DeviceModelPM.xml 174 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <DeviceModelDefine type="Furnace" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
  3. <IoLPs classType="FurnaceRT.Devices.IoLP" assembly="FurnaceRT">
  4. <IoLP id="LP1" display="LP1" schematicId="LP1" unit=""
  5. diLeftClamp="DI_LP1FOUPLeftClamp"
  6. diRightClamp="DI_LP1FOUPRightClamp"
  7. diLeftRelease="DI_LP1FOUPLeftRelease"
  8. diRightRelease="DI_LP1FOUPRightRelease"
  9. diInPosition1="DI_LP1FOUPInPosition1"
  10. diInPosition2="DI_LP1FOUPInPosition2"
  11. diInPosition3="DI_LP1FOUPInPosition3"
  12. diDetect="DI_LP1FOUPDetect"
  13. doClamp="DO_LP1FOUPClamp"
  14. doRelease="DO_LP1FOUPRelease"
  15. doPresence="DO_LP1FOUPPresence"
  16. doPlacement="DO_LP1FOUPPlacement"
  17. doLoad="DO_LP1FOUPLoad"
  18. doUnload="DO_LP1FOUPUnload"
  19. doManual="DO_LP1FOUPManual"
  20. scRootPath="LoadPort"
  21. />
  22. <IoLP id="LP2" display="LP2" schematicId="LP2" unit=""
  23. diLeftClamp="DI_LP2FOUPLeftClamp"
  24. diRightClamp="DI_LP2FOUPRightClamp"
  25. diLeftRelease="DI_LP2FOUPLeftRelease"
  26. diRightRelease="DI_LP2FOUPRightRelease"
  27. diInPosition1="DI_LP2FOUPInPosition1"
  28. diInPosition2="DI_LP2FOUPInPosition2"
  29. diInPosition3="DI_LP2FOUPInPosition3"
  30. diDetect="DI_LP2FOUPDetect"
  31. doClamp="DO_LP2FOUPClamp"
  32. doRelease="DO_LP2FOUPRelease"
  33. doPresence="DO_LP2FOUPPresence"
  34. doPlacement="DO_LP2FOUPPlacement"
  35. doLoad="DO_LP2FOUPLoad"
  36. doUnload="DO_LP2FOUPUnload"
  37. doManual="DO_LP2FOUPManual"
  38. scRootPath="LoadPort"
  39. />
  40. <IoLP id="LP3" display="LP3" schematicId="LP3" unit=""
  41. diLeftClamp=""
  42. diRightClamp=""
  43. diLeftRelease=""
  44. diRightRelease=""
  45. diInPosition1="DI_LP3FOUPInPosition1"
  46. diInPosition2="DI_LP3FOUPInPosition2"
  47. diInPosition3="DI_LP3FOUPInPosition3"
  48. diDetect="DI_LP3FOUPDetect"
  49. doClamp=""
  50. doRelease=""
  51. doPresence=""
  52. doPlacement=""
  53. doLoad=""
  54. doUnload=""
  55. doManual=""
  56. scRootPath="LoadPort"
  57. />
  58. <IoLP id="LP4" display="LP4" schematicId="LP4" unit=""
  59. diLeftClamp=""
  60. diRightClamp=""
  61. diLeftRelease=""
  62. diRightRelease=""
  63. diInPosition1="DI_LP4FOUPInPosition1"
  64. diInPosition2="DI_LP4FOUPInPosition2"
  65. diInPosition3="DI_LP4FOUPInPosition3"
  66. diDetect="DI_LP4FOUPDetect"
  67. doClamp=""
  68. doRelease=""
  69. doPresence=""
  70. doPlacement=""
  71. doLoad=""
  72. doUnload=""
  73. doManual=""
  74. scRootPath="LoadPort"
  75. />
  76. </IoLPs>
  77. <IoFIMSs classType="FurnaceRT.Devices.IoFIMS" assembly="FurnaceRT">
  78. <IoFIMS id="FIMS1" display="FIMS1" schematicId="FIMS1" unit=""
  79. diLoadComplete="DI_FIMS1LoadComplete"
  80. diUnloadComplete="DI_FIMS1UnloadComplete"
  81. diHomeComplete="DI_FIMS1UnloadComplete"
  82. diRunning="DI_FIMS1Running"
  83. diAutoManual="DI_FIMS1AutoManualMode"
  84. diDock="DI_POD1FOUPExtend"
  85. diUndock="DI_POD1FOUPRetract"
  86. diExist="DI_POD1FOUPInPosition"
  87. diSeal="DI_POD1XForward"
  88. diRelease="DI_POD1XBackward"
  89. diDoorOpen="DI_POD1YForward"
  90. diDoorClose="DI_POD1YBackward"
  91. diLatchOn="DI_POD1FOUPLocked"
  92. diLatchOff="DI_POD1FOUPUnlocked"
  93. diCollisionAvoidanceDown="DI_POD1CollisionAvoidanceBackward"
  94. diCollisionAvoidanceUp="DI_POD1CollisionAvoidanceForward"
  95. diN2PurgeValveClosed="DI_POD1N2PurgeAV63Closed"
  96. diN2PurgeValveOpened="DI_POD1N2PurgeAV63Opened"
  97. diFOUPVacuumSuckingOK="DI_FIMS1FOUPVacuumSuckingOK"
  98. diFOUPVacuumSuckingAlarm="DI_FIMS1FOUPVacuumSuckingAlarm"
  99. diWaferOnRobot="DI_POD1WaferOnRobot"
  100. diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
  101. diWaferRobotEX2AxisHomePosition="DI_WaferRobotEX2AxisHomePosition"
  102. doLoad="DO_FIMS1LoadCommand"
  103. doUnload="DO_FIMS1UnloadCommand"
  104. doHome="DO_FIMS1UnloadCommand"
  105. doAlarmReset="DO_FIMS1AlarmReset"
  106. doAutoManual="DO_FIMS1AutoManualCommand"
  107. doDock="DO_FIMS1Dock"
  108. doUndock="DO_FIMS1Undock"
  109. doSeal="DO_FIMS1Seal"
  110. doRelease="DO_FIMS1Release"
  111. doDoorOpen="DO_FIMS1DoorClose"
  112. doDoorClose="DO_FIMS1DoorOpen"
  113. doLatch1On="DO_FIMS1Latch1On"
  114. doLatch2On="DO_FIMS1Latch2On"
  115. doLatch1Off="DO_FIMS1Latch1Off"
  116. doLatch2Off="DO_FIMS1Latch2Off"
  117. doCollisionAvoidanceDown="DO_FIMS1CollisionAvoidanceDown"
  118. doCollisionAvoidanceUp="DO_FIMS1CollisionAvoidanceUp"
  119. doN2PurgeValveOpen="DO_FIMS1N2PurgeValveOpen"
  120. doN2PurgeValveClose="DO_FIMS1N2PurgeValveClose"
  121. doVaccumValveOpen="DO_FIMS1VaccumValveOpen"
  122. doVaccumValveClose="DO_FIMS1VaccumValveClose"
  123. scRootPath="FIMS"
  124. />
  125. <IoFIMS id="FIMS2" display="FIMS2" schematicId="FIMS2" unit=""
  126. diLoadComplete="DI_FIMS2LoadComplete"
  127. diUnloadComplete="DI_FIMS2UnloadComplete"
  128. diHomeComplete="DI_FIMS2UnloadComplete"
  129. diRunning="DI_FIMS2Running"
  130. diAutoManual="DI_FIMS2AutoManualMode"
  131. diDock="DI_POD2FOUPExtend"
  132. diUndock="DI_POD2FOUPRetract"
  133. diExist="DI_POD2FOUPInPosition"
  134. diSeal="DI_POD2XForward"
  135. diRelease="DI_POD2XBackward"
  136. diDoorOpen="DI_POD2YForward"
  137. diDoorClose="DI_POD2YBackward"
  138. diLatchOn="DI_POD2FOUPLocked"
  139. diLatchOff="DI_POD2FOUPUnlocked"
  140. diCollisionAvoidanceDown="DI_POD2CollisionAvoidanceBackward"
  141. diCollisionAvoidanceUp="DI_POD2CollisionAvoidanceForward"
  142. diN2PurgeValveClosed="DI_POD2N2PurgeAV63Closed"
  143. diN2PurgeValveOpened="DI_POD2N2PurgeAV63Opened"
  144. diFOUPVacuumSuckingOK="DI_FIMS2FOUPVacuumSuckingOK"
  145. diFOUPVacuumSuckingAlarm="DI_FIMS2FOUPVacuumSuckingAlarm"
  146. diWaferOnRobot="DI_POD2WaferOnRobot"
  147. diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
  148. diWaferRobotEX2AxisHomePosition="DI_WaferRobotEX2AxisHomePosition"
  149. doLoad="DO_FIMS2LoadCommand"
  150. doUnload="DO_FIMS2UnloadCommand"
  151. doHome="DO_FIMS2UnloadCommand"
  152. doAlarmReset="DO_FIMS2AlarmReset"
  153. doAutoManual="DO_FIMS2AutoManualCommand"
  154. doDock="DO_FIMS2Dock"
  155. doUndock="DO_FIMS2Undock"
  156. doSeal="DO_FIMS2Seal"
  157. doRelease="DO_FIMS2Release"
  158. doDoorOpen="DO_FIMS2DoorClose"
  159. doDoorClose="DO_FIMS2DoorOpen"
  160. doLatch1On="DO_FIMS2Latch1On"
  161. doLatch2On="DO_FIMS2Latch2On"
  162. doLatch1Off="DO_FIMS2Latch1Off"
  163. doLatch2Off="DO_FIMS2Latch2Off"
  164. doCollisionAvoidanceDown="DO_FIMS2CollisionAvoidanceDown"
  165. doCollisionAvoidanceUp="DO_FIMS2CollisionAvoidanceUp"
  166. doN2PurgeValveOpen="DO_FIMS2N2PurgeValveOpen"
  167. doN2PurgeValveClose="DO_FIMS2N2PurgeValveClose"
  168. doVaccumValveOpen="DO_FIMS2VaccumValveOpen"
  169. doVaccumValveClose="DO_FIMS2VaccumValveClose"
  170. scRootPath="FIMS"
  171. />
  172. </IoFIMSs>
  173. <IoDoors classType="FurnaceRT.Devices.IoDoor" assembly="FurnaceRT">
  174. <IoDoor id="AGVDoor" display="AGVDoor" schematicId="AGVDoor" unit=""
  175. diOpen="DI_LAShutterClampOn"
  176. diClose="DI_LAShutterClampOff"
  177. doOpen="DO_AGVDoorSwitchOpen"
  178. doClose="DO_AGVDoorSwitchClose"
  179. scRootPath=""
  180. />
  181. </IoDoors>
  182. <IoShutters classType="FurnaceRT.Devices.IoShutter" assembly="FurnaceRT">
  183. <IoShutter id="Shutter" display="Shutter" schematicId="Shutter" unit=""
  184. diOpen="DI_FurnaceShutterOpened"
  185. diClose="DI_FurnaceShutterClosed"
  186. doOpen="DO_ShutterOpen"
  187. doClose="DO_ShutterClose"
  188. scRootPath=""
  189. />
  190. </IoShutters>
  191. <IoBufferMotors assembly="FurnaceRT" classType="FurnaceRT.Devices.IoBufferMotor">
  192. <IoBufferMotor id="BufferServo" display="" schematicId="" unit="" module=""
  193. aiRealPosition="AI_BufferMotorPositionFb"
  194. aiRealSpeed="AI_BufferMotorSpeedFb"
  195. aiRealTorque="AI_BufferMotorTorqueFb"
  196. aiTargetPosFb="AI_BufferTargetPosFb"
  197. aiDriverErrorCode="AI_BufferDriverErrCode"
  198. aiMotionErrorCode="AI_BufferMotionErrID"
  199. aoTargetPosition="AO_TargetPositionBufferAxis"
  200. aoSpeed="AO_BufferRotationSpeed"
  201. aoAcc="AO_BufferRotationAcc"
  202. aoDec="AO_BufferRotationDec"
  203. diMoving="DI_MvAbsBusyBufferAxis"
  204. diSensor1=""
  205. diSensor2=""
  206. diSensor3=""
  207. diSensor4=""
  208. diSensor5=""
  209. diSensor6=""
  210. diSensor7=""
  211. diSensor8=""
  212. diWarning="DI_BufferWarningBufferAxis"
  213. diAlarm="DI_BufferFaultBufferAxis"
  214. diPositionA1="DI_BufferInPositionA1"
  215. diPositionB1="DI_BufferInPositionB1"
  216. diPositionC1="DI_BufferInPositionC1"
  217. diPositionD1="DI_BufferInPositionD1"
  218. diPositionA2="DI_BufferInPositionA2"
  219. diPositionB2="DI_BufferInPositionB2"
  220. diPositionC2="DI_BufferInPositionC2"
  221. diPositionD2="DI_BufferInPositionD2"
  222. diPositionA3="DI_BufferInPositionA3"
  223. diPositionB3="DI_BufferInPositionB3"
  224. diPositionC3="DI_BufferInPositionC3"
  225. diPositionD3="DI_BufferInPositionD3"
  226. diPositionA4="DI_BufferInPositionA4"
  227. diPositionB4="DI_BufferInPositionB4"
  228. diPositionC4="DI_BufferInPositionC4"
  229. diPositionD4="DI_BufferInPositionD4"
  230. doServoOn="DO_ServoOnBufferAxis"
  231. doStop="DO_StopBufferAxis"
  232. doMove="DO_MoveCommandBufferAxis"
  233. doReset="DO_ResetBufferAxis"
  234. aioType="float"
  235. scRootPath="BufferServo"
  236. />
  237. </IoBufferMotors>
  238. <IoFurnaceMotors assembly="FurnaceRT" classType="FurnaceRT.Devices.IoFurnaceMotor">
  239. <IoFurnaceMotor id="BoatElevatorServo" display="" schematicId="" unit="" module=""
  240. aiRealPosition="AI_BoatMotorPositionFeedback"
  241. aiRealSpeed="AI_BoatMotorSpeedFb"
  242. aiTargetPosFb="AI_BoatTargetPosFb"
  243. aiDriverErrorCode="AI_BoatDriverErrCode"
  244. aiMotionErrorCode="AI_BoatMotioErrID"
  245. aoTargetPosition="AO_BoatPosition"
  246. aoTargetSpeed="AO_BoatRotationSpeed"
  247. aoAcc="AO_BoatRotationAcc"
  248. aoDec="AO_BoatRotationDec"
  249. diMotorAlarm="DI_PwrErrBufferAxis"
  250. diMove="DI_StopBusyBufferAxis"
  251. diPowerOn="DI_PwrBusyBoatZAxis"
  252. diPowerOnError="DI_PwrErrBoatZAxis"
  253. diStop="DI_StopBusyBoatZAxis"
  254. diStopError="DI_StopErrBoatZAxis"
  255. diHomeDone=""
  256. diAlignDone=""
  257. diHoming=""
  258. diHomeError=""
  259. diMoving="DI_MvAbsBusyBoatZAxis"
  260. diMoveError="DI_MvAbsErrBoatZAxis"
  261. diHomePosition="DI_HmPosBoatZAxis"
  262. diNegativeLimit="DI_NegLmtPosBoatZAxis"
  263. diPositiveLimit="DI_PotLmtPosBoatZAxis"
  264. diConveyRelaxAlarm=""
  265. diReadyToSwitchOn="DI_ReadytoSwitchOnBoatZAxis"
  266. diSwitchOn="DI_SwitchedOnBoatZAxis"
  267. diWarning="DI_BoatWarningBoatZAxis"
  268. diAlarm="DI_BoatFaultBoatZAxis"
  269. diPosition1="DI_MiddlePos1BoatZAxis"
  270. diPosition2="DI_MiddlePos2BoatZAxis"
  271. diPosition3="DI_MiddlePos3BoatZAxis"
  272. diUpPosition="DI_BoatLiftMotorUpPosition"
  273. diDownPosition="DI_BoatLiftMotorDownPosition"
  274. doStop="DO_StopBoatZAxis"
  275. doHome=""
  276. doMove="DO_MoveEnableBoatZAxis"
  277. doReset="DO_ResetBoatZAxis"
  278. doServoOn="DO_ServoOnBoatZAxis"
  279. doInTransfer=""
  280. doTransferComplete=""
  281. doStepperDriverStart=""
  282. doStepperDriverAllWindingsOff=""
  283. doStepperDriverDataSelectionM0=""
  284. doStepperDriverDataSelectionM1=""
  285. doStepperDriverDataSelectionM2=""
  286. doStepperDriverDataSelectionM3=""
  287. doStepperDriverDataSelectionM4=""
  288. doStepperDriverDataSelectionM5=""
  289. doStepperDriverHomeOrPosPrerst=""
  290. doCW=""
  291. doCCW=""
  292. aioType="float"
  293. scRootPath="Boat.BoatElevatorServo"
  294. />
  295. <IoFurnaceMotor id="BoatRotationServo" display="" schematicId="" unit="" module=""
  296. aiRealPosition=""
  297. aiRealSpeed=""
  298. aiPowerErrorCode=""
  299. aiStopErrorCode=""
  300. aiHomeErrorCode=""
  301. aiMoveAbsErrorCode=""
  302. aiJogErrorCode=""
  303. aiResetErrorCode=""
  304. aiDriverErrorCode=""
  305. aiErrorCode=""
  306. aoTargetSpeed=""
  307. diMotorAlarm=""
  308. diMove="DI_BoatRAxisMoving"
  309. diPowerOn=""
  310. diPowerOnError=""
  311. diStop=""
  312. diStopError=""
  313. diHoming="DI_BoatRAxisHomeBusy"
  314. diInitializing="DI_BoatRAxisInitBusy"
  315. diHomeDone="DI_BoatRAxisHomeDone"
  316. diInitDone="DI_BoatRAxisInitDone"
  317. diMoving="DI_BoatRAxisRotationBusy"
  318. diMoveError=""
  319. diHomePosition="DI_BoatRAxisInHomePosition"
  320. diNegativeLimit=""
  321. diPositiveLimit=""
  322. diConveyRelaxAlarm=""
  323. diReadyToSwitchOn=""
  324. diSwitchOn=""
  325. diWarning="DI_BoatRAxisWarning"
  326. diAlarm="DI_BoatRAxisAlarm"
  327. diPosition1=""
  328. diStepperMotorInWorkPosition="DI_BoatRAxisInWorkPosition"
  329. diStepperMotorMoving=""
  330. diStepperMotorAlarm=""
  331. diStepperMotorInArea="DI_BoatRAxisInHomeArea"
  332. diStepperMotorInReady="DI_BoatRAxisInReady"
  333. diStepperMotorInHomePosition=""
  334. diUpPosition=""
  335. diDownPosition=""
  336. doStop="DO_BoatRAxisStop"
  337. doHome="DO_BoatRAxisHomeCmd"
  338. doInit="DO_BoatRAxisInitialCmd"
  339. doMove="DO_BoatRAxisRotationCmd"
  340. doReset="DO_BoatRAxisAlarmReset"
  341. doM0="DO_BoatRAxisM0"
  342. doM1="DO_BoatRAxisM1"
  343. doM2="DO_BoatRAxisM2"
  344. doM3="DO_BoatRAxisM3"
  345. doM4="DO_BoatRAxisM4"
  346. doM5="DO_BoatRAxisM5"
  347. doCW="DO_BoatRAxisRotationForward"
  348. doCCW="DO_BoatRAxisRotationReverse"
  349. aioType="float"
  350. scRootPath="Boat.BoatRotationServo"
  351. />
  352. </IoFurnaceMotors>
  353. <IoWaferRobots classType="FurnaceRT.Devices.IoWaferRobot" assembly="FurnaceRT">
  354. <IoWaferRobot id="IoWaferRobot" display="IoWaferRobot" schematicId="IoWaferRobot" unit=""
  355. diInFIMS1="DI_WaferRobotAtPOD1Area"
  356. diInFIMS2="DI_WaferRobotAtPOD2Area"
  357. diInBoatRotate="DI_WaferRobotAtBoatRotaryArea"
  358. diInBoatBottom="DI_WaferRobotAtBoatBottomArea"
  359. diFIMS1WaferOnRobot="DI_POD1WaferOnRobot"
  360. diFIMS2WaferOnRobot="DI_POD2WaferOnRobot"
  361. diTPEmo="DI_WaferRobotTPEMOButtonStatus"
  362. diServoOn="DI_WaferRobotTPServoOn"
  363. diTPStatus="DI_WaferRobotTPStatus"
  364. diRobotPowerOn="DI_WaferRobotPowerOn"
  365. diAlarm="DI_WaferRobotAlarm"
  366. diBlade1WaferPresent="DI_WaferRobotWafer1Checked"
  367. diBlade2WaferPresent="DI_WaferRobotWafer2Checked"
  368. diBlade3WaferPresent="DI_WaferRobotWafer3Checked"
  369. diBlade4WaferPresent="DI_WaferRobotWafer4Checked"
  370. diBlade5WaferPresent="DI_WaferRobotWafer5Checked"
  371. diZAxisHomePosition="DI_WaferRobotZAxisHomePosition"
  372. diYAxisHomePosition="DI_WaferRobotTHAxisHomePosition"
  373. diVAxisHomePosition="DI_WaferRobotPAxisHomePosition"
  374. diRunning="DI_WaferRobotRunning"
  375. doAlarmReset="DO_WaferRobotAlarmReset"
  376. doActionHold="DO_WaferRobotActionHold"
  377. doTPEnable="DO_WaferRobotTPEnable"
  378. doFIMS1Interlock="DO_WaferRobotFIMS1Interlock"
  379. doFIMS2Interlock="DO_WaferRobotFIMS2Interlock"
  380. doBoatRotateInterlock="DO_WaferRobotBoatRotaryInterlock"
  381. doBoatBottomInterlock="DO_WaferRobotBoatBottomInterlock"
  382. scRootPath=""
  383. />
  384. </IoWaferRobots>
  385. <IoCarrierRobots classType="FurnaceRT.Devices.IoCarrierRobot" assembly="FurnaceRT">
  386. <IoCarrierRobot id="IoCarrierRobot" display="IoCarrierRobot" schematicId="IoCarrierRobot" unit=""
  387. diInFIMS1="DI_FOUPRobotWithinFIMS1Area"
  388. diInFIMS2="DI_FOUPRobotWithinFIMS2Area"
  389. diInStockerLayer1="DI_FOUPRobotWithinBufferLayer1Area"
  390. diInStockerLayer2="DI_FOUPRobotWithinBufferLayer2Area"
  391. diInStockerLayer3="DI_FOUPRobotWithinBufferLayer3Area"
  392. diInStockerLayer4="DI_FOUPRobotWithinBufferLayer4Area"
  393. diTPEmo="DI_FOUPRobotTPEMOButton"
  394. diServoOn="DI_FOUPRobotTPServoOn"
  395. diTPStatus="DI_FoupRobotEachAxisHPSignal"
  396. diRobotPowerOn="DI_FoupRobotStationAccessSignal"
  397. diAlarm="DI_FoupRobotPedantMode"
  398. diBlade1WaferPresent="DI_FoupRobotEachHandWaferStatus"
  399. diZAxisHomePosition="DI_FOUPRobotZAxisHomePosition"
  400. diYAxisHomePosition="DI_FOUPRobotYAxisHomePosition"
  401. diRAxisHomePosition="DI_FOUPRobotRAxisHomePosition"
  402. diRunning="DI_FoupRobotReserveDI3"
  403. doAlarmReset="DO_FOUPRobotAlarmReset"
  404. doActionHold="DO_FOUPRobotActionHold"
  405. doTPEnable="DO_FOUPRobotTPEnable"
  406. doFIMS1Interlock="DO_FOUPRobotFIMS1Interlock"
  407. doFIMS2Interlock="DO_FOUPRobotFIMS2Interlock"
  408. doStockerInterlock="DO_FOUPRobotBufferInterlock"
  409. scRootPath=""
  410. />
  411. </IoCarrierRobots>
  412. <IoRFs classType="FurnaceRT.Devices.IoRF" assembly="FurnaceRT">
  413. <IoRF id="RF" display="RF" schematicId="RF" unit=""
  414. aiRelfectionPower="AI_RFGeneratorRelfectionPower"
  415. aiForwardPower="AI_RFGeneratorForwardPower"
  416. diPowerReached="DI_RFSetPowerReached"
  417. diAlarm="DI_RFAlarm"
  418. diRFOnStatus="DI_RFOnStatus"
  419. doReset="DO_RFReset"
  420. doOnOff="DO_RFOnOff"
  421. doManualAnalog="DO_RFManualAnalog"
  422. aoPower="AO_RFPowerSet"
  423. scRootPath=""
  424. />
  425. </IoRFs>
  426. <IoRFMatchs classType="FurnaceRT.Devices.IoRFMatch" assembly="FurnaceRT">
  427. <IoRFMatch id="RFMatch" display="RFMatch" schematicId="RFMatch" unit=""
  428. aiVpp="AI_MatchingUnitVppMonitor"
  429. aiVdc="AI_MatchingUnitVdcMonitor"
  430. aiLoadPosition="AI_MatchingUnitLoadPosition"
  431. aiPhase="AI_MatchingUnitPhasePosition"
  432. doPresetMemory="DO_MatchingUnitPresetMemory"
  433. doPresetStart="DO_MatchingUnitPresetStart"
  434. doPresetCH0="DO_MatchingUnitPresetCH0"
  435. doPresetCH1="DO_MatchingUnitPresetCH1"
  436. doPresetCH2="DO_MatchingUnitPresetCH2"
  437. doPresetCH3="DO_MatchingUnitPresetCH3"
  438. doSafty="DO_MatchingUnitSafty"
  439. aoLoadPosition="AO_MatchingUnitLoadPositionSet"
  440. aoPhase="AO_MatchingUnitPhaseSet"
  441. scRootPath=""
  442. />
  443. </IoRFMatchs>
  444. <IoAPCs classType="FurnaceRT.Devices.IoAPC" assembly="FurnaceRT">
  445. <IoAPC id="APC" display="APC" schematicId="APC" unit=""
  446. aiValueSensorInput1="AI_APCValueSensorInput1"
  447. aiValueSensorInput2="AI_APCValueSensorInput2"
  448. aiSelectController="AI_APCSelectController"
  449. aiPositionActualValue="AI_APCPositionActualValue"
  450. aiControlModeStatus="AI_APCControlModeStatus"
  451. aiHomeStatus="AI_APCHomeStatus"
  452. aiWarningStatus1="AI_APCWarningStatus1"
  453. aiWarningStatus2="AI_APCWarningStatus2"
  454. aiWarningStatus3="AI_APCWarningStatus3"
  455. aiWarningStatus4="AI_APCWarningStatus4"
  456. aiWarningStatus5="AI_APCWarningStatus5"
  457. aiWarningStatus6="AI_APCWarningStatus6"
  458. aiErrorStatus1="AI_APCErrorStatus1"
  459. aiErrorStatus2="AI_APCErrorStatus2"
  460. aiErrorStatus3="AI_APCErrorStatus3"
  461. aiErrorStatus4="AI_APCErrorStatus4"
  462. aiValveStatusThreshold="AI_APCValveStatusThreshold"
  463. aiSlowVacuumModeSetting="AI_APCSlowVacuumModeSetting"
  464. aiInterlock1="AI_APCInterlock1"
  465. aiInterlock2="AI_APCInterlock2"
  466. aiInterlock3="AI_APCInterlock3"
  467. aiInterlockConstantOfInterlock3="AI_APCInterlockConstantOfInterlock3"
  468. aiP1SensorOffsetSetting="AI_APCP1SensorOffsetSetting"
  469. aiPosMonOffsetSetting="AI_APCPosMonOffsetSetting"
  470. diP1ZeroOffsetOutRangeAlm="DI_P1ZeroOffsetOutRangeAlm"
  471. diP1ZeroAdjOutRangeAlm="DI_P1ZeroAdjOutRangeAlm"
  472. diP1SpanAdjOutRangeAlm="DI_P1SpanAdjOutRangeAlm"
  473. diP2ZeroOffsetOutRangeAlm="DI_P2ZeroOffsetOutRangeAlm"
  474. diP2ZeroAdjOutRangeAlm="DI_P2ZeroAdjOutRangeAlm"
  475. diP2SpanAdjOutRangeAlm="DI_P2SpanAdjOutRangeAlm"
  476. diP1PressCtrlInterlockAlm="DI_P1PressCtrlInterlockAlm"
  477. diP2PressCtrlInterlockAlm="DI_P2PressCtrlInterlockAlm"
  478. diValveOpenCtrlInterlockAlm="DI_ValveOpenCtrlInterlockAlm"
  479. diValveHoldCtrlInterlockAlm="DI_ValveHoldCtrlInterlockAlm"
  480. diValveCloseInterlockAlm="DI_ValveCloseInterlockAlm"
  481. diAutoTeachingInterlockAlm="DI_AutoTeachingInterlockAlm"
  482. diP1DisconnectionAlm="DI_P1DisconnectionAlm"
  483. diP2DisconnectionAlm="DI_P2DisconnectionAlm"
  484. diPumpStopInterlockAlm="DI_PumpStopInterlockAlm"
  485. diAutoTeachingErr1Alm="DI_AutoTeachingErr1Alm"
  486. diAutoTeachingErr2Alm="DI_AutoTeachingErr2Alm"
  487. doValve="DO_ValveAV71"
  488. doVGUnit="DO_VGUnitConversion"
  489. doAoDataReadSysConfig="DO_APCAoDataReadSysConfig"
  490. doAoDataWriteSysConfig="DO_APCAoDataWriteSysConfig"
  491. doAoDataReadCusConfig="DO_APCAoDataReadCusConfig"
  492. doAoDataWriteCusConfig="DO_APCAoDataWriteCusConfig"
  493. aoZeroResetP1=""
  494. aoZeroAdjustP1="AO_APCZeroAdjustP1"
  495. aoSpanAdjustP1=""
  496. aoZeroResetP2=""
  497. aoZeroAdjustP2="AO_APCZeroAdjustP2"
  498. aoSpanAdjustP2=""
  499. aoSlowVacuumTargetPressure="AO_APCSlowVacuumTargetPressure"
  500. aoValveStatusThreshold="AO_APCValveStatusThreshold"
  501. aoForbidInterlockOutbreak="AO_APCForbidInterlockOutbreak"
  502. aoSlowVacuumModeSetting="AO_APCSlowVacuumModeSetting"
  503. aoInterlock1="AO_APCInterlock1"
  504. aoInterlock2="AO_APCInterlock2"
  505. aoInterlock3="AO_APCInterlock3"
  506. aoInterlockConstantOfInterlock3="AO_APCInterlockConstantOfInterlock3"
  507. aoP1SensorOffsetSetting="AO_APCP1SensorOffsetSetting"
  508. aoPosMonOffsetSetting="AO_APCPosMonOffsetSetting"
  509. aoSensorAdjustReset="AO_APCSensorAdjustReset"
  510. aoSlowVacuumRate="AO_APCSlowVacuumRate"
  511. aoSlowVacuumP="AO_APCSlowVacuumP"
  512. aoSlowVacuumI="AO_APCSlowVacuumI"
  513. aoSlowVacuumD="AO_APCSlowVacuumD"
  514. aoSlowVacuumA="AO_APCSlowVacuumA"
  515. aoControllerModeSelect="AO_APCControllerModeSelect"
  516. aoSpecifyTargetVacuumPressureControl="AO_APCSpecifyTargetVacuumPressureControl"
  517. aoSpecifyTargetOpeningForValveOpeningControl="AO_APCSpecifyTargetOpeningForValveOpeningControl"
  518. aoSpecifyControlMode="AO_APCSpecifyControlMode"
  519. aoRangeUpperLimitSensorInput="AO_APCRangeUpperLimitSensorInput"
  520. aoController1="AO_APCController1"
  521. aoController1P="AO_APCController1P"
  522. aoController1I="AO_APCController1I"
  523. aoController1D="AO_APCController1D"
  524. aoController1A="AO_APCController1A"
