| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333 | using System;using Aitex.Core.RT.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;namespace FurnaceRT.Equipments.PMs.Routines{    public class PMBaseRoutine : ModuleRoutine, IRoutine    {        protected PMModule PMModule        {            get { return _pm; }        }        private PMModule _pm;         public PMBaseRoutine(ModuleName module, PMModule pm)        {            Module = module.ToString();            _pm = pm;        }        public virtual Result Start(params object[] objs)        {            return Result.DONE;        }        public virtual Result Monitor()        {            return Result.DONE;        }        public virtual void Abort()        {        }        protected void TurnPumpOn(int id, PMModule pm, int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"Turn on {pm.Name} pump");                //if (!pm.MainPump.SetPump(out string reason, 0, true))                //{                //    Stop(reason);                //    return false;                //}                return true;            }, () =>            {                return true/*pm.MainPump.IsRunning*/;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else                {                    throw (new RoutineBreakException());                }            }        }        protected void StopAllGasFlow(int id, PMModule pm)        {            Tuple<bool, Result> ret = Execute (id, () =>            {                Notify($"Turn off all {pm.Name} gas flow");                string reason = "";                foreach(var stick in PMModule.GasSticks)                {                    if (!stick.SetFlow(out reason, 0, 0))                    {                        Stop(reason);                        return false;                    }                }                return true;            } );            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else                    throw (new RoutineBreakException());            }        }        protected void PumpToHighVacuum(int id, string stepName, PM pm, double pumpHighVacuumPressure, int tvPosition, int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"Run {pm.Name} fast pump to {pumpHighVacuumPressure:F2} Torr");                //if (!pm.FastPump(tvPosition, out string reason))                //{                //    Stop(reason);                //    return false;                //}                _stepSpan = new TimeSpan(0, 0, 0, (int)timeout);                _stepStartTime = DateTime.Now;                _stepName = stepName;                return true;            }, () =>            {                if (pm.IsError)                {                    Stop($"{pm.Name} error");                    return null;                }                return pm.ChamberPressure < pumpHighVacuumPressure;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    Stop($"{pm.Name} pump to gas line pump pressure timeout, over {timeout} seconds");                    throw (new RoutineFaildException());                }                else                    throw (new RoutineBreakException());            }        }        protected void CheckForelinePressure(int id, string stepName, PM pm, double forelineBasePressure, int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"Run {pm.Name} check foreline pressure lower than {forelineBasePressure:F2} Torr");                _stepSpan = new TimeSpan(0, 0, 0, (int)timeout);                _stepStartTime = DateTime.Now;                _stepName = stepName;                return true;            }, () =>            {                if (pm.IsError)                {                    Stop($"{pm.Name} error");                    return null;                }                return pm.ForelinePressure <= forelineBasePressure;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    Stop($"{pm.Name} wait foreline lower than {forelineBasePressure:F2} Torr timeout, over {timeout} seconds");                    throw (new RoutineFaildException());                }                else                    throw (new RoutineBreakException());            }        }         protected void CheckChamberOk(int id, PMModuleBase pm)        {            Tuple<bool, Result> ret = Execute(id, () =>            {                Notify($"Run {pm.Name} check chamber running no error");                if (pm.IsError)                {                    Stop($"{pm.Name} error");                    return false;                }                return true;            });            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else                {                    throw (new RoutineBreakException());                }            }        }        public void ToReadyProcessState(int id, PMModule pm,int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"prepare chamber {pm.Name} ready to run process");                string reason = "";                //if (!pm.ChamberDoor.Close(out string reason))                //{                //    Stop(reason);                //    return false;                //}                foreach (var stick in PMModule.GasSticks)                {                    if (!stick.SetFlow(out reason, 0, 0))                    {                        Stop(reason);                        return false;                    }                }                return true;            }, () =>            {                return true/*pm.ChamberDoor.IsClose*/;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    Stop($"{pm.Name} prepare process timeout, over {timeout} seconds");                    throw (new RoutineFaildException());                }                else                {                    throw (new RoutineBreakException());                }            }        }        public void MovePinDown(int id, PMModule pm, int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"move {pm.Name} lift pin down");                //if (!pm.ChamberLiftPin.MoveDown(out string reason))                //{                //    Stop(reason);                //    return false;                //}                return true;            }, () =>            {                return  true/*pm.ChamberLiftPin.IsDown*/;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    Stop($"{pm.Name} move lift pin timeout, over {timeout} seconds");                    throw (new RoutineFaildException());                }                else                {                    throw (new RoutineBreakException());                }            }        }        public void MovePinUp(int id, PMModule pm, int timeout)        {            Tuple<bool, Result> ret = ExecuteAndWait(id, () =>            {                Notify($"move {pm.Name} lift pin up");                //if (!pm.ChamberLiftPin.MoveUp(out string reason))                //{                //    Stop(reason);                //    return false;                //}                return true;            }, () =>            {                return true/*pm.ChamberLiftPin.IsUp*/;            }, timeout * 1000);            if (ret.Item1)            {                if (ret.Item2 == Result.FAIL)                {                    throw (new RoutineFaildException());                }                else if (ret.Item2 == Result.TIMEOUT) //timeout                {                    Stop($"{pm.Name} move lift pin timeout, over {timeout} seconds");                    throw (new RoutineFaildException());                }                else                {                    throw (new RoutineBreakException());                }            }        }    }}
 |