CHAMBER_IN 832 C02 BOOL 1 16 128 0 C03 BOOL 1 16 128 128 C04 INT 1 8 128 256 C05 INT 1 8 128 384 C06 INT 1 4 64 512 C11 BOOL 1 8 64 576 C12 BOOL 1 4 32 640 C13 BOOL 1 4 32 672 C15 INT 1 8 128 704 IGS_IN 704 C32 INT 1 4 64 0 C33 INT 1 4 64 64 C34 INT 1 4 64 128 C35 INT 1 4 64 192 C36 BOOL 1 16 128 256 C37 BOOL 1 16 128 384 C38 BOOL 1 4 32 512 C39 BOOL 1 4 32 544 C40 INT 1 8 128 576 STR_FCSP700_INPUT 224 Active_Exception_Status USINT 8 0 Flow_Reading REAL 32 32 Pressure_Reading REAL 32 64 Temperature_Reading REAL 32 96 Position_Readback REAL 32 128 Position_Setpoint REAL 32 160 WcState BIT 1 192 InputToggle BIT 1 193 State UINT 16 208 ARRAY [1..10] OF STR_FCSP700_INPUT 2240 STR_FCSP700_INPUT 1 10 VAT_IN 224 Actual_Pressure REAL 32 0 Pressure_Sensor_1 REAL 32 32 Pressure_Sensor_2 REAL 32 64 Actual_Position REAL 32 96 Control_Mode SINT 8 128 Error_Number UINT 16 144 General_Status UINT 16 160 General_Warnings UINT 16 176 Extended_Warnings UINT 16 192 TMP_IN 112 Rotation BIT 1 0 Normal BIT 1 1 Acceleration BIT 1 2 Deceleration_Includes_Braking BIT 1 3 Remote_Local BIT 1 4 Turbo_Low_Speed BIT 1 5 Alarm BIT 1 6 Warning BIT 1 7 Turbo_Speed INT 16 16 Turbo_Current INT 16 32 Turbo_pump_temperature INT 16 48 VibrationH INT 16 64 VibrationB INT 16 80 VibrationZ INT 16 96 STR_CDG200D 192 Reading_Valid1 BOOL 8 0 Overrange_Exceeded1 BOOL 8 8 Underrange_Exceeded1 BOOL 8 16 Sensor_Value1 REAL 32 32 Reading_Valid2 BOOL 8 64 Overrange_Exceeded2 BOOL 8 72 Underrange_Exceeded2 BOOL 8 80 Sensor_Value2 REAL 32 96 Active_Exception_Status USINT 8 128 Trip_Point_Output_All_Insta UDINT 32 160 STR_BPG400 224 Combination_Gauge_Reading_Valid_Module_1 BIT 1 0 Combination_Gauge_Overrange_Exceeded_Module_1 BIT 1 1 Combination_Gauge_Underrange_Exceeded_Module_1 BIT 1 2 Combination_Gauge_Active_Value_Module_1 REAL 32 32 Combination_Gauge_Active_Sensor_Number_Module_1 UINT 16 64 Combination_Gauge_Reading_Valid_Module_2 BIT 1 80 Combination_Gauge_Overrange_Exceeded_Module_2 BIT 1 81 Combination_Gauge_Underrange_Exceeded_Module_2 BIT 1 82 Combination_Gauge_Active_Value_Module_2 REAL 32 96 Combination_Gauge_Active_Sensor_Number_Module_2 UINT 16 128 Active_Exception_Status USINT 8 144 Trip_Point_Output_All_Instance UDINT 32 160 WcState BIT 1 192 InputToggle BIT 1 193 State UINT 16 208 CHILLER_IN 288 Module1_Word UINT 1 2 32 0 Module2_Word UINT 1 16 256 32 SPLC_TO_PLC 184 EV1_EN BOOL 8 0 EV2_EN BOOL 8 8 EV3_EN BOOL 8 16 EV4_EN BOOL 8 24 HTR_APC_EN BOOL 8 32 HTR_CHAMBER_EN BOOL 8 40 HTR_FORLINE_EN BOOL 8 48 HTR_GAS_BOX BOOL 8 56 HTR_GATE_VALVE BOOL 8 64 HTR_LID BOOL 8 72 PROCESS_EN BOOL 8 80 DRY_PUMP_PW_EN BOOL 8 88 TMP_PW_EN BOOL 8 96 TRANSFER_EN BOOL 8 104 VALVE_ACID_EXHAUST_OPEN_EN BOOL 8 112 VALVE_CM_OPEN_EN BOOL 8 120 VALVE_DRY_PUMP_EN BOOL 