Helios/SPLC/TwinSafeGroup1/TwinSafeGroup1.sal

<?xml version="1.0" encoding="utf-8"?>
<safetyApplication Crc="3580013277" xmlns:dm0="http://schemas.microsoft.com/VisualStudio/2008/DslTools/Core" dslVersion="1.5.0.0" Id="41296e44-6243-4db0-b197-205df26f6889" name="" mapState="false" mapDiag="false" groupOrderId="0" passificationAllowed="false" temporaryDeactivationAllowed="false" permamentDeactivationAllowed="false" xmlid="0" analogFBOutputReplacementValues="Zero" verifyAnalogFBInputsIfStart="false" userFbId="00000000-0000-0000-0000-000000000000" xmlns="http://schemas.microsoft.com/dsltools/SafetyApplicationLanguage">
  <networks>
    <safetyApplicationHasNetworks Id="8ad282b4-450b-49fe-b3d8-8c093cfce2d6">
      <Network Id="b2b9706a-a1bd-4680-ba3e-c2bae88ee2e7" name="Network1" networkName="Network1" intId="1" networkOrderId="0">
        <functionBlocks>
          <networkHasFunctionBlocks Id="7953690e-47bb-4344-8c39-2fa328a3b633">
            <fBAnd Id="9642ce4c-81b6-428e-8bb7-a8ff7bd7d9fc" name="FBAnd1" instanceName="FBAnd1" orderOfExecution="1" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="1a6ad849-87fb-4c82-a0a2-d08164523120">
                  <inPort Id="081cfa07-dbb4-4c01-9970-9175ca7afca6" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="6cc44fda-31c1-459b-91b4-d6f751716255">
                  <inPort Id="4aa4fe08-f212-4f5b-84a0-ac84555900b3" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1212fc0e-7acd-45cb-9a16-8a3c111d75b9">
                  <inPort Id="f22cdfa7-ca78-42b3-89f9-b923bd394013" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a32ed943-604f-47ea-8101-d88456ed5763">
                  <inPort Id="cb5ca772-03e8-4cbc-ade2-76f60ea38b8f" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="6e1fdce6-c5b7-49c2-8a2a-340e189bfba8">
                  <inPort Id="0ee3c74f-5d9e-46d1-8678-f1f9e7e41b6b" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="63fd29d0-9b77-4c19-9f6b-7a1dcbcd952f">
                  <inPort Id="f77f6a11-e301-4f62-847d-33528743211d" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="10479290-434e-47c5-bd8a-4544ce42cc99">
                  <inPort Id="150000ca-51f2-4673-ac9a-3e19f4bf24c3" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="844e5cfd-090c-4878-9950-87c610be021e">
                  <inPort Id="2936d683-af72-4914-8ea9-a3d22e0634f0" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="19cf2957-0b45-4b67-a04b-7aec80a84d7e">
                  <outPort Id="33e83391-a248-466a-9e23-34e1d67f503f" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="edaca37f-c74c-46c1-b63d-f0b18b55b010">
            <fBOr Id="e283adda-0e73-46af-9849-7ac98b20a4ef" name="FBOr1" instanceName="FBOr1" orderOfExecution="20" mapState="false" mapDiag="false" functionName="safeOr">
              <inPorts>
                <functioBlockHasInPorts Id="a291a95e-d3ac-4194-9b8c-a9829923590a">
                  <inPort Id="97231d73-9458-4adf-8d50-9a646add93fb" name="OrIn1" portName="OrIn1" portNum="2" objectIndex="8" varId="2" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="74cfcbf7-5329-486c-bcc0-d1d9437cf686">
                  <inPort Id="191c8984-0b4a-4115-a661-8a0c1cb3bc80" name="OrIn2" portName="OrIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a1f8ce5f-bda0-4990-a125-37694f062bd1">
                  <inPort Id="f1bab702-583d-48df-bac7-07f2200f7e4d" name="OrIn3" portName="OrIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7ba86a0d-015a-4344-8b24-64cf5e0e09b0">
                  <inPort Id="0b9109eb-a168-4f08-96c6-c73a407caf2d" name="OrIn4" portName="OrIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="615eeb29-8ff1-4181-b7e8-09c75e34d305">
                  <inPort Id="a1747b3f-33ff-442f-a028-ab4bc4fa82e5" name="OrIn5" portName="OrIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e3f3badc-581a-483c-aa4d-0dfea652cbd4">
                  <inPort Id="dfd58fe1-51e6-4cd8-a071-edff29c7c763" name="OrIn6" portName="OrIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="bc480bc3-6072-4daa-8481-f6e32a17fe88">
                  <inPort Id="6227ce3c-9a7b-4e4a-8e19-a9ab1fd22c4e" name="OrIn7" portName="OrIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="6bba0921-9410-4f30-a1cd-78e7283f1440">
                  <inPort Id="d5459073-7973-47f8-a222-376426a75004" name="OrIn8" portName="OrIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="ad2da188-3c8f-4325-9e08-fc20808c182e">
                  <outPort Id="5e4a4627-7979-4ef5-8c17-a0be5ad1a691" name="OrOut" portName="OrOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBOr>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="b2f4722b-598d-4f2f-bca6-38cc41e60ca9">
      <Network Id="477ba515-0122-4198-90cb-f84a327c1e6b" name="Network2" networkName="EV1" intId="2" networkOrderId="2">
        <functionBlocks>
          <networkHasFunctionBlocks Id="b37cc5e8-f11f-4da8-9c13-9ec5bb0e0c92">
            <fBAnd Id="accdb11b-05b2-43ca-aa4e-e33a2096d992" name="FBAnd1" instanceName="FBAnd2" orderOfExecution="2" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="1f8fc7d0-221c-4a48-8b26-efeff699e86c">
                  <inPort Id="731011e6-ba92-49aa-ac6c-fb78aa653f62" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="344cc489-909b-4df9-94e4-3c3b1c963217">
                  <inPort Id="7e56b6d1-4409-4e92-9e6d-4c2992d98b1e" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="8c875977-f8ee-4c91-b0c8-e2d3b2abb460">
                  <inPort Id="131f32fe-6234-4629-bc8e-f23f96729d78" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="5ec1c320-29e4-4d80-8bcf-35ee6fa2b7fc">
                  <inPort Id="a853e68a-9eb9-49e7-bb18-b7d9bc4fcb9f" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="41b5439a-bb2d-47be-af59-07311e271e5a">
                  <inPort Id="973e3590-fb74-44aa-bd48-175cfbe1c06a" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1eee4cd2-c38e-42bc-b78f-697a3a1659f7">
                  <inPort Id="50259bad-9a26-4759-b5c4-c06a4e1e5995" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e51d0baf-a5e4-452d-863d-8d47a53e135b">
                  <inPort Id="73784048-38af-455d-bb1a-f13bf356c84e" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1a71d833-50ec-40b1-b933-b7dfc1d101d1">
                  <inPort Id="d6db9b2e-3d07-4b84-bbad-8c87ad451560" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="a6e75ed9-26d6-4b6e-ab24-6d3457027b21">
                  <outPort Id="681e72c9-dc1e-4e15-9879-e15fb31674cb" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="5d999c92-9ae7-4b95-bc83-2aa3970321ef">
            <fBAnd Id="caf5eae2-cc3f-4ae2-b0b7-95c06216bb68" name="FBAnd2" instanceName="FBAnd5" orderOfExecution="7" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="65609c66-7a74-4fb1-9a1a-2dcb08f7da73">
                  <inPort Id="bc936363-9d31-4eb0-b887-0d03427cb390" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="b9a79355-2901-441d-bf69-283fd453aec6">
                  <inPort Id="2d50f449-91d8-42b1-9295-8da0032d00f5" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="5afe127a-9be8-4ee1-887e-0b879a4cad2c">
                  <inPort Id="ad4b95fd-9331-4f5e-9e31-d6ae553cccbd" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="9e2767fe-4428-4cbd-83b5-d38729eb7eb8">
                  <inPort Id="08fe784c-3623-49d4-a9b1-90c8da9b0cad" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="4a952dcf-f4e8-4c38-8054-7d0be502d9e7">
                  <inPort Id="8458a82d-eeb6-4925-9064-0166a6342826" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0a0b4d7c-792d-48a3-b8ae-6b7a4625824d">
                  <inPort Id="e118ddb6-d3da-4f9a-bea5-8fa1087416ee" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e870ba0f-02a5-4023-986e-7118e2df5ad9">
                  <inPort Id="dbccfdb5-cc02-4c15-b536-764d84617911" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="64c80e8f-6b6b-48e8-9733-31e3a1c3ffe5">
                  <inPort Id="889aed2e-02ad-4c24-b1ab-c9994784ae9b" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="92fb9320-a0b7-4ce4-b77f-f8c0c1af11f6">
                  <outPort Id="562f8abe-441e-4abb-88cd-3d62962f5131" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="839f7727-cafc-47ba-b47e-6a9c07ac810c">
                        <inPortMoniker name="//Network2/FBAnd1/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="31dfb755-be58-440a-8cec-b416ae5f52aa">
      <Network Id="b26626cd-ac16-48fa-94a8-a54a923969c2" name="Network3" networkName="EV2" intId="3" networkOrderId="3">
        <functionBlocks>
          <networkHasFunctionBlocks Id="e4a522b8-682c-4536-8c18-b9751f14f5ec">
            <fBAnd Id="8e46f410-b326-43af-8af0-165ccc91f130" name="FBAnd1" instanceName="FBAnd3" orderOfExecution="4" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="c44b8d9c-433c-47c4-bfa3-431db5694fad">
                  <inPort Id="a483d757-c49a-46f8-9403-01b246abca6e" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="38f20b56-c461-4e5b-8cdb-c6b119d3fc43">
                  <inPort Id="15ce9b14-55ca-4a50-928e-817a6255f978" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="94dd1d88-f9ea-4476-86bf-0bf9415fe674">
                  <inPort Id="ada6a722-e609-4994-9959-0e6f035c12a7" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="565fcc77-2aff-4f1a-928b-ecef95b1839e">
                  <inPort Id="ce05f59f-ea7e-4d0c-af2e-9e3b32df03c5" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="ef2ce8ce-06c3-48bd-bd88-0029b2494356">
                  <inPort Id="94dbde98-6d75-4846-b20a-a369edc10c38" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="200839e7-c50d-403c-891a-abca3309dcb7">
                  <inPort Id="b69a83ce-02c5-4651-9d1b-7ff461e2306f" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d580e842-267c-422b-8471-cfea2dcfe17e">
                  <inPort Id="67740d3d-6ac0-4d1e-9e07-5f48c820a107" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1055fabd-9d2f-4351-8a88-078bb9fb165e">
                  <inPort Id="5ca90a49-cd12-4cf8-94ef-629ad28834ad" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="0ab0a895-3e2d-4722-bcc4-76f35f584f25">
                  <outPort Id="c70f8d9c-ce25-4416-988f-8dc741f498fe" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="2319ed99-16a2-40d6-996a-17d47f50622f">
                        <inPortMoniker name="//Network3/FBAnd2/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="6d7352ce-5a16-4d19-9e50-dc5143348430">
            <fBAnd Id="e47635f0-8ab8-4f5d-a03e-9711372340df" name="FBAnd2" instanceName="FBAnd6" orderOfExecution="5" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="68c930cc-8966-4486-bc44-94650f4c3c68">
                  <inPort Id="bae287ca-7534-43f5-b903-043d3e6914ce" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="8c4498f2-0ca2-414e-a3ec-68042a7b9038">
                  <inPort Id="878ae448-72d7-41bc-ad8d-087006afa862" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d4993f7a-9cc4-40a3-9554-0d4b9927d5c5">
                  <inPort Id="ce3816c3-4096-41f5-a161-3ec228b7cd48" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="aebbf33e-3222-4e32-b7d5-9ed5c1f5415b">
                  <inPort Id="2139389b-a086-49d1-86d8-943535566fd5" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="bcc6ab5e-f450-44b2-9c1b-495572adabcb">
                  <inPort Id="a9277da0-5f33-4093-bcfa-4f4e1800efae" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="aaa78202-20e0-4085-a606-0b8b1dff0ff3">
                  <inPort Id="a489e69e-0270-4568-8722-2219bcf63d85" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="8d0f3bdf-9814-48a8-8bfd-6ac2b71d7ab0">
                  <inPort Id="ebd8c0ce-136f-45a5-bfa7-935e02f93afe" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7ff2e27e-f240-4ae3-b7c5-da13330d90d9">
                  <inPort Id="1dfe9804-3382-4ee3-9167-0c0d1d3165d1" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="c850a88b-f76a-4a02-9b84-e9f8c634bc3c">
                  <outPort Id="3cabedee-2e8b-4afa-ba04-c866315bf02c" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="affdee62-0604-4339-aaff-fa4ff5c60586">
      <Network Id="04fd189c-b7d3-4d86-85f8-9721ad9c9482" name="Network4" networkName="EV3_AND_4" intId="4" networkOrderId="4">
        <functionBlocks>
          <networkHasFunctionBlocks Id="6c9558ae-22ec-4b8d-aaf0-c751379a8672">
            <fBAnd Id="666a07e2-3ec2-49a6-8489-46dd7929e7d4" name="FBAnd1" instanceName="FBAnd7" orderOfExecution="6" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="54e19531-8ad9-4b9f-a886-3a389fafad43">
                  <inPort Id="14fdbef4-10b9-435d-96c8-77fcea950d1b" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="9e918203-4e4d-43c7-8c44-d985bd9cf115">
                  <inPort Id="19eb7952-a9ca-4571-9177-7e30a738f927" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a741a0a0-3bb2-4dd5-95b1-9418ccef3e0d">
                  <inPort Id="8ae99be2-882e-4a03-ade9-0789def0d287" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="599547a7-40ec-489e-b250-d7ce335b8f26">
                  <inPort Id="963a57d9-bb97-497d-97f5-6937832b638a" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="6350d118-962d-4d6a-a46a-380b6d6842cc">
                  <inPort Id="99210d9e-4995-4fd6-b446-3a4b54d30037" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="534db52a-97c2-46a2-b171-7ec0e227f630">
                  <inPort Id="4c08bfa8-6a3e-424f-86ac-8cc544689dc6" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="358e35cf-48b9-464b-93e3-d05aef24b8f5">
                  <inPort Id="30825a2e-c350-468e-a138-e00bf038975c" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="014d1351-ad43-45a2-b7cb-85277d26951f">
                  <inPort Id="84eb5836-6671-4c6b-9fce-c61679492721" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="ecb1346d-d554-4286-affc-90b443b4f22f">
                  <outPort Id="3022fbfa-4247-401f-a665-96621c0c3bb9" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="1" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="ce88f698-6cc9-4c7b-9123-47b88abb4773">
      <Network Id="f687ab91-f3bd-43dd-b940-3044dc7512b2" name="Network7" networkName="DRY_PUMP" intId="7" networkOrderId="5">
        <functionBlocks>
          <networkHasFunctionBlocks Id="896c8a33-ab68-48f6-a7dc-444f56949623">
            <fBAnd Id="06fc8f7b-2f59-4ce2-b3a8-bf72dac58c60" name="FBAnd1" instanceName="FBAnd8" orderOfExecution="8" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="6a4746c5-ce30-4958-8d4c-7ace7fe5afde">
                  <inPort Id="98f577bf-6b0e-4862-8918-1a74933b8626" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7750c92a-903b-4be0-9cbc-9ea3432844d3">
                  <inPort Id="29adc324-92c5-488f-96c4-f0773dd0b9b7" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="58cda9fe-ff76-499f-a966-d5e4b10cf730">
                  <inPort Id="8c4a7b9e-2445-4d02-b26a-ff2057b8f0fb" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="187fd09d-431b-4881-8781-8d92d1bd6c87">
                  <inPort Id="f0ff5bb9-73e0-475d-a7e6-92715dd5feca" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="45c1ce14-73e7-420f-aa74-9a35600f6086">
                  <inPort Id="89ac8242-4738-4a64-b5e9-e07e76ebd1c2" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="ca555f42-608d-420a-aa99-df20e218dde0">
                  <inPort Id="cf6a7f71-1491-448d-8726-e912022488fd" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="dfe18f51-baba-4aef-9143-22d29bf1f13c">
                  <inPort Id="fa9d3a9b-e7f8-416a-be14-3d59aa7a4eba" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="386381d9-5322-4f3b-96df-deaf25f96483">
                  <inPort Id="722519d9-8dea-4c07-8326-f310158ffa8c" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="7fcb2773-70d6-4015-8d42-ca343b401691">
                  <outPort Id="c47290d1-2e2a-4fb1-b002-e16d9327c96d" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="641d221c-2e1d-4fd5-9dac-48ba34908ac7">
