FurnaceELK/Furnace/FurnaceRT/Equipments/PMs/RecipeExecutions/RecipeParser.cs

using System;
using System.Collections.Generic;
using System.Xml;
using System.Reflection;
using Aitex.Common.Util;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using System.IO;
using MECF.Framework.UI.Client.CenterViews.Editors.Recipe;

namespace FurnaceRT.Equipments.PMs.RecipeExecutions
{
    public class RecipeParser
    {
        public static bool Parse(string recipeFile, string module, out RecipeHead recipeHead, out List<RecipeStep> recipeData, out string reason, string recipeType, int tableID = 1, RecipeHead mainHead = null)
        {
            reason = string.Empty;
            if (mainHead != null)
                recipeHead = mainHead;
            else
                recipeHead = new RecipeHead();
            recipeData = new List<RecipeStep>();

            string content = string.Empty;
            if (recipeType != "Process" && recipeType != "Idle" && recipeType != "Reset")
            {
                if (!File.Exists($"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue($"System.Recipe.Supported{recipeType}Type")}\\{recipeFile}.rcp"))
                    return true;
            }

            content = RecipeFileManager.Instance.LoadRecipe($"{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue($"System.Recipe.Supported{recipeType}Type")}", recipeFile, false);

            if (string.IsNullOrEmpty(content))
            {
                reason = $"{recipeFile} is not a valid recipe file";
                return false;
            }

            try
            {
                //获取工艺程序文件中允许的命令字符串列表
                //目的：如果工艺程序文件中含有规定之外的命令，则被禁止执行
                HashSet<string> recipeAllowedCommands = new HashSet<string>();
                XmlDocument rcpFormatDoc = new XmlDocument();
                string recipeSchema = PathManager.GetCfgDir() + $@"\Recipe\Furnace\Process\{SC.GetStringValue("System.SetUp.ToolType")}\RecipeFormat.xml";
                rcpFormatDoc.Load(recipeSchema);
                XmlNodeList rcpItemNodeList = rcpFormatDoc.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step");
                foreach (XmlElement item in rcpItemNodeList)
                    recipeAllowedCommands.Add(item.Attributes["ControlName"].Value);

                recipeAllowedCommands.Add("Temperature.ControlMode");
                recipeAllowedCommands.Add("Temperature.Correct");
                recipeAllowedCommands.Add("Temperature.PID");
                recipeAllowedCommands.Add("ConditionCheck");
                recipeAllowedCommands.Add("EventSetting");
                recipeAllowedCommands.Add("FilmThickFormula");
                recipeAllowedCommands.Add("FilmThickCoefficientA");
                recipeAllowedCommands.Add("FilmThickCoefficientB");
                recipeAllowedCommands.Add("AlarmTableIndex");
                recipeAllowedCommands.Add("RFSwitch");
                recipeAllowedCommands.Add("RFSetpoint");
                recipeAllowedCommands.Add("ForwardPowerAlarmWatchTable");
                recipeAllowedCommands.Add("PrAlarmWatchTable");
                recipeAllowedCommands.Add("PIAlarmWatchTable");
                recipeAllowedCommands.Add("C1Setpoint");
                recipeAllowedCommands.Add("C2Setpoint");
                recipeAllowedCommands.Add("C1AlarmWatchTable");
                recipeAllowedCommands.Add("C2AlarmWatchTable");
                recipeAllowedCommands.Add("VppAlarmWatchTable");
                recipeAllowedCommands.Add("VdcAlarmWatchTable");
                recipeAllowedCommands.Add("PressureSonserValue");
                recipeAllowedCommands.Add("PressureValveAngle");
                recipeAllowedCommands.Add("PressureSettingVG");
                recipeAllowedCommands.Add("PressCommand");
                recipeAllowedCommands.Add("PressValue");
                recipeAllowedCommands.Add("PressureAlarmTableNo");
                recipeAllowedCommands.Add("AbortRecipeTableIndex");
                recipeAllowedCommands.Add("AlarmConditionTable");
                recipeAllowedCommands.Add("LoaderCommand");
                recipeAllowedCommands.Add("LoaderValue");
                for (int i = 1; i < 11; i++)
                {
                    recipeAllowedCommands.Add($"AlarmAction.{i}");
                    recipeAllowedCommands.Add($"AlarmDetails.{i}");
                }

                for (int i = 1; i < 60; i++)
                {
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Set");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.SetUnit");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Ramprate");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.RamprateUnit");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Check");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.High");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Low");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Unit");
                }

                for (int i = 1; i < 200; i++)
                {
                    recipeAllowedCommands.Add($"AUX.{i}.Set");
                    recipeAllowedCommands.Add($"AUX.{i}.Check");
                    recipeAllowedCommands.Add($"AUX.{i}.High");
                    recipeAllowedCommands.Add($"AUX.{i}.Low");
                    recipeAllowedCommands.Add($"AUX.{i}.CheckUnit");
                }

                recipeAllowedCommands.Add("HeaterU.ZoneName");
                recipeAllowedCommands.Add("HeaterU.Set");
                recipeAllowedCommands.Add("HeaterU.SetUnit");
                recipeAllowedCommands.Add("HeaterU.Ramprate");
                recipeAllowedCommands.Add("HeaterU.RamprateUnit");
                recipeAllowedCommands.Add("HeaterU.Check");
                recipeAllowedCommands.Add("HeaterU.High");
                recipeAllowedCommands.Add("HeaterU.Low");
                recipeAllowedCommands.Add("HeaterU.Unit");

                recipeAllowedCommands.Add("HeaterCU.ZoneName");
                recipeAllowedCommands.Add("HeaterCU.Set");
                recipeAllowedCommands.Add("HeaterCU.SetUnit");
                recipeAllowedCommands.Add("HeaterCU.Ramprate");
                recipeAllowedCommands.Add("HeaterCU.RamprateUnit");
                recipeAllowedCommands.Add("HeaterCU.Check");
                recipeAllowedCommands.Add("HeaterCU.High");
                recipeAllowedCommands.Add("HeaterCU.Low");
                recipeAllowedCommands.Add("HeaterCU.Unit");

                recipeAllowedCommands.Add("HeaterC.ZoneName");
                recipeAllowedCommands.Add("HeaterC.Set");
                recipeAllowedCommands.Add("HeaterC.SetUnit");
                recipeAllowedCommands.Add("HeaterC.Ramprate");
                recipeAllowedCommands.Add("HeaterC.RamprateUnit");
                recipeAllowedCommands.Add("HeaterC.Check");
                recipeAllowedCommands.Add("HeaterC.High");
                recipeAllowedCommands.Add("HeaterC.Low");
                recipeAllowedCommands.Add("HeaterC.Unit");

                recipeAllowedCommands.Add("HeaterCL.ZoneName");
                recipeAllowedCommands.Add("HeaterCL.Set");
                recipeAllowedCommands.Add("HeaterCL.SetUnit");
                recipeAllowedCommands.Add("HeaterCL.Ramprate");
                recipeAllowedCommands.Add("HeaterCL.RamprateUnit");
                recipeAllowedCommands.Add("HeaterCL.Check");
                recipeAllowedCommands.Add("HeaterCL.High");
                recipeAllowedCommands.Add("HeaterCL.Low");
                recipeAllowedCommands.Add("HeaterCL.Unit");

                recipeAllowedCommands.Add("HeaterL.ZoneName");
                recipeAllowedCommands.Add("HeaterL.Set");
                recipeAllowedCommands.Add("HeaterL.SetUnit");
                recipeAllowedCommands.Add("HeaterL.Ramprate");
                recipeAllowedCommands.Add("HeaterL.RamprateUnit");
                recipeAllowedCommands.Add("HeaterL.Check");
                recipeAllowedCommands.Add("HeaterL.High");
                recipeAllowedCommands.Add("HeaterL.Low");
                recipeAllowedCommands.Add("HeaterL.Unit");

                recipeAllowedCommands.Add("Loader.Command");
                recipeAllowedCommands.Add("Loader.Speed1");
                recipeAllowedCommands.Add("Loader.Speed2");
                recipeAllowedCommands.Add("Loader.Speed3");
                recipeAllowedCommands.Add("Loader.RPM");

                recipeAllowedCommands.Add("Press.Command");
                recipeAllowedCommands.Add("Press.PID");
                recipeAllowedCommands.Add("Press.Set");
                recipeAllowedCommands.Add("Press.SlowVacSet");
                recipeAllowedCommands.Add("Press.ValveAngleSet");
                recipeAllowedCommands.Add("Press.IsWait");
                recipeAllowedCommands.Add("Press.LowWait");
                recipeAllowedCommands.Add("Press.HighWait");
                recipeAllowedCommands.Add("Press.WaitUnit");
                recipeAllowedCommands.Add("Press.WaitPress");

                //获取工艺程序文件中所有步的内容
                XmlDocument rcpDataDoc = new XmlDocument();
                rcpDataDoc.LoadXml(content);

                XmlNode nodeModule = null;
                if (recipeType == "Process" || recipeType == "Idle" || recipeType == "Reset")
                    nodeModule = rcpDataDoc.SelectSingleNode($"/Aitex/TableRecipeData/Module[@Name='{module}']");
                else
                    nodeModule = rcpDataDoc.SelectSingleNode($"/Aitex/TableRecipeData/Tables/Table[@Index='{tableID}']");
                if (nodeModule == null)
                {
                    reason = $"Recipe file does not contains step content for {module}";
                    return false;
                }

                XmlElement nodeConfig = nodeModule.SelectSingleNode($"Config") as XmlElement;
                if (nodeConfig != null)
                {
                    if (mainHead == null)
                    {
                        recipeHead.SubRecipe = nodeConfig.HasAttribute("Combination.SubRecipe") ? nodeConfig.Attributes["Combination.SubRecipe"].Value : "";
                        recipeHead.AlarmRecipe = nodeConfig.HasAttribute("Combination.AlarmRecipe") ? nodeConfig.Attributes["Combination.AlarmRecipe"].Value : "";
                        recipeHead.AlarmCondition = nodeConfig.HasAttribute("Combination.AlarmCondition") ? nodeConfig.Attributes["Combination.AlarmCondition"].Value : "";
                        recipeHead.LeakCheck = nodeConfig.HasAttribute("Combination.LeakCheck") ? nodeConfig.Attributes["Combination.LeakCheck"].Value : "";
                        recipeHead.AbortRecipe = nodeConfig.HasAttribute("Combination.AbortRecipe") ? nodeConfig.Attributes["Combination.AbortRecipe"].Value : "";
                        recipeHead.PressApcPID = nodeConfig.HasAttribute("Combination.PressAPCPID") ? nodeConfig.Attributes["Combination.PressAPCPID"].Value : "";
                        recipeHead.TempCorrect = nodeConfig.HasAttribute("Combination.TempCorrection") ? nodeConfig.Attributes["Combination.TempCorrection"].Value : "";
                        recipeHead.TempPID = nodeConfig.HasAttribute("Combination.TempPID") ? nodeConfig.Attributes["Combination.TempPID"].Value : "";
                        recipeHead.ProfileCondition = nodeConfig.HasAttribute("Combination.ProfileCondition") ? nodeConfig.Attributes["Combination.ProfileCondition"].Value : "";
                        if (nodeConfig.HasAttribute("N2PurgeMode"))
                        {
                            recipeHead.N2PurgeModeStr = nodeConfig.Attributes["N2PurgeMode"].Value;
                        }


                        if (string.IsNullOrEmpty(recipeHead.AbortRecipe))
                            recipeHead.AbortRecipe = SC.GetStringValue("System.Recipe.Abort Recipe");
                    }
                }
                else
                {
                    if (mainHead == null)
                    {
                        recipeHead.SubRecipe = "";
                        recipeHead.AlarmRecipe = "";
                        recipeHead.AlarmCondition = "";
                        recipeHead.LeakCheck = "";
                        recipeHead.AbortRecipe = "";
                        recipeHead.PressApcPID = "";
                        recipeHead.TempCorrect = "";
                        recipeHead.TempPID = "";
                        recipeHead.ProfileCondition = "";

                        if (recipeType == "Sub")
                            recipeHead.AbortRecipe = SC.GetStringValue("System.Recipe.Abort Recipe");
                    }
                }

                XmlNodeList stepNodeList = nodeModule.SelectNodes($"Step");

                string strLoopEndStep, strJumpStep;
                strLoopEndStep = strJumpStep = string.Empty;
                for (int i = 0; i < stepNodeList.Count; i++)
                {
                    var recipeStep = new RecipeStep();
                    recipeStep.RecipeType = recipeType;
                    recipeData.Add(recipeStep);

                    XmlElement stepNode = stepNodeList[i] as XmlElement;
                    Dictionary<string, string> dic = new Dictionary<string, string>();

