FurnaceELK/Furnace/FurnaceRT/Config/SiBCN/interlock.xml

<?xml version="1.0" encoding="utf-8" ?>

<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">

	<!--
	LT(less than)               小于
	LE(less than or equal to)   小于等于
	EQ(equal to)                等于
	NE(not equal to)            不等于
	GE(greater than or equal to)大于等于
	GT(greater than)            大于
	B(bool)
	-->
	<Action do="PM1.DO_ValveAV1" value="true" reverse="false">
		<Limit di="PM1.DI_AV1ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV2" value="true" reverse="false">
		<Limit di="PM1.DI_AV2ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV3" value="true" reverse="false">
		<Limit di="PM1.DI_AV3ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV4" value="true" reverse="false">
		<Limit di="PM1.DI_AV4ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV5" value="true" reverse="false">
		<Limit di="PM1.DI_AV5ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV6" value="true" reverse="false">
		<Limit di="PM1.DI_AV6ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV7" value="true" reverse="false">
		<Limit di="PM1.DI_AV7ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV8" value="true" reverse="false">
		<Limit di="PM1.DI_AV8ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV9" value="true" reverse="false">
		<Limit di="PM1.DI_AV9ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV10" value="true" reverse="false">
		<Limit di="PM1.DI_AV10ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV11" value="true" reverse="false">
		<Limit di="PM1.DI_AV11ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV12" value="true" reverse="false">
		<Limit di="PM1.DI_AV12ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV13" value="true" reverse="false">
		<Limit di="PM1.DI_AV13ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV14" value="true" reverse="false">
		<Limit di="PM1.DI_AV14ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV15" value="true" reverse="false">
		<Limit di="PM1.DI_AV15ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV16" value="true" reverse="false">
		<Limit di="PM1.DI_AV16ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV17" value="true" reverse="false">
		<Limit di="PM1.DI_AV17ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV18" value="true" reverse="false">
		<Limit di="PM1.DI_AV18ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV19" value="true" reverse="false">
		<Limit di="PM1.DI_AV19ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV20" value="true" reverse="false">
		<Limit di="PM1.DI_AV20ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV21" value="true" reverse="false">
		<Limit di="PM1.DI_AV21ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV22" value="true" reverse="false">
		<Limit di="PM1.DI_AV22ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV23" value="true" reverse="false">
		<Limit di="PM1.DI_AV23ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV24" value="true" reverse="false">
		<Limit di="PM1.DI_AV24ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV25" value="true" reverse="false">
		<Limit di="PM1.DI_AV25ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV26" value="true" reverse="false">
		<Limit di="PM1.DI_AV26ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV27" value="true" reverse="false">
		<Limit di="PM1.DI_AV27ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV28" value="true" reverse="false">
		<Limit di="PM1.DI_AV28ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV29" value="true" reverse="false">
		<Limit di="PM1.DI_AV29ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV30" value="true" reverse="false">
		<Limit di="PM1.DI_AV30ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV31" value="true" reverse="false">
		<Limit di="PM1.DI_AV31ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV32" value="true" reverse="false">
		<Limit di="PM1.DI_AV32ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV33" value="true" reverse="false">
		<Limit di="PM1.DI_AV33ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV34" value="true" reverse="false">
		<Limit di="PM1.DI_AV34ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV35" value="true" reverse="false">
		<Limit di="PM1.DI_AV35ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV36" value="true" reverse="false">
		<Limit di="PM1.DI_AV36ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV37" value="true" reverse="false">
		<Limit di="PM1.DI_AV37ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV38" value="true" reverse="false">
		<Limit di="PM1.DI_AV38ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV39" value="true" reverse="false">
		<Limit di="PM1.DI_AV39ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV40" value="true" reverse="false">
		<Limit di="PM1.DI_AV40ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV41" value="true" reverse="false">
		<Limit di="PM1.DI_AV41ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV42" value="true" reverse="false">
		<Limit di="PM1.DI_AV42ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV43" value="true" reverse="false">
		<Limit di="PM1.DI_AV43ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV44" value="true" reverse="false">
		<Limit di="PM1.DI_AV44ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV45" value="true" reverse="false">
