ST_LibVersion288iMajorUINT160iMinorUINT1616iBuildUINT1632iRevisionUINT1648nFlagsDWORD3264sVersionSTRING(23)19296ST_CTRL_CYCLE_TIME_INTERPRETATION128bInterpretCycleTimeAsTicksBOOL80fBaseTimeLREAL6464hideE_WATCHDOG_TIME_CONFIG16INTeWATCHDOG_TIME_DISABLED0eWATCHDOG_TIME_SECONDS1eWATCHDOG_TIME_MINUTES2TcEventSeverity16INT01234plcAttribute_qualified_onlyplcAttribute_strictTcEventEntryFlags8BYTE0#x1plcAttribute_qualified_onlyTcEventEntry192uuidEventClassGUID1280nEventIdUDINT32128eSeverityTcEventSeverity16160eFlagsTcEventEntryFlags8176UDINT (81..10000)32UDINTLowerBorder81UpperBorder10000E_S_UPS_State16INTeSUPS_PowerOK0eSUPS_PowerFailure1eSUPS_WritePersistentData2eSUPS_QuickShutdown3eSUPS_WaitForRecover4eSUPS_WaitForPowerOFF5LstPressure1456ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656PressureUnitModeSTRING(80)648672StartValueINT161328StartValueWarningRangeINT161344StartValueAlarmRangeINT161360ValvePositionPresetINT161376EnableRampBOOL81392HoldTimeINT161408RampTimeINT161424TargetValueINT161440LstGas1104ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656Gas1INT16672Gas1WarningRangeINT16688Gas1AlarmRangeINT16704Gas2INT16720Gas2WarningRangeINT16736Gas2AlarmRangeINT16752Gas3INT16768Gas3WarningRangeINT16784Gas3AlarmRangeINT16800Gas4INT16816Gas4WarningRangeINT16832Gas4AlarmRangeINT16848Gas5INT16864Gas5WarningRangeINT16880Gas5AlarmRangeINT16896Gas6INT16912Gas6WarningRangeINT16928Gas6AlarmRangeINT16944Gas7INT16960Gas7WarningRangeINT16976Gas7AlarmRangeINT16992Gas8INT161008Gas8WarningRangeINT161024Gas8AlarmRangeINT161040Gas9INT161056Gas9WarningRangeINT161072Gas9AlarmRangeINT161088LstHeater960ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656WallTempINT16672WallTempWaningRangeINT16688WallTempAlarmRangeINT16704LidTempINT16720LidTempWaningRangeINT16736LidTempAlarmRangeINT16752StageTemp1INT16768StageTemp1WaningRangeINT16784StageTemp1AlarmRangeINT16800StageTemp2INT16816StageTemp2WaningRangeINT16832StageTemp2AlarmRangeINT16848StageTemp3INT16864StageTemp3WaningRangeINT16880StageTemp3AlarmRangeINT16896StageTemp4INT16912StageTemp4WaningRangeINT16928StageTemp4AlarmRangeINT16944Lst3520PressureLstPressure14560GASLstGas11041456HeaterLstHeater9602560RecipeEachStep4304StepNoINT160CompletionSTRING(80)64816StepTimeINT16672AddTimeINT16688CycleStartBOOL8704CycleEndBOOL8712CycleNumberINT16720Lifter_UpBOOL8736AdjustTargetStepNoINT16752Lifter_DownBOOL8768LstUnitLst3520784TON256INBOOL864ItemTypeInputPTTIME3296ItemTypeInputQBOOL8128ItemTypeOutputETTIME32160ItemTypeOutputMBOOL8192StartTimeTIME32224PouTypeFunctionBlockTolerance2688ENABLEBOOL864ItemTypeInputSTEP_TYPESTRING(80)64872ItemTypeInputSTEP_TIMEINT16720ItemTypeInputTOL_VBOOL8736ItemTypeInputTOL_PBOOL8744ItemTypeInputSVINT16752ItemTypeInputPVREAL32768ItemTypeInputWARNING_RANGEINT16800ItemTypeInputALARM_RANGEINT16816ItemTypeInputDELAY_TIMEINT16832ItemTypeInputSTABLE_TIMEINT16848ItemTypeInputRSTBOOL8864ItemTypeInputSTU_WARNINGBOOL8872ItemTypeOutputSTU_ALARMBOOL8880ItemTypeOutputSTABLE_DONEBOOL8888ItemTypeOutputSV_SUB_WARNING_RANGEINT16896SV_ADD_WARNING_RANGEINT16912SV_DIV_WARNING_RANGEINT16928SV_MUL_WARNING_RANGEINT16944SV_SUB_ALARM_RANGEINT16960SV_ADD_ALARM_RANGEINT16976SV_DIV_ALARM_RANGEINT16992SV_MUL_ALARM_RANGEINT161008STU_WARNING_VBOOL81024STU_WARNING_PBOOL81032STU_ALARM_VBOOL81040STU_ALARM_PBOOL81048TON_DELAY_TIMETON2561088TON_DELAY_TIME_PTINT161344TON_ALARM_PTON2561408TON_ALARM_VTON2561664TON_WARNING_PTON2561920TON_WARNING_VTON2562176TON_STABLETON2562432PouTypeFunctionBlockR_TRIG128CLKBOOL864ItemTypeInputQBOOL872ItemTypeOutputMBOOL880conditionalshowPouTypeFunctionBlockconditionalshow_all_localsPROCESS41600ENABLEBOOL864ItemTypeInputNEXTSTEP_ENBOOL872ItemTypeInputAlarm_RSTBOOL880ItemTypeInputPMStableTimeINT1696ItemTypeInputSTEP_DATARecipeEachStep4304112ItemTypeInputAPC_PRESSUREREAL324416ItemTypeOutputAPC_POSITIONREAL324448ItemTypeOutputAPC_CONTROL_MODESINT84480ItemTypeOutputMFC1_SVREAL324512ItemTypeOutputMFC2_SVREAL324544ItemTypeOutputMFC3_SVREAL324576ItemTypeOutputMFC4_SVREAL324608ItemTypeOutputMFC5_SVREAL324640ItemTypeOutputMFC6_SVREAL324672ItemTypeOutputMFC7_SVREAL324704ItemTypeOutputMFC8_SVREAL324736ItemTypeOutputMFC9_SVREAL324768ItemTypeOutputWALL_TEMPREAL324800ItemTypeOutputLID_TEMPREAL324832ItemTypeOutputSTAGE_TEMP1REAL324864ItemTypeOutputSTAGE_TEMP2REAL324896ItemTypeOutputSTAGE_TEMP3REAL324928ItemTypeOutputSTAGE_TEMP4REAL324960ItemTypeOutputSTEP_TIME_OUTBOOL84992ItemTypeOutputSTEP_ERRBOOL85000ItemTypeOutputNEXTSTEPBOOL85008ItemTypeOutputPRESSURE_WARNINGBOOL85016ItemTypeOutputPRESSURE_ALARMBOOL85024ItemTypeOutputMFC1_WARNINGBOOL85032ItemTypeOutputMFC1_AlarmBOOL85040ItemTypeOutputMFC2_WARNINGBOOL85048ItemTypeOutputMFC2_AlarmBOOL85056ItemTypeOutputMFC3_WARNINGBOOL85064ItemTypeOutputMFC3_AlarmBOOL85072ItemTypeOutputMFC4_WARNINGBOOL85080ItemTypeOutputMFC4_AlarmBOOL85088ItemTypeOutputMFC5_WARNINGBOOL85096ItemTypeOutputMFC5_AlarmBOOL85104ItemTypeOutputMFC6_WARNINGBOOL85112ItemTypeOutputMFC6_AlarmBOOL85120ItemTypeOutputMFC7_WARNINGBOOL85128ItemTypeOutputMFC7_AlarmBOOL85136ItemTypeOutputMFC8_WARNINGBOOL85144ItemTypeOutputMFC8_AlarmBOOL85152ItemTypeOutputMFC9_WARNINGBOOL85160ItemTypeOutputMFC9_AlarmBOOL85168ItemTypeOutputWALL_TEMP_WARNINGBOOL85176ItemTypeOutputWALL_TEMP_AlarmBOOL85184ItemTypeOutputLID_TEMP_WARNINGBOOL85192ItemTypeOutputLID_TEMP_AlarmBOOL85200ItemTypeOutputSTAGE_TEMP1_WARNINGBOOL85208ItemTypeOutputSTAGE_TEMP1_AlarmBOOL85216ItemTypeOutputSTAGE_TEMP2_WARNINGBOOL85224ItemTypeOutputSTAGE_TEMP2_AlarmBOOL85232ItemTypeOutputSTAGE_TEMP3_WARNINGBOOL85240ItemTypeOutputSTAGE_TEMP3_AlarmBOOL85248ItemTypeOutputSTAGE_TEMP4_WARNINGBOOL85256ItemTypeOutputSTAGE_TEMP4_AlarmBOOL85264ItemTypeOutputSTEP_TIMETON2565312STEP_TIME_DONEBOOL85568COMPLETIONINT165584TOL_PRESSURE_PERCENTTolerance26885632TOL_PRESSURE_VALUE_ENBOOL88320TOL_PRESSURE_PERCENT_ENBOOL88328TOL_MFC1Tolerance26888384TOL_MFC2Tolerance268811072TOL_MFC3Tolerance268813760TOL_MFC5Tolerance268816448TOL_MFC6Tolerance268819136TOL_MFC7Tolerance268821824TOL_MFC_VALUE_ENBOOL824512TOL_MFC_PERCENT_ENBOOL824520TOL_WALL_TEMPTolerance268824576TOL_LID_TEMPTolerance268827264TOL_STAGE_TEMP1Tolerance268829952TOL_STAGE_TEMP2Tolerance268832640TOL_STAGE_TEMP3Tolerance268835328TOL_STAGE_TEMP4Tolerance268838016TOL_HEATER_VALUE_ENBOOL840704TOL_HEATER_PERCENT_ENBOOL840712TON_STEP_TIMETON25640768TON_STEP_TIME_ENBOOL841024WARNING_OCCBOOL841032ALARM_OCCBOOL841040iINT1641056STABLE_DONEBOOL841072EN_TRIGR_TRIG12841088TON_STABLE_PROCESSTON25641216CHAMBER_TEMP_MIN_VALUEREAL3241472STAGE_EDGE_TEMP_MIN_VALUEREAL3241504STAGE_CENTER_TEMP_MIN_VALUEREAL3241536PouTypeFunctionBlockT_AmsNetID192STRING(23)E_S_UPS_Mode16INTeSUPS_WrPersistData_Shutdown0eSUPS_WrPersistData_NoShutdown1eSUPS_ImmediateShutdown2eSUPS_CheckPowerStatus3E_PersistentMode16INTSPDM_2PASS0SPDM_VAR_BOOST1T_U64KAFFINITY64lowerDWORD3200higherDWORD32320conditionalshowT_AmsPort16UINTADSRDWRTEX1792NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputIDXGRPUDINT32288ItemTypeInputIDXOFFSUDINT32320ItemTypeInputWRITELENUDINT32352ItemTypeInputREADLENUDINT32384ItemTypeInputSRCADDRPVOID64448ItemTypeInputTcIgnorePersistentDESTADDRPVOID64512ItemTypeInputTcIgnorePersistentWRTRDBOOL8576ItemTypeInputTMOUTTIME326085000ItemTypeInputBUSYBOOL8640ItemTypeOutputERRBOOL8648ItemTypeOutputERRIDUDINT32672ItemTypeOutputCOUNT_RUDINT32704ItemTypeOutputPouTypeFunctionBlockhide_all_localsST_AdsBaDevApiIoCtlModifier128affinityT_U64KAFFINITY640.lower0.higher0flagsDWORD3264rsrvDWORD3296conditionalshowST_AdsBaDevApiHead192indexGroupUDINT320indexOffsetUDINT3232modifierST_AdsBaDevApiIoCtlModifier12864conditionalshowST_AdsBaDevApiReq8416headST_AdsBaDevApiHead1920inDataBYTE010258200192conditionalshowFB_BaDeviceIoControl11200sNetIDT_AmsNetID19264ItemTypeInputaffinityT_U64KAFFINITY64256.lower0.higher0ItemTypeInputnModifierUDINT323200ItemTypeInputnIdxGrpUDINT32352ItemTypeInputnIdxOffsUDINT32384ItemTypeInputcbWriteLenUDINT32416ItemTypeInputcbReadLenUDINT32448ItemTypeInputpWriteBuffPVOID64512ItemTypeInputpReadBuffPVOID64576ItemTypeInputbExecuteBOOL8640ItemTypeInputtTimeoutTIME326725000ItemTypeInputbBusyBOOL8704ItemTypeOutputbErrorBOOL8712ItemTypeOutputnErrIDUDINT32736ItemTypeOutputcbReadUDINT32768ItemTypeOutputfbRWADSRDWRTEX1792832.PORT10000.IDXGRP1100.IDXOFFS0reqST_AdsBaDevApiReq84162624stateBYTE811040rtrigR_TRIG12811072PouTypeFunctionBlockhideFB_BaGenGetVersion11840sNetIDT_AmsNetID19264ItemTypeInputbExecuteBOOL8256ItemTypeInputtTimeoutTIME322885000ItemTypeInputbBusyBOOL8320ItemTypeOutputbErrorBOOL8328ItemTypeOutputnErrIDUDINT32352ItemTypeOutputnVersionBYTE8384ItemTypeOutputnRevisionBYTE8392ItemTypeOutputnBuildWORD16400ItemTypeOutputfbCtrlFB_BaDeviceIoControl11200448.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp0.nIdxOffs0rtrigR_TRIG12811648stateBYTE811776rspDWORD3211808PouTypeFunctionBlockhideADSWRITE1344NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputIDXGRPUDINT32288ItemTypeInputIDXOFFSUDINT32320ItemTypeInputLENUDINT32352ItemTypeInputSRCADDRPVOID64384ItemTypeInputTcIgnorePersistentWRITEBOOL8448ItemTypeInputTMOUTTIME324805000ItemTypeInputBUSYBOOL8512ItemTypeOutputERRBOOL8520ItemTypeOutputERRIDUDINT32544ItemTypeOutputPouTypeFunctionBlockhide_all_localsFB_WritePersistentData1728NETIDT_AmsNetID19264ItemTypeInputPORTUINT16256ItemTypeInputSTARTBOOL8272ItemTypeInputTMOUTTIME322885000ItemTypeInputMODEE_PersistentMode16320E_PersistentMode.SPDM_2PASSItemTypeInputBUSYBOOL8336ItemTypeOutputERRBOOL8344ItemTypeOutputERRIDUDINT32352ItemTypeOutputfbAdsWriteADSWRITE1344384.IDXGRP139460625.IDXOFFS0conditionalshowPouTypeFunctionBlockconditionalshow_all_localsADSWRTCTL1344NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputADSSTATEUINT16272ItemTypeInputDEVSTATEUINT16288ItemTypeInputLENUDINT32320ItemTypeInputSRCADDRPVOID64384ItemTypeInputTcIgnorePersistentWRITEBOOL8448ItemTypeInputTMOUTTIME324805000ItemTypeInputBUSYBOOL8512ItemTypeOutputERRBOOL8520ItemTypeOutputERRIDUDINT32544ItemTypeOutputPouTypeFunctionBlockhide_all_localsFB_NT_QuickShutdown1920NETIDT_AmsNetID19264ItemTypeInputSTARTBOOL8256ItemTypeInputTMOUTTIME322885000ItemTypeInputBUSYBOOL8320ItemTypeOutputERRBOOL8328ItemTypeOutputERRIDUDINT32352ItemTypeOutputADSWRTCTL1ADSWRTCTL1344384RisingEdgeR_TRIG1281728DELAYDWORD3218564294967295PouTypeFunctionBlockconditionalshowST_WD_GPIO_InfoEx192nTypeUINT160nLengthUINT1616nFlagsWORD1632nReserved2UINT1648nAddressDWORD3264nReserved3DWORD3296nBitmaskDWORD32128nReserved4DWORD32160FB_S_UPS_BAPI74624sNetIDT_AmsNetID19264ItemTypeInputiPLCPortUINT16256ItemTypeInputtTimeoutTIME322885000ItemTypeInputeUpsModeE_S_UPS_Mode16320E_S_UPS_Mode.eSUPS_WrPersistData_ShutdownItemTypeInputePersistentModeE_PersistentMode16336E_PersistentMode.SPDM_2PASSItemTypeInputtRecoverTimeTIME3235210000ItemTypeInputbPowerFailDetectBOOL8384ItemTypeOutputeStateE_S_UPS_State16400E_S_UPS_State.eSUPS_PowerOKItemTypeOutputnCapacityBYTE84160ItemTypeOutputbBusyBOOL8424ItemTypeOutputbErrorBOOL8432ItemTypeOutputnErrIDUDINT32448ItemTypeOutputfbSUpsGetGpioInfoFB_BaDeviceIoControl11200512.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs161conditionalshownSUpsGetGpioInfoDWORD3211712conditionalshownGpioStateINT1611744conditionalshowfbSUpsGetStateFB_BaDeviceIoControl1120011776.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs1conditionalshownCapacityRspBYTE822976conditionalshowbChargingBOOL822984conditionalshowbDischargingBOOL822992conditionalshownGetStateINT1623008conditionalshownUpsStateINT1623024conditionalshowfbUpsStateTimerTON25623040.INtrueconditionalshowfbStartupTimerTON25623296.INtrue.PT0conditionalshownInitStateINT1623552conditionalshowdxValueDWORD3223584conditionalshowdxStatusDWORD3223616conditionalshowdxBitMaskDWORD3223648conditionalshownBitNoBYTE823680conditionalshowbBitLevelBOOL823688conditionalshowbStatusBOOL823696conditionalshowbLowActiveBOOL823704conditionalshowbHighActiveBOOL823712conditionalshowbOldSupsVersionBOOL823720trueconditionalshowfbSUpsEnableFB_BaDeviceIoControl1120023744.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs0conditionalshowbSUpsBOOL834944trueconditionalshowbSUpsEnableBOOL834952trueconditionalshownEnableStateINT1634960conditionalshowbEnableNotSupportedBOOL834976conditionalshowfbSUpsStatusFB_BaDeviceIoControl1120035008.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs1conditionalshownSUpsStatusBYTE8462080conditionalshowbSUpsStatusBOOL846216trueconditionalshowfbSUpsGetRevisionFB_BaDeviceIoControl1120046272.