                    //遍历Step节点
                    foreach (XmlAttribute att in stepNode.Attributes)
                    {
                        if (recipeAllowedCommands.Contains(att.Name))
                        {
                            dic.Add(att.Name, att.Value);
                        }
                    }
                    //遍历Step子节点中所有的attribute属性节点
                    foreach (XmlElement subStepNode in stepNode.ChildNodes)
                    {
                        foreach (XmlAttribute att in subStepNode.Attributes)
                        {
                            if (recipeAllowedCommands.Contains(att.Name))
                            {
                                dic.Add(att.Name, att.Value);
                            }
                        }
                        //遍历Step子节点的子节点中所有的attribute属性节点
                        foreach (XmlElement subsubStepNode in subStepNode.ChildNodes)
                        {
                            foreach (XmlAttribute att in subsubStepNode.Attributes)
                            {
                                if (recipeAllowedCommands.Contains(att.Name))
                                {
                                    dic.Add(att.Name, att.Value);
                                }
                            }
                        }
                    }

                    recipeStep.StepName = dic["Name"];

                    if (dic["Name"] == strLoopEndStep)
                    {
                        recipeStep.IsLoopEndStep = true;
                        strLoopEndStep = string.Empty;
                    }
                    recipeStep.IsJumpStep = false;

                    if (dic.ContainsKey("Command"))
                    {
                        string commandStr = dic["Command"];
                        if (commandStr.Contains("CallSystemRecipe"))
                        {
                        }
                        else if (commandStr.ToUpper().StartsWith("CALL"))
                        {
                            int subTableID = 0;
                            var subPara = commandStr.Replace("CALL", "").Replace("[", "").Replace("]", "").Split('*');
                            if (subPara != null && subPara.Length > 1)
                            {
                                int.TryParse(subPara[0], out int loopCount);
                                var tablePara = subPara[1].Split(':');
                                if (tablePara != null && tablePara.Length > 1)
                                {
                                    int.TryParse(tablePara[0], out subTableID);
                                    if (subTableID > 0)
                                    {
                                        recipeStep.IsCallSubStep = true;
                                        recipeStep.SubRecipeLoopCount = loopCount;
                                    }
                                }
                                recipeStep.SubRecipeTableInfo = subPara[1];
                            }

                            //sub需要修改table id
                            List<RecipeStep> subRecipeData = null;
                            if (recipeStep.IsCallSubStep && !Parse(recipeHead.SubRecipe, module, out var head, out subRecipeData, out reason, "Sub", subTableID, recipeHead))
                            {
                                return false;
                            }
                            if (subRecipeData == null || subRecipeData.Count == 0)
                            {
                                reason = $"Sub Recipe {commandStr.Replace("CallSubRecipe:", string.Empty)} is empty";
                                return false;
                            }

                            recipeStep.SubRecipeSteps = subRecipeData;
                        }
                        else if (commandStr.ToUpper().StartsWith("LOOP"))
                        {
                            recipeStep.IsLoopEndStep = true;
                            var loopPara = commandStr.Replace("LOOP", "").Replace("[", "").Replace("]", "").Split('*');
                            if (loopPara != null && loopPara.Length > 1)
                            {
                                int.TryParse(loopPara[0], out int loopCount);
                                recipeStep.LoopCount = loopCount + 1;//加1是因为第一次从正常的start-》end的执行算是一次循环，所以要额外加1

                                int loopStartStep = -1;
                                for (int index = 0; index < recipeData.Count; index++)
                                {
                                    if (recipeData[index].StepName == loopPara[1])
                                    {
                                        loopStartStep = index;
                                        break;
                                    }
                                }
                                if (loopStartStep < 0)
                                {
                                    reason = $"Recipe file does not contains LOOP step {loopPara[1]}";
                                    return false;
                                }
                                if (loopPara[1] != null)
                                {
                                    if (loopStartStep < 0 ||
                                        (recipeType == "Process" && loopStartStep == 0))//Process recipe的standby不参与循环
                                        recipeStep.IsLoopEndStep = false;
                                    else
                                    {
                                        recipeStep.LoopStartStep = loopStartStep;
                                        if (recipeData.Count > loopStartStep)
                                        {
                                            recipeData[loopStartStep].IsLoopStartStep = true;
                                            recipeData[loopStartStep].LoopCount = loopCount + 1;

                                            recipeStep.LoopEndStep = recipeType == "Process" ? i + 1 : i;//Process recipe包含standby，从0开始；其他recipe不包含standby
                                        }
                                    }
                                }
                            }
                        }
                        else if (commandStr.ToUpper().StartsWith("JUMP"))
                        {
                            var jumpPara = commandStr.Replace("Jump:", string.Empty).Replace("[", "").Replace("]", "");//JumpStepNo
                            if (jumpPara != null)
                            {
                                //int.TryParse(jumpPara[0], out int jumpStepNo);

                                //recipeStep.JumpStepNo = recipeType == "Process" ? jumpStepNo : jumpStepNo - 1;//Process recipe包含standby，从0开始；其他recipe不包含standby
                                recipeStep.IsJumpStep = true;
                                recipeStep.JumpStepName = jumpPara;
                            }
                        }
                    }

                    if (dic.ContainsKey("AbortRecipeTableIndex"))
                    {
                        if (dic["AbortRecipeTableIndex"].ToLower() != "none")
                        {
                            //格式 1:name
                            var abortPara = dic["AbortRecipeTableIndex"].Split(':');
                            int abortTableID = 0;
                            if (abortPara.Length > 1)
                            {
                                int.TryParse(abortPara[0], out abortTableID);
                                List<RecipeStep> abortRecipeData = null;
                                if (!Parse(recipeHead.AbortRecipe, module, out var head, out abortRecipeData, out reason, "Abort", abortTableID))
                                {
                                    return false;
                                }
                                if (abortRecipeData == null || abortRecipeData.Count == 0)
                                {
                                    reason = $"Abort Recipe {recipeHead.AbortRecipe}--{dic["AbortRecipeTableIndex"]} is empty";
                                    return false;
                                }
                                recipeStep.AbortRecipeSteps = abortRecipeData;
                                recipeStep.AbortRecipeTableInfo = dic["AbortRecipeTableIndex"];
                            }
                        }
                        else
                        {
                            recipeStep.AbortRecipeSteps = null;
                        }
                    }

                    if (dic.ContainsKey("EventSetting"))
                    {
                        string eventSettingStr = dic["EventSetting"];
                        if (eventSettingStr.ToLower() == "start")
                        {
                            recipeStep.IsTimeMeasurementStartStep = true;
                        }
                        else if (eventSettingStr.ToLower() == "stop")
                        {
                            recipeStep.IsTimeMeasurementStopStep = true;
                        }
                    }

                    if (dic.ContainsKey("FilmThickFormula"))
                    {
                        recipeStep.FilmThickFormula = dic["FilmThickFormula"];
                    }

                    if (dic.ContainsKey("FilmThickCoefficientA"))
                    {
                        recipeStep.FilmThickCoefficientA = float.Parse(dic["FilmThickCoefficientA"]);
                    }

                    if (dic.ContainsKey("FilmThickCoefficientB"))
                    {
                        recipeStep.FilmThickCoefficientB = float.Parse(dic["FilmThickCoefficientB"]);
                    }

                    if (dic.ContainsKey("AlarmConditionTable"))
                    {
                        recipeStep.AlarmConditionTable = dic["AlarmConditionTable"];
                    }

                    for (int j = 1; j < 11; j++)
                    {
                        string tempType = "Ignore Alarm";
                        string tempDetails = "";
                        if (dic.ContainsKey($"AlarmAction.{j}"))
                        {
                            tempType = dic[$"AlarmAction.{j}"];
                        }
                        if (dic.ContainsKey($"AlarmDetails.{j}"))
                        {
                            tempDetails = dic[$"AlarmDetails.{j}"];
                        }
                        recipeStep.AlarmActionSets.Add(j, new AlarmActions()
                        {
                            ProcessingType = tempType,
                            ProcessingDetails = tempDetails
                        });
                    }

                    //if(dic.ContainsKey("Loop"))
                    //{
                    //    string loopStr = dic["Loop"];
                    //    recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success;
                    //    recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success;
                    //    if (recipeStep.IsLoopStartStep)
                    //        recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty));
                    //    else
                    //        recipeStep.LoopCount = 0;
                    //}

                    //recipe time
                    if (dic["Name"].ToLower() == "standby")
                    {
                        if (DateTime.TryParse(dic["Time"], out DateTime time))
                        {
                            recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600 + time.Millisecond / 1000.0;
                        }
                        else if (float.TryParse(dic["Time"], out float timeInSec))
                        {
                            recipeStep.StepTime = timeInSec;
                            recipeStep.EndBy = EnumEndByCondition.ByTime;
                        }
                        else
                        {
                            recipeStep.StepTime = 0;
                            recipeStep.EndBy = EnumEndByCondition.ByStandbyFactor;
                        }
                    }
                    else
                    {
                        if (System.Text.RegularExpressions.Regex.Match(dic["Time"], @"[a-zA-Z]").Success)
                        {
                            if (SC.ContainsItem($"{module}.RecipeEditParameter.StepTime.{dic["Time"]}"))
                            {
                                var time = DateTime.Parse(SC.GetStringValue($"{module}.RecipeEditParameter.StepTime.{dic["Time"]}"));
                                recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600;
                            }
                            else
                            {
                                reason = $"Configuration does not contains step time config {dic["Time"]}";
                                return false;
                            }
                        }
                        else
                        {
                            if (DateTime.TryParse(dic["Time"], out DateTime time))
                            {
                                recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600 + time.Millisecond / 1000.0;
                            }
                            else if (float.TryParse(dic["Time"], out float timeInSec))
                            {
                                recipeStep.StepTime = timeInSec;
                            }
                            else
                            {
                                reason = $"Step time {dic["Time"]} is invalid";
                                return false;
                            }
                        }

                        if (dic["ConditionCheck"].ToLower() == "none")
                        {
                            recipeStep.EndBy = EnumEndByCondition.ByTime;
                        }
                        else
                        {
                            recipeStep.EndBy = EnumEndByCondition.ByStandbyFactor;
                        }
                    }

                    //ReplaceControlName(ref dic, "GasLineMFC1.Flow", "MFC1.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC2.Flow", "MFC2.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC3.Flow", "MFC3.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC4.Flow", "MFC4.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC5.Flow", "MFC5.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC6.Flow", "MFC6.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC7.Flow", "MFC7.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC8.Flow", "MFC8.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC9.Flow", "MFC9.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC10.Flow", "MFC10.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC11.Flow", "MFC11.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC12.Flow", "MFC12.SetParameters");
                    //ReplaceControlName(ref dic, "GasLineMFC51.Flow", "MFC51.SetParameters");

