PMN2Purge.cs 3.3 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.Util;
  6. using Aitex.Core.Utilities;
  7. using MECF.Framework.Common.Event;
  8. using System;
  9. using System.Collections.Generic;
  10. using System.Linq;
  11. using System.Reflection;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using Aitex.Core.Common;
  14. using FurnaceRT.Equipments.Systems;
  15. using Aitex.Core.RT.IOCore;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.RT.Core.IoProviders;
  18. using MECF.Framework.Common.Device.Bases;
  19. using FurnaceRT.Equipments.Boats;
  20. using IoHeater = FurnaceRT.Devices.IoHeater;
  21. using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter;
  22. using FurnaceRT.Devices;
  23. using Aitex.Core.RT.Log;
  24. using FurnaceRT.Equipments.PMs.Devices;
  25. namespace FurnaceRT.Equipments.PMs
  26. {
  27. public partial class PMModule
  28. {
  29. enum N2PurgeMode
  30. {
  31. Auto,
  32. Manual_N2Purge,
  33. Manual_ATM,
  34. Manual_Maintenance,
  35. Auto_Check,
  36. }
  37. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IoValve, bool>>>> _n2PurgeSequenceAction;
  38. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  39. private N2PurgeMode _N2PurgeMode = N2PurgeMode.Auto;
  40. private bool GetN2PurgeAIRTo20PPMStatus()
  41. {
  42. return ValveLABacksideDoorCylinderControl.DOOpen.Value;
  43. }
  44. private bool GetN2PurgeUnder20PPMStatus()
  45. {
  46. return ConcentrationO2.Value < 20;
  47. }
  48. private bool GetN2PurgeAIRStatus()
  49. {
  50. return ValveLABacksideDoorCylinderControl.DOClose.Value && !AlarmSignalFilterBox1DoorSwitch.Value;
  51. }
  52. private bool GetN2PurgeDoorOpenStatus()
  53. {
  54. return ValveLABacksideDoorCylinderControl.DOClose.Value && AlarmSignalFilterBox1DoorSwitch.Value;
  55. }
  56. private bool GetN2PurgeFoup1Status()
  57. {
  58. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  59. }
  60. private bool GetN2PurgeFoup2Status()
  61. {
  62. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  63. }
  64. private void MonitorN2Purge()
  65. {
  66. if (_N2PurgeMode != N2PurgeMode.Auto)
  67. return;
  68. if(_n2PurgeSequenceAction != null && _n2PurgeSequenceStatus != null)
  69. {
  70. foreach(var key in _n2PurgeSequenceAction.Keys)
  71. {
  72. var value = _n2PurgeSequenceAction[key];
  73. value.Item1.CLK = _n2PurgeSequenceStatus[key].Invoke();
  74. if(value.Item1.Q && value.Item2 != null)
  75. {
  76. LOG.Write($"N2 purge sequence trig: {key}");
  77. //EV.PostWarningLog("System",$"N2 purge sequence trig: {key}");
  78. foreach(var valve in value.Item2)
  79. {
  80. if (valve.Item1.Status != valve.Item2)
  81. valve.Item1.TurnValve(valve.Item2, out _);
  82. }
  83. }
  84. }
  85. }
  86. }
  87. }
  88. }