PMModuleDevice.cs 114 KB

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  1. using Aitex.Core.Common.DeviceData;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.Util;
  6. using Aitex.Core.Utilities;
  7. using MECF.Framework.Common.Event;
  8. using System;
  9. using System.Collections.Generic;
  10. using System.Linq;
  11. using System.Reflection;
  12. using MECF.Framework.Common.SubstrateTrackings;
  13. using Aitex.Core.Common;
  14. using FurnaceRT.Equipments.Systems;
  15. using Aitex.Core.RT.IOCore;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.RT.Core.IoProviders;
  18. using MECF.Framework.Common.Device.Bases;
  19. using FurnaceRT.Equipments.Boats;
  20. using IoHeater = FurnaceRT.Devices.IoHeater;
  21. using IoPressureMeter = FurnaceRT.Devices.IoPressureMeter;
  22. using FurnaceRT.Devices;
  23. using Aitex.Core.RT.Log;
  24. using FurnaceRT.Equipments.PMs.Devices;
  25. using Aitex.Core.RT.SCCore;
  26. using static Aitex.Core.RT.Device.Unit.IoBoat;
  27. using MECF.Framework.Common.CommonData.SorterDefines;
  28. using System.Windows;
  29. namespace FurnaceRT.Equipments.PMs
  30. {
  31. public partial class PMModule
  32. {
  33. // -------------------------------------------------------------------------
  34. #region
  35. [Tag("AlarmSignalEMO01001powerboxEMO")]
  36. public IoAlarmSignal AlarmSignalEMO01001powerboxEMO { get; set; }
  37. [Tag("AlarmSignalPowerboxfiredetector")]
  38. public IoAlarmSignal AlarmSignalPowerboxfiredetector { get; set; }
  39. [Tag("AlarmSignalSMK01001detectoroperator")]
  40. public IoAlarmSignal AlarmSignalSMK01001detectoroperator { get; set; }
  41. [Tag("AlarmSignalSMK01001detectorfault")]
  42. public IoAlarmSignal AlarmSignalSMK01001detectorfault { get; set; }
  43. [Tag("AlarmSignalEMO02001gasboxEMO")]
  44. public IoAlarmSignal AlarmSignalEMO02001gasboxEMO { get; set; }
  45. [Tag("AlarmSignalEMO04001frontbodyEMO")]
  46. public IoAlarmSignal AlarmSignalEMO04001frontbodyEMO { get; set; }
  47. [Tag("AlarmSignalLD02001LSCleakalarm")]
  48. public IoAlarmSignal AlarmSignalLD02001LSCleakalarm { get; set; }
  49. [Tag("AlarmSignalLD05001Magneticfluidleak")]
  50. public IoAlarmSignal AlarmSignalLD05001Magneticfluidleak { get; set; }
  51. [Tag("AlarmSignalLD05002Coolingwaterleak")]
  52. public IoAlarmSignal AlarmSignalLD05002Coolingwaterleak { get; set; }
  53. [Tag("AlarmSignalLD05003RHCleak")]
  54. public IoAlarmSignal AlarmSignalLD05003RHCleak { get; set; }
  55. [Tag("AlarmSignalLD03001exhaustboxwaterleakupside")]
  56. public IoAlarmSignal AlarmSignalLD03001exhaustboxwaterleakupside { get; set; }
  57. [Tag("AlarmSignalLD03002waterleakdownside")]
  58. public IoAlarmSignal AlarmSignalLD03002waterleakdownside { get; set; }
  59. [Tag("AlarmSignalExternalEMO")]
  60. public IoAlarmSignal AlarmSignalExternalEMO { get; set; }
  61. [Tag("AlarmSignalFurnacetransformertempsw")]
  62. public IoAlarmSignal AlarmSignalFurnacetransformertempsw { get; set; }
  63. [Tag("AlarmSignalAC100Vtransformertempsw")]
  64. public IoAlarmSignal AlarmSignalAC100Vtransformertempsw { get; set; }
  65. [Tag("AlarmSignalFurnacepoweronswitch")]
  66. public IoAlarmSignal AlarmSignalFurnacepoweronswitch { get; set; }
  67. [Tag("AlarmSignalAC100Vtransformerpowerswitch")]
  68. public IoAlarmSignal AlarmSignalAC100Vtransformerpowerswitch { get; set; }
  69. [Tag("AlarmSignalPowerboxinterlockresetbutton")]
  70. public IoAlarmSignal AlarmSignalPowerboxinterlockresetbutton { get; set; }
  71. [Tag("AlarmSignalVFD01001EDM")]
  72. public IoAlarmSignal AlarmSignalVFD01001EDM { get; set; }
  73. [Tag("AlarmSignalGasboxinterlockresetbutton")]
  74. public IoAlarmSignal AlarmSignalGasboxinterlockresetbutton { get; set; }
  75. [Tag("AlarmSignalSCRONOFFSWITCH")]
  76. public IoAlarmSignal AlarmSignalSCRONOFFSWITCH { get; set; }
  77. [Tag("AlarmSignalGasboxexhaustpressurealarm1st")]
  78. public IoAlarmSignal AlarmSignalGasboxexhaustpressurealarm1st { get; set; }
  79. [Tag("AlarmSignalGasboxexhaustpressurealarm2nd")]
  80. public IoAlarmSignal AlarmSignalGasboxexhaustpressurealarm2nd { get; set; }
  81. [Tag("AlarmSignalFS101waterflowalarm")]
  82. public IoAlarmSignal AlarmSignalFS101waterflowalarm { get; set; }
  83. [Tag("AlarmSignalFrontbodyinterlockresetbutton")]
  84. public IoAlarmSignal AlarmSignalFrontbodyinterlockresetbutton { get; set; }
  85. [Tag("AlarmSignalLightcurtainOSSD1")]
  86. public IoAlarmSignal AlarmSignalLightcurtainOSSD1 { get; set; }
  87. [Tag("AlarmSignalLightcurtainOSSD2")]
  88. public IoAlarmSignal AlarmSignalLightcurtainOSSD2 { get; set; }
  89. [Tag("AlarmSignalLightcurtainfault")]
  90. public IoAlarmSignal AlarmSignalLightcurtainfault { get; set; }
  91. [Tag("AlarmSignalFrontbodydoorswitch")]
  92. public IoAlarmSignal AlarmSignalFrontbodydoorswitch { get; set; }
  93. [Tag("AlarmSignalFrontbodyIOshuttersw")]
  94. public IoAlarmSignal AlarmSignalFrontbodyIOshuttersw { get; set; }
  95. [Tag("AlarmSignalFouprobotEMS")]
  96. public IoAlarmSignal AlarmSignalFouprobotEMS { get; set; }
  97. [Tag("AlarmSignalWaferrobotEMS")]
  98. public IoAlarmSignal AlarmSignalWaferrobotEMS { get; set; }
  99. [Tag("AlarmSignalAxisCRmotorEDM")]
  100. public IoAlarmSignal AlarmSignalAxisCRmotorEDM { get; set; }
  101. [Tag("AlarmSignalAxisEmotorEDM")]
  102. public IoAlarmSignal AlarmSignalAxisEmotorEDM { get; set; }
  103. [Tag("AlarmSignalTS05001FFUtempsw")]
  104. public IoAlarmSignal AlarmSignalTS05001FFUtempsw { get; set; }
  105. [Tag("AlarmSignalTS05002Capinsidetempsw")]
  106. public IoAlarmSignal AlarmSignalTS05002Capinsidetempsw { get; set; }
  107. [Tag("AlarmSignalTS05003Capoutsidetempsw")]
  108. public IoAlarmSignal AlarmSignalTS05003Capoutsidetempsw { get; set; }
  109. [Tag("AlarmSignalTS05004Raxisrotationtempsw")]
  110. public IoAlarmSignal AlarmSignalTS05004Raxisrotationtempsw { get; set; }
  111. [Tag("AlarmSignalTS05005RHCtempsw")]
  112. public IoAlarmSignal AlarmSignalTS05005RHCtempsw { get; set; }
  113. [Tag("AlarmSignalTS05006furnacetempsw")]
  114. public IoAlarmSignal AlarmSignalTS05006furnacetempsw { get; set; }
  115. [Tag("AlarmSignalLoadingareaEMS")]
  116. public IoAlarmSignal AlarmSignalLoadingareaEMS { get; set; }
  117. [Tag("AlarmSignalGD02001HCL1gasleak1stalarm")]
  118. public IoAlarmSignal AlarmSignalGD02001HCL1gasleak1stalarm { get; set; }
  119. [Tag("AlarmSignalGD02001HCL1gasleak2ndalarm")]
  120. public IoAlarmSignal AlarmSignalGD02001HCL1gasleak2ndalarm { get; set; }
  121. [Tag("AlarmSignalGD02001fault")]
  122. public IoAlarmSignal AlarmSignalGD02001fault { get; set; }
  123. [Tag("AlarmSignalGD02002HCL2gasleak1stalarm")]
  124. public IoAlarmSignal AlarmSignalGD02002HCL2gasleak1stalarm { get; set; }
  125. [Tag("AlarmSignalGD02002HCL2gasleak2ndalarm")]
  126. public IoAlarmSignal AlarmSignalGD02002HCL2gasleak2ndalarm { get; set; }
  127. [Tag("AlarmSignalGD02002fault")]
  128. public IoAlarmSignal AlarmSignalGD02002fault { get; set; }
  129. [Tag("AlarmSignalGD02003NH31gasleak1stalarm")]
  130. public IoAlarmSignal AlarmSignalGD02003NH31gasleak1stalarm { get; set; }
  131. [Tag("AlarmSignalGD02003NH31gasleak2ndalarm")]
  132. public IoAlarmSignal AlarmSignalGD02003NH31gasleak2ndalarm { get; set; }
  133. [Tag("AlarmSignalGD02003fault")]
  134. public IoAlarmSignal AlarmSignalGD02003fault { get; set; }
  135. [Tag("AlarmSignalGD02004NH32gasleak1stalarm")]
  136. public IoAlarmSignal AlarmSignalGD02004NH32gasleak1stalarm { get; set; }
  137. [Tag("AlarmSignalGD02004NH32gasleak2ndalarm")]
  138. public IoAlarmSignal AlarmSignalGD02004NH32gasleak2ndalarm { get; set; }
  139. [Tag("AlarmSignalGD02004fault")]
  140. public IoAlarmSignal AlarmSignalGD02004fault { get; set; }
  141. [Tag("AlarmSignalGD02005F21gasleak1stalarm")]
  142. public IoAlarmSignal AlarmSignalGD02005F21gasleak1stalarm { get; set; }
  143. [Tag("AlarmSignalGD02005F21gasleak2ndalarm")]
  144. public IoAlarmSignal AlarmSignalGD02005F21gasleak2ndalarm { get; set; }
  145. [Tag("AlarmSignalGD02005fault")]
  146. public IoAlarmSignal AlarmSignalGD02005fault { get; set; }
  147. [Tag("AlarmSignalGD02006F22gasleak1stalarm")]
  148. public IoAlarmSignal AlarmSignalGD02006F22gasleak1stalarm { get; set; }
  149. [Tag("AlarmSignalGD02006F22gasleak2ndalarm")]
  150. public IoAlarmSignal AlarmSignalGD02006F22gasleak2ndalarm { get; set; }
  151. [Tag("AlarmSignalGD02006fault")]
  152. public IoAlarmSignal AlarmSignalGD02006fault { get; set; }
  153. [Tag("AlarmSignalGD02007NO1gasleak1stalarm")]
  154. public IoAlarmSignal AlarmSignalGD02007NO1gasleak1stalarm { get; set; }
  155. [Tag("AlarmSignalGD02007NO1gasleak2ndalarm")]
  156. public IoAlarmSignal AlarmSignalGD02007NO1gasleak2ndalarm { get; set; }
  157. [Tag("AlarmSignalGD02007fault")]
  158. public IoAlarmSignal AlarmSignalGD02007fault { get; set; }
  159. [Tag("AlarmSignalGD02008NO2gasleak1stalarm")]
  160. public IoAlarmSignal AlarmSignalGD02008NO2gasleak1stalarm { get; set; }
  161. [Tag("AlarmSignalGD02008NO2gasleak2ndalarm")]
  162. public IoAlarmSignal AlarmSignalGD02008NO2gasleak2ndalarm { get; set; }
  163. [Tag("AlarmSignalGD02008fault")]
  164. public IoAlarmSignal AlarmSignalGD02008fault { get; set; }
  165. [Tag("AlarmSignalGD02009C3H61gasleak1stalarm")]
  166. public IoAlarmSignal AlarmSignalGD02009C3H61gasleak1stalarm { get; set; }
  167. [Tag("AlarmSignalGD02009C3H61gasleak2ndalarm")]
  168. public IoAlarmSignal AlarmSignalGD02009C3H61gasleak2ndalarm { get; set; }
  169. [Tag("AlarmSignalGD02009fault")]
  170. public IoAlarmSignal AlarmSignalGD02009fault { get; set; }
  171. [Tag("AlarmSignalGD02010C3H62gasleak1stalarm")]
  172. public IoAlarmSignal AlarmSignalGD02010C3H62gasleak1stalarm { get; set; }
  173. [Tag("AlarmSignalGD02010C3H62gasleak2ndalarm")]
  174. public IoAlarmSignal AlarmSignalGD02010C3H62gasleak2ndalarm { get; set; }
  175. [Tag("AlarmSignalGD02010fault")]
  176. public IoAlarmSignal AlarmSignalGD02010fault { get; set; }
  177. [Tag("AlarmSignalGD02011DMA1gasleak1stalarm")]
  178. public IoAlarmSignal AlarmSignalGD02011DMA1gasleak1stalarm { get; set; }
  179. [Tag("AlarmSignalGD02011DMA1gasleak2ndalarm")]
  180. public IoAlarmSignal AlarmSignalGD02011DMA1gasleak2ndalarm { get; set; }
  181. [Tag("AlarmSignalGD02011fault")]
  182. public IoAlarmSignal AlarmSignalGD02011fault { get; set; }
  183. [Tag("AlarmSignalGD02012DMA2gasleak1stalarm")]
  184. public IoAlarmSignal AlarmSignalGD02012DMA2gasleak1stalarm { get; set; }
  185. [Tag("AlarmSignalGD02012DMA2gasleak2ndalarm")]
  186. public IoAlarmSignal AlarmSignalGD02012DMA2gasleak2ndalarm { get; set; }
  187. [Tag("AlarmSignalGD02012fault")]
  188. public IoAlarmSignal AlarmSignalGD02012fault { get; set; }
  189. [Tag("AlarmSignalSL02001gasboxdoorsw11")]
  190. public IoAlarmSignal AlarmSignalSL02001gasboxdoorsw11 { get; set; }
  191. [Tag("AlarmSignalSL02001gasboxdoorsw12")]
  192. public IoAlarmSignal AlarmSignalSL02001gasboxdoorsw12 { get; set; }
  193. [Tag("AlarmSignalSL02002gasboxdoorsw11")]
  194. public IoAlarmSignal AlarmSignalSL02002gasboxdoorsw11 { get; set; }
  195. [Tag("AlarmSignalSL02002gasboxdoorsw12")]
  196. public IoAlarmSignal AlarmSignalSL02002gasboxdoorsw12 { get; set; }
  197. [Tag("AlarmSignalSL05001LAdoorsw1")]
  198. public IoAlarmSignal AlarmSignalSL05001LAdoorsw1 { get; set; }
  199. [Tag("AlarmSignalSL05002LAdoorsw2")]
  200. public IoAlarmSignal AlarmSignalSL05002LAdoorsw2 { get; set; }
  201. [Tag("AlarmSignalSL05004LAfurnacedoorsw")]
  202. public IoAlarmSignal AlarmSignalSL05004LAfurnacedoorsw { get; set; }
  203. [Tag("AlarmSignalFurnacepoweronoff")]
  204. public IoAlarmSignal AlarmSignalFurnacepoweronoff { get; set; }
  205. [Tag("AlarmSignalBlowerpoweronoff")]
  206. public IoAlarmSignal AlarmSignalBlowerpoweronoff { get; set; }
  207. [Tag("AlarmSignal100Vtransformerpoweron")]
  208. public IoAlarmSignal AlarmSignal100Vtransformerpoweron { get; set; }
  209. [Tag("AlarmSignalVFDenable")]
  210. public IoAlarmSignal AlarmSignalVFDenable { get; set; }
  211. [Tag("AlarmSignalHPMvalvepoweronoff")]
  212. public IoAlarmSignal AlarmSignalHPMvalvepoweronoff { get; set; }
  213. [Tag("AlarmSignalAxisCRmotorenable1")]
  214. public IoAlarmSignal AlarmSignalAxisCRmotorenable1 { get; set; }
  215. [Tag("AlarmSignalAxisCRmotorenable2")]
  216. public IoAlarmSignal AlarmSignalAxisCRmotorenable2 { get; set; }
  217. [Tag("AlarmSignalAxisEmotorenable1")]
  218. public IoAlarmSignal AlarmSignalAxisEmotorenable1 { get; set; }
  219. [Tag("AlarmSignalAxisEmotorenable2")]
  220. public IoAlarmSignal AlarmSignalAxisEmotorenable2 { get; set; }
  221. [Tag("AlarmSignalFTRenable1")]
  222. public IoAlarmSignal AlarmSignalFTRenable1 { get; set; }
  223. [Tag("AlarmSignalFTRenable2")]
  224. public IoAlarmSignal AlarmSignalFTRenable2 { get; set; }
  225. [Tag("AlarmSignalFTRinterlockreset")]
  226. public IoAlarmSignal AlarmSignalFTRinterlockreset { get; set; }
  227. [Tag("AlarmSignalWTRenable1")]
  228. public IoAlarmSignal AlarmSignalWTRenable1 { get; set; }
  229. [Tag("AlarmSignalWTRenable2")]
  230. public IoAlarmSignal AlarmSignalWTRenable2 { get; set; }
  231. [Tag("AlarmSignalWTRinterlockreset")]
  232. public IoAlarmSignal AlarmSignalWTRinterlockreset { get; set; }
  233. [Tag("AlarmSignalCapheaterenable")]
  234. public IoAlarmSignal AlarmSignalCapheaterenable { get; set; }
  235. [Tag("AlarmSignalLightcurtainidel")]
  236. public IoAlarmSignal AlarmSignalLightcurtainidel { get; set; }
