| 1 |
- <?xml version="1.0" encoding="utf-8"?><ArrayOfVIDItem xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"><VIDItem Name="Clock" Index="3" DataType="String" Description="Present date time
YYYYMMDDhhmmsscc" Module="System" Type="" Unit="" Parameter="Clock" /><VIDItem Name="ControlState" Index="4" DataType="String" Description="Current control state
"1"= Not defined
"2"= Offline-Equipment OffLine
"3"= Offline-Attempt OnLine
"4"= On-Line Local
 "5"= On-Line Remote" Module="System" Type="" Unit="" Parameter="ControlState" /><VIDItem Name="ECChangedID" Index="3007" DataType="Int" Description="Changed ECID list L,n<ECID>" Module="System" Type="" Unit="" Parameter="ECChangedID" /><VIDItem Name="CarrierID" Index="3105" DataType="String" Description="The ID of the carrier." Module="System" Type="" Unit="" Parameter="CarrierID" /><VIDItem Name="SlotMap" Index="3106" DataType="String" Description="Presence status of wafers in the carrier.
L, n (n = Number of SLOTSTATEs)
<SLOTSTATE>
0=UNDEFINED
1=EMPTY
2=NOT EMPTY
3=CORRECTLY OCCUPIED
4=DOUBLE SLOTTED
5=CROSS SLOTTED" Module="System" Type="" Unit="" Parameter="SlotMap" /><VIDItem Name="PortID" Index="3113" DataType="Int" Description="Load port ID" Module="System" Type="" Unit="" Parameter="PortID" /><VIDItem Name="SubstID" Index="3404" DataType="String" Description="Identifier of substrate associated with last event." Module="System" Type="" Unit="" Parameter="SubstID" /><VIDItem Name="SubstLocID" Index="3405" DataType="String" Description="Identifier for equipment substrate location associated with the last event." Module="System" Type="" Unit="" Parameter="SubstLocID" /><VIDItem Name="SubstLocState" Index="3406" DataType="Int" Description="State of substrate location associated with the last event.
0=UNOCCUPIED
1=OCCUPIED" Module="System" Type="" Unit="" Parameter="SubstLocState" /></ArrayOfVIDItem>
|
