AutoTransfer.cs 341 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386138713881389139013911392139313941395139613971398139914001401140214031404140514061407140814091410141114121413141414151416141714181419142014211422142314241425142614271428142914301431143214331434143514361437143814391440144114421443144414451446144714481449145014511452145314541455145614571458145914601461146214631464146514661467146814691470147114721473147414751476147714781479148014811482148314841485148614871488148914901491149214931494149514961497149814991500150115021503150415051506150715081509151015111512151315141515151615171518151915201521152215231524152515261527152815291530153115321533153415351536153715381539154015411542154315441545154615471548154915501551155215531554155515561557155815591560156115621563156415651566156715681569157015711572157315741575157615771578157915801581158215831584158515861587158815891590159115921593159415951596159715981599160016011602160316041605160616071608160916101611161216131614161516161617161816191620162116221623162416251626162716281629163016311632163316341635163616371638163916401641164216431644164516461647164816491650165116521653165416551656165716581659166016611662166316641665166616671668166916701671167216731674167516761677167816791680168116821683168416851686168716881689169016911692169316941695169616971698169917001701170217031704170517061707170817091710171117121713171417151716171717181719172017211722172317241725172617271728172917301731173217331734173517361737173817391740174117421743174417451746174717481749175017511752175317541755175617571758175917601761176217631764176517661767176817691770177117721773177417751776177717781779178017811782178317841785178617871788178917901791179217931794179517961797179817991800180118021803180418051806180718081809181018111812181318141815181618171818181918201821182218231824182518261827182818291830183118321833183418351836183718381839184018411842184318441845184618471848184918501851185218531854185518561857185818591860186118621863186418651866186718681869187018711872187318741875187618771878187918801881188218831884188518861887188818891890189118921893189418951896189718981899190019011902190319041905190619071908190919101911191219131914191519161917191819191920192119221923192419251926192719281929193019311932193319341935193619371938193919401941194219431944194519461947194819491950195119521953195419551956195719581959196019611962196319641965196619671968196919701971197219731974197519761977197819791980198119821983198419851986198719881989199019911992199319941995199619971998199920002001200220032004200520062007200820092010201120122013201420152016201720182019202020212022202320242025202620272028202920302031203220332034203520362037203820392040204120422043204420452046204720482049205020512052205320542055205620572058205920602061206220632064206520662067206820692070207120722073207420752076207720782079208020812082208320842085208620872088208920902091209220932094209520962097209820992100210121022103210421052106210721082109211021112112211321142115211621172118211921202121212221232124212521262127212821292130213121322133213421352136213721382139214021412142214321442145214621472148214921502151215221532154215521562157215821592160216121622163216421652166216721682169217021712172217321742175217621772178217921802181218221832184218521862187218821892190219121922193219421952196219721982199220022012202220322042205220622072208220922102211221222132214221522162217221822192220222122222223222422252226222722282229223022312232223322342235223622372238223922402241224222432244224522462247224822492250225122522253225422552256225722582259226022612262226322642265226622672268226922702271227222732274227522762277227822792280228122822283228422852286228722882289229022912292229322942295229622972298229923002301230223032304230523062307230823092310231123122313231423152316231723182319232023212322232323242325232623272328232923302331233223332334233523362337233823392340234123422343234423452346234723482349235023512352235323542355235623572358235923602361236223632364236523662367236823692370237123722373237423752376237723782379238023812382238323842385238623872388238923902391239223932394239523962397239823992400240124022403240424052406240724082409241024112412241324142415241624172418241924202421242224232424242524262427242824292430243124322433243424352436243724382439244024412442244324442445244624472448244924502451245224532454245524562457245824592460246124622463246424652466246724682469247024712472247324742475247624772478247924802481248224832484248524862487248824892490249124922493249424952496249724982499250025012502250325042505250625072508250925102511251225132514251525162517251825192520252125222523252425252526252725282529253025312532253325342535253625372538253925402541254225432544254525462547254825492550255125522553255425552556255725582559256025612562256325642565256625672568256925702571257225732574257525762577257825792580258125822583258425852586258725882589259025912592259325942595259625972598259926002601260226032604260526062607260826092610261126122613261426152616261726182619262026212622262326242625262626272628262926302631263226332634263526362637263826392640264126422643264426452646264726482649265026512652265326542655265626572658265926602661266226632664266526662667266826692670267126722673267426752676267726782679268026812682268326842685268626872688268926902691269226932694269526962697269826992700270127022703270427052706270727082709271027112712271327142715271627172718271927202721272227232724272527262727272827292730273127322733273427352736273727382739274027412742274327442745274627472748274927502751275227532754275527562757275827592760276127622763276427652766276727682769277027712772277327742775277627772778277927802781278227832784278527862787278827892790279127922793279427952796279727982799280028012802280328042805280628072808280928102811281228132814281528162817281828192820282128222823282428252826282728282829283028312832283328342835283628372838283928402841284228432844284528462847284828492850285128522853285428552856285728582859286028612862286328642865286628672868286928702871287228732874287528762877287828792880288128822883288428852886288728882889289028912892289328942895289628972898289929002901290229032904290529062907290829092910291129122913291429152916291729182919292029212922292329242925292629272928292929302931293229332934293529362937293829392940294129422943294429452946294729482949295029512952295329542955295629572958295929602961296229632964296529662967296829692970297129722973297429752976297729782979298029812982298329842985298629872988298929902991299229932994299529962997299829993000300130023003300430053006300730083009301030113012301330143015301630173018301930203021302230233024302530263027302830293030303130323033303430353036303730383039304030413042304330443045304630473048304930503051305230533054305530563057305830593060306130623063306430653066306730683069307030713072307330743075307630773078307930803081308230833084308530863087308830893090309130923093309430953096309730983099310031013102310331043105310631073108310931103111311231133114311531163117311831193120312131223123312431253126312731283129313031313132313331343135313631373138313931403141314231433144314531463147314831493150315131523153315431553156315731583159316031613162316331643165316631673168316931703171317231733174317531763177317831793180318131823183318431853186318731883189319031913192319331943195319631973198319932003201320232033204320532063207320832093210321132123213321432153216321732183219322032213222322332243225322632273228322932303231323232333234323532363237323832393240324132423243324432453246324732483249325032513252325332543255325632573258325932603261326232633264326532663267326832693270327132723273327432753276327732783279328032813282328332843285328632873288328932903291329232933294329532963297329832993300330133023303330433053306330733083309331033113312331333143315331633173318331933203321332233233324332533263327332833293330333133323333333433353336333733383339334033413342334333443345334633473348334933503351335233533354335533563357335833593360336133623363336433653366336733683369337033713372337333743375337633773378337933803381338233833384338533863387338833893390339133923393339433953396339733983399340034013402340334043405340634073408340934103411341234133414341534163417341834193420342134223423342434253426342734283429343034313432343334343435343634373438343934403441344234433444344534463447344834493450345134523453345434553456345734583459346034613462346334643465346634673468346934703471347234733474347534763477347834793480348134823483348434853486348734883489349034913492349334943495349634973498349935003501350235033504350535063507350835093510351135123513351435153516351735183519352035213522352335243525352635273528352935303531353235333534353535363537353835393540354135423543354435453546354735483549355035513552355335543555355635573558355935603561356235633564356535663567356835693570357135723573357435753576357735783579358035813582358335843585358635873588358935903591359235933594359535963597359835993600360136023603360436053606360736083609361036113612361336143615361636173618361936203621362236233624362536263627362836293630363136323633363436353636363736383639364036413642364336443645364636473648364936503651365236533654365536563657365836593660366136623663366436653666366736683669367036713672367336743675367636773678367936803681368236833684368536863687368836893690369136923693369436953696369736983699370037013702370337043705370637073708370937103711371237133714371537163717371837193720372137223723372437253726372737283729373037313732373337343735373637373738373937403741374237433744374537463747374837493750375137523753375437553756375737583759376037613762376337643765376637673768376937703771377237733774377537763777377837793780378137823783378437853786378737883789379037913792379337943795379637973798379938003801380238033804380538063807380838093810381138123813381438153816381738183819382038213822382338243825382638273828382938303831383238333834383538363837383838393840384138423843384438453846384738483849385038513852385338543855385638573858385938603861386238633864386538663867386838693870387138723873387438753876387738783879388038813882388338843885388638873888388938903891389238933894389538963897389838993900390139023903390439053906390739083909391039113912391339143915391639173918391939203921392239233924392539263927392839293930393139323933393439353936393739383939394039413942394339443945394639473948394939503951395239533954395539563957395839593960396139623963396439653966396739683969397039713972397339743975397639773978397939803981398239833984398539863987398839893990399139923993399439953996399739983999400040014002400340044005400640074008400940104011401240134014401540164017401840194020402140224023402440254026402740284029403040314032403340344035403640374038403940404041404240434044404540464047404840494050405140524053405440554056405740584059406040614062406340644065406640674068406940704071407240734074407540764077407840794080408140824083408440854086408740884089409040914092409340944095409640974098409941004101410241034104410541064107410841094110411141124113411441154116411741184119412041214122412341244125412641274128412941304131413241334134413541364137413841394140414141424143414441454146414741484149415041514152415341544155415641574158415941604161416241634164416541664167416841694170417141724173417441754176417741784179418041814182418341844185418641874188418941904191419241934194419541964197419841994200420142024203420442054206420742084209421042114212421342144215421642174218421942204221422242234224422542264227422842294230423142324233423442354236423742384239424042414242424342444245424642474248424942504251425242534254425542564257425842594260426142624263426442654266426742684269427042714272427342744275427642774278427942804281428242834284428542864287428842894290429142924293429442954296429742984299430043014302430343044305430643074308430943104311431243134314431543164317431843194320432143224323432443254326432743284329433043314332433343344335433643374338433943404341434243434344434543464347434843494350435143524353435443554356435743584359436043614362436343644365436643674368436943704371437243734374437543764377437843794380438143824383438443854386438743884389439043914392439343944395439643974398439944004401440244034404440544064407440844094410441144124413441444154416441744184419442044214422442344244425442644274428442944304431443244334434443544364437443844394440444144424443444444454446444744484449445044514452445344544455445644574458445944604461446244634464446544664467446844694470447144724473447444754476447744784479448044814482448344844485448644874488448944904491449244934494449544964497449844994500450145024503450445054506450745084509451045114512451345144515451645174518451945204521452245234524452545264527452845294530453145324533453445354536453745384539454045414542454345444545454645474548454945504551455245534554455545564557455845594560456145624563456445654566456745684569457045714572457345744575457645774578457945804581458245834584458545864587458845894590459145924593459445954596459745984599460046014602460346044605460646074608460946104611461246134614461546164617461846194620462146224623462446254626462746284629463046314632463346344635463646374638463946404641464246434644464546464647464846494650465146524653465446554656465746584659466046614662466346644665466646674668466946704671467246734674467546764677467846794680468146824683468446854686468746884689469046914692469346944695469646974698469947004701470247034704470547064707470847094710471147124713471447154716471747184719472047214722472347244725472647274728472947304731473247334734473547364737473847394740474147424743474447454746474747484749475047514752475347544755475647574758475947604761476247634764476547664767476847694770477147724773477447754776477747784779478047814782478347844785478647874788478947904791479247934794479547964797479847994800480148024803480448054806480748084809481048114812481348144815481648174818481948204821482248234824482548264827482848294830483148324833483448354836483748384839484048414842484348444845484648474848484948504851485248534854485548564857485848594860486148624863486448654866486748684869487048714872487348744875487648774878487948804881488248834884488548864887488848894890489148924893489448954896489748984899490049014902490349044905490649074908490949104911491249134914491549164917491849194920492149224923492449254926492749284929493049314932493349344935493649374938493949404941494249434944494549464947494849494950495149524953495449554956495749584959496049614962496349644965496649674968496949704971497249734974497549764977497849794980498149824983498449854986498749884989499049914992499349944995499649974998499950005001500250035004500550065007500850095010501150125013501450155016501750185019502050215022502350245025502650275028502950305031503250335034503550365037503850395040504150425043504450455046504750485049505050515052505350545055505650575058505950605061506250635064506550665067506850695070507150725073507450755076507750785079508050815082508350845085508650875088508950905091509250935094509550965097509850995100510151025103510451055106510751085109511051115112511351145115511651175118511951205121512251235124512551265127512851295130513151325133513451355136513751385139514051415142514351445145514651475148514951505151515251535154515551565157515851595160516151625163516451655166516751685169517051715172517351745175517651775178517951805181518251835184518551865187518851895190519151925193519451955196519751985199520052015202520352045205520652075208520952105211521252135214521552165217521852195220522152225223522452255226522752285229523052315232523352345235523652375238523952405241524252435244524552465247524852495250525152525253525452555256525752585259526052615262526352645265526652675268526952705271527252735274527552765277527852795280528152825283528452855286528752885289529052915292529352945295529652975298529953005301530253035304530553065307530853095310531153125313531453155316531753185319532053215322532353245325532653275328532953305331533253335334533553365337533853395340534153425343534453455346534753485349535053515352535353545355535653575358535953605361536253635364536553665367536853695370537153725373537453755376537753785379538053815382538353845385538653875388538953905391539253935394539553965397539853995400540154025403540454055406540754085409541054115412541354145415541654175418541954205421542254235424542554265427542854295430543154325433543454355436543754385439544054415442544354445445544654475448544954505451545254535454545554565457545854595460546154625463546454655466546754685469547054715472547354745475547654775478547954805481548254835484548554865487548854895490549154925493549454955496549754985499550055015502550355045505550655075508550955105511551255135514551555165517551855195520552155225523552455255526552755285529553055315532553355345535553655375538553955405541554255435544554555465547554855495550555155525553555455555556555755585559556055615562556355645565556655675568556955705571557255735574557555765577557855795580558155825583558455855586558755885589559055915592559355945595559655975598559956005601560256035604560556065607560856095610561156125613561456155616561756185619562056215622562356245625562656275628562956305631563256335634563556365637563856395640564156425643564456455646564756485649565056515652565356545655565656575658565956605661566256635664566556665667566856695670567156725673567456755676567756785679568056815682568356845685568656875688568956905691569256935694569556965697569856995700570157025703570457055706570757085709571057115712571357145715571657175718571957205721572257235724572557265727572857295730573157325733573457355736573757385739574057415742574357445745574657475748574957505751575257535754575557565757575857595760576157625763576457655766576757685769577057715772577357745775577657775778577957805781578257835784578557865787578857895790579157925793579457955796579757985799580058015802580358045805580658075808580958105811581258135814581558165817581858195820582158225823582458255826582758285829583058315832583358345835583658375838583958405841584258435844584558465847584858495850585158525853585458555856585758585859586058615862586358645865586658675868586958705871587258735874587558765877587858795880588158825883588458855886588758885889589058915892589358945895589658975898589959005901590259035904590559065907590859095910591159125913591459155916591759185919592059215922592359245925592659275928592959305931593259335934593559365937593859395940594159425943594459455946594759485949595059515952595359545955595659575958595959605961596259635964596559665967596859695970597159725973597459755976597759785979598059815982598359845985598659875988598959905991599259935994599559965997599859996000600160026003600460056006600760086009601060116012601360146015601660176018601960206021602260236024602560266027602860296030603160326033603460356036603760386039604060416042604360446045604660476048604960506051605260536054605560566057605860596060606160626063606460656066606760686069607060716072607360746075607660776078607960806081608260836084608560866087608860896090609160926093609460956096609760986099610061016102610361046105610661076108610961106111611261136114611561166117611861196120612161226123612461256126612761286129613061316132613361346135613661376138613961406141614261436144614561466147614861496150615161526153615461556156615761586159616061616162616361646165616661676168616961706171617261736174617561766177617861796180618161826183618461856186618761886189619061916192619361946195619661976198619962006201620262036204620562066207620862096210621162126213621462156216621762186219622062216222622362246225622662276228622962306231623262336234623562366237623862396240624162426243624462456246624762486249625062516252625362546255625662576258625962606261626262636264626562666267626862696270627162726273627462756276627762786279628062816282628362846285628662876288628962906291629262936294629562966297629862996300630163026303630463056306630763086309631063116312631363146315631663176318631963206321632263236324632563266327632863296330633163326333633463356336633763386339634063416342634363446345634663476348634963506351635263536354635563566357635863596360636163626363636463656366636763686369637063716372637363746375637663776378637963806381638263836384638563866387638863896390639163926393639463956396639763986399640064016402640364046405640664076408640964106411641264136414641564166417641864196420642164226423642464256426642764286429643064316432643364346435643664376438643964406441644264436444644564466447644864496450645164526453645464556456645764586459646064616462646364646465646664676468646964706471647264736474647564766477647864796480648164826483648464856486648764886489649064916492649364946495649664976498649965006501650265036504650565066507650865096510651165126513651465156516651765186519652065216522652365246525652665276528652965306531653265336534653565366537653865396540654165426543654465456546654765486549655065516552655365546555655665576558655965606561656265636564656565666567656865696570657165726573657465756576657765786579658065816582658365846585658665876588658965906591659265936594659565966597659865996600660166026603660466056606660766086609661066116612661366146615661666176618661966206621662266236624662566266627662866296630663166326633663466356636663766386639664066416642664366446645664666476648664966506651665266536654665566566657665866596660666166626663666466656666666766686669667066716672667366746675667666776678667966806681668266836684668566866687668866896690669166926693669466956696669766986699670067016702670367046705670667076708670967106711671267136714671567166717671867196720672167226723672467256726672767286729673067316732673367346735673667376738673967406741674267436744674567466747674867496750675167526753675467556756675767586759676067616762676367646765676667676768676967706771677267736774677567766777677867796780678167826783678467856786678767886789679067916792679367946795679667976798679968006801680268036804680568066807680868096810681168126813681468156816681768186819682068216822682368246825682668276828682968306831683268336834683568366837683868396840684168426843684468456846684768486849685068516852685368546855685668576858685968606861686268636864686568666867686868696870687168726873687468756876687768786879688068816882688368846885688668876888688968906891689268936894689568966897689868996900690169026903690469056906690769086909691069116912691369146915691669176918691969206921692269236924692569266927692869296930693169326933693469356936693769386939694069416942694369446945694669476948694969506951695269536954695569566957695869596960696169626963696469656966696769686969697069716972697369746975697669776978697969806981698269836984698569866987698869896990699169926993699469956996699769986999700070017002700370047005700670077008700970107011701270137014701570167017701870197020702170227023702470257026702770287029703070317032703370347035703670377038703970407041704270437044704570467047704870497050705170527053705470557056705770587059706070617062706370647065706670677068706970707071707270737074707570767077707870797080708170827083708470857086708770887089709070917092709370947095709670977098709971007101710271037104710571067107710871097110711171127113711471157116711771187119712071217122712371247125712671277128712971307131713271337134713571367137713871397140714171427143714471457146714771487149715071517152715371547155715671577158715971607161716271637164716571667167716871697170717171727173717471757176717771787179718071817182718371847185718671877188718971907191719271937194719571967197719871997200720172027203720472057206720772087209721072117212721372147215721672177218721972207221722272237224722572267227722872297230723172327233723472357236723772387239724072417242724372447245724672477248724972507251725272537254725572567257725872597260726172627263726472657266726772687269727072717272727372747275727672777278727972807281728272837284728572867287728872897290729172927293729472957296729772987299730073017302730373047305730673077308730973107311731273137314731573167317731873197320732173227323732473257326732773287329733073317332733373347335733673377338733973407341734273437344734573467347734873497350735173527353735473557356735773587359736073617362736373647365736673677368736973707371737273737374737573767377737873797380738173827383738473857386738773887389739073917392739373947395739673977398739974007401740274037404740574067407740874097410741174127413741474157416741774187419742074217422742374247425742674277428742974307431743274337434743574367437743874397440744174427443744474457446744774487449745074517452745374547455745674577458745974607461746274637464746574667467746874697470747174727473747474757476747774787479748074817482748374847485748674877488748974907491749274937494749574967497749874997500750175027503750475057506750775087509751075117512751375147515751675177518751975207521752275237524752575267527752875297530753175327533753475357536753775387539754075417542754375447545754675477548754975507551755275537554755575567557755875597560
  1. using Aitex.Common.Util;
  2. using Aitex.Core.Common;
  3. using Aitex.Core.RT.Device;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using Aitex.Sorter.Common;
  9. using MECF.Framework.Common.Equipment;
  10. using MECF.Framework.Common.SubstrateTrackings;
  11. using System;
  12. using System.Collections.Generic;
  13. using System.IO;
  14. using System.Linq;
  15. using System.Text;
  16. using System.Threading.Tasks;
  17. using FurnaceRT.Equipments.CarrierRobots;
  18. using FurnaceRT.Equipments.PMs.RecipeExecutions;
  19. using FurnaceRT.Equipments.Schedulers;
  20. using FurnaceRT.Equipments.Systems;
  21. using FurnaceRT.Equipments.WaferRobots;
  22. using MECF.Framework.Common.Jobs;
  23. using Aitex.Core.RT.Log;
  24. using MECF.Framework.Common.DBCore;
  25. using Aitex.Core.RT.DataCenter;
  26. using System.Diagnostics;
  27. using FurnaceRT.Equipments.PMs;
  28. using MECF.Framework.Common.Schedulers;
  29. using System.Windows.Input;
  30. using System.Net.Sockets;
  31. using FurnaceRT.Equipments.FIMSs;
  32. using FurnaceRT.Devices;
  33. using System.Text.RegularExpressions;
  34. using MECF.Framework.Common.CommonData;
  35. using FurnaceRT.Equipments.Boats;
  36. using MECF.Framework.FA.Core.FAControl;
  37. using MECF.Framework.UI.Client.CenterViews.Operations.FA;
  38. using FurnaceRT.Equipments.LPs;
  39. using MECF.Framework.Common.CommonData.EnumData;
  40. using MECF.Framework.Common.DataCenter;
  41. using DocumentFormat.OpenXml.Drawing.Charts;
  42. using MECF.Framework.Common.Utilities;
  43. using System.Threading;
  44. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  45. using System.Reflection;
  46. using MECF.Framework.UI.Client.CenterViews.Editors.Recipe;
  47. namespace FurnaceRT.Equipments.Jobs
  48. {
  49. public class AutoTransfer : SchedulerModuleFactory
  50. {
  51. private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
  52. private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
  53. public List<ProcessJobInfo> LstProcessJobs => _lstProcessJobs;
  54. //private Object _locker = new Object();
  55. private const string LogSource = "Scheduler";
  56. System.Timers.Timer timer = null;
  57. private bool _isCycleMode;
  58. private int _cycleSetPoint = 0;
  59. private int _cycledCount = 0;
  60. private int _cycledWafer = 0;
  61. private int _cycledTotalWafer = 0;
  62. private int _cycleTime;
  63. private int _cycleTimeSecond = 0;
  64. private Stopwatch _coolTimer = new Stopwatch();
  65. private SchedulerFACallback _faCallback;
  66. private SchedulerDBCallback _dbCallback;
  67. private ProcessJobInfo _secondPj;
  68. private Dictionary<string, int> _sideDummyWafers = new Dictionary<string, int>();
  69. private Dictionary<string, int> _extraDummyWafers = new Dictionary<string, int>();
  70. private List<int> _sideDummySlots = new List<int>();
  71. private List<int> _extraDummySlots = new List<int>();
  72. private List<int> _productSlots = new List<int>();
  73. private List<int> _monitor1Slots = new List<int>();
  74. private List<int> _monitor2Slots = new List<int>();
  75. private List<int> _tSlots = new List<int>();//expert mode
  76. private List<int> _xdSlots = new List<int>();//expert mode
  77. private List<SchedulerStocker> _lstCurrentPjStocker = new List<SchedulerStocker>();
  78. private Dictionary<string, R_TRIG> _chargeRuleAlarmTrigDic = new Dictionary<string, R_TRIG>();
  79. private Dictionary<string, R_TRIG> _waferStatusAlarmTrigDic = new Dictionary<string, R_TRIG>();
  80. private Dictionary<string, R_TRIG> _dummyWaferCheckTrigDic = new Dictionary<string, R_TRIG>();
  81. private Dictionary<string, R_TRIG> _logTrigDic = new Dictionary<string, R_TRIG>();
  82. private bool _isCoolingSkip = false;
  83. public bool HasJobRunning
  84. {
  85. get { return _lstControlJobs.Count > 0; }
  86. }
  87. public AutoTransfer()
  88. {
  89. _faCallback = new SchedulerFACallback();
  90. _dbCallback = new SchedulerDBCallback();
  91. InitModule();
  92. _cycledTotalWafer = SC.ContainsItem("System.TotalCycledWafer")
  93. ? SC.GetValue<int>("System.TotalCycledWafer")
  94. : 0;
  95. DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount);
  96. DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer);
  97. DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint);
  98. DATA.Subscribe("Scheduler.CycledTotalWafer", () => _cycledTotalWafer);
  99. DATA.Subscribe("Scheduler.SecondPj", () => new List<ProcessJobInfo>() { _secondPj });
  100. DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
  101. DATA.Subscribe($"LP1.LocalJobName", () =>
  102. {
  103. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP1");
  104. if (cj != null)
  105. return cj.Name;
  106. return "";
  107. });
  108. DATA.Subscribe($"LP2.LocalJobStatus", () =>
  109. {
  110. var cj = _lstControlJobs.FirstOrDefault(x => x.Module == "LP2");
  111. if (cj != null)
  112. return cj.State.ToString();
  113. return "";
  114. });
  115. DATA.Subscribe($"Scheduler.CurrentControlJob", () =>
  116. {
  117. var cj = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  118. return cj;
  119. });
  120. DATA.Subscribe($"Scheduler.CurrentProcessJob", () =>
  121. {
  122. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  123. return pj;
  124. });
  125. DATA.Subscribe($"Scheduler.ControlJobList", () =>
  126. {
  127. return _lstControlJobs;
  128. });
  129. DATA.Subscribe($"Scheduler.ProcessJobList", () =>
  130. {
  131. return _lstProcessJobs;
  132. });
  133. DATA.Subscribe($"Scheduler.CoolingTime", () =>
  134. {
  135. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  136. return pj != null ? pj.CoolTimeSec : 0;
  137. });
  138. DATA.Subscribe($"Scheduler.CoolingRemainTime", () =>
  139. {
  140. var pj = _lstProcessJobs.Find(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused);
  141. var coolTime = pj != null ? pj.CoolTimeSec : 0;
  142. if (_coolTimer.IsRunning)
  143. return (coolTime - _coolTimer.ElapsedMilliseconds / 1000) > 0 ? Convert.ToInt32(coolTime - _coolTimer.ElapsedMilliseconds / 1000) : 0;
  144. return coolTime;
  145. });
  146. DATA.Subscribe($"Scheduler.StockerUseSlots", () =>
  147. {
  148. Dictionary<string, string> stockerUseSlots = new Dictionary<string, string>();
  149. if (!_lstProcessJobs.Any())
  150. return stockerUseSlots;
  151. foreach (var pj in _lstProcessJobs)
  152. {
  153. if (pj.Stockers != null)
  154. {
  155. foreach (var stocker in pj.Stockers)
  156. {
  157. if (!stockerUseSlots.ContainsKey(stocker.Item1))
  158. stockerUseSlots.Add(stocker.Item1, string.Join(",", stocker.Item3));
