FurnaceNTP/Furnace/FurnaceRT/Config/Parameter/AlarmCondition/ParameterFormat.xml

<?xml version="1.0" encoding="utf-8"?>
<Aitex>
	<TableParameterFormat ChamberType="AlarmCondition" Version="1.0"  TableNumber="200">

		<!--###########################################-->
		<Catalog DisplayName="ParameterInfo">
			<Group DisplayName="Parameter Information">
				<Step ModuleName="" DeviceType="" DisplayName="No." ControlName="TableNo" InputType="ReadOnly" />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<!--<Step ModuleName="" DeviceType="" DisplayName="Use Temp" ControlName="UseTemp" InputType="NumInput" InputMode="" Min="0" Max="99999"  />-->
			</Group>
		</Catalog>
		<!--###########################################-->
		<Catalog DisplayName="Table">
			<Group DisplayName="TempHeater" ControlName="TempHeater" TableNumber="5" NameList="U,CU,C,CL,L">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="AlarmDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="ErrorDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Buzzer" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="TempBoat" ControlName="TempBoat" TableNumber="2" NameList="Boat Load,Boat Unload" Description="BoatLoad/Unload">
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="High Limit" DefaultValue="0.0" ControlName="HighLimit" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="Unit" InputType="TextInput" />
			</Group>
			<Group DisplayName="FlowDeviation"  ControlName="MFCFlowDeviation"  TableNumber="16" NameList="MFC1,MFC2,MFC3,MFC4,MFC5,MFC6,MFC7,MFC8,MFC9,MFC10,MFC11,MFC12,MFC13,MFC14,MFC15,MFC16">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="AlarmDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Buzzer" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="℃" ControlName="ErrorUnit" InputType="TextInput" />
                <Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="ErrorDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Buzzer" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="Press" ControlName="Press" TableNumber="3" NameList="Press 1,Press 2,APC Angle">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="Torr" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="AlarmDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="Torr" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="DelayTime" DefaultValue="0" ControlName="ErrorDelayTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="AUX" ControlName="AUX" TableNumber="101" NameList="">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="HWILK" ControlName="HWILK" TableNumber="68" NameList="Air/N2-7 Pressure Too Low,N2-1 Pressure Too Low,N2-1 Pressure Too High,SiH2Cl2 Pressure Too Low,SiH2Cl2 Pressure Too High,
				   NH3-1 Pressure To Low,NH3-1 Pressure Too High,NH3-2 Pressure Too Low,NH3-2 Pressure Too High,N2-2 Pressure Too Low,
				   N2-2 Pressure Too High,20% F2/N2 Pressure Too Low,20% F2/N2 Pressure Too High,N2-8-1 Pressure Too Low,N2-8-1 Pressure Too High,
				   N2-8-2 Pressure Too Low,O.PRS-PS14 Pressure Too High,O.PRS-PS14 Pressure Too High,N2-6 Pressure Too Low,N2-70 Pressure Too Low,
				   Air/N2-1 Pressure Too Low,Heater Exhaust Pressure Too Low,Scavenge Exhaust Pressure Too Low,ValveBox Exhaust Pressure Too Low,GasBox Exhaust Pressure Too Low,
				   LA Exhaust Pressure Too Low,RHC Exhaust Pressure Too Low,Loading Area Exhaust Abnormal,FrontBody Exhaust Pressure Too Low,TEMP1 HTR Abnormal,
				   TEMP3 TR1 Abnormal,TEMP4 TR2 Abnormal,TEMP5 TR3 Abnormal,Magnetic Water Leak,Cooling Water Leak,
				   Front Panel Abnormal,Filter Box Cover Abnormal,Transfer Room Panel Abnormal,Heater Room Panel Abnormal,GasBox Lower Door Abnormal,
				   GasBox Upper Door Abnormal,RHC Abnormal Radiator,RHC Flow Abnormal,Cooling Water Flow Of Furnace Abnormal,Cooling Water Flow Of Shuttle Abnormal,
				   Cooling Water Flow Of BoatRotation Abnormal,Cooling Water Flow Of Flange Abnormal,Cooling Water Flow Of Loading Area Abnormal,RF Alarm,RF N2 Flow Abnormal,
				   Filter Box Fan Abnormal,SiH2CL2 Gas Leak,NH3 Gas Leak,F2 Gas Leak,Gas Leak Fault,
				   Heater Power Down,Vacuum Pump Warning,Vacuum Pump Alarm,O.PRS Too High,CK.PRS Too Low,
				   FFU Data Write Error,P.CNT Pressure NG,RHC.DMR Abnormal,BlowerPower Overload,RF Output Abnormal,
				   N2 Flow in FOUP Abnormal,Cap Heater Abnormal,Tube Heater OverTemp" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="InterLockName" ControlName="InterLockName" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="ValveILK" ControlName="ValveILK" TableNumber="1" NameList="Valve Interlock" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="TempController" ControlName="TempController" TableNumber="10" NameList="TC Open Error,TC Short Error,Limit Temperature Error,A/D Conversion Value Error,Sub Heater TC Open Error,Sub Heater Limit Temperature Error,Sub Heater A/D Conversion Value Error,Overheat Limit Temperature Error,Overheat Error,Overheat AD Conversion Value Error" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="APCController" ControlName="APCController" TableNumber="0" NameList="" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="TransferError" ControlName="TransferError" TableNumber="1" NameList="RoBo Command Error" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="SerialLineDown" ControlName="SerialLineDown" TableNumber="2" NameList="Temperature Controller Line Down,APC Controller Line Down" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="LanLineDown" ControlName="LanLineDown" TableNumber="1" NameList="PMC - RoBo5000 Line Down" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
			<!--<Group DisplayName="DeviceNetLineDown" ControlName="DeviceNetLineDown" TableNumber="7" NameList="Sequencer Line Down,MFCDNET-1 Line Down,MFCDNET-2 Line Down,MFCDNET-3 Line Down,MFCDNET-4 Line Down,Hardware Gas Pattern Panel-1 Line Down,Hardware Gas Pattern Panel-2 Line Down" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>-->
			<Group DisplayName="Sensor"  ControlName="Sensor" TableNumber="0" NameList="">
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="AlarmDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="AlarmDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="AlarmUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="AlarmTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="AlarmErrorCommand" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="ErrorCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.High" DefaultValue="0.0" ControlName="ErrorDevHigh" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Dev.Low" DefaultValue="0.0" ControlName="ErrorDevLow" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"/>
				<Step ModuleName="" DeviceType="" DisplayName="Unit" DefaultValue="%fs" ControlName="ErrorUnit" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Time" DefaultValue="0" ControlName="ErrorTime" InputType="DoubleInput" InputMode=""  Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorErrorCommand" InputType="TextInput" />
			</Group>
			<Group DisplayName="Other" ControlName="Other" TableNumber="1" NameList="Step HOLD Check" Description="">
				<Step ModuleName="" DeviceType="" DisplayName="Index" ControlName="Index" InputType="NumInput" InputMode="" Min="0" Max="99999"  />
				<Step ModuleName="" DeviceType="" DisplayName="Name" ControlName="Name" InputType="TextInput" />
				<Step ModuleName="" DeviceType="" DisplayName="Check" DefaultValue="ON" ControlName="AlarmCheck" InputType="TextInput" Description=""/>
				<Step ModuleName="" DeviceType="" DisplayName="Error Command" DefaultValue="Monitor" ControlName="ErrorCommand" InputType="TextInput" />
			</Group>
		</Catalog>
	</TableParameterFormat>

