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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="SPLC_TO_PLC" Id="{d7b775f5-fbd3-42e2-8173-05f2c7fdc55e}">
- <Declaration><![CDATA[TYPE SPLC_TO_PLC :
- STRUCT
- EV1_EN,
- EV2_EN,
- EV3_EN,
- EV4_EN,
- HTR_APC_EN,
- HTR_CHAMBER_EN,
- HTR_FORLINE_EN,
- HTR_GAS_BOX,
- HTR_GATE_VALVE,
- HTR_LID,
- PROCESS_EN,
- DRY_PUMP_PW_EN,
- TMP_PW_EN,
- TRANSFER_EN,
- VALVE_ACID_EXHAUST_OPEN_EN,
- VALVE_CM_OPEN_EN,
- VALVE_DRY_PUMP_EN,
- VALVE_TMP_BACK_OPEN_EN,
- VALVE_APC_OPEN_EN,
- WAFER_MOVING_IN_EN,
- SPLC_Com_err,
- SPLC_FB_Err :BOOL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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