PMModuleInterlock.cs 14 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Event;
  3. using Aitex.Core.RT.IOCore;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.OperationCenter;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.OperationCenter;
  9. using System;
  10. using System.Collections;
  11. using System.Diagnostics;
  12. using System.Linq;
  13. namespace FurnaceRT.Equipments.PMs
  14. {
  15. public partial class PMModule
  16. {
  17. private SCConfigItem _configAutoControlCoolingValve;
  18. private SCConfigItem _configVacuumSensorPressure;
  19. private SCConfigItem _configAutoControlChiller;
  20. private SCConfigItem _chillerTurnOffIfTempBelow;
  21. private SCConfigItem _chillerTurnOnIfTempAbove;
  22. private PeriodicJob _threadMonitor;
  23. private bool _vac1;
  24. private bool _vac2;
  25. private bool _vac3;
  26. private Stopwatch _vac1Timer = new Stopwatch();
  27. private Stopwatch _vac2Timer = new Stopwatch();
  28. private Stopwatch _vac3Timer = new Stopwatch();
  29. private int _vac1PumpTimeS = 120;
  30. private int _vac2PumpTimeS = 120;
  31. private int _vac3PumpTimeS = 120;
  32. private void InitInterlock()
  33. {
  34. OP.AddCheck($"{Module}.{Name}.Disconnect", new CheckPlcConnect(this));
  35. //OP.AddCheck($"{ChamberDoor.Module}.{ChamberDoor.Name}.Open", new CheckOpenDoor(this));
  36. _configAutoControlCoolingValve = SC.GetConfigItem($"PM.{Module}.AutoControlCoolingValve");
  37. _configVacuumSensorPressure = SC.GetConfigItem($"PM.{Module}.VacuumSensorPressure");
  38. _configAutoControlChiller = SC.GetConfigItem($"PM.{Module}.Chiller.EnableAutoAdjust");
  39. _chillerTurnOffIfTempBelow = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOffIfTempBelow");
  40. _chillerTurnOnIfTempAbove = SC.GetConfigItem($"PM.{Module}.Chiller.TurnOnIfTempAbove");
  41. _threadMonitor = new PeriodicJob(100, OnTimer, "interlock thread", true);
  42. }
  43. private void InitUserDefineInterlock()
  44. {
  45. //DATA.Subscribe($"{Module}.Heater1", () => 100);//自定义的Interlock limit
  46. InterlockManager.Instance.UserDefineInterlockHandler += UserDefineInterlockHandler;
  47. InterlockManager.Instance.UserDefineInterlocks += UserDefineInterlocks;
  48. //DATA.Subscribe("UserDefineInterlock", () => InterlockManager.Instance.UserDefineFlagCurrentValues);
  49. //DATA.Subscribe("UserDefineCurrent", () => InterlockManager.Instance.UserDefineCurrentValues);
  50. }
  51. //自定义的interlock action
  52. private bool UserDefineInterlocks(string name)
  53. {
  54. switch (name)
  55. {
  56. case "PM1.Heater1":
  57. return true;
  58. }
  59. return false;
  60. }
  61. //设置自定义的interlock action
  62. private bool UserDefineInterlockHandler(string name, object value)
  63. {
  64. switch(name)
  65. {
  66. case "PM1.Heater1":
  67. //设置Heater的值
  68. return true;
  69. }
  70. return false;
  71. }
  72. private class CheckOpenDoor : IInterlockChecker
  73. {
  74. private PMModule _pm;
  75. public CheckOpenDoor(PMModule pm)
  76. {
  77. _pm = pm;
  78. }
  79. public bool CanDo(out string reason, object[] args)
  80. {
  81. if (_pm.ChamberPressure < SC.GetValue<double>("PM.AtmPressureBase"))
  82. {
  83. reason = $"{_pm.Module} chamber pressure {_pm.ChamberPressure:F3} Torr less than {SC.GetValue<double>("PM.AtmPressureBase")} [PM.AtmPressureBase], can not open door";
  84. return false;
  85. }
  86. reason = string.Empty;
  87. return true;
  88. }
  89. }
  90. private class CheckPlcConnect : IInterlockChecker
  91. {
  92. private PMModule _pm;
  93. public CheckPlcConnect(PMModule pm)
  94. {
  95. _pm = pm;
  96. }
  97. public bool CanDo(out string reason, object[] args)
  98. {
  99. if (_pm.IsBusy)
  100. {
