CarrierRobotModule.cs 27 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763
  1. using System;
  2. using System.Diagnostics;
  3. using System.Linq;
  4. using Aitex.Core.Common;
  5. using Aitex.Core.RT.DataCenter;
  6. using Aitex.Core.RT.Device;
  7. using Aitex.Core.RT.Event;
  8. using Aitex.Core.RT.Fsm;
  9. using Aitex.Core.RT.Log;
  10. using Aitex.Core.RT.OperationCenter;
  11. using Aitex.Core.RT.Routine;
  12. using Aitex.Core.RT.SCCore;
  13. using Aitex.Core.Util;
  14. using Aitex.Core.Utilities;
  15. using Aitex.Sorter.Common;
  16. using FurnaceRT.Equipments.PMs;
  17. using FurnaceRT.Equipments.Systems;
  18. using MECF.Framework.Common.Alarms;
  19. using MECF.Framework.Common.Device.Bases;
  20. using MECF.Framework.Common.Equipment;
  21. using MECF.Framework.Common.Event;
  22. using MECF.Framework.Common.Schedulers;
  23. using MECF.Framework.Common.SubstrateTrackings;
  24. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
  25. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
  26. namespace FurnaceRT.Equipments.CarrierRobots
  27. {
  28. public partial class CarrierRobotModule : CarrierRobotModuleBase, IE87CallBack
  29. {
  30. public enum STATE
  31. {
  32. Init,
  33. Idle,
  34. Error,
  35. Homing,
  36. InTransfer,
  37. Loading,
  38. Unloading,
  39. Picking,
  40. Placing,
  41. Gotoing,
  42. Transfer,
  43. CycleSwaping,
  44. }
  45. public enum MSG
  46. {
  47. Home,
  48. Reset,
  49. Init,
  50. Error,
  51. Abort,
  52. InTransfer,
  53. TransferComplete,
  54. Load,
  55. LoadRetry,
  56. Unload,
  57. UnloadRetry,
  58. Pick,
  59. PickRetry,
  60. Place,
  61. PlaceRetry,
  62. Goto,
  63. GotoRetry,
  64. SwapRetry,
  65. Transfer,
  66. CycleSwap
  67. }
  68. public override bool IsReady
  69. {
  70. get { return FsmState == (int)STATE.Idle; }
  71. }
  72. public override bool IsError
  73. {
  74. get
  75. {
  76. return FsmState == (int)STATE.Error;
  77. }
  78. }
  79. public override bool IsInit
  80. {
  81. get { return FsmState == (int)STATE.Init; }
  82. }
  83. public event Action<string> OnEnterError;
  84. private bool _jobDone;
  85. private bool _isInit;
  86. private Stopwatch _timerNotifyJobDone = new Stopwatch();
  87. private CarrierLoad _loadRoutine;
  88. private CarrierUnload _unloadRoutine;
  89. private CarrierRobotHome _home;
  90. private CarrierRobotPick _pick;
  91. private CarrierRobotPlace _place;
  92. private CarrierRobotGoto _goto;
  93. private CarrierRobotSwap _swap;
  94. private CarrierRobotCycleSwap _cycleSwap;
  95. private bool _uiFoupSensor;
  96. public bool IsExcuteRoutineFailed { get; set; }
  97. public CarrierRobotModule(ModuleName module) : base()
  98. {
  99. Name = module.ToString();
  100. Module = module.ToString();
  101. IsOnline = true;
  102. }
  103. public override bool Initialize()
  104. {
  105. InitRoutine();
  106. InitDevice();
  107. InitFsm();
  108. InitOp();
  109. InitData();
  110. InitAlarmDefine();
  111. Singleton<EventManager>.Instance.OnAlarmEvent += Instance_OnAlarmEvent;
  112. return base.Initialize();
  113. }
  114. private void Instance_OnAlarmEvent(EventItem item)
  115. {
  116. if (item != null && item.Level == EventLevel.Alarm && (item.Source == Name || item.Source == Module))
  117. {
  118. DEVICE.GetDevice<SignalTowerBase>("System.SignalTower")?.Reset();
  119. LOG.Write($"{item.Source} {item.EventEnum} {item.Description}\n");
  120. PostMsg(MSG.Error);