  159. else
  160. {
  161. var value = stockerUseSlots[stocker.Item1];
  162. stockerUseSlots[stocker.Item1] = $"{value},{string.Join(",", stocker.Item3)}";
  163. }
  164. }
  165. }
  166. }
  167. return stockerUseSlots;
  168. });
  169. }
  170. public void Clear()
  171. {
  172. _carrierRobot.ResetTask();
  173. _waferRobot.ResetTask();
  174. foreach (var pm in _lstPms)
  175. {
  176. pm.ResetTask();
  177. }
  178. foreach (var lp in _lstLPs)
  179. {
  180. lp.ResetTask();
  181. }
  182. foreach (var fims in _lstFIMSs)
  183. {
  184. fims.ResetTask();
  185. }
  186. _lstControlJobs.Clear();
  187. _lstProcessJobs.Clear();
  188. _isCoolingSkip = false;
  189. }
  190. public void ResetTask(ModuleName module)
  191. {
  192. if (module == _carrierRobot.Module)
  193. _carrierRobot.ResetTask();
  194. if (module == _waferRobot.Module)
  195. _waferRobot.ResetTask();
  196. foreach (var lp in _lstLPs)
  197. {
  198. if (module == _carrierRobot.Module)
  199. lp.ResetTask();
  200. }
  201. foreach (var fims in _lstFIMSs)
  202. {
  203. if (module == _carrierRobot.Module)
  204. fims.ResetTask();
  205. }
  206. }
  207. #region Job Management
  208. public Result CreateJob(params object[] objs)
  209. {
  210. _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
  211. _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
  212. if (_isCycleMode)
  213. {
  214. _cycledWafer = 0;
  215. _cycledCount = 0;
  216. }
  217. if (objs == null || objs.Length == 0)
  218. {
  219. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  220. return Result.FAIL;
  221. }
  222. var param = (Dictionary<string, object>)objs[0];
  223. if (param == null)
  224. {
  225. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid");
  226. return Result.FAIL;
  227. }
  228. var content = "";
  229. foreach (var key in param.Keys)
  230. {
  231. content += $"{key}-{param[key]}#";
  232. }
  233. LOG.Write($"Control Job: {content}");
  234. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  235. {
  236. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  237. return Result.FAIL;
  238. }
  239. if (string.IsNullOrEmpty(layoutRecipe))
  240. {
  241. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  242. return Result.FAIL;
  243. }
  244. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  245. if (!File.Exists(path))
  246. {
  247. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  248. return Result.FAIL;
  249. }
  250. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  251. if (!File.Exists(path))
  252. {
  253. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  254. return Result.FAIL;
  255. }
  256. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  257. {
  258. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  259. return Result.FAIL;
  260. }
  261. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  262. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  263. {
  264. if (param.ContainsKey("CarrierPara"))
  265. {
  266. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  267. var paras = param["CarrierPara"].ToString().Split(';');
  268. if (paras != null && paras.Length > 0)
  269. {
  270. foreach (var item in paras)
  271. {
  272. //Stocker13,,21/22/23/24/25"
  273. var arry = item.Split(',');
  274. if (arry != null && arry.Length >= 2)
  275. {
  276. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  277. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  278. {
  279. var slots = new List<int>();
  280. if (arry.Length >= 3)
  281. {
  282. var slotParas = arry[2].Split('/').ToList();
  283. if (slotParas != null && slotParas.Count > 0)
  284. {
  285. foreach (var slotPara in slotParas)
  286. {
  287. var ret = int.TryParse(slotPara, out int slot);
  288. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  289. {
  290. if (_lstProcessJobs.Any())
  291. {
  292. foreach (var job in _lstProcessJobs)
  293. {
  294. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  295. {
  296. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  297. return Result.FAIL;
  298. }
  299. }
  300. }
  301. slots.Add(slot - 1);
  302. }
  303. }
  304. }
  305. }
  306. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  307. }
  308. }
  309. }
  310. }
  311. }
  312. if (param.ContainsKey("mCarrierPara"))
  313. {
  314. //Stocker14,P_00000014;Stocker15,P_00000015
  315. var paras = param["mCarrierPara"].ToString().Split(';');
  316. if (paras != null && paras.Length > 0)
  317. {
  318. if (!string.IsNullOrEmpty(paras[0]))
  319. {
  320. foreach (var item in paras)
  321. {
  322. var arry = item.Split(',');
  323. if (arry != null && arry.Length >= 2)
  324. {
  325. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  326. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  327. {
  328. var slots = new List<int>();
  329. if (arry.Length >= 3)
  330. {
  331. var slotParas = arry[2].Split('/').ToList();
  332. if (slotParas != null && slotParas.Count > 0)
  333. {
  334. foreach (var slotPara in slotParas)
  335. {
  336. var ret = int.TryParse(slotPara, out int slot);
  337. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  338. {
  339. if (_lstProcessJobs.Any())
  340. {
  341. foreach (var job in _lstProcessJobs)
  342. {
  343. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  344. {
  345. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  346. return Result.FAIL;
  347. }
  348. }
  349. }
  350. slots.Add(slot - 1);
  351. }
  352. }
  353. }
  354. }
  355. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  356. }
  357. }
  358. }
  359. }
  360. }
  361. }
  362. if (param.ContainsKey("m1CarrierPara"))
  363. {
  364. //Stocker14,P_00000014;Stocker15,P_00000015
  365. var paras = param["m1CarrierPara"].ToString().Split(';');
  366. if (paras != null && paras.Length > 0)
  367. {
  368. if (!string.IsNullOrEmpty(paras[0]))
  369. {
  370. foreach (var item in paras)
  371. {
  372. var arry = item.Split(',');
  373. if (arry != null && arry.Length >= 2)
  374. {
  375. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  376. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  377. {
  378. var slots = new List<int>();
  379. if (arry.Length >= 3)
  380. {
  381. var slotParas = arry[2].Split('/').ToList();
  382. if (slotParas != null && slotParas.Count > 0)
  383. {
  384. foreach (var slotPara in slotParas)
  385. {
  386. var ret = int.TryParse(slotPara, out int slot);
  387. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  388. {
  389. if (_lstProcessJobs.Any())
  390. {
  391. foreach (var job in _lstProcessJobs)
  392. {
  393. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  394. {
  395. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  396. return Result.FAIL;
  397. }
  398. }
  399. }
  400. slots.Add(slot - 1);
  401. }
  402. }
  403. }
  404. }
  405. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  406. }
  407. }
  408. }
  409. }
  410. }
  411. }
  412. if (param.ContainsKey("m2CarrierPara"))
  413. {
  414. //Stocker14,P_00000014;Stocker15,P_00000015
  415. var paras = param["m2CarrierPara"].ToString().Split(';');
  416. if (paras != null && paras.Length > 0)
  417. {
  418. if (!string.IsNullOrEmpty(paras[0]))
  419. {
  420. foreach (var item in paras)
  421. {
  422. var arry = item.Split(',');
  423. if (arry != null && arry.Length >= 2)
  424. {
  425. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  426. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  427. {
  428. var slots = new List<int>();
  429. if (arry.Length >= 3)
  430. {
  431. var slotParas = arry[2].Split('/').ToList();
  432. if (slotParas != null && slotParas.Count > 0)
  433. {
  434. foreach (var slotPara in slotParas)
  435. {
  436. var ret = int.TryParse(slotPara, out int slot);
  437. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  438. {
  439. if (_lstProcessJobs.Any())
  440. {
  441. foreach (var job in _lstProcessJobs)
  442. {
  443. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  444. {
  445. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  446. return Result.FAIL;
  447. }
  448. }
  449. }
  450. slots.Add(slot - 1);
  451. }
  452. }
  453. }
  454. }
  455. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  456. }
  457. }
  458. }
  459. }
  460. }
  461. }
  462. useStockers.Sort(compare);
  463. foreach (var s in _lstSideDummyStocker)
  464. {
  465. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  466. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  467. else
  468. {
  469. bool onRobot = false;
  470. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  471. {
  472. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  473. if (carrier.CarrierType == CarrierType.SD &&
  474. carrier.InternalModuleName == s.Module)
  475. {
  476. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  477. onRobot = true;
  478. }
  479. }
  480. if (!onRobot)
  481. {
  482. bool inFIMS = false;
  483. foreach (var fims in _lstFIMSs)
  484. {
  485. if (!fims.IsOnline)
  486. continue;
  487. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  488. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  489. carrier.InternalModuleName == s.Module)
  490. {
  491. inFIMS = true;
  492. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  493. }
  494. }
  495. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  496. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  497. }
  498. }
  499. }
  500. foreach (var s in _lstExtraDummyStocker)
  501. {
  502. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  503. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  504. else
  505. {
  506. bool onRobot = false;
  507. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  508. {
  509. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  510. if (carrier.CarrierType == CarrierType.ED &&
  511. carrier.InternalModuleName == s.Module)
  512. {
  513. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  514. onRobot = true;
  515. }
  516. }
  517. if (!onRobot)
  518. {
  519. bool inFIMS = false;
  520. foreach (var fims in _lstFIMSs)
  521. {
  522. if (!fims.IsOnline)
  523. continue;
  524. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  525. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  526. carrier.InternalModuleName == s.Module)
  527. {
  528. inFIMS = true;
  529. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  530. }
  531. }
  532. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  533. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  534. }
  535. }
  536. }
  537. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  538. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  539. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  540. {
  541. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  542. return Result.FAIL;
  543. }
  544. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  545. {
  546. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  547. return Result.FAIL;
  548. }
  549. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  550. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  551. {
  552. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  553. return Result.FAIL;
  554. }
  555. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  556. {
  557. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  558. return Result.FAIL;
  559. }
  560. if (!CheckWaferStatus(useStockers, true, true, out reason))
  561. {
  562. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  563. return Result.FAIL;
  564. }
  565. }
  566. var pjJobId = param["PJID"].ToString();
  567. var cjJobId = param["CJID"].ToString();
  568. ControlJobInfo cj = null;
  569. if (_lstControlJobs.Exists(x => x.Name == cjJobId))
  570. {
  571. for (int i = 1; i < 1000; i++)
  572. {
  573. if (!_lstControlJobs.Exists(x => x.Name == $"{cjJobId}_{i}"))
  574. {
  575. cjJobId = $"{cjJobId}_{i}";
  576. break;
  577. }
  578. }
  579. }
  580. cj = new ControlJobInfo();
  581. cj.Name = cjJobId;
  582. //cj.Module = module;
  583. cj.LotName = cjJobId;
  584. cj.LotInnerId = Guid.NewGuid();
  585. cj.LotWafers = new List<WaferInfo>();
  586. cj.CreateTime = DateTime.Now;
  587. cj.SetState(EnumControlJobState.WaitingForStart);
  588. ProcessJobInfo pj = new ProcessJobInfo();
  589. pj.Name = pjJobId;
  590. pj.JobRecipe = param["JobRecipe"].ToString();
  591. pj.ProcessRecipe = processRecipe;
  592. pj.LayoutRecipe = layoutRecipe;
  593. pj.ControlJobName = cj.Name;
  594. pj.SetState(EnumProcessJobState.Queued);
  595. pj.CreateTime = DateTime.Now;
  596. pj.Stockers = useStockers;
  597. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  598. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  599. pj.CoolTimeSec = coolTime;
  600. pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  601. pj.IsN2PurgeMode = recipeHead.IsN2PurgeMode;
  602. pj.N2PurgeModeStr = recipeHead.N2PurgeModeStr;
  603. if (useStockers.Any() && !CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  604. {
  605. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  606. return Result.FAIL;
  607. }
  608. foreach (var stocker in useStockers)
  609. {
  610. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  611. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  612. {
  613. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  614. return Result.FAIL;
  615. }
  616. }
  617. _lstProcessJobs.Add(pj);
  618. cj.ProcessJobNameList.Add(pj.Name);
  619. if (!_lstControlJobs.Contains(cj))
  620. _lstControlJobs.Add(cj);
  621. _faCallback.JobCreated(cj, pj);
  622. _secondPj = null;
  623. if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  624. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  625. return Result.RUN;
  626. }
  627. static int compare(Tuple<string, string> t1, Tuple<string, string> t2)
  628. {
  629. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  630. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  631. if (s1 > s2)
  632. {
  633. return 1;
  634. }
  635. else
  636. {
  637. return -1;
  638. }
  639. }
  640. static int compare(Tuple<string, string, List<int>> t1, Tuple<string, string, List<int>> t2)
  641. {
  642. int.TryParse(t1.Item1.Replace("Stocker", ""), out int s1);
  643. int.TryParse(t2.Item1.Replace("Stocker", ""), out int s2);
  644. if (s1 > s2)
  645. {
  646. return 1;
  647. }
  648. else
  649. {
  650. return -1;
  651. }
  652. }
  653. internal ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj, ProcessJobInfo checkPj = null)
  654. {
  655. DateTime dtMin = DateTime.MaxValue;
  656. ProcessJobInfo currentPj = null;
  657. foreach (var pj in _lstProcessJobs)
  658. {
  659. if (checkPj != null && checkPj == pj)
  660. continue;
  661. if (pj.ControlJobName == cj.Name)
  662. {
  663. if (pj.CreateTime.CompareTo(dtMin) < 0)
  664. {
  665. dtMin = pj.CreateTime;
  666. currentPj = pj;
  667. }
  668. }
  669. }
  670. return currentPj;
  671. }
  672. internal void StopJob(string jobName)
  673. {
  674. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  675. if (cj == null)
  676. {
  677. EV.PostWarningLog(LogSource, $"stop job rejected, not found job with id {jobName}");
  678. return;
  679. }
  680. foreach (var pj in _lstProcessJobs)
  681. {
  682. if (pj.ControlJobName == cj.Name)
  683. {
  684. if (pj.State == EnumProcessJobState.Processing)
  685. _faCallback.JobStopped(cj, pj);
  686. pj.SetState(EnumProcessJobState.Stopping);
  687. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  688. }
  689. }
  690. if (_isCycleMode)
  691. {
  692. if (_cycleSetPoint > _cycledCount)
  693. {
  694. _cycleSetPoint = _cycledCount;
  695. EV.PostWarningLog("System", $"system in cycle mode, cycle count reset to {_cycledCount}");
  696. }
  697. }
  698. _dbCallback.LotFinished(cj);
  699. }
  700. internal void AbortJob(string jobName)
  701. {
  702. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  703. if (cj == null)
  704. {
  705. EV.PostWarningLog(LogSource, $"abort job rejected, not found job with id {jobName}");
  706. return;
  707. }
  708. List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
  709. foreach (var pj in _lstProcessJobs)
  710. {
  711. if (pj.ControlJobName == cj.Name)
  712. {
  713. if (pj.State == EnumProcessJobState.Processing)
  714. _faCallback.JobAborted(cj, pj);
  715. pj.SetState(EnumProcessJobState.Aborting);
  716. if (pj.ProcessingState == EnumProcessingState.Charging || pj.ProcessingState == EnumProcessingState.Discharging)
  717. {
  718. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  719. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  720. pmModule?.SetN2PurgeProcess(false);
  721. }
  722. pj.ProcessingState = EnumProcessingState.WaitingWithdrawal;
  723. pjAbortList.Add(pj);
  724. int unprocessed = 0;
  725. int aborted = 0;
  726. WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
  727. foreach (var waferInfo in wafers)
  728. {
  729. waferInfo.ProcessJob = null;
  730. waferInfo.NextSequenceStep = 0;
  731. if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
  732. unprocessed++;
  733. }
  734. JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
  735. }
  736. }
  737. if (_coolTimer.IsRunning) _coolTimer.Stop();
  738. Singleton<FAJobController>.Instance.FAProcessJobs[jobName].RequestAbort();
  739. foreach (var pj in pjAbortList)
  740. {
  741. _lstProcessJobs.Remove(pj);
  742. }
  743. _lstControlJobs.Remove(cj);
  744. _dbCallback.LotFinished(cj);
  745. }
  746. public void ResumeJob(string jobName)
  747. {
  748. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  749. if (cj == null)
  750. {
  751. EV.PostWarningLog(LogSource, $"resume job rejected, not found job with id {jobName}");
  752. return;
  753. }
  754. if (cj.State == EnumControlJobState.Paused)
  755. {
  756. cj.SetState(EnumControlJobState.Executing);
  757. }
  758. foreach (var pj in _lstProcessJobs)
  759. {
  760. if (pj.ControlJobName == cj.Name)
  761. {
  762. if (pj.State == EnumProcessJobState.Processing)
  763. _faCallback.JobResumed(cj, pj);
  764. }
  765. }
  766. }
  767. internal bool StartJob(string jobName)
  768. {
  769. if (!CheckPMStatus())
  770. {
  771. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  772. return false;
  773. }
  774. ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
  775. if (cj == null)
  776. {
  777. EV.PostWarningLog(LogSource, $"start job rejected, not found job with id {jobName}");
  778. return false;
  779. }
  780. if (_isCycleMode)
  781. {
  782. if (CheckAllJobDone())
  783. {
  784. _cycledWafer = 0;
  785. _cycledCount = 0;
  786. }
  787. }
  788. if (cj.State == EnumControlJobState.WaitingForStart)
  789. {
  790. cj.SetState(EnumControlJobState.Executing);
  791. //(GetModule(cj.Module) as SchedulerLoadPort).NoteJobStart();
  792. cj.LotInnerId = Guid.NewGuid();
  793. cj.BeginTime = DateTime.Now;
  794. _dbCallback.LotCreated(cj);
  795. _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
  796. }
  797. return true;
  798. }
  799. internal void PauseJob(string jobName)
  800. {
  801. foreach (var cj in _lstControlJobs)
  802. {
  803. if (cj.Name != jobName && !string.IsNullOrEmpty(jobName))
  804. continue;
  805. if (cj.State == EnumControlJobState.Executing)
  806. {
  807. cj.SetState(EnumControlJobState.Paused);
  808. _faCallback.JobPaused(cj, GetFirstProcessJob(cj));
  809. }
  810. }
  811. }
  812. #endregion Job Management
  813. private bool CheckPMStatus()
  814. {
  815. bool hasPmOnline = false;
  816. foreach (var schedulerPm in _lstPms)
  817. {
  818. if (schedulerPm.IsAvailable)
  819. {
  820. hasPmOnline = true;
  821. continue;
  822. }
  823. }
  824. return hasPmOnline;
  825. }
  826. public Result Start(params object[] objs)
  827. {
  828. Clear();
  829. _cycledWafer = 0;
  830. _cycledCount = 0;
  831. timer.Start();
  832. if (!CheckPMStatus())
  833. {
  834. EV.PostWarningLog("Scheduler", "can not change to auto mode, at least one process chamber be online");
  835. return Result.FAIL;
  836. }
  837. return Result.RUN;
  838. }
  839. public Result Monitor()
  840. {
  841. ControlJobInfo cjActive = _lstControlJobs.Find(x => x.State == EnumControlJobState.Executing);
  842. if (cjActive != null)
  843. {
  844. MonitorModuleTasks();
  845. }
  846. MonitorJobTasks();
  847. return Result.RUN;
  848. }
  849. #region Job task
  850. public Result MonitorJobTasks()
  851. {
  852. UpdateProcessJobStatus();
  853. UpdateControlJobStatus();
  854. StartNewJob();
  855. return Result.RUN;
  856. }
  857. private void UpdateProcessJobStatus()
  858. {
  859. foreach (var pj in _lstProcessJobs)
  860. {
  861. if (pj.ProcessingState == EnumProcessingState.Discharging && pj.IsEmptyLayout)
  862. {
  863. pj.SetState(EnumProcessJobState.ProcessingComplete);
  864. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  865. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  866. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  867. pmModule?.SetN2PurgeProcess(false);
  868. }
  869. else
  870. {
  871. if (pj.State == EnumProcessJobState.Processing)
  872. {
  873. if (CheckAllWaferReturned(pj, true))
  874. {
  875. pj.SetState(EnumProcessJobState.ProcessingComplete);
  876. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  877. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  878. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  879. pmModule?.SetN2PurgeProcess(false);
  880. }
  881. }
  882. else if (pj.State == EnumProcessJobState.Stopping)
  883. {
  884. if (CheckAllWaferReturned(pj, false))
  885. {
  886. pj.SetState(EnumProcessJobState.ProcessingComplete);
  887. JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
  888. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  889. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  890. pmModule?.SetN2PurgeProcess(false);
  891. }
  892. }
  893. }
  894. }
  895. }
  896. private void UpdateControlJobStatus()
  897. {
  898. if (_lstControlJobs.Count == 0)
  899. return;
  900. bool allControlJobComplete = true;
  901. List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
  902. foreach (var cj in _lstControlJobs)
  903. {
  904. if (cj.State == EnumControlJobState.Executing)
  905. {
  906. bool allPjCompleted = true;
  907. foreach (var pjName in cj.ProcessJobNameList)
  908. {
  909. var pj = _lstProcessJobs.Find(x => x.Name == pjName);
  910. if (pj == null)
  911. {
  912. LOG.Error($"Not find pj named {pjName} in {cj.Name}");
  913. continue;
  914. }
  915. if (pj.State != EnumProcessJobState.Complete && pj.State != EnumProcessJobState.ProcessingComplete)
  916. {
  917. allPjCompleted = false;
  918. break;
  919. }
  920. }
  921. if (allPjCompleted)
  922. {
  923. cj.SetState(EnumControlJobState.Completed);
  924. cj.EndTime = DateTime.Now;
  925. string strInfo = $"{cj.Module} has finished: \r\n\r\nProcessed wafer number: {cj.LotWafers.Count} \r\nBegin time: {cj.BeginTime} \r\nEnd time: {cj.EndTime} \r\nDuration: {(cj.EndTime - cj.BeginTime).TotalSeconds:F0} sec";
  926. EV.PostInfoLog("Scheduler", strInfo);
  927. if (SC.GetValue<bool>("System.Job.EnablePopDialogWhenJobDone"))
  928. {
  929. EV.PostPopDialogMessage(EventLevel.Information, "System Information", strInfo);
  930. }
  931. _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
  932. _dbCallback.LotFinished(cj);
  933. //if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
  934. // (GetModule(cj.Module) as SchedulerLoadPort).NoteJobComplete();
  935. }
  936. }
  937. if (cj.State == EnumControlJobState.Completed && (!SC.GetValue<bool>("System.IsCycleMode") ||
  938. (SC.GetValue<bool>("System.IsCycleMode") && _cycledCount >= _cycleSetPoint)))
  939. {
  940. cjRemoveList.Add(cj);
  941. }
  942. allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
  943. }
  944. if (_isCycleMode && _cycledCount < _cycleSetPoint)
  945. {
  946. int countPerCycle = 0;
  947. int countProcessed = 0;
  948. foreach (var pj in _lstProcessJobs)
  949. {
  950. if (pj.State == EnumProcessJobState.Queued || pj.SlotWafers == null)
  951. continue;
  952. foreach (var pjSlotWafer in pj.SlotWafers)
  953. {
  954. countPerCycle++;
  955. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  956. if (!wafer.IsEmpty && !CheckWaferNeedProcess(pjSlotWafer.Item1, pjSlotWafer.Item2))
  957. {
  958. countProcessed++;
  959. }
  960. }
  961. }
  962. _cycledWafer = _cycledCount * countPerCycle + countProcessed;
  963. if (allControlJobComplete)
  964. {
  965. _cycledCount++;
  966. if (_cycledCount < _cycleSetPoint)
  967. {
  968. foreach (var cj in _lstControlJobs)
  969. {
  970. cj.SetState(EnumControlJobState.Executing);
  971. cj.LotInnerId = Guid.NewGuid();
  972. //_dbCallback.LotCreated(cj);
  973. }
  974. foreach (var pj in _lstProcessJobs)
  975. {
  976. pj.SetState(EnumProcessJobState.Queued);
  977. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  978. pj.InnerId = Guid.NewGuid();
  979. if (pj.SlotWafers == null)
  980. continue;
  981. foreach (var pjSlotWafer in pj.SlotWafers)
  982. {
  983. WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
  984. wafer.ProcessJob = null;
  985. wafer.NextSequenceStep = 0;
  986. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  987. }
  988. pj.SlotWafers.Clear();
  989. }
  990. }
  991. else
  992. {
  993. foreach (var cj in _lstControlJobs)
  994. {
  995. if (cj.State == EnumControlJobState.Completed)
  996. {
  997. cjRemoveList.Add(cj);
  998. }
  999. }
  1000. }
  1001. }
  1002. }
  1003. if (_waferRobot.IsAvailable && cjRemoveList.Any())
  1004. {
  1005. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  1006. }
  1007. foreach (var cj in cjRemoveList)
  1008. {
  1009. List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
  1010. foreach (var pj in _lstProcessJobs)
  1011. {
  1012. if (pj.ControlJobName == cj.Name)
  1013. pjRemoveList.Add(pj);
  1014. }
  1015. foreach (var pj in pjRemoveList)
  1016. {
  1017. _lstProcessJobs.Remove(pj);
  1018. }
  1019. _lstControlJobs.Remove(cj);
  1020. }
  1021. }
  1022. public bool CheckAllJobDone()
  1023. {
  1024. foreach (var cj in _lstControlJobs)
  1025. {
  1026. if (cj.State == EnumControlJobState.Executing ||
  1027. cj.State == EnumControlJobState.Paused ||
  1028. cj.State == EnumControlJobState.Queued ||
  1029. cj.State == EnumControlJobState.WaitingForStart)
  1030. return false;
  1031. }
  1032. if (_lstControlJobs.Count > 0 || _lstProcessJobs.Count > 0)
  1033. {
  1034. return false;
  1035. }
  1036. return true;
  1037. }
  1038. public List<Tuple<string, string, List<int>>> GetProcessingStockers()
  1039. {
  1040. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1041. return null;
  1042. foreach (var cj in _lstControlJobs)
  1043. {
  1044. if (cj.State == EnumControlJobState.Completed)
  1045. continue;
  1046. var pj = GetFirstProcessJob(cj);
  1047. if (pj != null)
  1048. {
  1049. if (pj.ProcessingState != EnumProcessingState.Discharging)
  1050. return pj.Stockers;
  1051. else
  1052. {
  1053. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1054. foreach (var item in pj.Stockers)
  1055. {
  1056. if (CarrierManager.Instance.CheckHasCarrier(item.Item1, 0))
  1057. {
  1058. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1059. if (wafers != null && !wafers.Any(x => !x.IsEmpty && x.OriginStation == (int)ModuleHelper.Converter(item.Item1)))
  1060. continue;
  1061. }
  1062. temp.Add(Tuple.Create(item.Item1, item.Item2, item.Item3));
  1063. }
  1064. return temp;
  1065. }
  1066. }
  1067. }
  1068. return null;
  1069. }
  1070. public List<Tuple<string, string, List<int>>> GetSecondlyProcessingStockers()
  1071. {
  1072. var pj = GetSecondlyProcessJob();
  1073. return pj != null ? pj.Stockers : null;
  1074. }
  1075. private ProcessJobInfo GetSecondlyProcessJob()
  1076. {
  1077. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1078. return null;
  1079. if (_lstControlJobs.Count > 1)
  1080. {
  1081. var cj = _lstControlJobs[1];
  1082. if (cj.State == EnumControlJobState.Completed)
  1083. return null;
  1084. var pj = GetFirstProcessJob(cj);
  1085. return pj;
  1086. }
  1087. return null;
  1088. }
  1089. private ProcessJobInfo GetSecondlyProcessJobV2()
  1090. {
  1091. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1092. return null;
  1093. if (_lstControlJobs.Count > 1 && _secondPj == null)
  1094. {
  1095. var cj = _lstControlJobs[1];
  1096. if (cj.State == EnumControlJobState.Completed)
  1097. return null;
  1098. var pj = GetFirstProcessJob(cj);
  1099. return pj;
  1100. }
  1101. return _secondPj;
  1102. }
  1103. public List<Tuple<string, string, List<int>>> GetAllPJStockers()
  1104. {
  1105. List<Tuple<string, string, List<int>>> temp = new List<Tuple<string, string, List<int>>>();
  1106. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1107. return temp;
  1108. foreach (var cj in _lstControlJobs)
  1109. {
  1110. if (cj.State == EnumControlJobState.Completed)
  1111. continue;
  1112. foreach (var pj in _lstProcessJobs)
  1113. {
  1114. if (pj != null && pj.ControlJobName == cj.Name)
  1115. {
  1116. temp.AddRange(pj.Stockers);
  1117. }
  1118. }
  1119. }
  1120. return temp;
  1121. }
  1122. private void StartNewJob()
  1123. {
  1124. if (!_lstControlJobs.Any() || !_lstProcessJobs.Any())
  1125. return;
  1126. _secondPj = GetSecondlyProcessJobV2();
  1127. ControlJobInfo cjActived = null;
  1128. DateTime dtMin = DateTime.MaxValue;
  1129. foreach (var cj in _lstControlJobs)
  1130. {
  1131. if (cj.State == EnumControlJobState.Completed)
  1132. continue;
  1133. if (cj.CreateTime.CompareTo(dtMin) < 0)
  1134. {
  1135. dtMin = cj.CreateTime;
  1136. cjActived = cj;
  1137. }
  1138. }
  1139. if (cjActived == null)
  1140. return;
  1141. if (cjActived.State != EnumControlJobState.Executing &&
  1142. cjActived.State != EnumControlJobState.Paused)
  1143. {
  1144. cjActived.BeginTime = DateTime.Now;
  1145. cjActived.SetState(EnumControlJobState.Executing);
  1146. }
  1147. ProcessJobInfo pj = null;
  1148. foreach (var cj in _lstControlJobs)
  1149. {
  1150. if (cj.State != EnumControlJobState.Executing)
  1151. continue;
  1152. cjActived = cj;
  1153. pj = GetFirstProcessJob(cjActived);
  1154. if (pj != null && pj.State == EnumProcessJobState.Queued)
  1155. {
  1156. if (!pj.IsEmptyLayout)
  1157. {
  1158. if (CheckProcessJobReady(pj))
  1159. {
  1160. //先不管charge rule
  1161. if (!CheckChargeRule(pj, out bool waferShort, true, true, out string reason))
  1162. {
  1163. if (!_chargeRuleAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1164. _chargeRuleAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1165. _chargeRuleAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1166. if (_chargeRuleAlarmTrigDic[pj.InnerId.ToString()].Q)
  1167. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, {reason}");
  1168. return;
  1169. }
  1170. if (!CheckWaferStatus(pj.Stockers, false, false, out reason))
  1171. {
  1172. if (!_waferStatusAlarmTrigDic.ContainsKey(pj.InnerId.ToString()))
  1173. _waferStatusAlarmTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1174. _waferStatusAlarmTrigDic[pj.InnerId.ToString()].CLK = true;