  525. aoController1CH="AO_APCController1CH"
  526. aoController1CL="AO_APCController1CL"
  527. aoController1Offset="AO_APCController1Offset"
  528. aoController2="AO_APCController2"
  529. aoController2P="AO_APCController2P"
  530. aoController2I="AO_APCController2I"
  531. aoController2D="AO_APCController2D"
  532. aoController2A="AO_APCController2A"
  533. aoController2CH="AO_APCController2CH"
  534. aoController2CL="AO_APCController2CL"
  535. aoController2Offset="AO_APCController2Offset"
  536. aoController3="AO_APCController3"
  537. aoController3P="AO_APCController3P"
  538. aoController3I="AO_APCController3I"
  539. aoController3D="AO_APCController3D"
  540. aoController3A="AO_APCController3A"
  541. aoController3CH="AO_APCController3CH"
  542. aoController3CL="AO_APCController3CL"
  543. aoController3Offset="AO_APCController3Offset"
  544. aoController4="AO_APCController4"
  545. aoController4P="AO_APCController4P"
  546. aoController4I="AO_APCController4I"
  547. aoController4D="AO_APCController4D"
  548. aoController4A="AO_APCController4A"
  549. aoController4CH="AO_APCController4CH"
  550. aoController4CL="AO_APCController4CL"
  551. aoController4Offset="AO_APCController4Offset"
  552. aoController5="AO_APCController5"
  553. aoController5P="AO_APCController5P"
  554. aoController5I="AO_APCController5I"
  555. aoController5D="AO_APCController5D"
  556. aoController5A="AO_APCController5A"
  557. aoController5CH="AO_APCController5CH"
  558. aoController5CL="AO_APCController5CL"
  559. aoController5Offset="AO_APCController5Offset"
  560. aoController6="AO_APCController6"
  561. aoController6P="AO_APCController6P"
  562. aoController6I="AO_APCController6I"
  563. aoController6D="AO_APCController6D"
  564. aoController6A="AO_APCController6A"
  565. aoController6CH="AO_APCController6CH"
  566. aoController6CL="AO_APCController6CL"
  567. aoController6Offset="AO_APCController6Offset"
  568. aoController7="AO_APCController7"
  569. aoController7P="AO_APCController7P"
  570. aoController7I="AO_APCController7I"
  571. aoController7D="AO_APCController7D"
  572. aoController7A="AO_APCController7A"
  573. aoController7CH="AO_APCController7CH"
  574. aoController7CL="AO_APCController7CL"
  575. aoController7Offset="AO_APCController7Offset"
  576. aoController8="AO_APCController8"
  577. aoController8P="AO_APCController8P"
  578. aoController8I="AO_APCController8I"
  579. aoController8D="AO_APCController8D"
  580. aoController8A="AO_APCController8A"
  581. aoController8CH="AO_APCController8CH"
  582. aoController8CL="AO_APCController8CL"
  583. aoController8Offset="AO_APCController8Offset"
  584. aoController9="AO_APCController9"
  585. aoController9P="AO_APCController9P"
  586. aoController9I="AO_APCController9I"
  587. aoController9D="AO_APCController9D"
  588. aoController9A="AO_APCController9A"
  589. aoController9CH="AO_APCController9CH"
  590. aoController9CL="AO_APCController9CL"
  591. aoController9Offset="AO_APCController9Offset"
  592. aoController10="AO_APCController10"
  593. aoController10P="AO_APCController10P"
  594. aoController10I="AO_APCController10I"
  595. aoController10D="AO_APCController10D"
  596. aoController10A="AO_APCController10A"
  597. aoController10CH="AO_APCController10CH"
  598. aoController10CL="AO_APCController10CL"
  599. aoController10Offset="AO_APCController10Offset"
  600. scRootPath=""
  601. aioType="float"
  602. />
  603. </IoAPCs>
  604. <IoPressureMeters classType="FurnaceRT.Devices.IoPressureMeter" assembly="FurnaceRT">
  605. <IoPressureMeter id="PressureGLBoxPG1" display="GLBoxPG1Pressure" schematicId="GLBoxPG1Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG1Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
  606. <IoPressureMeter id="PressureGLBoxPG2" display="GLBoxPG2Pressure" schematicId="GLBoxPG2Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG2Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
  607. <IoPressureMeter id="PressureGLBoxPG3" display="GLBoxPG3Pressure" schematicId="GLBoxPG3Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG3Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
  608. <IoPressureMeter id="PressureGLBoxPG4" display="GLBoxPG4Pressure" schematicId="GLBoxPG4Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG4Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
  609. <IoPressureMeter id="PressureGLBoxPG5" display="GLBoxPG5Pressure" schematicId="GLBoxPG5Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG5Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
  610. <IoPressureMeter id="PressureGLBoxPG6" display="GLBoxPG6Pressure" schematicId="GLBoxPG6Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG6Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
  611. <!--<IoPressureMeter id="PressureGasBoxUpperVG21" display="GasBoxUpperVG21Pressure" schematicId="GasBoxUpperVG21Pressure" unit="Torr" aiFeedback="AI_GasBoxUpperVG21Pressure" scale="0,1000" physical="0,15000" aioType="float"/>-->
  612. <!--<IoPressureMeter id="PressureGasBoxUpperVG22" display="GasBoxUpperVG22Pressure" schematicId="GasBoxUpperVG22Pressure" unit="Torr" aiFeedback="AI_GasBoxUpperVG22Pressure" scale="0,1000" physical="0,15000" aioType="float"/>-->
  613. <IoPressureMeter id="ConcentrationO2" display="O2Concentration" schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration" scale="0,10" physical="0,15000" aioType="float"/>
  614. <IoPressureMeter id="HeatingExhaustMS1" display="HeatingExhaustMS1" schematicId="HeatingExhaustMS1" unit="pa" aiFeedback="AI_HeatingExhaustMS1" physical="0,15000" scale="0,200" aioType="float"/>
  615. <IoPressureMeter id="GasBoxExhaustMS2" display="GasBoxExhaustMS2" schematicId="GasBoxExhaustMS2" unit="pa" aiFeedback="AI_GasBoxExhaustMS2" physical="0,15000" scale="0,200" aioType="float"/>
  616. <IoPressureMeter id="ScavengerExhaustMS3" display="ScavengerExhaustMS3" schematicId="ScavengerExhaustMS3" unit="pa" aiFeedback="AI_ScavengerExhaustMS3" physical="0,15000" scale="0,200" aioType="float"/>
  617. <IoPressureMeter id="ExhaustBoxExhaustMS4" display="ExhaustBoxExhaustMS4" schematicId="ExhaustBoxExhaustMS4" unit="pa" aiFeedback="AI_ExhaustBoxExhaustMS4" physical="0,15000" scale="0,200" aioType="float"/>
  618. <IoPressureMeter id="LoadingAreaExhaustMS5" display="LoadingAreaExhaustMS5" schematicId="LoadingAreaExhaustMS5" unit="pa" aiFeedback="AI_LoadingAreaExhaustMS5" physical="0,15000" scale="0,200" aioType="float"/>
  619. <IoPressureMeter id="FrontBodyExhaustMS6" display="FrontBodyExhaustMS6" schematicId="FrontBodyExhaustMS6" unit="pa" aiFeedback="AI_FrontBodyExhaustMS6" physical="0,15000" scale="0,200" aioType="float"/>
  620. <IoPressureMeter id="LAExhaustMS7" display="LAExhaustMS7" schematicId="LAExhaustMS7" unit="pa" aiFeedback="AI_LAExhaustMS7" physical="0,15000" scale="0,500" aioType="float"/>
  621. <IoPressureMeter id="RHCExhaustMS8" display="RHCExhaustMS8" schematicId="RHCExhaustMS8" unit="kPa" aiFeedback="AI_RHCExhaustMS8" physical="0,15000" scale="0,2" aioType="float"/>
  622. <IoPressureMeter id="PS11" display="PS11" schematicId="PS11" unit="MPa" aiFeedback="AI_PS11Value" physical="1500,7500" scale="0,1" aioType="float"/>
  623. <IoPressureMeter id="RHCFlowFL901" display="RHCFlowFL901" schematicId="RHCFlowFL901" unit="L" aiFeedback="AI_RHCFlowFL901" physical="0,30000" scale="0,40" aioType="float"/>
  624. <IoPressureMeter id="CoolingWaterFlowOfFurnaceFL902" display="CoolingWaterFlowOfFurnaceFL902" schematicId="CoolingWaterFlowOfFurnaceFL902" unit="L" aiFeedback="AI_CoolingWaterFlowOfFurnaceFL902" physical="0,30000" scale="0,16" aioType="float"/>
  625. <IoPressureMeter id="CoolingWateFlowOfShuttleFL903" display="CoolingWateFlowOfShuttleFL903" schematicId="CoolingWateFlowOfShuttleFL903" unit="L" aiFeedback="AI_CoolingWateFlowOfShuttleFL903" physical="0,30000" scale="0,4" aioType="float"/>
  626. <IoPressureMeter id="CoolingWaterFlowOfBoatRotationFL904" display="CoolingWaterFlowOfBoatRotationFL904" schematicId="CoolingWaterFlowOfBoatRotationFL904" unit="L" aiFeedback="AI_CoolingWaterFlowOfBoatRotationFL904" physical="0,30000" scale="0,4" aioType="float"/>
  627. <IoPressureMeter id="CoolingWaterFlowOfFlangeFL905" display="CoolingWaterFlowOfFlangeFL905" schematicId="CoolingWaterFlowOfFlangeFL905" unit="L" aiFeedback="AI_CoolingWaterFlowOfFlangeFL905" physical="0,30000" scale="0,4" aioType="float"/>
  628. <IoPressureMeter id="CoolingWaterFlowOfLoadingAreaFL906" display="CoolingWaterFlowOfLoadingAreaFL906" schematicId="CoolingWaterFlowOfLoadingAreaFL906" unit="L" aiFeedback="AI_CoolingWaterFlowOfLoadingAreaFL906" physical="0,30000" scale="0,16" aioType="float"/>
  629. <IoPressureMeter id="PG12" display="PG12" schematicId="PG12" unit="psig" aiFeedback="AI_PG12AnalogValue" physical="0,15000" scale="0,100" aioType="float"/>
  630. <IoPressureMeter id="PG13" display="PG13" schematicId="PG13" unit="psig" aiFeedback="AI_PG13AnalogValue" physical="0,15000" scale="0,100" aioType="float"/>
  631. <IoPressureMeter id="PS13" display="PS13" schematicId="PS13" unit="kPa" aiFeedback="AI_PS13AnalogValue" physical="0,30000" scale="0,98.1" aioType="float"/>
  632. <IoPressureMeter id="PS17" display="PS17" schematicId="PS17" unit="MPa" aiFeedback="AI_PS17Value" physical="900,7500" scale="-0.1,1" aioType="float"/>
  633. <IoPressureMeter id="VG12AnalogValue" display="VG12AnalogValue" schematicId="VG12AnalogValue" unit="Pa" aiFeedback="AI_VG12AnalogValue" physical="0,15000" scale="0,1330" aioType="float"/>
  634. <IoPressureMeter id="DG1AnalogValue" display="DG1AnalogValue" schematicId="DG1AnalogValue" unit="Pa" aiFeedback="AI_DG1AnalogValue" physical="0,15000" scale="-500,500" aioType="float"/>
  635. <IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue" schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14AnalogValue" physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
  636. <IoPressureMeter id="VG11" display="VG11" schematicId="VG11" unit="Torr" aiFeedback="AI_VG11Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
  637. <IoPressureMeter id="VG12" display="VG12" schematicId="VG12" unit="Torr" aiFeedback="AI_VG12Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
  638. <IoPressureMeter id="VG13" display="VG13" schematicId="VG13" unit="Torr" aiFeedback="AI_VG13Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
  639. <IoPressureMeter id="VG21" display="VG21" schematicId="VG21" unit="Torr" aiFeedback="AI_VG21Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
  640. <IoPressureMeter id="VG22" display="VG22" schematicId="VG22" unit="Torr" aiFeedback="AI_VG22Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
  641. <IoPressureMeter id="N24PurgePressure" display="N24PurgePressure" schematicId="N24PurgePressure" unit="psig" aiFeedback="AI_N24PurgePressure" physical="0,15000" scale="0,150" aioType="float"/>
  642. <IoPressureMeter id="N25PurgePressure" display="N25PurgePressure" schematicId="N25PurgePressure" unit="psig" aiFeedback="AI_N25PurgePressure" physical="0,15000" scale="0,150" aioType="float"/>
  643. <IoPressureMeter id="N26PurgePressure" display="N26PurgePressure" schematicId="N26PurgePressure" unit="psig" aiFeedback="AI_N26PurgePressure" physical="0,15000" scale="0,150" aioType="float"/>
  644. <IoPressureMeter id="N27PurgePressure" display="N27PurgePressure" schematicId="N27PurgePressure" unit="psig" aiFeedback="AI_N27PurgePressure" physical="0,15000" scale="0,150" aioType="float"/>
  645. </IoPressureMeters>
  646. <IoAlarmSignals classType="Aitex.Core.RT.Device.Unit.IoAlarmSignal" assembly="MECF.Framework.RT.EquipmentLibrary">
  647. <IoAlarmSignal id="AlarmSignalO2ConcentrationHI" diSignalsplay="O2ConcentrationHigh" diSignal="DI_O2ConcentrationHI" alarmTrigValue="true"/>
  648. <IoAlarmSignal id="AlarmSignalO2ConcentrationLow" diSignalsplay="O2ConcentrationLow" diSignal="DI_O2ConcentrationLow" alarmTrigValue="true"/>
  649. <IoAlarmSignal id="AlarmSignalO2ConcentrationEcho1" diSignalsplay="O2ConcentrationEcho1" diSignal="DI_O2ConcentrationEcho1" alarmTrigValue="true"/>
  650. <IoAlarmSignal id="AlarmSignalO2ConcentrationEcho2" diSignalsplay="O2ConcentrationEcho2" diSignal="DI_O2ConcentrationEcho2" alarmTrigValue="true"/>
  651. <IoAlarmSignal id="AlarmSignalSMK1DetectorSensorOperates" diSignalsplay="SMK1DetectorSensorOperates" diSignal="DI_SMK1DetectorSensorOperates" alarmTrigValue="true"/>
  652. <IoAlarmSignal id="AlarmSignalSMK1DetectorSensorFireAlarm" diSignalsplay="SMK1DetectorSensorFireAlarm" diSignal="DI_SMK1DetectorFireAlarm" alarmTrigValue="true"/>
  653. <IoAlarmSignal id="AlarmSignalSMK1DetectorSensorFault" diSignalsplay="SMK1DetectorSensorFault" diSignal="DI_SMK1DetectorFault" alarmTrigValue="true"/>
  654. <IoAlarmSignal id="AlarmSignalHCLGasLeak1stAlarm" diSignalsplay="HCLGasLeak1stAlarm" diSignal="DI_HCLGasLeak1stAlarm" alarmTrigValue="true"/>
  655. <IoAlarmSignal id="AlarmSignalHCLGasLeak2ndAlarm" diSignalsplay="HCLGasLeak2ndAlarm" diSignal="DI_HCLGasLeak2ndAlarm" alarmTrigValue="true"/>
  656. <IoAlarmSignal id="AlarmSignalNH3GasLeak1stAlarm" diSignalsplay="NH3GasLeak1stAddlarm" diSignal="DI_NH3GasLeak1stAlarm" alarmTrigValue="true"/>
  657. <IoAlarmSignal id="AlarmSignalNH3GasLeak2ndAlarm" diSignalsplay="NH3GasLeak2ndAlarm" diSignal="DI_NH3GasLeak2ndAlarm" alarmTrigValue="true"/>
  658. <IoAlarmSignal id="AlarmSignalF2GasLeak1stAlarm" diSignalsplay="F2GasLeak1stAlarm" diSignal="DI_F2GasLeak1stAlarm" alarmTrigValue="true"/>
  659. <IoAlarmSignal id="AlarmSignalF2GasLeak2ndAlarm" diSignalsplay="F2GasLeak2ndAlarm" diSignal="DI_F2GasLeak2ndAlarm" alarmTrigValue="true"/>
  660. <IoAlarmSignal id="AlarmSignalGasLeakFault" diSignalsplay="GasLeakFault" diSignal="DI_NOGasLeak1stAlarm" alarmTrigValue="true"/>
  661. <IoAlarmSignal id="AlarmSignalTS34RotationTempSW" diSignalsplay="C3H6GasLeak1stAlarm" diSignal="DI_C3H6GasLeak1stAlarm" alarmTrigValue="true"/>
  662. <IoAlarmSignal id="AlarmSignalTS30CapInsideTempSW" diSignalsplay="C3H6GasLeak2stAlarm" diSignal="DI_C3H6GasLeak2stAlarm" alarmTrigValue="true"/>
  663. <IoAlarmSignal id="AlarmSignalTS31CapOutsideTempSW" diSignalsplay="DMAGasLeak1stAlarm" diSignal="DI_DMAGasLeak1stAlarm" alarmTrigValue="true"/>
  664. <IoAlarmSignal id="AlarmSignalGasBoxLowerDoorSW" diSignalsplay="HCLGasLeak1stAlarm" diSignal="DI_HCLGasLeak1stAlarm" alarmTrigValue="true"/>
  665. <IoAlarmSignal id="AlarmSignalGasBoxUpperDoorSW" diSignalsplay="DMAGasLeak2stAlarm" diSignal="DI_DMAGasLeak2stAlarm" alarmTrigValue="true"/>
  666. <IoAlarmSignal id="AlarmSignalEXHBoxWaterLeak" diSignalsplay="HCLGasLeak2stAlarm" diSignal="DI_HCLGasLeak2stAlarm" alarmTrigValue="true"/>
  667. <IoAlarmSignal id="AlarmSignalOPPanelEMO1" diSignalsplay="NH3gasleak1stalarm" diSignal="DI_NH3gasleak1stalarm" alarmTrigValue="true"/>
  668. <IoAlarmSignal id="AlarmSignalOPPanelEMO2" diSignalsplay="NH3gasleak2stalarm" diSignal="DI_NH3gasleak2stalarm" alarmTrigValue="true"/>
  669. <IoAlarmSignal id="AlarmSignalMainFurnaceCellingTS306" diSignalsplay="C3H6GasLeak1stAlarm" diSignal="DI_C3H6GasLeak1stAlarm" alarmTrigValue="true"/>
  670. <IoAlarmSignal id="AlarmSignalHeaterRoomSWS11S12" diSignalsplay="C3H6GasLeak2stAlarm" diSignal="DI_C3H6GasLeak2stAlarm" alarmTrigValue="true"/>
  671. <IoAlarmSignal id="AlarmSignalFilterBox1DoorSwitch" diSignalsplay="DMAGasLeak1stAlarm" diSignal="DI_DMAGasLeak1stAlarm" alarmTrigValue="true"/>
  672. <IoAlarmSignal id="AlarmSignalLABacksideDoorSwitch" diSignalsplay="NH3gasleak1stalarm" diSignal="DI_NH3gasleak1stalarm" alarmTrigValue="true"/>
  673. <IoAlarmSignal id="AlarmSignalNH3GasLeak2stAlarm" diSignalsplay="NH3gasleak2stalarm" diSignal="DI_NH3gasleak2stalarm" alarmTrigValue="true"/>
  674. <IoAlarmSignal id="AlarmSignalRHCTS305" diSignalsplay="DMAGasLeak2stAlarm" diSignal="DI_DMAGasLeak2stAlarm" alarmTrigValue="true"/>
  675. <IoAlarmSignal id="AlarmSignalGasBoxExhaust1stAlarmMS2" diSignalsplay="TS34RRotationTempSw" diSignal="DI_TS34RRotationTempSw" alarmTrigValue="true"/>
  676. <IoAlarmSignal id="AlarmSignalGasBoxExhaust2ndAlarmMS2" diSignalsplay="TS30CapInsideTempSw" diSignal="DI_TS30CapInsideTempSw" alarmTrigValue="true"/>
  677. <IoAlarmSignal id="AlarmSignalMachineEMO1" diSignalsplay="MachineEMO1" diSignal="DI_MachineEMO1" alarmTrigValue="true"/>
  678. <IoAlarmSignal id="AlarmSignalMachineEMO2" diSignalsplay="MachineEMO2" diSignal="DI_MachineEMO2" alarmTrigValue="true"/>
  679. <IoAlarmSignal id="AlarmSignalT101TempStatus" diSignalsplay="T101TempStatus" diSignal="DI_T101TempStatus" alarmTrigValue="true"/>
  680. <IoAlarmSignal id="AlarmSignalT102TempStatus" diSignalsplay="T102TempStatus" diSignal="DI_T102TempStatus" alarmTrigValue="true"/>
  681. <IoAlarmSignal id="AlarmSignalT103TempStatus" diSignalsplay="T103TempStatus" diSignal="DI_T103TempStatus" alarmTrigValue="true"/>
  682. <IoAlarmSignal id="AlarmSignalBufferMotorHardwareInterlockAlarm" diSignalsplay="BufferMotorEDMEAlarm" diSignal="DI_BufferMotorEDMEAlarm" alarmTrigValue="true"/>
  683. <IoAlarmSignal id="AlarmSignalBoatLiftMotorHardwareInterlockAlarm" diSignalsplay="BoatLiftMotorEDMAlarm" diSignal="DI_BoatLiftMotorEDMAlarm" alarmTrigValue="true"/>
  684. <IoAlarmSignal id="AlarmSignalHFReconciliationPressureMinAbnormal" diSignalsplay="HFReconciliationPressureMinAbnormal" diSignal="DI_HFReconciliationPressureMinAbnormal" alarmTrigValue="true"/>
  685. <IoAlarmSignal id="AlarmSignalMagneticFluidLeak" diSignalsplay="HCLGasLeak1stAlarm" diSignal="DI_HCLGasLeak1stAlarm" alarmTrigValue="true"/>
  686. <IoAlarmSignal id="AlarmSignalCoolingWaterLeak" diSignalsplay="HCLGasLeak2stAlarm" diSignal="DI_HCLGasLeak2stAlarm" alarmTrigValue="true"/>
  687. <IoAlarmSignal id="AlarmSignalMachineEMS1" diSignalsplay="MachineEMS1" diSignal="DI_MachineEMS1" alarmTrigValue="true"/>
  688. <IoAlarmSignal id="AlarmSignalMachineEMS2" diSignalsplay="MachineEMS2" diSignal="DI_MachineEMS2" alarmTrigValue="true"/>
  689. <IoAlarmSignal id="AlarmSignalFBLightCurtainFault" diSignalsplay="FBLightCurtainFault" diSignal="DI_FBLightCurtainFault" alarmTrigValue="true"/>
  690. <IoAlarmSignal id="AlarmSignalFBLightCurtainOSSD1" diSignalsplay="FBLightCurtainOSSD1" diSignal="DI_FBLightCurtainOSSD1" alarmTrigValue="true"/>
  691. <IoAlarmSignal id="AlarmSignalFBLightCurtainOSSD2" diSignalsplay="FBLightCurtainOSSD2" diSignal="DI_FBLightCurtainOSSD2" alarmTrigValue="true"/>
  692. <IoAlarmSignal id="AlarmSignalFBEMO1" diSignalsplay="FBEMO1" diSignal="DI_FBEMO1" alarmTrigValue="true"/>
  693. <IoAlarmSignal id="AlarmSignalFBEMO2" diSignalsplay="FBEMO2" diSignal="DI_FBEMO2" alarmTrigValue="true"/>
  694. <IoAlarmSignal id="AlarmSignalDoorOverride" diSignalsplay="DoorOverride" diSignal="DI_DoorOverride" alarmTrigValue="true"/>
  695. <IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch" diSignalsplay="FBFrontDoorSwitch" diSignal="DI_FBFrontDoorSwitch" alarmTrigValue="true"/>
  696. <IoAlarmSignal id="AlarmSignalGLBoxPG1CNT1Alarm" diSignalsplay="GLBoxPG1CNT1Alarm" diSignal="DI_GLBoxPG1CNT1Alarm" alarmTrigValue="true"/>
  697. <IoAlarmSignal id="AlarmSignalGLBoxPG1CNT2Alarm" diSignalsplay="GLBoxPG1CNT2Alarm" diSignal="DI_GLBoxPG1CNT2Alarm" alarmTrigValue="true"/>
  698. <IoAlarmSignal id="AlarmSignalGLBoxPG2CNT1Alarm" diSignalsplay="GLBoxPG2CNT1Alarm" diSignal="DI_GLBoxPG2CNT1Alarm" alarmTrigValue="true"/>
  699. <IoAlarmSignal id="AlarmSignalGLBoxPG2CNT2Alarm" diSignalsplay="GLBoxPG2CNT2Alarm" diSignal="DI_GLBoxPG2CNT2Alarm" alarmTrigValue="true"/>
  700. <IoAlarmSignal id="AlarmSignalGLBoxPG3CNT1Alarm" diSignalsplay="GLBoxPG3CNT1Alarm" diSignal="DI_GLBoxPG3CNT1Alarm" alarmTrigValue="true"/>
  701. <IoAlarmSignal id="AlarmSignalGLBoxPG3CNT2Alarm" diSignalsplay="GLBoxPG3CNT2Alarm" diSignal="DI_GLBoxPG3CNT2Alarm" alarmTrigValue="true"/>
  702. <IoAlarmSignal id="AlarmSignalGLBoxPG4CNT1Alarm" diSignalsplay="GLBoxPG4CNT1Alarm" diSignal="DI_GLBoxPG4CNT1Alarm" alarmTrigValue="true"/>
  703. <IoAlarmSignal id="AlarmSignalGLBoxPG4CNT2Alarm" diSignalsplay="GLBoxPG4CNT2Alarm" diSignal="DI_GLBoxPG4CNT2Alarm" alarmTrigValue="true"/>
  704. <IoAlarmSignal id="AlarmSignalGLBoxPG5CNT1Alarm" diSignalsplay="GLBoxPG5CNT1Alarm" diSignal="DI_GLBoxPG5CNT1Alarm" alarmTrigValue="true"/>
  705. <IoAlarmSignal id="AlarmSignalGLBoxPG5CNT2Alarm" diSignalsplay="GLBoxPG5CNT2Alarm" diSignal="DI_GLBoxPG5CNT2Alarm" alarmTrigValue="true"/>
  706. <IoAlarmSignal id="AlarmSignalGLBoxPG6CNT1Alarm" diSignalsplay="GLBoxPG6CNT1Alarm" diSignal="DI_GLBoxPG6CNT1Alarm" alarmTrigValue="true"/>
  707. <IoAlarmSignal id="AlarmSignalGLBoxPG6CNT2Alarm" diSignalsplay="GLBoxPG6CNT2Alarm" diSignal="DI_GLBoxPG6CNT2Alarm" alarmTrigValue="true"/>
  708. <IoAlarmSignal id="AlarmSignalGLBoxVG21Status" diSignalsplay="GLBoxVG32Status" diSignal="DI_GLBoxVG21Status" alarmTrigValue="true"/>
  709. <IoAlarmSignal id="AlarmSignalGLBoxVG21Output1" diSignalsplay="GLBoxVG32Output1" diSignal="DI_GLBoxVG21Output1" alarmTrigValue="true"/>
  710. <IoAlarmSignal id="AlarmSignalGLBoxVG21Output2" diSignalsplay="GLBoxVG32Output2" diSignal="DI_GLBoxVG21Output2" alarmTrigValue="true"/>
  711. <IoAlarmSignal id="AlarmSignalGLBoxVG22Status" diSignalsplay="GLBoxVG33Status" diSignal="DI_GLBoxVG22Status" alarmTrigValue="true"/>
  712. <IoAlarmSignal id="AlarmSignalGLBoxVG22Output1" diSignalsplay="GLBoxVG33Output1" diSignal="DI_GLBoxVG22Output1" alarmTrigValue="true"/>
  713. <IoAlarmSignal id="AlarmSignalGLBoxVG22Output2" diSignalsplay="GLBoxVG33Output2" diSignal="DI_GLBoxVG22Output2" alarmTrigValue="true"/>
  714. <IoAlarmSignal id="AlarmSignalHeatingExhaust1stAlarmMS1" diSignalsplay="HeatingExhaust1stAlarmMS1" diSignal="DI_HeatingExhaust1stAlarmMS1" alarmTrigValue="true"/>
  715. <IoAlarmSignal id="AlarmSignalHeatingExhaust2ndAlarmMS1" diSignalsplay="HeatingExhaust2ndAlarmMS1" diSignal="DI_HeatingExhaust2ndAlarmMS1" alarmTrigValue="true"/>
  716. <IoAlarmSignal id="AlarmSignalScavengeExhaust1stAlarmMS3" diSignalsplay="ScavengeExhaust1stAlarmMS3" diSignal="DI_ScavengeExhaust1stAlarmMS3" alarmTrigValue="true"/>
  717. <IoAlarmSignal id="AlarmSignalScavengeExhaust2ndAlarmMS3" diSignalsplay="ScavengeExhaust2ndAlarmMS3" diSignal="DI_ScavengeExhaust2ndAlarmMS3" alarmTrigValue="true"/>
