, ET=> ); IF TON_PrepareTransfer.Q THEN PM.INFO.Alarm.PrepareTransferTimerout:=TRUE; ELSE PM.INFO.Alarm.PrepareTransferTimerout:=FALSE; END_IF //TransferWafer TIMEOUT TON_TransferWafer(IN:=GV_IL.STATUS_TransferWafer , PT:= INT_TO_TIME(GV.PMConfig.TransferWaferTimeout)*1000, Q=> , ET=> ); IF TON_TransferWafer.Q THEN PM.INFO.Alarm.TransferWaferTimeout:=TRUE; ELSE PM.INFO.Alarm.TransferWaferTimeout:=FALSE; END_IF //OpenGasValve TIMEOUT TON_OpenGasValve(IN:=GV_IL.STATUS_OpenGasValve , PT:= INT_TO_TIME(GV.PMConfig.OpenGasValveTimeout)*1000, Q=> , ET=> ); IF TON_OpenGasValve.Q THEN PM.INFO.Alarm.OpenGasValveTimeout:=TRUE; ELSE PM.INFO.Alarm.OpenGasValveTimeout:=FALSE; END_IF //CloseGasValve TIMEOUT TON_CloseGasValve(IN:=GV_IL.STATUS_CloseGasValve , PT:= INT_TO_TIME(GV.PMConfig.CloseGasValveTimeout)*1000, Q=> , ET=> ); IF TON_CloseGasValve.Q THEN PM.INFO.Alarm.CloseGasValveTimeout:=TRUE; ELSE PM.INFO.Alarm.CloseGasValveTimeout:=FALSE; END_IF //OpenCloseSlitValve TIMEOUT TON_OpenCloseSlitValve(IN:=GV_IL.STATUS_OpenCloseSlitValve , PT:= INT_TO_TIME(GV.PMConfig.OpenCloseSlitValveTimeout)*1000, Q=> , ET=> ); IF TON_OpenCloseSlitValve.Q THEN PM.INFO.Alarm.OpenCloseSlitValveTimeout:=TRUE; ELSE PM.INFO.Alarm.OpenCloseSlitValveTimeout:=FALSE; END_IF //PRESSURE ALARM //PM.INFO.Alarm.PRESSURE:= //ALARM OR WARNING OCCUR GV.ALARM_OCC:= //PM.INFO.Alarm.PRESSURE PM.INFO.Alarm.MFC1 OR PM.INFO.Alarm.MFC2 OR PM.INFO.Alarm.MFC3 OR PM.INFO.Alarm.MFC5 OR PM.INFO.Alarm.MFC6 OR PM.INFO.Alarm.MFC7 OR PM.INFO.Alarm.WALL_TEMP OR PM.INFO.Alarm.LID_TEMP OR PM.INFO.Alarm.STAGE_EDGE_TEMP OR PM.INFO.Alarm.STAGE_CENTER_TEMP OR PM.INFO.Alarm.Gas1FlowPressureOutOfRange OR PM.INFO.Alarm.Gas2FlowPressureOutOfRange OR PM.INFO.Alarm.Gas3FlowPressureOutOfRange //OR PM.INFO.Alarm.Gas4FlowPressureOutOfRange OR PM.INFO.Alarm.Gas5FlowPressureOutOfRange OR PM.INFO.Alarm.Gas6FlowPressureOutOfRange //OR PM.INFO.Alarm.TurboN2PurgePressureOutOfRange //OR PM.INFO.Alarm.PrepareTransferTimerout //OR PM.INFO.Alarm.TransferWaferTimeout //OR PM.INFO.Alarm.OpenGasValveTimeout //OR PM.INFO.Alarm.CloseGasValveTimeout //OR PM.INFO.Alarm.OpenCloseSlitValveTimeout //OR PM.INFO.Alarm.ATMCheckTimeout //OR PM.INFO.Alarm.DRY_PUMP //OR PM.INFO.Alarm.PENDULUM_VALVE //OR PM.INFO.Alarm.TURBO_PUMP OR PM.INFO.Alarm.CHILLER1 OR PM.INFO.Alarm.CHILLER2 OR PM.INFO.Alarm.TOLERANCE_PRESSURE OR PM.INFO.Alarm.TOLERANCE_MFC1 OR PM.INFO.Alarm.TOLERANCE_MFC2 OR PM.INFO.Alarm.TOLERANCE_MFC3 OR PM.INFO.Alarm.TOLERANCE_MFC5 OR PM.INFO.Alarm.TOLERANCE_MFC6 OR PM.INFO.Alarm.TOLERANCE_MFC7 OR PM.INFO.Alarm.TOLERANCE_WALL_TEMP OR PM.INFO.Alarm.TOLERANCE_LID_TEMP OR PM.INFO.Alarm.TOLERANCE_STAGE_EDGE_TEMP OR PM.INFO.Alarm.TOLERANCE_STAGE_CENTER_TEMP ; GV.WARNING_OCC:= //PM.INFO.Warning.PRESSURE PM.INFO.Warning.MFC1 OR PM.INFO.Warning.MFC2 OR PM.INFO.Warning.MFC3 OR PM.INFO.Warning.MFC5 OR PM.INFO.Warning.MFC6 OR PM.INFO.Warning.MFC7 OR PM.INFO.Warning.WALL_TEMP OR PM.INFO.Warning.LID_TEMP OR PM.INFO.Warning.STAGE_EDGE_TEMP OR PM.INFO.Warning.STAGE_CENTER_TEMP OR PM.INFO.Warning.Gas1FlowPressureOutOfRange OR PM.INFO.Warning.Gas2FlowPressureOutOfRange OR PM.INFO.Warning.Gas3FlowPressureOutOfRange //OR PM.INFO.Warning.Gas4FlowPressureOutOfRange OR PM.INFO.Warning.Gas5FlowPressureOutOfRange OR PM.INFO.Warning.Gas6FlowPressureOutOfRange //OR PM.INFO.Warning.OpenCloseSlitValveTimeout OR PM.INFO.Warning.CHILLER1 OR PM.INFO.Warning.CHILLER2 OR PM.INFO.Warning.TOLERANCE_PRESSURE OR PM.INFO.Warning.TOLERANCE_MFC1 OR PM.INFO.Warning.TOLERANCE_MFC2 OR PM.INFO.Warning.TOLERANCE_MFC3 OR PM.INFO.Warning.TOLERANCE_MFC5 OR PM.INFO.Warning.TOLERANCE_MFC6 OR PM.INFO.Warning.TOLERANCE_MFC7 OR PM.INFO.Warning.TOLERANCE_WALL_TEMP OR PM.INFO.Warning.TOLERANCE_LID_TEMP OR PM.INFO.Warning.TOLERANCE_STAGE_EDGE_TEMP OR PM.INFO.Warning.TOLERANCE_STAGE_CENTER_TEMP ;]]> , WARNING=> ); RANGE_CHAMBER_HEATER2( ENABLE:= GV.ChamberHeater.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Chamber_Temp2_SV), PV:= REAL_TO_LREAL( GV.AI.Chamber_Temp2), RANGE_ALARM_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningTime.SV), ALARM=> , WARNING=> ); RANGE_CHAMBER_HEATER3( ENABLE:= GV.ChamberHeater.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Chamber_Temp3_SV), PV:= REAL_TO_LREAL( GV.AI.Chamber_Temp3), RANGE_ALARM_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.WALL_TEMP:= RANGE_CHAMBER_HEATER1.ALARM OR RANGE_CHAMBER_HEATER2.ALARM OR RANGE_CHAMBER_HEATER3.ALARM ; PM.INFO.Warning.WALL_TEMP:= RANGE_CHAMBER_HEATER1.WARNING OR RANGE_CHAMBER_HEATER2.WARNING OR RANGE_CHAMBER_HEATER3.WARNING ; //LID HEATER RANGE_LID_HEATER( ENABLE:= GV.LidHeater.