STR_AI.TcDUT 1.6 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  3. <DUT Name="STR_AI" Id="{6575a4b9-3bc4-4bec-9dbe-d8e6adab06fb}">
  4. <Declaration><![CDATA[TYPE STR_AI :
  5. STRUCT
  6. VG101_Pressure ,
  7. VG102_Pressure ,
  8. VG103_Pressure ,
  9. VG104_Pressure ,
  10. BA1_Pressure ,
  11. MFC1_Flow ,
  12. MFC2_Flow ,
  13. MFC3_Flow ,
  14. MFC4_Flow ,
  15. MFC5_Flow ,
  16. MFC6_Flow ,
  17. MFC7_Flow ,
  18. CHILLER1_TEMP_PV ,
  19. CHILLER1_DI_PV ,
  20. CHILLER1_FLOW_PV ,
  21. CHILLER1_PRESS_PV ,
  22. CHILLER2_TEMP_PV ,
  23. CHILLER2_DI_PV ,
  24. CHILLER2_FLOW_PV ,
  25. CHILLER2_PRESS_PV ,
  26. Turbo_Pump_Temp ,
  27. APC_Temp , //TC01
  28. Gate_Valve_Temp , //TC13
  29. Gate_Valve_Temp_Monitor, //TC14
  30. IGS_Temp1 , //TC35
  31. IGS_Temp2 , //TC36
  32. IGS_Temp3 , //TC35
  33. IGS_Temp4 , //TC36
  34. Lid_Temp , //TC02
  35. Lid_Temp_Monitor1 , //TC03
  36. Lid_Temp_Monitor2 , //TC04
  37. Tape_Temp1 , //TC31
  38. Tape_Temp2 , //TC32
  39. AV102_Temp ,
  40. AV101_Temp ,
  41. AV104_Temp ,
  42. AV105_Temp ,
  43. //BA01_Temp ,
  44. //VG103_Pipe_Temp ,
  45. Exhaust1_3_Temp ,
  46. Exhaust4_7_Temp ,
  47. VG101_Pipe_Temp ,
  48. Chamber_Temp1 , //TC05
  49. Chamber_Temp2 , //TC06
  50. Chamber_Temp3 , //TC07
  51. Chamber_Temp_Monitor, //TC12
  52. Stage_Temp1 , //TC08
  53. Stage_Temp1_Monitor ,
  54. Stage_Temp2 , //TC09
  55. Stage_Temp2_Monitor ,
  56. Stage_Temp3 , //TC10
  57. Stage_Temp3_Monitor ,
  58. Stage_Temp4 ,
  59. Stage_Temp4_Monitor :REAL; //TC11
  60. PG_PS1_Value ,
  61. PG_PS2_Value ,
  62. PG_PS3_Value ,
  63. PG_PS4_Value ,
  64. PG_PS5_Value ,
  65. PG_PS6_Value ,
  66. PG_PS7_Value ,
  67. PG_PS8_Value ,
  68. PG_PS9_Value ,
  69. PS1_Value ,
  70. PS2_Value ,
  71. MS1_Value ,
  72. GD01_Value ,
  73. GD02_Value :REAL;
  74. APC:VAT_IN;
  75. TMP:TMP_IN;
  76. VG103_PV ,//原PG10
  77. VG101_PV ,//原PS10
  78. VG102_PV ,//原PS11
  79. BA1_PV ,
  80. VG104_PV:REAL;//原PS12
  81. Water_Flow:REAL;
  82. END_STRUCT
  83. END_TYPE
  84. ]]></Declaration>
  85. </DUT>
  86. </TcPlcObject>