PMN2Purge.cs 15 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using FurnaceRT.Devices;
  8. using FurnaceRT.Equipments.PMs.Devices;
  9. using FurnaceRT.Extraction;
  10. using MECF.Framework.Common.CommonData.SorterDefines;
  11. using MECF.Framework.Common.Equipment;
  12. using System;
  13. using System.Collections.Generic;
  14. namespace FurnaceRT.Equipments.PMs
  15. {
  16. /// <summary>
  17. /// 分布类 定义N2Purge的执行逻辑
  18. /// </summary>
  19. public partial class PMModule
  20. {
  21. private R_TRIG _trigN2UpRD = new R_TRIG();
  22. private R_TRIG _trigN2DownRD = new R_TRIG();
  23. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  24. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  25. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  26. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  27. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  28. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  29. private double _n2PurgeData = 20;
  30. private double _n2ToAirData = 185000;
  31. private void InitN2PurgeData()
  32. {
  33. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  34. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  35. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  36. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  37. }
  38. private void InitN2PurgeConfigData()
  39. {
  40. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  41. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  42. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  43. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  44. {
  45. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  46. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  47. {"AIR",()=> GetN2PurgeAIRStatus()},
  48. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  49. {"Foup1",()=> GetN2PurgeFoup1Status()},
  50. {"Foup2",()=> GetN2PurgeFoup2Status()},
  51. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  52. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  53. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  54. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  55. };
  56. }
  57. private void MonitorN2Purge()
  58. {
  59. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  60. if (string.IsNullOrEmpty(selectN2PurgeMode))
  61. {
  62. return;
  63. }
  64. SetN2PurgeModeAction(selectN2PurgeMode);
  65. }
  66. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  67. {
  68. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  69. switch (_N2PurgeMode)
  70. {
  71. case N2PurgeModeEnum.Auto:
  72. // 自动模式下的操作
  73. break;
  74. case N2PurgeModeEnum.ManualMode:
  75. break;
  76. case N2PurgeModeEnum.N2PurgeMode:
  77. ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  78. ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString());
  79. break;
  80. case N2PurgeModeEnum.ATMMode:
  81. ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  82. ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString());
  83. break;
  84. }
  85. }
  86. private void ProcessPhase(R_TRIG r_TRIG, string modeKey)
  87. {
  88. r_TRIG.CLK = _n2PurgeSequenceStatus[modeKey].Invoke();
  89. if (r_TRIG.Q)
  90. {
  91. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()}");
  92. SetN2PurgeValveData(modeKey);
  93. }
  94. }
  95. public void RestAllN2PrugeRD()
  96. {
  97. _trigN2AirDownRD.RST = false;
  98. _trigN2AirUpRD.RST = false;
  99. _trigN2DownRD.RST = false;
  100. _trigN2UpRD.RST = false;
  101. }
  102. private void SetN2PurgeValveData(string mode)
  103. {
  104. var value = _n2PurgeSequenceAction[mode];
  105. foreach (var operateItem in value.Item2)
  106. {
  107. if (operateItem.Item1 is IoMFC)
  108. {
  109. var ioMFc = (operateItem.Item1 as IoMFC);
  110. ioMFc.SetPoint = float.Parse(operateItem.Item2.ToString());
  111. }
  112. if (operateItem.Item1 is IoValve)
  113. {
  114. var ioValve = (operateItem.Item1 as IoValve);
  115. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  116. }
  117. if (operateItem.Item1 is IoTrigger)
  118. {
  119. var ioTrigger = (operateItem.Item1 as IoTrigger);
  120. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  121. }
  122. }
  123. }
  124. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  125. {
  126. reason = string.Empty;
  127. var mode = param[0].ToString();
  128. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  129. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  130. {
  131. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  132. }
  133. RestAllN2PrugeRD();
  134. return true;
  135. }
  136. /// <summary>
  137. /// 获取当前O2检测位置的设定值
  138. /// </summary>
  139. /// <returns></returns>
  140. private string GetO2SetCheckSetPoint()
  141. {
  142. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  143. {
  144. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  145. if (SC.ContainsItem(key))
  146. return SC.GetValue<double>(key).ToString("f3");
  147. }
  148. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  149. {
  150. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  151. if (SC.ContainsItem(key))
  152. return SC.GetValue<double>(key).ToString("f3");
  153. }
  154. return "";
  155. }
  156. /// <summary>
  157. /// 获取当前O2检测位置
  158. /// </summary>
  159. /// <returns></returns>
  160. private string GetCheckO2Location()
  161. {
  162. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  163. return SensorO2DetectSideLA.Display;
  164. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  165. return SensorO2DetectSideFIMS1.Display;