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs2conditionalshownSUpsVersionDataBYTE032457472conditionalshowbSUpsGetRevisionBOOL857496trueconditionalshowsSupsVersionSTRING(15)12857504conditionalshownRevisionStateINT1657632conditionalshowfbBaGenGetVersionFB_BaGenGetVersion1184057664conditionalshowbBaGenGetVersionBOOL869504trueconditionalshownVersionBYTE869512conditionalshownRevisionBYTE869520conditionalshownBuildWORD1669536conditionalshowsBaVersionSTRING(15)12869552conditionalshowbOldBaVersionBOOL869680trueconditionalshowbPowerFailDetectPrevBOOL869688conditionalshowbPowerOKInFirstCycleBOOL869696conditionalshowfbWritePersistentDataFB_WritePersistentData172869760conditionalshowfbNT_QuickShutdownFB_NT_QuickShutdown192071488conditionalshowWaitForOffTimerTON25673408conditionalshowbFirstCycleBOOL873664trueconditionalshowpAddress1BYTE6473728conditionalshowdxValue1BYTE873792conditionalshowdxBitMask1BYTE873800conditionalshowpAddress2WORD6473856conditionalshowdxValue2WORD1673920conditionalshowdxBitMask2WORD1673936conditionalshowpAddress4DWORD6473984conditionalshowdxValue4DWORD3274048conditionalshowdxBitMask4DWORD3274080conditionalshowpAddress8LWORD6474112conditionalshowdxValue8LWORD6474176conditionalshowdxBitMask8LWORD6474240conditionalshowbUseInfoBOOL874304TcPersistentconditionalshownIoAddrUDINT3274336TcPersistentconditionalshownOffsetBYTE874368TcPersistentconditionalshownParamsBYTE874376TcPersistentconditionalshowbUseInfoExBOOL874384TcPersistentconditionalshowstGpioInfoExST_WD_GPIO_InfoEx19274400TcPersistentconditionalshowPouTypeFunctionBlockconditionalshow_all_localsRANGEJD1280ENABLEBOOL864ItemTypeInputSVLREAL64128ItemTypeInputPVLREAL64192ItemTypeInputRANGE_ALARM_HLREAL64256ItemTypeInputRANGE_ALARM_LLREAL64320ItemTypeInputRANGE_WARNING_HLREAL64384ItemTypeInputRANGE_WARNING_LLREAL64448ItemTypeInputTIME_ALARMLREAL64512ItemTypeInputTIME_WARNINGLREAL64576ItemTypeInputALARMBOOL8640ItemTypeOutputWARNINGBOOL8648ItemTypeOutputTON_ALARMTON256704TON_WARNINGTON256960STATUS_ALARMBOOL81216STATUS_WARNINGBOOL81224PouTypeFunctionBlockSTR_EX260_SEC32AUSINT80BUSINT88CUSINT816DUSINT824TMP_OUT8Turbo_Start_StopBIT10Turbo_Reset_AlarmBIT11Turbo_Low_SpeedBIT12E_CTRL_MODE16INTeCTRL_MODE_IDLE0eCTRL_MODE_PASSIVE1eCTRL_MODE_ACTIVE2eCTRL_MODE_RESET3eCTRL_MODE_MANUAL4eCTRL_MODE_TUNE5eCTRL_MODE_SELFTEST6eCTRL_MODE_SYNC_MOVEMENT7eCTRL_MODE_FREEZE8E_CTRL_STATE16INTeCTRL_STATE_IDLE0eCTRL_STATE_PASSIVE1eCTRL_STATE_ACTIVE2eCTRL_STATE_RESET3eCTRL_STATE_MANUAL4eCTRL_STATE_TUNING5eCTRL_STATE_TUNED6eCTRL_STATE_SELFTEST7eCTRL_STATE_ERROR8eCTRL_STATE_SYNC_MOVEMENT9eCTRL_STATE_FREEZE10E_CTRL_ERRORCODES16INTeCTRL_ERROR_NOERROR0eCTRL_ERROR_INVALIDTASKCYCLETIME1eCTRL_ERROR_INVALIDCTRLCYCLETIME2eCTRL_ERROR_INVALIDPARAM3eCTRL_ERROR_INVALIDPARAM_Tv4eCTRL_ERROR_INVALIDPARAM_Td5eCTRL_ERROR_INVALIDPARAM_Tn6eCTRL_ERROR_INVALIDPARAM_Ti7eCTRL_ERROR_INVALIDPARAM_fHystereisisRange8eCTRL_ERROR_INVALIDPARAM_fPosOutOn_Off9eCTRL_ERROR_INVALIDPARAM_fNegOutOn_Off10eCTRL_ERROR_INVALIDPARAM_TableDescription11eCTRL_ERROR_INVALIDPARAM_TableData12eCTRL_ERROR_INVALIDPARAM_DataTableADR13eCTRL_ERROR_INVALIDPARAM_T014eCTRL_ERROR_INVALIDPARAM_T115eCTRL_ERROR_INVALIDPARAM_T216eCTRL_ERROR_INVALIDPARAM_T317eCTRL_ERROR_INVALIDPARAM_Theta18eCTRL_ERROR_INVALIDPARAM_nOrder19eCTRL_ERROR_INVALIDPARAM_Tt20eCTRL_ERROR_INVALIDPARAM_Tu21eCTRL_ERROR_INVALIDPARAM_Tg22eCTRL_ERROR_INVALIDPARAM_infinite_slope23eCTRL_ERROR_INVALIDPARAM_fMaxIsLessThanfMin24eCTRL_ERROR_INVALIDPARAM_fOutMaxLimitIsLessThanfOutMinLimit25eCTRL_ERROR_INVALIDPARAM_fOuterWindow26eCTRL_ERROR_INVALIDPARAM_fInnerWindow27eCTRL_ERROR_INVALIDPARAM_fOuterWindowIsLessThanfInnerWindow28eCTRL_ERROR_INVALIDPARAM_fDeadBandInput29eCTRL_ERROR_INVALIDPARAM_fDeadBandOutput30eCTRL_ERROR_INVALIDPARAM_PWM_Cycletime31eCTRL_ERROR_INVALIDPARAM_no_Parameterset32eCTRL_ERROR_INVALIDPARAM_fOutOn33eCTRL_ERROR_INVALIDPARAM_fOutOff34eCTRL_ERROR_INVALIDPARAM_fGain35eCTRL_ERROR_INVALIDPARAM_fOffset36eCTRL_ERROR_MODE_NOT_SUPPORTED37eCTRL_ERROR_INVALIDPARAM_Tv_heating38eCTRL_ERROR_INVALIDPARAM_Td_heating39eCTRL_ERROR_INVALIDPARAM_Tn_heating40eCTRL_ERROR_INVALIDPARAM_Tv_cooling41eCTRL_ERROR_INVALIDPARAM_Td_cooling42eCTRL_ERROR_INVALIDPARAM_Tn_cooling43eCTRL_ERROR_RANGE_NOT_SUPPORTED44eCTRL_ERROR_INVALIDPARAM_nParameterChangeCycleTicks45eCTRL_ERROR_ParameterEstimationFailed46eCTRL_ERROR_NoiseLevelToHigh47eCTRL_ERROR_INTERNAL_ERROR_048eCTRL_ERROR_INTERNAL_ERROR_149eCTRL_ERROR_INTERNAL_ERROR_250eCTRL_ERROR_INTERNAL_ERROR_351eCTRL_ERROR_INTERNAL_ERROR_452eCTRL_ERROR_INTERNAL_ERROR_553eCTRL_ERROR_INTERNAL_ERROR_654eCTRL_ERROR_INTERNAL_ERROR_755eCTRL_ERROR_INTERNAL_ERROR_856eCTRL_ERROR_INTERNAL_ERROR_957eCTRL_ERROR_INVALIDPARAM_WorkArrayADR58eCTRL_ERROR_INVALIDPARAM_tOnTime59eCTRL_ERROR_INVALIDPARAM_tOffTime60eCTRL_ERROR_INVALIDPARAM_nMaxMovingPulses61eCTRL_ERROR_INVALIDPARAM_nAdditionalPulsesAtLimits62eCTRL_ERROR_INVALIDPARAM_fCtrlOutMax_Min63eCTRL_ERROR_INVALIDPARAM_fDeltaMax64eCTRL_ERROR_INVALIDPARAM_tMovingTime65eCTRL_ERROR_INVALIDPARAM_tDeadTime66eCTRL_ERROR_INVALIDPARAM_tAdditionalMoveTimeAtLimits67eCTRL_ERROR_INVALIDPARAM_fThreshold68eCTRL_ERROR_MEMCPY69eCTRL_ERROR_MEMSET70eCTRL_ERROR_INVALIDPARAM_nNumberOfColumns71eCTRL_ERROR_FileClose72eCTRL_ERROR_FileOpen73eCTRL_ERROR_FileWrite74eCTRL_ERROR_INVALIDPARAM_fVeloNeg75eCTRL_ERROR_INVALIDPARAM_fVeloPos76eCTRL_ERROR_INVALIDPARAM_DeadBandInput77eCTRL_ERROR_INVALIDPARAM_DeadBandOutput78eCTRL_ERROR_INVALIDPARAM_CycleDuration79eCTRL_ERROR_INVALIDPARAM_tStart80eCTRL_ERROR_INVALIDPARAM_StepHeigthTuningToLow81eCTRL_ERROR_INVALIDPARAM_fMinLimitIsLessThanZero82eCTRL_ERROR_INVALIDPARAM_fMaxLimitIsGreaterThan10083eCTRL_ERROR_INVALIDPARAM_fStepSize84eCTRL_ERROR_INVALIDPARAM_fOkRangeIsLessOrEqualZero85eCTRL_ERROR_INVALIDPARAM_fForceRangeIsLessOrEqualfOkRange86eCTRL_ERROR_INVALIDPWMPeriod87eCTRL_ERROR_INVALIDPARAM_tMinimumPulseTime88eCTRL_ERROR_FileDelete89eCTRL_ERROR_INVALIDPARAM_nNumberOfPwmOutputs90eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_SIZEOF91eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_SIZEOF92eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_SIZEOF93eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_SIZEOF94eCTRL_ERROR_SIZEOF95eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction96eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_SIZEOF97eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_SIZEOF98eCTRL_ERROR_INVALIDPARAM_a_n_IsZero99eCTRL_ERROR_INVALIDPARAM_WorkArraySIZEOF100eCTRL_ERROR_INVALIDPARAM_MOVINGRANGE_MIN_MAX101eCTRL_ERROR_INVALIDPARAM_MOVINGTIME102eCTRL_ERROR_INVALIDPARAM_DEADTIME103eCTRL_ERROR_INVALIDPARAM_fMinLimitIsGreaterThanfMaxLimit104eCTRL_ERROR_INVALIDPARAM_DataTableSIZEOF105eCTRL_ERROR_INVALIDPARAM_OutputVectorDescription106eCTRL_ERROR_TaskCycleTimeIsLessThanOneMillisecond107eCTRL_ERROR_INVALIDPARAM_nMinMovingPulses108eCTRL_ERROR_INVALIDPARAM_fAcceleration109eCTRL_ERROR_INVALIDPARAM_fDeceleration110eCTRL_ERROR_INVALIDPARAM_StartAndTargetPos111eCTRL_ERROR_INVALIDPARAM_fVelocity112eCTRL_ERROR_INVALIDPARAM_fTargetPos113eCTRL_ERROR_INVALIDPARAM_fStartPos114eCTRL_ERROR_INVALIDPARAM_fMovingLength115eCTRL_ERROR_NT_GetTime116eCTRL_ERROR_INVALIDPARAM_No3PhaseSolutionPossible117eCTRL_ERROR_INVALIDPARAM_fStartVelo118eCTRL_ERROR_INVALIDPARAM_fTargetVelo119eCTRL_ERROR_INVALID_NEW_PARAMETER_TYPE120eCTRL_ERROR_INVALIDPARAM_fBaseTime121eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction_SIZEOF122eCTRL_ERROR_INVALIDPARAM_nFilterOrder124eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_SIZEOF125eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_SIZEOF126eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_SIZEOF127eCTRL_ERROR_INVALIDPARAM_nLogBuffer_SIZEOF128eCTRL_ERROR_LogBufferOverflow129eCTRL_ERROR_INVALIDPARAM_nLogBuffer_ADR130eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_ADR131eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_ADR132eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_ADR133eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_ADR134eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_ADR135eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_ADR136eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_ADR137eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_ADR138eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_ADR139eCTRL_ERROR_INVALIDPARAM_nTransferfunction1Data_ADR140eCTRL_ERROR_INVALIDPARAM_nTransferfunction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Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox0PlcTask#x020100300PlcTask Inputs0917504ECC.CHAMBER_IN832CHAMBER_INTcAddressTypeInputTcVarGlobal3774080ECC.IGS_IN704IGS_INTcAddressTypeInputTcVarGlobal3775328ECC.MFC_PV2240STR_FCSP700_INPUT110TcAddressTypeInputTcVarGlobal3776192ECC.APC_PV224VAT_INTcAddressTypeInputTcVarGlobal3779808ECC.TURBO_PV112TMP_INTcAddressTypeInputTcVarGlobal3780256ECC.VG103_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3780384ECC.VG101_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3780576ECC.VG102_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3780768ECC.BA1_PV224STR_BPG400TcAddressTypeInputTcVarGlobal3780960ECC.VG104_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3781184GV_IL.SPLC_TO_PLC184SPLC_TO_PLCTcAddressTypeInputTcVarGlobal42626561PlcTask Outputs0917504ECC.EV132STR_EX260_SECTcAddressTypeOutputTcVarGlobal3242256ECC.TURBO_SV8TMP_OUTTcAddressTypeOutputTcVarGlobal3242288ECC.CHAMBER_OUT416CHAMBER_OUTTcAddressTypeOutputTcVarGlobal3774912ECC.IGS_OUT160IGS_OUTTcAddressTypeOutputTcVarGlobal3776032ECC.MFC_SV1280STR_FCSP700_OUTPUT110TcAddressTypeOutputTcVarGlobal3778432ECC.EV232STR_EX260_SECTcAddressTypeOutputTcVarGlobal3779712ECC.EV332STR_EX260_SECTcAddressTypeOutputTcVarGlobal3779744ECC.EV432STR_EX260_SECTcAddressTypeOutputTcVarGlobal3779776ECC.STAGE_SV128REAL14TcAddressTypeOutputTcVarGlobal3781376ECC.APC_SV224VAT_OUTTcAddressTypeOutputTcVarGlobal3805536GV_IL.PLC_TO_SPLC104PLC_TO_SPLCTcAddressTypeOutputTcVarGlobal42628403PlcTask Internal0917504Global_Version.stLibVersion_Tc2_ControllerToolbox288ST_LibVersion.iMajor3.iMinor6.iBuild1.iRevision0.nFlags1.sVersion3.6.1.0const_non_replacedTcVarGlobal3072000Global_Variables.nCTRL_LOGGER_DATA_ARRAY_SIZE16UINT10TcVarGlobal3072288Global_Variables.AMSPORT_LOGGER16UINT100TcVarGlobal3072304Global_Variables.stCtrl_GLOBAL_CycleTimeInterpretation128ST_CTRL_CYCLE_TIME_INTERPRETATIONTcVarGlobal3072320Global_Version.stLibVersion_Tc2_Standard288ST_LibVersion.iMajor3.iMinor4.iBuild5.iRevision0.nFlags1.sVersion3.4.5.0const_non_replacedTcVarGlobal3072448Global_Version.stLibVersion_Tc2_System288ST_LibVersion.iMajor3.iMinor6.iBuild4.iRevision0.nFlags1.sVersion3.6.4.0const_non_replacedTcVarGlobal3072736Global_Variables.AMSPORT_EVENTLOG16UINT110TcVarGlobal3073024Global_Variables.AMSPORT_R0_RTIME16UINT200TcVarGlobal3073040Global_Variables.AMSPORT_R0_IO16UINT300TcVarGlobal3073056Global_Variables.AMSPORT_R0_NC16UINT500TcVarGlobal3073072Global_Variables.AMSPORT_R0_NCSAF16UINT501TcVarGlobal3073088Global_Variables.AMSPORT_R0_NCSVB16UINT511TcVarGlobal3073104Global_Variables.AMSPORT_R0_ISG16UINT550TcVarGlobal3073120Global_Variables.AMSPORT_R0_CNC16UINT600TcVarGlobal3073136Global_Variables.AMSPORT_R0_LINE16UINT700TcVarGlobal3073152Global_Variables.AMSPORT_R0_PLC16UINT800TcVarGlobal3073168Global_Variables.AMSPORT_R0_PLC_RTS116UINT801TcVarGlobal3073184Global_Variables.AMSPORT_R0_PLC_RTS216UINT811TcVarGlobal3073200Global_Variables.AMSPORT_R0_PLC_RTS316UINT821TcVarGlobal3073216Global_Variables.AMSPORT_R0_PLC_RTS416UINT831TcVarGlobal3073232Global_Variables.AMSPORT_R0_CAM16UINT900TcVarGlobal3073248Global_Variables.AMSPORT_R0_CAMTOOL16UINT950TcVarGlobal3073264Global_Variables.AMSPORT_R3_SYSSERV16UINT10000TcVarGlobal3073280Global_Variables.AMSPORT_R3_SCOPESERVER16UINT14001TcVarGlobal3073296Global_Variables.ADSSTATE_INVALID16UINT0TcVarGlobal3073312Global_Variables.ADSSTATE_IDLE16UINT1TcVarGlobal3073328Global_Variables.ADSSTATE_RESET16UINT2TcVarGlobal3073344Global_Variables.ADSSTATE_INIT16UINT3TcVarGlobal3073360Global_Variables.ADSSTATE_START16UINT4TcVarGlobal3073376Global_Variables.ADSSTATE_RUN16UINT5TcVarGlobal3073392Global_Variables.ADSSTATE_STOP16UINT6TcVarGlobal3073408Global_Variables.ADSSTATE_SAVECFG16UINT7TcVarGlobal3073424Global_Variables.ADSSTATE_LOADCFG16UINT8TcVarGlobal3073440Global_Variables.ADSSTATE_POWERFAILURE16UINT9TcVarGlobal3073456Global_Variables.ADSSTATE_POWERGOOD16UINT10TcVarGlobal3073472Global_Variables.ADSSTATE_ERROR16UINT11TcVarGlobal3073488Global_Variables.ADSSTATE_SHUTDOWN16UINT12TcVarGlobal3073504Global_Variables.ADSSTATE_SUSPEND16UINT13TcVarGlobal3073520Global_Variables.ADSSTATE_RESUME16UINT14TcVarGlobal3073536Global_Variables.ADSSTATE_CONFIG16UINT15TcVarGlobal3073552Global_Variables.ADSSTATE_RECONFIG16UINT16TcVarGlobal3073568Global_Variables.ADSSTATE_STOPPING16UINT17TcVarGlobal3073584Global_Variables.ADSSTATE_INCOMPATIBLE16UINT18TcVarGlobal3073600Global_Variables.ADSSTATE_EXCEPTION16UINT19TcVarGlobal3073616Global_Variables.ADSSTATE_MAXSTATES16UINT20TcVarGlobal3073632Global_Variables.BOOTDATAFLAGS_RETAIN_LOADED8BYTE1TcVarGlobal3073648Global_Variables.BOOTDATAFLAGS_RETAIN_INVALID8BYTE2TcVarGlobal3073656Global_Variables.ADSIGRP_SYMTAB32UDINT61440