FurnaceELK/Furnace/FurnaceRT/Equipments/CarrierRobots/CarrierRobotPlace.cs

using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using DocumentFormat.OpenXml.Bibliography;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.LogicUnits;
using System;
using System.Collections.Generic;
using FurnaceRT.Equipments.FIMSs;
using FurnaceRT.Equipments.LPs;
using FurnaceRT.Equipments.Stockers;
using FurnaceRT.Equipments.Systems;
using FurnaceRT.Equipments.WaferRobots;
using static FurnaceRT.Equipments.FIMSs.FIMSModule;

namespace FurnaceRT.Equipments.CarrierRobots
{
    public class CarrierRobotPlace : ModuleRoutine, IRoutine
    {
        enum RoutineStep
        {
            SetLPLoad,
            SetLPUnload,
            SetBufferTargetPosition,
            SetBufferMoveTo,
            Delay,
            Goto,
            Place,
            DoorOpen,
            DoorClose,
            RobotRequestCassettePresent,
            CheckCassetteInfoByRobotSensor,
            SetStageLock,
            SetStageUnlock,
            CheckBeforePlace,
            CheckGotoFinish,
            SetRobotActionCommand,
        }

        private CarrierRobotModule _cassetteRobotModule;
        private ModuleName _destination;
        private int _destinationSlot;
        private Hand _blade;
        private int _timeout = 0;
        private RD_TRIG _holdTrig = new RD_TRIG();
        private R_TRIG _emergencyStopTrig = new R_TRIG();
        private R_TRIG _pauseTrig = new R_TRIG();
        private R_TRIG _resumeTrig = new R_TRIG();
        private RoutineStep _routineStep;
        private double _durationTime = 0;
        private bool _isHasAlarm = false;
        private bool _needStartCheck = true;

        public CarrierRobotPlace(CarrierRobotModule cassetteModule)
        {
            _cassetteRobotModule = cassetteModule;
            Module = cassetteModule.Module;
            Name = "Place";
        }

        public void Init(ModuleName destination, int destinationSlot, Hand blade, bool isHasAlarm)
        {
            _destination = destination;
            _destinationSlot = destinationSlot;
            _blade = blade;

            var para = new List<object> { _destination, _destinationSlot, _blade, true };
            _cassetteRobotModule.PlaceCassetteFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.PlaceCassetteFailAlarm.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.PlaceCassetteTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.PlaceCassetteTimeoutAlarm.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.RequestCassettePresentFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.RequestCassettePresentFailAlarm.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.SetStageValveFailAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.SetStageValveFailAlarm.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.SetStageValveTimeout.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.SetStageValveTimeout.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.RobotHasError.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.RobotHasError.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.ShutterOpenTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.ShutterOpenTimeoutAlarm.RetryMessageParas = para.ToArray();

            _cassetteRobotModule.ShutterCloseTimeoutAlarm.RetryMessage = (int)CarrierRobotModule.MSG.PlaceRetry;
            _cassetteRobotModule.ShutterCloseTimeoutAlarm.RetryMessageParas = para.ToArray();

            _isHasAlarm = isHasAlarm;
            if (!_isHasAlarm)
                _needStartCheck = true;
        }

        public Result Start(params object[] objs)
        {
            // 抛出过alarm就不reset
            if (!_isHasAlarm)
            {
                Reset();
            }
            else
            {
                _historySteps.Remove((int)_routineStep);
                _isHasAlarm = false;
                ResetState();
            }

            _holdTrig.RST = true;
            _emergencyStopTrig.RST = true;
            _pauseTrig.RST = true;
            _resumeTrig.RST = true;