  237. [Tag("AlarmSignalPowerboxinterlockbuttonled")]
  238. public IoAlarmSignal AlarmSignalPowerboxinterlockbuttonled { get; set; }
  239. [Tag("AlarmSignalGasboxinterlockbuttonled")]
  240. public IoAlarmSignal AlarmSignalGasboxinterlockbuttonled { get; set; }
  241. [Tag("AlarmSignalFrontbodyinterlockbuttonled")]
  242. public IoAlarmSignal AlarmSignalFrontbodyinterlockbuttonled { get; set; }
  243. #endregion
  244. #region AlarmSignal
  245. [Tag("AlarmSignalO2ConcentrationHI")]
  246. public IoAlarmSignal AlarmSignalO2ConcentrationHI { get; set; }
  247. [Tag("AlarmSignalO2ConcentrationLow")]
  248. public IoAlarmSignal AlarmSignalO2ConcentrationLow { get; set; }
  249. [Tag("AlarmSignalO2ConcentrationEcho1")]
  250. public IoAlarmSignal AlarmSignalO2ConcentrationEcho1 { get; set; }
  251. [Tag("AlarmSignalO2ConcentrationEcho2")]
  252. public IoAlarmSignal AlarmSignalO2ConcentrationEcho2 { get; set; }
  253. [Tag("AlarmSignalSMK1DetectorSensorOperates")]
  254. public IoAlarmSignal AlarmSignalSMK1DetectorSensorOperates { get; set; }
  255. [Tag("AlarmSignalSMK1DetectorSensorFireAlarm")]
  256. public IoAlarmSignal AlarmSignalSMK1DetectorSensorFireAlarm { get; set; }
  257. [Tag("AlarmSignalSMK1DetectorSensorFault")]
  258. public IoAlarmSignal AlarmSignalSMK1DetectorSensorFault { get; set; }
  259. [Tag("AlarmSignalHCLGasLeak1stAlarm")]
  260. public IoAlarmSignal AlarmSignalHCLGasLeak1stAlarm { get; set; }
  261. [Tag("AlarmSignalHCLGasLeak2ndAlarm")]
  262. public IoAlarmSignal AlarmSignalHCLGasLeak2ndAlarm { get; set; }
  263. [Tag("AlarmSignalNH3GasLeak1stAlarm")]
  264. public IoAlarmSignal AlarmSignalNH3GasLeak1stAlarm { get; set; }
  265. [Tag("AlarmSignalNH3GasLeak2ndAlarm")]
  266. public IoAlarmSignal AlarmSignalNH3GasLeak2ndAlarm { get; set; }
  267. [Tag("AlarmSignalF2GasLeak1stAlarm")]
  268. public IoAlarmSignal AlarmSignalF2GasLeak1stAlarm { get; set; }
  269. [Tag("AlarmSignalF2GasLeak2ndAlarm")]
  270. public IoAlarmSignal AlarmSignalF2GasLeak2ndAlarm { get; set; }
  271. [Tag("AlarmSignalGasLeakFault")]
  272. public IoAlarmSignal AlarmSignalGasLeakFault { get; set; }
  273. [Tag("AlarmSignalTS34RotationTempSW")]
  274. public IoAlarmSignal AlarmSignalTS34RotationTempSW { get; set; }
  275. [Tag("AlarmSignalTS30CapInsideTempSW")]
  276. public IoAlarmSignal AlarmSignalTS30CapInsideTempSW { get; set; }
  277. [Tag("AlarmSignalTS31CapOutsideTempSW")]
  278. public IoAlarmSignal AlarmSignalTS31CapOutsideTempSW { get; set; }
  279. [Tag("AlarmSignalGasBoxLowerDoorSW")]
  280. public IoAlarmSignal AlarmSignalGasBoxLowerDoorSW { get; set; }
  281. [Tag("AlarmSignalGasBoxUpperDoorSW")]
  282. public IoAlarmSignal AlarmSignalGasBoxUpperDoorSW { get; set; }
  283. [Tag("AlarmSignalEXHBoxWaterLeak")]
  284. public IoAlarmSignal AlarmSignalEXHBoxWaterLeak { get; set; }
  285. [Tag("AlarmSignalOPPanelEMO1")]
  286. public IoAlarmSignal AlarmSignalOPPanelEMO1 { get; set; }
  287. [Tag("AlarmSignalOPPanelEMO2")]
  288. public IoAlarmSignal AlarmSignalOPPanelEMO2 { get; set; }
  289. [Tag("AlarmSignalMainFurnaceCellingTS306")]
  290. public IoAlarmSignal AlarmSignalMainFurnaceCellingTS306 { get; set; }
  291. [Tag("AlarmSignalHeaterRoomSWS11S12")]
  292. public IoAlarmSignal AlarmSignalHeaterRoomSWS11S12 { get; set; }
  293. [Tag("AlarmSignalFilterBox1DoorSwitch")]
  294. public IoAlarmSignal AlarmSignalFilterBox1DoorSwitch { get; set; }
  295. [Tag("AlarmSignalLABacksideDoorSwitch")]
  296. public IoAlarmSignal AlarmSignalLABacksideDoorSwitch { get; set; }
  297. [Tag("AlarmSignalRHCTS305")]
  298. public IoAlarmSignal AlarmSignalRHCTS305 { get; set; }
  299. [Tag("AlarmSignalGasBoxExhaust1stAlarmMS2")]
  300. public IoAlarmSignal AlarmSignalGasBoxExhaust1stAlarmMS2 { get; set; }
  301. [Tag("AlarmSignalGasBoxExhaust2ndAlarmMS2")]
  302. public IoAlarmSignal AlarmSignalGasBoxExhaust2ndAlarmMS2 { get; set; }
  303. [Tag("AlarmSignalMachineEMO1")]
  304. public IoAlarmSignal AlarmSignalMachineEMO1 { get; set; }
  305. [Tag("AlarmSignalMachineEMO2")]
  306. public IoAlarmSignal AlarmSignalMachineEMO2 { get; set; }
  307. [Tag("AlarmSignalT101TempStatus")]
  308. public IoAlarmSignal AlarmSignalT101TempStatus { get; set; }
  309. [Tag("AlarmSignalT102TempStatus")]
  310. public IoAlarmSignal AlarmSignalT102TempStatus { get; set; }
  311. [Tag("AlarmSignalT103TempStatus")]
  312. public IoAlarmSignal AlarmSignalT103TempStatus { get; set; }
  313. [Tag("AlarmSignalBufferMotorHardwareInterlockAlarm")]
  314. public IoAlarmSignal AlarmSignalBufferMotorHardwareInterlockAlarm { get; set; }
  315. [Tag("AlarmSignalBoatLiftMotorHardwareInterlockAlarm")]
  316. public IoAlarmSignal AlarmSignalBoatLiftMotorHardwareInterlockAlarm { get; set; }
  317. [Tag("AlarmSignalHFReconciliationPressureMinAbnormal")]
  318. public IoAlarmSignal AlarmSignalHFReconciliationPressureMinAbnormal { get; set; }
  319. [Tag("AlarmSignalMagneticFluidLeak")]
  320. public IoAlarmSignal AlarmSignalMagneticFluidLeak { get; set; }
  321. [Tag("AlarmSignalCoolingWaterLeak")]
  322. public IoAlarmSignal AlarmSignalCoolingWaterLeak { get; set; }
  323. [Tag("AlarmSignalMachineEMS1")]
  324. public IoAlarmSignal AlarmSignalMachineEMS1 { get; set; }
  325. [Tag("AlarmSignalMachineEMS2")]
  326. public IoAlarmSignal AlarmSignalMachineEMS2 { get; set; }
  327. [Tag("AlarmSignalFBLightCurtainFault")]
  328. public IoAlarmSignal AlarmSignalFBLightCurtainFault { get; set; }
  329. [Tag("AlarmSignalFBLightCurtainOSSD1")]
  330. public IoAlarmSignal AlarmSignalFBLightCurtainOSSD1 { get; set; }
  331. [Tag("AlarmSignalFBLightCurtainOSSD2")]
  332. public IoAlarmSignal AlarmSignalFBLightCurtainOSSD2 { get; set; }
  333. [Tag("AlarmSignalFBEMO1")]
  334. public IoAlarmSignal AlarmSignalFBEMO1 { get; set; }
  335. [Tag("AlarmSignalFBEMO2")]
  336. public IoAlarmSignal AlarmSignalFBEMO2 { get; set; }
  337. [Tag("AlarmSignalDoorOverride")]
  338. public IoAlarmSignal AlarmSignalDoorOverride { get; set; }
  339. [Tag("AlarmSignalFBFrontDoorSwitch")]
  340. public IoAlarmSignal AlarmSignalFBFrontDoorSwitch { get; set; }
  341. [Tag("AlarmSignalGLBoxPG1CNT1Alarm")]
  342. public IoAlarmSignal AlarmSignalGLBoxPG1CNT1Alarm { get; set; }
  343. [Tag("AlarmSignalGLBoxPG1CNT2Alarm")]
  344. public IoAlarmSignal AlarmSignalGLBoxPG1CNT2Alarm { get; set; }
  345. [Tag("AlarmSignalGLBoxPG2CNT1Alarm")]
  346. public IoAlarmSignal AlarmSignalGLBoxPG2CNT1Alarm { get; set; }
  347. [Tag("AlarmSignalGLBoxPG2CNT2Alarm")]
  348. public IoAlarmSignal AlarmSignalGLBoxPG2CNT2Alarm { get; set; }
  349. [Tag("AlarmSignalGLBoxPG3CNT1Alarm")]
  350. public IoAlarmSignal AlarmSignalGLBoxPG3CNT1Alarm { get; set; }
  351. [Tag("AlarmSignalGLBoxPG3CNT2Alarm")]
  352. public IoAlarmSignal AlarmSignalGLBoxPG3CNT2Alarm { get; set; }
  353. [Tag("AlarmSignalGLBoxPG4CNT1Alarm")]
  354. public IoAlarmSignal AlarmSignalGLBoxPG4CNT1Alarm { get; set; }
  355. [Tag("AlarmSignalGLBoxPG4CNT2Alarm")]
  356. public IoAlarmSignal AlarmSignalGLBoxPG4CNT2Alarm { get; set; }
  357. [Tag("AlarmSignalGLBoxPG5CNT1Alarm")]
  358. public IoAlarmSignal AlarmSignalGLBoxPG5CNT1Alarm { get; set; }
  359. [Tag("AlarmSignalGLBoxPG5CNT2Alarm")]
  360. public IoAlarmSignal AlarmSignalGLBoxPG5CNT2Alarm { get; set; }
  361. [Tag("AlarmSignalGLBoxPG6CNT1Alarm")]
  362. public IoAlarmSignal AlarmSignalGLBoxPG6CNT1Alarm { get; set; }
  363. [Tag("AlarmSignalGLBoxPG6CNT2Alarm")]
  364. public IoAlarmSignal AlarmSignalGLBoxPG6CNT2Alarm { get; set; }
  365. [Tag("AlarmSignalGLBoxVG21Status")]
  366. public IoAlarmSignal AlarmSignalGLBoxVG21Output1 { get; set; }
  367. [Tag("AlarmSignalGLBoxVG21Output2")]
  368. public IoAlarmSignal AlarmSignalGLBoxVG21Output2 { get; set; }
  369. [Tag("AlarmSignalGLBoxVG22Output1")]
  370. public IoAlarmSignal AlarmSignalGLBoxVG22Output1 { get; set; }
  371. [Tag("AlarmSignalGLBoxVG22Output2")]
  372. public IoAlarmSignal AlarmSignalGLBoxVG22Output2 { get; set; }
  373. [Tag("AlarmSignalGLBoxVG32Output1")]
  374. public IoAlarmSignal AlarmSignalGLBoxVG32Output1 { get; set; }
  375. [Tag("AlarmSignalGLBoxVG32Output2")]
  376. public IoAlarmSignal AlarmSignalGLBoxVG32Output2 { get; set; }
  377. [Tag("AlarmSignalGLBoxVG33Output1")]
  378. public IoAlarmSignal AlarmSignalGLBoxVG33Output1 { get; set; }
  379. [Tag("AlarmSignalGLBoxVG33Output2")]
  380. public IoAlarmSignal AlarmSignalGLBoxVG33Output2 { get; set; }
  381. [Tag("AlarmSignalHeatingExhaust1stAlarmMS1")]
  382. public IoAlarmSignal AlarmSignalHeatingExhaust1stAlarmMS1 { get; set; }
  383. [Tag("AlarmSignalHeatingExhaust2ndAlarmMS1")]
  384. public IoAlarmSignal AlarmSignalHeatingExhaust2ndAlarmMS1 { get; set; }
  385. [Tag("AlarmSignalScavengeExhaust1stAlarmMS3")]
  386. public IoAlarmSignal AlarmSignalScavengeExhaust1stAlarmMS3 { get; set; }
  387. [Tag("AlarmSignalScavengeExhaust2ndAlarmMS3")]
  388. public IoAlarmSignal AlarmSignalScavengeExhaust2ndAlarmMS3 { get; set; }
  389. [Tag("AlarmSignalValveBoxExhaust1stAlarmMS4")]
  390. public IoAlarmSignal AlarmSignalValveBoxExhaust1stAlarmMS4 { get; set; }
  391. [Tag("AlarmSignalValveBoxExhaust2ndAlarmMS4")]
  392. public IoAlarmSignal AlarmSignalValveBoxExhaust2ndAlarmMS4 { get; set; }
  393. [Tag("AlarmSignalLoadingAreaExhaust1stAlarmMS5")]
  394. public IoAlarmSignal AlarmSignalLoadingAreaExhaust1stAlarmMS5 { get; set; }
  395. [Tag("AlarmSignalLoadingAreaExhaust2ndAlarmMS5")]
  396. public IoAlarmSignal AlarmSignalLoadingAreaExhaust2ndAlarmMS5 { get; set; }
  397. [Tag("AlarmSignalFrontBodyExhaust1stAlarmMS6")]
  398. public IoAlarmSignal AlarmSignalFrontBodyExhaust1stAlarmMS6 { get; set; }
  399. [Tag("AlarmSignalFrontBodyExhaust2ndAlarmMS6")]
  400. public IoAlarmSignal AlarmSignalFrontBodyExhaust2ndAlarmMS6 { get; set; }
  401. [Tag("AlarmSignalLAExhaust1stAlarmMS7")]
  402. public IoAlarmSignal AlarmSignalLAExhaust1stAlarmMS7 { get; set; }
  403. [Tag("AlarmSignalLAExhaust2ndAlarmMS7")]
  404. public IoAlarmSignal AlarmSignalLAExhaust2ndAlarmMS7 { get; set; }
  405. [Tag("AlarmSignalRHC1stAlarmMS8")]
  406. public IoAlarmSignal AlarmSignalRHC1stAlarmMS8 { get; set; }
  407. [Tag("AlarmSignalRHC2ndAlarmMS8")]
  408. public IoAlarmSignal AlarmSignalRHC2ndAlarmMS8 { get; set; }
  409. [Tag("AlarmSignalREV1stAlarmMS9")]
  410. public IoAlarmSignal AlarmSignalREV1stAlarmMS9 { get; set; }
  411. [Tag("AlarmSignalREV2ndAlarmMS9")]
  412. public IoAlarmSignal AlarmSignalREV2ndAlarmMS9 { get; set; }
  413. [Tag("AlarmSignalREV1stAlarmMS10")]
  414. public IoAlarmSignal AlarmSignalREV1stAlarmMS10 { get; set; }
  415. [Tag("AlarmSignalREV2ndAlarmMS10")]
  416. public IoAlarmSignal AlarmSignalREV2ndAlarmMS10 { get; set; }
  417. [Tag("AlarmSignalOPBoxPS11Out1")]
  418. public IoAlarmSignal AlarmSignalOPBoxPS11Out1 { get; set; }
  419. [Tag("AlarmSignalOPBoxPS11Out2")]
  420. public IoAlarmSignal AlarmSignalOPBoxPS11Out2 { get; set; }
  421. [Tag("AlarmSignalRHCFlowAlarmFL901")]
  422. public IoAlarmSignal AlarmSignalRHCFlowAlarmFL901 { get; set; }
  423. [Tag("AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902")]
  424. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902 { get; set; }
  425. [Tag("AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903")]
  426. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903 { get; set; }
  427. [Tag("AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904")]
  428. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904 { get; set; }
  429. [Tag("AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905")]
  430. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905 { get; set; }
  431. [Tag("AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906")]
  432. public IoAlarmSignal AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906 { get; set; }
  433. [Tag("AlarmSignalVG11LowAlarm")]
  434. public IoAlarmSignal AlarmSignalVG11LowAlarm { get; set; }
  435. [Tag("AlarmSignalVG11HighAlarm")]
  436. public IoAlarmSignal AlarmSignalVG11HighAlarm { get; set; }
  437. [Tag("AlarmSignalVG12LowAlarm")]
  438. public IoAlarmSignal AlarmSignalVG12LowAlarm { get; set; }
  439. [Tag("AlarmSignalVG12HighAlarm")]
  440. public IoAlarmSignal AlarmSignalVG12HighAlarm { get; set; }
  441. [Tag("AlarmSignalVG13LowAlarm")]
  442. public IoAlarmSignal AlarmSignalVG13LowAlarm { get; set; }
  443. [Tag("AlarmSignalVG13HighAlarm")]
  444. public IoAlarmSignal AlarmSignalVG13HighAlarm { get; set; }
  445. [Tag("AlarmSignalPG12OUT1")]
  446. public IoAlarmSignal AlarmSignalPG12OUT1 { get; set; }
  447. [Tag("AlarmSignalPG12OUT2")]
  448. public IoAlarmSignal AlarmSignalPG12OUT2 { get; set; }
  449. [Tag("AlarmSignalPG13OUT1")]
  450. public IoAlarmSignal AlarmSignalPG13OUT1 { get; set; }
  451. [Tag("AlarmSignalPG13OUT2")]
  452. public IoAlarmSignal AlarmSignalPG13OUT2 { get; set; }
  453. [Tag("AlarmSignalPS14OUT1")]
  454. public IoAlarmSignal AlarmSignalPS14OUT1 { get; set; }
  455. [Tag("AlarmSignalPS14OUT2")]
  456. public IoAlarmSignal AlarmSignalPS14OUT2 { get; set; }
  457. [Tag("AlarmSignalCoolingWaterPressureOut1")]
  458. public IoAlarmSignal AlarmSignalCoolingWaterPressureOut1 { get; set; }
  459. [Tag("AlarmSignalCoolingWaterPressureOut2")]
  460. public IoAlarmSignal AlarmSignalCoolingWaterPressureOut2 { get; set; }
  461. [Tag("AlarmSignalAirFlowFL70")]
  462. public IoAlarmSignal AlarmSignalAirFlowFL70 { get; set; }
  463. [Tag("AlarmSignalAirFlowFL71")]
  464. public IoAlarmSignal AlarmSignalAirFlowFL71 { get; set; }
  465. [Tag("AlarmSignalAirFlowFL72")]