TcVarGlobal3073664Global_Variables.ADSIGRP_SYMNAME32UDINT61441TcVarGlobal3073696Global_Variables.ADSIGRP_SYMVAL32UDINT61442TcVarGlobal3073728Global_Variables.ADSIGRP_SYM_HNDBYNAME32UDINT61443TcVarGlobal3073760Global_Variables.ADSIGRP_SYM_VALBYNAME32UDINT61444TcVarGlobal3073792Global_Variables.ADSIGRP_SYM_VALBYHND32UDINT61445TcVarGlobal3073824Global_Variables.ADSIGRP_SYM_RELEASEHND32UDINT61446TcVarGlobal3073856Global_Variables.ADSIGRP_SYM_INFOBYNAME32UDINT61447TcVarGlobal3073888Global_Variables.ADSIGRP_SYM_VERSION32UDINT61448TcVarGlobal3073920Global_Variables.ADSIGRP_SYM_INFOBYNAMEEX32UDINT61449TcVarGlobal3073952Global_Variables.ADSIGRP_SYM_DOWNLOAD32UDINT61450TcVarGlobal3073984Global_Variables.ADSIGRP_SYM_UPLOAD32UDINT61451TcVarGlobal3074016Global_Variables.ADSIGRP_SYM_UPLOADINFO32UDINT61452TcVarGlobal3074048Global_Variables.ADSIGRP_SYMNOTE32UDINT61456TcVarGlobal3074080Global_Variables.ADSIGRP_IOIMAGE_RWIB32UDINT61472TcVarGlobal3074112Global_Variables.ADSIGRP_IOIMAGE_RWIX32UDINT61473TcVarGlobal3074144Global_Variables.ADSIGRP_IOIMAGE_RISIZE32UDINT61477TcVarGlobal3074176Global_Variables.ADSIGRP_IOIMAGE_RWOB32UDINT61488TcVarGlobal3074208Global_Variables.ADSIGRP_IOIMAGE_RWOX32UDINT61489TcVarGlobal3074240Global_Variables.ADSIGRP_IOIMAGE_ROSIZE32UDINT61493TcVarGlobal3074272Global_Variables.ADSIGRP_IOIMAGE_CLEARI32UDINT61504TcVarGlobal3074304Global_Variables.ADSIGRP_IOIMAGE_CLEARO32UDINT61520TcVarGlobal3074336Global_Variables.ADSIGRP_IOIMAGE_RWIOB32UDINT61536TcVarGlobal3074368Global_Variables.ADSIGRP_DEVICE_DATA32UDINT61696TcVarGlobal3074400Global_Variables.ADSIOFFS_DEVDATA_ADSSTATE32UDINT0TcVarGlobal3074432Global_Variables.ADSIOFFS_DEVDATA_DEVSTATE32UDINT2TcVarGlobal3074464Global_Variables.SYSTEMSERVICE_OPENCREATE32UDINT100TcVarGlobal3074496Global_Variables.SYSTEMSERVICE_OPENREAD32UDINT101TcVarGlobal3074528Global_Variables.SYSTEMSERVICE_OPENWRITE32UDINT102TcVarGlobal3074560Global_Variables.SYSTEMSERVICE_CREATEFILE32UDINT110TcVarGlobal3074592Global_Variables.SYSTEMSERVICE_CLOSEHANDLE32UDINT111TcVarGlobal3074624Global_Variables.SYSTEMSERVICE_FOPEN32UDINT120TcVarGlobal3074656Global_Variables.SYSTEMSERVICE_FCLOSE32UDINT121TcVarGlobal3074688Global_Variables.SYSTEMSERVICE_FREAD32UDINT122TcVarGlobal3074720Global_Variables.SYSTEMSERVICE_FWRITE32UDINT123TcVarGlobal3074752Global_Variables.SYSTEMSERVICE_FSEEK32UDINT124TcVarGlobal3074784Global_Variables.SYSTEMSERVICE_FTELL32UDINT125TcVarGlobal3074816Global_Variables.SYSTEMSERVICE_FGETS32UDINT126TcVarGlobal3074848Global_Variables.SYSTEMSERVICE_FPUTS32UDINT127TcVarGlobal3074880Global_Variables.SYSTEMSERVICE_FSCANF32UDINT128TcVarGlobal3074912Global_Variables.SYSTEMSERVICE_FPRINTF32UDINT129TcVarGlobal3074944Global_Variables.SYSTEMSERVICE_FEOF32UDINT130TcVarGlobal3074976Global_Variables.SYSTEMSERVICE_FDELETE32UDINT131TcVarGlobal3075008Global_Variables.SYSTEMSERVICE_FRENAME32UDINT132TcVarGlobal3075040Global_Variables.SYSTEMSERVICE_MKDIR32UDINT138TcVarGlobal3075072Global_Variables.SYSTEMSERVICE_RMDIR32UDINT139TcVarGlobal3075104Global_Variables.SYSTEMSERVICE_REG_HKEYLOCALMACHINE32UDINT200TcVarGlobal3075136Global_Variables.SYSTEMSERVICE_SENDEMAIL32UDINT300TcVarGlobal3075168Global_Variables.SYSTEMSERVICE_TIMESERVICES32UDINT400TcVarGlobal3075200Global_Variables.SYSTEMSERVICE_STARTPROCESS32UDINT500TcVarGlobal3075232Global_Variables.SYSTEMSERVICE_CHANGENETID32UDINT600TcVarGlobal3075264Global_Variables.TIMESERVICE_DATEANDTIME32UDINT1TcVarGlobal3075296Global_Variables.TIMESERVICE_SYSTEMTIMES32UDINT2TcVarGlobal3075328Global_Variables.TIMESERVICE_RTCTIMEDIFF32UDINT3TcVarGlobal3075360Global_Variables.TIMESERVICE_ADJUSTTIMETORTC32UDINT4TcVarGlobal3075392Global_Variables.TIMESERVICE_TIMEZONINFORMATION32UDINT6TcVarGlobal3075424Global_Variables.ADSLOG_MSGTYPE_HINT32DWORD1TcVarGlobal3075456Global_Variables.ADSLOG_MSGTYPE_WARN32DWORD2TcVarGlobal3075488Global_Variables.ADSLOG_MSGTYPE_ERROR32DWORD4TcVarGlobal3075520Global_Variables.ADSLOG_MSGTYPE_LOG32DWORD16TcVarGlobal3075552Global_Variables.ADSLOG_MSGTYPE_MSGBOX32DWORD32TcVarGlobal3075584Global_Variables.ADSLOG_MSGTYPE_RESOURCE32DWORD64TcVarGlobal3075616Global_Variables.ADSLOG_MSGTYPE_STRING32DWORD128TcVarGlobal3075648Global_Variables.BOOTDATAFLAGS_RETAIN_REQUESTED8BYTE4TcVarGlobal3075680Global_Variables.BOOTDATAFLAGS_PERSISTENT_LOADED8BYTE16TcVarGlobal3075688Global_Variables.BOOTDATAFLAGS_PERSISTENT_INVALID8BYTE32TcVarGlobal3075696Global_Variables.SYSTEMSTATEFLAGS_BSOD8BYTE1TcVarGlobal3075704Global_Variables.SYSTEMSTATEFLAGS_RTVIOLATION8BYTE2TcVarGlobal3075712Global_Variables.nWatchdogTime8BYTETcVarGlobal3075720Global_Variables.TCEVENTFLAG_PRIOCLASS16WORD16TcVarGlobal3075728Global_Variables.FOPEN_MODEREAD32DWORD1TcVarGlobal3075744Global_Variables.FOPEN_MODEWRITE32DWORD2TcVarGlobal3075776Global_Variables.FOPEN_MODEAPPEND32DWORD4TcVarGlobal3075808Global_Variables.FOPEN_MODEPLUS32DWORD8TcVarGlobal3075840Global_Variables.FOPEN_MODEBINARY32DWORD16TcVarGlobal3075872Global_Variables.FOPEN_MODETEXT32DWORD32TcVarGlobal3075904Global_Variables.TCEVENTFLAG_FMTSELF16WORD32TcVarGlobal3076160Global_Variables.TCEVENTFLAG_LOG16WORD64TcVarGlobal3076176Global_Variables.TCEVENTFLAG_MSGBOX16WORD128TcVarGlobal3076192Global_Variables.TCEVENTFLAG_SRCID16WORD256TcVarGlobal3076208Global_Variables.TCEVENTFLAG_AUTOFMTALL16WORD4096TcVarGlobal3076224Global_Variables.TCEVENTSTATE_INVALID16WORD0TcVarGlobal3076240Global_Variables.TCEVENTSTATE_SIGNALED16WORD1TcVarGlobal3076256Global_Variables.TCEVENTSTATE_RESET16WORD2TcVarGlobal3076272Global_Variables.TCEVENTSTATE_CONFIRMED16WORD16TcVarGlobal3076288Global_Variables.TCEVENTSTATE_RESETCON16WORD18TcVarGlobal3076304Global_Variables.TCEVENT_SRCNAMESIZE16INT15TcVarGlobal3076320Global_Variables.TCEVENT_FMTPRGSIZE16INT31TcVarGlobal3076336Global_Variables.PI64LREAL3.14159265358979TcVarGlobal3076352Global_Variables.DEFAULT_ADS_TIMEOUT32TIME5000TcVarGlobal3076416Global_Variables.MAX_STRING_LENGTH32UDINT255TcVarGlobal3076448Global_Variables.eWatchdogConfig16E_WATCHDOG_TIME_CONFIGE_WATCHDOG_TIME_CONFIG.eWATCHDOG_TIME_DISABLEDTcVarGlobal3077024Global_Constants.EMPTY_SEVERITY16TcEventSeverityTcEventSeverity.VerboseTcVarGlobal3077040Global_Version.stLibVersion_Tc3_Module288ST_LibVersion.iMajor3.iMinor4.iBuild5.iRevision0.nFlags1.sVersion3.4.5.0const_non_replacedTcVarGlobal3077056Global_Version.stLibVersion_Tc2_Utilities288ST_LibVersion.iMajor3.iMinor6.iBuild1.iRevision0.nFlags1.sVersion3.6.1.0const_non_replacedTcVarGlobal3077696Global_Constants.EMPTY_EVENT_CLASS128GUID.Data10.Data20.Data30.Data4[0]0.Data4[1]0.Data4[2]0.Data4[3]0.Data4[4]0.Data4[5]0.Data4[6]0.Data4[7]0TcVarGlobal3077984Global_Constants.EMPTY_EVENT_ID32UDINT0TcVarGlobal3078112Global_Constants.SUCCESS_EVENT192TcEventEntry.uuidEventClass.Data10.uuidEventClass.Data20.uuidEventClass.Data30.uuidEventClass.Data4[0]0.uuidEventClass.Data4[1]0.uuidEventClass.Data4[2]0.uuidEventClass.Data4[3]0.uuidEventClass.Data4[4]0.uuidEventClass.Data4[5]0.uuidEventClass.Data4[6]0.uuidEventClass.Data4[7]0.nEventID0.eSeverityGlobal_Constants.EMPTY_SEVERITYTcVarGlobal3078144GVL.nLangId_OnlineMonitoring32DINT1033TcVarGlobal3078336ParameterList.cSourceNameSize32UDINT (81..10000)256TcVarGlobal3078368Global_Version.stLibVersion_Tc3_EventLogger288ST_LibVersion.iMajor3.iMinor3.iBuild10.iRevision0.nFlags1.sVersion3.3.10.0const_non_replacedTcVarGlobal3078400Global_Version.stLibVersion_Tc2_SUPS288ST_LibVersion.iMajor3.iMinor3.iBuild8.iRevision0.nFlags0.sVersion3.3.8.0const_non_replacedTcVarGlobal3078688Global_Variables.eGlobalSUpsState16E_S_UPS_StateTcVarGlobal3079168MAIN.ENABLE8BOOL3079184MAIN.PROCESS_EN8BOOL3079192MAIN.PROCESS_RUN8BOOL3079200MAIN.PROCESS_STOP8BOOL3079208MAIN.P_NO16INT3079216MAIN.PROCESS41600PROCESS3091008MAIN.CYCLE_EN8BOOL3132608MAIN.NEXTSTEP_EN8BOOL3132616MAIN.CYCLE_NUM16INT3132624MAIN.CYCLE_START_STEP_NO16INT3132640MAIN.STEP_NO16INT3132656MAIN.UPS74624FB_S_UPS_BAPI3132672IL.RANGE_PG_PS11280RANGEJD3207680IL.RANGE_PG_PS21280RANGEJD3208960IL.RANGE_PG_PS31280RANGEJD3210240IL.RANGE_PG_PS41280RANGEJD3211520IL.RANGE_PG_PS51280RANGEJD3212800IL.RANGE_PG_PS61280RANGEJD3214080IL.RANGE_PG_PS71280RANGEJD3215360IL.RANGE_PG_PS81280RANGEJD3216640IL.RANGE_PG_PS91280RANGEJD3217920IL.RANGE_MFC11280RANGEJD3219200IL.RANGE_MFC21280RANGEJD3220480IL.RANGE_MFC31280RANGEJD3221760IL.RANGE_MFC41280RANGEJD3223040IL.RANGE_MFC51280RANGEJD3224320IL.RANGE_MFC61280RANGEJD3225600IL.RANGE_MFC71280RANGEJD3226880IL.RANGE_MFC81280RANGEJD3228160IL.RANGE_MFC91280RANGEJD3229440IL.RANGE_CHAMBER_HEATER11280RANGEJD3230720IL.RANGE_CHAMBER_HEATER21280RANGEJD3232000IL.RANGE_CHAMBER_HEATER31280RANGEJD3233280IL.RANGE_LID_HEATER1280RANGEJD3234560IL.RANGE_STAGE11280RANGEJD3235840IL.RANGE_STAGE21280RANGEJD3237120IL.RANGE_STAGE31280RANGEJD3238400IL.RANGE_STAGE41280RANGEJD3239680IL.TON_PrepareTransfer256TON3240960IL.TON_TransferWafer256TON3241216IL.TON_OpenGasValve256TON3241472IL.TON_CloseGasValve256TON3241728IL.TON_OpenCloseSlitValve256TON3241984IL.ALWAYS_TRUE8BOOLtrue3242240GV.TURBO_PUMP_POWER_ON8BOOLTcVarGlobal3242296Temp.H_LID73600Temp_controller1103244160Temp.H_CHAMBER73600Temp_controller1103317760Temp.H_PEN_VALVE7360Temp_controller3391360Temp.H_GATE_VALVE7360Temp_controller3398720Temp.H_IGS73600Temp_controller1103406080Temp.H_TAPE73600Temp_controller1103479680Temp.H_FORELINE147200Temp_controller1203553280Temp.H_STAGE73600Temp_controller1103700480GV.PENDULUM_VALVE_HEATER_POWER_ON8BOOLTcVarGlobal3780368GV.LID_HEATER_POWER_ON8BOOLTcVarGlobal3780376Global_Version.stLibVersion_Tc2_EtherCAT288ST_LibVersion.iMajor3.iMinor4.iBuild4.iRevision0.nFlags1.sVersion3.4.4.0const_non_replacedTcVarGlobal3781888Global_Variables.EC_AMSPORT_MASTER16UINT65535TcVarGlobal3782176Global_Variables.EC_MAX_SLAVES16UINT65535TcVarGlobal3782192Global_Variables.EC_CMD_TYPE_APRD8BYTE1TcVarGlobal3782208Global_Variables.EC_CMD_TYPE_APWR8BYTE2TcVarGlobal3782216Global_Variables.EC_CMD_TYPE_APRW8BYTE3TcVarGlobal3782224Global_Variables.EC_CMD_TYPE_FPRD8BYTE4TcVarGlobal3782232Global_Variables.EC_CMD_TYPE_FPWR8BYTE5TcVarGlobal3782240Global_Variables.EC_CMD_TYPE_FPRW8BYTE6TcVarGlobal3782248Global_Variables.EC_CMD_TYPE_BRD8BYTE7TcVarGlobal3782256Global_Variables.EC_CMD_TYPE_BWR8BYTE8TcVarGlobal3782264Global_Variables.EC_CMD_TYPE_BRW8BYTE9TcVarGlobal3782272Global_Variables.EC_CMD_TYPE_LRD8BYTE10TcVarGlobal3782280Global_Variables.EC_CMD_TYPE_LWR8BYTE11TcVarGlobal3782288Global_Variables.EC_CMD_TYPE_LRW8BYTE12TcVarGlobal3782296Global_Variables.EC_DEVICE_STATE_MASK8BYTE15TcVarGlobal3782304Global_Variables.EC_DEVICE_STATE_INIT8BYTE1TcVarGlobal3782312Global_Variables.EC_DEVICE_STATE_PREOP8BYTE2TcVarGlobal3782320Global_Variables.EC_DEVICE_STATE_BOOTSTRAP8BYTE3TcVarGlobal3782328Global_Variables.EC_DEVICE_STATE_SAFEOP8BYTE4TcVarGlobal3782336Global_Variables.EC_DEVICE_STATE_OP8BYTE8TcVarGlobal3782344Global_Variables.EC_DEVICE_STATE_ERROR8BYTE16TcVarGlobal3782352Global_Variables.EC_DEVICE_STATE_INVALID_VPRS8BYTE32TcVarGlobal3782360Global_Variables.EC_DEVICE_STATE_INITCMD_ERROR8BYTE64TcVarGlobal3782368Global_Variables.EC_DEVICE_STATE_DISABLED8BYTE128TcVarGlobal3782376Global_Variables.EC_LINK_STATE_OK8BYTE0TcVarGlobal3782384Global_Variables.EC_LINK_STATE_NOT_PRESENT8BYTE1TcVarGlobal3782392Global_Variables.EC_LINK_STATE_LINK_WITHOUT_COMM8BYTE2TcVarGlobal3782400Global_Variables.EC_LINK_STATE_MISSING_LINK8BYTE4TcVarGlobal3782408Global_Variables.EC_LINK_STATE_ADDITIONAL_LINK8BYTE8TcVarGlobal3782416Global_Variables.EC_LINK_STATE_PORT_A8BYTE16TcVarGlobal3782424Global_Variables.EC_LINK_STATE_PORT_B8BYTE32TcVarGlobal3782432Global_Variables.EC_LINK_STATE_PORT_C8BYTE64TcVarGlobal3782440Global_Variables.EC_LINK_STATE_PORT_D8BYTE128TcVarGlobal3782448Global_Variables.EC_SOE_ELEMENT_DATASTATE8BYTE1TcVarGlobal3782456Global_Variables.EC_ADS_IGRP_MASTER_STATEMACHINE32UDINT3TcVarGlobal3782464Global_Variables.EC_ADS_IOFFS_MASTER_CURSTATE32UDINT256TcVarGlobal3782496Global_Variables.EC_ADS_IOFFS_MASTER_REQSTATE32UDINT257TcVarGlobal3782528Global_Variables.EC_ADS_IOFFS_MASTER_INTERNALSTATE32UDINT258TcVarGlobal3782560Global_Variables.EC_ADS_IGRP_MASTER_COUNT_SLAVE32UDINT6TcVarGlobal3782592Global_Variables.EC_ADS_IOFFS_MASTER_COUNT_SLAVE32UDINT0TcVarGlobal3782624Global_Variables.EC_ADS_IOFFS_MASTER_COUNT_PORT32UDINT1TcVarGlobal3782656Global_Variables.EC_ADS_IOFFS_MASTER_COUNT_ROUTER32UDINT2TcVarGlobal3782688Global_Variables.EC_ADS_IGRP_MASTER_SLAVE_ADDRESSES32UDINT7TcVarGlobal3782720Global_Variables.EC_ADS_IGRP_MASTER_SENDCMD32UDINT8TcVarGlobal3782752Global_Variables.EC_ADS_IGRP_SLAVE_STATEMACHINE32UDINT9TcVarGlobal3782784Global_Variables.EC_ADS_IGRP_MASTER_SLAVE_IDENTITY32UDINT17TcVarGlobal3782816Global_Variables.EC_ADS_IGRP_MASTER_SLAVE_CRC32UDINT18TcVarGlobal3782848Global_Variables.EC_ADS_IGRP_MASTER_SLAVE_ABNORMAL_STATE_CHANGES32UDINT19TcVarGlobal3782880Global_Variables.EC_ADS_IGRP_MASTER_SLAVE_SETPRESENT