	<TableParameterSchema>
		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
			<xs:simpleType name="booleanType">
				<xs:restriction base="xs:string">
					<xs:enumeration value="0" />
					<xs:enumeration value="1" />
					<xs:enumeration value="False" />
					<xs:enumeration value="True" />
					<xs:enumeration value="false" />
					<xs:enumeration value="true" />
				</xs:restriction>
			</xs:simpleType>
			<xs:element name="TableParameterData">
				<xs:complexType>
					<xs:sequence>
						<xs:element maxOccurs="unbounded" name="Step">
							<xs:complexType>
								<xs:attribute name="TableNo" type="xs:string" use="required" />
								<xs:attribute name="Name" type="xs:string" use="required" />
								<xs:attribute name="Type" type="xs:string" use="required" />
								<xs:attribute name="UseTemp" type="xs:decimal" use="required" />
							</xs:complexType>
						</xs:element>
					</xs:sequence>
					<xs:attribute name="ParameterChamberType" type="xs:string" fixed="Parameter" use="required" />
					<xs:attribute name="ParameterType" type="xs:string" use="required" />
					<xs:attribute name="ParameterVersion" type="xs:string" fixed="1.0" use="required" />
					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
					<xs:attribute name="Description" type="xs:string" use="required" />
				</xs:complexType>
			</xs:element>
		</xs:schema>
	</TableParameterSchema>
</Aitex>