| 123456789101112131415161718 |
- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <DUT Name="ConfigIdleClean" Id="{1d7cf409-294a-456b-a3b2-7ceaf5327743}">
- <Declaration><![CDATA[TYPE ConfigIdleClean :
- STRUCT
- Option:SVINT;
-
- IdleCleanRecipe:STRING;
- IdleCleanTime:SVINT;
- IdleCleanWaferCount:SVINT;
-
- WaferCountSinceLastClean:SVINT;
- LastRunTime:STRING;
- END_STRUCT
- END_TYPE
- ]]></Declaration>
- </DUT>
- </TcPlcObject>
|