  718. <IoAlarmSignal id="AlarmSignalValveBoxExhaust1stAlarmMS4" diSignalsplay="ValveBoxExhaust1stAlarmMS4" diSignal="DI_ValveBoxExhaust1stAlarmMS4" alarmTrigValue="true"/>
  719. <IoAlarmSignal id="AlarmSignalValveBoxExhaust2ndAlarmMS4" diSignalsplay="ValveBoxExhaust2ndAlarmMS4" diSignal="DI_ValveBoxExhaust2ndAlarmMS4" alarmTrigValue="true"/>
  720. <IoAlarmSignal id="AlarmSignalLoadingAreaExhaust1stAlarmMS5" diSignalsplay="LoadingAreaExhaust1stAlarmMS5" diSignal="DI_LoadingAreaExhaust1stAlarmMS5" alarmTrigValue="true"/>
  721. <IoAlarmSignal id="AlarmSignalLoadingAreaExhaust2ndAlarmMS5" diSignalsplay="LoadingAreaExhaust2ndAlarmMS5" diSignal="DI_LoadingAreaExhaust2ndAlarmMS5" alarmTrigValue="true"/>
  722. <IoAlarmSignal id="AlarmSignalFrontBodyExhaust1stAlarmMS6" diSignalsplay="FrontBodyExhaust1stAlarmMS6" diSignal="DI_FrontBodyExhaust1stAlarmMS6" alarmTrigValue="true"/>
  723. <IoAlarmSignal id="AlarmSignalFrontBodyExhaust2ndAlarmMS6" diSignalsplay="FrontBodyExhaust2ndAlarmMS6" diSignal="DI_FrontBodyExhaust2ndAlarmMS6" alarmTrigValue="true"/>
  724. <IoAlarmSignal id="AlarmSignalLAExhaust1stAlarmMS7" diSignalsplay="LAExhaust1stAlarmMS7" diSignal="DI_LAExhaust1stAlarmMS7" alarmTrigValue="true"/>
  725. <IoAlarmSignal id="AlarmSignalLAExhaust2ndAlarmMS7" diSignalsplay="LAExhaust2ndAlarmMS7" diSignal="DI_LAExhaust2ndAlarmMS7" alarmTrigValue="true"/>
  726. <IoAlarmSignal id="AlarmSignalRHC1stAlarmMS8" diSignalsplay="RHC1stAlarmMS8" diSignal="DI_RHC1stAlarmMS8" alarmTrigValue="true"/>
  727. <IoAlarmSignal id="AlarmSignalRHC2ndAlarmMS8" diSignalsplay="RHC2ndAlarmMS8" diSignal="DI_RHC2ndAlarmMS8" alarmTrigValue="true"/>
  728. <IoAlarmSignal id="AlarmSignalREV1stAlarmMS9" diSignalsplay="REV1stAlarmMS9" diSignal="DI_REV1stAlarmMS9" alarmTrigValue="true"/>
  729. <IoAlarmSignal id="AlarmSignalREV2ndAlarmMS9" diSignalsplay="REV2ndAlarmMS9" diSignal="DI_REV2ndAlarmMS9" alarmTrigValue="true"/>
  730. <IoAlarmSignal id="AlarmSignalREV1stAlarmMS10" diSignalsplay="REV1stAlarmMS10" diSignal="DI_REV1stAlarmMS10" alarmTrigValue="true"/>
  731. <IoAlarmSignal id="AlarmSignalREV2ndAlarmMS10" diSignalsplay="REV2ndAlarmMS10" diSignal="DI_REV2ndAlarmMS10" alarmTrigValue="true"/>
  732. <IoAlarmSignal id="AlarmSignalOPBoxPS11Out1" diSignalsplay="OPBoxPS11Out1" diSignal="DI_OPBoxPS11Out1" alarmTrigValue="true"/>
  733. <IoAlarmSignal id="AlarmSignalRHCFlowAlarmFL901" diSignalsplay="RHCFlowAlarmFL901" diSignal="DI_RHCFlowAlarmFL901" alarmTrigValue="true"/>
  734. <IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902" diSignalsplay="CoolingWaterFlowAlarmOfFurnaceFL902" diSignal="DI_CoolingWaterFlowAlarmOfFurnaceFL902" alarmTrigValue="true"/>
  735. <IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903" diSignalsplay="CoolingWaterFlowAlarmOfShuttleFL903" diSignal="DI_CoolingWaterFlowAlarmOfShuttleFL903" alarmTrigValue="true"/>
  736. <IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904" diSignalsplay="CoolingWaterFlowAlarmOfBoatRotationFL904" diSignal="DI_CoolingWaterFlowAlarmOfBoatRotationFL904" alarmTrigValue="true"/>
  737. <IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905" diSignalsplay="CoolingWaterFlowAlarmOfFlangeFL905" diSignal="DI_CoolingWaterFlowAlarmOfFlangeFL905" alarmTrigValue="true"/>
  738. <IoAlarmSignal id="AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906" diSignalsplay="CoolingWaterFlowAlarmOfLoadingAreaFL906" diSignal="DI_CoolingWaterFlowAlarmOfLoadingAreaFL906" alarmTrigValue="true"/>
  739. <IoAlarmSignal id="AlarmSignalVG11LowAlarm" diSignalsplay="VG11LowAlarm" diSignal="DI_VG11LowAlarm" alarmTrigValue="true"/>
  740. <IoAlarmSignal id="AlarmSignalVG11HighAlarm" diSignalsplay="VG11HighAlarm" diSignal="DI_VG11HighAlarm" alarmTrigValue="true"/>
  741. <IoAlarmSignal id="AlarmSignalVG12LowAlarm" diSignalsplay="VG12LowAlarm" diSignal="DI_VG12LowAlarm" alarmTrigValue="true"/>
  742. <IoAlarmSignal id="AlarmSignalVG12HighAlarm" diSignalsplay="VG12HighAlarm" diSignal="DI_VG12HighAlarm" alarmTrigValue="true"/>
  743. <IoAlarmSignal id="AlarmSignalVG13LowAlarm" diSignalsplay="VG13LowAlarm" diSignal="DI_VG13LowAlarm" alarmTrigValue="true"/>
  744. <IoAlarmSignal id="AlarmSignalVG13HighAlarm" diSignalsplay="VG13HighAlarm" diSignal="DI_VG13HighAlarm" alarmTrigValue="true"/>
  745. <IoAlarmSignal id="AlarmSignalPG12OUT1" diSignalsplay="PG12OUT1" diSignal="DI_PG12OUT1" alarmTrigValue="true"/>
  746. <IoAlarmSignal id="AlarmSignalPG12OUT2" diSignalsplay="PG12OUT2" diSignal="DI_PG12OUT2" alarmTrigValue="true"/>
  747. <IoAlarmSignal id="AlarmSignalPG13OUT1" diSignalsplay="PG13OUT1" diSignal="DI_PG13OUT1" alarmTrigValue="true"/>
  748. <IoAlarmSignal id="AlarmSignalPG13OUT2" diSignalsplay="PG13OUT2" diSignal="DI_PG13OUT2" alarmTrigValue="true"/>
  749. <IoAlarmSignal id="AlarmSignalPS14OUT1" diSignalsplay="PS14OUT1" diSignal="DI_PS14OUT1" alarmTrigValue="true"/>
  750. <IoAlarmSignal id="AlarmSignalPS14OUT2" diSignalsplay="PS14OUT2" diSignal="DI_PS14OUT2" alarmTrigValue="true"/>
  751. <IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut1" diSignalsplay="CoolingWaterPressureOut1" diSignal="DI_CoolingWaterPressureOut1" alarmTrigValue="true"/>
  752. <IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut2" diSignalsplay="CoolingWaterPressureOut2" diSignal="DI_CoolingWaterPressureOut2" alarmTrigValue="true"/>
  753. <IoAlarmSignal id="AlarmSignalAirFlowFL70" diSignalsplay="AirFlowFL70" diSignal="DI_AirFlowFL70" alarmTrigValue="true"/>
  754. <IoAlarmSignal id="AlarmSignalAirFlowFL71" diSignalsplay="AirFlowFL71" diSignal="DI_AirFlowFL71" alarmTrigValue="true"/>
  755. <IoAlarmSignal id="AlarmSignalAirFlowFL72" diSignalsplay="AirFlowFL72" diSignal="DI_AirFlowFL72" alarmTrigValue="true"/>
  756. <IoAlarmSignal id="AlarmSignalWaterFlowFL61" diSignalsplay="WaterFlowFL61" diSignal="DI_WaterFlowFL61" alarmTrigValue="true"/>
  757. <IoAlarmSignal id="AlarmSignalWaterFlowFL62" diSignalsplay="WaterFlowFL62" diSignal="DI_WaterFlowFL62" alarmTrigValue="true"/>
  758. <IoAlarmSignal id="AlarmSignalUPSFault" diSignalsplay="UPSFault" diSignal="DI_UPSFault" alarmTrigValue="true"/>
  759. <IoAlarmSignal id="AlarmSignalUPSAlarm" diSignalsplay="UPSAlarm" diSignal="DI_UPSAlarm" alarmTrigValue="true"/>
  760. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT1" diSignalsplay="N2PurgeBOXPG14CNT1" diSignal="DI_N2PurgeBOXPG14CNT1" alarmTrigValue="true"/>
  761. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT2" diSignalsplay="N2PurgeBOXPG14CNT2" diSignal="DI_N2PurgeBOXPG14CNT2" alarmTrigValue="true"/>
  762. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT1" diSignalsplay="N2PurgeBOXPG15CNT1" diSignal="DI_N2PurgeBOXPG15CNT1" alarmTrigValue="true"/>
  763. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT2" diSignalsplay="N2PurgeBOXPG15CNT2" diSignal="DI_N2PurgeBOXPG15CNT2" alarmTrigValue="true"/>
  764. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG16CNT1" diSignalsplay="N2PurgeBOXPG16CNT1" diSignal="DI_N2PurgeBOXPG16CNT1" alarmTrigValue="true"/>
  765. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG16CNT2" diSignalsplay="N2PurgeBOXPG16CNT2" diSignal="DI_N2PurgeBOXPG16CNT2" alarmTrigValue="true"/>
  766. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG70CNT1" diSignalsplay="N2PurgeBOXPG70CNT1" diSignal="DI_N2PurgeBOXPG70CNT1" alarmTrigValue="true"/>
  767. <IoAlarmSignal id="AlarmSignalN2PurgeBOXPG70CNT2" diSignalsplay="N2PurgeBOXPG70CNT2" diSignal="DI_N2PurgeBOXPG70CNT2" alarmTrigValue="true"/>
  768. <IoAlarmSignal id="AlarmSignalPS17ValueLowLimitAlarm" diSignalsplay="PS17ValueLowLimitAlarm" diSignal="DI_PS17ValueLowLimitAlarm" alarmTrigValue="true"/>
  769. <IoAlarmSignal id="AlarmSignalPS17ValueLowLimitAlarm2" diSignalsplay="PS17ValueLowLimitAlarm2" diSignal="DI_PS17ValueLowLimitAlarm2" alarmTrigValue="true"/>
  770. <IoAlarmSignal id="AlarmSignalVaccumPumpWarning" diSignalsplay="VaccumPumpWarning" diSignal="DI_VaccumPumpWarning" alarmTrigValue="true"/>
  771. <IoAlarmSignal id="AlarmSignalVaccumPumpAlarm" diSignalsplay="VaccumPumpAlarm" diSignal="DI_VaccumPumpAlarm" alarmTrigValue="true"/>
  772. <IoAlarmSignal id="AlarmSignalFilterBox1Fan1Alarm" diSignalsplay="FilterBox1Fan1Alarm" diSignal="DI_FilterBox1Fan1Alarm" alarmTrigValue="true"/>
  773. <IoAlarmSignal id="AlarmSignalFilterBox1Fan2Alarm" diSignalsplay="FilterBox1Fan2Alarm" diSignal="DI_FilterBox1Fan2Alarm" alarmTrigValue="true"/>
  774. <IoAlarmSignal id="AlarmSignalStepperMotorAlarm" diSignalsplay="StepperMotorAlarm" diSignal="DI_StepperMotorAlarm" alarmTrigValue="true"/>
  775. <IoAlarmSignal id="AlarmSignalRFAlarm" diSignalsplay="RFAlarm" diSignal="DI_RFAlarm" alarmTrigValue="true"/>
  776. <IoAlarmSignal id="AlarmSignalForelineHeaterJacketLightAlarm" diSignalsplay="ForelineHeaterJacketLightAlarm" diSignal="DI_ForelineHeaterJacketLightAlarm" alarmTrigValue="true"/>
  777. <IoAlarmSignal id="AlarmSignalForelineHeaterJacketHeavyAlarm" diSignalsplay="ForelineHeaterJacketHeavyAlarm" diSignal="DI_ForelineHeaterJacketHeavyAlarm" alarmTrigValue="true"/>
  778. <IoAlarmSignal id="AlarmSignalScrubberWarning" diSignalsplay="ScrubberWarning" diSignal="DI_ScrubberWarning" alarmTrigValue="true"/>
  779. <IoAlarmSignal id="AlarmSignalScrubberAlarm" diSignalsplay="ScrubberAlarm" diSignal="DI_ScrubberAlarm" alarmTrigValue="true"/>
  780. <IoAlarmSignal id="AlarmSignalNegLmtPosBoatZAxis" diSignalsplay="NegLmtPosBoatZAxis" diSignal="DI_NegLmtPosBoatZAxis" alarmTrigValue="true"/>
  781. <IoAlarmSignal id="AlarmSignalPotLmtPosBoatZAxis" diSignalsplay="PotLmtPosBoatZAxis" diSignal="DI_PotLmtPosBoatZAxis" alarmTrigValue="true"/>
  782. <IoAlarmSignal id="AlarmSignalLAFFUCommAlarm" diSignalsplay="LAFFUCommAlarm" diSignal="DI_LAFFUCommAlarm" alarmTrigValue="true"/>
  783. <IoAlarmSignal id="AlarmSignalMINI8CommAlarm" diSignalsplay="MINI8CommAlarm" diSignal="DI_MINI8CommAlarm" alarmTrigValue="true"/>
  784. <IoAlarmSignal id="AlarmSignaMainWaterFlowAlarm" diSignalsplay="MainWaterFlowAlarm" diSignal="DI_MainWaterFlowAlarm" alarmTrigValue="true"/>
  785. <IoAlarmSignal id="AlarmSignaBufferRemoteIOAlarm" diSignalsplay="BufferRemoteIOAlarm" diSignal="DI_BufferRemoteIOAlarm" alarmTrigValue="true"/>
  786. <IoAlarmSignal id="AlarmSignaBoatRAxisAlarm" diSignalsplay="BoatRAxisAlarm" diSignal="DI_BoatRAxisAlarm" alarmTrigValue="true"/>
  787. <IoAlarmSignal id="AlarmSignaBoatRAxisWarning" diSignalsplay="BoatRAxisWarning" diSignal="DI_BoatRAxisWarning" alarmTrigValue="true"/>
  788. <IoAlarmSignal id="AlarmSignaBoatZAxisWarning" diSignalsplay="BoatZAxisWarning" diSignal="DI_BoatWarningBoatZAxis" alarmTrigValue="true"/>
  789. <IoAlarmSignal id="AlarmSignaBoatZAxisAlarm" diSignalsplay="BoatZAxisAlarm" diSignal="DI_BoatFaultBoatZAxis" alarmTrigValue="true"/>
  790. <IoAlarmSignal id="AlarmSignaFOUPRobotTPStatusWarning" diSignalsplay="FOUPRobotTPStatusWarning" diSignal="DI_FOUPRobotTPStatus" alarmTrigValue="false"/>
  791. <IoAlarmSignal id="AlarmSignaWaferRobotAlarm" diSignalsplay="WaferRobotAlarm" diSignal="DI_WaferRobotAlarm" alarmTrigValue="true"/>
  792. <IoAlarmSignal id="AlarmSignaFOUPRobotAlarm" diSignalsplay="WaferRobotAlarm" diSignal="DI_FOUPRobotAlarmSignal" alarmTrigValue="true"/>
  793. </IoAlarmSignals>
  794. <IoSensors>
  795. <IoSensor id="SensorEMOReset" display="" di="DI_EMOReset"/>
  796. <IoSensor id="SensorFurnacePowerOnButton" display="" di="DI_FurnacePowerOnButton"/>
  797. <IoSensor id="SensorGasLineHeaterPowerOnButton" display="" di="DI_GasLineHeaterPowerOnButton"/>
  798. <IoSensor id="SensorExhaustHeaterPowerOnButton" display="" di="DI_ExhaustHeaterPowerOnButton"/>
  799. <IoSensor id="SensorFrontbodyPowerOnButton" display="" di="DI_FrontbodyPowerOnButton"/>
  800. <IoSensor id="SensorBlowerMotorPowerOnButton" display="" di="DI_BlowerMotorPowerOnButton"/>
  801. <IoSensor id="SensorFFUPowerOnButton" display="" di="DI_FFUPowerOnButton"/>
  802. <IoSensor id="SensorT102PowerOnButton" display="" di="DI_T102PowerOnButton"/>
  803. <IoSensor id="SensorT103PowerOnButton" display="" di="DI_T103PowerOnButton"/>
  804. <IoSensor id="SensorStartButton" display="" di="DI_StartButton"/>
  805. <IoSensor id="SensorStopButton" display="" di="DI_StopButton"/>
  806. <IoSensor id="SensorResetButton" display="" di="DI_ResetButton"/>
  807. <IoSensor id="SensorMechaStopButton" display="" di="DI_MechaStopButton"/>
  808. <IoSensor id="SensorAutoOrmanualKnob" display="" di="DI_AutoOrmanualKnob"/>
  809. <IoSensor id="SensorNormalOrMaintainKnob" display="" di="DI_NormalOrMaintainKnob"/>
  810. <IoSensor id="SensorHeaterPowerOnOffKnob" display="" di="DI_HeaterPowerOnOffKnob"/>
  811. <IoSensor id="SensorREVReset" display="" di="DI_REVReset"/>
  812. <IoSensor id="SensorMachineStop" display="" di="DI_MachineStop"/>
  813. <IoSensor id="SensorMachinePause" display="" di="DI_MachinePause"/>
  814. <IoSensor id="SensorOperatorAccessHandOffLeft" display="" di="DI_OperatorAccessHandOffLeft"/>
  815. <IoSensor id="SensorOperatorAccessHandOffRight" display="" di="DI_OperatorAccessHandOffRight"/>
  816. <IoSensor id="SensorBoatLiftCAPInPosition" display="" di="DI_BoatLiftCAPInPosition"/>
  817. <IoSensor id="SensorVG11Status" display="" di="DI_VG11Status"/>
  818. <IoSensor id="SensorVG12Status" display="" di="DI_VG12Status"/>
  819. <IoSensor id="SensorVG13Status" display="" di="DI_VG13Status"/>
  820. <IoSensor id="SensorUPSBypassStatus" display="" di="DI_UPSBypassStatus"/>
  821. <IoSensor id="SensorUPSBatteryVoltageLow" display="" di="DI_UPSBatteryVoltageLow"/>
  822. <IoSensor id="SensorUPSStart" display="" di="DI_UPSStart"/>
  823. <IoSensor id="SensorUPSACInputCutOff" display="" di="DI_UPSACInputCutOff"/>
  824. <IoSensor id="SensorBlowerPowerStatusFeedback" display="" di="DI_BlowerPowerStatusFeedback"/>
  825. <IoSensor id="SensorVaccumPumpBothOn" display="" di="DI_VaccumPumpBothOn"/>
  826. <IoSensor id="SensorStocker1" display="" di="DI_BufferStock1A"/>
  827. <IoSensor id="SensorStocker2" display="" di="DI_BufferStock1B"/>
  828. <IoSensor id="SensorStocker3" display="" di="DI_BufferStock1C"/>
  829. <IoSensor id="SensorStocker4" display="" di="DI_BufferStock1D"/>
  830. <IoSensor id="SensorStocker5" display="" di="DI_BufferStock2A"/>
  831. <IoSensor id="SensorStocker6" display="" di="DI_BufferStock2B"/>
  832. <IoSensor id="SensorStocker7" display="" di="DI_BufferStock2C"/>
  833. <IoSensor id="SensorStocker8" display="" di="DI_BufferStock2D"/>
  834. <IoSensor id="SensorStocker9" display="" di="DI_BufferStock3A"/>
  835. <IoSensor id="SensorStocker10" display="" di="DI_BufferStock3B"/>
  836. <IoSensor id="SensorStocker11" display="" di="DI_BufferStock3C"/>
  837. <IoSensor id="SensorStocker12" display="" di="DI_BufferStock3D"/>
  838. <IoSensor id="SensorStocker13" display="" di="DI_BufferStock4A"/>
  839. <IoSensor id="SensorStocker14" display="" di="DI_BufferStock4B"/>
  840. <IoSensor id="SensorStocker15" display="" di="DI_BufferStock4C"/>
  841. <IoSensor id="SensorStocker16" display="" di="DI_BufferStock4D"/>
  842. <IoSensor id="SensorStocker17" display="" di="DI_LAFrontFOUPBuffer1InPosition"/>
  843. <IoSensor id="SensorStocker18" display="" di="DI_LAFrontFOUPBuffer2InPosition"/>
  844. <IoSensor id="SensorFurnaceMainCircuitBreakerStatusMonitor" display="" di="DI_FurnaceMainCircuitBreakerStatusMonitor"/>
  845. <IoSensor id="SensorZone1CircuitBreakerStatusMonitor" display="" di="DI_Zone1CircuitBreakerStatusMonitor"/>
  846. <IoSensor id="SensorZone2CircuitBreakerStatusMonitor" display="" di="DI_Zone2CircuitBreakerStatusMonitor"/>
  847. <IoSensor id="SensorZone3CircuitBreakerStatusMonitor" display="" di="DI_Zone3CircuitBreakerStatusMonitor"/>
  848. <IoSensor id="SensorZone4CircuitBreakerStatusMonitor" display="" di="DI_Zone4CircuitBreakerStatusMonitor"/>
  849. <IoSensor id="SensorZone5CircuitBreakerStatusMonitor" display="" di="DI_Zone5CircuitBreakerStatusMonitor"/>
  850. <IoSensor id="SensorWaferRobotEX1AxisHomePosition" display="" di="DI_WaferRobotEX1AxisHomePosition"/>
  851. <IoSensor id="SensorWaferRobotEX2AxisHomePosition" display="" di="DI_WaferRobotEX2AxisHomePosition"/>
  852. <IoSensor id="SensorVAC1" display="" di="DI_VAC1"/>
  853. <IoSensor id="SensorVAC2" display="" di="DI_VAC2"/>
  854. <IoSensor id="SensorVAC3" display="" di="DI_VAC3"/>
  855. <IoSensor id="SensorVAC4" display="" di="DI_VAC4"/>
  856. <IoSensor id="SensorVAC5" display="" di="DI_VAC5"/>
  857. <IoSensor id="SensorVAC6" display="" di="DI_VAC6"/>
  858. <IoSensor id="SensorVAC7" display="" di="DI_VAC7"/>
  859. <IoSensor id="SensorVAC8" display="" di="DI_VAC8"/>
  860. <IoSensor id="SensorPS13LStatus" display="" di="DI_PS13LStatus"/>
  861. <IoSensor id="SensorBoatUnloadInterlock" display="" di="DI_BoatUnloadInterlock"/>
  862. <IoSensor id="SensorAVGSwitchStatus" display="" di="DI_AVGSwitchStatus"/>
  863. </IoSensors>
  864. <IoTriggers >
  865. <IoTrigger id="TrigHPMValve" display="" schematicId="" unit="" doTrigger="DO_HPMValveOnOff"/>
  866. <IoTrigger id="TrigT101PowerOn" display="" schematicId="" unit="" doTrigger="DO_MainPowerOn"/>
  867. <IoTrigger id="TrigT101PowerOff" display="" schematicId="" unit="" doTrigger="DO_MainPowerOff"/>
  868. <IoTrigger id="TrigGaslineHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_GaslineHeaterPowerOn"/>
  869. <IoTrigger id="TrigExhaustHeaterPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustHeaterPowerOn"/>
  870. <IoTrigger id="TrigFrontBodyPowerOn" display="" schematicId="" unit="" doTrigger="DO_FrontBodyPowerOn"/>
  871. <IoTrigger id="TrigBlowerMotorPowerOn" display="" schematicId="" unit="" doTrigger="DO_BlowerMotorPowerOn"/>
  872. <IoTrigger id="TrigFFUPowerOn" display="" schematicId="" unit="" doTrigger="DO_FFUPowerOn"/>
  873. <IoTrigger id="TrigT102PowerOn" display="" schematicId="" unit="" doTrigger="DO_T102PowerOn"/>
  874. <IoTrigger id="TrigT103PowerOff" display="" schematicId="" unit="" doTrigger="DO_HExPowerOn"/>
  875. <IoTrigger id="TrigBufferMotorHardwareInterlockOk1" display="" schematicId="" unit="" doTrigger="DO_BufferMotorHardwareInterlockOk1"/>
  876. <IoTrigger id="TrigBufferMotorHardwareInterlockOk2" display="" schematicId="" unit="" doTrigger="DO_BufferMotorHardwareInterlockOk2"/>
  877. <IoTrigger id="TrigBoatLiftMotorHardwareInterlockOk1" display="" schematicId="" unit="" doTrigger="DO_BoatLiftMotorHardwareInterlockOk1"/>
  878. <IoTrigger id="TrigBoatLiftMotorHardwareInterlockOk2" display="" schematicId="" unit="" doTrigger="DO_BoatLiftMotorHardwareInterlockOk2"/>
  879. <IoTrigger id="TrigWaferRobotEnable" display="" schematicId="" unit="" doTrigger="DO_WaferRobotEnable"/>
  880. <IoTrigger id="TrigFOUPRobotEnable" display="" schematicId="" unit="" doTrigger="DO_FOUPRobotEnable"/>
  881. <IoTrigger id="TrigLightCurtainIdle" display="" schematicId="" unit="" doTrigger="DO_LightCurtainIdle"/>
  882. <IoTrigger id="TrigGaslineHeatingEN1K5201" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5201"/>
  883. <IoTrigger id="TrigGaslineHeatingEN1K5202" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5202"/>
  884. <IoTrigger id="TrigGaslineHeatingEN1K5203" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5203"/>
  885. <IoTrigger id="TrigGaslineHeatingEN1K5204" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5204"/>
  886. <IoTrigger id="TrigGaslineHeatingEN1K5205" display="" schematicId="" unit="" doTrigger="DO_GaslineHeatingEN1K5205"/>
  887. <IoTrigger id="TrigStartButton" display="" schematicId="" unit="" doTrigger="DO_StartButton"/>
  888. <IoTrigger id="TrigStopButton" display="" schematicId="" unit="" doTrigger="DO_StopButton"/>
  889. <IoTrigger id="TrigResetButton" display="" schematicId="" unit="" doTrigger="DO_ResetButton"/>
  890. <IoTrigger id="TrigMechaStopButton" display="" schematicId="" unit="" doTrigger="DO_MechaStopButton"/>
  891. <IoTrigger id="TrigAutoOrManualKnob" display="" schematicId="" unit="" doTrigger="DO_AutoOrManualKnob"/>
  892. <IoTrigger id="TrigNormalOrMaintainKnob" display="" schematicId="" unit="" doTrigger="DO_NormalOrMaintainKnob"/>
  893. <IoTrigger id="TrigHeaterPowerOnOffKnob" display="" schematicId="" unit="" doTrigger="DO_HeaterPowerOnOffKnob"/>
  894. <IoTrigger id="TrigREVReset" display="" schematicId="" unit="" doTrigger="DO_REVReset"/>
  895. <IoTrigger id="TrigEV101CoolingWaterShift" display="" schematicId="" unit="" doTrigger="DO_EV101CoolingWaterShift"/>
  896. <IoTrigger id="TrigVaccumPumpBothOn" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpBothOn"/>
  897. <IoTrigger id="TrigVaccumPumpAGVOpen" display="" schematicId="" unit="" doTrigger="DO_VaccumPumpAGVOpen"/>
  898. <IoTrigger id="TrigFurnaceLZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceLZoneHeatingEnable"/>
  899. <IoTrigger id="TrigFurnaceCLZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCLZoneHeatingEnable"/>
  900. <IoTrigger id="TrigFurnaceCZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCZoneHeatingEnable"/>
  901. <IoTrigger id="TrigFurnaceCUZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceCUZoneHeatingEnable"/>
  902. <IoTrigger id="TrigFurnaceUZoneHeatingEnable" display="" schematicId="" unit="" doTrigger="DO_FurnaceUZoneHeatingEnable"/>
  903. <IoTrigger id="TrigExhaustOmmanBoxFanPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustOmmanBoxFanPowerOn"/>
  904. <IoTrigger id="TrigHPMValveOutStatus" display="" schematicId="" unit="" doTrigger="DO_HPMValveOutStatus"/>
  905. <IoTrigger id="TrigForlineHeaterOn" display="" schematicId="" unit="" doTrigger="DO_ForlineHeaterOn"/>
  906. <IoTrigger id="TrigHeaterE901Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE901Enable"/>
  907. <IoTrigger id="TrigHeaterE902Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE902Enable"/>
  908. <IoTrigger id="TrigHeaterE903Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE903Enable"/>
  909. <IoTrigger id="TrigHeaterE904Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE904Enable"/>
  910. <IoTrigger id="TrigHeaterE905Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE905Enable"/>