  101. reason = $"{_pm.Module} is in {_pm.StringFsmStatus} status, can not disconnect, should be idle";
  102. return false;
  103. }
  104. reason = string.Empty;
  105. return true;
  106. }
  107. }
  108. public bool OnTimer()
  109. {
  110. try
  111. {
  112. MonitorN2Purge();
  113. MonitorAux();
  114. MonitorFfu();
  115. lock (_alarmConditionLocker)
  116. {
  117. MonitorAlarmCondition();
  118. }
  119. if (!IsProcessing && TrigVGUnitConversion != null && SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa")
  120. {
  121. TrigVGUnitConversion.SetTrigger(SC.GetStringValue($"{Module}.APC.PressureUnit").ToLower() == "pa", out _);
  122. }
  123. //MonitorVAC1();
  124. //MonitorVAC2();
  125. //MonitorVAC3();
  126. //foreach (var item in _inCommandLst)
  127. //{
  128. // if (item == null)
  129. // continue;
  130. // if (!_inCommandTirgs.ContainsKey(item.Name))
  131. // {
  132. // _inCommandTirgs.Add(item.Name, new RD_TRIG());
  133. // }
  134. // _inCommandTirgs[item.Name].CLK = item.Value;
  135. //}
  136. //if (_inCommandTirgs[SensorHECPowerONSW.Name].R)
  137. //{
  138. // _trigTHPowerEN.SetTrigger(true, out _);
  139. // _trigHECPowerONLamp.SetTrigger(true, out _);
  140. //}
  141. //if (_inCommandTirgs[SensorHECPowerONSW.Name].T)
  142. //{
  143. //}
  144. //if (_inCommandTirgs[SensorTHBreakOK.Name].R)
  145. //{
  146. //}
  147. //if (_inCommandTirgs[SensorTHBreakOK.Name].T)
  148. //{
  149. // _trigTHPowerEN.SetTrigger(false, out _);
  150. // _trigHECPowerONLamp.SetTrigger(false, out _);
  151. //}
  152. ProcessAlarmSignal();
  153. //if (IV2Valve.Status != SensorVG2LOW.Value)
  154. // IV2Valve.TurnValve(SensorVG2LOW.Value, out _);
  155. //if (IV2Valve.Status != SensorVG2LOW.Value)
  156. // VV2Valve.TurnValve(SensorTubeOverPressure.Value, out _);
  157. if (IsInit || !IsInstalled)
  158. return true;
  159. //cooling 阀门
  160. if (_configAutoControlCoolingValve == null || _configAutoControlCoolingValve.BoolValue)
  161. {
  162. //if (ElectricalCoolingValve.Status != MainChiller.IsRunning)
  163. // ElectricalCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  164. //if (MicrowaveCoolingValve.Status != MainChiller.IsRunning)
  165. // MicrowaveCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  166. //if (ChamberLidCoolingValve.Status != MainChiller.IsRunning)
  167. // ChamberLidCoolingValve.TurnValve(MainChiller.IsRunning, out _);
  168. }
  169. //auto control chiller
  170. if (_configAutoControlChiller != null && _configAutoControlChiller.BoolValue && _chillerTurnOffIfTempBelow != null && _chillerTurnOnIfTempAbove != null)
  171. {
  172. //if (!MainChiller.HasAlarm)
  173. //{
  174. // if (MainChiller.IsRunning && (ChamberHeater1.Feedback < _chillerTurnOffIfTempBelow.DoubleValue))
  175. // {
  176. // if (!MainChiller.SetMainPowerOnOff(false, out string reason))
  177. // {
  178. // LOG.Write(reason);
  179. // }
  180. // }else if (!MainChiller.IsRunning && (ChamberHeater1.Feedback > _chillerTurnOnIfTempAbove.DoubleValue))
  181. // {
  182. // if (!MainChiller.SetMainPowerOnOff(true, out string reason))
  183. // {
  184. // LOG.Write(reason);
  185. // }
  186. // }
  187. //}
  188. }
  189. //压力保护计
  190. double pressure = 3.0;
  191. if (_configVacuumSensorPressure != null)
  192. pressure = _configVacuumSensorPressure.DoubleValue;
  193. if (pressure > 30.0)
  194. pressure = 30.0;
  195. //bool canOpen = ChamberMonitorPressureGauge.Value < pressure;
  196. //if (VacuumSensorValve.Status != canOpen)
  197. //{
  198. // VacuumSensorValve.TurnValve(canOpen, out _);
  199. //}
  200. ////interlock ignore
  201. //SignalExhaustAlarm.SetIgnoreError(SC.GetValue<bool>($"PM.{Module}.Signal.IgnoreExhaustAlarm"));
