, ET=> ); IF TON_PrepareTransfer.Q THEN PM.INFO.Alarm.PrepareTransferTimerout:=TRUE; ELSE PM.INFO.Alarm.PrepareTransferTimerout:=FALSE; END_IF //TransferWafer TIMEOUT TON_TransferWafer(IN:=GV_IL.STATUS_TransferWafer , PT:= INT_TO_TIME(GV.PMConfig.TransferWaferTimeout)*1000, Q=> , ET=> ); IF TON_TransferWafer.Q THEN PM.INFO.Alarm.TransferWaferTimeout:=TRUE; ELSE PM.INFO.Alarm.TransferWaferTimeout:=FALSE; END_IF //OpenGasValve TIMEOUT TON_OpenGasValve(IN:=GV_IL.STATUS_OpenGasValve , PT:= INT_TO_TIME(GV.PMConfig.OpenGasValveTimeout)*1000, Q=> , ET=> ); IF TON_OpenGasValve.Q THEN PM.INFO.Alarm.OpenGasValveTimeout:=TRUE; ELSE PM.INFO.Alarm.OpenGasValveTimeout:=FALSE; END_IF //CloseGasValve TIMEOUT TON_CloseGasValve(IN:=GV_IL.STATUS_CloseGasValve , PT:= INT_TO_TIME(GV.PMConfig.CloseGasValveTimeout)*1000, Q=> , ET=> ); IF TON_CloseGasValve.Q THEN PM.INFO.Alarm.CloseGasValveTimeout:=TRUE; ELSE PM.INFO.Alarm.CloseGasValveTimeout:=FALSE; END_IF //OpenCloseSlitValve TIMEOUT TON_OpenCloseSlitValve(IN:=GV_IL.STATUS_OpenCloseSlitValve , PT:= INT_TO_TIME(GV.PMConfig.OpenCloseSlitValveTimeout)*1000, Q=> , ET=> ); IF TON_OpenCloseSlitValve.Q THEN PM.INFO.Alarm.OpenCloseSlitValveTimeout:=TRUE; ELSE PM.INFO.Alarm.OpenCloseSlitValveTimeout:=FALSE; END_IF //PRESSURE ALARM //PM.INFO.Alarm.PRESSURE:= //ALARM OR WARNING OCCUR GV.ALARM_OCC:= //PM.INFO.Alarm.PRESSURE PM.INFO.Alarm.MFC1 OR PM.INFO.Alarm.WALL_TEMP OR PM.INFO.Alarm.LID_TEMP OR PM.INFO.Alarm.STAGE_TEMP1 OR PM.INFO.Alarm.STAGE_TEMP2 OR PM.INFO.Alarm.STAGE_TEMP3 OR PM.INFO.Alarm.STAGE_TEMP4 //OR PM.INFO.Alarm.Gas1FlowPressureOutOfRange //OR PM.INFO.Alarm.Gas2FlowPressureOutOfRange //OR PM.INFO.Alarm.Gas3FlowPressureOutOfRange //OR PM.INFO.Alarm.Gas4FlowPressureOutOfRange //OR PM.INFO.Alarm.Gas5FlowPressureOutOfRange //OR PM.INFO.Alarm.Gas6FlowPressureOutOfRange //OR PM.INFO.Alarm.TurboN2PurgePressureOutOfRange //OR PM.INFO.Alarm.PrepareTransferTimerout //OR PM.INFO.Alarm.TransferWaferTimeout //OR PM.INFO.Alarm.OpenGasValveTimeout //OR PM.INFO.Alarm.CloseGasValveTimeout //OR PM.INFO.Alarm.OpenCloseSlitValveTimeout //OR PM.INFO.Alarm.ATMCheckTimeout //OR PM.INFO.Alarm.DRY_PUMP //OR PM.INFO.Alarm.PENDULUM_VALVE //OR PM.INFO.Alarm.TURBO_PUMP OR PM.INFO.Alarm.TOLERANCE_PRESSURE OR PM.INFO.Alarm.TOLERANCE_MFC1 OR PM.INFO.Alarm.TOLERANCE_WALL_TEMP OR PM.INFO.Alarm.TOLERANCE_LID_TEMP OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP1 OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP2 OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP3 OR PM.INFO.Alarm.TOLERANCE_STAGE_TEMP4 ; GV.WARNING_OCC:= //PM.INFO.Warning.PRESSURE PM.INFO.Warning.MFC1 OR PM.INFO.Warning.WALL_TEMP OR PM.INFO.Warning.LID_TEMP OR PM.INFO.Warning.STAGE_TEMP1 OR PM.INFO.Warning.STAGE_TEMP2 OR PM.INFO.Warning.STAGE_TEMP3 OR PM.INFO.Warning.STAGE_TEMP4 //OR PM.INFO.Warning.Gas1FlowPressureOutOfRange //OR PM.INFO.Warning.Gas2FlowPressureOutOfRange //OR PM.INFO.Warning.Gas3FlowPressureOutOfRange //OR PM.INFO.Warning.Gas4FlowPressureOutOfRange //OR PM.INFO.Warning.Gas5FlowPressureOutOfRange //OR PM.INFO.Warning.Gas6FlowPressureOutOfRange //OR PM.INFO.Warning.OpenCloseSlitValveTimeout OR PM.INFO.Warning.TOLERANCE_PRESSURE OR PM.INFO.Warning.TOLERANCE_MFC1 OR PM.INFO.Warning.TOLERANCE_WALL_TEMP OR PM.INFO.Warning.TOLERANCE_LID_TEMP OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP1 OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP2 OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP3 OR PM.INFO.Warning.TOLERANCE_STAGE_TEMP4 ; ]]> , WARNING=> ); RANGE_CHAMBER_HEATER2( ENABLE:= GV.ChamberHeater.