_CHANGES32UDINT22TcVarGlobal3782912Global_Variables.EC_ADS_IGRP_MASTER_DEVICESTATE32UDINT69TcVarGlobal3782944Global_Variables.EC_ADS_IGRP_MASTER_COUNT_FRAME32UDINT72TcVarGlobal3782976Global_Variables.EC_ADS_IGRP_ECAT_SOE32UDINT62496TcVarGlobal3783008Global_Variables.EC_ADS_IGRP_ECAT_SOE_LASTERROR32UDINT62497TcVarGlobal3783040Global_Variables.EC_SOE_ELEMENT_NAME8BYTE2TcVarGlobal3783072Global_Variables.EC_SOE_ELEMENT_ATTRIBUTE8BYTE4TcVarGlobal3783080Global_Variables.EC_SOE_ELEMENT_UNIT8BYTE8TcVarGlobal3783088Global_Variables.EC_SOE_ELEMENT_MIN8BYTE16TcVarGlobal3783096Global_Variables.EC_SOE_ELEMENT_MAX8BYTE32TcVarGlobal3783104Global_Variables.EC_SOE_ELEMENT_VALUE8BYTE64TcVarGlobal3783112Global_Variables.EC_SOE_ELEMENT_DEFAULT8BYTE128TcVarGlobal3783120Global_Variables.bSeqReadDrvAttrAndValue8BOOLfalseTcVarGlobal3783128Global_Variables.EC_ADS_IGRP_FOE_FOPENREAD32UDINT62465TcVarGlobal3783136Global_Variables.EC_ADS_IGRP_FOE_FOPENWRITE32UDINT62466TcVarGlobal3783168Global_Variables.EC_ADS_IGRP_FOE_FCLOSE32UDINT62467TcVarGlobal3783200Global_Variables.EC_ADS_IGRP_FOE_FREAD32UDINT62468TcVarGlobal3783232Global_Variables.EC_ADS_IGRP_FOE_FWRITE32UDINT62469TcVarGlobal3783264Global_Variables.EC_ADS_IGRP_FOE_PROGRESSINFO32UDINT62470TcVarGlobal3783296Global_Variables.EC_ADS_IGRP_FOE_LASTERROR32UDINT62471TcVarGlobal3783328Global_Variables.EC_ADS_IGRP_CANOPEN_SDO32UDINT62210TcVarGlobal3783360Global_Variables.EC_ADS_IGRP_CANOPEN_SDO_LASTERROR32UDINT62211TcVarGlobal3783392Global_Variables.EC_FOE_PROTERR_NOTDEFINED32UDINT0TcVarGlobal3783424Global_Variables.EC_FOE_PROTERR_NOTFOUND32UDINT1TcVarGlobal3783456Global_Variables.EC_FOE_PROTERR_ACCESS32UDINT2TcVarGlobal3783488Global_Variables.EC_FOE_PROTERR_DISKFULL32UDINT3TcVarGlobal3783520Global_Variables.EC_FOE_PROTERR_ILLEAGAL32UDINT4TcVarGlobal3783552Global_Variables.EC_FOE_PROTERR_PACKENO32UDINT5TcVarGlobal3783584Global_Variables.EC_FOE_PROTERR_EXISTS32UDINT6TcVarGlobal3783616Global_Variables.EC_FOE_PROTERR_NOUSER32UDINT7TcVarGlobal3783648Global_Variables.EC_FOE_PROTERR_BOOTSTRAPONLY32UDINT8TcVarGlobal3783680Global_Variables.EC_FOE_PROTERR_NOTINBOOTSTRAP32UDINT9TcVarGlobal3783712Global_Variables.EC_FOE_PROTERR_INVALIDPASSWORD32UDINT10TcVarGlobal3783744Global_Variables.EC_COE_PROTERR_TOGGLE32UDINT84082688TcVarGlobal3783776Global_Variables.EC_COE_PROTERR_TIMEOUT32UDINT84148224TcVarGlobal3783808Global_Variables.EC_COE_PROTERR_CCS_SCS32UDINT84148225TcVarGlobal3783840Global_Variables.EC_COE_PROTERR_BLK_SIZE32UDINT84148226TcVarGlobal3783872Global_Variables.EC_COE_PROTERR_SEQNO32UDINT84148227TcVarGlobal3783904Global_Variables.EC_COE_PROTERR_CRC32UDINT84148228TcVarGlobal3783936Global_Variables.EC_COE_PROTERR_MEMORY32UDINT84148229TcVarGlobal3783968Global_Variables.EC_COE_PROTERR_ACCESS32UDINT100728832TcVarGlobal3784000Global_Variables.EC_COE_PROTERR_WRITEONLY32UDINT100728833TcVarGlobal3784032Global_Variables.EC_COE_PROTERR_READONLY32UDINT100728834TcVarGlobal3784064Global_Variables.EC_COE_PROTERR_INDEX32UDINT100794368TcVarGlobal3784096Global_Variables.EC_COE_PROTERR_PDO_MAP32UDINT100925505TcVarGlobal3784128Global_Variables.EC_COE_PROTERR_PDO_LEN32UDINT100925506TcVarGlobal3784160GV.NDO264STR_NDOTcVarGlobal3784192UI.NDO264STR_NDOTcVarGlobal3784456Global_Variables.EC_COE_PROTERR_P_INCOMP32UDINT100925507TcVarGlobal3786624Global_Variables.EC_COE_PROTERR_I_INCOMP32UDINT100925511TcVarGlobal3786656Global_Variables.EC_COE_PROTERR_HARDWARE32UDINT101056512TcVarGlobal3786688Global_Variables.EC_COE_PROTERR_DATA_SIZE32UDINT101122064TcVarGlobal3786720Global_Variables.EC_COE_PROTERR_DATA_SIZE132UDINT101122066TcVarGlobal3786752Global_Variables.EC_COE_PROTERR_DATA_SIZE232UDINT101122067TcVarGlobal3786784Global_Variables.EC_COE_PROTERR_OFFSET32UDINT101253137TcVarGlobal3786816Global_Variables.EC_COE_PROTERR_DATA_RANGE32UDINT101253168TcVarGlobal3786848Global_Variables.EC_COE_PROTERR_DATA_RANGE132UDINT101253169TcVarGlobal3786880Global_Variables.EC_COE_PROTERR_DATA_RANGE232UDINT101253170TcVarGlobal3786912Global_Variables.EC_COE_PROTERR_MINMAX32UDINT101253174TcVarGlobal3786944Global_Variables.EC_COE_PROTERR_GENERAL32UDINT134217728TcVarGlobal3786976GV.CHAMBER_HEATER_POWER_ON8BOOLTcVarGlobal3787008GV.IGS_HEATER_POWER_ON8BOOLTcVarGlobal3787016GV.TAPE_HEATER_POWER_ON8BOOLTcVarGlobal3787024GV.FORELINE_HEATER_POWER_ON8BOOLTcVarGlobal3787032GV.GATE_VALVE_HEATER_POWER_ON8BOOLTcVarGlobal3787040GV.LID_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787048GV.CHAMBER_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787128GV.PEN_VALVE_HEATER_AUTO_TUNE_EN8BOOLTcVarGlobal3787208GV.GATE_VALVE_HEATER_AUTO_TUNE_EN8BOOLTcVarGlobal3787216GV.IGS_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787224GV.TAPE_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787304GV.FORELINE_HEATER_AUTO_TUNE_EN160BOOL120TcVarGlobal3787384GV.STAGE_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787544GV.PEN_VALVE_HEATER_SSR_ON8BOOLTcVarGlobal3787624GV.GATE_VALVE_SSR_ON8BOOLTcVarGlobal3787632GV.ALARM_OCC8BOOLTcVarGlobal3787640GV.LID_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3787648GV.CHAMBER_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3787968GV.PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT32REALTcVarGlobal3788288GV.GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT32REALTcVarGlobal3788320GV.IGS_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3788352GV.TAPE_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3788672GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT640REAL120TcVarGlobal3788992GV.STAGE_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3789632GV.LID_HEATER_SSR_ON80BOOL110TcVarGlobal3789952GV.CHAMBER_HEATER_SSR_ON80BOOL110TcVarGlobal3790032GV.IGS_HEATER_SSR_ON80BOOL110TcVarGlobal3790112GV.TAPE_HEATER_SSR_ON80BOOL110TcVarGlobal3790192GV.FORELINE_HEATER_SSR_ON160BOOL120TcVarGlobal3790272GV.STAGE_HEATER_SCR_OUTPUT320REAL110TcVarGlobal3790432GV.WARNING_OCC8BOOLTcVarGlobal3790752GV.Process_Start8BOOLTcVarGlobal3790760GV.Step_Num16INTTcVarGlobal3790768GV.PMConfig1536ConfigPMTcVarGlobal3790784GV.Chiller768ConfigChillerTcVarGlobal3792320GV.InnerChiller768ConfigChillerTcVarGlobal3793088GV.OuterChiller768ConfigChillerTcVarGlobal3793856GV.TopChiller768ConfigChillerTcVarGlobal3794624GV.DryPump320ConfigDryPumpTcVarGlobal3795392GV.Mfcgas11120ConfigMfcGasTcVarGlobal3795712Global_Variables.EC_COE_PROTERR_TRANSFER32UDINT134217760TcVarGlobal3796832GV.NDI352STR_NDITcVarGlobal3801088PM.NDI352STR_NDITcVarGlobal3801440Global_Variables.EC_COE_PROTERR_TRANSFER132UDINT134217761TcVarGlobal3802240Global_Variables.EC_COE_PROTERR_TRANSFER232UDINT134217762TcVarGlobal3802272Global_Variables.EC_COE_PROTERR_DICTIONARY32UDINT134217763TcVarGlobal3802304Global_Variables.EC_DCTIME_DATEDELTA_OFFSET32DWORD730120TcVarGlobal3802336Global_Variables.EC_DCTIME_DELTA_OFFSET64T_ULARGE_INTEGER.dwHighPart29316075.dwLowPart627916800TcVarGlobal3802368Global_Variables.EC_DCTIME_TICKSPERMSEC64T_ULARGE_INTEGER.dwHighPart0.dwLowPart1000000TcVarGlobal3802432Global_Variables.EC_DCTIME_TICKSPERSEC64T_ULARGE_INTEGER.dwHighPart0.dwLowPart1000000000TcVarGlobal3802496Global_Variables.EC_DCTIME_TICKSPERDAY64T_ULARGE_INTEGER.dwHighPart20116.dwLowPart2437873664TcVarGlobal3802560Global_Variables.EC_DCTIME_DELTA_OFFSET6464ULINT125911584000000000TcVarGlobal3802624Global_Variables.EC_DCTIME_TICKSPERMSEC6464ULINT1000000TcVarGlobal3802688Global_Variables.EC_DCTIME_TICKSPERSEC6464ULINT1000000000TcVarGlobal3802752Global_Variables.EC_DCTIME_TICKSPERDAY6464ULINT86400000000000TcVarGlobal3802816Global_Variables.bEcFoeOpenFileNameWithFileExt FB_EcFoeOpen opens file name without file extension. If TRUE => FB_EcFoeOpen opens file name with file extension. ]]>8BOOLfalseTcVarGlobal3802880IO_EXCHANGE.WRITE_DATA_SINT8USINT3802888IO_EXCHANGE.nSlaveAddr_116UINT10073802896IO_EXCHANGE.SDO_WRITE32STR_SDO3802912IO_EXCHANGE.WRITE_SINT2048FB_EcCoESdoWrite3803264IO_EXCHANGE.sNetId192T_AmsNetID192.168.250.34.7.13805312IO_EXCHANGE.WRITE_EN_SINT8BOOL3805504GV.AO864STR_AOTcVarGlobal3805760UI.AO864STR_AOTcVarGlobal3806624GV.MfcN21120ConfigMfcGasTcVarGlobal3809152GV.MfcHe1120ConfigMfcGasTcVarGlobal3810272GV.Pump2560ConfigPumpTcVarGlobal3811392GV.Purge640ConfigPurgeTcVarGlobal3813952GV.PendulumHeater272ConfigHeaterTcVarGlobal3814592GV.LidHeater272ConfigHeaterTcVarGlobal3814864GV.ChamberHeater272ConfigHeaterTcVarGlobal3815136GV.ForelineHeater272ConfigHeaterTcVarGlobal3815952GV.STAGE272ConfigHeaterTcVarGlobal3816224GV.PendulumValve912ConfigPendulumValveTcVarGlobal3816496GV.SetpArray430400RecipeEachStep1100TcVarGlobal3817408GV.TurboN2PurgePressure16INTTcVarGlobal4247808GV.Process_Stop8BOOLTcVarGlobal4247824GV_IL.PRESSURE_WARNING8BOOLTcVarGlobal4247832GV_H.LID_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4247840GV_H.CHAMBER_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4249760GV_H.PEN_VALVE_HEATER_PID192STR_PIDTcPersistentTcVarGlobal4251680GV_H.GATE_VALVE_HEATER_PID192STR_PIDTcPersistentTcVarGlobal4251872GV_H.IGS_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4252064GV_H.TAPE_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4253984GV_H.FORELINE_HEATER_PID3840STR_PID120TcPersistentTcVarGlobal4255904GV_H.STAGE_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4259744GV_IL.PRESSURE_ALARM8BOOLTcVarGlobal4261664GV_IL.MFC1_WARNING8BOOLTcVarGlobal4261672GV_IL.MFC1_Alarm8BOOLTcVarGlobal4261680GV_IL.MFC2_WARNING8BOOLTcVarGlobal4261688GV_IL.MFC2_Alarm8BOOLTcVarGlobal4261696GV_IL.MFC3_WARNING8BOOLTcVarGlobal4261704GV_IL.MFC3_Alarm8BOOLTcVarGlobal4261712GV_IL.MFC4_WARNING8BOOLTcVarGlobal4261720GV_IL.MFC4_Alarm8BOOLTcVarGlobal4261728GV_IL.MFC5_WARNING8BOOLTcVarGlobal4261736GV_IL.MFC5_Alarm8BOOLTcVarGlobal4261744GV_IL.MFC6_WARNING8BOOLTcVarGlobal4261752GV_IL.MFC6_Alarm8BOOLTcVarGlobal4261760GV_IL.MFC7_WARNING8BOOLTcVarGlobal4261768GV_IL.MFC7_Alarm8BOOLTcVarGlobal4261776GV_IL.MFC8_WARNING8BOOLTcVarGlobal4261784GV_IL.MFC8_Alarm8BOOLTcVarGlobal4261792GV_IL.MFC9_WARNING8BOOLTcVarGlobal4261800GV_IL.MFC9_Alarm8BOOLTcVarGlobal4261808GV_IL.WALL_TEMP_WARNING8BOOLTcVarGlobal4261816GV_IL.WALL_TEMP_Alarm8BOOLTcVarGlobal4261824GV_IL.LID_TEMP_WARNING8BOOLTcVarGlobal4261832GV_IL.LID_TEMP_Alarm8BOOLTcVarGlobal4261840GV_IL.STAGE_EDGE_TEMP_WARNING8BOOLTcVarGlobal4261848GV_IL.STAGE_EDGE_TEMP_Alarm8BOOLTcVarGlobal4261856GV_IL.STAGE_CENTER_TEMP_WARNING8BOOLTcVarGlobal4261864GV_IL.STAGE_CENTER_TEMP_ALARM8BOOLTcVarGlobal4261872GV_IL.STATUS_PrepareTransfer8BOOLTcVarGlobal4261880GV_IL.STATUS_TransferWafer8BOOLTcVarGlobal4261888GV_IL.STATUS_OpenGasValve8BOOLTcVarGlobal4261896GV_IL.STATUS_CloseGasValve8BOOLTcVarGlobal4261904GV_IL.STATUS_OpenCloseSlitValve8BOOLTcVarGlobal4261912GV_IL.AV1_EN8BOOLTcVarGlobal4261920GV_IL.AV2_EN8BOOLTcVarGlobal4261928GV_IL.AV3_EN8BOOLTcVarGlobal4261936GV_IL.AV4_EN8BOOLTcVarGlobal4261944GV_IL.AV5_EN8BOOLTcVarGlobal4261952GV_IL.AV6_EN8BOOLTcVarGlobal4261960GV_IL.AV7_EN8BOOLTcVarGlobal4261968GV_IL.AV8_EN8BOOLTcVarGlobal4261976GV_IL.AV9_EN8BOOLTcVarGlobal4261984GV_IL.AV10_EN8BOOLTcVarGlobal4261992GV_IL.AV11_EN8BOOLTcVarGlobal4262000GV_IL.AV12_EN8BOOLTcVarGlobal4262008GV_IL.AV13_EN8BOOLTcVarGlobal4262016GV_IL.AV14_EN8BOOLTcVarGlobal4262024GV_IL.AV15_EN8BOOLTcVarGlobal4262032GV_IL.AV16_EN8BOOLTcVarGlobal4262040GV_IL.AV17_EN8BOOLTcVarGlobal4262048GV_IL.AV18_EN8BOOLTcVarGlobal4262056GV_IL.AV19_EN8BOOLTcVarGlobal4262064GV_IL.AV20_EN8BOOLTcVarGlobal4262072GV_IL.AV21_EN8BOOLTcVarGlobal4262080GV_IL.AV22_EN8BOOLTcVarGlobal4262088GV_IL.AV23_EN8BOOLTcVarGlobal4262096GV_IL.AV24_EN8BOOLTcVarGlobal4262104GV_IL.AV25_EN8BOOLTcVarGlobal4262112GV_IL.AV26_EN8BOOLTcVarGlobal4262120GV_IL.AV27_EN8BOOLTcVarGlobal4262128GV_IL.AV101_EN8BOOLTcVarGlobal4262136GV_IL.AV102_EN8BOOLTcVarGlobal4262144GV_IL.AV103_EN8BOOLTcVarGlobal4262152GV_IL.AV104_EN8BOOLTcVarGlobal4262160GV_IL.AV105_EN8BOOLTcVarGlobal4262168GV_IL.AV106_EN8BOOLTcVarGlobal4262176GV_IL.APC_EN8BOOLTcVarGlobal4262184GV_IL.AV1_EN_Bypass8BOOLTcVarGlobal4262192GV_IL.AV2_EN_Bypass8BOOLTcVarGlobal4262200GV_IL.AV3_EN_Bypass8BOOLTcVarGlobal4262208GV_IL.AV4_EN_Bypass8BOOLTcVarGlobal4262216GV_IL.AV5_EN_Bypass8BOOLTcVarGlobal4262224GV_IL.AV6_EN_Bypass8BOOLTcVarGlobal4262232GV_IL.AV7_EN_Bypass8BOOLTcVarGlobal4262240GV_IL.AV8_EN_Bypass8BOOLTcVarGlobal4262248GV_IL.AV9_EN_Bypass8BOOLTcVarGlobal4262256GV_IL.AV10_EN_Bypass8BOOLTcVarGlobal4262264GV_IL.AV11_EN_Bypass8BOOLTcVarGlobal4262272GV_IL.AV12_EN_Bypass8BOOLTcVarGlobal4262280GV_IL.AV13_EN_Bypass8BOOLTcVarGlobal4262288GV_IL.AV14_EN_Bypass8BOOLTcVarGlobal4262296GV_IL.AV15_EN_Bypass8BOOLTcVarGlobal4262304GV_IL.AV16_EN_Bypass8BOOLTcVarGlobal4262312GV_IL.AV17_EN_Bypass8BOOLTcVarGlobal4262320GV_IL.AV18_EN_Bypass8BOOLTcVarGlobal4262328GV_IL.AV19_EN_Bypass8BOOLTcVarGlobal4262336GV_IL.AV20_EN_Bypass8BOOLTcVarGlobal4262344GV_IL.AV21_EN_By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