                    AddParameter(ref dic, "MFC1.SetParameters", new string[8] { "MFC1.Flow.Set", "MFC1.Flow.Ramprate", "MFC1.Flow.SetUnit", "MFC1.Flow.RamprateUnit", "MFC1.Flow.Check", "MFC1.Flow.High", "MFC1.Flow.Low", "MFC1.Flow.Unit" });
                    AddParameter(ref dic, "MFC2.SetParameters", new string[8] { "MFC2.Flow.Set", "MFC2.Flow.Ramprate", "MFC2.Flow.SetUnit", "MFC2.Flow.RamprateUnit", "MFC2.Flow.Check", "MFC2.Flow.High", "MFC2.Flow.Low", "MFC2.Flow.Unit" });
                    AddParameter(ref dic, "MFC3.SetParameters", new string[8] { "MFC3.Flow.Set", "MFC3.Flow.Ramprate", "MFC3.Flow.SetUnit", "MFC3.Flow.RamprateUnit", "MFC3.Flow.Check", "MFC3.Flow.High", "MFC3.Flow.Low", "MFC3.Flow.Unit" });
                    AddParameter(ref dic, "MFC4.SetParameters", new string[8] { "MFC4.Flow.Set", "MFC4.Flow.Ramprate", "MFC4.Flow.SetUnit", "MFC4.Flow.RamprateUnit", "MFC4.Flow.Check", "MFC4.Flow.High", "MFC4.Flow.Low", "MFC4.Flow.Unit" });
                    AddParameter(ref dic, "MFC5.SetParameters", new string[8] { "MFC5.Flow.Set", "MFC5.Flow.Ramprate", "MFC5.Flow.SetUnit", "MFC5.Flow.RamprateUnit", "MFC5.Flow.Check", "MFC5.Flow.High", "MFC5.Flow.Low", "MFC5.Flow.Unit" });
                    AddParameter(ref dic, "MFC6.SetParameters", new string[8] { "MFC6.Flow.Set", "MFC6.Flow.Ramprate", "MFC6.Flow.SetUnit", "MFC6.Flow.RamprateUnit", "MFC6.Flow.Check", "MFC6.Flow.High", "MFC6.Flow.Low", "MFC6.Flow.Unit" });
                    AddParameter(ref dic, "MFC7.SetParameters", new string[8] { "MFC7.Flow.Set", "MFC7.Flow.Ramprate", "MFC7.Flow.SetUnit", "MFC7.Flow.RamprateUnit", "MFC7.Flow.Check", "MFC7.Flow.High", "MFC7.Flow.Low", "MFC7.Flow.Unit" });
                    AddParameter(ref dic, "MFC8.SetParameters", new string[8] { "MFC8.Flow.Set", "MFC8.Flow.Ramprate", "MFC8.Flow.SetUnit", "MFC8.Flow.RamprateUnit", "MFC8.Flow.Check", "MFC8.Flow.High", "MFC8.Flow.Low", "MFC8.Flow.Unit" });
                    AddParameter(ref dic, "MFC9.SetParameters", new string[8] { "MFC9.Flow.Set", "MFC9.Flow.Ramprate", "MFC9.Flow.SetUnit", "MFC9.Flow.RamprateUnit", "MFC9.Flow.Check", "MFC9.Flow.High", "MFC9.Flow.Low", "MFC9.Flow.Unit" });
                    AddParameter(ref dic, "MFC10.SetParameters", new string[8] { "MFC10.Flow.Set", "MFC10.Flow.Ramprate", "MFC10.Flow.SetUnit", "MFC10.Flow.RamprateUnit", "MFC10.Flow.Check", "MFC10.Flow.High", "MFC10.Flow.Low", "MFC10.Flow.Unit" });
                    AddParameter(ref dic, "MFC11.SetParameters", new string[8] { "MFC11.Flow.Set", "MFC11.Flow.Ramprate", "MFC11.Flow.SetUnit", "MFC11.Flow.RamprateUnit", "MFC11.Flow.Check", "MFC11.Flow.High", "MFC11.Flow.Low", "MFC11.Flow.Unit" });
                    AddParameter(ref dic, "MFC12.SetParameters", new string[8] { "MFC12.Flow.Set", "MFC12.Flow.Ramprate", "MFC12.Flow.SetUnit", "MFC12.Flow.RamprateUnit", "MFC12.Flow.Check", "MFC12.Flow.High", "MFC12.Flow.Low", "MFC12.Flow.Unit" });
                    AddParameter(ref dic, "MFC13.SetParameters", new string[8] { "MFC13.Flow.Set", "MFC13.Flow.Ramprate", "MFC13.Flow.SetUnit", "MFC13.Flow.RamprateUnit", "MFC13.Flow.Check", "MFC13.Flow.High", "MFC13.Flow.Low", "MFC13.Flow.Unit" });
                    AddParameter(ref dic, "MFC14.SetParameters", new string[8] { "MFC14.Flow.Set", "MFC14.Flow.Ramprate", "MFC14.Flow.SetUnit", "MFC14.Flow.RamprateUnit", "MFC14.Flow.Check", "MFC14.Flow.High", "MFC14.Flow.Low", "MFC14.Flow.Unit" });
                    AddParameter(ref dic, "MFC15.SetParameters", new string[8] { "MFC15.Flow.Set", "MFC15.Flow.Ramprate", "MFC15.Flow.SetUnit", "MFC15.Flow.RamprateUnit", "MFC15.Flow.Check", "MFC15.Flow.High", "MFC15.Flow.Low", "MFC15.Flow.Unit" });
                    AddParameter(ref dic, "MFC16.SetParameters", new string[8] { "MFC16.Flow.Set", "MFC16.Flow.Ramprate", "MFC16.Flow.SetUnit", "MFC16.Flow.RamprateUnit", "MFC16.Flow.Check", "MFC16.Flow.High", "MFC16.Flow.Low", "MFC16.Flow.Unit" });
                    AddParameter(ref dic, "MFC17.SetParameters", new string[8] { "MFC17.Flow.Set", "MFC17.Flow.Ramprate", "MFC17.Flow.SetUnit", "MFC17.Flow.RamprateUnit", "MFC17.Flow.Check", "MFC17.Flow.High", "MFC17.Flow.Low", "MFC17.Flow.Unit" });
                    AddParameter(ref dic, "MFC31.SetParameters", new string[8] { "MFC31.Flow.Set", "MFC31.Flow.Ramprate", "MFC31.Flow.SetUnit", "MFC31.Flow.RamprateUnit", "MFC31.Flow.Check", "MFC31.Flow.High", "MFC31.Flow.Low", "MFC31.Flow.Unit" });
                    AddParameter(ref dic, "MFC32.SetParameters", new string[8] { "MFC32.Flow.Set", "MFC32.Flow.Ramprate", "MFC32.Flow.SetUnit", "MFC32.Flow.RamprateUnit", "MFC32.Flow.Check", "MFC32.Flow.High", "MFC32.Flow.Low", "MFC32.Flow.Unit" });
                    //AddParameter(ref dic, "MFC51.SetParameters", new string[8] { "MFC51.Flow.Set",  "MFC51.Flow.Ramprate", "MFC51.Flow.SetUnit", "MFC51.Flow.RamprateUnit", "MFC51.Flow.Check", "MFC51.Flow.High", "MFC51.Flow.Low", "MFC51.Flow.Unit" });

                    ReplaceControlName(ref dic, "MFM57Flow", "MFM57.SetParameters");
                    ReplaceControlName(ref dic, "MFM1Flow", "MFM1.SetParameters");
                    ReplaceControlName(ref dic, "MFM6Flow", "MFM6.SetParameters");
                    ReplaceControlName(ref dic, "MFM7Flow", "MFM7.SetParameters");
                    ReplaceControlName(ref dic, "MFM8Flow", "MFM8.SetParameters");
                    ReplaceControlName(ref dic, "MFM9Flow", "MFM9.SetParameters");
                    ReplaceControlName(ref dic, "MFM11Flow", "MFM11.SetParameters");
                    ReplaceControlName(ref dic, "MFM12Flow", "MFM12.SetParameters");
                    ReplaceControlName(ref dic, "MFM13Flow", "MFM13.SetParameters");
                    ReplaceControlName(ref dic, "MFM16Flow", "MFM16.SetParameters");

                    ReplaceControlName(ref dic, "ConditionCheck", "SetConditionCheck");

                    ReplaceControlName(ref dic, "Command", "SetCommand");

                    if (dic.ContainsKey("AlarmConditionTable"))
                        ReplaceControlName(ref dic, "AlarmConditionTable", "SetAlarmConditionTable");

                    //ReplaceControlName(ref dic, "Heater2", "ZoneU.SetParameters");
                    //ReplaceControlName(ref dic, "Heater4", "ZoneCU.SetParameters");
                    //ReplaceControlName(ref dic, "Heater6", "ZoneC.SetParameters");
                    //ReplaceControlName(ref dic, "Heater8", "ZoneCL.SetParameters");
                    //ReplaceControlName(ref dic, "Heater10", "ZoneL.SetParameters");
                    var controlMode = dic["Temperature.ControlMode"];
                    var correct = dic["Temperature.Correct"];
                    var PID = dic["Temperature.PID"];
                    //AddParameter(ref dic, "ZoneU.SetParameters", controlMode, correct, PID);
                    //AddParameter(ref dic, "ZoneCU.SetParameters", controlMode, correct, PID);
                    //AddParameter(ref dic, "ZoneC.SetParameters", controlMode, correct, PID);
                    //AddParameter(ref dic, "ZoneCL.SetParameters", controlMode, correct, PID);
                    //AddParameter(ref dic, "ZoneL.SetParameters", controlMode, correct, PID);

                    AddParameter(ref dic, "HeaterU.SetParameters", new string[9] { "HeaterU.ZoneName", "HeaterU.Set", "HeaterU.SetUnit", "HeaterU.Ramprate", "HeaterU.RamprateUnit", "HeaterU.Check", "HeaterU.High", "HeaterU.Low", "HeaterU.Unit" });
                    AddParameterValue(ref dic, "HeaterU.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });

                    AddParameter(ref dic, "HeaterCU.SetParameters", new string[9] { "HeaterCU.ZoneName", "HeaterCU.Set", "HeaterCU.SetUnit", "HeaterCU.Ramprate", "HeaterCU.RamprateUnit", "HeaterCU.Check", "HeaterCU.High", "HeaterCU.Low", "HeaterCU.Unit" });
                    AddParameterValue(ref dic, "HeaterCU.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });

                    AddParameter(ref dic, "HeaterC.SetParameters", new string[9] { "HeaterC.ZoneName", "HeaterC.Set", "HeaterC.SetUnit", "HeaterC.Ramprate", "HeaterC.RamprateUnit", "HeaterC.Check", "HeaterC.High", "HeaterC.Low", "HeaterC.Unit" });
                    AddParameterValue(ref dic, "HeaterC.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });

                    AddParameter(ref dic, "HeaterCL.SetParameters", new string[9] { "HeaterCL.ZoneName", "HeaterCL.Set", "HeaterCL.SetUnit", "HeaterCL.Ramprate", "HeaterCL.RamprateUnit", "HeaterCL.Check", "HeaterCL.High", "HeaterCL.Low", "HeaterCL.Unit" });
                    AddParameterValue(ref dic, "HeaterCL.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });

                    AddParameter(ref dic, "HeaterL.SetParameters", new string[9] { "HeaterL.ZoneName", "HeaterL.Set", "HeaterL.SetUnit", "HeaterL.Ramprate", "HeaterL.RamprateUnit", "HeaterL.Check", "HeaterL.High", "HeaterL.Low", "HeaterL.Unit" });
                    AddParameterValue(ref dic, "HeaterL.SetParameters", new string[8] { controlMode, correct, PID, recipeHead.TempCorrect, recipeHead.TempPID, recipeHead.ProfileCondition, dic["ValveAV91"], dic["BWR"] });

                    AddParameter(ref dic, "APC.SetParameters", new string[10] { "Press.Command", "Press.PID", "Press.Set", "Press.SlowVacSet", "Press.ValveAngleSet", "Press.IsWait", "Press.LowWait", "Press.HighWait", "Press.WaitUnit", "Press.WaitPress" });//APC
                    AddParameterValue(ref dic, "APC.SetParameters", new string[2] { recipeHead.PressApcPID, dic["ValveAV71"] });//APC

                    AddParameter(ref dic, "SetBoatMotion", new string[5] { "Loader.Command", "Loader.Speed1", "Loader.Speed2", "Loader.Speed3", "Loader.RPM" });//Boat

                    List<string> auxCommands = new List<string>();
                    for (int k = 1; k < 200; k++)
                    {
                        if (!dic.ContainsKey($"AUX.{k}.Set"))
                            continue;
                        auxCommands.Add($"{k},{dic[$"AUX.{k}.Set"]},{dic[$"AUX.{k}.Check"]},{dic[$"AUX.{k}.High"]},{dic[$"AUX.{k}.Low"]},{dic[$"AUX.{k}.CheckUnit"]}");
                        dic.Remove($"AUX.{k}.Set");
                        dic.Remove($"AUX.{k}.Check");
                        dic.Remove($"AUX.{k}.High");
                        dic.Remove($"AUX.{k}.Low");
                        dic.Remove($"AUX.{k}.CheckUnit");
                    }
                    dic.Add("AUX.SetParameters", string.Join(";", auxCommands));

                    //ReplaceControlName(ref dic, "RFSwitch", "RfPower.SetParameters");
                    //AddParameter(ref dic, "RfPower.SetParameters", dic["RFSetpoint"], dic["ForwardPowerAlarmWatchTable"], dic["PrAlarmWatchTable"], dic["PIAlarmWatchTable"]);

                    //ReplaceControlName(ref dic, "C1Setpoint", "RfMatch.SetParameters");
                    //AddParameter(ref dic, "RfMatch.SetParameters", dic["C2Setpoint"], dic["C1AlarmWatchTable"], dic["C2AlarmWatchTable"], dic["VppAlarmWatchTable"]);
                    AddValveParameter(ref dic, "SetValves", new string[153] {
                      "ValveAV1",
                      "ValveAV2",
                      "ValveAV3",
                      "ValveAV4",
                      "ValveAV5",
                      "ValveAV6",
                      "ValveAV7",
                      "ValveAV8",
                      "ValveAV9",
                      "ValveAV10",
                      "ValveAV11",
                      "ValveAV12",
                      "ValveAV13",
                      "ValveAV14",
                      "ValveAV15",
                      "ValveAV16",
                      "ValveAV17",
                      "ValveAV18",
                      "ValveAV19",
                      "ValveAV20",
                      "ValveAV21",
                      "ValveAV22",
                      "ValveAV23",
                      "ValveAV24",
                      "ValveAV25",
                      "ValveAV26",
                      "ValveAV27",
                      "ValveAV28",
                      "ValveAV29",
                      "ValveAV30",
                      "ValveAV31",
                      "ValveAV32",
                      "ValveAV33",
                      "ValveAV34",
                      "ValveAV35",
                      "ValveAV36",
                      "ValveAV37",
                      "ValveAV38",
                      "ValveAV39",
                      "ValveAV40",
                      "ValveAV41",
                      "ValveAV42",
                      "ValveAV43",
                      "ValveAV44",
                      "ValveAV45",
                      "ValveAV46",
                      "ValveAV47",
                      "ValveAV48",
                      "ValveAV49",
                      "ValveAV50",
                      "ValveAV51",
                      "ValveAV52",
                      "ValveAV53",