            <fBAnd Id="5178a4d3-4b47-46d4-a11f-ee8e983570aa" name="FBAnd2" instanceName="FBAnd30" orderOfExecution="31" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="653b1abf-5c91-495e-8d07-1922c40ad92f">
                  <inPort Id="91e0ded4-def8-4480-bbb3-7ab84e3486c6" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e5ffff8e-5345-413c-b27d-6718c0f5ac53">
                  <inPort Id="d792fa59-93c5-4feb-9db9-5b6950d93a2c" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Make Contact (NO)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1eed7a18-a262-43d9-89d2-69d2467de482">
                  <inPort Id="1afe86c6-3703-4d25-8fc1-b13cc390644c" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="20688517-441f-482e-aa75-60059e671a88">
                  <inPort Id="65d333a7-ab77-4ef1-a102-8cf08f1f7d91" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7909e0d6-e4dc-4d44-b4ae-4139c31c6a0e">
                  <inPort Id="6d3947ba-2b5d-4f40-8afa-eb9430a84bc5" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d844205b-91c7-4ceb-90a5-3bc6150f7c6f">
                  <inPort Id="efae5ac7-fd65-4e70-997d-7ff094aeaabc" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="2d0b62b1-7bfa-4e89-afa0-defe0274abe0">
                  <inPort Id="6240896b-88a0-4fea-aac9-78df038cdf8c" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="246af1f1-ae7f-4ea7-822b-8c2fa662e212">
                  <inPort Id="adbbb66a-72ce-45b2-be0f-7ab17c94eb84" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="fe7d406b-0cdf-4b92-b519-34120c103668">
                  <outPort Id="54d0f631-aae9-4c16-bc58-03bf81482564" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="599aff3e-812c-442e-9777-4231b5941f02">
      <Network Id="596c5d22-15e2-4917-9ebd-f19d8c59960d" name="Network5" networkName="MS1" intId="8" networkOrderId="1">
        <functionBlocks>
          <networkHasFunctionBlocks Id="b0d6c861-a402-4ba5-9866-33d769c4e3bf">
            <fBAnd Id="1c0ba41e-7512-42f1-973d-f46918a6732d" name="FBAnd1" instanceName="FBAnd4" orderOfExecution="3" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="5d69fc9b-7bc4-43bd-bb49-3b33fc002311">
                  <inPort Id="03deb10a-c06d-4ab0-b725-e256eac0d6fa" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3e34b65f-ead8-488b-b2ce-e407673dae7f">
                  <inPort Id="8cf11078-a18d-4fe1-98a3-68cffc4a1fa7" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="95e4538d-c0f3-4067-8ce0-614ba1afcdcd">
                  <inPort Id="64007ae6-767e-4459-adfc-9e7f73bf3b3c" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="082ed753-bd91-410d-9803-f5483e5b3320">
                  <inPort Id="843ec0ec-56fa-49c9-a160-b9c59096f886" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="709eb254-77a1-435f-8cbb-874c6f10325d">
                  <inPort Id="5a01d811-d8ba-49fc-8f1f-4dddff47f315" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3cd2d575-9f83-4c99-ae21-fadc4e629448">
                  <inPort Id="3fde6552-a5cd-47a0-a2e2-30e36a8974df" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a1a11838-39d3-4278-98fb-8a9947b71cab">
                  <inPort Id="4b35c9e5-0f31-4d37-bfda-7fc9686da226" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="170459cb-b8f3-4c77-b2ae-9ce01f0696ac">
                  <inPort Id="9128f5b6-e60d-47f7-9789-155c5ea2cb25" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="c6bc4aac-39ec-47d7-b523-21405b89b9f9">
                  <outPort Id="3b3d25c0-d4b8-487d-bba5-e7fc9b72982d" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="ed7ee21a-b5b5-4e32-9751-970017686dfe">
      <Network Id="0d2f2959-7b15-4e16-ac96-b63208587a43" name="Network6" networkName="APC" intId="9" networkOrderId="6">
        <functionBlocks>
          <networkHasFunctionBlocks Id="b41aeb40-9271-417b-8515-634964db8e8c">
            <fBAnd Id="51b4cdd0-dce5-4cd3-b722-0666a67a6cb2" name="FBAnd1" instanceName="FBAnd9" orderOfExecution="9" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="4c564fe0-a3ea-4ef5-967a-f3c7edccb23a">
                  <inPort Id="85b419b2-9e3b-456e-bad2-8b4c8cd98684" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="44135d20-2400-4de5-99c4-d46265460c31">
                  <inPort Id="99e55933-9f76-47b1-b761-d5b9495cca16" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="05c20b88-80f6-4840-a508-106425a801d4">
                  <inPort Id="305c3118-fb8b-4ae9-b387-333c878ebb16" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="918e9760-13c9-42de-87f7-0e41913b8d35">
                  <inPort Id="6602a83a-1920-45dd-86f7-abf1db8339d8" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="b3aa798f-cb21-4290-8746-063bc7862a54">
                  <inPort Id="58d71d66-e4a2-43f0-ab77-b7eae10c2102" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="be6c923b-4841-4e87-98fa-9177b7a57b28">
                  <inPort Id="2ab0317b-14cd-4c48-a447-0aa4c9d1bbc8" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="183dc917-e15c-4fac-b50e-a8abec96d907">
                  <inPort Id="1347073a-ef4b-42b8-9524-fdb6273a2af1" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0a261257-bff7-4ef2-8600-8f6ed0f6b44d">
                  <inPort Id="856eb7a0-d4b2-4685-91a1-aad22836d338" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="c87714a3-019b-48d5-9dc3-92c9c5feed76">
                  <outPort Id="3ea24370-a1eb-4447-97a6-1c30a78f9549" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="3f9c234d-ea82-4b10-95c3-e335961ef03b">
      <Network Id="ba625a0f-07f3-404e-99c2-5a51003cfe5e" name="Network8" networkName="CM_VALVE" intId="10" networkOrderId="7">
        <functionBlocks>
          <networkHasFunctionBlocks Id="87526a6c-f7de-417b-a4bc-c7ecd16de0b0">
            <fBAnd Id="919a91ae-a640-490e-935c-d531c34918cb" name="FBAnd1" instanceName="FBAnd10" orderOfExecution="10" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="f32d8c67-8591-4ad0-af9d-cb65e42d7f3e">
                  <inPort Id="4c48b856-87f5-4644-b110-e18e8bd858a2" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1f187a38-2e74-43a2-93ef-9a4178153573">
                  <inPort Id="95ee3618-9e81-4d27-a2ae-ea6b3977a3cd" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e10cedd5-a466-40f3-90e8-00e0b410e720">
                  <inPort Id="6de4082c-0ae0-4c3b-86b2-8c1ef511d7e1" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="40afd6c4-1c95-4a42-a543-e8fea39359b4">
                  <inPort Id="762fe5d1-8a4e-4fd1-8883-2305dd4d8b59" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e2788d53-820d-4455-b761-4a31eb6ca731">
                  <inPort Id="183fa42b-363b-4b16-81ea-982e4201693f" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="8de3b5ac-859a-499c-96f2-1be659b1e39d">
                  <inPort Id="c779ab41-ef9b-43bd-a146-8a007e9405da" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0bc12052-876b-4eba-9b1a-db2ab94d88fd">
                  <inPort Id="adbb4012-4926-49c4-9359-acbfbd22cbc2" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="51495a9a-11a0-4fc6-a511-92ae1175245d">
                  <inPort Id="5bc674bf-3f57-4206-a5b2-a367b0894592" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="9ca6db92-cec7-41d6-ae00-cda9aebf0546">
                  <outPort Id="2b670c87-2d32-4f8c-b5a6-f569833e0200" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="d68c5dbe-4de3-43a1-a8d3-812860e8df06">
      <Network Id="f8dc31d5-2bf7-492d-9d0d-909439464aee" name="Network9" networkName="H_LID" intId="11" networkOrderId="8">
        <functionBlocks>
          <networkHasFunctionBlocks Id="a1ef7d01-87cb-48b7-b8a2-be56026aafda">
            <fBAnd Id="2f8bf043-8c0f-411d-a33f-602afcc37d00" name="FBAnd1" instanceName="FBAnd11" orderOfExecution="11" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="eabe5e3e-4f47-4d41-b2a6-2f3df5dece27">
                  <inPort Id="ca65b39a-bb8e-4a3c-bbfa-2b818ce0f27e" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d495479a-c5ba-4583-9ac2-e277ee8d121d">
                  <inPort Id="b32b30d7-c0f5-4889-9f02-6ed452427575" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="74bbbc27-e532-4148-9650-8e523ef85dbf">
                  <inPort Id="5baf4ffb-35ad-4ced-9ef8-a15e1b6881a7" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="51d6217a-fcc4-47f1-a6eb-6da59c45f7e2">
                  <inPort Id="e565ff9e-8726-4727-8721-f1b7964b364c" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="ee8e3988-5e74-4ba3-8669-4aa52caaa9ba">
                  <inPort Id="54009393-e054-450d-b8ad-267efd369134" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="6aaf0383-f9a0-4e93-bf55-7cc0e311d7d9">
                  <inPort Id="a72e8379-7051-442b-a142-517381c0ef2b" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="61bc1303-133c-4dd1-8ceb-3d6dea12fb7a">
                  <inPort Id="445df7cb-9a79-43f3-b11a-efa6d58148ad" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="c09767e4-4859-402c-8084-81a5eb9a651f">
                  <inPort Id="f99e6afb-1755-4aa5-92b4-334641d05992" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="5502be3c-27a0-4b30-ae51-ba9ea316ecd3">
                  <outPort Id="711a07e5-9aed-430b-b482-c850545d067f" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="545505c7-8213-45b9-a724-1a336517afcd">
                        <inPortMoniker name="//Network9/FBAnd2/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="eff4d0ba-46c8-46d1-a6ad-870653345ada">
            <fBAnd Id="66c68ef9-108b-403d-a4da-9bf4d5e8dac2" name="FBAnd2" instanceName="FBAnd12" orderOfExecution="12" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="ff938e35-41af-423c-93d8-6c4a752751c7">
                  <inPort Id="b0ebca2b-6c40-4fb9-ac08-852cea11293a" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="83112888-c3be-456d-b192-ea9a14c932aa">
                  <inPort Id="98d5061c-32bc-4877-b3e3-abd9a65a0ab7" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3b4cc136-3b63-4259-aac6-fe54e117d914">
                  <inPort Id="eb68be80-7144-4c93-a5fb-fa65a4024119" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="23a605d0-57db-4deb-a92c-75b6e1a046cc">
                  <inPort Id="47d3e36e-1152-4ead-b037-98629dd4c230" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0ac3ded6-51ae-492e-aad8-bb7eee4329ca">
                  <inPort Id="4918c064-4094-4081-b49e-9a59655c0244" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0b1a3dfb-e37b-4a0b-94e1-b2d304a33cd6">
                  <inPort Id="6cd4abfb-4248-4524-b50d-46ba34733a81" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1e9160c3-bd75-4c36-85a9-f4cb92bba953">
                  <inPort Id="33d6aad1-0fd1-4c9f-8768-6cc7ed77e08d" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1235a062-396c-463f-9066-484bfb445235">
                  <inPort Id="cfb52952-f189-4de3-8097-0c7fea16122a" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="df58e8a8-a5c9-420f-b8fd-a28d21e2c79a">
                  <outPort Id="e38b3ad1-c6ad-40f3-8bd8-9ffd3bfe7e3b" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="37ac39c2-e850-4628-ac53-d505d2aad2ba">
      <Network Id="dd1bd465-6964-45a5-a962-a79c26ddf400" name="Network10" networkName="H_CHAMBER" intId="12" networkOrderId="9">
        <functionBlocks>
          <networkHasFunctionBlocks Id="3de3554d-47b1-455d-b96b-5d10c2eaac34">
            <fBAnd Id="cdbf30e8-2964-4d59-b3db-e0e786456463" name="FBAnd1" instanceName="FBAnd13" orderOfExecution="13" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="99bc977d-1691-43a8-83a6-65aff883bd8f">
                  <inPort Id="8521a7b5-9b36-43e4-ae9e-15ce13cc6745" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="5fc06b5f-dc1c-4382-824b-9eacd077e7ad">
                  <inPort Id="153a2bda-1d2f-4b2d-9056-36dd8aa9bf29" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="349931af-33a1-45c1-aaf3-ccb407538124">
                  <inPort Id="b08f972a-3c62-4166-a1d5-786279633b88" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="fe87c728-9c16-494c-a7da-b0346a2ac104">
                  <inPort Id="1c6feefc-4a7a-4978-aae2-4ac771df6a9d" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="4d9e7a5e-7e31-40ba-af01-493e505773f5">
                  <inPort Id="fb9b482b-50ed-4d1a-a992-2cfa94b726c6" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="f3fcecd5-052d-43e7-b0b9-3e66de89ad92">
                  <inPort Id="8b672d59-52c9-4575-b8bf-4f1e32961072" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="801108f9-a100-4f72-8682-dc9d0d2341af">
                  <inPort Id="f40096a9-1658-477e-9d8e-4a4fcf8597c8" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="fc4c7da9-e6e9-470f-8801-69dd083ac97b">
                  <inPort Id="d184b941-9189-46d9-938f-ed9657be46d5" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="a413728d-c584-43a2-8d0d-db6111a381e2">
                  <outPort Id="9c2ffb31-9343-4dc0-a765-0b4d87bec829" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="6b3e925a-9bd4-4c21-8259-2cba05529e2c">
      <Network Id="51ecda0e-de34-4aeb-a0e5-ee0a4ff34bb8" name="Network11" networkName="H_APC" intId="13" networkOrderId="10">
        <functionBlocks>
          <networkHasFunctionBlocks Id="84ff1d05-c6fd-4bf1-a46a-fdccdf4dd208">
            <fBAnd Id="ea65eb9d-55de-4c26-b9d3-570fa9a3e480" name="FBAnd1" instanceName="FBAnd14" orderOfExecution="14" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="3575cece-0854-439e-a1de-69ccb74ad2b8">
                  <inPort Id="3624b92c-6ba0-4065-b578-2b575c16bcc8" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="afa73b2d-07c4-4002-b9e3-90f757bbbef6">
                  <inPort Id="045307ae-d1b3-4d92-9a94-0144e6b9a013" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3f9892b8-67b8-4dc4-9429-15bea948c036">
                  <inPort Id="009cbf79-6b7c-459f-b616-9745231f1188" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="78844533-724e-4add-8880-c48e949940a4">
                  <inPort Id="4e2b72b5-6431-4c72-a3a2-d4a2d8452f9d" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7c690081-c67c-48f1-b6d1-f5139d4001e0">
                  <inPort Id="a1de9cd4-c7fc-42ba-b334-5beab66e4fd1" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7fdea6af-5bbe-47bb-b2c1-cb4362406581">
                  <inPort Id="898e9523-182a-417a-bc8f-256834eb3b20" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="660236f4-b49c-402a-9ae2-8ad5cff04678">
                  <inPort Id="e35db755-7179-4d64-ba62-723dec62f7fe" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1bb9b428-1d79-43a0-adaf-6a7b110d66af">
                  <inPort Id="89fc6f39-281b-4403-b129-06a55f2e0861" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="c8fa58fb-49d0-4522-a1bb-648daac9d6c1">
                  <outPort Id="98817746-732b-4669-a512-ce0f43fb4331" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="b8fa6cbe-7bfd-4dd7-ab98-fac595bda7a1">
      <Network Id="05bf7b3f-fc7a-4381-ab3a-65a707930846" name="Network12" networkName="H_GAS_BOX" intId="14" networkOrderId="11">
        <functionBlocks>
          <networkHasFunctionBlocks Id="51c57ee6-23fc-4c0a-8495-2e00b21a0586">
            <fBAnd Id="b7ca6fe1-cb6b-4daa-98e5-b3fe19a02c40" name="FBAnd1" instanceName="FBAnd15" orderOfExecution="15" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="4c270111-f3ec-4351-89c5-b1be1090a28e">
                  <inPort Id="a92e1ccd-36d0-4cac-b01e-39d87c2bad82" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e177daa5-ca08-43ec-bea3-6c2908465403">
                  <inPort Id="32ae1fba-e2fa-4cfa-ad55-0ab691ec7e78" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="955779de-7190-4302-b378-6f622bee3d71">
                  <inPort Id="4661d27f-4d09-4963-ae56-defe830318c8" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="051242a9-56a5-48b4-9557-7376cbd07a5a">
                  <inPort Id="8b72529a-7277-4168-92b5-718e1b8ce154" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="ecf0ff3d-1c6c-408c-ada4-b283c0566b64">