  121. }
  122. }
  123. private void InitRoutine()
  124. {
  125. _loadRoutine = new CarrierLoad(this);
  126. _unloadRoutine = new CarrierUnload(this);
  127. _home = new CarrierRobotHome(this);
  128. _pick = new CarrierRobotPick(this);
  129. _place = new CarrierRobotPlace(this);
  130. _swap = new CarrierRobotSwap(this);
  131. _cycleSwap = new CarrierRobotCycleSwap(this);
  132. }
  133. private void InitData()
  134. {
  135. DATA.Subscribe($"{Module}.Status", () => IsExcuteRoutineFailed ? STATE.Error.ToString() : StringFsmStatus);
  136. DATA.Subscribe($"{Module}.IsOnline", () => IsOnline);
  137. DATA.Subscribe($"{Module}.IsError", () => IsError);
  138. DATA.Subscribe($"{Module}.SwapCycledCount", () => _swap.LoopCounter);
  139. DATA.Subscribe($"{Module}.CycleSwapCycledCount", () => _cycleSwap._overAllLoopCount);
  140. }
  141. private void InitOp()
  142. {
  143. OP.Subscribe($"{Module}.Home", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Home));
  144. OP.Subscribe($"{Module}.Abort", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Abort));
  145. OP.Subscribe($"{Module}.Reset", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Reset));
  146. OP.Subscribe($"{Module}.Pick", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Pick, args));
  147. OP.Subscribe($"{Module}.Place", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Place, args));
  148. OP.Subscribe($"{Module}.Transfer", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Transfer, args));
  149. OP.Subscribe($"{Module}.CycleSwap", (string cmd, object[] args) => CheckToPostMessage((int)MSG.CycleSwap, args));
  150. OP.Subscribe($"{Module}.Load", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Load));
  151. OP.Subscribe($"{Module}.Unload", (string cmd, object[] args) => CheckToPostMessage((int)MSG.Unload));
  152. OP.Subscribe($"{Module}.In", (string cmd, object[] args) =>
  153. {
  154. return true;
  155. });
  156. OP.Subscribe($"{Module}.Out", (string cmd, object[] args) =>
  157. {
  158. return true;
  159. });
  160. OP.Subscribe($"{Module}.AlarmAction", (string cmd, object[] args) =>
  161. {
  162. Enum.TryParse(args[0].ToString(), out AlarmAction alarmAction);
  163. string eventName = null;
  164. if (args.Length > 1)
  165. eventName = args[1].ToString();
  166. if (eventName != null)
  167. {
  168. EV.ClearAlarmEvent(eventName);
  169. var item = _triggeredAlarmList.FirstOrDefault(x => x.EventEnum == eventName);
  170. if (item != null)
  171. {
  172. item.Reset();
  173. _triggeredAlarmList.Remove(item);
  174. }
  175. if (item != null)
  176. {
  177. switch (alarmAction)
  178. {
  179. case AlarmAction.Retry:
  180. {
  181. CheckToPostMessage((int)item.RetryMessage, item.RetryMessageParas);
  182. }
  183. break;
  184. case AlarmAction.Abort:
  185. {
  186. CheckToPostMessage((int)MSG.Abort);
  187. }
  188. break;
  189. case AlarmAction.Clear:
  190. {
  191. int alarmCount = 0;
  192. var alarms = EV.GetAlarmEvent();
  193. foreach (var alarm in alarms)
  194. {
  195. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  196. alarmCount++;
  197. }
  198. if (alarmCount == 0)
  199. CheckToPostMessage((int)MSG.Reset);
  200. }
  201. break;
  202. case AlarmAction.Continue:
  203. {
  204. int alarmCount = 0;
  205. var alarms = EV.GetAlarmEvent();
  206. foreach (var alarm in alarms)
  207. {
  208. if (alarm.Level == EventLevel.Alarm && alarm.Source == Name)
  209. alarmCount++;
  210. }