		<Limit di="PM1.DI_AV45ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV46" value="true" reverse="false">
		<Limit di="PM1.DI_AV46ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV47" value="true" reverse="false">
		<Limit di="PM1.DI_AV47ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV48" value="true" reverse="false">
		<Limit di="PM1.DI_AV48ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV49" value="true" reverse="false">
		<Limit di="PM1.DI_AV49ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV50" value="true" reverse="false">
		<Limit di="PM1.DI_AV50ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV51" value="true" reverse="false">
		<Limit di="PM1.DI_AV51ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV52" value="true" reverse="false">
		<Limit di="PM1.DI_AV52ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV53" value="true" reverse="false">
		<Limit di="PM1.DI_AV53ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV55" value="true" reverse="false">
		<Limit di="PM1.DI_AV55ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV56" value="true" reverse="false">
		<Limit di="PM1.DI_AV56ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV57" value="true" reverse="false">
		<Limit di="PM1.DI_AV57ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV58" value="true" reverse="false">
		<Limit di="PM1.DI_AV58ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV59" value="true" reverse="false">
		<Limit di="PM1.DI_AV59ILK" value="true" condition="and"/>
	</Action>
	<!--<Action do="PM1.DO_ValveAV60" value="true" reverse="false">
		<Limit di="PM1.DI_AV60ILK" value="true" condition="and"/>
	</Action>-->
	<!--<Action do="PM1.DO_ValveAV61" value="true" reverse="false">
		<Limit di="PM1.DI_AV61ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV62" value="true" reverse="false">
		<Limit di="PM1.DI_AV62ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV63" value="true" reverse="false">
		<Limit di="PM1.DI_AV63ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV64" value="true" reverse="false">
		<Limit di="PM1.DI_AV64ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV65" value="true" reverse="false">
		<Limit di="PM1.DI_AV65ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV66" value="true" reverse="false">
		<Limit di="PM1.DI_AV66ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV67" value="true" reverse="false">
		<Limit di="PM1.DI_AV67ILK" value="true" condition="and"/>
	</Action>-->
	<Action do="PM1.DO_ValveAV68" value="true" reverse="false">
		<Limit di="PM1.DI_AV68ILK" value="true" condition="and"/>
	</Action>
	<!--<Action do="PM1.DO_ValveAV69" value="true" reverse="false">
		<Limit di="PM1.DI_AV69ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV70" value="true" reverse="false">
		<Limit di="PM1.DI_AV70ILK" value="true" condition="and"/>
	</Action>-->
	<Action do="PM1.DO_ValveAV71" value="true" reverse="false">
		<Limit di="PM1.DI_AV71ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV72" value="true" reverse="false">
		<Limit di="PM1.DI_AV72ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV73" value="true" reverse="false">
		<Limit di="PM1.DI_AV73ILK" value="true" condition="and"/>
	</Action>
	<!--<Action do="PM1.DO_ValveAV74" value="true" reverse="false">
		<Limit di="PM1.DI_AV74ILK" value="true" condition="and"/>
	</Action>-->
	<Action do="PM1.DO_ValveAV75" value="true" reverse="false">
		<Limit di="PM1.DI_AV75ILK" value="true" condition="and"/>
	</Action>
	<!--<Action do="PM1.DO_ValveAV76" value="true" reverse="false">
		<Limit di="PM1.DI_AV76ILK" value="true" condition="and"/>
	</Action>-->
	<!--<Action do="PM1.DO_ValveAV77" value="true" reverse="false">
		<Limit di="PM1.DI_AV77ILK" value="true" condition="and"/>
	</Action>-->
	<!--<Action do="PM1.DO_ValveAV78" value="true" reverse="false">
		<Limit di="PM1.DI_AV78ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV79" value="true" reverse="false">
		<Limit di="PM1.DI_AV79ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV80" value="true" reverse="false">
		<Limit di="PM1.DI_AV80ILK" value="true" condition="and"/>
	</Action>-->
	<Action do="PM1.DO_ValveAV81" value="true" reverse="false">
		<Limit di="PM1.DI_AV81ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV82" value="true" reverse="false">
		<Limit di="PM1.DI_AV82ILK" value="true" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV83" value="true" reverse="false">
		<Limit di="PM1.DI_AV83ILK" value="true" condition="and"/>
	</Action>
	<!--<Action do="PM1.DO_ValveAV2" value="true" reverse="false">
		<Limit poll="PM1.VG11.Value" value="812LE" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV3" value="true" reverse="false">
		<Limit poll="PM1.VG11.Value" value="812LE" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV4" value="true" reverse="false">
		<Limit poll="PM1.VG11.Value" value="812LE" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV5" value="true" reverse="false">
		<Limit poll="PM1.VG11.Value" value="812LE" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV6" value="true" reverse="false">
		<Limit poll="PM1.VG11.Value" value="812LE" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV7" value="true" reverse="false">
		<Limit poll="PM1.VG11.Value" value="812LE" condition="and"/>
	</Action>
	<Action do="PM1.DO_ValveAV8" value="true" reverse="false">
		<Limit do="PM1.DO_ValveAV9" value="false" condition="and"/>
	</Action>
	
