PMModuleInterlock.cs 14 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Event;
  3. using Aitex.Core.RT.IOCore;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.OperationCenter;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.OperationCenter;
  9. using System;
  10. using System.Collections;
  11. using System.Diagnostics;
  12. using System.Linq;
  13. namespace FurnaceRT.Equipments.PMs
  14. {
  15. public partial class PMModule
  16. {
  17. private SCConfigItem _configAutoControlCoolingValve;
  18. private SCConfigItem _configVacuumSensorPressure;
  19. private SCConfigItem _configAutoControlChiller;
  20. private SCConfigItem _chillerTurnOffIfTempBelow;
  21. private SCConfigItem _chillerTurnOnIfTempAbove;
  22. private PeriodicJob _threadMonitor;
  23. private bool _vac1;
  24. private bool _vac2;
  25. private bool _vac3;
  26. private Stopwatch _vac1Timer = new Stopwatch();
  27. private Stopwatch _vac2Timer = new Stopwatch();
  28. private Stopwatch _vac3Timer = new Stopwatch();
  29. private int _vac1PumpTimeS = 120;
  30. private int _vac2PumpTimeS = 120;
  31. private int _vac3PumpTimeS = 120;
  32. private void InitInterlock()
  33. {
  34. OP.AddCheck($"{Module}.{Name}.Disconnect", new CheckPlcConnect(this));
  35. //OP.AddCheck($"{ChamberDoor.Module}.{ChamberDoor.Name}.Open", new CheckOpenDoor(this));
  36. _configAutoControlCoolingValve = SC.GetConfigItem($"PM.{Module}.AutoControlCoolingValve");
  37. _configVacuumSensorPressure = SC.GetConfigItem($"PM.{Module}.VacuumSensorPressure");
  38. _configAutoControlChiller = SC.GetConfigItem($"PM.{Module}.Chiller.EnableAutoAdjust");
  39. _chillerTurnOffIfTempBelow = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOffIfTempBelow");
  40. _chillerTurnOnIfTempAbove = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOnIfTempAbove");
  41. _threadMonitor = new PeriodicJob(100, OnTimer, "interlock thread", true);
  42. }
  43. private void InitUserDefineInterlock()
  44. {
  45. //DATA.Subscribe($"{Module}.Heater1", () => 100);//自定义的Interlock limit
  46. InterlockManager.Instance.UserDefineInterlockHandler += UserDefineInterlockHandler;
  47. InterlockManager.Instance.UserDefineInterlocks += UserDefineInterlocks;
  48. }
  49. //自定义的interlock action
  50. private bool UserDefineInterlocks(string name)
  51. {
  52. switch (name)
  53. {
  54. case "PM1.Heater1":
  55. return true;
  56. }
  57. return false;
  58. }
  59. //设置自定义的interlock action
  60. private bool UserDefineInterlockHandler(string name, object value)
  61. {
  62. switch(name)
  63. {
  64. case "PM1.Heater1":
  65. //设置Heater的值
  66. return true;
  67. }
  68. return false;
  69. }
  70. private class CheckOpenDoor : IInterlockChecker
  71. {
  72. private PMModule _pm;
  73. public CheckOpenDoor(PMModule pm)
  74. {
  75. _pm = pm;
  76. }
  77. public bool CanDo(out string reason, object[] args)
  78. {
  79. if (_pm.ChamberPressure < SC.GetValue<double>("PM.AtmPressureBase"))
  80. {
  81. reason = $"{_pm.Module} chamber pressure {_pm.ChamberPressure:F3} Torr less than {SC.GetValue<double>("PM.AtmPressureBase")} [PM.AtmPressureBase], can not open door";
  82. return false;
  83. }
  84. reason = string.Empty;
  85. return true;
  86. }
  87. }
  88. private class CheckPlcConnect : IInterlockChecker
  89. {
  90. private PMModule _pm;
  91. public CheckPlcConnect(PMModule pm)
  92. {
  93. _pm = pm;
  94. }
  95. public bool CanDo(out string reason, object[] args)
  96. {
  97. if (_pm.IsBusy)
  98. {
  99. reason = $"{_pm.Module} is in {_pm.StringFsmStatus} status, can not disconnect, should be idle";
  100. return false;
  101. }