  1175. if (_waferStatusAlarmTrigDic[pj.InnerId.ToString()].Q)
  1176. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  1177. return;
  1178. }
  1179. if (!CheckDummyWaferUse(pj, cj))
  1180. return;
  1181. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1182. {
  1183. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1184. if (wafers != null && wafers.Any(x => !x.IsEmpty && (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  1185. {
  1186. for (int i = 0; i < wafers.Count; i++)
  1187. {
  1188. var wafer = wafers[i];
  1189. if (wafer == null || wafer.IsEmpty)
  1190. continue;
  1191. if (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED)
  1192. {
  1193. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1194. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1195. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1196. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1197. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid wafer in boat");
  1198. return;
  1199. }
  1200. if (!pj.SideDummySlots.Any(x => x == i) && !pj.ExtraDummySlots.Any(x => x == i))
  1201. {
  1202. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1203. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1204. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1205. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1206. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, dummy wafer layout mismatch");
  1207. return;
  1208. }
  1209. }
  1210. var existSDSlots = new List<int>();
  1211. foreach (var slot in pj.SideDummySlots)
  1212. {
  1213. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1214. if (!wafer.IsEmpty)
  1215. {
  1216. if (wafer.WaferType != WaferType.SD)
  1217. {
  1218. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1219. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1220. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1221. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1222. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, SD wafer layout mismatch");
  1223. return;
  1224. }
  1225. else
  1226. {
  1227. existSDSlots.Add(slot);
  1228. }
  1229. }
  1230. }
  1231. var existEDSlots = new List<int>();
  1232. foreach (var slot in pj.ExtraDummySlots)
  1233. {
  1234. var wafer = WaferManager.Instance.GetWafer(ModuleName.PM1, slot);
  1235. if (!wafer.IsEmpty)
  1236. {
  1237. if (wafer.WaferType != WaferType.ED)
  1238. {
  1239. if (!_dummyWaferCheckTrigDic.ContainsKey(pj.InnerId.ToString()))
  1240. _dummyWaferCheckTrigDic.Add(pj.InnerId.ToString(), new R_TRIG());
  1241. _dummyWaferCheckTrigDic[pj.InnerId.ToString()].CLK = true;
  1242. if (_dummyWaferCheckTrigDic[pj.InnerId.ToString()].Q)
  1243. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {pj.LayoutRecipe} check charge rule failed, invalid dummy wafer in boat, ED wafer layout mismatch");
  1244. return;
  1245. }
  1246. else
  1247. {
  1248. existEDSlots.Add(slot);
  1249. }
  1250. }
  1251. }
  1252. for (int i = 0; i < wafers.Count; i++)
  1253. {
  1254. var wafer = wafers[i];
  1255. if (wafer == null || wafer.IsEmpty)
  1256. continue;
  1257. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1258. }
  1259. pj.IsNeedChargeDummyWafer = pj.ExtraDummySlots.Count != existEDSlots.Count || pj.SideDummySlots.Count != existSDSlots.Count;
  1260. }
  1261. else
  1262. {
  1263. pj.IsNeedChargeDummyWafer = true;
  1264. }
  1265. }
  1266. else
  1267. {
  1268. pj.IsNeedChargeDummyWafer = true;
  1269. }
  1270. ActiveProcessJob(cjActived, pj);
  1271. _sideDummyWafers = GetDummyWafers(_lstSideDummyStocker, pj.SideDummySlots.Count(), WaferType.SD);
  1272. _extraDummyWafers = GetDummyWafers(_lstExtraDummyStocker, pj.ExtraDummySlots.Count(), WaferType.ED);
  1273. _sideDummySlots = pj.SideDummySlots;
  1274. _extraDummySlots = pj.ExtraDummySlots;
  1275. _productSlots = pj.ProductSlots;
  1276. _monitor1Slots = pj.Monitor1Slots;
  1277. _monitor2Slots = pj.Monitor2Slots;
  1278. _lstCurrentPjStocker.Clear();
  1279. foreach (var s in pj.Stockers)
  1280. {
  1281. var module = GetModule(s.Item1) as SchedulerStocker;
  1282. if (module != null)
  1283. _lstCurrentPjStocker.Add(module);
  1284. }
  1285. }
  1286. }
  1287. else
  1288. {
  1289. if (!SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1290. {
  1291. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  1292. for (int i = 0; i < wafers.Count; i++)
  1293. {
  1294. var wafer = wafers[i];
  1295. if (wafer == null || wafer.IsEmpty)
  1296. continue;
  1297. if (wafer.WaferType != WaferType.ED && wafer.WaferType != WaferType.SD)
  1298. continue;
  1299. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  1300. }
  1301. }
  1302. ActiveProcessJob(cjActived, pj);
  1303. }
  1304. break;
  1305. }
  1306. }
  1307. if (_lstControlJobs.Count > 1 && pj != null)
  1308. {
  1309. var second = GetSecondlyProcessJob();
  1310. if (second != null && second.IsEmptyLayout && !second.IsStandbyStarted &&
  1311. (pj.ProcessingState == EnumProcessingState.Cooling || pj.ProcessingState == EnumProcessingState.Discharging))
  1312. {
  1313. foreach (var pm in _lstPms)
  1314. {
  1315. if (pm.IsAvailable)
  1316. {
  1317. _dbCallback.PjCreated(second);
  1318. _dbCallback.PjStart();
  1319. pm.Standby(second.ProcessRecipe);
  1320. second.IsStandbyStarted = true;
  1321. }
  1322. }
  1323. }
  1324. }
  1325. }
  1326. private bool ActiveProcessJob(ControlJobInfo cj, ProcessJobInfo pj)
  1327. {
  1328. //_dbCallback.JobCreated(cj, pj);
  1329. pj.SetState(EnumProcessJobState.Processing);
  1330. pj.ProcessingState = EnumProcessingState.Charging;
  1331. pj.BeginTime = DateTime.Now;
  1332. if (pj.IsN2PurgeMode)
  1333. {
  1334. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1335. //pmModule?.SetN2PurgeProcess(true);
  1336. //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  1337. // pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  1338. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  1339. {
  1340. pmModule?.SetN2PurgeProcess(true);
  1341. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  1342. }
  1343. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  1344. {
  1345. var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);
  1346. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  1347. pmModule.RestAllN2PrugeRD();
  1348. }
  1349. }
  1350. foreach (var pm in _lstPms)
  1351. {
  1352. if (pm.IsAvailable)
  1353. {
  1354. _dbCallback.PjCreated(pj);
  1355. _dbCallback.PjStart();
  1356. pm.Standby(pj.ProcessRecipe);
  1357. pj.IsStandbyStarted = true;
  1358. }
  1359. }
  1360. return true;
  1361. }
  1362. #endregion Job task
  1363. #region Module task
  1364. public Result MonitorModuleTasks()
  1365. {
  1366. MonitorFIMSTask();
  1367. MonitorWaferRobotTask();
  1368. MonitorCarrierRobotTask();
  1369. MonitorPMTask();
  1370. return Result.RUN;
  1371. }
  1372. private void MonitorWaferRobotTask()
  1373. {
  1374. if (!_waferRobot.IsAvailable)
  1375. return;
  1376. foreach (var fims in _lstFIMSs)
  1377. {
  1378. if (fims.IsWaitTransfer(ModuleName.WaferRobot))
  1379. {
  1380. fims.StopWaitTransfer(ModuleName.WaferRobot);
  1381. }
  1382. }
  1383. foreach (var pm in _lstPms)
  1384. {
  1385. if (pm.IsWaitTransfer(ModuleName.WaferRobot))
  1386. {
  1387. pm.StopWaitTransfer(ModuleName.WaferRobot);
  1388. }
  1389. }
  1390. MonitorWaferRobotFIMSTask();
  1391. if (!_waferRobot.IsAvailable)
  1392. return;
  1393. MonitorWaferRobotPMTask();
  1394. }
  1395. private void MonitorCarrierRobotTask()
  1396. {
  1397. if (!_carrierRobot.IsAvailable)
  1398. return;
  1399. //efem robot is idle, release all the target
  1400. foreach (var fims in _lstFIMSs)
  1401. {
  1402. if (fims.IsWaitTransfer(ModuleName.CarrierRobot))
  1403. {
  1404. fims.StopWaitTransfer(ModuleName.CarrierRobot);
  1405. }
  1406. }
  1407. foreach (var stock in _lstTotlaStockers)
  1408. {
  1409. if (stock.IsWaitTransfer(ModuleName.CarrierRobot))
  1410. {
  1411. stock.StopWaitTransfer(ModuleName.CarrierRobot);
  1412. }
  1413. }
  1414. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1415. if (pj == null || pj.IsEmptyLayout)
  1416. return;
  1417. if (pj.ProcessingState == EnumProcessingState.Discharging)
  1418. {
  1419. //discharge
  1420. DischargingOrderBySort(SC.GetStringValue("System.ChargingOrderBySort"));
  1421. if (!_carrierRobot.IsAvailable)
  1422. return;
  1423. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  1424. MonitorCassetteRobotStockerTaskInDischarge(_lstSideDummyStocker, WaferType.SD, _sideDummySlots);
  1425. if (!_carrierRobot.IsAvailable)
  1426. return;
  1427. MonitorCarrierRobotPickFIMSTask();
  1428. if (!_carrierRobot.IsAvailable)
  1429. return;
  1430. MonitorCarrierRobotPlaceFIMSTaskInDischarge();
  1431. }
  1432. else if (pj.ProcessingState == EnumProcessingState.Charging)
  1433. {
  1434. //charge
  1435. if (pj.IsNeedChargeDummyWafer)
  1436. MonitorCassetteRobotStockerTask(_lstSideDummyStocker, WaferType.SD);
  1437. if (!_carrierRobot.IsAvailable)
  1438. return;
  1439. ChargingOrderBySort(pj, SC.GetStringValue("System.ChargingOrderBySort"));
  1440. if (!_carrierRobot.IsAvailable)
  1441. return;
  1442. MonitorCarrierRobotPickFIMSTask();
  1443. if (!_carrierRobot.IsAvailable)
  1444. return;
  1445. MonitorCarrierRobotPlaceFIMSTaskInCharge();
  1446. }
  1447. else if (pj.ProcessingState == EnumProcessingState.Processing)
  1448. {
  1449. MonitorCarrierRobotPickFIMSTask();
  1450. MonitorCassetteRobotPlaceStockerTask();
  1451. }
  1452. }
  1453. private void MonitorFIMSTask()
  1454. {
  1455. if (!_lstProcessJobs.Any())
  1456. return;
  1457. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1458. if (pj == null || pj.IsEmptyLayout)
  1459. return;
  1460. //load
  1461. if (pj.ProcessingState == EnumProcessingState.Charging)
  1462. {
  1463. foreach (var st in _lstFIMSs)
  1464. {
  1465. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1466. continue;
  1467. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1468. if (!CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Charging"))
  1469. {
  1470. return;
  1471. }
  1472. }
  1473. }
  1474. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1475. {
  1476. //先判断空片的情况,空片的先load
  1477. foreach (var st in _lstFIMSs)
  1478. {
  1479. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1480. continue;
  1481. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1482. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1483. if (wafers != null)
  1484. {
  1485. if (CheckCarrierNoHasEmptySlot(st.Module) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1486. {
  1487. return;
  1488. }
  1489. }
  1490. }
  1491. foreach (var st in _lstFIMSs)
  1492. {
  1493. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1494. continue;
  1495. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1496. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1497. if (carrier != null)
  1498. {
  1499. if (!CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && !fimsDevice.IsLoadCompleted && st.Load(pj.IsN2PurgeMode, "Discharging"))
  1500. {
  1501. return;
  1502. }
  1503. }
  1504. }
  1505. }
  1506. //unload
  1507. if (pj.ProcessingState == EnumProcessingState.Charging)
  1508. {
  1509. foreach (var st in _lstFIMSs)
  1510. {
  1511. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1512. continue;
  1513. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1514. if (CheckCarrierCanPickFromFIMS(st.Module) && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Charging"))
  1515. {
  1516. return;
  1517. }
  1518. }
  1519. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  1520. {
  1521. SchedulerFIMS fims = null;
  1522. foreach (var st in _lstFIMSs)
  1523. {
  1524. if (!st.IsAvailable || CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1525. continue;
  1526. // check FIMS
  1527. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1528. if (fimsDevice.IsUnloadCompleted)
  1529. continue;
  1530. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  1531. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  1532. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  1533. continue;
  1534. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  1535. if (fims != null && slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count && CheckCarrierCanPickFromStocker(ModuleName.CarrierRobot) && fims.Unload(pj.IsN2PurgeMode, "Charging"))
  1536. {
  1537. return;
  1538. }
  1539. }
  1540. }
  1541. }
  1542. else if (pj.ProcessingState == EnumProcessingState.Discharging)
  1543. {
  1544. //先判断满片的情况,满片的先unload
  1545. foreach (var st in _lstFIMSs)
  1546. {
  1547. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1548. continue;
  1549. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1550. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1551. if (carrier != null)
  1552. {
  1553. if (!CheckCarrierHasEmptySlot(st.Module) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1554. {
  1555. return;
  1556. }
  1557. }
  1558. }
  1559. foreach (var st in _lstFIMSs)
  1560. {
  1561. if (!st.IsAvailable || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1562. continue;
  1563. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1564. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1565. if (carrier != null)
  1566. {
  1567. if (CheckCarrierCanPickFromFIMSInDischarge(carrier.InternalModuleName) && _waferRobot.IsAvailable && !fimsDevice.IsUnloadCompleted && st.Unload(pj.IsN2PurgeMode, "Discharging"))
  1568. {
  1569. return;
  1570. }
  1571. }
  1572. }
  1573. }
  1574. }
  1575. private void MonitorWaferRobotPMTask()
  1576. {
  1577. if (!_waferRobot.IsAvailable)
  1578. return;
  1579. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  1580. if (pmModule == null)
  1581. return;
  1582. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1583. if (pj == null || pj.IsEmptyLayout)
  1584. return;
  1585. //place
  1586. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1587. List<int> slots = GetWaferSlots(wafer.WaferType);
  1588. if (!_logTrigDic.ContainsKey("GetWaferSlots(wafer.WaferType)"))
  1589. _logTrigDic.Add("GetWaferSlots(wafer.WaferType)", new R_TRIG());
  1590. _logTrigDic["GetWaferSlots(wafer.WaferType)"].CLK = slots == null;
  1591. if (_logTrigDic["GetWaferSlots(wafer.WaferType)"].Q)
  1592. LOG.Write($"GetWaferSlots(wafer.WaferType) is null");
  1593. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1594. wafer != null && !wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Idle &&
  1595. slots != null)
  1596. {
  1597. Hand placeBlade = Hand.Blade1;
  1598. int placeSlot = -1;
  1599. for (int i = 0; i < slots.Count; i++)
  1600. {
  1601. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1602. continue;
  1603. placeSlot = slots[i];
  1604. placeBlade = Hand.Blade1;
  1605. break;
  1606. }
  1607. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1608. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1609. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1610. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  1611. {
  1612. //check PM
  1613. for (int i = 0; i < slots.Count; i++)
  1614. {
  1615. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1616. continue;
  1617. placeSlot = slots[i];
  1618. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1619. {
  1620. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1621. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1622. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1623. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]))
  1624. {
  1625. placeBlade = Hand.Both;
  1626. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  1627. placeSlot = slots[i + 4];
  1628. }
  1629. }
  1630. break;
  1631. }
  1632. }
  1633. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, placeBlade, placeSlot, EnumTransferType.Place, out string reason) &&
  1634. placeSlot != -1 && _waferRobot.Place(_pm1.Module, placeSlot, placeBlade))
  1635. {
  1636. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1637. return;
  1638. }
  1639. }
  1640. if (!_waferRobot.IsAvailable)
  1641. return;
  1642. //pick
  1643. List<int> targetWaferSlots = GetWaferSlots();
  1644. if (!_logTrigDic.ContainsKey("GetWaferSlots()"))
  1645. _logTrigDic.Add("GetWaferSlots()", new R_TRIG());
  1646. _logTrigDic["GetWaferSlots()"].CLK = targetWaferSlots == null;
  1647. if (_logTrigDic["GetWaferSlots()"].Q)
  1648. LOG.Write($"GetWaferSlots() is null");
  1649. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1650. wafer != null && wafer.IsEmpty && targetWaferSlots != null)
  1651. {
  1652. Hand pickBlade = Hand.Blade1;
  1653. int pickSlot = -1;
  1654. var isEnableDummyWaferDischarge = SC.GetValue<bool>("System.IsEnableDummyWaferDischarge");
  1655. //check PM
  1656. for (int i = 0; i < targetWaferSlots.Count; i++)
  1657. {
  1658. var targetWafer = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i]);
  1659. if (targetWafer == null || targetWafer.IsEmpty || (targetWafer.ProcessState != EnumWaferProcessStatus.Completed &&
  1660. targetWafer.ProcessState != EnumWaferProcessStatus.Abort &&
  1661. targetWafer.ProcessState != EnumWaferProcessStatus.Failed))
  1662. continue;
  1663. if (!isEnableDummyWaferDischarge && (targetWafer.WaferType == WaferType.SD || targetWafer.WaferType == WaferType.ED))
  1664. continue;
  1665. pickSlot = targetWaferSlots[i];
  1666. if (i + 4 < targetWaferSlots.Count && Math.Abs(targetWaferSlots[i] - targetWaferSlots[i + 4]) == 4)
  1667. {
  1668. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 1]) &&
  1669. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 2]) &&
  1670. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 3]) &&
  1671. WaferManager.Instance.CheckHasWafer(_pm1.Module, targetWaferSlots[i + 4]) &&
  1672. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1673. {
  1674. bool isFromTopToBottom = SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom";
  1675. var wafer0 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 4 : 0)]);
  1676. var wafer1 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 3 : 1)]);
  1677. var wafer2 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + 2]);
  1678. var wafer3 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 1 : 3)]);
  1679. var wafer4 = WaferManager.Instance.GetWafer(_pm1.Module, targetWaferSlots[i + (isFromTopToBottom ? 0 : 4)]);
  1680. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1681. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1682. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1683. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4) &&
  1684. wafer0.OriginStation == wafer1.OriginStation &&
  1685. wafer0.OriginStation == wafer2.OriginStation &&
  1686. wafer0.OriginStation == wafer3.OriginStation &&
  1687. wafer0.OriginStation == wafer4.OriginStation &&
  1688. Math.Abs(wafer1.OriginSlot - wafer2.OriginSlot) == 1 &&
  1689. Math.Abs(wafer2.OriginSlot - wafer3.OriginSlot) == 1 &&
  1690. Math.Abs(wafer0.OriginSlot - wafer4.OriginSlot) == 4 &&
  1691. Math.Abs(wafer0.OriginSlot - wafer3.OriginSlot) == 3 &&
  1692. Math.Abs(wafer0.OriginSlot - wafer2.OriginSlot) == 2 &&
  1693. Math.Abs(wafer0.OriginSlot - wafer1.OriginSlot) == 1)
  1694. {
  1695. pickBlade = Hand.Both;
  1696. pickSlot = wafer4.Slot;
  1697. }
  1698. }
  1699. }
  1700. break;
  1701. }
  1702. if (pmModule.CheckReadyForTransfer(_waferRobot.Module, pickBlade, pickSlot, EnumTransferType.Pick, out string reason) &&
  1703. pickSlot != -1 && _waferRobot.Pick(_pm1.Module, pickSlot, pickBlade))
  1704. {
  1705. _pm1.WaitTransfer(ModuleName.WaferRobot);
  1706. }
  1707. }
  1708. }
  1709. private void MonitorWaferRobotFIMSTask()
  1710. {
  1711. if (!_waferRobot.IsAvailable)
  1712. return;
  1713. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  1714. if (pj == null || pj.IsEmptyLayout)
  1715. return;
  1716. //pick
  1717. if (pj.ProcessingState == EnumProcessingState.Charging &&
  1718. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2))
  1719. {
  1720. SchedulerFIMS fims = null;
  1721. List<int> slots = null;
  1722. WaferType waferType = WaferType.None;
  1723. ModuleName currentFims = GetCurrentTransferFims();
  1724. foreach (var st in _lstFIMSs)
  1725. {
  1726. if (!st.IsAvailable)
  1727. continue;
  1728. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1729. continue;
  1730. // check FIMS
  1731. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1732. if (!fimsDevice.IsLoadCompleted)
  1733. continue;
  1734. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1735. if (carrier != null && !carrier.IsEmpty)
  1736. {
  1737. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1738. bool hasWafer = false;
  1739. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1740. if (wafers != null && stockerInfo != null)
  1741. {
  1742. foreach (var wafer in wafers)
  1743. {
  1744. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  1745. continue;
  1746. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  1747. {
  1748. hasWafer = true;
  1749. break;
  1750. }
  1751. }
  1752. }
  1753. if (!hasWafer)
  1754. continue;
  1755. if (currentFims != ModuleName.System && currentFims != st.Module)
  1756. continue;
  1757. GetWaferSlotsAndWaferType(carrier, out slots, out waferType);
  1758. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) < slots.Count)
  1759. {
  1760. fims = st;
  1761. break;
  1762. }
  1763. }
  1764. }
  1765. if (fims != null && slots != null)
  1766. {
  1767. Hand pickBlade = Hand.Blade1;
  1768. int pickSlot = -1;
  1769. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  1770. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  1771. if (WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 0) &&
  1772. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1) &&
  1773. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 3) &&
  1774. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 4))
  1775. {
  1776. //check PM
  1777. for (int i = 0; i < slots.Count; i++)
  1778. {
  1779. if (!WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i]))
  1780. continue;
  1781. if (i + 4 < slots.Count && Math.Abs(slots[i] - slots[i + 4]) == 4)
  1782. {
  1783. if (WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 1]) &&
  1784. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 2]) &&
  1785. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 3]) &&
  1786. WaferManager.Instance.CheckNoWafer(_pm1.Module, slots[i + 4]) &&
  1787. SC.GetValue<bool>($"{_waferRobot.Module}.IsSupport5Wafer"))
  1788. {
  1789. pickBlade = Hand.Both;
  1790. break;
  1791. }
  1792. }
  1793. break;
  1794. }
  1795. //check cassette
  1796. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  1797. if (waferType == WaferType.SD)
  1798. dummyWafers = _sideDummyWafers;
  1799. else if (waferType == WaferType.ED)
  1800. dummyWafers = _extraDummyWafers;
  1801. var wafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  1802. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1803. wafers.Reverse();
  1804. if (wafers != null)
  1805. {
  1806. for (int i = 0; i < wafers.Count; i++)
  1807. {
  1808. if (wafers[i] == null || wafers[i].IsEmpty || wafers[i].ProcessState != EnumWaferProcessStatus.Idle)
  1809. continue;
  1810. if ((wafers[i].WaferType == WaferType.SD || wafers[i].WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafers[i].InnerId.ToString()))
  1811. continue;
  1812. pickSlot = wafers[i].OriginSlot;
  1813. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == pickSlot))//非dummy类型要根据传入的slot按顺序取
  1814. continue;
  1815. if (pickBlade == Hand.Both)
  1816. {
  1817. if (i < SC.GetValue<int>("System.CassetteSlotCount") - 4)
  1818. {
  1819. if (waferType == WaferType.SD || waferType == WaferType.ED)
  1820. {
  1821. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1822. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1823. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1824. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1825. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1826. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))) &&
  1827. dummyWafers.ContainsKey(wafers[i + 1].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 2].InnerId.ToString()) &&
  1828. dummyWafers.ContainsKey(wafers[i + 3].InnerId.ToString()) && dummyWafers.ContainsKey(wafers[i + 4].InnerId.ToString()))
  1829. {
  1830. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1831. pickSlot = wafers[i + 4].OriginSlot;
  1832. break;
  1833. }
  1834. else
  1835. {
  1836. pickBlade = Hand.Blade1;
  1837. break;
  1838. }
  1839. }
  1840. else
  1841. {
  1842. if (!wafers[i + 1].IsEmpty && !wafers[i + 2].IsEmpty && !wafers[i + 3].IsEmpty && !wafers[i + 4].IsEmpty &&
  1843. wafers[i + 1].ProcessState == EnumWaferProcessStatus.Idle &&
  1844. wafers[i + 2].ProcessState == EnumWaferProcessStatus.Idle &&
  1845. wafers[i + 3].ProcessState == EnumWaferProcessStatus.Idle &&
  1846. wafers[i + 4].ProcessState == EnumWaferProcessStatus.Idle &&
  1847. (!stockerInfo.Item3.Any() || (stockerInfo.Item3.Any(x => x == i + 1) && stockerInfo.Item3.Any(x => x == i + 2) && stockerInfo.Item3.Any(x => x == i + 3) && stockerInfo.Item3.Any(x => x == i + 4))))
  1848. {
  1849. if (SC.GetStringValue("System.ChargingOrderFromCassette") == "FromTopToBottom")
  1850. pickSlot = wafers[i + 4].OriginSlot;
  1851. break;
  1852. }
  1853. else
  1854. {
  1855. pickBlade = Hand.Blade1;
  1856. break;
  1857. }
  1858. }
  1859. }
  1860. else
  1861. {
  1862. pickBlade = Hand.Blade1;
  1863. break;
  1864. }
  1865. }
  1866. else
  1867. {
  1868. pickBlade = Hand.Blade1;
  1869. break;
  1870. }
  1871. }
  1872. }
  1873. }
  1874. if (SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping"))
  1875. {
  1876. if (carrier != null && !carrier.IsEmpty && carrier.IsMapped && carrier.IsMapOK &&
  1877. pickSlot != -1 && _pm1.IsAvailable && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1878. {
  1879. fims.WaitTransfer(ModuleName.WaferRobot);
  1880. return;
  1881. }
  1882. }
  1883. else
  1884. {
  1885. if (pickSlot != -1 && _waferRobot.Pick(fims.Module, pickSlot, pickBlade))
  1886. {
  1887. fims.WaitTransfer(ModuleName.WaferRobot);
  1888. }
  1889. }
  1890. }
  1891. }
  1892. if (!_waferRobot.IsAvailable)
  1893. return;
  1894. // mapping
  1895. if (pj.ProcessingState == EnumProcessingState.Charging && SC.GetValue<bool>($"System.IsEnableFIMSChargeMapping") &&
  1896. WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 2) && WaferManager.Instance.CheckNoWafer(ModuleName.WaferRobot, 1))
  1897. {
  1898. foreach (var fims in _lstFIMSs)
  1899. {
  1900. if (!fims.IsAvailable)
  1901. continue;
  1902. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module.ToString(), 0))
  1903. continue;
  1904. // check FIMS
  1905. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{fims.Module}");
  1906. if (!fimsDevice.IsLoadCompleted)
  1907. continue;
  1908. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  1909. if (carrier == null || carrier.IsEmpty || carrier.IsMapped)
  1910. continue;
  1911. var mappingSlot = GetMappingSlot(fims.Module);
  1912. if (_waferRobot.Map(fims.Module, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  1913. {
  1914. fims.WaitTransfer(ModuleName.WaferRobot);
  1915. return;
  1916. }
  1917. }
  1918. }
  1919. if (!_waferRobot.IsAvailable)
  1920. return;
  1921. //place
  1922. var robotWafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1923. if (pj.ProcessingState == EnumProcessingState.Discharging &&
  1924. robotWafer != null && !robotWafer.IsEmpty && (robotWafer.ProcessState == EnumWaferProcessStatus.Completed ||
  1925. robotWafer.ProcessState == EnumWaferProcessStatus.Abort ||
  1926. robotWafer.ProcessState == EnumWaferProcessStatus.Failed))
  1927. {
  1928. SchedulerFIMS fims = null;
  1929. var waferInRobot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2);
  1930. foreach (var st in _lstFIMSs)
  1931. {
  1932. if (!st.IsAvailable)
  1933. continue;
  1934. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  1935. continue;
  1936. // check FIMS
  1937. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  1938. if (!fimsDevice.IsLoadCompleted)
  1939. continue;
  1940. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  1941. if (carrier == null || carrier.IsEmpty)
  1942. continue;
  1943. if ((ModuleName)waferInRobot.OriginStation != carrier.InternalModuleName)
  1944. continue;
  1945. bool hasEmptySlot = false;
  1946. var wafers = WaferManager.Instance.GetWafers(st.Module);
  1947. if (wafers != null)
  1948. {
  1949. foreach (var wafer in wafers)
  1950. {
  1951. if (wafer == null)
  1952. continue;
  1953. if (wafer.IsEmpty)
  1954. {
  1955. hasEmptySlot = true;
  1956. break;
  1957. }
  1958. }
  1959. }
  1960. if (hasEmptySlot)
  1961. {
  1962. fims = st;
  1963. break;
  1964. }
  1965. }
  1966. if (fims != null)
  1967. {
  1968. Hand placeBlade = Hand.Blade1;
  1969. int placeSlot = waferInRobot.OriginSlot;
  1970. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) &&
  1971. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) &&
  1972. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) &&
  1973. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4) &&
  1974. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation &&
  1975. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation &&
  1976. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation &&
  1977. WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation == WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation)
  1978. {
  1979. var tempPlaceSlot = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginSlot;
  1980. if (tempPlaceSlot + 4 < SC.GetValue<int>("System.CassetteSlotCount"))
  1981. {
  1982. if (WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 1) &&
  1983. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 2) &&
  1984. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 3) &&
  1985. WaferManager.Instance.CheckNoWafer(fims.Module, tempPlaceSlot + 4))
  1986. {
  1987. placeBlade = Hand.Both;
  1988. placeSlot = tempPlaceSlot;
  1989. }
  1990. }
  1991. }
  1992. if (placeSlot != -1 && _waferRobot.Place(fims.Module, placeSlot, placeBlade))
  1993. {
  1994. fims.WaitTransfer(ModuleName.WaferRobot);
  1995. }
  1996. }
  1997. }
  1998. }
  1999. private bool CheckWaferSlotsHasWafer(List<int> slots)
  2000. {
  2001. foreach (var slot in slots)
  2002. {
  2003. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  2004. {
  2005. return true;
  2006. }
  2007. }
  2008. return false;
  2009. }
  2010. private List<int> GetWaferSlots()
  2011. {
  2012. List<int> slots = null;
  2013. switch (SC.GetStringValue("System.ChargingOrderBySort"))
  2014. {
  2015. case "ED,P,M":
  2016. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2017. return _monitor1Slots;
  2018. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2019. return _monitor2Slots;
  2020. if (CheckWaferSlotsHasWafer(_productSlots))
