ST_LibVersion288iMajorUINT160iMinorUINT1616iBuildUINT1632iRevisionUINT1648nFlagsDWORD3264sVersionSTRING(23)19296ST_CTRL_CYCLE_TIME_INTERPRETATION128bInterpretCycleTimeAsTicksBOOL80fBaseTimeLREAL6464hideE_WATCHDOG_TIME_CONFIG16INTeWATCHDOG_TIME_DISABLED0eWATCHDOG_TIME_SECONDS1eWATCHDOG_TIME_MINUTES2TcEventSeverity16INT01234plcAttribute_qualified_onlyplcAttribute_strictTcEventEntryFlags8BYTE0#x1plcAttribute_qualified_onlyTcEventEntry192uuidEventClassGUID1280nEventIdUDINT32128eSeverityTcEventSeverity16160eFlagsTcEventEntryFlags8176UDINT (81..10000)32UDINTLowerBorder81UpperBorder10000E_S_UPS_State16INTeSUPS_PowerOK0eSUPS_PowerFailure1eSUPS_WritePersistentData2eSUPS_QuickShutdown3eSUPS_WaitForRecover4eSUPS_WaitForPowerOFF5LstPressure1456ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656PressureUnitModeSTRING(80)648672StartValueINT161328StartValueWarningRangeINT161344StartValueAlarmRangeINT161360ValvePositionPresetINT161376EnableRampBOOL81392HoldTimeINT161408RampTimeINT161424TargetValueINT161440LstGas1104ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656Gas1INT16672Gas1WarningRangeINT16688Gas1AlarmRangeINT16704Gas2INT16720Gas2WarningRangeINT16736Gas2AlarmRangeINT16752Gas3INT16768Gas3WarningRangeINT16784Gas3AlarmRangeINT16800Gas4INT16816Gas4WarningRangeINT16832Gas4AlarmRangeINT16848Gas5INT16864Gas5WarningRangeINT16880Gas5AlarmRangeINT16896Gas6INT16912Gas6WarningRangeINT16928Gas6AlarmRangeINT16944Gas7INT16960Gas7WarningRangeINT16976Gas7AlarmRangeINT16992Gas8INT161008Gas8WarningRangeINT161024Gas8AlarmRangeINT161040Gas9INT161056Gas9WarningRangeINT161072Gas9AlarmRangeINT161088LstHeater960ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656WallTempINT16672WallTempWaningRangeINT16688WallTempAlarmRangeINT16704LidTempINT16720LidTempWaningRangeINT16736LidTempAlarmRangeINT16752StageTemp1INT16768StageTemp1WaningRangeINT16784StageTemp1AlarmRangeINT16800StageTemp2INT16816StageTemp2WaningRangeINT16832StageTemp2AlarmRangeINT16848StageTemp3INT16864StageTemp3WaningRangeINT16880StageTemp3AlarmRangeINT16896StageTemp4INT16912StageTemp4WaningRangeINT16928StageTemp4AlarmRangeINT16944Lst3520PressureLstPressure14560GASLstGas11041456HeaterLstHeater9602560RecipeEachStep4304StepNoINT160CompletionSTRING(80)64816StepTimeINT16672AddTimeINT16688CycleStartBOOL8704CycleEndBOOL8712CycleNumberINT16720Lifter_UpBOOL8736AdjustTargetStepNoINT16752Lifter_DownBOOL8768LstUnitLst3520784TON256INBOOL864ItemTypeInputPTTIME3296ItemTypeInputQBOOL8128ItemTypeOutputETTIME32160ItemTypeOutputMBOOL8192StartTimeTIME32224PouTypeFunctionBlockTolerance2688ENABLEBOOL864ItemTypeInputSTEP_TYPESTRING(80)64872ItemTypeInputSTEP_TIMEINT16720ItemTypeInputTOL_VBOOL8736ItemTypeInputTOL_PBOOL8744ItemTypeInputSVINT16752ItemTypeInputPVREAL32768ItemTypeInputWARNING_RANGEINT16800ItemTypeInputALARM_RANGEINT16816ItemTypeInputDELAY_TIMEINT16832ItemTypeInputSTABLE_TIMEINT16848ItemTypeInputRSTBOOL8864ItemTypeInputSTU_WARNINGBOOL8872ItemTypeOutputSTU_ALARMBOOL8880ItemTypeOutputSTABLE_DONEBOOL8888ItemTypeOutputSV_SUB_WARNING_RANGEINT16896SV_ADD_WARNING_RANGEINT16912SV_DIV_WARNING_RANGEINT16928SV_MUL_WARNING_RANGEINT16944SV_SUB_ALARM_RANGEINT16960SV_ADD_ALARM_RANGEINT16976SV_DIV_ALARM_RANGEINT16992SV_MUL_ALARM_RANGEINT161008STU_WARNING_VBOOL81024STU_WARNING_PBOOL81032STU_ALARM_VBOOL81040STU_ALARM_PBOOL81048TON_DELAY_TIMETON2561088TON_DELAY_TIME_PTINT161344TON_ALARM_PTON2561408TON_ALARM_VTON2561664TON_WARNING_PTON2561920TON_WARNING_VTON2562176TON_STABLETON2562432PouTypeFunctionBlockR_TRIG128CLKBOOL864ItemTypeInputQBOOL872ItemTypeOutputMBOOL880conditionalshowPouTypeFunctionBlockconditionalshow_all_localsPROCESS41600ENABLEBOOL864ItemTypeInputNEXTSTEP_ENBOOL872ItemTypeInputAlarm_RSTBOOL880ItemTypeInputPMStableTimeINT1696ItemTypeInputSTEP_DATARecipeEachStep4304112ItemTypeInputAPC_PRESSUREREAL324416ItemTypeOutputAPC_POSITIONREAL324448ItemTypeOutputAPC_CONTROL_MODESINT84480ItemTypeOutputMFC1_SVREAL324512ItemTypeOutputMFC2_SVREAL324544ItemTypeOutputMFC3_SVREAL324576ItemTypeOutputMFC4_SVREAL324608ItemTypeOutputMFC5_SVREAL324640ItemTypeOutputMFC6_SVREAL324672ItemTypeOutputMFC7_SVREAL324704ItemTypeOutputMFC8_SVREAL324736ItemTypeOutputMFC9_SVREAL324768ItemTypeOutputWALL_TEMPREAL324800ItemTypeOutputLID_TEMPREAL324832ItemTypeOutputSTAGE_TEMP1REAL324864ItemTypeOutputSTAGE_TEMP2REAL324896ItemTypeOutputSTAGE_TEMP3REAL324928ItemTypeOutputSTAGE_TEMP4REAL324960ItemTypeOutputSTEP_TIME_OUTBOOL84992ItemTypeOutputSTEP_ERRBOOL85000ItemTypeOutputNEXTSTEPBOOL85008ItemTypeOutputPRESSURE_WARNINGBOOL85016ItemTypeOutputPRESSURE_ALARMBOOL85024ItemTypeOutputMFC1_WARNINGBOOL85032ItemTypeOutputMFC1_AlarmBOOL85040ItemTypeOutputMFC2_WARNINGBOOL85048ItemTypeOutputMFC2_AlarmBOOL85056ItemTypeOutputMFC3_WARNINGBOOL85064ItemTypeOutputMFC3_AlarmBOOL85072ItemTypeOutputMFC4_WARNINGBOOL85080ItemTypeOutputMFC4_AlarmBOOL85088ItemTypeOutputMFC5_WARNINGBOOL85096ItemTypeOutputMFC5_AlarmBOOL85104ItemTypeOutputMFC6_WARNINGBOOL85112ItemTypeOutputMFC6_AlarmBOOL85120ItemTypeOutputMFC7_WARNINGBOOL85128ItemTypeOutputMFC7_AlarmBOOL85136ItemTypeOutputMFC8_WARNINGBOOL85144ItemTypeOutputMFC8_AlarmBOOL85152ItemTypeOutputMFC9_WARNINGBOOL85160ItemTypeOutputMFC9_AlarmBOOL85168ItemTypeOutputWALL_TEMP_WARNINGBOOL85176ItemTypeOutputWALL_TEMP_AlarmBOOL85184ItemTypeOutputLID_TEMP_WARNINGBOOL85192ItemTypeOutputLID_TEMP_AlarmBOOL85200ItemTypeOutputSTAGE_TEMP1_WARNINGBOOL85208ItemTypeOutputSTAGE_TEMP1_AlarmBOOL85216ItemTypeOutputSTAGE_TEMP2_WARNINGBOOL85224ItemTypeOutputSTAGE_TEMP2_AlarmBOOL85232ItemTypeOutputSTAGE_TEMP3_WARNINGBOOL85240ItemTypeOutputSTAGE_TEMP3_AlarmBOOL85248ItemTypeOutputSTAGE_TEMP4_WARNINGBOOL85256ItemTypeOutputSTAGE_TEMP4_AlarmBOOL85264ItemTypeOutputSTEP_TIMETON2565312STEP_TIME_DONEBOOL85568COMPLETIONINT165584TOL_PRESSURE_PERCENTTolerance26885632TOL_PRESSURE_VALUE_ENBOOL88320TOL_PRESSURE_PERCENT_ENBOOL88328TOL_MFC1Tolerance26888384TOL_MFC2Tolerance268811072TOL_MFC3Tolerance268813760TOL_MFC5Tolerance268816448TOL_MFC6Tolerance268819136TOL_MFC7Tolerance268821824TOL_MFC_VALUE_ENBOOL824512TOL_MFC_PERCENT_ENBOOL824520TOL_WALL_TEMPTolerance268824576TOL_LID_TEMPTolerance268827264TOL_STAGE_TEMP1Tolerance268829952TOL_STAGE_TEMP2Tolerance268832640TOL_STAGE_TEMP3Tolerance268835328TOL_STAGE_TEMP4Tolerance268838016TOL_HEATER_VALUE_ENBOOL840704TOL_HEATER_PERCENT_ENBOOL840712TON_STEP_TIMETON25640768TON_STEP_TIME_ENBOOL841024WARNING_OCCBOOL841032ALARM_OCCBOOL841040iINT1641056STABLE_DONEBOOL841072EN_TRIGR_TRIG12841088TON_STABLE_PROCESSTON25641216CHAMBER_TEMP_MIN_VALUEREAL3241472STAGE_EDGE_TEMP_MIN_VALUEREAL3241504STAGE_CENTER_TEMP_MIN_VALUEREAL3241536PouTypeFunctionBlockT_AmsNetID192STRING(23)E_S_UPS_Mode16INTeSUPS_WrPersistData_Shutdown0eSUPS_WrPersistData_NoShutdown1eSUPS_ImmediateShutdown2eSUPS_CheckPowerStatus3E_PersistentMode16INTSPDM_2PASS0SPDM_VAR_BOOST1T_U64KAFFINITY64lowerDWORD3200higherDWORD32320conditionalshowT_AmsPort16UINTADSRDWRTEX1792NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputIDXGRPUDINT32288ItemTypeInputIDXOFFSUDINT32320ItemTypeInputWRITELENUDINT32352ItemTypeInputREADLENUDINT32384ItemTypeInputSRCADDRPVOID64448ItemTypeInputTcIgnorePersistentDESTADDRPVOID64512ItemTypeInputTcIgnorePersistentWRTRDBOOL8576ItemTypeInputTMOUTTIME326085000ItemTypeInputBUSYBOOL8640ItemTypeOutputERRBOOL8648ItemTypeOutputERRIDUDINT32672ItemTypeOutputCOUNT_RUDINT32704ItemTypeOutputPouTypeFunctionBlockhide_all_localsST_AdsBaDevApiIoCtlModifier128affinityT_U64KAFFINITY640.lower0.higher0flagsDWORD3264rsrvDWORD3296conditionalshowST_AdsBaDevApiHead192indexGroupUDINT320indexOffsetUDINT3232modifierST_AdsBaDevApiIoCtlModifier12864conditionalshowST_AdsBaDevApiReq8416headST_AdsBaDevApiHead1920inDataBYTE010258200192conditionalshowFB_BaDeviceIoControl11200sNetIDT_AmsNetID19264ItemTypeInputaffinityT_U64KAFFINITY64256.lower0.higher0ItemTypeInputnModifierUDINT323200ItemTypeInputnIdxGrpUDINT32352ItemTypeInputnIdxOffsUDINT32384ItemTypeInputcbWriteLenUDINT32416ItemTypeInputcbReadLenUDINT32448ItemTypeInputpWriteBuffPVOID64512ItemTypeInputpReadBuffPVOID64576ItemTypeInputbExecuteBOOL8640ItemTypeInputtTimeoutTIME326725000ItemTypeInputbBusyBOOL8704ItemTypeOutputbErrorBOOL8712ItemTypeOutputnErrIDUDINT32736ItemTypeOutputcbReadUDINT32768ItemTypeOutputfbRWADSRDWRTEX1792832.PORT10000.IDXGRP1100.IDXOFFS0reqST_AdsBaDevApiReq84162624stateBYTE811040rtrigR_TRIG12811072PouTypeFunctionBlockhideFB_BaGenGetVersion11840sNetIDT_AmsNetID19264ItemTypeInputbExecuteBOOL8256ItemTypeInputtTimeoutTIME322885000ItemTypeInputbBusyBOOL8320ItemTypeOutputbErrorBOOL8328ItemTypeOutputnErrIDUDINT32352ItemTypeOutputnVersionBYTE8384ItemTypeOutputnRevisionBYTE8392ItemTypeOutputnBuildWORD16400ItemTypeOutputfbCtrlFB_BaDeviceIoControl11200448.