                      "ValveAV60",
                      "ValveAV61",
                      "ValveAV62",
                      "ValveAV63",
                      "ValveAV64",
                      "ValveAV65",
                      "ValveAV66",
                      "ValveAV67",
                      "ValveAV68",
                      "ValveAV69",
                      "ValveAV70",
                      "ValveAV71",
                      "ValveAV72",
                      "ValveAV73",
                      "ValveAV74",
                      "ValveAV75",
                      "ValveAV76",
                      "ValveAV77",
                      "ValveAV78",
                      "ValveAV79",
                      "ValveAV80",
                      "ValveAV81",
                      "ValveAV82",
                      "ValveAV83",
                      "ValveAV84",
                      "ValveAV85",
                      "ValveAV86",
                      "ValveAV87",
                      "ValveAV88",
                      "ValveAV89",
                      "ValveAV90",
                      "ValveAV91",
                      "ValveAV92",
                      "ValveAV93",
                      "ValveAV94",
                      "ValveAV95",
                      "ValveAV96",
                      "ValveAV97",
                      "ValveAV98",
                      "ValveAV99",
                      "ValveAV100",
                      "ValveAV101",
                      "ValveAV102",
                      "ValveAV103",
                      "ValveAV104",
                      "ValveAV105",
                      "ValveAV106",
                      "ValveAV107",
                      "ValveAV108",
                      "ValveAV109",
                      "ValveAV110",
                      "ValveAV111",
                      "ValveAV112",
                      "ValveAV113",
                      "ValveAV114",
                      "ValveAV115",
                      "ValveAV116",
                      "ValveAV117",
                      "ValveAV118",
                      "ValveAV119",
                      "ValveAV120",
                      "ValveAV121",
                      "ValveAV122",
                      "ValveAV123",
                      "ValveAV124",
                      "ValveAV125",
                      "ValveAV126",
                      "ValveAV127",
                      "ValveAV128",
                      "ValveAV129",
                      "ValveAV130",
                      "ValveAV131",
                      "ValveAV132",
                      "ValveAV133",
                      "ValveAV134",
                      "ValveAV135",
                      "ValveAV136",
                        "DPR",
                        "AGV",
                        "AGV2",
                        "MBP",
                        "MBP1",
                        "MBP2",
                        "DP",
                        "BWR",
                        "F2Cln",
                        "HFCln",
                        "CEXH",
                        "DEPO",
                        "HTR1",
                        "HTR2",
                        "HTR3",
                        "DP1",
                        "DP2",
                        "HMNT",
                        "CMNT",
                        "HREF",
                        "CREF",
                        "HZERO",
                        "CZERO"
                    });

                    //dic.Remove("SetValves");
                    //dic.Remove("HeaterU.SetParameters");
                    //dic.Remove("HeaterCU.SetParameters");
                    //dic.Remove("HeaterC.SetParameters");
                    //dic.Remove("HeaterCL.SetParameters");
                    //dic.Remove("HeaterL.SetParameters");
                    //dic.Remove("MFC1.SetParameters");
                    //dic.Remove("MFC2.SetParameters");
                    //dic.Remove("MFC3.SetParameters");
                    //dic.Remove("MFC4.SetParameters");
                    //dic.Remove("MFC5.SetParameters");
                    //dic.Remove("MFC6.SetParameters");
                    //dic.Remove("MFC7.SetParameters");
                    //dic.Remove("MFC8.SetParameters");
                    //dic.Remove("MFC9.SetParameters");
                    //dic.Remove("MFC10.SetParameters");
                    //dic.Remove("MFC11.SetParameters");
                    //dic.Remove("MFC12.SetParameters");
                    //ReplaceControlNameForValve(ref dic, "ValveAV1");
                    //ReplaceControlNameForValve(ref dic, "ValveAV2");
                    //ReplaceControlNameForValve(ref dic, "ValveAV3");
                    //ReplaceControlNameForValve(ref dic, "ValveAV4");
                    //ReplaceControlNameForValve(ref dic, "ValveAV5");
                    //ReplaceControlNameForValve(ref dic, "ValveAV6");
                    //ReplaceControlNameForValve(ref dic, "ValveAV7");
                    //ReplaceControlNameForValve(ref dic, "ValveAV8");
                    //ReplaceControlNameForValve(ref dic, "ValveAV9");
                    //ReplaceControlNameForValve(ref dic, "ValveAV10");
                    //ReplaceControlNameForValve(ref dic, "ValveAV11");
                    //ReplaceControlNameForValve(ref dic, "ValveAV12");
                    //ReplaceControlNameForValve(ref dic, "ValveAV13");
                    //ReplaceControlNameForValve(ref dic, "ValveAV14");
                    //ReplaceControlNameForValve(ref dic, "ValveAV15");
                    //ReplaceControlNameForValve(ref dic, "ValveAV16");
                    //ReplaceControlNameForValve(ref dic, "ValveAV17");
                    //ReplaceControlNameForValve(ref dic, "ValveAV18");
                    //ReplaceControlNameForValve(ref dic, "ValveAV19");
                    //ReplaceControlNameForValve(ref dic, "ValveAV20");
                    //ReplaceControlNameForValve(ref dic, "ValveAV21");
                    //ReplaceControlNameForValve(ref dic, "ValveAV22");
                    //ReplaceControlNameForValve(ref dic, "ValveAV23");
                    //ReplaceControlNameForValve(ref dic, "ValveAV24");
                    //ReplaceControlNameForValve(ref dic, "ValveAV25");
                    //ReplaceControlNameForValve(ref dic, "ValveAV26");
                    //ReplaceControlNameForValve(ref dic, "ValveAV27");
                    //ReplaceControlNameForValve(ref dic, "ValveAV28");
                    //ReplaceControlNameForValve(ref dic, "ValveAV29");
                    //ReplaceControlNameForValve(ref dic, "ValveAV30");
                    //ReplaceControlNameForValve(ref dic, "ValveAV31");
                    //ReplaceControlNameForValve(ref dic, "ValveAV32");
                    //ReplaceControlNameForValve(ref dic, "ValveAV33");
                    //ReplaceControlNameForValve(ref dic, "ValveAV34");
                    //ReplaceControlNameForValve(ref dic, "ValveAV35");
                    //ReplaceControlNameForValve(ref dic, "ValveAV36");
                    //ReplaceControlNameForValve(ref dic, "ValveAV37");
                    //ReplaceControlNameForValve(ref dic, "ValveAV38");
                    //ReplaceControlNameForValve(ref dic, "ValveAV39");
                    //ReplaceControlNameForValve(ref dic, "ValveAV52");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV54");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV56");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV57");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV58");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV59");
                    //ReplaceControlNameForValve(ref dic, "ValveAV60");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV65");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV66");
                    ////ReplaceControlNameForValve(ref dic, "ValveAV68");
                    //ReplaceControlNameForValve(ref dic, "ValveAV71");
                    //ReplaceControlNameForValve(ref dic, "ValveAV72");
                    //ReplaceControlNameForValve(ref dic, "ValveAV73");
                    //ReplaceControlNameForValve(ref dic, "ValveAV74");
                    //ReplaceControlNameForValve(ref dic, "ValveAV75");
                    //ReplaceControlNameForValve(ref dic, "ValveAV77");
                    //ReplaceControlNameForValve(ref dic, "ValveAV81");
                    //ReplaceControlNameForValve(ref dic, "ValveAV82");
                    //ReplaceControlNameForValve(ref dic, "ValveAV83");
                    //ReplaceControlNameForValve(ref dic, "ValveAV91");
                    dic.Remove("StepNo");
                    dic.Remove("Name");
                    dic.Remove("EndBy");
                    dic.Remove("Time");
                    dic.Remove("ZAxisPosition");
                    dic.Remove("ZAxisSpeed");
                    dic.Remove("RotatePosition");
                    dic.Remove("RotateSpeed");
                    dic.Remove("RotateDirection");
                    dic.Remove("Heater1");
                    dic.Remove("Heater2");
                    dic.Remove("Heater3");
                    dic.Remove("Heater4");
                    dic.Remove("Heater5");
                    dic.Remove("ValveAV54");
                    dic.Remove("ValveAV55");
                    dic.Remove("ValveAV56");
                    dic.Remove("ValveAV57");
                    dic.Remove("ValveAV58");
                    dic.Remove("ValveAV59");
                    dic.Remove("ValveAV65");
                    dic.Remove("ValveAV66");
                    dic.Remove("ValveAV68");
                    dic.Remove("ExternalOn");
                    dic.Remove("ExternalOff");
                    dic.Remove("ExternalSensor");
                    dic.Remove("TempStabilize");
                    dic.Remove("FinishAutoProfile");
                    dic.Remove("ReachTempWait");
                    dic.Remove("ReachTemp");
                    dic.Remove("TempUpper");
                    dic.Remove("TempLower");
                    dic.Remove("ReachPressureWait");
                    dic.Remove("ReachPressure");
                    dic.Remove("PressureUpper");
                    dic.Remove("PressureLower");
                    dic.Remove("PressureStabilize");
                    dic.Remove("External.Out1");
                    dic.Remove("External.Out2");
                    dic.Remove("External.Out3");
                    dic.Remove("External.Out4");
                    dic.Remove("External.Out5");
                    dic.Remove("External.Out6");

                    dic.Remove("RFSwitch");
                    dic.Remove("RFSetpoint");
                    dic.Remove("ForwardPowerAlarmWatchTable");
                    dic.Remove("PrAlarmWatchTable");
                    dic.Remove("PIAlarmWatchTable");

                    dic.Remove("C1Setpoint");
                    dic.Remove("C2Setpoint");
                    dic.Remove("C1AlarmWatchTable");
                    dic.Remove("C2AlarmWatchTable");
                    dic.Remove("VppAlarmWatchTable");
                    dic.Remove("VdcAlarmWatchTable");
                    dic.Remove("AbortRecipeTableIndex");

                    dic.Remove("Temperature.ControlMode");
                    dic.Remove("Temperature.Correct");
                    dic.Remove("Temperature.PID");
                    dic.Remove("Temperature.Profile");
                    dic.Remove("Temperature.Stabilize");
                    dic.Remove("Temperature.TempReadyCond");

                    dic.Remove("FilmThickFormula");
                    dic.Remove("FilmThickCoefficientA");
                    dic.Remove("FilmThickCoefficientB");

                    dic.Remove("APC.SetPressure");
                    dic.Remove("PressureSettingVG");
                    dic.Remove("PressureSonserValue");
                    dic.Remove("PressureValveAngle");
                    dic.Remove("PressureAlarmTableNo");

                    dic.Remove("EventSetting");
                    dic.Remove("AlarmTableIndex");
                    dic.Remove("AlarmDetails.1");
                    dic.Remove("AlarmAction.1");
                    dic.Remove("AlarmDetails.2");
                    dic.Remove("AlarmAction.2");
                    dic.Remove("AlarmDetails.3");
                    dic.Remove("AlarmAction.3");
                    dic.Remove("AlarmDetails.4");
                    dic.Remove("AlarmAction.4");
                    dic.Remove("AlarmDetails.5");
                    dic.Remove("AlarmAction.5");
                    dic.Remove("AlarmDetails.6");
                    dic.Remove("AlarmAction.6");
                    dic.Remove("AlarmDetails.7");
                    dic.Remove("AlarmAction.7");
                    dic.Remove("AlarmDetails.8");
                    dic.Remove("AlarmAction.8");
                    dic.Remove("AlarmDetails.9");
                    dic.Remove("AlarmAction.9");
                    dic.Remove("AlarmDetails.10");
                    dic.Remove("AlarmAction.10");

                    //List<string> mfcCheckInstall = new List<string>()
                    //{
                    //    "MfcN1",
                    //    "MfcN2",
                    //    "MfcN3",
                    //    "MfcH1",
                    //    "MfcJ1",
                    //    "MfcXN1",
                    //};
                    //foreach(var mfc in mfcCheckInstall)
                    //{
                    //    if (!SC.GetValue<bool>($"PM1.MFC.{mfc}.IsMFCInstalled"))
                    //        dic.Remove($"{mfc}.SetParameters");
                    //}

                    foreach (string key in dic.Keys)
                        recipeStep.RecipeCommands.Add(key, dic[key]);
                }

                for (int i = 0; i < recipeData.Count; i++)
                {
                    if (recipeData[i].IsJumpStep)
                    {
                        bool findJumpStep = false;
                        for (int j = 0; j < recipeData.Count; j++)
                        {
                            if (recipeData[j].StepName == recipeData[i].JumpStepName)
                            {
                                recipeData[i].JumpStepNo = j;
                                findJumpStep = true;
                                break;
                            }
                        }

                        if (!findJumpStep)
                        {
                            reason = $"Recipe file does not contains jump step {recipeData[i].JumpStepName}";
                            return false;
                        }
                    }
                }
            }
            catch (Exception ex)
            {
                LOG.Write(ex);

                reason = $"Recipe file content not valid, {recipeFile}, {ex.Message}";
                return false;
            }
            return true;
        }
        public static bool LayoutRecipeParse(string recipeFile, string module, out RecipeLayoutEntityNormal layoutRecipeDataNormal, out RecipeLayoutEntityExpert layoutRecipeDataExpert, out RecipeLayoutEntityConfig layoutRecipeDataConfig, out string reason)
        {
            reason = string.Empty;
            layoutRecipeDataNormal = new RecipeLayoutEntityNormal();
            layoutRecipeDataExpert = new RecipeLayoutEntityExpert();
            layoutRecipeDataConfig = new RecipeLayoutEntityConfig();

            string content = RecipeFileManager.Instance.LoadRecipe($"{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue("System.Recipe.SupportedLayoutType")}", recipeFile, false);

            if (string.IsNullOrEmpty(content))
            {
                reason = $"{recipeFile} is not a valid recipe file";
                return false;
            }

            try
            {
                XmlDocument rcpDataDoc = new XmlDocument();
                rcpDataDoc.LoadXml(content);

