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- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Device.Bases;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using FurnaceRT.Equipments.Systems;
- namespace FurnaceRT.Equipments.WaferRobots
- {
- public class WaferRobotHome : ModuleRoutine, IRoutine
- {
- enum RoutineStep
- {
- SetCommunication,
- RobotReset,
- RobotSetServoOn,
- SetLoadArm1,
- SetLoadArm2,
- Home,
- CheckLoad1,
- CheckLoad2,
- SetSpeed,
- RobotRequestWaferPresent1,
- RobotRequestWaferPresent2,
- UpdateWaferInfoByRobotSensor,
- }
- private WaferRobotModule _waferRobotModule;
- private int _timeout = 0;
- private int _speed = 1;
- public WaferRobotHome(WaferRobotModule waferRobotModule)
- {
- _waferRobotModule = waferRobotModule;
- Module = waferRobotModule.Module;
- Name = "Home";
- }
- public Result Start(params object[] objs)
- {
- Reset();
- _timeout = SC.GetValue<int>($"{Module}.HomeTimeout");
- _speed = SC.GetValue<int>($"{Module}.RobotSpeed");
- _waferRobotModule.RobotHomeFailAlarm.RetryMessage = (int)WaferRobotModule.MSG.Home;
- _waferRobotModule.RobotHomeTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.Home;
- _waferRobotModule.SetServoOnTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.Home;
- _waferRobotModule.CheckLoadTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.Home;
- _waferRobotModule.SetSpeedTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.Home;
- _waferRobotModule.RequestWaferPresentTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.Home;
- Notify($"Start");
- return Result.RUN;
- }
- public void Abort()
- {
- _waferRobotModule.Stop();
- }
- public override Result Monitor()
- {
- try
- {
- PauseRountine(_waferRobotModule.WaferRobotDevice.IsPause);
- if (_waferRobotModule.WaferRobotDevice.IsPause)
- return Result.RUN;
- //RobotReset((int)RoutineStep.RobotReset, _timeout);
- //RobotSetServoOn((int)RoutineStep.RobotSetServoOn, _waferRobot, true, _timeout);
- RobotHome((int)RoutineStep.Home, _timeout);
- //RobotCheckLoad((int)RoutineStep.CheckLoad1, _waferRobot, Hand.Blade1, _timeout);
- //RobotCheckLoad((int)RoutineStep.CheckLoad2, _waferRobot, Hand.Blade2, _timeout);
- RobotSetSpeed((int)RoutineStep.SetSpeed, _speed, _timeout);
- RobotRequestWaferPresent((int)RoutineStep.RobotRequestWaferPresent1, Hand.Blade1, _timeout);
- //RobotRequestWaferPresent((int)RoutineStep.RobotRequestWaferPresent2, Hand.Blade2, _timeout);
- UpdateWaferInfoByRobotSensor((int)RoutineStep.UpdateWaferInfoByRobotSensor);
- }
- catch (RoutineBreakException)
- {
- return Result.RUN;
- }
- catch (RoutineFaildException ex)
- {
- return Result.FAIL;
- }
- Notify("Finished");
- return Result.DONE;
- }
- private void RobotReset(int id, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify($"Set robot reset");
- _waferRobotModule.SetCassetteRobotReset();
- return true;
- }, () =>
- {
- if (_waferRobotModule.WaferRobotDevice.IsReady())
- {
- return true;
- }
- return false;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- _waferRobotModule.RobotHomeTimeoutAlarm.Set($"timeout over {timeout} seconds");
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- private void RobotSetServoOn(int id, Robot robot, bool isOn, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify($"Set servo {(isOn ? "on":"off")}");
- if (!robot.SetServoOnOff(isOn, out string reason))
- {
- _waferRobotModule.SetServoOnFailAlarm.Description = reason;
- _waferRobotModule.SetServoOnFailAlarm.Set();
- return false;
- }
- return true;
- }, () =>
- {
- if (!robot.Busy)
- {
- return true;
- }
- return false;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- _waferRobotModule.SetServoOnTimeoutAlarm.Description = $"timeout over {timeout} seconds";
- _waferRobotModule.SetServoOnTimeoutAlarm.Set();
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- public void RobotSetLoad(int id, Robot robot, Hand hand, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify($"Set default load {hand}");
- if (!robot.SetLoad(hand, out string reason))
- {
- Stop(reason);
- return false;
- }
- return true;
- }, () =>
- {
- if (!robot.Busy)
- {
- return true;
- }
- return false;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- Stop($"timeout over {timeout} seconds");
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- public void RobotHome(int id, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify("Execute home");
- if (!_waferRobotModule.SetWaferRobotHome(out string reason))
- {
- //_waferRobotModule.RobotHomeFailAlarm.Description = reason;
- _waferRobotModule.RobotHomeFailAlarm.Set(reason);
- return false;
- }
- return true;
- }, () =>
- {
- if (_waferRobotModule.WaferRobotDevice.IsReady() && !_waferRobotModule.WaferRobotDevice.IsError)
- {
- return true;
- }
- return false;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- _waferRobotModule.RobotHomeTimeoutAlarm.Description = $"timeout over {timeout} seconds";
- _waferRobotModule.RobotHomeTimeoutAlarm.Set();
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- public void RobotCheckLoad(int id, Robot robot, Hand hand, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify("Check load");
- if (!robot.CheckLoad(hand, out string reason))
- {
- _waferRobotModule.CheckLoadFailAlarm.Description = reason;
- _waferRobotModule.CheckLoadFailAlarm.Set();
- return false;
- }
- return true;
- }, () =>
- {
- if (!robot.Busy)
- {
- return true;
- }
- return false;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- _waferRobotModule.CheckLoadTimeoutAlarm.Description = $"timeout over {timeout} seconds";