  102. reason = string.Empty;
  103. return true;
  104. }
  105. }
  106. public bool OnTimer()
  107. {
  108. try
  109. {
  110. MonitorN2Purge();
  111. MonitorAux();
  112. MonitorFfu();
  113. lock (_alarmConditionLocker)
  114. {
  115. MonitorAlarmCondition();
  116. }
  117. if (!IsProcessing && TrigVGUnitConversion != null && SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa")
  118. {
  119. TrigVGUnitConversion.SetTrigger(SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa", out _);
  120. }
  121. //MonitorVAC1();
  122. //MonitorVAC2();
  123. //MonitorVAC3();
  124. //foreach (var item in _inCommandLst)
  125. //{
  126. // if (item == null)
  127. // continue;
  128. // if (!_inCommandTirgs.ContainsKey(item.Name))
  129. // {
  130. // _inCommandTirgs.Add(item.Name, new RD_TRIG());
  131. // }
  132. // _inCommandTirgs[item.Name].CLK = item.Value;
  133. //}
  134. //if (_inCommandTirgs[SensorHECPowerONSW.Name].R)
  135. //{
  136. // _trigTHPowerEN.SetTrigger(true, out _);
  137. // _trigHECPowerONLamp.SetTrigger(true, out _);
  138. //}
  139. //if (_inCommandTirgs[SensorHECPowerONSW.Name].T)
  140. //{
  141. //}
  142. //if (_inCommandTirgs[SensorTHBreakOK.Name].R)
  143. //{
  144. //}
  145. //if (_inCommandTirgs[SensorTHBreakOK.Name].T)
  146. //{
  147. // _trigTHPowerEN.SetTrigger(false, out _);
  148. // _trigHECPowerONLamp.SetTrigger(false, out _);
  149. //}
  150. ProcessAlarmSignal();
  151. //if (IV2Valve.Status != SensorVG2LOW.Value)
  152. // IV2Valve.TurnValve(SensorVG2LOW.Value, out _);
  153. //if (IV2Valve.Status != SensorVG2LOW.Value)
  154. // VV2Valve.TurnValve(SensorTubeOverPressure.Value, out _);
  155. if (IsInit || !IsInstalled)
  156. return true;
  157. //cooling 阀门
  158. if (_configAutoControlCoolingValve == null || _configAutoControlCoolingValve.BoolValue)
  159. {
  160. //if (ElectricalCoolingValve.Status != MainChiller.IsRunning)
  161. // ElectricalCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  162. //if (MicrowaveCoolingValve.Status != MainChiller.IsRunning)
  163. // MicrowaveCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  164. //if (ChamberLidCoolingValve.Status != MainChiller.IsRunning)
  165. // ChamberLidCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  166. }
  167. //auto control chiller
  168. if (_configAutoControlChiller != null && _configAutoControlChiller.BoolValue && _chillerTurnOffIfTempBelow != null && _chillerTurnOnIfTempAbove != null)
  169. {
  170. //if (!MainChiller.HasAlarm)
  171. //{
  172. // if (MainChiller.IsRunning && (ChamberHeater1.Feedback < _chillerTurnOffIfTempBelow.DoubleValue))
  173. // {
  174. // if (!MainChiller.SetMainPowerOnOff(false, out string reason))
  175. // {
  176. // LOG.Write(reason);
  177. // }
  178. // }else if (!MainChiller.IsRunning && (ChamberHeater1.Feedback > _chillerTurnOnIfTempAbove.DoubleValue))
  179. // {
  180. // if (!MainChiller.SetMainPowerOnOff(true, out string reason))
  181. // {
  182. // LOG.Write(reason);
  183. // }
  184. // }
  185. //}
  186. }
  187. //压力保护计
  188. double pressure = 3.0;
  189. if (_configVacuumSensorPressure != null)
  190. pressure = _configVacuumSensorPressure.DoubleValue;
  191. if (pressure > 30.0)
  192. pressure = 30.0;
  193. //bool canOpen = ChamberMonitorPressureGauge.Value < pressure;
  194. //if (VacuumSensorValve.Status != canOpen)
  195. //{
  196. // VacuumSensorValve.TurnValve(canOpen, out _);
  197. //}
  198. ////interlock ignore
  199. //SignalExhaustAlarm.SetIgnoreError(SC.GetValue<bool>($"PM.{Module}.Signal.IgnoreExhaustAlarm"));
  200. }
  201. catch (Exception ex)
  202. {