  211. if (alarmCount == 0)
  212. CheckToPostMessage((int)MSG.Reset);
  213. }
  214. break;
  215. }
  216. }
  217. }
  218. return true;
  219. });
  220. OP.Subscribe($"{Module}.SetOnline", (string cmd, object[] args) =>
  221. {
  222. IsOnline = true;
  223. return true;
  224. });
  225. OP.Subscribe($"{Module}.SetOffline", (string cmd, object[] args) =>
  226. {
  227. IsOnline = false;
  228. return true;
  229. });
  230. }
  231. private void InitFsm()
  232. {
  233. EnumLoop<STATE>.ForEach((item) =>
  234. {
  235. MapState((int)item, item.ToString());
  236. });
  237. EnumLoop<MSG>.ForEach((item) =>
  238. {
  239. MapMessage((int)item, item.ToString());
  240. });
  241. EnableFsm(50, STATE.Init);
  242. //Init
  243. Transition(STATE.Init, MSG.Home, FsmStartHome, STATE.Homing);
  244. Transition(STATE.Error, MSG.Home, FsmStartHome, STATE.Homing);
  245. Transition(STATE.Idle, MSG.Home, FsmStartHome, STATE.Homing);
  246. Transition(STATE.Homing, FSM_MSG.TIMER, FsmMonitorHomeTask, STATE.Idle);
  247. Transition(STATE.Homing, MSG.Error, null, STATE.Init);
  248. Transition(STATE.Homing, MSG.Abort, FsmAbortTask, STATE.Init);
  249. EnterExitTransition<STATE, FSM_MSG>(STATE.Idle, FsmEnterIdle, FSM_MSG.NONE, FsmExitIdle);
  250. Transition(STATE.Idle, MSG.Abort, null, STATE.Idle);
  251. Transition(STATE.Idle, MSG.Reset, null, STATE.Idle);
  252. Transition(STATE.Init, MSG.Reset, null, STATE.Init);
  253. Transition(STATE.Error, MSG.Abort, FsmAbortTask, STATE.Error);
  254. //Error
  255. AnyStateTransition(MSG.Error, FsmOnError, STATE.Error);
  256. Transition(STATE.Error, MSG.Reset, FsmReset, STATE.Idle);
  257. EnterExitTransition<STATE, FSM_MSG>(STATE.Error, FsmEnterError, FSM_MSG.NONE, FsmExitError);
  258. //load
  259. Transition(STATE.Error, MSG.LoadRetry, FsmStartLoad, STATE.Loading);
  260. Transition(STATE.Idle, MSG.Load, FsmStartLoad, STATE.Loading);
  261. Transition(STATE.Loading, FSM_MSG.TIMER, FsmMonitorLoadTask, STATE.Idle);
  262. Transition(STATE.Loading, MSG.Abort, FsmAbortTask, STATE.Idle);
  263. //unload
  264. Transition(STATE.Error, MSG.UnloadRetry, FsmStartUnload, STATE.Unloading);
  265. Transition(STATE.Idle, MSG.Unload, FsmStartUnload, STATE.Unloading);
  266. Transition(STATE.Unloading, FSM_MSG.TIMER, FsmMonitorUnloadTask, STATE.Idle);
  267. Transition(STATE.Unloading, MSG.Abort, FsmAbortTask, STATE.Idle);
  268. //pick
  269. Transition(STATE.Error, MSG.PickRetry, FsmStartPick, STATE.Picking);
  270. Transition(STATE.Idle, MSG.Pick, FsmStartPick, STATE.Picking);
  271. Transition(STATE.Picking, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  272. Transition(STATE.Picking, MSG.Abort, FsmAbortTask, STATE.Idle);
  273. //place
  274. Transition(STATE.Error, MSG.PlaceRetry, FsmStartPlace, STATE.Placing);
  275. Transition(STATE.Idle, MSG.Place, FsmStartPlace, STATE.Placing);
  276. Transition(STATE.Placing, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  277. Transition(STATE.Placing, MSG.Abort, FsmAbortTask, STATE.Idle);
  278. //goto
  279. Transition(STATE.Error, MSG.GotoRetry, FsmStartGoto, STATE.Gotoing);
  280. Transition(STATE.Idle, MSG.Goto, FsmStartGoto, STATE.Gotoing);
  281. Transition(STATE.Gotoing, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  282. Transition(STATE.Gotoing, MSG.Abort, FsmAbortTask, STATE.Idle);
  283. //swap
  284. Transition(STATE.Idle, MSG.Transfer, FsmStartSwap, STATE.Transfer);
