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- <?xml version="1.0" encoding="utf-8"?><ArrayOfVIDItem xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"><VIDItem Name="Clock" Index="3" DataType="String" Description="Present date time
YYYYMMDDhhmmsscc" Module="System" Type="" Unit="" Parameter="Clock" /><VIDItem Name="ControlState" Index="4" DataType="String" Description="Current control state
"1"= Not defined
"2"= Offline-Equipment OffLine
"3"= Offline-Attempt OnLine
"4"= On-Line Local
 "5"= On-Line Remote" Module="System" Type="" Unit="" Parameter="ControlState" /><VIDItem Name="PreviousProcessState" Index="7" DataType="Int" Description="Immediately before process status
Ref.: VID8 ProcessState" Module="System" Type="" Unit="" Parameter="PreviousProcessState" /><VIDItem Name="ProcessState" Index="8" DataType="Int" Description="Current process state
0= init
1= idle
2= ready
3= run
4= pause
5 = abort
6= down" Module="System" Type="" Unit="" Parameter="ProcessState" /><VIDItem Name="PPChangeName" Index="3003" DataType="String" Description="Recipe change name(RCPID)" Module="System" Type="" Unit="" Parameter="PPChangeName" /><VIDItem Name="PPChangeStatus" Index="3004" DataType="Int" Description="The type of change that occurred for the recipe indicated in RcpChangeName 
 0=No change
 1=Created
 2=Updated (modified)
 3=Stored (new)
 4=Replaced
 5=Deleted
 6=Copied
 7=Renamed" Module="System" Type="" Unit="" Parameter="PPChangeStatus" /><VIDItem Name="AlarmID" Index="3006" DataType="Int" Description="This variable is valid only upon the setting or clearing of an alarm condition and contains the current alarm identification (ALID), regardless of whether that alarm is enabled for reporting." Module="System" Type="" Unit="" Parameter="AlarmID" /><VIDItem Name="ECChangedID" Index="3007" DataType="Int" Description="Changed ECID list L,n<ECID>" Module="System" Type="" Unit="" Parameter="ECChangedID" /><VIDItem Name="EventName" Index="3101" DataType="String" Module="System" Type="" Unit="" Parameter="EventName" /><VIDItem Name="LotID" Index="3102" DataType="String" Module="System" Type="" Unit="" Parameter="LotID" /><VIDItem Name="RecipeID" Index="3103" DataType="String" Module="System" Type="" Unit="" Parameter="RecipeID" /><VIDItem Name="CarrierID" Index="3105" DataType="String" Description="The ID of the carrier." Module="System" Type="" Unit="" Parameter="CarrierID" /><VIDItem Name="SlotMap" Index="3106" DataType="String" Description="Presence status of wafers in the carrier.
L, n (n = Number of SLOTSTATEs)
<SLOTSTATE>
0=UNDEFINED
1=EMPTY
2=NOT EMPTY
3=CORRECTLY OCCUPIED
4=DOUBLE SLOTTED
5=CROSS SLOTTED" Module="System" Type="" Unit="" Parameter="SlotMap" /><VIDItem Name="SequenceID" Index="3107" DataType="String" Module="System" Type="" Unit="" Parameter="SequenceID" /><VIDItem Name="AccessMode" Index="3111" DataType="Int" Description="Load Port Access Mode.
0=MANUAL
1=AUTO" Module="System" Type="" Unit="" Parameter="AccessMode" /><VIDItem Name="PortAssociationState" Index="3112" DataType="Int" Description="The association state of a load port.
0=NOT ASSOCIATED
1= ASSOCIATED" Module="System" Type="" Unit="" Parameter="PortAssociationState" /><VIDItem Name="PortID" Index="3113" DataType="Int" Description="Load port ID" Module="System" Type="" Unit="" Parameter="PortID" /><VIDItem Name="CarrierAccessingStatus" Index="3114" DataType="Int" Description="The current accessing state of the carrier by the equipment.
0=NOT ACCESSED
1=IN ACCESS
2=CARRIER COMPLETE
3=CARRIER STOPPED" Module="System" Type="" Unit="" Parameter="CarrierAccessingStatus" /><VIDItem Name="PortTransferState" Index="3116" DataType="Int" Description="The current transfer state of a load port. 
0=OUT OF SERVICE
1=TRANSFER BLOCKED
2=READY TO LOAD
3=READY TO UNLOAD" Module="System" Type="" Unit="" Parameter="PortTransferState" /><VIDItem Name="Reason" Index="3117" DataType="Int" Description="The reason for slot map status, SLOT MAP NOT READ to WAITING FOR HOST
0=Verification Needed
1=Verification By Equipment Unsuccessful
2=Read Fail
3=Improper Substrate Position" Module="System" Type="" Unit="" Parameter="Reason" /><VIDItem Name="LocationID" Index="3118" DataType="String" Description="The ID of a carrier location." Module="System" Type="" Unit="" Parameter="LocationID" /><VIDItem Name="SlotMapStatus" Index="3119" DataType="Int" Description="State of the carrier slot map status. 
