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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Runtime.Serialization;
- using System.Text;
- using System.Threading.Tasks;
- namespace MECF.Framework.Common.Equipment
- {
- /// <summary>
- /// 在框架中,Module指具备放置Wafer的单元
- /// </summary>
- [DataContract]
- [Serializable]
- public enum ModuleName
- {
-
- [EnumMember]
- System = 0,
- [EnumMember]
- LP1,
- [EnumMember]
- LP2,
- [EnumMember]
- LP3,
- [EnumMember]
- LP4,
- [EnumMember]
- LP5,
- [EnumMember]
- LP6,
- [EnumMember]
- LP7,
- [EnumMember]
- LP8,
- [EnumMember]
- LP9,
- [EnumMember]
- LP10,
- //robot modules
- //[EnumMember]
- //Robot,
- [EnumMember]
- VaccumRobot,
- [EnumMember]
- LoadRobot,
- [EnumMember]
- EfemRobot,
- [EnumMember]
- TMRobot,
- //upenders
- //[EnumMember]
- //Upender,
- //efem
- [EnumMember]
- EFEM,
- //aligners
- [EnumMember]
- Aligner,
- //load locks
- [EnumMember]
- LL1,
- [EnumMember]
- LL2,
- [EnumMember]
- LL3,
- [EnumMember]
- LL4,
- //load locks
- //[EnumMember]
- //LLA,
- //[EnumMember]
- //LLB,
- //[EnumMember]
- //LLC,
- //[EnumMember]
- //LLD,
- //[EnumMember]
- //LLE,
- //[EnumMember]
- //LLF,
- //[EnumMember]
- //LLG,
- //[EnumMember]
- //LLH,
- //[EnumMember]
- //VCE1,
- //[EnumMember]
- //VCE2,
- //[EnumMember]
- //VCEA,
- //transfer modules
- [EnumMember]
- TM,
- [EnumMember]
- Cooling1,
- [EnumMember]
- Cooling2,
- //buffers
- [EnumMember]
- Buffer,
- [EnumMember]
- Buffer1,
- [EnumMember]
- Buffer2,
- [EnumMember]
- Buffer3,
- [EnumMember]
- Buffer4,
- [EnumMember]
- Buffer5,
- [EnumMember]
- Buffer6,
-
- //PMs
- [EnumMember]
- PM,
- [EnumMember]
- PM1,
- [EnumMember]
- PM2,
- [EnumMember]
- PM3,
- [EnumMember]
- PM4,
- [EnumMember]
- PM5,
- [EnumMember]
- PM6,
- [EnumMember]
- PM7,
- [EnumMember]
- PM8,
- [EnumMember]
- PMA,
- [EnumMember]
- PMB,
- [EnumMember]
- PMC,
- [EnumMember]
- PMD,
- [EnumMember]
- Robot,
- [EnumMember]
- Handler,
- [EnumMember]
- WIDReader1,
- [EnumMember]
- WIDReader2,
- [EnumMember]
- TurnOverStation,
- [EnumMember]
- Host,
- [EnumMember]
- Cooling,
- [EnumMember]
- Cassette,
- [EnumMember]
- CassetteA,
- [EnumMember]
- CassetteB,
- [EnumMember]
- LoadLock,
- [EnumMember]
- SMIFLeft,
- [EnumMember]
- SMIFRight,
- [EnumMember]
- SMIFA,
- [EnumMember]
- SMIFB,
-
- [EnumMember]
- CassetteRobot,
- [EnumMember]
- SignalTower,
- [EnumMember]
- TurnStation,
- [EnumMember]
- Stocker1,
- [EnumMember]
- Stocker2,
- [EnumMember]
- Stocker3,
- [EnumMember]
- Stocker4,
- [EnumMember]
- Stocker5,
- [EnumMember]
- Stocker6,
- [EnumMember]
- Stocker7,
- [EnumMember]
- Stocker8,
- [EnumMember]
- Stocker9,
- [EnumMember]
- Stocker10,
- [EnumMember]
- Stocker11,
- [EnumMember]
- Stocker12,
- [EnumMember]
- Stocker13,
- [EnumMember]
- Stocker14,
- [EnumMember]
- Stocker15,
- [EnumMember]
- Stocker16,
- [EnumMember]
- Stocker17,
- [EnumMember]
- Stocker18,
- [EnumMember]
- Stocker19,
- [EnumMember]
- Stocker20,
- [EnumMember]
- Stocker21,
- [EnumMember]
- StageA,
- [EnumMember]
- StageB,
- [EnumMember]
- WaferRobot,
- [EnumMember]
- Boat,
- [EnumMember]
- CMB,
- [EnumMember]
- Cassette1,
- [EnumMember]
- Cassette2,
- [EnumMember]
- Cassette3,
- [EnumMember]
- Cassette4,
- [EnumMember]
- Cassette5,
- [EnumMember]
- CarrierRobot,
- [EnumMember]
- FIMS1,
- [EnumMember]
- FIMS2,
- [EnumMember]
- Minics = 0,
- }
- public static class ModuleHelper
