PMN2Purge.cs 19 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using DocumentFormat.OpenXml.Packaging;
  8. using FurnaceRT.Devices;
  9. using FurnaceRT.Equipments.PMs.Devices;
  10. using FurnaceRT.Extraction;
  11. using MECF.Framework.Common.CommonData.SorterDefines;
  12. using MECF.Framework.Common.Equipment;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  14. using System;
  15. using System.Collections.Generic;
  16. using System.Diagnostics;
  17. namespace FurnaceRT.Equipments.PMs
  18. {
  19. /// <summary>
  20. /// 分布类 定义N2Purge的执行逻辑
  21. /// </summary>
  22. public partial class PMModule
  23. {
  24. private R_TRIG _trigN2UpRD = new R_TRIG();
  25. private R_TRIG _trigN2DownRD = new R_TRIG();
  26. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  27. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  28. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  29. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  30. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  31. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  32. private Dictionary<string, R_TRIG> _rTrigDict;
  33. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  34. private double _n2PurgeData = 20;
  35. private double _n2ToAirData = 185000;
  36. private double _manualPhase2StabilityTime = 0;
  37. private double _manualPhase4StabilityTime = 0;
  38. private bool _manualPhase2NeedCheck = true;
  39. private bool _manualPhase4NeedCheck = true;
  40. private bool _enableAbortN2purge = true;
  41. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  42. private void InitN2PurgeData()
  43. {
  44. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  45. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  46. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  47. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  48. }
  49. private void InitN2PurgeConfigData()
  50. {
  51. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  52. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  53. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  54. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  55. _manualPhase2NeedCheck = _manualPhase2StabilityTime > 0;
  56. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  57. _manualPhase4NeedCheck = _manualPhase4StabilityTime > 0;
  58. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  59. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  60. {
  61. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  62. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  63. {"AIR",()=> GetN2PurgeAIRStatus()},
  64. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  65. {"Foup1",()=> GetN2PurgeFoup1Status()},
  66. {"Foup2",()=> GetN2PurgeFoup2Status()},
  67. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  68. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  69. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  70. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  71. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> GetN2PurgePhase5() },
  72. };
  73. _allTimeDict = new Dictionary<string, Stopwatch>()
  74. {
  75. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  76. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  77. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  78. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  79. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  80. };
  81. _rTrigDict = new Dictionary<string, R_TRIG>();
  82. }
  83. private void MonitorN2Purge()
  84. {
  85. if (IsAbortN2purge())
  86. {
  87. SC.SetItemValue("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ATMMode.ToString());
  88. }
  89. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  90. if (string.IsNullOrEmpty(selectN2PurgeMode))
  91. {
  92. return;
  93. }
  94. SetN2PurgeModeAction(selectN2PurgeMode);
  95. }
  96. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  97. {
  98. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  99. switch (_N2PurgeMode)
  100. {
  101. case N2PurgeModeEnum.Auto:
  102. // 自动模式下的操作
  103. break;
  104. case N2PurgeModeEnum.ManualMode:
  105. break;
  106. case N2PurgeModeEnum.N2PurgeMode:
  107. ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  108. ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  109. break;
  110. case N2PurgeModeEnum.ATMMode:
  111. ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  112. ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  113. ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  114. break;
  115. }
  116. }
  117. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  118. {
  119. var stopwatch = _allTimeDict[modeKey];
  120. if (!_allTimeDict[modeKey].IsRunning)
  121. {
  122. _allTimeDict[modeKey].Restart();
  123. }
  124. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  125. {
  126. if (!condition())
  127. {
  128. _allTimeDict[modeKey].Stop();
  129. _allTimeDict[modeKey].Reset();
  130. return false;
  131. }
  132. }
  133. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  134. {
  135. _allTimeDict[modeKey].Stop();
  136. _allTimeDict[modeKey].Reset();
  137. }
  138. return true;
  139. }
  140. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  141. {
  142. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  143. if (r_TRIG.Q)
  144. {
  145. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  146. SetN2PurgeValveData(modeKey);
  147. _allTimeDict[modeKey].Stop();
  148. _allTimeDict[modeKey].Reset();
  149. }
  150. }
  151. public void RestAllN2PrugeRD()
  152. {
  153. _trigN2AirDownRD.RST = false;
  154. _trigN2AirUpRD.RST = false;
  155. _trigN2DownRD.RST = false;
  156. _trigN2UpRD.RST = false;
  157. foreach (var item in _allTimeDict)
  158. {
  159. item.Value.Stop();
  160. item.Value.Reset();
  161. }
  162. }
  163. private void SetN2PurgeValveData(string mode)
  164. {
  165. var value = _n2PurgeSequenceAction[mode];
  166. foreach (var operateItem in value.Item2)
  167. {
  168. if (operateItem.Item1 is IoMFC)
  169. {
  170. var ioMFc = (operateItem.Item1 as IoMFC);
  171. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  172. }
  173. if (operateItem.Item1 is IoValve)
  174. {
  175. var ioValve = (operateItem.Item1 as IoValve);
  176. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  177. }
  178. if (operateItem.Item1 is IoTrigger)
  179. {
  180. var ioTrigger = (operateItem.Item1 as IoTrigger);
  181. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  182. }
  183. }
  184. }
  185. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  186. {
  187. reason = string.Empty;
  188. var mode = param[0].ToString();
  189. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  190. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  191. {