  911. <IoTrigger id="TrigHeaterE906Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE906Enable"/>
  912. <IoTrigger id="TrigHeaterE907Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE907Enable"/>
  913. <IoTrigger id="TrigHeaterE908Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE908Enable"/>
  914. <IoTrigger id="TrigHeaterE909Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE909Enable"/>
  915. <IoTrigger id="TrigHeaterE910Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE910Enable"/>
  916. <IoTrigger id="TrigHeaterE911Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE911Enable"/>
  917. <IoTrigger id="TrigHeaterE912Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE912Enable"/>
  918. <IoTrigger id="TrigAV71ExternalHeater" display="" schematicId="" unit="" doTrigger="DO_AV71ExternalHeater"/>
  919. <IoTrigger id="TrigAV71RingHeater" display="" schematicId="" unit="" doTrigger="DO_AV71RingHeater"/>
  920. <IoTrigger id="TrigCapHeaterPowerOnEnable" display="" schematicId="" unit="" doTrigger="DO_CapHeaterPowerOnEnable"/>
  921. <IoTrigger id="TrigMechaStopRed" display="" schematicId="" unit="" doTrigger="DO_MechaStopRed"/>
  922. <IoTrigger id="TrigMechaPause" display="" schematicId="" unit="" doTrigger="DO_MechaPause"/>
  923. <IoTrigger id="TrigHandOffLeft" display="" schematicId="" unit="" doTrigger="DO_HandOffLeft"/>
  924. <IoTrigger id="TrigHandOffRight" display="" schematicId="" unit="" doTrigger="DO_HandOffRight"/>
  925. <IoTrigger id="TrigLP1FoupPresence" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPPresence"/>
  926. <IoTrigger id="TrigLP1FoupPlacement" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPPlacement"/>
  927. <IoTrigger id="TrigLP1FoupLoad" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPLoad"/>
  928. <IoTrigger id="TrigLP1FoupUnload" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPUnload"/>
  929. <IoTrigger id="TrigLP1FoupManual" display="" schematicId="" unit="" doTrigger="DO_LP1FOUPManual"/>
  930. <IoTrigger id="TrigLP2FoupPresence" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPPresence"/>
  931. <IoTrigger id="TrigLP2FoupPlacement" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPPlacement"/>
  932. <IoTrigger id="TrigLP2FoupLoad" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPLoad"/>
  933. <IoTrigger id="TrigLP2FoupUnload" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPUnload"/>
  934. <IoTrigger id="TrigLP2FoupManual" display="" schematicId="" unit="" doTrigger="DO_LP2FOUPManual"/>
  935. <IoTrigger id="TrigTransferRoomLedLightBar" display="" schematicId="" unit="" doTrigger="DO_TransferRoomLedLightBar"/>
  936. <IoTrigger id="TrigBoatRAxisAlarmReset" display="" schematicId="" unit="" doTrigger="DO_BoatRAxisAlarmReset"/>
  937. <IoTrigger id="TrigWaferRobotAlarmReset" display="" schematicId="" unit="" doTrigger="DO_WaferRobotAlarmReset"/>
  938. <IoTrigger id="TrigFOUPRobotAlarmReset" display="" schematicId="" unit="" doTrigger="DO_FOUPRobotAlarmReset"/>
  939. <IoTrigger id="TrigVGUnitConversion" display="" schematicId="" unit="" doTrigger="DO_VGUnitConversion"/>
  940. <IoTrigger id="TrigHeaterAllEnable" display="" schematicId="" unit="" aoTrigger="AO_HeaterAllEnable"/>
  941. </IoTriggers>
  942. <IoSignalTowers assembly="FurnaceRT" classType="FurnaceRT.Equipments.Systems.FurnaceSignalTower">
  943. <IoSignalTower module="System" id ="SignalTower" display="Signal Tower" schematicId=""
  944. doRed="DO_TowerRed" doYellow="DO_TowerOrange" doGreen="DO_TowerGreen" doBlue=""
  945. doBuzzer1="DO_TowerBuzzle"/>
  946. </IoSignalTowers>
  947. <IoHeaterBands classType="FurnaceRT.Devices.IoHeaterBand" assembly="FurnaceRT">
  948. <IoHeaterBand id="ForelineHeater1" display="ForelineHeater1" schematicId="ForelineHeater1" unit="" module=""
  949. aiPV="AI_ForelineHeater1TempPV"
  950. aiMV="AI_ForelineHeater1ManualMVFeedback"
  951. aiControlOutput="AI_ForelineHeater1ControlOutput"
  952. aiErrorID="AI_ForelineHeater1ControlErrorID"
  953. aiPID_P="AI_ForelineHeater1PBFeedback"
  954. aiPID_I="AI_ForelineHeater1TIFeedback"
  955. aiPID_D="AI_ForelineHeater1TDFeedback"
  956. doEnable="DO_ForelineHeater1Enable"
  957. doManualControl="DO_ForelineHeater1ManualControl"
  958. doAutoTuning="DO_ForelineHeater1PIDATCommand"
  959. diControlDoing="DI_ForelineHeater1ControlDoing"
  960. diAutoTuningDoing="DI_ForelineHeater1PIDATDoing"
  961. diAutoTuningDone="DI_ForelineHeater1PIDATDone"
  962. diPIDControlError="DI_ForelineHeater1PIDControlError"
  963. diTimePropControlError="DI_ForelineHeater1TimePropControlError"
  964. aoPID_P="AO_ForelineHeater1PBSV"
  965. aoPID_I="AO_ForelineHeater1TISV"
  966. aoPID_D="AO_ForelineHeater1TDSV"
  967. aoManualOutput="AO_ForelineHeater1ManualOutputSV"
  968. aoControlPeriodTime="AO_ForelineHeater1ControlPeriodTimeSV"
  969. aoSetPoint="AO_ForelineHeater1TempSV"
  970. aioType="float"
  971. />
  972. <IoHeaterBand id="ForelineHeater2" display="ForelineHeater2" schematicId="ForelineHeater2" unit="" module=""
  973. aiPV="AI_ForelineHeater2TempPV"
  974. aiMV="AI_ForelineHeater2ManualMVFeedback"
  975. aiControlOutput="AI_ForelineHeater2ControlOutput"
  976. aiErrorID="AI_ForelineHeater2ControlErrorID"
  977. aiPID_P="AI_ForelineHeater2PBFeedback"
  978. aiPID_I="AI_ForelineHeater2TIFeedback"
  979. aiPID_D="AI_ForelineHeater2TDFeedback"
  980. doEnable="DO_ForelineHeater2Enable"
  981. doManualControl="DO_ForelineHeater2ManualControl"
  982. doAutoTuning="DO_ForelineHeater2PIDATCommand"
  983. diControlDoing="DI_ForelineHeater2ControlDoing"
  984. diAutoTuningDoing="DI_ForelineHeater2PIDATDoing"
  985. diAutoTuningDone="DI_ForelineHeater2PIDATDone"
  986. diPIDControlError="DI_ForelineHeater2PIDControlError"
  987. diTimePropControlError="DI_ForelineHeater2TimePropControlError"
  988. aoPID_P="AO_ForelineHeater2PBSV"
  989. aoPID_I="AO_ForelineHeater2TISV"
  990. aoPID_D="AO_ForelineHeater2TDSV"
  991. aoManualOutput="AO_ForelineHeater2ManualOutputSV"
  992. aoControlPeriodTime="AO_ForelineHeater2ControlPeriodTimeSV"
  993. aoSetPoint="AO_ForelineHeater2TempSV"
  994. aioType="float"
  995. />
  996. <IoHeaterBand id="ForelineHeater3" display="ForelineHeater3" schematicId="ForelineHeater3" unit="" module=""
  997. aiPV="AI_ForelineHeater3TempPV"
  998. aiMV="AI_ForelineHeater3ManualMVFeedback"
  999. aiControlOutput="AI_ForelineHeater3ControlOutput"
  1000. aiErrorID="AI_ForelineHeater3ControlErrorID"
  1001. aiPID_P="AI_ForelineHeater3PBFeedback"
  1002. aiPID_I="AI_ForelineHeater3TIFeedback"
  1003. aiPID_D="AI_ForelineHeater3TDFeedback"
  1004. doEnable="DO_ForelineHeater3Enable"
  1005. doManualControl="DO_ForelineHeater3ManualControl"
  1006. doAutoTuning="DO_ForelineHeater3PIDATCommand"
  1007. diControlDoing="DI_ForelineHeater3ControlDoing"
  1008. diAutoTuningDoing="DI_ForelineHeater3PIDATDoing"
  1009. diAutoTuningDone="DI_ForelineHeater3PIDATDone"
  1010. diPIDControlError="DI_ForelineHeater3PIDControlError"
  1011. diTimePropControlError="DI_ForelineHeater3TimePropControlError"
  1012. aoPID_P="AO_ForelineHeater3PBSV"
  1013. aoPID_I="AO_ForelineHeater3TISV"
  1014. aoPID_D="AO_ForelineHeater3TDSV"
  1015. aoManualOutput="AO_ForelineHeater3ManualOutputSV"
  1016. aoControlPeriodTime="AO_ForelineHeater3ControlPeriodTimeSV"
  1017. aoSetPoint="AO_ForelineHeater3TempSV"
  1018. aioType="float"
  1019. />
  1020. <IoHeaterBand id="ForelineHeater4" display="ForelineHeater4" schematicId="ForelineHeater4" unit="" module=""
  1021. aiPV="AI_ForelineHeater4TempPV"
  1022. aiMV="AI_ForelineHeater4ManualMVFeedback"
  1023. aiControlOutput="AI_ForelineHeater4ControlOutput"
  1024. aiErrorID="AI_ForelineHeater4ControlErrorID"
  1025. aiPID_P="AI_ForelineHeater4PBFeedback"
  1026. aiPID_I="AI_ForelineHeater4TIFeedback"
  1027. aiPID_D="AI_ForelineHeater4TDFeedback"
  1028. doEnable="DO_ForelineHeater4Enable"
  1029. doManualControl="DO_ForelineHeater4ManualControl"
  1030. doAutoTuning="DO_ForelineHeater4PIDATCommand"
  1031. diControlDoing="DI_ForelineHeater4ControlDoing"
  1032. diAutoTuningDoing="DI_ForelineHeater4PIDATDoing"
  1033. diAutoTuningDone="DI_ForelineHeater4PIDATDone"
  1034. diPIDControlError="DI_ForelineHeater4PIDControlError"
  1035. diTimePropControlError="DI_ForelineHeater4TimePropControlError"
  1036. aoPID_P="AO_ForelineHeater4PBSV"
  1037. aoPID_I="AO_ForelineHeater4TISV"
  1038. aoPID_D="AO_ForelineHeater4TDSV"
  1039. aoManualOutput="AO_ForelineHeater4ManualOutputSV"
  1040. aoControlPeriodTime="AO_ForelineHeater4ControlPeriodTimeSV"
  1041. aoSetPoint="AO_ForelineHeater4TempSV"
  1042. aioType="float"
  1043. />
  1044. <IoHeaterBand id="ForelineHeater5" display="ForelineHeater5" schematicId="ForelineHeater5" unit="" module=""
  1045. aiPV="AI_ForelineHeater5TempPV"
  1046. aiMV="AI_ForelineHeater5ManualMVFeedback"
  1047. aiControlOutput="AI_ForelineHeater5ControlOutput"
  1048. aiErrorID="AI_ForelineHeater5ControlErrorID"
  1049. aiPID_P="AI_ForelineHeater5PBFeedback"
  1050. aiPID_I="AI_ForelineHeater5TIFeedback"
  1051. aiPID_D="AI_ForelineHeater5TDFeedback"
  1052. doEnable="DO_ForelineHeater5Enable"
  1053. doManualControl="DO_ForelineHeater5ManualControl"
  1054. doAutoTuning="DO_ForelineHeater5PIDATCommand"
  1055. diControlDoing="DI_ForelineHeater5ControlDoing"
  1056. diAutoTuningDoing="DI_ForelineHeater5PIDATDoing"
  1057. diAutoTuningDone="DI_ForelineHeater5PIDATDone"
  1058. diPIDControlError="DI_ForelineHeater5PIDControlError"
  1059. diTimePropControlError="DI_ForelineHeater5TimePropControlError"
  1060. aoPID_P="AO_ForelineHeater5PBSV"
  1061. aoPID_I="AO_ForelineHeater5TISV"
  1062. aoPID_D="AO_ForelineHeater5TDSV"
  1063. aoManualOutput="AO_ForelineHeater5ManualOutputSV"
  1064. aoControlPeriodTime="AO_ForelineHeater5ControlPeriodTimeSV"
  1065. aoSetPoint="AO_ForelineHeater5TempSV"
  1066. aioType="float"
  1067. />
  1068. <IoHeaterBand id="ForelineHeater6" display="ForelineHeater6" schematicId="ForelineHeater6" unit="" module=""
  1069. aiPV="AI_ForelineHeater6TempPV"
  1070. aiMV="AI_ForelineHeater6ManualMVFeedback"
  1071. aiControlOutput="AI_ForelineHeater6ControlOutput"
  1072. aiErrorID="AI_ForelineHeater6ControlErrorID"
  1073. aiPID_P="AI_ForelineHeater6PBFeedback"
  1074. aiPID_I="AI_ForelineHeater6TIFeedback"
  1075. aiPID_D="AI_ForelineHeater6TDFeedback"
  1076. doEnable="DO_ForelineHeater6Enable"
  1077. doManualControl="DO_ForelineHeater6ManualControl"
  1078. doAutoTuning="DO_ForelineHeater6PIDATCommand"
  1079. diControlDoing="DI_ForelineHeater6ControlDoing"
  1080. diAutoTuningDoing="DI_ForelineHeater6PIDATDoing"
  1081. diAutoTuningDone="DI_ForelineHeater6PIDATDone"
  1082. diPIDControlError="DI_ForelineHeater6PIDControlError"
  1083. diTimePropControlError="DI_ForelineHeater6TimePropControlError"
  1084. aoPID_P="AO_ForelineHeater6PBSV"
  1085. aoPID_I="AO_ForelineHeater6TISV"
  1086. aoPID_D="AO_ForelineHeater6TDSV"
  1087. aoManualOutput="AO_ForelineHeater6ManualOutputSV"
  1088. aoControlPeriodTime="AO_ForelineHeater6ControlPeriodTimeSV"
  1089. aoSetPoint="AO_ForelineHeater6TempSV"
  1090. aioType="float"
  1091. />
  1092. <IoHeaterBand id="ForelineHeater7" display="ForelineHeater7" schematicId="ForelineHeater7" unit="" module=""
  1093. aiPV="AI_ForelineHeater7TempPV"
  1094. aiMV="AI_ForelineHeater7ManualMVFeedback"
  1095. aiControlOutput="AI_ForelineHeater7ControlOutput"
  1096. aiErrorID="AI_ForelineHeater7ControlErrorID"
  1097. aiPID_P="AI_ForelineHeater7PBFeedback"
  1098. aiPID_I="AI_ForelineHeater7TIFeedback"
  1099. aiPID_D="AI_ForelineHeater7TDFeedback"
  1100. doEnable="DO_ForelineHeater7Enable"
  1101. doManualControl="DO_ForelineHeater7ManualControl"
  1102. doAutoTuning="DO_ForelineHeater7PIDATCommand"
  1103. diControlDoing="DI_ForelineHeater7ControlDoing"
  1104. diAutoTuningDoing="DI_ForelineHeater7PIDATDoing"
  1105. diAutoTuningDone="DI_ForelineHeater7PIDATDone"
  1106. diPIDControlError="DI_ForelineHeater7PIDControlError"
  1107. diTimePropControlError="DI_ForelineHeater7TimePropControlError"
  1108. aoPID_P="AO_ForelineHeater7PBSV"
  1109. aoPID_I="AO_ForelineHeater7TISV"
  1110. aoPID_D="AO_ForelineHeater7TDSV"
  1111. aoManualOutput="AO_ForelineHeater7ManualOutputSV"
  1112. aoControlPeriodTime="AO_ForelineHeater7ControlPeriodTimeSV"
  1113. aoSetPoint="AO_ForelineHeater7TempSV"
  1114. aioType="float"
  1115. />
  1116. <IoHeaterBand id="ForelineHeater8" display="ForelineHeater8" schematicId="ForelineHeater8" unit="" module=""
  1117. aiPV="AI_ForelineHeater8TempPV"
  1118. aiMV="AI_ForelineHeater8ManualMVFeedback"
  1119. aiControlOutput="AI_ForelineHeater8ControlOutput"
  1120. aiErrorID="AI_ForelineHeater8ControlErrorID"
  1121. aiPID_P="AI_ForelineHeater8PBFeedback"
  1122. aiPID_I="AI_ForelineHeater8TIFeedback"
  1123. aiPID_D="AI_ForelineHeater8TDFeedback"
  1124. doEnable="DO_ForelineHeater8Enable"
  1125. doManualControl="DO_ForelineHeater8ManualControl"
  1126. doAutoTuning="DO_ForelineHeater8PIDATCommand"
  1127. diControlDoing="DI_ForelineHeater8ControlDoing"
  1128. diAutoTuningDoing="DI_ForelineHeater8PIDATDoing"
  1129. diAutoTuningDone="DI_ForelineHeater8PIDATDone"
  1130. diPIDControlError="DI_ForelineHeater8PIDControlError"
  1131. diTimePropControlError="DI_ForelineHeater8TimePropControlError"
  1132. aoPID_P="AO_ForelineHeater8PBSV"
  1133. aoPID_I="AO_ForelineHeater8TISV"
  1134. aoPID_D="AO_ForelineHeater8TDSV"
  1135. aoManualOutput="AO_ForelineHeater8ManualOutputSV"
  1136. aoControlPeriodTime="AO_ForelineHeater8ControlPeriodTimeSV"
  1137. aoSetPoint="AO_ForelineHeater8TempSV"
  1138. aioType="float"
  1139. />
  1140. <IoHeaterBand id="ForelineHeater9" display="ForelineHeater9" schematicId="ForelineHeater9" unit="" module=""
  1141. aiPV="AI_ForelineHeater9TempPV"
  1142. aiMV="AI_ForelineHeater9ManualMVFeedback"
  1143. aiControlOutput="AI_ForelineHeater9ControlOutput"
  1144. aiErrorID="AI_ForelineHeater9ControlErrorID"
  1145. aiPID_P="AI_ForelineHeater9PBFeedback"
  1146. aiPID_I="AI_ForelineHeater9TIFeedback"
  1147. aiPID_D="AI_ForelineHeater9TDFeedback"
  1148. doEnable="DO_ForelineHeater9Enable"
  1149. doManualControl="DO_ForelineHeater9ManualControl"
  1150. doAutoTuning="DO_ForelineHeater9PIDATCommand"
  1151. diControlDoing="DI_ForelineHeater9ControlDoing"
  1152. diAutoTuningDoing="DI_ForelineHeater9PIDATDoing"
  1153. diAutoTuningDone="DI_ForelineHeater9PIDATDone"
  1154. diPIDControlError="DI_ForelineHeater9PIDControlError"
  1155. diTimePropControlError="DI_ForelineHeater9TimePropControlError"
  1156. aoPID_P="AO_ForelineHeater9PBSV"
  1157. aoPID_I="AO_ForelineHeater9TISV"
  1158. aoPID_D="AO_ForelineHeater9TDSV"
  1159. aoManualOutput="AO_ForelineHeater9ManualOutputSV"
  1160. aoControlPeriodTime="AO_ForelineHeater9ControlPeriodTimeSV"
  1161. aoSetPoint="AO_ForelineHeater9TempSV"
  1162. aioType="float"
  1163. />
  1164. <IoHeaterBand id="ForelineHeater10" display="ForelineHeater10" schematicId="ForelineHeater10" unit="" module=""
  1165. aiPV="AI_ForelineHeater10TempPV"
  1166. aiMV="AI_ForelineHeater10ManualMVFeedback"
  1167. aiControlOutput="AI_ForelineHeater10ControlOutput"
  1168. aiErrorID="AI_ForelineHeater10ControlErrorID"
  1169. aiPID_P="AI_ForelineHeater10PBFeedback"
  1170. aiPID_I="AI_ForelineHeater10TIFeedback"
  1171. aiPID_D="AI_ForelineHeater10TDFeedback"
  1172. doEnable="DO_ForelineHeater10Enable"
  1173. doManualControl="DO_ForelineHeater10ManualControl"
  1174. doAutoTuning="DO_ForelineHeater10PIDATCommand"
  1175. diControlDoing="DI_ForelineHeater10ControlDoing"
  1176. diAutoTuningDoing="DI_ForelineHeater10PIDATDoing"
  1177. diAutoTuningDone="DI_ForelineHeater10PIDATDone"
  1178. diPIDControlError="DI_ForelineHeater10PIDControlError"
  1179. diTimePropControlError="DI_ForelineHeater10TimePropControlError"
  1180. aoPID_P="AO_ForelineHeater10PBSV"
  1181. aoPID_I="AO_ForelineHeater10TISV"
  1182. aoPID_D="AO_ForelineHeater10TDSV"
  1183. aoManualOutput="AO_ForelineHeater10ManualOutputSV"
  1184. aoControlPeriodTime="AO_ForelineHeater10ControlPeriodTimeSV"
  1185. aoSetPoint="AO_ForelineHeater10TempSV"
  1186. aioType="float"
  1187. />
  1188. <IoHeaterBand id="ForelineHeater11" display="ForelineHeater11" schematicId="ForelineHeater11" unit="" module=""
  1189. aiPV="AI_ForelineHeater11TempPV"
  1190. aiMV="AI_ForelineHeater11ManualMVFeedback"
  1191. aiControlOutput="AI_ForelineHeater11ControlOutput"
  1192. aiErrorID="AI_ForelineHeater11ControlErrorID"
  1193. aiPID_P="AI_ForelineHeater11PBFeedback"
  1194. aiPID_I="AI_ForelineHeater11TIFeedback"
  1195. aiPID_D="AI_ForelineHeater11TDFeedback"
  1196. doEnable="DO_ForelineHeater11Enable"
  1197. doManualControl="DO_ForelineHeater11ManualControl"
  1198. doAutoTuning="DO_ForelineHeater11PIDATCommand"
  1199. diControlDoing="DI_ForelineHeater11ControlDoing"
  1200. diAutoTuningDoing="DI_ForelineHeater11PIDATDoing"
  1201. diAutoTuningDone="DI_ForelineHeater11PIDATDone"
  1202. diPIDControlError="DI_ForelineHeater11PIDControlError"
  1203. diTimePropControlError="DI_ForelineHeater11TimePropControlError"
  1204. aoPID_P="AO_ForelineHeater11PBSV"
  1205. aoPID_I="AO_ForelineHeater11TISV"
  1206. aoPID_D="AO_ForelineHeater11TDSV"
  1207. aoManualOutput="AO_ForelineHeater11ManualOutputSV"
  1208. aoControlPeriodTime="AO_ForelineHeater11ControlPeriodTimeSV"
  1209. aoSetPoint="AO_ForelineHeater11TempSV"
  1210. aioType="float"
  1211. />
  1212. <IoHeaterBand id="ForelineHeater12" display="ForelineHeater12" schematicId="ForelineHeater12" unit="" module=""
  1213. aiPV="AI_ForelineHeater12TempPV"
  1214. aiMV="AI_ForelineHeater12ManualMVFeedback"
  1215. aiControlOutput="AI_ForelineHeater12ControlOutput"
  1216. aiErrorID="AI_ForelineHeater12ControlErrorID"
  1217. aiPID_P="AI_ForelineHeater12PBFeedback"
  1218. aiPID_I="AI_ForelineHeater12TIFeedback"
  1219. aiPID_D="AI_ForelineHeater12TDFeedback"
  1220. doEnable="DO_ForelineHeater12Enable"
  1221. doManualControl="DO_ForelineHeater12ManualControl"
  1222. doAutoTuning="DO_ForelineHeater12PIDATCommand"
  1223. diControlDoing="DI_ForelineHeater12ControlDoing"
  1224. diAutoTuningDoing="DI_ForelineHeater12PIDATDoing"
  1225. diAutoTuningDone="DI_ForelineHeater12PIDATDone"
  1226. diPIDControlError="DI_ForelineHeater12PIDControlError"
  1227. diTimePropControlError="DI_ForelineHeater12TimePropControlError"
  1228. aoPID_P="AO_ForelineHeater12PBSV"
  1229. aoPID_I="AO_ForelineHeater12TISV"
  1230. aoPID_D="AO_ForelineHeater12TDSV"
  1231. aoManualOutput="AO_ForelineHeater12ManualOutputSV"
  1232. aoControlPeriodTime="AO_ForelineHeater12ControlPeriodTimeSV"
  1233. aoSetPoint="AO_ForelineHeater12TempSV"
  1234. aioType="float"
  1235. />
  1236. <IoHeaterBand id="CapHeater" display="CapHeater" schematicId="CapHeater" unit="" module=""
  1237. aiPV="AI_CapHeaterTempPV"
  1238. aiMV="AI_CapHeaterManualMVFeedback"
  1239. aiControlOutput="AI_CapHeaterControlOutput"
  1240. aiErrorID="AI_CapHeaterControlErrorID"
  1241. aiPID_P="AI_CapHeaterPBFeedback"
  1242. aiPID_I="AI_CapHeaterTIFeedback"
  1243. aiPID_D="AI_CapHeaterTDFeedback"
  1244. doEnable="DO_CapHeaterEnable"
  1245. doManualControl="DO_CapHeaterManualControl"
  1246. doAutoTuning="DO_CapHeaterPIDATCommand"
  1247. diControlDoing="DI_CapHeaterControlDoing"
  1248. diAutoTuningDoing="DI_CapHeaterPIDATDoing"
  1249. diAutoTuningDone="DI_CapHeaterPIDATDone"
  1250. diPIDControlError="DI_CapHeaterPIDControlError"
  1251. diTimePropControlError="DI_CapHeaterTimePropControlError"
  1252. aoPID_P="AO_CapHeaterPBSV"
  1253. aoPID_I="AO_CapHeaterTISV"
  1254. aoPID_D="AO_CapHeaterTDSV"
  1255. aoManualOutput="AO_CapHeaterManualOutputSV"
  1256. aoControlPeriodTime="AO_CapHeaterControlPeriodTimeSV"
  1257. aoSetPoint="AO_CapHeaterTempSV"
  1258. aioType="float"
  1259. />
  1260. <IoHeaterBand id="APCExternalHeater" display="APCExternalHeater" schematicId="APCExternalHeater" unit="" module=""
  1261. aiPV="AI_APCExternalHeaterTempPV"
  1262. aiMV="AI_APCExternalHeaterManualMVFeedback"
  1263. aiControlOutput="AI_APCExternalHeaterControlOutput"
  1264. aiErrorID="AI_APCExternalHeaterControlErrorID"
  1265. aiPID_P="AI_APCExternalHeaterPBFeedback"
  1266. aiPID_I="AI_APCExternalHeaterTIFeedback"
  1267. aiPID_D="AI_APCExternalHeaterTDFeedback"
  1268. doEnable="DO_APCExternalHeaterEnable"
  1269. doManualControl="DO_APCExternalHeaterManualControl"
  1270. doAutoTuning="DO_APCExternalHeaterPIDATCommand"
  1271. diControlDoing="DI_APCExternalHeaterControlDoing"
  1272. diAutoTuningDoing="DI_APCExternalHeaterPIDATDoing"
  1273. diAutoTuningDone="DI_APCExternalHeaterPIDATDone"
  1274. diPIDControlError="DI_APCExternalHeaterPIDControlError"
  1275. diTimePropControlError="DI_APCExternalHeaterTimePropControlError"
  1276. aoPID_P="AO_APCExternalHeaterPBSV"
  1277. aoPID_I="AO_APCExternalHeaterTISV"
  1278. aoPID_D="AO_APCExternalHeaterTDSV"
  1279. aoManualOutput="AO_APCExternalHeaterManualOutputSV"
  1280. aoControlPeriodTime="AO_APCExternalHeaterControlPeriodTimeSV"
  1281. aoSetPoint="AO_APCExternalHeaterTempSV"
  1282. aioType="float"
  1283. />
  1284. <IoHeaterBand id="APCRingHeater" display="APCRingHeater" schematicId="APCRingHeater" unit="" module=""
  1285. aiPV="AI_APCRingHeaterTempPV"
  1286. aiMV="AI_APCRingHeaterManualMVFeedback"
  1287. aiControlOutput="AI_APCRingHeaterControlOutput"
  1288. aiErrorID="AI_APCRingHeaterControlErrorID"
  1289. aiPID_P="AI_APCRingHeaterPBFeedback"
  1290. aiPID_I="AI_APCRingHeaterTIFeedback"
  1291. aiPID_D="AI_APCRingHeaterTDFeedback"
  1292. doEnable="DO_APCRingHeaterEnable"
  1293. doManualControl="DO_APCRingHeaterManualControl"
  1294. doAutoTuning="DO_APCRingHeaterPIDATCommand"
  1295. diControlDoing="DI_APCRingHeaterControlDoing"
  1296. diAutoTuningDoing="DI_APCRingHeaterPIDATDoing"
  1297. diAutoTuningDone="DI_APCRingHeaterPIDATDone"
  1298. diPIDControlError="DI_APCRingHeaterPIDControlError"
  1299. diTimePropControlError="DI_APCRingHeaterTimePropControlError"
  1300. aoPID_P="AO_APCRingHeaterPBSV"
  1301. aoPID_I="AO_APCRingHeaterTISV"
  1302. aoPID_D="AO_APCRingHeaterTDSV"
  1303. aoManualOutput="AO_APCRingHeaterManualOutputSV"
