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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="ConfigIdleClean" Id="{9daaea88-5455-4b88-9d50-7fa4517ebe1d}">
- <Declaration><![CDATA[TYPE ConfigIdleClean :
- STRUCT
- Option:SVINT;
-
- IdleCleanRecipe:STRING;
- IdleCleanTime:SVINT;
- IdleCleanWaferCount:SVINT;
-
- WaferCountSinceLastClean:SVINT;
- LastRunTime:STRING;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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