                  <inPort Id="e154a3f0-6840-4769-8509-09477a0a3f1c" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="15c5c37f-9e1d-42a1-bf17-27559d5d971f">
                  <inPort Id="7a9a930f-e89a-4844-a0bd-ba71f20ae8f9" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a0ff4fa9-3f9b-4d4c-85de-aa65761c1320">
                  <inPort Id="91ef0330-c3a3-4691-856d-e500b26484e5" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7b489899-0aea-4446-baec-c1600807c879">
                  <inPort Id="cdd09f81-5bfd-417e-8772-2e7ffcecb0b3" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="586a8f72-d560-4759-9064-22c64f16b3cd">
                  <outPort Id="91236e83-c8f6-4b81-b024-ec772320d0ae" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="89f8749e-fbf1-4b66-a0c2-f64f9e29ed37">
      <Network Id="44505b0a-34c4-4d39-aa30-312c17fe20fb" name="Network13" networkName="H_FORELINE" intId="15" networkOrderId="12">
        <functionBlocks>
          <networkHasFunctionBlocks Id="38fe1fbb-369b-41bc-ab84-a861b7a25c91">
            <fBAnd Id="3254cd98-3d81-40af-958c-772159ac105e" name="FBAnd1" instanceName="FBAnd16" orderOfExecution="16" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="b05399ad-8292-408e-82a0-106f6c174ffe">
                  <inPort Id="d9e649e8-61bc-4a30-a749-b6457b3ef32b" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="c6c5dac4-f31d-48a0-8e38-2fa7b8a72969">
                  <inPort Id="121a3d5d-f7f5-42ae-a94e-df4cb5553ac9" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d5e19159-805d-44ae-898c-35a4fa48f2e4">
                  <inPort Id="e9aba591-6abb-4c15-9d2b-a9bb5d3e1a69" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="cd5b738d-8dd3-4ae6-9d91-6e5ded1f9601">
                  <inPort Id="ed175187-fbea-427f-a275-41dce736f97f" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d4e6d9bf-8c43-47ff-b85e-7ebf7113d316">
                  <inPort Id="0931adeb-f33a-429a-899c-57d8c0e55df9" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a00e8598-0c51-4e4e-bcb8-19d2c4df304b">
                  <inPort Id="7ffb342c-7188-46be-bf4f-574638c913e8" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="45171266-e5d8-4df8-bfa9-cbfc7a781d34">
                  <inPort Id="9d5cd2ad-f274-4329-8dcd-0ec9faed8862" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0433e7b5-faf9-410b-a453-8588c037c66d">
                  <inPort Id="60b94643-fcf5-4852-964f-a7f74c525bd0" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="f18506b7-3615-4b94-8c34-be8e4f1ee669">
                  <outPort Id="224f5ddd-b703-4e87-b89a-704b823b8ebd" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="8076ca04-6cc9-44b3-9bf1-cc307002eae0">
      <Network Id="c252a341-b064-4581-afaa-f34cabcfb386" name="Network14" networkName="H_GATE_VALVE" intId="16" networkOrderId="13">
        <functionBlocks>
          <networkHasFunctionBlocks Id="631fb62f-f185-48aa-9b20-eab6553c48f7">
            <fBAnd Id="5c04117f-a27b-4517-ab4a-ca2863d27356" name="FBAnd1" instanceName="FBAnd17" orderOfExecution="17" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="ef89e1db-9770-41dc-b81c-d4813a24f66c">
                  <inPort Id="e9d9c38f-f577-464e-973c-48d9759f3c5f" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="61021f4d-62d8-48cc-9a99-4884e35d36a5">
                  <inPort Id="0207854a-4f81-4342-b177-4d691c0eb876" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="6a29e118-bf56-424e-a9fe-369c7ff322be">
                  <inPort Id="7a811cd4-2aac-46b5-8ce1-05683fb9de6b" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="9b7db518-b133-4ed1-8455-59b223ea2002">
                  <inPort Id="621645c5-cb6f-4e99-bbf0-cbdca09d3a62" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="ceb53989-56fe-44b3-9773-524afa7723de">
                  <inPort Id="ddac03af-bedf-4318-91ad-2038877d8357" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a10fba8d-7767-4173-9759-39b865d9b45a">
                  <inPort Id="8977a151-9972-486e-9920-df3e838795ef" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="521351f9-c992-41a0-aa01-c5879d0a2dd0">
                  <inPort Id="4e3d7be5-82e6-48ac-bca6-e37d5b0eee61" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="460caaeb-28bd-4076-909e-9bcdc4b9eed4">
                  <inPort Id="e1c86db5-c75d-48a5-9c0e-de8dbf7be8a0" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="578ea45e-1e4e-49c3-9a7b-197d33d7616d">
                  <outPort Id="01c0baa2-066a-43cf-badd-9b1a62e78fe3" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="b5aaec0a-8ba4-4192-b79f-d4c9d20caab0">
      <Network Id="cc9ab242-574f-4d5c-8c98-a2032a06cf11" name="Network15" networkName="ACID_EXHAUST_VALVE" intId="17" networkOrderId="14">
        <functionBlocks>
          <networkHasFunctionBlocks Id="b28a0ed0-0d52-4fb1-83f8-9f1c3200072c">
            <fBAnd Id="1dd6d0b1-2f7e-4f86-b938-71550fce044d" name="FBAnd1" instanceName="FBAnd18" orderOfExecution="18" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="bae91890-065f-4b60-8e89-4e7b4d0727c0">
                  <inPort Id="65ac4c84-7ef4-46cf-b12a-de88e86f6e2c" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="34ea1159-4dff-4a28-a205-adab4da71928">
                  <inPort Id="ca50ce1a-f3af-4a70-987c-20d8c8f6c70d" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="92bc948f-cc67-4444-b6e1-346de3394036">
                  <inPort Id="8175921e-5864-4870-bd46-7ea358c4301b" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3fb2c80b-707d-4384-928b-1852c00c142f">
                  <inPort Id="3b8f6091-eba1-4bc2-b776-ad74e3943305" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="5886ad24-e55e-4e55-9889-985b84cc4b5f">
                  <inPort Id="8fcfd41e-5cff-4a5a-977a-0df392beb21f" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="c44e6926-ee63-41f2-95a2-f9ce45073962">
                  <inPort Id="96dd941e-89b9-4932-b6de-5fe913ef4588" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3f3e872d-9499-49c4-b27f-91c7b4fb7105">
                  <inPort Id="05bef500-be08-4812-8928-32734a9e68e5" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="40032a9b-8c61-4cb0-8da3-179fb6c2322a">
                  <inPort Id="89682a16-bd42-4d6b-9228-957de2c07d51" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="44610977-996f-47c8-81f6-61fa4dd532cc">
                  <outPort Id="1cccca0e-c05a-463b-b820-4bb58786abd4" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="1aa15b5a-bf40-4366-906c-efc925ece766">
      <Network Id="31c03d40-c0f5-48fd-92ce-6a1385d4863b" name="Network16" networkName="PROCESS_EN" intId="18" networkOrderId="15">
        <functionBlocks>
          <networkHasFunctionBlocks Id="5fa72a1a-5c90-485c-99b6-dd749b8fc0fd">
            <fBAnd Id="55466cfd-97cf-4713-9b32-a30c6ec39e83" name="FBAnd1" instanceName="FBAnd19" orderOfExecution="19" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="fed2628c-12df-47f3-9002-7da49b3c09a9">
                  <inPort Id="49c88d18-984b-4777-9f38-74cd4f9bba30" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="8b47262b-234e-499c-be8c-9deabbdd8776">
                  <inPort Id="fe9ddbf9-967b-47ee-a0ea-4f54e23b4742" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="5778cd4c-295c-47cf-9a75-eae890c4b1ed">
                  <inPort Id="13b52add-d807-4866-bd34-113029700232" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="76db2826-8c48-433a-8db2-675b840e132e">
                  <inPort Id="dd93e2a8-093b-4ac9-8ed2-04e0d02e73ef" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e81af4cd-7819-42f5-9d27-07713dafaeea">
                  <inPort Id="cdff89b5-3523-482a-b22b-e96a1437a478" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a860aa08-1c1a-4493-a217-ebc67144f6ab">
                  <inPort Id="e5597abd-2185-4d5e-8206-cd8c7879dbcf" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="01f8c46c-1c33-4c88-b367-5173197cb658">
                  <inPort Id="e9310781-5e11-43d5-8f35-4ae8ba9548ac" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="025e4311-e12d-4ecf-a992-0b4821eca7fc">
                  <inPort Id="20fce699-d084-48f8-8744-0cde6eaf1683" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="9e450450-d841-4622-8a12-1e63f731418a">
                  <outPort Id="da92c2b4-996a-4cef-a42e-623e32b8c8c4" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="534b9b79-05ed-482a-957b-ba0a73e461d9">
                        <inPortMoniker name="//Network16/FBAnd2/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="6a8a3add-61ac-4994-afa0-6f7ace56b888">
            <fBAnd Id="d0877605-e6e9-4054-bd09-b366d5babb8a" name="FBAnd2" instanceName="FBAnd20" orderOfExecution="21" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="7d8b3af7-4734-4699-a80d-74bd4486647a">
                  <inPort Id="cd962c1c-1d1d-4aae-9898-5654b9be6891" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="c114acb9-ca9c-4480-b600-434e83cad37b">
                  <inPort Id="feb26841-7724-48d2-a17a-160e24e97bdd" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="c72963dd-8006-4574-baa2-020b4cd8161e">
                  <inPort Id="f285a9da-6367-423f-8ea4-d0e62b20b7d4" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="49c5292c-cb17-4f71-8d23-d09599db0830">
                  <inPort Id="3b5dcb19-66bc-4ac8-9204-bb9393ec1f53" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="39431a92-70b6-4d53-a42d-8c160172351b">
                  <inPort Id="e8f57d58-bab0-4038-bbf6-577791439201" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3358d010-8e5b-41c1-a0ac-4c8b8ff7fef1">
                  <inPort Id="2fc1176c-c237-4fe1-9796-417c9f740cb1" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0ca9ab99-4ab1-4cdb-8114-72943c3613c0">
                  <inPort Id="3b9c7001-258c-4e81-9c79-e0094fcdf6e7" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="f834a8ac-f518-4f7f-af69-5408a18bec67">
                  <inPort Id="d4627b63-aaaa-42d4-a12b-afab5bbfa38b" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="538705e2-c5d6-4ce5-80fc-20ad70bb7b65">
                  <outPort Id="6228ed06-f381-4021-baba-f0f30b3528c2" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="541eb366-58f2-4417-8cb0-0ff7ef4b4ea0">
                        <inPortMoniker name="//Network16/FBAnd3/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="ff640364-7c86-46b9-a828-c6fac2c1b76a">
            <fBAnd Id="17b8b380-75f1-4dc8-8652-00035e8a5703" name="FBAnd3" instanceName="FBAnd21" orderOfExecution="22" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="fc417596-750d-4e3e-be87-2e599de453ec">
                  <inPort Id="60255c36-c164-4410-9807-86a78cd46c9a" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="b06e4882-22d3-48c1-b95f-4f7e4401446f">
                  <inPort Id="44710543-9de9-4fc1-a609-b367efe784e9" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="83340441-3fe0-419b-8de8-46a0e9a71e90">
                  <inPort Id="b3631242-6208-4a5e-a761-e54f94d624a3" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="742abc35-2eed-49d9-ad4e-8d3b43e283aa">
                  <inPort Id="382cc8ef-8109-4cee-93df-8bdc67a9c9ea" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="bb5d94be-aaea-400c-97c8-dab98a437dba">
                  <inPort Id="232a2d32-ba58-4b83-9f3f-fe1e45ebccf1" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a69841ac-0d58-4cce-b102-c79b6fdcabd3">
                  <inPort Id="7bf3e8d7-0a4c-4bf9-818d-45fb25017538" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="5ce6d2a2-fbf8-41da-9222-8483cfadce2b">
                  <inPort Id="9bf4c74f-ffbe-4a26-913a-9e0ac0d0e2fd" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="2c87028e-4ddd-4eca-9164-6acde5de631c">
                  <inPort Id="f0768572-0f2d-4efe-a7df-e788a1ab558e" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="b2dfd49a-59a7-47ef-9e39-5ec6764bb998">
                  <outPort Id="31652569-3722-4c77-83e5-f9a4332456d5" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="55126cab-c662-49c2-a36b-5ab929b33300">
                        <inPortMoniker name="//Network16/FBAnd4/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="4b03acad-2945-4b62-b493-50ae4c484a3c">
            <fBAnd Id="38887dcb-5533-4cda-a3cd-56e450fdc8b5" name="FBAnd4" instanceName="FBAnd22" orderOfExecution="23" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="bb75b058-b1c3-467c-b775-29cb50146113">
                  <inPort Id="15bed4ca-85d1-4948-98e0-5253743fd200" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="9645e565-cecf-46c1-a7e3-18940caa5c79">
                  <inPort Id="9d98c8c1-0be6-4b43-9ea9-befbb1852f3e" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="dadb3392-2c92-4044-bcb3-858cc2235861">
                  <inPort Id="87f5367a-98a7-4adf-b3fe-68a12f35398d" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="80f91668-0ce1-452e-a0c9-364b1af67d82">
                  <inPort Id="c25bed82-25b6-4a51-8038-d0cb99e99141" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="30065371-c93e-4648-a545-97522d7fa6b5">
                  <inPort Id="f8e9d7c8-981c-4f5b-a480-3e195ea04103" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="edcd2172-fa33-4869-9e47-7c050eadb34f">
                  <inPort Id="61b9f26d-5269-468e-9ae7-bff6c09a0079" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="66d14feb-efa2-44bc-8610-e23c841a6cbb">
                  <inPort Id="92fc1c45-7b14-4234-80d4-01b6df5fb561" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="13d72deb-b6c7-42a9-8263-6121e16ea701">
                  <inPort Id="011c78d7-aa47-40c7-843e-1b8ecee8c607" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="ceeca718-94f1-4cb3-868b-cf50f700fd7d">
                  <outPort Id="54ce9213-61fa-436d-8172-99f8cfe8ff92" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="1f7f7e63-bfef-4cbc-a6ab-6723015097b5">
      <Network Id="247d59aa-f2a5-4231-bf54-045e7f989052" name="Network17" networkName="TRANSFER" intId="19" networkOrderId="16">
        <functionBlocks>
          <networkHasFunctionBlocks Id="5ca06090-4a60-4135-9837-1e504e81b0ad">
            <fBAnd Id="0e675336-189d-468a-9e9e-6a0c08e07661" name="FBAnd1" instanceName="FBAnd23" orderOfExecution="24" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="9a4ede51-9556-4faa-a9ac-931bcf07ca8d">
                  <inPort Id="ea04fb4c-879d-4147-9ae9-70de42fe2b9e" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="365e31c8-5e1c-468c-8527-4472f7d8ee40">
                  <inPort Id="e1c8a5f4-e2eb-46ba-8076-1c5cb7a13a3f" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1867493a-09ed-4abb-bd6a-314375b651c4">
                  <inPort Id="292669f2-118e-4201-9f57-1c94a99f1073" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="228dd6dc-be7f-4810-8075-98321861db7c">
                  <inPort Id="8a95bcc1-1349-4c8e-8d73-af51b4b80b02" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="fe8965a3-742b-4168-959e-edbcfb87c6a9">
                  <inPort Id="76de372e-9b96-4059-954c-4f3bb84e9861" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0d8b4949-ca37-4441-b47e-b6e7d87d999b">
                  <inPort Id="7dcfc98f-d924-48ac-8b12-73257afe4250" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="48de4b63-0b28-4f20-b0e6-b9f37af12a73">
                  <inPort Id="6595e3f1-7a51-441c-995c-1be76b5206f5" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1e017fc7-4544-4066-bf91-e03c09f9b51c">
                  <inPort Id="f999e806-5977-4578-aa4d-64057e37ed36" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="af0956f7-7351-42ca-a0c2-59958721a918">
                  <outPort Id="44230eaf-11fb-44f3-be69-c484364b63ab" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="25a2d82f-77f0-45ad-ac33-7e559fd69fb2">
      <Network Id="4fe2c765-f06d-4a27-bdd9-91322107cbf3" name="Network18" networkName="WAFER_MOVING_IN" intId="20" networkOrderId="17">
        <functionBlocks>
          <networkHasFunctionBlocks Id="03dae75f-6eb8-40d0-93ef-3a7d313a2e48">
