PMN2Purge.cs 48 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Equipments.Systems;
  13. using FurnaceRT.Extraction;
  14. using MECF.Framework.Common.CommonData.SorterDefines;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.Tolerance;
  17. using MECF.Framework.Common.Utilities;
  18. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  19. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  20. using System;
  21. using System.Collections.Generic;
  22. using System.Diagnostics;
  23. using System.Linq;
  24. namespace FurnaceRT.Equipments.PMs
  25. {
  26. /// <summary>
  27. /// 分布类 定义N2Purge的执行逻辑
  28. /// </summary>
  29. public partial class PMModule
  30. {
  31. private R_TRIG _trigN2UpRD = new R_TRIG();
  32. private R_TRIG _trigN2DownRD = new R_TRIG();
  33. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  34. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  35. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  36. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  37. private FilterChecker _filterChecker = new FilterChecker();
  38. private R_TRIG tank1_TRIG = new R_TRIG();
  39. private R_TRIG tank2_TRIG = new R_TRIG();
  40. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  41. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  42. private Dictionary<string, R_TRIG> _rTrigDict;
  43. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  44. private double _n2PurgeData = 20;
  45. private double _n2ToAirData = 185000;
  46. private N2PurgeModeEnum _currentPhase;
  47. private double _manualPhase2StabilityTime = 0;
  48. private double _manualPhase4StabilityTime = 0;
  49. private bool _enableAbortN2purge = true;
  50. private int _phase1CycleCount = 0;
  51. private int _phase1CycleCountSC = 0;
  52. private bool _canSwitchToPhase2 = true;
  53. private FilterChecker _filterCheckerTank1 = new FilterChecker();
  54. private FilterChecker _filterCheckerCompulsoryTank1 = new FilterChecker();
  55. private FilterChecker _filterCheckerTank2 = new FilterChecker();
  56. private FilterChecker _filterCheckerCompulsoryTank2 = new FilterChecker();
  57. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  58. private void InitN2PurgeData()
  59. {
  60. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  61. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  62. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  63. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  64. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  65. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  66. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  67. {
  68. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  69. {
  70. SetN2PurgeModeAction(selectN2PurgeMode);
  71. }
  72. }
  73. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  74. if (!string.IsNullOrEmpty(currentPhase))
  75. {
  76. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  77. _currentPhase = enumCurrentPhase;
  78. }
  79. _filterCheckerCompulsoryTank1.CheckInterval = double.Parse(SC.ContainsItem("System.AutoTankDelayTime") ? SC.GetStringValue("System.AutoTankDelayTime") : "0");
  80. _filterCheckerTank1.CheckInterval = double.Parse(SC.ContainsItem("System.AutoTankDelayTime") ? SC.GetStringValue("System.AutoTankDelayTime") : "0");
  81. _filterCheckerCompulsoryTank2.CheckInterval = double.Parse(SC.ContainsItem("System.AutoTankDelayTime") ? SC.GetStringValue("System.AutoTankDelayTime") : "0");
  82. _filterCheckerTank2.CheckInterval = double.Parse(SC.ContainsItem("System.AutoTankDelayTime") ? SC.GetStringValue("System.AutoTankDelayTime") : "0");
  83. }
  84. private void InitN2PurgeConfigData()
  85. {
  86. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  87. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  88. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  89. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  90. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  91. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  92. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  93. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  94. {
  95. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  96. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  97. {"AIR",()=> GetN2PurgeAIRStatus()},
  98. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  99. {"Foup1",()=> GetN2PurgeFoup1Status()},
  100. {"Foup2",()=> GetN2PurgeFoup2Status()},
  101. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  102. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  103. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  104. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  105. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  106. };
