IoMFC.cs 22 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.DataCenter;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.IOCore;
  6. using Aitex.Core.RT.Log;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.SCCore;
  9. using Aitex.Core.RT.Tolerance;
  10. using Aitex.Core.Util;
  11. using Aitex.Core.Utilities;
  12. using MECF.Framework.Common.Event;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
  14. using System;
  15. using System.Collections;
  16. using System.Collections.Generic;
  17. using System.Diagnostics;
  18. using System.Xml;
  19. namespace FurnaceRT.Equipments.PMs.Devices
  20. {
  21. public class IoMFC : BaseDevice, IDevice, IMfc
  22. {
  23. public string Unit
  24. {
  25. get; set;
  26. }
  27. public double Scale
  28. {
  29. get
  30. {
  31. if (_scN2Scale == null || _scScaleFactor == null)
  32. return 0;
  33. return _scN2Scale.DoubleValue * _scScaleFactor.DoubleValue;
  34. }
  35. }
  36. private double _setpoint;
  37. public double SetPoint
  38. {
  39. get
  40. {
  41. return _setpoint;
  42. }
  43. set
  44. {
  45. _setpoint = value;
  46. if (_aoFlow != null)
  47. {
  48. //var setpoint = Scale != 0 ? (float)(value * _maxScale / Scale) : value;
  49. if (_isFloatAioType)
  50. _aoFlow.FloatValue = (float)value;
  51. else
  52. _aoFlow.Value = (short)value;
  53. }
  54. }
  55. }
  56. public double DefaultSetPoint
  57. {
  58. get
  59. {
  60. if (_scDefaultSetPoint != null)
  61. return _scDefaultSetPoint.DoubleValue;
  62. return 0;
  63. }
  64. }
  65. public double FeedBack
  66. {
  67. get
  68. {
  69. if (_aiFlow != null)
  70. {
  71. return _isFloatAioType ? _aiFlow.FloatValue : _aiFlow.Value;
  72. //var phy = _aiFlow == null ? 0 : (_isFloatAioType ? _aiFlow.FloatValue : _aiFlow.Value);
  73. //return Converter.Phy2Logic(phy, 0, Scale, 0, _phyScale);
  74. //return _maxScale != 0 ? aiValue * Scale / _maxScale : aiValue;
  75. }
  76. return 0;
  77. }
  78. }
  79. public bool EnableAlarm
  80. {
  81. get
  82. {
  83. if (_scEnableAlarm != null)
  84. return _scEnableAlarm.BoolValue;
  85. return false;
  86. }
  87. }
  88. public bool IsStable
  89. {
  90. get
  91. {
  92. if (!_stableDelayTimer.IsIdle() && _stableDelayTimer.GetElapseTime() >= _stableDelayTime * 1000)
  93. {
  94. if (_stableJudgmentTimer.IsRunning)
  95. {
  96. if (FeedBack < SetPoint * (100 - _stableMinValue) / 100 ||
  97. FeedBack > SetPoint * (100 + _stableMaxValue) / 100)
  98. {
  99. _stableJudgmentTimer.Restart();
  100. }
  101. if (_stableJudgmentTimer.ElapsedMilliseconds >= _stableJudgmentTime * 1000)
  102. {
  103. return true;
  104. }
  105. }
  106. else
  107. {
  108. _stableJudgmentTimer.Restart();
  109. }
  110. }
  111. return false;
  112. }
  113. }
  114. private AITMfcData DeviceData
  115. {
  116. get
  117. {
  118. AITMfcData data = new AITMfcData()
  119. {
  120. UniqueName = $"{Module}.{Name}",
  121. Type = "MFC",
  122. Module = Module,
  123. DeviceName = Name,
  124. DeviceSchematicId = DeviceID,
  125. DisplayName = DisplayName,
  126. FeedBack = FeedBack < 0 ? 0 : FeedBack,
  127. SetPoint = SetPoint,
  128. Ramping = _ramping,
  129. AlarmWatchTable = AlarmWatchTable,
  130. Scale = Scale,
  131. //IsWarning = !AlarmToleranceWarning.IsAcknowledged,
  132. //IsError = !AlarmToleranceAlarm.IsAcknowledged,
  133. Unit = Unit,
  134. VirtualSetPoint = (float)VirtualSetPoint,
  135. VirtualFeedBack = (float)VirtualFeedBack,
  136. VirtualAlarmWatchTable = VirtualAlarmWatchTable,
  137. VirtualRamping = VirtualRamping,
  138. };
  139. return data;
  140. }
  141. }
  142. public string DisplayName
  143. {
  144. get
  145. {
  146. if (_scGasName != null)