            <fBAnd Id="3b0cc304-1548-4545-84ab-091681af7a8d" name="FBAnd1" instanceName="FBAnd24" orderOfExecution="25" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="1ec4bfb5-3b40-42c9-b766-852a6f89bf71">
                  <inPort Id="50f66953-bfd3-4ed9-b455-c858e2247a82" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="aafac63c-13e5-40f4-a161-38fc3b48992a">
                  <inPort Id="0d8fc071-afbc-4b9a-b248-0cea3325d9f4" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="b14c57c0-25d9-404a-80b0-aaeca4d6c68d">
                  <inPort Id="c0b0d502-e1be-41eb-ab8d-eedc036a00f7" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="83f792ce-328c-4be2-ae8b-683c5324d4d0">
                  <inPort Id="15e03a8c-223f-482d-9ffc-73cd6b0e1af7" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="b24559cd-1849-48bd-9419-03e6177ad823">
                  <inPort Id="e505f3dc-53b8-4a89-b1bc-04facbeef864" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1cb597be-28f9-4e30-86dc-b6e4eaa0c40b">
                  <inPort Id="378f9690-4d30-4724-b611-c2003c011a3e" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="274f401e-5569-460a-ba8d-a3280adb7527">
                  <inPort Id="6776fd66-8806-48b2-a13e-ce139ef7f0c8" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d90f2f6b-8acd-4c7e-8f84-ed5b9a3f3dc2">
                  <inPort Id="b8a1891b-b612-42a1-b795-7c64f09c43eb" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="03cb42be-b9d8-45ed-a8bd-d6c89283571e">
                  <outPort Id="69dd95bb-213a-4c36-838a-74bff3c34566" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="18be34a1-2fff-4525-a0d2-62fb6002036a">
                        <inPortMoniker name="//Network18/FBAnd2/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="17690152-3dd3-4880-8cfe-dbb409713d14">
            <fBAnd Id="b518c708-501d-44ea-ab1f-d35c6ff2bba6" name="FBAnd2" instanceName="FBAnd25" orderOfExecution="26" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="95fd3be9-2d5f-4abe-9f1c-77e41c8dd70e">
                  <inPort Id="6042d4e1-0af3-46a4-97f6-d3f083eca3f4" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="9ba1e834-dedd-4488-9ac5-c0fff4193a8d">
                  <inPort Id="c5924d6b-fe2d-4c07-a162-f51c8dca9a59" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="3580044c-dd17-428b-ad83-b1160116d27a">
                  <inPort Id="131c10c5-7da8-4dec-8a0c-8352fe60fdd6" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="5b4fb37a-7adf-48ad-aa51-3c8fc0c92d81">
                  <inPort Id="58518f3a-7156-4f8c-8d91-0d73761fce55" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="7f4062c7-d938-4f4f-be1d-20160ab9b2ed">
                  <inPort Id="f784c5a6-36a7-4450-95fe-06cec859e2bb" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d597f42a-d3e5-47d5-88f0-ec368796235c">
                  <inPort Id="ab20ca94-920d-432b-97b9-b761f1ce24be" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="f45e7c95-81e9-42b9-ba85-169060e5530a">
                  <inPort Id="2c863ebe-a8af-4dfa-a913-f2342747f463" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="045c07b4-db3c-443e-a9ed-51f3dcd9e5b3">
                  <inPort Id="38c74996-0150-478d-bef8-721455d75338" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="ea029838-1123-48fc-8647-d7bd73a5371b">
                  <outPort Id="f0b65355-96dc-4249-9761-523e5213cb31" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="5c34f7be-3efb-4833-850d-953a647f7ee9">
                        <inPortMoniker name="//Network18/FBAnd3/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="27edd88d-8df3-499f-b0a3-931157329091">
            <fBAnd Id="7c129f82-1bb8-47cd-91f6-2e9dbcc16158" name="FBAnd3" instanceName="FBAnd26" orderOfExecution="27" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="db063897-ea8c-449e-a455-04584933b10a">
                  <inPort Id="78c028a6-6f73-4600-85ab-d1ced516e9b9" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d2c1dccf-cad8-492e-9d2c-72a12c75cf1c">
                  <inPort Id="cbd7f7f6-3db7-4d6d-82d7-3c8657d31d89" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="aa8c9ca6-1f58-49b0-a19a-149638f373d0">
                  <inPort Id="f03b6f0f-c2c2-49c7-990a-1cde30303632" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="66bbb091-e3a5-42e4-80b6-8b797ab7b1a5">
                  <inPort Id="9e4798d2-2185-4a06-85a4-402ac259ce67" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d1e39d3f-6caa-403a-8151-d10bebbc7955">
                  <inPort Id="3f063bd9-087c-4a46-a900-ad211929a895" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="a86e8138-db6c-4533-8aa3-6228131ffc82">
                  <inPort Id="077e4d21-d644-44e9-b548-6b96a4f4acda" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="1a6e4cb5-a33d-4bfa-ba43-931053e97a66">
                  <inPort Id="f53ca7bb-a1b2-454b-b5cb-18922f986a61" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="40345e21-8324-4e0c-942e-7ebad392d219">
                  <inPort Id="48ac0f3c-863f-4ecf-bcf2-d1d8f349ac68" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="35d7e402-77d7-4e4c-9cc9-dd1d86399572">
                  <outPort Id="acbe7e29-5260-4649-be8a-f090be1ff5bd" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="bcaa2c42-ab19-48fc-a660-1840cd0e7452">
                        <inPortMoniker name="//Network18/FBAnd4/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="b09b7e49-c931-4ec9-971f-444fd431bc8f">
            <fBAnd Id="73f3f822-47e2-400a-9ff4-f76d83d97dd0" name="FBAnd4" instanceName="FBAnd27" orderOfExecution="28" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="f43f5856-acc1-459b-bc52-4005c798df06">
                  <inPort Id="0e16f565-b89a-409a-aa77-961aaa7cae37" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="fa4fc72f-20c8-41bd-9a68-e9e1c142647f">
                  <inPort Id="c2748b9d-d131-41dd-a18e-6e1d77631520" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="b928fb34-a812-428d-8336-1f93bfbf3af5">
                  <inPort Id="f792e722-fe72-4aa0-b082-6aa0050f2ee6" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="9656adc7-432b-4cd7-a471-c413c97f9842">
                  <inPort Id="2415080e-5089-4946-a784-2f27b5c9ab3f" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="d4253f3e-c117-482a-abe3-fe51420115c0">
                  <inPort Id="e1fd28de-f090-472c-9140-10e1c86ec6c4" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="4238bd43-7fa4-46f4-a0c3-4d7a820e4385">
                  <inPort Id="3d495ecd-699e-4d25-a83b-b45654feff67" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="efb1f453-4525-4580-932f-45adbaa5173e">
                  <inPort Id="37ce40d5-5e48-41c9-ae5e-e3e2db9229d3" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="72d3af85-2159-480b-a193-527b849c89d2">
                  <inPort Id="2417c99e-cb89-43d4-b985-62694b662755" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="7caf2492-b399-4c60-a8ee-8a68e65d38e1">
                  <outPort Id="95573db9-7986-47f1-b91c-845abf6e011b" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0">
                    <targetFunctionBlockPorts>
                      <wiredLink Id="adc8eb33-8db2-4267-8ecc-593d5fffc971">
                        <inPortMoniker name="//Network18/FBAnd5/AndIn2" />
                      </wiredLink>
                    </targetFunctionBlockPorts>
                  </outPort>
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
          <networkHasFunctionBlocks Id="eb39ba07-82b0-45db-b094-40e685bb2f94">
            <fBAnd Id="618a6c48-361e-4909-a14e-30827edd1c94" name="FBAnd5" instanceName="FBAnd28" orderOfExecution="29" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="9368c9e1-3321-4ea9-bc5a-550163a4c969">
                  <inPort Id="55cab60f-0815-46cb-b36a-92eadd641660" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0a5889e9-b25b-4e58-9cd8-936b9e6a4a3a">
                  <inPort Id="c6260b3d-19a9-4628-a071-557e92355bb3" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="20b6b65c-02d3-4c6c-89b6-87840b54cc8c">
                  <inPort Id="e04d72f9-30fa-4064-ae17-ba45c2ee46a8" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="333044a7-580b-4804-a785-446591ea1122">
                  <inPort Id="4921bcf2-92fc-44e5-98a9-bb1731a4b5ed" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="cbecb7d7-cdf5-4919-9b84-031a19b1b234">
                  <inPort Id="845b3e4e-f0ed-4919-949f-dd580c1fc09e" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e854b82a-47f7-42c0-995b-b8eb5d008f56">
                  <inPort Id="43c5b5f6-1a69-4b8d-8ddb-edca5ab5c3df" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="8d970dee-734c-49cc-a771-c51432fc60aa">
                  <inPort Id="309a0bca-814e-49bb-98f9-30495b9e84ea" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="498ff000-4448-4b02-b18a-063155e903fb">
                  <inPort Id="b7abacaa-b72a-408e-9098-4c2f5a7a4ff2" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="f7a76ecf-7163-4adc-8c02-e351cd6f70ae">
                  <outPort Id="7e55ea32-35bf-4976-8f94-454057f6029e" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
    <safetyApplicationHasNetworks Id="e770f3b1-644e-47d4-adff-dea0030085fa">
      <Network Id="25a48771-a12a-41bb-a1ac-3502fdb99c54" name="Network19" networkName="TMP" intId="21" networkOrderId="18">
        <functionBlocks>
          <networkHasFunctionBlocks Id="c19bfd23-8620-4658-9981-dc239a8b5ee0">
            <fBAnd Id="1f61723d-d108-4c42-ad64-98cdf37a5ef6" name="FBAnd1" instanceName="FBAnd29" orderOfExecution="30" mapState="false" mapDiag="false" functionName="safeAnd">
              <inPorts>
                <functioBlockHasInPorts Id="4ad9b625-b70a-40ac-9fce-24533b99f477">
                  <inPort Id="4fa9a959-6aaa-4fd2-a7ee-aad4e3793d98" name="AndIn1" portName="AndIn1" portNum="2" objectIndex="8" varId="2" filter="3" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="eae267f3-e5e5-4175-9394-c222cde9c3ba">
                  <inPort Id="d7358a50-f4a5-4712-a56e-d64beb6aefc1" name="AndIn2" portName="AndIn2" portNum="3" objectIndex="9" varId="3" filter="2" portDataType="1" channelInterface="Activated" deactivate1="Break Contact (NC)" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="2db161ec-9c6c-468e-b8b0-304d1155e95a">
                  <inPort Id="88aee50c-af52-4683-ac5a-c0310f9cdb35" name="AndIn3" portName="AndIn3" portNum="4" objectIndex="10" varId="4" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="4d81e07b-42b9-404c-b259-c474ee898987">
                  <inPort Id="6df1d73a-81c4-4568-bd67-4aa2e0d4ec9b" name="AndIn4" portName="AndIn4" portNum="5" objectIndex="11" varId="5" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="14eff35b-0c64-4931-87df-983e42af4748">
                  <inPort Id="dc8b84f4-f1a4-457d-a8e5-f715a63bfa21" name="AndIn5" portName="AndIn5" portNum="6" objectIndex="12" varId="6" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="0a9a39a6-fafc-4c29-9772-cba7103beaa5">
                  <inPort Id="5bcf58a6-7d31-458f-bbe5-a8bb09e6fd02" name="AndIn6" portName="AndIn6" portNum="7" objectIndex="13" varId="7" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="e5dc29d1-af49-4747-9dd6-817971d2d636">
                  <inPort Id="0c9aafdc-d129-4dc1-bf55-325925072716" name="AndIn7" portName="AndIn7" portNum="8" objectIndex="14" varId="8" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
                <functioBlockHasInPorts Id="467e4aee-38ef-47d9-aa0b-a54e26dd9342">
                  <inPort Id="8f2ce898-7fb0-43f4-9f3a-8aee9543bcdf" name="AndIn8" portName="AndIn8" portNum="9" objectIndex="15" varId="9" filter="2" portDataType="1" channelInterface="Deactivated" maxDeviation="0" resetTime="0" />
                </functioBlockHasInPorts>
              </inPorts>
              <outPorts>
                <functionBlockHasOutPorts Id="3ad4ceb3-ddcf-49e6-ba26-f05210abc316">
                  <outPort Id="b2c382e7-afdc-4812-bf14-64848520f5c3" name="AndOut" portName="AndOut" portNum="8" objectIndex="1" varId="20" filter="7" portDataType="1" replacementValue="0" />
                </functionBlockHasOutPorts>
              </outPorts>
            </fBAnd>
          </networkHasFunctionBlocks>
        </functionBlocks>
      </Network>
    </safetyApplicationHasNetworks>
  </networks>
  <twinSAFEGroupAliasPorts>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="c297c2d4-2754-4234-a8a2-fcb917425324">
      <twinSAFEGroupAliasPort Id="1f429433-0583-43f5-b51b-e99ec6bff100" name="RunStop" sdsId="0" channelId="0" portName="RunStop" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="5278030d-58ee-4483-9896-f2fde2e69190">
      <twinSAFEGroupAliasPort Id="1538c726-dcdb-41b5-8327-e06ae6058a57" name="ErrAck" sdsId="0" channelId="0" portName="ErrAck" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="b28f8e38-ccba-4467-a355-215d0a7f3dbc">
      <twinSAFEGroupAliasPort Id="0dec34e3-39a9-461b-aab2-e8c8f8115cf6" name="ModuleFault" sdsId="0" channelId="0" portName="ModuleFault" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="1835e397-11d6-4c6a-9049-3b03c007b51e">
      <twinSAFEGroupAliasPort Id="ec36c0c7-4141-471e-9ab3-1d761a4b3e7d" name="FbErr" sdsId="0" channelId="0" portName="FbErr" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="9f465c4b-b6ba-4259-bc0a-81ad177bef25">
      <twinSAFEGroupAliasPort Id="e9e649a9-465c-4cde-a86a-80c21a88aead" name="ComErr" sdsId="0" channelId="0" portName="ComErr" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="3de87294-c89c-46b8-a46e-9e2744ff2eaa">
      <twinSAFEGroupAliasPort Id="d2001f37-b304-4c6b-b7a1-979acba39801" name="OutErr" sdsId="0" channelId="0" portName="OutErr" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="1353969e-0da0-449e-87b7-a5382076c582">
      <twinSAFEGroupAliasPort Id="c307a55e-3715-481b-ba84-5ce41db884cd" name="OtherErr" sdsId="0" channelId="0" portName="OtherErr" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="0d3ec25c-4847-483c-a3d0-11fc0fd5ba9e">
      <twinSAFEGroupAliasPort Id="bd5eb0ec-3918-4873-8d1e-cd957dab0ccd" name="ComStartup" sdsId="0" channelId="0" portName="ComStartup" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="2e958795-8cca-498b-9742-ce4a32f6899a">
      <twinSAFEGroupAliasPort Id="222e8a45-e533-4181-a4c7-064c7dcbca65" name="FbDeactive" sdsId="0" channelId="0" portName="FbDeactive" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="5253044d-9a46-431d-b79b-e3bf8b3c44e5">
      <twinSAFEGroupAliasPort Id="6e0584ad-4887-4703-ada8-eade20a2971d" name="FbRun" sdsId="0" channelId="0" portName="FbRun" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
    <safetyApplicationHasTwinSAFEGroupAliasPort Id="30ce21f6-7783-43f8-8dc6-6e8362fa34c2">
      <twinSAFEGroupAliasPort Id="998db100-b84f-4ba9-835c-f4dfd37f1bf5" name="InRun" sdsId="0" channelId="0" portName="InRun" functionId="0" />
    </safetyApplicationHasTwinSAFEGroupAliasPort>
  </twinSAFEGroupAliasPorts>
  <variables>
    <safetyApplicationHasVariables Id="33f51d4f-aa9c-4149-8efd-b06eb7785cee">
      <variable Id="52093c68-c24a-409d-9ff4-54b69a7315ef" name="GroupPort_ErrAck" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="6029822f-fac8-4a31-85d0-6bf558697ca9">
            <variableUsages Id="1a6385f5-3212-484b-b238-6f5f18f67df3">
              <usages>
                <variableUsagesHasUsages Id="9601e113-7736-4dfa-b479-77a527e0cae9">
                  <aliasDeviceIoUsage Id="896cdf34-95ff-4591-b5cb-b67364774ed8" sdsId="1" channelId="1" functionId="0" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="e48dd1e0-2a66-4e15-b22a-44d3541f0c05">
            <variableUsages Id="4c05fa19-3494-41c6-b43c-fbd21d3fbba7">
              <usages>
                <variableUsagesHasUsages Id="ba8124dc-4983-4181-839c-5019ae32f3b3">
                  <groupPortUsage Id="21b09819-10fb-461d-8be1-b77fbf456d16">
                    <twinSAFEGroupAliasPort>
                      <groupPortUsageReferencesTwinSAFEGroupAliasPort Id="b83a5a0c-bf13-458d-a868-bf6666e5256c">