                XmlNode nodeModule;

                nodeModule = rcpDataDoc.SelectSingleNode("/Aitex/TableRecipeData/Module/Step[@Name='Normal']");

                if (nodeModule == null)
                {
                    //reason = "Recipe file does not contains step content for Normal";
                    return false;
                }
                else
                {
                    Type t = layoutRecipeDataNormal.GetType();
                    foreach (FieldInfo pi in t.GetFields())
                    {
                        XmlElement stepNode = nodeModule as XmlElement;

                        //遍历Step节点
                        foreach (XmlAttribute att in stepNode.Attributes)
                        {
                            if (pi.Name == att.Name)
                            {
                                pi.SetValue(layoutRecipeDataNormal, att.Value);
                            }
                        }
                    }
                }

                nodeModule = rcpDataDoc.SelectSingleNode("/Aitex/TableRecipeData/Module/Step[@Name='Expert']");
                if (nodeModule == null)
                {
                    //reason = "Recipe file does not contains step content for Expert";
                    return false;
                }
                else
                {
                    XmlElement stepNode = nodeModule as XmlElement;

                    string strName = "";
                    //遍历Step节点
                    foreach (XmlAttribute att in stepNode.Attributes)
                    {
                        if (att.Name != "Name")
                        {
                            layoutRecipeDataExpert.Items.Add(att.Value);
                        }
                        else
                        {
                            strName = att.Value;
                        }

                    }
                    layoutRecipeDataExpert.Name = strName;
                }

                nodeModule = rcpDataDoc.SelectSingleNode("/Aitex/TableRecipeData/Module[@Name='PM1']/Config");
                if (nodeModule == null)
                {
                    return false;
                }
                else
                {
                    Type t = layoutRecipeDataConfig.GetType();
                    foreach (FieldInfo pi in t.GetFields())
                    {
                        XmlElement stepNode = nodeModule as XmlElement;

                        //遍历Step节点
                        foreach (XmlAttribute att in stepNode.Attributes)
                        {
                            if (pi.Name == att.Name)
                            {
                                pi.SetValue(layoutRecipeDataConfig, att.Value);
                            }
                        }
                    }
                }
            }
            catch (Exception ex)
            {
                LOG.Write(ex);

                reason = $"Recipe file content not valid, {recipeFile}, {ex.Message}";
                return false;
            }
            return true;
        }

        private static void ReplaceControlName(ref Dictionary<string, string> dic, string from, string to)
        {
            if (dic.ContainsKey(from))
            {
                dic.Add(to, dic[from]);
                dic.Remove(from);
            }
        }
        private static void ReplaceControlName(ref Dictionary<string, string> dic, string from, string to1, string to2)
        {
            dic.Add(to1, dic[from]);
            dic.Add(to2, dic[from]);
            dic.Remove(from);
        }

        private static void ReplaceControlNameForValve(ref Dictionary<string, string> dic, string key)
        {
            switch (dic[key].ToLower())
            {
                case "open":
                    dic[key] = "true";
                    break;
                case "close":
                    dic[key] = "false";
                    break;
                case "continue":
                    dic[key] = "Continue";
                    break;
            }
            //dic[key] = dic[key].ToLower() == "open" ? "true" : "false";
        }
        private static void AddValveParameter(ref Dictionary<string, string> dic, string to, string[] param)
        {
            if (param != null && param.Length > 0)
            {
                foreach (var item in param)
                {
                    if (!string.IsNullOrEmpty(item) && dic.ContainsKey(item))
                    {
                        if (!dic.ContainsKey(to))
                            dic.Add(to, "");
                        var set = "";
                        switch (dic[item].ToLower())
                        {
                            case "open":
                                set = "true";
                                break;
                            case "close":
                                set = "false";
                                break;
                            case "continue":
                                set = "Continue";
                                break;
                        }
                        var value = $"{dic[to]};{item},{set}";
                        dic[to] = string.IsNullOrEmpty(dic[to]) ? $"{item},{set}" : value;
                        dic.Remove(item);
                    }
                }
            }
        }
        private static void AddParameter(ref Dictionary<string, string> dic, string to, string from1, string from2, string from3, string from4 = null)
        {
            var value = $"{dic[to]};{from1};{from2};{from3}";
            if (!string.IsNullOrEmpty(from4))
                value = $"{value};{from4}";
            dic[to] = value;
        }
        private static void AddParameter(ref Dictionary<string, string> dic, string to, string[] param)
        {
            if (param != null && param.Length > 0)
            {
                foreach (var item in param)
                {
                    if (!string.IsNullOrEmpty(item) && dic.ContainsKey(item))
                    {
                        if (!dic.ContainsKey(to))
                            dic.Add(to, "");
                        var value = $"{dic[to]};{dic[item]}";
                        dic[to] = string.IsNullOrEmpty(dic[to]) ? dic[item] : value;
                        dic.Remove(item);
                    }
                }
            }
        }
        private static void AddParameterValue(ref Dictionary<string, string> dic, string to, string[] param)
        {
            if (!dic.ContainsKey(to))
                dic.Add(to, "");
            if (param != null && param.Length > 0)
            {
                foreach (var item in param)
                {
                    var value = $"{dic[to]};{item}";
                    dic[to] = string.IsNullOrEmpty(dic[to]) ? item : value;
                }
            }
        }
        public static bool ParseTables(string recipeFile, string module, out Dictionary<int, List<RecipeStep>> recipeDatas, out string reason, string recipeType)
        {
            reason = string.Empty;

            recipeDatas = new Dictionary<int, List<RecipeStep>>();

            string content = string.Empty;
            if (recipeType != "Process" && recipeType != "Idle" && recipeType != "Reset")
            {
                if (!File.Exists($"{PathManager.GetRecipeDir()}\\{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue($"System.Recipe.Supported{recipeType}Type")}\\{recipeFile}.rcp"))
                    return true;
            }

            content = RecipeFileManager.Instance.LoadRecipe($"{SC.GetStringValue("System.Recipe.SupportedChamberType")}\\{SC.GetStringValue($"System.Recipe.Supported{recipeType}Type")}", recipeFile, false);

            if (string.IsNullOrEmpty(content))
            {
                reason = $"{recipeFile} is not a valid recipe file";
                return false;
            }

            try
            {
                //获取工艺程序文件中允许的命令字符串列表
                //目的：如果工艺程序文件中含有规定之外的命令，则被禁止执行
                HashSet<string> recipeAllowedCommands = new HashSet<string>();
                XmlDocument rcpFormatDoc = new XmlDocument();
                string recipeSchema = PathManager.GetCfgDir() + $@"\Recipe\Furnace\Process\{SC.GetStringValue("System.SetUp.ToolType")}\RecipeFormat.xml";
                rcpFormatDoc.Load(recipeSchema);
                XmlNodeList rcpItemNodeList = rcpFormatDoc.SelectNodes("/Aitex/TableRecipeFormat/Catalog/Group/Step");
                foreach (XmlElement item in rcpItemNodeList)
                    recipeAllowedCommands.Add(item.Attributes["ControlName"].Value);

                recipeAllowedCommands.Add("Temperature.ControlMode");
                recipeAllowedCommands.Add("Temperature.Correct");
                recipeAllowedCommands.Add("Temperature.PID");
                recipeAllowedCommands.Add("ConditionCheck");
                recipeAllowedCommands.Add("EventSetting");
                recipeAllowedCommands.Add("FilmThickFormula");
                recipeAllowedCommands.Add("FilmThickCoefficientA");
                recipeAllowedCommands.Add("FilmThickCoefficientB");
                recipeAllowedCommands.Add("AlarmTableIndex");
                recipeAllowedCommands.Add("RFSwitch");
                recipeAllowedCommands.Add("RFSetpoint");
                recipeAllowedCommands.Add("ForwardPowerAlarmWatchTable");
                recipeAllowedCommands.Add("PrAlarmWatchTable");
                recipeAllowedCommands.Add("PIAlarmWatchTable");
                recipeAllowedCommands.Add("C1Setpoint");
                recipeAllowedCommands.Add("C2Setpoint");
                recipeAllowedCommands.Add("C1AlarmWatchTable");
                recipeAllowedCommands.Add("C2AlarmWatchTable");
                recipeAllowedCommands.Add("VppAlarmWatchTable");
                recipeAllowedCommands.Add("VdcAlarmWatchTable");
                recipeAllowedCommands.Add("PressureSonserValue");
                recipeAllowedCommands.Add("PressureValveAngle");
                recipeAllowedCommands.Add("PressureSettingVG");
                recipeAllowedCommands.Add("PressCommand");
                recipeAllowedCommands.Add("PressValue");
                recipeAllowedCommands.Add("PressureAlarmTableNo");
                recipeAllowedCommands.Add("AbortRecipeTableIndex");
                recipeAllowedCommands.Add("AlarmConditionTable");
                recipeAllowedCommands.Add("LoaderCommand");
                recipeAllowedCommands.Add("LoaderValue");
                for (int i = 1; i < 11; i++)
                {
                    recipeAllowedCommands.Add($"AlarmAction.{i}");
                    recipeAllowedCommands.Add($"AlarmDetails.{i}");
                }

                for (int i = 1; i < 60; i++)
                {
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Set");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.SetUnit");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Ramprate");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.RamprateUnit");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Check");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.High");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Low");
                    recipeAllowedCommands.Add($"MFC{i}.Flow.Unit");
                }

                for (int i = 1; i < 200; i++)
                {
                    recipeAllowedCommands.Add($"AUX.{i}.Set");
                    recipeAllowedCommands.Add($"AUX.{i}.Check");
                    recipeAllowedCommands.Add($"AUX.{i}.High");
                    recipeAllowedCommands.Add($"AUX.{i}.Low");
                    recipeAllowedCommands.Add($"AUX.{i}.CheckUnit");
                }

                recipeAllowedCommands.Add("HeaterU.ZoneName");
                recipeAllowedCommands.Add("HeaterU.Set");
                recipeAllowedCommands.Add("HeaterU.SetUnit");
                recipeAllowedCommands.Add("HeaterU.Ramprate");
                recipeAllowedCommands.Add("HeaterU.RamprateUnit");
                recipeAllowedCommands.Add("HeaterU.Check");
                recipeAllowedCommands.Add("HeaterU.High");
                recipeAllowedCommands.Add("HeaterU.Low");
                recipeAllowedCommands.Add("HeaterU.Unit");

                recipeAllowedCommands.Add("HeaterCU.ZoneName");
                recipeAllowedCommands.Add("HeaterCU.Set");
                recipeAllowedCommands.Add("HeaterCU.SetUnit");
                recipeAllowedCommands.Add("HeaterCU.Ramprate");
                recipeAllowedCommands.Add("HeaterCU.RamprateUnit");
                recipeAllowedCommands.Add("HeaterCU.Check");
                recipeAllowedCommands.Add("HeaterCU.High");
                recipeAllowedCommands.Add("HeaterCU.Low");
                recipeAllowedCommands.Add("HeaterCU.Unit");

                recipeAllowedCommands.Add("HeaterC.ZoneName");
                recipeAllowedCommands.Add("HeaterC.Set");
                recipeAllowedCommands.Add("HeaterC.SetUnit");
                recipeAllowedCommands.Add("HeaterC.Ramprate");
                recipeAllowedCommands.Add("HeaterC.RamprateUnit");
                recipeAllowedCommands.Add("HeaterC.Check");
                recipeAllowedCommands.Add("HeaterC.High");
                recipeAllowedCommands.Add("HeaterC.Low");
                recipeAllowedCommands.Add("HeaterC.Unit");

                recipeAllowedCommands.Add("HeaterCL.ZoneName");
                recipeAllowedCommands.Add("HeaterCL.Set");
                recipeAllowedCommands.Add("HeaterCL.SetUnit");
                recipeAllowedCommands.Add("HeaterCL.Ramprate");
                recipeAllowedCommands.Add("HeaterCL.RamprateUnit");
                recipeAllowedCommands.Add("HeaterCL.Check");
                recipeAllowedCommands.Add("HeaterCL.High");
                recipeAllowedCommands.Add("HeaterCL.Low");
                recipeAllowedCommands.Add("HeaterCL.Unit");

                recipeAllowedCommands.Add("HeaterL.ZoneName");
                recipeAllowedCommands.Add("HeaterL.Set");
                recipeAllowedCommands.Add("HeaterL.SetUnit");
                recipeAllowedCommands.Add("HeaterL.Ramprate");
                recipeAllowedCommands.Add("HeaterL.RamprateUnit");
                recipeAllowedCommands.Add("HeaterL.Check");
                recipeAllowedCommands.Add("HeaterL.High");
                recipeAllowedCommands.Add("HeaterL.Low");
                recipeAllowedCommands.Add("HeaterL.Unit");

                recipeAllowedCommands.Add("Loader.Command");
                recipeAllowedCommands.Add("Loader.Speed1");
                recipeAllowedCommands.Add("Loader.Speed2");
                recipeAllowedCommands.Add("Loader.Speed3");
                recipeAllowedCommands.Add("Loader.RPM");

                recipeAllowedCommands.Add("Press.Command");
                recipeAllowedCommands.Add("Press.PID");
                recipeAllowedCommands.Add("Press.Set");
                recipeAllowedCommands.Add("Press.SlowVacSet");
                recipeAllowedCommands.Add("Press.ValveAngleSet");
                recipeAllowedCommands.Add("Press.IsWait");
                recipeAllowedCommands.Add("Press.LowWait");
                recipeAllowedCommands.Add("Press.HighWait");
                recipeAllowedCommands.Add("Press.WaitUnit");
                recipeAllowedCommands.Add("Press.WaitPress");