  203. LOG.Write(ex);
  204. }
  205. return true;
  206. }
  207. private void ProcessAlarmSignal()
  208. {
  209. bool isTrig = false;
  210. foreach (var signal in _alarmSignals)
  211. {
  212. if (signal.RrigSignalOn.T && signal.IsAlarmAutoRecovery)
  213. {
  214. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == signal.AlarmTriggered.EventEnum);
  215. if (item != null)
  216. {
  217. item.Reset();
  218. _triggeredAlarmList.Remove(item);
  219. EV.ClearAlarmEvent(item.EventEnum);
  220. }
  221. isTrig = true;
  222. signal.AlarmRecovery?.Set();
  223. }
  224. }
  225. if (isTrig)
  226. {
  227. int count = 0;
  228. var alarms = EV.GetAlarmEvent();
  229. foreach (var alarm in alarms)
  230. {
  231. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  232. count++;
  233. }
  234. if (count == 0)
  235. CheckToPostMessage((int)MSG.Reset);
  236. }
  237. }
  238. private void MonitorVAC1()
  239. {
  240. if (_vac1Timer == null)
  241. _vac1Timer = new Stopwatch();
  242. if (ValveAV24.Status)
  243. {
  244. _vac1 = false;
  245. if (_vac1Timer.IsRunning)
  246. _vac1Timer.Stop();
  247. }
  248. if(!ValveAV9.Status &&
  249. !ValveAV16.Status &&
  250. !ValveAV20.Status &&
  251. !ValveAV24.Status &&
  252. ValveAV26.Status &&
  253. (ValveAV33.Status || ValveAV35.Status) &&
  254. ValveAV83.Status &&
  255. ValveAV71.Status &&
  256. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  257. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  258. {
  259. if (!_vac1Timer.IsRunning)
  260. _vac1Timer.Restart();
  261. if(_vac1Timer.ElapsedMilliseconds > _vac1PumpTimeS * 1000)
  262. _vac1 = true;
  263. }
  264. else
  265. {
  266. if (_vac1Timer.IsRunning)
  267. _vac1Timer.Stop();
  268. }
  269. }
  270. private void MonitorVAC2()
  271. {
  272. if (_vac2Timer == null)
  273. _vac2Timer = new Stopwatch();
  274. if (ValveAV9.Status)
  275. {
  276. _vac2 = false;
  277. if (_vac2Timer.IsRunning)
  278. _vac2Timer.Stop();
  279. }
  280. if (!ValveAV9.Status &&
  281. !ValveAV16.Status &&
  282. !ValveAV20.Status &&
  283. !ValveAV24.Status &&
  284. ValveAV12.Status &&
  285. ValveAV14.Status &&
  286. ValveAV28.Status &&
  287. ValveAV29.Status &&
  288. ValveAV36.Status &&
  289. ValveAV37.Status &&
  290. ValveAV81.Status &&
  291. ValveAV71.Status &&
  292. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  293. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  294. {
  295. if (!_vac2Timer.IsRunning)
  296. _vac2Timer.Restart();
  297. if (_vac2Timer.ElapsedMilliseconds > _vac2PumpTimeS * 1000)
  298. _vac2 = true;
  299. }
  300. else
  301. {
  302. if (_vac2Timer.IsRunning)
  303. _vac2Timer.Stop();
  304. }
  305. }
  306. private void MonitorVAC3()
  307. {
  308. if (_vac3Timer == null)
  309. _vac3Timer = new Stopwatch();
  310. if (ValveAV16.Status || ValveAV20.Status)
  311. {
  312. _vac3 = false;
  313. if (_vac3Timer.IsRunning)
  314. _vac3Timer.Stop();
  315. }
  316. if (!ValveAV9.Status &&
  317. !ValveAV16.Status &&
  318. !ValveAV20.Status &&
  319. !ValveAV24.Status &&
  320. ValveAV18.Status &&
  321. ValveAV22.Status &&
  322. ValveAV38.Status &&
  323. ValveAV39.Status &&
  324. ValveAV82.Status &&
  325. ValveAV71.Status &&
  326. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  327. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  328. {
  329. if (!_vac3Timer.IsRunning)
  330. _vac3Timer.Restart();
  331. if (_vac3Timer.ElapsedMilliseconds > _vac3PumpTimeS * 1000)
  332. _vac3 = true;
  333. }
  334. else
  335. {
  336. if (_vac3Timer.IsRunning)
  337. _vac3Timer.Stop();
  338. }
  339. }
  340. }
  341. }