  107. _allTimeDict = new Dictionary<string, Stopwatch>()
  108. {
  109. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  110. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  111. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  112. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  113. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  114. };
  115. _rTrigDict = new Dictionary<string, R_TRIG>();
  116. }
  117. private void MonitorN2Purge()
  118. {
  119. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  120. if (string.IsNullOrEmpty(selectN2PurgeMode))
  121. {
  122. return;
  123. }
  124. SetN2PurgeModeAction(selectN2PurgeMode);
  125. }
  126. private void MonitorTank1LeakAgeExec()
  127. {
  128. _filterCheckerTank1.Monitor(SensorHCDTANKH != null && SensorHCDTANKH.Value);
  129. if (_filterCheckerTank1.Trig)
  130. {
  131. LOG.Info($"SensorHCDTANKH trigger:{SensorHCDTANKH.Value}");
  132. SetHREFEnable(new object[1] { false });
  133. ValveAV113?.TurnValve(false, out _);
  134. }
  135. _filterCheckerCompulsoryTank1.Monitor((SensorHCDTANKH != null && SensorHCDTANKH.Value) && TrigSIREFON.Value);
  136. if (_filterCheckerCompulsoryTank1.Trig)
  137. {
  138. LOG.Info($"SensorHCDTANKH trigger:{SensorHCDTANKH.Value},TrigCREFON:{TrigSIREFON.Value}");
  139. SetHREFEnable(new object[1] { false });
  140. ValveAV113?.TurnValve(false, out _);
  141. }
  142. }
  143. public bool SetHREFEnable(object[] param)
  144. {
  145. if (param == null || param.Length <= 0)
  146. return true;
  147. bool.TryParse(param[0].ToString(), out bool isEnable);
  148. if (isEnable)
  149. {
  150. if (SensorHREFILK != null && SensorHREFILK.Value)
  151. {
  152. TrigSIREFON?.CheckAndSet(isEnable, out _);
  153. }
  154. }
  155. else
  156. {
  157. TrigSIREFON?.CheckAndSet(isEnable, out _);
  158. }
  159. return true;
  160. }
  161. private void MonitorTank2LeakAgeExec()
  162. {
  163. _filterCheckerTank2.Monitor(SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value);
  164. if (_filterCheckerTank2.Trig)
  165. {
  166. LOG.Info($"SensorCSOURCETANKH trigger:{SensorCSOURCETANKH.Value}");
  167. SetCREFEnable(new object[1] { false });
  168. ValveAV121?.TurnValve(false, out _);
  169. }
  170. _filterCheckerCompulsoryTank2.Monitor((SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value) && (TrigCREFON != null && TrigCREFON.Value));
  171. if (_filterCheckerCompulsoryTank2.Trig)
  172. {
  173. LOG.Info($"SensorCSOURCETANKH trigger:{SensorCSOURCETANKH.Value},TrigCREFON:{TrigCREFON.Value}");
  174. SetCREFEnable(new object[1] { false });
  175. ValveAV121?.TurnValve(false, out _);
  176. }
  177. }
  178. public bool SetCREFEnable(object[] param)
  179. {
  180. if (param == null || param.Length <= 0)
  181. return true;
  182. bool.TryParse(param[0].ToString(), out bool isEnable);
  183. if (isEnable)
  184. {
  185. if (SensorCREFILK != null && SensorCREFILK.Value)
  186. {
  187. TrigCREFON?.CheckAndSet(isEnable, out _);
  188. }
  189. }
  190. else
  191. {
  192. TrigCREFON?.CheckAndSet(isEnable, out _);
  193. }
  194. return true;
  195. }
  196. public void SetN2PurgeModePhase(string setValue)
  197. {
  198. if (SC.ContainsItem("PM1.N2PurgeModePhase"))
  199. {
  200. var data = SC.GetStringValue("PM1.N2PurgeModePhase");
  201. if (data != setValue)
  202. {
  203. SC.SetItemValue("PM1.N2PurgeModePhase", setValue);
  204. }
  205. }
  206. }
  207. /// <summary>
  208. /// TODO:这里展示数据的逻辑 不正确,待明确逻辑
  209. /// </summary>
  210. /// <returns></returns>
  211. private double GetN2PurgeLimitData()
  212. {
  213. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  214. {
  215. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  216. {
  217. if (SC.ContainsItem("PM1.N2PurgeModePhase"))
  218. {
  219. var n2PurgeModePhase = SC.GetStringValue("PM1.N2PurgeModePhase");
  220. if (n2PurgeModePhase == N2PurgeModeEnum.WaferCharge.ToString())
  221. {
  222. return (float)SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV");
  223. }
  224. else if (n2PurgeModePhase == N2PurgeModeEnum.FoupEnter.ToString())
  225. {
  226. return (float)SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV");
  227. }
  228. else if (n2PurgeModePhase == N2PurgeModeEnum.WaferDisCharge.ToString())
  229. {
  230. return (float)SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV");
  231. }
  232. return (float)SC.GetValue<double>("System.N2PurgeData");
  233. }
  234. }
  235. if (CheckIsLASide())
  236. {
  237. if (SC.ContainsItem("PM1.N2PurgeModePhase"))
  238. {
  239. var n2PurgeModePhase = SC.GetStringValue("PM1.N2PurgeModePhase");
  240. if (n2PurgeModePhase == N2PurgeModeEnum.BoatLoad.ToString())
  241. {
  242. return (float)SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV");