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp0.nIdxOffs0rtrigR_TRIG12811648stateBYTE811776rspDWORD3211808PouTypeFunctionBlockhideADSWRITE1344NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputIDXGRPUDINT32288ItemTypeInputIDXOFFSUDINT32320ItemTypeInputLENUDINT32352ItemTypeInputSRCADDRPVOID64384ItemTypeInputTcIgnorePersistentWRITEBOOL8448ItemTypeInputTMOUTTIME324805000ItemTypeInputBUSYBOOL8512ItemTypeOutputERRBOOL8520ItemTypeOutputERRIDUDINT32544ItemTypeOutputPouTypeFunctionBlockhide_all_localsFB_WritePersistentData1728NETIDT_AmsNetID19264ItemTypeInputPORTUINT16256ItemTypeInputSTARTBOOL8272ItemTypeInputTMOUTTIME322885000ItemTypeInputMODEE_PersistentMode16320E_PersistentMode.SPDM_2PASSItemTypeInputBUSYBOOL8336ItemTypeOutputERRBOOL8344ItemTypeOutputERRIDUDINT32352ItemTypeOutputfbAdsWriteADSWRITE1344384.IDXGRP139460625.IDXOFFS0conditionalshowPouTypeFunctionBlockconditionalshow_all_localsADSWRTCTL1344NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputADSSTATEUINT16272ItemTypeInputDEVSTATEUINT16288ItemTypeInputLENUDINT32320ItemTypeInputSRCADDRPVOID64384ItemTypeInputTcIgnorePersistentWRITEBOOL8448ItemTypeInputTMOUTTIME324805000ItemTypeInputBUSYBOOL8512ItemTypeOutputERRBOOL8520ItemTypeOutputERRIDUDINT32544ItemTypeOutputPouTypeFunctionBlockhide_all_localsFB_NT_QuickShutdown1920NETIDT_AmsNetID19264ItemTypeInputSTARTBOOL8256ItemTypeInputTMOUTTIME322885000ItemTypeInputBUSYBOOL8320ItemTypeOutputERRBOOL8328ItemTypeOutputERRIDUDINT32352ItemTypeOutputADSWRTCTL1ADSWRTCTL1344384RisingEdgeR_TRIG1281728DELAYDWORD3218564294967295PouTypeFunctionBlockconditionalshowST_WD_GPIO_InfoEx192nTypeUINT160nLengthUINT1616nFlagsWORD1632nReserved2UINT1648nAddressDWORD3264nReserved3DWORD3296nBitmaskDWORD32128nReserved4DWORD32160FB_S_UPS_BAPI74624sNetIDT_AmsNetID19264ItemTypeInputiPLCPortUINT16256ItemTypeInputtTimeoutTIME322885000ItemTypeInputeUpsModeE_S_UPS_Mode16320E_S_UPS_Mode.eSUPS_WrPersistData_ShutdownItemTypeInputePersistentModeE_PersistentMode16336E_PersistentMode.SPDM_2PASSItemTypeInputtRecoverTimeTIME3235210000ItemTypeInputbPowerFailDetectBOOL8384ItemTypeOutputeStateE_S_UPS_State16400E_S_UPS_State.eSUPS_PowerOKItemTypeOutputnCapacityBYTE84160ItemTypeOutputbBusyBOOL8424ItemTypeOutputbErrorBOOL8432ItemTypeOutputnErrIDUDINT32448ItemTypeOutputfbSUpsGetGpioInfoFB_BaDeviceIoControl11200512.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs161conditionalshownSUpsGetGpioInfoDWORD3211712conditionalshownGpioStateINT1611744conditionalshowfbSUpsGetStateFB_BaDeviceIoControl1120011776.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs1conditionalshownCapacityRspBYTE822976conditionalshowbChargingBOOL822984conditionalshowbDischargingBOOL822992conditionalshownGetStateINT1623008conditionalshownUpsStateINT1623024conditionalshowfbUpsStateTimerTON25623040.INtrueconditionalshowfbStartupTimerTON25623296.INtrue.PT0conditionalshownInitStateINT1623552conditionalshowdxValueDWORD3223584conditionalshowdxStatusDWORD3223616conditionalshowdxBitMaskDWORD3223648conditionalshownBitNoBYTE823680conditionalshowbBitLevelBOOL823688conditionalshowbStatusBOOL823696conditionalshowbLowActiveBOOL823704conditionalshowbHighActiveBOOL823712conditionalshowbOldSupsVersionBOOL823720trueconditionalshowfbSUpsEnableFB_BaDeviceIoControl1120023744.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs0conditionalshowbSUpsBOOL834944trueconditionalshowbSUpsEnableBOOL834952trueconditionalshownEnableStateINT1634960conditionalshowbEnableNotSupportedBOOL834976conditionalshowfbSUpsStatusFB_BaDeviceIoControl1120035008.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs1conditionalshownSUpsStatusBYTE8462080conditionalshowbSUpsStatusBOOL846216trueconditionalshowfbSUpsGetRevisionFB_BaDeviceIoControl1120046272.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs2conditionalshownSUpsVersionDataBYTE032457472conditionalshowbSUpsGetRevisionBOOL857496trueconditionalshowsSupsVersionSTRING(15)12857504conditionalshownRevisionStateINT1657632conditionalshowfbBaGenGetVersionFB_BaGenGetVersion1184057664conditionalshowbBaGenGetVersionBOOL869504trueconditionalshownVersionBYTE869512conditionalshownRevisionBYTE869520conditionalshownBuildWORD1669536conditionalshowsBaVersionSTRING(15)12869552conditionalshowbOldBaVersionBOOL869680trueconditionalshowbPowerFailDetectPrevBOOL869688conditionalshowbPowerOKInFirstCycleBOOL869696conditionalshowfbWritePersistentDataFB_WritePersistentData172869760conditionalshowfbNT_QuickShutdownFB_NT_QuickShutdown192071488conditionalshowWaitForOffTimerTON25673408conditionalshowbFirstCycleBOOL873664trueconditionalshowpAddress1BYTE6473728conditionalshowdxValue1BYTE873792conditionalshowdxBitMask1BYTE873800conditionalshowpAddress2WORD6473856conditionalshowdxValue2WORD1673920conditionalshowdxBitMask2WORD1673936conditionalshowpAddress4DWORD6473984conditionalshowdxValue4DWORD3274048conditionalshowdxBitMask4DWORD3274080conditionalshowpAddress8LWORD6474112conditionalshowdxValue8LWORD6474176conditionalshowdxBitMask8LWORD6474240conditionalshowbUseInfoBOOL874304TcPersistentconditionalshownIoAddrUDINT3274336TcPersistentconditionalshownOffsetBYTE874368TcPersistentconditionalshownParamsBYTE874376TcPersistentconditionalshowbUseInfoExBOOL874384TcPersistentconditionalshowstGpioInfoExST_WD_GPIO_InfoEx19274400TcPersistentconditionalshowPouTypeFunctionBlockconditionalshow_all_localsRANGEJD1280ENABLEBOOL864ItemTypeInputSVLREAL64128ItemTypeInputPVLREAL64192ItemTypeInputRANGE_ALARM_HLREAL64256ItemTypeInputRANGE_ALARM_LLREAL64320ItemTypeInputRANGE_WARNING_HLREAL64384ItemTypeInputRANGE_WARNING_LLREAL64448ItemTypeInputTIME_ALARMLREAL64512ItemTypeInputTIME_WARNINGLREAL64576ItemTypeInputALARMBOOL8640ItemTypeOutputWARNINGBOOL8648ItemTypeOutputTON_ALARMTON256704TON_WARNINGTON256960STATUS_ALARMBOOL81216STATUS_WARNINGBOOL81224PouTypeFunctionBlockSTR_EX260_SEC32AUSINT80BUSINT88CUSINT816DUSINT824TMP_OUT8Turbo_Start_StopBIT10Turbo_Reset_AlarmBIT11Turbo_Low_SpeedBIT12E_CTRL_MODE16INTeCTRL_MODE_IDLE0eCTRL_MODE_PASSIVE1eCTRL_MODE_ACTIVE2eCTRL_MODE_RESET3eCTRL_MODE_MANUAL4eCTRL_MODE_TUNE5eCTRL_MODE_SELFTEST6eCTRL_MODE_SYNC_MOVEMENT7eCTRL_MODE_FREEZE8E_CTRL_STATE16INTeCTRL_STATE_IDLE0eCTRL_STATE_PASSIVE1eCTRL_STATE_ACTIVE2eCTRL_STATE_RESET3eCTRL_STATE_MANUAL4eCTRL_STATE_TUNING5eCTRL_STATE_TUNED6eCTRL_STATE_SELFTEST7eCTRL_STATE_ERROR8eCTRL_STATE_SYNC_MOVEMENT9eCTRL_STATE_FREEZE10E_CTRL_ERRORCODES16INTeCTRL_ERROR_NOERROR0eCTRL_ERROR_INVALIDTASKCYCLETIME1eCTRL_ERROR_INVALIDCTRLCYCLETIME2eCTRL_ERROR_INVALIDPARAM3eCTRL_ERROR_INVALIDPARAM_Tv4eCTRL_ERROR_INVALIDPARAM_Td5eCTRL_ERROR_INVALIDPARAM_Tn6eCTRL_ERROR_INVALIDPARAM_Ti7eCTRL_ERROR_INVALIDPARAM_fHystereisisRange8eCTRL_ERROR_INVALIDPARAM_fPosOutOn_Off9eCTRL_ERROR_INVALIDPARAM_fNegOutOn_Off10eCTRL_ERROR_INVALIDPARAM_TableDescription11eCTRL_ERROR_INVALIDPARAM_TableData12eCTRL_ERROR_INVALIDPARAM_DataTableADR13eCTRL_ERROR_INVALIDPARAM_T014eCTRL_ERROR_INVALIDPARAM_T115eCTRL_ERROR_INVALIDPARAM_T216eCTRL_ERROR_INVALIDPARAM_T317eCTRL_ERROR_INVALIDPARAM_Theta18eCTRL_ERROR_INVALIDPARAM_nOrder19eCTRL_ERROR_INVALIDPARAM_Tt20eCTRL_ERROR_INVALIDPARAM_Tu21eCTRL_ERROR_INVALIDPARAM_Tg22eCTRL_ERROR_INVALIDPARAM_infinite_slope23eCTRL_ERROR_INVALIDPARAM_fMaxIsLessThanfMin24eCTRL_ERROR_INVALIDPARAM_fOutMaxLimitIsLessThanfOutMinLimit25eCTRL_ERROR_INVALIDPARAM_fOuterWindow26eCTRL_ERROR_INVALIDPARAM_fInnerWindow27eCTRL_ERROR_INVALIDPARAM_fOuterWindowIsLessThanfInnerWindow28eCTRL_ERROR_INVALIDPARAM_fDeadBandInput29eCTRL_ERROR_INVALIDPARAM_fDeadBandOutput30eCTRL_ERROR_INVALIDPARAM_PWM_Cycletime31eCTRL_ERROR_INVALIDPARAM_no_Parameterset32eCTRL_ERROR_INVALIDPARAM_fOutOn33eCTRL_ERROR_INVALIDPARAM_fOutOff34eCTRL_ERROR_INVALIDPARAM_fGain35eCTRL_ERROR_INVALIDPARAM_fOffset36eCTRL_ERROR_MODE_NOT_SUPPORTED37eCTRL_ERROR_INVALIDPARAM_Tv_heating38eCTRL_ERROR_INVALIDPARAM_Td_heating39eCTRL_ERROR_INVALIDPARAM_Tn_heating40eCTRL_ERROR_INVALIDPARAM_Tv_cooling41eCTRL_ERROR_INVALIDPARAM_Td_cooling42eCTRL_ERROR_INVALIDPARAM_Tn_cooling43eCTRL_ERROR_RANGE_NOT_SUPPORTED44eCTRL_ERROR_INVALIDPARAM_nParameterChangeCycleTicks45eCTRL_ERROR_ParameterEstimationFailed46eCTRL_ERROR_NoiseLevelToHigh47eCTRL_ERROR_INTERNAL_ERROR_048eCTRL_ERROR_INTERNAL_ERROR_149eCTRL_ERROR_INTERNAL_ERROR_250eCTRL_ERROR_INTERNAL_ERROR_351eCTRL_ERROR_INTERNAL_ERROR_452eCTRL_ERROR_INTERNAL_ERROR_553eCTRL_ERROR_INTERNAL_ERROR_654eCTRL_ERROR_INTERNAL_ERROR_755eCTRL_ERROR_INTERNAL_ERROR_856eCTRL_ERROR_INTERNAL_ERROR_957eCTRL_ERROR_INVALIDPARAM_WorkArrayADR58eCTRL_ERROR_INVALIDPARAM_tOnTime59eCTRL_ERROR_INVALIDPARAM_tOffTime60eCTRL_ERROR_INVALIDPARAM_nMaxMovingPulses61eCTRL_ERROR_INVALIDPARAM_nAdditionalPulsesAtLimits62eCTRL_ERROR_INVALIDPARAM_fCtrlOutMax_Min63eCTRL_ERROR_INVALIDPARAM_fDeltaMax64eCTRL_ERROR_INVALIDPARAM_tMovingTime65eCTRL_ERROR_INVALIDPARAM_tDeadTime66eCTRL_ERROR_INVALIDPARAM_tAdditionalMoveTimeAtLimits67eCTRL_ERROR_INVALIDPARAM_fThreshold68eCTRL_ERROR_MEMCPY69eCTRL_ERROR_MEMSET70eCTRL_ERROR_INVALIDPARAM_nNumberOfColumns71eCTRL_ERROR_FileClose72eCTRL_ERROR_FileOpen73eCTRL_ERROR_FileWrite74eCTRL_ERROR_INVALIDPARAM_fVeloNeg75eCTRL_ERROR_INVALIDPARAM_fVeloPos76eCTRL_ERROR_INVALIDPARAM_DeadBandInput77eCTRL_ERROR_INVALIDPARAM_DeadBandOutput78eCTRL_ERROR_INVALIDPARAM_CycleDuration79eCTRL_ERROR_INVALIDPARAM_tStart80eCTRL_ERROR_INVALIDPARAM_StepHeigthTuningToLow81eCTRL_ERROR_INVALIDPARAM_fMinLimitIsLessThanZero82eCTRL_ERROR_INVALIDPARAM_fMaxLimitIsGreaterThan10083eCTRL_ERROR_INVALIDPARAM_fStepSize84eCTRL_ERROR_INVALIDPARAM_fOkRangeIsLessOrEqualZero85eCTRL_ERROR_INVALIDPARAM_fForceRangeIsLessOrEqualfOkRange86eCTRL_ERROR_INVALIDPWMPeriod87eCTRL_ERROR_INVALIDPARAM_tMinimumPulseTime88eCTRL_ERROR_FileDelete89eCTRL_ERROR_INVALIDPARAM_nNumberOfPwmOutputs90eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_SIZEOF91eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_SIZEOF92eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_SIZEOF93eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_SIZEOF94eCTRL_ERROR_SIZEOF95eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction96eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_SIZEOF97eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_SIZEOF98eCTRL_ERROR_INVALIDPARAM_a_n_IsZero99eCTRL_ERROR_INVALIDPARAM_WorkArraySIZEOF100eCTRL_ERROR_INVALIDPARAM_MOVINGRANGE_MIN_MAX101eCTRL_ERROR_INVALIDPARAM_MOVINGTIME102eCTRL_ERROR_INVALIDPARAM_DEADTIME103eCTRL_ERROR_INVALIDPARAM_fMinLimitIsGreaterThanfMaxLimit104eCTRL_ERROR_INVALIDPARAM_DataTableSIZEOF105eCTRL_ERROR_INVALIDPARAM_OutputVectorDescription106eCTRL_ERROR_TaskCycleTimeIsLessThanOneMillisecond107eCTRL_ERROR_INVALIDPARAM_nMinMovingPulses108eCTRL_ERROR_INVALIDPARAM_fAcceleration109eCTRL_ERROR_INVALIDPARAM_fDeceleration110eCTRL_ERROR_INVALIDPARAM_StartAndTargetPos111eCTRL_ERROR_INVALIDPARAM_fVelocity112eCTRL_ERROR_INVALIDPARAM_fTargetPos113eCTRL_ERROR_INVALIDPARAM_fStartPos114eCTRL_ERROR_INVALIDPARAM_fMovingLength115eCTRL_ERROR_NT_GetTime116eCTRL_ERROR_INVALIDPARAM_No3PhaseSolutionPossible117eCTRL_ERROR_INVALIDPARAM_fStartVelo118eCTRL_ERROR_INVALIDPARAM_fTargetVelo119eCTRL_ERROR_INVALID_NEW_PARAMETER_TYPE120eCTRL_ERROR_INVALIDPARAM_fBaseTime121eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction_SIZEOF122eCTRL_ERROR_INVALIDPARAM_nFilterOrder124eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_SIZEOF125eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_SIZEOF126eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_SIZEOF127eCTRL_ERROR_INVALIDPARAM_nLogBuffer_SIZEOF128eCTRL_ERROR_LogBufferOverflow129eCTRL_ERROR_INVALIDPARAM_nLogBuffer_ADR130eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_ADR131eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_ADR132eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_ADR133eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_ADR134eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_ADR135eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_ADR136eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_ADR137eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_ADR138eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_ADR139eCTRL_ERROR_INVALIDPARAM_nTransferfunction1Data_ADR140eCTRL_ERROR_INVALIDPARAM_nTransferfunction2Data_ADR141eCTRL_ERROR_FileSeek142eCTRL_ERROR_INVALIDPARAM_AmbientTempMaxIsLessThanAmbientTempMin143eCTRL_ERROR_INVALIDPARAM_ForerunTempMaxIsLessThanForerunTempMin144eCTRL_ERROR_INVALIDLOGCYCLETIME145eCTRL_ERROR_INVALIDVERSION_TcControllerToolbox146eCTRL_ERROR_INVALIDPARAM_Bandwidth147eCTRL_ERROR_INVALIDPARAM_NotchFrequency148eCTRL_ERROR_INVALIDPARAM_DampingCoefficient149eCTRL_ERROR_INVALIDPARAM_fKpIsLessThanZero150eCTRL_ERROR_INVALIDPARAM_nSamplesToFilter151ST_CTRL_PID_PARAMS448tCtrlCycleTimeTIME3200tTaskCycleTimeTIME32320fKpLREAL64640tTnTIME321280tTvTIME321600tTdTIME321920fOutMaxLimitLREAL642561E+38fOutMinLimitLREAL64320-1E+38bPInTheFeedbackPathBOOL8384falsebDInTheFeedbackPathBOOL8392falsebARWOnIPartOnlyBOOL8400falseFB_License64PouTypeFunctionBlockhideFB_CTRL_PID2944fSetpointValueLREAL6464ItemTypeInputfActualValueLREAL64128ItemTypeInputfManSyncValueLREAL64192ItemTypeInputbSyncBOOL8256ItemTypeInputeModeE_CTRL_MODE16272ItemTypeInputbHoldBOOL8288ItemTypeInputfOutLREAL64320ItemTypeOutputbARWactiveBOOL8384ItemTypeOutputeStateE_CTRL_STATE16400ItemTypeOutputeErrorIdE_CTRL_ERRORCODES16416ItemTypeOutputbErrorBOOL8432ItemTypeOutputstParamsST_CTRL_PID_PARAMS64448ItemTypeInOutstInternalParamsST_CTRL_PID_PARAMS448512stInternalCycleTimeInterpretationST_CTRL_CYCLE_TIME_INTERPRETATION128960bFirstInitBOOL81088truebFirstCallAfterAStateChangeBOOL81096falsefD_ILREAL641152fC_DLREAL641216fD_DLREAL641280fTaskCycleTimeLREAL641344fCtrlCycleTimeLREAL641408fHalfCtrlCycleTimeLREAL641472fTnLREAL641536fTvLREAL641600fTdLREAL641664bIPartEnabledBOOL81728bDPartEnabledBOOL81736fSyncValueInternalLREAL641792fLimitValueLREAL641856fELREAL6419200fE_1LREAL6419840fY_PLREAL6420480fY_ILREAL6421120fY_I_1LREAL6421760fY_DLREAL6422400fY_D_1LREAL6423040fYLREAL6423680fY_1LREAL6424320fActValLREAL6424960fActVal_1LREAL6425600nCtrlCycleTicksUDINT322624nActCtrlCycleTickUDINT322656eMode_oldE_CTRL_MODE162688bMaxLimitReachedBOOL82704bMinLimitReachedBOOL82712bSyncRequestBOOL82720fbR_TRIGR_TRIG1282752fbLicenseFB_License642880M_ErrorM_ResetM_ManualM_ActiveM_StateChangeM_PassiveM_InitPouTypeFunctionBlockPID_AutoTune896PVREAL3264ItemTypeInputAutoTuneActiveBOOL896ItemTypeInputStepResponseAmplitudeREAL3212820ItemTypeInputOutputREAL32160ItemTypeOutputKpREAL32192ItemTypeOutputKiREAL32224ItemTypeOutputKdREAL32256ItemTypeOutputDoneBOOL8288ItemTypeOutputStepResponseStartTimeREAL323200StepResponsePVStartREAL32352StepResponsePVEndREAL32384StepResponseTimeREAL32416KuREAL32448TuREAL32480CurrentTimeREAL32512NT_TimeTIME32544D_DecTON256576monitorREAL32832PouTypeFunctionBlockTemp_controller7360ENABLEBOOL864ItemTypeInputAUTO_TUNEBOOL872ItemTypeInputAUTO_TUNE_OUTPUTREAL3296ItemTypeInputTEMP_SVREAL32128ItemTypeInputTEMP_ACTUALREAL32160ItemTypeInputTEMP_RATEREAL32192ItemTypeInputPID_PREAL32224ItemTypeInputPID_IREAL32256ItemTypeInputPID_DREAL32288ItemTypeInputPID_DpREAL32320ItemTypeInputPID_FeedforwardREAL32352ItemTypeInputPID_Output_LimitREAL32384ItemTypeInputPID_AUTO_TUNE_PREAL32416ItemTypeOutputPID_AUTO_TUNE_IREAL32448ItemTypeOutputPID_AUTO_TUNE_DREAL32480ItemTypeOutputPID_AUTO_TUNE_DONEBOOL8512ItemTypeOutputSCR_OUTREAL32544ItemTypeOutputSSR_ONBOOL8576ItemTypeOutputSAMPLING_TIMETIME32608TPID_NMFB_CTRL_PID2944640PID_PARAMSST_CTRL_PID_PARAMS4483584PID_MODEE_CTRL_MODE164032PID_OUTPUTLREAL644096PID_FUC_STATEE_CTRL_STATE164160PID_ERRIDE_CTRL_ERRORCODES164176PID_ERRBOOL84192PID_TASKTIMETIME324224TPID_CYCLETIMETIME324256TSSR_ON_PERCENTREAL324288TEMP_DATA_ARRREAL1103204320FIRST_RUNR_TRIG1284672SAMPLING_TON1TON2564800SAMPLING_TON2TON2565056SAMPLING_TON1_ENBOOL85312SAMPLING_TON2_ENBOOL85320TEMP_AVERAGEREAL325344iINT165376SSR_ON_TIMETIME325408SSR_RESET_TIMETIME325440SSR_ON_TONTON2565504SSR_RESET_TONTON2565760SSR_ON_ENABLEBOOL86016SSR_RESET_ENABLEBOOL86024PID_AUTO_TUNEPID_AutoTune8966080TON_FOR_RATETON2566976CACHE_TEMP_SVREAL327232TEMP_SV_TO_PIDREAL327264EACH_STEP_TEMPREAL327296PouTypeFunctionBlockCHAMBER_IN832C02BOOL1161280C03BOOL116128128C04INT18128256C05INT18128384C06INT1464512C11BOOL1864576C12BOOL1432640C13BOOL1432672C15INT18128704IGS_IN704C32INT14640C33INT146464C34INT1464128C35INT1464192C36BOOL116128256C37BOOL116128384C38BOOL1432512C39BOOL1432544C40INT18128576STR_FCSP700_INPUT224Active_Exception_StatusUSINT80Flow_ReadingREAL3232Pressure_ReadingREAL3264Temperature_ReadingREAL3296Position_ReadbackREAL32128Position_SetpointREAL32160WcStateBIT1192InputToggleBIT1193StateUINT16208VAT_IN224Actual_PressureREAL320Pressure_Sensor_1REAL3232Pressure_Sensor_2REAL3264Actual_PositionREAL3296Control_ModeSINT8128Error_NumberUINT16144General_StatusUINT16160General_WarningsUINT16176Extended_WarningsUINT16192TMP_IN112RotationBIT10NormalBIT11AccelerationBIT12Deceleration_Includes_BrakingBIT13Remote_LocalBIT14Turbo_Low_SpeedBIT15AlarmBIT16WarningBIT17Turbo_SpeedINT1616Turbo_CurrentINT1632Turbo_pump_temperatureINT1648VibrationHINT1664VibrationBINT1680VibrationZINT1696STR_CDG200D192Reading_Valid1BOOL80Overrange_Exceeded1BOOL88Underrange_Exceeded1BOOL816Sensor_Value1REAL3232Reading_Valid2BOOL864Overrange_Exceeded2BOOL872Underrange_Exceeded2BOOL880Sensor_Value2REAL3296Active_Exception_StatusUSINT8128Trip_Point_Output_All_InstaUDINT32160STR_BPG400224Combination_Gauge_Reading_Valid_Module_1BIT10Combination_Gauge_Overrange_Exceeded_Module_1BIT11Combination_Gauge_Underrange_Exceeded_Module_1BIT12Combination_Gauge_Active_Value_Module_1REAL3232Combination_Gauge_Active_Sensor_Number_Module_1UINT1664Combination_Gauge_Reading_Valid_Module_2BIT180Combination_Gauge_Overrange_Exceeded_Module_2BIT181Combination_Gauge_Underrange_Exceeded_Module_2BIT182Combination_Gauge_Active_Value_Module_2REAL3296Combination_Gauge_Active_Sensor_Number_Module_2UINT16128Active_Exception_StatusUSINT8144Trip_Point_Output_All_InstanceUDINT32160WcStateBIT1192InputToggleBIT1193StateUINT16208CHAMBER_OUT416C07BOOL1161280C08BOOL116128128C09BOOL116128256C14BOOL1432384IGS_OUT160C42BOOL1161280C43BOOL1432128STR_FCSP700_OUTPUT128Flow_SPREAL320Actuator_ControlUSINT832Actuator_Position_SPREAL3264Ramp_TimeUDINT3296VAT_OUT192Target_PressureREAL320Target_PositionREAL3232Pressure_Input_Digital_Sensor_1REAL3264Pressure_Input_Digital_Sensor_2REAL3296Control_ModeSINT8128General_Control_SetpointUINT16144Pressure_Ramp_TimeREAL32160STR_NDI904HeartbeatBOOL80AV101_OPENBOOL88AV101_CLOSEBOOL816AV102_OPENBOOL824AV102_CLOSEBOOL832AV103_OPENBOOL840AV103_CLOSEBOOL848AV104_OPENBOOL856AV104_CLOSEBOOL864AV105_OPENBOOL872AV105_CLOSEBOOL880AV106_OPENBOOL888AV106_CLOSEBOOL896CY1_OPENBOOL8104CY1_CLOSEBOOL8112CY2_OPENBOOL8120CY2_CLOSEBOOL8128GV1_OPENBOOL8136GV1_CLOSEBOOL8144Lid_ClosedBOOL8152Water_Leak_Sensor01BOOL8160Water_Leak_Sensor02BOOL8168Water_Leak_Sensor03BOOL8176Water_Leak_Sensor04BOOL8184WAFER_CHECK_SENSOR1BOOL8192WAFER_CHECK_SENSOR2BOOL8200WAFER_CHECK_SENSOR3BOOL8208WAFER_CHECK_SENSOR4BOOL8216PS10_H_ALMBOOL8224PS10_L_ALMBOOL8232PS11_H_ALMBOOL8240PS11_L_ALMBOOL8248PS12_H_ALMBOOL8256PS12_L_ALMBOOL8264LID_heater_OTBOOL8272Chamber_heater_OTBOOL8280Chiller_Controller_ALMBOOL8288PG_PS1_Pressure_Switch_Up_LimitBOOL8296PG_PS1_Pressure_Switch_Down_LimitBOOL8304PG_PS2_Pressure_Switch_Up_LimitBOOL8312PG_PS2_Pressure_Switch_Down_LimitBOOL8320PG_PS3_Pressure_Switch_Up_LimitBOOL8328PG_PS3_Pressure_Switch_Down_LimitBOOL8336PG_PS4_Pressure_Switch_Up_LimitBOOL8344PG_PS4_Pressure_Switch_Down_LimitBOOL8352PG_PS5_Pressure_Switch_Up_LimitBOOL8360PG_PS5_Pressure_Switch_Down_LimitBOOL8368PG_PS6_Pressure_Switch_Up_LimitBOOL8376PG_PS6_Pressure_Switch_Down_LimitBOOL8384PG_PS7_Pressure_Switch_Up_LimitBOOL8392PG_PS7_Pressure_Switch_Down_LimitBOOL8400PG_PS8_Pressure_Switch_Up_LimitBOOL8408PG_PS8_Pressure_Switch_Down_LimitBOOL8416PG_PS9_Pressure_Switch_Up_LimitBOOL8424PG_PS9_Pressure_Switch_Down_LimitBOOL8432MS1_Pressure_Switch_Up_LimitBOOL8440MS1_Pressure_Switch_Down_LimitBOOL8448PS1_Pressure_SwitchBOOL8456PS2_Pressure_SwitchBOOL8464HT001_OTBOOL8472HT002_OTBOOL8480HT003_OTBOOL8488HT004_OTBOOL8496HT005_OTBOOL8504HT006_OTBOOL8512Turbo_Pump_Heater_OTBOOL8520Pendulum_Valve_Heater_OTBOOL8528IGS_Heater_OTBOOL8536Tape_Heater_OTBOOL8544Foreline_Heater_OTBOOL8552Gate_Valve_OTBOOL8560Stage_Heater_OTBOOL8568CDA_OKBOOL8576Lift_Pin_Middle1BOOL8584Lift_Pin_Middle2BOOL8592FL01B2BOOL8600FL01B4BOOL8608FL02B2BOOL8616FL02B4BOOL8624FL03B2BOOL8632FL03B4BOOL8640FL04B2BOOL8648FL04B4BOOL8656DP01_OUTPUT1BOOL8664DP01_OUTPUT2BOOL8672MaualEndStepFeedBackBOOL8680AV1BOOL8688AV2BOOL8696AV3BOOL8704AV4BOOL8712AV6BOOL8720AV7BOOL8728AV9BOOL8736AV10BOOL8744AV11BOOL8752AV12BOOL8760AV13BOOL8768AV14BOOL8776AV16BOOL8784AV17BOOL8792AV19BOOL8800AV20BOOL8808AV22BOOL8816AV23BOOL8824AV25BOOL8832AV26BOOL8840AV27BOOL8848AV5BOOL8856AV8BOOL8864AV15BOOL8872AV18BOOL8880AV21BOOL8888AV24BOOL8896STR_NDO408HeartbeatBOOL80AV101BOOL88AV102BOOL816AV103BOOL824AV104BOOL832AV105BOOL840AV106BOOL848AV107BOOL856AV108BOOL864AV109BOOL872AV110BOOL880AV111BOOL888AV112BOOL896GV101CBOOL8104GV101OBOOL8112AV201BOOL8120AV202BOOL8128AC101BOOL8136AC102BOOL8144AC103BOOL8152AC104BOOL8160AC105BOOL8168AC106BOOL8176AV1BOOL8184AV2BOOL8192AV3BOOL8200AV4BOOL8208AV6BOOL8216AV7BOOL8224AV9BOOL8232AV10BOOL8240AV11BOOL8248AV12BOOL8256AV13BOOL8264AV14BOOL8272AV16BOOL8280AV17BOOL8288AV19BOOL8296AV20BOOL8304AV22BOOL8312AV23BOOL8320AV25BOOL8328AV26BOOL8336AV27BOOL8344AV5BOOL8352AV8BOOL8360AV15BOOL8368AV18BOOL8376AV21BOOL8384AV24BOOL8392MaualEndStepBOOL8400STR_AI2656VG101_PressureREAL320VG102_PressureREAL3232VG103_PressureREAL3264VG104_PressureREAL3296BA1_PressureREAL32128MFC1_FlowREAL32160MFC2_FlowREAL32192MFC3_FlowREAL32224MFC4_FlowREAL32256MFC5_FlowREAL32288MFC6_FlowREAL32320MFC7_FlowREAL32352CHILLER1_TEMP_PVREAL32384CHILLER1_DI_PVREAL32416CHILLER1_FLOW_PVREAL32448CHILLER1_PRESS_PVREAL32480CHILLER2_TEMP_PVREAL32512CHILLER2_DI_PVREAL32544CHILLER2_FLOW_PVREAL32576CHILLER2_PRESS_PVREAL32608Turbo_Pump_TempREAL32640APC_TempREAL32672Gate_Valve_TempREAL32704Gate_Valve_Temp_MonitorREAL32736IGS_Temp1REAL32768IGS_Temp2REAL32800IGS_Temp3REAL32832IGS_Temp4REAL32864Lid_TempREAL32896Lid_Temp_Monitor1REAL32928Lid_Temp_Monitor2REAL32960Tape_Temp1REAL32992Tape_Temp2REAL321024AV102_TempREAL321056AV101_TempREAL321088AV104_TempREAL321120AV105_TempREAL321152Exhaust1_3_TempREAL321184Exhaust4_7_TempREAL321216VG101_Pipe_TempREAL321248Chamber_Temp1REAL321280Chamber_Temp2REAL321312Chamber_Temp3REAL321344Chamber_Temp_MonitorREAL321376Stage_Temp1REAL321408Stage_Temp1_MonitorREAL321440Stage_Temp2REAL321472Stage_Temp2_MonitorREAL321504Stage_Temp3REAL321536Stage_Temp3_MonitorREAL321568Stage_Temp4REAL321600Stage_Temp4_MonitorREAL321632PG_PS1_ValueREAL321664PG_PS2_ValueREAL321696PG_PS3_ValueREAL321728PG_PS4_ValueREAL321760PG_PS5_ValueREAL321792PG_PS6_ValueREAL321824PG_PS7_ValueREAL321856PG_PS8_ValueREAL321888PG_PS9_ValueREAL321920PS1_ValueREAL321952PS2_ValueREAL321984MS1_ValueREAL322016GD01_ValueREAL322048GD02_ValueREAL322080APCVAT_IN2242112TMPTMP_IN1122336VG103_PVREAL322464VG101_PVREAL322496VG102_PVREAL322528BA1_PVREAL322560VG104_PVREAL322592Water_FlowREAL322624STR_AO1504MFC1_Flow_SetpointREAL320MFC1_Rate_SetpointREAL3232MFC2_Flow_SetpointREAL3264MFC2_Rate_SetpointREAL3296MFC3_Flow_SetpointREAL32128MFC3_Rate_SetpointREAL32160MFC4_Flow_SetpointREAL32192MFC4_Rate_SetpointREAL32224MFC5_Flow_SetpointREAL32256MFC5_Rate_SetpointREAL32288MFC6_Flow_SetpointREAL32320MFC6_Rate_SetpointREAL32352MFC7_Flow_SetpointREAL32384MFC7_Rate_SetpointREAL32416LID_Temp_SVREAL32448Chamber_Temp1_SVREAL32480Chamber_Temp2_SVREAL32512Chamber_Temp3_SVREAL32544AV102_Temp_SVREAL32576AV101_Temp_SVREAL32608AV104_Temp_SVREAL32640AV105_Temp_SVREAL32672Exhaust1_3_Temp_SVREAL32704Exhaust4_7_Temp_SVREAL32736VG101_Pipe_Temp_SVREAL32768Gate_Valve_Temp_SVREAL32800APC_Temp_SVREAL32832TMP_Temp_SVREAL32864Tape_Temp1_SVREAL32896Tape_Temp2_SVREAL32928Tape_Temp3_SVREAL32960Tape_Temp4_SVREAL32992IGS_Temp1_SVREAL321024IGS_Temp2_SVREAL321056Chiller_Temp1_SVREAL321088Chiller_Temp2_SVREAL321120Stage_Temp1_SVREAL321152Stage_Temp2_SVREAL321184Stage_Temp3_SVREAL321216Stage_Temp4_SVREAL321248APCVAT_OUT1921280TMPTMP_OUT81472ConfigPM1536TurboN2PressureINT160PrepareTransferTimeoutINT1616TransferWaferTimeoutINT1632OpenGasValveTimeoutINT1648CloseGasValveTimeoutINT1664OpenCloseSlitValveTimeoutINT1680GasFlowPressureAlarmRangeLREAL64128GasFlowPressureAlarmTimeLREAL64192GasFlowPressureWarningRangeLREAL64256GasFlowPressureWarningTimeLREAL64320EnableThrottleValveBOOL8384ValveHeaterSetPointLimitINT16400ForeLineHeaterSetPointLimitINT16416CheckSubstrateTempTimeoutINT16432CheckATMTimeoutINT16448OverVentTimeUINT16464ChamberBasePressureThresholdUDINT32480ChamberBaseTemperatureThresholdLREAL64512ProcessPressureOffsetLREAL64576PickDelayTimeINT16640PlaceDelayTimeINT16656ChamberLabelSTRING(80)648672WallHeaterSetPointLimitINT161328PendulumHeaterSetPointLimitINT161344EnableWallHeaterBOOL81360EnableGridHeaterBOOL81368RecipeRunningModeINT161376ForelineInterlockPressureLREAL641408IsEnableRecipeExtensionBOOL81472ControlPressureSetPointINT161488ControlPressureN2FlowSetPointINT161504PMStableTimeINT161520SVLREAL256MinSVLREAL640MaxSVLREAL6464PVLREAL64128SVLREAL64192SVINT64MinSVINT160MaxSVINT1616PVINT1632SVINT1648ConfigMfcVer1472BasePressureSVLREAL2560PumpingTimeSVINT64256GasFlowTimeSVINT64320HoldTimeSVINT64384TargetPressureSVLREAL256448MaxDeviationSVLREAL256704PressureStableToleranceSVLREAL256960FlowStableToleranceSVLREAL2561216ConfigChiller1792EnableBOOL80MFGSVINT6416CommTypeSVINT6480PortSTRING(80)648144TempOffsetSVLREAL256832MaxLimitSVLREAL2561088MinLimitSVLREAL2561344EnableAlarmToleranceBOOL81600ToleranceAlarmRangeSVINT641616ToleranceAlarmTimeSVINT641680ConfigDryPump1152MFGSVINT640CommTypeSVINT6464PortSTRING(80)648128ChamberForlinePressureToleranceSVLREAL256832ChamberForlinePressureTimeoutSVINT641088ConfigMfcGas1728EnableBOOL80GasNameSTRING(80)6488N2ScaleSVLREAL256704ScaleFactorSVLREAL256960DefaultSVSVINT641216FlowRegulationFactorSVINT641280EnableAlarmBOOL81344AlarmRangeSVINT641360AlarmTimeSVINT641424WarningRangeSVINT641488WarningTimeSVINT641552WriteModeSVINT641616ConfigPump2560LeakRateSVLREAL2560LeakCheckPumpingTimeSVINT64256LeakCheckHoldTimeSVINT64320PumpBasePressureSVINT64384LeakCheckBasePressurSVLREAL256448LeakCheckGasLineNumsSTRING(80)648704PumpTimeLimitSVLREAL2561408PumpValveDelaySVINT641664PumpCrossingPressureSVINT641728PumpVHe2FlowPressureSVINT641792LoadLockPumpBasePressureSVINT641856LoadLockPumpTimeLimitSVINT641920LoadLockPurgeVentPressureSVINT641984LoadLockPurgeCycleCountSVINT642048LoadLockPurgePumpTimeSVINT642112LoadLockLeakCheckPumpTimeSVINT642176LoadLockLeakCheckWaitTimeSVINT642240LoadLockLeakRateSVLREAL2562304ConfigPurge640PurgeCycleCountSVINT640PurgeVentPressureSVINT6464PurgePumpPressureSVINT64128PurgeVentTimeLimitSVINT64192PurgePumpTimeLimitSVINT64256PurgeVentStableTimeSVINT64320PurgePumpTimeSVINT64384GasPurgeCycleCountSVINT64448GasPurgeFlowTimeSVINT64512GasPurgePumpTimeSVINT64576ConfigHeater272HeaterTolerance_EnableBOOL80HeaterAlarmRangeSVINT6416HeaterAlarmTimeSVINT6480HeaterWarningRangeSVINT64144HeaterWarningTimeSVINT64208ConfigElectrostaticVoltageSource648PortSTRING(80)6480ConfigTurboPump1024PortSTRING(80)6480ChamberForelinePressureThresholdSVLREAL256704ChamberForelinePressureTimeoutSVINT64960ConfigPendulumValve912PortSTRING(80)6480PressureFullRangeSVINT64656ForelinePressureLimitSVINT64720ChamberPressureLimitSVINT64784TurboPumpSpeedLimitSVINT64848ConfigIdleClean1568OptionSVINT640IdleCleanRecipeSTRING(80)64864IdleCleanTimeSVINT64720IdleCleanWaferCountSVINT64784WaferCountSinceLastCleanSVINT64848LastRunTimeSTRING(80)648912ConfigEPD800IsEnabledBOOL80ChannelNumberSVINT6416IPAdressSTRING(80)64880EPDTypeSVINT64736ConfigHighTempChiller2816LiftServoPosition1SVLREAL2560LiftServoPosition2SVLREAL256256LiftServoPosition3SVLREAL256512LiftServoPosition4SVLREAL256768LiftServoPosition5SVLREAL2561024OriginSearchHighSpeedSVLREAL2561280OriginSearchLowSpeedSVLREAL2561536AbsMoveSpeedSVLREAL2561792MaxMoveSpeedSVLREAL2562048SoftDownLimitSVLREAL2562304SoftUpLimitSVLREAL2562560STR_PID192PREAL320IREAL3232DREAL3264DPREAL3296FeedforwardREAL32128Output_LimitREAL32160SPLC_TO_PLC184EV1_ENBOOL80EV2_ENBOOL88EV3_ENBOOL816EV4_ENBOOL824HTR_APC_ENBOOL832HTR_CHAMBER_ENBOOL840HTR_FORLINE_ENBOOL848HTR_GAS_BOXBOOL856HTR_GATE_VALVEBOOL864HTR_LIDBOOL872PROCESS_ENBOOL880DRY_PUMP_PW_ENBOOL888TMP_PW_ENBOOL896TRANSFER_ENBOOL8104VALVE_ACID_EXHAUST_OPEN_ENBOOL8112VALVE_CM_OPEN_ENBOOL8120VALVE_DRY_PUMP_ENBOOL8128VALVE_TMP_BACK_OPEN_ENBOOL8136VALVE_APC_OPEN_ENBOOL8144WAFER_MOVING_IN_ENBOOL8152Status_LidBOOL8160SPLC_Com_errBOOL8168SPLC_FB_ErrBOOL8176PLC_TO_SPLC104Lid_Temp_OKBOOL80Chamber_Temp_OKBOOL88APC_Temp_OKBOOL816Gate_Valve_Temp_OKBOOL824Gas_Line_Temp_OKBOOL832Stage_Temp_OKBOOL840TMP_Interlock_OKBOOL848PS1_Interlock_OKBOOL856PS2_Interlock_OKBOOL864VG101_LOWER_10TorrBOOL872SPLC_ErrorAcknowledgementBOOL880SPLC_RestartBOOL888SPLC_RunBOOL896Warning336PRESSUREBOOL80MFC1BOOL88MFC2BOOL816MFC3BOOL824MFC4BOOL832MFC5BOOL840MFC6BOOL848MFC7BOOL856MFC8BOOL864MFC9BOOL872WALL_TEMPBOOL880LID_TEMPBOOL888STAGE_TEMP1BOOL896STAGE_TEMP2BOOL8104STAGE_TEMP3BOOL8112STAGE_TEMP4BOOL8120OpenCloseSlitValveTimeoutBOOL8128Gas1FlowPressureOutOfRangeBOOL8136Gas2FlowPressureOutOfRangeBOOL8144Gas3FlowPressureOutOfRangeBOOL8152Gas4FlowPressureOutOfRangeBOOL8160Gas5FlowPressureOutOfRangeBOOL8168Gas6FlowPressureOutOfRangeBOOL8176Gas7FlowPressureOutOfRangeBOOL8184Gas8FlowPressureOutOfRangeBOOL8192Gas9FlowPressureOutOfRangeBOOL8200TOLERANCE_PRESSUREBOOL8208TOLERANCE_MFC1BOOL8216TOLERANCE_MFC2BOOL8224TOLERANCE_MFC3BOOL8232TOLERANCE_MFC4BOOL8240TOLERANCE_MFC5BOOL8248TOLERANCE_MFC6BOOL8256TOLERANCE_MFC7BOOL8264TOLERANCE_MFC8BOOL8272TOLERANCE_MFC9BOOL8280TOLERANCE_WALL_TEMPBOOL8288TOLERANCE_LID_TEMPBOOL8296TOLERANCE_STAGE_TEMP1BOOL8304TOLERANCE_STAGE_TEMP2BOOL8312TOLERANCE_STAGE_TEMP3BOOL8320TOLERANCE_STAGE_TEMP4BOOL8328Alarm416PRESSUREBOOL80MFC1BOOL88MFC2BOOL816MFC3BOOL824MFC4BOOL832MFC5BOOL840MFC6BOOL848MFC7BOOL856MFC8BOOL864MFC9BOOL872WALL_TEMPBOOL880LID_TEMPBOOL888STAGE_TEMP1BOOL896STAGE_TEMP2BOOL8104STAGE_TEMP3BOOL8112STAGE_TEMP4BOOL8120Gas1FlowPressureOutOfRangeBOOL8128Gas2FlowPressureOutOfRangeBOOL8136trueGas3FlowPressureOutOfRangeBOOL8144trueGas4FlowPressureOutOfRangeBOOL8152trueGas5FlowPressureOutOfRangeBOOL8160trueGas6FlowPressureOutOfRangeBOOL8168trueGas7FlowPressureOutOfRangeBOOL8176trueGas8FlowPressureOutOfRangeBOOL8184trueGas9FlowPressureOutOfRangeBOOL8192trueTurboN2PurgePressureOutOfRangeBOOL8200PrepareTransferTimeroutBOOL8208TransferWaferTimeoutBOOL8216OpenGasValveTimeoutBOOL8224CloseGasValveTimeoutBOOL8232OpenCloseSlitValveTimeoutBOOL8240ATMCheckTimeoutBOOL8248PLCBOOL8256DRY_PUMPBOOL8264PENDULUM_VALVEBOOL8272TURBO_PUMPBOOL8280TOLERANCE_PRESSUREBOOL8288TOLERANCE_MFC1BOOL8296TOLERANCE_MFC2BOOL8304TOLERANCE_MFC3BOOL8312TOLERANCE_MFC4BOOL8320TOLERANCE_MFC5BOOL8328TOLERANCE_MFC6BOOL8336TOLERANCE_MFC7BOOL8344TOLERANCE_MFC8BOOL8352TOLERANCE_MFC9BOOL8360TOLERANCE_WALL_TEMPBOOL8368TOLERANCE_LID_TEMPBOOL8376TOLERANCE_STAGE_TEMP1BOOL8384TOLERANCE_STAGE_TEMP2BOOL8392TOLERANCE_STAGE_TEMP3BOOL8400TOLERANCE_STAGE_TEMP4BOOL8408Info752WarningWarning3360AlarmAlarm416336ProcessRecipeFeedBack64ProcessStartBOOL80ProcessFinishedBOOL88ProcessErrorINT1616CurrentStepNoINT1632CurrentStepstartBOOL848CurrentStepFinishedBOOL856PlcLicenseInfo1024LicenseIdGUID1280InstancesUDINT32128LicenseNameSTRING(95)768256EPlcPersistentStatus8USINT012PlcAppSystemInfo2048ObjIdOTCID320TaskCntUDINT3232OnlineChangeCntUDINT3264FlagsDWORD3296AdsPortUINT16128BootDataLoadedBOOL8144OldBootDataBOOL8152AppTimestampDT32160KeepOutputsOnBPBOOL8192ShutdownInProgressBOOL8200LicensesPendingBOOL8208BSODOccuredBOOL8216LoggedInBOOL8224PersistentStatusEPlcPersistentStatus8232TComSrvPtrITComObjectServer32256TcComInterfaceAppNameSTRING(63)512512ProjectNameSTRING(63)5121024PlcTaskSystemInfo1024ObjIdOTCID320CycleTimeUDINT3232PriorityUINT1664AdsPortUINT1680CycleCountUDINT3296DcTaskTimeLINT64128LastExecTimeUDINT32192FirstCycleBOOL8224CycleTimeExceededBOOL8232InCallAfterOutputUpdateBOOL8240RTViolationBOOL8248TaskNameSTRING(63)512512_Implicit_KindOfTask16INT_implicit_cyclic0_implicit_event1_implicit_external2_implicit_freewheeling3hidegenerate_implicit_init_function_Implicit_Jitter_Distribution48wRangeMaxWORD160wCountJitterNegWORD1616wCountJitterPosWORD1632hide_Implicit_Task_Info896dwVersionDWORD320pszNameSTRING(80)6464nPriorityINT16128KindOf_Implicit_KindOfTask16144bWatchdogBOOL8160bProfilingTaskBOOL8168dwEventFunctionPointerBYTE64192pszExternalEventSTRING(80)64256dwTaskEntryFunctionPointerBYTE64320dwWatchdogSensitivityDWORD32384dwIntervalDWORD32416dwWatchdogTimeDWORD32448dwLastCycleTimeDWORD32480dwAverageCycleTimeDWORD32512dwMaxCycleTimeDWORD32544dwMinCycleTimeDWORD32576diJitterDINT32608diJitterMinDINT32640diJitterMaxDINT32672dwCycleCountDWORD32704wTaskStatusWORD16736wNumOfJitterDistributionsWORD16752pJitterDistribution_Implicit_Jitter_Distribution64768bWithinSPSTimeSlicingBOOL8832byDummyBYTE8840bShouldBlockBOOL8848bActiveBOOL8856dwIECCycleCountDWORD32864hidePLC{08500001-0000-0000-F000-000000000064}{1eebbaaa-51e1-4750-9d6a-7b04116ea32b}TF4110 Temperature Controller{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox0PlcTask#x020100300PlcTask Inputs0851968ECC.CHAMBER_IN832CHAMBER_INTcAddressTypeInputTcVarGlobal3774080ECC.IGS_IN704IGS_INTcAddressTypeInputTcVarGlobal3775328ECC.MFC_PV2240STR_FCSP700_INPUT110TcAddressTypeInputTcVarGlobal3776192ECC.APC_PV224VAT_INTcAddressTypeInputTcVarGlobal3779808ECC.TURBO_PV112TMP_INTcAddressTypeInputTcVarGlobal3780224ECC.VG103_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3780352ECC.VG101_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3780544ECC.VG102_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3780736ECC.BA1_PV224STR_BPG400TcAddressTypeInputTcVarGlobal3780928ECC.VG104_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3781152GV_IL.SPLC_TO_PLC184SPLC_TO_PLCTcAddressTypeInputTcVarGlobal42843601PlcTask Outputs0851968ECC.EV132STR_EX260_SECTcAddressTypeOutputTcVarGlobal3242256ECC.TURBO_SV8TMP_OUTTcAddressTypeOutputTcVarGlobal3242288ECC.CHAMBER_OUT416CHAMBER_OUTTcAddressTypeOutputTcVarGlobal3774912ECC.IGS_OUT160IGS_OUTTcAddressTypeOutputTcVarGlobal3776032ECC.MFC_SV1280STR_FCSP700_OUTPUT110TcAddressTypeOutputTcVarGlobal3778432ECC.EV232STR_EX260_SECTcAddressTypeOutputTcVarGlobal3779712ECC.EV332STR_EX260_SECTcAddressTypeOutputTcVarGlobal3779744ECC.EV432STR_EX260_SECTcAddressTypeOutputTcVarGlobal3779776ECC.APC_SV192VAT_OUTTcAddressTypeOutputTcVarGlobal3780032ECC.STAGE_SV128REAL14TcAddressTypeOutputTcVarGlobal3781344GV_IL.PLC_TO_SPLC104PLC_TO_SPLCTcAddressTypeOutputTcVarGlobal42845443PlcTask