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.LID_Temp_SV), PV:= REAL_TO_LREAL( GV.AI.Lid_Temp), RANGE_ALARM_H:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.LID_TEMP := RANGE_LID_HEATER.ALARM ; PM.INFO.Warning.LID_TEMP:= RANGE_LID_HEATER.WARNING; //STAGE HEATER RANGE_STAGE_CENTER_HEATER( ENABLE:= GV.Chiller.EnableAlarmTolerance, SV:= REAL_TO_LREAL(GV.AO.Chiller_Temp1_SV), PV:= REAL_TO_LREAL( GV.AI.CHILLER1_TEMP_PV), RANGE_ALARM_H:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.STAGE_CENTER_TEMP:=RANGE_STAGE_CENTER_HEATER.ALARM; PM.INFO.Warning.STAGE_CENTER_TEMP:=RANGE_STAGE_CENTER_HEATER.WARNING; PM.INFO.Alarm.CHILLER1:= ECC. CHILLER1_PV.Module2_Word[5].1; PM.INFO.Warning.CHILLER1:= ECC. CHILLER1_PV.Module2_Word[5].2; RANGE_STAGE_EDGE_HEATER( ENABLE:= GV.Chiller.EnableAlarmTolerance, SV:= REAL_TO_LREAL(GV.AO.Chiller_Temp2_SV), PV:= REAL_TO_LREAL( GV.AI.CHILLER2_TEMP_PV), RANGE_ALARM_H:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.Chiller.ToleranceAlarmTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.STAGE_EDGE_TEMP:=RANGE_STAGE_EDGE_HEATER.ALARM; PM.INFO.Warning.STAGE_EDGE_TEMP:=RANGE_STAGE_EDGE_HEATER.WARNING; PM.INFO.Alarm.CHILLER2:= ECC. CHILLER2_PV.Module2_Word[5].1; PM.INFO.Warning.CHILLER2:= ECC. CHILLER2_PV.Module2_Word[5].2; ]]> , WARNING=> ); RANGE_MFC2( ENABLE:= GV.Mfcgas2.EnableAlarm AND GV.Mfcgas2.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC2_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC2_Flow), RANGE_ALARM_H:= GV.Mfcgas2.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas2.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas2.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas2.WarningRange.SV, TIME_ALARM:= GV.Mfcgas2.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas2.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC3( ENABLE:= GV.Mfcgas3.EnableAlarm AND GV.Mfcgas3.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC3_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC3_Flow), RANGE_ALARM_H:= GV.Mfcgas3.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas3.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas3.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas3.WarningRange.SV, TIME_ALARM:= GV.Mfcgas3.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas3.WarningTime.SV, ALARM=> , WARNING=> ); (* RANGE_MFC4( ENABLE:= GV.Mfcgas4.EnableAlarm AND GV.Mfcgas4.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC4_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC4_Flow), RANGE_ALARM_H:= GV.Mfcgas4.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas4.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas4.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas4.WarningRange.SV, TIME_ALARM:= GV.Mfcgas4.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas4.WarningTime.SV, ALARM=> , WARNING=> ); *) RANGE_MFC5( ENABLE:= GV.Mfcgas5.EnableAlarm AND GV.Mfcgas5.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC5_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC5_Flow), RANGE_ALARM_H:= GV.Mfcgas5.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas5.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas5.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas5.WarningRange.SV, TIME_ALARM:= GV.Mfcgas5.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas5.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC6( ENABLE:= GV.Mfcgas6.EnableAlarm AND GV.Mfcgas6.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC6_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC6_Flow), RANGE_ALARM_H:= GV.Mfcgas6.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas6.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas6.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas6.WarningRange.SV, TIME_ALARM:= GV.Mfcgas6.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas6.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC7( ENABLE:= GV.Mfcgas7.EnableAlarm AND GV.Mfcgas7.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC7_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC7_Flow), RANGE_ALARM_H:= GV.Mfcgas7.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas7.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas7.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas7.WarningRange.SV, TIME_ALARM:= GV.Mfcgas7.