  243. }
  244. if (n2PurgeModePhase == N2PurgeModeEnum.BoatUnLoad.ToString())
  245. {
  246. return (float)SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV");
  247. }
  248. if (n2PurgeModePhase == N2PurgeModeEnum.FoupEnter.ToString())
  249. {
  250. return (float)SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV");
  251. }
  252. if (n2PurgeModePhase == N2PurgeModeEnum.WaferCharge.ToString())
  253. {
  254. return (float)SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV");
  255. }
  256. if (n2PurgeModePhase == N2PurgeModeEnum.WaferDisCharge.ToString())
  257. {
  258. return (float)SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV");
  259. }
  260. if (n2PurgeModePhase == N2PurgeModeEnum.Idle.ToString())
  261. {
  262. return (float)SC.GetValue<double>("System.N2PurgeData");
  263. }
  264. return (float)SC.GetValue<double>("System.N2PurgeData");
  265. }
  266. }
  267. return _n2PurgeData;
  268. }
  269. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  270. {
  271. return _n2ToAirData;
  272. }
  273. return ConcentrationO2.Value;
  274. }
  275. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  276. {
  277. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  278. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  279. {
  280. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  281. {
  282. _filterChecker.CheckInterval = 3;
  283. _filterChecker.Monitor(CheckN2PurgePhase2());
  284. if (_filterChecker.Trig && _canSwitchToPhase2)
  285. {
  286. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  287. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  288. }
  289. }
  290. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  291. {
  292. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  293. {
  294. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  295. }
  296. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  297. if (second >= _manualPhase2StabilityTime)
  298. {
  299. if (CheckN2PurgePhase1())
  300. {
  301. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  302. N2PurgeFaileAlarm.Set();
  303. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  304. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  305. _canSwitchToPhase2 = false;
  306. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  307. }
  308. if (CheckN2PurgePhase2())
  309. {
  310. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  311. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  312. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  313. _canSwitchToPhase2 = false;
  314. }
  315. }
  316. }
  317. else
  318. {
  319. if (CheckN2PurgePhase1())
  320. {
  321. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  322. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  323. }
  324. else if (CheckN2PurgePhase2())
  325. {
  326. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  327. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  328. }
  329. }
  330. }
  331. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  332. {
  333. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  334. {
  335. var checkResult = CheckN2PurgePhase4();
  336. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  337. {
  338. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  339. }
  340. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  341. if (second >= _manualPhase4StabilityTime && checkResult)
  342. {
  343. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  344. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  345. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  346. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  347. }
  348. }
  349. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  350. {
  351. if (CheckN2PurgePhase5())
  352. {
  353. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  354. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  355. }
  356. //if (CheckN2PurgePhase3( ))
  357. //{
  358. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  359. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  360. //}
  361. }
  362. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  363. {
  364. if (CheckN2PurgePhase4())
  365. {
  366. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  367. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  368. }
  369. //if (CheckN2PurgePhase3( ))
  370. //{
  371. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  372. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  373. //}
  374. }
  375. else
  376. {
  377. if (CheckN2PurgePhase3())
  378. {
  379. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  380. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  381. return;
  382. }
