Helios/PLC/GVLs/GV.TcGVL

<?xml version="1.0" encoding="utf-8"?>
<TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
  <GVL Name="GV" Id="{9fe6761e-0922-4b0a-8145-d66624e14f55}">
    <Declaration><![CDATA[{attribute 'qualified_only'}
VAR_GLOBAL
//************************HW-IO******************************************
	NDI:STR_NDI;	
	NDO:STR_NDO;
	AI:STR_AI;
	AO:STR_AO;
	
	//POWER
	TURBO_PUMP_POWER_ON :BOOL;
	PENDULUM_VALVE_HEATER_POWER_ON:BOOL;
	LID_HEATER_POWER_ON:BOOL;
	CHAMBER_HEATER_POWER_ON:BOOL;
	IGS_HEATER_POWER_ON:BOOL;
	TAPE_HEATER_POWER_ON:BOOL;
	FORELINE_HEATER_POWER_ON:BOOL;
	GATE_VALVE_HEATER_POWER_ON:BOOL;
	
	//HEATER	
	LID_HEATER_AUTO_TUNE_EN				:ARRAY[1..10] OF BOOL;
	CHAMBER_HEATER_AUTO_TUNE_EN			:ARRAY[1..10] OF BOOL;
	PEN_VALVE_HEATER_AUTO_TUNE_EN		:BOOL;
	GATE_VALVE_HEATER_AUTO_TUNE_EN		:BOOL;
	IGS_HEATER_AUTO_TUNE_EN				:ARRAY[1..10] OF BOOL;
	TAPE_HEATER_AUTO_TUNE_EN			:ARRAY[1..10] OF BOOL;
	FORELINE_HEATER_AUTO_TUNE_EN		:ARRAY[1..20] OF BOOL;
	
	LID_HEATER_AUTO_TUNE_OUTPUT			:ARRAY[1..10] OF REAL;
	CHAMBER_HEATER_AUTO_TUNE_OUTPUT		:ARRAY[1..10] OF REAL;
	PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT	:REAL;
	GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT	:REAL;
	IGS_HEATER_AUTO_TUNE_OUTPUT			:ARRAY[1..10] OF REAL;
	TAPE_HEATER_AUTO_TUNE_OUTPUT		:ARRAY[1..10] OF REAL;
	FORELINE_HEATER_AUTO_TUNE_OUTPUT	:ARRAY[1..20] OF REAL;
	
	LID_HEATER_SSR_ON					:ARRAY[1..10] OF BOOL;
	CHAMBER_HEATER_SSR_ON				:ARRAY[1..10] OF BOOL;
	PEN_VALVE_HEATER_SSR_ON				:BOOL;
	GATE_VALVE_SSR_ON					:BOOL;
	IGS_HEATER_SSR_ON					:ARRAY[1..10] OF BOOL;
	TAPE_HEATER_SSR_ON					:ARRAY[1..10] OF BOOL;
	FORELINE_HEATER_SSR_ON				:ARRAY[1..20] OF BOOL;
	
	
//INTERLOCK
	ALARM_OCC:BOOL;
	WARNING_OCC:BOOL;
	
//UI-Config
	PMConfig:ConfigPM;
	
	MFCVerification:ConfigMfcVer;
	
	Chiller:ConfigChiller;	
	InnerChiller:ConfigChiller;
	OuterChiller:ConfigChiller;
	TopChiller:ConfigChiller;
	
	DryPump:ConfigDryPump;
	
	Mfcgas1					:ConfigMfcGas;
	Mfcgas2					:ConfigMfcGas;
	Mfcgas3					:ConfigMfcGas;
	Mfcgas4					:ConfigMfcGas;
	Mfcgas5					:ConfigMfcGas;
	Mfcgas6					:ConfigMfcGas;
	Mfcgas7					:ConfigMfcGas;
	Mfcgas8					:ConfigMfcGas;
	Mfcgas9					:ConfigMfcGas;
	Mfcgas10				:ConfigMfcGas;
	Mfcgas11				:ConfigMfcGas;
	Mfcgas12				:ConfigMfcGas;	
	MfcN2					:ConfigMfcGas;
	MfcHe					:ConfigMfcGas; 
	
	Pump:ConfigPump;
	
	Purge:ConfigPurge;
	
	PendulumHeater:ConfigHeater;
	LidHeater:ConfigHeater;
	ChamberHeater:ConfigHeater;
	IGSHeater:ConfigHeater;
	TapeHeater:ConfigHeater;
	ForelineHeater:ConfigHeater;
	
	ElectrostaticVoltageSource:ConfigElectrostaticVoltageSource;
	
	TurboPump:ConfigTurboPump;
	
	PendulumValve:ConfigPendulumValve;
	
	IdleClean:ConfigIdleClean;
	
	EPD:ConfigEPD;
	
	HighTemperatureChiller:ConfigHighTempChiller;
		
	
//UI-RECIPE
	Step_Num:INT;
	SetpArray:ARRAY[1..100] OF RecipeEachStep;
	
//INTERLOCK
	TurboN2PurgePressure:INT;	//PS103	
	
	Process_Start:BOOL;
	Process_Stop:BOOL;
END_VAR]]></Declaration>
  </GVL>
</TcPlcObject>