  285. Transition(STATE.Transfer, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  286. Transition(STATE.Transfer, MSG.Abort, FsmAbortTask, STATE.Idle);
  287. //CycleSwap
  288. Transition(STATE.Idle, MSG.CycleSwap, FsmStartCycleSwap, STATE.CycleSwaping);
  289. Transition(STATE.CycleSwaping, FSM_MSG.TIMER, FsmMonitorTask, STATE.Idle);
  290. Transition(STATE.CycleSwaping, MSG.Abort, FsmAbortTask, STATE.Idle);
  291. }
  292. public override bool Home(out string reason)
  293. {
  294. if (!CheckToPostMessage((int)MSG.Home))
  295. {
  296. reason = $"Can not home in {StringFsmStatus} status";
  297. return false;
  298. }
  299. reason = string.Empty;
  300. return true;
  301. }
  302. public override void NoteJobStart()
  303. {
  304. _jobDone = false;
  305. }
  306. public override void NoteJobComplete()
  307. {
  308. _timerNotifyJobDone.Restart();
  309. _jobDone = true;
  310. }
  311. public override void Monitor()
  312. {
  313. base.Monitor();
  314. _alarmSignaRobotAlarmTrig.CLK = _alarmSignaRobotAlarm.Value;
  315. if (_alarmSignaRobotAlarmTrig.Q)
  316. {
  317. RobotDIAlarm.Set();
  318. CarrierRobotDevice.NoteError("");
  319. }
  320. if (SC.GetValue<bool>("System.IsSimulatorMode"))
  321. {
  322. var hasFoupSensor = !CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0);
  323. var carrierRobotFoupInfo = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
  324. if (hasFoupSensor && carrierRobotFoupInfo != null)
  325. {
  326. carrierRobotFoupInfo.UICarrierStatusEnum = CarrierStatus.TRAKCST;
  327. carrierRobotFoupInfo.UICarrierType = carrierRobotFoupInfo.CarrierType.ToString();
  328. _uiFoupSensor = true;
  329. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  330. carrierRobotFoupInfo.UICarrierColor = pmModule.GetCarrierUIColor(carrierRobotFoupInfo.UICarrierType, carrierRobotFoupInfo.UICarrierStatusEnum);
  331. }
  332. Singleton<EquipmentManager>.Instance.SetUIWaferCount(carrierRobotFoupInfo, ModuleName.CarrierRobot, out var wafers);
  333. Singleton<EquipmentManager>.Instance.SetVisibility(carrierRobotFoupInfo, hasFoupSensor);
  334. }
  335. else
  336. {
  337. var hasFoupSensor = CarrierRobotDevice.IsWaferPresenceOnBlade1 || !CarrierManager.Instance.CheckNoCarrier(ModuleName.CarrierRobot, 0);
  338. var carrierRobotFoupInfo = CarrierManager.Instance.GetCarrier(ModuleName.CarrierRobot);
  339. if (hasFoupSensor && carrierRobotFoupInfo != null)
  340. {
  341. _uiFoupSensor = true;
  342. carrierRobotFoupInfo.UICarrierType = carrierRobotFoupInfo.CarrierType.ToString();
  343. carrierRobotFoupInfo.UICarrierStatusEnum = CarrierStatus.TRAKCST;
  344. var pmModule = Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule;
  345. carrierRobotFoupInfo.UICarrierColor = pmModule.GetCarrierUIColor(carrierRobotFoupInfo.UICarrierType, carrierRobotFoupInfo.UICarrierStatusEnum);
  346. carrierRobotFoupInfo.UIExitFoup = true;
  347. carrierRobotFoupInfo.UIStockerExitFoup = false;
  348. var stockerFoupInfo = CarrierManager.Instance.GetCarrier(carrierRobotFoupInfo.InternalModuleName);
  349. if (stockerFoupInfo != null)
  350. {
  351. stockerFoupInfo.UICarrierType = carrierRobotFoupInfo.CarrierType.ToString();
  352. stockerFoupInfo.UICarrierWaferCount = carrierRobotFoupInfo.UICarrierWaferCount;
  353. stockerFoupInfo.UICarrierStatusEnum = carrierRobotFoupInfo.UICarrierStatusEnum;
  354. }
  355. }
  356. Singleton<EquipmentManager>.Instance.SetUIWaferCount(carrierRobotFoupInfo, ModuleName.CarrierRobot, out var wafers);