  383. if (CheckN2PurgePhase5())
  384. {
  385. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  386. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  387. return;
  388. }
  389. if (CheckN2PurgePhase4())
  390. {
  391. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  392. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  393. return;
  394. }
  395. }
  396. }
  397. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  398. {
  399. _currentPhase = _N2PurgeMode;
  400. }
  401. //switch (_N2PurgeMode)
  402. //{
  403. // case N2PurgeModeEnum.Auto:
  404. // // 自动模式下的操作
  405. // break;
  406. // case N2PurgeModeEnum.ManualMode:
  407. // break;
  408. // case N2PurgeModeEnum.N2PurgeMode:
  409. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  410. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  411. // break;
  412. // case N2PurgeModeEnum.ATMMode:
  413. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  414. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  415. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  416. // break;
  417. //}
  418. }
  419. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  420. {
  421. var stopwatch = _allTimeDict[modeKey];
  422. if (!_allTimeDict[modeKey].IsRunning)
  423. {
  424. _allTimeDict[modeKey].Restart();
  425. }
  426. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  427. {
  428. if (!_allTimeDict[modeKey].IsRunning)
  429. {
  430. return true;
  431. }
  432. if (!condition())
  433. {
  434. _allTimeDict[modeKey].Stop();
  435. _allTimeDict[modeKey].Reset();
  436. return false;
  437. }
  438. }
  439. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  440. {
  441. _allTimeDict[modeKey].Stop();
  442. _allTimeDict[modeKey].Reset();
  443. }
  444. return true;
  445. }
  446. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  447. {
  448. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  449. if (r_TRIG.Q)
  450. {
  451. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  452. SetN2PurgeValveData(modeKey);
  453. _allTimeDict[modeKey].Stop();
  454. _allTimeDict[modeKey].Reset();
  455. }
  456. }
  457. public void RestAllN2PrugeRD()
  458. {
  459. _trigN2AirDownRD.RST = false;
  460. _trigN2AirUpRD.RST = false;
  461. _trigN2DownRD.RST = false;
  462. _trigN2UpRD.RST = false;
  463. foreach (var item in _allTimeDict)
  464. {
  465. item.Value.Stop();
  466. item.Value.Reset();
  467. }
  468. _canSwitchToPhase2 = true;
  469. }
  470. public void SetN2PurgeValveData(string mode, string msg = "")
  471. {
  472. var value = _n2PurgeSequenceAction[mode];
  473. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  474. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  475. {
  476. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  477. }
  478. foreach (var operateItem in value.Item2)
  479. {
  480. if (operateItem.Item1 is IoMFC)
  481. {
  482. var ioMFc = (operateItem.Item1 as IoMFC);
  483. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  484. }
  485. if (operateItem.Item1 is IoValve)
  486. {
  487. var ioValve = (operateItem.Item1 as IoValve);
  488. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  489. }
  490. if (operateItem.Item1 is IoTrigger)
  491. {
  492. var ioTrigger = (operateItem.Item1 as IoTrigger);
  493. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  494. }
  495. }
  496. }
  497. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  498. {
  499. reason = string.Empty;
  500. var mode = param[0].ToString();
  501. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  502. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  503. {
  504. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  505. }
  506. RestAllN2PrugeRD();
  507. return true;
  508. }
  509. /// <summary>
  510. /// 获取当前O2检测位置的设定值
  511. /// TODO:这里展示数据的逻辑也不正确,待明确逻辑
  512. /// </summary>
  513. /// <returns></returns>
  514. private string GetO2SetCheckSetPoint()
  515. {
  516. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  517. {
  518. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  519. if (SC.ContainsItem(key))
  520. return SC.GetValue<double>(key).ToString("f3");
  521. }
  522. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  523. {
  524. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  525. if (SC.ContainsItem(key))
  526. return SC.GetValue<double>(key).ToString("f3");
  527. }
  528. return "";
  529. }
  530. /// <summary>
  531. /// 获取当前O2检测位置
  532. /// </summary>
  533. /// <returns></returns>
  534. private string GetCheckO2Location()
  535. {
  536. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  537. return SensorO2DetectSideLA.Display;
  538. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  539. return SensorO2DetectSideFIMS1.Display;