- _waferRobotModule.CheckLoadTimeoutAlarm.Set();
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- public void RobotSetSpeed(int id, int speed, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- if (speed > 3 || speed < 1)
- speed = 1;
- Notify($"set speed to {speed}");
- if (!_waferRobotModule.SetSpeed(speed, out string reason))
- {
- //_waferRobotModule.SetSpeedFailAlarm.Description = reason;
- _waferRobotModule.SetSpeedFailAlarm.Set(reason);
- return false;
- }
- return true;
- }, () =>
- {
- if (_waferRobotModule.WaferRobotDevice.IsReady() && !_waferRobotModule.WaferRobotDevice.IsError)
- {
- return true;
- }
- return false;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- //_waferRobotModule.SetSpeedTimeoutAlarm.Description = $"timeout over {timeout} seconds";
- _waferRobotModule.SetSpeedTimeoutAlarm.Set($"timeout over {timeout} seconds");
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- private void RobotRequestWaferPresent(int id, Hand hand, int timeout)
- {
- Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
- {
- Notify("request wafer present");
- if (!_waferRobotModule.RequestWaferPresent(hand, out string reason))
- {
- _waferRobotModule.RequestWaferPresentFailAlarm.Description = reason;
- _waferRobotModule.RequestWaferPresentFailAlarm.Set();
- return false;
- }
- return true;
- }, () =>
- {
- if (_waferRobotModule.WaferRobotDevice.IsReady() && !_waferRobotModule.WaferRobotDevice.IsError)
- {
- return true;
- }
- return false;
- }, timeout * 1000);
- if (ret.Item1)
- {
- if (ret.Item2 == Result.FAIL)
- {
- throw (new RoutineFaildException());
- }
- else if (ret.Item2 == Result.TIMEOUT) //timeout
- {
- //_waferRobotModule.RequestWaferPresentTimeoutAlarm.Description = $"timeout over {timeout} seconds";
- _waferRobotModule.RequestWaferPresentTimeoutAlarm.Set($"timeout over {timeout} seconds");
- throw (new RoutineFaildException());
- }
- else
- throw (new RoutineBreakException());
- }
- }
- protected void UpdateWaferInfoByRobotSensor(int id)
- {
- Tuple<bool, Result> ret = Execute(id, () => {
- Notify($"Update wafer info by robot wafer present");
- if (SC.GetValue<bool>("System.IsSimulatorMode"))
- return true;
- if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade1 && WaferManager.Instance.CheckNoWafer(_waferRobotModule.Module, 0))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor found wafer on blade 1");
- WaferManager.Instance.CreateWafer(ModuleHelper.Converter(_waferRobotModule.Module), 0, WaferStatus.Normal);
- }
- if (!_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade1 && WaferManager.Instance.CheckHasWafer(_waferRobotModule.Module, 0))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor no wafer on blade 1");
- WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(_waferRobotModule.Module), 0);
- }
- if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade2 && WaferManager.Instance.CheckNoWafer(_waferRobotModule.Module, 1))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor found wafer on blade 2");
- WaferManager.Instance.CreateWafer(ModuleHelper.Converter(_waferRobotModule.Module), 1, WaferStatus.Normal);
- }
- if (!_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade2 && WaferManager.Instance.CheckHasWafer(_waferRobotModule.Module, 1))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor no wafer on blade 2");
- WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(_waferRobotModule.Module), 1);
- }
- if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade3 && WaferManager.Instance.CheckNoWafer(_waferRobotModule.Module, 2))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor found wafer on blade 3");
- WaferManager.Instance.CreateWafer(ModuleHelper.Converter(_waferRobotModule.Module), 2, WaferStatus.Normal);
- }
- if (!_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade3 && WaferManager.Instance.CheckHasWafer(_waferRobotModule.Module, 2))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor no wafer on blade 3");
- WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(_waferRobotModule.Module), 2);
- }
- if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade4 && WaferManager.Instance.CheckNoWafer(_waferRobotModule.Module, 3))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor found wafer on blade 4");
- WaferManager.Instance.CreateWafer(ModuleHelper.Converter(_waferRobotModule.Module), 3, WaferStatus.Normal);
- }
- if (!_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade4 && WaferManager.Instance.CheckHasWafer(_waferRobotModule.Module, 3))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor no wafer on blade 4");
- WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(_waferRobotModule.Module), 3);
- }
- if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade5 && WaferManager.Instance.CheckNoWafer(_waferRobotModule.Module, 4))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor found wafer on blade 5");
- WaferManager.Instance.CreateWafer(ModuleHelper.Converter(_waferRobotModule.Module), 4, WaferStatus.Normal);
- }
- if (!_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade5 && WaferManager.Instance.CheckHasWafer(_waferRobotModule.Module, 4))
- {
- EV.PostInfoLog(Module, "Wafer Robot sensor no wafer on blade 5");
- WaferManager.Instance.DeleteWafer(ModuleHelper.Converter(_waferRobotModule.Module), 4);
- }
- return true;
- });
- if (ret.Item1)
- {
- throw (new RoutineBreakException());
- }
- }
-
- }
- }
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