                //获取工艺程序文件中所有步的内容
                XmlDocument rcpDataDoc = new XmlDocument();
                rcpDataDoc.LoadXml(content);

                XmlNodeList tablesNodeList = rcpDataDoc.SelectNodes("//Tables/Table");
                if (tablesNodeList == null || tablesNodeList.Count == 0)
                {
                    reason = "No Table nodes found.";
                    return false;
                }

                for (int x = 0; x < tablesNodeList.Count; x++)
                {
                    XmlNode tableNode = tablesNodeList[x];

                    // 获取当前 Table 下的所有 Step 节点
                    XmlNodeList stepNodes = tableNode.SelectNodes("Step");
                    #region 
                    string strLoopEndStep, strJumpStep;
                    strLoopEndStep = strJumpStep = string.Empty;
                    var recipeData = new List<RecipeStep>();

                    for (int i = 0; i < stepNodes.Count; i++)
                    {
                        var recipeStep = new RecipeStep();
                        recipeStep.RecipeType = recipeType;
                        recipeData.Add(recipeStep);

                        XmlElement stepNode = stepNodes[i] as XmlElement;
                        Dictionary<string, string> dic = new Dictionary<string, string>();

                        //遍历Step节点
                        foreach (XmlAttribute att in stepNode.Attributes)
                        {
                            if (recipeAllowedCommands.Contains(att.Name))
                            {
                                dic.Add(att.Name, att.Value);
                            }
                        }
                        //遍历Step子节点中所有的attribute属性节点
                        foreach (XmlElement subStepNode in stepNode.ChildNodes)
                        {
                            foreach (XmlAttribute att in subStepNode.Attributes)
                            {
                                if (recipeAllowedCommands.Contains(att.Name))
                                {
                                    dic.Add(att.Name, att.Value);
                                }
                            }
                            //遍历Step子节点的子节点中所有的attribute属性节点
                            foreach (XmlElement subsubStepNode in subStepNode.ChildNodes)
                            {
                                foreach (XmlAttribute att in subsubStepNode.Attributes)
                                {
                                    if (recipeAllowedCommands.Contains(att.Name))
                                    {
                                        dic.Add(att.Name, att.Value);
                                    }
                                }
                            }
                        }

                        recipeStep.StepName = dic["Name"];

                        if (dic["Name"] == strLoopEndStep)
                        {
                            recipeStep.IsLoopEndStep = true;
                            strLoopEndStep = string.Empty;
                        }
                        recipeStep.IsJumpStep = false;

                        if (dic.ContainsKey("Command"))
                        {
                            string commandStr = dic["Command"];
                            if (commandStr.Contains("CallSystemRecipe"))
                            {
                            }
                            else if (commandStr.ToUpper().StartsWith("CALL"))
                            {
                                int subTableID = 0;
                                var subPara = commandStr.Replace("CALL", "").Replace("[", "").Replace("]", "").Split('*');
                                if (subPara != null && subPara.Length > 1)
                                {
                                    int.TryParse(subPara[0], out int loopCount);
                                    var tablePara = subPara[1].Split(':');
                                    if (tablePara != null && tablePara.Length > 1)
                                    {
                                        int.TryParse(tablePara[0], out subTableID);
                                        if (subTableID > 0)
                                        {
                                            recipeStep.IsCallSubStep = true;
                                            recipeStep.SubRecipeLoopCount = loopCount;
                                        }
                                    }
                                    recipeStep.SubRecipeTableInfo = subPara[1];
                                }


                            }
                            else if (commandStr.ToUpper().StartsWith("LOOP"))
                            {
                                recipeStep.IsLoopEndStep = true;
                                var loopPara = commandStr.Replace("LOOP", "").Replace("[", "").Replace("]", "").Split('*');
                                if (loopPara != null && loopPara.Length > 1)
                                {
                                    int.TryParse(loopPara[0], out int loopCount);
                                    recipeStep.LoopCount = loopCount + 1;//加1是因为第一次从正常的start-》end的执行算是一次循环，所以要额外加1

                                    int loopStartStep = -1;
                                    for (int index = 0; index < recipeData.Count; index++)
                                    {
                                        if (recipeData[index].StepName == loopPara[1])
                                        {
                                            loopStartStep = index;
                                            break;
                                        }
                                    }
                                    if (loopStartStep < 0)
                                    {
                                        reason = $"Recipe file does not contains LOOP step {loopPara[1]}";
                                        return false;
                                    }
                                    if (loopPara[1] != null)
                                    {
                                        if (loopStartStep < 0 ||
                                            (recipeType == "Process" && loopStartStep == 0))//Process recipe的standby不参与循环
                                            recipeStep.IsLoopEndStep = false;
                                        else
                                        {
                                            recipeStep.LoopStartStep = loopStartStep;
                                            if (recipeData.Count > loopStartStep)
                                            {
                                                recipeData[loopStartStep].IsLoopStartStep = true;
                                                recipeData[loopStartStep].LoopCount = loopCount + 1;

                                                recipeStep.LoopEndStep = recipeType == "Process" ? i + 1 : i;//Process recipe包含standby，从0开始；其他recipe不包含standby
                                            }
                                        }
                                    }
                                }
                            }
                            else if (commandStr.ToUpper().StartsWith("JUMP"))
                            {
                                var jumpPara = commandStr.Replace("Jump:", string.Empty).Replace("[", "").Replace("]", "");//JumpStepNo
                                if (jumpPara != null)
                                {
                                    //int.TryParse(jumpPara[0], out int jumpStepNo);

                                    //recipeStep.JumpStepNo = recipeType == "Process" ? jumpStepNo : jumpStepNo - 1;//Process recipe包含standby，从0开始；其他recipe不包含standby
                                    recipeStep.IsJumpStep = true;
                                    recipeStep.JumpStepName = jumpPara;
                                }
                            }
                        }

                        if (dic.ContainsKey("AbortRecipeTableIndex"))
                        {
                            if (dic["AbortRecipeTableIndex"].ToLower() != "none")
                            {
                                recipeStep.AbortRecipeTableInfo = dic["AbortRecipeTableIndex"];
                            }
                            recipeStep.AbortRecipeSteps = null;

                        }

                        if (dic.ContainsKey("EventSetting"))
                        {
                            string eventSettingStr = dic["EventSetting"];
                            if (eventSettingStr.ToLower() == "start")
                            {
                                recipeStep.IsTimeMeasurementStartStep = true;
                            }
                            else if (eventSettingStr.ToLower() == "stop")
                            {
                                recipeStep.IsTimeMeasurementStopStep = true;
                            }
                        }

                        if (dic.ContainsKey("FilmThickFormula"))
                        {
                            recipeStep.FilmThickFormula = dic["FilmThickFormula"];
                        }

                        if (dic.ContainsKey("FilmThickCoefficientA"))
                        {
                            recipeStep.FilmThickCoefficientA = float.Parse(dic["FilmThickCoefficientA"]);
                        }

                        if (dic.ContainsKey("FilmThickCoefficientB"))
                        {
                            recipeStep.FilmThickCoefficientB = float.Parse(dic["FilmThickCoefficientB"]);
                        }

                        if (dic.ContainsKey("AlarmConditionTable"))
                        {
                            recipeStep.AlarmConditionTable = dic["AlarmConditionTable"];
                        }

                        for (int j = 1; j < 11; j++)
                        {
                            string tempType = "Ignore Alarm";
                            string tempDetails = "";
                            if (dic.ContainsKey($"AlarmAction.{j}"))
                            {
                                tempType = dic[$"AlarmAction.{j}"];
                            }
                            if (dic.ContainsKey($"AlarmDetails.{j}"))
                            {
                                tempDetails = dic[$"AlarmDetails.{j}"];
                            }
                            recipeStep.AlarmActionSets.Add(j, new AlarmActions()
                            {
                                ProcessingType = tempType,
                                ProcessingDetails = tempDetails
                            });
                        }

                        //if(dic.ContainsKey("Loop"))
                        //{
                        //    string loopStr = dic["Loop"];
                        //    recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success;
                        //    recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success;
                        //    if (recipeStep.IsLoopStartStep)
                        //        recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty));
                        //    else
                        //        recipeStep.LoopCount = 0;
                        //}

                        //recipe time
                        if (dic["Name"].ToLower() == "standby")
                        {
                            if (DateTime.TryParse(dic["Time"], out DateTime time))
                            {
                                recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600 + time.Millisecond / 1000.0;
                            }
                            else if (float.TryParse(dic["Time"], out float timeInSec))
                            {
                                recipeStep.StepTime = timeInSec;
                                recipeStep.EndBy = EnumEndByCondition.ByTime;
                            }
                            else
                            {
                                recipeStep.StepTime = 0;
                                recipeStep.EndBy = EnumEndByCondition.ByStandbyFactor;
                            }
                        }
                        else
                        {
                            if (System.Text.RegularExpressions.Regex.Match(dic["Time"], @"[a-zA-Z]").Success)
                            {
                                if (SC.ContainsItem($"{module}.RecipeEditParameter.StepTime.{dic["Time"]}"))
                                {
                                    var time = DateTime.Parse(SC.GetStringValue($"{module}.RecipeEditParameter.StepTime.{dic["Time"]}"));
                                    recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600;
                                }
                                else
                                {
                                    reason = $"Configuration does not contains step time config {dic["Time"]}";
                                    return false;
                                }
                            }
                            else
                            {
                                if (DateTime.TryParse(dic["Time"], out DateTime time))
                                {
                                    recipeStep.StepTime = time.Second + time.Minute * 60 + time.Hour * 3600 + time.Millisecond / 1000.0;
                                }
                                else if (float.TryParse(dic["Time"], out float timeInSec))
                                {
                                    recipeStep.StepTime = timeInSec;
                                }
                                else
                                {
                                    reason = $"Step time {dic["Time"]} is invalid";
                                    return false;
                                }
                            }

                            if (dic["ConditionCheck"].ToLower() == "none")
                            {
                                recipeStep.EndBy = EnumEndByCondition.ByTime;
                            }
                            else
                            {
                                recipeStep.EndBy = EnumEndByCondition.ByStandbyFactor;
                            }
                        }

                        //ReplaceControlName(ref dic, "GasLineMFC1.Flow", "MFC1.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC2.Flow", "MFC2.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC3.Flow", "MFC3.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC4.Flow", "MFC4.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC5.Flow", "MFC5.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC6.Flow", "MFC6.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC7.Flow", "MFC7.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC8.Flow", "MFC8.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC9.Flow", "MFC9.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC10.Flow", "MFC10.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC11.Flow", "MFC11.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC12.Flow", "MFC12.SetParameters");
                        //ReplaceControlName(ref dic, "GasLineMFC51.Flow", "MFC51.SetParameters");

