WaferRobotPick.cs 33 KB

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  1. using Aitex.Core.RT.Routine;
  2. using Aitex.Core.RT.SCCore;
  3. using Aitex.Core.Util;
  4. using Aitex.Sorter.Common;
  5. using MECF.Framework.Common.Equipment;
  6. using MECF.Framework.Common.Schedulers;
  7. using MECF.Framework.Common.SubstrateTrackings;
  8. using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
  9. using System;
  10. using System.Collections.Generic;
  11. using FurnaceRT.Equipments.FIMSs;
  12. using FurnaceRT.Equipments.PMs;
  13. using FurnaceRT.Equipments.Stockers;
  14. using FurnaceRT.Equipments.Systems;
  15. namespace FurnaceRT.Equipments.WaferRobots
  16. {
  17. public class WaferRobotPick : ModuleRoutine, IRoutine
  18. {
  19. enum RoutineStep
  20. {
  21. Pick,
  22. RobotRequestWaferPresent,
  23. CheckCassetteInfoByRobotSensor,
  24. CheckBeforePick,
  25. SetRobotActionCommand,
  26. }
  27. private ModuleName _source;
  28. private int _sourceSlot;
  29. private Hand _blade;
  30. private WaferRobotModule _waferRobotModule;
  31. private int _timeout = 0;
  32. private RD_TRIG _holdTrig = new RD_TRIG();
  33. private R_TRIG _emergencyStopTrig = new R_TRIG();
  34. private R_TRIG _pauseTrig = new R_TRIG();
  35. private R_TRIG _resumeTrig = new R_TRIG();
  36. private RoutineStep _routineStep;
  37. private double _durationTime = 0;
  38. private bool _isHasAlarm = false;
  39. private bool _needStartCheck = true;
  40. public WaferRobotPick(WaferRobotModule waferRobotModule)
  41. {
  42. _waferRobotModule = waferRobotModule;
  43. Module = waferRobotModule.Module;
  44. Name = "Pick";
  45. }
  46. public void Init(ModuleName source, int sourceSlot, Hand blade, bool isHasAlarm)
  47. {
  48. _source = source;
  49. _sourceSlot = sourceSlot;
  50. _blade = blade;
  51. var para = new List<object> { _source, _sourceSlot, _blade, true };//增加参数true,表示执行过程中有alarm
  52. _waferRobotModule.PickWaferFailAlarm.RetryMessage = (int)WaferRobotModule.MSG.PickRetry;
  53. _waferRobotModule.PickWaferFailAlarm.RetryMessageParas = para.ToArray();
  54. _waferRobotModule.PickWaferTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.PickRetry;
  55. _waferRobotModule.PickWaferTimeoutAlarm.RetryMessageParas = para.ToArray();
  56. _waferRobotModule.RequestWaferPresentFailAlarm.RetryMessage = (int)WaferRobotModule.MSG.PickRetry;
  57. _waferRobotModule.RequestWaferPresentFailAlarm.RetryMessageParas = para.ToArray();
  58. _waferRobotModule.RequestWaferPresentTimeoutAlarm.RetryMessage = (int)WaferRobotModule.MSG.PickRetry;
  59. _waferRobotModule.RequestWaferPresentTimeoutAlarm.RetryMessageParas = para.ToArray();
  60. _waferRobotModule.RobotHasError.RetryMessage = (int)WaferRobotModule.MSG.PickRetry;
  61. _waferRobotModule.RobotHasError.RetryMessageParas = para.ToArray();
  62. _isHasAlarm = isHasAlarm;
  63. if (!_isHasAlarm)
  64. _needStartCheck = true;
  65. }
  66. public Result Start(params object[] objs)
  67. {
  68. // 抛出过alarm就不reset
  69. if (!_isHasAlarm)
  70. {
  71. Reset();
  72. }
  73. else
  74. {
  75. List<int> stepLst = new List<int>(Steps.ToArray());
  76. stepLst.Remove((int)_routineStep);
  77. Steps = new Stack<int>(stepLst);
  78. _isHasAlarm = false;
  79. ResetState();
  80. }
  81. _holdTrig.RST = true;
  82. _emergencyStopTrig.RST = true;
  83. _pauseTrig.RST = true;
  84. _resumeTrig.RST = true;
  85. _timeout = SC.GetValue<int>($"{Module}.PickTimeout");
  86. if (_needStartCheck)
  87. {
  88. if (_blade == Hand.Blade1)
  89. {
  90. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  91. {
  92. if (!WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2))
  93. {
  94. //_waferRobotModule.BladeWaferPresentWarning.Description = $"{ModuleName.WaferRobot} {_blade} wafer present";
  95. _waferRobotModule.BladeWaferPresentWarning.Set($"{ModuleName.WaferRobot} {_blade} wafer present");
  96. return Result.FAIL;
  97. }
  98. }
  99. else
  100. {
  101. if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade3 || !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2))
  102. {
  103. //_waferRobotModule.BladeWaferPresentWarning.Description = $"{ModuleName.WaferRobot} {_blade} wafer present";