  166. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  167. return SensorO2DetectSideFIMS2.Display;
  168. return "";
  169. }
  170. /// <summary>
  171. /// 获取当前O2浓度
  172. /// </summary>
  173. /// <returns></returns>
  174. private string GetO2DensityData()
  175. {
  176. var result = "";
  177. result = ConcentrationO2.FeedBack.ToString("f3");
  178. return result;
  179. }
  180. private double GetO2Density()
  181. {
  182. return ConcentrationO2.FeedBack;
  183. }
  184. private bool GetN2PurgePhase1()
  185. {
  186. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  187. }
  188. private bool GetN2PurgePhase2()
  189. {
  190. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  191. }
  192. private bool GetN2PurgePhase3()
  193. {
  194. return GetLADoorOpenStatus();
  195. }
  196. private bool GetN2PurgePhase5()
  197. {
  198. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  199. }
  200. private bool GetN2PurgePhase4()
  201. {
  202. return GetO2Density() >= _n2ToAirData && !GetLADoorOpenStatus();
  203. }
  204. private bool GetN2PurgeAIRTo20PPMStatus()
  205. {
  206. return ValveLABacksideDoorCylinderControl.DOOpen.Value;
  207. }
  208. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  209. {
  210. return ConcentrationO2.Value < value;
  211. }
  212. private bool GetN2PurgeAIRStatus()
  213. {
  214. return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  215. }
  216. private bool GetLADoorOpenStatus()
  217. {
  218. return (bool)(SensorLADoorSw1?.Value) && (bool)(SensorLADoorSw2?.Value) && (bool)(SensorLADoorSw3?.Value);
  219. }
  220. private bool GetN2PurgeDoorOpenStatus()
  221. {
  222. return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  223. }
  224. private bool GetN2PurgeFoup1Status()
  225. {
  226. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  227. }
  228. private bool GetN2PurgeFoup2Status()
  229. {
  230. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  231. }
  232. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  233. {
  234. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  235. {
  236. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  237. }
  238. }
  239. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  240. {
  241. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  242. {
  243. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  244. }
  245. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  246. {
  247. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  248. }
  249. }
  250. public void SetN2PurgeProcess(bool isEable)
  251. {
  252. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  253. {
  254. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  255. }
  256. }
  257. public void SetN2PurgeLAO2CheckSV(float value)
  258. {
  259. if (TrigN2PurgeLAO2CheckSV != null)
  260. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  261. }
  262. public void SetN2PurgeFOUPO2CheckSV(float value)
  263. {
  264. if (TrigN2PurgeFOUPO2CheckSV != null)
  265. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  266. }
  267. public void SetAVParameter(ModuleName fims, bool isEable)
  268. {
  269. if (fims == ModuleName.FIMS1)
  270. {
  271. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  272. avValve58?.TurnValve(isEable, out _);
  273. }
  274. if (fims == ModuleName.FIMS2)
  275. {
  276. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  277. avValve59?.TurnValve(isEable, out _);
  278. }
  279. }
  280. /// <summary>
  281. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  282. /// </summary>
  283. public void SetN2PurgeParameters()
  284. {
  285. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  286. {
  287. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime") * 1000;
  288. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  289. }
  290. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  291. {
  292. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime") * 1000;
  293. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  294. }
  295. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  296. {
  297. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime") * 1000;
  298. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  299. }
  300. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  301. {
  302. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime") * 1000;
  303. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  304. }
  305. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  306. {
  307. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") * 1000;
  308. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  309. }
  310. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  311. {
  312. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") * 1000;
  313. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  314. }
  315. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  316. {
  317. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime") * 1000;
  318. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  319. }
  320. }
  321. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  322. {
  323. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  324. {
  325. if (!isN2Purge)
  326. {
  327. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  328. }
  329. else
  330. {
  331. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  332. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  333. }
  334. RestAllN2PrugeRD();
  335. }
  336. }
  337. }
  338. }