PMN2Purge.cs 17 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using DocumentFormat.OpenXml.Packaging;
  8. using FurnaceRT.Devices;
  9. using FurnaceRT.Equipments.PMs.Devices;
  10. using FurnaceRT.Extraction;
  11. using MECF.Framework.Common.CommonData.SorterDefines;
  12. using MECF.Framework.Common.Equipment;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Diagnostics;
  16. namespace FurnaceRT.Equipments.PMs
  17. {
  18. /// <summary>
  19. /// 分布类 定义N2Purge的执行逻辑
  20. /// </summary>
  21. public partial class PMModule
  22. {
  23. private R_TRIG _trigN2UpRD = new R_TRIG();
  24. private R_TRIG _trigN2DownRD = new R_TRIG();
  25. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  26. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  27. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  28. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  29. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  30. private Dictionary<string, R_TRIG> _rTrigDict;
  31. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  32. private double _n2PurgeData = 20;
  33. private double _n2ToAirData = 185000;
  34. private double _stabilityTime = 30;
  35. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  36. private void InitN2PurgeData()
  37. {
  38. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  39. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  40. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  41. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  42. }
  43. private void InitN2PurgeConfigData()
  44. {
  45. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  46. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  47. _stabilityTime = SC.ContainsItem($"System.StabilityTime") ? SC.GetValue<double>("System.StabilityTime") : 30;
  48. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  49. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  50. {
  51. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  52. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  53. {"AIR",()=> GetN2PurgeAIRStatus()},
  54. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  55. {"Foup1",()=> GetN2PurgeFoup1Status()},
  56. {"Foup2",()=> GetN2PurgeFoup2Status()},
  57. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  58. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  59. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  60. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  61. };
  62. _allTimeDict = new Dictionary<string, Stopwatch>()
  63. {
  64. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  65. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  66. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  67. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() }
  68. };
  69. _rTrigDict = new Dictionary<string, R_TRIG>();
  70. }
  71. private void MonitorN2Purge()
  72. {
  73. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  74. if (string.IsNullOrEmpty(selectN2PurgeMode))
  75. {
  76. return;
  77. }
  78. SetN2PurgeModeAction(selectN2PurgeMode);
  79. }
  80. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  81. {
  82. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  83. switch (_N2PurgeMode)
  84. {
  85. case N2PurgeModeEnum.Auto:
  86. // 自动模式下的操作
  87. break;
  88. case N2PurgeModeEnum.ManualMode:
  89. break;
  90. case N2PurgeModeEnum.N2PurgeMode:
  91. ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  92. ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString());
  93. break;
  94. case N2PurgeModeEnum.ATMMode:
  95. ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  96. ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString());
  97. break;
  98. }
  99. }
  100. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  101. {
  102. var stopwatch = _allTimeDict[modeKey];
  103. if (!_allTimeDict[modeKey].IsRunning)
  104. {
  105. _allTimeDict[modeKey].Restart();
  106. }
  107. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  108. {
  109. if (!condition())
  110. {
  111. _allTimeDict[modeKey].Stop();
  112. _allTimeDict[modeKey].Reset();
  113. return false;
  114. }
  115. }
  116. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  117. {
  118. _allTimeDict[modeKey].Stop();
  119. _allTimeDict[modeKey].Reset();
  120. }
  121. return true;
  122. }
  123. private void ProcessPhase(R_TRIG r_TRIG, string modeKey)
  124. {
  125. r_TRIG.CLK = CheckConditionInTime(modeKey, (int)_stabilityTime * 1000, () => _n2PurgeSequenceStatus[modeKey].Invoke());
  126. if (r_TRIG.Q)
  127. {
  128. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  129. SetN2PurgeValveData(modeKey);
  130. _allTimeDict[modeKey].Stop();
  131. _allTimeDict[modeKey].Reset();
  132. }
  133. }
  134. public void RestAllN2PrugeRD()
  135. {
  136. _trigN2AirDownRD.RST = false;
  137. _trigN2AirUpRD.RST = false;
  138. _trigN2DownRD.RST = false;
  139. _trigN2UpRD.RST = false;
  140. foreach (var item in _allTimeDict)
  141. {
  142. item.Value.Stop();
  143. item.Value.Reset();
  144. }
  145. }
  146. private void SetN2PurgeValveData(string mode)
  147. {
  148. var value = _n2PurgeSequenceAction[mode];
  149. foreach (var operateItem in value.Item2)
  150. {
  151. if (operateItem.Item1 is IoMFC)
  152. {
  153. var ioMFc = (operateItem.Item1 as IoMFC);
  154. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  155. }
  156. if (operateItem.Item1 is IoValve)
  157. {
  158. var ioValve = (operateItem.Item1 as IoValve);
  159. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  160. }
  161. if (operateItem.Item1 is IoTrigger)
  162. {
  163. var ioTrigger = (operateItem.Item1 as IoTrigger);
  164. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  165. }
  166. }
  167. }
  168. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  169. {
  170. reason = string.Empty;
  171. var mode = param[0].ToString();
  172. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  173. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  174. {
  175. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  176. }
  177. RestAllN2PrugeRD();
  178. return true;
  179. }
  180. /// <summary>
  181. /// 获取当前O2检测位置的设定值
  182. /// </summary>
  183. /// <returns></returns>
  184. private string GetO2SetCheckSetPoint()
