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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="Warning" Id="{3ac9c37b-ad10-4e0e-a22a-20414aeb141b}">
- <Declaration><![CDATA[TYPE Warning :
- STRUCT
- //PRESSURE_Alarm:BOOL;
- PRESSURE:BOOL;
-
- //MFC1_Alarm:BOOL;
- MFC1:BOOL;
-
- //MFC2_Alarm:BOOL;
- MFC2:BOOL;
-
- //MFC3_Alarm:BOOL;
- MFC3:BOOL;
-
- //MFC4_Alarm:BOOL;
- MFC4:BOOL;
-
- //MFC5_Alarm:BOOL;
- MFC5:BOOL;
-
- //MFC6_Alarm:BOOL;
- MFC6:BOOL;
-
- //MFC7_Alarm:BOOL;
- MFC7:BOOL;
-
- //MFC8_Alarm:BOOL;
- MFC8:BOOL;
-
- //MFC9_Alarm:BOOL;
- MFC9:BOOL;
-
- //WALL_TEMP_Alarm:BOOL;
- WALL_TEMP:BOOL;
-
- //LID_TEMP_Alarm:BOOL;
- LID_TEMP:BOOL;
-
- //STAGE_TEMP_Warning:BOOL;
- STAGE_TEMP1:BOOL;
- STAGE_TEMP2:BOOL;
- STAGE_TEMP3:BOOL;
- STAGE_TEMP4:BOOL;
-
-
-
- OpenCloseSlitValveTimeout:BOOL;
- Gas1FlowPressureOutOfRange:BOOL;
- Gas2FlowPressureOutOfRange:BOOL;
- Gas3FlowPressureOutOfRange:BOOL;
- Gas4FlowPressureOutOfRange:BOOL;
- Gas5FlowPressureOutOfRange:BOOL;
- Gas6FlowPressureOutOfRange:BOOL;
- Gas7FlowPressureOutOfRange:BOOL;
- Gas8FlowPressureOutOfRange:BOOL;
- Gas9FlowPressureOutOfRange:BOOL;
-
-
- //PROCESS TOLERANCE
- TOLERANCE_PRESSURE:BOOL;
- TOLERANCE_MFC1:BOOL;
- TOLERANCE_MFC2:BOOL;
- TOLERANCE_MFC3:BOOL;
- TOLERANCE_MFC4:BOOL;
- TOLERANCE_MFC5:BOOL;
- TOLERANCE_MFC6:BOOL;
- TOLERANCE_MFC7:BOOL;
- TOLERANCE_MFC8:BOOL;
- TOLERANCE_MFC9:BOOL;
- TOLERANCE_WALL_TEMP:BOOL;
- TOLERANCE_LID_TEMP:BOOL;
- TOLERANCE_STAGE_TEMP1,
- TOLERANCE_STAGE_TEMP2,
- TOLERANCE_STAGE_TEMP3,
- TOLERANCE_STAGE_TEMP4: BOOL;
-
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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