- {
- public static bool IsTurnOverStation(ModuleName unit)
- {
- return unit == ModuleName.TurnOverStation;
- }
- public static bool IsLoadPort(ModuleName unit)
- {
- return unit == ModuleName.LP1
- || unit == ModuleName.LP2
- || unit == ModuleName.LP3
- || unit == ModuleName.LP4
- || unit == ModuleName.LP5
- || unit == ModuleName.LP6
- || unit == ModuleName.LP7
- || unit == ModuleName.LP8
- || unit == ModuleName.LP9
- || unit == ModuleName.LP10;
- }
- public static bool IsCassette(ModuleName unit)
- {
- return unit == ModuleName.Cassette1
- || unit == ModuleName.Cassette2
- || unit == ModuleName.Cassette3
- || unit == ModuleName.Cassette4
- || unit == ModuleName.Cassette5
- || unit == ModuleName.Cassette;
- }
- public static bool IsCOT(string unit)
- {
- return unit.ToString().Contains( "2_1")
- || unit.ToString().Contains("2_2");
- }
- public static bool IsBuffer(ModuleName unit)
- {
- return unit == ModuleName.Buffer
- || unit == ModuleName.Buffer1
- || unit == ModuleName.Buffer2
- || unit == ModuleName.Buffer3
- || unit == ModuleName.Buffer4
- || unit == ModuleName.Buffer5
- || unit == ModuleName.Buffer6;
- }
- public static bool IsBufferStocker(ModuleName unit)
- {
- return unit == ModuleName.Stocker1
- || unit == ModuleName.Stocker2
- || unit == ModuleName.Stocker3
- || unit == ModuleName.Stocker4
- || unit == ModuleName.Stocker5
- || unit == ModuleName.Stocker6
- || unit == ModuleName.Stocker7
- || unit == ModuleName.Stocker8
- || unit == ModuleName.Stocker9
- || unit == ModuleName.Stocker10
- || unit == ModuleName.Stocker11
- || unit == ModuleName.Stocker12
- || unit == ModuleName.Stocker13
- || unit == ModuleName.Stocker14
- || unit == ModuleName.Stocker15
- || unit == ModuleName.Stocker16;
- }
- public static bool IsFIMS(ModuleName unit)
- {
- return unit == ModuleName.FIMS1 || unit == ModuleName.FIMS2;
- }
- public static bool IsPm(string unit)
- {
- return IsPm(ModuleHelper.Converter(unit));
- }
- public static bool IsPm(ModuleName unit)
- {
- return unit == ModuleName.PM1
- || unit == ModuleName.PM2
- || unit == ModuleName.PM3
- || unit == ModuleName.PM4
- || unit == ModuleName.PM5
- || unit == ModuleName.PM6
- || unit == ModuleName.PM7
- || unit == ModuleName.PM8
- || unit == ModuleName.PM
- || unit == ModuleName.PMA
- || unit == ModuleName.PMB
- || unit == ModuleName.PMC
- || unit == ModuleName.PMD
- ;
- }
-
- public static bool IsLoadLock(string unit)
- {
- return IsLoadLock(ModuleHelper.Converter(unit));
- }
- public static bool IsLoadLock(ModuleName unit)
- {
- return unit == ModuleName.LoadLock;
- }
- public static bool IsStocker(ModuleName unit)
- {
- return unit == ModuleName.Stocker1
- || unit == ModuleName.Stocker2
- || unit == ModuleName.Stocker3
- || unit == ModuleName.Stocker4
- || unit == ModuleName.Stocker5
- || unit == ModuleName.Stocker6
- || unit == ModuleName.Stocker7
- || unit == ModuleName.Stocker8
- || unit == ModuleName.Stocker9
- || unit == ModuleName.Stocker10
- || unit == ModuleName.Stocker11
- || unit == ModuleName.Stocker12
- || unit == ModuleName.Stocker13
- || unit == ModuleName.Stocker14
- || unit == ModuleName.Stocker15
- || unit == ModuleName.Stocker16
- || unit == ModuleName.Stocker17
- || unit == ModuleName.Stocker18
- || unit == ModuleName.Stocker19
- || unit == ModuleName.Stocker20
- || unit == ModuleName.Stocker21;
- }
