- <?xml version="1.0" encoding="utf-8"?>
- <TcPlcObject Version="1.1.0.1" ProductVersion="3.1.4024.12">
- <GVL Name="GV_H" Id="{b38aa7ed-b486-4d9b-8d99-d041b8103e90}">
- <Declaration><![CDATA[{attribute 'qualified_only'}
- VAR_GLOBAL PERSISTENT
- LID_HEATER_PID :ARRAY[1..10] OF STR_PID;
- CHAMBER_HEATER_PID :ARRAY[1..10] OF STR_PID;
- PEN_VALVE_HEATER_PID :STR_PID;
- GATE_VALVE_HEATER_PID :STR_PID;
- IGS_HEATER_PID :ARRAY[1..10] OF STR_PID;
- TAPE_HEATER_PID :ARRAY[1..10] OF STR_PID;
- FORELINE_HEATER_PID :ARRAY[1..20] OF STR_PID;
- STAGE_HEATER_PID :ARRAY[1..10] OF STR_PID;
- END_VAR]]></Declaration>
- </GVL>
- </TcPlcObject>
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