  104. _waferRobotModule.BladeWaferPresentWarning.Set($"{ModuleName.WaferRobot} {_blade} wafer present");
  105. return Result.FAIL;
  106. }
  107. }
  108. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot))
  109. {
  110. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 1} wafer not present";
  111. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 1} wafer not present");
  112. return Result.FAIL;
  113. }
  114. }
  115. else if (_blade == Hand.Blade2)
  116. {
  117. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  118. {
  119. if (!WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) ||
  120. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) ||
  121. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) ||
  122. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  123. {
  124. //_waferRobotModule.BladeWaferPresentWarning.Description = $"{ModuleName.WaferRobot} {_blade} wafer present";
  125. _waferRobotModule.BladeWaferPresentWarning.Set($"{ModuleName.WaferRobot} {_blade} wafer present");
  126. return Result.FAIL;
  127. }
  128. }
  129. else
  130. {
  131. if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade2 ||
  132. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) ||
  133. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) ||
  134. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) ||
  135. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  136. {
  137. //_waferRobotModule.BladeWaferPresentWarning.Description = $"{ModuleName.WaferRobot} {_blade} wafer present";
  138. _waferRobotModule.BladeWaferPresentWarning.Set($"{ModuleName.WaferRobot} {_blade} wafer present");
  139. return Result.FAIL;
  140. }
  141. }
  142. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot))
  143. {
  144. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 1} wafer not present";
  145. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 1} wafer not present");
  146. return Result.FAIL;
  147. }
  148. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot + 1))
  149. {
  150. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 2} wafer not present";
  151. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 2} wafer not present");
  152. return Result.FAIL;
  153. }
  154. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot + 2))
  155. {
  156. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 3} wafer not present";
  157. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 3} wafer not present");
  158. return Result.FAIL;
  159. }
  160. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot + 3))
  161. {
  162. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 4} wafer not present";
  163. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 4} wafer not present");
  164. return Result.FAIL;
  165. }
  166. }
  167. else if (_blade == Hand.Both)
  168. {
  169. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  170. {
  171. if (!WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) ||
  172. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) ||
  173. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) ||
  174. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) ||
  175. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  176. {
  177. //_waferRobotModule.BladeWaferPresentWarning.Description = $"{ModuleName.WaferRobot} {_blade} wafer present";
  178. _waferRobotModule.BladeWaferPresentWarning.Set($"{ModuleName.WaferRobot} {_blade} wafer present");
  179. return Result.FAIL;
  180. }
  181. }
  182. else
  183. {
  184. if (_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade1 ||
  185. _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade2 ||
  186. _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade3 ||
  187. _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade4 ||
  188. _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade5 ||
  189. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) ||
  190. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) ||
  191. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) ||
  192. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) ||
  193. !WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  194. {
  195. //_waferRobotModule.BladeWaferPresentWarning.Description = $"{ModuleName.WaferRobot} {_blade} wafer present";