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas7.WarningTime.SV, ALARM=> , WARNING=> ); (* RANGE_MFC8( ENABLE:= GV.Mfcgas8.EnableAlarm AND GV.Mfcgas8.Enable, PV:= REAL_TO_LREAL( GV.AI.MFC8_Flow), RANGE_ALARM_H:= GV.Mfcgas8.AlarmRange.MaxSV, RANGE_ALARM_L:= 0, RANGE_WARNING_H:= GV.Mfcgas8.WarningRange.MaxSV, RANGE_WARNING_L:= 0, TIME_ALARM:= GV.Mfcgas8.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas8.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC9( ENABLE:= GV.Mfcgas9.EnableAlarm AND GV.Mfcgas9.Enable, PV:= REAL_TO_LREAL( GV.AI.MFC9_Flow), RANGE_ALARM_H:= GV.Mfcgas9.AlarmRange.MaxSV, RANGE_ALARM_L:= 0, RANGE_WARNING_H:= GV.Mfcgas9.WarningRange.MaxSV, RANGE_WARNING_L:= 0, TIME_ALARM:= GV.Mfcgas9.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas9.WarningTime.SV, ALARM=> , WARNING=> ); *) PM.Info.Alarm.MFC1:= RANGE_MFC1.ALARM; PM.INFO.Alarm.MFC2:= RANGE_MFC2.ALARM; PM.INFO.Alarm.MFC3:= RANGE_MFC3.ALARM; // PM.INFO.Alarm.MFC4:= RANGE_MFC4.ALARM; PM.INFO.Alarm.MFC5:= RANGE_MFC5.ALARM; PM.INFO.Alarm.MFC6:= RANGE_MFC6.ALARM; PM.INFO.Alarm.MFC7:= RANGE_MFC7.ALARM; // PM.INFO.Alarm.MFC8:= RANGE_MFC8.ALARM; // PM.INFO.Alarm.MFC9:= RANGE_MFC9.ALARM; PM.INFO.warning.MFC1:= RANGE_MFC1.warning; PM.INFO.warning.MFC2:= RANGE_MFC2.warning; PM.INFO.warning.MFC3:= RANGE_MFC3.warning; // PM.INFO.warning.MFC4:= RANGE_MFC4.warning; PM.INFO.warning.MFC5:= RANGE_MFC5.warning; PM.INFO.warning.MFC6:= RANGE_MFC6.warning; PM.INFO.warning.MFC7:= RANGE_MFC7.warning; // PM.INFO.warning.MFC8:= RANGE_MFC8.warning; // PM.INFO.warning.MFC9:= RANGE_MFC9.warning;]]> , WARNING=> ); RANGE_PG_PS2( ENABLE:=TRUE, SV:= 270 , PV:= GV.AI.PG_PS2_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS3( ENABLE:=TRUE, SV:= 270 , PV:= GV.AI.PG_PS3_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS4( ENABLE:=TRUE, SV:=25, PV:= GV.AI.PG_PS4_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS5( ENABLE:=TRUE, SV:= 270, PV:= GV.AI.PG_PS5_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS6( ENABLE:=TRUE, SV:=270, PV:= GV.AI.PG_PS6_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); (* RANGE_PG_PS7( ENABLE:=TRUE, PV:= GV.AI.PG_PS7_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS8( ENABLE:=TRUE, PV:= GV.AI.PG_PS8_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS9( ENABLE:=TRUE, PV:= GV.AI.PG_PS9_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); *) PM.INFO.Alarm.Gas1FlowPressureOutOfRange:= RANGE_PG_PS1.ALARM; PM.INFO.Alarm.Gas2FlowPressureOutOfRange:= RANGE_PG_PS2.ALARM; PM.INFO.Alarm.Gas3FlowPressureOutOfRange:= RANGE_PG_PS3.ALARM; PM.INFO.Alarm.Gas4FlowPressureOutOfRange:= RANGE_PG_PS4.ALARM; PM.INFO.Alarm.Gas5FlowPressureOutOfRange:= RANGE_PG_PS5.ALARM; PM.INFO.Alarm.Gas6FlowPressureOutOfRange:= RANGE_PG_PS6.ALARM; //PM.INFO.Alarm.Gas7FlowPressureOutOfRange:= RANGE_PG_PS7.ALARM; //PM.INFO.Alarm.Gas8FlowPressureOutOfRange:= RANGE_PG_PS8.ALARM; //PM.INFO.Alarm.Gas9FlowPressureOutOfRange:= RANGE_PG_PS9.ALARM; PM.INFO.warning.Gas1FlowPressureOutOfRange:= RANGE_PG_PS1.warning; PM.INFO.warning.Gas2FlowPressureOutOfRange:= RANGE_PG_PS2.warning; PM.INFO.warning.Gas3FlowPressureOutOfRange:= RANGE_PG_PS3.warning; PM.INFO.warning.Gas4FlowPressureOutOfRange:= RANGE_PG_PS4.warning; PM.INFO.warning.Gas5FlowPressureOutOfRange:= RANGE_PG_PS5.warning; PM.INFO.warning.Gas6FlowPressureOutOfRange:= RANGE_PG_PS6.warning; //PM.INFO.warning.Gas7FlowPressureOutOfRange:= RANGE_PG_PS7.warning; //PM.INFO.warning.Gas8FlowPressureOutOfRange:= RANGE_PG_PS8.warning; //PM.INFO.warning.Gas9FlowPressureOutOfRange:= RANGE_PG_PS9.warning; ]]> "" "Ld" false false false "" "" "" false "GV_IL.PLC_TO_SPLC.SPLC_ErrorAcknowledgement" "BOOL" "" "" "" 0 false false true true false 3L 0 false false "OR" "" "" "" "" 0 false false false false true 11L 0 false false "GV_IL.SPLC_TO_PLC.SPLC_Com_err" "BOOL" "" "" "" 0 true false false true false 10L 9L "GV_IL.SPLC_TO_PLC.SPLC_FB_Err" "BOOL" "" "" "" 0 true false false true false 14L 13L "GV_IL.SPLC_TO_PLC.Other_Err" "BOOL" "" "" "" 0 true false false true false 36L 35L "GV_IL.SPLC_manual_ErrorAck" "BOOL" "" "" "" 0 true false false true false 23L 22L Or false false 12L 4L 1L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.SPLC_Restart" "BOOL" "" "" "" 0 false false true false false 28L "GV_IL.PLC_TO_SPLC.SPLC_Run" "BOOL" "" "" "" 0 false false true true false 7L 0 false false "AND" "" "" "" "" 0 false false false