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- using Aitex.Core.Common.DeviceData;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.RT.Tolerance;
- using Aitex.Core.Util;
- using Aitex.Core.Utilities;
- using MECF.Framework.Common.Event;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
- using System;
- using System.Collections;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Xml;
- namespace FurnaceRT.Equipments.PMs.Devices
- {
- public class IoMFC : BaseDevice, IDevice, IMfc
- {
- public string Unit
- {
- get; set;
- }
- public double Scale
- {
- get
- {
- if (_scN2Scale == null || _scScaleFactor == null)
- return 0;
- return _scN2Scale.DoubleValue * _scScaleFactor.DoubleValue;
- }
- }
- private double _setpoint;
- public double SetPoint
- {
- get
- {
- return _setpoint;
- }
- set
- {
- _setpoint = value;
- if (_aoFlow != null)
- {
- //var setpoint = Scale != 0 ? (float)(value * _maxScale / Scale) : value;
- if (_isFloatAioType)
- _aoFlow.FloatValue = (float)value;
- else
- _aoFlow.Value = (short)value;
- }
- }
- }
- public double DefaultSetPoint
- {
- get
- {
- if (_scDefaultSetPoint != null)
- return _scDefaultSetPoint.DoubleValue;
- return 0;
- }
- }
- public double FeedBack
- {
- get
- {
- if (_aiFlow != null)
- {
- return _isFloatAioType ? _aiFlow.FloatValue : _aiFlow.Value;
- //var phy = _aiFlow == null ? 0 : (_isFloatAioType ? _aiFlow.FloatValue : _aiFlow.Value);
- //return Converter.Phy2Logic(phy, 0, Scale, 0, _phyScale);
- //return _maxScale != 0 ? aiValue * Scale / _maxScale : aiValue;
- }
- return 0;
- }
- }
- public bool EnableAlarm
- {
- get
- {
- if (_scEnableAlarm != null)
- return _scEnableAlarm.BoolValue;
- return false;
- }
- }
- public bool IsStable
- {
- get
- {
- if (!_stableDelayTimer.IsIdle() && _stableDelayTimer.GetElapseTime() >= _stableDelayTime * 1000)
- {
- if (_stableJudgmentTimer.IsRunning)
- {
- if (FeedBack < SetPoint * (100 - _stableMinValue) / 100 ||
- FeedBack > SetPoint * (100 + _stableMaxValue) / 100)
- {
- _stableJudgmentTimer.Restart();
- }
- if (_stableJudgmentTimer.ElapsedMilliseconds >= _stableJudgmentTime * 1000)
- {
- return true;
- }
- }
- else
- {
- _stableJudgmentTimer.Restart();
- }
- }
- return false;
- }
- }
- public AITMfcData DeviceData
- {
- get
- {
- AITMfcData data = new AITMfcData()
- {
- UniqueName = $"{Module}.{Name}",
- Type = "MFC",
- Module = Module,
- DeviceName = Name,
- DeviceSchematicId = DeviceID,
- DisplayName = DisplayName,
- FeedBack = FeedBack < 0 ? 0 : FeedBack,
- SetPoint = SetPoint,
- Ramping = _ramping,
- AlarmWatchTable = AlarmWatchTable,
- Scale = Scale,
- //IsWarning = !AlarmToleranceWarning.IsAcknowledged,
- //IsError = !AlarmToleranceAlarm.IsAcknowledged,
- Unit = Unit,
- VirtualSetPoint = (float)VirtualSetPoint,
- VirtualFeedBack = (float)VirtualFeedBack,
- VirtualAlarmWatchTable = VirtualAlarmWatchTable,
- VirtualRamping = VirtualRamping,
- IsInstalled= IsMFCInstalled
- };
- return data;
- }
- }
- public string DisplayName
- {
- get
- {
- if (_scGasName != null)
- return _scGasName.StringValue;
- return Display;
- }
- }
- public string AlarmWatchTable
- {
- get;
- set;
- }
- public double VirtualSetPoint;
- public double VirtualFeedBack;
- public string VirtualAlarmWatchTable;