  1304. aoControlPeriodTime="AO_APCRingHeaterControlPeriodTimeSV"
  1305. aoSetPoint="AO_APCRingHeaterTempSV"
  1306. aioType="float"
  1307. />
  1308. <IoHeaterBand id="GaslineHeaterUnit1CH1" display="GaslineHeaterUnit1CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH1SV" aiPV="AI_Unit1CH1PV" aiControlOutput="AI_Unit1CH1WorkingOutput" aiPID_P="AI_Unit1CH1PID_P" aiPID_I="AI_Unit1CH1PID_I" aiPID_D="AI_Unit1CH1PID_D" aiEnableIn="AI_Unit1CH1EnableIn" aiAutotuneActivate="AI_Unit1CH1AutotuneActivate" aiAlarmHigher="AI_Unit1CH1AlarmHigher" aiUpRate="AI_Unit1CH1UpRate" aiDownRate="AI_Unit1CH1DownRate" aiAlarmLower="AI_Unit1CH1AlarmLower" aoUpRate="AO_Unit1CH1UpRate" aoDownRate="AO_Unit1CH1DownRate" aoEnableIn="AO_Unit1CH1EnableIn" aoAutotuneActivate="AO_Unit1CH1AutotuneActivate" aoPID_P="AO_Unit1CH1PID_P" aoPID_I="AO_Unit1CH1PID_I" aoPID_D="AO_Unit1CH1PID_D" aoSetPoint="AO_Unit1CH1SV" aoAlarmHigher="AO_Unit1CH1AlarmHigher" aoAlarmLower="AO_Unit1CH1AlarmLower" aioType="float" />
  1309. <IoHeaterBand id="GaslineHeaterUnit1CH2" display="GaslineHeaterUnit1CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH2SV" aiPV="AI_Unit1CH2PV" aiControlOutput="AI_Unit1CH2WorkingOutput" aiPID_P="AI_Unit1CH2PID_P" aiPID_I="AI_Unit1CH2PID_I" aiPID_D="AI_Unit1CH2PID_D" aiEnableIn="AI_Unit1CH2EnableIn" aiAutotuneActivate="AI_Unit1CH2AutotuneActivate" aiAlarmHigher="AI_Unit1CH2AlarmHigher" aiUpRate="AI_Unit1CH2UpRate" aiDownRate="AI_Unit1CH2DownRate" aiAlarmLower="AI_Unit1CH2AlarmLower" aoUpRate="AO_Unit1CH2UpRate" aoDownRate="AO_Unit1CH2DownRate" aoEnableIn="AO_Unit1CH2EnableIn" aoAutotuneActivate="AO_Unit1CH2AutotuneActivate" aoPID_P="AO_Unit1CH2PID_P" aoPID_I="AO_Unit1CH2PID_I" aoPID_D="AO_Unit1CH2PID_D" aoSetPoint="AO_Unit1CH2SV" aoAlarmHigher="AO_Unit1CH2AlarmHigher" aoAlarmLower="AO_Unit1CH2AlarmLower" aioType="float" />
  1310. <IoHeaterBand id="GaslineHeaterUnit1CH3" display="GaslineHeaterUnit1CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH3SV" aiPV="AI_Unit1CH3PV" aiControlOutput="AI_Unit1CH3WorkingOutput" aiPID_P="AI_Unit1CH3PID_P" aiPID_I="AI_Unit1CH3PID_I" aiPID_D="AI_Unit1CH3PID_D" aiEnableIn="AI_Unit1CH3EnableIn" aiAutotuneActivate="AI_Unit1CH3AutotuneActivate" aiAlarmHigher="AI_Unit1CH3AlarmHigher" aiUpRate="AI_Unit1CH3UpRate" aiDownRate="AI_Unit1CH3DownRate" aiAlarmLower="AI_Unit1CH3AlarmLower" aoUpRate="AO_Unit1CH3UpRate" aoDownRate="AO_Unit1CH3DownRate" aoEnableIn="AO_Unit1CH3EnableIn" aoAutotuneActivate="AO_Unit1CH3AutotuneActivate" aoPID_P="AO_Unit1CH3PID_P" aoPID_I="AO_Unit1CH3PID_I" aoPID_D="AO_Unit1CH3PID_D" aoSetPoint="AO_Unit1CH3SV" aoAlarmHigher="AO_Unit1CH3AlarmHigher" aoAlarmLower="AO_Unit1CH3AlarmLower" aioType="float" />
  1311. <IoHeaterBand id="GaslineHeaterUnit1CH4" display="GaslineHeaterUnit1CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH4SV" aiPV="AI_Unit1CH4PV" aiControlOutput="AI_Unit1CH4WorkingOutput" aiPID_P="AI_Unit1CH4PID_P" aiPID_I="AI_Unit1CH4PID_I" aiPID_D="AI_Unit1CH4PID_D" aiEnableIn="AI_Unit1CH4EnableIn" aiAutotuneActivate="AI_Unit1CH4AutotuneActivate" aiAlarmHigher="AI_Unit1CH4AlarmHigher" aiUpRate="AI_Unit1CH4UpRate" aiDownRate="AI_Unit1CH4DownRate" aiAlarmLower="AI_Unit1CH4AlarmLower" aoUpRate="AO_Unit1CH4UpRate" aoDownRate="AO_Unit1CH4DownRate" aoEnableIn="AO_Unit1CH4EnableIn" aoAutotuneActivate="AO_Unit1CH4AutotuneActivate" aoPID_P="AO_Unit1CH4PID_P" aoPID_I="AO_Unit1CH4PID_I" aoPID_D="AO_Unit1CH4PID_D" aoSetPoint="AO_Unit1CH4SV" aoAlarmHigher="AO_Unit1CH4AlarmHigher" aoAlarmLower="AO_Unit1CH4AlarmLower" aioType="float" />
  1312. <IoHeaterBand id="GaslineHeaterUnit1CH5" display="GaslineHeaterUnit1CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH5SV" aiPV="AI_Unit1CH5PV" aiControlOutput="AI_Unit1CH5WorkingOutput" aiPID_P="AI_Unit1CH5PID_P" aiPID_I="AI_Unit1CH5PID_I" aiPID_D="AI_Unit1CH5PID_D" aiEnableIn="AI_Unit1CH5EnableIn" aiAutotuneActivate="AI_Unit1CH5AutotuneActivate" aiAlarmHigher="AI_Unit1CH5AlarmHigher" aiUpRate="AI_Unit1CH5UpRate" aiDownRate="AI_Unit1CH5DownRate" aiAlarmLower="AI_Unit1CH5AlarmLower" aoUpRate="AO_Unit1CH5UpRate" aoDownRate="AO_Unit1CH5DownRate" aoEnableIn="AO_Unit1CH5EnableIn" aoAutotuneActivate="AO_Unit1CH5AutotuneActivate" aoPID_P="AO_Unit1CH5PID_P" aoPID_I="AO_Unit1CH5PID_I" aoPID_D="AO_Unit1CH5PID_D" aoSetPoint="AO_Unit1CH5SV" aoAlarmHigher="AO_Unit1CH5AlarmHigher" aoAlarmLower="AO_Unit1CH5AlarmLower" aioType="float" />
  1313. <IoHeaterBand id="GaslineHeaterUnit1CH6" display="GaslineHeaterUnit1CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH6SV" aiPV="AI_Unit1CH6PV" aiControlOutput="AI_Unit1CH6WorkingOutput" aiPID_P="AI_Unit1CH6PID_P" aiPID_I="AI_Unit1CH6PID_I" aiPID_D="AI_Unit1CH6PID_D" aiEnableIn="AI_Unit1CH6EnableIn" aiAutotuneActivate="AI_Unit1CH6AutotuneActivate" aiAlarmHigher="AI_Unit1CH6AlarmHigher" aiUpRate="AI_Unit1CH6UpRate" aiDownRate="AI_Unit1CH6DownRate" aiAlarmLower="AI_Unit1CH6AlarmLower" aoUpRate="AO_Unit1CH6UpRate" aoDownRate="AO_Unit1CH6DownRate" aoEnableIn="AO_Unit1CH6EnableIn" aoAutotuneActivate="AO_Unit1CH6AutotuneActivate" aoPID_P="AO_Unit1CH6PID_P" aoPID_I="AO_Unit1CH6PID_I" aoPID_D="AO_Unit1CH6PID_D" aoSetPoint="AO_Unit1CH6SV" aoAlarmHigher="AO_Unit1CH6AlarmHigher" aoAlarmLower="AO_Unit1CH6AlarmLower" aioType="float" />
  1314. <IoHeaterBand id="GaslineHeaterUnit1CH7" display="GaslineHeaterUnit1CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH7SV" aiPV="AI_Unit1CH7PV" aiControlOutput="AI_Unit1CH7WorkingOutput" aiPID_P="AI_Unit1CH7PID_P" aiPID_I="AI_Unit1CH7PID_I" aiPID_D="AI_Unit1CH7PID_D" aiEnableIn="AI_Unit1CH7EnableIn" aiAutotuneActivate="AI_Unit1CH7AutotuneActivate" aiAlarmHigher="AI_Unit1CH7AlarmHigher" aiUpRate="AI_Unit1CH7UpRate" aiDownRate="AI_Unit1CH7DownRate" aiAlarmLower="AI_Unit1CH7AlarmLower" aoUpRate="AO_Unit1CH7UpRate" aoDownRate="AO_Unit1CH7DownRate" aoEnableIn="AO_Unit1CH7EnableIn" aoAutotuneActivate="AO_Unit1CH7AutotuneActivate" aoPID_P="AO_Unit1CH7PID_P" aoPID_I="AO_Unit1CH7PID_I" aoPID_D="AO_Unit1CH7PID_D" aoSetPoint="AO_Unit1CH7SV" aoAlarmHigher="AO_Unit1CH7AlarmHigher" aoAlarmLower="AO_Unit1CH7AlarmLower" aioType="float" />
  1315. <IoHeaterBand id="GaslineHeaterUnit1CH8" display="GaslineHeaterUnit1CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH8SV" aiPV="AI_Unit1CH8PV" aiControlOutput="AI_Unit1CH8WorkingOutput" aiPID_P="AI_Unit1CH8PID_P" aiPID_I="AI_Unit1CH8PID_I" aiPID_D="AI_Unit1CH8PID_D" aiEnableIn="AI_Unit1CH8EnableIn" aiAutotuneActivate="AI_Unit1CH8AutotuneActivate" aiAlarmHigher="AI_Unit1CH8AlarmHigher" aiUpRate="AI_Unit1CH8UpRate" aiDownRate="AI_Unit1CH8DownRate" aiAlarmLower="AI_Unit1CH8AlarmLower" aoUpRate="AO_Unit1CH8UpRate" aoDownRate="AO_Unit1CH8DownRate" aoEnableIn="AO_Unit1CH8EnableIn" aoAutotuneActivate="AO_Unit1CH8AutotuneActivate" aoPID_P="AO_Unit1CH8PID_P" aoPID_I="AO_Unit1CH8PID_I" aoPID_D="AO_Unit1CH8PID_D" aoSetPoint="AO_Unit1CH8SV" aoAlarmHigher="AO_Unit1CH8AlarmHigher" aoAlarmLower="AO_Unit1CH8AlarmLower" aioType="float" />
  1316. <IoHeaterBand id="GaslineHeaterUnit1CH9" display="GaslineHeaterUnit1CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH9SV" aiPV="AI_Unit1CH9PV" aiControlOutput="AI_Unit1CH9WorkingOutput" aiPID_P="AI_Unit1CH9PID_P" aiPID_I="AI_Unit1CH9PID_I" aiPID_D="AI_Unit1CH9PID_D" aiEnableIn="AI_Unit1CH9EnableIn" aiAutotuneActivate="AI_Unit1CH9AutotuneActivate" aiAlarmHigher="AI_Unit1CH9AlarmHigher" aiUpRate="AI_Unit1CH9UpRate" aiDownRate="AI_Unit1CH9DownRate" aiAlarmLower="AI_Unit1CH9AlarmLower" aoUpRate="AO_Unit1CH9UpRate" aoDownRate="AO_Unit1CH9DownRate" aoEnableIn="AO_Unit1CH9EnableIn" aoAutotuneActivate="AO_Unit1CH9AutotuneActivate" aoPID_P="AO_Unit1CH9PID_P" aoPID_I="AO_Unit1CH9PID_I" aoPID_D="AO_Unit1CH9PID_D" aoSetPoint="AO_Unit1CH9SV" aoAlarmHigher="AO_Unit1CH9AlarmHigher" aoAlarmLower="AO_Unit1CH9AlarmLower" aioType="float" />
  1317. <IoHeaterBand id="GaslineHeaterUnit1CH10" display="GaslineHeaterUnit1CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH10SV" aiPV="AI_Unit1CH10PV" aiControlOutput="AI_Unit1CH10WorkingOutput" aiPID_P="AI_Unit1CH10PID_P" aiPID_I="AI_Unit1CH10PID_I" aiPID_D="AI_Unit1CH10PID_D" aiEnableIn="AI_Unit1CH10EnableIn" aiAutotuneActivate="AI_Unit1CH10AutotuneActivate" aiAlarmHigher="AI_Unit1CH10AlarmHigher" aiUpRate="AI_Unit1CH10UpRate" aiDownRate="AI_Unit1CH10DownRate" aiAlarmLower="AI_Unit1CH10AlarmLower" aoUpRate="AO_Unit1CH10UpRate" aoDownRate="AO_Unit1CH10DownRate" aoEnableIn="AO_Unit1CH10EnableIn" aoAutotuneActivate="AO_Unit1CH10AutotuneActivate" aoPID_P="AO_Unit1CH10PID_P" aoPID_I="AO_Unit1CH10PID_I" aoPID_D="AO_Unit1CH10PID_D" aoSetPoint="AO_Unit1CH10SV" aoAlarmHigher="AO_Unit1CH10AlarmHigher" aoAlarmLower="AO_Unit1CH10AlarmLower" aioType="float" />
  1318. <IoHeaterBand id="GaslineHeaterUnit1CH11" display="GaslineHeaterUnit1CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH11SV" aiPV="AI_Unit1CH11PV" aiControlOutput="AI_Unit1CH11WorkingOutput" aiPID_P="AI_Unit1CH11PID_P" aiPID_I="AI_Unit1CH11PID_I" aiPID_D="AI_Unit1CH11PID_D" aiEnableIn="AI_Unit1CH11EnableIn" aiAutotuneActivate="AI_Unit1CH11AutotuneActivate" aiAlarmHigher="AI_Unit1CH11AlarmHigher" aiUpRate="AI_Unit1CH11UpRate" aiDownRate="AI_Unit1CH11DownRate" aiAlarmLower="AI_Unit1CH11AlarmLower" aoUpRate="AO_Unit1CH11UpRate" aoDownRate="AO_Unit1CH11DownRate" aoEnableIn="AO_Unit1CH11EnableIn" aoAutotuneActivate="AO_Unit1CH11AutotuneActivate" aoPID_P="AO_Unit1CH11PID_P" aoPID_I="AO_Unit1CH11PID_I" aoPID_D="AO_Unit1CH11PID_D" aoSetPoint="AO_Unit1CH11SV" aoAlarmHigher="AO_Unit1CH11AlarmHigher" aoAlarmLower="AO_Unit1CH11AlarmLower" aioType="float" />
  1319. <IoHeaterBand id="GaslineHeaterUnit1CH12" display="GaslineHeaterUnit1CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH12SV" aiPV="AI_Unit1CH12PV" aiControlOutput="AI_Unit1CH12WorkingOutput" aiPID_P="AI_Unit1CH12PID_P" aiPID_I="AI_Unit1CH12PID_I" aiPID_D="AI_Unit1CH12PID_D" aiEnableIn="AI_Unit1CH12EnableIn" aiAutotuneActivate="AI_Unit1CH12AutotuneActivate" aiAlarmHigher="AI_Unit1CH12AlarmHigher" aiUpRate="AI_Unit1CH12UpRate" aiDownRate="AI_Unit1CH12DownRate" aiAlarmLower="AI_Unit1CH12AlarmLower" aoUpRate="AO_Unit1CH12UpRate" aoDownRate="AO_Unit1CH12DownRate" aoEnableIn="AO_Unit1CH12EnableIn" aoAutotuneActivate="AO_Unit1CH12AutotuneActivate" aoPID_P="AO_Unit1CH12PID_P" aoPID_I="AO_Unit1CH12PID_I" aoPID_D="AO_Unit1CH12PID_D" aoSetPoint="AO_Unit1CH12SV" aoAlarmHigher="AO_Unit1CH12AlarmHigher" aoAlarmLower="AO_Unit1CH12AlarmLower" aioType="float" />
  1320. <IoHeaterBand id="GaslineHeaterUnit1CH13" display="GaslineHeaterUnit1CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH13SV" aiPV="AI_Unit1CH13PV" aiControlOutput="AI_Unit1CH13WorkingOutput" aiPID_P="AI_Unit1CH13PID_P" aiPID_I="AI_Unit1CH13PID_I" aiPID_D="AI_Unit1CH13PID_D" aiEnableIn="AI_Unit1CH13EnableIn" aiAutotuneActivate="AI_Unit1CH13AutotuneActivate" aiAlarmHigher="AI_Unit1CH13AlarmHigher" aiUpRate="AI_Unit1CH13UpRate" aiDownRate="AI_Unit1CH13DownRate" aiAlarmLower="AI_Unit1CH13AlarmLower" aoUpRate="AO_Unit1CH13UpRate" aoDownRate="AO_Unit1CH13DownRate" aoEnableIn="AO_Unit1CH13EnableIn" aoAutotuneActivate="AO_Unit1CH13AutotuneActivate" aoPID_P="AO_Unit1CH13PID_P" aoPID_I="AO_Unit1CH13PID_I" aoPID_D="AO_Unit1CH13PID_D" aoSetPoint="AO_Unit1CH13SV" aoAlarmHigher="AO_Unit1CH13AlarmHigher" aoAlarmLower="AO_Unit1CH13AlarmLower" aioType="float" />
  1321. <IoHeaterBand id="GaslineHeaterUnit1CH14" display="GaslineHeaterUnit1CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH14SV" aiPV="AI_Unit1CH14PV" aiControlOutput="AI_Unit1CH14WorkingOutput" aiPID_P="AI_Unit1CH14PID_P" aiPID_I="AI_Unit1CH14PID_I" aiPID_D="AI_Unit1CH14PID_D" aiEnableIn="AI_Unit1CH14EnableIn" aiAutotuneActivate="AI_Unit1CH14AutotuneActivate" aiAlarmHigher="AI_Unit1CH14AlarmHigher" aiUpRate="AI_Unit1CH14UpRate" aiDownRate="AI_Unit1CH14DownRate" aiAlarmLower="AI_Unit1CH14AlarmLower" aoUpRate="AO_Unit1CH14UpRate" aoDownRate="AO_Unit1CH14DownRate" aoEnableIn="AO_Unit1CH14EnableIn" aoAutotuneActivate="AO_Unit1CH14AutotuneActivate" aoPID_P="AO_Unit1CH14PID_P" aoPID_I="AO_Unit1CH14PID_I" aoPID_D="AO_Unit1CH14PID_D" aoSetPoint="AO_Unit1CH14SV" aoAlarmHigher="AO_Unit1CH14AlarmHigher" aoAlarmLower="AO_Unit1CH14AlarmLower" aioType="float" />
  1322. <IoHeaterBand id="GaslineHeaterUnit1CH15" display="GaslineHeaterUnit1CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH15SV" aiPV="AI_Unit1CH15PV" aiControlOutput="AI_Unit1CH15WorkingOutput" aiPID_P="AI_Unit1CH15PID_P" aiPID_I="AI_Unit1CH15PID_I" aiPID_D="AI_Unit1CH15PID_D" aiEnableIn="AI_Unit1CH15EnableIn" aiAutotuneActivate="AI_Unit1CH15AutotuneActivate" aiAlarmHigher="AI_Unit1CH15AlarmHigher" aiUpRate="AI_Unit1CH15UpRate" aiDownRate="AI_Unit1CH15DownRate" aiAlarmLower="AI_Unit1CH15AlarmLower" aoUpRate="AO_Unit1CH15UpRate" aoDownRate="AO_Unit1CH15DownRate" aoEnableIn="AO_Unit1CH15EnableIn" aoAutotuneActivate="AO_Unit1CH15AutotuneActivate" aoPID_P="AO_Unit1CH15PID_P" aoPID_I="AO_Unit1CH15PID_I" aoPID_D="AO_Unit1CH15PID_D" aoSetPoint="AO_Unit1CH15SV" aoAlarmHigher="AO_Unit1CH15AlarmHigher" aoAlarmLower="AO_Unit1CH15AlarmLower" aioType="float" />
  1323. <IoHeaterBand id="GaslineHeaterUnit1CH16" display="GaslineHeaterUnit1CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit1CH16SV" aiPV="AI_Unit1CH16PV" aiControlOutput="AI_Unit1CH16WorkingOutput" aiPID_P="AI_Unit1CH16PID_P" aiPID_I="AI_Unit1CH16PID_I" aiPID_D="AI_Unit1CH16PID_D" aiEnableIn="AI_Unit1CH16EnableIn" aiAutotuneActivate="AI_Unit1CH16AutotuneActivate" aiAlarmHigher="AI_Unit1CH16AlarmHigher" aiUpRate="AI_Unit1CH16UpRate" aiDownRate="AI_Unit1CH16DownRate" aiAlarmLower="AI_Unit1CH16AlarmLower" aoUpRate="AO_Unit1CH16UpRate" aoDownRate="AO_Unit1CH16DownRate" aoEnableIn="AO_Unit1CH16EnableIn" aoAutotuneActivate="AO_Unit1CH16AutotuneActivate" aoPID_P="AO_Unit1CH16PID_P" aoPID_I="AO_Unit1CH16PID_I" aoPID_D="AO_Unit1CH16PID_D" aoSetPoint="AO_Unit1CH16SV" aoAlarmHigher="AO_Unit1CH16AlarmHigher" aoAlarmLower="AO_Unit1CH16AlarmLower" aioType="float" />
  1324. <IoHeaterBand id="GaslineHeaterUnit2CH1" display="GaslineHeaterUnit2CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH1SV" aiPV="AI_Unit2CH1PV" aiControlOutput="AI_Unit2CH1WorkingOutput" aiPID_P="AI_Unit2CH1PID_P" aiPID_I="AI_Unit2CH1PID_I" aiPID_D="AI_Unit2CH1PID_D" aiEnableIn="AI_Unit2CH1EnableIn" aiAutotuneActivate="AI_Unit2CH1AutotuneActivate" aiAlarmHigher="AI_Unit2CH1AlarmHigher" aiUpRate="AI_Unit2CH1UpRate" aiDownRate="AI_Unit2CH1DownRate" aiAlarmLower="AI_Unit2CH1AlarmLower" aoUpRate="AO_Unit2CH1UpRate" aoDownRate="AO_Unit2CH1DownRate" aoEnableIn="AO_Unit2CH1EnableIn" aoAutotuneActivate="AO_Unit2CH1AutotuneActivate" aoPID_P="AO_Unit2CH1PID_P" aoPID_I="AO_Unit2CH1PID_I" aoPID_D="AO_Unit2CH1PID_D" aoSetPoint="AO_Unit2CH1SV" aoAlarmHigher="AO_Unit2CH1AlarmHigher" aoAlarmLower="AO_Unit2CH1AlarmLower" aioType="float" />
  1325. <IoHeaterBand id="GaslineHeaterUnit2CH2" display="GaslineHeaterUnit2CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH2SV" aiPV="AI_Unit2CH2PV" aiControlOutput="AI_Unit2CH2WorkingOutput" aiPID_P="AI_Unit2CH2PID_P" aiPID_I="AI_Unit2CH2PID_I" aiPID_D="AI_Unit2CH2PID_D" aiEnableIn="AI_Unit2CH2EnableIn" aiAutotuneActivate="AI_Unit2CH2AutotuneActivate" aiAlarmHigher="AI_Unit2CH2AlarmHigher" aiUpRate="AI_Unit2CH2UpRate" aiDownRate="AI_Unit2CH2DownRate" aiAlarmLower="AI_Unit2CH2AlarmLower" aoUpRate="AO_Unit2CH2UpRate" aoDownRate="AO_Unit2CH2DownRate" aoEnableIn="AO_Unit2CH2EnableIn" aoAutotuneActivate="AO_Unit2CH2AutotuneActivate" aoPID_P="AO_Unit2CH2PID_P" aoPID_I="AO_Unit2CH2PID_I" aoPID_D="AO_Unit2CH2PID_D" aoSetPoint="AO_Unit2CH2SV" aoAlarmHigher="AO_Unit2CH2AlarmHigher" aoAlarmLower="AO_Unit2CH2AlarmLower" aioType="float" />
  1326. <IoHeaterBand id="GaslineHeaterUnit2CH3" display="GaslineHeaterUnit2CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH3SV" aiPV="AI_Unit2CH3PV" aiControlOutput="AI_Unit2CH3WorkingOutput" aiPID_P="AI_Unit2CH3PID_P" aiPID_I="AI_Unit2CH3PID_I" aiPID_D="AI_Unit2CH3PID_D" aiEnableIn="AI_Unit2CH3EnableIn" aiAutotuneActivate="AI_Unit2CH3AutotuneActivate" aiAlarmHigher="AI_Unit2CH3AlarmHigher" aiUpRate="AI_Unit2CH3UpRate" aiDownRate="AI_Unit2CH3DownRate" aiAlarmLower="AI_Unit2CH3AlarmLower" aoUpRate="AO_Unit2CH3UpRate" aoDownRate="AO_Unit2CH3DownRate" aoEnableIn="AO_Unit2CH3EnableIn" aoAutotuneActivate="AO_Unit2CH3AutotuneActivate" aoPID_P="AO_Unit2CH3PID_P" aoPID_I="AO_Unit2CH3PID_I" aoPID_D="AO_Unit2CH3PID_D" aoSetPoint="AO_Unit2CH3SV" aoAlarmHigher="AO_Unit2CH3AlarmHigher" aoAlarmLower="AO_Unit2CH3AlarmLower" aioType="float" />
  1327. <IoHeaterBand id="GaslineHeaterUnit2CH4" display="GaslineHeaterUnit2CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH4SV" aiPV="AI_Unit2CH4PV" aiControlOutput="AI_Unit2CH4WorkingOutput" aiPID_P="AI_Unit2CH4PID_P" aiPID_I="AI_Unit2CH4PID_I" aiPID_D="AI_Unit2CH4PID_D" aiEnableIn="AI_Unit2CH4EnableIn" aiAutotuneActivate="AI_Unit2CH4AutotuneActivate" aiAlarmHigher="AI_Unit2CH4AlarmHigher" aiUpRate="AI_Unit2CH4UpRate" aiDownRate="AI_Unit2CH4DownRate" aiAlarmLower="AI_Unit2CH4AlarmLower" aoUpRate="AO_Unit2CH4UpRate" aoDownRate="AO_Unit2CH4DownRate" aoEnableIn="AO_Unit2CH4EnableIn" aoAutotuneActivate="AO_Unit2CH4AutotuneActivate" aoPID_P="AO_Unit2CH4PID_P" aoPID_I="AO_Unit2CH4PID_I" aoPID_D="AO_Unit2CH4PID_D" aoSetPoint="AO_Unit2CH4SV" aoAlarmHigher="AO_Unit2CH4AlarmHigher" aoAlarmLower="AO_Unit2CH4AlarmLower" aioType="float" />
  1328. <IoHeaterBand id="GaslineHeaterUnit2CH5" display="GaslineHeaterUnit2CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH5SV" aiPV="AI_Unit2CH5PV" aiControlOutput="AI_Unit2CH5WorkingOutput" aiPID_P="AI_Unit2CH5PID_P" aiPID_I="AI_Unit2CH5PID_I" aiPID_D="AI_Unit2CH5PID_D" aiEnableIn="AI_Unit2CH5EnableIn" aiAutotuneActivate="AI_Unit2CH5AutotuneActivate" aiAlarmHigher="AI_Unit2CH5AlarmHigher" aiUpRate="AI_Unit2CH5UpRate" aiDownRate="AI_Unit2CH5DownRate" aiAlarmLower="AI_Unit2CH5AlarmLower" aoUpRate="AO_Unit2CH5UpRate" aoDownRate="AO_Unit2CH5DownRate" aoEnableIn="AO_Unit2CH5EnableIn" aoAutotuneActivate="AO_Unit2CH5AutotuneActivate" aoPID_P="AO_Unit2CH5PID_P" aoPID_I="AO_Unit2CH5PID_I" aoPID_D="AO_Unit2CH5PID_D" aoSetPoint="AO_Unit2CH5SV" aoAlarmHigher="AO_Unit2CH5AlarmHigher" aoAlarmLower="AO_Unit2CH5AlarmLower" aioType="float" />
  1329. <IoHeaterBand id="GaslineHeaterUnit2CH6" display="GaslineHeaterUnit2CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH6SV" aiPV="AI_Unit2CH6PV" aiControlOutput="AI_Unit2CH6WorkingOutput" aiPID_P="AI_Unit2CH6PID_P" aiPID_I="AI_Unit2CH6PID_I" aiPID_D="AI_Unit2CH6PID_D" aiEnableIn="AI_Unit2CH6EnableIn" aiAutotuneActivate="AI_Unit2CH6AutotuneActivate" aiAlarmHigher="AI_Unit2CH6AlarmHigher" aiUpRate="AI_Unit2CH6UpRate" aiDownRate="AI_Unit2CH6DownRate" aiAlarmLower="AI_Unit2CH6AlarmLower" aoUpRate="AO_Unit2CH6UpRate" aoDownRate="AO_Unit2CH6DownRate" aoEnableIn="AO_Unit2CH6EnableIn" aoAutotuneActivate="AO_Unit2CH6AutotuneActivate" aoPID_P="AO_Unit2CH6PID_P" aoPID_I="AO_Unit2CH6PID_I" aoPID_D="AO_Unit2CH6PID_D" aoSetPoint="AO_Unit2CH6SV" aoAlarmHigher="AO_Unit2CH6AlarmHigher" aoAlarmLower="AO_Unit2CH6AlarmLower" aioType="float" />
  1330. <IoHeaterBand id="GaslineHeaterUnit2CH7" display="GaslineHeaterUnit2CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH7SV" aiPV="AI_Unit2CH7PV" aiControlOutput="AI_Unit2CH7WorkingOutput" aiPID_P="AI_Unit2CH7PID_P" aiPID_I="AI_Unit2CH7PID_I" aiPID_D="AI_Unit2CH7PID_D" aiEnableIn="AI_Unit2CH7EnableIn" aiAutotuneActivate="AI_Unit2CH7AutotuneActivate" aiAlarmHigher="AI_Unit2CH7AlarmHigher" aiUpRate="AI_Unit2CH7UpRate" aiDownRate="AI_Unit2CH7DownRate" aiAlarmLower="AI_Unit2CH7AlarmLower" aoUpRate="AO_Unit2CH7UpRate" aoDownRate="AO_Unit2CH7DownRate" aoEnableIn="AO_Unit2CH7EnableIn" aoAutotuneActivate="AO_Unit2CH7AutotuneActivate" aoPID_P="AO_Unit2CH7PID_P" aoPID_I="AO_Unit2CH7PID_I" aoPID_D="AO_Unit2CH7PID_D" aoSetPoint="AO_Unit2CH7SV" aoAlarmHigher="AO_Unit2CH7AlarmHigher" aoAlarmLower="AO_Unit2CH7AlarmLower" aioType="float" />
  1331. <IoHeaterBand id="GaslineHeaterUnit2CH8" display="GaslineHeaterUnit2CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH8SV" aiPV="AI_Unit2CH8PV" aiControlOutput="AI_Unit2CH8WorkingOutput" aiPID_P="AI_Unit2CH8PID_P" aiPID_I="AI_Unit2CH8PID_I" aiPID_D="AI_Unit2CH8PID_D" aiEnableIn="AI_Unit2CH8EnableIn" aiAutotuneActivate="AI_Unit2CH8AutotuneActivate" aiAlarmHigher="AI_Unit2CH8AlarmHigher" aiUpRate="AI_Unit2CH8UpRate" aiDownRate="AI_Unit2CH8DownRate" aiAlarmLower="AI_Unit2CH8AlarmLower" aoUpRate="AO_Unit2CH8UpRate" aoDownRate="AO_Unit2CH8DownRate" aoEnableIn="AO_Unit2CH8EnableIn" aoAutotuneActivate="AO_Unit2CH8AutotuneActivate" aoPID_P="AO_Unit2CH8PID_P" aoPID_I="AO_Unit2CH8PID_I" aoPID_D="AO_Unit2CH8PID_D" aoSetPoint="AO_Unit2CH8SV" aoAlarmHigher="AO_Unit2CH8AlarmHigher" aoAlarmLower="AO_Unit2CH8AlarmLower" aioType="float" />
  1332. <IoHeaterBand id="GaslineHeaterUnit2CH9" display="GaslineHeaterUnit2CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH9SV" aiPV="AI_Unit2CH9PV" aiControlOutput="AI_Unit2CH9WorkingOutput" aiPID_P="AI_Unit2CH9PID_P" aiPID_I="AI_Unit2CH9PID_I" aiPID_D="AI_Unit2CH9PID_D" aiEnableIn="AI_Unit2CH9EnableIn" aiAutotuneActivate="AI_Unit2CH9AutotuneActivate" aiAlarmHigher="AI_Unit2CH9AlarmHigher" aiUpRate="AI_Unit2CH9UpRate" aiDownRate="AI_Unit2CH9DownRate" aiAlarmLower="AI_Unit2CH9AlarmLower" aoUpRate="AO_Unit2CH9UpRate" aoDownRate="AO_Unit2CH9DownRate" aoEnableIn="AO_Unit2CH9EnableIn" aoAutotuneActivate="AO_Unit2CH9AutotuneActivate" aoPID_P="AO_Unit2CH9PID_P" aoPID_I="AO_Unit2CH9PID_I" aoPID_D="AO_Unit2CH9PID_D" aoSetPoint="AO_Unit2CH9SV" aoAlarmHigher="AO_Unit2CH9AlarmHigher" aoAlarmLower="AO_Unit2CH9AlarmLower" aioType="float" />
  1333. <IoHeaterBand id="GaslineHeaterUnit2CH10" display="GaslineHeaterUnit2CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH10SV" aiPV="AI_Unit2CH10PV" aiControlOutput="AI_Unit2CH10WorkingOutput" aiPID_P="AI_Unit2CH10PID_P" aiPID_I="AI_Unit2CH10PID_I" aiPID_D="AI_Unit2CH10PID_D" aiEnableIn="AI_Unit2CH10EnableIn" aiAutotuneActivate="AI_Unit2CH10AutotuneActivate" aiAlarmHigher="AI_Unit2CH10AlarmHigher" aiUpRate="AI_Unit2CH10UpRate" aiDownRate="AI_Unit2CH10DownRate" aiAlarmLower="AI_Unit2CH10AlarmLower" aoUpRate="AO_Unit2CH10UpRate" aoDownRate="AO_Unit2CH10DownRate" aoEnableIn="AO_Unit2CH10EnableIn" aoAutotuneActivate="AO_Unit2CH10AutotuneActivate" aoPID_P="AO_Unit2CH10PID_P" aoPID_I="AO_Unit2CH10PID_I" aoPID_D="AO_Unit2CH10PID_D" aoSetPoint="AO_Unit2CH10SV" aoAlarmHigher="AO_Unit2CH10AlarmHigher" aoAlarmLower="AO_Unit2CH10AlarmLower" aioType="float" />