            _timeout = SC.GetValue<int>($"{Module}.MotionTimeout");

            if (_needStartCheck)
            {
                if (!Singleton<EquipmentManager>.Instance.Modules.ContainsKey(_destination))
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for not install");
                    return Result.FAIL;
                }
                if (ModuleHelper.IsLoadPort(_destination))
                {
                    var lpModule = Singleton<EquipmentManager>.Instance.Modules[_destination] as LoadPortModule;
                    if (lpModule == null)
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for not install");
                        return Result.FAIL;
                    }
                    if (lpModule != null && !lpModule.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, _destinationSlot, EnumTransferType.Place, out string reason))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for {reason}");
                        return Result.FAIL;
                    }
                }
                else if (_destination == ModuleName.FIMS1 || _destination == ModuleName.FIMS2)
                {
                    var fims = Singleton<EquipmentManager>.Instance.Modules[_destination] as FIMSModule;
                    if (fims == null)
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for not install");
                        return Result.FAIL;
                    }
                    if (fims != null && !fims.CheckReadyForTransfer(ModuleHelper.Converter(Module), _blade, _destinationSlot, EnumTransferType.Place, out string reason))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for {reason}");
                        return Result.FAIL;
                    }

                    if (!SC.GetValue<bool>("System.IsSimulatorMode"))
                    {
                        if (fims != null && fims.IsFoupExist)
                        {
                            _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for carrier is present");
                            return Result.FAIL;
                        }
                    }
                }
                else
                {
                    var stockerModule = Singleton<EquipmentManager>.Instance.Modules[_destination] as StockerModule;
                    if (stockerModule == null)
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for not install");
                        return Result.FAIL;
                    }
                    if (!SC.GetValue<bool>("System.IsSimulatorMode"))
                    {
                        if (stockerModule != null && stockerModule.IsFoupPresent)
                        {
                            _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for carrier is present");
                            return Result.FAIL;
                        }
                    }
                }

                if (SC.GetValue<bool>("System.IsSimulatorMode"))
                {
                    if (!CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
                    {
                        _cassetteRobotModule.BladeCassetteNotPresentWarning.Set($"{ModuleName.CarrierRobot} cassette not present");
                        return Result.FAIL;
                    }
                }
                else
                {
                    if (!_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1 || !CarrierManager.Instance.CheckHasCarrier(ModuleName.CarrierRobot, 0))
                    {
                        _cassetteRobotModule.BladeCassetteNotPresentWarning.Set($"{ModuleName.CarrierRobot} cassette not present");
                        return Result.FAIL;
                    }
                }

                if (!CarrierManager.Instance.CheckNoCarrier(_destination, 0))
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for carrier is present");
                    return Result.FAIL;
                }
            }

            Notify($"Start");

            return Result.RUN;
        }

        public void Abort()
        {
            _cassetteRobotModule.ResetRobotActionCommand();
            _cassetteRobotModule.Stop();
            (Singleton<EquipmentManager>.Instance.Modules[_destination] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _destinationSlot, EnumTransferType.Place);
        }

        public override Result Monitor()
        {
            try
            {
                PauseRountine(_cassetteRobotModule.CarrierRobotDevice.IsPause);
                if (_cassetteRobotModule.CarrierRobotDevice.IsPause)
                    return Result.RUN;

                CheckBeforePlace((int)RoutineStep.CheckBeforePlace, _destination, _destinationSlot, _blade);

                if (ModuleHelper.IsBufferStocker(_destination))
                {
                    Goto((int)RoutineStep.Goto, _destination, _destinationSlot, _blade, false, _timeout);

                    SetBufferTargetPosition((int)RoutineStep.SetBufferTargetPosition, _destination, _timeout);

                    SetBufferMoveTo((int)RoutineStep.SetBufferMoveTo, _destination, _timeout);

                    CheckGotoFinish((int)RoutineStep.CheckGotoFinish, _destination, _timeout);
                }

                if (_destination == ModuleName.LP1 || _destination == ModuleName.LP2)
                {
                    Goto((int)RoutineStep.Goto, _destination, _destinationSlot, _blade, false, _timeout);

                    SaferDoorOpen((int)RoutineStep.DoorOpen, true, _timeout);

                    CheckGotoFinish((int)RoutineStep.CheckGotoFinish, _destination, _timeout);

                    SetLPLoad((int)RoutineStep.SetLPLoad, _destination, _timeout);
                }
                if (_destination == ModuleName.LP3 || _destination == ModuleName.LP4)
                {
                    Goto((int)RoutineStep.Goto, _destination, _destinationSlot, _blade, false, _timeout);