- public float VirtualRamping;
- private DeviceTimer _rampTimer = new DeviceTimer();
- private double _rampTarget;
- private double _rampInitValue;
- private int _rampTime;
- private float _ramping;
- private double _phyScale;
- private ToleranceChecker _toleranceCheckerWarning = new ToleranceChecker();
- private ToleranceChecker _toleranceCheckerAlarm = new ToleranceChecker();
- private AIAccessor _aiFlow;
- private AOAccessor _aoFlow;
- private AOAccessor _aoRamp;
- private bool _isErrorStatus;
- private bool _isMFCInstalled;
- private int _mfcIndex;
- public bool IsMFCInstalled
- {
- get { return _isMFCInstalled; }
- }
- public int MFCIndex
- {
- get { return _mfcIndex; }
- }
- protected SCConfigItem _scGasName;
- protected SCConfigItem _scEnable;
- private SCConfigItem _scN2Scale;
- private SCConfigItem _scScaleFactor;
- private SCConfigItem _scEnableAlarm;
- private SCConfigItem _scDefaultSetPoint;
- private SCConfigItem _scRegulationFactor;
- //tolerance check
- private float _alarmJudgmentRange;
- private float _warningJudgmentRange;
- private float _alarmJudgmentTime;
- private float _warningJudgmentTime;
- private float _toleranceJudgmentDelayTime;
- private DeviceTimer _toleranceJudgmentDelayTimer = new DeviceTimer();
- //stable check
- private DeviceTimer _stableDelayTimer = new DeviceTimer();
- private float _stableDelayTime;
- private Stopwatch _stableJudgmentTimer = new Stopwatch();
- private float _stableJudgmentTime = 1;
- private float _stableMinValue;
- private float _stableMaxValue;
- public AlarmEventItem AlarmToleranceWarning { get; set; }
- public AlarmEventItem AlarmToleranceAlarm { get; set; }
- private bool _isFloatAioType = false;
- private bool _isWait;
- private float _waitHigh;
- private float _waitLow;
- private string _writeLog = "";
- public IoMFC(string module, XmlElement node, string ioModule = "")
- {
- Unit = node.GetAttribute("unit");
- base.Module = string.IsNullOrEmpty(node.GetAttribute("module")) ? module : node.GetAttribute("module");
- base.Name = node.GetAttribute("id");
- base.Display = node.GetAttribute("display");
- base.DeviceID = node.GetAttribute("schematicId");
- _aiFlow = ParseAiNode("aiFlow", node, ioModule);
- _aoFlow = ParseAoNode("aoFlow", node, ioModule);
- _aoRamp = ParseAoNode("aoRamp", node, ioModule);
- _isFloatAioType = !string.IsNullOrEmpty(node.GetAttribute("aioType")) && (node.GetAttribute("aioType") == "float");
- string scBasePath = node.GetAttribute("scBasePath");
- if (string.IsNullOrEmpty(scBasePath))
- scBasePath = $"{Module}.MFC.{Name}";
- else
- {
- scBasePath = scBasePath.Replace("{module}", Module);
- }
- _scGasName = SC.GetConfigItem($"{scBasePath}.{Name}.GasName");
- _scEnable = SC.GetConfigItem($"{scBasePath}.{Name}.Enable");
- _isMFCInstalled = SC.GetConfigItem($"{scBasePath}.{Name}.IsMFCInstalled").BoolValue;
- _scN2Scale = ParseScNode("scN2Scale", node, ioModule, $"{scBasePath}.{Name}.N2Scale");
- _scScaleFactor = ParseScNode("scScaleFactor", node, ioModule, $"{scBasePath}.{Name}.ScaleFactor");
- _scEnableAlarm = ParseScNode("scEnableAlarm", node, ioModule, $"{scBasePath}.{Name}.EnableAlarm");
- _scDefaultSetPoint = ParseScNode("scDefaultSetPoint", node, ioModule, $"{scBasePath}.{Name}.DefaultSetPoint");