  466. public IoAlarmSignal AlarmSignalAirFlowFL72 { get; set; }
  467. [Tag("AlarmSignalWaterFlowFL62")]
  468. public IoAlarmSignal AlarmSignalWaterFlowFL62 { get; set; }
  469. [Tag("AlarmSignalUPSFault")]
  470. public IoAlarmSignal AlarmSignalUPSFault { get; set; }
  471. [Tag("AlarmSignalUPSAlarm")]
  472. public IoAlarmSignal AlarmSignalUPSAlarm { get; set; }
  473. [Tag("AlarmSignalK141UPSAlarm")]
  474. public IoAlarmSignal AlarmSignalK141UPSAlarm { get; set; }
  475. [Tag("AlarmSignalK169UPSAlarm")]
  476. public IoAlarmSignal AlarmSignalK169UPSAlarm { get; set; }
  477. [Tag("AlarmSignalN2PurgeBOXPG14CNT1")]
  478. public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT1 { get; set; }
  479. [Tag("AlarmSignalN2PurgeBOXPG14CNT2")]
  480. public IoAlarmSignal AlarmSignalN2PurgeBOXPG14CNT2 { get; set; }
  481. [Tag("AlarmSignalN2PurgeBOXPG15CNT1")]
  482. public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT1 { get; set; }
  483. [Tag("AlarmSignalN2PurgeBOXPG15CNT2")]
  484. public IoAlarmSignal AlarmSignalN2PurgeBOXPG15CNT2 { get; set; }
  485. [Tag("AlarmSignalN2PurgeBOXPG16CNT1")]
  486. public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT1 { get; set; }
  487. [Tag("AlarmSignalN2PurgeBOXPG16CNT2")]
  488. public IoAlarmSignal AlarmSignalN2PurgeBOXPG16CNT2 { get; set; }
  489. [Tag("AlarmSignalN2PurgeBOXPG70CNT1")]
  490. public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT1 { get; set; }
  491. [Tag("AlarmSignalN2PurgeBOXPG70CNT2")]
  492. public IoAlarmSignal AlarmSignalN2PurgeBOXPG70CNT2 { get; set; }
  493. [Tag("AlarmSignalPS17ValueLowLimitAlarm")]
  494. public IoAlarmSignal AlarmSignalPS17ValueLowLimitAlarm { get; set; }
  495. [Tag("AlarmSignalVaccumPumpWarning")]
  496. public IoAlarmSignal AlarmSignalVaccumPumpWarning { get; set; }
  497. [Tag("AlarmSignalVaccumPumpAlarm")]
  498. public IoAlarmSignal AlarmSignalVaccumPumpAlarm { get; set; }
  499. [Tag("AlarmSignalFilterBox1Fan1Alarm")]
  500. public IoAlarmSignal AlarmSignalFilterBox1Fan1Alarm { get; set; }
  501. [Tag("AlarmSignalFilterBox1Fan2Alarm")]
  502. public IoAlarmSignal AlarmSignalFilterBox1Fan2Alarm { get; set; }
  503. [Tag("AlarmSignalStepperMotorAlarm")]
  504. public IoAlarmSignal AlarmSignalStepperMotorAlarm { get; set; }
  505. [Tag("AlarmSignalRFAlarm")]
  506. public IoAlarmSignal AlarmSignalRFAlarm { get; set; }
  507. [Tag("AlarmSignalForelineHeaterJacketLightAlarm")]
  508. public IoAlarmSignal AlarmSignalForelineHeaterJacketLightAlarm { get; set; }
  509. [Tag("AlarmSignalForelineHeaterJacketHeavyAlarm")]
  510. public IoAlarmSignal AlarmSignalForelineHeaterJacketHeavyAlarm { get; set; }
  511. [Tag("AlarmSignalScrubberWarning")]
  512. public IoAlarmSignal AlarmSignalScrubberWarning { get; set; }
  513. [Tag("AlarmSignalScrubberAlarm")]
  514. public IoAlarmSignal AlarmSignalScrubberAlarm { get; set; }
  515. [Tag("AlarmSignalNegLmtPosBoatZAxis")]
  516. public IoAlarmSignal AlarmSignalNegLmtPosBoatZAxis { get; set; }
  517. [Tag("AlarmSignalPotLmtPosBoatZAxis")]
  518. public IoAlarmSignal AlarmSignalPotLmtPosBoatZAxis { get; set; }
  519. [Tag("AlarmSignalLAFFUCommAlarm")]
  520. public IoAlarmSignal AlarmSignalLAFFUCommAlarm { get; set; }
  521. [Tag("AlarmSignaAPCCommAlarm")]
  522. public IoAlarmSignal AlarmSignaAPCCommAlarm { get; set; }
  523. [Tag("AlarmSignalMINI8CommAlarm")]
  524. public IoAlarmSignal AlarmSignalMINI8CommAlarm { get; set; }
  525. [Tag("AlarmSignaMainWaterFlowAlarm")]
  526. public IoAlarmSignal AlarmSignaMainWaterFlowAlarm { get; set; }
  527. [Tag("AlarmSignalFurnaceMainCircuitBreakerStatusMonitor")]
  528. public IoAlarmSignal AlarmSignalFurnaceMainCircuitBreakerStatusMonitor { get; set; }
  529. [Tag("AlarmSignalPumpDown")]
  530. public IoAlarmSignal AlarmSignalPumpDown { get; set; }
  531. [Tag("AlarmSignalPS13HStatus")]
  532. public IoAlarmSignal AlarmSignalPS13HStatus { get; set; }
  533. [Tag("AlarmSignalPS13LStatus")]
  534. public IoAlarmSignal AlarmSignalPS13LStatus { get; set; }
  535. [Tag("AlarmSignalFFU1DataWriteError")]
  536. public IoAlarmSignal AlarmSignalFFU1DataWriteError { get; set; }
  537. [Tag("AlarmSignalFFU2DataWriteError")]
  538. public IoAlarmSignal AlarmSignalFFU2DataWriteError { get; set; }
  539. [Tag("AlarmSignalFFU3DataWriteError")]
  540. public IoAlarmSignal AlarmSignalFFU3DataWriteError { get; set; }
  541. [Tag("AlarmSignalFFU4DataWriteError")]
  542. public IoAlarmSignal AlarmSignalFFU4DataWriteError { get; set; }
  543. [Tag("AlarmSignalFFU5DataWriteError")]
  544. public IoAlarmSignal AlarmSignalFFU5DataWriteError { get; set; }
  545. [Tag("AlarmSignalFFU6DataWriteError")]
  546. public IoAlarmSignal AlarmSignalFFU6DataWriteError { get; set; }
  547. [Tag("AlarmSignalFFU7DataWriteError")]
  548. public IoAlarmSignal AlarmSignalFFU7DataWriteError { get; set; }
  549. [Tag("AlarmSignalFFU8DataWriteError")]
  550. public IoAlarmSignal AlarmSignalFFU8DataWriteError { get; set; }
  551. [Tag("AlarmSignalFFU9DataWriteError")]
  552. public IoAlarmSignal AlarmSignalFFU9DataWriteError { get; set; }
  553. [Tag("AlarmSignalDG1Output1")]
  554. public IoAlarmSignal AlarmSignalDG1Output1 { get; set; }
  555. [Tag("AlarmSignalDG1Output2")]
  556. public IoAlarmSignal AlarmSignalDG1Output2 { get; set; }
  557. [Tag("AlarmSignalAV91_1RHCAirInOpened")]
  558. public IoAlarmSignal AlarmSignalAV91_1RHCAirInOpened { get; set; }
  559. [Tag("AlarmSignalAV91_2RHCAirInOpened")]
  560. public IoAlarmSignal AlarmSignalAV91_2RHCAirInOpened { get; set; }
  561. [Tag("AlarmSignalAV91_3RHCAirInOpened")]
  562. public IoAlarmSignal AlarmSignalAV91_3RHCAirInOpened { get; set; }
  563. [Tag("AlarmSignalAV91_4RHCAirInOpened")]
  564. public IoAlarmSignal AlarmSignalAV91_4RHCAirInOpened { get; set; }
  565. [Tag("AlarmSignalBlowerPower")]
  566. public IoAlarmSignal AlarmSignalBlowerPower { get; set; }
  567. [Tag("AlarmSignalRFSetPowerReached")]
  568. public IoAlarmSignal AlarmSignalRFSetPowerReached { get; set; }
  569. [Tag("AlarmSignalN2FlowInFOUPAbnormal")]
  570. public IoAlarmSignal AlarmSignalN2FlowInFOUPAbnormal { get; set; }
  571. [Tag("AlarmSignalCapHeaterAbnormal")]
  572. public IoAlarmSignal AlarmSignalCapHeaterAbnormal { get; set; }
  573. [Tag("AlarmSignalHeaterUOverTemp")]
  574. public IoAlarmSignal AlarmSignalHeaterUOverTemp { get; set; }
  575. [Tag("AlarmSignalHeaterCUOverTemp")]
  576. public IoAlarmSignal AlarmSignalHeaterCUOverTemp { get; set; }
  577. [Tag("AlarmSignalHeaterCOverTemp")]
  578. public IoAlarmSignal AlarmSignalHeaterCOverTemp { get; set; }
  579. [Tag("AlarmSignalHeaterCLOverTemp")]
  580. public IoAlarmSignal AlarmSignalHeaterCLOverTemp { get; set; }
  581. [Tag("AlarmSignalHeaterLOverTemp")]
  582. public IoAlarmSignal AlarmSignalHeaterLOverTemp { get; set; }
  583. [Tag("AlarmSignaBoatRAxisAlarm")]
  584. public IoAlarmSignal AlarmSignaBoatRAxisAlarm { get; set; }
  585. [Tag("AlarmSignaBoatRAxisWarning")]
  586. public IoAlarmSignal AlarmSignaBoatRAxisWarning { get; set; }
  587. [Tag("AlarmSignaBoatZAxisWarning")]
  588. public IoAlarmSignal AlarmSignaBoatZAxisWarning { get; set; }
  589. [Tag("AlarmSignaBoatZAxisAlarm")]
  590. public IoAlarmSignal AlarmSignaBoatZAxisAlarm { get; set; }
  591. [Tag("AlarmSignaGasHeaterSensorBreakOutAlarm")]
  592. public IoAlarmSignal AlarmSignaGasHeaterSensorBreakOutAlarm { get; set; }
  593. [Tag("AlarmSignaTempLimitAlarm")]
  594. public IoAlarmSignal AlarmSignaTempLimitAlarm { get; set; }
  595. [Tag("AlarmSignalLAO2CheckOTWarning")]
  596. public IoAlarmSignal AlarmSignalLAO2CheckOTWarning { get; set; }
  597. [Tag("AlarmSignalFIMS1O2CheckOTWarning")]
  598. public IoAlarmSignal AlarmSignalFIMS1O2CheckOTWarning { get; set; }
  599. [Tag("AlarmSignalFIMS2O2CheckOTWarning")]
  600. public IoAlarmSignal AlarmSignalFIMS2O2CheckOTWarning { get; set; }
  601. [Tag("AlarmSignalHeaterUCascadePVSBrk")]
  602. public IoAlarmSignal AlarmSignalHeaterUCascadePVSBrk { get; set; }
  603. [Tag("AlarmSignalHeaterUHeaterPVSBrk")]
  604. public IoAlarmSignal AlarmSignalHeaterUHeaterPVSBrk { get; set; }
  605. [Tag("AlarmSignalHeaterCUCascadePVSBrk")]
  606. public IoAlarmSignal AlarmSignalHeaterCUCascadePVSBrk { get; set; }
  607. [Tag("AlarmSignalHeaterCUHeaterPVSBrk")]
  608. public IoAlarmSignal AlarmSignalHeaterCUHeaterPVSBrk { get; set; }
  609. [Tag("AlarmSignalHeaterCCascadePVSBrk")]
  610. public IoAlarmSignal AlarmSignalHeaterCCascadePVSBrk { get; set; }
  611. [Tag("AlarmSignalHeaterCHeaterPVSBrk")]
  612. public IoAlarmSignal AlarmSignalHeaterCHeaterPVSBrk { get; set; }
  613. [Tag("AlarmSignalHeaterCLCascadePVSBrk")]
  614. public IoAlarmSignal AlarmSignalHeaterCLCascadePVSBrk { get; set; }
  615. [Tag("AlarmSignalHeaterCLHeaterPVSBrk")]
  616. public IoAlarmSignal AlarmSignalHeaterCLHeaterPVSBrk { get; set; }
  617. [Tag("AlarmSignalHeaterLCascadePVSBrk")]
  618. public IoAlarmSignal AlarmSignalHeaterLCascadePVSBrk { get; set; }
  619. [Tag("AlarmSignalHeaterLHeaterPVSBrk")]
  620. public IoAlarmSignal AlarmSignalHeaterLHeaterPVSBrk { get; set; }
  621. [Tag("GasLine1AlarmSignalTempOutRange")]
  622. public IoAlarmSignal GasLine1AlarmSignalTempOutRange { get; set; }
  623. [Tag("GasLine2AlarmSignalTempOutRange")]
  624. public IoAlarmSignal GasLine2AlarmSignalTempOutRange { get; set; }
  625. [Tag("GasLine3AlarmSignalTempOutRange")]
  626. public IoAlarmSignal GasLine3AlarmSignalTempOutRange { get; set; }
  627. [Tag("GasLine4AlarmSignalTempOutRange")]
  628. public IoAlarmSignal GasLine4AlarmSignalTempOutRange { get; set; }
  629. [Tag("GasLine6AlarmSignalTempOutRange")]
  630. public IoAlarmSignal GasLine6AlarmSignalTempOutRange { get; set; }
  631. [Tag("GasLine7AlarmSignalTempOutRange")]
  632. public IoAlarmSignal GasLine7AlarmSignalTempOutRange { get; set; }
  633. [Tag("GasLine1AlarmSignalCLN")]
  634. public IoAlarmSignal GasLine1AlarmSignalCLN { get; set; }
  635. [Tag("GasLine2AlarmSignalCLN")]
  636. public IoAlarmSignal GasLine2AlarmSignalCLN { get; set; }
  637. [Tag("GasLine3AlarmSignalCLN")]
  638. public IoAlarmSignal GasLine3AlarmSignalCLN { get; set; }
  639. [Tag("GasLine4AlarmSignalCLN")]
  640. public IoAlarmSignal GasLine4AlarmSignalCLN { get; set; }
  641. [Tag("GasLine6AlarmSignalCLN")]
  642. public IoAlarmSignal GasLine6AlarmSignalCLN { get; set; }
  643. [Tag("GasLine7AlarmSignalCLN")]
  644. public IoAlarmSignal GasLine7AlarmSignalCLN { get; set; }
  645. [Tag("AlarmSignalHCL1GasLeak1stAlarm")]
  646. public IoAlarmSignal AlarmSignalHCL1GasLeak1stAlarm { get; set; }
  647. [Tag("AlarmSignalHCL1GasLeak2ndAlarm")]
  648. public IoAlarmSignal AlarmSignalHCL1GasLeak2ndAlarm { get; set; }
  649. [Tag("AlarmSignalHCL2GasLeak1stAlarm")]
  650. public IoAlarmSignal AlarmSignalHCL2GasLeak1stAlarm { get; set; }
  651. [Tag("AlarmSignalHCL2GasLeak2ndAlarm")]
  652. public IoAlarmSignal AlarmSignalHCL2GasLeak2ndAlarm { get; set; }
  653. [Tag("AlarmSignalNH31GasLeak1stAlarm")]
  654. public IoAlarmSignal AlarmSignalNH31GasLeak1stAlarm { get; set; }
  655. [Tag("AlarmSignalNH31GasLeak2ndAlarm")]
  656. public IoAlarmSignal AlarmSignalNH31GasLeak2ndAlarm { get; set; }
  657. [Tag("AlarmSignalNH32GasLeak1stAlarm")]
  658. public IoAlarmSignal AlarmSignalNH32GasLeak1stAlarm { get; set; }
  659. [Tag("AlarmSignalNH32GasLeak2ndAlarm")]
  660. public IoAlarmSignal AlarmSignalNH32GasLeak2ndAlarm { get; set; }
  661. [Tag("AlarmSignalF21GasLeak1stAlarm")]
  662. public IoAlarmSignal AlarmSignalF21GasLeak1stAlarm { get; set; }
  663. [Tag("AlarmSignalF21GasLeak2ndAlarm")]
  664. public IoAlarmSignal AlarmSignalF21GasLeak2ndAlarm { get; set; }
  665. [Tag("AlarmSignalF22GasLeak1stAlarm")]
  666. public IoAlarmSignal AlarmSignalF22GasLeak1stAlarm { get; set; }
  667. [Tag("AlarmSignalF22GasLeak2ndAlarm")]
  668. public IoAlarmSignal AlarmSignalF22GasLeak2ndAlarm { get; set; }
  669. [Tag("AlarmSignalNO1GasLeak1stAlarm")]
  670. public IoAlarmSignal AlarmSignalNO1GasLeak1stAlarm { get; set; }
  671. [Tag("AlarmSignalNO1GasLeak2ndAlarm")]
  672. public IoAlarmSignal AlarmSignalNO1GasLeak2ndAlarm { get; set; }
  673. [Tag("AlarmSignalNO2GasLeak1stAlarm")]
  674. public IoAlarmSignal AlarmSignalNO2GasLeak1stAlarm { get; set; }
  675. [Tag("AlarmSignalNO2GasLeak2ndAlarm")]
  676. public IoAlarmSignal AlarmSignalNO2GasLeak2ndAlarm { get; set; }
  677. [Tag("AlarmSignalC3H61GasLeak1stAlarm")]
  678. public IoAlarmSignal AlarmSignalC3H61GasLeak1stAlarm { get; set; }
  679. [Tag("AlarmSignalC3H61GasLeak2ndAlarm")]
  680. public IoAlarmSignal AlarmSignalC3H61GasLeak2ndAlarm { get; set; }
  681. [Tag("AlarmSignalC3H62GasLeak1stAlarm")]
  682. public IoAlarmSignal AlarmSignalC3H62GasLeak1stAlarm { get; set; }
  683. [Tag("AlarmSignalC3H62GasLeak2ndAlarm")]
  684. public IoAlarmSignal AlarmSignalC3H62GasLeak2ndAlarm { get; set; }
  685. [Tag("AlarmSignalDMA1GasLeak1stAlarm")]
  686. public IoAlarmSignal AlarmSignalDMA1GasLeak1stAlarm { get; set; }
  687. [Tag("AlarmSignalDMA1GasLeak2ndAlarm")]
  688. public IoAlarmSignal AlarmSignalDMA1GasLeak2ndAlarm { get; set; }
  689. [Tag("AlarmSignalDMA2GasLeak1stAlarm")]
  690. public IoAlarmSignal AlarmSignalDMA2GasLeak1stAlarm { get; set; }
  691. [Tag("AlarmSignalDMA2GasLeak2ndAlarm")]
  692. public IoAlarmSignal AlarmSignalDMA2GasLeak2ndAlarm { get; set; }
  693. [Tag("AlarmSignalGLBoxPG7CNT1Alarm")]
  694. public IoAlarmSignal AlarmSignalGLBoxPG7CNT1Alarm { get; set; }
  695. [Tag("AlarmSignalGLBoxPG7CNT2Alarm")]
  696. public IoAlarmSignal AlarmSignalGLBoxPG7CNT2Alarm { get; set; }
