SequenceFormat.xml 2.8 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <Aitex>
  3. <TableSequenceFormat RecipeVersion="Furnace">
  4. <Catalog Type="Position">
  5. <Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection" >
  6. <!--<Selection Name="Aligner" DisplayName="Aligner" Parameter="AlignerAngle" />-->
  7. <Selection Name="Furnace" DisplayName="PM" Parameter="PMSelection,ProcessRecipe,CleanRecipeNoWafer,CleanIntervalNoWafer" />
  8. <!--<Selection Name="Buffer" DisplayName="Buffer" Parameter="CoolingTime" />-->
  9. </Item>
  10. </Catalog>
  11. <Catalog Type="Parameter">
  12. <Item Name="PMSelection" DisplayName="PM Selection" InputType="MultiSelection" >
  13. <Selection Name="PM1" DisplayName="PM1"/>
  14. <Selection Name="PM2" DisplayName="PM2"/>
  15. </Item>
  16. <Item Name="ProcessRecipe" DisplayName="Process Recipe" InputType="RecipeSelection" Parameter="Process" Min="0" Max="999999" />
  17. <Item Name="CoolingTime" DisplayName="Cooling Time(s)" InputType="NumInput" Min="0" Max="3600" />
  18. </Catalog>
  19. </TableSequenceFormat>
  20. <TableSequenceData RecipeVersion="Furnace" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="(Empty)">
  21. <Step></Step>
  22. </TableSequenceData>
  23. <TableRecipeSchema>
  24. <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
  25. <xs:simpleType name="booleanType">
  26. <xs:restriction base="xs:string">
  27. <xs:enumeration value="0" />
  28. <xs:enumeration value="1" />
  29. <xs:enumeration value="False" />
  30. <xs:enumeration value="True" />
  31. <xs:enumeration value="false" />
  32. <xs:enumeration value="true" />
  33. </xs:restriction>
  34. </xs:simpleType>
  35. <xs:element name="TableSequenceData">
  36. <xs:complexType>
  37. <xs:sequence>
  38. <xs:element maxOccurs="unbounded" name="Step">
  39. </xs:element>
  40. </xs:sequence>
  41. <xs:attribute name="RecipeVersion" type="xs:string" fixed="Furnace" use="required" />
  42. <xs:attribute name="CreatedBy" type="xs:string" use="required" />
  43. <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
  44. <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
  45. <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
  46. <xs:attribute name="Barcode" type="xs:string" use="required" />
  47. <xs:attribute name="Description" type="xs:string" use="required" />
  48. </xs:complexType>
  49. </xs:element>
  50. </xs:schema>
  51. </TableRecipeSchema>
  52. <Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
  53. </Aitex>