Internal0851968Global_Version.stLibVersion_Tc2_ControllerToolbox288ST_LibVersion.iMajor3.iMinor6.iBuild1.iRevision0.nFlags1.sVersion3.6.1.0const_non_replacedTcVarGlobal3072000Global_Variables.nCTRL_LOGGER_DATA_ARRAY_SIZE16UINT10TcVarGlobal3072288Global_Variables.AMSPORT_LOGGER16UINT100TcVarGlobal3072304Global_Variables.stCtrl_GLOBAL_CycleTimeInterpretation128ST_CTRL_CYCLE_TIME_INTERPRETATIONTcVarGlobal3072320Global_Version.stLibVersion_Tc2_Standard288ST_LibVersion.iMajor3.iMinor4.iBuild5.iRevision0.nFlags1.sVersion3.4.5.0const_non_replacedTcVarGlobal3072448Global_Version.stLibVersion_Tc2_System288ST_LibVersion.iMajor3.iMinor6.iBuild4.iRevision0.nFlags1.sVersion3.6.4.0const_non_replacedTcVarGlobal3072736Global_Variables.AMSPORT_EVENTLOG16UINT110TcVarGlobal3073024Global_Variables.AMSPORT_R0_RTIME16UINT200TcVarGlobal3073040Global_Variables.AMSPORT_R0_IO16UINT300TcVarGlobal3073056Global_Variables.AMSPORT_R0_NC16UINT500TcVarGlobal3073072Global_Variables.AMSPORT_R0_NCSAF16UINT501TcVarGlobal3073088Global_Variables.AMSPORT_R0_NCSVB16UINT511TcVarGlobal3073104Global_Variables.AMSPORT_R0_ISG16UINT550TcVarGlobal3073120Global_Variables.AMSPORT_R0_CNC16UINT600TcVarGlobal3073136Global_Variables.AMSPORT_R0_LINE16UINT700TcVarGlobal3073152Global_Variables.AMSPORT_R0_PLC16UINT800TcVarGlobal3073168Global_Variables.AMSPORT_R0_PLC_RTS116UINT801TcVarGlobal3073184Global_Variables.AMSPORT_R0_PLC_RTS216UINT811TcVarGlobal3073200Global_Variables.AMSPORT_R0_PLC_RTS316UINT821TcVarGlobal3073216Global_Variables.AMSPORT_R0_PLC_RTS416UINT831TcVarGlobal3073232Global_Variables.AMSPORT_R0_CAM16UINT900TcVarGlobal3073248Global_Variables.AMSPORT_R0_CAMTOOL16UINT950TcVarGlobal3073264Global_Variables.AMSPORT_R3_SYSSERV16UINT10000TcVarGlobal3073280Global_Variables.AMSPORT_R3_SCOPESERVER16UINT14001TcVarGlobal3073296Global_Variables.ADSSTATE_INVALID16UINT0TcVarGlobal3073312Global_Variables.ADSSTATE_IDLE16UINT1TcVarGlobal3073328Global_Variables.ADSSTATE_RESET16UINT2TcVarGlobal3073344Global_Variables.ADSSTATE_INIT16UINT3TcVarGlobal3073360Global_Variables.ADSSTATE_START16UINT4TcVarGlobal3073376Global_Variables.ADSSTATE_RUN16UINT5TcVarGlobal3073392Global_Variables.ADSSTATE_STOP16UINT6TcVarGlobal3073408Global_Variables.ADSSTATE_SAVECFG16UINT7TcVarGlobal3073424Global_Variables.ADSSTATE_LOADCFG16UINT8TcVarGlobal3073440Global_Variables.ADSSTATE_POWERFAILURE16UINT9TcVarGlobal3073456Global_Variables.ADSSTATE_POWERGOOD16UINT10TcVarGlobal3073472Global_Variables.ADSSTATE_ERROR16UINT11TcVarGlobal3073488Global_Variables.ADSSTATE_SHUTDOWN16UINT12TcVarGlobal3073504Global_Variables.ADSSTATE_SUSPEND16UINT13TcVarGlobal3073520Global_Variables.ADSSTATE_RESUME16UINT14TcVarGlobal3073536Global_Variables.ADSSTATE_CONFIG16UINT15TcVarGlobal3073552Global_Variables.ADSSTATE_RECONFIG16UINT16TcVarGlobal3073568Global_Variables.ADSSTATE_STOPPING16UINT17TcVarGlobal3073584Global_Variables.ADSSTATE_INCOMPATIBLE16UINT18TcVarGlobal3073600Global_Variables.ADSSTATE_EXCEPTION16UINT19TcVarGlobal3073616Global_Variables.ADSSTATE_MAXSTATES16UINT20TcVarGlobal3073632Global_Variables.BOOTDATAFLAGS_RETAIN_LOADED8BYTE1TcVarGlobal3073648Global_Variables.BOOTDATAFLAGS_RETAIN_INVALID8BYTE2TcVarGlobal3073656Global_Variables.ADSIGRP_SYMTAB32UDINT61440TcVarGlobal3073664Global_Variables.ADSIGRP_SYMNAME32UDINT61441TcVarGlobal3073696Global_Variables.ADSIGRP_SYMVAL32UDINT61442TcVarGlobal3073728Global_Variables.ADSIGRP_SYM_HNDBYNAME32UDINT61443TcVarGlobal3073760Global_Variables.ADSIGRP_SYM_VALBYNAME32UDINT61444TcVarGlobal3073792Global_Variables.ADSIGRP_SYM_VALBYHND32UDINT61445TcVarGlobal3073824Global_Variables.ADSIGRP_SYM_RELEASEHND32UDINT61446TcVarGlobal3073856Global_Variables.ADSIGRP_SYM_INFOBYNAME32UDINT61447TcVarGlobal3073888Global_Variables.ADSIGRP_SYM_VERSION32UDINT61448TcVarGlobal3073920Global_Variables.ADSIGRP_SYM_INFOBYNAMEEX32UDINT61449TcVarGlobal3073952Global_Variables.ADSIGRP_SYM_DOWNLOAD32UDINT61450TcVarGlobal3073984Global_Variables.ADSIGRP_SYM_UPLOAD32UDINT61451TcVarGlobal3074016Global_Variables.ADSIGRP_SYM_UPLOADINFO32UDINT61452TcVarGlobal3074048Global_Variables.ADSIGRP_SYMNOTE32UDINT61456TcVarGlobal3074080Global_Variables.ADSIGRP_IOIMAGE_RWIB32UDINT61472TcVarGlobal3074112Global_Variables.ADSIGRP_IOIMAGE_RWIX32UDINT61473TcVarGlobal3074144Global_Variables.ADSIGRP_IOIMAGE_RISIZE32UDINT61477TcVarGlobal3074176Global_Variables.ADSIGRP_IOIMAGE_RWOB32UDINT61488TcVarGlobal3074208Global_Variables.ADSIGRP_IOIMAGE_RWOX32UDINT61489TcVarGlobal3074240Global_Variables.ADSIGRP_IOIMAGE_ROSIZE32UDINT61493TcVarGlobal3074272Global_Variables.ADSIGRP_IOIMAGE_CLEARI32UDINT61504TcVarGlobal3074304Global_Variables.ADSIGRP_IOIMAGE_CLEARO32UDINT61520TcVarGlobal3074336Global_Variables.ADSIGRP_IOIMAGE_RWIOB32UDINT61536TcVarGlobal3074368Global_Variables.ADSIGRP_DEVICE_DATA32UDINT61696TcVarGlobal3074400Global_Variables.ADSIOFFS_DEVDATA_ADSSTATE32UDINT0TcVarGlobal3074432Global_Variables.ADSIOFFS_DEVDATA_DEVSTATE32UDINT2TcVarGlobal3074464Global_Variables.SYSTEMSERVICE_OPENCREATE32UDINT100TcVarGlobal3074496Global_Variables.SYSTEMSERVICE_OPENREAD32UDINT101TcVarGlobal3074528Global_Variables.SYSTEMSERVICE_OPENWRITE32UDINT102TcVarGlobal3074560Global_Variables.SYSTEMSERVICE_CREATEFILE32UDINT110TcVarGlobal3074592Global_Variables.SYSTEMSERVICE_CLOSEHANDLE32UDINT111TcVarGlobal3074624Global_Variables.SYSTEMSERVICE_FOPEN32UDINT120TcVarGlobal3074656Global_Variables.SYSTEMSERVICE_FCLOSE32UDINT121TcVarGlobal3074688Global_Variables.SYSTEMSERVICE_FREAD32UDINT122TcVarGlobal3074720Global_Variables.SYSTEMSERVICE_FWRITE32UDINT123TcVarGlobal3074752Global_Variables.SYSTEMSERVICE_FSEEK32UDINT124TcVarGlobal3074784Global_Variables.SYSTEMSERVICE_FTELL32UDINT125TcVarGlobal3074816Global_Variables.SYSTEMSERVICE_FGETS32UDINT126TcVarGlobal3074848Global_Variables.SYSTEMSERVICE_FPUTS32UDINT127TcVarGlobal3074880Global_Variables.SYSTEMSERVICE_FSCANF32UDINT128TcVarGlobal3074912Global_Variables.SYSTEMSERVICE_FPRINTF32UDINT129TcVarGlobal3074944Global_Variables.SYSTEMSERVICE_FEOF32UDINT130TcVarGlobal3074976Global_Variables.SYSTEMSERVICE_FDELETE32UDINT131TcVarGlobal3075008Global_Variables.SYSTEMSERVICE_FRENAME32UDINT132TcVarGlobal3075040Global_Variables.SYSTEMSERVICE_MKDIR32UDINT138TcVarGlobal3075072Global_Variables.SYSTEMSERVICE_RMDIR32UDINT139TcVarGlobal3075104Global_Variables.SYSTEMSERVICE_REG_HKEYLOCALMACHINE32UDINT200TcVarGlobal3075136Global_Variables.SYSTEMSERVICE_SENDEMAIL32UDINT300TcVarGlobal3075168Global_Variables.SYSTEMSERVICE_TIMESERVICES32UDINT400TcVarGlobal3075200Global_Variables.SYSTEMSERVICE_STARTPROCESS32UDINT500TcVarGlobal3075232Global_Variables.SYSTEMSERVICE_CHANGENETID32UDINT600TcVarGlobal3075264Global_Variables.TIMESERVICE_DATEANDTIME32UDINT1TcVarGlobal3075296Global_Variables.TIMESERVICE_SYSTEMTIMES32UDINT2TcVarGlobal3075328Global_Variables.TIMESERVICE_RTCTIMEDIFF32UDINT3TcVarGlobal3075360Global_Variables.TIMESERVICE_ADJUSTTIMETORTC32UDINT4TcVarGlobal3075392Global_Variables.TIMESERVICE_TIMEZONINFORMATION32UDINT6TcVarGlobal3075424Global_Variables.ADSLOG_MSGTYPE_HINT32DWORD1TcVarGlobal3075456Global_Variables.ADSLOG_MSGTYPE_WARN32DWORD2TcVarGlobal3075488Global_Variables.ADSLOG_MSGTYPE_ERROR32DWORD4TcVarGlobal3075520Global_Variables.ADSLOG_MSGTYPE_LOG32DWORD16TcVarGlobal3075552Global_Variables.ADSLOG_MSGTYPE_MSGBOX32DWORD32TcVarGlobal3075584Global_Variables.ADSLOG_MSGTYPE_RESOURCE32DWORD64TcVarGlobal3075616Global_Variables.ADSLOG_MSGTYPE_STRING32DWORD128TcVarGlobal3075648Global_Variables.BOOTDATAFLAGS_RETAIN_REQUESTED8BYTE4TcVarGlobal3075680Global_Variables.BOOTDATAFLAGS_PERSISTENT_LOADED8BYTE16TcVarGlobal3075688Global_Variables.BOOTDATAFLAGS_PERSISTENT_INVALID8BYTE32TcVarGlobal3075696Global_Variables.SYSTEMSTATEFLAGS_BSOD8BYTE1TcVarGlobal3075704Global_Variables.SYSTEMSTATEFLAGS_RTVIOLATION8BYTE2TcVarGlobal3075712Global_Variables.nWatchdogTime8BYTETcVarGlobal3075720Global_Variables.TCEVENTFLAG_PRIOCLASS16WORD16TcVarGlobal3075728Global_Variables.FOPEN_MODEREAD32DWORD1TcVarGlobal3075744Global_Variables.FOPEN_MODEWRITE32DWORD2TcVarGlobal3075776Global_Variables.FOPEN_MODEAPPEND32DWORD4TcVarGlobal3075808Global_Variables.FOPEN_MODEPLUS32DWORD8TcVarGlobal3075840Global_Variables.FOPEN_MODEBINARY32DWORD16TcVarGlobal3075872Global_Variables.FOPEN_MODETEXT32DWORD32TcVarGlobal3075904Global_Variables.TCEVENTFLAG_FMTSELF16WORD32TcVarGlobal3076160Global_Variables.TCEVENTFLAG_LOG16WORD64TcVarGlobal3076176Global_Variables.TCEVENTFLAG_MSGBOX16WORD128TcVarGlobal3076192Global_Variables.TCEVENTFLAG_SRCID16WORD256TcVarGlobal3076208Global_Variables.TCEVENTFLAG_AUTOFMTALL16WORD4096TcVarGlobal3076224Global_Variables.TCEVENTSTATE_INVALID16WORD0TcVarGlobal3076240Global_Variables.TCEVENTSTATE_SIGNALED16WORD1TcVarGlobal3076256Global_Variables.TCEVENTSTATE_RESET16WORD2TcVarGlobal3076272Global_Variables.TCEVENTSTATE_CONFIRMED16WORD16TcVarGlobal3076288Global_Variables.TCEVENTSTATE_RESETCON16WORD18TcVarGlobal3076304Global_Variables.TCEVENT_SRCNAMESIZE16INT15TcVarGlobal3076320Global_Variables.TCEVENT_FMTPRGSIZE16INT31TcVarGlobal3076336Global_Variables.PI64LREAL3.14159265358979TcVarGlobal3076352Global_Variables.DEFAULT_ADS_TIMEOUT32TIME5000TcVarGlobal3076416Global_Variables.MAX_STRING_LENGTH32UDINT255TcVarGlobal3076448Global_Variables.eWatchdogConfig16E_WATCHDOG_TIME_CONFIGE_WATCHDOG_TIME_CONFIG.eWATCHDOG_TIME_DISABLEDTcVarGlobal3077024Global_Constants.EMPTY_SEVERITY16TcEventSeverityTcEventSeverity.VerboseTcVarGlobal3077040Global_Version.stLibVersion_Tc3_Module288ST_LibVersion.iMajor3.iMinor4.iBuild5.iRevision0.nFlags1.sVersion3.4.5.0const_non_replacedTcVarGlobal3077056Global_Version.stLibVersion_Tc2_Utilities288ST_LibVersion.iMajor3.iMinor6.iBuild1.iRevision0.nFlags1.sVersion3.6.1.0const_non_replacedTcVarGlobal3077696Global_Constants.EMPTY_EVENT_CLASS128GUID.Data10.Data20.Data30.Data4[0]0.Data4[1]0.Data4[2]0.Data4[3]0.Data4[4]0.Data4[5]0.Data4[6]0.Data4[7]0TcVarGlobal3077984Global_Constants.EMPTY_EVENT_ID32UDINT0TcVarGlobal3078112Global_Constants.SUCCESS_EVENT192TcEventEntry.uuidEventClass.Data10.uuidEventClass.Data20.uuidEventClass.Data30.uuidEventClass.Data4[0]0.uuidEventClass.Data4[1]0.uuidEventClass.Data4[2]0.uuidEventClass.Data4[3]0.uuidEventClass.Data4[4]0.uuidEventClass.Data4[5]0.uuidEventClass.Data4[6]0.uuidEventClass.Data4[7]0.nEventID0.eSeverityGlobal_Constants.EMPTY_SEVERITYTcVarGlobal3078144GVL.nLangId_OnlineMonitoring32DINT1033TcVarGlobal3078336ParameterList.cSourceNameSize32UDINT (81..10000)256TcVarGlobal3078368Global_Version.stLibVersion_Tc3_EventLogger288ST_LibVersion.iMajor3.iMinor3.iBuild7.iRevision0.nFlags1.sVersion3.3.7.0const_non_replacedTcVarGlobal3078400Global_Version.stLibVersion_Tc2_SUPS288ST_LibVersion.iMajor3.iMinor3.iBuild8.iRevision0.nFlags0.sVersion3.3.8.0const_non_replacedTcVarGlobal3078688Global_Variables.eGlobalSUpsState16E_S_UPS_StateTcVarGlobal3079168MAIN.ENABLE8BOOL3079184MAIN.PROCESS_EN8BOOL3079192MAIN.PROCESS_RUN8BOOL3079200MAIN.PROCESS_STOP8BOOL3079208MAIN.P_NO16INT3079216MAIN.PROCESS41600PROCESS3091008MAIN.CYCLE_EN8BOOL3132608MAIN.NEXTSTEP_EN8BOOL3132616MAIN.CYCLE_NUM16INT3132624MAIN.CYCLE_START_STEP_NO16INT3132640MAIN.STEP_NO16INT3132656MAIN.UPS74624FB_S_UPS_BAPI3132672IL.RANGE_PG_PS11280RANGEJD3207680IL.RANGE_PG_PS21280RANGEJD3208960IL.RANGE_PG_PS31280RANGEJD3210240IL.RANGE_PG_PS41280RANGEJD3211520IL.RANGE_PG_PS51280RANGEJD3212800IL.RANGE_PG_PS61280RANGEJD3214080IL.RANGE_PG_PS71280RANGEJD3215360IL.RANGE_PG_PS81280RANGEJD3216640IL.RANGE_PG_PS91280RANGEJD3217920IL.RANGE_MFC11280RANGEJD3219200IL.RANGE_MFC21280RANGEJD3220480IL.RANGE_MFC31280RANGEJD3221760IL.RANGE_MFC41280RANGEJD3223040IL.RANGE_MFC51280RANGEJD3224320IL.RANGE_MFC61280RANGEJD3225600IL.RANGE_MFC71280RANGEJD3226880IL.RANGE_MFC81280RANGEJD3228160IL.RANGE_MFC91280RANGEJD3229440IL.RANGE_CHAMBER_HEATER11280RANGEJD3230720IL.RANGE_CHAMBER_HEATER21280RANGEJD3232000IL.RANGE_CHAMBER_HEATER31280RANGEJD3233280IL.RANGE_LID_HEATER1280RANGEJD3234560IL.RANGE_STAGE11280RANGEJD3235840IL.RANGE_STAGE21280RANGEJD3237120IL.RANGE_STAGE31280RANGEJD3238400IL.RANGE_STAGE41280RANGEJD3239680IL.TON_PrepareTransfer256TON3240960IL.TON_TransferWafer256TON3241216IL.TON_OpenGasValve256TON3241472IL.TON_CloseGasValve256TON3241728IL.TON_OpenCloseSlitValve256TON3241984IL.ALWAYS_TRUE8BOOLtrue3242240GV.TURBO_PUMP_POWER_ON8BOOLTcVarGlobal3242296Temp.H_LID73600Temp_controller1103244160Temp.H_CHAMBER73600Temp_controller1103317760Temp.H_PEN_VALVE7360Temp_controller3391360Temp.H_GATE_VALVE7360Temp_controller3398720Temp.H_IGS73600Temp_controller1103406080Temp.H_TAPE73600Temp_controller1103479680Temp.H_FORELINE147200Temp_controller1203553280Temp.H_STAGE73600Temp_controller1103700480GV.PENDULUM_VALVE_HEATER_POWER_ON8BOOLTcVarGlobal3780336GV.LID_HEATER_POWER_ON8BOOLTcVarGlobal3780344GV.NDI904STR_NDITcVarGlobal3781472GV.NDO408STR_NDOTcVarGlobal3782376GV.AI2656STR_AITcVarGlobal3782784GV.AO1504STR_AOTcVarGlobal3785440GV.CHAMBER_HEATER_POWER_ON8BOOLTcVarGlobal3786944GV.IGS_HEATER_POWER_ON8BOOLTcVarGlobal3786952GV.TAPE_HEATER_POWER_ON8BOOLTcVarGlobal3786960GV.FORELINE_HEATER_POWER_ON8BOOLTcVarGlobal3786968GV.GATE_VALVE_HEATER_POWER_ON8BOOLTcVarGlobal3786976GV.LID_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3786984GV.CHAMBER_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787064GV.PEN_VALVE_HEATER_AUTO_TUNE_EN8BOOLTcVarGlobal3787144GV.GATE_VALVE_HEATER_AUTO_TUNE_EN8BOOLTcVarGlobal3787152GV.IGS_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787160GV.TAPE_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787240GV.FORELINE_HEATER_AUTO_TUNE_EN160BOOL120TcVarGlobal3787320GV.STAGE_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3787480GV.PEN_VALVE_HEATER_SSR_ON8BOOLTcVarGlobal3787560GV.GATE_VALVE_SSR_ON8BOOLTcVarGlobal3787568GV.ALARM_OCC8BOOLTcVarGlobal3787576GV.LID_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3787584GV.CHAMBER_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3787904GV.PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT32REALTcVarGlobal3788224GV.GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT32REALTcVarGlobal3788256GV.IGS_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3788288GV.TAPE_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3788608GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT640REAL120TcVarGlobal3788928GV.STAGE_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3789568GV.LID_HEATER_SSR_ON80BOOL110TcVarGlobal3789888GV.CHAMBER_HEATER_SSR_ON80BOOL110TcVarGlobal3789968GV.IGS_HEATER_SSR_ON80BOOL110TcVarGlobal3790048GV.TAPE_HEATER_SSR_ON80BOOL110TcVarGlobal3790128GV.FORELINE_HEATER_SSR_ON160BOOL120TcVarGlobal3790208GV.STAGE_HEATER_SCR_OUTPUT320REAL110TcVarGlobal3790368GV.WARNING_OCC8BOOLTcVarGlobal3790688GV.Process_Start8BOOLTcVarGlobal3790696GV.Step_Num16INTTcVarGlobal3790704GV.PMConfig1536ConfigPMTcVarGlobal3790720GV.MFCVerification1472ConfigMfcVerTcVarGlobal3792256GV.Chiller1792ConfigChillerTcVarGlobal3793728GV.InnerChiller1792ConfigChillerTcVarGlobal3795520GV.OuterChiller1792ConfigChillerTcVarGlobal3797312GV.TopChiller1792ConfigChillerTcVarGlobal3799104GV.DryPump1152ConfigDryPumpTcVarGlobal3800896GV.Mfcgas11728ConfigMfcGasTcVarGlobal3802048GV.Mfcgas21728ConfigMfcGasTcVarGlobal3803776GV.Mfcgas31728ConfigMfcGasTcVarGlobal3805504GV.Mfcgas41728ConfigMfcGasTcVarGlobal3807232GV.Mfcgas51728ConfigMfcGasTcVarGlobal3808960GV.Mfcgas61728ConfigMfcGasTcVarGlobal3810688GV.Mfcgas71728ConfigMfcGasTcVarGlobal3812416GV.Mfcgas81728ConfigMfcGasTcVarGlobal3814144GV.Mfcgas91728ConfigMfcGasTcVarGlobal3815872GV.Mfcgas101728ConfigMfcGasTcVarGlobal3817600GV.Mfcgas111728ConfigMfcGasTcVarGlobal3819328GV.Mfcgas121728ConfigMfcGasTcVarGlobal3821056GV.MfcN21728ConfigMfcGasTcVarGlobal3822784GV.MfcHe1728ConfigMfcGasTcVarGlobal3824512GV.Pump2560ConfigPumpTcVarGlobal3826240GV.Purge640ConfigPurgeTcVarGlobal3828800GV.PendulumHeater272ConfigHeaterTcVarGlobal3829440GV.LidHeater272ConfigHeaterTcVarGlobal3829712GV.ChamberHeater272ConfigHeaterTcVarGlobal3829984GV.IGSHeater272ConfigHeaterTcVarGlobal3830256GV.TapeHeater272ConfigHeaterTcVarGlobal3830528GV.ForelineHeater272ConfigHeaterTcVarGlobal3830800GV.STAGE272ConfigHeaterTcVarGlobal3831072GV.ElectrostaticVoltageSource648ConfigElectrostaticVoltageSourceTcVarGlobal3831344GV.Process_Stop8BOOLTcVarGlobal3831992GV.TurboPump1024ConfigTurboPumpTcVarGlobal3832000GV.PendulumValve912ConfigPendulumValveTcVarGlobal3833024GV.IdleClean1568ConfigIdleCleanTcVarGlobal3833936GV.EPD800ConfigEPDTcVarGlobal3835504GV.TurboN2PurgePressure16INTTcVarGlobal3836304GV_IL.PRESSURE_WARNING8BOOLTcVarGlobal3836320GV_IL.PRESSURE_ALARM8BOOLTcVarGlobal3836328GV_IL.MFC1_WARNING8BOOLTcVarGlobal3836336GV_IL.MFC1_Alarm8BOOLTcVarGlobal3836344GV.HighTemperatureChiller2816ConfigHighTempChillerTcVarGlobal3836352GV.SetpArray430400RecipeEachStep1100TcVarGlobal3839168GV_H.LID_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4269568GV_H.CHAMBER_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4271488GV_H.PEN_VALVE_HEATER_PID192STR_PIDTcPersistentTcVarGlobal4273408GV_H.GATE_VALVE_HEATER_PID192STR_PIDTcPersistentTcVarGlobal4273600GV_H.IGS_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4273792GV_H.TAPE_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4275712GV_H.FORELINE_HEATER_PID3840STR_PID120TcPersistentTcVarGlobal4277632GV_H.STAGE_HEATER_PID1920STR_PID110