  147. return _scGasName.StringValue;
  148. return Display;
  149. }
  150. }
  151. public string AlarmWatchTable
  152. {
  153. get;
  154. set;
  155. }
  156. public double VirtualSetPoint;
  157. public double VirtualFeedBack;
  158. public string VirtualAlarmWatchTable;
  159. public float VirtualRamping;
  160. private DeviceTimer _rampTimer = new DeviceTimer();
  161. private double _rampTarget;
  162. private double _rampInitValue;
  163. private int _rampTime;
  164. private float _ramping;
  165. private double _phyScale;
  166. private ToleranceChecker _toleranceCheckerWarning = new ToleranceChecker();
  167. private ToleranceChecker _toleranceCheckerAlarm = new ToleranceChecker();
  168. private AIAccessor _aiFlow;
  169. private AOAccessor _aoFlow;
  170. private AOAccessor _aoRamp;
  171. private bool _isErrorStatus;
  172. private bool _isMFCInstalled;
  173. private int _mfcIndex;
  174. public bool IsMFCInstalled
  175. {
  176. get { return _isMFCInstalled; }
  177. }
  178. public int MFCIndex
  179. {
  180. get { return _mfcIndex; }
  181. }
  182. protected SCConfigItem _scGasName;
  183. protected SCConfigItem _scEnable;
  184. private SCConfigItem _scN2Scale;
  185. private SCConfigItem _scScaleFactor;
  186. private SCConfigItem _scEnableAlarm;
  187. private SCConfigItem _scDefaultSetPoint;
  188. private SCConfigItem _scRegulationFactor;
  189. //tolerance check
  190. private float _alarmJudgmentRange;
  191. private float _warningJudgmentRange;
  192. private float _alarmJudgmentTime;
  193. private float _warningJudgmentTime;
  194. private float _toleranceJudgmentDelayTime;
  195. private DeviceTimer _toleranceJudgmentDelayTimer = new DeviceTimer();
  196. //stable check
  197. private DeviceTimer _stableDelayTimer = new DeviceTimer();
  198. private float _stableDelayTime;
  199. private Stopwatch _stableJudgmentTimer = new Stopwatch();
  200. private float _stableJudgmentTime = 1;
  201. private float _stableMinValue;
  202. private float _stableMaxValue;
  203. public AlarmEventItem AlarmToleranceWarning { get; set; }
  204. public AlarmEventItem AlarmToleranceAlarm { get; set; }
  205. private bool _isFloatAioType = false;
  206. private bool _isWait;
  207. private float _waitHigh;
  208. private float _waitLow;
  209. private string _writeLog = "";
  210. public IoMFC(string module, XmlElement node, string ioModule = "")
  211. {
  212. Unit = node.GetAttribute("unit");
  213. base.Module = string.IsNullOrEmpty(node.GetAttribute("module")) ? module : node.GetAttribute("module");
  214. base.Name = node.GetAttribute("id");
  215. base.Display = node.GetAttribute("display");
  216. base.DeviceID = node.GetAttribute("schematicId");
  217. _aiFlow = ParseAiNode("aiFlow", node, ioModule);
  218. _aoFlow = ParseAoNode("aoFlow", node, ioModule);
  219. _aoRamp = ParseAoNode("aoRamp", node, ioModule);
  220. _isFloatAioType = !string.IsNullOrEmpty(node.GetAttribute("aioType")) && (node.GetAttribute("aioType") == "float");
  221. string scBasePath = node.GetAttribute("scBasePath");
  222. if (string.IsNullOrEmpty(scBasePath))
  223. scBasePath = $"{Module}.MFC.{Name}";
  224. else
  225. {
  226. scBasePath = scBasePath.Replace("{module}", Module);
  227. }
  228. _scGasName = SC.GetConfigItem($"{scBasePath}.{Name}.GasName");
  229. _scEnable = SC.GetConfigItem($"{scBasePath}.{Name}.Enable");
  230. //_isMFCInstalled = SC.GetConfigItem($"{scBasePath}.{Name}.IsMFCInstalled").BoolValue;
  231. _scN2Scale = ParseScNode("scN2Scale", node, ioModule, $"{scBasePath}.{Name}.N2Scale");
  232. _scScaleFactor = ParseScNode("scScaleFactor", node, ioModule, $"{scBasePath}.{Name}.ScaleFactor");
  233. _scEnableAlarm = ParseScNode("scEnableAlarm", node, ioModule, $"{scBasePath}.{Name}.EnableAlarm");
