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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.OperationCenter;
- using System;
- using System.Collections;
- using System.Diagnostics;
- using System.Linq;
- namespace FurnaceRT.Equipments.PMs
- {
- public partial class PMModule
- {
- private SCConfigItem _configAutoControlCoolingValve;
- private SCConfigItem _configVacuumSensorPressure;
- private SCConfigItem _configAutoControlChiller;
- private SCConfigItem _chillerTurnOffIfTempBelow;
- private SCConfigItem _chillerTurnOnIfTempAbove;
- private PeriodicJob _threadMonitor;
- private bool _vac1;
- private bool _vac2;
- private bool _vac3;
- private Stopwatch _vac1Timer = new Stopwatch();
- private Stopwatch _vac2Timer = new Stopwatch();
- private Stopwatch _vac3Timer = new Stopwatch();
- private int _vac1PumpTimeS = 120;
- private int _vac2PumpTimeS = 120;
- private int _vac3PumpTimeS = 120;
- private int _foolProofTime = 5;
- private DeviceTimer _plcFoolProofTime = null;
- private RD_TRIG _trigPLCConnected = null;
-
- private void InitInterlock()
- {
- OP.AddCheck($"{Module}.{Name}.Disconnect", new CheckPlcConnect(this));
- //OP.AddCheck($"{ChamberDoor.Module}.{ChamberDoor.Name}.Open", new CheckOpenDoor(this));
- if (SC.ContainsItem("System.PLCConnectSensorFoolTime"))
- _foolProofTime = SC.GetValue<int>("System.PLCConnectSensorFoolTime");
- _configAutoControlCoolingValve = SC.GetConfigItem($"PM.{Module}.AutoControlCoolingValve");
- _configVacuumSensorPressure = SC.GetConfigItem($"PM.{Module}.VacuumSensorPressure");
- _configAutoControlChiller = SC.GetConfigItem($"PM.{Module}.Chiller.EnableAutoAdjust");
- _chillerTurnOffIfTempBelow = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOffIfTempBelow");
- _chillerTurnOnIfTempAbove = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOnIfTempAbove");
- if (SensorPLCHeartBeatPC != null)
- {
- _trigPLCConnected = new RD_TRIG();
- _plcFoolProofTime = new DeviceTimer();
- _plcFoolProofTime.Start((_foolProofTime + 2) * 1000);//首次
- }
- _threadMonitor = new PeriodicJob(100, OnTimer, "interlock thread", true);
- }
- private void InitUserDefineInterlock()
- {
- //DATA.Subscribe($"{Module}.Heater1", () => 100);//自定义的Interlock limit
- InterlockManager.Instance.UserDefineInterlockHandler += UserDefineInterlockHandler;
- InterlockManager.Instance.UserDefineInterlocks += UserDefineInterlocks;
- //DATA.Subscribe("UserDefineInterlock", () => InterlockManager.Instance.UserDefineFlagCurrentValues);
- //DATA.Subscribe("UserDefineCurrent", () => InterlockManager.Instance.UserDefineCurrentValues);
- }
- //自定义的interlock action
- private bool UserDefineInterlocks(string name)
- {
- switch (name)
- {
- case "PM1.Heater1":
- return true;
- }
- return false;
- }
- //设置自定义的interlock action
- private bool UserDefineInterlockHandler(string name, object value)
- {
- switch(name)
- {
- case "PM1.Heater1":
- //设置Heater的值
- return true;
- }
- return false;
- }
- private class CheckOpenDoor : IInterlockChecker
- {
- private PMModule _pm;
- public CheckOpenDoor(PMModule pm)
- {
- _pm = pm;
- }
- public bool CanDo(out string reason, object[] args)
- {
- if (_pm.ChamberPressure < SC.GetValue<double>("PM.AtmPressureBase"))
- {
- reason = $"{_pm.Module} chamber pressure {_pm.ChamberPressure:F3} Torr less than {SC.GetValue<double>("PM.AtmPressureBase")} [PM.AtmPressureBase], can not open door";
- return false;
- }
- reason = string.Empty;
- return true;
- }
- }
