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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="ConfigPM" Id="{cce8fc33-b6ae-404d-ab2e-7580722e38c6}">
- <Declaration><![CDATA[TYPE ConfigPM :
- STRUCT
- //TurboN2FlowSetPoint:LREAL; //0-200 mtorr
- TurboN2Pressure:INT;
- PrepareTransferTimeout:INT; //1-99999 s
- TransferWaferTimeout:INT; //1-99999 s
- OpenGasValveTimeout:INT; //0-60 s
- CloseGasValveTimeout:INT; //0-10
- OpenCloseSlitValveTimeout:INT; //0-10
- GasFlowPressureAlarmRange:LREAL; //0-760000 mtorr
- GasFlowPressureAlarmTime:LREAL; //0-3600 s
- GasFlowPressureWarningRange:LREAL; //0-760000 mtorr
- GasFlowPressureWarningTime:LREAL; //0-3600 s
- EnableThrottleValve:BOOL; //0-10 //不清楚作用
- ValveHeaterSetPointLimit:INT; //0-500
- ForeLineHeaterSetPointLimit:INT; //0-500
- CheckSubstrateTempTimeout:INT; //0-3600 //不清楚作用
- CheckATMTimeout:INT; //0-3000 s
- OverVentTime:UINT; //0-60000 ms 充气至常压
- ChamberBasePressureThreshold:UDINT; //0-1000000 mtorr 腔体基础压力门槛 工艺开始压力？腔体压力下限？
- ChamberBaseTemperatureThreshold:LREAL; //0-1000 ℃ 腔体基础温度门槛 工艺开始温度？腔体温度下限？
- ProcessPressureOffset:LREAL; //0-100 mtorr
- PickDelayTime:INT; //0-10000 ms
- PlaceDelayTime:INT; //0-10000 ms
- ChamberLabel:STRING; //''
- WallHeaterSetPointLimit:INT; //0-500
- PendulumHeaterSetPointLimit:INT; //0-500
- EnableWallHeater:BOOL; //0-10
- EnableGridHeater:BOOL; //0-10
- (*RecipeToleranceIgnoreTime:INT; //0-60 s Tolerance失效时间,用不到*)
- RecipeRunningMode:INT; //0-5
- ForelineInterlockPressure:LREAL; //500-2000 ℃
- IsEnableRecipeExtension:BOOL; //0-10
- ControlPressureSetPoint:INT; //0-2000 mtorr
- ControlPressureN2FlowSetPoint:INT; //0-500 sccm
- PMStableTime:INT; //0-100 s
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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