  234. _scDefaultSetPoint = ParseScNode("scDefaultSetPoint", node, ioModule, $"{scBasePath}.{Name}.DefaultSetPoint");
  235. _scRegulationFactor = ParseScNode("scFlowRegulationFactor", node, ioModule, $"{scBasePath}.{Name}.RegulationFactor");
  236. if (SC.ContainsItem($"{scBasePath}.{Name}.FlowUnit"))
  237. Unit = SC.GetStringValue($"{scBasePath}.{Name}.FlowUnit");
  238. }
  239. public bool Initialize()
  240. {
  241. DATA.Subscribe($"{Module}.{Name}.DeviceData", () => DeviceData);
  242. DATA.Subscribe($"{Module}.{Name}.Feedback", () => FeedBack);
  243. DATA.Subscribe($"{Module}.{Name}.SetPoint", () => SetPoint);
  244. // DATA.Subscribe($"{Module}.{Name}.ForceOpen", () => _doOpen.Value);
  245. // DATA.Subscribe($"{Module}.{Name}.ForceClose", () => _doClose.Value);
  246. OP.Subscribe($"{Module}.{Name}.Ramp", (out string reason, int time, object[] param) =>
  247. {
  248. double target = Convert.ToDouble(param[0].ToString());
  249. if (target < 0 || target > Scale)
  250. {
  251. reason = $"set {Display} value {target} out of range [0, {Scale}] {Unit}";
  252. return false;
  253. }
  254. Ramp(target, time);
  255. if (time > 0)
  256. {
  257. reason = $"{Display} ramp to {target} {Unit} in {time} seconds";
  258. }
  259. else
  260. {
  261. reason = $"{Display} ramp to {target} {Unit}";
  262. }
  263. return true;
  264. });
  265. OP.Subscribe($"{Module}.{Name}.SetParameters", SetParameters);
  266. OP.Subscribe($"{Module}.{Name}.SetMfcValue", SetMfcValue);
  267. OP.Subscribe($"{Module}.{Name}.SetMfcVirtualValue", SetMfcVirtualValue);
  268. //_phyScale = SC.GetValue<double>($"{Module}.MFC.{Name}.PhyScale");
  269. return true;
  270. }
  271. public void Monitor()
  272. {
  273. if(!string.IsNullOrEmpty(_writeLog))
  274. {
  275. LOG.Write(_writeLog);
  276. _writeLog = "";
  277. }
  278. //MonitorRamping();
  279. //MonitorTolerance();
  280. }
  281. public bool ResetWarningChecker()
  282. {
  283. _toleranceCheckerWarning.Reset(_warningJudgmentTime);
  284. return true;
  285. }
  286. public bool ResetAlarmChecker()
  287. {
  288. _toleranceCheckerAlarm.Reset(_alarmJudgmentTime);
  289. return true;
  290. }
  291. public void Reset()
  292. {
  293. _toleranceCheckerWarning.Reset(_warningJudgmentTime);
  294. _toleranceCheckerAlarm.Reset(_alarmJudgmentTime);
  295. //AlarmToleranceWarning.Reset();
  296. //AlarmToleranceAlarm.Reset();
  297. }
  298. public void Terminate()
  299. {
  300. Ramp(DefaultSetPoint, 0);
  301. }
  302. private bool SetParameters(out string reason, int time, object[] param)
  303. {
  304. reason = string.Empty;
  305. var paras = param[0].ToString().Split(';');//flow;rampTime
  306. _isWait = false;
  307. float setpoint = 0.0f;
  308. if (paras[0].ToString() == "Continue")
  309. {
  310. EV.PostInfoLog(Module, $"Set {DisplayName} flow to Continue");
  311. return true;
  312. }
  313. else
  314. {
  315. if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
  316. {
  317. var table = paras[0].ToString().Split(':')[0];
  318. if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
  319. setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
  320. }
  321. else
  322. {
  323. float.TryParse(paras[0].ToString(), out setpoint);
  324. }
  325. }
  326. float ramp = 0;
  327. if (paras.Length > 1)
  328. float.TryParse(paras[1].ToString(), out ramp);
  329. if (paras.Length >= 8)
  330. {
  331. var setUnit = paras[2].ToString();
  332. var ramprateUnit = paras[3].ToString();
  333. bool.TryParse(paras[4].ToString(), out _isWait);
  334. float.TryParse(paras[5].ToString(), out float waitHigh);
  335. float.TryParse(paras[6].ToString(), out float waitLow);