  697. [Tag("AlarmSignalGLBoxPG8CNT2Alarm")]
  698. public IoAlarmSignal AlarmSignalGLBoxPG8CNT2Alarm { get; set; }
  699. [Tag("AlarmSignalGLBoxPG9CNT2Alarm")]
  700. public IoAlarmSignal AlarmSignalGLBoxPG9CNT2Alarm { get; set; }
  701. [Tag("AlarmSignalHEXOverTemperatureAlarm")]
  702. public IoAlarmSignal AlarmSignalHEXOverTemperatureAlarm { get; set; }
  703. [Tag("AlarmSignalGLBoxPG21CNT1Alarm")]
  704. public IoAlarmSignal AlarmSignalGLBoxPG21CNT1Alarm { get; set; }
  705. [Tag("AlarmSignalGLBoxPG21CNT2Alarm")]
  706. public IoAlarmSignal AlarmSignalGLBoxPG21CNT2Alarm { get; set; }
  707. [Tag("AlarmSignalGLBoxPG22CNT1Alarm")]
  708. public IoAlarmSignal AlarmSignalGLBoxPG22CNT1Alarm { get; set; }
  709. [Tag("AlarmSignalGLBoxPG22CNT2Alarm")]
  710. public IoAlarmSignal AlarmSignalGLBoxPG22CNT2Alarm { get; set; }
  711. [Tag("AlarmSignalGLBoxPG23CNT1Alarm")]
  712. public IoAlarmSignal AlarmSignalGLBoxPG23CNT1Alarm { get; set; }
  713. [Tag("AlarmSignalGLBoxPG23CNT2Alarm")]
  714. public IoAlarmSignal AlarmSignalGLBoxPG23CNT2Alarm { get; set; }
  715. [Tag("AlarmSignalGLBoxPG24CNT1Alarm")]
  716. public IoAlarmSignal AlarmSignalGLBoxPG24CNT1Alarm { get; set; }
  717. [Tag("AlarmSignalGLBoxPG24CNT2Alarm")]
  718. public IoAlarmSignal AlarmSignalGLBoxPG24CNT2Alarm { get; set; }
  719. [Tag("AlarmSignalGLBoxPG25CNT1Alarm")]
  720. public IoAlarmSignal AlarmSignalGLBoxPG25CNT1Alarm { get; set; }
  721. [Tag("AlarmSignalGLBoxPG25CNT2Alarm")]
  722. public IoAlarmSignal AlarmSignalGLBoxPG25CNT2Alarm { get; set; }
  723. [Tag("AlarmSignalGLBoxPG31CNT1Alarm")]
  724. public IoAlarmSignal AlarmSignalGLBoxPG31CNT1Alarm { get; set; }
  725. [Tag("AlarmSignalGLBoxPG31CNT2Alarm")]
  726. public IoAlarmSignal AlarmSignalGLBoxPG31CNT2Alarm { get; set; }
  727. [Tag("AlarmSignalGLBoxPG32CNT1Alarm")]
  728. public IoAlarmSignal AlarmSignalGLBoxPG32CNT1Alarm { get; set; }
  729. [Tag("AlarmSignalGLBoxPG32CNT2Alarm")]
  730. public IoAlarmSignal AlarmSignalGLBoxPG32CNT2Alarm { get; set; }
  731. [Tag("AlarmSignalPG12CNT1Alarm")]
  732. public IoAlarmSignal AlarmSignalPG12CNT1Alarm { get; set; }
  733. [Tag("AlarmSignalPG12CNT2Alarm")]
  734. public IoAlarmSignal AlarmSignalPG12CNT2Alarm { get; set; }
  735. [Tag("AlarmSignalPG13CNT1Alarm")]
  736. public IoAlarmSignal AlarmSignalPG13CNT1Alarm { get; set; }
  737. [Tag("AlarmSignalPG13CNT2Alarm")]
  738. public IoAlarmSignal AlarmSignalPG13CNT2Alarm { get; set; }
  739. [Tag("AlarmSignalVaccum1PumpWarning")]
  740. public IoAlarmSignal AlarmSignalVaccum1PumpWarning { get; set; }
  741. [Tag("AlarmSignalVaccum1PumpAlarm")]
  742. public IoAlarmSignal AlarmSignalVaccum1PumpAlarm { get; set; }
  743. [Tag("AlarmSignalVaccum2PumpWarning")]
  744. public IoAlarmSignal AlarmSignalVaccum2PumpWarning { get; set; }
  745. [Tag("AlarmSignalVaccum2PumpAlarm")]
  746. public IoAlarmSignal AlarmSignalVaccum2PumpAlarm { get; set; }
  747. [Tag("AlarmSignalHotN2Alarm")]
  748. public IoAlarmSignal AlarmSignalHotN2Alarm { get; set; }
  749. [Tag("AlarmSignalLDS1MajorAlarm")]
  750. public IoAlarmSignal AlarmSignalLDS1MajorAlarm { get; set; }
  751. [Tag("AlarmSignalLDS1MinorWarning")]
  752. public IoAlarmSignal AlarmSignalLDS1MinorWarning { get; set; }
  753. [Tag("AlarmSignalLDS1liquidLowWarning")]
  754. public IoAlarmSignal AlarmSignalLDS1liquidLowWarning { get; set; }
  755. [Tag("AlarmSignalLDS1TankBlankAlarm")]
  756. public IoAlarmSignal AlarmSignalLDS1TankBlankAlarm { get; set; }
  757. [Tag("AlarmSignalLDS2MajorAlarm")]
  758. public IoAlarmSignal AlarmSignalLDS2MajorAlarm { get; set; }
  759. [Tag("AlarmSignalLDS2MinorWarning")]
  760. public IoAlarmSignal AlarmSignalLDS2MinorWarning { get; set; }
  761. [Tag("AlarmSignalLDS2LiquidLowWarning")]
  762. public IoAlarmSignal AlarmSignalLDS2LiquidLowWarning { get; set; }
  763. [Tag("AlarmSignalLDS2TankBlankAlarm")]
  764. public IoAlarmSignal AlarmSignalLDS2TankBlankAlarm { get; set; }
  765. [Tag("AlarmSignalPOD1FOUPVacuumSuckingAlarm")]
  766. public IoAlarmSignal AlarmSignalPOD1FOUPVacuumSuckingAlarm { get; set; }
  767. [Tag("AlarmSignalPOD2FOUPVacuumSuckingAlarm")]
  768. public IoAlarmSignal AlarmSignalPOD2FOUPVacuumSuckingAlarm { get; set; }
  769. [Tag("AlarmTS34RRotationTempSwAlarm")]
  770. public IoAlarmSignal AlarmTS34RRotationTempSwAlarm { get; set; }
  771. [Tag("AlarmTS30CapInsideTempSwAlarm")]
  772. public IoAlarmSignal AlarmTS30CapInsideTempSwAlarm { get; set; }
  773. [Tag("AlarmTS31capoutsidetemSwAlarm")]
  774. public IoAlarmSignal AlarmTS31capoutsidetemSwAlarm { get; set; }
  775. [Tag("AlarmGasboxlowerdoorSwAlarm")]
  776. public IoAlarmSignal AlarmGasboxlowerdoorSwAlarm { get; set; }
  777. [Tag("AlarmGasboxupperdoorSwAlarm")]
  778. public IoAlarmSignal AlarmGasboxupperdoorSwAlarm { get; set; }
  779. [Tag("AlarmEXHboxwaterleakAlarm")]
  780. public IoAlarmSignal AlarmEXHboxwaterleakAlarm { get; set; }
  781. [Tag("AlarmOPpanelEMO1Alarm")]
  782. public IoAlarmSignal AlarmOPpanelEMO1Alarm { get; set; }
  783. [Tag("AlarmOPpanelEMO2Alarm")]
  784. public IoAlarmSignal AlarmOPpanelEMO2Alarm { get; set; }
  785. [Tag("AlarmMainFurnaceTS306Alarm")]
  786. public IoAlarmSignal AlarmMainFurnaceTS306Alarm { get; set; }
  787. [Tag("AlarmHeaterRoomSWS11S12Alarm")]
  788. public IoAlarmSignal AlarmHeaterRoomSWS11S12Alarm { get; set; }
  789. [Tag("AlarmHeaterBbacksidePanelSWS112Alarm")]
  790. public IoAlarmSignal AlarmHeaterBbacksidePanelSWS112Alarm { get; set; }
  791. [Tag("AlarmRHCTS305Alarm")]
  792. public IoAlarmSignal AlarmRHCTS305Alarm { get; set; }
  793. [Tag("AlarmGasLeakFaultAlarm")]
  794. public IoAlarmSignal AlarmGasLeakFaultAlarm { get; set; }
  795. [Tag("AlarmMagneticFluidLeakAlarm")]
  796. public IoAlarmSignal AlarmMagneticFluidLeakAlarm { get; set; }
  797. [Tag("AlarmCoolingWaterLeakAlarm")]
  798. public IoAlarmSignal AlarmCoolingWaterLeakAlarm { get; set; }
  799. [Tag("AlarmLSCWaterLeakAlarm")]
  800. public IoAlarmSignal AlarmLSCWaterLeakAlarm { get; set; }
  801. [Tag("AlarmLABacksideDoorSwitchAlarm")]
  802. public IoAlarmSignal AlarmLABacksideDoorSwitchAlarm { get; set; }
  803. [Tag("AlarmSiSourceTANKHeater1INHIBITHIAlarm")]
  804. public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITHIAlarm { get; set; }
  805. [Tag("AlarmSiSourceTANKHeater1INHIBITLOWAlarm")]
  806. public IoAlarmSignal AlarmSiSourceTANKHeater1INHIBITLOWAlarm { get; set; }
  807. [Tag("AlarmSiSourceTANKHeater2INHIBITHIAlarm")]
  808. public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITHIAlarm { get; set; }
  809. [Tag("AlarmSiSourceTANKHeater2INHIBITLOWAlarm")]
  810. public IoAlarmSignal AlarmSiSourceTANKHeater2INHIBITLOWAlarm { get; set; }
  811. [Tag("AlarmSiSourceTANKHeater3INHIBITHIAlarm")]
  812. public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITHIAlarm { get; set; }
  813. [Tag("AlarmSiSourceTANKHeater3INHIBITLOWAlarm")]
  814. public IoAlarmSignal AlarmSiSourceTANKHeater3INHIBITLOWAlarm { get; set; }
  815. [Tag("AlarmSiSourceAVMFCHeaterINHIBITHIAlarm")]
  816. public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITHIAlarm { get; set; }
  817. [Tag("AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm")]
  818. public IoAlarmSignal AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm { get; set; }
  819. [Tag("AlarmCSourceTANKHeater1INHIBITHIAlarm")]
  820. public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITHIAlarm { get; set; }
  821. [Tag("AlarmCSourceTANKHeater1INHIBITLOWAlarm")]
  822. public IoAlarmSignal AlarmCSourceTANKHeater1INHIBITLOWAlarm { get; set; }
  823. [Tag("AlarmCSourceTANKHeater2INHIBITHIAlarm")]
  824. public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITHIAlarm { get; set; }
  825. [Tag("AlarmCSourceTANKHeater2INHIBITLOWAlarm")]
  826. public IoAlarmSignal AlarmCSourceTANKHeater2INHIBITLOWAlarm { get; set; }
  827. [Tag("AlarmCSourceTANKHeater3INHIBITHIAlarm")]
  828. public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITHIAlarm { get; set; }
  829. [Tag("AlarmCSourceTANKHeater3INHIBITLOWAlarm")]
  830. public IoAlarmSignal AlarmCSourceTANKHeater3INHIBITLOWAlarm { get; set; }
  831. [Tag("AlarmCSourceAVMFCHeaterINHIBITHIAlarm")]
  832. public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITHIAlarm { get; set; }
  833. [Tag("AlarmCSourceAVMFCHeaterINHIBITLOWAlarm")]
  834. public IoAlarmSignal AlarmCSourceAVMFCHeaterINHIBITLOWAlarm { get; set; }
  835. #endregion
  836. public AITSensorData SensorRecipeOK { get; set; }
  837. public AITSensorData SensorPROCManualOK { get; set; }
  838. [Tag("SensorVG11Status")]
  839. public IoSensor SensorVG11Status { get; set; }
  840. [Tag("SensorVG12Status")]
  841. public IoSensor SensorVG12Status { get; set; }
  842. [Tag("SensorVG13Status")]
  843. public IoSensor SensorVG13Status { get; set; }
  844. [Tag("SensorVACDEPOOK")]
  845. public IoSensor SensorVACDEPOOK { get; set; }
  846. [Tag("SensorVACHFOK")]
  847. public IoSensor SensorVACHFOK { get; set; }
  848. [Tag("SensorVACF2OK")]
  849. public IoSensor SensorVACF2OK { get; set; }
  850. [Tag("SensorO2DetectSideLA")]
  851. public IoSensor SensorO2DetectSideLA { get; set; }
  852. [Tag("SensorO2DetectSideFIMS1")]
  853. public IoSensor SensorO2DetectSideFIMS1 { get; set; }
  854. [Tag("SensorO2DetectSideFIMS2")]
  855. public IoSensor SensorO2DetectSideFIMS2 { get; set; }
  856. [Tag("SensorLADoorSw1")]
  857. public IoSensor SensorLADoorSw1 { get; set; }
  858. [Tag("SensorPLCHeartBeatPC")]
  859. public IoSensor SensorPLCHeartBeatPC { get; set; }
  860. //[Tag("SensorNH3PressureOK")]
  861. //public IoAlarmSignal SignalLeak { get; set; }
  862. //[Tag("SignalExhaustAlarm")]
  863. //public IoAlarmSignal SignalExhaustAlarm { get; set; }
  864. //[Tag("SignalLeakBroken")]
  865. //public IoAlarmSignal SignalLeakBroken { get; set; }
  866. //[Tag("EmoAlarm")]
  867. //public IoAlarmSignal EmoAlarm { get; set; }
  868. // -------------------------------------------------------------------------
  869. //[Tag("ChamberLiftPin")]
  870. //public IoLift2 ChamberLiftPin { get; set; }
  871. // -------------------------------------------------------------------------
  872. //[Tag("ChamberDoor")]
  873. //public IoDoor2 ChamberDoor { get; set; }
  874. //[Tag("MFM61")]
  875. //public IoMFM MFM61 { get; set; }
  876. //[Tag("MfmNB")]
  877. //public IoMFM MfmNB { get; set; }
  878. [Tag("ValveAV1")]
  879. public IoValve ValveAV1 { get; set; }
  880. [Tag("ValveAV2")]
  881. public IoValve ValveAV2 { get; set; }
  882. [Tag("ValveAV3")]
  883. public IoValve ValveAV3 { get; set; }
  884. [Tag("ValveAV4")]
  885. public IoValve ValveAV4 { get; set; }
  886. [Tag("ValveAV5")]
  887. public IoValve ValveAV5 { get; set; }
  888. [Tag("ValveAV6")]
  889. public IoValve ValveAV6 { get; set; }
  890. [Tag("ValveAV7")]
  891. public IoValve ValveAV7 { get; set; }
  892. [Tag("ValveAV8")]
  893. public IoValve ValveAV8 { get; set; }
  894. [Tag("ValveAV9")]
  895. public IoValve ValveAV9 { get; set; }
  896. [Tag("ValveAV10")]
  897. public IoValve ValveAV10 { get; set; }
  898. [Tag("ValveAV11")]
  899. public IoValve ValveAV11 { get; set; }
  900. [Tag("ValveAV12")]
  901. public IoValve ValveAV12 { get; set; }
  902. [Tag("ValveAV13")]
  903. public IoValve ValveAV13 { get; set; }
  904. [Tag("ValveAV14")]
  905. public IoValve ValveAV14 { get; set; }
  906. [Tag("ValveAV15")]
  907. public IoValve ValveAV15 { get; set; }
  908. [Tag("ValveAV16")]
  909. public IoValve ValveAV16 { get; set; }
  910. [Tag("ValveAV17")]
  911. public IoValve ValveAV17 { get; set; }
  912. [Tag("ValveAV18")]
  913. public IoValve ValveAV18 { get; set; }
  914. [Tag("ValveAV19")]
  915. public IoValve ValveAV19 { get; set; }
  916. [Tag("ValveAV20")]
  917. public IoValve ValveAV20 { get; set; }
  918. [Tag("ValveAV21")]
  919. public IoValve ValveAV21 { get; set; }
  920. [Tag("ValveAV22")]
  921. public IoValve ValveAV22 { get; set; }
  922. [Tag("ValveAV23")]
  923. public IoValve ValveAV23 { get; set; }
  924. [Tag("ValveAV24")]
  925. public IoValve ValveAV24 { get; set; }
  926. [Tag("ValveAV25")]
  927. public IoValve ValveAV25 { get; set; }
  928. [Tag("ValveAV26")]
  929. public IoValve ValveAV26 { get; set; }
  930. [Tag("ValveAV27")]
  931. public IoValve ValveAV27 { get; set; }
  932. [Tag("ValveAV28")]
  933. public IoValve ValveAV28 { get; set; }
  934. [Tag("ValveAV29")]
  935. public IoValve ValveAV29 { get; set; }
  936. [Tag("ValveAV30")]
  937. public IoValve ValveAV30 { get; set; }
  938. [Tag("ValveAV31")]
  939. public IoValve ValveAV31 { get; set; }
  940. [Tag("ValveAV32")]
  941. public IoValve ValveAV32 { get; set; }
  942. [Tag("ValveAV33")]
  943. public IoValve ValveAV33 { get; set; }
  944. [Tag("ValveAV34")]
  945. public IoValve ValveAV34 { get; set; }
  946. [Tag("ValveAV35")]
  947. public IoValve ValveAV35 { get; set; }
  948. [Tag("ValveAV36")]
  949. public IoValve ValveAV36 { get; set; }
  950. [Tag("ValveAV37")]
  951. public IoValve ValveAV37 { get; set; }
  952. [Tag("ValveAV38")]
  953. public IoValve ValveAV38 { get; set; }
  954. [Tag("ValveAV39")]
  955. public IoValve ValveAV39 { get; set; }
  956. [Tag("ValveAV40")]
  957. public IoValve ValveAV40 { get; set; }
  958. [Tag("ValveAV41")]
  959. public IoValve ValveAV41 { get; set; }
  960. [Tag("ValveAV42")]
  961. public IoValve ValveAV42 { get; set; }
  962. [Tag("ValveAV43")]
  963. public IoValve ValveAV43 { get; set; }
  964. [Tag("ValveAV44")]