  1334. <IoHeaterBand id="GaslineHeaterUnit2CH11" display="GaslineHeaterUnit2CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH11SV" aiPV="AI_Unit2CH11PV" aiControlOutput="AI_Unit2CH11WorkingOutput" aiPID_P="AI_Unit2CH11PID_P" aiPID_I="AI_Unit2CH11PID_I" aiPID_D="AI_Unit2CH11PID_D" aiEnableIn="AI_Unit2CH11EnableIn" aiAutotuneActivate="AI_Unit2CH11AutotuneActivate" aiAlarmHigher="AI_Unit2CH11AlarmHigher" aiUpRate="AI_Unit2CH11UpRate" aiDownRate="AI_Unit2CH11DownRate" aiAlarmLower="AI_Unit2CH11AlarmLower" aoUpRate="AO_Unit2CH11UpRate" aoDownRate="AO_Unit2CH11DownRate" aoEnableIn="AO_Unit2CH11EnableIn" aoAutotuneActivate="AO_Unit2CH11AutotuneActivate" aoPID_P="AO_Unit2CH11PID_P" aoPID_I="AO_Unit2CH11PID_I" aoPID_D="AO_Unit2CH11PID_D" aoSetPoint="AO_Unit2CH11SV" aoAlarmHigher="AO_Unit2CH11AlarmHigher" aoAlarmLower="AO_Unit2CH11AlarmLower" aioType="float" />
  1335. <IoHeaterBand id="GaslineHeaterUnit2CH12" display="GaslineHeaterUnit2CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH12SV" aiPV="AI_Unit2CH12PV" aiControlOutput="AI_Unit2CH12WorkingOutput" aiPID_P="AI_Unit2CH12PID_P" aiPID_I="AI_Unit2CH12PID_I" aiPID_D="AI_Unit2CH12PID_D" aiEnableIn="AI_Unit2CH12EnableIn" aiAutotuneActivate="AI_Unit2CH12AutotuneActivate" aiAlarmHigher="AI_Unit2CH12AlarmHigher" aiUpRate="AI_Unit2CH12UpRate" aiDownRate="AI_Unit2CH12DownRate" aiAlarmLower="AI_Unit2CH12AlarmLower" aoUpRate="AO_Unit2CH12UpRate" aoDownRate="AO_Unit2CH12DownRate" aoEnableIn="AO_Unit2CH12EnableIn" aoAutotuneActivate="AO_Unit2CH12AutotuneActivate" aoPID_P="AO_Unit2CH12PID_P" aoPID_I="AO_Unit2CH12PID_I" aoPID_D="AO_Unit2CH12PID_D" aoSetPoint="AO_Unit2CH12SV" aoAlarmHigher="AO_Unit2CH12AlarmHigher" aoAlarmLower="AO_Unit2CH12AlarmLower" aioType="float" />
  1336. <IoHeaterBand id="GaslineHeaterUnit2CH13" display="GaslineHeaterUnit2CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH13SV" aiPV="AI_Unit2CH13PV" aiControlOutput="AI_Unit2CH13WorkingOutput" aiPID_P="AI_Unit2CH13PID_P" aiPID_I="AI_Unit2CH13PID_I" aiPID_D="AI_Unit2CH13PID_D" aiEnableIn="AI_Unit2CH13EnableIn" aiAutotuneActivate="AI_Unit2CH13AutotuneActivate" aiAlarmHigher="AI_Unit2CH13AlarmHigher" aiUpRate="AI_Unit2CH13UpRate" aiDownRate="AI_Unit2CH13DownRate" aiAlarmLower="AI_Unit2CH13AlarmLower" aoUpRate="AO_Unit2CH13UpRate" aoDownRate="AO_Unit2CH13DownRate" aoEnableIn="AO_Unit2CH13EnableIn" aoAutotuneActivate="AO_Unit2CH13AutotuneActivate" aoPID_P="AO_Unit2CH13PID_P" aoPID_I="AO_Unit2CH13PID_I" aoPID_D="AO_Unit2CH13PID_D" aoSetPoint="AO_Unit2CH13SV" aoAlarmHigher="AO_Unit2CH13AlarmHigher" aoAlarmLower="AO_Unit2CH13AlarmLower" aioType="float" />
  1337. <IoHeaterBand id="GaslineHeaterUnit2CH14" display="GaslineHeaterUnit2CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH14SV" aiPV="AI_Unit2CH14PV" aiControlOutput="AI_Unit2CH14WorkingOutput" aiPID_P="AI_Unit2CH14PID_P" aiPID_I="AI_Unit2CH14PID_I" aiPID_D="AI_Unit2CH14PID_D" aiEnableIn="AI_Unit2CH14EnableIn" aiAutotuneActivate="AI_Unit2CH14AutotuneActivate" aiAlarmHigher="AI_Unit2CH14AlarmHigher" aiUpRate="AI_Unit2CH14UpRate" aiDownRate="AI_Unit2CH14DownRate" aiAlarmLower="AI_Unit2CH14AlarmLower" aoUpRate="AO_Unit2CH14UpRate" aoDownRate="AO_Unit2CH14DownRate" aoEnableIn="AO_Unit2CH14EnableIn" aoAutotuneActivate="AO_Unit2CH14AutotuneActivate" aoPID_P="AO_Unit2CH14PID_P" aoPID_I="AO_Unit2CH14PID_I" aoPID_D="AO_Unit2CH14PID_D" aoSetPoint="AO_Unit2CH14SV" aoAlarmHigher="AO_Unit2CH14AlarmHigher" aoAlarmLower="AO_Unit2CH14AlarmLower" aioType="float" />
  1338. <IoHeaterBand id="GaslineHeaterUnit2CH15" display="GaslineHeaterUnit2CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH15SV" aiPV="AI_Unit2CH15PV" aiControlOutput="AI_Unit2CH15WorkingOutput" aiPID_P="AI_Unit2CH15PID_P" aiPID_I="AI_Unit2CH15PID_I" aiPID_D="AI_Unit2CH15PID_D" aiEnableIn="AI_Unit2CH15EnableIn" aiAutotuneActivate="AI_Unit2CH15AutotuneActivate" aiAlarmHigher="AI_Unit2CH15AlarmHigher" aiUpRate="AI_Unit2CH15UpRate" aiDownRate="AI_Unit2CH15DownRate" aiAlarmLower="AI_Unit2CH15AlarmLower" aoUpRate="AO_Unit2CH15UpRate" aoDownRate="AO_Unit2CH15DownRate" aoEnableIn="AO_Unit2CH15EnableIn" aoAutotuneActivate="AO_Unit2CH15AutotuneActivate" aoPID_P="AO_Unit2CH15PID_P" aoPID_I="AO_Unit2CH15PID_I" aoPID_D="AO_Unit2CH15PID_D" aoSetPoint="AO_Unit2CH15SV" aoAlarmHigher="AO_Unit2CH15AlarmHigher" aoAlarmLower="AO_Unit2CH15AlarmLower" aioType="float" />
  1339. <IoHeaterBand id="GaslineHeaterUnit2CH16" display="GaslineHeaterUnit2CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit2CH16SV" aiPV="AI_Unit2CH16PV" aiControlOutput="AI_Unit2CH16WorkingOutput" aiPID_P="AI_Unit2CH16PID_P" aiPID_I="AI_Unit2CH16PID_I" aiPID_D="AI_Unit2CH16PID_D" aiEnableIn="AI_Unit2CH16EnableIn" aiAutotuneActivate="AI_Unit2CH16AutotuneActivate" aiAlarmHigher="AI_Unit2CH16AlarmHigher" aiUpRate="AI_Unit2CH16UpRate" aiDownRate="AI_Unit2CH16DownRate" aiAlarmLower="AI_Unit2CH16AlarmLower" aoUpRate="AO_Unit2CH16UpRate" aoDownRate="AO_Unit2CH16DownRate" aoEnableIn="AO_Unit2CH16EnableIn" aoAutotuneActivate="AO_Unit2CH16AutotuneActivate" aoPID_P="AO_Unit2CH16PID_P" aoPID_I="AO_Unit2CH16PID_I" aoPID_D="AO_Unit2CH16PID_D" aoSetPoint="AO_Unit2CH16SV" aoAlarmHigher="AO_Unit2CH16AlarmHigher" aoAlarmLower="AO_Unit2CH16AlarmLower" aioType="float" />
  1340. <IoHeaterBand id="GaslineHeaterUnit3CH1" display="GaslineHeaterUnit3CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH1SV" aiPV="AI_Unit3CH1PV" aiControlOutput="AI_Unit3CH1WorkingOutput" aiPID_P="AI_Unit3CH1PID_P" aiPID_I="AI_Unit3CH1PID_I" aiPID_D="AI_Unit3CH1PID_D" aiEnableIn="AI_Unit3CH1EnableIn" aiAutotuneActivate="AI_Unit3CH1AutotuneActivate" aiAlarmHigher="AI_Unit3CH1AlarmHigher" aiUpRate="AI_Unit3CH1UpRate" aiDownRate="AI_Unit3CH1DownRate" aiAlarmLower="AI_Unit3CH1AlarmLower" aoUpRate="AO_Unit3CH1UpRate" aoDownRate="AO_Unit3CH1DownRate" aoEnableIn="AO_Unit3CH1EnableIn" aoAutotuneActivate="AO_Unit3CH1AutotuneActivate" aoPID_P="AO_Unit3CH1PID_P" aoPID_I="AO_Unit3CH1PID_I" aoPID_D="AO_Unit3CH1PID_D" aoSetPoint="AO_Unit3CH1SV" aoAlarmHigher="AO_Unit3CH1AlarmHigher" aoAlarmLower="AO_Unit3CH1AlarmLower" aioType="float" />
  1341. <IoHeaterBand id="GaslineHeaterUnit3CH2" display="GaslineHeaterUnit3CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH2SV" aiPV="AI_Unit3CH2PV" aiControlOutput="AI_Unit3CH2WorkingOutput" aiPID_P="AI_Unit3CH2PID_P" aiPID_I="AI_Unit3CH2PID_I" aiPID_D="AI_Unit3CH2PID_D" aiEnableIn="AI_Unit3CH2EnableIn" aiAutotuneActivate="AI_Unit3CH2AutotuneActivate" aiAlarmHigher="AI_Unit3CH2AlarmHigher" aiUpRate="AI_Unit3CH2UpRate" aiDownRate="AI_Unit3CH2DownRate" aiAlarmLower="AI_Unit3CH2AlarmLower" aoUpRate="AO_Unit3CH2UpRate" aoDownRate="AO_Unit3CH2DownRate" aoEnableIn="AO_Unit3CH2EnableIn" aoAutotuneActivate="AO_Unit3CH2AutotuneActivate" aoPID_P="AO_Unit3CH2PID_P" aoPID_I="AO_Unit3CH2PID_I" aoPID_D="AO_Unit3CH2PID_D" aoSetPoint="AO_Unit3CH2SV" aoAlarmHigher="AO_Unit3CH2AlarmHigher" aoAlarmLower="AO_Unit3CH2AlarmLower" aioType="float" />
  1342. <IoHeaterBand id="GaslineHeaterUnit3CH3" display="GaslineHeaterUnit3CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH3SV" aiPV="AI_Unit3CH3PV" aiControlOutput="AI_Unit3CH3WorkingOutput" aiPID_P="AI_Unit3CH3PID_P" aiPID_I="AI_Unit3CH3PID_I" aiPID_D="AI_Unit3CH3PID_D" aiEnableIn="AI_Unit3CH3EnableIn" aiAutotuneActivate="AI_Unit3CH3AutotuneActivate" aiAlarmHigher="AI_Unit3CH3AlarmHigher" aiUpRate="AI_Unit3CH3UpRate" aiDownRate="AI_Unit3CH3DownRate" aiAlarmLower="AI_Unit3CH3AlarmLower" aoUpRate="AO_Unit3CH3UpRate" aoDownRate="AO_Unit3CH3DownRate" aoEnableIn="AO_Unit3CH3EnableIn" aoAutotuneActivate="AO_Unit3CH3AutotuneActivate" aoPID_P="AO_Unit3CH3PID_P" aoPID_I="AO_Unit3CH3PID_I" aoPID_D="AO_Unit3CH3PID_D" aoSetPoint="AO_Unit3CH3SV" aoAlarmHigher="AO_Unit3CH3AlarmHigher" aoAlarmLower="AO_Unit3CH3AlarmLower" aioType="float" />
  1343. <IoHeaterBand id="GaslineHeaterUnit3CH4" display="GaslineHeaterUnit3CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH4SV" aiPV="AI_Unit3CH4PV" aiControlOutput="AI_Unit3CH4WorkingOutput" aiPID_P="AI_Unit3CH4PID_P" aiPID_I="AI_Unit3CH4PID_I" aiPID_D="AI_Unit3CH4PID_D" aiEnableIn="AI_Unit3CH4EnableIn" aiAutotuneActivate="AI_Unit3CH4AutotuneActivate" aiAlarmHigher="AI_Unit3CH4AlarmHigher" aiUpRate="AI_Unit3CH4UpRate" aiDownRate="AI_Unit3CH4DownRate" aiAlarmLower="AI_Unit3CH4AlarmLower" aoUpRate="AO_Unit3CH4UpRate" aoDownRate="AO_Unit3CH4DownRate" aoEnableIn="AO_Unit3CH4EnableIn" aoAutotuneActivate="AO_Unit3CH4AutotuneActivate" aoPID_P="AO_Unit3CH4PID_P" aoPID_I="AO_Unit3CH4PID_I" aoPID_D="AO_Unit3CH4PID_D" aoSetPoint="AO_Unit3CH4SV" aoAlarmHigher="AO_Unit3CH4AlarmHigher" aoAlarmLower="AO_Unit3CH4AlarmLower" aioType="float" />
  1344. <IoHeaterBand id="GaslineHeaterUnit3CH5" display="GaslineHeaterUnit3CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH5SV" aiPV="AI_Unit3CH5PV" aiControlOutput="AI_Unit3CH5WorkingOutput" aiPID_P="AI_Unit3CH5PID_P" aiPID_I="AI_Unit3CH5PID_I" aiPID_D="AI_Unit3CH5PID_D" aiEnableIn="AI_Unit3CH5EnableIn" aiAutotuneActivate="AI_Unit3CH5AutotuneActivate" aiAlarmHigher="AI_Unit3CH5AlarmHigher" aiUpRate="AI_Unit3CH5UpRate" aiDownRate="AI_Unit3CH5DownRate" aiAlarmLower="AI_Unit3CH5AlarmLower" aoUpRate="AO_Unit3CH5UpRate" aoDownRate="AO_Unit3CH5DownRate" aoEnableIn="AO_Unit3CH5EnableIn" aoAutotuneActivate="AO_Unit3CH5AutotuneActivate" aoPID_P="AO_Unit3CH5PID_P" aoPID_I="AO_Unit3CH5PID_I" aoPID_D="AO_Unit3CH5PID_D" aoSetPoint="AO_Unit3CH5SV" aoAlarmHigher="AO_Unit3CH5AlarmHigher" aoAlarmLower="AO_Unit3CH5AlarmLower" aioType="float" />
  1345. <IoHeaterBand id="GaslineHeaterUnit3CH6" display="GaslineHeaterUnit3CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH6SV" aiPV="AI_Unit3CH6PV" aiControlOutput="AI_Unit3CH6WorkingOutput" aiPID_P="AI_Unit3CH6PID_P" aiPID_I="AI_Unit3CH6PID_I" aiPID_D="AI_Unit3CH6PID_D" aiEnableIn="AI_Unit3CH6EnableIn" aiAutotuneActivate="AI_Unit3CH6AutotuneActivate" aiAlarmHigher="AI_Unit3CH6AlarmHigher" aiUpRate="AI_Unit3CH6UpRate" aiDownRate="AI_Unit3CH6DownRate" aiAlarmLower="AI_Unit3CH6AlarmLower" aoUpRate="AO_Unit3CH6UpRate" aoDownRate="AO_Unit3CH6DownRate" aoEnableIn="AO_Unit3CH6EnableIn" aoAutotuneActivate="AO_Unit3CH6AutotuneActivate" aoPID_P="AO_Unit3CH6PID_P" aoPID_I="AO_Unit3CH6PID_I" aoPID_D="AO_Unit3CH6PID_D" aoSetPoint="AO_Unit3CH6SV" aoAlarmHigher="AO_Unit3CH6AlarmHigher" aoAlarmLower="AO_Unit3CH6AlarmLower" aioType="float" />
  1346. <IoHeaterBand id="GaslineHeaterUnit3CH7" display="GaslineHeaterUnit3CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH7SV" aiPV="AI_Unit3CH7PV" aiControlOutput="AI_Unit3CH7WorkingOutput" aiPID_P="AI_Unit3CH7PID_P" aiPID_I="AI_Unit3CH7PID_I" aiPID_D="AI_Unit3CH7PID_D" aiEnableIn="AI_Unit3CH7EnableIn" aiAutotuneActivate="AI_Unit3CH7AutotuneActivate" aiAlarmHigher="AI_Unit3CH7AlarmHigher" aiUpRate="AI_Unit3CH7UpRate" aiDownRate="AI_Unit3CH7DownRate" aiAlarmLower="AI_Unit3CH7AlarmLower" aoUpRate="AO_Unit3CH7UpRate" aoDownRate="AO_Unit3CH7DownRate" aoEnableIn="AO_Unit3CH7EnableIn" aoAutotuneActivate="AO_Unit3CH7AutotuneActivate" aoPID_P="AO_Unit3CH7PID_P" aoPID_I="AO_Unit3CH7PID_I" aoPID_D="AO_Unit3CH7PID_D" aoSetPoint="AO_Unit3CH7SV" aoAlarmHigher="AO_Unit3CH7AlarmHigher" aoAlarmLower="AO_Unit3CH7AlarmLower" aioType="float" />
  1347. <IoHeaterBand id="GaslineHeaterUnit3CH8" display="GaslineHeaterUnit3CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH8SV" aiPV="AI_Unit3CH8PV" aiControlOutput="AI_Unit3CH8WorkingOutput" aiPID_P="AI_Unit3CH8PID_P" aiPID_I="AI_Unit3CH8PID_I" aiPID_D="AI_Unit3CH8PID_D" aiEnableIn="AI_Unit3CH8EnableIn" aiAutotuneActivate="AI_Unit3CH8AutotuneActivate" aiAlarmHigher="AI_Unit3CH8AlarmHigher" aiUpRate="AI_Unit3CH8UpRate" aiDownRate="AI_Unit3CH8DownRate" aiAlarmLower="AI_Unit3CH8AlarmLower" aoUpRate="AO_Unit3CH8UpRate" aoDownRate="AO_Unit3CH8DownRate" aoEnableIn="AO_Unit3CH8EnableIn" aoAutotuneActivate="AO_Unit3CH8AutotuneActivate" aoPID_P="AO_Unit3CH8PID_P" aoPID_I="AO_Unit3CH8PID_I" aoPID_D="AO_Unit3CH8PID_D" aoSetPoint="AO_Unit3CH8SV" aoAlarmHigher="AO_Unit3CH8AlarmHigher" aoAlarmLower="AO_Unit3CH8AlarmLower" aioType="float" />
  1348. <IoHeaterBand id="GaslineHeaterUnit3CH9" display="GaslineHeaterUnit3CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH9SV" aiPV="AI_Unit3CH9PV" aiControlOutput="AI_Unit3CH9WorkingOutput" aiPID_P="AI_Unit3CH9PID_P" aiPID_I="AI_Unit3CH9PID_I" aiPID_D="AI_Unit3CH9PID_D" aiEnableIn="AI_Unit3CH9EnableIn" aiAutotuneActivate="AI_Unit3CH9AutotuneActivate" aiAlarmHigher="AI_Unit3CH9AlarmHigher" aiUpRate="AI_Unit3CH9UpRate" aiDownRate="AI_Unit3CH9DownRate" aiAlarmLower="AI_Unit3CH9AlarmLower" aoUpRate="AO_Unit3CH9UpRate" aoDownRate="AO_Unit3CH9DownRate" aoEnableIn="AO_Unit3CH9EnableIn" aoAutotuneActivate="AO_Unit3CH9AutotuneActivate" aoPID_P="AO_Unit3CH9PID_P" aoPID_I="AO_Unit3CH9PID_I" aoPID_D="AO_Unit3CH9PID_D" aoSetPoint="AO_Unit3CH9SV" aoAlarmHigher="AO_Unit3CH9AlarmHigher" aoAlarmLower="AO_Unit3CH9AlarmLower" aioType="float" />
  1349. <IoHeaterBand id="GaslineHeaterUnit3CH10" display="GaslineHeaterUnit3CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH10SV" aiPV="AI_Unit3CH10PV" aiControlOutput="AI_Unit3CH10WorkingOutput" aiPID_P="AI_Unit3CH10PID_P" aiPID_I="AI_Unit3CH10PID_I" aiPID_D="AI_Unit3CH10PID_D" aiEnableIn="AI_Unit3CH10EnableIn" aiAutotuneActivate="AI_Unit3CH10AutotuneActivate" aiAlarmHigher="AI_Unit3CH10AlarmHigher" aiUpRate="AI_Unit3CH10UpRate" aiDownRate="AI_Unit3CH10DownRate" aiAlarmLower="AI_Unit3CH10AlarmLower" aoUpRate="AO_Unit3CH10UpRate" aoDownRate="AO_Unit3CH10DownRate" aoEnableIn="AO_Unit3CH10EnableIn" aoAutotuneActivate="AO_Unit3CH10AutotuneActivate" aoPID_P="AO_Unit3CH10PID_P" aoPID_I="AO_Unit3CH10PID_I" aoPID_D="AO_Unit3CH10PID_D" aoSetPoint="AO_Unit3CH10SV" aoAlarmHigher="AO_Unit3CH10AlarmHigher" aoAlarmLower="AO_Unit3CH10AlarmLower" aioType="float" />
  1350. <IoHeaterBand id="GaslineHeaterUnit3CH11" display="GaslineHeaterUnit3CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH11SV" aiPV="AI_Unit3CH11PV" aiControlOutput="AI_Unit3CH11WorkingOutput" aiPID_P="AI_Unit3CH11PID_P" aiPID_I="AI_Unit3CH11PID_I" aiPID_D="AI_Unit3CH11PID_D" aiEnableIn="AI_Unit3CH11EnableIn" aiAutotuneActivate="AI_Unit3CH11AutotuneActivate" aiAlarmHigher="AI_Unit3CH11AlarmHigher" aiUpRate="AI_Unit3CH11UpRate" aiDownRate="AI_Unit3CH11DownRate" aiAlarmLower="AI_Unit3CH11AlarmLower" aoUpRate="AO_Unit3CH11UpRate" aoDownRate="AO_Unit3CH11DownRate" aoEnableIn="AO_Unit3CH11EnableIn" aoAutotuneActivate="AO_Unit3CH11AutotuneActivate" aoPID_P="AO_Unit3CH11PID_P" aoPID_I="AO_Unit3CH11PID_I" aoPID_D="AO_Unit3CH11PID_D" aoSetPoint="AO_Unit3CH11SV" aoAlarmHigher="AO_Unit3CH11AlarmHigher" aoAlarmLower="AO_Unit3CH11AlarmLower" aioType="float" />
  1351. <IoHeaterBand id="GaslineHeaterUnit3CH12" display="GaslineHeaterUnit3CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH12SV" aiPV="AI_Unit3CH12PV" aiControlOutput="AI_Unit3CH12WorkingOutput" aiPID_P="AI_Unit3CH12PID_P" aiPID_I="AI_Unit3CH12PID_I" aiPID_D="AI_Unit3CH12PID_D" aiEnableIn="AI_Unit3CH12EnableIn" aiAutotuneActivate="AI_Unit3CH12AutotuneActivate" aiAlarmHigher="AI_Unit3CH12AlarmHigher" aiUpRate="AI_Unit3CH12UpRate" aiDownRate="AI_Unit3CH12DownRate" aiAlarmLower="AI_Unit3CH12AlarmLower" aoUpRate="AO_Unit3CH12UpRate" aoDownRate="AO_Unit3CH12DownRate" aoEnableIn="AO_Unit3CH12EnableIn" aoAutotuneActivate="AO_Unit3CH12AutotuneActivate" aoPID_P="AO_Unit3CH12PID_P" aoPID_I="AO_Unit3CH12PID_I" aoPID_D="AO_Unit3CH12PID_D" aoSetPoint="AO_Unit3CH12SV" aoAlarmHigher="AO_Unit3CH12AlarmHigher" aoAlarmLower="AO_Unit3CH12AlarmLower" aioType="float" />
  1352. <IoHeaterBand id="GaslineHeaterUnit3CH13" display="GaslineHeaterUnit3CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH13SV" aiPV="AI_Unit3CH13PV" aiControlOutput="AI_Unit3CH13WorkingOutput" aiPID_P="AI_Unit3CH13PID_P" aiPID_I="AI_Unit3CH13PID_I" aiPID_D="AI_Unit3CH13PID_D" aiEnableIn="AI_Unit3CH13EnableIn" aiAutotuneActivate="AI_Unit3CH13AutotuneActivate" aiAlarmHigher="AI_Unit3CH13AlarmHigher" aiUpRate="AI_Unit3CH13UpRate" aiDownRate="AI_Unit3CH13DownRate" aiAlarmLower="AI_Unit3CH13AlarmLower" aoUpRate="AO_Unit3CH13UpRate" aoDownRate="AO_Unit3CH13DownRate" aoEnableIn="AO_Unit3CH13EnableIn" aoAutotuneActivate="AO_Unit3CH13AutotuneActivate" aoPID_P="AO_Unit3CH13PID_P" aoPID_I="AO_Unit3CH13PID_I" aoPID_D="AO_Unit3CH13PID_D" aoSetPoint="AO_Unit3CH13SV" aoAlarmHigher="AO_Unit3CH13AlarmHigher" aoAlarmLower="AO_Unit3CH13AlarmLower" aioType="float" />
  1353. <IoHeaterBand id="GaslineHeaterUnit3CH14" display="GaslineHeaterUnit3CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH14SV" aiPV="AI_Unit3CH14PV" aiControlOutput="AI_Unit3CH14WorkingOutput" aiPID_P="AI_Unit3CH14PID_P" aiPID_I="AI_Unit3CH14PID_I" aiPID_D="AI_Unit3CH14PID_D" aiEnableIn="AI_Unit3CH14EnableIn" aiAutotuneActivate="AI_Unit3CH14AutotuneActivate" aiAlarmHigher="AI_Unit3CH14AlarmHigher" aiUpRate="AI_Unit3CH14UpRate" aiDownRate="AI_Unit3CH14DownRate" aiAlarmLower="AI_Unit3CH14AlarmLower" aoUpRate="AO_Unit3CH14UpRate" aoDownRate="AO_Unit3CH14DownRate" aoEnableIn="AO_Unit3CH14EnableIn" aoAutotuneActivate="AO_Unit3CH14AutotuneActivate" aoPID_P="AO_Unit3CH14PID_P" aoPID_I="AO_Unit3CH14PID_I" aoPID_D="AO_Unit3CH14PID_D" aoSetPoint="AO_Unit3CH14SV" aoAlarmHigher="AO_Unit3CH14AlarmHigher" aoAlarmLower="AO_Unit3CH14AlarmLower" aioType="float" />
  1354. <IoHeaterBand id="GaslineHeaterUnit3CH15" display="GaslineHeaterUnit3CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH15SV" aiPV="AI_Unit3CH15PV" aiControlOutput="AI_Unit3CH15WorkingOutput" aiPID_P="AI_Unit3CH15PID_P" aiPID_I="AI_Unit3CH15PID_I" aiPID_D="AI_Unit3CH15PID_D" aiEnableIn="AI_Unit3CH15EnableIn" aiAutotuneActivate="AI_Unit3CH15AutotuneActivate" aiAlarmHigher="AI_Unit3CH15AlarmHigher" aiUpRate="AI_Unit3CH15UpRate" aiDownRate="AI_Unit3CH15DownRate" aiAlarmLower="AI_Unit3CH15AlarmLower" aoUpRate="AO_Unit3CH15UpRate" aoDownRate="AO_Unit3CH15DownRate" aoEnableIn="AO_Unit3CH15EnableIn" aoAutotuneActivate="AO_Unit3CH15AutotuneActivate" aoPID_P="AO_Unit3CH15PID_P" aoPID_I="AO_Unit3CH15PID_I" aoPID_D="AO_Unit3CH15PID_D" aoSetPoint="AO_Unit3CH15SV" aoAlarmHigher="AO_Unit3CH15AlarmHigher" aoAlarmLower="AO_Unit3CH15AlarmLower" aioType="float" />
  1355. <IoHeaterBand id="GaslineHeaterUnit3CH16" display="GaslineHeaterUnit3CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit3CH16SV" aiPV="AI_Unit3CH16PV" aiControlOutput="AI_Unit3CH16WorkingOutput" aiPID_P="AI_Unit3CH16PID_P" aiPID_I="AI_Unit3CH16PID_I" aiPID_D="AI_Unit3CH16PID_D" aiEnableIn="AI_Unit3CH16EnableIn" aiAutotuneActivate="AI_Unit3CH16AutotuneActivate" aiAlarmHigher="AI_Unit3CH16AlarmHigher" aiUpRate="AI_Unit3CH16UpRate" aiDownRate="AI_Unit3CH16DownRate" aiAlarmLower="AI_Unit3CH16AlarmLower" aoUpRate="AO_Unit3CH16UpRate" aoDownRate="AO_Unit3CH16DownRate" aoEnableIn="AO_Unit3CH16EnableIn" aoAutotuneActivate="AO_Unit3CH16AutotuneActivate" aoPID_P="AO_Unit3CH16PID_P" aoPID_I="AO_Unit3CH16PID_I" aoPID_D="AO_Unit3CH16PID_D" aoSetPoint="AO_Unit3CH16SV" aoAlarmHigher="AO_Unit3CH16AlarmHigher" aoAlarmLower="AO_Unit3CH16AlarmLower" aioType="float" />
  1356. <IoHeaterBand id="GaslineHeaterUnit4CH1" display="GaslineHeaterUnit4CH1" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH1SV" aiPV="AI_Unit4CH1PV" aiControlOutput="AI_Unit4CH1WorkingOutput" aiPID_P="AI_Unit4CH1PID_P" aiPID_I="AI_Unit4CH1PID_I" aiPID_D="AI_Unit4CH1PID_D" aiEnableIn="AI_Unit4CH1EnableIn" aiAutotuneActivate="AI_Unit4CH1AutotuneActivate" aiAlarmHigher="AI_Unit4CH1AlarmHigher" aiUpRate="AI_Unit4CH1UpRate" aiDownRate="AI_Unit4CH1DownRate" aiAlarmLower="AI_Unit4CH1AlarmLower" aoUpRate="AO_Unit4CH1UpRate" aoDownRate="AO_Unit4CH1DownRate" aoEnableIn="AO_Unit4CH1EnableIn" aoAutotuneActivate="AO_Unit4CH1AutotuneActivate" aoPID_P="AO_Unit4CH1PID_P" aoPID_I="AO_Unit4CH1PID_I" aoPID_D="AO_Unit4CH1PID_D" aoSetPoint="AO_Unit4CH1SV" aoAlarmHigher="AO_Unit4CH1AlarmHigher" aoAlarmLower="AO_Unit4CH1AlarmLower" aioType="float" />
  1357. <IoHeaterBand id="GaslineHeaterUnit4CH2" display="GaslineHeaterUnit4CH2" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH2SV" aiPV="AI_Unit4CH2PV" aiControlOutput="AI_Unit4CH2WorkingOutput" aiPID_P="AI_Unit4CH2PID_P" aiPID_I="AI_Unit4CH2PID_I" aiPID_D="AI_Unit4CH2PID_D" aiEnableIn="AI_Unit4CH2EnableIn" aiAutotuneActivate="AI_Unit4CH2AutotuneActivate" aiAlarmHigher="AI_Unit4CH2AlarmHigher" aiUpRate="AI_Unit4CH2UpRate" aiDownRate="AI_Unit4CH2DownRate" aiAlarmLower="AI_Unit4CH2AlarmLower" aoUpRate="AO_Unit4CH2UpRate" aoDownRate="AO_Unit4CH2DownRate" aoEnableIn="AO_Unit4CH2EnableIn" aoAutotuneActivate="AO_Unit4CH2AutotuneActivate" aoPID_P="AO_Unit4CH2PID_P" aoPID_I="AO_Unit4CH2PID_I" aoPID_D="AO_Unit4CH2PID_D" aoSetPoint="AO_Unit4CH2SV" aoAlarmHigher="AO_Unit4CH2AlarmHigher" aoAlarmLower="AO_Unit4CH2AlarmLower" aioType="float" />
  1358. <IoHeaterBand id="GaslineHeaterUnit4CH3" display="GaslineHeaterUnit4CH3" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH3SV" aiPV="AI_Unit4CH3PV" aiControlOutput="AI_Unit4CH3WorkingOutput" aiPID_P="AI_Unit4CH3PID_P" aiPID_I="AI_Unit4CH3PID_I" aiPID_D="AI_Unit4CH3PID_D" aiEnableIn="AI_Unit4CH3EnableIn" aiAutotuneActivate="AI_Unit4CH3AutotuneActivate" aiAlarmHigher="AI_Unit4CH3AlarmHigher" aiUpRate="AI_Unit4CH3UpRate" aiDownRate="AI_Unit4CH3DownRate" aiAlarmLower="AI_Unit4CH3AlarmLower" aoUpRate="AO_Unit4CH3UpRate" aoDownRate="AO_Unit4CH3DownRate" aoEnableIn="AO_Unit4CH3EnableIn" aoAutotuneActivate="AO_Unit4CH3AutotuneActivate" aoPID_P="AO_Unit4CH3PID_P" aoPID_I="AO_Unit4CH3PID_I" aoPID_D="AO_Unit4CH3PID_D" aoSetPoint="AO_Unit4CH3SV" aoAlarmHigher="AO_Unit4CH3AlarmHigher" aoAlarmLower="AO_Unit4CH3AlarmLower" aioType="float" />