                        <twinSAFEGroupAliasPortMoniker name="//ErrAck" />
                      </groupPortUsageReferencesTwinSAFEGroupAliasPort>
                    </twinSAFEGroupAliasPort>
                  </groupPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="7a9c20ff-55c3-46ad-8b8e-bfb83a6f0a41">
      <variable Id="695f9f8d-8389-402c-8102-a9f7633095a1" name="GroupPort_RunStop" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="9af7c76d-7e58-463f-b1eb-a31dd880a27d">
            <variableUsages Id="e1050c03-13b8-41cb-ac9b-7a64242ce6af">
              <usages>
                <variableUsagesHasUsages Id="e9843f3c-62a4-4156-ba80-be5945eb72ad">
                  <aliasDeviceIoUsage Id="e752022b-7bb3-4e44-92d6-3cd4f4a27436" sdsId="2" channelId="1" functionId="0" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="b6829c3a-8258-4a90-9573-35fe73e1c5b2">
            <variableUsages Id="e4d2ca2c-e114-47c4-981c-8eb7c0733474">
              <usages>
                <variableUsagesHasUsages Id="2ce29a65-6424-48d0-a2e9-d92a3fd80ce7">
                  <groupPortUsage Id="48497979-ee19-48da-8f0b-6c2e593d5bc5">
                    <twinSAFEGroupAliasPort>
                      <groupPortUsageReferencesTwinSAFEGroupAliasPort Id="06fe7d8e-735e-484a-bc8e-1517c521647d">
                        <twinSAFEGroupAliasPortMoniker name="//RunStop" />
                      </groupPortUsageReferencesTwinSAFEGroupAliasPort>
                    </twinSAFEGroupAliasPort>
                  </groupPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="962ab709-0d79-4649-a6b9-bc687ff9ad0f">
      <variable Id="d802954f-7516-4f93-84ff-122bca2fb868" name="C12" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="c3236888-03ce-4e0e-9ae0-30e78b9b5b6c">
            <variableUsages Id="4313b7ce-5179-42e2-b3c6-8f0828f49570">
              <usages>
                <variableUsagesHasUsages Id="b749253d-08d2-4589-86b4-e9fd6ff717ac">
                  <aliasDeviceIoUsage Id="d53e20c6-ca81-476b-800b-02cfc3bc1b0d" sdsId="4" channelId="1" functionId="1610678529" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="f290f780-5810-4e81-acee-dba45fb9e6c7">
            <variableUsages Id="f83e7b84-dd41-44e0-98b1-0652eb6e4348">
              <usages>
                <variableUsagesHasUsages Id="6ce53779-f0e7-4f5b-8bd7-1b36364d6c9a">
                  <fbPortUsage Id="fa5db136-7efc-4fe0-b5e4-46f2a8aa747a">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="54c188bc-4c85-43e5-b7e3-04e97bfa0369">
                        <inPortMoniker name="//Network1/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="aef5f4cd-22cb-4789-8006-a1a9198f8feb">
      <variable Id="92212fdc-c6a0-4e2c-a0b6-32576ef1685f" name="I_C13_00_ACID_FAILURE" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="dd915982-cda5-4e75-894c-05760db8836f">
            <variableUsages Id="ad5cfb61-c30a-4b73-b317-9d9ed535616a">
              <usages>
                <variableUsagesHasUsages Id="58588974-817f-41d3-81f2-4b6862c6a2ec">
                  <aliasDeviceIoUsage Id="df3de2b4-3b6c-42a8-a07f-2a764f8b04ea" sdsId="5" channelId="1" functionId="1610678529" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="413d64ba-e4b9-48f0-bd52-e3fb654ac956">
            <variableUsages Id="92814f0c-1879-48e4-bfd3-f645347138a5">
              <usages>
                <variableUsagesHasUsages Id="c33a5f31-63d9-46fe-b393-e74faedbb794">
                  <fbPortUsage Id="dbcbc1c2-c542-489d-bcfa-9b9a6ee7b497">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="abf1e1e5-7904-4510-8e7e-2b0ac03dc2ae">
                        <inPortMoniker name="//Network1/FBAnd1/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="eca287b1-a4c2-434e-a1ca-9215c002d187">
                  <fbPortUsage Id="c40dcf47-5c7b-465d-991c-3207373f71c4">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="ab01a5cd-e34e-4357-b206-de52055a0d63">
                        <inPortMoniker name="//Network15/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="f106fdf1-173b-4126-ad98-74f66d82c319">
      <variable Id="ade22ff0-b082-4311-bf07-40272f2a6e83" name="C14_C43" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="3fc8fd80-06c6-4b10-afdf-1b9749e1e1cf">
            <variableUsages Id="00c5e77a-531b-449b-b21f-7390c4754fd9">
              <usages>
                <variableUsagesHasUsages Id="f957a016-fe93-42da-ae8c-7d494f404160">
                  <fbPortUsage Id="591374ca-e356-49e0-9f1c-c2fc90f320c2">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="378e15ee-9db7-46b7-a770-25ce1c16da4a">
                        <outPortMoniker name="//Network1/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="fd552bba-0a8f-4610-ae3f-52548fa53fb6">
            <variableUsages Id="4917c751-ef05-4f3e-a88b-15f6dd520a12">
              <usages>
                <variableUsagesHasUsages Id="02c7d3e5-aaec-4840-81a3-98e11b7e4fdc">
                  <aliasDeviceIoUsage Id="28f41630-936a-4538-8dbb-d34a488f765c" sdsId="6" channelId="1" functionId="1879113985" />
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="00ed9cad-f872-496d-9d0e-a0ad199a1ebb">
                  <aliasDeviceIoUsage Id="9458d599-46da-4294-aafd-c345dad3db82" sdsId="9" channelId="1" functionId="1879113985" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="b9b0e81d-a123-4cf3-a89e-4b6fc0aec23a">
      <variable Id="78524f1d-ceee-494b-a774-bf75d313d6c7" name="I_C11_00_PM_LID_CLOSE" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="5e0b18a1-0731-4835-9e94-1cc27d98d3b6">
            <variableUsages Id="d22dc60d-e3b6-4b25-8680-775c82c2ffa2">
              <usages>
                <variableUsagesHasUsages Id="23366bc5-fa3b-43f8-a82e-f6bcd4af4071">
                  <aliasDeviceIoUsage Id="ea9797ca-7549-435e-970b-bf2fb695c9bb" sdsId="3" channelId="1" functionId="1610678529" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="6331ef20-879e-4cf0-93e6-0cb7c267dc1c">
            <variableUsages Id="b1296624-a55a-4357-9ba2-01148fa74dde">
              <usages>
                <variableUsagesHasUsages Id="cccf4c81-c6ef-4daf-8dff-bbf29d66cfff">
                  <fbPortUsage Id="e7af4646-9044-481e-b084-11af7b4c2221">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="382a668e-bf76-4f8c-aa47-b332380a8234">
                        <inPortMoniker name="//Network3/FBAnd2/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="6087365b-ef21-4a76-adeb-c65c9fe1f59b">
                  <fbPortUsage Id="3d17c3dd-7859-41c0-9d85-ff47533cc56f">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="ad014ff2-2be2-4d71-aeb2-c4530c6c1fa0">
                        <inPortMoniker name="//Network4/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="a77d6cc7-2394-47d2-a489-c09a8bddb29c">
                  <fbPortUsage Id="45eb1f63-fcee-48c2-8431-401eb2d38ec6">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="d2eb459d-a99d-46c2-9489-c0e18b144876">
                        <inPortMoniker name="//Network2/FBAnd2/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="c6818f15-8036-4f07-a4f1-35b253bffbe2">
                  <fbPortUsage Id="2cdec70d-aa1e-4165-a0b7-a612bcfa15bd">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="4897b1b0-7b1f-47dc-ae2c-4efdbf62c554">
                        <inPortMoniker name="//Network7/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="6dea7cc3-811b-4303-8aa9-a400705c53bd">
                  <fbPortUsage Id="231fa93b-8264-4f65-af9d-2b8c000945f5">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="ad628ff4-cfaf-4e7d-88da-e260d1eaeac9">
                        <inPortMoniker name="//Network6/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="5d06d264-a44f-4e4b-ac6b-80438c2bbb5b">
                  <fbPortUsage Id="cb7d2334-060e-4b09-ab7e-d72a3069958a">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="911f5e1d-ae7f-4a69-b386-7a0eb076b52f">
                        <inPortMoniker name="//Network8/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="2442c210-9f3c-40aa-b9f1-91c5b1ee8ae2">
                  <fbPortUsage Id="6f55e1de-11ef-495c-b9ce-b7ce0533b863">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="31863bee-ac7b-4149-bf55-5513fe1e1c6e">
                        <inPortMoniker name="//Network9/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="5bbd6c5d-b5f8-4195-9e41-4633248905a2">
                  <fbPortUsage Id="f88bca70-53d8-4fe1-851d-e1a0399e7356">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="57d28a5a-7674-4f91-87d8-ba61b89500e4">
                        <inPortMoniker name="//Network10/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="4a2265dd-e464-4d53-a2f4-7111d74a898a">
                  <fbPortUsage Id="329b79c3-6b2a-47d9-8081-ed66afb2ad90">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="9d38c12c-d20f-4bf4-b609-dfc1cbf10b1d">
                        <inPortMoniker name="//Network11/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="8a514499-0716-45f6-873f-ad69600a656f">
                  <fbPortUsage Id="e44760b3-3ac1-4be5-8dd5-b5f4430018f2">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="14df0680-a69d-43a9-8841-1b982623a038">
                        <inPortMoniker name="//Network13/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="829db8a4-876e-4e5d-930d-04351ea21c96">
                  <fbPortUsage Id="39dff535-bd8b-4664-a414-97d2619d848f">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="6ee576d6-5c8b-4d68-8cc8-d5a8a2a7c2bf">
                        <inPortMoniker name="//Network13/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="dae70b0e-3960-4bea-87b0-fc93d6e991c1">
                  <fbPortUsage Id="1d28be9e-1418-4fd3-9cad-2b0aef28fce1">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="3f150316-5e47-485c-bfe3-1e9063896223">
                        <inPortMoniker name="//Network14/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="c9ce74d8-d079-45ff-b26c-16c27525573d">
                  <fbPortUsage Id="1ae87e15-de55-4e8e-93df-783a3eda9952">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="c9706143-784d-4332-a940-02febb870853">
                        <inPortMoniker name="//Network15/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="404d7638-6769-43f7-8b8d-1d0c9c4eacf3">
                  <fbPortUsage Id="0fc0a59a-5deb-4589-a58d-3b1747a9f0da">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="998dbd61-e94a-4a56-8a72-5a3451776ffc">
                        <inPortMoniker name="//Network1/FBOr1/OrIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="26b07bc8-49ee-446f-ac21-b2a82ea994c6">
                  <fbPortUsage Id="2a26b177-e90b-4aa9-ab22-1ba9f7790d6e">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="1184c9ee-9228-433d-ad8f-91f4d7457219">
                        <inPortMoniker name="//Network1/FBOr1/OrIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="98e18cd1-9a3a-46ba-a631-4163b3b18c4e">
                  <fbPortUsage Id="8d31f396-79f8-429f-a2b3-fbe292a38070">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="913c37d3-496b-46dc-827f-3ad550e8473f">
                        <inPortMoniker name="//Network16/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="6050b40b-f3ab-4ef5-b153-be6f89adccdf">
                  <fbPortUsage Id="ee9da8f8-f268-4556-b937-3ceb024ca29d">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="a68816e5-251f-4364-9da3-715bacf566c5">
                        <inPortMoniker name="//Network17/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="8050a67b-13ad-4b6e-beea-d30041333940">
      <variable Id="cb1197c2-e3b9-422d-9134-3b41252c3a08" name="I_C11_01_PM_UNDER_VACUUM" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="d08799f5-3c3a-4cb3-b3c2-aece9f0dc8d5">
            <variableUsages Id="1a475278-e2a8-45b7-a6e1-d73b18431112">
              <usages>
                <variableUsagesHasUsages Id="0d15ef72-cf03-49a5-ada7-2127d276463c">
                  <aliasDeviceIoUsage Id="61a9b191-5b13-474a-87b7-a3b42e91fe60" sdsId="3" channelId="3" functionId="1611727105" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="a82ad0b5-b487-4eed-90ca-0e0630b778ed">
            <variableUsages Id="fa1fe2ef-8399-4070-a73b-59dd43d0e487">
              <usages>
                <variableUsagesHasUsages Id="7d92a6db-d9ae-4403-8294-2ea88698fd55">
                  <fbPortUsage Id="a3a49fa8-ae7f-43ab-ac5d-13d3f84bd3b0">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="f3301cfd-6112-40ad-885f-1ce232f45a91">
                        <inPortMoniker name="//Network3/FBAnd2/AndIn4" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="b63ff596-b9ad-4588-93a0-c02e3cf9db27">
                  <fbPortUsage Id="62030181-e18e-4d7a-950c-b892cfc88836">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="f340e3a7-0590-4b91-bd46-0c18dba5a737">
                        <inPortMoniker name="//Network4/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="10434d80-ed20-46ba-a936-dddcc53c1467">
                  <fbPortUsage Id="e6cb0d98-fc3a-42d3-9229-7c40d15b65d4">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="b91eb485-d3fa-46fa-b0b4-2b3f658ebf76">
                        <inPortMoniker name="//Network2/FBAnd2/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="50f20c06-b065-40ab-90f5-4c66e61e92d0">
                  <fbPortUsage Id="b8602ef5-bdc8-4c5c-b66d-70fe04a41b63">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="a48c8bd0-d223-4e59-955f-ef11f90f908d">
                        <inPortMoniker name="//Network6/FBAnd1/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="7de6f597-b283-431b-905e-ac865555304f">
                  <fbPortUsage Id="8c1808a3-f728-4a9e-8352-15908254c8fe">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="635bbb53-f7cb-44e8-8b91-b3ac357c4eca">
                        <inPortMoniker name="//Network8/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="59fc2c6a-f699-4910-a8c6-7afac007fdc6">
                  <fbPortUsage Id="c06cba96-ab82-4366-9760-a3eca6c48e11">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="ddb6cf1c-0a02-49ba-ac9b-a50b802fa625">
                        <inPortMoniker name="//Network16/FBAnd1/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="ee79afd1-410e-47ea-996f-cc5fa92a63db">
                  <fbPortUsage Id="52b44943-20c1-4a3a-ae97-cc1f001a3b2e">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="27245825-628f-435c-bbd2-0a320745a4af">
                        <inPortMoniker name="//Network18/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="5dd3b6af-ea82-4307-9308-65b0c8632fc3">
      <variable Id="b55079a2-d586-4478-91c1-b3d5657b8205" name="PLC_Q_EV1_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="2511e2dc-cc87-4af0-a02d-9d8221286b0d">
            <variableUsages Id="b233ac4d-cb1d-4c54-9637-03d6fa42a995">
              <usages>
                <variableUsagesHasUsages Id="0b100271-3e03-44d9-a0e5-d0d27cbf9bd2">
                  <fbPortUsage Id="62594268-eb3c-4344-9e9e-1b08b33aab7b">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="c106ad7d-99cd-42e2-b22e-bf6f20d06909">
                        <outPortMoniker name="//Network2/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="682b346a-af55-4f18-966c-735e2e1708f5">
            <variableUsages Id="d1287a28-21b5-4611-9fe2-ba5c1c712a84">
              <usages>
                <variableUsagesHasUsages Id="48ff343a-bb93-4c64-ba7c-90ec0239ace7">
                  <aliasDeviceIoUsage Id="eb08b539-0a20-40d6-bb04-cd419088ab9c" sdsId="10" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="afb36900-4a42-499c-bbbd-6372554c2efc">
      <variable Id="ea0ed67f-416d-44e7-990b-d1a88014741c" name="PLC_Q_EV2_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="2bbf32cb-5687-49cd-bf88-a2afc890447c">
            <variableUsages Id="d3535b81-5a99-4a3d-bd06-4effc48846db">
              <usages>
                <variableUsagesHasUsages Id="50ddd100-d23a-47cc-a1a0-125a5fe16d5d">