0=SLOT MAP NOT READ
1=WAITING FOR HOST
2=SLOT MAP VERIFICATION OK
3=SLOT MAP VERIFICATION FAIL" Module="System" Type="" Unit="" Parameter="SlotMapStatus" /><VIDItem Name="PRJobID" Index="3201" DataType="String" Description="Process job ID" Module="System" Type="" Unit="" Parameter="PRJobID" /><VIDItem Name="PRJobState" Index="3202" DataType="Int" Description="Indicates the current state of a Process Job.
0=POOLED
1=SETTING UP
2=WAITINGFORHOST
3=PROCESSING
4=PROCESSING COMPLETE
5=EXECUTING
6=PAUSING
7=PAUSED
8=STOPPING
9=ABORTING
255=(no state)" Module="System" Type="" Unit="" Parameter="PRJobState" /><VIDItem Name="PrvPRJobState" Index="3203" DataType="Int" Description="The last process job state
 (Values same as DVVAL: 3202)" Module="System" Type="" Unit="" Parameter="PrvPRJobState" /><VIDItem Name="PRMtlNameList" Index="3205" DataType="List" Description="" Module="System" Type="" Unit="" Parameter="PRMtlNameList" /><VIDItem Name="RecVariableList" Index="3210" DataType="List" Description="" Module="System" Type="" Unit="" Parameter="RecVariableList" /><VIDItem Name="CJID" Index="3301" DataType="String" Description="Control Job ID" Module="System" Type="" Unit="" Parameter="CJID" /><VIDItem Name="CJState" Index="3302" DataType="Int" Description="Indicates the current state of a Control Job.
0=QUEUED
1=SELECTED
2=WAITINGFORSTART
3=EXECUTING
4=PAUSED (*1)
5=COMPLETED
255=(no state)" Module="System" Type="" Unit="" Parameter="CJState" /><VIDItem Name="SubstID" Index="3404" DataType="String" Description="Identifier of substrate associated with last event." Module="System" Type="" Unit="" Parameter="SubstID" /><VIDItem Name="SubstLocID" Index="3405" DataType="String" Description="Identifier for equipment substrate location associated with the last event." Module="System" Type="" Unit="" Parameter="SubstLocID" /><VIDItem Name="SubstLocState" Index="3406" DataType="Int" Description="State of substrate location associated with the last event.
0=UNOCCUPIED
1=OCCUPIED" Module="System" Type="" Unit="" Parameter="SubstLocState" /><VIDItem Name="SubstProcState" Index="3407" DataType="Int" Description="Processing state of the substrate associated with the last event.
0=NEEDS PROCESSING
1=IN PROCESS
2=PROCESSED
3=ABORTED
4=STOPPED
5=REJECT
6=LOST
7=SKIPPED
255=(no state)" Module="System" Type="" Unit="" Parameter="SubstProcState" /><VIDItem Name="PrvSubstProcState" Index="3408" DataType="Int" Description="The last board process state
(Values same as DVVAL: 3407)" Module="System" Type="" Unit="" Parameter="PrvSubstProcState" /><VIDItem Name="PPIDList" Index="3505" DataType="List" Description="List of PPID.
L, n
L, 3
<PPID> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="PPIDList" /><VIDItem Name="SlotMapList" Index="3506" DataType="List" Description="List of map slot result.
L, n
L, 3
<SlotMapInt> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="SlotMapList" /><VIDItem Name="BatchLocID" Index="3507" DataType="String" Description="BatchLocID" Module="System" Type="" Unit="" Parameter="BatchLocID" /><VIDItem Name="BoatID" Index="3508" DataType="String" Description="BoatID" Module="System" Type="" Unit="" Parameter="BoatID" /><VIDItem Name="WaferIDList" Index="3509" DataType="List" Description="List of waferID.
L, n
L, 3
<waferID> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="WaferIDList" /><VIDItem Name="PrdVariableList" Index="3510" DataType="List" Description="List of PrdVariable.
L, n
L, 3
<PrdVariable> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="PrdVariableList" /><VIDItem Name="CarrierIDList" Index="3511" DataType="List" Description="List of CarrierID.
L, n
L, 3
<CarrierID> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="CarrierIDList" /><VIDItem Name="Usage" Index="3512" DataType="String" Description="Usage" Module="System" Type="" Unit="" Parameter="Usage" /><VIDItem Name="EPTState" Index="3513" DataType="String" Description="EPTState" Module="System" Type="" Unit="" Parameter="EPTState" /><VIDItem Name="BufferCapacitiyList" Index="3514" DataType="List" Description="List of BufferCapacitiy .
L, n
L, 3
<BufferCapacitiy> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="BufferCapacitiyList" /><VIDItem Name="BufferMaterialInfo" Index="3515" DataType="List" Description="List of BufferMaterial.
L, n
L, 3
<BufferMaterial> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="BufferMaterialInfo" /><VIDItem Name="PPStepChange" Index="3518" DataType="String" Description="BoatThickness" Module="System" Type="" Unit="" Parameter="PPStepChange" /><VIDItem Name="ProcessCarrierIDList" Index="3519" DataType="List" Description="List of process CarrierID.
L, n
L, 3
<CarrierID> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="ProcessCarrierIDList" /><VIDItem Name="BoatSlotMapList" Index="3526" DataType="List" Description="List of boat map slot result.
L, n
L, 3
<SlotMapInt> 
<TimeIn>
<TimeOut>" Module="System" Type="" Unit="" Parameter="BoatSlotMapList" /></ArrayOfVIDItem>
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