RecipeHead.cs 810 B

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  1. namespace FurnaceRT.Equipments.PMs.RecipeExecutions
  2. {
  3. public class RecipeHead
  4. {
  5. public string ProcessPurgeCount { get; set; }
  6. public string RecipeChamberType { get; set; }
  7. public string RecipeVersion { get; set; }
  8. public string SubRecipe { get; set; }
  9. public string AlarmRecipe { get; set; }
  10. public string AbortRecipe { get; set; }
  11. public string AlarmCondition { get; set; }
  12. public string LeakCheck { get; set; }
  13. public string PressApcPID { get; set; }
  14. public string TempCorrect { get; set; }
  15. public string TempPID { get; set; }
  16. public string ProfileCondition { get; set; }
  17. public bool IsN2PurgeMode { get; set; }
  18. public string N2PurgeModeStr { get; set; }
  19. }
  20. }