	<Action do="PM1.DO_T101PowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_T101TempStatus" value="false" condition="and"/>
		<Limit di="PM1.DI_FurnacePowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_MainFurnaceCellingTS306" value="false" condition="and"/>
		<Limit di="PM1.DI_HeaterRoomSWS11S12" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_T101PowerOff" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_T101TempStatus" value="false" condition="and"/>
		<Limit di="PM1.DI_FurnacePowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_MainFurnaceCellingTS306" value="false" condition="and"/>
		<Limit di="PM1.DI_HeaterRoomSWS11S12" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_GaslineHeaterPowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_GasLineHeaterPowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_ExhaustHeaterPowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_ExhaustHeaterPowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_FrontBodyPowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FrontbodyPowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_BlowerMotorPowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_BlowerMotorPowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_RHCTS305" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_FFUPowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FFUPowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_T102PowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_T102TempStatus" value="false" condition="and"/>
		<Limit di="PM1.DI_T102PowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_T103PowerOff" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_T103TempStatus" value="false" condition="and"/>
		<Limit di="PM1.DI_T103PowerOnButton" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_CapHeaterEnable" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_TS34RotationTempSW" value="false" condition="and"/>
		<Limit di="PM1.DI_TS30CapInsideTempSW" value="false" condition="and"/>
		<Limit di="PM1.DI_TS31CapOutsideTempSW" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_RFPowerOn" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_RFPowerOn" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_HPMValveOnOff" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_HCLGasLeak1stAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_HCLGasLeak2ndAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_NH3GasLeak1stAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_NH3GasLeak2ndAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_F2GasLeak1stAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_F2GasLeak2ndAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_GasLeakFault" value="false" condition="and"/>
		<Limit di="PM1.DI_GasBoxLowerDoorSW" value="false" condition="and"/>
		<Limit di="PM1.DI_GasBoxUpperDoorSW" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_GasBoxExhaust1stAlarmMS2" value="false" condition="and"/>
		<Limit di="PM1.DI_GasBoxExhaust2ndAlarmMS2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_FOUPRobotEnable1" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FilterBox1DoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBLightCurtainFault" value="false" condition="and"/>
		<Limit di="PM1.DI_FBLightCurtainOSSD1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBLightCurtainOSSD2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBFrontDoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_LightCurtainIdle" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBLightCurtainFault" value="false" condition="and"/>
		<Limit di="PM1.DI_FBLightCurtainOSSD1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBLightCurtainOSSD2" value="false" condition="and"/>
		<Limit di="PM1.DI_FBFrontDoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_BufferMotorHardwareInterlockOk1" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FilterBox1DoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBFrontDoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_BufferMotorHardwareInterlockAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_BufferMotorHardwareInterlockOk2" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FilterBox1DoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBFrontDoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_BufferMotorHardwareInterlockAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_BoatLiftMotorHardwareInterlockOk1" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FilterBox1DoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBFrontDoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_BoatLiftMotorHardwareInterlockAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_BoatLiftMotorHardwareInterlockOk2" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FilterBox1DoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBFrontDoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_BoatLiftMotorHardwareInterlockAlarm" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS2" value="false" condition="and"/>
	</Action>
	<Action do="PM1.DO_WaferRobotEnable1" value="true" reverse="false">
		<Limit di="PM1.DI_MachineEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_OPPanelEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_FilterBox1DoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBFrontDoorSwitch" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO1" value="false" condition="and"/>
		<Limit di="PM1.DI_FBEMO2" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS1" value="false" condition="and"/>
		<Limit di="PM1.DI_MachineEMS2" value="false" condition="and"/>
	</Action>-->

</Interlock>