  192. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  193. }
  194. RestAllN2PrugeRD();
  195. return true;
  196. }
  197. /// <summary>
  198. /// 获取当前O2检测位置的设定值
  199. /// </summary>
  200. /// <returns></returns>
  201. private string GetO2SetCheckSetPoint()
  202. {
  203. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  204. {
  205. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  206. if (SC.ContainsItem(key))
  207. return SC.GetValue<double>(key).ToString("f3");
  208. }
  209. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  210. {
  211. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  212. if (SC.ContainsItem(key))
  213. return SC.GetValue<double>(key).ToString("f3");
  214. }
  215. return "";
  216. }
  217. /// <summary>
  218. /// 获取当前O2检测位置
  219. /// </summary>
  220. /// <returns></returns>
  221. private string GetCheckO2Location()
  222. {
  223. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  224. return SensorO2DetectSideLA.Display;
  225. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  226. return SensorO2DetectSideFIMS1.Display;
  227. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  228. return SensorO2DetectSideFIMS2.Display;
  229. return "";
  230. }
  231. /// <summary>
  232. /// 获取当前O2浓度
  233. /// </summary>
  234. /// <returns></returns>
  235. private string GetO2DensityData()
  236. {
  237. var result = "";
  238. result = ConcentrationO2.FeedBack.ToString("f3");
  239. return result;
  240. }
  241. private double GetO2Density()
  242. {
  243. return ConcentrationO2.FeedBack;
  244. }
  245. private bool GetN2PurgePhase1()
  246. {
  247. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  248. }
  249. private bool GetN2PurgePhase2()
  250. {
  251. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  252. }
  253. private bool GetN2PurgePhase3()
  254. {
  255. return GetO2Density() < _n2ToAirData && GetLADoorOpenStatus();
  256. }
  257. private bool GetN2PurgePhase5()
  258. {
  259. return GetO2Density() >= _n2ToAirData && !GetLADoorOpenStatus();
  260. }
  261. private bool GetN2PurgePhase4()
  262. {
  263. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  264. }
  265. private bool GetN2PurgeAIRTo20PPMStatus()
  266. {
  267. return ValveAV202.DOOpen.Value;
  268. }
  269. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  270. {
  271. return ConcentrationO2.Value < value;
  272. }
  273. private bool GetN2PurgeAIRStatus()
  274. {
  275. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  276. }
  277. private bool GetLADoorOpenStatus()
  278. {
  279. return (bool)(SensorLADoorSw1?.Value);
  280. }
  281. private bool GetN2PurgeDoorOpenStatus()
  282. {
  283. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  284. }
  285. private bool GetN2PurgeFoup1Status()
  286. {
  287. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  288. }
  289. private bool GetN2PurgeFoup2Status()
  290. {
  291. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  292. }
  293. public bool IsAbortN2purge()
  294. {
  295. if (!_enableAbortN2purge)
  296. {
  297. return false;
  298. }
  299. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  300. {
  301. return true;
  302. }
  303. return false;
  304. }
  305. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  306. {
  307. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  308. {
  309. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  310. }
  311. }
  312. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  313. {
  314. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  315. {
  316. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  317. }
  318. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  319. {
  320. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  321. }
  322. }
  323. public void SetN2PurgeProcess(bool isEable)
  324. {
  325. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  326. {
  327. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  328. }
  329. }
  330. public void SetN2PurgeLAO2CheckSV(float value)
  331. {
  332. if (TrigN2PurgeLAO2CheckSV != null)
  333. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  334. }
  335. public void SetN2PurgeFOUPO2CheckSV(float value)
  336. {
  337. if (TrigN2PurgeFOUPO2CheckSV != null)
  338. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  339. }
  340. public void SetAVParameter(ModuleName fims, bool isEable)
  341. {
  342. if (fims == ModuleName.FIMS1)
  343. {
  344. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  345. avValve58?.TurnValve(isEable, out _);
  346. }
  347. if (fims == ModuleName.FIMS2)
  348. {
  349. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  350. avValve59?.TurnValve(isEable, out _);
  351. }
  352. }
  353. /// <summary>
  354. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  355. /// </summary>
  356. public void SetN2PurgeParameters()
  357. {
  358. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  359. {
  360. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime") * 1000;
  361. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  362. }
  363. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  364. {
  365. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime") * 1000;
  366. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  367. }
  368. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  369. {
  370. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime") * 1000;
  371. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  372. }
  373. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  374. {
  375. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime") * 1000;
  376. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  377. }
  378. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  379. {
  380. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") * 1000;
  381. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  382. }
  383. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  384. {
  385. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") * 1000;
  386. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  387. }
  388. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  389. {
  390. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime") * 1000;
  391. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  392. }
  393. }
  394. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  395. {
  396. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  397. {
  398. if (!isN2Purge)
  399. {
  400. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  401. }
  402. else
  403. {
  404. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  405. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  406. }
  407. RestAllN2PrugeRD();
  408. }
  409. }
  410. }
  411. }