- _scRegulationFactor = ParseScNode("scFlowRegulationFactor", node, ioModule, $"{scBasePath}.{Name}.RegulationFactor");
- if (SC.ContainsItem($"{scBasePath}.{Name}.FlowUnit"))
- Unit = SC.GetStringValue($"{scBasePath}.{Name}.FlowUnit");
- }
- public bool Initialize()
- {
- DATA.Subscribe($"{Module}.{Name}.DeviceData", () => DeviceData);
-
- DATA.Subscribe($"{Module}.{Name}.Feedback", () => FeedBack);
- DATA.Subscribe($"{Module}.{Name}.SetPoint", () => SetPoint);
- // DATA.Subscribe($"{Module}.{Name}.ForceOpen", () => _doOpen.Value);
- // DATA.Subscribe($"{Module}.{Name}.ForceClose", () => _doClose.Value);
- OP.Subscribe($"{Module}.{Name}.Ramp", (out string reason, int time, object[] param) =>
- {
- double target = Convert.ToDouble(param[0].ToString());
- if (target < 0 || target > Scale)
- {
- reason = $"set {Display} value {target} out of range [0, {Scale}] {Unit}";
- return false;
- }
- Ramp(target, time);
- if (time > 0)
- {
- reason = $"{Display} ramp to {target} {Unit} in {time} seconds";
- }
- else
- {
- reason = $"{Display} ramp to {target} {Unit}";
- }
- return true;
- });
- OP.Subscribe($"{Module}.{Name}.SetParameters", SetParameters);
- OP.Subscribe($"{Module}.{Name}.SetMfcValue", SetMfcValue);
- OP.Subscribe($"{Module}.{Name}.SetMfcVirtualValue", SetMfcVirtualValue);
- //_phyScale = SC.GetValue<double>($"{Module}.MFC.{Name}.PhyScale");
- return true;
- }
- public void Monitor()
- {
- if(!string.IsNullOrEmpty(_writeLog))
- {
- LOG.Write(_writeLog);
- _writeLog = "";
- }
- //MonitorRamping();
- //MonitorTolerance();
- }
- public bool ResetWarningChecker()
- {
- _toleranceCheckerWarning.Reset(_warningJudgmentTime);
- return true;
- }
- public bool ResetAlarmChecker()
- {
- _toleranceCheckerAlarm.Reset(_alarmJudgmentTime);
- return true;
- }
- public void Reset()
- {
- _toleranceCheckerWarning.Reset(_warningJudgmentTime);
- _toleranceCheckerAlarm.Reset(_alarmJudgmentTime);
- //AlarmToleranceWarning.Reset();
- //AlarmToleranceAlarm.Reset();
- }
- public void Terminate()
- {
- Ramp(DefaultSetPoint, 0);
- }
- private bool SetParameters(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- var paras = param[0].ToString().Split(';');//flow;rampTime
- _isWait = false;
- float setpoint = 0.0f;
- if (paras[0].ToString() == "Continue")
- {
- EV.PostInfoLog(Module, $"Set {DisplayName} flow to Continue");
- return true;
- }
- else
- {
- if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
- {
- var table = paras[0].ToString().Split(':')[0];
- if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
- setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
- }
- else
- {
- float.TryParse(paras[0].ToString(), out setpoint);
- }
- }
- float ramp = 0;
- if (paras.Length > 1)
- float.TryParse(paras[1].ToString(), out ramp);
- if (paras.Length >= 8)
- {
- var setUnit = paras[2].ToString();
- var ramprateUnit = paras[3].ToString();
- bool.TryParse(paras[4].ToString(), out _isWait);
- float.TryParse(paras[5].ToString(), out float waitHigh);
- float.TryParse(paras[6].ToString(), out float waitLow);
- var waitUnit = paras[7].ToString();
- if(waitUnit.ToLower() == "%sv")
- {
- _waitHigh = setpoint * waitHigh;
- _waitLow = setpoint * waitLow;
- }
- else if(waitUnit.ToLower() == "%fs")
- {