                    CheckGotoFinish((int)RoutineStep.CheckGotoFinish, _destination, _timeout);

                    SetLPLoad((int)RoutineStep.SetLPLoad, _destination, _timeout);
                }

                if (_cassetteRobotModule.TrigActionCommand != null)
                    SetRobotActionCommand((int)RoutineStep.SetRobotActionCommand, _destination, _timeout);

                Place((int)RoutineStep.Place, _destination, _destinationSlot, _blade, _timeout);

                if (_destination == ModuleName.LP1 || _destination == ModuleName.LP2)
                {
                    SetLPUnload((int)RoutineStep.SetLPUnload, _destination, _timeout);
                    SaferDoorOpen((int)RoutineStep.DoorClose, false, _timeout);
                }
                if (_destination == ModuleName.LP3 || _destination == ModuleName.LP4)
                {
                    SetLPUnload((int)RoutineStep.SetLPUnload, _destination, _timeout);
                }
                //RobotRequestCassettePresent((int)RoutineStep.RobotRequestCassettePresent, _blade, _timeout);

                CheckCassetteInfoByRobotSensor((int)RoutineStep.CheckCassetteInfoByRobotSensor, _blade, false);
            }
            catch (RoutineBreakException)
            {
                return Result.RUN;
            }
            catch (RoutineFaildException ex)
            {
                _cassetteRobotModule.ResetRobotActionCommand();
                PlaceEndInfo();
                return Result.FAIL;
            }

            _cassetteRobotModule.ResetRobotActionCommand();
            PlaceEndInfo();

            Notify("Finished");
            return Result.DONE;
        }


        private void PlaceEndInfo()
        {
            (Singleton<EquipmentManager>.Instance.Modules[_destination] as ITransferTarget)?.NoteTransferStop(ModuleHelper.Converter(_cassetteRobotModule.Module), _blade, _destinationSlot, EnumTransferType.Place);


            var stockerModule = Singleton<EquipmentManager>.Instance.Modules[_destination] as StockerModule;
            var stockerFoupInfo = CarrierManager.Instance.GetCarrier(_destination);
            stockerFoupInfo.UICarrierStatusEnum = CarrierStatus.READY;
            Singleton<EquipmentManager>.Instance.SetVisibility(stockerFoupInfo, true);


            var carrierRobotFoupInfo = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
            Singleton<EquipmentManager>.Instance.SetVisibility(carrierRobotFoupInfo, false);

        }

        private void SetLPLoad(int id, ModuleName source, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Set {source} load");

                var lp = Singleton<EquipmentManager>.Instance.Modules[source] as LoadPortModule;
                if (lp != null)
                    lp.LPDevice.Load(out string reason);
                return true;
            }, () =>
            {
                return true;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void SetLPUnload(int id, ModuleName source, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Set {source} unload");

                var lp = Singleton<EquipmentManager>.Instance.Modules[source] as LoadPortModule;
                if (lp != null)
                    lp.LPDevice.Unload(out string reason);
                return true;
            }, () =>
            {
                return true;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }
        private void SetRobotActionCommand(int id, ModuleName source, int timeout)
        {
            _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Set robot action command target position {source}");

                _cassetteRobotModule.SetRobotActionCommand(source, EnumTransferType.Place);

                return true;
            }, () =>
            {
                return _cassetteRobotModule.CheckRobotActionCommand(source, EnumTransferType.Place);
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    _cassetteRobotModule.PlaceCassetteTimeoutAlarm.Set($"place to {source} failed for robot action command interlock");
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    _cassetteRobotModule.PlaceCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }
        private void SetBufferTargetPosition(int id, ModuleName source, int timeout)
        {
            _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Set buffer target position {source}");

                _cassetteRobotModule.SetBufferTargetPosition(source.ToString());

                return true;
            }, () =>
            {
                return _cassetteRobotModule.CheckBufferTargetPosition(source.ToString());
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {source} failed for set buffer target position");
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }
        private void SetBufferMoveTo(int id, ModuleName target, int timeout)
        {
            _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Set buffer move to {target}");