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Chamber_Temp2_SV), PV:= REAL_TO_LREAL( GV.AI.Chamber_Temp2), RANGE_ALARM_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningTime.SV), ALARM=> , WARNING=> ); RANGE_CHAMBER_HEATER3( ENABLE:= GV.ChamberHeater.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Chamber_Temp3_SV), PV:= REAL_TO_LREAL( GV.AI.Chamber_Temp3), RANGE_ALARM_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.ChamberHeater.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.ChamberHeater.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.WALL_TEMP:= RANGE_CHAMBER_HEATER1.ALARM AND RANGE_CHAMBER_HEATER2.ALARM AND RANGE_CHAMBER_HEATER3.ALARM ; PM.INFO.Warning.WALL_TEMP:= RANGE_CHAMBER_HEATER1.WARNING AND RANGE_CHAMBER_HEATER2.WARNING AND RANGE_CHAMBER_HEATER3.WARNING ; //LID HEATER RANGE_LID_HEATER( ENABLE:= GV.LidHeater.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.LID_Temp_SV), PV:= REAL_TO_LREAL( GV.AI.Lid_Temp), RANGE_ALARM_H:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.LidHeater.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.LidHeater.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.LID_TEMP := RANGE_LID_HEATER.ALARM ; PM.INFO.Warning.LID_TEMP:= RANGE_LID_HEATER.WARNING; //STAGE HEATER RANGE_STAGE1( ENABLE:= GV.STAGE.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Stage_Temp1_SV), PV:= REAL_TO_LREAL( GV.AI.Stage_Temp1), RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.STAGE_TEMP1:=RANGE_STAGE1.ALARM; PM.INFO.Warning.STAGE_TEMP1:=RANGE_STAGE1.WARNING; RANGE_STAGE2( ENABLE:= GV.STAGE.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Stage_Temp2_SV), PV:= REAL_TO_LREAL( GV.AI.Stage_Temp2), RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.STAGE_TEMP2:=RANGE_STAGE2.ALARM; PM.INFO.Warning.STAGE_TEMP2:=RANGE_STAGE2.WARNING; RANGE_STAGE3( ENABLE:= GV.STAGE.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Stage_Temp3_SV), PV:= REAL_TO_LREAL( GV.AI.Stage_Temp3), RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.STAGE_TEMP3:=RANGE_STAGE3.ALARM; PM.INFO.Warning.STAGE_TEMP3:=RANGE_STAGE3.WARNING; RANGE_STAGE4( ENABLE:= GV.STAGE.HeaterTolerance_Enable, SV:= REAL_TO_LREAL(GV.AO.Stage_Temp4_SV), PV:= REAL_TO_LREAL( GV.AI.Stage_Temp4), RANGE_ALARM_H:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_ALARM_L:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmRange.SV), RANGE_WARNING_H:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), RANGE_WARNING_L:= ANY_TO_LREAL(GV.STAGE.HeaterWarningRange.SV), TIME_ALARM:= ANY_TO_LREAL(GV.STAGE.HeaterAlarmTime.SV), TIME_WARNING:= ANY_TO_LREAL(GV.STAGE.HeaterWarningTime.SV), ALARM=> , WARNING=> ); PM.INFO.Alarm.STAGE_TEMP4:=RANGE_STAGE4.ALARM; PM.INFO.Warning.STAGE_TEMP4:=RANGE_STAGE4.WARNING; ]]> , WARNING=> ); (* RANGE_MFC2( ENABLE:= GV.Mfcgas2.EnableAlarm AND GV.Mfcgas2.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC2_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC2_Flow), RANGE_ALARM_H:= GV.Mfcgas2.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas2.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas2.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas2.WarningRange.SV, TIME_ALARM:= GV.Mfcgas2.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas2.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC3( ENABLE:= GV.Mfcgas3.EnableAlarm AND GV.Mfcgas3.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC3_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC3_Flow), RANGE_ALARM_H:= GV.Mfcgas3.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas3.