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- namespace FurnaceRT.Equipments.PMs.RecipeExecutions
- {
- public class RecipeHead
- {
- public string ProcessPurgeCount { get; set; }
- public string RecipeChamberType { get; set; }
- public string RecipeVersion { get; set; }
- public string SubRecipe { get; set; }
- public string AlarmRecipe { get; set; }
- public string AbortRecipe { get; set; }
- public string AlarmCondition { get; set; }
- public string LeakCheck { get; set; }
- public string PressApcPID { get; set; }
- public string TempCorrect { get; set; }
- public string TempPID { get; set; }
- public string ProfileCondition { get; set; }
- }
- }
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