  965. public IoValve ValveAV44 { get; set; }
  966. [Tag("ValveAV45")]
  967. public IoValve ValveAV45 { get; set; }
  968. [Tag("ValveAV46")]
  969. public IoValve ValveAV46 { get; set; }
  970. [Tag("ValveAV47")]
  971. public IoValve ValveAV47 { get; set; }
  972. [Tag("ValveAV48")]
  973. public IoValve ValveAV48 { get; set; }
  974. [Tag("ValveAV49")]
  975. public IoValve ValveAV49 { get; set; }
  976. [Tag("ValveAV50")]
  977. public IoValve ValveAV50 { get; set; }
  978. [Tag("ValveAV51")]
  979. public IoValve ValveAV51 { get; set; }
  980. [Tag("ValveAV52")]
  981. public IoValve ValveAV52 { get; set; }
  982. [Tag("ValveAV53")]
  983. public IoValve ValveAV53 { get; set; }
  984. [Tag("ValveAV54")]
  985. public IoValve ValveAV54 { get; set; }
  986. [Tag("ValveAV55")]
  987. public IoValve ValveAV55 { get; set; }
  988. [Tag("ValveAV56")]
  989. public IoValve ValveAV56 { get; set; }
  990. [Tag("ValveAV57")]
  991. public IoValve ValveAV57 { get; set; }
  992. [Tag("ValveAV58")]
  993. public IoValve ValveAV58 { get; set; }
  994. [Tag("ValveAV59")]
  995. public IoValve ValveAV59 { get; set; }
  996. [Tag("ValveAV60")]
  997. public IoValve ValveAV60 { get; set; }
  998. [Tag("ValveAV61")]
  999. public IoValve ValveAV61 { get; set; }
  1000. [Tag("ValveAV62")]
  1001. public IoValve ValveAV62 { get; set; }
  1002. [Tag("ValveAV63")]
  1003. public IoValve ValveAV63 { get; set; }
  1004. [Tag("ValveAV64")]
  1005. public IoValve ValveAV64 { get; set; }
  1006. [Tag("ValveAV65")]
  1007. public IoValve ValveAV65 { get; set; }
  1008. [Tag("ValveAV202LADoor")]
  1009. public IoValve ValveAV202LADoor { get; set; }
  1010. [Tag("ValveAV66")]
  1011. public IoValve ValveAV66 { get; set; }
  1012. [Tag("ValveAV67")]
  1013. public IoValve ValveAV67 { get; set; }
  1014. [Tag("ValveAV68")]
  1015. public IoValve ValveAV68 { get; set; }
  1016. [Tag("ValveAV69")]
  1017. public IoValve ValveAV69 { get; set; }
  1018. [Tag("ValveAV70")]
  1019. public IoValve ValveAV70 { get; set; }
  1020. [Tag("ValveAV71")]
  1021. public IoValve ValveAV71 { get; set; }
  1022. [Tag("ValveAV72")]
  1023. public IoValve ValveAV72 { get; set; }
  1024. [Tag("ValveAV73")]
  1025. public IoValve ValveAV73 { get; set; }
  1026. [Tag("ValveAV74")]
  1027. public IoValve ValveAV74 { get; set; }
  1028. [Tag("ValveAV75")]
  1029. public IoValve ValveAV75 { get; set; }
  1030. [Tag("ValveAV76")]
  1031. public IoValve ValveAV76 { get; set; }
  1032. [Tag("ValveAV77")]
  1033. public IoValve ValveAV77 { get; set; }
  1034. [Tag("ValveAV78")]
  1035. public IoValve ValveAV78 { get; set; }
  1036. [Tag("ValveAV79")]
  1037. public IoValve ValveAV79 { get; set; }
  1038. [Tag("ValveAV80")]
  1039. public IoValve ValveAV80 { get; set; }
  1040. [Tag("ValveAV81")]
  1041. public IoValve ValveAV81 { get; set; }
  1042. [Tag("ValveAV82")]
  1043. public IoValve ValveAV82 { get; set; }
  1044. [Tag("ValveAV83")]
  1045. public IoValve ValveAV83 { get; set; }
  1046. [Tag("ValveAV84")]
  1047. public IoValve ValveAV84 { get; set; }
  1048. [Tag("ValveAV85")]
  1049. public IoValve ValveAV85 { get; set; }
  1050. [Tag("ValveAV86")]
  1051. public IoValve ValveAV86 { get; set; }
  1052. [Tag("ValveAV87")]
  1053. public IoValve ValveAV87 { get; set; }
  1054. [Tag("ValveAV88")]
  1055. public IoValve ValveAV88 { get; set; }
  1056. [Tag("ValveAV89")]
  1057. public IoValve ValveAV89 { get; set; }
  1058. [Tag("ValveAV90")]
  1059. public IoValve ValveAV90 { get; set; }
  1060. [Tag("ValveAV91")]
  1061. public IoValve ValveAV91 { get; set; }
  1062. [Tag("ValveAV92")]
  1063. public IoValve ValveAV92 { get; set; }
  1064. [Tag("ValveAV93")]
  1065. public IoValve ValveAV93 { get; set; }
  1066. [Tag("ValveAV94")]
  1067. public IoValve ValveAV94 { get; set; }
  1068. [Tag("ValveAV95")]
  1069. public IoValve ValveAV95 { get; set; }
  1070. [Tag("ValveAV96")]
  1071. public IoValve ValveAV96 { get; set; }
  1072. [Tag("ValveAV97")]
  1073. public IoValve ValveAV97 { get; set; }
  1074. [Tag("ValveAV98")]
  1075. public IoValve ValveAV98 { get; set; }
  1076. [Tag("ValveAV99")]
  1077. public IoValve ValveAV99 { get; set; }
  1078. [Tag("ValveAV100")]
  1079. public IoValve ValveAV100 { get; set; }
  1080. [Tag("ValveAV101")]
  1081. public IoValve ValveAV101 { get; set; }
  1082. [Tag("ValveAV102")]
  1083. public IoValve ValveAV102 { get; set; }
  1084. [Tag("ValveAV103")]
  1085. public IoValve ValveAV103 { get; set; }
  1086. [Tag("ValveAV104")]
  1087. public IoValve ValveAV104 { get; set; }
  1088. [Tag("ValveAV105")]
  1089. public IoValve ValveAV105 { get; set; }
  1090. [Tag("ValveAV106")]
  1091. public IoValve ValveAV106 { get; set; }
  1092. [Tag("ValveAV107")]
  1093. public IoValve ValveAV107 { get; set; }
  1094. [Tag("ValveAV108")]
  1095. public IoValve ValveAV108 { get; set; }
  1096. [Tag("ValveAV109")]
  1097. public IoValve ValveAV109 { get; set; }
  1098. [Tag("ValveAV110")]
  1099. public IoValve ValveAV110 { get; set; }
  1100. [Tag("ValveAV111")]
  1101. public IoValve ValveAV111 { get; set; }
  1102. [Tag("ValveAV112")]
  1103. public IoValve ValveAV112 { get; set; }
  1104. [Tag("ValveAV113")]
  1105. public IoValve ValveAV113 { get; set; }
  1106. [Tag("ValveAV114")]
  1107. public IoValve ValveAV114 { get; set; }
  1108. [Tag("ValveAV115")]
  1109. public IoValve ValveAV115 { get; set; }
  1110. [Tag("ValveAV116")]
  1111. public IoValve ValveAV116 { get; set; }
  1112. [Tag("ValveAV117")]
  1113. public IoValve ValveAV117 { get; set; }
  1114. [Tag("ValveAV118")]
  1115. public IoValve ValveAV118 { get; set; }
  1116. [Tag("ValveAV119")]
  1117. public IoValve ValveAV119 { get; set; }
  1118. [Tag("ValveAV120")]
  1119. public IoValve ValveAV120 { get; set; }
  1120. [Tag("ValveAV121")]
  1121. public IoValve ValveAV121 { get; set; }
  1122. [Tag("ValveAV122")]
  1123. public IoValve ValveAV122 { get; set; }
  1124. [Tag("ValveAV123")]
  1125. public IoValve ValveAV123 { get; set; }
  1126. [Tag("ValveAV124")]
  1127. public IoValve ValveAV124 { get; set; }
  1128. [Tag("ValveAV125")]
  1129. public IoValve ValveAV125 { get; set; }
  1130. [Tag("ValveAV126")]
  1131. public IoValve ValveAV126 { get; set; }
  1132. [Tag("ValveAV127")]
  1133. public IoValve ValveAV127 { get; set; }
  1134. [Tag("ValveAV128")]
  1135. public IoValve ValveAV128 { get; set; }
  1136. [Tag("ValveAV129")]
  1137. public IoValve ValveAV129 { get; set; }
  1138. [Tag("ValveAV130")]
  1139. public IoValve ValveAV130 { get; set; }
  1140. [Tag("ValveAV131")]
  1141. public IoValve ValveAV131 { get; set; }
  1142. [Tag("ValveAV132")]
  1143. public IoValve ValveAV132 { get; set; }
  1144. [Tag("ValveAV133")]
  1145. public IoValve ValveAV133 { get; set; }
  1146. [Tag("ValveAV134")]
  1147. public IoValve ValveAV134 { get; set; }
  1148. [Tag("ValveAV135")]
  1149. public IoValve ValveAV135 { get; set; }
  1150. [Tag("ValveAV136")]
  1151. public IoValve ValveAV136 { get; set; }
  1152. [Tag("ValveAV230")]
  1153. public IoValve ValveAV230 { get; set; }
  1154. [Tag("ValveSV227")]
  1155. public IoValve ValveSV227 { get; set; }
  1156. [Tag("ValveAV201")]
  1157. public IoValve ValveAV201 { get; set; }
  1158. [Tag("ValveAV202")]
  1159. public IoValve ValveAV202 { get; set; }
  1160. [Tag("ValveLAExhaustDamper")]
  1161. public IoValve ValveLAExhaustDamper { get; set; }
  1162. [Tag("ValveLADamper")]
  1163. public IoValve ValveLADamper { get; set; }
  1164. [Tag("ValveFIMS1N2Purge")]
  1165. public IoValve ValveFIMS1N2Purge { get; set; }
  1166. [Tag("ValveFIMS2N2Purge")]
  1167. public IoValve ValveFIMS2N2Purge { get; set; }
  1168. [Tag("ValveSV61")]
  1169. public IoValve ValveSV61 { get; set; }
  1170. [Tag("ValveSV62")]
  1171. public IoValve ValveSV62 { get; set; }
  1172. [Tag("ValveSV63")]
  1173. public IoValve ValveSV63 { get; set; }
  1174. [Tag("ValveSV64")]
  1175. public IoValve ValveSV64 { get; set; }
  1176. [Tag("AGVPump")]
  1177. public IoValve AGVPump { get; set; }
  1178. [Tag("AGV2Pump")]
  1179. public IoValve AGV2Pump { get; set; }
  1180. [Tag("BothPump")]
  1181. public IoValve BothPump { get; set; }
  1182. [Tag("BothPump1")]
  1183. public IoValve BothPump1 { get; set; }
  1184. [Tag("BothPump2")]
  1185. public IoValve BothPump2 { get; set; }
  1186. [Tag("ValveBlowerPowerOn")]
  1187. public IoValve ValveBlowerPowerOn { get; set; }
  1188. [Tag("HMNT")]
  1189. public IoValve HMNT { get; set; }
  1190. [Tag("CMNT")]
  1191. public IoValve CMNT { get; set; }
  1192. [Tag("HREF")]
  1193. public IoValve HREF { get; set; }
  1194. [Tag("CREF")]
  1195. public IoValve CREF { get; set; }
  1196. [Tag("HZERO")]
  1197. public IoValve HZERO { get; set; }
  1198. [Tag("CZERO")]
  1199. public IoValve CZERO { get; set; }
  1200. // -------------------------------------------------------------------------
  1201. [Tag("PressureGLBoxPG1")]
  1202. public IoPressureMeter PressureGLBoxPG1 { get; set; }
  1203. [Tag("PressureGLBoxPG2")]
  1204. public IoPressureMeter PressureGLBoxPG2 { get; set; }
  1205. [Tag("PressureGLBoxPG3")]
  1206. public IoPressureMeter PressureGLBoxPG3 { get; set; }
  1207. [Tag("PressureGLBoxPG4")]
  1208. public IoPressureMeter PressureGLBoxPG4 { get; set; }
  1209. [Tag("PressureGLBoxPG5")]
  1210. public IoPressureMeter PressureGLBoxPG5 { get; set; }
  1211. [Tag("PressureGLBoxPG6")]
  1212. public IoPressureMeter PressureGLBoxPG6 { get; set; }
  1213. [Tag("PressureGasBoxUpperVG21")]
  1214. public IoPressureMeter PressureGasBoxUpperVG21 { get; set; }
  1215. [Tag("PressureGasBoxUpperVG22")]
  1216. public IoPressureMeter PressureGasBoxUpperVG22 { get; set; }
  1217. [Tag("ConcentrationO2")]
  1218. public IoPressureMeter ConcentrationO2 { get; set; }
  1219. [Tag("GasBoxExhaustMS2")]
  1220. public IoPressureMeter GasBoxExhaustMS2 { get; set; }
  1221. [Tag("ScavengerExhaustMS3")]
  1222. public IoPressureMeter ScavengerExhaustMS3 { get; set; }
  1223. [Tag("ExhaustBoxExhaustMS4")]
  1224. public IoPressureMeter ExhaustBoxExhaustMS4 { get; set; }
  1225. [Tag("LoadingAreaExhaustMS5")]
  1226. public IoPressureMeter LoadingAreaExhaustMS5 { get; set; }
  1227. [Tag("FrontBodyExhaustMS6")]
  1228. public IoPressureMeter FrontBodyExhaustMS6 { get; set; }
  1229. [Tag("LAExhaustMS7")]
  1230. public IoPressureMeter LAExhaustMS7 { get; set; }
  1231. [Tag("RHCExhaustMS8")]
  1232. public IoPressureMeter RHCExhaustMS8 { get; set; }
  1233. [Tag("RHCFlowFL901")]
  1234. public IoPressureMeter RHCFlowFL901 { get; set; }
  1235. [Tag("CoolingWaterFlowOfFurnaceFL902")]
  1236. public IoPressureMeter CoolingWaterFlowOfFurnaceFL902 { get; set; }
  1237. [Tag("CoolingWateFlowOfShuttleFL903")]
  1238. public IoPressureMeter CoolingWateFlowOfShuttleFL903 { get; set; }
  1239. [Tag("CoolingWaterFlowOfBoatRotationFL904")]
  1240. public IoPressureMeter CoolingWaterFlowOfBoatRotationFL904 { get; set; }
  1241. [Tag("CoolingWaterFlowOfFlangeFL905")]
  1242. public IoPressureMeter CoolingWaterFlowOfFlangeFL905 { get; set; }
  1243. [Tag("CoolingWaterFlowOfLoadingAreaFL906")]
  1244. public IoPressureMeter CoolingWaterFlowOfLoadingAreaFL906 { get; set; }
  1245. [Tag("VG11")]
  1246. public IoPressureMeter VG11 { get; set; }
  1247. [Tag("VG12")]
  1248. public IoPressureMeter VG12 { get; set; }
  1249. [Tag("VG13")]
  1250. public IoPressureMeter VG13 { get; set; }
  1251. [Tag("VG21")]
  1252. public IoPressureMeter VG21 { get; set; }
  1253. [Tag("VG22")]
  1254. public IoPressureMeter VG22 { get; set; }
  1255. [Tag("VG33")]
  1256. public IoPressureMeter VG33 { get; set; }
  1257. [Tag("VG32")]
  1258. public IoPressureMeter VG32 { get; set; }
  1259. [Tag("PG12")]
  1260. public IoPressureMeter PG12 { get; set; }
  1261. [Tag("PG13")]
  1262. public IoPressureMeter PG13 { get; set; }
  1263. [Tag("PS13")]
  1264. public IoPressureMeter PS13 { get; set; }
  1265. [Tag("LoadingAreaExhaustMS321")]
  1266. public IoPressureMeter LoadingAreaExhaustMS321 { get; set; }
  1267. [Tag("N24PurgePressure")]
  1268. public IoPressureMeter N24PurgePressure { get; set; }
  1269. [Tag("N25PurgePressure")]
  1270. public IoPressureMeter N25PurgePressure { get; set; }
  1271. [Tag("N26PurgePressure")]
  1272. public IoPressureMeter N26PurgePressure { get; set; }
  1273. [Tag("N27PurgePressure")]
  1274. public IoPressureMeter N27PurgePressure { get; set; }
  1275. [Tag("PS11")]
  1276. public IoPressureMeter PS11 { get; set; }
  1277. [Tag("PS17")]
  1278. public IoPressureMeter PS17 { get; set; }
  1279. // -------------------------------------------------------------------------
  1280. [Tag("FIMS1")]
  1281. public IoFIMS FIMS1 { get; set; }
  1282. [Tag("FIMS2")]
  1283. public IoFIMS FIMS2 { get; set; }
  1284. //[Tag("ValvePV12")]
  1285. //public IoValve ValvePV12 { get; set; }
  1286. //[Tag("ValvePV13")]
  1287. //public IoValve ValvePV13 { get; set; }
  1288. //[Tag("ValvePV14")]
  1289. //public IoValve ValvePV14 { get; set; }
  1290. //[Tag("ValvePV15")]
  1291. //public IoValve ValvePV15 { get; set; }
  1292. //[Tag("ValvePV16")]
  1293. //public IoValve ValvePV16 { get; set; }
  1294. //[Tag("ValvePV17")]
  1295. //public IoValve ValvePV17 { get; set; }
  1296. [Tag("MFC1")]
  1297. public IoMFC MFC1 { get; set; }
  1298. [Tag("MFC2")]
  1299. public IoMFC MFC2 { get; set; }
  1300. [Tag("MFC3")]
  1301. public IoMFC MFC3 { get; set; }
  1302. [Tag("MFC4")]
  1303. public IoMFC MFC4 { get; set; }
  1304. [Tag("MFC5")]
  1305. public IoMFC MFC5 { get; set; }