false true 24L 0 false false "GV_IL.SPLC_TO_PLC.SPLC_Com_err" "BOOL" "" "" "" 1 true false false true false 20L 19L "GV_IL.SPLC_TO_PLC.SPLC_FB_Err" "BOOL" "" "" "" 1 true false false true false 16L 15L "GV_IL.SPLC_manual_ErrorAck" "BOOL" "" "" "" 1 true false false true false 27L 26L And false false 25L 8L 5L false false false "" "" "" false "PM.NDI.Lid_Closed" "BOOL" "" "" "" 0 false false true true false 33L 0 false false "GV_IL.SPLC_TO_PLC.Status_Lid" "BOOL" "" "" "" 0 true false false true false 32L 31L 34L 30L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String "" "Ld" false false false "" "" "" false "GV_IL.PLC_TO_SPLC.TMP_Interlock_OK" "BOOL" "" "" "" 0 false false true true false 10L 0 false false "OR" "" "" "" "" 0 false false false false true 24L 0 false false "GV.AI.TMP.Alarm" "BOOL" "" "" "" 1 true false false true false 13L 12L "GV_IL.TMP_ALARM_Bypass" "BOOL" "" "" "" 0 true false false true false 27L 26L Or false false 25L 11L 2L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.PS1_Interlock_OK" "BOOL" "" "" "" 0 false false true true false 22L 0 false false "OR" "" "" "" "" 0 false false false false true 28L 0 false false "GV.NDI. PS1_Pressure_Switch" "BOOL" "" "" "" 1 true false false true false 21L 20L "GV_IL.PS1_ALM_Bypass" "BOOL" "" "" "" 0 true false false true false 31L 30L "ALWAYS_TRUE" "BOOL" "" "" "" 0 true false false true false 115L 114L Or false false 29L 23L 19L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.PS2_Interlock_OK" "BOOL" "" "" "" 0 false false true true false 17L 0 false false "OR" "" "" "" "" 0 false false false false true 32L 0 false false "GV.NDI. PS2_Pressure_Switch" "BOOL" "" "" "" 1 true false false true false 16L 15L "GV_IL.PS2_ALM_Bypass" "BOOL" "" "" "" 0 true false false true false 35L 34L "ALWAYS_TRUE" "BOOL" "" "" "" 0 true false false true false 117L 116L Or false false 33L 18L 14L false false false "" "" "" false "GV_IL.HTR_APC_EN" "BOOL" "" "" "" 0 false false true true false 106L 0 false false "OR" "" "" "" "" 0 false false false false true 100L 0 false false "GV_IL.SPLC_TO_PLC.HTR_APC_EN" "BOOL" "" "" "" 0 true false false true false 103L 102L "GV_IL.HTR_APC_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 105L 104L Or false false 101L 107L 99L false false false "" "" "" false "GV_IL.HTR_CHAMBER_EN" "BOOL" "" "" "" 0 false false true true false 97L 0 false false "OR" "" "" "" "" 0 false false false false true 91L 0 false false "GV_IL.SPLC_TO_PLC.HTR_CHAMBER_EN" "BOOL" "" "" "" 0 true false false true false 94L 93L "GV_IL.HTR_CHAMBER_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 96L 95L Or false false 92L 98L 90L false false false "" "" "" false "GV_IL.HTR_FORLINE_EN" "BOOL" "" "" "" 0 false false true true false 88L 0 false false "OR" "" "" "" "" 0 false false false false true 82L 0 false false "GV_IL.SPLC_TO_PLC.HTR_FORLINE_EN" "BOOL" "" "" "" 0 true false false true false 85L 84L "GV_IL.HTR_FORLINE_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 87L 86L Or false false 83L 89L 81L false false false "" "" "" false "GV_IL.HTR_GAS_BOX_EN" "BOOL" "" "" "" 0 false false true true false 79L 0 false false "OR" "" "" "" "" 0 false false false false true 73L 0 false false "GV_IL.SPLC_TO_PLC.HTR_GAS_BOX" "BOOL" "" "" "" 0 true false false true false 76L 75L "GV_IL.HTR_GAS_BOX_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 78L 77L Or false false 74L 80L 72L false false false "" "" "" false "GV_IL.HTR_GATE_VALVE_EN" "BOOL" "" "" "" 0 false false true true false 70L 0 false false "OR" "" "" "" "" 0 false false false false true 64L 0 false false "GV_IL.SPLC_TO_PLC.HTR_GATE_VALVE" "BOOL" "" "" "" 0 true false false true false 67L 66L "GV_IL.HTR_GATE_VALVE_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 69L 68L Or false false 65L 71L 63L false false false "" "" "" false "GV_IL.HTR_LID_EN" "BOOL" "" "" "" 0 false false true true false 57L 0 false false "OR" "" "" "" "" 0 false false false false true 59L 0 false false "GV_IL.SPLC_TO_PLC.HTR_LID" "BOOL" "" "" "" 0 true false false true false 56L 55L "GV_IL.HTR_LID_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 62L 61L Or false false 60L 58L 1L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.VG101_LOWER_10Torr" "BOOL" "" "" "" 0 false false true true false 139L 0 false false "GE" "" "" "" "" 0 false false false false true 141L 0 true false 0 false false 134L "GV. AI. VG101_Pressure" "REAL" "" "" "" 0 false false false