PMN2Purge.cs 26 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using DocumentFormat.OpenXml.Packaging;
  8. using FurnaceRT.Devices;
  9. using FurnaceRT.Equipments.PMs.Devices;
  10. using FurnaceRT.Extraction;
  11. using MECF.Framework.Common.CommonData.SorterDefines;
  12. using MECF.Framework.Common.Equipment;
  13. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  14. using System;
  15. using System.Collections.Generic;
  16. using System.Diagnostics;
  17. namespace FurnaceRT.Equipments.PMs
  18. {
  19. /// <summary>
  20. /// 分布类 定义N2Purge的执行逻辑
  21. /// </summary>
  22. public partial class PMModule
  23. {
  24. private R_TRIG _trigN2UpRD = new R_TRIG();
  25. private R_TRIG _trigN2DownRD = new R_TRIG();
  26. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  27. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  28. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  29. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  30. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  31. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  32. private Dictionary<string, R_TRIG> _rTrigDict;
  33. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  34. private double _n2PurgeData = 20;
  35. private double _n2ToAirData = 185000;
  36. private N2PurgeModeEnum _currentPhase;
  37. private double _manualPhase2StabilityTime = 0;
  38. private double _manualPhase4StabilityTime = 0;
  39. private bool _enableAbortN2purge = true;
  40. private int _phase1CycleCount = 0;
  41. private int _phase1CycleCountSC = 0;
  42. private bool _canSwitchToPhase2 = true;
  43. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  44. private void InitN2PurgeData()
  45. {
  46. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  47. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  48. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  49. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  50. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  51. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  52. {
  53. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  54. {
  55. SetN2PurgeModeAction(selectN2PurgeMode);
  56. }
  57. }
  58. }
  59. private void InitN2PurgeConfigData()
  60. {
  61. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  62. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  63. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  64. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  65. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  66. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  67. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  68. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  69. {
  70. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  71. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  72. {"AIR",()=> GetN2PurgeAIRStatus()},
  73. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  74. {"Foup1",()=> GetN2PurgeFoup1Status()},
  75. {"Foup2",()=> GetN2PurgeFoup2Status()},
  76. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  77. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  78. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  79. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  80. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> GetN2PurgePhase5() },
  81. };
  82. _allTimeDict = new Dictionary<string, Stopwatch>()
  83. {
  84. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  85. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  86. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  87. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  88. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  89. };
  90. _rTrigDict = new Dictionary<string, R_TRIG>();
  91. }
  92. private void MonitorN2Purge()
  93. {
  94. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  95. if (string.IsNullOrEmpty(selectN2PurgeMode))
  96. {
  97. return;
  98. }
  99. SetN2PurgeModeAction(selectN2PurgeMode);
  100. }
  101. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  102. {
  103. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  104. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  105. {
  106. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  107. {
  108. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase2.ToString()].Invoke() && _canSwitchToPhase2)
  109. {
  110. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString(), "from Manual_phase1 to Manual_phase2");
  111. }
  112. }
  113. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  114. {
  115. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  116. {
  117. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  118. }
  119. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  120. if (second >= _manualPhase2StabilityTime)
  121. {
  122. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase1.ToString()].Invoke())
  123. {
  124. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString(), "from Manual_phase2 to Manual_phase1");
  125. N2PurgeFaileAlarm.Set();
  126. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  127. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  128. _canSwitchToPhase2 = false;
  129. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {_manualPhase2StabilityTime} seconds later");
  130. }
  131. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase2.ToString()].Invoke())
  132. {
  133. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {_manualPhase2StabilityTime} seconds later");
  134. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  135. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  136. _canSwitchToPhase2 = false;
  137. }
  138. }
  139. }
  140. else
  141. {
  142. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase1.ToString()].Invoke())
  143. {
  144. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  145. }
  146. else if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase2.ToString()].Invoke())
  147. {
  148. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  149. }
  150. }
  151. }