- private class CheckPlcConnect : IInterlockChecker
- {
- private PMModule _pm;
- public CheckPlcConnect(PMModule pm)
- {
- _pm = pm;
- }
- public bool CanDo(out string reason, object[] args)
- {
- if (_pm.IsBusy)
- {
- reason = $"{_pm.Module} is in {_pm.StringFsmStatus} status, can not disconnect, should be idle";
- return false;
- }
- reason = string.Empty;
- return true;
- }
- }
- public bool OnTimer()
- {
- try
- {
- MonitorN2Purge();
- MonitorAux();
- MonitorFfu();
- lock (_alarmConditionLocker)
- {
- MonitorAlarmCondition();
- }
- if (!IsProcessing && TrigVGUnitConversion != null && SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa")
- {
- TrigVGUnitConversion.SetTrigger(SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa", out _);
- }
- //MonitorVAC1();
- //MonitorVAC2();
- //MonitorVAC3();
- MonitorPLCConnected();
- //foreach (var item in _inCommandLst)
- //{
- // if (item == null)
- // continue;
- // if (!_inCommandTirgs.ContainsKey(item.Name))
- // {
- // _inCommandTirgs.Add(item.Name, new RD_TRIG());
- // }
- // _inCommandTirgs[item.Name].CLK = item.Value;
- //}
- //if (_inCommandTirgs[SensorHECPowerONSW.Name].R)
- //{
- // _trigTHPowerEN.SetTrigger(true, out _);
- // _trigHECPowerONLamp.SetTrigger(true, out _);
- //}
- //if (_inCommandTirgs[SensorHECPowerONSW.Name].T)
- //{
- //}
- //if (_inCommandTirgs[SensorTHBreakOK.Name].R)
- //{
- //}
- //if (_inCommandTirgs[SensorTHBreakOK.Name].T)
- //{
- // _trigTHPowerEN.SetTrigger(false, out _);
- // _trigHECPowerONLamp.SetTrigger(false, out _);
- //}
- ProcessAlarmSignal();
- //if (IV2Valve.Status != SensorVG2LOW.Value)
- // IV2Valve.TurnValve(SensorVG2LOW.Value, out _);
- //if (IV2Valve.Status != SensorVG2LOW.Value)
- // VV2Valve.TurnValve(SensorTubeOverPressure.Value, out _);
- if (IsInit || !IsInstalled)
- return true;
- //cooling 阀门
- if (_configAutoControlCoolingValve == null || _configAutoControlCoolingValve.BoolValue)
- {
- //if (ElectricalCoolingValve.Status != MainChiller.IsRunning)
- // ElectricalCoolingValve.TurnValve(MainChiller.IsRunning, out _);
- //if (MicrowaveCoolingValve.Status != MainChiller.IsRunning)
- // MicrowaveCoolingValve.TurnValve(MainChiller.IsRunning, out _);
- //if (ChamberLidCoolingValve.Status != MainChiller.IsRunning)
- // ChamberLidCoolingValve.TurnValve(MainChiller.IsRunning, out _);
- }
- //auto control chiller
- if (_configAutoControlChiller != null && _configAutoControlChiller.BoolValue && _chillerTurnOffIfTempBelow != null && _chillerTurnOnIfTempAbove != null)
- {
- //if (!MainChiller.HasAlarm)
- //{
- // if (MainChiller.IsRunning && (ChamberHeater1.Feedback < _chillerTurnOffIfTempBelow.DoubleValue))
- // {
- // if (!MainChiller.SetMainPowerOnOff(false, out string reason))
- // {
- // LOG.Write(reason);
- // }
- // }else if (!MainChiller.IsRunning && (ChamberHeater1.Feedback > _chillerTurnOnIfTempAbove.DoubleValue))
- // {
- // if (!MainChiller.SetMainPowerOnOff(true, out string reason))
- // {
- // LOG.Write(reason);
- // }
- // }
- //}
- }
- //压力保护计
- double pressure = 3.0;
- if (_configVacuumSensorPressure != null)
- pressure = _configVacuumSensorPressure.DoubleValue;
- if (pressure > 30.0)
- pressure = 30.0;
- //bool canOpen = ChamberMonitorPressureGauge.Value < pressure;
- //if (VacuumSensorValve.Status != canOpen)
- //{
- // VacuumSensorValve.TurnValve(canOpen, out _);
- //}
- ////interlock ignore
- //SignalExhaustAlarm.SetIgnoreError(SC.GetValue<bool>($"PM.{Module}.Signal.IgnoreExhaustAlarm"));
- }
- catch (Exception ex)