                _cassetteRobotModule.SetBufferMoveTo();

                return true;
            }, () =>
            {
                return _cassetteRobotModule.BufferDevice.IsReady && _cassetteRobotModule.BufferDevice.IsInPosition;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    _cassetteRobotModule.PlaceCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void Place(int id, ModuleName target, int slot, Hand hand, int timeout)
        {
            _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Send place to {target} command to robot device");
                string reason;
                (Singleton<EquipmentManager>.Instance.Modules[target] as ITransferTarget)?.NoteTransferStart(ModuleHelper.Converter(_cassetteRobotModule.Module), hand, slot, EnumTransferType.Place);
                if (!_cassetteRobotModule.RobotPlace(target, slot, hand, out reason))
                {
                    //_cassetteRobotModule.PlaceCassetteFailAlarm.Description = reason;
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set(reason);
                    return false;
                }
                return true;
            }, () =>
            {
                if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
                {
                    if (!ModuleHelper.IsLoadPort1And2(_destination))
                        return true;

                    if (_cassetteRobotModule.SensorFTRHomeCX != null && _cassetteRobotModule.SensorFTRHomeCX.Value)
                        return true;
                }

                return false;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    //_cassetteRobotModule.PlaceCassetteFailAlarm.Description = $"{_cassetteRobotModule.CassetteRobotDevice.ErrorCode}";
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    //_cassetteRobotModule.PlaceCassetteTimeoutAlarm.Description = $"timeout over {timeout} seconds";
                    _cassetteRobotModule.PlaceCassetteTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void RobotRequestCassettePresent(int id, Hand hand, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify("Request cassette present");

                if (!_cassetteRobotModule.RequestCassettePresent(hand, out string reason))
                {
                    //_cassetteRobotModule.RequestCassettePresentFailAlarm.Description = reason;
                    _cassetteRobotModule.RequestCassettePresentFailAlarm.Set(reason);
                    return false;
                }

                return true;
            }, () =>
            {
                if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
                {
                    return true;
                }

                return false;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    //_cassetteRobotModule.RequestCassettePresentTimeoutAlarm.Description = $"timeout over {timeout} seconds";
                    _cassetteRobotModule.RequestCassettePresentTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void CheckCassetteInfoByRobotSensor(int id, Hand hand, bool isAfterPick)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Check cassette info by robot RQ present");

                if (SC.GetValue<bool>("System.IsSimulatorMode"))
                    return true;

                if (hand == Hand.Blade1 || hand == Hand.Both)
                {
                    if (!isAfterPick && _cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1)
                    {
                        //_cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Description = "Cassette Robot sensor found cassette on blade 1";
                        _cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Set("Cassette Robot sensor found cassette on blade 1");
                        return false;
                    }

                    if (isAfterPick && !_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade1)
                    {
                        //_cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Description = "Cassette Robot sensor no cassette on blade 1";
                        _cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Set("Cassette Robot sensor no cassette on blade 1");
                        return false;
                    }
                }

                if (hand == Hand.Blade2 || hand == Hand.Both)
                {
                    if (!isAfterPick && _cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade2)
                    {
                        //_cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Description = "Cassette Robot sensor found cassette on blade 2";
                        _cassetteRobotModule.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm.Set("Cassette Robot sensor found cassette on blade 2");
                        return false;
                    }

                    if (isAfterPick && !_cassetteRobotModule.CarrierRobotDevice.IsWaferPresenceOnBlade2)
                    {
                        //_cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Description = "Cassette Robot sensor no cassette on blade 2";
                        _cassetteRobotModule.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm.Set("Cassette Robot sensor no cassette on blade 2");
                        return false;
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    //_cassetteRobotModule.CheckCassetteInformationFailAlarm.Description = $"check cassette info failed.";
                    _cassetteRobotModule.CheckCassetteInformationFailAlarm.Set($"check cassette info failed.");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void CheckBeforePlace(int id, ModuleName target, int slot, Hand blade)
        {
            Tuple<bool, Result> ret = Execute(id, () =>
            {
                Notify($"Check place to {target} condition");
                string reason = string.Empty;

                if (_cassetteRobotModule.CarrierRobotDevice.IsError)
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
                    return false;
                }