  152. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  153. {
  154. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  155. {
  156. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase4.ToString()].Invoke())
  157. {
  158. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  159. {
  160. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  161. }
  162. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  163. if (second >= _manualPhase4StabilityTime)
  164. {
  165. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString(), "from Manual_phase3 to Manual_phase4");
  166. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  167. }
  168. }
  169. }
  170. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  171. {
  172. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase5.ToString()].Invoke())
  173. {
  174. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString(), "from Manual_phase4 to Manual_phase5");
  175. }
  176. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase3.ToString()].Invoke())
  177. {
  178. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString(), "from Manual_phase4 to Manual_phase3");
  179. }
  180. }
  181. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  182. {
  183. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase4.ToString()].Invoke())
  184. {
  185. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString(), "from Manual_phase5 to Manual_phase4");
  186. }
  187. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase3.ToString()].Invoke())
  188. {
  189. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString(), "from Manual_phase5 to Manual_phase3");
  190. }
  191. }
  192. else
  193. {
  194. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase3.ToString()].Invoke())
  195. {
  196. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  197. }
  198. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase5.ToString()].Invoke())
  199. {
  200. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  201. }
  202. if (_n2PurgeSequenceStatus[N2PurgeModeEnum.Manual_phase4.ToString()].Invoke())
  203. {
  204. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  205. }
  206. }
  207. }
  208. //switch (_N2PurgeMode)
  209. //{
  210. // case N2PurgeModeEnum.Auto:
  211. // // 自动模式下的操作
  212. // break;
  213. // case N2PurgeModeEnum.ManualMode:
  214. // break;
  215. // case N2PurgeModeEnum.N2PurgeMode:
  216. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  217. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  218. // break;
  219. // case N2PurgeModeEnum.ATMMode:
  220. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  221. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  222. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  223. // break;
  224. //}
  225. }
  226. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  227. {
  228. var stopwatch = _allTimeDict[modeKey];
  229. if (!_allTimeDict[modeKey].IsRunning)
  230. {
  231. _allTimeDict[modeKey].Restart();
  232. }
  233. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  234. {
  235. if (!_allTimeDict[modeKey].IsRunning)
  236. {
  237. return true;
  238. }
  239. if (!condition())
  240. {
  241. _allTimeDict[modeKey].Stop();
  242. _allTimeDict[modeKey].Reset();
  243. return false;
  244. }
  245. }
  246. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  247. {
  248. _allTimeDict[modeKey].Stop();
  249. _allTimeDict[modeKey].Reset();
  250. }
  251. return true;
  252. }
  253. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  254. {
  255. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  256. if (r_TRIG.Q)
  257. {
  258. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  259. SetN2PurgeValveData(modeKey);
  260. _allTimeDict[modeKey].Stop();
  261. _allTimeDict[modeKey].Reset();
  262. }
  263. }
  264. public void RestAllN2PrugeRD()
  265. {
  266. _trigN2AirDownRD.RST = false;
  267. _trigN2AirUpRD.RST = false;
  268. _trigN2DownRD.RST = false;
  269. _trigN2UpRD.RST = false;
  270. foreach (var item in _allTimeDict)
  271. {
  272. item.Value.Stop();
  273. item.Value.Reset();
  274. }
  275. }
  276. private void SetN2PurgeValveData(string mode, string msg = "")
  277. {
  278. string message = string.IsNullOrEmpty(msg) ? $"N2PurgeMode Trigger {mode},O2:{GetO2Density()}" : $"N2PurgeMode Trigger {msg},O2:{GetO2Density()}";
  279. LOG.Info(message);
  280. var value = _n2PurgeSequenceAction[mode];
  281. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  282. foreach (var operateItem in value.Item2)
  283. {
  284. if (operateItem.Item1 is IoMFC)
  285. {
  286. var ioMFc = (operateItem.Item1 as IoMFC);
  287. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  288. }
  289. if (operateItem.Item1 is IoValve)
  290. {
  291. var ioValve = (operateItem.Item1 as IoValve);
  292. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  293. }
  294. if (operateItem.Item1 is IoTrigger)
  295. {
  296. var ioTrigger = (operateItem.Item1 as IoTrigger);
  297. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  298. }
  299. }
  300. }
  301. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  302. {
  303. reason = string.Empty;
  304. var mode = param[0].ToString();
  305. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  306. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  307. {
  308. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  309. }
  310. RestAllN2PrugeRD();
  311. return true;
  312. }
  313. /// <summary>
  314. /// 获取当前O2检测位置的设定值
  315. /// </summary>
  316. /// <returns></returns>
  317. private string GetO2SetCheckSetPoint()
  318. {
  319. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  320. {
  321. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  322. if (SC.ContainsItem(key))
  323. return SC.GetValue<double>(key).ToString("f3");
  324. }
  325. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  326. {
  327. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  328. if (SC.ContainsItem(key))
  329. return SC.GetValue<double>(key).ToString("f3");
  330. }
  331. return "";
  332. }