  185. {
  186. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  187. {
  188. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  189. if (SC.ContainsItem(key))
  190. return SC.GetValue<double>(key).ToString("f3");
  191. }
  192. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  193. {
  194. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  195. if (SC.ContainsItem(key))
  196. return SC.GetValue<double>(key).ToString("f3");
  197. }
  198. return "";
  199. }
  200. /// <summary>
  201. /// 获取当前O2检测位置
  202. /// </summary>
  203. /// <returns></returns>
  204. private string GetCheckO2Location()
  205. {
  206. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  207. return SensorO2DetectSideLA.Display;
  208. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  209. return SensorO2DetectSideFIMS1.Display;
  210. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  211. return SensorO2DetectSideFIMS2.Display;
  212. return "";
  213. }
  214. /// <summary>
  215. /// 获取当前O2浓度
  216. /// </summary>
  217. /// <returns></returns>
  218. private string GetO2DensityData()
  219. {
  220. var result = "";
  221. result = ConcentrationO2.FeedBack.ToString("f3");
  222. return result;
  223. }
  224. private double GetO2Density()
  225. {
  226. return ConcentrationO2.FeedBack;
  227. }
  228. private bool GetN2PurgePhase1()
  229. {
  230. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  231. }
  232. private bool GetN2PurgePhase2()
  233. {
  234. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  235. }
  236. private bool GetN2PurgePhase3()
  237. {
  238. return GetLADoorOpenStatus();
  239. }
  240. private bool GetN2PurgePhase5()
  241. {
  242. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  243. }
  244. private bool GetN2PurgePhase4()
  245. {
  246. return GetO2Density() >= _n2ToAirData;
  247. }
  248. private bool GetN2PurgeAIRTo20PPMStatus()
  249. {
  250. return ValveAV202.DOOpen.Value;
  251. }
  252. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  253. {
  254. return ConcentrationO2.Value < value;
  255. }
  256. private bool GetN2PurgeAIRStatus()
  257. {
  258. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  259. }
  260. private bool GetLADoorOpenStatus()
  261. {
  262. return (bool)(SensorLADoorSw1?.Value);
  263. }
  264. private bool GetN2PurgeDoorOpenStatus()
  265. {
  266. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  267. }
  268. private bool GetN2PurgeFoup1Status()
  269. {
  270. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  271. }
  272. private bool GetN2PurgeFoup2Status()
  273. {
  274. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  275. }
  276. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  277. {
  278. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  279. {
  280. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  281. }
  282. }
  283. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  284. {
  285. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  286. {
  287. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  288. }
  289. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  290. {
  291. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  292. }
  293. }
  294. public void SetN2PurgeProcess(bool isEable)
  295. {
  296. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  297. {
  298. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  299. }
  300. }
  301. public void SetN2PurgeLAO2CheckSV(float value)
  302. {
  303. if (TrigN2PurgeLAO2CheckSV != null)
  304. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  305. }
  306. public void SetN2PurgeFOUPO2CheckSV(float value)
  307. {
  308. if (TrigN2PurgeFOUPO2CheckSV != null)
  309. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  310. }
  311. public void SetAVParameter(ModuleName fims, bool isEable)
  312. {
  313. if (fims == ModuleName.FIMS1)
  314. {
  315. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  316. avValve58?.TurnValve(isEable, out _);
  317. }
  318. if (fims == ModuleName.FIMS2)
  319. {
  320. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  321. avValve59?.TurnValve(isEable, out _);
  322. }
  323. }
  324. /// <summary>
  325. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  326. /// </summary>
  327. public void SetN2PurgeParameters()
  328. {
  329. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  330. {
  331. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime") * 1000;
  332. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  333. }
  334. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  335. {
  336. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime") * 1000;
  337. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  338. }
  339. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  340. {
  341. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime") * 1000;
  342. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  343. }
  344. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  345. {
  346. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime") * 1000;
  347. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  348. }
  349. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  350. {
  351. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") * 1000;
  352. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  353. }
  354. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  355. {
  356. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") * 1000;
  357. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  358. }
  359. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  360. {
  361. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime") * 1000;
  362. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  363. }
  364. }
  365. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  366. {
  367. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  368. {
  369. if (!isN2Purge)
  370. {
  371. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  372. }
  373. else
  374. {
  375. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  376. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  377. }
  378. RestAllN2PrugeRD();
  379. }
  380. }
  381. }
  382. }