  2021. return _productSlots;
  2022. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2023. return _extraDummySlots;
  2024. break;
  2025. case "ED,M,P":
  2026. if (CheckWaferSlotsHasWafer(_productSlots))
  2027. return _productSlots;
  2028. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2029. return _monitor1Slots;
  2030. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2031. return _monitor2Slots;
  2032. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2033. return _extraDummySlots;
  2034. break;
  2035. case "P,ED,M":
  2036. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2037. return _monitor1Slots;
  2038. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2039. return _monitor2Slots;
  2040. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2041. return _extraDummySlots;
  2042. if (CheckWaferSlotsHasWafer(_productSlots))
  2043. return _productSlots;
  2044. break;
  2045. case "P,M,ED":
  2046. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2047. return _extraDummySlots;
  2048. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2049. return _monitor1Slots;
  2050. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2051. return _monitor2Slots;
  2052. if (CheckWaferSlotsHasWafer(_productSlots))
  2053. return _productSlots;
  2054. break;
  2055. case "M,P,ED":
  2056. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2057. return _extraDummySlots;
  2058. if (CheckWaferSlotsHasWafer(_productSlots))
  2059. return _productSlots;
  2060. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2061. return _monitor1Slots;
  2062. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2063. return _monitor2Slots;
  2064. break;
  2065. case "M,ED,P":
  2066. if (CheckWaferSlotsHasWafer(_productSlots))
  2067. return _productSlots;
  2068. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2069. return _extraDummySlots;
  2070. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2071. return _monitor1Slots;
  2072. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2073. return _monitor2Slots;
  2074. break;
  2075. default:
  2076. if (CheckWaferSlotsHasWafer(_monitor1Slots))
  2077. return _monitor1Slots;
  2078. if (CheckWaferSlotsHasWafer(_monitor2Slots))
  2079. return _monitor2Slots;
  2080. if (CheckWaferSlotsHasWafer(_productSlots))
  2081. return _productSlots;
  2082. if (CheckWaferSlotsHasWafer(_extraDummySlots))
  2083. return _extraDummySlots;
  2084. break;
  2085. }
  2086. foreach (var slot in _sideDummySlots)
  2087. {
  2088. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slot))
  2089. {
  2090. return _sideDummySlots;
  2091. }
  2092. }
  2093. return slots;
  2094. }
  2095. private bool CheckCarrierHasWaferInPM(ModuleName module)
  2096. {
  2097. bool isHaveWafer = false;
  2098. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2099. {
  2100. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  2101. continue;
  2102. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2103. if (wafer == null || wafer.IsEmpty)
  2104. continue;
  2105. if (wafer.OriginStation == (int)module)
  2106. {
  2107. isHaveWafer = true;
  2108. break;
  2109. }
  2110. }
  2111. return isHaveWafer;
  2112. }
  2113. private void DischargingOrderBySort(string order)
  2114. {
  2115. switch (order)
  2116. {
  2117. case "ED,P,M":
  2118. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2119. if (!_carrierRobot.IsAvailable)
  2120. return;
  2121. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2122. if (!_carrierRobot.IsAvailable)
  2123. return;
  2124. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2125. if (!_carrierRobot.IsAvailable)
  2126. return;
  2127. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2128. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2129. break;
  2130. case "ED,M,P":
  2131. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2132. if (!_carrierRobot.IsAvailable)
  2133. return;
  2134. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2135. if (!_carrierRobot.IsAvailable)
  2136. return;
  2137. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2138. if (!_carrierRobot.IsAvailable)
  2139. return;
  2140. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2141. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2142. break;
  2143. case "P,ED,M":
  2144. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2145. if (!_carrierRobot.IsAvailable)
  2146. return;
  2147. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2148. if (!_carrierRobot.IsAvailable)
  2149. return;
  2150. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2151. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2152. if (!_carrierRobot.IsAvailable)
  2153. return;
  2154. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2155. break;
  2156. case "P,M,ED":
  2157. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2158. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2159. if (!_carrierRobot.IsAvailable)
  2160. return;
  2161. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2162. if (!_carrierRobot.IsAvailable)
  2163. return;
  2164. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2165. if (!_carrierRobot.IsAvailable)
  2166. return;
  2167. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2168. break;
  2169. case "M,P,ED":
  2170. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2171. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2172. if (!_carrierRobot.IsAvailable)
  2173. return;
  2174. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2175. if (!_carrierRobot.IsAvailable)
  2176. return;
  2177. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2178. if (!_carrierRobot.IsAvailable)
  2179. return;
  2180. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2181. if (!_carrierRobot.IsAvailable)
  2182. return;
  2183. break;
  2184. case "M,ED,P":
  2185. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2186. if (!_carrierRobot.IsAvailable)
  2187. return;
  2188. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2189. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2190. if (!_carrierRobot.IsAvailable)
  2191. return;
  2192. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2193. if (!_carrierRobot.IsAvailable)
  2194. return;
  2195. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2196. if (!_carrierRobot.IsAvailable)
  2197. return;
  2198. break;
  2199. default:
  2200. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M1, _monitor1Slots);
  2201. if (!_carrierRobot.IsAvailable)
  2202. return;
  2203. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.M2, _monitor2Slots);
  2204. if (!_carrierRobot.IsAvailable)
  2205. return;
  2206. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.P, _productSlots);
  2207. if (!_carrierRobot.IsAvailable)
  2208. return;
  2209. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  2210. MonitorCassetteRobotStockerTaskInDischarge(_lstTotlaStockers, WaferType.ED, _extraDummySlots);
  2211. break;
  2212. }
  2213. }
  2214. private void ChargingOrderBySort(ProcessJobInfo pj, string order)
  2215. {
  2216. List<SchedulerStocker> pjStocker = new List<SchedulerStocker>();
  2217. foreach (var s in pj.Stockers)
  2218. {
  2219. var module = GetModule(s.Item1) as SchedulerStocker;
  2220. if (module != null)
  2221. pjStocker.Add(module);
  2222. }
  2223. switch (order)
  2224. {
  2225. case "ED,P,M":
  2226. if (pj.IsNeedChargeDummyWafer)
  2227. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2228. if (!_carrierRobot.IsAvailable)
  2229. return;
  2230. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2231. if (!_carrierRobot.IsAvailable)
  2232. return;
  2233. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2234. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2235. break;
  2236. case "ED,M,P":
  2237. if (pj.IsNeedChargeDummyWafer)
  2238. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2239. if (!_carrierRobot.IsAvailable)
  2240. return;
  2241. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2242. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2243. if (!_carrierRobot.IsAvailable)
  2244. return;
  2245. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2246. break;
  2247. case "P,ED,M":
  2248. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2249. if (!_carrierRobot.IsAvailable)
  2250. return;
  2251. if (pj.IsNeedChargeDummyWafer)
  2252. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2253. if (!_carrierRobot.IsAvailable)
  2254. return;
  2255. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2256. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2257. break;
  2258. case "P,M,ED":
  2259. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2260. if (!_carrierRobot.IsAvailable)
  2261. return;
  2262. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2263. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2264. if (!_carrierRobot.IsAvailable)
  2265. return;
  2266. if (pj.IsNeedChargeDummyWafer)
  2267. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2268. break;
  2269. case "M,P,ED":
  2270. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2271. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2272. if (!_carrierRobot.IsAvailable)
  2273. return;
  2274. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2275. if (!_carrierRobot.IsAvailable)
  2276. return;
  2277. if (pj.IsNeedChargeDummyWafer)
  2278. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2279. break;
  2280. case "M,ED,P":
  2281. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2282. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2283. if (!_carrierRobot.IsAvailable)
  2284. return;
  2285. if (pj.IsNeedChargeDummyWafer)
  2286. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2287. if (!_carrierRobot.IsAvailable)
  2288. return;
  2289. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2290. break;
  2291. default:
  2292. if (pj.IsNeedChargeDummyWafer)
  2293. MonitorCassetteRobotStockerTask(_lstExtraDummyStocker, WaferType.ED);
  2294. if (!_carrierRobot.IsAvailable)
  2295. return;
  2296. MonitorCassetteRobotStockerTask(pjStocker, WaferType.P);
  2297. if (!_carrierRobot.IsAvailable)
  2298. return;
  2299. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M1);
  2300. MonitorCassetteRobotStockerTask(pjStocker, WaferType.M2);
  2301. break;
  2302. }
  2303. }
  2304. private void MonitorCassetteRobotStockerTaskInDischarge(List<SchedulerStocker> targetStockers, WaferType targetWaferType, List<int> waferSlots)
  2305. {
  2306. if (!_carrierRobot.IsAvailable)
  2307. return;
  2308. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2309. //pick
  2310. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && waferSlots.Count > 0)
  2311. {
  2312. bool needPickSdCassette = false;
  2313. int sdWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType, true);
  2314. needPickSdCassette = sdWaferCount > 0;
  2315. var sdStockerModule = GetModuleNameForNextWafer(targetWaferType);
  2316. if (needPickSdCassette && sdStockerModule != ModuleName.System)
  2317. {
  2318. SchedulerStocker sdStocker = null;
  2319. foreach (var sd in targetStockers)
  2320. {
  2321. if (!CarrierManager.Instance.CheckHasCarrier(sd.Module, 0) ||
  2322. CarrierManager.Instance.GetCarrier(sd.Module, 0).CarrierType != targetCarrierType)
  2323. continue;
  2324. if (sd.Module == sdStockerModule &&
  2325. CheckCarrierHasEmptySlot(sd.Module))
  2326. {
  2327. sdStocker = sd;
  2328. break;
  2329. }
  2330. }
  2331. SchedulerFIMS fims = null;
  2332. foreach (var st in _lstFIMSs)
  2333. {
  2334. if (!st.IsAvailable)
  2335. continue;
  2336. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2337. {
  2338. fims = st;
  2339. break;
  2340. }
  2341. }
  2342. if (sdStocker != null && fims != null)
  2343. {
  2344. if (_carrierRobot.Pick(sdStocker.Module, 0, Hand.Blade1))
  2345. {
  2346. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2347. return;
  2348. }
  2349. }
  2350. }
  2351. }
  2352. if (!_carrierRobot.IsAvailable)
  2353. return;
  2354. //place
  2355. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2356. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2357. {
  2358. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName) || !CheckCarrierHasEmptySlot(ModuleName.CarrierRobot))
  2359. {
  2360. SchedulerStocker sdStocker = null;
  2361. foreach (var sd in targetStockers)
  2362. {
  2363. if (CarrierManager.Instance.CheckNoCarrier(sd.Module, 0) && sd.Module == carrier.InternalModuleName)
  2364. {
  2365. sdStocker = sd;
  2366. break;
  2367. }
  2368. }
  2369. if (sdStocker != null)
  2370. {
  2371. var canPlace = true;
  2372. var transfer = Singleton<EquipmentManager>.Instance.GetTransferJobStockers();
  2373. if (transfer != null && transfer.Any(x => x.Stocker == carrier.InternalModuleName))
  2374. canPlace = false;
  2375. if (canPlace && _carrierRobot.Place(sdStocker.Module, 0, Hand.Blade1))
  2376. {
  2377. sdStocker.WaitTransfer(ModuleName.CarrierRobot);
  2378. return;
  2379. }
  2380. }
  2381. }
  2382. }
  2383. }
  2384. private bool CheckCarrierCanPickFromFIMSInDischarge(ModuleName fimsCarrierModule)
  2385. {
  2386. List<ModuleName> robotModules = new List<ModuleName>();
  2387. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2388. {
  2389. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2390. if (wafer == null || wafer.IsEmpty)
  2391. continue;
  2392. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2393. robotModules.Add((ModuleName)wafer.OriginStation);
  2394. }
  2395. if (robotModules.Contains(fimsCarrierModule))
  2396. return false;
  2397. List<ModuleName> pmModules = new List<ModuleName>();
  2398. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2399. {
  2400. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2401. if (wafer == null || wafer.IsEmpty)
  2402. continue;
  2403. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2404. pmModules.Add((ModuleName)wafer.OriginStation);
  2405. }
  2406. if (pmModules.Contains(fimsCarrierModule))
  2407. return false;
  2408. return true;
  2409. }
  2410. private ModuleName GetNextStockerRelatedToWaferRobot()
  2411. {
  2412. List<ModuleName> fimsModules = new List<ModuleName>();
  2413. foreach (var fims in _lstFIMSs)
  2414. {
  2415. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  2416. continue;
  2417. fimsModules.Add(CarrierManager.Instance.GetCarrier(fims.Module, 0).InternalModuleName);
  2418. }
  2419. List<ModuleName> robotModules = new List<ModuleName>();
  2420. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  2421. {
  2422. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  2423. if (wafer == null || wafer.IsEmpty)
  2424. continue;
  2425. if (!robotModules.Contains((ModuleName)wafer.OriginStation))
  2426. robotModules.Add((ModuleName)wafer.OriginStation);
  2427. }
  2428. if (robotModules.Count > 0)
  2429. {
  2430. foreach (var module in robotModules)
  2431. {
  2432. if (!fimsModules.Any(x => x == module))
  2433. return module;
  2434. }
  2435. }
  2436. List<ModuleName> pmModules = new List<ModuleName>();
  2437. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  2438. {
  2439. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  2440. if (wafer == null || wafer.IsEmpty)
  2441. continue;
  2442. if (!pmModules.Contains((ModuleName)wafer.OriginStation))
  2443. pmModules.Add((ModuleName)wafer.OriginStation);
  2444. if (pmModules.Count == _lstFIMSs.Count)
  2445. break;
  2446. }
  2447. if (pmModules.Count > 0)
  2448. {
  2449. foreach (var module in pmModules)
  2450. {
  2451. if (!fimsModules.Any(x => x == module))
  2452. return module;
  2453. }
  2454. }
  2455. return ModuleName.System;
  2456. }
  2457. private void MonitorCassetteRobotPlaceStockerTask()
  2458. {
  2459. if (!_carrierRobot.IsAvailable)
  2460. return;
  2461. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2462. if (pj == null)
  2463. return;
  2464. //place
  2465. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2466. if (carrier != null && !carrier.IsEmpty && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2467. {
  2468. var target = pj.Stockers.Find(x => x.Item1 == carrier.InternalModuleName.ToString());
  2469. if (target != null && CarrierManager.Instance.CheckNoCarrier(target.Item1, 0))
  2470. {
  2471. if (_carrierRobot.Place(ModuleHelper.Converter(target.Item1), 0, Hand.Blade1))
  2472. {
  2473. GetModule(target.Item1).WaitTransfer(ModuleName.CarrierRobot);
  2474. return;
  2475. }
  2476. }
  2477. }
  2478. }
  2479. private void MonitorCassetteRobotStockerTask(List<SchedulerStocker> targetStockers, WaferType targetWaferType)
  2480. {
  2481. if (!_carrierRobot.IsAvailable)
  2482. return;
  2483. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2484. if (pj == null || pj.IsEmptyLayout)
  2485. return;
  2486. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2487. var targetSlots = GetWaferSlots(targetWaferType);
  2488. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  2489. if (targetSlots == null)
  2490. return;
  2491. //pick
  2492. if (CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0) && targetSlots.Count > 0)
  2493. {
  2494. bool needPickTargetCassette = false;
  2495. int targetWaferCount = GetWaferCountRelatedToWaferRobot(targetWaferType);
  2496. if (targetWaferCount < targetSlots.Count)
  2497. needPickTargetCassette = true;
  2498. if (needPickTargetCassette)
  2499. {
  2500. SchedulerStocker targetStocker = null;
  2501. foreach (var target in targetStockers)
  2502. {
  2503. if (CarrierManager.Instance.CheckHasCarrier(target.Module, 0) && !CheckCarrierHasNoWafer(target.Module, targetWaferType) &&
  2504. CarrierManager.Instance.GetCarrier(target.Module).CarrierType == targetCarrierType)
  2505. {
  2506. if (pj.ProcessingState == EnumProcessingState.Charging)
  2507. {
  2508. carrier = CarrierManager.Instance.GetCarrier(target.Module);
  2509. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2510. var wafers = WaferManager.Instance.GetWafers(target.Module);
  2511. if (wafers != null && stockerInfo != null)
  2512. {
  2513. foreach (var wafer in wafers)
  2514. {
  2515. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2516. continue;
  2517. if (!wafer.IsEmpty && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  2518. {
  2519. targetStocker = target;
  2520. break;
  2521. }
  2522. }
  2523. if (targetStocker != null)
  2524. break;
  2525. }
  2526. }
  2527. else
  2528. {
  2529. targetStocker = target;
  2530. break;
  2531. }
  2532. }
  2533. }
  2534. SchedulerFIMS fims = null;
  2535. foreach (var st in _lstFIMSs)
  2536. {
  2537. if (!st.IsAvailable)
  2538. continue;
  2539. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  2540. {
  2541. fims = st;
  2542. break;
  2543. }
  2544. }
  2545. if (targetStocker != null && fims != null)
  2546. {
  2547. switch (targetCarrierType.ToString())
  2548. {
  2549. case "SD":
  2550. _lstPlaceSideDummyStocker.Add(targetStocker);
  2551. break;
  2552. case "ED":
  2553. _lstPlaceExtraDummyStockers.Add(targetStocker);
  2554. break;
  2555. case "P":
  2556. _lstPlaceCurrentBatchStocker.Add(targetStocker);
  2557. break;
  2558. case "M1":
  2559. _lstPlaceMonitor1Stocker.Add(targetStocker);
  2560. break;
  2561. case "M2":
  2562. _lstPlaceMonitor2Stocker.Add(targetStocker);
  2563. break;
  2564. }
  2565. if (_carrierRobot.Pick(targetStocker.Module, 0, Hand.Blade1))
  2566. {
  2567. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2568. return;
  2569. }
  2570. }
  2571. }
  2572. }
  2573. if (!_carrierRobot.IsAvailable)
  2574. return;
  2575. //place
  2576. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2577. if (carrier != null && !carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  2578. {
  2579. var needPlace = false;
  2580. if (pj.ProcessingState == EnumProcessingState.Charging)
  2581. {
  2582. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2583. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2584. if (wafers != null && stockerInfo != null)
  2585. {
  2586. foreach (var wafer in wafers)
  2587. {
  2588. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2589. continue;
  2590. if (stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2591. {
  2592. needPlace = true;
  2593. break;
  2594. }
  2595. }
  2596. }
  2597. }
  2598. if (GetWaferCountRelatedToWaferRobot(targetWaferType) >= targetSlots.Count || CheckCarrierHasNoWafer(ModuleName.CarrierRobot, targetWaferType) || needPlace)
  2599. {
  2600. switch (targetCarrierType.ToString())
  2601. {
  2602. case "SD":
  2603. targetStockers = _lstPlaceSideDummyStocker;
  2604. break;
  2605. case "ED":
  2606. targetStockers = _lstPlaceExtraDummyStockers;
  2607. break;
  2608. case "P":
  2609. targetStockers = _lstPlaceCurrentBatchStocker;
  2610. break;
  2611. case "M1":
  2612. targetStockers = _lstPlaceMonitor1Stocker;
  2613. break;
  2614. case "M2":
  2615. targetStockers = _lstPlaceMonitor2Stocker;
  2616. break;
  2617. }
  2618. SchedulerStocker targetStocker = null;
  2619. foreach (var target in targetStockers)
  2620. {
  2621. if (CarrierManager.Instance.CheckNoCarrier(target.Module, 0) && carrier.InternalModuleName == target.Module)
  2622. {
  2623. if (pj.ProcessingState == EnumProcessingState.Charging)
  2624. {
  2625. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2626. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  2627. if (wafers != null && stockerInfo != null)
  2628. {
  2629. var hasWafer = false;
  2630. foreach (var wafer in wafers)
  2631. {
  2632. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2633. continue;
  2634. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2635. {
  2636. hasWafer = true;
  2637. break;
  2638. }
  2639. }
  2640. if (!hasWafer)
  2641. {
  2642. targetStocker = target;
  2643. break;
  2644. }
  2645. }
  2646. }
  2647. else
  2648. {
  2649. targetStocker = target;
  2650. break;
  2651. }
  2652. }
  2653. }
  2654. if (targetStocker != null)
  2655. {
  2656. if (_carrierRobot.Place(targetStocker.Module, 0, Hand.Blade1))
  2657. {
  2658. targetStocker.WaitTransfer(ModuleName.CarrierRobot);
  2659. return;
  2660. }
  2661. }
  2662. }
  2663. }
  2664. }
  2665. private bool CheckCarrierCanPickFromStocker(ModuleName currentModule)
  2666. {
  2667. var currentWafers = WaferManager.Instance.GetWafers(currentModule);
  2668. if (currentWafers != null && !currentWafers.Any(x => !x.IsEmpty))
  2669. {
  2670. //空盒子
  2671. return false;
  2672. }
  2673. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2674. var ret = CheckHasPWafer();
  2675. var waferTypeSlots = GetWaferTypeSlots();
  2676. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2677. {
  2678. Dictionary<WaferType, int> nextWaferTypeDic = new Dictionary<WaferType, int>();
  2679. int startIndex = -1;
  2680. for (int i = 0; i < waferTypeSlots.Count; i++)
  2681. {
  2682. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2683. {
  2684. startIndex = i;
  2685. continue;
  2686. }
  2687. //P wafer不够的情况
  2688. if (waferTypeSlots[i].Item1 == WaferType.P)
  2689. {
  2690. if (!ret.Item1)
  2691. continue;
  2692. else
  2693. {
  2694. if (i - startIndex > ret.Item2)
  2695. continue;
  2696. }
  2697. }
  2698. if (!nextWaferTypeDic.ContainsKey(waferTypeSlots[i].Item1))
  2699. nextWaferTypeDic.Add(waferTypeSlots[i].Item1, 0);
  2700. nextWaferTypeDic[waferTypeSlots[i].Item1] += 1;
  2701. if (nextWaferTypeDic.Count == _lstFIMSs.Count)
  2702. break;
  2703. if (i - startIndex >= _lstFIMSs.Count * 25)
  2704. break;
  2705. }
  2706. Dictionary<WaferType, int> fimsWaferTypeDic = new Dictionary<WaferType, int>();
  2707. foreach (var fims in _lstFIMSs)
  2708. {
  2709. if (CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  2710. {
  2711. for (int i = 0; i < WaferManager.Instance.GetWafers(fims.Module).Length; i++)
  2712. {
  2713. var wafer = WaferManager.Instance.GetWafer(fims.Module, i);
  2714. if (wafer == null || wafer.IsEmpty)
  2715. continue;
  2716. if (!fimsWaferTypeDic.ContainsKey(wafer.WaferType))
  2717. fimsWaferTypeDic.Add(wafer.WaferType, 0);
  2718. fimsWaferTypeDic[wafer.WaferType] += 1;
  2719. }
  2720. }
  2721. }
  2722. foreach (var type in nextWaferTypeDic.Keys)
  2723. {
  2724. if (carrierType.ToString() == type.ToString())
  2725. {
  2726. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2727. {
  2728. if (!fimsWaferTypeDic.ContainsKey(type) || nextWaferTypeDic[type] > fimsWaferTypeDic[type])
  2729. return true;
  2730. }
  2731. else if (type == WaferType.SD)
  2732. {
  2733. foreach (var wafer in currentWafers)
  2734. {
  2735. if (wafer.IsEmpty)
  2736. continue;
  2737. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2738. return true;
  2739. }
  2740. }
  2741. else if (type == WaferType.ED)
  2742. {
  2743. foreach (var wafer in currentWafers)
  2744. {
  2745. if (wafer.IsEmpty)
  2746. continue;
  2747. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2748. return true;
  2749. }
  2750. }
  2751. }
  2752. }
  2753. }
  2754. return false;
  2755. }
  2756. private bool CheckCarrierCanPickFromFIMS(ModuleName currentModule)
  2757. {
  2758. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2759. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2760. {
  2761. //空盒子
  2762. return true;
  2763. }
  2764. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2765. if (pj == null)
  2766. return true;
  2767. var carrier = CarrierManager.Instance.GetCarrier(currentModule, 0);
  2768. var carrierType = carrier.CarrierType;
  2769. if (!pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()))
  2770. return true;
  2771. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2772. GetWaferSlotsAndWaferType(carrier, out var slots, out var waferType);
  2773. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  2774. if (waferType == WaferType.SD)
  2775. dummyWafers = _sideDummyWafers;
  2776. else if (waferType == WaferType.ED)
  2777. dummyWafers = _extraDummyWafers;
  2778. if (stockerInfo != null)
  2779. {
  2780. var hasWafer = false;
  2781. foreach (var wafer in fimsWafers)
  2782. {
  2783. if (wafer == null || wafer.IsEmpty || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  2784. continue;
  2785. if (stockerInfo.Item3.Any() && stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2786. {
  2787. hasWafer = true;
  2788. break;
  2789. }
  2790. if (!stockerInfo.Item3.Any())
  2791. {
  2792. if (slots != null && slots.Count > 0)
  2793. {
  2794. for (int i = 0; i < slots.Count; i++)
  2795. {
  2796. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, slots[i]))
  2797. {
  2798. continue;
  2799. }
  2800. if ((wafer.WaferType == WaferType.SD || wafer.WaferType == WaferType.ED) && !dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2801. continue;
  2802. return false;
  2803. }
  2804. }
  2805. }
  2806. }
  2807. if (hasWafer)
  2808. return false;
  2809. }
  2810. return true;
  2811. var ret = CheckHasPWafer();
  2812. var waferTypeSlots = GetWaferTypeSlots();
  2813. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2814. {
  2815. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2816. int startIndex = -1;
  2817. for (int i = 0; i < waferTypeSlots.Count; i++)
  2818. {
  2819. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2820. {
  2821. startIndex = i;
  2822. continue;
  2823. }
  2824. //P wafer不够的情况
  2825. if (waferTypeSlots[i].Item1 == WaferType.P)
  2826. {
  2827. if (!ret.Item1)
  2828. continue;
  2829. else
  2830. {
  2831. if (i - startIndex > ret.Item2)
  2832. continue;
  2833. }
  2834. }
  2835. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2836. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2837. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2838. break;
  2839. if (i - startIndex >= _lstFIMSs.Count * 25)
  2840. break;
  2841. }
  2842. foreach (var type in nextWaferTypeLst)
  2843. {
  2844. if (carrierType.ToString() == type.ToString())
  2845. {
  2846. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2847. return false;
  2848. else if (type == WaferType.SD)
  2849. {
  2850. foreach (var wafer in fimsWafers)
  2851. {
  2852. if (wafer.IsEmpty)
  2853. continue;
  2854. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2855. return false;
  2856. }
  2857. }
  2858. else if (type == WaferType.ED)
  2859. {
  2860. foreach (var wafer in fimsWafers)
  2861. {
  2862. if (wafer.IsEmpty)
  2863. continue;
  2864. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2865. return false;
  2866. }
  2867. }
  2868. }
  2869. }
  2870. }
  2871. return true;
  2872. }
  2873. private bool CheckCarrierCanPlaceToStocker(ModuleName currentModule)
  2874. {
  2875. var fimsWafers = WaferManager.Instance.GetWafers(currentModule);
  2876. if (fimsWafers != null && !fimsWafers.Any(x => !x.IsEmpty))
  2877. {
  2878. //空盒子
  2879. return true;
  2880. }
  2881. var carrierType = CarrierManager.Instance.GetCarrier(currentModule, 0).CarrierType;
  2882. var ret = CheckHasPWafer();
  2883. var waferTypeSlots = GetWaferTypeSlots();
  2884. if (waferTypeSlots != null && waferTypeSlots.Count > 0)
  2885. {
  2886. List<WaferType> nextWaferTypeLst = new List<WaferType>();
  2887. int startIndex = -1;
  2888. for (int i = 0; i < waferTypeSlots.Count; i++)
  2889. {
  2890. if (WaferManager.Instance.CheckHasWafer(_pm1.Module, waferTypeSlots[i].Item2))
  2891. {
  2892. startIndex = i;
  2893. continue;
  2894. }
  2895. //P wafer不够的情况
  2896. if (waferTypeSlots[i].Item1 == WaferType.P)
  2897. {
  2898. if (!ret.Item1)
  2899. continue;
  2900. else
  2901. {
  2902. if (i - startIndex > ret.Item2)
  2903. continue;
  2904. }
  2905. }
  2906. if (!nextWaferTypeLst.Contains(waferTypeSlots[i].Item1))
  2907. nextWaferTypeLst.Add(waferTypeSlots[i].Item1);
  2908. if (nextWaferTypeLst.Count == _lstFIMSs.Count)
  2909. break;
  2910. if (i - startIndex >= _lstFIMSs.Count * 25)
  2911. break;
  2912. }
  2913. foreach (var type in nextWaferTypeLst)
  2914. {
  2915. if (carrierType.ToString() == type.ToString())
  2916. {
  2917. if (type == WaferType.P || type == WaferType.M1 || type == WaferType.M2)
  2918. return false;
  2919. else if (type == WaferType.SD)
  2920. {
  2921. foreach (var wafer in fimsWafers)
  2922. {
  2923. if (wafer.IsEmpty)
  2924. continue;
  2925. if (_sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2926. return false;
  2927. }
  2928. }
  2929. else if (type == WaferType.ED)
  2930. {
  2931. foreach (var wafer in fimsWafers)
  2932. {
  2933. if (wafer.IsEmpty)
  2934. continue;
  2935. if (_extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  2936. return false;
  2937. }
  2938. }
  2939. }
  2940. }
  2941. }
  2942. return true;
  2943. }
  2944. private void MonitorCarrierRobotPickFIMSTask()
  2945. {
  2946. if (!_carrierRobot.IsAvailable)
  2947. return;
  2948. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  2949. if (pj == null)
  2950. return;
  2951. //pick
  2952. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  2953. if (carrier != null && carrier.IsEmpty)
  2954. {
  2955. SchedulerFIMS fims = null;
  2956. foreach (var st in _lstFIMSs)
  2957. {