  540. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  541. return SensorO2DetectSideFIMS2.Display;
  542. return "";
  543. }
  544. /// <summary>
  545. /// 获取当前O2浓度
  546. /// </summary>
  547. /// <returns></returns>
  548. public bool CheckIsLASide()
  549. {
  550. if (SensorO2DetectSideLA == null)
  551. {
  552. return false;
  553. }
  554. return SensorO2DetectSideLA.Value;
  555. }
  556. private bool CheckN2PurgePhase1()
  557. {
  558. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  559. }
  560. private bool CheckN2PurgePhase2()
  561. {
  562. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  563. }
  564. private bool CheckN2PurgePhase3()
  565. {
  566. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  567. }
  568. private bool CheckN2PurgePhase5()
  569. {
  570. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus() && CheckIsLASide();
  571. }
  572. private bool CheckN2PurgePhase4()
  573. {
  574. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  575. }
  576. private bool GetN2PurgeAIRTo20PPMStatus()
  577. {
  578. return ValveAV202.DOOpen.Value;
  579. }
  580. public bool GetN2PurgeUnder20PPMStatus(double value = 20)
  581. {
  582. return ConcentrationO2.Value < value;
  583. }
  584. private bool GetN2PurgeAIRStatus()
  585. {
  586. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  587. }
  588. private bool GetLADoorOpenStatus()
  589. {
  590. return (bool)(SensorLADoorSw1?.Value);
  591. }
  592. private bool GetN2PurgeDoorOpenStatus()
  593. {
  594. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  595. }
  596. private bool GetN2PurgeFoup1Status()
  597. {
  598. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  599. }
  600. private bool GetN2PurgeFoup2Status()
  601. {
  602. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  603. }
  604. public bool IsAbortN2purge()
  605. {
  606. if (!_enableAbortN2purge)
  607. {
  608. return false;
  609. }
  610. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  611. {
  612. return true;
  613. }
  614. return false;
  615. }
  616. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  617. {
  618. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  619. {
  620. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  621. }
  622. }
  623. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  624. {
  625. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  626. {
  627. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  628. }
  629. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  630. {
  631. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  632. }
  633. }
  634. public void SetN2PurgeProcess(bool isEable)
  635. {
  636. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  637. {
  638. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  639. }
  640. }
  641. public void SetN2PurgeLAO2CheckSV(float value)
  642. {
  643. if (TrigN2PurgeLAO2CheckSV != null)
  644. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  645. }
  646. public void SetN2PurgeFOUPO2CheckSV(float value)
  647. {
  648. if (TrigN2PurgeFOUPO2CheckSV != null)
  649. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  650. }
  651. /// <summary>
  652. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  653. /// </summary>
  654. public void SetN2PurgeParameters(string n2PurgeModeEnum)
  655. {
  656. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  657. {
  658. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  659. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  660. }
  661. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  662. {
  663. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  664. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  665. }
  666. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  667. {
  668. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  669. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  670. }
  671. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  672. {
  673. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  674. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  675. }
  676. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  677. {
  678. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  679. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  680. }
  681. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  682. {
  683. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  684. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  685. }
  686. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  687. {
  688. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  689. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  690. }