  1306. [Tag("MFC6")]
  1307. public IoMFC MFC6 { get; set; }
  1308. [Tag("MFC7")]
  1309. public IoMFC MFC7 { get; set; }
  1310. [Tag("MFC8")]
  1311. public IoMFC MFC8 { get; set; }
  1312. [Tag("MFC9")]
  1313. public IoMFC MFC9 { get; set; }
  1314. [Tag("MFC10")]
  1315. public IoMFC MFC10 { get; set; }
  1316. [Tag("MFC11")]
  1317. public IoMFC MFC11 { get; set; }
  1318. [Tag("MFC12")]
  1319. public IoMFC MFC12 { get; set; }
  1320. [Tag("MFC13")]
  1321. public IoMFC MFC13 { get; set; }
  1322. [Tag("MFC14")]
  1323. public IoMFC MFC14 { get; set; }
  1324. [Tag("MFC15")]
  1325. public IoMFC MFC15 { get; set; }
  1326. [Tag("MFC16")]
  1327. public IoMFC MFC16 { get; set; }
  1328. [Tag("MFC17")]
  1329. public IoMFC MFC17 { get; set; }
  1330. [Tag("MFC31")]
  1331. public IoMFC MFC31 { get; set; }
  1332. [Tag("MFC32")]
  1333. public IoMFC MFC32 { get; set; }
  1334. [Tag("MFC51")]
  1335. public IoMFC MFC51 { get; set; }
  1336. [Tag("MFC57")]
  1337. public IoMFC MFC57 { get; set; }
  1338. //[Tag("GasLineA")]
  1339. //public IoGasStick2 GasLineA { get; set; }
  1340. //[Tag("GasLineB")]
  1341. //public IoGasStick2 GasLineB { get; set; }
  1342. //[Tag("GasLineC")]
  1343. //public IoGasStick2 GasLineC { get; set; }
  1344. //[Tag("GasLineNX")]
  1345. //public IoGasStick2 GasLineNX { get; set; }
  1346. //[Tag("GasLineNY")]
  1347. //public IoGasStick2 GasLineNY { get; set; }
  1348. //[Tag("GasLineN1")]
  1349. //public IoGasStick2 GasLineN1 { get; set; }
  1350. //[Tag("GasLineN2")]
  1351. //public IoGasStick2 GasLineN2 { get; set; }
  1352. //[Tag("GasLineN3")]
  1353. //public IoGasStick2 GasLineN3 { get; set; }
  1354. //[Tag("GasLineM1")]
  1355. //public IoGasStick2 GasLineM1 { get; set; }
  1356. //[Tag("GasLineM2")]
  1357. //public IoGasStick2 GasLineM2 { get; set; }
  1358. //[Tag("GasLineD1")]
  1359. //public IoGasStick2 GasLineD1 { get; set; }
  1360. //[Tag("GasLineJ1")]
  1361. //public IoGasStick2 GasLineJ1 { get; set; }
  1362. // -------------------------------------------------------------------------
  1363. [Tag("Shutter")]
  1364. public IoShutter Shutter { get; set; }
  1365. [Tag("FFU1")] public IoFFU FFU1 { get; set; }
  1366. [Tag("FFU2")] public IoFFU FFU2 { get; set; }
  1367. [Tag("FFU3")] public IoFFU FFU3 { get; set; }
  1368. [Tag("FFU4")] public IoFFU FFU4 { get; set; }
  1369. [Tag("FFU5")] public IoFFU FFU5 { get; set; }
  1370. [Tag("FFU6")] public IoFFU FFU6 { get; set; }
  1371. [Tag("FFU7")] public IoFFU FFU7 { get; set; }
  1372. [Tag("FFU8")] public IoFFU FFU8 { get; set; }
  1373. [Tag("FFU9")] public IoFFU FFU9 { get; set; }
  1374. // -------------------------------------------------------------------------
  1375. [Tag("APC")]
  1376. public IoAPC APC { get; set; }
  1377. // -------------------------------------------------------------------------
  1378. //[Tag("MainPump")]
  1379. //public IoPump MainPump { get; set; }
  1380. //[Tag("IoPump")]
  1381. //public IoPump IoPump { get; set; }
  1382. // -------------------------------------------------------------------------
  1383. //[Tag("VG2Pressure")]
  1384. //public IoPressureMeter VG2Pressure { get; set; }
  1385. //[Tag("PT52")]
  1386. //public IoPressureMeter PT52 { get; set; }
  1387. //[Tag("PT53")]
  1388. //public IoPressureMeter PT53 { get; set; }
  1389. //[Tag("PT10")]
  1390. //public IoPressureMeter PT10 { get; set; }
  1391. //[Tag("PT20")]
  1392. //public IoPressureMeter PT20 { get; set; }
  1393. //[Tag("PT30")]
  1394. //public IoPressureMeter PT30 { get; set; }
  1395. //[Tag("O2Detector1")]
  1396. //public IoPressureMeter O2Detector1 { get; set; }
  1397. //[Tag("O2Detector2")]
  1398. //public IoPressureMeter O2Detector2 { get; set; }
  1399. // -------------------------------------------------------------------------
  1400. [Tag("TrigFurnaceLZoneHeatingEnable")]
  1401. public IoTrigger TrigFurnaceLZoneHeatingEnable { get; set; }
  1402. [Tag("TrigFurnaceCLZoneHeatingEnable")]
  1403. public IoTrigger TrigFurnaceCLZoneHeatingEnable { get; set; }
  1404. [Tag("TrigFurnaceCZoneHeatingEnable")]
  1405. public IoTrigger TrigFurnaceCZoneHeatingEnable { get; set; }
  1406. [Tag("TrigFurnaceCUZoneHeatingEnable")]
  1407. public IoTrigger TrigFurnaceCUZoneHeatingEnable { get; set; }
  1408. [Tag("TrigFurnaceUZoneHeatingEnable")]
  1409. public IoTrigger TrigFurnaceUZoneHeatingEnable { get; set; }
  1410. [Tag("TrigFFULSPEED")]
  1411. public IoTrigger TrigFFULSPEED { get; set; }
  1412. [Tag("TrigFFUHSPEED")]
  1413. public IoTrigger TrigFFUHSPEED { get; set; }
  1414. [Tag("TrigVGUnitConversion")]
  1415. public IoTrigger TrigVGUnitConversion { get; set; }
  1416. [Tag("TrigForlineHeaterOn")]
  1417. public IoTrigger TrigForlineHeaterOn { get; set; }
  1418. [Tag("TrigHTR1SWON")]
  1419. public IoTrigger TrigHTR1SWON { get; set; }
  1420. [Tag("TrigHTR2SWON")]
  1421. public IoTrigger TrigHTR2SWON { get; set; }
  1422. [Tag("TrigHTR3SWON")]
  1423. public IoTrigger TrigHTR3SWON { get; set; }
  1424. [Tag("TrigDEPOSW")]
  1425. public IoTrigger TrigDEPOSW { get; set; }
  1426. [Tag("TrigCREFON")]
  1427. public IoTrigger TrigCREFON { get; set; }
  1428. [Tag("TrigSIREFON")]
  1429. public IoTrigger TrigSIREFON { get; set; }
  1430. [Tag("TrigCEXHON")]
  1431. public IoTrigger TrigCEXHON { get; set; }
  1432. [Tag("TrigDPRON")]
  1433. public IoTrigger TrigDPRON { get; set; }
  1434. [Tag("TrigHFCleanSwitchB")]
  1435. public IoTrigger TrigHFCleanSwitchB { get; set; }
  1436. [Tag("TrigF2CleanSwitchB")]
  1437. public IoTrigger TrigF2CleanSwitchB { get; set; }
  1438. public IoHeater HeaterU { get; set; }
  1439. public IoHeater HeaterCU { get; set; }
  1440. public IoHeater HeaterC { get; set; }
  1441. public IoHeater HeaterCL { get; set; }
  1442. public IoHeater HeaterL { get; set; }
  1443. //private Dictionary<string, IoMFC> _gasMFCs;
  1444. //public Dictionary<string, IoMFC> GasMFCs => _gasMFCs;
  1445. [Tag("TrigAV71ExternalHeater")]
  1446. public IoTrigger TrigAV71ExternalHeater { get; set; }
  1447. [Tag("TrigAV71RingHeater")]
  1448. public IoTrigger TrigAV71RingHeater { get; set; }
  1449. [Tag("TrigHeaterAllEnable")]
  1450. public IoTrigger TrigHeaterAllEnable { get; set; }
  1451. [Tag("TrigGasLineHeaterMemoryChange")]
  1452. public IoTrigger TrigGasLineHeaterMemoryChange { get; set; }
  1453. #region N2Purge
  1454. [Tag("TrigN2PurgeLAO2CheckFirstEnable")]
  1455. public IoTrigger TrigN2PurgeLAO2CheckFirstEnable { get; set; }
  1456. [Tag("TrigN2PurgeFIMS1O2CheckEnable")]
  1457. public IoTrigger TrigN2PurgeFIMS1O2CheckEnable { get; set; }
  1458. [Tag("TrigN2PurgeFIMS2O2CheckEnable")]
  1459. public IoTrigger TrigN2PurgeFIMS2O2CheckEnable { get; set; }
  1460. [Tag("TrigN2PurgeProcess")]
  1461. public IoTrigger TrigN2PurgeProcess { get; set; }
  1462. [Tag("TrigN2PurgeLAO2OverTime")]
  1463. public IoTrigger TrigN2PurgeLAO2OverTime { get; set; }
  1464. [Tag("TrigN2PurgeLAO2CheckTime")]
  1465. public IoTrigger TrigN2PurgeLAO2CheckTime { get; set; }
  1466. [Tag("TrigN2PurgeFOUPO2OverTime")]
  1467. public IoTrigger TrigN2PurgeFOUPO2OverTime { get; set; }
  1468. [Tag("TrigN2PurgeFOUPO2CheckTime")]
  1469. public IoTrigger TrigN2PurgeFOUPO2CheckTime { get; set; }
  1470. [Tag("TrigN2PurgeExchangeLATOFOUPWaitTime")]
  1471. public IoTrigger TrigN2PurgeExchangeLATOFOUPWaitTime { get; set; }
  1472. [Tag("TrigN2PurgeExchangeFOUPTOLAWaitTime")]
  1473. public IoTrigger TrigN2PurgeExchangeFOUPTOLAWaitTime { get; set; }
  1474. [Tag("TrigN2PurgeExchangeFOUPTOFOUPWaitTime")]
  1475. public IoTrigger TrigN2PurgeExchangeFOUPTOFOUPWaitTime { get; set; }
  1476. [Tag("TrigN2PurgeLAO2CheckSV")]
  1477. public IoTrigger TrigN2PurgeLAO2CheckSV { get; set; }
  1478. [Tag("TrigN2PurgeFOUPO2CheckSV")]
  1479. public IoTrigger TrigN2PurgeFOUPO2CheckSV { get; set; }
  1480. #endregion
  1481. #region IoHeaterBand
  1482. [Tag("CapHeater")]
  1483. public IoHeaterBand CapHeater { get; set; }
  1484. [Tag("APCExternalHeater")]
  1485. public IoHeaterBand APCExternalHeater { get; set; }
  1486. [Tag("APCRingHeater")]
  1487. public IoHeaterBand APCRingHeater { get; set; }
  1488. #endregion
  1489. // -------------------------------------------------------------------------
  1490. [Tag("BoatElevatorServo")]
  1491. public IoFurnaceMotor ZAxisDevice { get; set; }
  1492. [Tag("BoatRotationServo")]
  1493. public IoFurnaceMotor RAxisDevice { get; set; }
  1494. [Tag("APC")]
  1495. public IoAPC APCDevice { get; set; }
  1496. [Tag("TrigGasLineHeaterUnit1PowerOn")]
  1497. public IoTrigger2 TrigGasLine1PowerOn { get; set; }
  1498. [Tag("TrigGasLineHeaterUnit2PowerOn")]
  1499. public IoTrigger2 TrigGasLine2PowerOn { get; set; }
  1500. [Tag("TrigGasLineHeaterUnit3PowerOn")]
  1501. public IoTrigger2 TrigGasLine3PowerOn { get; set; }
  1502. [Tag("TrigGasLineHeaterUnit4PowerOn")]
  1503. public IoTrigger2 TrigGasLine4PowerOn { get; set; }
  1504. [Tag("TrigGasLineHeaterUnit6PowerOn")]
  1505. public IoTrigger2 TrigGasLine6PowerOn { get; set; }
  1506. [Tag("TrigGasLineHeaterUnit7PowerOn")]
  1507. public IoTrigger2 TrigGasLine7PowerOn { get; set; }
  1508. [Tag("TrigGasLineHeaterUnit1RecipeChange")]
  1509. public IoTrigger2 TrigGasLine1RecipeChange { get; set; }
  1510. [Tag("TrigGasLineHeaterUnit2RecipeChange")]
  1511. public IoTrigger2 TrigGasLine2RecipeChange { get; set; }
  1512. [Tag("TrigGasLineHeaterUnit3RecipeChange")]
  1513. public IoTrigger2 TrigGasLine3RecipeChange { get; set; }
  1514. [Tag("TrigGasLineHeaterUnit4RecipeChange")]
  1515. public IoTrigger2 TrigGasLine4RecipeChange { get; set; }
  1516. [Tag("TrigGasLineHeaterUnit6RecipeChange")]
  1517. public IoTrigger2 TrigGasLine6RecipeChange { get; set; }
  1518. [Tag("TrigGasLineHeaterUnit7RecipeChange")]
  1519. public IoTrigger2 TrigGasLine7RecipeChange { get; set; }
  1520. [Tag("MINI8AlarmReset")]
  1521. public IoReset MINI8AlarmReset { get; set; }
  1522. [Tag("PLCCPUReset")]
  1523. public IoReset PLCCPUReset { get; set; }
  1524. Func<MemberInfo, bool> _hasTagAttribute;
  1525. Func<object, bool> _isTagAttribute;
  1526. public override double ChamberPressure
  1527. {
  1528. get
  1529. {
  1530. return 0;
  1531. }
  1532. }
  1533. //public IAdsPlc Plc { get; set; }
  1534. private List<IDevice> _allModuleDevice = new List<IDevice>();
  1535. private List<IoMFC> _processMFCs = new List<IoMFC>();
  1536. private List<IoHeater> _heaters = new List<IoHeater>();
  1537. private List<IoValve> _valves = new List<IoValve>();
  1538. private List<IoFFU> _fFUs = new List<IoFFU>();
  1539. private List<IoGasStick2> _gasSticks;
  1540. public List<IoGasStick2> GasSticks => _gasSticks;
  1541. private List<AlarmEventItem> _triggeredAlarmList = new List<AlarmEventItem>();
  1542. private List<IoAlarmSignal> _alarmSignals = new List<IoAlarmSignal>();
  1543. private FurnaceSignalTower _signalTowerDevice;
  1544. private int _alarmNumber;
  1545. private List<IoAlarmSignal> _inCommandLst;
  1546. private Dictionary<string, RD_TRIG> _inCommandTirgs = new Dictionary<string, RD_TRIG>();
  1547. private IoTrigger _trigTHPowerEN;
  1548. private IoTrigger _trigHECPowerONLamp;
  1549. private List<HeaterBase> _HTR1Group = new List<HeaterBase>();
  1550. private List<HeaterBase> _HTR2Group = new List<HeaterBase>();
  1551. private List<HeaterBase> _HTR3Group = new List<HeaterBase>();
  1552. public void InitDevice()
  1553. {
  1554. InitAllWaferTypeNode();
  1555. _isTagAttribute = attribute => attribute is TagAttribute;
  1556. _hasTagAttribute = mi => mi.GetCustomAttributes(false).Any(_isTagAttribute);
  1557. var properties = this.GetType().GetProperties().Where(_hasTagAttribute);
  1558. foreach (var field in properties)
  1559. {
  1560. TagAttribute tag = field.GetCustomAttributes(false).First(_isTagAttribute) as TagAttribute;
  1561. IDevice device = DEVICE.GetDevice<IDevice>($"{Module}.{tag.Tag}");
  1562. if (device == null)
  1563. device = DEVICE.GetDevice<IDevice>($"PM1.{tag.Tag}");
  1564. if (device == null)
  1565. device = DEVICE.GetDevice<IDevice>($"System.{tag.Tag}");
  1566. if (device != null)
  1567. {
  1568. _allModuleDevice.Add(device);
  1569. PropertyInfo pi = (PropertyInfo)field;
  1570. var convertedValue = Convert.ChangeType(device, pi.PropertyType);
  1571. System.Diagnostics.Debug.Assert(convertedValue != null);
  1572. pi.SetValue(this, convertedValue);
  1573. if (device is IoAlarmSignal)
  1574. {
  1575. _alarmSignals.Add(device as IoAlarmSignal);
  1576. }
  1577. device.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1578. if (device is IoMFC && device.Name != "MFC57")
  1579. _processMFCs.Add(device as IoMFC);
  1580. if (device is IoHeater)
  1581. _heaters.Add(device as IoHeater);
  1582. else if (device is IoValve)
  1583. _valves.Add(device as IoValve);
  1584. else if (device is HeaterBase)
  1585. _HTR2Group.Add(device as HeaterBase);
  1586. else if (device is IoFFU)
  1587. _fFUs.Add(device as IoFFU);
  1588. }
  1589. else
  1590. {
  1591. }
  1592. }
  1593. for (int i = 1; i < 10; i++)
  1594. {
  1595. for (int ch = 1; ch < 40; ch++)
  1596. {
  1597. var device = DEVICE.GetDevice<HeaterBase>($"PM1.GaslineHeaterUnit{i}CH{ch}");
  1598. if (device != null)
  1599. {
  1600. if ((i == 4 && ch == 1) || (i == 4 && ch == 2) || (i == 4 && ch == 3) || (i == 4 && ch == 4))
  1601. {
  1602. //这几个从_HTR2Group中删除
  1603. //_HTR2Group.Add(device);
  1604. continue;
  1605. }