  2958. if (!st.IsAvailable)
  2959. continue;
  2960. // check FIMS
  2961. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  2962. if (!fimsDevice.IsUnloadCompleted)
  2963. continue;
  2964. if (CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  2965. {
  2966. carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  2967. if (carrier != null)
  2968. {
  2969. if (pj.ProcessingState == EnumProcessingState.Discharging)
  2970. {
  2971. //discharge
  2972. if (!CheckCarrierHasEmptySlot(st.Module))
  2973. {
  2974. fims = st;
  2975. break;
  2976. }
  2977. if (!CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  2978. {
  2979. fims = st;
  2980. break;
  2981. }
  2982. }
  2983. else if (pj.ProcessingState == EnumProcessingState.Charging)
  2984. {
  2985. //charge
  2986. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  2987. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  2988. var wafers = WaferManager.Instance.GetWafers(st.Module);
  2989. if (wafers != null && stockerInfo != null)
  2990. {
  2991. bool isEmpty = true;
  2992. foreach (var wafer in wafers)
  2993. {
  2994. if (!wafer.IsEmpty)
  2995. {
  2996. if (stockerInfo.Item3.Any())
  2997. {
  2998. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  2999. {
  3000. isEmpty = false;
  3001. break;
  3002. }
  3003. }
  3004. else
  3005. {
  3006. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3007. {
  3008. isEmpty = false;
  3009. break;
  3010. }
  3011. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3012. {
  3013. isEmpty = false;
  3014. break;
  3015. }
  3016. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3017. {
  3018. isEmpty = false;
  3019. break;
  3020. }
  3021. }
  3022. }
  3023. }
  3024. if (isEmpty)
  3025. {
  3026. fims = st;
  3027. break;
  3028. }
  3029. }
  3030. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) >= slots.Count)
  3031. {
  3032. fims = st;
  3033. break;
  3034. }
  3035. }
  3036. else if (pj.ProcessingState == EnumProcessingState.Processing)
  3037. {
  3038. foreach (var bf in pj.Stockers)
  3039. {
  3040. if (CarrierManager.Instance.CheckHasCarrier(bf.Item1, 0))
  3041. continue;
  3042. if (bf.Item1 == carrier.InternalModuleName.ToString())
  3043. {
  3044. fims = st;
  3045. break;
  3046. }
  3047. }
  3048. }
  3049. }
  3050. }
  3051. }
  3052. if (fims != null)
  3053. {
  3054. if (_carrierRobot.Pick(fims.Module, 0, Hand.Blade1))
  3055. {
  3056. fims.WaitTransfer(ModuleName.CarrierRobot);
  3057. return;
  3058. }
  3059. }
  3060. }
  3061. if (!_carrierRobot.IsAvailable)
  3062. return;
  3063. }
  3064. private void MonitorCarrierRobotPlaceFIMSTaskInCharge()
  3065. {
  3066. if (!_carrierRobot.IsAvailable)
  3067. return;
  3068. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3069. if (pj == null)
  3070. return;
  3071. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3072. //place
  3073. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3074. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3075. if (carrier != null && !carrier.IsEmpty && stockerInfo != null)
  3076. {
  3077. SchedulerFIMS fims = null;
  3078. foreach (var st in _lstFIMSs)
  3079. {
  3080. if (!st.IsAvailable)
  3081. continue;
  3082. // check FIMS
  3083. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3084. if (!fimsDevice.IsUnloadCompleted)
  3085. continue;
  3086. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3087. {
  3088. GetWaferSlotsAndWaferType(carrier, out List<int> slots, out WaferType waferType);
  3089. if (slots != null && GetWaferCountRelatedToWaferRobot(waferType, false) <= slots.Count)
  3090. {
  3091. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3092. foreach (var wafer in wafers)
  3093. {
  3094. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3095. {
  3096. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3097. continue;
  3098. fims = st;
  3099. break;
  3100. }
  3101. }
  3102. }
  3103. if (fims != null)
  3104. break;
  3105. }
  3106. }
  3107. if (fims != null)
  3108. {
  3109. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3110. {
  3111. fims.WaitTransfer(ModuleName.CarrierRobot);
  3112. return;
  3113. }
  3114. }
  3115. }
  3116. }
  3117. private void MonitorCarrierRobotPlaceFIMSTaskInDischarge()
  3118. {
  3119. if (!_carrierRobot.IsAvailable)
  3120. return;
  3121. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3122. if (pj == null)
  3123. return;
  3124. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3125. //place
  3126. carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3127. if (carrier != null && !carrier.IsEmpty && CheckCarrierHasEmptySlot(ModuleName.CarrierRobot) && CheckModuleHasWaferInWaferRobotAndPM(carrier.InternalModuleName))
  3128. {
  3129. SchedulerFIMS fims = null;
  3130. foreach (var st in _lstFIMSs)
  3131. {
  3132. if (!st.IsAvailable)
  3133. continue;
  3134. // check FIMS
  3135. var fimsDevice = DEVICE.GetDevice<IoFIMS>($"PM1.{st.Module}");
  3136. if (!fimsDevice.IsUnloadCompleted)
  3137. continue;
  3138. if (CarrierManager.Instance.CheckNoCarrier(st.Module, 0))
  3139. {
  3140. fims = st;
  3141. break;
  3142. }
  3143. }
  3144. if (fims != null)
  3145. {
  3146. if (_carrierRobot.Place(fims.Module, 0, Hand.Blade1))
  3147. {
  3148. fims.WaitTransfer(ModuleName.CarrierRobot);
  3149. return;
  3150. }
  3151. }
  3152. }
  3153. }
  3154. private bool CheckCarrierHasNoWafer(ModuleName module, WaferType waferType)
  3155. {
  3156. bool isEmpty = true;
  3157. var wafers = WaferManager.Instance.GetWafers(module);
  3158. if (wafers != null)
  3159. {
  3160. foreach (var wafer in wafers)
  3161. {
  3162. if (!wafer.IsEmpty)
  3163. {
  3164. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3165. {
  3166. isEmpty = false;
  3167. break;
  3168. }
  3169. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3170. {
  3171. isEmpty = false;
  3172. break;
  3173. }
  3174. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3175. {
  3176. isEmpty = false;
  3177. break;
  3178. }
  3179. }
  3180. }
  3181. }
  3182. return isEmpty;
  3183. }
  3184. private Dictionary<string, int> GetDummyWafers(List<SchedulerStocker> targetStockers, int needWaferCount, WaferType waferType)
  3185. {
  3186. Dictionary<string, int> dummyWafers = new Dictionary<string, int>();
  3187. float useCountMin = GetWaferUseCountMin(targetStockers, waferType);
  3188. float useCountMax = GetWaferUseCountMax(targetStockers, waferType);
  3189. int range = (int)(useCountMax - useCountMin);
  3190. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), waferType.ToString()));
  3191. for (int i = 0; i <= range; i++)
  3192. {
  3193. foreach (var target in targetStockers)
  3194. {
  3195. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  3196. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  3197. continue;
  3198. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3199. if (wafers != null)
  3200. {
  3201. foreach (var wafer in wafers)
  3202. {
  3203. if (wafer.IsEmpty)
  3204. continue;
  3205. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3206. {
  3207. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3208. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3209. }
  3210. }
  3211. }
  3212. }
  3213. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3214. {
  3215. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  3216. if (carrier.CarrierType == targetCarrierType)
  3217. {
  3218. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3219. if (wafers != null)
  3220. {
  3221. foreach (var wafer in wafers)
  3222. {
  3223. if (wafer.IsEmpty)
  3224. continue;
  3225. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3226. {
  3227. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3228. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3229. }
  3230. }
  3231. }
  3232. }
  3233. }
  3234. foreach (var fims in _lstFIMSs)
  3235. {
  3236. if (!fims.IsOnline)
  3237. continue;
  3238. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3239. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  3240. {
  3241. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3242. if (wafers != null)
  3243. {
  3244. foreach (var wafer in wafers)
  3245. {
  3246. if (wafer.IsEmpty)
  3247. continue;
  3248. if (wafer.UseCount <= useCountMin && dummyWafers.Count() < needWaferCount)
  3249. {
  3250. if (!dummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3251. dummyWafers.Add(wafer.InnerId.ToString(), wafer.OriginStation);
  3252. }
  3253. }
  3254. }
  3255. }
  3256. }
  3257. if (dummyWafers.Count() < needWaferCount)
  3258. useCountMin++;
  3259. else
  3260. break;
  3261. }
  3262. return dummyWafers;
  3263. }
  3264. private float GetWaferUseCountMin(List<SchedulerStocker> targetStockers, WaferType waferType)
  3265. {
  3266. float iUseCountMin = 10000;
  3267. foreach (var target in targetStockers)
  3268. {
  3269. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3270. if (wafers == null)
  3271. continue;
  3272. foreach (var wafer in wafers)
  3273. {
  3274. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3275. continue;
  3276. if (wafer.UseCount < iUseCountMin)
  3277. iUseCountMin = wafer.UseCount;
  3278. }
  3279. }
  3280. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3281. {
  3282. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3283. foreach (var wafer in wafers)
  3284. {
  3285. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3286. continue;
  3287. if (wafer.UseCount < iUseCountMin)
  3288. iUseCountMin = wafer.UseCount;
  3289. }
  3290. }
  3291. foreach (var fims in _lstFIMSs)
  3292. {
  3293. if (!fims.IsOnline)
  3294. continue;
  3295. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3296. foreach (var wafer in wafers)
  3297. {
  3298. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3299. continue;
  3300. if (wafer.UseCount < iUseCountMin)
  3301. iUseCountMin = wafer.UseCount;
  3302. }
  3303. }
  3304. return iUseCountMin;
  3305. }
  3306. private float GetWaferUseCountMax(List<SchedulerStocker> targetStockers, WaferType waferType)
  3307. {
  3308. float iUseCountMax = 0;
  3309. foreach (var target in targetStockers)
  3310. {
  3311. var wafers = WaferManager.Instance.GetWafers(target.Module);
  3312. if (wafers == null)
  3313. continue;
  3314. foreach (var wafer in wafers)
  3315. {
  3316. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3317. continue;
  3318. if (wafer.UseCount >= iUseCountMax)
  3319. iUseCountMax = wafer.UseCount;
  3320. }
  3321. }
  3322. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3323. {
  3324. var wafers = WaferManager.Instance.GetWafers(ModuleName.CarrierRobot);
  3325. foreach (var wafer in wafers)
  3326. {
  3327. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3328. continue;
  3329. if (wafer.UseCount >= iUseCountMax)
  3330. iUseCountMax = wafer.UseCount;
  3331. }
  3332. }
  3333. foreach (var fims in _lstFIMSs)
  3334. {
  3335. if (!fims.IsOnline)
  3336. continue;
  3337. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3338. foreach (var wafer in wafers)
  3339. {
  3340. if (wafer.IsEmpty || wafer.WaferType != waferType)
  3341. continue;
  3342. if (wafer.UseCount >= iUseCountMax)
  3343. iUseCountMax = wafer.UseCount;
  3344. }
  3345. }
  3346. return iUseCountMax;
  3347. }
  3348. private ModuleName GetModuleNameForNextWafer(WaferType waferType)
  3349. {
  3350. ModuleName module = ModuleName.System;
  3351. bool hasEmptyFims = false;
  3352. foreach (var fims in _lstFIMSs)
  3353. {
  3354. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3355. {
  3356. hasEmptyFims = true;
  3357. break;
  3358. }
  3359. }
  3360. if (!hasEmptyFims)
  3361. return module;
  3362. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0))
  3363. {
  3364. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0).OriginStation;
  3365. }
  3366. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1))
  3367. {
  3368. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1).OriginStation;
  3369. }
  3370. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2))
  3371. {
  3372. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 2).OriginStation;
  3373. }
  3374. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3))
  3375. {
  3376. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 3).OriginStation;
  3377. }
  3378. else if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  3379. {
  3380. module = (ModuleName)WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 4).OriginStation;
  3381. }
  3382. else
  3383. {
  3384. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3385. {
  3386. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3387. {
  3388. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3389. continue;
  3390. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3391. if (wafer == null || wafer.IsEmpty)
  3392. continue;
  3393. if (wafer.WaferType == waferType)
  3394. {
  3395. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3396. break;
  3397. }
  3398. }
  3399. }
  3400. else
  3401. {
  3402. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3403. {
  3404. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3405. continue;
  3406. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3407. if (wafer == null || wafer.IsEmpty)
  3408. continue;
  3409. if (wafer.WaferType == waferType)
  3410. {
  3411. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3412. break;
  3413. }
  3414. }
  3415. }
  3416. }
  3417. //下一片要放回的cassette已经在fims上
  3418. bool isCarrierAlreadyPicked = false;
  3419. foreach (var fims in _lstFIMSs)
  3420. {
  3421. if (!CarrierManager.Instance.CheckHasCarrier(fims.Module, 0))
  3422. continue;
  3423. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  3424. if (carrier != null && carrier.InternalModuleName == module)
  3425. {
  3426. isCarrierAlreadyPicked = true;
  3427. }
  3428. }
  3429. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  3430. {
  3431. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
  3432. if (carrier != null && carrier.InternalModuleName == module)
  3433. {
  3434. isCarrierAlreadyPicked = true;
  3435. }
  3436. }
  3437. if (isCarrierAlreadyPicked)
  3438. {
  3439. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3440. {
  3441. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  3442. {
  3443. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3444. continue;
  3445. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3446. if (wafer == null || wafer.IsEmpty)
  3447. continue;
  3448. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3449. {
  3450. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3451. break;
  3452. }
  3453. }
  3454. }
  3455. else
  3456. {
  3457. for (int i = SC.GetValue<int>($"Boat.SlotCount") - 1; i >= 0; i--)
  3458. {
  3459. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  3460. continue;
  3461. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3462. if (wafer == null || wafer.IsEmpty)
  3463. continue;
  3464. if (wafer.WaferType == waferType && (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation != module)
  3465. {
  3466. module = (ModuleName)WaferManager.Instance.GetWafer(_pm1.Module, i).OriginStation;
  3467. break;
  3468. }
  3469. }
  3470. }
  3471. }
  3472. return module;
  3473. }
  3474. private int GetWaferCountRelatedToWaferRobot(WaferType waferType, bool includeFims = true)
  3475. {
  3476. int count = 0;
  3477. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3478. if (pj == null || pj.IsEmptyLayout)
  3479. return count;
  3480. if (includeFims)
  3481. {
  3482. foreach (var fims in _lstFIMSs)
  3483. {
  3484. if (CarrierManager.Instance.CheckNoCarrier(fims.Module, 0))
  3485. continue;
  3486. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  3487. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  3488. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  3489. foreach (var wafer in wafers)
  3490. {
  3491. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3492. {
  3493. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3494. continue;
  3495. if (waferType == WaferType.P || waferType == WaferType.M1 || waferType == WaferType.M2)
  3496. count++;
  3497. else if (waferType == WaferType.SD && _sideDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3498. count++;
  3499. else if (waferType == WaferType.ED && _extraDummyWafers.ContainsKey(wafer.InnerId.ToString()))
  3500. count++;
  3501. }
  3502. }
  3503. }
  3504. }
  3505. for (int i = 0; i < WaferManager.Instance.GetWafers(ModuleName.WaferRobot).Length; i++)
  3506. {
  3507. var wafer = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, i);
  3508. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3509. {
  3510. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  3511. if (pj.ProcessingState == EnumProcessingState.Charging && stockerInfo != null && stockerInfo.Item3.Any() && !stockerInfo.Item3.Any(x => x == wafer.OriginSlot))
  3512. continue;
  3513. count++;
  3514. }
  3515. }
  3516. for (int i = 0; i < WaferManager.Instance.GetWafers(_pm1.Module).Length; i++)
  3517. {
  3518. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  3519. if (!wafer.IsEmpty && wafer.WaferType == waferType)
  3520. count++;
  3521. }
  3522. return count;
  3523. }
  3524. private void GetWaferSlotsAndWaferType(CarrierInfo carrier, out List<int> slots, out WaferType waferType)
  3525. {
  3526. slots = null;
  3527. waferType = WaferType.None;
  3528. if (carrier != null && !carrier.IsEmpty)
  3529. {
  3530. switch (carrier.CarrierType)
  3531. {
  3532. case CarrierType.SD:
  3533. slots = _sideDummySlots;
  3534. waferType = WaferType.SD;
  3535. break;
  3536. case CarrierType.ED:
  3537. slots = _extraDummySlots;
  3538. waferType = WaferType.ED;
  3539. break;
  3540. case CarrierType.M1:
  3541. slots = _monitor1Slots;
  3542. waferType = WaferType.M1;
  3543. break;
  3544. case CarrierType.M2:
  3545. slots = _monitor2Slots;
  3546. waferType = WaferType.M2;
  3547. break;
  3548. case CarrierType.P:
  3549. slots = _productSlots;
  3550. waferType = WaferType.P;
  3551. break;
  3552. }
  3553. }
  3554. }
  3555. private bool CheckCarrierHasEmptySlot(ModuleName module)
  3556. {
  3557. bool hasEmpty = false;
  3558. var wafers = WaferManager.Instance.GetWafers(module);
  3559. if (wafers != null)
  3560. {
  3561. foreach (var wafer in wafers)
  3562. {
  3563. if (wafer.IsEmpty)
  3564. {
  3565. hasEmpty = true;
  3566. break;
  3567. }
  3568. }
  3569. }
  3570. return hasEmpty;
  3571. }
  3572. private bool CheckCarrierNoHasEmptySlot(ModuleName module)
  3573. {
  3574. bool noHasEmpty = true;
  3575. var wafers = WaferManager.Instance.GetWafers(module);
  3576. if (wafers != null)
  3577. {
  3578. foreach (var wafer in wafers)
  3579. {
  3580. if (!wafer.IsEmpty)
  3581. {
  3582. noHasEmpty = false;
  3583. break;
  3584. }
  3585. }
  3586. }
  3587. return noHasEmpty;
  3588. }
  3589. private bool CheckModuleHasWaferInWaferRobotAndPM(ModuleName module)
  3590. {
  3591. bool isHaveWafer = false;
  3592. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  3593. if (wafers != null)
  3594. {
  3595. foreach (var wafer in wafers)
  3596. {
  3597. if (wafer == null || wafer.IsEmpty)
  3598. continue;
  3599. if (wafer.OriginStation == (int)module)
  3600. {
  3601. isHaveWafer = true;
  3602. break;
  3603. }
  3604. }
  3605. }
  3606. wafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot).ToList();
  3607. if (wafers != null)
  3608. {
  3609. foreach (var wafer in wafers)
  3610. {
  3611. if (wafer == null || wafer.IsEmpty)
  3612. continue;
  3613. if (wafer.OriginStation == (int)module)
  3614. {
  3615. isHaveWafer = true;
  3616. break;
  3617. }
  3618. }
  3619. }
  3620. return isHaveWafer;
  3621. }
  3622. private bool CheckWaferStatus(List<Tuple<string, string, List<int>>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  3623. {
  3624. reason = string.Empty;
  3625. if (SC.GetValue<bool>("System.IsCycleMode"))
  3626. {
  3627. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3628. {
  3629. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3630. continue;
  3631. var wafers = WaferManager.Instance.GetWafers(module);
  3632. if (wafers == null)
  3633. continue;
  3634. foreach (var wafer in wafers)
  3635. {
  3636. if (wafer.IsEmpty)
  3637. continue;
  3638. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3639. }
  3640. }
  3641. }
  3642. else
  3643. {
  3644. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  3645. {
  3646. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  3647. continue;
  3648. var stockerInfo = useStockers.FirstOrDefault(x => x.Item1 == module.ToString());
  3649. var wafers = WaferManager.Instance.GetWafers(module);
  3650. if (wafers == null || stockerInfo == null)
  3651. continue;
  3652. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  3653. {
  3654. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  3655. {
  3656. reason = $"{module} has failed wafers.";
  3657. return false;
  3658. }
  3659. }
  3660. foreach (var wafer in wafers)
  3661. {
  3662. if (wafer.IsEmpty)
  3663. continue;
  3664. if (wafer.ProcessState != EnumWaferProcessStatus.Idle && SC.GetValue<bool>("System.EnableWarningWaferProcessState") && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  3665. {
  3666. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  3667. {
  3668. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3669. return false;
  3670. }
  3671. if (isNeedCheckMonitor)
  3672. {
  3673. if (wafer.WaferType == WaferType.M2 || wafer.WaferType == WaferType.M || wafer.WaferType == WaferType.M1)
  3674. {
  3675. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  3676. return false;
  3677. }
  3678. }
  3679. }
  3680. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  3681. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  3682. }
  3683. }
  3684. }
  3685. return true;
  3686. }
  3687. private Tuple<bool, int> CheckHasPWafer()
  3688. {
  3689. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3690. if (pj == null || pj.Stockers == null)
  3691. return Tuple.Create(false, 0);
  3692. int countP = 0;
  3693. foreach (var stocker in pj.Stockers)
  3694. {
  3695. var wafers = WaferManager.Instance.GetWafersByOriginalPosition(ModuleHelper.Converter(stocker.Item1));
  3696. foreach (var wafer in wafers)
  3697. {
  3698. if (!wafer.IsEmpty && wafer.WaferType == WaferType.P && wafer.Station != (int)ModuleName.PM1)
  3699. {
  3700. countP++;
  3701. }
  3702. }
  3703. }
  3704. return Tuple.Create(countP > 0, countP);
  3705. }
  3706. //返回下一片要放的wafer的slot和type
  3707. private int GetNextWaferSlot(out WaferType waferType)
  3708. {
  3709. var waferTypeSlots = GetWaferTypeSlots();
  3710. waferType = WaferType.None;
  3711. var ret = CheckHasPWafer();
  3712. int slot = -1;
  3713. if (waferTypeSlots != null)
  3714. {
  3715. for (int i = 0; i < waferTypeSlots.Count; i++)
  3716. {
  3717. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3718. {
  3719. continue;
  3720. }
  3721. //针对P wafer不够的情况
  3722. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3723. continue;
  3724. slot = waferTypeSlots[i].Item2;
  3725. waferType = waferTypeSlots[i].Item1;
  3726. break;
  3727. }
  3728. }
  3729. return slot;
  3730. }
  3731. //返回下一片要放的wafer的type,需要除去当前在机械手上的wafer
  3732. private WaferType GetNextWaferType()
  3733. {
  3734. var ret = CheckHasPWafer();
  3735. var waferTypeSlots = GetWaferTypeSlots();
  3736. WaferType waferType = WaferType.None;
  3737. if (waferTypeSlots != null)
  3738. {
  3739. for (int i = 0; i < waferTypeSlots.Count; i++)
  3740. {
  3741. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3742. {
  3743. continue;
  3744. }
  3745. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3746. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3747. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3748. i++;
  3749. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3750. i++;
  3751. //机械手wafer放过去就放满了
  3752. if (i >= waferTypeSlots.Count)
  3753. {
  3754. break;
  3755. }
  3756. //针对P wafer不够的情况
  3757. if (!ret.Item1 && waferTypeSlots[i].Item1 == WaferType.P)
  3758. continue;
  3759. waferType = waferTypeSlots[i].Item1;
  3760. break;
  3761. }
  3762. }
  3763. return waferType;
  3764. }
  3765. private ModuleName GetCurrentTransferFims()
  3766. {
  3767. ModuleName currentFims = ModuleName.System;
  3768. foreach (var st in _lstFIMSs)
  3769. {
  3770. if (!st.IsAvailable)
  3771. continue;
  3772. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3773. continue;
  3774. var carrier = CarrierManager.Instance.GetCarrier(st.Module, 0);
  3775. if (carrier != null && !carrier.IsEmpty)
  3776. {
  3777. bool hasWafer = false;
  3778. var wafers = WaferManager.Instance.GetWafers(st.Module);
  3779. if (wafers != null)
  3780. {
  3781. foreach (var wafer in wafers)
  3782. {
  3783. if (wafer == null || wafer.IsEmpty)
  3784. continue;
  3785. if (!wafer.IsEmpty)
  3786. {
  3787. hasWafer = true;
  3788. break;
  3789. }
  3790. }
  3791. }
  3792. if (hasWafer && CheckCarrierHasWaferInPM(carrier.InternalModuleName))
  3793. {
  3794. currentFims = st.Module;
  3795. break;
  3796. };
  3797. }
  3798. }
  3799. return currentFims;
  3800. }
  3801. private List<int> GetWaferSlots(out WaferType waferType)
  3802. {
  3803. var waferTypeSlots = GetWaferTypeSlots();
  3804. waferType = WaferType.None;
  3805. var slots = new List<int>();
  3806. if (waferTypeSlots != null)
  3807. {
  3808. List<Tuple<ModuleName, WaferType, int>> fimsWaferInforLst = new List<Tuple<ModuleName, WaferType, int>>();
  3809. foreach (var st in _lstFIMSs)
  3810. {
  3811. if (!CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  3812. continue;
  3813. var fimsWafers = WaferManager.Instance.GetWafers(st.Module);
  3814. int waferCountFIMS = 0;
  3815. WaferType waferTypeFIMS = WaferType.None;
  3816. if (fimsWafers != null)
  3817. {
  3818. foreach (var fimsWafer in fimsWafers)
  3819. {
  3820. if (!fimsWafer.IsEmpty)
  3821. {
  3822. waferTypeFIMS = fimsWafer.WaferType;
  3823. if (fimsWafer.WaferType == WaferType.P || fimsWafer.WaferType == WaferType.M1 || fimsWafer.WaferType == WaferType.M2)
  3824. {
  3825. waferCountFIMS++;
  3826. }
  3827. else if (fimsWafer.WaferType == WaferType.SD && _sideDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3828. {
  3829. waferCountFIMS++;
  3830. }
  3831. else if (fimsWafer.WaferType == WaferType.ED && _extraDummyWafers.ContainsKey(fimsWafer.InnerId.ToString()))
  3832. {
  3833. waferCountFIMS++;
  3834. }
  3835. }
  3836. }
  3837. }
  3838. if (waferCountFIMS > 0)
  3839. fimsWaferInforLst.Add(Tuple.Create(st.Module, waferTypeFIMS, waferCountFIMS));
  3840. }
  3841. //两个FIMS都有Carrier,直接返回
  3842. if (_lstFIMSs.Count == fimsWaferInforLst.Count)
  3843. return slots;
  3844. //FIMS有空的,才继续
  3845. int startIndex = 0;
  3846. for (int i = 0; i < waferTypeSlots.Count; i++)
  3847. {
  3848. if (WaferManager.Instance.CheckHasWafer(ModuleName.PM1, waferTypeSlots[i].Item2))
  3849. {
  3850. continue;
  3851. }
  3852. var wafer0 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 0);
  3853. var wafer1 = WaferManager.Instance.GetWafer(ModuleName.WaferRobot, 1);
  3854. if (i < waferTypeSlots.Count && wafer0 != null && !wafer0.IsEmpty && wafer0.WaferType == waferTypeSlots[i].Item1)
  3855. i++;
  3856. if (i >= waferTypeSlots.Count)
  3857. break;
  3858. if (i < waferTypeSlots.Count && wafer1 != null && !wafer1.IsEmpty && wafer1.WaferType == waferTypeSlots[i].Item1)
  3859. i++;
  3860. if (i >= waferTypeSlots.Count)
  3861. break;
  3862. if (fimsWaferInforLst.Count > 0)
  3863. {
  3864. var fimsWaferInfor = fimsWaferInforLst.FirstOrDefault(x => x.Item2 == waferTypeSlots[i].Item1);
  3865. if (fimsWaferInfor != null)
  3866. {
  3867. for (; i < waferTypeSlots.Count;)
  3868. {
  3869. if (i >= waferTypeSlots.Count)
  3870. break;
  3871. if (waferTypeSlots[i].Item1 == fimsWaferInfor.Item2)
  3872. i++;
  3873. else
  3874. break;
  3875. }
  3876. }
  3877. }
  3878. if (i >= waferTypeSlots.Count)
  3879. {
  3880. i = waferTypeSlots.Count - 1;
  3881. }
  3882. startIndex = i;
  3883. waferType = waferTypeSlots[i].Item1;
  3884. break;
  3885. }
  3886. for (int i = startIndex; i < waferTypeSlots.Count; i++)
  3887. {
  3888. if (waferTypeSlots[i].Item1 != waferType)
  3889. {
  3890. break;
  3891. }
  3892. slots.Add(waferTypeSlots[i].Item2);
  3893. }
  3894. }
  3895. return slots;
  3896. }
  3897. private List<int> GetWaferSlots(WaferType waferType)
  3898. {
  3899. var slots = new List<int>();
  3900. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  3901. if (pj == null)
  3902. return null;
  3903. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out string reason))
  3904. {
  3905. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3906. return null;
  3907. }
  3908. switch (waferType)
  3909. {
  3910. case WaferType.SD:
  3911. return pj.SideDummySlots;
  3912. case WaferType.ED:
  3913. return pj.ExtraDummySlots;
  3914. case WaferType.M1:
  3915. return pj.Monitor1Slots;
  3916. case WaferType.M2:
  3917. return pj.Monitor2Slots;
  3918. case WaferType.P:
  3919. return pj.ProductSlots;
  3920. }
  3921. return null;
  3922. }
  3923. private List<int> GetWaferSlots(RecipeLayoutEntityExpert layoutRecipeDataExpert, WaferType waferType)
  3924. {
  3925. var slots = new List<int>();
  3926. if (layoutRecipeDataExpert == null)
  3927. return null;
  3928. var type = "";
  3929. switch (waferType)
  3930. {
  3931. case WaferType.SD:
  3932. type = "sd";
  3933. break;
  3934. case WaferType.ED:
  3935. type = "fd";
  3936. break;
  3937. case WaferType.M1:
  3938. type = "m1";
  3939. break;
  3940. case WaferType.M2:
  3941. type = "m2";
  3942. break;
  3943. case WaferType.P:
  3944. type = "pd";
  3945. break;
  3946. }
  3947. if (layoutRecipeDataExpert != null)
  3948. {
  3949. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  3950. {
  3951. if (layoutRecipeDataExpert.Items[i].ToLower() == type)
  3952. {
  3953. slots.Add(i);
  3954. }
  3955. }
  3956. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  3957. {
  3958. slots.Sort((x, y) => -x.CompareTo(y));//降序
  3959. }
  3960. else
  3961. {
  3962. slots.Sort((x, y) => x.CompareTo(y));//升序
  3963. }
  3964. }
  3965. return slots;
  3966. }
  3967. #region charge rule
  3968. private bool CheckChargeRule(ProcessJobInfo pj, out bool waferShort, bool needCheckPWafer, bool needCheckMWafer, out string reason)
  3969. {
  3970. waferShort = false;
  3971. //needCheckPWafer = false;
  3972. reason = string.Empty;
  3973. if (!RecipeParser.LayoutRecipeParse(pj.LayoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  3974. {
  3975. //Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load layout recipe {pj.LayoutRecipe} failed, {reason}");
  3976. return false;
  3977. }
  3978. if (!CheckLayoutParameter(layoutRecipeDataNormal, out reason))
  3979. {
  3980. return false;
  3981. }
  3982. int iCassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  3983. if (iCassetteSlotCount == 0)