  1359. <IoHeaterBand id="GaslineHeaterUnit4CH4" display="GaslineHeaterUnit4CH4" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH4SV" aiPV="AI_Unit4CH4PV" aiControlOutput="AI_Unit4CH4WorkingOutput" aiPID_P="AI_Unit4CH4PID_P" aiPID_I="AI_Unit4CH4PID_I" aiPID_D="AI_Unit4CH4PID_D" aiEnableIn="AI_Unit4CH4EnableIn" aiAutotuneActivate="AI_Unit4CH4AutotuneActivate" aiAlarmHigher="AI_Unit4CH4AlarmHigher" aiUpRate="AI_Unit4CH4UpRate" aiDownRate="AI_Unit4CH4DownRate" aiAlarmLower="AI_Unit4CH4AlarmLower" aoUpRate="AO_Unit4CH4UpRate" aoDownRate="AO_Unit4CH4DownRate" aoEnableIn="AO_Unit4CH4EnableIn" aoAutotuneActivate="AO_Unit4CH4AutotuneActivate" aoPID_P="AO_Unit4CH4PID_P" aoPID_I="AO_Unit4CH4PID_I" aoPID_D="AO_Unit4CH4PID_D" aoSetPoint="AO_Unit4CH4SV" aoAlarmHigher="AO_Unit4CH4AlarmHigher" aoAlarmLower="AO_Unit4CH4AlarmLower" aioType="float" />
  1360. <IoHeaterBand id="GaslineHeaterUnit4CH5" display="GaslineHeaterUnit4CH5" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH5SV" aiPV="AI_Unit4CH5PV" aiControlOutput="AI_Unit4CH5WorkingOutput" aiPID_P="AI_Unit4CH5PID_P" aiPID_I="AI_Unit4CH5PID_I" aiPID_D="AI_Unit4CH5PID_D" aiEnableIn="AI_Unit4CH5EnableIn" aiAutotuneActivate="AI_Unit4CH5AutotuneActivate" aiAlarmHigher="AI_Unit4CH5AlarmHigher" aiUpRate="AI_Unit4CH5UpRate" aiDownRate="AI_Unit4CH5DownRate" aiAlarmLower="AI_Unit4CH5AlarmLower" aoUpRate="AO_Unit4CH5UpRate" aoDownRate="AO_Unit4CH5DownRate" aoEnableIn="AO_Unit4CH5EnableIn" aoAutotuneActivate="AO_Unit4CH5AutotuneActivate" aoPID_P="AO_Unit4CH5PID_P" aoPID_I="AO_Unit4CH5PID_I" aoPID_D="AO_Unit4CH5PID_D" aoSetPoint="AO_Unit4CH5SV" aoAlarmHigher="AO_Unit4CH5AlarmHigher" aoAlarmLower="AO_Unit4CH5AlarmLower" aioType="float" />
  1361. <IoHeaterBand id="GaslineHeaterUnit4CH6" display="GaslineHeaterUnit4CH6" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH6SV" aiPV="AI_Unit4CH6PV" aiControlOutput="AI_Unit4CH6WorkingOutput" aiPID_P="AI_Unit4CH6PID_P" aiPID_I="AI_Unit4CH6PID_I" aiPID_D="AI_Unit4CH6PID_D" aiEnableIn="AI_Unit4CH6EnableIn" aiAutotuneActivate="AI_Unit4CH6AutotuneActivate" aiAlarmHigher="AI_Unit4CH6AlarmHigher" aiUpRate="AI_Unit4CH6UpRate" aiDownRate="AI_Unit4CH6DownRate" aiAlarmLower="AI_Unit4CH6AlarmLower" aoUpRate="AO_Unit4CH6UpRate" aoDownRate="AO_Unit4CH6DownRate" aoEnableIn="AO_Unit4CH6EnableIn" aoAutotuneActivate="AO_Unit4CH6AutotuneActivate" aoPID_P="AO_Unit4CH6PID_P" aoPID_I="AO_Unit4CH6PID_I" aoPID_D="AO_Unit4CH6PID_D" aoSetPoint="AO_Unit4CH6SV" aoAlarmHigher="AO_Unit4CH6AlarmHigher" aoAlarmLower="AO_Unit4CH6AlarmLower" aioType="float" />
  1362. <IoHeaterBand id="GaslineHeaterUnit4CH7" display="GaslineHeaterUnit4CH7" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH7SV" aiPV="AI_Unit4CH7PV" aiControlOutput="AI_Unit4CH7WorkingOutput" aiPID_P="AI_Unit4CH7PID_P" aiPID_I="AI_Unit4CH7PID_I" aiPID_D="AI_Unit4CH7PID_D" aiEnableIn="AI_Unit4CH7EnableIn" aiAutotuneActivate="AI_Unit4CH7AutotuneActivate" aiAlarmHigher="AI_Unit4CH7AlarmHigher" aiUpRate="AI_Unit4CH7UpRate" aiDownRate="AI_Unit4CH7DownRate" aiAlarmLower="AI_Unit4CH7AlarmLower" aoUpRate="AO_Unit4CH7UpRate" aoDownRate="AO_Unit4CH7DownRate" aoEnableIn="AO_Unit4CH7EnableIn" aoAutotuneActivate="AO_Unit4CH7AutotuneActivate" aoPID_P="AO_Unit4CH7PID_P" aoPID_I="AO_Unit4CH7PID_I" aoPID_D="AO_Unit4CH7PID_D" aoSetPoint="AO_Unit4CH7SV" aoAlarmHigher="AO_Unit4CH7AlarmHigher" aoAlarmLower="AO_Unit4CH7AlarmLower" aioType="float" />
  1363. <IoHeaterBand id="GaslineHeaterUnit4CH8" display="GaslineHeaterUnit4CH8" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH8SV" aiPV="AI_Unit4CH8PV" aiControlOutput="AI_Unit4CH8WorkingOutput" aiPID_P="AI_Unit4CH8PID_P" aiPID_I="AI_Unit4CH8PID_I" aiPID_D="AI_Unit4CH8PID_D" aiEnableIn="AI_Unit4CH8EnableIn" aiAutotuneActivate="AI_Unit4CH8AutotuneActivate" aiAlarmHigher="AI_Unit4CH8AlarmHigher" aiUpRate="AI_Unit4CH8UpRate" aiDownRate="AI_Unit4CH8DownRate" aiAlarmLower="AI_Unit4CH8AlarmLower" aoUpRate="AO_Unit4CH8UpRate" aoDownRate="AO_Unit4CH8DownRate" aoEnableIn="AO_Unit4CH8EnableIn" aoAutotuneActivate="AO_Unit4CH8AutotuneActivate" aoPID_P="AO_Unit4CH8PID_P" aoPID_I="AO_Unit4CH8PID_I" aoPID_D="AO_Unit4CH8PID_D" aoSetPoint="AO_Unit4CH8SV" aoAlarmHigher="AO_Unit4CH8AlarmHigher" aoAlarmLower="AO_Unit4CH8AlarmLower" aioType="float" />
  1364. <IoHeaterBand id="GaslineHeaterUnit4CH9" display="GaslineHeaterUnit4CH9" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH9SV" aiPV="AI_Unit4CH9PV" aiControlOutput="AI_Unit4CH9WorkingOutput" aiPID_P="AI_Unit4CH9PID_P" aiPID_I="AI_Unit4CH9PID_I" aiPID_D="AI_Unit4CH9PID_D" aiEnableIn="AI_Unit4CH9EnableIn" aiAutotuneActivate="AI_Unit4CH9AutotuneActivate" aiAlarmHigher="AI_Unit4CH9AlarmHigher" aiUpRate="AI_Unit4CH9UpRate" aiDownRate="AI_Unit4CH9DownRate" aiAlarmLower="AI_Unit4CH9AlarmLower" aoUpRate="AO_Unit4CH9UpRate" aoDownRate="AO_Unit4CH9DownRate" aoEnableIn="AO_Unit4CH9EnableIn" aoAutotuneActivate="AO_Unit4CH9AutotuneActivate" aoPID_P="AO_Unit4CH9PID_P" aoPID_I="AO_Unit4CH9PID_I" aoPID_D="AO_Unit4CH9PID_D" aoSetPoint="AO_Unit4CH9SV" aoAlarmHigher="AO_Unit4CH9AlarmHigher" aoAlarmLower="AO_Unit4CH9AlarmLower" aioType="float" />
  1365. <IoHeaterBand id="GaslineHeaterUnit4CH10" display="GaslineHeaterUnit4CH10" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH10SV" aiPV="AI_Unit4CH10PV" aiControlOutput="AI_Unit4CH10WorkingOutput" aiPID_P="AI_Unit4CH10PID_P" aiPID_I="AI_Unit4CH10PID_I" aiPID_D="AI_Unit4CH10PID_D" aiEnableIn="AI_Unit4CH10EnableIn" aiAutotuneActivate="AI_Unit4CH10AutotuneActivate" aiAlarmHigher="AI_Unit4CH10AlarmHigher" aiUpRate="AI_Unit4CH10UpRate" aiDownRate="AI_Unit4CH10DownRate" aiAlarmLower="AI_Unit4CH10AlarmLower" aoUpRate="AO_Unit4CH10UpRate" aoDownRate="AO_Unit4CH10DownRate" aoEnableIn="AO_Unit4CH10EnableIn" aoAutotuneActivate="AO_Unit4CH10AutotuneActivate" aoPID_P="AO_Unit4CH10PID_P" aoPID_I="AO_Unit4CH10PID_I" aoPID_D="AO_Unit4CH10PID_D" aoSetPoint="AO_Unit4CH10SV" aoAlarmHigher="AO_Unit4CH10AlarmHigher" aoAlarmLower="AO_Unit4CH10AlarmLower" aioType="float" />
  1366. <IoHeaterBand id="GaslineHeaterUnit4CH11" display="GaslineHeaterUnit4CH11" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH11SV" aiPV="AI_Unit4CH11PV" aiControlOutput="AI_Unit4CH11WorkingOutput" aiPID_P="AI_Unit4CH11PID_P" aiPID_I="AI_Unit4CH11PID_I" aiPID_D="AI_Unit4CH11PID_D" aiEnableIn="AI_Unit4CH11EnableIn" aiAutotuneActivate="AI_Unit4CH11AutotuneActivate" aiAlarmHigher="AI_Unit4CH11AlarmHigher" aiUpRate="AI_Unit4CH11UpRate" aiDownRate="AI_Unit4CH11DownRate" aiAlarmLower="AI_Unit4CH11AlarmLower" aoUpRate="AO_Unit4CH11UpRate" aoDownRate="AO_Unit4CH11DownRate" aoEnableIn="AO_Unit4CH11EnableIn" aoAutotuneActivate="AO_Unit4CH11AutotuneActivate" aoPID_P="AO_Unit4CH11PID_P" aoPID_I="AO_Unit4CH11PID_I" aoPID_D="AO_Unit4CH11PID_D" aoSetPoint="AO_Unit4CH11SV" aoAlarmHigher="AO_Unit4CH11AlarmHigher" aoAlarmLower="AO_Unit4CH11AlarmLower" aioType="float" />
  1367. <IoHeaterBand id="GaslineHeaterUnit4CH12" display="GaslineHeaterUnit4CH12" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH12SV" aiPV="AI_Unit4CH12PV" aiControlOutput="AI_Unit4CH12WorkingOutput" aiPID_P="AI_Unit4CH12PID_P" aiPID_I="AI_Unit4CH12PID_I" aiPID_D="AI_Unit4CH12PID_D" aiEnableIn="AI_Unit4CH12EnableIn" aiAutotuneActivate="AI_Unit4CH12AutotuneActivate" aiAlarmHigher="AI_Unit4CH12AlarmHigher" aiUpRate="AI_Unit4CH12UpRate" aiDownRate="AI_Unit4CH12DownRate" aiAlarmLower="AI_Unit4CH12AlarmLower" aoUpRate="AO_Unit4CH12UpRate" aoDownRate="AO_Unit4CH12DownRate" aoEnableIn="AO_Unit4CH12EnableIn" aoAutotuneActivate="AO_Unit4CH12AutotuneActivate" aoPID_P="AO_Unit4CH12PID_P" aoPID_I="AO_Unit4CH12PID_I" aoPID_D="AO_Unit4CH12PID_D" aoSetPoint="AO_Unit4CH12SV" aoAlarmHigher="AO_Unit4CH12AlarmHigher" aoAlarmLower="AO_Unit4CH12AlarmLower" aioType="float" />
  1368. <IoHeaterBand id="GaslineHeaterUnit4CH13" display="GaslineHeaterUnit4CH13" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH13SV" aiPV="AI_Unit4CH13PV" aiControlOutput="AI_Unit4CH13WorkingOutput" aiPID_P="AI_Unit4CH13PID_P" aiPID_I="AI_Unit4CH13PID_I" aiPID_D="AI_Unit4CH13PID_D" aiEnableIn="AI_Unit4CH13EnableIn" aiAutotuneActivate="AI_Unit4CH13AutotuneActivate" aiAlarmHigher="AI_Unit4CH13AlarmHigher" aiUpRate="AI_Unit4CH13UpRate" aiDownRate="AI_Unit4CH13DownRate" aiAlarmLower="AI_Unit4CH13AlarmLower" aoUpRate="AO_Unit4CH13UpRate" aoDownRate="AO_Unit4CH13DownRate" aoEnableIn="AO_Unit4CH13EnableIn" aoAutotuneActivate="AO_Unit4CH13AutotuneActivate" aoPID_P="AO_Unit4CH13PID_P" aoPID_I="AO_Unit4CH13PID_I" aoPID_D="AO_Unit4CH13PID_D" aoSetPoint="AO_Unit4CH13SV" aoAlarmHigher="AO_Unit4CH13AlarmHigher" aoAlarmLower="AO_Unit4CH13AlarmLower" aioType="float" />
  1369. <IoHeaterBand id="GaslineHeaterUnit4CH14" display="GaslineHeaterUnit4CH14" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH14SV" aiPV="AI_Unit4CH14PV" aiControlOutput="AI_Unit4CH14WorkingOutput" aiPID_P="AI_Unit4CH14PID_P" aiPID_I="AI_Unit4CH14PID_I" aiPID_D="AI_Unit4CH14PID_D" aiEnableIn="AI_Unit4CH14EnableIn" aiAutotuneActivate="AI_Unit4CH14AutotuneActivate" aiAlarmHigher="AI_Unit4CH14AlarmHigher" aiUpRate="AI_Unit4CH14UpRate" aiDownRate="AI_Unit4CH14DownRate" aiAlarmLower="AI_Unit4CH14AlarmLower" aoUpRate="AO_Unit4CH14UpRate" aoDownRate="AO_Unit4CH14DownRate" aoEnableIn="AO_Unit4CH14EnableIn" aoAutotuneActivate="AO_Unit4CH14AutotuneActivate" aoPID_P="AO_Unit4CH14PID_P" aoPID_I="AO_Unit4CH14PID_I" aoPID_D="AO_Unit4CH14PID_D" aoSetPoint="AO_Unit4CH14SV" aoAlarmHigher="AO_Unit4CH14AlarmHigher" aoAlarmLower="AO_Unit4CH14AlarmLower" aioType="float" />
  1370. <IoHeaterBand id="GaslineHeaterUnit4CH15" display="GaslineHeaterUnit4CH15" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH15SV" aiPV="AI_Unit4CH15PV" aiControlOutput="AI_Unit4CH15WorkingOutput" aiPID_P="AI_Unit4CH15PID_P" aiPID_I="AI_Unit4CH15PID_I" aiPID_D="AI_Unit4CH15PID_D" aiEnableIn="AI_Unit4CH15EnableIn" aiAutotuneActivate="AI_Unit4CH15AutotuneActivate" aiAlarmHigher="AI_Unit4CH15AlarmHigher" aiUpRate="AI_Unit4CH15UpRate" aiDownRate="AI_Unit4CH15DownRate" aiAlarmLower="AI_Unit4CH15AlarmLower" aoUpRate="AO_Unit4CH15UpRate" aoDownRate="AO_Unit4CH15DownRate" aoEnableIn="AO_Unit4CH15EnableIn" aoAutotuneActivate="AO_Unit4CH15AutotuneActivate" aoPID_P="AO_Unit4CH15PID_P" aoPID_I="AO_Unit4CH15PID_I" aoPID_D="AO_Unit4CH15PID_D" aoSetPoint="AO_Unit4CH15SV" aoAlarmHigher="AO_Unit4CH15AlarmHigher" aoAlarmLower="AO_Unit4CH15AlarmLower" aioType="float" />
  1371. <IoHeaterBand id="GaslineHeaterUnit4CH16" display="GaslineHeaterUnit4CH16" schematicId="" unit="" module="" aiTemperatureSVFeedback="AI_Unit4CH16SV" aiPV="AI_Unit4CH16PV" aiControlOutput="AI_Unit4CH16WorkingOutput" aiPID_P="AI_Unit4CH16PID_P" aiPID_I="AI_Unit4CH16PID_I" aiPID_D="AI_Unit4CH16PID_D" aiEnableIn="AI_Unit4CH16EnableIn" aiAutotuneActivate="AI_Unit4CH16AutotuneActivate" aiAlarmHigher="AI_Unit4CH16AlarmHigher" aiUpRate="AI_Unit4CH16UpRate" aiDownRate="AI_Unit4CH16DownRate" aiAlarmLower="AI_Unit4CH16AlarmLower" aoUpRate="AO_Unit4CH16UpRate" aoDownRate="AO_Unit4CH16DownRate" aoEnableIn="AO_Unit4CH16EnableIn" aoAutotuneActivate="AO_Unit4CH16AutotuneActivate" aoPID_P="AO_Unit4CH16PID_P" aoPID_I="AO_Unit4CH16PID_I" aoPID_D="AO_Unit4CH16PID_D" aoSetPoint="AO_Unit4CH16SV" aoAlarmHigher="AO_Unit4CH16AlarmHigher" aoAlarmLower="AO_Unit4CH16AlarmLower" aioType="float" />
  1372. </IoHeaterBands>
  1373. <IoMFCs classType="FurnaceRT.Equipments.PMs.Devices.IoMFC" assembly="FurnaceRT">
  1374. <IoMFC id="MFC1" display="MFC1" schematicId="MFC1" unit="sccm" aiFlow="AI_MFC1AirFlowPV" aoFlow="AO_MFC1AirFlowSV" aoRamp="AO_MFC1RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1375. <IoMFC id="MFC2" display="MFC2" schematicId="MFC2" unit="sccm" aiFlow="AI_MFC2AirFlowPV" aoFlow="AO_MFC2AirFlowSV" aoRamp="AO_MFC2RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1376. <IoMFC id="MFC3" display="MFC3" schematicId="MFC3" unit="sccm" aiFlow="AI_MFC3AirFlowPV" aoFlow="AO_MFC3AirFlowSV" aoRamp="AO_MFC3RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1377. <IoMFC id="MFC4" display="MFC4" schematicId="MFC4" unit="sccm" aiFlow="AI_MFC4AirFlowPV" aoFlow="AO_MFC4AirFlowSV" aoRamp="AO_MFC4RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1378. <IoMFC id="MFC5" display="MFC5" schematicId="MFC5" unit="sccm" aiFlow="AI_MFC5AirFlowPV" aoFlow="AO_MFC5AirFlowSV" aoRamp="AO_MFC5RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1379. <IoMFC id="MFC6" display="MFC6" schematicId="MFC6" unit="sccm" aiFlow="AI_MFC6AirFlowPV" aoFlow="AO_MFC6AirFlowSV" aoRamp="AO_MFC6RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1380. <IoMFC id="MFC7" display="MFC7" schematicId="MFC7" unit="sccm" aiFlow="AI_MFC7AirFlowPV" aoFlow="AO_MFC7AirFlowSV" aoRamp="AO_MFC7RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1381. <IoMFC id="MFC8" display="MFC8" schematicId="MFC8" unit="sccm" aiFlow="AI_MFC8AirFlowPV" aoFlow="AO_MFC8AirFlowSV" aoRamp="AO_MFC8RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1382. <IoMFC id="MFC9" display="MFC9" schematicId="MFC9" unit="sccm" aiFlow="AI_MFC9AirFlowPV" aoFlow="AO_MFC9AirFlowSV" aoRamp="AO_MFC9RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1383. <IoMFC id="MFC10" display="MFC10" schematicId="MFC10" unit="sccm" aiFlow="AI_MFC10AirFlowPV" aoFlow="AO_MFC10AirFlowSV" aoRamp="AO_MFC10RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1384. <IoMFC id="MFC11" display="MFC11" schematicId="MFC11" unit="sccm" aiFlow="AI_MFC11AirFlowPV" aoFlow="AO_MFC11AirFlowSV" aoRamp="AO_MFC11RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1385. <IoMFC id="MFC12" display="MFC12" schematicId="MFC12" unit="sccm" aiFlow="AI_MFC12AirFlowPV" aoFlow="AO_MFC12AirFlowSV" aoRamp="AO_MFC12RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1386. <IoMFC id="MFC13" display="MFC13" schematicId="MFC13" unit="sccm" aiFlow="AI_MFC13AirFlowPV" aoFlow="AO_MFC13AirFlowSV" aoRamp="AO_MFC13RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1387. <IoMFC id="MFC16" display="MFC16" schematicId="MFC16" unit="sccm" aiFlow="AI_MFC16AirFlowPV" aoFlow="AO_MFC16AirFlowSV" aoRamp="AO_MFC16RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1388. <IoMFC id="MFC17" display="MFC17" schematicId="MFC17" unit="sccm" aiFlow="AI_MFC17AirFlowPV" aoFlow="AO_MFC17AirFlowSV" aoRamp="AO_MFC17RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1389. <IoMFC id="MFC31" display="MFC31" schematicId="MFC31" unit="sccm" aiFlow="AI_MFC31AirFlowPV" aoFlow="AO_MFC31AirFlowSV" aoRamp="AO_MFC31RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1390. <IoMFC id="MFC32" display="MFC32" schematicId="MFC32" unit="sccm" aiFlow="AI_MFC32AirFlowPV" aoFlow="AO_MFC32AirFlowSV" aoRamp="AO_MFC32RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1391. <IoMFC id="MFC51" display="MFC51" schematicId="MFC51" unit="sccm" aiFlow="AI_MFC51AirFlowPV" aoFlow="AO_MFC51AirFlowSV" aoRamp="AO_MFC51RampTime" aioType="float" scBasePath="PM1.MFC"/>
  1392. </IoMFCs>
  1393. <IoMFMs classType="FurnaceRT.Equipments.PMs.Devices.IoMFM" assembly="FurnaceRT">
  1394. <IoMFM id="MFM6" display="MFM6" schematicId="MFM6" unit="sccm" aiFlow="AI_MFM6AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1395. <IoMFM id="MFM7" display="MFM7" schematicId="MFM7" unit="sccm" aiFlow="AI_MFM7AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1396. <IoMFM id="MFM8" display="MFM8" schematicId="MFM8" unit="sccm" aiFlow="AI_MFM8AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1397. <IoMFM id="MFM9" display="MFM9" schematicId="MFM9" unit="sccm" aiFlow="AI_MFM9AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1398. <IoMFM id="MFM11" display="MFM11" schematicId="MFM11" unit="sccm" aiFlow="AI_MFM11AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1399. <IoMFM id="MFM12" display="MFM12" schematicId="MFM12" unit="sccm" aiFlow="AI_MFM12AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1400. <IoMFM id="MFM13" display="MFM13" schematicId="MFM13" unit="sccm" aiFlow="AI_MFM13AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1401. <IoMFM id="MFM16" display="MFM16" schematicId="MFM16" unit="sccm" aiFlow="AI_MFM16AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1402. <IoMFM id="MFM57" display="MFM57" schematicId="MFM57" unit="sccm" aiFlow="AI_MFM57AirFlowPV" aioType="float" scBasePath="PM1.MFM"/>
  1403. </IoMFMs>
  1404. <IoFFUs classType="FurnaceRT.Devices.IoFFU" assembly="FurnaceRT">
  1405. <IoFFU id="FFU1" display="FFU1" schematicId="FFU1" unit=""
  1406. diDataWriteDone="DI_FFU801DataWriteDone"
  1407. diDataWriteError="DI_FFU801DataWriteError"
  1408. diDataReadError="DI_FFU801DataReadError"
  1409. aiGroupNumber="AI_FFU1GroupNumber"
  1410. aiAddressNumber="AI_FFU1AddressNumber"
  1411. aiSwitch="AI_FFU1Switch"
  1412. aiSetSpeed="AI_FFU1SetSpeed"
  1413. aiMaxSpeed="AI_FFU1MaxSpeed"
  1414. aiReset="AI_FFU1Reset"
  1415. aiErrorTimer="AI_FFU1ErrorTimer"
  1416. aiCurrentSpeed="AI_FFU1CurrentSpeed"
  1417. aiVoltage="AI_FFU1Voltage"
  1418. aiCurrent="AI_FFU1Current"
  1419. aoSwitch="AO_FFU1Switch"
  1420. aoSetSpeed="AO_FFU1SetSpeed"
  1421. aoReset="AO_FFU1Reset"
  1422. doEnable="DO_FFU1Enable"
  1423. doWriteCommand="DO_FFU1WriteCommand"
  1424. aioType="float"
  1425. />
  1426. <IoFFU id="FFU2" display="FFU2" schematicId="FFU2" unit=""
  1427. diDataWriteDone="DI_FFU802DataWriteDone"
  1428. diDataWriteError="DI_FFU802DataWriteError"
  1429. diDataReadError="DI_FFU802DataReadError"
  1430. aiGroupNumber="AI_FFU2GroupNumber"
  1431. aiAddressNumber="AI_FFU2AddressNumber"
  1432. aiSwitch="AI_FFU2Switch"
  1433. aiSetSpeed="AI_FFU2SetSpeed"
  1434. aiMaxSpeed="AI_FFU2MaxSpeed"
  1435. aiReset="AI_FFU2Reset"
  1436. aiErrorTimer="AI_FFU2ErrorTimer"
  1437. aiCurrentSpeed="AI_FFU2CurrentSpeed"
  1438. aiVoltage="AI_FFU2Voltage"
  1439. aiCurrent="AI_FFU2Current"
  1440. aoSwitch="AO_FFU2Switch"
  1441. aoSetSpeed="AO_FFU2SetSpeed"
  1442. aoReset="AO_FFU2Reset"
  1443. doEnable="DO_FFU2Enable"
  1444. doWriteCommand="DO_FFU2WriteCommand"
  1445. aioType="float"
  1446. />
  1447. <IoFFU id="FFU3" display="FFU3" schematicId="FFU3" unit=""
  1448. diDataWriteDone="DI_FFU803DataWriteDone"
  1449. diDataWriteError="DI_FFU803DataWriteError"
  1450. diDataReadError="DI_FFU803DataReadError"
  1451. aiGroupNumber="AI_FFU3GroupNumber"
  1452. aiAddressNumber="AI_FFU3AddressNumber"
  1453. aiSwitch="AI_FFU3Switch"
  1454. aiSetSpeed="AI_FFU3SetSpeed"
  1455. aiMaxSpeed="AI_FFU3MaxSpeed"
  1456. aiReset="AI_FFU3Reset"
  1457. aiErrorTimer="AI_FFU3ErrorTimer"
  1458. aiCurrentSpeed="AI_FFU3CurrentSpeed"
  1459. aiVoltage="AI_FFU3Voltage"
  1460. aiCurrent="AI_FFU3Current"
  1461. aoSwitch="AO_FFU3Switch"
  1462. aoSetSpeed="AO_FFU3SetSpeed"
  1463. aoReset="AO_FFU3Reset"
  1464. doEnable="DO_FFU3Enable"
  1465. doWriteCommand="DO_FFU3WriteCommand"
  1466. aioType="float"
  1467. />
  1468. <IoFFU id="FFU4" display="FFU4" schematicId="FFU4" unit=""
  1469. diDataWriteDone="DI_FFU201DataWriteDone"
  1470. diDataWriteError="DI_FFU201DataWriteError"
  1471. diDataReadError="DI_FFU201DataReadError"
  1472. aiGroupNumber="AI_FFU4GroupNumber"
  1473. aiAddressNumber="AI_FFU4AddressNumber"
  1474. aiSwitch="AI_FFU4Switch"
  1475. aiSetSpeed="AI_FFU4SetSpeed"
  1476. aiMaxSpeed="AI_FFU4MaxSpeed"
  1477. aiReset="AI_FFU4Reset"
  1478. aiErrorTimer="AI_FFU4ErrorTimer"
  1479. aiCurrentSpeed="AI_FFU4CurrentSpeed"
  1480. aiVoltage="AI_FFU4Voltage"
  1481. aiCurrent="AI_FFU4Current"
  1482. aoSwitch="AO_FFU4Switch"
  1483. aoSetSpeed="AO_FFU4SetSpeed"
  1484. aoReset="AO_FFU4Reset"
  1485. doEnable="DO_FFU4Enable"
  1486. doWriteCommand="DO_FFU4WriteCommand"
  1487. aioType="float"
  1488. />
  1489. <IoFFU id="FFU5" display="FFU5" schematicId="FFU5" unit=""
  1490. diDataWriteDone="DI_FFU202DataWriteDone"
  1491. diDataWriteError="DI_FFU202DataWriteError"
  1492. diDataReadError="DI_FFU202DataReadError"
  1493. aiGroupNumber="AI_FFU5GroupNumber"
  1494. aiAddressNumber="AI_FFU5AddressNumber"
  1495. aiSwitch="AI_FFU5Switch"
  1496. aiSetSpeed="AI_FFU5SetSpeed"
  1497. aiMaxSpeed="AI_FFU5MaxSpeed"
  1498. aiReset="AI_FFU5Reset"
  1499. aiErrorTimer="AI_FFU5ErrorTimer"
  1500. aiCurrentSpeed="AI_FFU5CurrentSpeed"
  1501. aiVoltage="AI_FFU5Voltage"
  1502. aiCurrent="AI_FFU5Current"
  1503. aoSwitch="AO_FFU5Switch"
  1504. aoSetSpeed="AO_FFU5SetSpeed"
  1505. aoReset="AO_FFU5Reset"
  1506. doEnable="DO_FFU5Enable"
  1507. doWriteCommand="DO_FFU5WriteCommand"
  1508. aioType="float"
  1509. />
  1510. <IoFFU id="FFU6" display="FFU6" schematicId="FFU6" unit=""
  1511. diDataWriteDone="DI_FFU203DataWriteDone"
  1512. diDataWriteError="DI_FFU203DataWriteError"
  1513. diDataReadError="DI_FFU203DataReadError"
  1514. aiGroupNumber="AI_FFU6GroupNumber"
  1515. aiAddressNumber="AI_FFU6AddressNumber"
  1516. aiSwitch="AI_FFU6Switch"
  1517. aiSetSpeed="AI_FFU6SetSpeed"
  1518. aiMaxSpeed="AI_FFU6MaxSpeed"
  1519. aiReset="AI_FFU6Reset"
  1520. aiErrorTimer="AI_FFU6ErrorTimer"
  1521. aiCurrentSpeed="AI_FFU6CurrentSpeed"
  1522. aiVoltage="AI_FFU6Voltage"
  1523. aiCurrent="AI_FFU6Current"
  1524. aoSwitch="AO_FFU6Switch"
  1525. aoSetSpeed="AO_FFU6SetSpeed"
  1526. aoReset="AO_FFU6Reset"
  1527. doEnable="DO_FFU6Enable"
  1528. doWriteCommand="DO_FFU6WriteCommand"
  1529. aioType="float"
  1530. />
  1531. <IoFFU id="FFU7" display="FFU7" schematicId="FFU7" unit=""
  1532. diDataWriteDone="DI_FFU204DataWriteDone"
  1533. diDataWriteError="DI_FFU204DataWriteError"
  1534. diDataReadError="DI_FFU204DataReadError"
  1535. aiGroupNumber="AI_FFU7GroupNumber"
  1536. aiAddressNumber="AI_FFU7AddressNumber"
  1537. aiSwitch="AI_FFU7Switch"
  1538. aiSetSpeed="AI_FFU7SetSpeed"
  1539. aiMaxSpeed="AI_FFU7MaxSpeed"
  1540. aiReset="AI_FFU7Reset"
  1541. aiErrorTimer="AI_FFU7ErrorTimer"
  1542. aiCurrentSpeed="AI_FFU7CurrentSpeed"
  1543. aiVoltage="AI_FFU7Voltage"
  1544. aiCurrent="AI_FFU7Current"
  1545. aoSwitch="AO_FFU7Switch"
  1546. aoSetSpeed="AO_FFU7SetSpeed"
  1547. aoReset="AO_FFU7Reset"
  1548. doEnable="DO_FFU7Enable"
  1549. doWriteCommand="DO_FFU7WriteCommand"
  1550. aioType="float"
  1551. />
  1552. <IoFFU id="FFU8" display="FFU8" schematicId="FFU8" unit=""
  1553. diDataWriteDone="DI_FFU205DataWriteDone"
  1554. diDataWriteError="DI_FFU205DataWriteError"
  1555. diDataReadError="DI_FFU205DataReadError"
  1556. aiGroupNumber="AI_FFU8GroupNumber"
  1557. aiAddressNumber="AI_FFU8AddressNumber"
  1558. aiSwitch="AI_FFU8Switch"