8 128 VALVE_TMP_BACK_OPEN_EN BOOL 8 136 VALVE_APC_OPEN_EN BOOL 8 144 WAFER_MOVING_IN_EN BOOL 8 152 Status_Lid BOOL 8 160 SPLC_Com_err BOOL 8 168 SPLC_FB_Err BOOL 8 176 TMP_OUT 8 Turbo_Start_Stop BIT 1 0 Turbo_Reset_Alarm BIT 1 1 Turbo_Low_Speed BIT 1 2 CHAMBER_OUT 416 C07 BOOL 1 16 128 0 C08 BOOL 1 16 128 128 C09 BOOL 1 16 128 256 C14 BOOL 1 4 32 384 IGS_OUT 160 C42 BOOL 1 16 128 0 C43 BOOL 1 4 32 128 STR_FCSP700_OUTPUT 128 Flow_SP REAL 32 0 Actuator_Control USINT 8 32 Actuator_Position_SP REAL 32 64 Ramp_Time UDINT 32 96 ARRAY [1..10] OF STR_FCSP700_OUTPUT 1280 STR_FCSP700_OUTPUT 1 10 STR_EX260_SEC 32 A USINT 8 0 B USINT 8 8 C USINT 8 16 D USINT 8 24 VAT_OUT 192 Target_Pressure REAL 32 0 Target_Position REAL 32 32 Pressure_Input_Digital_Sensor_1 REAL 32 64 Pressure_Input_Digital_Sensor_2 REAL 32 96 Control_Mode SINT 8 128 General_Control_Setpoint UINT 16 144 Pressure_Ramp_Time REAL 32 160 CHILLER_OUT 288 Module1_Word UINT 1 2 32 0 Module2_Word UINT 1 16 256 32 PLC_TO_SPLC 96 Lid_Temp_OK BOOL 8 0 Chamber_Temp_OK BOOL 8 8 APC_Temp_OK BOOL 8 16 Gate_Valve_Temp_OK BOOL 8 24 Gas_Line_Temp_OK BOOL 8 32 TMP_Interlock_OK BOOL 8 40 PS1_Interlock_OK BOOL 8 48 PS2_Interlock_OK BOOL 8 56 VG101_LOWER_10Torr BOOL 8 64 SPLC_ErrorAcknowledgement BOOL 8 72 SPLC_Restart BOOL 8 80 SPLC_Run BOOL 8 88 ARRAY [0..3] OF BIT 4 BIT 0 4 ARRAY [0..6] OF BIT 7 BIT 0 7 ARRAY [0..0] OF BIT 1 BIT 0 1 ARRAY [0..4] OF BIT 5 BIT 0 5 FSOE_6 48 FSoE CMD USINT 8 0 FSoE Data BITARR8 8 8 FSoE CRC_0 UINT 16 16 FSoE ConnID UINT 16 32 ARRAY [0..1] OF BIT 2 BIT 0 2 INFODATA_1790266199 8 Input Safe Data InputChannel1 BIT 1 0 Input Safe Data InputChannel2 BIT 1 1 Input Safe Data InputChannel3 BIT 1 2 Input Safe Data InputChannel4 BIT 1 3 INFODATA_3187781607 24 Input Safe Data FSIN Module 1.Input BIT 1 0 Input Safe Data FSIN Module 1.Module Fault BIT 1 1 Input Safe Data FSIN Module 2.Input BIT 1 2 Input Safe Data FSIN Module 2.Module Fault BIT 1 3 Input Safe Data FSIN Module 3.Input BIT 1 4 Input Safe Data FSIN Module 3.Module Fault BIT 1 5 Input Safe Data FSIN Module 4.Input BIT 1 6 Input Safe Data FSIN Module 4.Module Fault BIT 1 7 Input Safe Data FSIN Module 5.Input BIT 1 8 Input Safe Data FSIN Module 5.Module Fault BIT 1 9 Input Safe Data FSIN Module 6.Input BIT 1 10 Input Safe Data FSIN Module 6.Module Fault BIT 1 11 Input Safe Data FSIN Module 7.Input BIT 1 12 Input Safe Data FSIN Module 7.Module Fault BIT 1 13 Input Safe Data FSIN Module 8.Input BIT 1 14 Input Safe Data FSIN Module 8.Module Fault BIT 1 15 Output Safe Data FSIN Module 1.ErrAck BIT 1 16 Output Safe Data FSIN Module 2.ErrAck BIT 1 17 Output Safe Data FSIN Module 3.ErrAck BIT 1 18 Output Safe Data FSIN Module 4.ErrAck BIT 1 19 Output Safe Data FSIN Module 5.ErrAck BIT 1 20 Output