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STR_AO.TcDUT

STR_AO.TcDUT 2.0 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
    3. 

  3.   <DUT Name="STR_AO" Id="{b73cbc10-e11d-41a0-8294-d507835504d6}">
    4. 

  4.     <Declaration><![CDATA[TYPE STR_AO :
    5. 

  5. STRUCT
    6. 

  6. MFC1_Flow_Setpoint	,
    7. 

  7. MFC1_Rate_Setpoint	,
    8. 

  8. MFC2_Flow_Setpoint	,
    9. 

  9. MFC2_Rate_Setpoint	,
    10. 

  10. MFC3_Flow_Setpoint	,
    11. 

  11. MFC3_Rate_Setpoint	,
    12. 

  12. MFC4_Flow_Setpoint	,
    13. 

  13. MFC4_Rate_Setpoint	,
    14. 

  14. MFC5_Flow_Setpoint	,
    15. 

  15. MFC5_Rate_Setpoint	,
    16. 

  16. MFC6_Flow_Setpoint	,
    17. 

  17. MFC6_Rate_Setpoint	,
    18. 

  18. MFC7_Flow_Setpoint	,
    19. 

  19. MFC7_Rate_Setpoint	,
    20. 

  20. LID_Temp_SV	,	//E02
    21. 

  21. //LID_Heater2_Temperature_Setpoint	,	//E03
    22. 

  22. //LID_Heater3_Temperature_Setpoint	,	//E04
    23. 

  23. //LID_Heater4_Temperature_Setpoint	,	//E05
    24. 

  24. Chamber_Temp1_SV	,//E06
    25. 

  25. Chamber_Temp2_SV	,//E07
    26. 

  26. Chamber_Temp3_SV	,//E08
    27. 

  27. (*Chamber_Heater4_Temperature_Setpoint	,//E09
    28. 

  28. Chamber_Heater5_Temperature_Setpoint	,//E10
    29. 

  29. Chamber_Heater6_Temperature_Setpoint	,//E11
    30. 

  30. Chamber_Heater7_Temperature_Setpoint	,//E12
    31. 

  31. Chamber_Heater8_Temperature_Setpoint	,//E13*)
    32. 

  32. AV102_Temp_SV	,//E14
    33. 

  33. AV101_Temp_SV	,//E15
    34. 

  34. AV104_Temp_SV	,//E16
    35. 

  35. AV105_Temp_SV	,
    36. 

  36. //BA01_Temp_SV	,//E17
    37. 

  37. //VG103_Pipe_Temp_SV	,//E16
    38. 

  38. Exhaust1_3_Temp_SV	,//E14
    39. 

  39. Exhaust4_7_Temp_SV	,//E15
    40. 

  40. VG101_Pipe_Temp_SV	,//E16
    41. 

  41. (*Forline_Heater9_Temperature_Setpoint	,//E17
    42. 

  42. Forline_Heater10_Temperature_Setpoint	,//E14
    43. 

  43. Forline_Heater11_Temperature_Setpoint	,//E15
    44. 

  44. Forline_Heater12_Temperature_Setpoint	,//E16
    45. 

  45. Forline_Heater13_Temperature_Setpoint	,//E17
    46. 

  46. Forline_Heater14_Temperature_Setpoint	,//E14
    47. 

  47. Forline_Heater15_Temperature_Setpoint	,//E15
    48. 

  48. Forline_Heater16_Temperature_Setpoint	,//E16
    49. 

  49. Forline_Heater17_Temperature_Setpoint	,//E17
    50. 

  50. Forline_Heater18_Temperature_Setpoint	,//E14
    51. 

  51. Forline_Heater19_Temperature_Setpoint	,//E15
    52. 

  52. Forline_Heater20_Temperature_Setpoint	,//E16*)
    53. 

  53. Gate_Valve_Temp_SV	,//E18
    54. 

  54. APC_Temp_SV	,//E01
    55. 

  55. TMP_Temp_SV	,//不用
    56. 

  56. Tape_Temp1_SV	,
    57. 

  57. Tape_Temp2_SV	,
    58. 

  58. Tape_Temp3_SV	,
    59. 

  59. Tape_Temp4_SV	,
    60. 

  60. IGS_Temp1_SV	,
    61. 

  61. IGS_Temp2_SV	,
    62. 

  62. Chiller_Temp1_SV	,
    63. 

  63. Chiller_Temp2_SV	,
    64. 

  64. Stage_Temp1_SV	,
    65. 

  65. Stage_Temp2_SV	,
    66. 

  66. Stage_Temp3_SV	,
    67. 

  67. Stage_Temp4_SV	:REAL;
    68. 

  68. 

  69. 

  70. APC:VAT_OUT;
    71. 

  71. 

  72. TMP:TMP_OUT;
    73. 

  73. END_STRUCT
    74. 

  74. END_TYPE
    75. 

  75. ]]></Declaration>
    76. 

  76.   </DUT>
    77. 

  77. </TcPlcObject>
    78.