TcPersistentTcVarGlobal4281472GV_IL.MFC2_WARNING8BOOLTcVarGlobal4283392GV_IL.MFC2_Alarm8BOOLTcVarGlobal4283400GV_IL.MFC3_WARNING8BOOLTcVarGlobal4283408GV_IL.MFC3_Alarm8BOOLTcVarGlobal4283416GV_IL.MFC4_WARNING8BOOLTcVarGlobal4283424GV_IL.MFC4_Alarm8BOOLTcVarGlobal4283432GV_IL.MFC5_WARNING8BOOLTcVarGlobal4283440GV_IL.MFC5_Alarm8BOOLTcVarGlobal4283448GV_IL.MFC6_WARNING8BOOLTcVarGlobal4283456GV_IL.MFC6_Alarm8BOOLTcVarGlobal4283464GV_IL.MFC7_WARNING8BOOLTcVarGlobal4283472GV_IL.MFC7_Alarm8BOOLTcVarGlobal4283480GV_IL.MFC8_WARNING8BOOLTcVarGlobal4283488GV_IL.MFC8_Alarm8BOOLTcVarGlobal4283496GV_IL.MFC9_WARNING8BOOLTcVarGlobal4283504GV_IL.MFC9_Alarm8BOOLTcVarGlobal4283512GV_IL.WALL_TEMP_WARNING8BOOLTcVarGlobal4283520GV_IL.WALL_TEMP_Alarm8BOOLTcVarGlobal4283528GV_IL.LID_TEMP_WARNING8BOOLTcVarGlobal4283536GV_IL.LID_TEMP_Alarm8BOOLTcVarGlobal4283544GV_IL.STAGE_EDGE_TEMP_WARNING8BOOLTcVarGlobal4283552GV_IL.STAGE_EDGE_TEMP_Alarm8BOOLTcVarGlobal4283560GV_IL.STAGE_CENTER_TEMP_WARNING8BOOLTcVarGlobal4283568GV_IL.STAGE_CENTER_TEMP_ALARM8BOOLTcVarGlobal4283576GV_IL.STATUS_PrepareTransfer8BOOLTcVarGlobal4283584GV_IL.STATUS_TransferWafer8BOOLTcVarGlobal4283592GV_IL.STATUS_OpenGasValve8BOOLTcVarGlobal4283600GV_IL.STATUS_CloseGasValve8BOOLTcVarGlobal4283608GV_IL.STATUS_OpenCloseSlitValve8BOOLTcVarGlobal4283616GV_IL.AV1_EN8BOOLTcVarGlobal4283624GV_IL.AV2_EN8BOOLTcVarGlobal4283632GV_IL.AV3_EN8BOOLTcVarGlobal4283640GV_IL.AV4_EN8BOOLTcVarGlobal4283648GV_IL.AV5_EN8BOOLTcVarGlobal4283656GV_IL.AV6_EN8BOOLTcVarGlobal4283664GV_IL.AV7_EN8BOOLTcVarGlobal4283672GV_IL.AV8_EN8BOOLTcVarGlobal4283680GV_IL.AV9_EN8BOOLTcVarGlobal4283688GV_IL.AV10_EN8BOOLTcVarGlobal4283696GV_IL.AV11_EN8BOOLTcVarGlobal4283704GV_IL.AV12_EN8BOOLTcVarGlobal4283712GV_IL.AV13_EN8BOOLTcVarGlobal4283720GV_IL.AV14_EN8BOOLTcVarGlobal4283728GV_IL.AV15_EN8BOOLTcVarGlobal4283736GV_IL.AV16_EN8BOOLTcVarGlobal4283744GV_IL.AV17_EN8BOOLTcVarGlobal4283752GV_IL.AV18_EN8BOOLTcVarGlobal4283760GV_IL.AV19_EN8BOOLTcVarGlobal4283768GV_IL.AV20_EN8BOOLTcVarGlobal4283776GV_IL.AV21_EN8BOOLTcVarGlobal4283784GV_IL.AV22_EN8BOOLTcVarGlobal4283792GV_IL.AV23_EN8BOOLTcVarGlobal4283800GV_IL.AV24_EN8BOOLTcVarGlobal4283808GV_IL.AV25_EN8BOOLTcVarGlobal4283816GV_IL.AV26_EN8BOOLTcVarGlobal4283824GV_IL.AV27_EN8BOOLTcVarGlobal4283832GV_IL.AV101_EN8BOOLTcVarGlobal4283840GV_IL.AV102_EN8BOOLTcVarGlobal4283848GV_IL.AV103_EN8BOOLTcVarGlobal4283856GV_IL.AV104_EN8BOOLTcVarGlobal4283864GV_IL.AV105_EN8BOOLTcVarGlobal4283872GV_IL.AV106_EN8BOOLTcVarGlobal4283880GV_IL.APC_EN8BOOLTcVarGlobal4283888GV_IL.AV1_EN_Bypass8BOOLTcVarGlobal4283896GV_IL.AV2_EN_Bypass8BOOLTcVarGlobal4283904GV_IL.AV3_EN_Bypass8BOOLTcVarGlobal4283912GV_IL.AV4_EN_Bypass8BOOLTcVarGlobal4283920GV_IL.AV5_EN_Bypass8BOOLTcVarGlobal4283928GV_IL.AV6_EN_Bypass8BOOLTcVarGlobal4283936GV_IL.AV7_EN_Bypass8BOOLTcVarGlobal4283944GV_IL.AV8_EN_Bypass8BOOLTcVarGlobal4283952GV_IL.AV9_EN_Bypass8BOOLTcVarGlobal4283960GV_IL.AV10_EN_Bypass8BOOLTcVarGlobal4283968GV_IL.AV11_EN_Bypass8BOOLTcVarGlobal4283976GV_IL.AV12_EN_Bypass8BOOLTcVarGlobal4283984GV_IL.AV13_EN_Bypass8BOOLTcVarGlobal4283992GV_IL.AV14_EN_Bypass8BOOLTcVarGlobal4284000GV_IL.AV15_EN_Bypass8BOOLTcVarGlobal4284008GV_IL.AV16_EN_Bypass8BOOLTcVarGlobal4284016GV_IL.AV17_EN_Bypass8BOOLTcVarGlobal4284024GV_IL.AV18_EN_Bypass8BOOLTcVarGlobal4284032GV_IL.AV19_EN_Bypass8BOOLTcVarGlobal4284040GV_IL.AV20_EN_Bypass8BOOLTcVarGlobal4284048GV_IL.AV21_EN_Bypass8BOOLTcVarGlobal4284056GV_IL.AV22_EN_Bypass8BOOLTcVarGlobal4284064GV_IL.AV23_EN_Bypass8BOOLTcVarGlobal4284072GV_IL.AV24_EN_Bypass8BOOLTcVarGlobal4284080GV_IL.AV25_EN_Bypass8BOOLTcVarGlobal4284088GV_IL.AV26_EN_Bypass8BOOLTcVarGlobal4284096GV_IL.AV27_EN_Bypass8BOOLTcVarGlobal4284104GV_IL.AV101_EN_Bypass8BOOLTcVarGlobal4284112GV_IL.AV102_EN_Bypass8BOOLTcVarGlobal4284120GV_IL.AV103_EN_Bypass8BOOLTcVarGlobal4284128GV_IL.AV104_EN_Bypass8BOOLTcVarGlobal4284136GV_IL.AV105_EN_Bypass8BOOLTcVarGlobal4284144GV_IL.AV106_EN_Bypass8BOOLTcVarGlobal4284152GV_IL.APC_EN_Bypass8BOOLTcVarGlobal4284160GV_IL.HTR_APC_EN8BOOLTcVarGlobal4284168GV_IL.HTR_CHAMBER_EN8BOOLTcVarGlobal4284176GV_IL.HTR_FORLINE_EN8BOOLTcVarGlobal4284184GV_IL.HTR_GAS_BOX_EN8BOOLTcVarGlobal4284192GV_IL.HTR_GATE_VALVE_EN8BOOLTcVarGlobal4284200GV_IL.HTR_LID_EN8BOOLTcVarGlobal4284208GV_IL.HTR_APC_EN_Bypass8BOOLTcVarGlobal4284216GV_IL.HTR_CHAMBER_EN_Bypass8BOOLTcVarGlobal4284224GV_IL.HTR_FORLINE_EN_Bypass8BOOLTcVarGlobal4284232GV_IL.HTR_GAS_BOX_EN_Bypass8BOOLTcVarGlobal4284240GV_IL.HTR_GATE_VALVE_EN_Bypass8BOOLTcVarGlobal4284248GV_IL.HTR_LID_EN_Bypass8BOOLTcVarGlobal4284256GV_IL.Process_RUN8BOOLTcVarGlobal4284264GV_IL.Process_Stop8BOOLTcVarGlobal4284272GV_IL.Lid_Temp_OT_Bypass8BOOLTcVarGlobal4284280GV_IL.Chamber_Temp_OT_Bypass8BOOLTcVarGlobal4284288GV_IL.APC_Temp_OT_Bypass8BOOLTcVarGlobal4284296GV_IL.Gate_Valve_Temp_OT_Bypass8BOOLTcVarGlobal4284304GV_IL.Gas_Line_Temp_OT_Bypass8BOOLTcVarGlobal4284312GV_IL.Stage_Temp_OT_Bypass8BOOLTcVarGlobal4284320GV_IL.TMP_ALARM_Bypass8BOOLTcVarGlobal4284328GV_IL.PS1_ALM_Bypass8BOOLTcVarGlobal4284336GV_IL.PS2_ALM_Bypass8BOOLTcVarGlobal4284344GV_IL.SPLC_manual_ErrorAck8BOOLTcVarGlobal4284352UI.Process_Start8BOOLTcVarGlobal4284648UI.Step_Num16INTTcVarGlobal4284656PM.HeartBeat32REALTcVarGlobal4284672PM.NDI904STR_NDITcVarGlobal4284704UI.Process_Stop8BOOLTcVarGlobal4285608UI.TurboN2PurgePressure16INTTcVarGlobal4285616PM.AI2656STR_AITcVarGlobal4285632PM.Info752InfoTcVarGlobal4288288PM.ProcessFeedBack64ProcessRecipeFeedBackTcVarGlobal4289040UI.Warning_And_Alarm_RST8BOOLTcVarGlobal4289104UI.HeartBeat32REALTcVarGlobal4289120UI.NDO408STR_NDOTcVarGlobal4289152UI.AO1504STR_AOTcVarGlobal4289568UI.PMConfig1536ConfigPMTcVarGlobal4291072UI.MFCVerification1472ConfigMfcVerTcVarGlobal4292608UI.Chiller1792ConfigChillerTcVarGlobal4294080UI.InnerChiller1792ConfigChillerTcVarGlobal4295872UI.OuterChiller1792ConfigChillerTcVarGlobal4297664UI.TopChiller1792ConfigChillerTcVarGlobal4299456UI.DryPump1152ConfigDryPumpTcVarGlobal4301248UI.Mfcgas11728ConfigMfcGasTcVarGlobal4302400UI.Mfcgas21728ConfigMfcGasTcVarGlobal4304128UI.Mfcgas31728ConfigMfcGasTcVarGlobal4305856UI.Mfcgas41728ConfigMfcGasTcVarGlobal4307584UI.Mfcgas51728ConfigMfcGasTcVarGlobal4309312UI.Mfcgas61728ConfigMfcGasTcVarGlobal4311040UI.Mfcgas71728ConfigMfcGasTcVarGlobal4312768UI.Mfcgas81728ConfigMfcGasTcVarGlobal4314496UI.Mfcgas91728ConfigMfcGasTcVarGlobal4316224UI.Mfcgas101728ConfigMfcGasTcVarGlobal4317952UI.Mfcgas111728ConfigMfcGasTcVarGlobal4319680UI.Mfcgas121728ConfigMfcGasTcVarGlobal4321408UI.MfcN21728ConfigMfcGasTcVarGlobal4323136UI.MfcHe1728ConfigMfcGasTcVarGlobal4324864UI.Pump2560ConfigPumpTcVarGlobal4326592UI.Purge640ConfigPurgeTcVarGlobal4329152UI.PendulumHeater272ConfigHeaterTcVarGlobal4329792UI.LidHeater272ConfigHeaterTcVarGlobal4330064UI.ChamberHeater272ConfigHeaterTcVarGlobal4330336UI.IGSHeater272ConfigHeaterTcVarGlobal4330608UI.TapeHeater272ConfigHeaterTcVarGlobal4330880UI.ForelineHeater272ConfigHeaterTcVarGlobal4331152UI.STAGE272ConfigHeaterTcVarGlobal4331424UI.ElectrostaticVoltageSource648ConfigElectrostaticVoltageSourceTcVarGlobal4331696UI.TurboPump1024ConfigTurboPumpTcVarGlobal4332352UI.PendulumValve912ConfigPendulumValveTcVarGlobal4333376UI.IdleClean1568ConfigIdleCleanTcVarGlobal4334288UI.EPD800ConfigEPDTcVarGlobal4335856UI.HighTemperatureChiller2816ConfigHighTempChillerTcVarGlobal4336704UI.SetpArray430400RecipeEachStep1100TcVarGlobal4339520TwinCAT_LicenseInfoVarList._LicenseInfo2048PlcLicenseInfo12[1].LicenseId.Data1518765226[1].LicenseId.Data220961[1].LicenseId.Data318256[1].LicenseId.Data4[0]157[1].LicenseId.Data4[1]106[1].LicenseId.Data4[2]123[1].LicenseId.Data4[3]4[1].LicenseId.Data4[4]17[1].LicenseId.Data4[5]110[1].LicenseId.Data4[6]163[1].LicenseId.Data4[7]43[1].Instances0[1].LicenseNameTF4110 Temperature Controller[2].LicenseId.Data12004817304[2].LicenseId.Data222587[2].LicenseId.Data317667[2].LicenseId.Data4[0]153[2].LicenseId.Data4[1]187[2].LicenseId.Data4[2]124[2].LicenseId.Data4[3]2[2].LicenseId.Data4[4]224[2].LicenseId.Data4[5]171[2].LicenseId.Data4[6]217[2].LicenseId.Data4[7]126[2].Instances0[2].LicenseNameTF4100 TC3 Controller ToolboxTcVarGlobal4770112TwinCAT_SystemInfoVarList._AppInfo2048PlcAppSystemInfono_initTcVarGlobal4772160TwinCAT_SystemInfoVarList._TaskInfo1024PlcTaskSystemInfo11no_initTcVarGlobal4774208TwinCAT_SystemInfoVarList._TaskPouOid_PlcTask32OTCIDno_initTcVarGlobal4775232TwinCAT_SystemInfoVarList._TaskOid_PlcTask32OTCIDno_initTcVarGlobal4775264TwinCAT_SystemInfoVarList.__PlcTask896_Implicit_Task_Info.dwVersion2TcContextNamePlcTaskTcVarGlobal4775296ApplicationNamePort_851ChangeDate2025-06-13T11:25:27GeneratedCodeSize176128GlobalDataSize237568