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas3.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas3.WarningRange.SV, TIME_ALARM:= GV.Mfcgas3.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas3.WarningTime.SV, ALARM=> , WARNING=> ); (* RANGE_MFC4( ENABLE:= GV.Mfcgas4.EnableAlarm AND GV.Mfcgas4.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC4_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC4_Flow), RANGE_ALARM_H:= GV.Mfcgas4.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas4.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas4.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas4.WarningRange.SV, TIME_ALARM:= GV.Mfcgas4.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas4.WarningTime.SV, ALARM=> , WARNING=> ); *) RANGE_MFC5( ENABLE:= GV.Mfcgas5.EnableAlarm AND GV.Mfcgas5.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC5_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC5_Flow), RANGE_ALARM_H:= GV.Mfcgas5.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas5.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas5.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas5.WarningRange.SV, TIME_ALARM:= GV.Mfcgas5.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas5.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC6( ENABLE:= GV.Mfcgas6.EnableAlarm AND GV.Mfcgas6.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC6_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC6_Flow), RANGE_ALARM_H:= GV.Mfcgas6.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas6.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas6.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas6.WarningRange.SV, TIME_ALARM:= GV.Mfcgas6.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas6.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC7( ENABLE:= GV.Mfcgas7.EnableAlarm AND GV.Mfcgas7.Enable, SV:= REAL_TO_LREAL(GV.AO.MFC7_Flow_Setpoint), PV:= REAL_TO_LREAL( GV.AI.MFC7_Flow), RANGE_ALARM_H:= GV.Mfcgas7.AlarmRange.SV, RANGE_ALARM_L:= GV.Mfcgas7.AlarmRange.SV, RANGE_WARNING_H:= GV.Mfcgas7.WarningRange.SV, RANGE_WARNING_L:= GV.Mfcgas7.WarningRange.SV, TIME_ALARM:= GV.Mfcgas7.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas7.WarningTime.SV, ALARM=> , WARNING=> ); *) (* RANGE_MFC8( ENABLE:= GV.Mfcgas8.EnableAlarm AND GV.Mfcgas8.Enable, PV:= REAL_TO_LREAL( GV.AI.MFC8_Flow), RANGE_ALARM_H:= GV.Mfcgas8.AlarmRange.MaxSV, RANGE_ALARM_L:= 0, RANGE_WARNING_H:= GV.Mfcgas8.WarningRange.MaxSV, RANGE_WARNING_L:= 0, TIME_ALARM:= GV.Mfcgas8.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas8.WarningTime.SV, ALARM=> , WARNING=> ); RANGE_MFC9( ENABLE:= GV.Mfcgas9.EnableAlarm AND GV.Mfcgas9.Enable, PV:= REAL_TO_LREAL( GV.AI.MFC9_Flow), RANGE_ALARM_H:= GV.Mfcgas9.AlarmRange.MaxSV, RANGE_ALARM_L:= 0, RANGE_WARNING_H:= GV.Mfcgas9.WarningRange.MaxSV, RANGE_WARNING_L:= 0, TIME_ALARM:= GV.Mfcgas9.AlarmTime.SV, TIME_WARNING:= GV.Mfcgas9.WarningTime.SV, ALARM=> , WARNING=> ); *) PM.Info.Alarm.MFC1:= RANGE_MFC1.ALARM; PM.INFO.warning.MFC1:= RANGE_MFC1.warning;]]> , WARNING=> ); (* RANGE_PG_PS2( ENABLE:=TRUE, SV:= 270 , PV:= GV.AI.PG_PS2_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS3( ENABLE:=TRUE, SV:= 270 , PV:= GV.AI.PG_PS3_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS4( ENABLE:=TRUE, SV:=25, PV:= GV.AI.PG_PS4_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS5( ENABLE:=TRUE, SV:= 