Safe Data FSIN Module 6.ErrAck BIT 1 21 Output Safe Data FSIN Module 7.ErrAck BIT 1 22 Output Safe Data FSIN Module 8.ErrAck BIT 1 23 ARRAY [0..1] OF BYTE 16 BYTE 0 2 ARRAY [0..0] OF BYTE 8 BYTE 0 1 ARRAY [0..11] OF BIT 12 BIT 0 12 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PlcTask PLC Instance {08500001-0000-0000-F000-000000000064} PlcTask Inputs ECC.CHAMBER_IN CHAMBER_IN ECC.IGS_IN IGS_IN ECC.MFC_PV ARRAY [1..10] OF STR_FCSP700_INPUT ECC.APC_PV VAT_IN ECC.TURBO_PV TMP_IN ECC.VG103_PV STR_CDG200D ECC.VG101_PV STR_CDG200D ECC.VG102_PV STR_CDG200D ECC.BA1_PV STR_BPG400 ECC.VG104_PV STR_CDG200D ECC.CHILLER1_PV CHILLER_IN ECC.CHILLER2_PV CHILLER_IN GV_IL.SPLC_TO_PLC SPLC_TO_PLC PlcTask Outputs ECC.TURBO_SV TMP_OUT ECC.CHAMBER_OUT CHAMBER_OUT ECC.IGS_OUT IGS_OUT ECC.MFC_SV ARRAY [1..10] OF STR_FCSP700_OUTPUT ECC.EV1 STR_EX260_SEC ECC.EV2 STR_EX260_SEC ECC.EV3 STR_EX260_SEC ECC.EV4 STR_EX260_SEC ECC.APC_SV VAT_OUT ECC.CHILLER1_SV CHILLER_OUT ECC.CHILLER2_SV CHILLER_OUT GV_IL.PLC_TO_SPLC PLC_TO_SPLC 0 PlcTask #x02010030 20 10000000 COR_SPLC Instance Safety PO 1 Default Device 1 (EtherCAT)

-1855979520

131072 8192 0 3 0 5612 20480

0

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BIT BIT ARRAY [0..11] OF BIT 0000010001000400000000000000000000000000000000000000000000000000 290 Module 1 (FSOES) 118 020000002201000000000c000000000000000000000000000000000000000000 6656 5632 0000010001000400000000000000000000000000000000000000000000000000 200 Module 2 (DO) 118 02000000c8000000000004000000000000000000000000000000000000000000 5633 C15 (EL3318) 1001 001080002600010001000000800080008000001026010000 801080002200010002000000800080008000801022010000 001100002400000003000000000000000000001124010000 801120002000010004000000000000002000801120010000 0000000000000000000000020000000001000000000000000000000000000000 0000000000000000801100010100000002000000000000000000000000000000 00000000000000000d0800010100000003000000000000000000000000000000 0010f400f410f400 BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT 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BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT BIT BIT ARRAY [0..3] OF BIT BIT ARRAY [0..6] OF BIT BIT BIT INT INT INT INT INT INT INT INT INT C41 (EL9410) 1003 001001000000010004000000000000000000001000000000 0000000000000000001000010100000002000000000000000000000000000000 BIT BIT C42 (EL2889) 1002 000f01004400010003000000000000000100000f44090000 010f01004400010003000000000000000100010f44090000 0000000000000000000f00020100000001000000000000000000000000000000 BIT BIT BIT BIT BIT BIT BIT BIT BIT BIT BIT BIT BIT BIT BIT BIT C43 (EL2904) 118 001000012600010001000000400000010001001026010000 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