  1559. aiSetSpeed="AI_FFU8SetSpeed"
  1560. aiMaxSpeed="AI_FFU8MaxSpeed"
  1561. aiReset="AI_FFU8Reset"
  1562. aiErrorTimer="AI_FFU8ErrorTimer"
  1563. aiCurrentSpeed="AI_FFU8CurrentSpeed"
  1564. aiVoltage="AI_FFU8Voltage"
  1565. aiCurrent="AI_FFU8Current"
  1566. aoSwitch="AO_FFU8Switch"
  1567. aoSetSpeed="AO_FFU8SetSpeed"
  1568. aoReset="AO_FFU8Reset"
  1569. doEnable="DO_FFU8Enable"
  1570. doWriteCommand="DO_FFU8WriteCommand"
  1571. aioType="float"
  1572. />
  1573. <IoFFU id="FFU9" display="FFU9" schematicId="FFU9" unit=""
  1574. diDataWriteDone="DI_FFU206DataWriteDone"
  1575. diDataWriteError="DI_FFU206DataWriteError"
  1576. diDataReadError="DI_FFU206DataReadError"
  1577. aiGroupNumber="AI_FFU9GroupNumber"
  1578. aiAddressNumber="AI_FFU9AddressNumber"
  1579. aiSwitch="AI_FFU9Switch"
  1580. aiSetSpeed="AI_FFU9SetSpeed"
  1581. aiMaxSpeed="AI_FFU9MaxSpeed"
  1582. aiReset="AI_FFU9Reset"
  1583. aiErrorTimer="AI_FFU9ErrorTimer"
  1584. aiCurrentSpeed="AI_FFU9CurrentSpeed"
  1585. aiVoltage="AI_FFU9Voltage"
  1586. aiCurrent="AI_FFU9Current"
  1587. aoSwitch="AO_FFU9Switch"
  1588. aoSetSpeed="AO_FFU9SetSpeed"
  1589. aoReset="AO_FFU9Reset"
  1590. doEnable="DO_FFU9Enable"
  1591. doWriteCommand="DO_FFU9WriteCommand"
  1592. aioType="float"
  1593. />
  1594. </IoFFUs>
  1595. <IoValves>
  1596. <IoValve id="ValveAV1" diOpen="" doOpen="DO_ValveAV1" display="ValveAV1" schematicId="" isNc="false" isDefaultOpen="false"/>
  1597. <IoValve id="ValveAV2" diOpen="" doOpen="DO_ValveAV2" display="ValveAV2" schematicId="" isNc="false" isDefaultOpen="false"/>
  1598. <IoValve id="ValveAV3" diOpen="" doOpen="DO_ValveAV3" display="ValveAV3" schematicId="" isNc="true" isDefaultOpen="false"/>
  1599. <IoValve id="ValveAV4" diOpen="" doOpen="DO_ValveAV4" display="ValveAV4" schematicId="" isNc="true" isDefaultOpen="false"/>
  1600. <IoValve id="ValveAV5" diOpen="" doOpen="DO_ValveAV5" display="ValveAV5" schematicId="" isNc="false" isDefaultOpen="false"/>
  1601. <IoValve id="ValveAV6" diOpen="" doOpen="DO_ValveAV6" display="ValveAV6" schematicId="" isNc="true" isDefaultOpen="false"/>
  1602. <IoValve id="ValveAV7" diOpen="" doOpen="DO_ValveAV7" display="ValveAV7" schematicId="" isNc="true" isDefaultOpen="false"/>
  1603. <IoValve id="ValveAV8" diOpen="" doOpen="DO_ValveAV8" display="ValveAV8" schematicId="" isNc="true" isDefaultOpen="false"/>
  1604. <IoValve id="ValveAV9" diOpen="" doOpen="DO_ValveAV9" display="ValveAV9" schematicId="" isNc="true" isDefaultOpen="false"/>
  1605. <IoValve id="ValveAV10" diOpen="" doOpen="DO_ValveAV10" display="ValveAV10" schematicId="" isNc="true" isDefaultOpen="false"/>
  1606. <IoValve id="ValveAV11" diOpen="" doOpen="DO_ValveAV11" display="ValveAV11" schematicId="" isNc="true" isDefaultOpen="false"/>
  1607. <IoValve id="ValveAV12" diOpen="" doOpen="DO_ValveAV12" display="ValveAV12" schematicId="" isNc="true" isDefaultOpen="false"/>
  1608. <IoValve id="ValveAV13" diOpen="" doOpen="DO_ValveAV13" display="ValveAV13" schematicId="" isNc="true" isDefaultOpen="false"/>
  1609. <IoValve id="ValveAV14" diOpen="" doOpen="DO_ValveAV14" display="ValveAV14" schematicId="" isNc="true" isDefaultOpen="false"/>
  1610. <IoValve id="ValveAV15" diOpen="" doOpen="DO_ValveAV15" display="ValveAV15" schematicId="" isNc="true" isDefaultOpen="false"/>
  1611. <IoValve id="ValveAV16" diOpen="" doOpen="DO_ValveAV16" display="ValveAV16" schematicId="" isNc="true" isDefaultOpen="false"/>
  1612. <IoValve id="ValveAV17" diOpen="" doOpen="DO_ValveAV17" display="ValveAV17" schematicId="" isNc="true" isDefaultOpen="false"/>
  1613. <IoValve id="ValveAV18" diOpen="" doOpen="DO_ValveAV18" display="ValveAV18" schematicId="" isNc="true" isDefaultOpen="false"/>
  1614. <IoValve id="ValveAV19" diOpen="" doOpen="DO_ValveAV19" display="ValveAV19" schematicId="" isNc="true" isDefaultOpen="false"/>
  1615. <IoValve id="ValveAV20" diOpen="" doOpen="DO_ValveAV20" display="ValveAV20" schematicId="" isNc="true" isDefaultOpen="false"/>
  1616. <IoValve id="ValveAV21" diOpen="" doOpen="DO_ValveAV21" display="ValveAV21" schematicId="" isNc="true" isDefaultOpen="false"/>
  1617. <IoValve id="ValveAV22" diOpen="" doOpen="DO_ValveAV22" display="ValveAV22" schematicId="" isNc="true" isDefaultOpen="false"/>
  1618. <IoValve id="ValveAV23" diOpen="" doOpen="DO_ValveAV23" display="ValveAV23" schematicId="" isNc="true" isDefaultOpen="false"/>
  1619. <IoValve id="ValveAV24" diOpen="" doOpen="DO_ValveAV24" display="ValveAV24" schematicId="" isNc="true" isDefaultOpen="false"/>
  1620. <IoValve id="ValveAV25" diOpen="" doOpen="DO_ValveAV25" display="ValveAV25" schematicId="" isNc="false" isDefaultOpen="false"/>
  1621. <IoValve id="ValveAV26" diOpen="" doOpen="DO_ValveAV26" display="ValveAV26" schematicId="" isNc="false" isDefaultOpen="false"/>
  1622. <IoValve id="ValveAV27" diOpen="" doOpen="DO_ValveAV27" display="ValveAV27" schematicId="" isNc="true" isDefaultOpen="false"/>
  1623. <IoValve id="ValveAV28" diOpen="" doOpen="DO_ValveAV28" display="ValveAV28" schematicId="" isNc="true" isDefaultOpen="false"/>
  1624. <IoValve id="ValveAV29" diOpen="" doOpen="DO_ValveAV29" display="ValveAV29" schematicId="" isNc="true" isDefaultOpen="false"/>
  1625. <IoValve id="ValveAV30" diOpen="" doOpen="DO_ValveAV30" display="ValveAV30" schematicId="" isNc="true" isDefaultOpen="false"/>
  1626. <IoValve id="ValveAV31" diOpen="" doOpen="DO_ValveAV31" display="ValveAV31" schematicId="" isNc="true" isDefaultOpen="false"/>
  1627. <IoValve id="ValveAV32" diOpen="" doOpen="DO_ValveAV32" display="ValveAV32" schematicId="" isNc="true" isDefaultOpen="false"/>
  1628. <IoValve id="ValveAV33" diOpen="" doOpen="DO_ValveAV33" display="ValveAV33" schematicId="" isNc="true" isDefaultOpen="false"/>
  1629. <IoValve id="ValveAV34" diOpen="" doOpen="DO_ValveAV34" display="ValveAV34" schematicId="" isNc="true" isDefaultOpen="false"/>
  1630. <IoValve id="ValveAV35" diOpen="" doOpen="DO_ValveAV35" display="ValveAV35" schematicId="" isNc="true" isDefaultOpen="false"/>
  1631. <IoValve id="ValveAV36" diOpen="" doOpen="DO_ValveAV36" display="ValveAV36" schematicId="" isNc="true" isDefaultOpen="false"/>
  1632. <IoValve id="ValveAV37" diOpen="" doOpen="DO_ValveAV37" display="ValveAV37" schematicId="" isNc="true" isDefaultOpen="false"/>
  1633. <IoValve id="ValveAV38" diOpen="" doOpen="DO_ValveAV38" display="ValveAV38" schematicId="" isNc="true" isDefaultOpen="false"/>
  1634. <IoValve id="ValveAV39" diOpen="" doOpen="DO_ValveAV39" display="ValveAV39" schematicId="" isNc="false" isDefaultOpen="false"/>
  1635. <IoValve id="ValveAV40" diOpen="" doOpen="DO_ValveAV40" display="ValveAV40" schematicId="" isNc="true" isDefaultOpen="false"/>
  1636. <IoValve id="ValveAV41" diOpen="" doOpen="DO_ValveAV41" display="ValveAV41" schematicId="" isNc="true" isDefaultOpen="false"/>
  1637. <IoValve id="ValveAV42" diOpen="" doOpen="DO_ValveAV42" display="ValveAV42" schematicId="" isNc="true" isDefaultOpen="false"/>
  1638. <IoValve id="ValveAV43" diOpen="" doOpen="DO_ValveAV43" display="ValveAV43" schematicId="" isNc="true" isDefaultOpen="false"/>
  1639. <IoValve id="ValveAV44" diOpen="" doOpen="DO_ValveAV44" display="ValveAV44" schematicId="" isNc="true" isDefaultOpen="false"/>
  1640. <IoValve id="ValveAV45" diOpen="" doOpen="DO_ValveAV45" display="ValveAV45" schematicId="" isNc="true" isDefaultOpen="false"/>
  1641. <IoValve id="ValveAV46" diOpen="" doOpen="DO_ValveAV46" display="ValveAV46" schematicId="" isNc="true" isDefaultOpen="false"/>
  1642. <IoValve id="ValveAV47" diOpen="" doOpen="DO_ValveAV47" display="ValveAV47" schematicId="" isNc="true" isDefaultOpen="false"/>
  1643. <IoValve id="ValveAV48" diOpen="" doOpen="DO_ValveAV48" display="ValveAV48" schematicId="" isNc="true" isDefaultOpen="false"/>
  1644. <IoValve id="ValveAV49" diOpen="" doOpen="DO_ValveAV49" display="ValveAV49" schematicId="" isNc="true" isDefaultOpen="false"/>
  1645. <IoValve id="ValveAV50" diOpen="" doOpen="DO_ValveAV50" display="ValveAV50" schematicId="" isNc="true" isDefaultOpen="false"/>
  1646. <IoValve id="ValveAV51" diOpen="" doOpen="DO_ValveAV51" display="ValveAV51" schematicId="" isNc="true" isDefaultOpen="false"/>
  1647. <IoValve id="ValveAV52" diOpen="" doOpen="DO_ValveAV52" display="ValveAV52" schematicId="" isNc="true" isDefaultOpen="false"/>
  1648. <IoValve id="ValveAV53" diOpen="" doOpen="DO_ValveAV53" display="ValveAV53" schematicId="" isNc="true" isDefaultOpen="false"/>
  1649. <IoValve id="ValveAV54" diOpen="" doOpen="DO_ValveAV54" display="ValveAV54" schematicId="" isNc="true" isDefaultOpen="false"/>
  1650. <IoValve id="ValveAV55" diOpen="" doOpen="DO_ValveAV55" display="ValveAV55" schematicId="" isNc="true" isDefaultOpen="false"/>
  1651. <IoValve id="ValveAV56" diOpen="" doOpen="DO_ValveAV56" display="ValveAV56" schematicId="" isNc="true" isDefaultOpen="false"/>
  1652. <IoValve id="ValveAV57" diOpen="" doOpen="DO_ValveAV57" display="ValveAV57" schematicId="" isNc="true" isDefaultOpen="false"/>
  1653. <IoValve id="ValveAV58" diOpen="" doOpen="DO_ValveAV58" display="ValveAV58" schematicId="" isNc="true" isDefaultOpen="false"/>
  1654. <IoValve id="ValveAV59" diOpen="" doOpen="DO_ValveAV59" display="ValveAV59" schematicId="" isNc="true" isDefaultOpen="false"/>
  1655. <IoValve id="ValveAV60" diOpen="" doOpen="DO_ValveAV60" display="ValveAV60" schematicId="" isNc="false" isDefaultOpen="false"/>
  1656. <IoValve id="ValveAV61" diOpen="" doOpen="DO_ValveAV61" display="ValveAV61" schematicId="" isNc="true" isDefaultOpen="false"/>
  1657. <IoValve id="ValveAV62" diOpen="" doOpen="DO_ValveAV62" display="ValveAV62" schematicId="" isNc="true" isDefaultOpen="false"/>
  1658. <IoValve id="ValveAV63" diOpen="" doOpen="DO_ValveAV63" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
  1659. <IoValve id="ValveAV64" diOpen="" doOpen="DO_ValveAV64" display="ValveAV64" schematicId="" isNc="true" isDefaultOpen="false"/>
  1660. <IoValve id="ValveAV65" doOpen="DO_FFUAirInValveOpen" doClose="DO_FFUAirInValveClose" diOpenSensor="DI_AV65FFUAirInOpened" diCloseSensor="DI_AV65FFUAirInClosed" display="ValveAV65" schematicId="" isNc="true" isDefaultOpen="false"/>
  1661. <IoValve id="ValveAV66" diOpenSensor="DI_AV66CommonExhaustOpened" diCloseSensor="DI_AV66CommonExhaustClosed" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="ValveAV66" schematicId="" isNc="true" isDefaultOpen="false"/>
  1662. <IoValve id="ValveAV67" diOpen="" doOpen="DO_ValveAV67" display="ValveAV67" schematicId="" isNc="true" isDefaultOpen="false"/>
  1663. <IoValve id="ValveAV68" diOpen="" doOpen="DO_ValveAV68" display="ValveAV68" schematicId="" isNc="true" isDefaultOpen="false"/>
  1664. <IoValve id="ValveAV69" diOpen="" doOpen="DO_ValveAV69" display="ValveAV69" schematicId="" isNc="true" isDefaultOpen="false"/>
  1665. <IoValve id="ValveAV70" diOpen="" doOpen="DO_ValveAV70" display="ValveAV70" schematicId="" isNc="true" isDefaultOpen="false"/>
  1666. <IoValve id="ValveAV71" diOpen="" doOpen="DO_ValveAV71" display="ValveAV71" schematicId="" isNc="true" isDefaultOpen="false"/>
  1667. <IoValve id="ValveAV72" diOpen="" doOpen="DO_ValveAV72" display="ValveAV72" schematicId="" isNc="true" isDefaultOpen="false"/>
  1668. <IoValve id="ValveAV73" diOpen="" doOpen="DO_ValveAV73" display="ValveAV73" schematicId="" isNc="true" isDefaultOpen="false"/>
  1669. <IoValve id="ValveAV74" diOpen="" doOpen="DO_ValveAV74" display="ValveAV74" schematicId="" isNc="false" isDefaultOpen="false"/>
  1670. <IoValve id="ValveAV75" diOpen="" doOpen="DO_ValveAV75" display="ValveAV75" schematicId="" isNc="true" isDefaultOpen="false"/>
  1671. <IoValve id="ValveAV76" diOpen="" doOpen="DO_ValveAV76" display="ValveAV76" schematicId="" isNc="true" isDefaultOpen="false"/>
  1672. <IoValve id="ValveAV77" diOpen="" doOpen="DO_ValveAV77" display="ValveAV77" schematicId="" isNc="false" isDefaultOpen="false"/>
  1673. <IoValve id="ValveAV78" diOpen="" doOpen="DO_ValveAV78" display="ValveAV78" schematicId="" isNc="false" isDefaultOpen="false"/>
  1674. <IoValve id="ValveAV79" diOpen="" doOpen="DO_ValveAV79" display="ValveAV79" schematicId="" isNc="true" isDefaultOpen="false"/>
  1675. <IoValve id="ValveAV80" diOpen="" doOpen="DO_ValveAV80" display="ValveAV80" schematicId="" isNc="true" isDefaultOpen="false"/>
  1676. <IoValve id="ValveAV81" diOpen="" doOpen="DO_ValveAV81" display="ValveAV81" schematicId="" isNc="true" isDefaultOpen="false"/>
  1677. <IoValve id="ValveAV82" diOpen="" doOpen="DO_ValveAV82" display="ValveAV82" schematicId="" isNc="true" isDefaultOpen="false"/>
  1678. <IoValve id="ValveAV83" diOpen="" doOpen="DO_ValveAV83" display="ValveAV83" schematicId="" isNc="true" isDefaultOpen="false"/>
  1679. <IoValve id="ValveAV84" diOpen="" doOpen="DO_ValveAV84" display="ValveAV84" schematicId="" isNc="true" isDefaultOpen="false"/>
  1680. <IoValve id="ValveAV85" diOpen="" doOpen="DO_ValveAV85" display="ValveAV85" schematicId="" isNc="true" isDefaultOpen="false"/>
  1681. <IoValve id="ValveAV86" diOpen="" doOpen="DO_ValveAV86" display="ValveAV86" schematicId="" isNc="true" isDefaultOpen="false"/>
  1682. <IoValve id="ValveAV87" diOpen="" doOpen="DO_ValveAV87" display="ValveAV87" schematicId="" isNc="true" isDefaultOpen="false"/>
  1683. <IoValve id="ValveAV88" diOpen="" doOpen="DO_ValveAV88" display="ValveAV88" schematicId="" isNc="true" isDefaultOpen="false"/>
  1684. <IoValve id="ValveAV89" diOpen="" doOpen="DO_ValveAV89" display="ValveAV89" schematicId="" isNc="true" isDefaultOpen="false"/>
  1685. <IoValve id="ValveAV90" diOpen="" doOpen="DO_ValveAV90" display="ValveAV90" schematicId="" isNc="true" isDefaultOpen="false"/>
  1686. <IoValve id="ValveAV91" diOpen="" doOpen="DO_ValveAV91" display="ValveAV91" schematicId="" isNc="true" isDefaultOpen="false"/>
  1687. <IoValve id="ValveAV92" diOpen="" doOpen="DO_ValveAV92" display="ValveAV92" schematicId="" isNc="true" isDefaultOpen="false"/>
  1688. <IoValve id="ValveAV93" diOpen="" doOpen="DO_ValveAV93" display="ValveAV93" schematicId="" isNc="true" isDefaultOpen="false"/>
  1689. <IoValve id="ValveAV94" diOpen="" doOpen="DO_ValveAV94" display="ValveAV94" schematicId="" isNc="true" isDefaultOpen="false"/>
  1690. <IoValve id="ValveAV95" diOpen="" doOpen="DO_ValveAV95" display="ValveAV95" schematicId="" isNc="true" isDefaultOpen="false"/>
  1691. <IoValve id="ValveAV96" diOpen="" doOpen="DO_ValveAV96" display="ValveAV96" schematicId="" isNc="true" isDefaultOpen="false"/>
  1692. <IoValve id="ValveAV97" diOpen="" doOpen="DO_ValveAV97" display="ValveAV97" schematicId="" isNc="true" isDefaultOpen="false"/>
  1693. <IoValve id="ValveAV98" diOpen="" doOpen="DO_ValveAV98" display="ValveAV98" schematicId="" isNc="true" isDefaultOpen="false"/>
  1694. <IoValve id="ValveAV99" diOpen="" doOpen="DO_ValveAV99" display="ValveAV99" schematicId="" isNc="true" isDefaultOpen="false"/>
  1695. <IoValve id="ValveAV100" diOpen="" doOpen="DO_ValveAV100" display="ValveAV100" schematicId="" isNc="true" isDefaultOpen="false"/>
  1696. <IoValve id="ValveAV101" diOpen="" doOpen="DO_ValveAV101" display="ValveAV101" schematicId="" isNc="false" isDefaultOpen="false"/>
  1697. <IoValve id="ValveAV102" diOpen="" doOpen="DO_ValveAV102" display="ValveAV102" schematicId="" isNc="true" isDefaultOpen="false"/>
  1698. <IoValve id="ValveAV103" diOpen="" doOpen="DO_ValveAV103" display="ValveAV103" schematicId="" isNc="true" isDefaultOpen="false"/>
  1699. <IoValve id="ValveAV104" diOpen="" doOpen="DO_ValveAV104" display="ValveAV104" schematicId="" isNc="false" isDefaultOpen="false"/>
  1700. <IoValve id="ValveAV105" diOpen="" doOpen="DO_ValveAV105" display="ValveAV105" schematicId="" isNc="false" isDefaultOpen="false"/>
  1701. <IoValve id="ValveAV106" diOpen="" doOpen="DO_ValveAV106" display="ValveAV106" schematicId="" isNc="true" isDefaultOpen="false"/>
  1702. <IoValve id="ValveAV107" diOpen="" doOpen="DO_ValveAV107" display="ValveAV107" schematicId="" isNc="true" isDefaultOpen="false"/>
  1703. <IoValve id="ValveAV108" diOpen="" doOpen="DO_ValveAV108" display="ValveAV108" schematicId="" isNc="true" isDefaultOpen="false"/>
  1704. <IoValve id="ValveAV109" diOpen="" doOpen="DO_ValveAV109" display="ValveAV109" schematicId="" isNc="true" isDefaultOpen="false"/>
  1705. <IoValve id="ValveAV110" diOpen="" doOpen="DO_ValveAV110" display="ValveAV110" schematicId="" isNc="true" isDefaultOpen="false"/>
  1706. <IoValve id="ValveAV111" diOpen="" doOpen="DO_ValveAV111" display="ValveAV111" schematicId="" isNc="true" isDefaultOpen="false"/>
  1707. <IoValve id="ValveAV112" diOpen="" doOpen="DO_ValveAV112" display="ValveAV112" schematicId="" isNc="true" isDefaultOpen="false"/>
  1708. <IoValve id="ValveAV113" diOpen="" doOpen="DO_ValveAV113" display="ValveAV113" schematicId="" isNc="true" isDefaultOpen="false"/>
  1709. <IoValve id="ValveAV114" diOpen="" doOpen="DO_ValveAV114" display="ValveAV114" schematicId="" isNc="true" isDefaultOpen="false"/>
  1710. <IoValve id="ValveAV115" diOpen="" doOpen="DO_ValveAV115" display="ValveAV115" schematicId="" isNc="true" isDefaultOpen="false"/>
  1711. <IoValve id="ValveAV116" diOpen="" doOpen="DO_ValveAV116" display="ValveAV116" schematicId="" isNc="true" isDefaultOpen="false"/>
  1712. <IoValve id="ValveAV117" diOpen="" doOpen="DO_ValveAV117" display="ValveAV117" schematicId="" isNc="true" isDefaultOpen="false"/>
  1713. <IoValve id="ValveAV118" diOpen="" doOpen="DO_ValveAV118" display="ValveAV118" schematicId="" isNc="true" isDefaultOpen="false"/>
  1714. <IoValve id="ValveAV119" diOpen="" doOpen="DO_ValveAV119" display="ValveAV119" schematicId="" isNc="true" isDefaultOpen="false"/>
  1715. <IoValve id="ValveAV120" diOpen="" doOpen="DO_ValveAV120" display="ValveAV120" schematicId="" isNc="true" isDefaultOpen="false"/>
  1716. <IoValve id="ValveAV121" diOpen="" doOpen="DO_ValveAV121" display="ValveAV121" schematicId="" isNc="true" isDefaultOpen="false"/>
  1717. <IoValve id="ValveAV122" diOpen="" doOpen="DO_ValveAV122" display="ValveAV122" schematicId="" isNc="true" isDefaultOpen="false"/>
  1718. <IoValve id="ValveAV123" diOpen="" doOpen="DO_ValveAV123" display="ValveAV123" schematicId="" isNc="true" isDefaultOpen="false"/>
  1719. <IoValve id="ValveAV124" diOpen="" doOpen="DO_ValveAV124" display="ValveAV124" schematicId="" isNc="true" isDefaultOpen="false"/>
  1720. <IoValve id="ValveAV125" diOpen="" doOpen="DO_ValveAV125" display="ValveAV125" schematicId="" isNc="true" isDefaultOpen="false"/>
  1721. <IoValve id="ValveAV126" diOpen="" doOpen="DO_ValveAV126" display="ValveAV126" schematicId="" isNc="true" isDefaultOpen="false"/>
  1722. <IoValve id="ValveAV127" diOpen="" doOpen="DO_ValveAV127" display="ValveAV127" schematicId="" isNc="true" isDefaultOpen="false"/>
  1723. <IoValve id="ValveAV128" diOpen="" doOpen="DO_ValveAV128" display="ValveAV128" schematicId="" isNc="true" isDefaultOpen="false"/>
  1724. <IoValve id="ValveAV129" diOpen="" doOpen="DO_ValveAV129" display="ValveAV129" schematicId="" isNc="true" isDefaultOpen="false"/>
  1725. <IoValve id="ValveAV130" diOpen="" doOpen="DO_ValveAV130" display="ValveAV130" schematicId="" isNc="true" isDefaultOpen="false"/>
  1726. <IoValve id="ValveAV131" diOpen="" doOpen="DO_ValveAV131" display="ValveAV131" schematicId="" isNc="true" isDefaultOpen="false"/>
  1727. <IoValve id="ValveAV132" diOpen="" doOpen="DO_ValveAV132" display="ValveAV132" schematicId="" isNc="true" isDefaultOpen="false"/>
  1728. <IoValve id="ValveAV133" diOpen="" doOpen="DO_ValveAV133" display="ValveAV133" schematicId="" isNc="true" isDefaultOpen="false"/>
  1729. <IoValve id="ValveAV134" diOpen="" doOpen="DO_ValveAV134" display="ValveAV134" schematicId="" isNc="true" isDefaultOpen="false"/>
  1730. <IoValve id="ValveAV135" diOpen="" doOpen="DO_ValveAV135" display="ValveAV135" schematicId="" isNc="true" isDefaultOpen="false"/>
  1731. <IoValve id="ValveAV136" diOpen="" doOpen="DO_ValveAV136" display="ValveAV136" schematicId="" isNc="true" isDefaultOpen="false"/>
  1732. <IoValve id="ValveAV201" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1733. <IoValve id="ValveAV202" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1734. <IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1735. <IoValve id="ValveLADamper" doOpen="DO_LADamperOpen" doClose="DO_LADamperClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1736. <IoValve id="ValveFIMS1N2Purge" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
  1737. <IoValve id="ValveFIMS2N2Purge" doOpen="DO_FIMS2N2PurgeValveOpen" doClose="DO_FIMS2N2PurgeValveClose" display="ValveAV64" schematicId="" isNc="true" isDefaultOpen="false"/>
  1738. <IoValve id="ValveSV61" doOpen="DO_SV61Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1739. <IoValve id="ValveSV62" doOpen="DO_SV62Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1740. <IoValve id="ValveSV63" doOpen="DO_SV63Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1741. <IoValve id="ValveSV64" doOpen="DO_SV64Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
  1742. <IoValve id="ValveBlowerPowerOn" doOpen="DO_BlowerPowerOn" doClose="" display="Blower Power On" schematicId="" isNc="true" isDefaultOpen="false"/>
  1743. <IoValve id="AUCPump" doOpen="DO_VaccumPumpAUCOn" doClose="" display="AUCPump" schematicId="" isNc="true" isDefaultOpen="false"/>
  1744. <IoVae id="BothPump" doOpen="DO_VaccumPumpBothOn" diOpenSensor="DI_VaccumPumpBothOn" doClose="" display="BothPump" schematicId="" isNc="true" isDefaultOpen="false"/>
  1745. <IoValve id="AGVPump" doOpen="DO_VaccumPumpAGVOpen" doClose="" display="AGVPump" schematicId="" isNc="true" isDefaultOpen="false"/>
  1746. </IoValves>
  1747. <!--<IoPump3s classType="FurnaceRT.Devices.IoPump3" assembly="FurnaceRT">
  1748. <IoPump3 id="AUCPump" display="" doPowerOn="DO_VaccumPumpAUCOn" diPowerOn="DI_VaccumPumpBothOn" />
  1749. <IoPump3 id="BothPump" display="" doPowerOn="DO_VaccumPumpBothOn" diPowerOn="DI_VaccumPumpBothOn" />
  1750. <IoPump3 id="AGVPump" display="" doPowerOn="DO_VaccumPumpAGVOpen" diPowerOn="DI_VaccumPumpBothOn" />
  1751. </IoPump3s>-->
  1752. </DeviceModelDefine>