270, PV:= GV.AI.PG_PS5_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS6( ENABLE:=TRUE, SV:=270, PV:= GV.AI.PG_PS6_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS7( ENABLE:=TRUE, PV:= GV.AI.PG_PS7_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS8( ENABLE:=TRUE, PV:= GV.AI.PG_PS8_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); RANGE_PG_PS9( ENABLE:=TRUE, PV:= GV.AI.PG_PS9_VALUE, RANGE_ALARM_H:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_ALARM_L:= GV.PMConfig.GasFlowPressureAlarmRange, RANGE_WARNING_H:= GV.PMConfig.GasFlowPressureWarningRange, RANGE_WARNING_L:= GV.PMConfig.GasFlowPressureWarningRange, TIME_ALARM:= GV.PMConfig.GasFlowPressureAlarmTime, TIME_WARNING:= GV.PMConfig.GasFlowPressureWarningTime, ALARM=> , WARNING=> ); *) PM.INFO.Alarm.Gas1FlowPressureOutOfRange:= RANGE_PG_PS1.ALARM; (* PM.INFO.Alarm.Gas2FlowPressureOutOfRange:= RANGE_PG_PS2.ALARM OR TRUE; PM.INFO.Alarm.Gas3FlowPressureOutOfRange:= RANGE_PG_PS3.ALARM OR TRUE; PM.INFO.Alarm.Gas4FlowPressureOutOfRange:= RANGE_PG_PS4.ALARM OR TRUE; PM.INFO.Alarm.Gas5FlowPressureOutOfRange:= RANGE_PG_PS5.ALARM OR TRUE; PM.INFO.Alarm.Gas6FlowPressureOutOfRange:= RANGE_PG_PS6.ALARM OR TRUE; //PM.INFO.Alarm.Gas7FlowPressureOutOfRange:= RANGE_PG_PS7.ALARM; //PM.INFO.Alarm.Gas8FlowPressureOutOfRange:= RANGE_PG_PS8.ALARM; //PM.INFO.Alarm.Gas9FlowPressureOutOfRange:= RANGE_PG_PS9.ALARM; *) PM.INFO.warning.Gas1FlowPressureOutOfRange:= RANGE_PG_PS1.warning; (* PM.INFO.warning.Gas2FlowPressureOutOfRange:= RANGE_PG_PS2.warning OR TRUE; PM.INFO.warning.Gas3FlowPressureOutOfRange:= RANGE_PG_PS3.warning OR TRUE; PM.INFO.warning.Gas4FlowPressureOutOfRange:= RANGE_PG_PS4.warning OR TRUE; PM.INFO.warning.Gas5FlowPressureOutOfRange:= RANGE_PG_PS5.warning OR TRUE; PM.INFO.warning.Gas6FlowPressureOutOfRange:= RANGE_PG_PS6.warning OR TRUE; //PM.INFO.warning.Gas7FlowPressureOutOfRange:= RANGE_PG_PS7.warning; //PM.INFO.warning.Gas8FlowPressureOutOfRange:= RANGE_PG_PS8.warning; //PM.INFO.warning.Gas9FlowPressureOutOfRange:= RANGE_PG_PS9.warning; *)]]> "" "Ld" false false false "" "" "" false "GV_IL.PLC_TO_SPLC.SPLC_ErrorAcknowledgement" "BOOL" "" "" "" 0 false false true true false 46L 0 false false "OR" "" "" "" "" 0 false false false false true 36L 0 false false "GV_IL.SPLC_TO_PLC.SPLC_Com_err" "BOOL" "" "" "" 0 true false false true false 39L 38L "GV_IL.SPLC_TO_PLC.SPLC_FB_Err" "BOOL" "" "" "" 0 true false false true false 41L 40L "GV_IL.SPLC_TO_PLC.Other_Err" "BOOL" "" "" "" 0 true false false true false 43L 42L "GV_IL.SPLC_manual_ErrorAck" "BOOL" "" "" "" 0 true false false true false 45L 44L Or false false 37L 47L 35L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.SPLC_Restart" "BOOL" "" "" "" 0 false false true false false 28L "GV_IL.PLC_TO_SPLC.SPLC_Run" "BOOL" "" "" "" 0 false false true true false 7L 0 false false "AND" "" "" "" "" 0 false false false false true 24L 0 false false "GV_IL.SPLC_TO_PLC.SPLC_Com_err" "BOOL" "" "" "" 1 true false false true false 20L 19L "GV_IL.SPLC_TO_PLC.SPLC_FB_Err" "BOOL" "" "" "" 1 true false false true false 16L 15L "GV_IL.SPLC_manual_ErrorAck" "BOOL" "" "" "" 1 true false false true false 27L 26L And false false 25L 8L 5L false false false "" "" "" false "PM.NDI.Lid_Closed" "BOOL" "" "" "" 0 false false true true false 33L 0 false false "GV_IL.SPLC_TO_PLC.Status_Lid" "BOOL" "" "" "" 0 true false false true false 32L 31L 34L 30L false false false "" "" "" false 29L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String "" "Ld" false false false "" "" "" false "GV_IL.PLC_TO_SPLC.TMP_Interlock_OK" "BOOL" "" "" "" 0 false false true true false 10L 0 false false "OR" "" "" "" "" 0 false false false false true 24L 0 false false "GV.AI.TMP.Alarm" "BOOL" "" "" "" 1 true false false true false 13L 12L "GV_IL.TMP_ALARM_Bypass" "BOOL" "" "" "" 0 true false false true false 27L 26L Or false false 25L 11L 2L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.PS1_Interlock_OK" "BOOL" "" "" "" 0 false false true true false 22L 0 false false "OR" "" "" "" "" 0 false false false false true 28L 0 false false "GV.NDI. PS1_Pressure_Switch" "BOOL" "" "" "" 1 true false false true false 21L 20L "GV_IL.PS1_ALM_Bypass" "BOOL" "" "" "" 0 true false false true false 31L 30L "ALWAYS_TRUE" "BOOL" "" "" "" 0 true false false true false 115L 114L Or false false 29L 23L 19L false false false "" "" "" false "GV_IL.HTR_APC_EN" "BOOL" "" "" "" 0 false false true true false 106L 0 false false "OR" "" "" "" "" 0 false false false false true 100L 0 false false "GV_IL.SPLC_TO_PLC.HTR_APC_EN" "BOOL" "" "" "" 0 true false false true false 103L 102L "GV_IL.HTR_APC_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 105L 104L Or false false 101L 107L 99L false false false "" "" "" false "GV_IL.HTR_CHAMBER_EN" "BOOL" "" "" "" 0 false false true true false 97L 0 false false "OR" "" "" "" "" 0 false false false false true 91L 0 false false "GV_IL.SPLC_TO_PLC.HTR_CHAMBER_EN" "BOOL" "" "" "" 0 true false false true false 94L 93L "GV_IL.HTR_CHAMBER_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 96L 95L Or false false 92L 98L 90L false false false "" "" "" false "GV_IL.HTR_FORLINE_EN" "BOOL" "" "" "" 0 false false true true false 88L 0 false false "OR" "" "" "" "" 0 false false false false true 82L 0 false false "GV_IL.SPLC_TO_PLC.HTR_FORLINE_EN" "BOOL" "" "" "" 0 true false false true false 85L 84L "GV_IL.HTR_FORLINE_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 87L 86L Or false false 83L 89L 81L false false false "" "" "" false "GV_IL.HTR_GAS_BOX_EN" "BOOL" "" "" "" 0 false false true true false 79L 0 false false "OR" "" "" "" "" 0 false false false false true 73L 0 false false "GV_IL.SPLC_TO_PLC.HTR_GAS_BOX" "BOOL" "" "" "" 0 true false false true false 76L 75L "GV_IL.HTR_GAS_BOX_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 78L 77L Or false false 74L 80L 72L false false false "" "" "" false "GV_IL.HTR_GATE_VALVE_EN" "BOOL" "" "" "" 0 false false true true false 70L 0 false false "OR" "" "" "" "" 0 false false false false true 64L 0 false false "GV_IL.SPLC_TO_PLC.HTR_GATE_VALVE" "BOOL" "" "" "" 0 true false false true false 67L 66L "GV_IL.HTR_GATE_VALVE_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 69L 68L Or false false 65L 71L 63L false false false "" "" "" false "GV_IL.HTR_LID_EN" "BOOL" "" "" "" 0 false false true true false 57L 0 false false "OR" "" "" "" "" 0 false false false false true 59L 0 false false "GV_IL.SPLC_TO_PLC.HTR_LID" "BOOL" "" "" "" 0 true false false true false 56L 55L "GV_IL.HTR_LID_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 62L 61L Or false false 60L 58L 1L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.VG101_LOWER_10Torr" "BOOL" "" "" "" 0 false false true true false 139L 0 false false "GE" "" "" "" "" 0 false false false false true 141L 0 true false 0 false false 134L "GV. AI. VG101_Pressure" "REAL" "" "" "" 0 false false false false false 136L 135L "10000" "INT" "" "" "" 0 false false false false false 138L 137L EN BOOL BOOL Ge true false false false 142L 140L 131L false false false "" "" "" false 130L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {5f9848d3-568d-4cc5-9e31-8e28e9607ff1} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String "" "Ld" false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Lid_Temp_OK" "BOOL" "" "" "" 0 false false true true false 11L 0 false false "LT" "" "" "" "" 0 false false false false true 229L 0 true false 0 false false 294L "GV.AI.Lid_Temp" "REAL" "" "" "" 0 false false false false false 7L 6L "210" "USINT" "" "" "" 0 false false false false false 9L 8L EN BOOL BOOL Lt true false false false 230L "GV_IL.Lid_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 185L 184L BoxShortCircuit 50L 12L 1L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Chamber_Temp_OK" "BOOL" "" "" "" 0 false false true true false 96L 0 false false "LT" "" "" "" "" 0 false false false false true 261L 0 true false "LT" "" "" "" "" 0 false false false false true 255L 0 true false "LT" "" "" "" "" 0 false false false false true 235L 0 true false 0 false false 293L "GV.AI.Chamber_Temp1" "REAL" "" "" "" 0 false false false false false 77L 76L "210" "USINT" "" "" "" 0 false false false false false 79L 78L EN BOOL BOOL Lt true false false false 236L "GV.AI.Chamber_Temp2" "REAL" "" "" "" 0 false false false false false 258L 257L "210" "USINT" "" "" "" 0 false false false false false 260L 259L EN BOOL BOOL Lt true false false false 256L "GV.AI.Chamber_Temp3" "REAL" "" "" "" 0 false false false false false 264L 263L "210" "USINT" "" "" "" 0 false false false false false 266L 265L EN BOOL BOOL Lt true false false false 262L "GV_IL.Chamber_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 189L 188L BoxShortCircuit 95L 97L 70L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.APC_Temp_OK" "BOOL" "" "" "" 0 false false true true false 139L 0 false false "LT" "" "" "" "" 0 false false false false true 227L 0 true false 0 false false 191L "GV.AI.APC_Temp" "REAL" "" "" "" 0 false false false false false 120L 119L "120" "INT" "" "" "" 0 false false false false false 122L 121L EN BOOL BOOL Lt true false false false 228L "GV_IL.APC_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 193L 192L BoxShortCircuit 194L 140L 113L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Gate_Valve_Temp_OK" "BOOL" "" "" "" 0 false false true true false 149L 0 false false "LT" "" "" "" "" 0 false false false false true 225L 0 true false 0 false false 195L "GV.AI.Gate_Valve_Temp" "REAL" "" "" "" 0 false false false false false 146L 145L "120" "INT" "" "" "" 0 false false false false false 148L 147L EN BOOL BOOL Lt true false false false 226L "GV_IL.Gate_Valve_Temp_OT_Bypass" "BOOL" "" "" "" 0 true false false false false 197L 196L BoxShortCircuit 198L 150L 141L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Gas_Line_Temp_OK" "BOOL" "" "" "" 0 false false true true false 177L 0 false false 0 false false 507L 178L 151L false false false "" "" "" false "GV_IL.PLC_TO_SPLC.Stage_Temp_OK" "BOOL" "" "" "" 0 false false true true false 503L 0 false false "LT" "" "" "" "" 0 false false false false true 496L 0 true false "LT" "" "" "" "" 0 false false false false true 490L 0 true false "LT" "" "" "" "" 0 false false false false true 374L 0 true false "LT" "" "" "" "" 0 false false false false true 380L 0 true false "LT" "" "" "" "" 0 false false false false true 348L 0 true false "LT" "" "" "" "" 0 false false false false true 350L 0 true false "LT" "" "" "" "" 0 false false false false true 296L 0 true false "LT" "" "" "" "" 0 false false false false true 298L 0 true false 0 false false 502L "GV.AI.Stage_Temp1" "REAL" "" "" "" 0 false false false false false 302L 301L "210" "USINT" "" "" "" 0 false false false false false 304L 303L EN BOOL BOOL Lt true false false false 299L "GV.AI.Stage_Temp1_Monitor" "REAL" "" "" "" 0 false false false false false 306L 305L "210" "USINT" "" "" "" 0 false false false false false 