ConfigIdleClean.TcDUT 443 B

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  3. <DUT Name="ConfigIdleClean" Id="{1d7cf409-294a-456b-a3b2-7ceaf5327743}">
  4. <Declaration><![CDATA[TYPE ConfigIdleClean :
  5. STRUCT
  6. Option:SVINT;
  7. IdleCleanRecipe:STRING;
  8. IdleCleanTime:SVINT;
  9. IdleCleanWaferCount:SVINT;
  10. WaferCountSinceLastClean:SVINT;
  11. LastRunTime:STRING;
  12. END_STRUCT
  13. END_TYPE
  14. ]]></Declaration>
  15. </DUT>
  16. </TcPlcObject>