  691. SetN2PurgeModePhase(n2PurgeModeEnum);
  692. //这2个SV下发值应该根据什么阶段下发什么值
  693. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferCharge.ToString())
  694. {
  695. SetN2PurgeFOUPO2CheckSV((float)GetWaferChargeFOUPO2CheckSV());
  696. SetN2PurgeLAO2CheckSV((float)GetWaferChargeLAO2CheckSV());
  697. if (GetWaferChargeLAN2purgeConfig())
  698. {
  699. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  700. RestAllN2PrugeRD();
  701. }
  702. }
  703. if (n2PurgeModeEnum == N2PurgeModeEnum.FoupEnter.ToString())
  704. {
  705. SetN2PurgeFOUPO2CheckSV((float)GetFoupEnterFOUPO2CheckSV());
  706. SetN2PurgeLAO2CheckSV((float)GetFoupEnterLAO2CheckSV());
  707. if (GetFoupEnterLAN2purgeConfig())
  708. {
  709. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  710. RestAllN2PrugeRD();
  711. }
  712. }
  713. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferDisCharge.ToString())
  714. {
  715. SetN2PurgeFOUPO2CheckSV((float)GetWaferDisChargeFOUPO2CheckSV());
  716. SetN2PurgeLAO2CheckSV((float)GetWaferDisChargeLAO2CheckSV());
  717. if (GetWaferDisChargeLAN2purgeConfig())
  718. {
  719. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  720. RestAllN2PrugeRD();
  721. }
  722. }
  723. }
  724. /// <summary>
  725. /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
  726. /// </summary>
  727. /// <param name="n2PurgeModeStr"></param>
  728. public void InitN2PurgeMode(string n2PurgeModeStr)
  729. {
  730. if (string.IsNullOrEmpty(n2PurgeModeStr))
  731. return;
  732. if (n2PurgeModeStr.ToLower() == "none")
  733. return;
  734. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  735. {
  736. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  737. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  738. RestAllN2PrugeRD();
  739. }
  740. }
  741. public bool CheckFimsIsNeedOxygenPressure(bool fimsN2PurgeConfig, string recipeN2PurgeModeStr, out bool isCheckO2, bool isCheckRecipeHeader = true)
  742. {
  743. isCheckO2 = false;
  744. var currectN2PurgeModel = GetLACurrectN2purgeMode();
  745. if (isCheckRecipeHeader)
  746. {
  747. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  748. return false;
  749. if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
  750. {
  751. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  752. }
  753. if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
  754. {
  755. recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
  756. }
  757. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  758. if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  759. return false;
  760. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
  761. {
  762. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  763. {
  764. if (fimsN2PurgeConfig)
  765. {
  766. isCheckO2 = true;
  767. return true;
  768. }
  769. else
  770. {
  771. return false;
  772. }
  773. }
  774. }
  775. if (n2PurgeEnum == N2PurgeModeEnum.None)
  776. {
  777. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  778. {
  779. return false;
  780. }
  781. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
  782. {
  783. if (fimsN2PurgeConfig)
  784. {
  785. isCheckO2 = true;
  786. return true;
  787. }
  788. else
  789. {
  790. return false;
  791. }
  792. }
  793. }
  794. }
  795. else
  796. {
  797. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  798. {
  799. if (fimsN2PurgeConfig)
  800. {
  801. isCheckO2 = true;
  802. return true;
  803. }
  804. else
  805. {
  806. return false;
  807. }
  808. }
  809. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
  810. {
  811. return false;
  812. }
  813. }
  814. return false;
  815. }
  816. public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
  817. {
  818. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  819. return false;
  820. if (recipeN2PurgeModeStr.ToLower() == "none")
  821. return false;
  822. if (recipeN2PurgeModeStr.ToLower() == "atm")
  823. {
  824. recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
  825. }
  826. if (recipeN2PurgeModeStr.ToLower().Contains("n2"))
  827. {
  828. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  829. }
  830. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  831. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  832. return true;
  833. return false;
  834. }
  835. /// <summary>
  836. /// boat Move时候是否Check氧气浓度
  837. /// </summary>
  838. /// <param name="n2PurgeModeEnumStr"></param>
  839. /// <param name="isProcessing"></param>
  840. /// <param name="limitO2Data"></param>
  841. /// <returns></returns>
  842. public bool CheckBoatMoveIsNeedOxygenPressure(string n2PurgeModeEnumStr, bool isProcessing, out double limitO2Data)
  843. {
  844. limitO2Data = 0;