false false 136L 135L "10000" "INT" "" "" "" 0 false false false false false 138L 137L EN BOOL BOOL Ge true false false false 142L 140L 131L false false false "" "" "" false 130L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {5f9848d3-568d-4cc5-9e31-8e28e9607ff1} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String "" "Ld" false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Lid_Temp_OK" "BOOL" "" "" "" 0 false false true true false 11L 0 false false "LT" "" "" "" "" 0 false false false false true 249L 0 true false "LT" "" "" "" "" 0 false false false false true 243L 0 true false "LT" "" "" "" "" 0 false false false false true 229L 0 true false 0 false false 294L "GV.AI.Lid_Temp" "REAL" "" "" "" 0 false false false false false 7L 6L "210" "USINT" "" "" "" 0 false false false false false 9L 8L EN BOOL BOOL Lt true false false false 230L "GV.AI.Lid_Temp_Monitor2" "REAL" "" "" "" 0 false false false false false 246L 245L "210" "USINT" "" "" "" 0 false false false false false 248L 247L EN BOOL BOOL Lt true false false false 244L "GV.AI.Lid_Temp_Monitor1" "REAL" "" "" "" 0 false false false false false 252L 251L "210" "USINT" "" "" "" 0 false false false false false 254L 253L EN BOOL BOOL Lt true false false false 250L "GV_IL.Lid_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 185L 184L BoxShortCircuit 50L 12L 1L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Chamber_Temp_OK" "BOOL" "" "" "" 0 false false true true false 96L 0 false false "LT" "" "" "" "" 0 false false false false true 267L 0 true false "LT" "" "" "" "" 0 false false false false true 261L 0 true false "LT" "" "" "" "" 0 false false false false true 255L 0 true false "LT" "" "" "" "" 0 false false false false true 235L 0 true false 0 false false 293L "GV.AI.Chamber_Temp1" "REAL" "" "" "" 0 false false false false false 77L 76L "210" "USINT" "" "" "" 0 false false false false false 79L 78L EN BOOL BOOL Lt true false false false 236L "GV.AI.Chamber_Temp2" "REAL" "" "" "" 0 false false false false false 258L 257L "210" "USINT" "" "" "" 0 false false false false false 260L 259L EN BOOL BOOL Lt true false false false 256L "GV.AI.Chamber_Temp3" "REAL" "" "" "" 0 false false false false false 264L 263L "210" "USINT" "" "" "" 0 false false false false false 266L 265L EN BOOL BOOL Lt true false false false 262L "GV.AI.Chamber_Temp_Monitor" "REAL" "" "" "" 0 false false false false false 270L 269L "210" "USINT" "" "" "" 0 false false false false false 272L 271L EN BOOL BOOL Lt true false false false 268L "GV_IL.Chamber_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 189L 188L BoxShortCircuit 95L 97L 70L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.APC_Temp_OK" "BOOL" "" "" "" 0 false false true true false 139L 0 false false "LT" "" "" "" "" 0 false false false false true 227L 0 true false 0 false false 191L "GV.AI.APC_Temp" "REAL" "" "" "" 0 false false false false false 120L 119L "120" "INT" "" "" "" 0 false false false false false 122L 121L EN BOOL BOOL Lt true false false false 228L "GV_IL.APC_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 193L 192L BoxShortCircuit 194L 140L 113L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Gate_Valve_Temp_OK" "BOOL" "" "" "" 0 false false true true false 149L 0 false false "LT" "" "" "" "" 0 false false false false true 225L 0 true false 0 false false 195L "GV.AI.Gate_Valve_Temp" "REAL" "" "" "" 0 false false false false false 146L 145L "120" "INT" "" "" "" 0 false false false false false 148L 147L EN BOOL BOOL Lt true false false false 226L "GV_IL.Gate_Valve_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 197L 196L BoxShortCircuit 198L 150L 141L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Gas_Line_Temp_OK" "BOOL" "" "" "" 0 false false true true false 177L 0 false false "LT" "" "" "" "" 0 false false false false true 273L 0 true false "LT" "" "" "" "" 0 false false false false true 221L 0 true false 0 false false 156L "GV.AI.IGS_Temp1" "REAL" "" "" "" 0 false false false false false 158L 157L "60" "INT" "" "" "" 0 false false false false false 160L 159L EN BOOL BOOL Lt true false false false 222L "GV.AI.IGS_Temp2" "REAL" "" "" "" 0 false false false false false 276L 275L "60" "INT" "" "" "" 0 false false false false false 278L 277L EN BOOL BOOL Lt true false false false 274L "GV_IL.Gas_Line_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 201L 200L BoxShortCircuit 168L 178L 151L false false false "" "" "" false 69L false false false "" "" "" false 39L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {827b9ec2-2032-40da-9f4e-7670ca2d55a8} {5f9848d3-568d-4cc5-9e31-8e28e9607ff1} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {3b9474d0-c98b-4935-8ce5-65f06808350d} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String "" "Ld" false false false "" "" "" false "ECC. CHAMBER_OUT. C07 [ 13 ]" "BOOL" "" "" "" 0 false false true false false 6L "ECC. CHAMBER_OUT. C07 [ 14 ]" "BOOL" "" "" "" 0 false false true true false 4L 0 false false "GV_IL.SPLC_TO_PLC.Status_Lid" "BOOL" "" "" "" 0 true false false true false 3L 2L 5L 1L false false false "" "" "" false "ECC. CHAMBER_OUT. C07 [ 15 ]" "BOOL" "" "" "" 0 false false true true false 10L 0 false false "AND" "" "" "" "" 0 false false false false true 16L 0 false false "GV_IL.SPLC_TO_PLC.Status_Lid" "BOOL" "" "" "" 0 true false false true false 15L 14L "GV_IL.SPLC_TO_PLC.TRANSFER_EN" "BOOL" "" "" "" 0 true false false true false 9L 8L "GV_IL.SPLC_TO_PLC.WAFER_MOVING_IN_EN" "BOOL" "" "" "" 0 true false false true false 19L 18L And false false 17L 11L 7L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String "" "Ld" false false false "" "" "" false "GV_IL.AV1_EN" "BOOL" "" "" "" 0 false false true true false 5L 0 false false "OR" "" "" "" "" 0 false false false false true 258L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 142L 141L "GV_IL.AV1_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 261L 260L Or false false 259L 4L 1L false false false "" "" "" false "GV_IL.AV2_EN" "BOOL" "" "" "" 0 false false true true false 34L 0 false false "OR" "" "" "" "" 0 false false false false true 262L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 182L 181L "GV_IL.AV2_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 265L 264L Or false false 263L 35L 16L false false false "" "" "" false "GV_IL.AV3_EN" "BOOL" "" "" "" 0 false false true true false 37L 0 false false "OR" "" "" "" "" 0 false false false false true 266L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 156L 155L "GV_IL.AV3_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 269L 268L Or false false 267L 38L 10L false false false "" "" "" false "GV_IL.AV4_EN" "BOOL" "" "" "" 0 false false true true false 40L 0 false false "OR" "" "" "" "" 0 false false false false true 270L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 144L 143L "GV_IL.AV4_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 273L 272L Or false false 271L 41L 9L false false false "" "" "" false "GV_IL.AV5_EN" "BOOL" "" "" "" 0 false false true true false 43L 0 false false "OR" "" "" "" "" 0 false false false false true 274L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 184L 183L "GV_IL.AV5_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 277L 276L Or false false 275L 44L 8L false false false "" "" "" false "GV_IL.AV6_EN" "BOOL" "" "" "" 0 false false true true false 46L 0 false false "OR" "" "" "" "" 0 false false false false true 278L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 158L 157L "GV_IL.AV6_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 281L 280L Or false false 279L 47L 13L false false false "" "" "" false "GV_IL.AV7_EN" "BOOL" "" "" "" 0 false false true true false 49L 0 false false "OR" "" "" "" "" 0 false false false false true 282L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 146L 145L "GV_IL.AV7_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 285L 284L Or false false 283L 50L 14L false false false "" "" "" false "GV_IL.AV8_EN" "BOOL" "" "" "" 0 false false true true false 52L 0 false false "OR" "" "" "" "" 0 false false false false true 286L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 186L 185L "GV_IL.AV8_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 289L 288L Or false false 287L 53L 12L false false false "" "" "" false "GV_IL.AV9_EN" "BOOL" "" "" "" 0 false false true true false 55L 0 false false "OR" "" "" "" "" 0 false false false false true 290L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 160L 159L "GV_IL.AV9_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 293L 292L Or false false 291L 56L 24L false false false "" "" "" false "GV_IL.AV10_EN" "BOOL" "" "" "" 0 false false true true false 58L 0 false false "OR" "" "" "" "" 0 false false false false true 294L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 162L 161L "GV_IL.AV10_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 