  3984. {
  3985. reason = "System.CassetteSlotCount not valid";
  3986. return false;
  3987. }
  3988. int iSlotCount = SC.GetValue<int>($"Boat.SlotCount");
  3989. var productSlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.P);
  3990. var monitor1Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M1);
  3991. var monitor2Slots = GetWaferSlots(layoutRecipeDataExpert, WaferType.M2);
  3992. var sideDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.SD);
  3993. var extraDummySlots = GetWaferSlots(layoutRecipeDataExpert, WaferType.ED);
  3994. int iNeedCassetteNum;
  3995. var temp = (float)productSlots.Count / iCassetteSlotCount;
  3996. iNeedCassetteNum = (int)Math.Ceiling(temp);
  3997. int iCurrentCassetteNum = GetCurrentCassetteNum(pj, WaferType.P);
  3998. int iDummyUpper = int.Parse(layoutRecipeDataNormal.DummyUpperSlot);
  3999. int iDummyLower = int.Parse(layoutRecipeDataNormal.DummyLowerSlot);
  4000. int iNeedPWaferNum = productSlots.Count;
  4001. int iNeedM1WaferNum = monitor1Slots.Count;
  4002. int iNeedM2WaferNum = monitor2Slots.Count;
  4003. int iNeedSDWaferNum = sideDummySlots.Count;
  4004. int iNeedEDWaferNum = extraDummySlots.Count;
  4005. int iCurrentPWaferNum = GetCurrentWaferNum(pj, WaferType.P, out bool pSlotSelect);
  4006. int iCurrentSDWaferNum = GetCurrentDummyWaferNum(WaferType.SD);
  4007. int iCurrentM1WaferNum = GetCurrentWaferNum(pj, WaferType.M1, out bool m1SlotSelect);
  4008. int iCurrentM2WaferNum = GetCurrentWaferNum(pj, WaferType.M2, out bool m2SlotSelect);
  4009. int iCurrentEDWaferNum = GetCurrentDummyWaferNum(WaferType.ED);
  4010. //if (iNeedMWaferNum > iCurrentMWaferNum)
  4011. //{
  4012. // reason = "monitor wafer are short.";
  4013. // return false;
  4014. //}
  4015. //if (iNeedSDWaferNum > iCurrentSDWaferNum)
  4016. //{
  4017. // reason = "dummy wafer are short.";
  4018. // return false;
  4019. //}
  4020. //if (iNeedEDWaferNum > iCurrentEDWaferNum)
  4021. //{
  4022. // reason = "extra dummy wafer are short.";
  4023. // return false;
  4024. //}
  4025. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4026. {
  4027. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4028. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4029. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4030. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4031. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4032. }
  4033. else
  4034. {
  4035. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4036. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4037. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4038. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4039. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4040. }
  4041. pj.SideDummySlots = sideDummySlots;
  4042. pj.ExtraDummySlots = extraDummySlots;
  4043. pj.Monitor1Slots = monitor1Slots;
  4044. pj.Monitor2Slots = monitor2Slots;
  4045. pj.ProductSlots = productSlots;
  4046. bool bM1Short = false;
  4047. bool bM2Short = false;
  4048. if (needCheckMWafer)
  4049. {
  4050. bM1Short = GetRemainWaferNum(pj, WaferType.M1) < 0 && monitor1Slots.Count > 0;
  4051. bM2Short = GetRemainWaferNum(pj, WaferType.M2) < 0 && monitor2Slots.Count > 0;
  4052. if (monitor1Slots.Count > 0 && m1SlotSelect && iCurrentM1WaferNum != monitor1Slots.Count)
  4053. {
  4054. reason = $"layout recipe M1 wafer number={iCurrentM1WaferNum}, current M1 wafer number={monitor1Slots.Count}, not match";
  4055. return false;
  4056. }
  4057. if (monitor2Slots.Count > 0 && m2SlotSelect && iCurrentM2WaferNum != monitor2Slots.Count)
  4058. {
  4059. reason = $"layout recipe M2 wafer number={iCurrentM2WaferNum}, current M2 wafer number={monitor2Slots.Count}, not match";
  4060. return false;
  4061. }
  4062. if (bM1Short)
  4063. {
  4064. reason = "M1 wafer are short";
  4065. return false;
  4066. }
  4067. if (bM2Short)
  4068. {
  4069. reason = "M2 wafer are short";
  4070. return false;
  4071. }
  4072. }
  4073. if (!needCheckPWafer)
  4074. return true;
  4075. if (iNeedPWaferNum > iCurrentPWaferNum)
  4076. {
  4077. reason = "layout recipe production wafer number greater than current production wafer number";
  4078. return false;
  4079. }
  4080. if (pSlotSelect && iNeedPWaferNum != iCurrentPWaferNum)
  4081. {
  4082. reason = $"layout recipe production wafer number={iNeedPWaferNum}, current production wafer number={iCurrentPWaferNum}, not match";
  4083. return false;
  4084. }
  4085. //下面charge rule暂时不判断
  4086. return true;
  4087. //if (layoutRecipeDataNormal.ProductPosition.ToLower() == "slot")
  4088. //{
  4089. // if (iNeedPWaferNum <= iCurrentPWaferNum)
  4090. // {
  4091. // return true;
  4092. // }
  4093. // else
  4094. // {
  4095. // reason = "production wafer insufficiency productPos set to slot";
  4096. // return false;
  4097. // }
  4098. //}
  4099. string strWhenCassetteAreShort = layoutRecipeDataNormal.WhenCassetteInBatchAreShort;
  4100. string strWhenPWaferShort = layoutRecipeDataNormal.WhenPWaferShort;
  4101. string strWhenWaferInCassetteAreShort = layoutRecipeDataNormal.WhenWaferInCassetteAreShort;
  4102. string strWhenEDAreShort = layoutRecipeDataNormal.WhenEDAreShort;
  4103. bool bSDMove = layoutRecipeDataNormal.SDRule == "Move";
  4104. bool bBoatSupplyED = layoutRecipeDataNormal.RuleOfSpaceInBoat == "SupplyED" && !bSDMove;
  4105. bool bEDShort = false;
  4106. List<string> adjustedSlot = new List<string>();
  4107. for (int i = 0; i < layoutRecipeDataExpert.Items.Count; i++)
  4108. {
  4109. adjustedSlot.Add(layoutRecipeDataExpert.Items[i]);
  4110. }
  4111. bool bCassetteSuppleED;
  4112. bool bWaferSuppleED;
  4113. if (iNeedPWaferNum > iCurrentPWaferNum)
  4114. {
  4115. // 先判断cassette是否充足,然后再判断P wafers是否充足
  4116. if (iNeedCassetteNum > iCurrentCassetteNum)
  4117. {
  4118. if (strWhenCassetteAreShort != "LeaveAs" && strWhenCassetteAreShort != "SupplyED")
  4119. {
  4120. reason = "cassette in batch are short";
  4121. return true;
  4122. }
  4123. else
  4124. {
  4125. bCassetteSuppleED = strWhenCassetteAreShort == "SupplyED";
  4126. // 重新计算需要的P wafers
  4127. iNeedPWaferNum = iNeedPWaferNum - (iNeedCassetteNum - iCurrentCassetteNum) * iCassetteSlotCount;
  4128. // 判断P wafers是否充足
  4129. if (iNeedPWaferNum > iCurrentPWaferNum)
  4130. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4131. if (strWhenPWaferShort == "LeaveAs")
  4132. {
  4133. if (strWhenWaferInCassetteAreShort != "LeaveAs" && strWhenWaferInCassetteAreShort != "SupplyED")
  4134. {
  4135. reason = "wafer in cassette are short";
  4136. return true;
  4137. }
  4138. else
  4139. {
  4140. bWaferSuppleED = strWhenWaferInCassetteAreShort == "SupplyED";
  4141. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4142. }
  4143. }
  4144. else
  4145. {
  4146. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bCassetteSuppleED);
  4147. }
  4148. }
  4149. else
  4150. {
  4151. bWaferSuppleED = false;
  4152. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4153. }
  4154. }
  4155. }
  4156. else
  4157. { // 只有在when P wafer short == leave as 的时候 when wafer in cassette are short 才执行判断
  4158. if (strWhenPWaferShort == "LeaveAs")
  4159. {
  4160. if (strWhenWaferInCassetteAreShort == "LeaveAs")
  4161. {
  4162. }
  4163. else if (strWhenWaferInCassetteAreShort == "SupplyED")
  4164. {
  4165. bCassetteSuppleED = false;
  4166. bWaferSuppleED = true;
  4167. bEDShort = CassetteShortWaferInCassetteShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, bCassetteSuppleED, bWaferSuppleED);
  4168. }
  4169. else
  4170. {
  4171. reason = "wafer in cassette are short";
  4172. return true;
  4173. }
  4174. }
  4175. else
  4176. {
  4177. bWaferSuppleED = false;
  4178. bEDShort = CassetteShortPWaferShort(pj, ref adjustedSlot, ref iCurrentEDWaferNum, layoutRecipeDataNormal, layoutRecipeDataExpert, iCurrentPWaferNum, bWaferSuppleED);
  4179. }
  4180. }
  4181. }
  4182. if (bSDMove)
  4183. {
  4184. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4185. {
  4186. if (adjustedSlot[i] != "")
  4187. {
  4188. for (int j = 0; j < iDummyUpper; j++)
  4189. {
  4190. adjustedSlot[i - j - 1] = "dummy";
  4191. }
  4192. break;
  4193. }
  4194. }
  4195. for (int i = iSlotCount - iDummyLower - 1; i > iDummyUpper; i--)
  4196. {
  4197. if (adjustedSlot[i] != "")
  4198. {
  4199. for (int j = 0; j < iDummyLower; j++)
  4200. {
  4201. adjustedSlot[i + j + 1] = "dummy";
  4202. }
  4203. break;
  4204. }
  4205. }
  4206. }
  4207. else
  4208. {
  4209. if (bBoatSupplyED)
  4210. {
  4211. for (int i = iDummyUpper; i < iSlotCount - iDummyLower; i++)
  4212. {
  4213. if (iCurrentEDWaferNum > 0)
  4214. {
  4215. if (adjustedSlot[i] == "")
  4216. {
  4217. adjustedSlot[i] = "extradummy";
  4218. iCurrentEDWaferNum--;
  4219. }
  4220. }
  4221. else
  4222. {
  4223. bEDShort = true;
  4224. break;
  4225. }
  4226. }
  4227. }
  4228. for (int i = 0; i < iDummyUpper; i++)
  4229. {
  4230. adjustedSlot[i] = "dummy";
  4231. }
  4232. for (int i = iSlotCount - iDummyLower; i < iSlotCount; i++)
  4233. {
  4234. adjustedSlot[i] = "dummy";
  4235. }
  4236. }
  4237. if (bEDShort)
  4238. {
  4239. switch (strWhenEDAreShort)
  4240. {
  4241. case "WarningAndContinue":
  4242. case "AbortWhenError":
  4243. reason = "extradummy wafer are short";
  4244. break;
  4245. case "LeaveAs":
  4246. bEDShort = false;
  4247. break;
  4248. }
  4249. }
  4250. sideDummySlots.Clear();
  4251. extraDummySlots.Clear();
  4252. monitor1Slots.Clear();
  4253. monitor2Slots.Clear();
  4254. productSlots.Clear();
  4255. for (int i = 0; i < adjustedSlot.Count; i++)
  4256. {
  4257. if (adjustedSlot[i].ToLower() == "dummy" && iCurrentSDWaferNum > 0)
  4258. {
  4259. sideDummySlots.Add(i);
  4260. iCurrentSDWaferNum--;
  4261. }
  4262. if (adjustedSlot[i].ToLower() == "extradummy")
  4263. {
  4264. extraDummySlots.Add(i);
  4265. }
  4266. if (adjustedSlot[i].ToLower() == "monitor1" && iCurrentM1WaferNum > 0)
  4267. {
  4268. monitor1Slots.Add(i);
  4269. iCurrentM1WaferNum--;
  4270. }
  4271. if (adjustedSlot[i].ToLower() == "monitor2" && iCurrentM2WaferNum > 0)
  4272. {
  4273. monitor2Slots.Add(i);
  4274. iCurrentM2WaferNum--;
  4275. }
  4276. if (adjustedSlot[i].ToLower() == "pd")
  4277. {
  4278. productSlots.Add(i);
  4279. }
  4280. }
  4281. bM1Short = (GetCurrentWaferNum(pj, WaferType.M1, out m1SlotSelect) < monitor1Slots.Count) || monitor1Slots.Count == 0;
  4282. bM2Short = (GetCurrentWaferNum(pj, WaferType.M2, out m2SlotSelect) < monitor2Slots.Count) || monitor2Slots.Count == 0;
  4283. bool bSDShort = (GetCurrentWaferNum(pj, WaferType.SD, out bool sdSlotSelect) < sideDummySlots.Count) || sideDummySlots.Count == 0;
  4284. if (SC.GetValue<bool>("System.IsLeaveAsAllWaferWhenWaferShort"))
  4285. bEDShort = bM1Short = bM2Short = bSDShort = false;
  4286. waferShort = bEDShort || bM1Short || bM2Short || bSDShort;
  4287. if (bM1Short || bM2Short)
  4288. {
  4289. if (reason == string.Empty)
  4290. {
  4291. if (bSDShort)
  4292. {
  4293. reason = "dummy wafer and monitor wafer are short";
  4294. }
  4295. else
  4296. {
  4297. reason = "monitor wafer are short";
  4298. }
  4299. }
  4300. else
  4301. {
  4302. if (bSDShort)
  4303. {
  4304. reason = "extradummy wafer,monitor wafer and dummy wafer are short";
  4305. }
  4306. else
  4307. {
  4308. reason = "extradummy wafer and dummy wafer are short";
  4309. }
  4310. }
  4311. }
  4312. else
  4313. {
  4314. if (reason == string.Empty)
  4315. {
  4316. if (bSDShort)
  4317. {
  4318. reason = "dummy wafer are short";
  4319. }
  4320. }
  4321. else
  4322. {
  4323. if (bSDShort)
  4324. {
  4325. reason = "extradummy wafer and dummy wafer are short";
  4326. }
  4327. }
  4328. }
  4329. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4330. {
  4331. sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4332. extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  4333. monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4334. monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  4335. productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  4336. }
  4337. else
  4338. {
  4339. sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4340. extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  4341. monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  4342. monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  4343. productSlots.Sort((x, y) => x.CompareTo(y));//升序
  4344. }
  4345. pj.SideDummySlots = sideDummySlots;
  4346. pj.ExtraDummySlots = extraDummySlots;
  4347. pj.Monitor1Slots = monitor1Slots;
  4348. pj.Monitor2Slots = monitor2Slots;
  4349. pj.ProductSlots = productSlots;
  4350. return true;
  4351. }
  4352. private bool CheckLayoutParameter(RecipeLayoutEntityNormal layoutRecipeDataNormal, out string reason)
  4353. {
  4354. reason = string.Empty;
  4355. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyUpperSlot))
  4356. {
  4357. reason = "DummyUpper is null";
  4358. return false;
  4359. }
  4360. if (string.IsNullOrEmpty(layoutRecipeDataNormal.DummyLowerSlot))
  4361. {
  4362. reason = "DummyLower is null";
  4363. return false;
  4364. }
  4365. if (string.IsNullOrEmpty(layoutRecipeDataNormal.CenteringSlotPosition))
  4366. {
  4367. reason = "CenteringSlotPosition is null";
  4368. return false;
  4369. }
  4370. //if (string.IsNullOrEmpty(layoutRecipeDataNormal.Pitch))
  4371. //{
  4372. // reason = "Pitch is null";
  4373. // return false;
  4374. //}
  4375. if (string.IsNullOrEmpty(layoutRecipeDataNormal.ProductPosition))
  4376. {
  4377. reason = "ProductPosition is null";
  4378. return false;
  4379. }
  4380. if (string.IsNullOrEmpty(layoutRecipeDataNormal.MonitorPosition))
  4381. {
  4382. reason = "MonitorPosition is null";
  4383. return false;
  4384. }
  4385. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenCassetteInBatchAreShort))
  4386. {
  4387. reason = "WhenCassetteInBatchAreShort is null";
  4388. return false;
  4389. }
  4390. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenPWaferShort))
  4391. {
  4392. reason = "WhenPWaferShort is null";
  4393. return false;
  4394. }
  4395. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenWaferInCassetteAreShort))
  4396. {
  4397. reason = "WhenWaferInCassetteAreShort is null";
  4398. return false;
  4399. }
  4400. if (string.IsNullOrEmpty(layoutRecipeDataNormal.WhenEDAreShort))
  4401. {
  4402. reason = "WhenEDAreShort is null";
  4403. return false;
  4404. }
  4405. if (string.IsNullOrEmpty(layoutRecipeDataNormal.SDRule))
  4406. {
  4407. reason = "SDRule is null";
  4408. return false;
  4409. }
  4410. if (string.IsNullOrEmpty(layoutRecipeDataNormal.RuleOfSpaceInBoat))
  4411. {
  4412. reason = "RuleOfSpaceInBoat is null";
  4413. return false;
  4414. }
  4415. return true;
  4416. }
  4417. private int GetCurrentCassetteNum(ProcessJobInfo pj, WaferType targetWaferType)
  4418. {
  4419. int iCassetteNum = 0;
  4420. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4421. foreach (var target in _lstTotlaStockers)
  4422. {
  4423. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4424. continue;
  4425. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4426. if (!carrier.IsEmpty && carrier.CarrierType == targetCarrierType)
  4427. iCassetteNum++;
  4428. }
  4429. return iCassetteNum;
  4430. }
  4431. private int GetRemainWaferNum(ProcessJobInfo pj, WaferType targetWaferType)
  4432. {
  4433. int iWaferNum = 0;
  4434. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4435. foreach (var target in _lstTotlaStockers)
  4436. {
  4437. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4438. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4439. continue;
  4440. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4441. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()) || stockerInfo == null)
  4442. continue;
  4443. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4444. foreach (var wafer in wafers)
  4445. {
  4446. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4447. iWaferNum++;
  4448. }
  4449. }
  4450. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0))
  4451. {
  4452. var carrier = CarrierManager.Instance.GetCarrier(_carrierRobot.Module);
  4453. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4454. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4455. {
  4456. var wafers = WaferManager.Instance.GetWafers(_carrierRobot.Module);
  4457. foreach (var wafer in wafers)
  4458. {
  4459. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4460. iWaferNum++;
  4461. }
  4462. }
  4463. }
  4464. foreach (var fims in _lstFIMSs)
  4465. {
  4466. if (!fims.IsOnline)
  4467. continue;
  4468. var carrier = CarrierManager.Instance.GetCarrier(fims.Module);
  4469. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == carrier.InternalModuleName.ToString());
  4470. if (carrier.CarrierType == targetCarrierType && pj != null && pj.Stockers.Any(x => x.Item1 == carrier.InternalModuleName.ToString()) && stockerInfo != null)
  4471. {
  4472. var wafers = WaferManager.Instance.GetWafers(fims.Module);
  4473. foreach (var wafer in wafers)
  4474. {
  4475. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4476. iWaferNum++;
  4477. }
  4478. }
  4479. }
  4480. {
  4481. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  4482. foreach (var wafer in wafers)
  4483. {
  4484. if (wafer == null || wafer.IsEmpty || wafer.WaferType != targetWaferType)
  4485. continue;
  4486. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString());
  4487. if (stockerInfo != null && pj != null && pj.Stockers.Any(x => x.Item1 == ((ModuleName)wafer.OriginStation).ToString()) && (!stockerInfo.Item3.Any() || stockerInfo.Item3.Any(x => x == wafer.OriginSlot)))
  4488. iWaferNum++;
  4489. }
  4490. }
  4491. var useCount = 0;
  4492. if (targetWaferType == WaferType.M1)
  4493. useCount = pj.Monitor1Slots.Count;
  4494. if (targetWaferType == WaferType.M2)
  4495. useCount = pj.Monitor2Slots.Count;
  4496. return iWaferNum - useCount;
  4497. }
  4498. private int GetCurrentWaferNum(ProcessJobInfo pj, WaferType targetWaferType, out bool isSlotSelect)
  4499. {
  4500. int iWaferNum = 0;
  4501. isSlotSelect = false;
  4502. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4503. foreach (var target in _lstTotlaStockers)
  4504. {
  4505. var carrier = CarrierManager.Instance.GetCarrier(target.Module);
  4506. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4507. continue;
  4508. if (pj == null || !pj.Stockers.Any(x => x.Item1 == target.Module.ToString()))
  4509. continue;
  4510. var stockerInfo = pj.Stockers.FirstOrDefault(x => x.Item1 == target.Module.ToString());
  4511. var wafers = WaferManager.Instance.GetWafers(target.Module);
  4512. foreach (var wafer in wafers)
  4513. {
  4514. if (!stockerInfo.Item3.Any() && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4515. iWaferNum++;
  4516. if (stockerInfo.Item3.Any(x => x == wafer.OriginSlot) && !wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4517. {
  4518. iWaferNum++;
  4519. isSlotSelect = true;
  4520. }
  4521. }
  4522. }
  4523. return iWaferNum;
  4524. }
  4525. private int GetCurrentDummyWaferNum(WaferType targetWaferType)
  4526. {
  4527. int iWaferNum = 0;
  4528. var targetCarrierType = (CarrierType)(Enum.Parse(typeof(CarrierType), targetWaferType.ToString()));
  4529. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  4530. {
  4531. if (module == ModuleName.SMIFA || module == ModuleName.SMIFB || module == ModuleName.Boat)
  4532. continue;
  4533. if (ModuleHelper.IsStocker(module))
  4534. {
  4535. var carrier = CarrierManager.Instance.GetCarrier(module);
  4536. if (carrier == null || carrier.IsEmpty || carrier.CarrierType != targetCarrierType)
  4537. continue;
  4538. }
  4539. var wafers = WaferManager.Instance.GetWafers(module);
  4540. if (wafers == null)
  4541. continue;
  4542. foreach (var wafer in wafers)
  4543. {
  4544. if (!wafer.IsEmpty && wafer.WaferType == targetWaferType)
  4545. iWaferNum++;
  4546. }
  4547. }
  4548. return iWaferNum;
  4549. }
  4550. private bool CassetteShortWaferInCassetteShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, bool cassetteSupplyED, bool waferSupplyED)
  4551. {
  4552. bool bEDShort = false;
  4553. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4554. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4555. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4556. adjustslot = new List<string>();
  4557. for (int i = 0; i < slotCount; i++)
  4558. {
  4559. adjustslot.Add("");
  4560. }
  4561. if (monitorSlot)
  4562. {
  4563. for (int i = 0; i < slotCount; i++)
  4564. {
  4565. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4566. adjustslot[i] = "monitor";
  4567. }
  4568. }
  4569. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4570. foreach (var p in pj.Stockers)
  4571. {
  4572. var module = GetModule(p.Item1) as SchedulerStocker;
  4573. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4574. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4575. tempStockers.Add(module);
  4576. }
  4577. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4578. tempStockers.Reverse();
  4579. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4580. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4581. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4582. int centeringSlotPosLower;
  4583. int centeringSlotPosUpper;
  4584. if (tempStockers.Count % 2 == 0)
  4585. {
  4586. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4587. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4588. }
  4589. else
  4590. {
  4591. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount / 2) + 1 + (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4592. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount / 2) - 1 - (cassetteSlotCount + 1) * (tempStockers.Count / 2);
  4593. }
  4594. if (centeringSlotPosLower >= slotCount - dummyLower)
  4595. {
  4596. int iIndex = slotCount - dummyLower - 1;
  4597. if (!monitorSlot)
  4598. {
  4599. adjustslot[iIndex] = "monitor";
  4600. iIndex--;
  4601. }
  4602. foreach (var stocker in tempStockers)
  4603. {
  4604. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4605. if (wafers == null)
  4606. continue;
  4607. foreach (var wafer in wafers)
  4608. {
  4609. if (!wafer.IsEmpty)
  4610. {
  4611. for (int i = iIndex; i >= dummyUpper; i--)
  4612. {
  4613. if (adjustslot[i] == "")
  4614. {
  4615. adjustslot[i] = "production";
  4616. iIndex = i - 1;
  4617. break;
  4618. }
  4619. }
  4620. }
  4621. else
  4622. {
  4623. if (waferSupplyED)
  4624. {
  4625. if (currentEDNum > 0)
  4626. {
  4627. for (int i = iIndex; i >= dummyUpper; i--)
  4628. {
  4629. if (adjustslot[i] == "")
  4630. {
  4631. adjustslot[i] = "extradummy";
  4632. currentEDNum--;
  4633. iIndex = i - 1;
  4634. break;
  4635. }
  4636. }
  4637. }
  4638. else
  4639. {
  4640. bEDShort = true;
  4641. }
  4642. }
  4643. }
  4644. }
  4645. if (!monitorSlot)
  4646. {
  4647. adjustslot[iIndex] = "monitor";
  4648. iIndex--;
  4649. }
  4650. }
  4651. if (cassetteSupplyED && currentEDNum > 0)
  4652. {
  4653. for (int i = iIndex; i >= dummyUpper; i--)
  4654. {
  4655. if (currentEDNum > 0)
  4656. {
  4657. if (adjustslot[i] == "")
  4658. {
  4659. adjustslot[i] = "extradummy";
  4660. currentEDNum--;
  4661. }
  4662. }
  4663. else
  4664. {
  4665. bEDShort = true;
  4666. break;
  4667. }
  4668. }
  4669. }
  4670. }
  4671. else if (centeringSlotPosUpper <= dummyUpper + 1)
  4672. {
  4673. int iIndex = dummyUpper;
  4674. if (!monitorSlot)
  4675. {
  4676. adjustslot[iIndex] = "monitor";
  4677. iIndex++;
  4678. }
  4679. foreach (var stocker in tempStockers)
  4680. {
  4681. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4682. if (wafers == null)
  4683. continue;
  4684. foreach (var wafer in wafers)
  4685. {
  4686. if (!wafer.IsEmpty)
  4687. {
  4688. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4689. {
  4690. if (adjustslot[i] == "")
  4691. {
  4692. adjustslot[i] = "production";
  4693. iIndex = i + 1;
  4694. break;
  4695. }
  4696. }
  4697. }
  4698. else
  4699. {
  4700. if (waferSupplyED)
  4701. {
  4702. if (currentEDNum > 0)
  4703. {
  4704. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4705. {
  4706. if (adjustslot[i] == "")
  4707. {
  4708. adjustslot[i] = "extradummy";
  4709. currentEDNum--;
  4710. iIndex = i + 1;
  4711. break;
  4712. }
  4713. }
  4714. }
  4715. else
  4716. {
  4717. bEDShort = true;
  4718. }
  4719. }
  4720. }
  4721. }
  4722. if (!monitorSlot)
  4723. {
  4724. adjustslot[iIndex] = "monitor";
  4725. iIndex++;
  4726. }
  4727. }
  4728. if (cassetteSupplyED && currentEDNum > 0)
  4729. {
  4730. for (int i = iIndex; i < slotCount - dummyLower; i++)
  4731. {
  4732. if (currentEDNum > 0)
  4733. {
  4734. if (adjustslot[i] == "")
  4735. {
  4736. adjustslot[i] = "extradummy";
  4737. currentEDNum--;
  4738. }
  4739. }
  4740. else
  4741. {
  4742. bEDShort = true;
  4743. break;
  4744. }
  4745. }
  4746. }
  4747. }
  4748. else
  4749. {
  4750. int iCount = 0;
  4751. int iUpperIndex = centeringSlotPos - 1;
  4752. int iLowerIndex = centeringSlotPos - 1;
  4753. int iUpperCount = 0;
  4754. int iLowerCount = 0;
  4755. bool bCassetteEvenNumber = tempStockers.Count % 2 == 0;
  4756. if (bCassetteEvenNumber && !monitorSlot)
  4757. {
  4758. adjustslot[centeringSlotPos - 1] = "monitor";
  4759. iUpperIndex--;
  4760. iLowerIndex++;
  4761. iCount++;
  4762. }
  4763. foreach (var stocker in tempStockers)
  4764. {
  4765. var wafers = WaferManager.Instance.GetWafers(stocker.Module);
  4766. if (wafers == null)
  4767. continue;
  4768. foreach (var wafer in wafers)
  4769. {
  4770. if (bCassetteEvenNumber)
  4771. {
  4772. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  4773. {
  4774. adjustslot[iUpperIndex] = "monitor";
  4775. iUpperIndex--;
  4776. iUpperCount = 0;
  4777. }
  4778. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  4779. {
  4780. adjustslot[iLowerIndex] = "monitor";
  4781. iLowerIndex++;
  4782. iLowerCount = 0;
  4783. }
  4784. }
  4785. else
  4786. {
  4787. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  4788. {
  4789. adjustslot[iUpperIndex] = "monitor";
  4790. iUpperIndex--;
  4791. iUpperCount = 0;
  4792. adjustslot[iLowerIndex] = "monitor";
  4793. iLowerIndex++;
  4794. iLowerCount = 0;
  4795. bCassetteEvenNumber = true;
  4796. }
  4797. }
  4798. if (iCount % 2 == 0)
  4799. {
  4800. if (!wafer.IsEmpty)
  4801. {
  4802. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4803. {
  4804. if (adjustslot[i] == "")
  4805. {
  4806. adjustslot[i] = "production";
  4807. iUpperIndex = i - 1;
  4808. iUpperCount++;
  4809. iCount++;
  4810. break;
  4811. }
  4812. }
  4813. }
  4814. else
  4815. {
  4816. if (waferSupplyED)
  4817. {
  4818. if (currentEDNum > 0)
  4819. {
  4820. for (int i = iUpperIndex; i >= dummyUpper; i--)
  4821. {
  4822. if (adjustslot[i] == "")
  4823. {
  4824. adjustslot[i] = "extradummy";
  4825. currentEDNum--;
  4826. iUpperIndex = i - 1;
  4827. iUpperCount++;
  4828. iCount++;
  4829. break;
  4830. }
  4831. }
  4832. }
  4833. else
  4834. {
  4835. bEDShort = true;
  4836. }
  4837. }
  4838. }
  4839. }
  4840. else
  4841. {
  4842. if (!wafer.IsEmpty)
  4843. {
  4844. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4845. {
  4846. if (adjustslot[i] == "")
  4847. {
  4848. adjustslot[i] = "production";
  4849. iLowerIndex = i + 1;
  4850. iLowerCount++;
  4851. iCount++;
  4852. break;
  4853. }
  4854. }
  4855. }
  4856. else
  4857. {
  4858. if (waferSupplyED)
  4859. {
  4860. if (currentEDNum > 0)
  4861. {
  4862. for (int i = iLowerIndex; i < slotCount - dummyLower; i++)
  4863. {
  4864. if (adjustslot[i] == "")
  4865. {
  4866. adjustslot[i] = "extradummy";
  4867. currentEDNum--;
  4868. iLowerIndex = i + 1;
  4869. iLowerCount++;
  4870. iCount++;
  4871. break;
  4872. }
  4873. }
  4874. }
  4875. else
  4876. {
  4877. bEDShort = true;
  4878. }
  4879. }
  4880. }
  4881. }
  4882. }
  4883. if (!monitorSlot)
  4884. {
  4885. if (adjustslot[iUpperIndex + 1] != "M")
  4886. {
  4887. adjustslot[iUpperIndex] = "monitor";
  4888. iUpperIndex--;
  4889. iCount++;
  4890. }
  4891. if (adjustslot[iLowerIndex - 1] != "monitor")
  4892. {
  4893. adjustslot[iLowerIndex] = "monitor";
  4894. iLowerIndex++;
  4895. iCount++;
  4896. }
  4897. }
  4898. }
  4899. if (cassetteSupplyED && currentEDNum > 0)
  4900. {
  4901. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  4902. {
  4903. if (currentEDNum <= 0)
  4904. {
  4905. bEDShort = true;
  4906. break;
  4907. }
  4908. for (int j = iUpperIndex; j >= dummyUpper; j--)
  4909. {
  4910. if (adjustslot[j] == "")
  4911. {
  4912. adjustslot[j] = "extradummy";
  4913. iUpperIndex = j - 1;
  4914. currentEDNum--;
  4915. break;
  4916. }
  4917. }
  4918. if (currentEDNum <= 0)
  4919. {
  4920. bEDShort = true;
  4921. break;
  4922. }
  4923. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  4924. {
  4925. if (adjustslot[j] == "")
  4926. {
  4927. adjustslot[j] = "extradummy";
  4928. iLowerIndex = j + 1;
  4929. currentEDNum--;
  4930. break;
  4931. }
  4932. }
  4933. }
  4934. }
  4935. }
  4936. return bEDShort;
  4937. }
  4938. private bool CassetteShortPWaferShort(ProcessJobInfo pj, ref List<string> adjustslot, ref int currentEDNum, RecipeLayoutEntityNormal layoutRecipeDataNormal, RecipeLayoutEntityExpert layoutRecipeDataExpert, int currentPWaferNum, bool cassetteSupplyED)
  4939. {
  4940. bool bEDShort = false;
  4941. bool monitorSlot = layoutRecipeDataNormal.MonitorPosition.ToLower() == "slot";
  4942. int slotCount = SC.GetValue<int>($"Boat.SlotCount");
  4943. int cassetteSlotCount = SC.GetValue<int>("System.CassetteSlotCount");
  4944. adjustslot = new List<string>();
  4945. for (int i = 0; i < slotCount; i++)
  4946. {
  4947. adjustslot.Add("");
  4948. }
  4949. if (monitorSlot)
  4950. {
  4951. for (int i = 0; i < slotCount; i++)
  4952. {
  4953. if (layoutRecipeDataExpert.Items[i].ToLower() == "monitor")
  4954. adjustslot[i] = "monitor";
  4955. }
  4956. }
  4957. int.TryParse(layoutRecipeDataNormal.DummyUpperSlot, out int dummyUpper);
  4958. int.TryParse(layoutRecipeDataNormal.DummyLowerSlot, out int dummyLower);
  4959. int.TryParse(layoutRecipeDataNormal.CenteringSlotPosition, out int centeringSlotPos);
  4960. List<SchedulerStocker> tempStockers = new List<SchedulerStocker>();
  4961. foreach (var p in pj.Stockers)
  4962. {
  4963. var module = GetModule(p.Item1) as SchedulerStocker;
  4964. var carrier = CarrierManager.Instance.GetCarrier(module.Module);
  4965. if (!carrier.IsEmpty && carrier.CarrierType.ToString() == "P")
  4966. tempStockers.Add(module);
  4967. }
  4968. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  4969. tempStockers.Reverse();
  4970. int centeringSlotPosLower;
  4971. int centeringSlotPosUpper;
  4972. if ((currentPWaferNum / 2) % cassetteSlotCount == 0)
  4973. {
  4974. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4975. centeringSlotPosLower = centeringSlotPos + (cassetteSlotCount + 1) * temp;
