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- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="ConfigPump" Id="{9d5bffb3-5d44-4f27-b5cf-a0ffc7de608a}">
- <Declaration><![CDATA[TYPE ConfigPump :
- STRUCT
- LeakRate:SVLREAL;
-
- LeakCheckPumpingTime:SVINT;
- LeakCheckHoldTime:SVINT;
-
- PumpBasePressure:SVINT;
- LeakCheckBasePressur:SVLREAL;
-
- LeakCheckGasLineNums:STRING;
-
- PumpTimeLimit:SVLREAL;
- PumpValveDelay:SVINT;
-
- PumpCrossingPressure:SVINT;
- PumpVHe2FlowPressure:SVINT;
-
- LoadLockPumpBasePressure:SVINT;
- LoadLockPumpTimeLimit:SVINT;
-
- LoadLockPurgeVentPressure:SVINT;
- LoadLockPurgeCycleCount:SVINT;
- LoadLockPurgePumpTime:SVINT;
-
- LoadLockLeakCheckPumpTime:SVINT;
- LoadLockLeakCheckWaitTime:SVINT;
- LoadLockLeakRate:SVLREAL;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
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