  196. _waferRobotModule.BladeWaferPresentWarning.Set($"{ModuleName.WaferRobot} {_blade} wafer present");
  197. return Result.FAIL;
  198. }
  199. }
  200. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot))
  201. {
  202. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 1} wafer not present";
  203. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 1} wafer not present");
  204. return Result.FAIL;
  205. }
  206. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot + 1))
  207. {
  208. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 2} wafer not present";
  209. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 2} wafer not present");
  210. return Result.FAIL;
  211. }
  212. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot + 2))
  213. {
  214. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 3} wafer not present";
  215. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 3} wafer not present");
  216. return Result.FAIL;
  217. }
  218. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot + 3))
  219. {
  220. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 4} wafer not present";
  221. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 4} wafer not present");
  222. return Result.FAIL;
  223. }
  224. if (!WaferManager.Instance.CheckHasWafer(_source, _sourceSlot + 4))
  225. {
  226. //_waferRobotModule.TargetWaferNotPresentWarning.Description = $"{_source} {_sourceSlot + 5} wafer not present";
  227. _waferRobotModule.TargetWaferNotPresentWarning.Set($"{_source} {_sourceSlot + 5} wafer not present");
  228. return Result.FAIL;
  229. }
  230. }
  231. if (ModuleHelper.IsPm(_source))
  232. {
  233. var pmModule = Singleton<EquipmentManager>.Instance.Modules[_source] as PMModule;
  234. if (pmModule != null && !pmModule.CheckReadyForTransfer(ModuleHelper.Converter(_waferRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick, out string reason))
  235. {
  236. //_waferRobotModule.PickWaferFailAlarm.Description = reason;
  237. _waferRobotModule.PickWaferFailAlarm.Set(reason);
  238. return Result.FAIL;
  239. }
  240. }
  241. if (_source == ModuleName.FIMS1 || _source == ModuleName.FIMS2)
  242. {
  243. var fims = Singleton<EquipmentManager>.Instance.Modules[_source] as FIMSModule;
  244. if (fims != null && !fims.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, _sourceSlot, EnumTransferType.Pick, out string reason))
  245. {
  246. //_waferRobotModule.PickWaferFailAlarm.Description = reason;
  247. _waferRobotModule.PickWaferFailAlarm.Set(reason);
  248. return Result.FAIL;
  249. }
  250. }
  251. }
  252. Notify($"Start");
  253. return Result.RUN;
  254. }
  255. public void Abort()
  256. {
  257. _waferRobotModule.ResetRobotActionCommand();
  258. _waferRobotModule.Stop();
  259. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_waferRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  260. }
  261. public override Result Monitor()
  262. {
  263. try
  264. {
  265. PauseRountine(_waferRobotModule.WaferRobotDevice.IsPause);
  266. if (_waferRobotModule.WaferRobotDevice.IsPause)
  267. return Result.RUN;
  268. CheckBeforePick((int)RoutineStep.CheckBeforePick, _source, _sourceSlot, _blade);
  269. if (_waferRobotModule.TrigActionCommand != null)
  270. SetRobotActionCommand((int)RoutineStep.SetRobotActionCommand, _source, _timeout);
  271. Pick((int)RoutineStep.Pick, _source, _sourceSlot, _blade, _timeout);
  272. //RobotRequestWaferPresent((int)RoutineStep.RobotRequestWaferPresent, _blade, _timeout);
  273. CheckWaferInfoByRobotSensor((int)RoutineStep.CheckCassetteInfoByRobotSensor, _blade, true);
  274. }
  275. catch (RoutineBreakException)
  276. {
  277. return Result.RUN;
  278. }
  279. catch (RoutineFaildException ex)
  280. {
  281. _waferRobotModule.ResetRobotActionCommand();
  282. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_waferRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  283. return Result.FAIL;
  284. }
  285. _waferRobotModule.ResetRobotActionCommand();
  286. (Singleton<EquipmentManager>.Instance.Modules[_source] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_waferRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick);