                  <fbPortUsage Id="7c0a4b31-6c35-42f9-a6f8-57ea9905319a">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="22194881-1eb9-428c-b6de-7407f14665c1">
                        <outPortMoniker name="//Network3/FBAnd2/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="a15cbdc9-0253-454d-935e-ee814acb46a4">
            <variableUsages Id="0cc0ea16-fa16-472f-bc6b-7707c93dcbbc">
              <usages>
                <variableUsagesHasUsages Id="b922ff02-214d-4c10-a6d5-2b099138b789">
                  <aliasDeviceIoUsage Id="94c836ef-21b8-4b0e-a5bd-5c4783758084" sdsId="19" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="1893d22f-674b-415b-993c-cf236f4a6459">
      <variable Id="9da09601-62fe-4993-ae4a-e29faaa3044e" name="PLC_I_H_GAS_BOX_NORMAL" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="70c7e9ac-370a-4ee8-b32d-518787d07202">
            <variableUsages Id="f234e120-d4cc-46ca-a502-372f022f970e">
              <usages>
                <variableUsagesHasUsages Id="9e59c394-253a-4b7a-a636-7f32ce7ac8a8">
                  <aliasDeviceIoUsage Id="41de400a-9cdc-4502-b1ed-e981c6167f3e" sdsId="33" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="4e6ace4f-ebfe-4997-a257-d9c93767ed94">
            <variableUsages Id="e14147fc-4753-47a8-9fde-e85bc63b1cf6">
              <usages>
                <variableUsagesHasUsages Id="866e4bab-3a11-4b4b-b49a-185e28e677e5">
                  <fbPortUsage Id="c3d11462-58ac-43b9-8d8d-c6c228017936">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="b3c13535-86ad-4b68-8279-b0ca34e78026">
                        <inPortMoniker name="//Network3/FBAnd2/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="8d66ef49-1489-4681-b7ab-af481fb68b69">
                  <fbPortUsage Id="a96bcb66-3315-4faa-9cfc-a92c56f88329">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="26ea31be-b244-4b12-aa64-449d883bf5a5">
                        <inPortMoniker name="//Network12/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="003b5b08-749a-4219-a2d6-4e54877a12c9">
                  <fbPortUsage Id="ace24414-aad7-4a18-9e99-c72ff18e76de">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="4f1ddd1c-071c-47b5-b630-0dcdc14efa65">
                        <inPortMoniker name="//Network16/FBAnd4/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="74238f94-bfb4-4d42-9f11-5010c601a19e">
      <variable Id="c3c68613-330d-450c-919c-608665e3cace" name="PLC_Q_EV3_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="55410cef-1852-4bfe-bcb2-8a74e9aff96b">
            <variableUsages Id="ead2c8f2-52f0-46b4-9b65-4f5c2330e624">
              <usages>
                <variableUsagesHasUsages Id="b9234521-c04d-45e7-89a3-2a86f39948b6">
                  <fbPortUsage Id="b13cd221-4b65-4202-a9ff-8b70d5d53621">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="d9b5afbd-9b38-4cd7-9bbb-99a97ec2950c">
                        <outPortMoniker name="//Network4/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="fb6f79ef-85da-49c6-b63e-3b6df78abbfa">
            <variableUsages Id="a5fd24d4-02da-4302-ac7f-81be20f9e1ab">
              <usages>
                <variableUsagesHasUsages Id="7268dd8f-b0fb-4897-a95f-1a06067ed8d0">
                  <aliasDeviceIoUsage Id="9669e409-0ed3-4063-bf70-6e1e8a941c5d" sdsId="20" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="139138da-74e3-41d7-b4f9-564b8bd31fe1">
      <variable Id="f032963b-dc96-4ab5-9f20-ad206af9a001" name="I_C39_01_MS1_ALM1" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="5fa64260-e895-47eb-8c6c-9dba12ce2c55">
            <variableUsages Id="8b0f42c4-a7f8-43c2-8c9b-c8582efea3a2">
              <usages>
                <variableUsagesHasUsages Id="d79e20b2-8f7f-4e20-97f8-ca1987eac017">
                  <aliasDeviceIoUsage Id="9eef2094-5b85-46f2-919c-7464fdaab6ab" sdsId="8" channelId="2" functionId="1610678785" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="bfe0564d-ed56-4584-9ef3-3fa490120015">
            <variableUsages Id="91a77de0-88c9-48ff-a162-d0ea5cfe806d">
              <usages>
                <variableUsagesHasUsages Id="0a1624c2-c0e3-4ffc-bb66-fd5efd70b7b7">
                  <fbPortUsage Id="ac105281-e862-487c-a904-4617477ccd4b">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="7df483cd-9f4b-4eaf-b2f5-ae03c1900e71">
                        <inPortMoniker name="//Network5/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="e675e8a5-5c5c-4473-9c6c-5e561752610a">
      <variable Id="5c863f62-6372-4892-a878-5fc2cc8a8073" name="I_C39_01_MS1_ALM2" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="7738c5d6-fcfb-4962-9159-19d5867b1b07">
            <variableUsages Id="0d8eccbc-e906-499e-aeee-bc75693cfe00">
              <usages>
                <variableUsagesHasUsages Id="a735096a-e104-4db1-9ecd-6d297a0be4f5">
                  <aliasDeviceIoUsage Id="80b79eee-5ec3-4e4a-a8d6-52c00ab94ab3" sdsId="8" channelId="3" functionId="1610679041" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="82b68bfa-e664-4128-92be-09c4f314aa62">
            <variableUsages Id="51086ac3-ca22-460c-8f84-9a79abca3212">
              <usages>
                <variableUsagesHasUsages Id="93e8ee67-6574-447b-b2e0-dace7c6d1293">
                  <fbPortUsage Id="a4858c24-853b-4f56-93f9-2096e079d8e8">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="741e2555-25da-4c11-9c0d-1111f1cc498e">
                        <inPortMoniker name="//Network5/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="d03eeba8-928a-4883-a2ec-c77c9fdf5c01">
      <variable Id="bd109a2c-1b4b-462b-b4d5-a95928c57d6a" name="MS1_ALM" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="012ce598-fc20-4342-aef5-6ca4092e7b6b">
            <variableUsages Id="5a5f7fb5-6b82-4746-a80c-1ed9e59f27f6">
              <usages>
                <variableUsagesHasUsages Id="1c6a11ec-edbf-4454-9f21-b95d8deb6231">
                  <fbPortUsage Id="ac095b05-b8c6-4d2a-9e92-b0592289a36f">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="aa4b874e-367e-42c1-86b9-54b3171d40f2">
                        <outPortMoniker name="//Network5/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="a7d9f720-c7a9-42fe-88f4-b1f5ed5c83e8">
            <variableUsages Id="efc96275-301f-4fd0-8583-c6f628a4108d">
              <usages>
                <variableUsagesHasUsages Id="209db4d0-1061-43c7-9a3e-f6232367500a">
                  <fbPortUsage Id="27449256-4400-443c-a66f-9daf2e0287f8">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="b2a517d4-07cc-452e-8640-7b16c27dbec3">
                        <inPortMoniker name="//Network16/FBAnd1/AndIn4" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="b863a6e2-e3c8-4110-86e3-c2a8aa0fdb32">
                  <fbPortUsage Id="0760b1cb-1f5d-4889-8d8a-ebf9cae200c1">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="5c5c4095-8aff-4272-89ce-1433d0f57d9b">
                        <inPortMoniker name="//Network18/FBAnd1/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="48b3f41f-1b22-4e72-98de-9224347e6a06">
      <variable Id="7ea755c7-0de5-4c15-b479-d79968d3d9ca" name="I_C38_00_GD1_ALM1" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="4f839594-9296-45ae-a437-e552100cef74">
            <variableUsages Id="63b87c8c-6ba4-4472-a75d-c4e58094aeeb">
              <usages>
                <variableUsagesHasUsages Id="180c80fa-b41f-400b-9bce-6b64af819402">
                  <aliasDeviceIoUsage Id="757b67a4-c051-4728-a8bd-06b48ec1cf30" sdsId="7" channelId="1" functionId="1610678529" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="c133fa62-cd89-479b-aa44-a1e7c59f03c3">
            <variableUsages Id="9320fdbf-6a64-4f70-a61b-dd141658404e">
              <usages>
                <variableUsagesHasUsages Id="e655cfd2-f5da-4d22-9d48-9fa01bb37ca2">
                  <fbPortUsage Id="e4b82075-57cd-4cfd-af4d-f2eee58876fa">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="6859aa17-d631-45fc-ad5c-4d9146bf70c1">
                        <inPortMoniker name="//Network3/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="afc655b3-9ce7-401f-89db-bc37b621dee4">
      <variable Id="6d9bfec5-0487-426d-86e1-0f4b9482eee0" name="I_C38_01_GD1_ALM2" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="ba8731a1-fc79-4f64-93a6-c909703b2633">
            <variableUsages Id="c84617c7-ed1f-4fd0-ac77-27596b68b910">
              <usages>
                <variableUsagesHasUsages Id="89e5143f-f4de-44e4-9014-ab846aabcdf1">
                  <aliasDeviceIoUsage Id="fbcd885f-fe4c-481f-9f27-36e4434f4cf6" sdsId="7" channelId="2" functionId="1610678785" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="97082d03-3943-4997-863f-49ff0c466cdc">
            <variableUsages Id="05080f7b-3d08-4f08-ab7a-66b49d10a7ed">
              <usages>
                <variableUsagesHasUsages Id="41a3d483-e628-4014-8010-dab6e388ba02">
                  <fbPortUsage Id="f22be2f6-295e-48d7-8a1e-2692365bb7a2">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="80b0e67e-fcc9-48e2-a10a-d8e26abc4b0c">
                        <inPortMoniker name="//Network3/FBAnd1/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="63449087-8e55-4404-a71f-7a42878bb8a0">
      <variable Id="e4793873-2b40-42b1-97f6-962063dbd92d" name="I_C38_02_GD2_ALM1" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="ea2994fb-bfcb-4fec-90de-49676ddb9258">
            <variableUsages Id="5d9a9ff8-9dc9-47eb-aafd-a90f641bcf12">
              <usages>
                <variableUsagesHasUsages Id="3f722540-6f9f-4db6-b43c-97007087d603">
                  <aliasDeviceIoUsage Id="ef1f709e-34b4-43cc-8da7-75744a032ef4" sdsId="7" channelId="3" functionId="1610679041" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="48f6b5b3-a461-4eb4-ba14-a3ceb427ee35">
            <variableUsages Id="e4392d22-b551-4f4f-af10-a3b2b88042d7">
              <usages>
                <variableUsagesHasUsages Id="36d496f5-4916-4a44-952c-d9054ffbf6ef">
                  <fbPortUsage Id="1509c684-ba2c-4b22-92ee-58ec07d894dd">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="30670685-6c09-49d9-bd08-7548d8c296cd">
                        <inPortMoniker name="//Network3/FBAnd1/AndIn4" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="9407524c-f942-44be-9231-1a6b4fc8572e">
      <variable Id="eecb2658-f906-4c88-a1bf-c61b77e33268" name="I_C38_03_GD2_ALM2" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="fd7edf75-94f6-4627-9444-1921556c7411">
            <variableUsages Id="b3e46ca2-25fe-4b74-a38d-09246a6d8986">
              <usages>
                <variableUsagesHasUsages Id="ba74e47c-98c9-49b8-bc1a-1f2ee0b7d01a">
                  <aliasDeviceIoUsage Id="6cf3a90f-0d9b-4345-bf62-75b6c0f81e9e" sdsId="7" channelId="4" functionId="1610679297" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="b0da7c25-732c-4ac4-973c-9a69f2c2946f">
            <variableUsages Id="5f6e34be-e372-4dc8-8a4b-1454efbfff7c">
              <usages>
                <variableUsagesHasUsages Id="cd04552b-452e-4f1c-84f8-02825b7422ea">
                  <fbPortUsage Id="7364682d-871a-4318-b17a-6ab70c297da4">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="1a848115-32af-4705-b007-bedefec0307c">
                        <inPortMoniker name="//Network3/FBAnd1/AndIn5" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="81b33884-3865-48e2-9e72-dfc7d9e2e094">
      <variable Id="2dc16614-db12-407a-b5eb-bf2290c428be" name="I_C39_00_GD_FAULT" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="58a75100-f7a9-47b6-ab45-ac79973471c7">
            <variableUsages Id="ed123025-de17-4de6-b4dd-b48d440a1d16">
              <usages>
                <variableUsagesHasUsages Id="30166418-e0f0-49de-ae2b-5bac00630778">
                  <aliasDeviceIoUsage Id="d60f6d3e-473e-4d61-9345-3a2fa753cfb0" sdsId="8" channelId="1" functionId="1610678529" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="58f19030-0236-463d-bc1f-ebc328824254">
            <variableUsages Id="4ecfefbe-087c-45c7-a501-9a60f699098a">
              <usages>
                <variableUsagesHasUsages Id="41ee8404-8c8f-4745-9955-578d58bb1835">
                  <fbPortUsage Id="e3bffd04-1f3e-4a8c-846b-48b11cf3319a">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="0a614d2c-c454-4712-ba80-1d414b089926">
                        <inPortMoniker name="//Network3/FBAnd1/AndIn6" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="202b2931-f1e5-4c88-8314-d64a21d82053">
      <variable Id="1e1ad96d-8adb-4909-9c51-e3cc4f2dfd42" name="PLC_Q_EV4_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="5b5b5677-0f44-472f-aee3-4bc4c47befe2">
            <variableUsages Id="ba2637d6-c4a0-46d7-af42-bd22b8a21692">
              <usages>
                <variableUsagesHasUsages Id="bb164af7-20aa-4c4c-aa1c-b8696ca892d9">
                  <fbPortUsage Id="3c0ef64f-578a-41ac-ae3e-9153f751941a">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="3e77370c-f452-4046-b9e2-c987325ecc5d">
                        <outPortMoniker name="//Network4/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="4f24b8a8-83eb-4c53-bbff-fac705777966">
            <variableUsages Id="c555b3e0-fa98-46ca-ab48-49c940863f82">
              <usages>
                <variableUsagesHasUsages Id="030ba806-f1d8-4d77-822a-1f3ed4bdea45">
                  <aliasDeviceIoUsage Id="d6f2044e-e5af-4cea-b508-cbc3bde7dcdc" sdsId="18" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="2e3ebccd-6b26-4ace-bdb2-fb06f10cafe7">
      <variable Id="e81fc2cf-0870-4988-a5e4-1f5294d13a79" name="I_C11_07_DRY_PUMP_NORMAL" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="ac86a042-9fe6-47b4-b50f-16116816388a">
            <variableUsages Id="6b3e4615-3361-4f95-b80a-5c94886a08da">
              <usages>
                <variableUsagesHasUsages Id="44804ef5-a314-4531-a376-f062a8c857a6">
                  <aliasDeviceIoUsage Id="d703d9e8-0adf-4118-a235-942909ce515f" sdsId="3" channelId="15" functionId="1618018561" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="7ba69be0-5323-40f3-a3be-517d4ff20b4b">
            <variableUsages Id="7f023129-5269-4ff5-9b7c-32f32c2db916">
              <usages>
                <variableUsagesHasUsages Id="dd5f65c4-4f79-493a-aac9-3ad8e75286e4">
                  <fbPortUsage Id="58aa4f74-4b29-4614-a693-e1224d725260">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="e0d895b9-3d50-4159-a944-28c433257743">
                        <inPortMoniker name="//Network3/FBAnd2/AndIn5" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="117827a4-f478-47b8-831d-ce7e4f209300">
                  <fbPortUsage Id="0a06b35b-e52c-46ab-beff-0bdf3273f0e0">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="dddc9511-78d9-415e-9afe-8bf933873102">
                        <inPortMoniker name="//Network2/FBAnd2/AndIn4" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="454a175d-d0f3-4bd5-9465-7ffae8978a3c">
                  <fbPortUsage Id="a687c7e5-be4c-4eb9-b857-d0afebb696a6">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="5b9304aa-02a4-4a09-a4f5-adae1936b287">
                        <inPortMoniker name="//Network7/FBAnd1/AndIn3" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="9f5d65ac-280b-4c41-b230-cb6fe628be14">
                  <fbPortUsage Id="3a3d9309-2e14-4216-b284-0b7395c195ff">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="295b41ba-11ba-43b3-81ed-85dde390b64b">
                        <inPortMoniker name="//Network6/FBAnd1/AndIn4" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="ad5c9dc0-b499-4750-adc2-5f1769d62f32">
                  <fbPortUsage Id="8f031311-acc6-4a38-b9b0-22820aef5708">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="b376df03-e9d8-401f-b0e0-162655769f54">
                        <inPortMoniker name="//Network19/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="aa75e848-d7d0-4324-88a0-119ca3579d27">
