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UI.TcGVL

UI.TcGVL 1.6 KB
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  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
    3. 

  3.   <GVL Name="UI" Id="{3f5a37c1-892b-4f04-a8f1-a50350d791df}">
    4. 

  4.     <Declaration><![CDATA[{attribute 'qualified_only'}
    5. 

  5. VAR_GLOBAL
    6. 

  6. 	HeartBeat:REAL;
    7. 

  7. //HW
    8. 

  8. 	NDO:STR_NDO;
    9. 

  9. 	AO:STR_AO;
    10. 

  10. 	
    11. 

  11. //Config
    12. 

  12. 	PMConfig:ConfigPM;
    13. 

  13. 	
    14. 

  14. 	MFCVerification:ConfigMfcVer;
    15. 

  15. 	
    16. 

  16. 	Chiller:ConfigChiller;	
    17. 

  17. 	InnerChiller:ConfigChiller;
    18. 

  18. 	OuterChiller:ConfigChiller;
    19. 

  19. 	TopChiller:ConfigChiller;
    20. 

  20. 	
    21. 

  21. 	DryPump:ConfigDryPump;
    22. 

  22. 	
    23. 

  23. 	Mfcgas1:ConfigMfcGas;
    24. 

  24. 	Mfcgas2:ConfigMfcGas;
    25. 

  25. 	Mfcgas3:ConfigMfcGas;
    26. 

  26. 	Mfcgas4:ConfigMfcGas;
    27. 

  27. 	Mfcgas5:ConfigMfcGas;
    28. 

  28. 	Mfcgas6:ConfigMfcGas;
    29. 

  29. 	Mfcgas7:ConfigMfcGas;
    30. 

  30. 	Mfcgas8:ConfigMfcGas;
    31. 

  31. 	Mfcgas9:ConfigMfcGas;
    32. 

  32. 	Mfcgas10:ConfigMfcGas;
    33. 

  33. 	Mfcgas11:ConfigMfcGas;
    34. 

  34. 	Mfcgas12:ConfigMfcGas;	
    35. 

  35. 	MfcN2:ConfigMfcGas;
    36. 

  36. 	MfcHe:ConfigMfcGas;
    37. 

  37. 	
    38. 

  38. 	Pump:ConfigPump;
    39. 

  39. 	
    40. 

  40. 	Purge:ConfigPurge;
    41. 

  41. 	
    42. 

  42. 	PendulumHeater:ConfigHeater;
    43. 

  43. 	LidHeater:ConfigHeater;
    44. 

  44. 	ChamberHeater:ConfigHeater;
    45. 

  45. 	IGSHeater:ConfigHeater;
    46. 

  46. 	TapeHeater:ConfigHeater;
    47. 

  47. 	ForelineHeater:ConfigHeater;
    48. 

  48. 	
    49. 

  49. 	ElectrostaticVoltageSource:ConfigElectrostaticVoltageSource;
    50. 

  50. 	
    51. 

  51. 	TurboPump:ConfigTurboPump;
    52. 

  52. 	
    53. 

  53. 	PendulumValve:ConfigPendulumValve;
    54. 

  54. 	
    55. 

  55. 	IdleClean:ConfigIdleClean;
    56. 

  56. 	
    57. 

  57. 	EPD:ConfigEPD;
    58. 

  58. 	
    59. 

  59. 	HighTemperatureChiller:ConfigHighTempChiller;
    60. 

  60. 	
    61. 

  61. 	
    62. 

  62. 	
    63. 

  63. 	
    64. 

  64. //RECIPE
    65. 

  65. 	Step_Num:INT;
    66. 

  66. 	SetpArray:ARRAY[1..100] OF RecipeEachStep;
    67. 

  67. 

  68. 	
    69. 

  69. //INTERLOCK
    70. 

  70. 	TurboN2PurgePressure:INT;	//PS103	
    71. 

  71. 	
    72. 

  72. //PROCESS
    73. 

  73. 	Process_Start:BOOL;
    74. 

  74. 	Process_Stop:BOOL;
    75. 

  75. 

  76. //*********************READ**************
    77. 

  77. //	Process_Finished:BOOL;
    78. 

  78. 

  79. //WARNING&ALARM
    80. 

  80. 

  81. 	Warning_And_Alarm_RST:BOOL;
    82. 

  82. 

  83. 	
    84. 

  84. END_VAR
    85. 

  85. 

  86. ]]></Declaration>
    87. 

  87.   </GVL>
    88. 

  88. </TcPlcObject>
    89.