                if (!_cassetteRobotModule.CarrierRobotDevice.IsReady())
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for robot isn't Ready");
                    return false;
                }

                if (!CarrierManager.Instance.CheckNoCarrier(_destination, 0))
                {
                    _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {_destination} failed for pod is present");
                    return false;
                }

                if (blade == Hand.Blade1)
                {
                    if (!CarrierManager.Instance.CheckNoCarrier(target, 0))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for {target} has carrier");
                        return false;
                    }

                    if (!CarrierManager.Instance.CheckHasCarrier(Module, 0))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for blade no carrier");
                        return false;
                    }
                }
                else if (blade == Hand.Blade2)
                {
                    if (!CarrierManager.Instance.CheckNoCarrier(target, 0))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for {target} has carrier");
                        return false;
                    }

                    if (!CarrierManager.Instance.CheckHasCarrier(Module, 0))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for blade no carrier");
                        return false;
                    }
                }
                else
                {
                    if (!CarrierManager.Instance.CheckNoCarrier(target, 0))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for {target} has carrier");
                        return false;
                    }

                    if (!CarrierManager.Instance.CheckHasCarrier(Module, 0))
                    {
                        _cassetteRobotModule.PlaceCassetteFailAlarm.Set($"place to {target} failed for blade no carrier");
                        return false;
                    }
                }

                return true;
            });

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw (new RoutineFaildException());
                }
            }

            _needStartCheck = false;
        }

        private void Goto(int id, ModuleName target, int slot, Hand hand, bool isPickReady, int timeout)
        {
            _routineStep = (RoutineStep)Enum.Parse(typeof(RoutineStep), id.ToString());
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Send goto to {target} command to robot device");
                string reason;
                _cassetteRobotModule.RobotGoto(target, slot, hand, isPickReady, out reason);
                return true;
            }, () =>
            {
                return true;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    _cassetteRobotModule.GotoFailAlarm.Set($"goto to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    _cassetteRobotModule.GotoTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void CheckGotoFinish(int id, ModuleName target, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Check goto to {target} command finish");

                return true;
            }, () =>
            {
                if (_cassetteRobotModule.CarrierRobotDevice.IsError)
                    return null;

                if (_cassetteRobotModule.CarrierRobotDevice.IsReady() && !_cassetteRobotModule.CarrierRobotDevice.IsError)
                {
                    return true;
                }

                return false;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    _cassetteRobotModule.GotoFailAlarm.Set($"goto to {target} failed for robot error, error code={_cassetteRobotModule.CarrierRobotDevice.ErrorCode}");
                    throw (new RoutineFaildException());
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    _cassetteRobotModule.GotoTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw (new RoutineBreakException());
            }
        }

        private void SaferDoorOpen(int id, bool isOpen, int timeout)
        {
            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
            {
                Notify($"Shutter Door {(isOpen ? "Open" : "Close")}");

                if (isOpen)
                    _cassetteRobotModule.DoorDevice.Open();
                else
                    _cassetteRobotModule.DoorDevice.Close();

                if (isOpen)
                    (Singleton<EquipmentManager>.Instance.Modules[_destination] as LoadPortModule)?.LPDevice.Unclamp(out _);

                return true;
            }, () =>
            {
                return isOpen ? _cassetteRobotModule.DoorDevice.OpenCloseStatus == Devices.DeviceStatus.Open && (Singleton<EquipmentManager>.Instance.Modules[_destination] as LoadPortModule).IsReleased : _cassetteRobotModule.DoorDevice.OpenCloseStatus == Devices.DeviceStatus.Close;
            }, timeout * 1000);

            if (ret.Item1)
            {
                if (ret.Item2 == Result.FAIL)
                {
                    throw new RoutineFaildException();
                }
                else if (ret.Item2 == Result.TIMEOUT) //timeout
                {
                    if (isOpen)
                        _cassetteRobotModule.ShutterOpenTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    else
                        _cassetteRobotModule.ShutterCloseTimeoutAlarm.Set($"timeout over {timeout} seconds");
                    throw (new RoutineFaildException());
                }
                else
                    throw new RoutineBreakException();
            }
        }
    }
}