  357. }
  358. }
  359. public override void Reset()
  360. {
  361. _alarmSignaRobotAlarmTrig.RST = true;
  362. //_trigAlarmReset?.SetPulseTrigger(true, out _);
  363. if (IsError)
  364. {
  365. CheckToPostMessage((int)MSG.Reset);
  366. }
  367. }
  368. public override bool PrepareTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  369. {
  370. reason = string.Empty;
  371. return true;
  372. }
  373. public override bool TransferHandoff(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  374. {
  375. reason = string.Empty;
  376. return true;
  377. }
  378. public override bool PostTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType, out string reason)
  379. {
  380. reason = string.Empty;
  381. return true;
  382. }
  383. public override bool CheckReadyForTransfer(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType,
  384. out string reason)
  385. {
  386. reason = string.Empty;
  387. return IsReady;
  388. }
  389. public override bool CheckReadyForMap(ModuleName robot, Hand blade, out string reason)
  390. {
  391. reason = string.Empty;
  392. return IsReady;
  393. }
  394. public override void NoteTransferStart(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  395. {
  396. CheckToPostMessage(MSG.InTransfer);
  397. }
  398. public override void NoteTransferStop(ModuleName robot, Hand blade, int targetSlot, EnumTransferType transferType)
  399. {
  400. if (FsmState == (int)STATE.InTransfer)
  401. CheckToPostMessage(MSG.TransferComplete);
  402. }
  403. public override bool Pick(ModuleName target, Hand blade, int targetSlot, out string reason)
  404. {
  405. CheckToPostMessage((int)MSG.Pick, target.ToString(), targetSlot, blade);
  406. reason = string.Empty;
  407. return true;
  408. }
  409. public override bool Place(ModuleName target, Hand blade, int targetSlot, out string reason)
  410. {
  411. CheckToPostMessage((int)MSG.Place, target.ToString(), targetSlot, blade);
  412. reason = string.Empty;
  413. return true;
  414. }
  415. public bool Goto(ModuleName target, Hand blade, int targetSlot, bool isPickReady, out string reason)
  416. {
  417. CheckToPostMessage((int)MSG.Goto, target.ToString(), targetSlot, blade, isPickReady);
  418. reason = string.Empty;
  419. return true;
  420. }
  421. public override bool Load(ModuleName target, Hand blade, int targetSlot, ModuleName destinationStocker,
  422. CarrierType carrierType, string reservedCarrierId, out string reason)
  423. {
  424. CheckToPostMessage((int)MSG.Load, target.ToString(), targetSlot, blade, destinationStocker, carrierType, reservedCarrierId);
  425. reason = string.Empty;
  426. return true;
  427. }
  428. public override bool Unload(ModuleName target, Hand blade, int targetSlot, out string reason)
  429. {
  430. CheckToPostMessage((int)MSG.Unload, target.ToString(), targetSlot, blade);
  431. reason = string.Empty;
  432. return true;
  433. }
  434. public void CarrierIDReadSuccess(string carrierID)
  435. {
  436. }
  437. public void CarrierIDReadFail()
  438. {
  439. }
  440. public void MappingComplete(string carrierID, string slotmap)
  441. {
  442. }
  443. public void LoadportError(string errorcode)
  444. {
  445. }
  446. public void LoadComplete()
  447. {
  448. }
  449. public void UnloadComplete()
  450. {
  451. }
  452. public void OnLPHomed()
  453. {
  454. }
  455. public void OnE84HandoffStart(bool isload)
  456. {
  457. }