- public static bool IsCooling(string unit)
- {
- return IsCooling(ModuleHelper.Converter(unit));
- }
- public static bool IsCooling(ModuleName unit)
- {
- return unit == ModuleName.Cooling;
- }
- public static bool IsAligner(string unit)
- {
- return IsAligner(ModuleHelper.Converter(unit));
- }
-
- public static bool IsAligner(ModuleName unit)
- {
- return unit == ModuleName.Aligner;
- }
- public static bool IsRobot(string unit)
- {
- return IsRobot(ModuleHelper.Converter(unit));
- }
- public static bool IsRobot(ModuleName unit)
- {
- return unit.ToString().Contains("Robot");
- }
- public static bool IsEfemRobot(string unit)
- {
- return IsEfemRobot(ModuleHelper.Converter(unit));
- }
- public static bool IsEfemRobot(ModuleName unit)
- {
- return unit == ModuleName.EfemRobot;
- }
- public static bool IsTMRobot(string unit)
- {
- return IsTMRobot(ModuleHelper.Converter(unit));
- }
- public static bool IsTMRobot(ModuleName unit)
- {
- return unit == ModuleName.TMRobot;
- }
- public static bool IsTurnStation(ModuleName unit)
- {
- return unit == ModuleName.TurnStation;
- }
- public static string GetAbbr(ModuleName module)
- {
- switch (module)
- {
- case ModuleName.Aligner: return "PA";
- case ModuleName.Robot: return "RB";
- default: return module.ToString();
- }
- }
- public static string GetE84LpName(string device)
- {
- string e84 = string.Empty;
- switch(device)
- {
- case "P1":
- case "LP1":
- e84 = "Loadport1E84";
- break;
- case "P2":
- case "LP2":
- e84 = "Loadport2E84";
- break;
- case "P3":
- case "LP3":
- e84 = "Loadport3E84";
- break;
- case "P4":
- case "LP4":
- e84 = "Loadport4E84";
- break;
- case "P5":
- case "LP5":
- e84 = "Loadport5E84";
- break;
- case "P6":
- case "LP6":
- e84 = "Loadport6E84";
- break;
- case "P7":
- case "LP7":
- e84 = "Loadport7E84";
- break;
- case "P8":
- case "LP8":
- e84 = "Loadport8E84";
- break;
- case "P9":
- case "LP9":
- e84 = "Loadport9E84";
- break;
- case "P10":
- case "LP10":
- e84 = "Loadport10E84";
- break;
- }
- return e84;
- }
-
- public static ModuleName Converter(string module)
- {
- module = module.Replace("-", "_");
- if (module.ToLower().Contains("1_1"))
- return ModuleName.Cassette1;
- if (module.ToLower().Contains("1_2"))
- return ModuleName.Cassette2;
- if (module.ToLower().Contains("1_3"))
- return ModuleName.Cassette3;
- if (module.ToLower().Contains("1_4"))
- return ModuleName.Cassette4;
- if (module.ToLower().Contains("1_5"))
- return ModuleName.Cassette5;
- return (ModuleName) Enum.Parse(typeof(ModuleName), module);
- }
- /// <summary>
- ///
- /// </summary>
- /// <param name="index">0 based</param>
- /// <returns></returns>
- public static ModuleName GetLoadPort(int index)
- {
- ModuleName[] lps = new ModuleName[]
- {
- ModuleName.LP1, ModuleName.LP2, ModuleName.LP3, ModuleName.LP4, ModuleName.LP5,
- ModuleName.LP6, ModuleName.LP7, ModuleName.LP8, ModuleName.LP9, ModuleName.LP10,
- };
- return lps[index];
- }
- }
- public class ModuleNameString
- {
- public const string System = "System";
- public const string LDULD = "LDULD";
- public const string BufferOut = "BufferOut";
- public const string BufferIn = "BufferIn";
- public const string Dryer = "Dryer";
- public const string QDR = "QDR";
- public const string Robot = "Robot";
- public const string Handler = "Handler";
- }
- }
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