  333. /// <summary>
  334. /// 获取当前O2检测位置
  335. /// </summary>
  336. /// <returns></returns>
  337. private string GetCheckO2Location()
  338. {
  339. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  340. return SensorO2DetectSideLA.Display;
  341. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  342. return SensorO2DetectSideFIMS1.Display;
  343. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  344. return SensorO2DetectSideFIMS2.Display;
  345. return "";
  346. }
  347. /// <summary>
  348. /// 获取当前O2浓度
  349. /// </summary>
  350. /// <returns></returns>
  351. private string GetO2DensityData()
  352. {
  353. var result = "";
  354. result = ConcentrationO2.FeedBack.ToString("f3");
  355. return result;
  356. }
  357. private double GetO2Density()
  358. {
  359. return ConcentrationO2.FeedBack;
  360. }
  361. private bool GetN2PurgePhase1()
  362. {
  363. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  364. }
  365. private bool GetN2PurgePhase2()
  366. {
  367. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  368. }
  369. private bool GetN2PurgePhase3()
  370. {
  371. return GetO2Density() < _n2ToAirData && GetLADoorOpenStatus();
  372. }
  373. private bool GetN2PurgePhase5()
  374. {
  375. return GetO2Density() >= _n2ToAirData && !GetLADoorOpenStatus();
  376. }
  377. private bool GetN2PurgePhase4()
  378. {
  379. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  380. }
  381. private bool GetN2PurgeAIRTo20PPMStatus()
  382. {
  383. return ValveAV202.DOOpen.Value;
  384. }
  385. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  386. {
  387. return ConcentrationO2.Value < value;
  388. }
  389. private bool GetN2PurgeAIRStatus()
  390. {
  391. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  392. }
  393. private bool GetLADoorOpenStatus()
  394. {
  395. return (bool)(SensorLADoorSw1?.Value);
  396. }
  397. private bool GetN2PurgeDoorOpenStatus()
  398. {
  399. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  400. }
  401. private bool GetN2PurgeFoup1Status()
  402. {
  403. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  404. }
  405. private bool GetN2PurgeFoup2Status()
  406. {
  407. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  408. }
  409. public bool IsAbortN2purge()
  410. {
  411. if (!_enableAbortN2purge)
  412. {
  413. return false;
  414. }
  415. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  416. {
  417. return true;
  418. }
  419. return false;
  420. }
  421. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  422. {
  423. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  424. {
  425. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  426. }
  427. }
  428. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  429. {
  430. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  431. {
  432. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  433. }
  434. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  435. {
  436. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  437. }
  438. }
  439. public void SetN2PurgeProcess(bool isEable)
  440. {
  441. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  442. {
  443. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  444. }
  445. }
  446. public void SetN2PurgeLAO2CheckSV(float value)
  447. {
  448. if (TrigN2PurgeLAO2CheckSV != null)
  449. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  450. }
  451. public void SetN2PurgeFOUPO2CheckSV(float value)
  452. {
  453. if (TrigN2PurgeFOUPO2CheckSV != null)
  454. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  455. }
  456. public void SetAVParameter(ModuleName fims, bool isEable)
  457. {
  458. if (fims == ModuleName.FIMS1)
  459. {
  460. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  461. avValve58?.TurnValve(isEable, out _);
  462. }
  463. if (fims == ModuleName.FIMS2)
  464. {
  465. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  466. avValve59?.TurnValve(isEable, out _);
  467. }
  468. }
  469. /// <summary>
  470. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  471. /// </summary>
  472. public void SetN2PurgeParameters()
  473. {
  474. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  475. {
  476. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  477. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  478. }
  479. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  480. {
  481. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  482. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  483. }
  484. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  485. {
  486. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  487. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  488. }
  489. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  490. {
  491. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  492. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  493. }
  494. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  495. {
  496. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  497. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  498. }
  499. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  500. {
  501. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  502. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  503. }
  504. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  505. {
  506. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  507. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  508. }
  509. SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
  510. SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
  511. }
  512. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  513. {
  514. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  515. {
  516. if (!isN2Purge)
  517. {
  518. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  519. }
  520. else
  521. {
  522. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  523. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  524. }
  525. RestAllN2PrugeRD();
  526. }
  527. }
  528. }
  529. }