| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124 |
- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="STR_NDI" Id="{4ab57c46-39d4-4f3c-88a6-8531c15a5180}">
- <Declaration><![CDATA[TYPE STR_NDI :
- STRUCT
- Heartbeat ,
- AV101_OPEN ,
- AV101_CLOSE ,
- AV102_OPEN ,
- AV102_CLOSE ,
- AV103_OPEN ,
- AV103_CLOSE ,
- AV104_OPEN ,
- AV104_CLOSE ,
- AV105_OPEN ,
- AV105_CLOSE ,
- AV106_OPEN ,
- AV106_CLOSE ,
- CY1_OPEN ,
- CY1_CLOSE ,
- CY2_OPEN ,
- CY2_CLOSE ,
- GV1_OPEN ,
- GV1_CLOSE ,
- Lid_Closed ,
- Water_Leak_Sensor01 ,
- Water_Leak_Sensor02 ,
- Water_Leak_Sensor03 ,
- Water_Leak_Sensor04 ,
- WAFER_CHECK_SENSOR1 ,
- WAFER_CHECK_SENSOR2 ,
- WAFER_CHECK_SENSOR3 ,
- WAFER_CHECK_SENSOR4 ,
- PS10_H_ALM ,
- PS10_L_ALM ,
- PS11_H_ALM ,
- PS11_L_ALM ,
- PS12_H_ALM ,
- PS12_L_ALM ,
- LID_heater_OT ,
- Chamber_heater_OT ,
- Chiller_Controller_ALM ,
- PG_PS1_Pressure_Switch_Up_Limit ,
- PG_PS1_Pressure_Switch_Down_Limit ,
- PG_PS2_Pressure_Switch_Up_Limit ,
- PG_PS2_Pressure_Switch_Down_Limit ,
- PG_PS3_Pressure_Switch_Up_Limit ,
- PG_PS3_Pressure_Switch_Down_Limit ,
- PG_PS4_Pressure_Switch_Up_Limit ,
- PG_PS4_Pressure_Switch_Down_Limit ,
- PG_PS5_Pressure_Switch_Up_Limit ,
- PG_PS5_Pressure_Switch_Down_Limit ,
- PG_PS6_Pressure_Switch_Up_Limit ,
- PG_PS6_Pressure_Switch_Down_Limit ,
- PG_PS7_Pressure_Switch_Up_Limit ,
- PG_PS7_Pressure_Switch_Down_Limit ,
- PG_PS8_Pressure_Switch_Up_Limit ,
- PG_PS8_Pressure_Switch_Down_Limit ,
- PG_PS9_Pressure_Switch_Up_Limit ,
- PG_PS9_Pressure_Switch_Down_Limit ,
- MS1_Pressure_Switch_Up_Limit ,
- MS1_Pressure_Switch_Down_Limit ,
- PS1_Pressure_Switch ,
- PS2_Pressure_Switch ,
- HT001_OT ,
- HT002_OT ,
- HT003_OT ,
- HT004_OT ,
- HT005_OT ,
- HT006_OT ,
- Turbo_Pump_Heater_OT ,
- Pendulum_Valve_Heater_OT ,
- IGS_Heater_OT ,
- Tape_Heater_OT ,
- Foreline_Heater_OT ,
- Gate_Valve_OT ,
- Stage_Heater_OT ,
- CDA_OK ,
- Lift_Pin_Middle1 ,
- Lift_Pin_Middle2 ,
- FL01B2 ,
- FL01B4 ,
- FL02B2 ,
- FL02B4 ,
- FL03B2 ,
- FL03B4 ,
- FL04B2 ,
- FL04B4 ,
- DP01_OUTPUT1 ,
- DP01_OUTPUT2 ,
- MaualEndStepFeedBack ,
- AV1 ,
- AV2 ,
- AV3 ,
- AV4 ,
- AV6 ,
- AV7 ,
- AV9 ,
- AV10 ,
- AV11 ,
- AV12 ,
- AV13 ,
- AV14 ,
- AV16 ,
- AV17 ,
- AV19 ,
- AV20 ,
- AV22 ,
- AV23 ,
- AV25 ,
- AV26 ,
- AV27 ,
- AV5 ,
- AV8 ,
- AV15 ,
- AV18 ,
- AV21 ,
- AV24 :BOOL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
|