308L 307L EN BOOL BOOL Lt true false false false 297L "GV.AI.Stage_Temp2" "REAL" "" "" "" 0 false false false false false 353L 352L "210" "USINT" "" "" "" 0 false false false false false 355L 354L EN BOOL BOOL Lt true false false false 351L "GV.AI.Stage_Temp2_Monitor" "REAL" "" "" "" 0 false false false false false 357L 356L "210" "USINT" "" "" "" 0 false false false false false 359L 358L EN BOOL BOOL Lt true false false false 349L "GV.AI.Stage_Temp3" "REAL" "" "" "" 0 false false false false false 383L 382L "210" "USINT" "" "" "" 0 false false false false false 385L 384L EN BOOL BOOL Lt true false false false 381L "GV.AI.Stage_Temp3_Monitor" "REAL" "" "" "" 0 false false false false false 377L 376L "210" "USINT" "" "" "" 0 false false false false false 379L 378L EN BOOL BOOL Lt true false false false 375L "GV.AI.Stage_Temp4" "REAL" "" "" "" 0 false false false false false 493L 492L "210" "USINT" "" "" "" 0 false false false false false 495L 494L EN BOOL BOOL Lt true false false false 491L "GV.AI.Stage_Temp4_Monitor" "REAL" "" "" "" 0 false false false false false 499L 498L "210" "USINT" "" "" "" 0 false false false false false 501L 500L EN BOOL BOOL Lt true false false false 497L 504L 295L false false false "" "" "" false 69L false false false "" "" "" false 39L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {827b9ec2-2032-40da-9f4e-7670ca2d55a8} {5f9848d3-568d-4cc5-9e31-8e28e9607ff1} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {3b9474d0-c98b-4935-8ce5-65f06808350d} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String "" "Ld" false false false "" "" "" false "GV_IL.AV1_EN" "BOOL" "" "" "" 0 false false true true false 5L 0 false false "OR" "" "" "" "" 0 false false false false true 258L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 142L 141L "GV_IL.AV1_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 261L 260L Or false false 259L 4L 1L false false false "" "" "" false "GV_IL.AV2_EN" "BOOL" "" "" "" 0 false false true true false 34L 0 false false "OR" "" "" "" "" 0 false false false false true 262L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 182L 181L "GV_IL.AV2_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 265L 264L Or false false 263L 35L 16L false false false "" "" "" false "GV_IL.AV3_EN" "BOOL" "" "" "" 0 false false true true false 37L 0 false false "OR" "" "" "" "" 0 false false false false true 266L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 156L 155L "GV_IL.AV3_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 269L 268L Or false false 267L 38L 10L false false false "" "" "" false "GV_IL.AV4_EN" "BOOL" "" "" "" 0 false false true true false 40L 0 false false "OR" "" "" "" "" 0 false false false false true 270L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 144L 143L "GV_IL.AV4_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 273L 272L Or false false 271L 41L 9L false false false "" "" "" false "GV_IL.AV5_EN" "BOOL" "" "" "" 0 false false true true false 43L 0 false false "OR" "" "" "" "" 0 false false false false true 274L 0 false false "GV_IL.SPLC_TO_PLC.EV1_EN" "BOOL" "" "" "" 0 true false false true false 184L 183L "GV_IL.AV5_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 277L 276L Or false false 275L 44L 8L false false false "" "" "" false "GV_IL.AV26_EN" "BOOL" "" "" "" 0 false false true true false 106L 0 false false "OR" "" "" "" "" 0 false false false false true 358L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 178L 177L "GV_IL.AV26_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 361L 360L Or false false 359L 107L 