                  <fbPortUsage Id="85bac7b7-51f4-4456-ad70-87abb960ffd2">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="5bbac879-d86c-4178-a19d-ee977cd0b813">
                        <inPortMoniker name="//Network7/FBAnd2/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="e59a8ed6-8c41-4d6a-a0ef-819ae0c7bd42">
      <variable Id="48045c91-d9bd-44c3-910f-e62f02839a06" name="PLC_I_TMP_NORMAL" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="71809026-aac4-4cfc-865f-e36604ef8e41">
            <variableUsages Id="3fad00b8-0774-4d28-8504-b805167425fd">
              <usages>
                <variableUsagesHasUsages Id="37539c86-08c9-42e4-a1a9-3629cd80191a">
                  <aliasDeviceIoUsage Id="0f159274-0958-43dc-9c92-993c2c160532" sdsId="34" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="97dd50ef-a920-4fb5-8613-bcf42f012933">
            <variableUsages Id="c5670440-26a2-4920-a1cd-433ffa921053">
              <usages>
                <variableUsagesHasUsages Id="55d1870e-0b5d-499f-8164-68f41216d9c1">
                  <fbPortUsage Id="fc750123-0dcf-4cf7-be19-b9dc2a2543fb">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="6ab76e23-65c9-4dd9-8600-a7a717c39b30">
                        <inPortMoniker name="//Network3/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="36f92a6e-c3c1-4b16-ad93-adec3a282dc4">
                  <fbPortUsage Id="1dbd5259-427a-4e23-b546-9c99eb9726c6">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="af4c07b8-b8c6-4f02-a286-360a84389f59">
                        <inPortMoniker name="//Network7/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="092275d0-2511-463e-9dad-b4dbd52a00d5">
                  <fbPortUsage Id="39d245f4-c45b-45f7-bfd0-048949a84ebb">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="f5ede00f-2982-4468-ba0d-1c2572631b3d">
                        <inPortMoniker name="//Network6/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="5564735b-bfc8-46fe-9d66-ba117f75ef64">
      <variable Id="e1b83e9f-e852-4369-8192-a19179bcddbf" name="PLC_I_PS2" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="23717dff-0ac5-440f-bbe1-009bc4b50228">
            <variableUsages Id="b1152461-b0e5-44f6-8c95-9d21a955b1be">
              <usages>
                <variableUsagesHasUsages Id="07dbc5a7-50df-4c6c-a55c-4f64bf7f85bf">
                  <aliasDeviceIoUsage Id="e222db17-1a28-4bac-bd29-cdf3af0a085f" sdsId="36" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="26f4370c-5491-4ee6-a8d8-d795be1100a5">
            <variableUsages Id="b249d253-80a7-4255-817d-c3cccf15f3e0">
              <usages>
                <variableUsagesHasUsages Id="616188de-4456-49a2-ba58-a8a7784c230b">
                  <fbPortUsage Id="4ef55a98-aa6f-463f-8fa1-ab273ea84d64">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="f6d6dbb0-654a-4295-b418-9381179c7572">
                        <inPortMoniker name="//Network2/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="9dc0cdb2-3ee7-4d29-b053-89e89cf8cc27">
                  <fbPortUsage Id="1e807448-1f4a-4cee-8c18-6204736c9d20">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="4b48d9c5-d9d8-47a7-b974-660c376d25e8">
                        <inPortMoniker name="//Network16/FBAnd2/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="345886cf-97c4-4840-9ac5-4ad4a1ba938d">
                  <fbPortUsage Id="e81ee164-481b-4ad1-8feb-672884f355fa">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="e69f9f48-77ad-48ef-8d25-6e99a88da268">
                        <inPortMoniker name="//Network18/FBAnd2/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="d65f5f44-9f45-48f5-b43d-675af3aaf688">
      <variable Id="ada9bb03-0487-4f8a-8c4a-5b0089d9f717" name="PLC_I_PS1" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="6f5a36f9-e2df-4ff2-978b-ad1996a040fd">
            <variableUsages Id="b6fd97ed-33d7-4223-aaef-200d43ad3ab3">
              <usages>
                <variableUsagesHasUsages Id="ec02b49b-b673-460f-935d-2dbccc00e3cc">
                  <aliasDeviceIoUsage Id="012d6a1d-0e5f-4f18-929d-93218c79b5d7" sdsId="35" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="d791a4e2-18f4-48aa-a055-768442bfc66d">
            <variableUsages Id="047c5302-550b-42b1-b336-18fde17b2015">
              <usages>
                <variableUsagesHasUsages Id="b901f480-c3c8-4245-8588-04094e333b4f">
                  <fbPortUsage Id="98db0c18-1c20-4c87-9453-ba6b2bfb22a7">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="25ed0820-5a77-40bc-b6d9-18cb6196daa9">
                        <inPortMoniker name="//Network2/FBAnd2/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="bc557a62-781c-4f97-82ce-aafa58bcd0c3">
                  <fbPortUsage Id="30e2b256-686c-4a18-acff-e39f1ef02c13">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="e94ad45b-be48-4b63-a036-ad271041730f">
                        <inPortMoniker name="//Network16/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="9ceaf694-369d-4711-b234-7011af7d2cff">
                  <fbPortUsage Id="1f4e1f49-7d2a-4435-9da8-b08430eeeec2">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="425afe9d-16ca-4033-80ac-8b6b2c10366e">
                        <inPortMoniker name="//Network18/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="0f3c6a43-f8f4-4cb7-9b2e-dfb967c55b54">
      <variable Id="c070f2b2-40e7-4b15-8d99-c4c79977920b" name="PLC_Q_ROUGH_VACUUM_VALVE_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="c3ca3568-eb32-4569-ae8d-6004c18e1dae">
            <variableUsages Id="716123bd-2002-4c37-87c6-7356d13d0001">
              <usages>
                <variableUsagesHasUsages Id="53460de9-9f57-4332-a6e6-6c0bf325862c">
                  <fbPortUsage Id="06910fb5-ec9d-4f55-9677-2dda3f2d9d30">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="6c4475ef-fb8d-421b-bf55-6b3cb3670d99">
                        <outPortMoniker name="//Network7/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="f57d113b-c4db-4be3-9e20-8e72f1976f02">
            <variableUsages Id="767e0c33-3213-4bb9-8258-d9a11b0f9170">
              <usages>
                <variableUsagesHasUsages Id="2c8c5d74-5c4e-478e-ab72-d694a6523b2b">
                  <aliasDeviceIoUsage Id="e1c77925-0e37-4310-84f4-96d58f7c000f" sdsId="44" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="51596b72-4b25-41ca-bb37-119a6eeefcc3">
      <variable Id="30edcf68-6e76-4c78-9fcf-6ff3e3cbe07d" name="PLC_Q_APC_OPEN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="358a719b-cbba-4a54-9e46-ba6674b2ea1e">
            <variableUsages Id="0e8ede18-44cf-469a-bbad-91b0566f8fec">
              <usages>
                <variableUsagesHasUsages Id="9e61e536-0c4d-48eb-89ec-19c81856675b">
                  <fbPortUsage Id="321dee83-1c1a-48e0-aed7-c30635de8518">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="32312b58-0265-41c4-a380-18229bb1a488">
                        <outPortMoniker name="//Network6/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="5f1eb6ad-06f4-4965-bdf7-59cda1268704">
            <variableUsages Id="4f53b4a0-7abe-4f85-b524-61c4b1f785c2">
              <usages>
                <variableUsagesHasUsages Id="9c4c44d7-e472-4cb9-9cba-2c9bd5585e34">
                  <aliasDeviceIoUsage Id="e45dd56e-4b1c-4c30-98e8-f1bfcb00907f" sdsId="21" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="a800718f-8747-4be4-afe7-71a22f6b7f06">
      <variable Id="ce74d597-9347-4ffd-8019-b14c9dfccdc0" name="PLC_Q_CM_VALVE" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="e99c2f93-0446-4138-9226-48b722d126a2">
            <variableUsages Id="c6a8c1e3-abf3-4456-b937-0a12466ffe5c">
              <usages>
                <variableUsagesHasUsages Id="29ff73aa-d509-49f1-93d1-25bcc78d701c">
                  <fbPortUsage Id="b88211b6-0bdc-4e78-965a-cbd2416d32e8">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="a0aa644d-d046-442b-ba31-90060054da86">
                        <outPortMoniker name="//Network8/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="31ba1920-af37-4c90-9a4a-0831c892d76b">
            <variableUsages Id="b6c953f5-a33d-4904-9850-a3307414e533">
              <usages>
                <variableUsagesHasUsages Id="ec9a084a-9a41-4a4b-897b-f9def7df962e">
                  <aliasDeviceIoUsage Id="8fc3e47f-b31e-414e-ad4f-df8c3d8a37cb" sdsId="24" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="960a5659-b6cf-46f8-aad4-6b0bf3222fd5">
      <variable Id="a2c60512-d6a6-4cc4-806e-36723488c639" name="PLC_I_H_LID_NORMAL" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="0ba33f0b-fac2-4f9c-a4e1-a6e26a957a0e">
            <variableUsages Id="5e6a088f-6cfb-4420-82ca-21f409450bd7">
              <usages>
                <variableUsagesHasUsages Id="30d226a4-55fd-47e1-a352-5365f0ff13e7">
                  <aliasDeviceIoUsage Id="96f0d021-0b34-49c6-aebe-e3c46e7a312b" sdsId="29" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="a163c4a3-1506-43d0-b714-a98e346949e0">
            <variableUsages Id="3080972b-5204-4dbc-880d-544f99487648">
              <usages>
                <variableUsagesHasUsages Id="3047a87b-e15c-4347-8126-0c8397f4c8cf">
                  <fbPortUsage Id="b82a1913-1378-4348-888e-e65f07f789b6">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="03a330c1-178a-48e7-9b99-a100d666536d">
                        <inPortMoniker name="//Network9/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="6c46a2ac-3d5f-4ecc-a569-d21cd20590f6">
                  <fbPortUsage Id="98277a95-a4aa-4ca1-a860-aa2e54a24fb9">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="911df975-4e4b-4622-ab58-2978d6a8a8bd">
                        <inPortMoniker name="//Network18/FBAnd3/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="37be67d1-44ea-4828-838c-a08463ba943b">
      <variable Id="feafa621-37d3-4f19-8e73-820c2dba4a17" name="PLC_I_H_CHAMBER_NORMAL" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="5b164068-2924-4090-8fe4-b86ef7b0747e">
            <variableUsages Id="8334aea9-cb68-4014-b0b5-f2591fb077c8">
              <usages>
                <variableUsagesHasUsages Id="e46140cd-9c11-4397-97a9-946e34679a1b">
                  <aliasDeviceIoUsage Id="4e04ad35-b9ef-4b40-8404-657503fe0c48" sdsId="30" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="80efe00e-f63f-4c90-8019-6162ce77d58c">
            <variableUsages Id="8305235e-4bd4-4e1d-bad6-0ddff13770ca">
              <usages>
                <variableUsagesHasUsages Id="5586d57c-2ad9-456d-8cf7-d214b17d89d4">
                  <fbPortUsage Id="03b04a56-4b7e-47a2-87a4-a42620e20f30">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="4fd738af-207d-4a7a-8e64-adafd2929611">
                        <inPortMoniker name="//Network9/FBAnd2/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="a9f4740f-a94d-4aff-ac06-60ca0fb929a5">
                  <fbPortUsage Id="134098e2-fb15-474e-87be-a1cfffbeee10">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="197f51c4-a102-46b2-b02d-3dc081fe48bd">
                        <inPortMoniker name="//Network10/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="92afd12b-8b81-481f-803c-0ea97e9b7bf4">
                  <fbPortUsage Id="9df5e45e-5dde-409a-9082-8ecb650d5e3b">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="2a4fd610-47f3-4b84-8023-b80517ac2f11">
                        <inPortMoniker name="//Network18/FBAnd4/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="adeac4de-1dc3-4f14-b92d-c0d7559ba88f">
      <variable Id="5ee31326-49b7-431a-89f3-a8f7c3e12241" name="PLC_Q_H_LID_ON" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="5faeb70c-56b8-4d51-b40d-08f408efeeb5">
            <variableUsages Id="e5ff48b5-be41-4331-8657-24dc5a2a006c">
              <usages>
                <variableUsagesHasUsages Id="894121e2-bcc7-491b-be40-bbc4425cbe67">
                  <fbPortUsage Id="c630ec82-36e6-4d1e-938b-6c5ac525fd6e">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="4365954e-f20d-48ed-a6b4-af50d14d35a4">
                        <outPortMoniker name="//Network9/FBAnd2/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="a920018b-583c-48d2-877b-c12e2305f923">
            <variableUsages Id="ca04ca5b-755d-4004-ba6b-1ef60be1c3d5">
              <usages>
                <variableUsagesHasUsages Id="c590202e-ba29-4c61-92a2-b1f29a13f443">
                  <aliasDeviceIoUsage Id="202b53bf-4b2a-4403-897b-1f17094d68f2" sdsId="11" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="ac9cd384-1cc3-4a26-8035-30cfb8926707">
      <variable Id="80465c54-656d-4681-8147-c0993fbc4baa" name="PLC_Q_H_CHAMBER_ON" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="63b3b8f1-2dd1-4255-9a7e-703c3b26aa99">
            <variableUsages Id="95842793-5d2e-4bf8-8719-1f9db21f2c61">
              <usages>
                <variableUsagesHasUsages Id="d66356db-5c03-4fda-8f07-924afac95f71">
                  <fbPortUsage Id="5e9fdeb1-5196-4cf2-b7b1-db7b023fe68b">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="d059e308-2f34-48fc-a824-8e4c12b302f5">
                        <outPortMoniker name="//Network10/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="08c0d950-d3b9-4b51-87b7-5ce6b4e89a4d">
            <variableUsages Id="751d7bd9-df58-46c2-9462-ea759470ed54">
              <usages>
                <variableUsagesHasUsages Id="0f154659-bde7-4c5a-9153-a51dd2b114a7">
                  <aliasDeviceIoUsage Id="9ea739d9-4132-489c-9cb1-cf6c63558985" sdsId="15" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="6f596941-2a6f-45de-8218-8a8afec8dcf8">
      <variable Id="853d9bc8-ca8c-4467-9583-560fa72ec15a" name="PLC_Q_H_APC_ON" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="7c080628-1e16-46a6-aad8-0ad6d1288ec4">
            <variableUsages Id="ef27f456-a229-44da-901f-5b99cb27634c">
              <usages>
                <variableUsagesHasUsages Id="835d6012-9e40-4f7a-b597-9d4077d329c5">
                  <fbPortUsage Id="62c6c510-3521-4274-8504-e5b095ca9b0c">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="3185641a-4843-4db8-8d93-4e57696f83a6">
                        <outPortMoniker name="//Network11/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="03102660-2285-4a11-b50a-647c17511a9a">
            <variableUsages Id="82b97a77-d50c-4ce1-8cf8-9f54dd5a5306">
              <usages>
                <variableUsagesHasUsages Id="cc034136-7ca6-456a-ab45-50c2bff1f9fe">
                  <aliasDeviceIoUsage Id="29247350-5fb6-4048-a4dc-142b5e2c5589" sdsId="17" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="72886d56-a6cf-43ec-bb02-97bcab38df41">
      <variable Id="51937c55-91d8-436b-b919-3639d71af6a1" name="PLC_Q_H_GAS_BOX_ON" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="e6a52e91-9313-4698-88d2-40de06eeec44">
            <variableUsages Id="2f7ea02e-72d9-491e-8751-422002051b91">
              <usages>
                <variableUsagesHasUsages Id="8c29ac92-f892-4815-a165-a9f9d1861636">
                  <fbPortUsage Id="c38dbf89-ec19-4626-9660-9c302f2f8875">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="8d377032-24b9-4452-a0e3-241be810c38d">
                        <outPortMoniker name="//Network12/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="820a2687-ba61-4c28-8d51-4d36b641501b">
            <variableUsages Id="0fb33df6-7456-4190-b20e-685724a55f3c">
              <usages>
                <variableUsagesHasUsages Id="08e25857-ed92-4101-97a0-5b1a69a63a8f">
                  <aliasDeviceIoUsage Id="25516bc8-5c65-4813-984d-86e230b13e59" sdsId="13" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="e5e6c565-fd60-4b6d-ac76-f0a83edca24f">
      <variable Id="c2d3fbc0-7c84-41ec-8f9e-886472d01d66" name="PLC_Q_H_FORLINE_ON" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="5fc3a5d6-a1ea-48ad-9c3a-b61bd592e79f">
            <variableUsages Id="0c05ad96-23dc-4396-8cbc-2b25cb54a2c9">
              <usages>
                <variableUsagesHasUsages Id="9d9cc1f6-cf5e-4408-b4fd-4629b703b806">