                        AddParameter(ref dic, "MFC1.SetParameters", new string[8] { "MFC1.Flow.Set", "MFC1.Flow.Ramprate", "MFC1.Flow.SetUnit", "MFC1.Flow.RamprateUnit", "MFC1.Flow.Check", "MFC1.Flow.High", "MFC1.Flow.Low", "MFC1.Flow.Unit" });
                        AddParameter(ref dic, "MFC2.SetParameters", new string[8] { "MFC2.Flow.Set", "MFC2.Flow.Ramprate", "MFC2.Flow.SetUnit", "MFC2.Flow.RamprateUnit", "MFC2.Flow.Check", "MFC2.Flow.High", "MFC2.Flow.Low", "MFC2.Flow.Unit" });
                        AddParameter(ref dic, "MFC3.SetParameters", new string[8] { "MFC3.Flow.Set", "MFC3.Flow.Ramprate", "MFC3.Flow.SetUnit", "MFC3.Flow.RamprateUnit", "MFC3.Flow.Check", "MFC3.Flow.High", "MFC3.Flow.Low", "MFC3.Flow.Unit" });
                        AddParameter(ref dic, "MFC4.SetParameters", new string[8] { "MFC4.Flow.Set", "MFC4.Flow.Ramprate", "MFC4.Flow.SetUnit", "MFC4.Flow.RamprateUnit", "MFC4.Flow.Check", "MFC4.Flow.High", "MFC4.Flow.Low", "MFC4.Flow.Unit" });
                        AddParameter(ref dic, "MFC5.SetParameters", new string[8] { "MFC5.Flow.Set", "MFC5.Flow.Ramprate", "MFC5.Flow.SetUnit", "MFC5.Flow.RamprateUnit", "MFC5.Flow.Check", "MFC5.Flow.High", "MFC5.Flow.Low", "MFC5.Flow.Unit" });
                        AddParameter(ref dic, "MFC6.SetParameters", new string[8] { "MFC6.Flow.Set", "MFC6.Flow.Ramprate", "MFC6.Flow.SetUnit", "MFC6.Flow.RamprateUnit", "MFC6.Flow.Check", "MFC6.Flow.High", "MFC6.Flow.Low", "MFC6.Flow.Unit" });
                        AddParameter(ref dic, "MFC7.SetParameters", new string[8] { "MFC7.Flow.Set", "MFC7.Flow.Ramprate", "MFC7.Flow.SetUnit", "MFC7.Flow.RamprateUnit", "MFC7.Flow.Check", "MFC7.Flow.High", "MFC7.Flow.Low", "MFC7.Flow.Unit" });
                        AddParameter(ref dic, "MFC8.SetParameters", new string[8] { "MFC8.Flow.Set", "MFC8.Flow.Ramprate", "MFC8.Flow.SetUnit", "MFC8.Flow.RamprateUnit", "MFC8.Flow.Check", "MFC8.Flow.High", "MFC8.Flow.Low", "MFC8.Flow.Unit" });
                        AddParameter(ref dic, "MFC9.SetParameters", new string[8] { "MFC9.Flow.Set", "MFC9.Flow.Ramprate", "MFC9.Flow.SetUnit", "MFC9.Flow.RamprateUnit", "MFC9.Flow.Check", "MFC9.Flow.High", "MFC9.Flow.Low", "MFC9.Flow.Unit" });
                        AddParameter(ref dic, "MFC10.SetParameters", new string[8] { "MFC10.Flow.Set", "MFC10.Flow.Ramprate", "MFC10.Flow.SetUnit", "MFC10.Flow.RamprateUnit", "MFC10.Flow.Check", "MFC10.Flow.High", "MFC10.Flow.Low", "MFC10.Flow.Unit" });
                        AddParameter(ref dic, "MFC11.SetParameters", new string[8] { "MFC11.Flow.Set", "MFC11.Flow.Ramprate", "MFC11.Flow.SetUnit", "MFC11.Flow.RamprateUnit", "MFC11.Flow.Check", "MFC11.Flow.High", "MFC11.Flow.Low", "MFC11.Flow.Unit" });
                        AddParameter(ref dic, "MFC12.SetParameters", new string[8] { "MFC12.Flow.Set", "MFC12.Flow.Ramprate", "MFC12.Flow.SetUnit", "MFC12.Flow.RamprateUnit", "MFC12.Flow.Check", "MFC12.Flow.High", "MFC12.Flow.Low", "MFC12.Flow.Unit" });
                        AddParameter(ref dic, "MFC13.SetParameters", new string[8] { "MFC13.Flow.Set", "MFC13.Flow.Ramprate", "MFC13.Flow.SetUnit", "MFC13.Flow.RamprateUnit", "MFC13.Flow.Check", "MFC13.Flow.High", "MFC13.Flow.Low", "MFC13.Flow.Unit" });
                        AddParameter(ref dic, "MFC14.SetParameters", new string[8] { "MFC14.Flow.Set", "MFC14.Flow.Ramprate", "MFC14.Flow.SetUnit", "MFC14.Flow.RamprateUnit", "MFC14.Flow.Check", "MFC14.Flow.High", "MFC14.Flow.Low", "MFC14.Flow.Unit" });
                        AddParameter(ref dic, "MFC15.SetParameters", new string[8] { "MFC15.Flow.Set", "MFC15.Flow.Ramprate", "MFC15.Flow.SetUnit", "MFC15.Flow.RamprateUnit", "MFC15.Flow.Check", "MFC15.Flow.High", "MFC15.Flow.Low", "MFC15.Flow.Unit" });
                        AddParameter(ref dic, "MFC16.SetParameters", new string[8] { "MFC16.Flow.Set", "MFC16.Flow.Ramprate", "MFC16.Flow.SetUnit", "MFC16.Flow.RamprateUnit", "MFC16.Flow.Check", "MFC16.Flow.High", "MFC16.Flow.Low", "MFC16.Flow.Unit" });
                        AddParameter(ref dic, "MFC17.SetParameters", new string[8] { "MFC17.Flow.Set", "MFC17.Flow.Ramprate", "MFC17.Flow.SetUnit", "MFC17.Flow.RamprateUnit", "MFC17.Flow.Check", "MFC17.Flow.High", "MFC17.Flow.Low", "MFC17.Flow.Unit" });
                        AddParameter(ref dic, "MFC31.SetParameters", new string[8] { "MFC31.Flow.Set", "MFC31.Flow.Ramprate", "MFC31.Flow.SetUnit", "MFC31.Flow.RamprateUnit", "MFC31.Flow.Check", "MFC31.Flow.High", "MFC31.Flow.Low", "MFC31.Flow.Unit" });
                        AddParameter(ref dic, "MFC32.SetParameters", new string[8] { "MFC32.Flow.Set", "MFC32.Flow.Ramprate", "MFC32.Flow.SetUnit", "MFC32.Flow.RamprateUnit", "MFC32.Flow.Check", "MFC32.Flow.High", "MFC32.Flow.Low", "MFC32.Flow.Unit" });
                        //AddParameter(ref dic, "MFC51.SetParameters", new string[8] { "MFC51.Flow.Set",  "MFC51.Flow.Ramprate", "MFC51.Flow.SetUnit", "MFC51.Flow.RamprateUnit", "MFC51.Flow.Check", "MFC51.Flow.High", "MFC51.Flow.Low", "MFC51.Flow.Unit" });

                        ReplaceControlName(ref dic, "MFM57Flow", "MFM57.SetParameters");
                        ReplaceControlName(ref dic, "MFM1Flow", "MFM1.SetParameters");
                        ReplaceControlName(ref dic, "MFM6Flow", "MFM6.SetParameters");
                        ReplaceControlName(ref dic, "MFM7Flow", "MFM7.SetParameters");
                        ReplaceControlName(ref dic, "MFM8Flow", "MFM8.SetParameters");
                        ReplaceControlName(ref dic, "MFM9Flow", "MFM9.SetParameters");
                        ReplaceControlName(ref dic, "MFM11Flow", "MFM11.SetParameters");
                        ReplaceControlName(ref dic, "MFM12Flow", "MFM12.SetParameters");
                        ReplaceControlName(ref dic, "MFM13Flow", "MFM13.SetParameters");
                        ReplaceControlName(ref dic, "MFM16Flow", "MFM16.SetParameters");

                        ReplaceControlName(ref dic, "ConditionCheck", "SetConditionCheck");

                        ReplaceControlName(ref dic, "Command", "SetCommand");

                        if (dic.ContainsKey("AlarmConditionTable"))
                            ReplaceControlName(ref dic, "AlarmConditionTable", "SetAlarmConditionTable");

                        //ReplaceControlName(ref dic, "Heater2", "ZoneU.SetParameters");
                        //ReplaceControlName(ref dic, "Heater4", "ZoneCU.SetParameters");
                        //ReplaceControlName(ref dic, "Heater6", "ZoneC.SetParameters");
                        //ReplaceControlName(ref dic, "Heater8", "ZoneCL.SetParameters");
                        //ReplaceControlName(ref dic, "Heater10", "ZoneL.SetParameters");
                        var controlMode = dic["Temperature.ControlMode"];
                        var correct = dic["Temperature.Correct"];
                        var PID = dic["Temperature.PID"];
                        //AddParameter(ref dic, "ZoneU.SetParameters", controlMode, correct, PID);
                        //AddParameter(ref dic, "ZoneCU.SetParameters", controlMode, correct, PID);
                        //AddParameter(ref dic, "ZoneC.SetParameters", controlMode, correct, PID);
                        //AddParameter(ref dic, "ZoneCL.SetParameters", controlMode, correct, PID);
                        //AddParameter(ref dic, "ZoneL.SetParameters", controlMode, correct, PID);

                        AddParameter(ref dic, "HeaterU.SetParameters", new string[9] { "HeaterU.ZoneName", "HeaterU.Set", "HeaterU.SetUnit", "HeaterU.Ramprate", "HeaterU.RamprateUnit", "HeaterU.Check", "HeaterU.High", "HeaterU.Low", "HeaterU.Unit" });
                        AddParameterValue(ref dic, "HeaterU.SetParameters", new string[8] { controlMode, correct, PID, "", "", "", dic["ValveAV91"], dic["BWR"] });

                        AddParameter(ref dic, "HeaterCU.SetParameters", new string[9] { "HeaterCU.ZoneName", "HeaterCU.Set", "HeaterCU.SetUnit", "HeaterCU.Ramprate", "HeaterCU.RamprateUnit", "HeaterCU.Check", "HeaterCU.High", "HeaterCU.Low", "HeaterCU.Unit" });
                        AddParameterValue(ref dic, "HeaterCU.SetParameters", new string[8] { controlMode, correct, PID, "", "", "", dic["ValveAV91"], dic["BWR"] });

                        AddParameter(ref dic, "HeaterC.SetParameters", new string[9] { "HeaterC.ZoneName", "HeaterC.Set", "HeaterC.SetUnit", "HeaterC.Ramprate", "HeaterC.RamprateUnit", "HeaterC.Check", "HeaterC.High", "HeaterC.Low", "HeaterC.Unit" });
                        AddParameterValue(ref dic, "HeaterC.SetParameters", new string[8] { controlMode, correct, PID, "", "", "", dic["ValveAV91"], dic["BWR"] });

                        AddParameter(ref dic, "HeaterCL.SetParameters", new string[9] { "HeaterCL.ZoneName", "HeaterCL.Set", "HeaterCL.SetUnit", "HeaterCL.Ramprate", "HeaterCL.RamprateUnit", "HeaterCL.Check", "HeaterCL.High", "HeaterCL.Low", "HeaterCL.Unit" });
                        AddParameterValue(ref dic, "HeaterCL.SetParameters", new string[8] { controlMode, correct, PID, "", "", "", dic["ValveAV91"], dic["BWR"] });

                        AddParameter(ref dic, "HeaterL.SetParameters", new string[9] { "HeaterL.ZoneName", "HeaterL.Set", "HeaterL.SetUnit", "HeaterL.Ramprate", "HeaterL.RamprateUnit", "HeaterL.Check", "HeaterL.High", "HeaterL.Low", "HeaterL.Unit" });
                        AddParameterValue(ref dic, "HeaterL.SetParameters", new string[8] { controlMode, correct, PID, "", "", "", dic["ValveAV91"], dic["BWR"] });

                        AddParameter(ref dic, "APC.SetParameters", new string[10] { "Press.Command", "Press.PID", "Press.Set", "Press.SlowVacSet", "Press.ValveAngleSet", "Press.IsWait", "Press.LowWait", "Press.HighWait", "Press.WaitUnit", "Press.WaitPress" });//APC
                        AddParameterValue(ref dic, "APC.SetParameters", new string[2] { "", dic["ValveAV71"] });//APC

                        AddParameter(ref dic, "SetBoatMotion", new string[5] { "Loader.Command", "Loader.Speed1", "Loader.Speed2", "Loader.Speed3", "Loader.RPM" });//Boat

                        List<string> auxCommands = new List<string>();
                        for (int k = 1; k < 200; k++)
                        {
                            if (!dic.ContainsKey($"AUX.{k}.Set"))
                                continue;
                            auxCommands.Add($"{k},{dic[$"AUX.{k}.Set"]},{dic[$"AUX.{k}.Check"]},{dic[$"AUX.{k}.High"]},{dic[$"AUX.{k}.Low"]},{dic[$"AUX.{k}.CheckUnit"]}");
                            dic.Remove($"AUX.{k}.Set");
                            dic.Remove($"AUX.{k}.Check");
                            dic.Remove($"AUX.{k}.High");
                            dic.Remove($"AUX.{k}.Low");
                            dic.Remove($"AUX.{k}.CheckUnit");
                        }
                        dic.Add("AUX.SetParameters", string.Join(";", auxCommands));

                        //ReplaceControlName(ref dic, "RFSwitch", "RfPower.SetParameters");
                        //AddParameter(ref dic, "RfPower.SetParameters", dic["RFSetpoint"], dic["ForwardPowerAlarmWatchTable"], dic["PrAlarmWatchTable"], dic["PIAlarmWatchTable"]);

                        //ReplaceControlName(ref dic, "C1Setpoint", "RfMatch.SetParameters");
                        //AddParameter(ref dic, "RfMatch.SetParameters", dic["C2Setpoint"], dic["C1AlarmWatchTable"], dic["C2AlarmWatchTable"], dic["VppAlarmWatchTable"]);
                        AddValveParameter(ref dic, "SetValves", new string[153] {
                      "ValveAV1",
                      "ValveAV2",
                      "ValveAV3",
                      "ValveAV4",
                      "ValveAV5",
                      "ValveAV6",
                      "ValveAV7",
                      "ValveAV8",
                      "ValveAV9",
                      "ValveAV10",
                      "ValveAV11",
                      "ValveAV12",
                      "ValveAV13",
                      "ValveAV14",
                      "ValveAV15",
                      "ValveAV16",
                      "ValveAV17",
                      "ValveAV18",
                      "ValveAV19",
                      "ValveAV20",
                      "ValveAV21",
                      "ValveAV22",
                      "ValveAV23",
                      "ValveAV24",
                      "ValveAV25",
                      "ValveAV26",
                      "ValveAV27",
                      "ValveAV28",
                      "ValveAV29",
                      "ValveAV30",
                      "ValveAV31",
                      "ValveAV32",
                      "ValveAV33",
                      "ValveAV34",
                      "ValveAV35",
                      "ValveAV36",
                      "ValveAV37",
                      "ValveAV38",
                      "ValveAV39",
                      "ValveAV40",
                      "ValveAV41",
                      "ValveAV42",
                      "ValveAV43",
                      "ValveAV44",
                      "ValveAV45",
                      "ValveAV46",
                      "ValveAV47",
                      "ValveAV48",
                      "ValveAV49",
                      "ValveAV50",
                      "ValveAV51",
                      "ValveAV52",
                      "ValveAV53",