297L 296L Or false false 295L 59L 23L false false false "" "" "" false "GV_IL.AV11_EN" "BOOL" "" "" "" 0 false false true true false 61L 0 false false "OR" "" "" "" "" 0 false false false false true 298L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 164L 163L "GV_IL.AV11_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 301L 300L Or false false 299L 62L 22L false false false "" "" "" false "GV_IL.AV12_EN" "BOOL" "" "" "" 0 false false true true false 64L 0 false false "OR" "" "" "" "" 0 false false false false true 302L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 166L 165L "GV_IL.AV12_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 305L 304L Or false false 303L 65L 11L false false false "" "" "" false "GV_IL.AV13_EN" "BOOL" "" "" "" 0 false false true true false 67L 0 false false "OR" "" "" "" "" 0 false false false false true 306L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 168L 167L "GV_IL.AV13_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 309L 308L Or false false 307L 68L 19L false false false "" "" "" false "GV_IL.AV14_EN" "BOOL" "" "" "" 0 false false true true false 70L 0 false false "OR" "" "" "" "" 0 false false false false true 310L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 148L 147L "GV_IL.AV14_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 313L 312L Or false false 311L 71L 25L false false false "" "" "" false "GV_IL.AV15_EN" "BOOL" "" "" "" 0 false false true true false 73L 0 false false "OR" "" "" "" "" 0 false false false false true 314L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 188L 187L "GV_IL.AV15_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 317L 316L Or false false 315L 74L 26L false false false "" "" "" false "GV_IL.AV16_EN" "BOOL" "" "" "" 0 false false true true false 76L 0 false false "OR" "" "" "" "" 0 false false false false true 318L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 170L 169L "GV_IL.AV16_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 321L 320L Or false false 319L 77L 21L false false false "" "" "" false "GV_IL.AV17_EN" "BOOL" "" "" "" 0 false false true true false 79L 0 false false "OR" "" "" "" "" 0 false false false false true 322L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 150L 149L "GV_IL.AV17_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 325L 324L Or false false 323L 80L 20L false false false "" "" "" false "GV_IL.AV18_EN" "BOOL" "" "" "" 0 false false true true false 82L 0 false false "OR" "" "" "" "" 0 false false false false true 326L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 190L 189L "GV_IL.AV18_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 329L 328L Or false false 327L 83L 18L false false false "" "" "" false "GV_IL.AV19_EN" "BOOL" "" "" "" 0 false false true true false 85L 0 false false "OR" "" "" "" "" 0 false false false false true 330L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 172L 171L "GV_IL.AV19_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 333L 332L Or false false 331L 86L 30L false false false "" "" "" false "GV_IL.AV20_EN" "BOOL" "" "" "" 0 false false true true false 88L 0 false false "OR" "" "" "" "" 0 false false false false true 334L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 152L 151L "GV_IL.AV20_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 337L 336L Or false false 335L 89L 29L false false false "" "" "" false "GV_IL.AV21_EN" "BOOL" "" "" "" 0 false false true true false 91L 0 false false "OR" "" "" "" "" 0 false false false false true 338L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 192L 191L "GV_IL.AV21_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 341L 340L Or false false 339L 92L 28L false false false "" "" "" false "GV_IL.AV22_EN" "BOOL" "" "" "" 0 false false true true false 94L 0 false false "OR" "" "" "" "" 0 false false false false true 342L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 174L 173L "GV_IL.AV22_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 345L 344L Or false false 343L 95L 27L false false false "" "" "" false "GV_IL.AV23_EN" "BOOL" "" "" "" 0 false false true true false 97L 0 false false "OR" "" "" "" "" 0 false false false false true 346L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 154L 153L "GV_IL.AV23_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 349L 348L Or false false 347L 98L 15L false false false "" "" "" false "GV_IL.AV24_EN" "BOOL" "" "" "" 