  1606. else
  1607. _HTR1Group.Add(device);
  1608. }
  1609. }
  1610. }
  1611. for (int i = 1; i < 20; i++)
  1612. {
  1613. var device = DEVICE.GetDevice<HeaterBase>($"PM1.ForelineHeater{i}");
  1614. if (device != null)
  1615. {
  1616. _HTR2Group.Add(device);
  1617. }
  1618. }
  1619. //Singleton<DeviceController>.Instance.Start(Singleton<DeviceManager>.Instance);
  1620. //FlowmeterLists = DEVICE.GetDevice<IoFlowMeter>().Where(o => o.Module == Module).ToList();
  1621. HeaterU = DEVICE.GetDevice<IoHeater>($"System.HeaterU");
  1622. HeaterCU = DEVICE.GetDevice<IoHeater>($"System.HeaterCU");
  1623. HeaterC = DEVICE.GetDevice<IoHeater>($"System.HeaterC");
  1624. HeaterCL = DEVICE.GetDevice<IoHeater>($"System.HeaterCL");
  1625. HeaterL = DEVICE.GetDevice<IoHeater>($"System.HeaterL");
  1626. _heaters = new List<IoHeater>()
  1627. {
  1628. HeaterU,
  1629. HeaterCU,
  1630. HeaterC,
  1631. HeaterCL,
  1632. HeaterL,
  1633. };
  1634. foreach (var heater in _heaters)
  1635. {
  1636. if (heater != null)
  1637. {
  1638. heater.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1639. }
  1640. }
  1641. Singleton<InterlockManager>.Instance.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1642. this.OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1643. foreach (var pv in Singleton<IoProviderManager>.Instance.Providers)
  1644. {
  1645. if ((pv as IoProvider) != null)
  1646. (pv as IoProvider).OnDeviceAlarmStateChanged += OnModuleDeviceAlarmStateChanged;
  1647. }
  1648. _gasSticks = new List<IoGasStick2>()
  1649. {
  1650. //GasLineA,
  1651. //GasLineB,
  1652. //GasLineC,
  1653. //GasLineNX,
  1654. //GasLineNY,
  1655. //GasLineN1,
  1656. //GasLineN2,
  1657. //GasLineN3,
  1658. //GasLineM1,
  1659. //GasLineM2,
  1660. //GasLineD1,
  1661. //GasLineJ1,
  1662. };
  1663. _signalTowerDevice = DEVICE.GetDevice<FurnaceSignalTower>($"{ModuleName.System}.{ModuleName.SignalTower}");
  1664. _trigTHPowerEN = DEVICE.GetDevice<IoTrigger>($"PM1.TrigTHPowerEN");
  1665. _trigHECPowerONLamp = DEVICE.GetDevice<IoTrigger>($"{Module}.TrigHECPowerONLamp");
  1666. _inCommandLst = new List<IoAlarmSignal>()
  1667. {
  1668. //SensorHECPowerONSW,
  1669. // SensorTHBreakOK,
  1670. };
  1671. //SensorLidClosed.OnSignalChanged += SensorLidClosed_OnSignalChanged;
  1672. TrigFurnaceUZoneHeatingEnable.SetTrigger(true, out _);
  1673. TrigFurnaceCUZoneHeatingEnable.SetTrigger(true, out _);
  1674. TrigFurnaceCZoneHeatingEnable.SetTrigger(true, out _);
  1675. TrigFurnaceCLZoneHeatingEnable.SetTrigger(true, out _);
  1676. TrigFurnaceLZoneHeatingEnable.SetTrigger(true, out _);
  1677. MINI8AlarmReset?.Reset();
  1678. PLCCPUReset?.Reset();
  1679. InitN2PurgeConfigData();
  1680. InitSCToAODO();
  1681. BackUpFileDataMethod();
  1682. CreateZIPMethod();
  1683. }
  1684. private void InitSCToAODO()
  1685. {
  1686. var scTrigFFULSPEEDData = SC.GetValue<double>($"FFU.LSPEED");
  1687. TrigFFULSPEED?.SetAOTrigger((float)scTrigFFULSPEEDData, out _);
  1688. var hSPEED = SC.GetValue<double>($"FFU.HSPEED");
  1689. TrigFFUHSPEED?.SetAOTrigger((float)hSPEED, out _);
  1690. SetN2PurgeLAO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeLAO2CheckSV"));
  1691. SetN2PurgeFOUPO2CheckSV((float)SC.GetValue<double>("PM1.N2Purge.N2PurgeFOUPO2CheckSV"));
  1692. }
  1693. private void SensorLidClosed_OnSignalChanged(IoSensor sender, bool isTriggered)
  1694. {
  1695. if (!isTriggered)
  1696. {
  1697. EV.PostWarningLog(Module, $"Lid Open.");
  1698. }
  1699. }
  1700. private void PlcDisconnected()
  1701. {
  1702. CheckToPostMessage(MSG.Disconnected);
  1703. }
  1704. private void PlcConnected()
  1705. {
  1706. if (IsInit)
  1707. return;
  1708. if (FsmState.Equals((int)STATE.NotConnected))
  1709. CheckToPostMessage(MSG.Connected);
  1710. }
  1711. public void OnModuleDeviceAlarmStateChanged(string deviceId, AlarmEventItem alarmItem)
  1712. {
  1713. if (alarmItem.IsTriggered)
  1714. {
  1715. EventLevel level = alarmItem.Level;
  1716. string description = alarmItem.AdditionalDescription;
  1717. //description += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}";
  1718. //alarmItem.AdditionalDescription += $" {(!string.IsNullOrEmpty(_recipeRunningInfo.RecipeName) ? $"Recipe:{_recipeRunningInfo.RecipeName}," : "")}Step:{(IsProcessing ? _recipeRunningInfo.StepName : "Standby")}";
  1719. alarmItem.AdditionalDescription = description;
  1720. alarmItem.OccuringTime = DateTime.Now;
  1721. _triggeredAlarmList.Add(alarmItem);
  1722. if (IsProcessing)
  1723. {
  1724. if (level == EventLevel.Alarm)
  1725. {
  1726. EV.PostAlarmLog(Module, alarmItem);
  1727. }
  1728. else
  1729. {
  1730. EV.PostWarningLog(Module, alarmItem);
  1731. }
  1732. }
  1733. else
  1734. {
  1735. if (level == EventLevel.Alarm)
  1736. {
  1737. try
  1738. {
  1739. //if (!(bool)Aitex.Core.RT.DataCenter.DATA.Poll($"{alarmItem.EventEnum}.ignoreSaveDB")) {
  1740. EV.PostAlarmLog(Module, alarmItem);
  1741. //}
  1742. }
  1743. catch (Exception ex)
  1744. {
  1745. EV.WriteEvent(ex.Message.ToString());
  1746. }
  1747. }
  1748. else
  1749. {
  1750. EV.PostWarningLog(Module, alarmItem);
  1751. }
  1752. }
  1753. }
  1754. else
  1755. {
  1756. }
  1757. }
  1758. public override bool CheckAcked(int entityTaskToken)
  1759. {
  1760. return true;
  1761. }
  1762. #region pump device operation
  1763. public override bool TurnOnPump(out string reason)
  1764. {
  1765. reason = string.Empty;
  1766. return true /*MainPump.SetPump(out reason, 0, true)*/;
  1767. }
  1768. public override bool CheckPumpIsOn()
  1769. {
  1770. return true/*MainPump.IsRunning*/;
  1771. }
  1772. #endregion
  1773. public bool CheckIsConnected()
  1774. {
  1775. return true;
  1776. }
  1777. public bool CheckHasAlarm()
  1778. {
  1779. foreach (var device in _allModuleDevice)
  1780. {
  1781. if (device != null && device.HasAlarm)
  1782. return true;
  1783. }
  1784. return false;
  1785. }
  1786. public override bool CheckSlitValveClose()
  1787. {
  1788. return true;
  1789. }
  1790. public override bool CheckLidClosed()
  1791. {
  1792. return true;
  1793. }
  1794. public override bool CheckPrepareProcess()
  1795. {
  1796. return _isPrepareProcess;
  1797. }
  1798. public override bool CheckProcessFinished()
  1799. {
  1800. bool isFinished = true;
  1801. var wafers = WaferManager.Instance.GetWafers(_module);
  1802. if (wafers == null)
  1803. {
  1804. return false;
  1805. }
  1806. foreach (var wafer in wafers)
  1807. {
  1808. if (wafer.IsEmpty)
  1809. continue;
  1810. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed)
  1811. isFinished = false;
  1812. }
  1813. return isFinished;
  1814. }
  1815. public override bool CheckStandbyCondition()
  1816. {
  1817. return true;
  1818. return CheckExternalSensorCondition() && CheckTempStabilizeCondition() &&
  1819. CheckReachTempCondition() && CheckPressureStablilizeCondition() &&
  1820. CheckReachPressureCondition() && CheckFinishAutoProfileCondition();
  1821. }
  1822. #region conditionCheck
  1823. private bool SeBypassStandbyFactor(out string reason, int time, object[] param)
  1824. {
  1825. reason = string.Empty;
  1826. if (param != null && param.Length > 0)
  1827. {
  1828. var condition = param[0].ToString();
  1829. if (_conditionCheckDic.ContainsKey(condition))
  1830. {
  1831. _conditionCheckDic[condition] = true;
  1832. }
  1833. }
  1834. return true;
  1835. }
  1836. private bool SetConditionCheck(out string reason, int time, object[] param)
  1837. {
  1838. reason = string.Empty;
  1839. _conditionCheckDic.Clear();
  1840. _conditionCheckItemDic.Clear();
  1841. _isExternalSensorConditionBypass = false;
  1842. _isTempStabilizeConditionBypass = false;
  1843. _isPressureStabilizeConditionBypass = false;
  1844. _isReachTempConditionBypass = false;
  1845. _isReachPressureConditionBypass = false;
  1846. _isFinishAutoProfileConditionBypass = false;
  1847. if (param.Length > 0)
  1848. {
  1849. var conditions = param[0].ToString().Split(';').ToList();
  1850. foreach (var condition in conditions)
  1851. {
  1852. var arry = condition.Split(':');
  1853. if (arry.Length > 1)
  1854. {
  1855. switch (arry[0])
  1856. {
  1857. case "ExternalSensor":
  1858. SetExternalSensorCondition("Wait For External Sensor", arry[1]);
  1859. break;
  1860. case "TempStabilize":
  1861. SetTempStabilizeCondition("Wait For Temperature Stablilize", arry[1]);
  1862. break;
  1863. case "ReachTemp":
  1864. SetReachTempCondition("Wait For Reach Temperature", arry[1]);
  1865. break;
  1866. case "ReachPressure":
  1867. SetReachPressureCondition("Wait For Reach Pressure", arry[1]);
  1868. break;
  1869. case "PressureStabilize":
  1870. SetPressureStabilizeCondition("Wait For Pressure Stablilize", arry[1]);
  1871. break;
  1872. case "FinishAutoProfile":
  1873. SetFinishAutoProfileCondition("Wait For Finish Auto Profile", arry[1]);
  1874. break;
  1875. case "None":
  1876. case "none":
  1877. break;
  1878. }
  1879. }
  1880. }
  1881. }
  1882. return true;
  1883. }
  1884. private void SetExternalSensorCondition(string title, string para)
  1885. {
  1886. var conditions = para.ToLower().Split(',').ToList();
  1887. if (conditions.Any(x => !x.Contains("none")))
  1888. {
  1889. _conditionCheckDic.Add(title, false);
  1890. _conditionCheckItemDic.Add(title, para);
  1891. }
  1892. }
  1893. private void SetTempStabilizeCondition(string title, string para)
  1894. {
  1895. if (para.ToLower() != "none")
  1896. {
  1897. _conditionCheckDic.Add(title, false);
  1898. _conditionCheckItemDic.Add(title, para);
  1899. foreach (var heater in _heaters)
  1900. {
  1901. //heater.SetStableParameters(para);
  1902. }
  1903. }
  1904. }
  1905. private void SetReachTempCondition(string title, string para)
  1906. {
  1907. if (para.ToLower() != "none")
  1908. {
  1909. _conditionCheckDic.Add(title, false);
  1910. _conditionCheckItemDic.Add(title, para);
  1911. }
  1912. }
  1913. private void SetReachPressureCondition(string title, string para)
  1914. {
  1915. if (para.ToLower() != "none")
  1916. {
  1917. _conditionCheckDic.Add(title, false);
  1918. _conditionCheckItemDic.Add(title, para);
  1919. }
  1920. }
  1921. private void SetFinishAutoProfileCondition(string title, string para)
  1922. {
  1923. if (para.ToLower() != "none")
  1924. {
  1925. _conditionCheckDic.Add(title, false);
  1926. _conditionCheckItemDic.Add(title, para);
  1927. }
  1928. }
  1929. private void SetPressureStabilizeCondition(string title, string para)
  1930. {
  1931. if (para.ToLower() != "none")
  1932. {
  1933. _conditionCheckDic.Add(title, false);
  1934. _conditionCheckItemDic.Add(title, para);
  1935. //APC.SetStableParameters(para);
  1936. }
  1937. }
  1938. public bool CheckExternalSensorCondition()
  1939. {
  1940. var key = "Wait For External Sensor";
  1941. if (_conditionCheckDic.ContainsKey(key))
  1942. {
  1943. if (_conditionCheckItemDic.ContainsKey(key))
  1944. {
  1945. var items = _conditionCheckItemDic[key].Split(',').ToList();
  1946. bool isMatch = true;
  1947. foreach (var item in items)
  1948. {
  1949. var sensorAndResult = item.Split('.');
  1950. if (sensorAndResult.Length > 1 && sensorAndResult[1].ToLower() != "none")
  1951. {
  1952. var sensorDevice = DEVICE.GetDevice<IoSensor>($"{Module}.{sensorAndResult[0]}");
  1953. if (sensorDevice == null)
  1954. sensorDevice = DEVICE.GetDevice<IoSensor>($"System.{sensorAndResult[0]}");
  1955. if (sensorDevice != null)
  1956. {
  1957. isMatch = sensorAndResult[1].ToLower() == "on" ? sensorDevice.Value : !sensorDevice.Value;
  1958. }
  1959. if (!isMatch)
  1960. break;
  1961. }
  1962. }
  1963. _conditionCheckDic[key] = isMatch;
  1964. }
  1965. if (_isExternalSensorConditionBypass)
  1966. _conditionCheckDic[key] = true;
  1967. return _conditionCheckDic[key];
  1968. }
  1969. else
  1970. {
  1971. return true;
  1972. }
  1973. }
  1974. public bool CheckTempStabilizeCondition()
  1975. {
  1976. var key = "Wait For Temperature Stablilize";
  1977. return true;
  1978. }
  1979. public bool CheckReachTempCondition()
  1980. {
  1981. var key = "Wait For Reach Temperature";
  1982. return true;
  1983. }
  1984. public bool CheckPressureStablilizeCondition()
  1985. {
  1986. var key = "Wait For Pressure Stablilize";
  1987. if (_conditionCheckDic.ContainsKey(key))
  1988. {
  1989. //_conditionCheckDic[key] = APC.IsStable;
  1990. if (_isPressureStabilizeConditionBypass)
  1991. _conditionCheckDic[key] = true;
  1992. return _conditionCheckDic[key];
  1993. }
  1994. else
  1995. {
  1996. return true;
  1997. }
  1998. }
  1999. public bool CheckReachPressureCondition()
  2000. {
  2001. var key = "Wait For Reach Pressure";
  2002. if (_conditionCheckDic.ContainsKey(key))
  2003. {
  2004. if (_conditionCheckItemDic.ContainsKey(key))
  2005. {
  2006. var itemArry = _conditionCheckItemDic[key].Split(',');
  2007. if (itemArry != null && itemArry.Length > 1)
  2008. {
  2009. float.TryParse(itemArry[1], out float pressure);
  2010. if (itemArry[0] == "WaitMoreThan")
  2011. {
  2012. //_conditionCheckDic[key] = APC.PressureFeedback > pressure;
  2013. }
  2014. else if (itemArry[0] == "WaitLessThan")
  2015. {
  2016. //_conditionCheckDic[key] = APC.PressureFeedback < pressure;
  2017. }
  2018. }
  2019. }
  2020. if (_isReachPressureConditionBypass)
  2021. _conditionCheckDic[key] = true;