                  <fbPortUsage Id="224e7d85-cf7a-4e67-8826-e383063ec5e5">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="d6952830-ab1c-4cee-97bb-10fb03e5365e">
                        <outPortMoniker name="//Network13/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="b6511ae7-c554-4848-86d4-049a6ff32390">
            <variableUsages Id="4529e49c-eef3-4462-a4f8-4791e1dabe15">
              <usages>
                <variableUsagesHasUsages Id="17be7cef-dae8-460d-a8f9-5e130fbdaa7b">
                  <aliasDeviceIoUsage Id="ce5dab98-a7d1-498a-9c0e-a5a3fbc0e521" sdsId="14" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="375613ed-8bf0-44e0-ba28-7ac01801be44">
      <variable Id="9d51dd64-ef18-4bdf-8125-31d98579c36d" name="PLC_Q_H_GATE_VALVE_ON" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="e8ace344-dc56-4d97-972b-9c83dbc147dd">
            <variableUsages Id="74496c4e-07b5-4418-b71e-18f37e702941">
              <usages>
                <variableUsagesHasUsages Id="4f9f6455-cde5-400c-9de7-714a38a3d991">
                  <fbPortUsage Id="f897b292-8055-47b9-8a8f-925925083fec">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="46a57360-1a10-4274-8bb7-d63ecbd6816a">
                        <outPortMoniker name="//Network14/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="750133a0-240c-496e-926e-bc5d05d5b0b4">
            <variableUsages Id="a4d04c0e-8f9d-485f-bd27-5589726753b3">
              <usages>
                <variableUsagesHasUsages Id="7bd880c5-370c-47a3-8459-226ed9e0f355">
                  <aliasDeviceIoUsage Id="bee33709-c535-4f5c-b542-2b8ee8ca5e9e" sdsId="12" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="4e88e465-730e-4f0c-8498-cab1d845e66a">
      <variable Id="e6d77172-72bc-4312-b52a-9450c7bcd976" name="PLC_I_H_APC_NORMAL" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="558baff3-e062-42ea-b2cc-f93a72403ef0">
            <variableUsages Id="2d1cf766-5d6c-4291-b0b8-730aca10aea7">
              <usages>
                <variableUsagesHasUsages Id="3caf9bb1-42c0-4276-b7f8-8212528c2f77">
                  <aliasDeviceIoUsage Id="c0566d5a-5de1-4e33-8eb2-f49b3d3ee4e4" sdsId="31" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="905c1428-d190-472e-95e2-a044feeb3104">
            <variableUsages Id="d2cb5d92-7bb7-4c2f-8c13-bc72b547f48c">
              <usages>
                <variableUsagesHasUsages Id="e20d323c-0133-4009-91da-e593544e9ff2">
                  <fbPortUsage Id="71b08c72-7cb0-4504-8a5d-94f41cb476cf">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="7d313f26-7f33-42b2-96e7-4fb0a3699297">
                        <inPortMoniker name="//Network11/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="f7699eb7-de28-4d52-b7f6-976fa79b571f">
                  <fbPortUsage Id="38ebaf37-ce31-43f1-a187-450a2841bf64">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="6be72fdf-3579-46bc-99da-8b0c6185e6a8">
                        <inPortMoniker name="//Network18/FBAnd5/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="c733290e-28b9-4f6f-8f27-ead044d15d85">
      <variable Id="62666776-741d-47d7-84a7-7728c8e72e2d" name="PLC_I_H_GATE_VALVE_NORMAL" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="45440f54-f4e0-4ad4-85e6-d712bf6cce4a">
            <variableUsages Id="b875e70b-9aee-40e6-b708-b657b134b3b2">
              <usages>
                <variableUsagesHasUsages Id="60db9e5a-4d2e-44e0-bc12-4d0f3f4d6f37">
                  <aliasDeviceIoUsage Id="f851ae7f-178c-4ece-b7d1-f0bc587fef67" sdsId="32" channelId="1" functionId="1131179973" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="2b9128e0-eb54-4f14-a163-5689b8ac2d48">
            <variableUsages Id="f1c0cb3e-5ff3-4289-8193-f7920ca8512d">
              <usages>
                <variableUsagesHasUsages Id="00909527-e600-4230-baba-50618f80147b">
                  <fbPortUsage Id="c7a54432-3962-4dae-b771-eda43e4e9dcd">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="c35b7427-1994-4690-be12-37cdbb4a5cd9">
                        <inPortMoniker name="//Network14/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="5ac85e0a-29f5-4d96-aea4-fa7f55676cf5">
                  <fbPortUsage Id="e6161c21-8d2d-49a3-8e1e-2682c7f0a934">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="53632614-fd38-475a-afd9-3bfe4535b408">
                        <inPortMoniker name="//Network16/FBAnd3/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="0fb58054-787a-41ec-b633-e724402239b5">
      <variable Id="22b62be4-f132-4b10-be78-312d6f1dad6f" name="Always_True" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="5adebffc-9416-41b4-9e4f-55a5237f6add">
            <variableUsages Id="0afedda6-04fe-4a22-bc82-d93a710104af">
              <usages>
                <variableUsagesHasUsages Id="ff517efd-ce1e-4ca9-8210-7455f1d0ec6b">
                  <fbPortUsage Id="055b27be-735a-4636-aade-61f630eb7c96">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="8432e216-f210-476e-8402-fbea94214e34">
                        <outPortMoniker name="//Network1/FBOr1/OrOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="964c8fb4-fee3-4adb-afa9-a5ee8fced7e5">
            <variableUsages Id="d51054ab-f338-4ee5-8cb8-c6589eebafa4">
              <usages>
                <variableUsagesHasUsages Id="1e8b1157-7d95-4814-b75c-69b30b6f6e9b">
                  <fbPortUsage Id="08435c42-8d0c-4861-83e4-cdb76e9f8857">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="01a5ea3e-e10f-4d9b-8206-f919dcad93bd">
                        <inPortMoniker name="//Network12/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="22a956a0-e6f6-41ad-abfc-fca9ff851054">
                  <fbPortUsage Id="40d99638-7be7-4c70-8ecb-50c4f9f96815">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="bcac11df-58cd-4b58-b1d8-818ede97ef55">
                        <inPortMoniker name="//Network17/FBAnd1/AndIn1" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="2abf4c3a-320b-43f9-b97d-dcb4ad5ab850">
                  <fbPortUsage Id="5d50fe79-4475-4251-b0c7-9f50d4ae108a">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="708293c2-c6e5-42c5-853c-338f409b2e16">
                        <inPortMoniker name="//Network19/FBAnd1/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
                <variableUsagesHasUsages Id="95983f9e-a7a3-4410-ad78-745abaae5b72">
                  <fbPortUsage Id="ac572306-79bc-479b-be33-e275101c4b93">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="09714b34-cab6-4370-bce3-0838477fdbc9">
                        <inPortMoniker name="//Network7/FBAnd2/AndIn2" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="17e20db2-555c-459f-b0dd-3262222e540c">
      <variable Id="9208a1e7-6b28-4c5e-84b8-89b1fdc7b74f" name="PLC_Q_ACID_VALVE_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="e77ed0da-a34b-4420-bd0a-f33be49bc7b4">
            <variableUsages Id="8d7429d7-98c0-414d-9618-9642a24d15ba">
              <usages>
                <variableUsagesHasUsages Id="8154d08e-a1bb-4ea6-804a-4442e8eaebcc">
                  <fbPortUsage Id="87b6f883-3648-4535-a8ad-b370ef314a58">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="d4a390e6-3e0b-461a-b407-eca6e905e4a3">
                        <outPortMoniker name="//Network15/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="3f18f6e5-bf4b-4075-8f8a-215b4f0d0e7f">
            <variableUsages Id="d5228458-466b-4161-9706-31e5bd07af26">
              <usages>
                <variableUsagesHasUsages Id="9b87212e-5a15-4483-839a-b0e0d2bc25f6">
                  <aliasDeviceIoUsage Id="8c81a735-6d0f-4f12-b878-04fca7b53490" sdsId="25" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="b8acaec7-4762-42c8-8fc7-1a66a9902fc7">
      <variable Id="7f558e15-b85a-4803-adfb-3b67d80ec4c9" name="PLC_Q_PROCESS_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="d0fa9e28-a498-4d38-b1fd-4ae5dce31703">
            <variableUsages Id="fc83a9a0-7521-4b1a-a125-827df27f2489">
              <usages>
                <variableUsagesHasUsages Id="65725bf9-1048-4022-81e8-3f56ee8df48d">
                  <fbPortUsage Id="99a4a160-941b-4043-888c-b6de44f75844">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="68617205-89ce-4826-8705-7f2b27bb28f7">
                        <outPortMoniker name="//Network16/FBAnd4/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="41b887ba-9a6a-4f1d-9307-7d86d20697e4">
            <variableUsages Id="6b83bfea-bd7b-47a3-b63d-e19d07cf968a">
              <usages>
                <variableUsagesHasUsages Id="5cbcc667-c203-4d12-b017-3c90d3d26cd9">
                  <aliasDeviceIoUsage Id="5f3aa9e6-8dd0-40ae-b949-c82b27ff5623" sdsId="28" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="546ad338-a942-42c1-97e2-b34ed2ead33f">
      <variable Id="dd22d6f2-17c7-44f8-81ba-3358b4353333" name="PLC_Q_TRANSFER_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="fe9630fc-cd91-4ed4-951a-30eccc78c332">
            <variableUsages Id="c8473fd1-b97c-4b9a-b735-f0c81f19d491">
              <usages>
                <variableUsagesHasUsages Id="b43d1139-109a-4ecf-b888-0afe9b1a4588">
                  <fbPortUsage Id="6c161e44-a14b-4dfd-9519-2c3563510207">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="4ff19153-65a8-4c41-b94a-fe6da6846cce">
                        <outPortMoniker name="//Network17/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="5a585344-7850-4cfd-b682-deea538c98ff">
            <variableUsages Id="26c062d9-98c8-4617-aa7d-6f782f16d0e9">
              <usages>
                <variableUsagesHasUsages Id="49f1a612-0756-48e7-8590-3957a6d37ace">
                  <aliasDeviceIoUsage Id="7b03f855-4951-4965-8ac5-501a67587cc8" sdsId="26" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="58a2bdf9-9e80-4901-8091-8b820d6c8a71">
      <variable Id="fea8ad1c-8f91-4616-aeea-3d87d4a54a2a" name="PLC_Q_WAFER_MOVING_IN_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="aa6a88ff-030f-4688-ac39-2113c473805e">
            <variableUsages Id="28db2bf3-5203-4f9c-8141-0347b0360b79">
              <usages>
                <variableUsagesHasUsages Id="5d38adaf-4ea6-48d2-a577-df264d46bd91">
                  <fbPortUsage Id="832525b1-6b3d-4fbe-b7b7-2b1bff74fe95">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="5e7f0533-5b01-4086-90a6-e6ba79c63a19">
                        <outPortMoniker name="//Network18/FBAnd5/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="a8a8ef47-9d35-40dd-905d-ad9d6e189d0c">
            <variableUsages Id="adaf3310-1fc5-422c-9e98-d0d6ddf1f525">
              <usages>
                <variableUsagesHasUsages Id="f5a5114c-4bc1-4a45-8419-86964368a131">
                  <aliasDeviceIoUsage Id="b6ca87e1-ce6e-4005-a81e-68a1e00be482" sdsId="16" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="515e7233-89ed-4951-adb8-589c617169e8">
      <variable Id="acd97710-98d9-4f77-a768-d5ef2fc2e45e" name="PLC_Q_DRY_PUMP_EN" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="fccc258c-4fda-4133-a4a8-7587f983b68e">
            <variableUsages Id="664310d4-9d03-43f3-81e8-124ee5b860be">
              <usages>
                <variableUsagesHasUsages Id="02ac523d-859f-4a0c-9151-a6224d7416a3">
                  <fbPortUsage Id="6ce087d5-28c3-40a4-a72a-e03e645c5d22">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="d1ca40f0-5432-4ad7-9cc5-267b22f3fec2">
                        <outPortMoniker name="//Network7/FBAnd2/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="3ae9f8e6-5aee-4760-adf6-280ee9bcc1e3">
            <variableUsages Id="1f6e3cec-e766-48e1-b171-4710eb373cd0">
              <usages>
                <variableUsagesHasUsages Id="ceaacb80-e260-4c9a-93e7-648179d976da">
                  <aliasDeviceIoUsage Id="0b774814-ee2d-4899-b50c-66b8fefbb4d7" sdsId="27" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="8efac921-0be1-4ad6-88bc-4dfa0d868f09">
      <variable Id="7321193d-b5dd-4c74-a835-0aca113b4ae5" name="PLC_Q_TMP_BACK_VALVE" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="415d63ad-63e4-42e2-8876-ec50d21f61a3">
            <variableUsages Id="bd975887-45fe-470c-b8f9-11019cfce3f8">
              <usages>
                <variableUsagesHasUsages Id="a15bd6c1-8178-4cf8-8aec-8e91b9a76fd9">
                  <fbPortUsage Id="12ec4154-8ce1-462b-8ffe-2652195db277">
                    <functionBlockPort>
                      <fbPortUsageReferencesFunctionBlockPort Id="2172d3dd-7cb5-40a7-b0fd-10de5e84479c">
                        <outPortMoniker name="//Network19/FBAnd1/AndOut" />
                      </fbPortUsageReferencesFunctionBlockPort>
                    </functionBlockPort>
                  </fbPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="20fcbdfc-b98e-4359-8fe1-a1c1e22d9a23">
            <variableUsages Id="760bd123-df37-4b09-9f00-6e69be6ea961">
              <usages>
                <variableUsagesHasUsages Id="96a1304d-98be-496d-89a7-cfaef737f31c">
                  <aliasDeviceIoUsage Id="00feb0ed-c629-43c3-8558-a99eac2adcc7" sdsId="22" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="c4365050-a6dc-403e-ba35-d0d52f87d038">
      <variable Id="ff622e79-5476-4d7b-a5d5-865cd5d2f300" name="FB_Err" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="051ab187-9840-4e90-80ee-e4dc1fd73e70">
            <variableUsages Id="224d478b-a554-492e-a18f-f3e4ab557342">
              <usages>
                <variableUsagesHasUsages Id="30f1b03f-c305-4b04-9fe6-c0903cead406">
                  <groupPortUsage Id="e1075461-abd5-4ecd-9114-c7e07f9a00c5">
                    <twinSAFEGroupAliasPort>
                      <groupPortUsageReferencesTwinSAFEGroupAliasPort Id="2e79386f-629c-4697-a661-2f655d502812">
                        <twinSAFEGroupAliasPortMoniker name="//FbErr" />
                      </groupPortUsageReferencesTwinSAFEGroupAliasPort>
                    </twinSAFEGroupAliasPort>
                  </groupPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="c8c5f0b4-d363-47dd-ae94-dcf9651b1064">
            <variableUsages Id="5d991caf-0723-4d03-b104-cef443602db6">
              <usages>
                <variableUsagesHasUsages Id="b697258e-a2e9-49dd-abb2-322aefdbf90f">
                  <aliasDeviceIoUsage Id="63c40546-0078-4b25-b90d-52f353507a60" sdsId="43" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
    <safetyApplicationHasVariables Id="a2e19568-9d3c-4ef2-9594-dc02fec93adf">
      <variable Id="f3b29dfc-b9c3-4b18-9671-12f95f0c0970" name="Com_err" isLocal="false">
        <sourceUsages>
          <variableHasSourceUsages Id="139c6be4-a836-4d02-8637-07729a204b71">
            <variableUsages Id="4180f5a9-b7b8-432b-bb4d-9e40f827f68c">
              <usages>
                <variableUsagesHasUsages Id="11370c8e-4d3d-4ec0-a452-557c17ad5e4e">
                  <groupPortUsage Id="d27e3f57-404e-412e-b1d0-18ee93735c7e">
                    <twinSAFEGroupAliasPort>
                      <groupPortUsageReferencesTwinSAFEGroupAliasPort Id="f439953f-0027-4416-93ca-0ac5531ff40b">
                        <twinSAFEGroupAliasPortMoniker name="//ComErr" />
                      </groupPortUsageReferencesTwinSAFEGroupAliasPort>
                    </twinSAFEGroupAliasPort>
                  </groupPortUsage>
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasSourceUsages>
        </sourceUsages>
        <targetUsages>
          <variableHasTargetUsages Id="68e47902-29e3-4002-a073-57df4385147b">
            <variableUsages Id="e5e174d4-eeb5-4a39-a18d-7203f96ffa99">
              <usages>
                <variableUsagesHasUsages Id="ad93025b-87fb-4c6a-8f4c-af0e67649409">
                  <aliasDeviceIoUsage Id="fa99d451-567e-4838-a43b-d029eefb8341" sdsId="42" channelId="1" functionId="1131179972" />
                </variableUsagesHasUsages>
              </usages>
            </variableUsages>
          </variableHasTargetUsages>
        </targetUsages>
      </variable>
    </safetyApplicationHasVariables>
  </variables>
</safetyApplication>