  4976. centeringSlotPosUpper = centeringSlotPos - (cassetteSlotCount + 1) * temp;
  4977. }
  4978. else
  4979. {
  4980. var temp = (int)Math.Ceiling((float)((currentPWaferNum / 2) / cassetteSlotCount));
  4981. centeringSlotPosLower = centeringSlotPos + (currentPWaferNum / 2) + 1 + temp;
  4982. centeringSlotPosUpper = centeringSlotPos - (currentPWaferNum / 2) - 1 - temp;
  4983. }
  4984. if (centeringSlotPosLower >= slotCount - dummyLower)
  4985. {
  4986. int iIndex = slotCount - dummyLower - 1;
  4987. if (!monitorSlot)
  4988. {
  4989. adjustslot[iIndex] = "monitor";
  4990. iIndex--;
  4991. }
  4992. for (int i = 0; i < tempStockers.Count; i++)
  4993. {
  4994. if (currentPWaferNum == 0)
  4995. break;
  4996. for (int j = 0; j < cassetteSlotCount; j++)
  4997. {
  4998. if (currentPWaferNum == 0)
  4999. break;
  5000. for (int k = iIndex; k >= dummyUpper; k--)
  5001. {
  5002. if (adjustslot[k] == "")
  5003. {
  5004. adjustslot[k] = "production";
  5005. currentPWaferNum--;
  5006. iIndex = k - 1;
  5007. break;
  5008. }
  5009. }
  5010. }
  5011. if (!monitorSlot)
  5012. {
  5013. adjustslot[iIndex] = "monitor";
  5014. iIndex--;
  5015. }
  5016. }
  5017. if (cassetteSupplyED)
  5018. {
  5019. for (int i = iIndex; i >= dummyUpper; i--)
  5020. {
  5021. if (currentEDNum > 0)
  5022. {
  5023. if (adjustslot[i] == "")
  5024. {
  5025. adjustslot[i] = "extradummy";
  5026. currentEDNum--;
  5027. }
  5028. }
  5029. else
  5030. {
  5031. bEDShort = true;
  5032. break;
  5033. }
  5034. }
  5035. }
  5036. }
  5037. else if (centeringSlotPosUpper <= dummyUpper + 1)
  5038. {
  5039. int iIndex = dummyUpper;
  5040. if (!monitorSlot)
  5041. {
  5042. adjustslot[iIndex] = "monitor";
  5043. iIndex++;
  5044. }
  5045. for (int i = 0; i < tempStockers.Count; i++)
  5046. {
  5047. if (currentPWaferNum == 0)
  5048. break;
  5049. for (int j = 0; j < cassetteSlotCount; j++)
  5050. {
  5051. if (currentPWaferNum == 0)
  5052. break;
  5053. for (int k = iIndex; k < slotCount - dummyLower; k++)
  5054. {
  5055. if (adjustslot[k] == "")
  5056. {
  5057. adjustslot[k] = "production";
  5058. currentPWaferNum--;
  5059. iIndex = k + 1;
  5060. break;
  5061. }
  5062. }
  5063. }
  5064. if (!monitorSlot)
  5065. {
  5066. adjustslot[iIndex] = "monitor";
  5067. iIndex++;
  5068. }
  5069. }
  5070. if (cassetteSupplyED)
  5071. {
  5072. for (int i = iIndex; i < slotCount - dummyLower; i++)
  5073. {
  5074. if (currentEDNum > 0)
  5075. {
  5076. if (adjustslot[i] == "")
  5077. {
  5078. adjustslot[i] = "extradummy";
  5079. currentEDNum--;
  5080. }
  5081. }
  5082. else
  5083. {
  5084. bEDShort = true;
  5085. break;
  5086. }
  5087. }
  5088. }
  5089. }
  5090. else
  5091. {
  5092. int iCount = 0;
  5093. int iUpperIndex = centeringSlotPos - 1;
  5094. int iLowerIndex = centeringSlotPos - 1;
  5095. int iUpperCount = 0;
  5096. int iLowerCount = 0;
  5097. bool bCassetteEvenNumber = (currentPWaferNum / 2) % cassetteSlotCount == 0;
  5098. if (bCassetteEvenNumber && !monitorSlot)
  5099. {
  5100. adjustslot[centeringSlotPos - 1] = "monitor";
  5101. iUpperIndex--;
  5102. iLowerIndex++;
  5103. iCount++;
  5104. }
  5105. for (int i = 0; i < tempStockers.Count; i++)
  5106. {
  5107. if (currentPWaferNum == 0)
  5108. break;
  5109. for (int j = 0; j < cassetteSlotCount; j++)
  5110. {
  5111. if (currentPWaferNum == 0)
  5112. break;
  5113. if (bCassetteEvenNumber)
  5114. {
  5115. if (!monitorSlot && iUpperCount >= cassetteSlotCount && iUpperIndex >= dummyUpper)
  5116. {
  5117. adjustslot[iUpperIndex] = "monitor";
  5118. iUpperIndex--;
  5119. iUpperCount = 0;
  5120. }
  5121. if (!monitorSlot && iLowerCount >= cassetteSlotCount && iLowerIndex < slotCount - dummyLower)
  5122. {
  5123. adjustslot[iLowerIndex] = "monitor";
  5124. iLowerIndex++;
  5125. iLowerCount = 0;
  5126. }
  5127. }
  5128. else
  5129. {
  5130. if (!monitorSlot && iUpperCount + iLowerCount >= cassetteSlotCount && iUpperIndex >= dummyUpper && iLowerIndex < slotCount - dummyLower)
  5131. {
  5132. adjustslot[iUpperIndex] = "monitor";
  5133. iUpperIndex--;
  5134. iUpperCount = 0;
  5135. adjustslot[iLowerIndex] = "monitor";
  5136. iLowerIndex++;
  5137. iLowerCount = 0;
  5138. bCassetteEvenNumber = true;
  5139. }
  5140. }
  5141. if (iCount % 2 == 0)
  5142. {
  5143. for (int k = iUpperIndex; k >= dummyUpper; k--)
  5144. {
  5145. if (adjustslot[k] == "")
  5146. {
  5147. adjustslot[k] = "production";
  5148. currentPWaferNum--;
  5149. iUpperIndex = k - 1;
  5150. iUpperCount++;
  5151. iCount++;
  5152. break;
  5153. }
  5154. }
  5155. }
  5156. else
  5157. {
  5158. for (int k = iLowerIndex; k < slotCount - dummyLower; k++)
  5159. {
  5160. if (adjustslot[k] == "")
  5161. {
  5162. adjustslot[k] = "production";
  5163. currentPWaferNum--;
  5164. iLowerIndex = k + 1;
  5165. iLowerCount++;
  5166. iCount++;
  5167. break;
  5168. }
  5169. }
  5170. }
  5171. }
  5172. }
  5173. if (!monitorSlot)
  5174. {
  5175. if (adjustslot[iUpperIndex + 1] != "monitor")
  5176. {
  5177. adjustslot[iUpperIndex] = "monitor";
  5178. iUpperIndex--;
  5179. iCount++;
  5180. }
  5181. if (adjustslot[iLowerIndex - 1] != "monitor")
  5182. {
  5183. adjustslot[iLowerIndex] = "monitor";
  5184. iLowerIndex++;
  5185. iCount++;
  5186. }
  5187. }
  5188. if (cassetteSupplyED)
  5189. {
  5190. for (int i = 0; i < slotCount - iCount - dummyUpper - dummyLower; i++)
  5191. {
  5192. if (currentEDNum <= 0)
  5193. {
  5194. bEDShort = true;
  5195. break;
  5196. }
  5197. for (int j = iUpperIndex; j >= dummyUpper; j--)
  5198. {
  5199. if (adjustslot[j] == "")
  5200. {
  5201. adjustslot[j] = "extradummy";
  5202. currentEDNum--;
  5203. iUpperIndex = j - 1;
  5204. break;
  5205. }
  5206. }
  5207. if (currentEDNum <= 0)
  5208. {
  5209. bEDShort = true;
  5210. break;
  5211. }
  5212. for (int j = iLowerIndex; j < slotCount - dummyLower; j++)
  5213. {
  5214. if (adjustslot[j] == "")
  5215. {
  5216. adjustslot[j] = "extradummy";
  5217. currentEDNum--;
  5218. iLowerIndex = j + 1;
  5219. break;
  5220. }
  5221. }
  5222. }
  5223. }
  5224. }
  5225. return bEDShort;
  5226. }
  5227. #endregion
  5228. #region dummy use
  5229. private bool CheckDummyWaferUse(ProcessJobInfo pj, ControlJobInfo cj)
  5230. {
  5231. var pm = (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule);
  5232. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  5233. {
  5234. if (!ModuleHelper.IsStocker(module) || !pj.Stockers.Any(x => x.Item1 == module.ToString()))
  5235. continue;
  5236. var wafers = WaferManager.Instance.GetWafers(module);
  5237. if (wafers == null)
  5238. continue;
  5239. var isScheduleMaintenance = SC.ContainsItem("System.EnableScheduleMaintenance") && SC.GetValue<bool>("System.EnableScheduleMaintenance");
  5240. if (isScheduleMaintenance)
  5241. {
  5242. pm.GetAllDBRecord();
  5243. }
  5244. foreach (var wafer in wafers)
  5245. {
  5246. if (wafer == null || wafer.IsEmpty || (wafer.WaferType != WaferType.SD && wafer.WaferType != WaferType.ED))
  5247. continue;
  5248. #region New
  5249. if (isScheduleMaintenance)
  5250. {
  5251. #region SD Dummy 时间/次数/膜厚限制
  5252. var maintenanceItemSDCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDCarrierUseFreq.ToString());
  5253. var maintenanceItemSDWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferThickness.ToString());
  5254. var maintenanceItemSDWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.SDWaferUserTime.ToString());
  5255. if (wafer.WaferType == WaferType.SD && maintenanceItemSDCarrierUseFreq.StartValue > 0 && wafer.UseCount > maintenanceItemSDCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemSDCarrierUseFreq.LimitValue)
  5256. {
  5257. if (maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5258. maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5259. {
  5260. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDCarrierUseFreq);
  5261. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set(msg);
  5262. }
  5263. }
  5264. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemSDWaferUserTime.StartValue && wafer.UseTime < maintenanceItemSDWaferUserTime.LimitValue)
  5265. {
  5266. if (maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5267. maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5268. {
  5269. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.CurrentValue.ToString());
  5270. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.StartValue.ToString());
  5271. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.LimitValue.ToString());
  5272. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferUserTime, true, currentValue, minValue, maxValue);
  5273. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set(msg);
  5274. }
  5275. }
  5276. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemSDWaferThickness.StartValue && wafer.UseThick < maintenanceItemSDWaferThickness.LimitValue)
  5277. {
  5278. if (maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5279. maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5280. {
  5281. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferThickness);
  5282. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set(msg);
  5283. }
  5284. }
  5285. if (wafer.WaferType == WaferType.SD && maintenanceItemSDCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemSDCarrierUseFreq.LimitValue)
  5286. {
  5287. if (maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5288. {
  5289. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDCarrierUseFreq);
  5290. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  5291. return false;
  5292. }
  5293. else if (maintenanceItemSDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5294. {
  5295. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDCarrierUseFreq, true);
  5296. if (string.IsNullOrEmpty(maintenanceItemSDCarrierUseFreq.AssociationProcessRecipeName))
  5297. {
  5298. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  5299. return false;
  5300. }
  5301. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set(msg);
  5302. pm.TriggerJobAutoStart(maintenanceItemSDCarrierUseFreq.AssociationProcessRecipeName);
  5303. LOG.Info($"{msg} Trigger {maintenanceItemSDCarrierUseFreq.AssociationProcessRecipeName}");
  5304. return false;
  5305. }
  5306. }
  5307. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemSDWaferUserTime.LimitValue)
  5308. {
  5309. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.CurrentValue.ToString());
  5310. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.StartValue.ToString());
  5311. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemSDWaferUserTime.LimitValue.ToString());
  5312. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferUserTime, true, currentValue, minValue, maxValue);
  5313. if (maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5314. {
  5315. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  5316. return false;
  5317. }
  5318. else if (maintenanceItemSDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5319. {
  5320. if (string.IsNullOrEmpty(maintenanceItemSDWaferUserTime.AssociationProcessRecipeName))
  5321. {
  5322. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  5323. return false;
  5324. }
  5325. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set(msg);
  5326. pm.TriggerJobAutoStart(maintenanceItemSDWaferUserTime.AssociationProcessRecipeName);
  5327. LOG.Info($"{msg} Trigger {maintenanceItemSDWaferUserTime.AssociationProcessRecipeName}");
  5328. return false;
  5329. }
  5330. }
  5331. if (wafer.WaferType == WaferType.SD && maintenanceItemSDWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemSDWaferThickness.LimitValue)
  5332. {
  5333. if (maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5334. {
  5335. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferThickness);
  5336. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  5337. return false;
  5338. }
  5339. else if (maintenanceItemSDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5340. {
  5341. var msg = pm.GetAlarmWarningMsg(maintenanceItemSDWaferThickness, true);
  5342. if (string.IsNullOrEmpty(maintenanceItemSDWaferThickness.AssociationProcessRecipeName))
  5343. {
  5344. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  5345. return false;
  5346. }
  5347. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set(msg);
  5348. pm.TriggerJobAutoStart(maintenanceItemSDWaferThickness.AssociationProcessRecipeName);
  5349. LOG.Info($"{msg} Trigger {maintenanceItemSDWaferThickness.AssociationProcessRecipeName}");
  5350. return false;
  5351. }
  5352. }
  5353. #endregion
  5354. #region ED
  5355. var maintenanceItemEDCarrierUseFreq = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDCarrierUseFreq.ToString());
  5356. var maintenanceItemEDWaferThickness = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferThickness.ToString());
  5357. var maintenanceItemEDWaferUserTime = ScheduleMaintenanceDataManager.Instance.GetItem(MaintenanceItemEnum.FDWaferUserTime.ToString());
  5358. if (wafer.WaferType == WaferType.ED && maintenanceItemEDCarrierUseFreq.StartValue > 0 && wafer.UseCount < maintenanceItemEDCarrierUseFreq.StartValue && wafer.UseCount < maintenanceItemEDCarrierUseFreq.LimitValue)
  5359. {
  5360. if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5361. maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5362. {
  5363. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
  5364. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set(msg);
  5365. }
  5366. }
  5367. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferUserTime.StartValue > 0 && wafer.UseTime > maintenanceItemEDWaferUserTime.StartValue && wafer.UseTime < maintenanceItemEDWaferUserTime.LimitValue)
  5368. {
  5369. if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5370. maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5371. {
  5372. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.CurrentValue.ToString());
  5373. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.StartValue.ToString());
  5374. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.LimitValue.ToString());
  5375. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferUserTime, true, currentValue, minValue, maxValue);
  5376. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set(msg);
  5377. }
  5378. }
  5379. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferThickness.StartValue > 0 && wafer.UseThick > maintenanceItemEDWaferThickness.StartValue && wafer.UseThick < maintenanceItemEDWaferThickness.LimitValue)
  5380. {
  5381. if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString() ||
  5382. maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5383. {
  5384. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
  5385. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set(msg);
  5386. }
  5387. }
  5388. if (wafer.WaferType == WaferType.ED && maintenanceItemEDCarrierUseFreq.StartValue > 0 && wafer.UseCount >= maintenanceItemEDCarrierUseFreq.LimitValue)
  5389. {
  5390. if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5391. {
  5392. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
  5393. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  5394. return false;
  5395. }
  5396. else if (maintenanceItemEDCarrierUseFreq.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5397. {
  5398. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDCarrierUseFreq);
  5399. if (string.IsNullOrEmpty(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName))
  5400. {
  5401. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  5402. return false;
  5403. }
  5404. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set(msg);
  5405. pm.TriggerJobAutoStart(maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName);
  5406. LOG.Info($"{msg} Trigger {maintenanceItemEDCarrierUseFreq.AssociationProcessRecipeName}");
  5407. return false;
  5408. }
  5409. }
  5410. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferUserTime.StartValue > 0 && wafer.UseTime >= maintenanceItemEDWaferUserTime.LimitValue)
  5411. {
  5412. var currentValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.CurrentValue.ToString());
  5413. var minValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.StartValue.ToString());
  5414. var maxValue = DateTimeUtil.SecondToHHmmss(maintenanceItemEDWaferUserTime.LimitValue.ToString());
  5415. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferUserTime, true, currentValue, minValue, maxValue);
  5416. if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5417. {
  5418. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  5419. return false;
  5420. }
  5421. else if (maintenanceItemEDWaferUserTime.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5422. {
  5423. if (string.IsNullOrEmpty(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName))
  5424. {
  5425. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  5426. return false;
  5427. }
  5428. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set(msg);
  5429. pm.TriggerJobAutoStart(maintenanceItemEDWaferUserTime.AssociationProcessRecipeName);
  5430. LOG.Info($"{msg} Trigger {maintenanceItemEDWaferUserTime.AssociationProcessRecipeName}");
  5431. return false;
  5432. }
  5433. }
  5434. if (wafer.WaferType == WaferType.ED && maintenanceItemEDWaferThickness.StartValue > 0 && wafer.UseThick >= maintenanceItemEDWaferThickness.LimitValue)
  5435. {
  5436. if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.AlarmReport.ToString())
  5437. {
  5438. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness);
  5439. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  5440. return false;
  5441. }
  5442. else if (maintenanceItemEDWaferThickness.MaintenanceProcessing == MaintenanceProcessingCommandEnum.JobAutoStart.ToString())
  5443. {
  5444. var msg = pm.GetAlarmWarningMsg(maintenanceItemEDWaferThickness, true);
  5445. if (string.IsNullOrEmpty(maintenanceItemEDWaferThickness.AssociationProcessRecipeName))
  5446. {
  5447. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  5448. return false;
  5449. }
  5450. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set(msg);
  5451. pm.TriggerJobAutoStart(maintenanceItemEDWaferThickness.AssociationProcessRecipeName);
  5452. LOG.Info($"{msg} Trigger {maintenanceItemEDWaferThickness.AssociationProcessRecipeName}");
  5453. return false;
  5454. }
  5455. }
  5456. #endregion
  5457. }
  5458. else
  5459. {
  5460. // SD Dummy
  5461. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5462. {
  5463. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountWarning")} 次");
  5464. }
  5465. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5466. {
  5467. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeWarning")} hour");
  5468. }
  5469. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5470. {
  5471. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessWarning")} nm");
  5472. }
  5473. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm"))
  5474. {
  5475. Singleton<EquipmentManager>.Instance.SDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.SDCountAlarm")} 次");
  5476. return false;
  5477. }
  5478. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm"))
  5479. {
  5480. Singleton<EquipmentManager>.Instance.SDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDTimeAlarm")} hour");
  5481. return false;
  5482. }
  5483. if (wafer.WaferType == WaferType.SD && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableSDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm"))
  5484. {
  5485. Singleton<EquipmentManager>.Instance.SDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.SDThicknessAlarm")} nm");
  5486. return false;
  5487. }
  5488. // Extra Dummy
  5489. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount > SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning") && wafer.UseCount < SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5490. {
  5491. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountWarning.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountWarning")} 次");
  5492. }
  5493. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 > SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning") && wafer.UseTime / 3600 < SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5494. {
  5495. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeWarning")} hour");
  5496. }
  5497. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick > SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning") && wafer.UseThick < SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5498. {
  5499. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessWarning.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessWarning")} nm");
  5500. }
  5501. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseCountWarning") && wafer.UseCount >= SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm"))
  5502. {
  5503. Singleton<EquipmentManager>.Instance.FDWaferTypeUseCountAlarm.Set($"more than {SC.GetValue<int>($"PM1.WaferCycleTime.EDCountAlarm")} 次");
  5504. return false;
  5505. }
  5506. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferUseTimeWarning") && wafer.UseTime / 3600 >= SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm"))
  5507. {
  5508. Singleton<EquipmentManager>.Instance.FDWaferTypeUseTimeAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDTimeAlarm")} hour");
  5509. return false;
  5510. }
  5511. if (wafer.WaferType == WaferType.ED && SC.GetValue<bool>($"PM1.WaferCycleTime.IsEnableEDWaferThicknessWarning") && wafer.UseThick >= SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm"))
  5512. {
  5513. Singleton<EquipmentManager>.Instance.FDWaferTypeThicknessAlarm.Set($"more than {SC.GetValue<double>($"PM1.WaferCycleTime.EDThicknessAlarm")} nm");
  5514. return false;
  5515. }
  5516. }
  5517. #endregion
  5518. }
  5519. }
  5520. return true;
  5521. }
  5522. #endregion
  5523. private void MonitorPMTask()
  5524. {
  5525. if (!_carrierRobot.IsAvailable || !_waferRobot.IsAvailable)
  5526. return;
  5527. foreach (var pm in _lstPms)
  5528. {
  5529. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5530. if (pmModule == null)
  5531. return;
  5532. if (!pm.IsAvailable && !pmModule.IsMainRecipeComplete)
  5533. continue;
  5534. var wafers = WaferManager.Instance.GetWafers(pm.Module);
  5535. if (wafers == null)
  5536. continue;
  5537. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5538. if (pj == null)
  5539. return;
  5540. bool isNeedProcess = false;
  5541. bool isProcessed = false;
  5542. foreach (var wafer in wafers)
  5543. {
  5544. if (wafer == null || wafer.IsEmpty)
  5545. continue;
  5546. if (!pj.SlotWafers.Any(x => x.Item1 == (ModuleName)wafer.OriginStation && x.Item2 == wafer.OriginSlot))
  5547. pj.SlotWafers.Add(Tuple.Create((ModuleName)wafer.OriginStation, wafer.OriginSlot));
  5548. if (wafer.ProcessJob == null)
  5549. {
  5550. wafer.ProcessJob = pj;
  5551. WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
  5552. }
  5553. if (wafer.ProcessState == EnumWaferProcessStatus.Idle)
  5554. {
  5555. isNeedProcess = true;
  5556. isProcessed = false;
  5557. }
  5558. if (wafer.ProcessState == EnumWaferProcessStatus.Completed)
  5559. {
  5560. isNeedProcess = false;
  5561. isProcessed = true;
  5562. }
  5563. }
  5564. if (pj.IsEmptyLayout)
  5565. {
  5566. if (pj.ProcessingState == EnumProcessingState.Charging)
  5567. {
  5568. isNeedProcess = true;
  5569. isProcessed = false;
  5570. }
  5571. else
  5572. {
  5573. isNeedProcess = false;
  5574. if (DateTime.Now - pm.RecipeStartTime > TimeSpan.FromSeconds(5))
  5575. isProcessed = true;
  5576. }
  5577. }
  5578. if (isNeedProcess && CheckChargeFinished(pj, pm.Module) && pj.ProcessingState != EnumProcessingState.Processing &&
  5579. pmModule.CheckStandbyCondition() && pm.IsAvailable)
  5580. {
  5581. if (SC.GetValue<bool>("System.IsEnableBoatChargeMapping") && !pj.IsMapAfterCharge)
  5582. {
  5583. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5584. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5585. {
  5586. pj.IsMapAfterCharge = true;
  5587. return;
  5588. }
  5589. }
  5590. if (!pj.RobotHomed)
  5591. {
  5592. (Singleton<EquipmentManager>.Instance.Modules[ModuleName.WaferRobot] as WaferRobotModule).Home(out _);
  5593. pj.RobotHomed = true;
  5594. }
  5595. pj.ProcessingState = EnumProcessingState.Processing;
  5596. pmModule?.SetN2PurgeLAO2CheckFirstEnable(false);
  5597. if (pm.Process((string)pj.ProcessRecipe, false, true))
  5598. return;
  5599. }
  5600. //工艺结束
  5601. if (isProcessed)
  5602. {
  5603. if (pj.ProcessingState == EnumProcessingState.Processing)
  5604. {
  5605. Singleton<EquipmentManager>.Instance.EndPj();
  5606. if (pj.CoolTimeSec > 0)
  5607. {
  5608. _coolTimer.Restart();
  5609. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5610. }
  5611. else
  5612. {
  5613. _coolTimer.Restart();
  5614. pj.ProcessingState = EnumProcessingState.CoolingBeforeDischarge;
  5615. }
  5616. LOG.Write($"Cooling start {pj.CoolTimeSec}");
  5617. }
  5618. if (pj.ProcessingState == EnumProcessingState.CoolingBeforeDischarge && (_coolTimer.ElapsedMilliseconds > pj.CoolTimeSec * 1000 || _isCoolingSkip))
  5619. {
  5620. _isCoolingSkip = false;
  5621. var boatModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.Boat] as BoatModule;
  5622. if (boatModule != null && !boatModule.IsBoatElevatorAtHomePosition && boatModule.ZAxisDevice.IsReady)
  5623. {
  5624. boatModule.ZAxisDevice.SetServoMoveTo("HomePosition", out _);
  5625. }
  5626. if (boatModule != null && !boatModule.IsBoatRotationAtHomePosition && boatModule.RAxisDevice.IsReady)
  5627. {
  5628. boatModule.RAxisDevice.ServoStop();
  5629. boatModule.RAxisDevice.SetServoHome();
  5630. }
  5631. if (boatModule != null && boatModule.IsBoatElevatorAtHomePosition && boatModule.IsBoatRotationAtHomePosition)
  5632. {
  5633. if (SC.GetValue<bool>("System.IsEnableBoatDischargeMapping") && !pj.IsMapBeforeDischarge)
  5634. {
  5635. var mappingSlot = GetMappingSlot(ModuleName.PM1);
  5636. if (_waferRobot.Map(ModuleName.PM1, mappingSlot.Length == 0 ? 0 : Regex.Matches(mappingSlot, "1").Count, mappingSlot, true, false, Hand.Blade1))
  5637. {
  5638. pj.IsMapBeforeDischarge = true;
  5639. return;
  5640. }
  5641. }
  5642. _coolTimer.Stop();
  5643. AdjustDischargeSlots();
  5644. pj.ProcessingState = EnumProcessingState.Discharging;
  5645. LOG.Write($"Cooling completed {pj.CoolTimeSec}");
  5646. if (pj.IsN2PurgeMode)
  5647. {
  5648. //pmModule?.SetN2PurgeProcess(true);
  5649. //if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  5650. // pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  5651. if (SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable"))
  5652. {
  5653. pmModule?.SetN2PurgeProcess(true);
  5654. pmModule?.SetN2PurgeLAO2CheckFirstEnable(true);
  5655. }
  5656. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  5657. {
  5658. var setValue = pmModule.GetN2PurgeModeEnumByStr(pj.N2PurgeModeStr);
  5659. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  5660. pmModule.RestAllN2PrugeRD();
  5661. }
  5662. }
  5663. }
  5664. }
  5665. }
  5666. }
  5667. }
  5668. #endregion Module task
  5669. #region Logic Check
  5670. private bool CheckChargeFinished(ProcessJobInfo pj, ModuleName module, bool isOnlyCharge = false)
  5671. {
  5672. var wafers = WaferManager.Instance.GetWafers(module);
  5673. if (pj == null || wafers == null)
  5674. return false;
  5675. if (WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 0) ||
  5676. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 1) ||
  5677. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 2) ||
  5678. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 3) ||
  5679. WaferManager.Instance.CheckHasWafer(ModuleName.WaferRobot, 4))
  5680. return false;
  5681. int edCount = 0;
  5682. int sdCount = 0;
  5683. int m1Count = 0;
  5684. int m2Count = 0;
  5685. int pCount = 0;
  5686. int expertCount = 0;
  5687. foreach (var wafer in wafers)
  5688. {
  5689. if (wafer == null || wafer.IsEmpty)
  5690. continue;
  5691. switch (wafer.WaferType)
  5692. {
  5693. case WaferType.M1:
  5694. m1Count++;
  5695. break;
  5696. case WaferType.M2:
  5697. m2Count++;
  5698. break;
  5699. case WaferType.ED:
  5700. edCount++;
  5701. break;
  5702. case WaferType.SD:
  5703. sdCount++;
  5704. break;
  5705. case WaferType.P:
  5706. pCount++;
  5707. break;
  5708. case WaferType.XD:
  5709. case WaferType.T:
  5710. expertCount++;
  5711. break;
  5712. }
  5713. }
  5714. if (expertCount > 0)
  5715. {
  5716. if (pj.XdSlots == null || pj.TSlots == null)
  5717. return false;
  5718. return expertCount == pj.XdSlots.Count + pj.TSlots.Count;
  5719. }
  5720. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count != edCount && pj.ExtraDummySlots.Count > 0)
  5721. return false;
  5722. if (pj.SideDummySlots != null && pj.SideDummySlots.Count != sdCount && pj.SideDummySlots.Count > 0)
  5723. return false;
  5724. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count != m1Count)
  5725. return false;
  5726. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count != m2Count)
  5727. return false;
  5728. foreach (var s in pj.Stockers)
  5729. {
  5730. var carrier = CarrierManager.Instance.GetCarrier(s.Item1, 0);
  5731. if (carrier == null || carrier.CarrierType != CarrierType.P || carrier.IsEmpty)
  5732. continue;
  5733. var carrierWafers = WaferManager.Instance.GetWafers(ModuleHelper.Converter(s.Item1)).ToList();
  5734. if (carrierWafers == null || (carrierWafers.Any(x => !x.IsEmpty) && pj.ProductSlots.Count > pCount))
  5735. return false;
  5736. }
  5737. var carrierRobot = CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0);
  5738. if (carrierRobot != null && !carrierRobot.IsEmpty && isOnlyCharge)
  5739. return false;
  5740. if (carrierRobot != null && !carrierRobot.IsEmpty &&
  5741. carrierRobot.CarrierType == CarrierType.P &&
  5742. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrierRobot.InternalModuleName))
  5743. {
  5744. var carrierWafers = WaferManager.Instance.GetWafers(_carrierRobot.Module).ToList();
  5745. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5746. return false;
  5747. }
  5748. foreach (var fims in _lstFIMSs)
  5749. {
  5750. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  5751. if (carrier != null && !carrier.IsEmpty && isOnlyCharge)
  5752. return false;
  5753. if (carrier != null && !carrier.IsEmpty &&
  5754. carrier.CarrierType == CarrierType.P &&
  5755. pj.Stockers.Any(x => ModuleHelper.Converter(x.Item1) == carrier.InternalModuleName))
  5756. {
  5757. var carrierWafers = WaferManager.Instance.GetWafers(fims.Module).ToList();
  5758. if (carrierWafers == null || carrierWafers.Any(x => !x.IsEmpty))
  5759. return false;
  5760. }
  5761. }
  5762. return true;
  5763. }
  5764. private bool CheckProcessJobReady(ProcessJobInfo pj)
  5765. {
  5766. bool isReady = true;
  5767. if (pj == null)