  287. Notify("Finished");
  288. return Result.DONE;
  289. }
  290. private void PickStartInfo(ModuleName moduleName)
  291. {
  292. if (ModuleHelper.IsFIMS(moduleName))
  293. {
  294. var fimsFoupInfo = CarrierManager.Instance.GetCarrier(_source);
  295. fimsFoupInfo.UICarrierStatusEnum = CarrierStatus.WCHARG;
  296. Singleton<EquipmentManager>.Instance.SetVisibility(fimsFoupInfo, true);
  297. Singleton<EquipmentManager>.Instance.SetUIWaferCount(fimsFoupInfo, moduleName, out var wafers);
  298. }
  299. if (ModuleHelper.IsPm(moduleName))
  300. {
  301. var fims1 = Singleton<EquipmentManager>.Instance.Modules[ModuleName.FIMS1] as FIMSModule;
  302. var fims2 = Singleton<EquipmentManager>.Instance.Modules[ModuleName.FIMS2] as FIMSModule;
  303. if (fims1 != null && fims1.CheckReadyForTransfer(ModuleName.WaferRobot, _blade, 0, EnumTransferType.Place, out string reason))
  304. {
  305. var fims1FoupInfo = CarrierManager.Instance.GetCarrier(ModuleName.FIMS1);
  306. fims1FoupInfo.UICarrierStatusEnum = CarrierStatus.WDCHRG;
  307. Singleton<EquipmentManager>.Instance.SetUIWaferCount(fims1FoupInfo, ModuleName.FIMS1, out var wafers);
  308. Singleton<EquipmentManager>.Instance.SetVisibility(fims1FoupInfo, true);
  309. }
  310. if (fims2 != null && fims2.CheckReadyForTransfer(ModuleName.WaferRobot, _blade, 0, EnumTransferType.Place, out reason))
  311. {
  312. var fims2FoupInfo = CarrierManager.Instance.GetCarrier(ModuleName.FIMS2);
  313. fims2FoupInfo.UICarrierStatusEnum = CarrierStatus.WDCHRG;
  314. Singleton<EquipmentManager>.Instance.SetUIWaferCount(fims2FoupInfo, ModuleName.FIMS2, out var wafers);
  315. Singleton<EquipmentManager>.Instance.SetVisibility(fims2FoupInfo, true);
  316. }
  317. }
  318. }
  319. private void CheckBeforePick(int id, ModuleName source, int slot, Hand blade)
  320. {
  321. Tuple<bool, Result> ret = Execute(id, () =>
  322. {
  323. Notify("Check pick condition");
  324. string reason = string.Empty;
  325. if (_waferRobotModule.WaferRobotDevice.IsError)
  326. {
  327. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for robot error, error code={_waferRobotModule.WaferRobotDevice.ErrorCode}";
  328. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for robot error, error code={_waferRobotModule.WaferRobotDevice.ErrorCode}");
  329. return false;
  330. }
  331. if (!_waferRobotModule.WaferRobotDevice.IsReady(out reason))
  332. {
  333. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for robot isn't Ready";
  334. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for robot isn't Ready {reason}");
  335. return false;
  336. }
  337. if (ModuleHelper.IsPm(_source))
  338. {
  339. var pmModule = Singleton<EquipmentManager>.Instance.Modules[_source] as PMModule;
  340. if (pmModule != null && !pmModule.CheckReadyForTransfer(ModuleHelper.Converter(_waferRobotModule.Module), _blade, _sourceSlot, EnumTransferType.Pick, out reason))
  341. {
  342. //_waferRobotModule.PickWaferFailAlarm.Description = reason;
  343. _waferRobotModule.PickWaferFailAlarm.Set(reason);
  344. return false;
  345. }
  346. PickStartInfo(_source);
  347. }
  348. if (source == ModuleName.FIMS1 || source == ModuleName.FIMS2)
  349. {
  350. var fims = Singleton<EquipmentManager>.Instance.Modules[source] as FIMSModule;
  351. if (fims != null && !fims.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, slot, EnumTransferType.Pick, out reason))
  352. {
  353. //_waferRobotModule.PickWaferFailAlarm.Description = reason;
  354. _waferRobotModule.PickWaferFailAlarm.Set(reason);
  355. return false;
  356. }
  357. PickStartInfo(source);
  358. }
  359. if (blade == Hand.Blade1)
  360. {
  361. if (!WaferManager.Instance.CheckHasWafer(source, slot))
  362. {
  363. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for {source} no wafer";
  364. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for {source} no wafer");
  365. return false;
  366. }
  367. if (!WaferManager.Instance.CheckNoWafer(Module, 2))
  368. {
  369. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for blade has wafer";
  370. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for blade has wafer");
  371. return false;
  372. }
  373. }
  374. else if (blade == Hand.Blade2)
  375. {
