123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293 |
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.Equipment;
- using FurnaceRT.Equipments.PMs.Routines;
- namespace FurnaceRT.Equipments.PMs.RecipeExecutions
- {
- public class PostProcess : PMBaseRoutine
- {
- private enum RoutineStep
- {
- RFPowerOff,
- MWPowerOff,
- StopGasFlow,
- PinUp,
- Vent,
- }
- private int _rfOffTimeout;
- private int _mwOffTimeout;
- private int _liftTimeout;
- public PostProcess(ModuleName module, PMModule pm) : base(module, pm)
- {
- Module = module.ToString();
- Name = "PostProcess";
- }
- public bool Initialize()
- {
- return true;
- }
- public void Terminate()
- {
- }
- public override Result Start(params object[] objs)
- {
- //_rfOffTimeout = SC.GetValue<int>($"PM.{PMModule.Name}.RF.PowerOnTimeout");
- //_mwOffTimeout = SC.GetValue<int>($"PM.{PMModule.Name}.Microwave.PowerOnTimeout");
- Reset();
- //_ventRoutine = new PMVentRoutine(ModuleHelper.Converter(Module), PMModule);
- //_liftTimeout = SC.GetValue<int>($"PM.{PMModule.Name}.ChamberLiftPin.MoveTimeout");
- return Result.RUN;
- }
- public override Result Monitor()
- {
- try
- {
- //StopAllGasFlow((int)RoutineStep.StopGasFlow, PMModule);
- //MovePinUp((int)RoutineStep.PinUp, PMModule, _liftTimeout);
- //ExecuteRoutine((int)RoutineStep.Vent, _ventRoutine);
- }
- catch (RoutineBreakException)
- {
- return Result.RUN;
- }
- catch (RoutineFaildException)
- {
- return Result.FAIL;
- }
- return Result.DONE;
- }
- public void Exit()
- {
- PMModule.RecipeRunningInfo.StepName = string.Empty;
- }
- public override void Abort()
- {
- //PMModule.GasSticks.ForEach(x=>x.SetFlow(out _, 0, 0));
- PMModule.RecipeRunningInfo.StepName = string.Empty;
- }
- }
- }
|