  5768. return false;
  5769. //Boat Ready检查
  5770. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  5771. if (pmModule == null || !pmModule.CheckReadyForTransfer(_waferRobot.Module, Hand.Blade1, 0, EnumTransferType.Place, out string reason))
  5772. return false;
  5773. int pCount = 0;
  5774. int m1Count = 0;
  5775. int m2Count = 0;
  5776. foreach (var s in pj.Stockers)
  5777. {
  5778. var type = SC.GetStringValue($"System.Stocker.{s.Item1}WaferType");
  5779. if (!string.IsNullOrEmpty(type) && (type.Contains("P") || type.Contains("M") || type.Contains("None")))
  5780. {
  5781. ModuleName module = ModuleHelper.Converter(s.Item1);
  5782. if (!CarrierManager.Instance.CheckHasCarrier(module, 0))
  5783. continue;
  5784. var wafers = WaferManager.Instance.GetWafers(module).ToList();
  5785. if (wafers == null)
  5786. continue;
  5787. foreach (var wafer in wafers)
  5788. {
  5789. if (wafer == null || wafer.ProcessState != EnumWaferProcessStatus.Idle)
  5790. continue;
  5791. if (wafer.WaferType == WaferType.M1)
  5792. m1Count++;
  5793. if (wafer.WaferType == WaferType.M2)
  5794. m2Count++;
  5795. if (wafer.WaferType == WaferType.P)
  5796. pCount++;
  5797. }
  5798. }
  5799. }
  5800. if (m1Count < pj.Monitor1Slots.Count || m2Count < pj.Monitor2Slots.Count || pCount < pj.ProductSlots.Count)
  5801. return false;
  5802. return isReady;
  5803. }
  5804. protected bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
  5805. {
  5806. if (pj.SlotWafers == null || pj.SlotWafers.Count == 0 ||
  5807. pj.SlotWafers.Count != (pj.SideDummySlots != null ? pj.SideDummySlots.Count : 0) +
  5808. (pj.ExtraDummySlots != null ? pj.ExtraDummySlots.Count : 0) +
  5809. (pj.ProductSlots != null ? pj.ProductSlots.Count : 0) +
  5810. (pj.Monitor1Slots != null ? pj.Monitor1Slots.Count : 0) +
  5811. (pj.Monitor2Slots != null ? pj.Monitor2Slots.Count : 0))
  5812. return false;
  5813. var boatWafers = WaferManager.Instance.GetWafers(ModuleName.PM1).ToList();
  5814. for (int i = 0; i < pj.SlotWafers.Count; ++i)
  5815. {
  5816. if (!CarrierManager.Instance.CheckHasCarrier(pj.SlotWafers[i].Item1, 0))
  5817. {
  5818. var isFOUPUnloaded = true;
  5819. if (CarrierManager.Instance.CheckHasCarrier(_carrierRobot.Module, 0) && CarrierManager.Instance.GetCarrier(_carrierRobot.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5820. {
  5821. isFOUPUnloaded = false;
  5822. }
  5823. foreach (var st in _lstFIMSs)
  5824. {
  5825. if (!st.IsOnline || !CarrierManager.Instance.CheckHasCarrier(st.Module, 0))
  5826. continue;
  5827. if (CarrierManager.Instance.GetCarrier(st.Module, 0).InternalModuleName == pj.SlotWafers[i].Item1)
  5828. {
  5829. isFOUPUnloaded = false;
  5830. break;
  5831. }
  5832. }
  5833. if (isFOUPUnloaded)
  5834. continue;//已经unload
  5835. }
  5836. WaferInfo wafer = WaferManager.Instance.GetWafer(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2);
  5837. if (wafer.IsEmpty)
  5838. {
  5839. if (SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  5840. return false;
  5841. else
  5842. {
  5843. if (boatWafers.Any(x => x.OriginStation == (int)pj.SlotWafers[i].Item1 && x.OriginSlot == pj.SlotWafers[i].Item2 &&
  5844. !x.IsEmpty &&
  5845. (x.WaferType == WaferType.SD || x.WaferType == WaferType.ED)))
  5846. continue;
  5847. else
  5848. return false;
  5849. }
  5850. }
  5851. if (checkAllProcessed && CheckWaferNeedProcess(pj.SlotWafers[i].Item1, pj.SlotWafers[i].Item2))
  5852. return false;
  5853. }
  5854. if (checkAllProcessed)
  5855. {
  5856. if (boatWafers != null)
  5857. {
  5858. for (int i = 0; i < boatWafers.Count; i++)
  5859. {
  5860. var wafer = boatWafers[i];
  5861. if (wafer.IsEmpty)
  5862. continue;
  5863. if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.Failed)
  5864. {
  5865. return false;
  5866. }
  5867. }
  5868. }
  5869. }
  5870. return true;
  5871. }
  5872. public bool CheckWaferNeedProcess(ModuleName waferModule, int waferSlot, ModuleName processIn = ModuleName.System)
  5873. {
  5874. WaferInfo wafer = WaferManager.Instance.GetWafer(waferModule, waferSlot);
  5875. if (wafer.IsEmpty)
  5876. return false;
  5877. if (wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null)
  5878. return false;
  5879. if (wafer.NextSequenceStep >= wafer.ProcessJob.Sequence.Steps.Count)
  5880. return false;
  5881. for (int i = wafer.NextSequenceStep; i < wafer.ProcessJob.Sequence.Steps.Count; i++)
  5882. {
  5883. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5884. .Contains(ModuleName.PM1) || wafer.ProcessJob.Sequence.Steps[i].StepModules
  5885. .Contains(ModuleName.PM2))
  5886. {
  5887. if (processIn == ModuleName.System)
  5888. return true;
  5889. //if (_mapLpPm[(ModuleName)wafer.OriginStation] != processIn)
  5890. // return false;
  5891. if (wafer.ProcessJob.Sequence.Steps[i].StepModules
  5892. .Contains(processIn))
  5893. return true;
  5894. }
  5895. }
  5896. return false;
  5897. }
  5898. private List<Tuple<WaferType, int>> GetWaferTypeSlots()
  5899. {
  5900. List<Tuple<WaferType, int>> slots = new List<Tuple<WaferType, int>>();
  5901. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing);
  5902. if (pj == null)
  5903. return slots;
  5904. if (pj.SideDummySlots != null && pj.SideDummySlots.Count > 0)
  5905. {
  5906. pj.SideDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.SD, x)));
  5907. }
  5908. if (pj.ExtraDummySlots != null && pj.ExtraDummySlots.Count > 0)
  5909. {
  5910. pj.ExtraDummySlots.ForEach(x => slots.Add(Tuple.Create(WaferType.ED, x)));
  5911. }
  5912. if (pj.ProductSlots != null && pj.ProductSlots.Count > 0)
  5913. {
  5914. pj.ProductSlots.ForEach(x => slots.Add(Tuple.Create(WaferType.P, x)));
  5915. }
  5916. if (pj.Monitor1Slots != null && pj.Monitor1Slots.Count > 0)
  5917. {
  5918. pj.Monitor1Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M1, x)));
  5919. }
  5920. if (pj.Monitor2Slots != null && pj.Monitor2Slots.Count > 0)
  5921. {
  5922. pj.Monitor2Slots.ForEach(x => slots.Add(Tuple.Create(WaferType.M2, x)));
  5923. }
  5924. return slots.OrderByDescending(x => x.Item2).ToList();
  5925. }
  5926. private string GetMappingSlot(ModuleName module)
  5927. {
  5928. string mappingSlot = string.Empty;
  5929. var wafers = WaferManager.Instance.GetWafers(module);
  5930. if (wafers != null)
  5931. {
  5932. for (int i = 0; i < wafers.Length; i++)
  5933. {
  5934. if (!wafers[i].IsEmpty)
  5935. mappingSlot += "1";
  5936. else
  5937. mappingSlot += "0";
  5938. }
  5939. }
  5940. return mappingSlot;
  5941. }
  5942. private void AdjustDischargeSlots()
  5943. {
  5944. _sideDummySlots.Clear();
  5945. _extraDummySlots.Clear();
  5946. _productSlots.Clear();
  5947. _monitor1Slots.Clear();
  5948. _monitor2Slots.Clear();
  5949. for (int i = 0; i < SC.GetValue<int>($"Boat.SlotCount"); i++)
  5950. {
  5951. if (!WaferManager.Instance.CheckHasWafer(_pm1.Module, i))
  5952. continue;
  5953. var wafer = WaferManager.Instance.GetWafer(_pm1.Module, i);
  5954. if (wafer == null || wafer.IsEmpty)
  5955. continue;
  5956. switch (wafer.WaferType)
  5957. {
  5958. case WaferType.SD:
  5959. _sideDummySlots.Add(i);
  5960. break;
  5961. case WaferType.ED:
  5962. _extraDummySlots.Add(i);
  5963. break;
  5964. case WaferType.P:
  5965. _productSlots.Add(i);
  5966. break;
  5967. case WaferType.M1:
  5968. _monitor1Slots.Add(i);
  5969. break;
  5970. case WaferType.M2:
  5971. _monitor2Slots.Add(i);
  5972. break;
  5973. }
  5974. }
  5975. if (SC.GetStringValue("System.ChargingOrderToBoat") == "FromTopToBottom")
  5976. {
  5977. _productSlots.Sort((x, y) => x.CompareTo(y));//升序
  5978. _monitor1Slots.Sort((x, y) => x.CompareTo(y));//升序
  5979. _monitor2Slots.Sort((x, y) => x.CompareTo(y));//升序
  5980. _extraDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  5981. _sideDummySlots.Sort((x, y) => x.CompareTo(y));//升序
  5982. }
  5983. else
  5984. {
  5985. _productSlots.Sort((x, y) => -x.CompareTo(y));//降序
  5986. _monitor1Slots.Sort((x, y) => -x.CompareTo(y));//降序
  5987. _monitor2Slots.Sort((x, y) => -x.CompareTo(y));//降序
  5988. _extraDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  5989. _sideDummySlots.Sort((x, y) => -x.CompareTo(y));//降序
  5990. }
  5991. }
  5992. public void CreatePj(string processName)
  5993. {
  5994. _dbCallback.PjCreated(processName);
  5995. }
  5996. public void StartPj()
  5997. {
  5998. _dbCallback.PjStart();
  5999. }
  6000. public void EndPj(string endStatus)
  6001. {
  6002. _dbCallback.PjUpdated();
  6003. _dbCallback.PjFinished(endStatus);
  6004. }
  6005. public void PjUpdated()
  6006. {
  6007. _dbCallback.PjUpdated();
  6008. }
  6009. public void PjFinished(string endStatus)
  6010. {
  6011. _dbCallback.PjFinished(endStatus);
  6012. }
  6013. #endregion Logic Check
  6014. public void CoolingSkip()
  6015. {
  6016. _isCoolingSkip = true;
  6017. }
  6018. public string GetFirstPJId()
  6019. {
  6020. return _dbCallback.GetFirstPJId();
  6021. }
  6022. public string GetFirstPJStatus()
  6023. {
  6024. if (_lstProcessJobs == null || _lstProcessJobs.Count == 0)
  6025. {
  6026. return "";
  6027. }
  6028. return _lstProcessJobs[0].ProcessingState.ToString();
  6029. }
  6030. #region FA
  6031. public bool IsCJExisted(string cjid)
  6032. {
  6033. return _lstControlJobs.Exists(x => x.Name == cjid);
  6034. }
  6035. public bool IsCJExcuting(string cjid)
  6036. {
  6037. return _lstControlJobs.Exists(x => x.Name == cjid && x.State == EnumControlJobState.Executing);
  6038. }
  6039. public bool CreateControlJob(string jobId, List<string> pjIDs, out ControlJobInfo cj)
  6040. {
  6041. cj = null;
  6042. if (_lstControlJobs.Exists(x => x.Name == jobId))
  6043. {
  6044. //EV.PostWarningLog(LogSource, $"{jobId} is already created");
  6045. return false;
  6046. }
  6047. cj = new ControlJobInfo();
  6048. cj.Name = jobId;
  6049. //cj.Module = module;
  6050. cj.LotName = jobId;
  6051. cj.LotInnerId = Guid.NewGuid();
  6052. cj.LotWafers = new List<WaferInfo>();
  6053. cj.CreateTime = DateTime.Now;
  6054. cj.SetState(EnumControlJobState.Queued);
  6055. foreach (var pjName in pjIDs)
  6056. {
  6057. var pj = _lstProcessJobs.FirstOrDefault(x => x.Name == pjName);
  6058. if (pj == null)
  6059. {
  6060. LOG.Info($"not find {pjName} while create control job");
  6061. continue;
  6062. }
  6063. pj.ControlJobName = jobId;
  6064. cj.ProcessJobNameList.Add(pj.Name);
  6065. }
  6066. if (!_lstControlJobs.Contains(cj))
  6067. _lstControlJobs.Add(cj);
  6068. _faCallback.JobCreated(cj);
  6069. //if ((Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).IsExcuteIdleRecipe)
  6070. // (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule).EndIdleRecipe();
  6071. return true;
  6072. }
  6073. private bool CheckWaferStatus(List<Tuple<string, string>> useStockers, bool isNeedCheckMonitor, bool isNeedCheckP, out string reason)
  6074. {
  6075. reason = string.Empty;
  6076. if (SC.GetValue<bool>("System.IsCycleMode"))
  6077. {
  6078. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  6079. {
  6080. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  6081. continue;
  6082. var wafers = WaferManager.Instance.GetWafers(module);
  6083. if (wafers == null)
  6084. continue;
  6085. foreach (var wafer in wafers)
  6086. {
  6087. if (wafer.IsEmpty)
  6088. continue;
  6089. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  6090. }
  6091. }
  6092. }
  6093. else
  6094. {
  6095. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  6096. {
  6097. if (!ModuleHelper.IsStocker(module) || !useStockers.Any(x => x.Item1 == module.ToString()))
  6098. continue;
  6099. var wafers = WaferManager.Instance.GetWafers(module);
  6100. if (wafers == null)
  6101. continue;
  6102. if (SC.GetValue<bool>("System.EnableWarningFailedWafer"))
  6103. {
  6104. if (wafers.ToList().Any(x => x.ProcessState == EnumWaferProcessStatus.Failed))
  6105. {
  6106. reason = $"{module} has failed wafers.";
  6107. return false;
  6108. }
  6109. }
  6110. foreach (var wafer in wafers)
  6111. {
  6112. if (wafer.IsEmpty)
  6113. continue;
  6114. if (wafer.ProcessState != EnumWaferProcessStatus.Idle)
  6115. {
  6116. if (SC.GetValue<bool>("System.EnableWarningWaferProcessState"))
  6117. {
  6118. if (wafer.WaferType == WaferType.P && isNeedCheckP)
  6119. {
  6120. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  6121. return false;
  6122. }
  6123. if (isNeedCheckMonitor)
  6124. {
  6125. if (wafer.WaferType == WaferType.M)
  6126. {
  6127. reason = $"{(ModuleName)wafer.OriginStation} {wafer.WaferType} wafer already completed process.";
  6128. return false;
  6129. }
  6130. }
  6131. }
  6132. else
  6133. {
  6134. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  6135. }
  6136. }
  6137. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  6138. wafer.ProcessState = EnumWaferProcessStatus.Idle;
  6139. }
  6140. }
  6141. }
  6142. return true;
  6143. }
  6144. public bool CreateProcessJob(out ProcessJobInfo pj, params object[] objs)
  6145. {
  6146. var param = (Dictionary<string, object>)objs[0];
  6147. pj = null;
  6148. foreach (var module in Singleton<EquipmentManager>.Instance.Modules.Keys)
  6149. {
  6150. var lpModule = Singleton<EquipmentManager>.Instance.Modules[module] as LoadPortModule;
  6151. if (lpModule != null)
  6152. {
  6153. if (lpModule.FsmState == (int)LoadPortModule.STATE.Init)
  6154. {
  6155. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6156. return false;
  6157. }
  6158. if (lpModule.FsmState == (int)LoadPortModule.STATE.Error)
  6159. {
  6160. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6161. return false;
  6162. }
  6163. }
  6164. var fimsModule = Singleton<EquipmentManager>.Instance.Modules[module] as FIMSModule;
  6165. if (fimsModule != null)
  6166. {
  6167. if (fimsModule.FsmState == (int)FIMSModule.STATE.Init)
  6168. {
  6169. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6170. return false;
  6171. }
  6172. if (fimsModule.FsmState == (int)FIMSModule.STATE.Error)
  6173. {
  6174. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6175. return false;
  6176. }
  6177. }
  6178. var boatModule = Singleton<EquipmentManager>.Instance.Modules[module] as BoatModule;
  6179. if (boatModule != null)
  6180. {
  6181. if (boatModule.FsmState == (int)BoatModule.STATE.Init)
  6182. {
  6183. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6184. return false;
  6185. }
  6186. if (boatModule.FsmState == (int)BoatModule.STATE.Error)
  6187. {
  6188. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6189. return false;
  6190. }
  6191. }
  6192. var carrierRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as CarrierRobotModule;
  6193. if (carrierRobotModule != null)
  6194. {
  6195. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Init)
  6196. {
  6197. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6198. return false;
  6199. }
  6200. if (carrierRobotModule.FsmState == (int)CarrierRobotModule.STATE.Error)
  6201. {
  6202. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6203. return false;
  6204. }
  6205. }
  6206. var waferRobotModule = Singleton<EquipmentManager>.Instance.Modules[module] as WaferRobotModule;
  6207. if (waferRobotModule != null)
  6208. {
  6209. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Init)
  6210. {
  6211. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6212. return false;
  6213. }
  6214. if (waferRobotModule.FsmState == (int)WaferRobotModule.STATE.Error)
  6215. {
  6216. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6217. return false;
  6218. }
  6219. }
  6220. var pmModule = Singleton<EquipmentManager>.Instance.Modules[module] as PMModule;
  6221. if (pmModule != null)
  6222. {
  6223. if (pmModule.FsmState == (int)PMModule.STATE.Init)
  6224. {
  6225. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is init state");
  6226. return false;
  6227. }
  6228. if (pmModule.FsmState == (int)PMModule.STATE.Error)
  6229. {
  6230. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"{module} is error state");
  6231. return false;
  6232. }
  6233. }
  6234. }
  6235. if (!Singleton<EquipmentManager>.Instance.GetJobRecipeInfor((string)param["JobRecipe"], out string processRecipe, out string layoutRecipe, out int coolTime, out string reason))
  6236. {
  6237. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6238. return false;
  6239. }
  6240. if (string.IsNullOrEmpty(layoutRecipe))
  6241. {
  6242. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set("Parameter not valid, Layout Recipe is null");
  6243. return false;
  6244. }
  6245. var path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Layout\\{layoutRecipe}.rcp";
  6246. if (!File.Exists(path))
  6247. {
  6248. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Layout \"{layoutRecipe}\" not exist.");
  6249. return false;
  6250. }
  6251. path = $"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\Process\\{processRecipe}.rcp";
  6252. if (!File.Exists(path))
  6253. {
  6254. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Process recipe \"{processRecipe}\" not exist.");
  6255. return false;
  6256. }
  6257. if (!RecipeParser.Parse(processRecipe, ModuleName.PM1.ToString(), out var recipeHead, out var recipeSteps, out reason, "Process"))
  6258. {
  6259. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Load process recipe {processRecipe} failed, {reason}");
  6260. return false;
  6261. }
  6262. List<Tuple<string, string, List<int>>> useStockers = new List<Tuple<string, string, List<int>>>();
  6263. if (RecipeParser.LayoutRecipeParse(layoutRecipe, ModuleName.PM1.ToString(), out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out reason))
  6264. {
  6265. if (param.ContainsKey("CarrierPara"))
  6266. {
  6267. //Stocker1,P_00000036,25,Exist,1111111111111111111111111,LP1;Stocker2,P_00000037,25,Exist,1111111111111111111111111,LP2
  6268. var paras = param["CarrierPara"].ToString().Split(';');
  6269. if (paras != null && paras.Length > 0)
  6270. {
  6271. foreach (var item in paras)
  6272. {
  6273. //Stocker13,,21/22/23/24/25"
  6274. var arry = item.Split(',');
  6275. if (arry != null && arry.Length >= 2)
  6276. {
  6277. var pStocker = GetModule(arry[0]) as SchedulerStocker;
  6278. if (pStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("P") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6279. {
  6280. var slots = new List<int>();
  6281. if (arry.Length >= 3)
  6282. {
  6283. var slotParas = arry[2].Split('/').ToList();
  6284. if (slotParas != null && slotParas.Count > 0)
  6285. {
  6286. foreach (var slotPara in slotParas)
  6287. {
  6288. var ret = int.TryParse(slotPara, out int slot);
  6289. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6290. {
  6291. if (_lstProcessJobs.Any())
  6292. {
  6293. foreach (var job in _lstProcessJobs)
  6294. {
  6295. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6296. {
  6297. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6298. return false;
  6299. }
  6300. }
  6301. }
  6302. slots.Add(slot - 1);
  6303. }
  6304. }
  6305. }
  6306. }
  6307. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6308. }
  6309. }
  6310. }
  6311. }
  6312. }
  6313. if (param.ContainsKey("mCarrierPara"))
  6314. {
  6315. //Stocker14,P_00000014;Stocker15,P_00000015
  6316. var paras = param["mCarrierPara"].ToString().Split(';');
  6317. if (paras != null && paras.Length > 0)
  6318. {
  6319. if (!string.IsNullOrEmpty(paras[0]))
  6320. {
  6321. foreach (var item in paras)
  6322. {
  6323. var arry = item.Split(',');
  6324. if (arry != null && arry.Length >= 2)
  6325. {
  6326. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6327. if (mStocker != null && SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M"))
  6328. {
  6329. var slots = new List<int>();
  6330. if (arry.Length >= 3)
  6331. {
  6332. var slotParas = arry[2].Split('/').ToList();
  6333. if (slotParas != null && slotParas.Count > 0)
  6334. {
  6335. foreach (var slotPara in slotParas)
  6336. {
  6337. var ret = int.TryParse(slotPara, out int slot);
  6338. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6339. {
  6340. if (_lstProcessJobs.Any())
  6341. {
  6342. foreach (var job in _lstProcessJobs)
  6343. {
  6344. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6345. {
  6346. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6347. return false;
  6348. }
  6349. }
  6350. }
  6351. slots.Add(slot - 1);
  6352. }
  6353. }
  6354. }
  6355. }
  6356. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6357. }
  6358. }
  6359. }
  6360. }
  6361. }
  6362. }
  6363. if (param.ContainsKey("m1CarrierPara"))
  6364. {
  6365. //Stocker14,P_00000014;Stocker15,P_00000015
  6366. var paras = param["m1CarrierPara"].ToString().Split(';');
  6367. if (paras != null && paras.Length > 0)
  6368. {
  6369. if (!string.IsNullOrEmpty(paras[0]))
  6370. {
  6371. foreach (var item in paras)
  6372. {
  6373. var arry = item.Split(',');
  6374. if (arry != null && arry.Length >= 2)
  6375. {
  6376. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6377. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M1") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6378. {
  6379. var slots = new List<int>();
  6380. if (arry.Length >= 3)
  6381. {
  6382. var slotParas = arry[2].Split('/').ToList();
  6383. if (slotParas != null && slotParas.Count > 0)
  6384. {
  6385. foreach (var slotPara in slotParas)
  6386. {
  6387. var ret = int.TryParse(slotPara, out int slot);
  6388. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6389. {
  6390. if (_lstProcessJobs.Any())
  6391. {
  6392. foreach (var job in _lstProcessJobs)
  6393. {
  6394. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6395. {
  6396. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6397. return false;
  6398. }
  6399. }
  6400. }
  6401. slots.Add(slot - 1);
  6402. }
  6403. }
  6404. }
  6405. }
  6406. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6407. }
  6408. }
  6409. }
  6410. }
  6411. }
  6412. }
  6413. if (param.ContainsKey("m2CarrierPara"))
  6414. {
  6415. //Stocker14,P_00000014;Stocker15,P_00000015
  6416. var paras = param["m2CarrierPara"].ToString().Split(';');
  6417. if (paras != null && paras.Length > 0)
  6418. {
  6419. if (!string.IsNullOrEmpty(paras[0]))
  6420. {
  6421. foreach (var item in paras)
  6422. {
  6423. var arry = item.Split(',');
  6424. if (arry != null && arry.Length >= 2)
  6425. {
  6426. var mStocker = GetModule(arry[0]) as SchedulerStocker;
  6427. if (mStocker != null && (SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("M2") || SC.GetStringValue($"System.Stocker.{arry[0]}WaferType").Contains("None")))
  6428. {
  6429. var slots = new List<int>();
  6430. if (arry.Length >= 3)
  6431. {
  6432. var slotParas = arry[2].Split('/').ToList();
  6433. if (slotParas != null && slotParas.Count > 0)
  6434. {
  6435. foreach (var slotPara in slotParas)
  6436. {
  6437. var ret = int.TryParse(slotPara, out int slot);
  6438. if (ret && slot - 1 >= 0 && !slots.Any(x => x == slot - 1))
  6439. {
  6440. if (_lstProcessJobs.Any())
  6441. {
  6442. foreach (var job in _lstProcessJobs)
  6443. {
  6444. if (job.Stockers.Any(x => x.Item1 == arry[0] && x.Item3.Contains(slot - 1)))
  6445. {
  6446. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Create job failed, already contains {arry[0]}.{slot} in previous process job");
  6447. return false;
  6448. }
  6449. }
  6450. }
  6451. slots.Add(slot - 1);
  6452. }
  6453. }
  6454. }
  6455. }
  6456. useStockers.Add(Tuple.Create(arry[0], arry[1], slots));
  6457. }
  6458. }
  6459. }
  6460. }
  6461. }
  6462. }
  6463. }
  6464. if (Singleton<FAJobController>.Instance.FaControlState != FAControlState.OnlineRemote.ToString())
  6465. useStockers.Sort(compare);
  6466. foreach (var s in _lstSideDummyStocker)
  6467. {
  6468. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.SD)
  6469. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6470. else
  6471. {
  6472. bool onRobot = false;
  6473. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6474. {
  6475. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6476. if (carrier.CarrierType == CarrierType.SD &&
  6477. carrier.InternalModuleName == s.Module)
  6478. {
  6479. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6480. onRobot = true;
  6481. }
  6482. }
  6483. if (!onRobot)
  6484. {
  6485. bool inFIMS = false;
  6486. foreach (var fims in _lstFIMSs)
  6487. {
  6488. if (!fims.IsOnline)
  6489. continue;
  6490. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6491. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.SD &&
  6492. carrier.InternalModuleName == s.Module)
  6493. {
  6494. inFIMS = true;
  6495. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6496. }
  6497. }
  6498. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6499. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6500. }
  6501. }
  6502. }
  6503. foreach (var s in _lstExtraDummyStocker)
  6504. {
  6505. if (CarrierManager.Instance.CheckHasCarrier(s.Module, 0) && CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierType == CarrierType.ED)
  6506. useStockers.Add(Tuple.Create(s.Module.ToString(), CarrierManager.Instance.GetCarrier(s.Module, 0).CarrierId, new List<int>()));
  6507. else
  6508. {
  6509. bool onRobot = false;
  6510. if (CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
  6511. {
  6512. var carrier = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot, 0);
  6513. if (carrier.CarrierType == CarrierType.ED &&
  6514. carrier.InternalModuleName == s.Module)
  6515. {
  6516. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6517. onRobot = true;
  6518. }
  6519. }
  6520. if (!onRobot)
  6521. {
  6522. bool inFIMS = false;
  6523. foreach (var fims in _lstFIMSs)
  6524. {
  6525. if (!fims.IsOnline)
  6526. continue;
  6527. var carrier = CarrierManager.Instance.GetCarrier(fims.Module, 0);
  6528. if (!carrier.IsEmpty && carrier.CarrierType == CarrierType.ED &&
  6529. carrier.InternalModuleName == s.Module)
  6530. {
  6531. inFIMS = true;
  6532. useStockers.Add(Tuple.Create(s.Module.ToString(), carrier.CarrierId, new List<int>()));
  6533. }
  6534. }
  6535. if (!inFIMS && CarrierManager.Instance.GetLocationByInternalCarrierModuleName(s.Module, CarrierType.SD) != null)
  6536. useStockers.Add(Tuple.Create(s.Module.ToString(), "", new List<int>()));
  6537. }
  6538. }
  6539. }
  6540. var wafers = WaferManager.Instance.GetWafers(_pm1.Module);
  6541. if (wafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused) &&
  6542. SC.GetValue<bool>("System.IsEnableDummyWaferDischarge"))
  6543. {
  6544. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in boat");
  6545. return false;
  6546. }
  6547. if (wafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6548. {
  6549. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in boat");
  6550. return false;
  6551. }
  6552. var robotWafers = WaferManager.Instance.GetWafers(ModuleName.WaferRobot);
  6553. if (robotWafers.Any(x => !x.IsEmpty) && !_lstProcessJobs.Any(x => x.State == EnumProcessJobState.Processing || x.State == EnumProcessJobState.Paused))
  6554. {
  6555. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have wafer in wafer robot");
  6556. return false;
  6557. }
  6558. if (robotWafers.Any(x => !x.IsEmpty && x.WaferType == WaferType.None))
  6559. {
  6560. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have unknown wafer in wafer robot");
  6561. return false;
  6562. }
  6563. if (!CheckWaferStatus(useStockers, true, true, out reason))
  6564. {
  6565. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6566. return false;
  6567. }
  6568. //if (!CheckWaferStatus(useStockers, out reason))
  6569. //{
  6570. // Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set(reason);
  6571. // return false;
  6572. //}
  6573. foreach (var stocker in useStockers)
  6574. {
  6575. if (CarrierManager.Instance.CheckHasCarrier($"{stocker.Item1}", 0) &&
  6576. CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName.ToString() != stocker.Item1)
  6577. {
  6578. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Carrier of {stocker.Item1} is not match stocker module name {CarrierManager.Instance.GetCarrier($"{stocker.Item1}", 0).InternalModuleName}");
  6579. return false;
  6580. }
  6581. }
  6582. bool isOnlyCharge = false;
  6583. if (param.ContainsKey("Charge"))
  6584. {
  6585. bool.TryParse(param["Charge"].ToString(), out isOnlyCharge);
  6586. }
  6587. var pjJobId = param["PJID"].ToString();
  6588. if (_lstProcessJobs.Exists(x => x.Name == pjJobId))
  6589. {
  6590. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"Already have the same pj id={pjJobId}");
  6591. return false;
  6592. }
  6593. pj = new ProcessJobInfo();
  6594. pj.Name = pjJobId;
  6595. pj.JobRecipe = param.ContainsKey("JobRecipe") ? param["JobRecipe"].ToString() : "";
  6596. pj.ProcessRecipe = processRecipe;
  6597. pj.LayoutRecipe = layoutRecipe;
  6598. pj.ControlJobName = "";
  6599. pj.SetState(EnumProcessJobState.Queued);
  6600. pj.CreateTime = DateTime.Now;
  6601. pj.Stockers = useStockers;
  6602. pj.SlotWafers = new List<Tuple<ModuleName, int>>();
  6603. pj.ProcessingState = EnumProcessingState.WaitingMaterial;
  6604. pj.CoolTimeSec = coolTime;
  6605. //pj.IsEmptyLayout = !layoutRecipeDataExpert.Items.Any(x => x != "----");
  6606. //pj.IsOnlyCharge = isOnlyCharge;
  6607. if (!CheckChargeRule(pj, out bool waferShort, false, true, out reason))
  6608. {
  6609. Singleton<EquipmentManager>.Instance.ChargeWaferJobStartFailedWarning.Set($"layout recipe {layoutRecipe} check charge rule failed, {reason}");
  6610. return false;
  6611. }
  6612. _lstProcessJobs.Add(pj);
  6613. //_faCallback.JobCreated(pj);
  6614. return true;
  6615. }
  6616. #endregion
  6617. private bool InvokeCoolingAbort(string arg1, object[] args)
  6618. {
  6619. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6620. if (pj != null)
  6621. {
  6622. pj.CoolTimeSec = 0;
  6623. }
  6624. return true;
  6625. }
  6626. private bool InvokeCoolingModify(string arg1, object[] args)
  6627. {
  6628. var pj = _lstProcessJobs.FirstOrDefault(x => x.State == EnumProcessJobState.Processing && x.ProcessingState == EnumProcessingState.Cooling);
  6629. if (pj != null && args != null && args.Length > 0)
  6630. {
  6631. float.TryParse(args[0].ToString(), out float addCoolTime);
  6632. pj.CoolTimeSec = (int)addCoolTime;
  6633. }
  6634. return true;
  6635. }
  6636. private List<string> GetBoatSlotMap()
  6637. {
  6638. var wafers = WaferManager.Instance.GetWafers(ModuleName.PM1);
  6639. if (wafers != null)
  6640. {
  6641. List<string> slotMap = new List<string>();
  6642. foreach (var wafer in wafers)
  6643. {
  6644. if (wafer == null || wafer.IsEmpty)
  6645. {
  6646. slotMap.Add("");
  6647. continue;
  6648. }
  6649. if (wafer.WaferType == WaferType.ED || wafer.WaferType == WaferType.SD)
  6650. slotMap.Add("filler");
  6651. else
  6652. slotMap.Add(wafer.WaferID);
  6653. }
  6654. return slotMap;
  6655. }
  6656. return null;
  6657. }
  6658. }
  6659. }