SchedulerFIMS.cs 6.1 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165
  1. using Aitex.Core.Common;
  2. using Aitex.Core.RT.Fsm;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.SCCore;
  5. using Aitex.Core.Util;
  6. using Aitex.Sorter.Common;
  7. using MECF.Framework.Common.Equipment;
  8. using MECF.Framework.Common.Schedulers;
  9. using MECF.Framework.Common.SubstrateTrackings;
  10. using FurnaceRT.Equipments.PMs;
  11. using FurnaceRT.Equipments.FIMSs;
  12. using FurnaceRT.Equipments.Systems;
  13. namespace FurnaceRT.Equipments.Schedulers
  14. {
  15. public class SchedulerFIMS : SchedulerModule
  16. {
  17. public override bool IsAvailable
  18. {
  19. get { return _pm.IsReady && _pm.IsOnline && CheckTaskDone() && !_pm.IsMapping; }
  20. }
  21. public override bool IsOnline
  22. {
  23. get { return _pm.IsOnline; }
  24. }
  25. public override bool IsError
  26. {
  27. get { return _pm.IsError; }
  28. }
  29. private FIMSModule _pm = null;
  30. private ModuleName _taskRobot;
  31. private EnumTransferType _taskTransferType;
  32. private int _taskSlot;
  33. private DeviceTimer _timer = new DeviceTimer();
  34. public SchedulerFIMS(ModuleName chamber) : base(chamber.ToString())
  35. {
  36. _pm = Singleton<EquipmentManager>.Instance.Modules[chamber] as FIMSModule;
  37. System.Diagnostics.Trace.Assert(_pm != null);
  38. }
  39. public override bool IsReadyForPick(ModuleName robot, int slot)
  40. {
  41. if (robot == ModuleName.CarrierRobot)
  42. return _pm.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _)
  43. && CarrierManager.Instance.CheckHasCarrier(ModuleHelper.Converter(_module), 0);
  44. if (robot == ModuleName.WaferRobot)
  45. return _pm.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Pick, out _)
  46. && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(_module), slot);
  47. return false;
  48. }
  49. public override bool IsReadyForPlace(ModuleName robot, int slot)
  50. {
  51. if (robot == ModuleName.CarrierRobot)
  52. return _pm.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Place, out _)
  53. && CarrierManager.Instance.CheckNoCarrier(ModuleHelper.Converter(_module), 0);
  54. if (robot == ModuleName.WaferRobot)
  55. return _pm.CheckReadyForTransfer(robot, Hand.Blade1, slot, EnumTransferType.Place, out _)
  56. && WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(_module), slot);
  57. return false;
  58. }
  59. public override bool PrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  60. {
  61. _task = TaskType.PrepareTransfer;
  62. _taskRobot = robot;
  63. _taskSlot = slot;
  64. _taskTransferType = type;
  65. if (!_pm.PrepareTransfer(robot, Hand.Blade1, slot, type, out string reason))
  66. {
  67. LOG.Write(reason);
  68. return false;
  69. }
  70. LogTaskStart(_task, $"{robot} {type} slot {slot + 1}");
  71. return true;
  72. }
  73. public bool IsPrepareTransfer(ModuleName robot, EnumTransferType type, int slot)
  74. {
  75. return _task == TaskType.PrepareTransfer && _taskRobot == robot && _taskSlot == slot &&
  76. _taskTransferType == type;
  77. }
  78. public bool Load(bool isN2PurgeMode = false, string transferMode = "")
  79. {
  80. _task = TaskType.Load;
  81. bool isNeedN2Purge = false;
  82. if(isN2PurgeMode)
  83. {
  84. if (transferMode == "Charging" && SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable"))
  85. isNeedN2Purge = true;
  86. if (transferMode == "Discharging" && SC.ContainsItem("PM1.N2Purge.WaferDischarge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferDischarge.FOUPN2PurgeEnable"))
  87. isNeedN2Purge = true;
  88. }
  89. _pm.InvokeLoad(isNeedN2Purge);
  90. LogTaskStart(_task, $"{Module} load start, N2 purge={isNeedN2Purge}");
  91. return true;
  92. }
  93. public bool Unload(bool isN2PurgeMode = false, string transferMode = "")
  94. {
  95. _task = TaskType.Unload;
  96. bool isNeedN2Purge = false;
  97. if (isN2PurgeMode)
  98. {
  99. if (transferMode == "Charging" && SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable"))
  100. isNeedN2Purge = true;
  101. if (transferMode == "Discharging" && SC.ContainsItem("PM1.N2Purge.WaferDischarge.FOUPN2PurgeEnable") && SC.GetValue<bool>("PM1.N2Purge.WaferDischarge.FOUPN2PurgeEnable"))
  102. isNeedN2Purge = true;
  103. }
  104. _pm.InvokeUnload(isNeedN2Purge);
  105. LogTaskStart(_task, $"{Module} unload start, N2 purge={isNeedN2Purge}");
  106. return true;
  107. }
  108. public bool CheckTaskDone()
  109. {
  110. bool ret = false;
  111. switch (_task)
  112. {
  113. case TaskType.None:
  114. ret = true;
  115. break;
  116. case TaskType.PrepareTransfer:
  117. ret = _pm.CheckReadyForTransfer(_taskRobot, Hand.Blade1, _taskSlot, _taskTransferType, out _);
  118. break;
  119. case TaskType.Process:
  120. ret = _pm.IsReady;
  121. break;
  122. case TaskType.Load:
  123. ret = _pm.FIMSDevice.IsLoadCompleted;
  124. break;
  125. case TaskType.Unload:
  126. ret = _pm.FIMSDevice.IsUnloadCompleted;
  127. break;
  128. }
  129. if (ret && _task != TaskType.None)
  130. {
  131. LogTaskDone(_task, "");
  132. _task = TaskType.None;
  133. }
  134. return ret;
  135. }
  136. public bool Monitor()
  137. {
  138. return true;
  139. }
  140. }
  141. }