32L false false false "" "" "" false "GV_IL.AV101_EN" "BOOL" "" "" "" 0 false false true true false 113L 0 false false "OR" "" "" "" "" 0 false false false false true 366L 0 false false "AND" "" "" "" "" 0 false false false false true 368L 0 false false "GV_IL.SPLC_TO_PLC.EV2_EN" "BOOL" "" "" "" 0 true false false true false 196L 195L "GV_IL.SPLC_TO_PLC.DRY_PUMP_PW_EN" "BOOL" "" "" "" 0 true false false true false 235L 234L "GV. AI. TMP. ALARM" "BOOL" "" "" "" 1 true false false true false 407L 406L And false false 369L "GV_IL.AV101_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 371L 370L Or false false 367L 114L 111L false false false "" "" "" false "GV_IL.AV102_EN" "BOOL" "" "" "" 0 false false true true false 117L 0 false false "OR" "" "" "" "" 0 false false false false true 372L 0 false false "GV_IL.SPLC_TO_PLC.DRY_PUMP_PW_EN" "BOOL" "" "" "" 0 true false false true false 214L 213L "GV_IL.AV102_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 377L 376L Or false false 373L 118L 115L false false false "" "" "" false "GV_IL.AV103_EN" "BOOL" "" "" "" 0 false false true true false 121L 0 false false "OR" "" "" "" "" 0 false false false false true 378L 0 false false "AND" "" "" "" "" 0 false false false false true 380L 0 false false "GV_IL.SPLC_TO_PLC.EV3_EN" "BOOL" "" "" "" 0 true false false true false 200L 199L "GV_IL.SPLC_TO_PLC.EV4_EN" "BOOL" "" "" "" 0 true false false true false 218L 217L And false false 381L "GV_IL.AV103_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 383L 382L Or false false 379L 122L 119L false false false "" "" "" false "GV_IL.AV104_EN" "BOOL" "" "" "" 0 false false true true false 125L 0 false false "OR" "" "" "" "" 0 false false false false true 384L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_CM_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 245L 244L "GV_IL.AV104_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 389L 388L Or false false 385L 126L 123L false false false "" "" "" false "GV_IL.AV105_EN" "BOOL" "" "" "" 0 false false true true false 129L 0 false false "OR" "" "" "" "" 0 false false false false true 390L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_CM_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 249L 248L "GV_IL.AV105_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 395L 394L Or false false 391L 130L 127L false false false "" "" "" false "GV_IL.AV106_EN" "BOOL" "" "" "" 0 false false true true false 133L 0 false false "OR" "" "" "" "" 0 false false false false true 396L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_ACID_EXHAUST_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 253L 252L "GV_IL.AV106_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 401L 400L Or false false 397L 134L 131L false false false "" "" "" false "GV_IL.APC_EN" "BOOL" "" "" "" 0 false false true true false 238L 0 false false "OR" "" "" "" "" 0 false false false false true 402L 0 false false "GV_IL.SPLC_TO_PLC.VALVE_APC_OPEN_EN" "BOOL" "" "" "" 0 true false false true false 241L 240L "GV_IL.APC_EN_Bypass" "BOOL" "" "" "" 0 true false false true false 405L 404L Or false false 403L 239L 236L 0 true System.Boolean {9873c309-1f09-4ebf-9078-42d8057ef11b} {acfc6f68-8e3a-4af5-bf81-3dd512095a46} {9de7f100-1b87-424c-a62e-45b0cfc85ed2} {668066f2-6069-46b3-8962-8db8d13d7db2} System.Int32 System.Int64 {d9a99d73-b633-47db-b876-a752acb25871} {25e509de-33d4-4447-93f8-c9e4ea381c8b} {c9b2f165-48a2-4a45-8326-3952d8a3d708} {bffb3c53-f105-4e85-aba2-e30df579d75f} {f40d3e09-c02c-4522-a88c-dac23558cfc4} {71496971-9e0c-4677-a832-b9583b571130} System.String