- _waitHigh = (float)_scN2Scale.DoubleValue * waitHigh;
- _waitLow = (float)_scN2Scale.DoubleValue * waitLow;
- }
- else
- {
- _waitHigh = waitHigh;
- _waitLow = waitLow;
- }
- _stableJudgmentTimer.Stop();
- if (ramprateUnit.ToLower() == "time")
- {
- if (ramp > 0)
- ramp = (float)(setpoint - FeedBack) / ramp;
- }
- else if (ramprateUnit.ToLower() == "%")
- {
- ramp = (float)_scN2Scale.DoubleValue * ramp;
- }
- }
- SetPoint = setpoint;
- if (_aoRamp != null)
- {
- _aoRamp.FloatValue = ramp;
- }
- if (SC.ContainsItem($"PM1.MFC.{Name}.SetLastPoint"))
- {
- SC.SetItemValue($"PM1.MFC.{Name}.SetLastPoint", setpoint);
- }
- //LOG.Write($"{Name} setpoint={setpoint}, ramp={ramp} wait={_isWait} waitHigh={_waitHigh} waitLow={_waitLow}");
- _writeLog = $"{Name} setpoint={setpoint}, ramp={ramp} wait={_isWait} waitHigh={_waitHigh} waitLow={_waitLow}";
- return true;
- }
- public bool SetMfcValue(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- float setpoint = 0.0f;
- var paras = param[0].ToString().Split(';'); // setpoint;ramping;alarmWatchTable
- if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
- {
- var table = paras[0].ToString().Split(':')[0];
- if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
- setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
- }
- else
- {
- float.TryParse(paras[0].ToString(), out setpoint);
- }
- float ramp = 0;
- if (paras.Length > 1)
- float.TryParse(paras[1].ToString(), out ramp);
- if (paras.Length > 2)
- {
- }
- SetPoint = setpoint;
- _ramping = ramp;
- if(_aoRamp!=null)
- _aoRamp.FloatValue = ramp;
- LOG.Write($"{Name} setpoint={setpoint}, ramp={ramp}");
- return true;
- }
- public bool SetMfcSetPoint(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- float setpoint = 0.0f;
- var paras = param[0].ToString().Split(';'); // setpoint;ramping;alarmWatchTable
- if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
- {
- var table = paras[0].ToString().Split(':')[0];
- if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
- setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
- }
- else
- {
- float.TryParse(paras[0].ToString(), out setpoint);
- }
- float ramp = 0;
- if (paras.Length > 1)
- float.TryParse(paras[1].ToString(), out ramp);
- _setpoint = setpoint;
- _ramping = ramp;
- if(_aoRamp!=null)
- _aoRamp.FloatValue = ramp;
- LOG.Write($"{Name} setpoint={setpoint}, ramp={ramp}");
- return true;
- }
- public bool SetMfcVirtualValue(out string reason, int time, object[] param)
- {
- reason = string.Empty;
- float setpoint = 0.0f;
- var paras = param[0].ToString().Split(';'); // setpoint;ramping;alarmWatchTable
- if (System.Text.RegularExpressions.Regex.Match(paras[0].ToString(), @"[a-zA-Z]").Success)
- {
- var table = paras[0].ToString().Split(':')[0];
- if (SC.ContainsItem($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}"))
- setpoint = (float)SC.GetValue<double>($"{Module}.RecipeEditParameter.FlowSetting.{Name}.{table}");
- }
- else
- {
- float.TryParse(paras[0].ToString(), out setpoint);
- }
- VirtualSetPoint = setpoint;
- VirtualFeedBack = setpoint;
- if (paras.Length > 1)
- {
- float.TryParse(paras[1].ToString(), out _ramping);
- VirtualRamping = _ramping;
- }
- return true;
- }
- public bool Ramp(double flowSetPoint, int time, out string reason)