  202. }
  203. catch (Exception ex)
  204. {
  205. LOG.Write(ex);
  206. }
  207. return true;
  208. }
  209. private void ProcessAlarmSignal()
  210. {
  211. bool isTrig = false;
  212. foreach (var signal in _alarmSignals)
  213. {
  214. if (signal.RrigSignalOn.T && signal.IsAlarmAutoRecovery)
  215. {
  216. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == signal.AlarmTriggered.EventEnum);
  217. if (item != null)
  218. {
  219. item.Reset();
  220. _triggeredAlarmList.Remove(item);
  221. EV.ClearAlarmEvent(item.EventEnum);
  222. }
  223. isTrig = true;
  224. signal.AlarmRecovery?.Set();
  225. }
  226. }
  227. if (isTrig)
  228. {
  229. int count = 0;
  230. var alarms = EV.GetAlarmEvent();
  231. foreach (var alarm in alarms)
  232. {
  233. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  234. count++;
  235. }
  236. if (count == 0)
  237. CheckToPostMessage((int)MSG.Reset);
  238. }
  239. }
  240. private void MonitorVAC1()
  241. {
  242. if (_vac1Timer == null)
  243. _vac1Timer = new Stopwatch();
  244. if (ValveAV24.Status)
  245. {
  246. _vac1 = false;
  247. if (_vac1Timer.IsRunning)
  248. _vac1Timer.Stop();
  249. }
  250. if(!ValveAV9.Status &&
  251. !ValveAV16.Status &&
  252. !ValveAV20.Status &&
  253. !ValveAV24.Status &&
  254. ValveAV26.Status &&
  255. (ValveAV33.Status || ValveAV35.Status) &&
  256. ValveAV83.Status &&
  257. ValveAV71.Status &&
  258. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  259. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  260. {
  261. if (!_vac1Timer.IsRunning)
  262. _vac1Timer.Restart();
  263. if(_vac1Timer.ElapsedMilliseconds > _vac1PumpTimeS * 1000)
  264. _vac1 = true;
  265. }
  266. else
  267. {
  268. if (_vac1Timer.IsRunning)
  269. _vac1Timer.Stop();
  270. }
  271. }
  272. private void MonitorVAC2()
  273. {
  274. if (_vac2Timer == null)
  275. _vac2Timer = new Stopwatch();
  276. if (ValveAV9.Status)
  277. {
  278. _vac2 = false;
  279. if (_vac2Timer.IsRunning)
  280. _vac2Timer.Stop();
  281. }
  282. if (!ValveAV9.Status &&
  283. !ValveAV16.Status &&
  284. !ValveAV20.Status &&
  285. !ValveAV24.Status &&
  286. ValveAV12.Status &&
  287. ValveAV14.Status &&
  288. ValveAV28.Status &&
  289. ValveAV29.Status &&
  290. ValveAV36.Status &&
  291. ValveAV37.Status &&
  292. ValveAV81.Status &&
  293. ValveAV71.Status &&
  294. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  295. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  296. {
  297. if (!_vac2Timer.IsRunning)
  298. _vac2Timer.Restart();
  299. if (_vac2Timer.ElapsedMilliseconds > _vac2PumpTimeS * 1000)
  300. _vac2 = true;
  301. }
  302. else
  303. {
  304. if (_vac2Timer.IsRunning)
  305. _vac2Timer.Stop();
  306. }
  307. }
  308. private void MonitorVAC3()
  309. {
  310. if (_vac3Timer == null)
  311. _vac3Timer = new Stopwatch();
  312. if (ValveAV16.Status || ValveAV20.Status)
  313. {
  314. _vac3 = false;
  315. if (_vac3Timer.IsRunning)
  316. _vac3Timer.Stop();
  317. }
  318. if (!ValveAV9.Status &&
  319. !ValveAV16.Status &&
  320. !ValveAV20.Status &&
  321. !ValveAV24.Status &&
  322. ValveAV18.Status &&
  323. ValveAV22.Status &&
  324. ValveAV38.Status &&
  325. ValveAV39.Status &&
  326. ValveAV82.Status &&
  327. ValveAV71.Status &&
  328. (APC.ModeFeedback == 0 || APC.ModeFeedback == 6) &&//0=idle;6=full open
  329. SensorVG11Status.Value && !AlarmSignalVG11HighAlarm.Value)
  330. {
  331. if (!_vac3Timer.IsRunning)
  332. _vac3Timer.Restart();
  333. if (_vac3Timer.ElapsedMilliseconds > _vac3PumpTimeS * 1000)
  334. _vac3 = true;
  335. }
  336. else
  337. {
  338. if (_vac3Timer.IsRunning)
  339. _vac3Timer.Stop();
  340. }
  341. }
  342. }
  343. }