  376. if (!WaferManager.Instance.CheckHasWafer(source, slot))
  377. {
  378. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for {source} no wafer";
  379. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for {source} no wafer");
  380. return false;
  381. }
  382. if (!WaferManager.Instance.CheckNoWafer(Module, 1))
  383. {
  384. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for blade has wafer";
  385. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for blade has wafer");
  386. return false;
  387. }
  388. }
  389. else
  390. {
  391. for (int i = 0; i < 5; i++)
  392. {
  393. if (!WaferManager.Instance.CheckHasWafer(source, slot + i))
  394. {
  395. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for {source} no wafer";
  396. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for {source} no wafer");
  397. return false;
  398. }
  399. if (!WaferManager.Instance.CheckNoWafer(Module, i))
  400. {
  401. //_waferRobotModule.PickWaferFailAlarm.Description = $"pick from {source} failed for blade has wafer";
  402. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for blade has wafer");
  403. return false;
  404. }
  405. }
  406. }
  407. return true;
  408. });
  409. if (ret.Item1)
  410. {
  411. if (ret.Item2 == Result.FAIL)
  412. {
  413. throw (new RoutineFaildException());
  414. }
  415. }
  416. _needStartCheck = false;
  417. }
  418. private void Pick(int id, ModuleName source, int slot, Hand hand, int timeout)
  419. {
  420. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  421. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  422. {
  423. Notify("Pick");
  424. string reason;
  425. (Singleton<EquipmentManager>.Instance.Modules[source] as ITransferTarget)?.NoteTransferStart(ModuleHelper.Converter(_waferRobotModule.Module), hand, slot, EnumTransferType.Pick);
  426. if (!_waferRobotModule.RobotPick(source, slot, hand, out reason))
  427. {
  428. //_waferRobotModule.PickWaferFailAlarm.Description = reason;
  429. _waferRobotModule.PickWaferFailAlarm.Set(reason);
  430. return false;
  431. }
  432. return true;
  433. }, () =>
  434. {
  435. if (_waferRobotModule.WaferRobotDevice.IsReady() && !_waferRobotModule.WaferRobotDevice.IsError)
  436. {
  437. return true;
  438. }
  439. return false;
  440. }, timeout * 1000);
  441. if (ret.Item1)
  442. {
  443. if (ret.Item2 == Result.FAIL)
  444. {
  445. //_waferRobotModule.PickWaferFailAlarm.Description = $"{_waferRobotModule.WaferRobotDevice.ErrorCode}";
  446. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for robot error, error code={_waferRobotModule.WaferRobotDevice.ErrorCode}");
  447. throw (new RoutineFaildException());
  448. }
  449. else if (ret.Item2 == Result.TIMEOUT) //timeout
  450. {
  451. //_waferRobotModule.PickWaferTimeoutAlarm.Description = $"timeout over {timeout} seconds";
  452. _waferRobotModule.PickWaferTimeoutAlarm.Set($"timeout over {timeout} seconds");
  453. throw (new RoutineFaildException());
  454. }
  455. else
  456. throw (new RoutineBreakException());
  457. }
  458. }
  459. private void RobotRequestWaferPresent(int id, Hand hand, int timeout)
  460. {
  461. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  462. {
  463. Notify("request wafer present");
  464. if (!_waferRobotModule.RequestWaferPresent(hand, out string reason))
  465. {
  466. //_waferRobotModule.RequestWaferPresentFailAlarm.Description = reason;
  467. _waferRobotModule.RequestWaferPresentFailAlarm.Set(reason);
  468. return false;
  469. }
  470. return true;
  471. }, () =>
  472. {
  473. if (_waferRobotModule.WaferRobotDevice.IsReady() && !_waferRobotModule.WaferRobotDevice.IsError)
  474. {
  475. return true;
  476. }
  477. return false;
  478. }, timeout * 1000);
  479. if (ret.Item1)
  480. {
  481. if (ret.Item2 == Result.FAIL)
  482. {
  483. throw (new RoutineFaildException());
  484. }
  485. else if (ret.Item2 == Result.TIMEOUT) //timeout
  486. {
  487. //_waferRobotModule.RequestWaferPresentTimeoutAlarm.Description = $"timeout over {timeout} seconds";
  488. _waferRobotModule.RequestWaferPresentTimeoutAlarm.Set($"timeout over {timeout} seconds");
  489. throw (new RoutineFaildException());
  490. }
  491. else
  492. throw (new RoutineBreakException());