  336. var waitUnit = paras[7].ToString();
  337. if(waitUnit.ToLower() == "%sv")
  338. {
  339. _waitHigh = setpoint * waitHigh;
  340. _waitLow = setpoint * waitLow;
  341. }
  342. else if(waitUnit.ToLower() == "%fs")
  343. {
  344. _waitHigh = (float)_scN2Scale.DoubleValue * waitHigh;
  345. _waitLow = (float)_scN2Scale.DoubleValue * waitLow;
  346. }
  347. else
  348. {
  349. _waitHigh = waitHigh;
  350. _waitLow = waitLow;
  351. }
  352. _stableJudgmentTimer.Stop();
  353. if (ramprateUnit.ToLower() == "time")
  354. {
  355. if (ramp > 0)
  356. ramp = (float)(setpoint - FeedBack) / ramp;
  357. }
  358. else if (ramprateUnit.ToLower() == "%")
  359. {
  360. ramp = (float)_scN2Scale.DoubleValue * ramp;
  361. }
  362. }
  363. SetPoint = setpoint;
  364. _aoRamp.FloatValue = ramp;
  365. //LOG.Write($"{Name} setpoint={setpoint}, ramp={ramp} wait={_isWait} waitHigh={_waitHigh} waitLow={_waitLow}");
  366. _writeLog = $"{Name} setpoint={setpoint}, ramp={ramp} wait={_isWait} waitHigh={_waitHigh} waitLow={_waitLow}";
  367. return true;
  368. }
  369. public bool SetMfcValue(out string reason, int time, object[] param)
  370. {
  371. reason = string.Empty;
  372. float setpoint = 0.0f;
  373. var paras = param[0].ToString().Split(';'); // setpoint;ramping;alarmWatchTable
  374. if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
  375. {
  376. var table = paras[0].ToString().Split(':')[0];
  377. if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
  378. setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
  379. }
  380. else
  381. {
  382. float.TryParse(paras[0].ToString(), out setpoint);
  383. }
  384. float ramp = 0;
  385. if (paras.Length > 1)
  386. float.TryParse(paras[1].ToString(), out ramp);
  387. if (paras.Length > 2)
  388. {
  389. }
  390. SetPoint = setpoint;
  391. _ramping = ramp;
  392. _aoRamp.FloatValue = ramp;
  393. LOG.Write($"{Name} setpoint={setpoint}, ramp={ramp}");
  394. return true;
  395. }
  396. public bool SetMfcSetPoint(out string reason, int time, object[] param)
  397. {
  398. reason = string.Empty;
  399. float setpoint = 0.0f;
  400. var paras = param[0].ToString().Split(';'); // setpoint;ramping;alarmWatchTable
  401. if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
  402. {
  403. var table = paras[0].ToString().Split(':')[0];
  404. if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
  405. setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
  406. }
  407. else
  408. {
  409. float.TryParse(paras[0].ToString(), out setpoint);
  410. }
  411. float ramp = 0;
  412. if (paras.Length > 1)
  413. float.TryParse(paras[1].ToString(), out ramp);
  414. _setpoint = setpoint;
  415. _ramping = ramp;
  416. _aoRamp.FloatValue = ramp;
  417. LOG.Write($"{Name} setpoint={setpoint}, ramp={ramp}");
  418. return true;
  419. }
  420. public bool SetMfcVirtualValue(out string reason, int time, object[] param)
  421. {
  422. reason = string.Empty;
  423. float setpoint = 0.0f;
  424. var paras = param[0].ToString().Split(';'); // setpoint;ramping;alarmWatchTable
  425. if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
  426. {
  427. var table = paras[0].ToString().Split(':')[0];
  428. if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
  429. setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
  430. }
  431. else
  432. {
  433. float.TryParse(paras[0].ToString(), out setpoint);
  434. }
  435. VirtualSetPoint = setpoint;
  436. VirtualFeedBack = setpoint;
  437. if (paras.Length > 1)
  438. {
  439. float.TryParse(paras[1].ToString(), out _ramping);
  440. VirtualRamping = _ramping;
  441. }
  442. return true;
  443. }
  444. public bool Ramp(double flowSetPoint, int time, out string reason)