                      "ValveAV60",
                      "ValveAV61",
                      "ValveAV62",
                      "ValveAV63",
                      "ValveAV64",
                      "ValveAV65",
                      "ValveAV66",
                      "ValveAV67",
                      "ValveAV68",
                      "ValveAV69",
                      "ValveAV70",
                      "ValveAV71",
                      "ValveAV72",
                      "ValveAV73",
                      "ValveAV74",
                      "ValveAV75",
                      "ValveAV76",
                      "ValveAV77",
                      "ValveAV78",
                      "ValveAV79",
                      "ValveAV80",
                      "ValveAV81",
                      "ValveAV82",
                      "ValveAV83",
                      "ValveAV84",
                      "ValveAV85",
                      "ValveAV86",
                      "ValveAV87",
                      "ValveAV88",
                      "ValveAV89",
                      "ValveAV90",
                      "ValveAV91",
                      "ValveAV92",
                      "ValveAV93",
                      "ValveAV94",
                      "ValveAV95",
                      "ValveAV96",
                      "ValveAV97",
                      "ValveAV98",
                      "ValveAV99",
                      "ValveAV100",
                      "ValveAV101",
                      "ValveAV102",
                      "ValveAV103",
                      "ValveAV104",
                      "ValveAV105",
                      "ValveAV106",
                      "ValveAV107",
                      "ValveAV108",
                      "ValveAV109",
                      "ValveAV110",
                      "ValveAV111",
                      "ValveAV112",
                      "ValveAV113",
                      "ValveAV114",
                      "ValveAV115",
                      "ValveAV116",
                      "ValveAV117",
                      "ValveAV118",
                      "ValveAV119",
                      "ValveAV120",
                      "ValveAV121",
                      "ValveAV122",
                      "ValveAV123",
                      "ValveAV124",
                      "ValveAV125",
                      "ValveAV126",
                      "ValveAV127",
                      "ValveAV128",
                      "ValveAV129",
                      "ValveAV130",
                      "ValveAV131",
                      "ValveAV132",
                      "ValveAV133",
                      "ValveAV134",
                      "ValveAV135",
                      "ValveAV136",
                        "DPR",
                        "AGV",
                        "AGV2",
                        "MBP",
                        "MBP1",
                        "MBP2",
                        "DP",
                        "BWR",
                        "F2Cln",
                        "HFCln",
                        "CEXH",
                        "DEPO",
                        "HTR1",
                        "HTR2",
                        "HTR3",
                        "DP1",
                        "DP2",
                        "HMNT",
                        "CMNT",
                        "HREF",
                        "CREF",
                        "HZERO",
                        "CZERO"
                    });

                        //dic.Remove("SetValves");
                        //dic.Remove("HeaterU.SetParameters");
                        //dic.Remove("HeaterCU.SetParameters");
                        //dic.Remove("HeaterC.SetParameters");
                        //dic.Remove("HeaterCL.SetParameters");
                        //dic.Remove("HeaterL.SetParameters");
                        //dic.Remove("MFC1.SetParameters");
                        //dic.Remove("MFC2.SetParameters");
                        //dic.Remove("MFC3.SetParameters");
                        //dic.Remove("MFC4.SetParameters");
                        //dic.Remove("MFC5.SetParameters");
                        //dic.Remove("MFC6.SetParameters");
                        //dic.Remove("MFC7.SetParameters");
                        //dic.Remove("MFC8.SetParameters");
                        //dic.Remove("MFC9.SetParameters");
                        //dic.Remove("MFC10.SetParameters");
                        //dic.Remove("MFC11.SetParameters");
                        //dic.Remove("MFC12.SetParameters");
                        //ReplaceControlNameForValve(ref dic, "ValveAV1");
                        //ReplaceControlNameForValve(ref dic, "ValveAV2");
                        //ReplaceControlNameForValve(ref dic, "ValveAV3");
                        //ReplaceControlNameForValve(ref dic, "ValveAV4");
                        //ReplaceControlNameForValve(ref dic, "ValveAV5");
                        //ReplaceControlNameForValve(ref dic, "ValveAV6");
                        //ReplaceControlNameForValve(ref dic, "ValveAV7");
                        //ReplaceControlNameForValve(ref dic, "ValveAV8");
                        //ReplaceControlNameForValve(ref dic, "ValveAV9");
                        //ReplaceControlNameForValve(ref dic, "ValveAV10");
                        //ReplaceControlNameForValve(ref dic, "ValveAV11");
                        //ReplaceControlNameForValve(ref dic, "ValveAV12");
                        //ReplaceControlNameForValve(ref dic, "ValveAV13");
                        //ReplaceControlNameForValve(ref dic, "ValveAV14");
                        //ReplaceControlNameForValve(ref dic, "ValveAV15");
                        //ReplaceControlNameForValve(ref dic, "ValveAV16");
                        //ReplaceControlNameForValve(ref dic, "ValveAV17");
                        //ReplaceControlNameForValve(ref dic, "ValveAV18");
                        //ReplaceControlNameForValve(ref dic, "ValveAV19");
                        //ReplaceControlNameForValve(ref dic, "ValveAV20");
                        //ReplaceControlNameForValve(ref dic, "ValveAV21");
                        //ReplaceControlNameForValve(ref dic, "ValveAV22");
                        //ReplaceControlNameForValve(ref dic, "ValveAV23");
                        //ReplaceControlNameForValve(ref dic, "ValveAV24");
                        //ReplaceControlNameForValve(ref dic, "ValveAV25");
                        //ReplaceControlNameForValve(ref dic, "ValveAV26");
                        //ReplaceControlNameForValve(ref dic, "ValveAV27");
                        //ReplaceControlNameForValve(ref dic, "ValveAV28");
                        //ReplaceControlNameForValve(ref dic, "ValveAV29");
                        //ReplaceControlNameForValve(ref dic, "ValveAV30");
                        //ReplaceControlNameForValve(ref dic, "ValveAV31");
                        //ReplaceControlNameForValve(ref dic, "ValveAV32");
                        //ReplaceControlNameForValve(ref dic, "ValveAV33");
                        //ReplaceControlNameForValve(ref dic, "ValveAV34");
                        //ReplaceControlNameForValve(ref dic, "ValveAV35");
                        //ReplaceControlNameForValve(ref dic, "ValveAV36");
                        //ReplaceControlNameForValve(ref dic, "ValveAV37");
                        //ReplaceControlNameForValve(ref dic, "ValveAV38");
                        //ReplaceControlNameForValve(ref dic, "ValveAV39");
                        //ReplaceControlNameForValve(ref dic, "ValveAV52");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV54");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV56");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV57");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV58");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV59");
                        //ReplaceControlNameForValve(ref dic, "ValveAV60");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV65");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV66");
                        ////ReplaceControlNameForValve(ref dic, "ValveAV68");
                        //ReplaceControlNameForValve(ref dic, "ValveAV71");
                        //ReplaceControlNameForValve(ref dic, "ValveAV72");
                        //ReplaceControlNameForValve(ref dic, "ValveAV73");
                        //ReplaceControlNameForValve(ref dic, "ValveAV74");
                        //ReplaceControlNameForValve(ref dic, "ValveAV75");
                        //ReplaceControlNameForValve(ref dic, "ValveAV77");
                        //ReplaceControlNameForValve(ref dic, "ValveAV81");
                        //ReplaceControlNameForValve(ref dic, "ValveAV82");
                        //ReplaceControlNameForValve(ref dic, "ValveAV83");
                        //ReplaceControlNameForValve(ref dic, "ValveAV91");
                        dic.Remove("StepNo");
                        dic.Remove("Name");
                        dic.Remove("EndBy");
                        dic.Remove("Time");
                        dic.Remove("ZAxisPosition");
                        dic.Remove("ZAxisSpeed");
                        dic.Remove("RotatePosition");
                        dic.Remove("RotateSpeed");
                        dic.Remove("RotateDirection");
                        dic.Remove("Heater1");
                        dic.Remove("Heater2");
                        dic.Remove("Heater3");
                        dic.Remove("Heater4");
                        dic.Remove("Heater5");
                        dic.Remove("ValveAV54");
                        dic.Remove("ValveAV55");
                        dic.Remove("ValveAV56");
                        dic.Remove("ValveAV57");
                        dic.Remove("ValveAV58");
                        dic.Remove("ValveAV59");
                        dic.Remove("ValveAV65");
                        dic.Remove("ValveAV66");
                        dic.Remove("ValveAV68");
                        dic.Remove("ExternalOn");
                        dic.Remove("ExternalOff");
                        dic.Remove("ExternalSensor");
                        dic.Remove("TempStabilize");
                        dic.Remove("FinishAutoProfile");
                        dic.Remove("ReachTempWait");
                        dic.Remove("ReachTemp");
                        dic.Remove("TempUpper");
                        dic.Remove("TempLower");
                        dic.Remove("ReachPressureWait");
                        dic.Remove("ReachPressure");
                        dic.Remove("PressureUpper");
                        dic.Remove("PressureLower");
                        dic.Remove("PressureStabilize");
                        dic.Remove("External.Out1");
                        dic.Remove("External.Out2");
                        dic.Remove("External.Out3");
                        dic.Remove("External.Out4");
                        dic.Remove("External.Out5");
                        dic.Remove("External.Out6");

                        dic.Remove("RFSwitch");
                        dic.Remove("RFSetpoint");
                        dic.Remove("ForwardPowerAlarmWatchTable");
                        dic.Remove("PrAlarmWatchTable");
                        dic.Remove("PIAlarmWatchTable");

                        dic.Remove("C1Setpoint");
                        dic.Remove("C2Setpoint");
                        dic.Remove("C1AlarmWatchTable");
                        dic.Remove("C2AlarmWatchTable");
                        dic.Remove("VppAlarmWatchTable");
                        dic.Remove("VdcAlarmWatchTable");
                        dic.Remove("AbortRecipeTableIndex");

                        dic.Remove("Temperature.ControlMode");
                        dic.Remove("Temperature.Correct");
                        dic.Remove("Temperature.PID");
                        dic.Remove("Temperature.Profile");
                        dic.Remove("Temperature.Stabilize");
                        dic.Remove("Temperature.TempReadyCond");

                        dic.Remove("FilmThickFormula");
                        dic.Remove("FilmThickCoefficientA");
                        dic.Remove("FilmThickCoefficientB");

                        dic.Remove("APC.SetPressure");
                        dic.Remove("PressureSettingVG");
                        dic.Remove("PressureSonserValue");
                        dic.Remove("PressureValveAngle");
                        dic.Remove("PressureAlarmTableNo");

                        dic.Remove("EventSetting");
                        dic.Remove("AlarmTableIndex");
                        dic.Remove("AlarmDetails.1");
                        dic.Remove("AlarmAction.1");
                        dic.Remove("AlarmDetails.2");
                        dic.Remove("AlarmAction.2");
                        dic.Remove("AlarmDetails.3");
                        dic.Remove("AlarmAction.3");
                        dic.Remove("AlarmDetails.4");
                        dic.Remove("AlarmAction.4");
                        dic.Remove("AlarmDetails.5");
                        dic.Remove("AlarmAction.5");
                        dic.Remove("AlarmDetails.6");
                        dic.Remove("AlarmAction.6");
                        dic.Remove("AlarmDetails.7");
                        dic.Remove("AlarmAction.7");
                        dic.Remove("AlarmDetails.8");
                        dic.Remove("AlarmAction.8");
                        dic.Remove("AlarmDetails.9");
                        dic.Remove("AlarmAction.9");
                        dic.Remove("AlarmDetails.10");
                        dic.Remove("AlarmAction.10");

                        //List<string> mfcCheckInstall = new List<string>()
                        //{
                        //    "MfcN1",
                        //    "MfcN2",
                        //    "MfcN3",
                        //    "MfcH1",
                        //    "MfcJ1",
                        //    "MfcXN1",
                        //};
                        //foreach(var mfc in mfcCheckInstall)
                        //{
                        //    if (!SC.GetValue<bool>($"PM1.MFC.{mfc}.IsMFCInstalled"))
                        //        dic.Remove($"{mfc}.SetParameters");
                        //}

                        foreach (string key in dic.Keys)
                            recipeStep.RecipeCommands.Add(key, dic[key]);
                    }

                    for (int i = 0; i < recipeData.Count; i++)
                    {
                        if (recipeData[i].IsJumpStep)
                        {
                            bool findJumpStep = false;
                            for (int j = 0; j < recipeData.Count; j++)
                            {
                                if (recipeData[j].StepName == recipeData[i].JumpStepName)
                                {
                                    recipeData[i].JumpStepNo = j;
                                    findJumpStep = true;
                                    break;
                                }
                            }

                            if (!findJumpStep)
                            {
                                reason = $"Recipe file does not contains jump step {recipeData[i].JumpStepName}";
                                return false;
                            }
                        }
                    }
                    #endregion
                    recipeDatas.Add(x + 1, recipeData);
                }




            }
            catch (Exception ex)
            {
                LOG.Write(ex);

                reason = $"Recipe file content not valid, {recipeFile}, {ex.Message}";
                return false;
            }
            return true;
        }

    }
}