  493. }
  494. }
  495. private void CheckWaferInfoByRobotSensor(int id, Hand hand, bool isAfterPick)
  496. {
  497. Tuple<bool, Result> ret = Execute(id, () =>
  498. {
  499. Notify($"check wafer info by robot RQ present");
  500. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  501. return true;
  502. if (hand == Hand.Blade1 || hand == Hand.Both)
  503. {
  504. if (!isAfterPick && _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade3)
  505. {
  506. _waferRobotModule.RobotSensorFoundWaferOnBladeAfterPlaceAlarm.Set("Wafer Robot sensor found wafer on blade 3");
  507. return false;
  508. }
  509. if (isAfterPick && !_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade3)
  510. {
  511. _waferRobotModule.RobotSensorNotFoundWaferOnBladeAfterPickAlarm.Set("Wafer Robot sensor no wafer on blade 3");
  512. return false;
  513. }
  514. }
  515. if (hand == Hand.Blade2 || hand == Hand.Both)
  516. {
  517. if (!isAfterPick && _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade1)
  518. {
  519. _waferRobotModule.RobotSensorFoundWaferOnBladeAfterPlaceAlarm.Set("Wafer Robot sensor found wafer on blade 1");
  520. return false;
  521. }
  522. if (isAfterPick && !_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade1)
  523. {
  524. _waferRobotModule.RobotSensorNotFoundWaferOnBladeAfterPickAlarm.Set("Wafer Robot sensor no wafer on blade 1");
  525. return false;
  526. }
  527. if (!isAfterPick && _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade2)
  528. {
  529. _waferRobotModule.RobotSensorFoundWaferOnBladeAfterPlaceAlarm.Set("Wafer Robot sensor found wafer on blade 2");
  530. return false;
  531. }
  532. if (isAfterPick && !_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade2)
  533. {
  534. _waferRobotModule.RobotSensorNotFoundWaferOnBladeAfterPickAlarm.Set("Wafer Robot sensor no wafer on blade 2");
  535. return false;
  536. }
  537. if (!isAfterPick && _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade4)
  538. {
  539. _waferRobotModule.RobotSensorFoundWaferOnBladeAfterPlaceAlarm.Set("Wafer Robot sensor found wafer on blade 4");
  540. return false;
  541. }
  542. if (isAfterPick && !_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade4)
  543. {
  544. _waferRobotModule.RobotSensorNotFoundWaferOnBladeAfterPickAlarm.Set("Wafer Robot sensor no wafer on blade 4");
  545. return false;
  546. }
  547. if (!isAfterPick && _waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade5)
  548. {
  549. _waferRobotModule.RobotSensorFoundWaferOnBladeAfterPlaceAlarm.Set("Wafer Robot sensor found wafer on blade 5");
  550. return false;
  551. }
  552. if (isAfterPick && !_waferRobotModule.WaferRobotDevice.IsWaferPresenceOnBlade5)
  553. {
  554. _waferRobotModule.RobotSensorNotFoundWaferOnBladeAfterPickAlarm.Set("Wafer Robot sensor no wafer on blade 5");
  555. return false;
  556. }
  557. }
  558. return true;
  559. });
  560. if (ret.Item1)
  561. {
  562. if (ret.Item2 == Result.FAIL)
  563. {
  564. _waferRobotModule.CheckWaferInformationFailAlarm.Set();
  565. throw (new RoutineFaildException());
  566. }
  567. else
  568. throw (new RoutineBreakException());
  569. }
  570. }
  571. private void SetRobotActionCommand(int id, ModuleName source, int timeout)
  572. {
  573. _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
  574. Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
  575. {
  576. Notify($"Set robot action command target position {source}");
  577. _waferRobotModule.SetRobotActionCommand(source, EnumTransferType.Pick);
  578. return true;
  579. }, () =>
  580. {
  581. return _waferRobotModule.CheckRobotActionCommand(source, EnumTransferType.Pick);
  582. }, timeout * 1000);
  583. if (ret.Item1)
  584. {
  585. if (ret.Item2 == Result.FAIL)
  586. {
  587. _waferRobotModule.PickWaferFailAlarm.Set($"pick from {source} failed for robot action command interlock");
  588. throw (new RoutineFaildException());
  589. }
  590. else if (ret.Item2 == Result.TIMEOUT) //timeout
  591. {
  592. _waferRobotModule.PickWaferTimeoutAlarm.Set($"timeout over {timeout} seconds");
  593. throw (new RoutineFaildException());
  594. }
  595. else
  596. throw (new RoutineBreakException());
  597. }
  598. }
  599. }
  600. }