  445. {
  446. if (HasAlarm)
  447. {
  448. reason = $"{DisplayName} in error status, can not flow";
  449. return false;
  450. }
  451. if (flowSetPoint < 0 || flowSetPoint > Scale)
  452. {
  453. reason = $"{DisplayName} range is [0, {Scale}], can not flow {flowSetPoint}";
  454. return false;
  455. }
  456. if (time > 0)
  457. {
  458. EV.PostInfoLog(Module, $"Set {DisplayName} flow to {flowSetPoint} {Unit} in {time / 1000:F0} seconds");
  459. }
  460. else
  461. {
  462. EV.PostInfoLog(Module, $"Set {DisplayName} flow to {flowSetPoint} {Unit}");
  463. }
  464. Ramp(flowSetPoint, time);
  465. reason = string.Empty;
  466. return true;
  467. }
  468. public void Ramp(int time)
  469. {
  470. Ramp(DefaultSetPoint, time);
  471. }
  472. public void Ramp(double target, int time)
  473. {
  474. target = Math.Max(0, target);
  475. target = Math.Min(Scale, target);
  476. _rampInitValue = FeedBack; //ramp 初始值取当前设定值,而非实际读取值.零漂问题
  477. _rampTime = time;
  478. _rampTarget = target;
  479. _rampTimer.Start(time);
  480. }
  481. public void StopRamp()
  482. {
  483. Ramp(SetPoint, 0);
  484. }
  485. private void MonitorRamping()
  486. {
  487. if (!_rampTimer.IsIdle())
  488. {
  489. if (_rampTimer.IsTimeout() || _rampTime == 0)
  490. {
  491. _rampTimer.Stop();
  492. SetPoint = _rampTarget;
  493. }
  494. else
  495. {
  496. SetPoint = _rampInitValue + (_rampTarget - _rampInitValue) * _rampTimer.GetElapseTime() / _rampTime;
  497. }
  498. }
  499. }
  500. private void MonitorTolerance()
  501. {
  502. if (!EnableAlarm || SetPoint < 0.01 ||
  503. _toleranceJudgmentDelayTimer.IsIdle() ||
  504. _toleranceJudgmentDelayTimer.GetElapseTime() < _toleranceJudgmentDelayTime * 1000)
  505. {
  506. _toleranceCheckerWarning.RST = true;
  507. _toleranceCheckerAlarm.RST = true;
  508. return;
  509. }
  510. if (_warningJudgmentRange != 0 && _warningJudgmentTime > 0)
  511. {
  512. _toleranceCheckerWarning.Monitor(FeedBack, (SetPoint - Math.Abs(_warningJudgmentRange)), (SetPoint + Math.Abs(_warningJudgmentRange)), _warningJudgmentTime);
  513. if (_toleranceCheckerWarning.Trig)
  514. {
  515. //AlarmToleranceWarning.Description = $"{Display} flow out of range {_warningJudgmentRange} {Unit} in {_warningJudgmentTime:F0} seconds";
  516. AlarmToleranceWarning.Set($"{Display} flow out of range {_warningJudgmentRange} {Unit} in {_warningJudgmentTime:F0} seconds");
  517. }
  518. }
  519. if (_alarmJudgmentRange != 0 && _alarmJudgmentTime > 0)
  520. {
  521. _toleranceCheckerAlarm.Monitor(FeedBack, (SetPoint - Math.Abs(_alarmJudgmentRange)), (SetPoint + Math.Abs(_alarmJudgmentRange)), _alarmJudgmentTime);
  522. if (_toleranceCheckerAlarm.Trig)
  523. {
  524. //AlarmToleranceAlarm.Description = $"{Display} flow out of range {_alarmJudgmentRange} {Unit} in {_alarmJudgmentTime:F0} seconds";
  525. AlarmToleranceAlarm.Set($"{Display} flow out of range {_alarmJudgmentRange} {Unit} in {_alarmJudgmentTime:F0} seconds");
  526. }
  527. }
  528. }
  529. public bool CheckWaitCondition(out string reason)
  530. {
  531. reason = "";
  532. if (!_isWait || _waitHigh == 0 || _waitLow == 0)
  533. return true;
  534. if (_stableJudgmentTimer.IsRunning)
  535. {
  536. if (FeedBack < SetPoint - _waitLow ||
  537. FeedBack > SetPoint + _waitHigh)
  538. {
  539. _stableJudgmentTimer.Restart();
  540. }
  541. if (_stableJudgmentTimer.ElapsedMilliseconds >= _stableJudgmentTime * 1000)
  542. {
  543. return true;
  544. }
  545. }
  546. else
  547. {
  548. _stableJudgmentTimer.Restart();
  549. }
  550. reason = $"{Name} feedback={FeedBack}, wait limit is ({SetPoint - _waitLow}, {SetPoint + _waitHigh})";
  551. return false;
  552. }
  553. }
  554. }