- {
- LOG.Write(ex);
- }
- return true;
- }
- private void MonitorPLCConnected()
- {
- if (SensorPLCHeartBeatPC != null)
- {
- _trigPLCConnected.CLK = SensorPLCHeartBeatPC.Value;
- if (_trigPLCConnected.T || _trigPLCConnected.R)
- {
- _plcFoolProofTime.Start(_foolProofTime * 1000);
- }
- if (_plcFoolProofTime.IsTimeout())
- {
- _plcFoolProofTime.Stop();
- SensorPLCConnectedAlarm?.Set($"Connected Status keep {_trigPLCConnected.CLK} out of {_foolProofTime}s");
- }
- }
- }
- private void ProcessAlarmSignal()
- {
- bool isTrig = false;
- foreach (var signal in _alarmSignals)
- {
- if (signal.RrigSignalOn.T && signal.IsAlarmAutoRecovery)
- {
- var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == signal.AlarmTriggered.EventEnum);
- if (item != null)
- {
- item.Reset();
- _triggeredAlarmList.Remove(item);
- EV.ClearAlarmEvent(item.EventEnum);
- }
- isTrig = true;
- signal.AlarmRecovery?.Set();
- }
- }
- if (isTrig)
- {
- int count = 0;
- var alarms = EV.GetAlarmEvent();
- foreach (var alarm in alarms)
- {
- if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
- count++;
- }
- if (count == 0)
- CheckToPostMessage((int)MSG.Reset);
- }
- }
- private void MonitorVAC1()
- {
- if (_vac1Timer == null)
- _vac1Timer = new Stopwatch();
- if (ValveAV24.Status)
- {
- _vac1 = false;
- if (_vac1Timer.IsRunning)
- _vac1Timer.Stop();
- }
- if(!ValveAV9.Status &&
- !ValveAV16.Status &&
- !ValveAV20.Status &&
- !ValveAV24.Status &&
- ValveAV26.Status &&
- (ValveAV33.Status || ValveAV35.Status) &&
- ValveAV83.Status &&
- ValveAV71.Status &&
- (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
- SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
- {
- if (!_vac1Timer.IsRunning)
- _vac1Timer.Restart();
- if(_vac1Timer.ElapsedMilliseconds > _vac1PumpTimeS * 1000)
- _vac1 = true;
- }
- else
- {
- if (_vac1Timer.IsRunning)
- _vac1Timer.Stop();
- }
- }
- private void MonitorVAC2()
- {
- if (_vac2Timer == null)
- _vac2Timer = new Stopwatch();
- if (ValveAV9.Status)
- {
- _vac2 = false;
- if (_vac2Timer.IsRunning)
- _vac2Timer.Stop();
- }
- if (!ValveAV9.Status &&
- !ValveAV16.Status &&
- !ValveAV20.Status &&
- !ValveAV24.Status &&
- ValveAV12.Status &&
- ValveAV14.Status &&
- ValveAV28.Status &&
- ValveAV29.Status &&
- ValveAV36.Status &&
- ValveAV37.Status &&
- ValveAV81.Status &&
- ValveAV71.Status &&
- (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
- SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
- {
- if (!_vac2Timer.IsRunning)
- _vac2Timer.Restart();
- if (_vac2Timer.ElapsedMilliseconds > _vac2PumpTimeS * 1000)
- _vac2 = true;
- }
- else
- {
- if (_vac2Timer.IsRunning)
- _vac2Timer.Stop();
- }
- }
- private void MonitorVAC3()
- {
- if (_vac3Timer == null)
- _vac3Timer = new Stopwatch();
- if (ValveAV16.Status || ValveAV20.Status)
- {
- _vac3 = false;
- if (_vac3Timer.IsRunning)
- _vac3Timer.Stop();
- }
- if (!ValveAV9.Status &&
- !ValveAV16.Status &&
- !ValveAV20.Status &&
- !ValveAV24.Status &&
- ValveAV18.Status &&
- ValveAV22.Status &&
- ValveAV38.Status &&
- ValveAV39.Status &&
- ValveAV82.Status &&
- ValveAV71.Status &&
- (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
- SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
- {
- if (!_vac3Timer.IsRunning)
- _vac3Timer.Restart();
- if (_vac3Timer.ElapsedMilliseconds > _vac3PumpTimeS * 1000)
- _vac3 = true;
- }
- else
- {
- if (_vac3Timer.IsRunning)
- _vac3Timer.Stop();
- }
- }
- }
- }
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