- {
- if (HasAlarm)
- {
- reason = $"{DisplayName} in error status, can not flow";
- return false;
- }
- if (flowSetPoint < 0 || flowSetPoint > Scale)
- {
- reason = $"{DisplayName} range is [0, {Scale}], can not flow {flowSetPoint}";
- return false;
- }
- if (time > 0)
- {
- EV.PostInfoLog(Module, $"Set {DisplayName} flow to {flowSetPoint} {Unit} in {time / 1000:F0} seconds");
- }
- else
- {
- EV.PostInfoLog(Module, $"Set {DisplayName} flow to {flowSetPoint} {Unit}");
- }
- Ramp(flowSetPoint, time);
- reason = string.Empty;
- return true;
- }
- public void Ramp(int time)
- {
- Ramp(DefaultSetPoint, time);
- }
- public void Ramp(double target, int time)
- {
- target = Math.Max(0, target);
- target = Math.Min(Scale, target);
- _rampInitValue = FeedBack; //ramp 初始值取当前设定值,而非实际读取值.零漂问题
- _rampTime = time;
- _rampTarget = target;
- _rampTimer.Start(time);
- }
- public void StopRamp()
- {
- Ramp(SetPoint, 0);
- }
- private void MonitorRamping()
- {
- if (!_rampTimer.IsIdle())
- {
- if (_rampTimer.IsTimeout() || _rampTime == 0)
- {
- _rampTimer.Stop();
- SetPoint = _rampTarget;
- }
- else
- {
- SetPoint = _rampInitValue + (_rampTarget - _rampInitValue) * _rampTimer.GetElapseTime() / _rampTime;
- }
- }
- }
- private void MonitorTolerance()
- {
- if (!EnableAlarm || SetPoint < 0.01 ||
- _toleranceJudgmentDelayTimer.IsIdle() ||
- _toleranceJudgmentDelayTimer.GetElapseTime() < _toleranceJudgmentDelayTime * 1000)
- {
- _toleranceCheckerWarning.RST = true;
- _toleranceCheckerAlarm.RST = true;
- return;
- }
- if (_warningJudgmentRange != 0 && _warningJudgmentTime > 0)
- {
- _toleranceCheckerWarning.Monitor(FeedBack, (SetPoint - Math.Abs(_warningJudgmentRange)), (SetPoint + Math.Abs(_warningJudgmentRange)), _warningJudgmentTime);
- if (_toleranceCheckerWarning.Trig)
- {
- //AlarmToleranceWarning.Description = $"{Display} flow out of range {_warningJudgmentRange} {Unit} in {_warningJudgmentTime:F0} seconds";
- AlarmToleranceWarning.Set($"{Display} flow out of range {_warningJudgmentRange} {Unit} in {_warningJudgmentTime:F0} seconds");
- }
- }
- if (_alarmJudgmentRange != 0 && _alarmJudgmentTime > 0)
- {
- _toleranceCheckerAlarm.Monitor(FeedBack, (SetPoint - Math.Abs(_alarmJudgmentRange)), (SetPoint + Math.Abs(_alarmJudgmentRange)), _alarmJudgmentTime);
- if (_toleranceCheckerAlarm.Trig)
- {
- //AlarmToleranceAlarm.Description = $"{Display} flow out of range {_alarmJudgmentRange} {Unit} in {_alarmJudgmentTime:F0} seconds";
- AlarmToleranceAlarm.Set($"{Display} flow out of range {_alarmJudgmentRange} {Unit} in {_alarmJudgmentTime:F0} seconds");
- }
- }
- }
- public bool CheckWaitCondition(out string reason)
- {
- reason = "";
- if (!_isWait || _waitHigh == 0 || _waitLow == 0)
- return true;
- if (_stableJudgmentTimer.IsRunning)
- {
- if (FeedBack < SetPoint - _waitLow ||
- FeedBack > SetPoint + _waitHigh)
- {
- _stableJudgmentTimer.Restart();
- }
- if (_stableJudgmentTimer.ElapsedMilliseconds >= _stableJudgmentTime * 1000)
- {
- return true;
- }
- }
- else
- {
- _stableJudgmentTimer.Restart();
- }
- reason = $"{Name} feedback={FeedBack}, wait limit is ({SetPoint - _waitLow}, {SetPoint + _waitHigh})";
- return false;
- }
- }
- }
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