  2022. return _conditionCheckDic[key];
  2023. }
  2024. else
  2025. {
  2026. return true;
  2027. }
  2028. }
  2029. public bool CheckFinishAutoProfileCondition()
  2030. {
  2031. var key = "Wait For Finish Auto Profile";
  2032. if (_conditionCheckDic.ContainsKey(key))
  2033. {
  2034. if (_isFinishAutoProfileConditionBypass)
  2035. _conditionCheckDic[key] = true;
  2036. return _conditionCheckDic[key];
  2037. }
  2038. else
  2039. {
  2040. return true;
  2041. }
  2042. }
  2043. #endregion
  2044. private bool SetBoatZAxisMotion(out string reason, int time, object[] param)
  2045. {
  2046. reason = string.Empty;
  2047. //if (AutoDoor.UpDownStatus != ASUpDownStatus.Down || AutoDoor.OpenCloseStatus != ASOpenCloseStatus.Open)
  2048. //{
  2049. // (Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).BoatZAxisMoveFailedForInterlock.Set();
  2050. // return false;
  2051. //}
  2052. return true;
  2053. //return BoatDevice.ZAxisMoveTo(param[0].ToString(), out reason);
  2054. }
  2055. private bool SetBoatRAxisMotion(out string reason, int time, object[] param)
  2056. {
  2057. reason = string.Empty;
  2058. return true;
  2059. }
  2060. private bool SetAutoShutterUp(out string reason, int time, object[] param)
  2061. {
  2062. reason = string.Empty;
  2063. bool.TryParse(param[0].ToString(), out bool isUp);
  2064. //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition)
  2065. //{
  2066. // AutoShutter.AutoShutterMoveFailedForInterlock.Set();
  2067. // return false;
  2068. //}
  2069. //return AutoDoor.SetUp(isUp, out reason);
  2070. return true;
  2071. }
  2072. private bool SetAutoShutterOpen(out string reason, int time, object[] param)
  2073. {
  2074. reason = string.Empty;
  2075. bool.TryParse(param[0].ToString(), out bool isOpen);
  2076. var ZAxisDevice = DEVICE.GetDevice<IoFurnaceMotor>($"PM1.BoatElevatorServo");
  2077. if (!ZAxisDevice.CheckServoAtPosition(BoatPosition.HomePosition.ToString()))
  2078. {
  2079. ShutterMoveFailedForInterlock.Set();
  2080. return true;
  2081. }
  2082. return Shutter.SetOpen(isOpen, out reason);
  2083. }
  2084. private bool SetAutoShutterRotateOpen(out string reason, int time, object[] param)
  2085. {
  2086. reason = string.Empty;
  2087. bool.TryParse(param[0].ToString(), out bool isOpen);
  2088. //if (BoatDevice.BoatCurrentPosition != BoatPosition.HomePosition && BoatDevice.BoatCurrentPosition != BoatPosition.ProcessPosition)
  2089. //{
  2090. // AutoShutter.AutoShutterMoveFailedForInterlock.Set();
  2091. // return false;
  2092. //}
  2093. //return AutoDoor.SetShutterRotateOpen(isOpen, out reason);
  2094. return true;
  2095. }
  2096. private bool SetCommand(out string reason, int time, object[] param)
  2097. {
  2098. reason = string.Empty;
  2099. var command = param[0].ToString();
  2100. switch (command)
  2101. {
  2102. case "Hold":
  2103. _processRoutine.PauseRecipe();
  2104. break;
  2105. case "Hold + Buzzer":
  2106. _processRoutine.PauseRecipe();
  2107. BuzzerOn();
  2108. break;
  2109. case "Buzzer":
  2110. BuzzerOn();
  2111. break;
  2112. case "Leak Check1":
  2113. case "Leak Check2":
  2114. case "Leak Check3":
  2115. int.TryParse(command.Replace("Leak Check", ""), out int index);
  2116. SetLeakCheckTableIndex(index);
  2117. break;
  2118. }
  2119. return true;
  2120. }
  2121. public bool SetSensorRecipeOK(out string reason, int time, object[] param)
  2122. {
  2123. reason = string.Empty;
  2124. SensorRecipeOK.Value = true;
  2125. //SensorPROCManualOK.Value = false;
  2126. return true;
  2127. }
  2128. public bool SetSensorPROCManualOK(out string reason, int time, object[] param)
  2129. {
  2130. reason = string.Empty;
  2131. SensorRecipeOK.Value = false;
  2132. //SensorPROCManualOK.Value = true;
  2133. return true;
  2134. }
  2135. public bool SetEditRecipeName(out string reason, int time, object[] param)
  2136. {
  2137. reason = string.Empty;
  2138. EditRecipeName = param[0].ToString();
  2139. return true;
  2140. }
  2141. public bool SetEditRecipeStepName(out string reason, int time, object[] param)
  2142. {
  2143. reason = string.Empty;
  2144. EditRecipeStepName = param[0].ToString();
  2145. return true;
  2146. }
  2147. private void BuzzerOn()
  2148. {
  2149. _signalTowerDevice.IsAutoSetLight = false;
  2150. _signalTowerDevice.SetLight(LightType.Buzzer1, TowerLightStatus.On);
  2151. }
  2152. public bool CheckBoatState()
  2153. {
  2154. return (Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule).IsReady;
  2155. }
  2156. //#region Temperature/Pressure Tolerance
  2157. //#region Heater Tolerance Alarm
  2158. //public bool CheckHeaterBottomToleranceAlaram()
  2159. //{
  2160. // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceAlarm() : Heater1.CheckToleranceAlarm();
  2161. //}
  2162. //public bool CheckHeaterCenterBottomToleranceAlaram()
  2163. //{
  2164. // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceAlarm() : Heater3.CheckToleranceAlarm();
  2165. //}
  2166. //public bool CheckHeaterCenterToleranceAlaram()
  2167. //{
  2168. // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceAlarm() : Heater5.CheckToleranceAlarm();
  2169. //}
  2170. //public bool CheckHeaterCenterTopToleranceAlaram()
  2171. //{
  2172. // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceAlarm() : Heater7.CheckToleranceAlarm();
  2173. //}
  2174. //public bool CheckHeaterTopToleranceAlaram()
  2175. //{
  2176. // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceAlarm() : Heater9.CheckToleranceAlarm();
  2177. //}
  2178. //public void SetHeaterBottomToleranceAlaram()
  2179. //{
  2180. // if (Heater2.DeviceData.IsLspModeFeedBack)
  2181. // Heater2.SetToleranceAlarm();
  2182. // else
  2183. // Heater1.SetToleranceAlarm();
  2184. //}
  2185. //public void SetHeaterCenterBottomToleranceAlaram()
  2186. //{
  2187. // if (Heater4.DeviceData.IsLspModeFeedBack)
  2188. // Heater4.SetToleranceAlarm();
  2189. // else
  2190. // Heater3.SetToleranceAlarm();
  2191. //}
  2192. //public void SetHeaterCenterToleranceAlaram()
  2193. //{
  2194. // if (Heater6.DeviceData.IsLspModeFeedBack)
  2195. // Heater6.SetToleranceAlarm();
  2196. // else
  2197. // Heater5.SetToleranceAlarm();
  2198. //}
  2199. //public void SetHeaterCenterTopToleranceAlaram()
  2200. //{
  2201. // if (Heater8.DeviceData.IsLspModeFeedBack)
  2202. // Heater8.SetToleranceAlarm();
  2203. // else
  2204. // Heater7.SetToleranceAlarm();
  2205. //}
  2206. //public void SetHeaterTopToleranceAlaram()
  2207. //{
  2208. // if (Heater10.DeviceData.IsLspModeFeedBack)
  2209. // Heater10.SetToleranceAlarm();
  2210. // else
  2211. // Heater9.SetToleranceAlarm();
  2212. //}
  2213. //#endregion
  2214. //#region Heater Tolerance Warning
  2215. //public bool CheckHeaterBottomToleranceWarning()
  2216. //{
  2217. // return Heater2.DeviceData.IsLspModeFeedBack ? Heater2.CheckToleranceWarning() : Heater1.CheckToleranceWarning();
  2218. //}
  2219. //public bool CheckHeaterCenterBottomToleranceWarning()
  2220. //{
  2221. // return Heater4.DeviceData.IsLspModeFeedBack ? Heater4.CheckToleranceWarning() : Heater3.CheckToleranceWarning();
  2222. //}
  2223. //public bool CheckHeaterCenterToleranceWarning()
  2224. //{
  2225. // return Heater6.DeviceData.IsLspModeFeedBack ? Heater6.CheckToleranceWarning() : Heater5.CheckToleranceWarning();
  2226. //}
  2227. //public bool CheckHeaterCenterTopToleranceWarning()
  2228. //{
  2229. // return Heater8.DeviceData.IsLspModeFeedBack ? Heater8.CheckToleranceWarning() : Heater7.CheckToleranceWarning();
  2230. //}
  2231. //public bool CheckHeaterTopToleranceWarning()
  2232. //{
  2233. // return Heater10.DeviceData.IsLspModeFeedBack ? Heater10.CheckToleranceWarning() : Heater9.CheckToleranceWarning();
  2234. //}
  2235. //public void SetHeaterBottomToleranceWarning()
  2236. //{
  2237. // if (Heater2.DeviceData.IsLspModeFeedBack)
  2238. // Heater2.SetToleranceWarning();
  2239. // else
  2240. // Heater1.SetToleranceWarning();
  2241. //}
  2242. //public void SetHeaterCenterBottomToleranceWarning()
  2243. //{
  2244. // if (Heater4.DeviceData.IsLspModeFeedBack)
  2245. // Heater4.SetToleranceWarning();
  2246. // else
  2247. // Heater3.SetToleranceWarning();
  2248. //}
  2249. //public void SetHeaterCenterToleranceWarning()
  2250. //{
  2251. // if (Heater6.DeviceData.IsLspModeFeedBack)
  2252. // Heater6.SetToleranceWarning();
  2253. // else
  2254. // Heater5.SetToleranceWarning();
  2255. //}
  2256. //public void SetHeaterCenterTopToleranceWarning()
  2257. //{
  2258. // if (Heater8.DeviceData.IsLspModeFeedBack)
  2259. // Heater8.SetToleranceWarning();
  2260. // else
  2261. // Heater7.SetToleranceWarning();
  2262. //}
  2263. //public void SetHeaterTopToleranceWarning()
  2264. //{
  2265. // if (Heater10.DeviceData.IsLspModeFeedBack)
  2266. // Heater10.SetToleranceWarning();
  2267. // else
  2268. // Heater9.SetToleranceWarning();
  2269. //}
  2270. //#endregion
  2271. //#region Pressure Tolerance Alarm
  2272. ////public bool CheckPressureToleranceAlaram()
  2273. ////{
  2274. //// return APC.CheckToleranceAlarm();
  2275. ////}
  2276. ////public void SetPressureToleranceAlaram()
  2277. ////{
  2278. //// APC.SetToleranceAlarm();
  2279. ////}
  2280. //#endregion
  2281. //#region Pressure Tolerance Warning
  2282. ////public bool CheckPressureToleranceWarning()
  2283. ////{
  2284. //// return APC.CheckToleranceWarning();
  2285. ////}
  2286. ////public void SetPressureToleranceWarning()
  2287. ////{
  2288. //// APC.SetToleranceWarning();
  2289. ////}
  2290. //#endregion
  2291. //#region Reset Tolerance
  2292. //public void ResetToleranceAlarm()
  2293. //{
  2294. // foreach (var heater in _heaters)
  2295. // {
  2296. // heater.Reset();
  2297. // }
  2298. // foreach (var key in _gasMFCs.Keys)
  2299. // {
  2300. // _gasMFCs[key].Reset();
  2301. // }
  2302. // //APC.Reset();
  2303. //}
  2304. //public void ResetToleranceAlarmChecker()
  2305. //{
  2306. // foreach (var heater in _heaters)
  2307. // {
  2308. // heater.ResetAlarmChecker();
  2309. // heater.ResetWarningChecker();
  2310. // }
  2311. // foreach (var key in _gasMFCs.Keys)
  2312. // {
  2313. // _gasMFCs[key].ResetAlarmChecker();
  2314. // _gasMFCs[key].ResetWarningChecker();
  2315. // }
  2316. // //APC.ResetAlarmChecker();
  2317. // //APC.ResetWarningChecker();
  2318. //}
  2319. //#endregion
  2320. //#endregion
  2321. private void SetAllFFUPower(object[] param)
  2322. {
  2323. var value = param[0].ToString();
  2324. foreach (var item in _fFUs)
  2325. {
  2326. item.SetSwitch(bool.Parse(value));
  2327. }
  2328. }
  2329. private void SetHeaterControlParameters(object[] param)
  2330. {
  2331. //Mode参数;Correct Table;PID Table
  2332. //"Heater;Parameter\\TempCorrection\\tempCorrect,2,Name2;Parameter\\TempPID\\tempPID,3,Name3"
  2333. if (param == null || param.Length == 0)
  2334. {
  2335. EV.PostWarningLog(Module, $"Invalid heater parameter");
  2336. return;
  2337. }
  2338. var paras = param[0].ToString().Split(';');
  2339. if (paras == null || paras.Length < 3)
  2340. {
  2341. EV.PostWarningLog(Module, $"Invalid heater parameter");
  2342. return;
  2343. }
  2344. var controlMode = paras[0];
  2345. var correct = paras[1];
  2346. var pid = paras[2];
  2347. HeaterU.SetControlMode(controlMode);
  2348. HeaterCU.SetControlMode(controlMode);
  2349. HeaterC.SetControlMode(controlMode);
  2350. HeaterCL.SetControlMode(controlMode);
  2351. HeaterL.SetControlMode(controlMode);
  2352. SetHeaterCorrectParameters(correct);
  2353. SetHeaterPIDParameters(pid);
  2354. }
  2355. private void SetHeaterCorrectParameters(string correct)
  2356. {
  2357. HeaterU.SetCorrectParameters(correct);
  2358. HeaterCU.SetCorrectParameters(correct);
  2359. HeaterC.SetCorrectParameters(correct);
  2360. HeaterCL.SetCorrectParameters(correct);
  2361. HeaterL.SetCorrectParameters(correct);
  2362. }
  2363. private void SetHeaterPIDParameters(string pid)
  2364. {
  2365. HeaterU.SetPIDParameters(pid);
  2366. HeaterCU.SetPIDParameters(pid);
  2367. HeaterC.SetPIDParameters(pid);
  2368. HeaterCL.SetPIDParameters(pid);
  2369. HeaterL.SetPIDParameters(pid);
  2370. }
  2371. private bool SetCEXHEnable(object[] param)
  2372. {
  2373. if (param != null && param.Length > 0)
  2374. {
  2375. bool.TryParse(param[0].ToString(), out bool isEnable);
  2376. _fFUs.ForEach(a => a.SetSwitch(isEnable));
  2377. }
  2378. return true;
  2379. }
  2380. private bool SetHTR1Enable(object[] param)
  2381. {
  2382. if (param != null && param.Length > 0)
  2383. {
  2384. bool.TryParse(param[0].ToString(), out bool isEnable);
  2385. SC.SetItemValue($"PM1.IsHTR1Enable", isEnable);
  2386. TrigHeaterAllEnable?.SetTrigger(isEnable, out _);
  2387. }
  2388. return true;
  2389. }
  2390. private bool SetHTR2Enable(object[] param)
  2391. {
  2392. if (param != null && param.Length > 0)
  2393. {
  2394. bool.TryParse(param[0].ToString(), out bool isEnable);
  2395. SC.SetItemValue($"PM1.IsHTR2Enable", isEnable);
  2396. }
  2397. return true;
  2398. }
  2399. private bool SetHTR3Enable(object[] param)
  2400. {
  2401. if (param != null && param.Length > 0)
  2402. {
  2403. bool.TryParse(param[0].ToString(), out bool isEnable);
  2404. SC.SetItemValue($"PM1.IsHTR3Enable", isEnable);
  2405. }
  2406. return true;
  2407. }
  2408. }
  2409. }