  845. if (!CheckIsLASide())
  846. return false;
  847. if (!isProcessing)
  848. return false;
  849. if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatLoad.ToString())
  850. {
  851. var isCheckO2Enbale = GetBoatLoadCheckO2DensityConfig();
  852. limitO2Data = GetBoatLoadLAO2CheckSV();
  853. return isCheckO2Enbale;
  854. }
  855. if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatUnLoad.ToString())
  856. {
  857. var isCheckO2Enbale = GetBoatUnLoadCheckO2DensityConfig();
  858. limitO2Data = GetBoatUnLoadLAO2CheckSV();
  859. return isCheckO2Enbale;
  860. }
  861. return false;
  862. }
  863. public string GetN2PurgeModeEnumByStr(string str)
  864. {
  865. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  866. {
  867. return N2PurgeModeEnum.ATMMode.ToString();
  868. }
  869. else if ((str == N2PurgeModeEnum.N2PurgeMode.ToString()) || (str == N2PurgeModeEnum.N2PurgeMode.ToDescription()) || (str.StartsWith("N2")))
  870. {
  871. return N2PurgeModeEnum.N2PurgeMode.ToString();
  872. }
  873. else
  874. {
  875. return GetLACurrectN2purgeMode();
  876. }
  877. }
  878. public string IsATMMode(string str)
  879. {
  880. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  881. {
  882. return N2PurgeModeEnum.ATMMode.ToString();
  883. }
  884. return str;
  885. }
  886. public string GetLACurrectN2purgeMode()
  887. {
  888. return SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : N2PurgeModeEnum.ManualMode.ToString();
  889. }
  890. #region FoupEnter
  891. public double GetFoupEnterLAO2CheckSV()
  892. {
  893. return SC.ContainsItem("PM1.N2Purge.FoupEnter.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV") : 20;
  894. }
  895. public double GetFoupEnterFOUPO2CheckSV()
  896. {
  897. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") : 20;
  898. }
  899. public bool GetFoupEnterFIMSN2purgeConfig()
  900. {
  901. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") : false;
  902. }
  903. public bool GetFoupEnterLAN2purgeConfig()
  904. {
  905. return SC.ContainsItem("PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable") : false;
  906. }
  907. #endregion
  908. #region WaferCharge
  909. public double GetWaferChargeLAO2CheckSV()
  910. {
  911. return SC.ContainsItem("PM1.N2Purge.WaferCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV") : 20;
  912. }
  913. public double GetWaferChargeFOUPO2CheckSV()
  914. {
  915. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") : 20;
  916. }
  917. public bool GetWaferChargeFIMSN2purgeConfig()
  918. {
  919. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") : false;
  920. }
  921. public bool GetWaferChargeLAN2purgeConfig()
  922. {
  923. return SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") : false;
  924. }
  925. #endregion
  926. #region WaferDisCharge
  927. public double GetWaferDisChargeLAO2CheckSV()
  928. {
  929. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") : 20;
  930. }
  931. public double GetWaferDisChargeFOUPO2CheckSV()
  932. {
  933. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") : 20;
  934. }
  935. public bool GetWaferDisChargeFIMSN2purgeConfig()
  936. {
  937. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") : false;
  938. }
  939. public bool GetWaferDisChargeLAN2purgeConfig()
  940. {
  941. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.TransferRoomN2PurgeEnable") : false;
  942. }
  943. #endregion
  944. #region Boat Load
  945. public double GetBoatLoadLAO2CheckSV()
  946. {
  947. return SC.ContainsItem("PM1.N2Purge.BoatLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV") : 20;
  948. }
  949. public bool GetBoatLoadCheckO2DensityConfig()
  950. {
  951. return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") : false;
  952. }
  953. public bool GetBoatLoadEAxisInhibitEnableConfig()
  954. {
  955. return SC.ContainsItem("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") : false;
  956. }
  957. public bool GetBoatLoadLAN2purgeConfig()
  958. {
  959. return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable") : false;
  960. }
  961. #endregion
  962. #region BoatUnLoad
  963. public bool GetBoatUnLoadCheckO2DensityConfig()
  964. {
  965. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") : false;
  966. }
  967. public bool GetBoatUnLoadEAxisInhibitEnableConfig()
  968. {
  969. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") : false;
  970. }
  971. public double GetBoatUnLoadLAO2CheckSV()
  972. {
  973. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") : 20;
  974. }
  975. public bool GetBoatUnLoadLAN2purgeConfig()
  976. {
  977. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomN2PurgeEnable") : false;
  978. }
  979. #endregion
  980. }
  981. }