0 false false true true false 100L 0 false false "OR" "" "" "" "" 0 false false false false true 350L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 194L 193L "GV_IL.AV24_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 353L 352L Or false false 351L 101L 17L false false false "" "" "" false "GV_IL.AV25_EN" "BOOL" "" "" "" 0 false false true true false 103L 0 false false "OR" "" "" "" "" 0 false false false false true 354L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 176L 175L "GV_IL.AV25_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 357L 356L Or false false 355L 104L 31L false false false "" "" "" false "GV_IL.AV26_EN" "BOOL" "" "" "" 0 false false true true false 106L 0 false false "OR" "" "" "" "" 0 false false false false true 358L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 178L 177L "GV_IL.AV26_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 361L 360L Or false false 359L 107L 32L false false false "" "" "" false "GV_IL.AV27_EN" "BOOL" "" "" "" 0 false false true true false 139L 0 false false "OR" "" "" "" "" 0 false false false false true 362L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 180L 179L "GV_IL.AV27_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 365L 364L Or false false 363L 140L 137L false false false "" "" "" false "GV_IL.AV101_EN" "BOOL" "" "" "" 0 false false true true false 113L 0 false false "OR" "" "" "" "" 0 false false false false true 366L 0 false false "AND" "" "" "" "" 0 false false false false true 368L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 196L 195L "GV_IL.SPLC_TO_PLC.DRY_PUMP_PW_EN" "BOOL" "" "" "" 0 true false false true false 235L 234L "GV. AI. TMP. ALARM" "BOOL" "" "" "" 1 true false false true false 407L 406L And false false 369L "GV_IL.AV101_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 371L 370L Or false false 367L 114L 111L false false false "" "" "" false "GV_IL.AV102_EN" "BOOL" "" "" "" 0 false false true true false 117L 0 false false "OR" "" "" "" "" 0 false false false false true 372L 0 false false "GV_IL.SPLC_TO_PLC.DRY_PUMP_PW_EN" "BOOL" "" "" "" 0 true false false true false 214L 213L "GV_IL.AV102_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 377L 376L Or false false 373L 118L 115L false false false "" "" "" false "GV_IL.AV103_EN" "BOOL" "" "" "" 0 false false true true false 121L 0 false false "OR" "" "" "" "" 0 false false false false true 378L 0 false false "AND" "" "" "" "" 0 false false false false true 380L 0 false false "GV_IL.SPLC_TO_PLC.EV3_EN" "BOOL" "" "" "" 0 true false false true false 200L 199L "GV_IL.SPLC_TO_PLC.EV4_EN" "BOOL" "" "" "" 0 true false false true false 218L 217L And false false 381L "GV_IL.AV103_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 383L 382L Or false false 379L 122L 119L false false false "" "" "" false "GV_IL.AV104_EN" "BOOL" "" "" "" 0 false false true true false 125L 0 false false "OR" "" "" "" "" 0 false false false false true 384L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_CM_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 245L 244L "GV_IL.AV104_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 389L 388L Or false false 385L 126L 123L false false false "" "" "" false "GV_IL.AV105_EN" "BOOL" "" "" "" 0 false false true true false 129L 0 false false "OR" "" "" "" "" 0 false false false false true 390L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_CM_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 249L 248L "GV_IL.AV105_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 395L 394L Or false false 391L 130L 127L false false false "" "" "" false "GV_IL.AV106_EN" "BOOL" "" "" "" 0 false false true true false 133L 0 false false "OR" "" "" "" "" 0 false false false false true 396L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_ACID_EXHAUST_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 253L 252L "GV_IL.AV106_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 401L 400L Or false false 397L 134L 131L false false false "" "" "" false "GV_IL.APC_EN" "BOOL" "" "" "" 0 false false true true false 238L 0 false false "OR" "" "" "" "" 0 false false false false true 402L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_APC_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 241L 240L "GV_IL.APC_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 405L 404L Or false false 403L 239L 236L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String