  458. public void OnE84HandoffComplete(bool isload)
  459. {
  460. }
  461. public void CarrierArrive()
  462. {
  463. }
  464. public void CarrerRemove(string carrierID)
  465. {
  466. }
  467. private bool FsmReset(object[] param)
  468. {
  469. if (IsError)
  470. {
  471. CarrierRobotDevice.RobotReset();
  472. if (Singleton<EquipmentManager>.Instance.IsAutoMode || Singleton<EquipmentManager>.Instance.IsReturnWafer)
  473. {
  474. Singleton<EquipmentManager>.Instance.ResetTask(ModuleHelper.Converter(Module));
  475. }
  476. }
  477. return true;
  478. }
  479. private bool FsmOnError(object[] param)
  480. {
  481. if (FsmState == (int)STATE.Error)
  482. {
  483. return false;
  484. }
  485. AbortRoutine();
  486. if (FsmState == (int)STATE.Init)
  487. return false;
  488. return true;
  489. }
  490. private bool FsmExitIdle(object[] param)
  491. {
  492. return true;
  493. }
  494. private bool FsmEnterIdle(object[] param)
  495. {
  496. return true;
  497. }
  498. private bool FsmExitError(object[] param)
  499. {
  500. return true;
  501. }
  502. private bool FsmEnterError(object[] param)
  503. {
  504. if (OnEnterError != null)
  505. OnEnterError(Module);
  506. return true;
  507. }
  508. private bool FsmAbortTask(object[] param)
  509. {
  510. if (!CarrierRobotDevice.IsReady())
  511. CarrierRobotDevice.Abort();
  512. AbortRoutine();
  513. return true;
  514. }
  515. private bool FsmToInit(object[] param)
  516. {
  517. return true;
  518. }
  519. private bool FsmToIdle(object[] param)
  520. {
  521. return true;
  522. }
  523. private bool FsmMonitorLoadTask(object[] param)
  524. {
  525. Result ret = MonitorRoutine();
  526. if (ret == Result.FAIL)
  527. {
  528. PostMsg(MSG.Error);
  529. return false;
  530. }
  531. if (ret == Result.DONE)
  532. IsOnline = true;
  533. return ret == Result.DONE;
  534. }
  535. private bool FsmMonitorUnloadTask(object[] param)
  536. {
  537. Result ret = MonitorRoutine();
  538. if (ret == Result.FAIL)
  539. {
  540. PostMsg(MSG.Error);
  541. return false;
  542. }
  543. return ret == Result.DONE;
  544. }
  545. private bool FsmStartLoad(object[] param)
  546. {
  547. QueueRoutine.Clear();
  548. _loadRoutine.Init(ModuleHelper.Converter(param[0].ToString()), (int)param[1], (Hand)param[2],
  549. ModuleHelper.Converter(param[3].ToString()), (CarrierType)param[4], param[5].ToString(), param.Length > 6 ? (bool)param[6] : false);
  550. QueueRoutine.Enqueue(_loadRoutine);
  551. Result ret = QueueRoutine.Peek().Start();
  552. if (ret == Result.FAIL || ret == Result.DONE)
  553. return false;
  554. return ret == Result.RUN;
  555. }
  556. private bool FsmStartUnload(object[] param)
  557. {
  558. _unloadRoutine.Init(ModuleHelper.Converter(param[0].ToString()), (int)param[1], (Hand)param[2], param.Length > 3 ? (bool)param[3] : false);
  559. Result ret = StartRoutine(_unloadRoutine);
  560. if (ret == Result.FAIL || ret == Result.DONE)
  561. return false;
  562. return ret == Result.RUN;
  563. }
  564. private bool FsmStartHome(object[] param)
  565. {
  566. if (IsError)
  567. {
  568. if (Singleton<EquipmentManager>.Instance.IsAutoMode || Singleton<EquipmentManager>.Instance.IsReturnWafer)
  569. {
  570. Singleton<EquipmentManager>.Instance.ResetTask(ModuleHelper.Converter(Module));
  571. }
  572. }
  573. Result ret = StartRoutine(_home);
  574. if (ret == Result.FAIL || ret == Result.DONE)
  575. return false;
  576. _isInit = false;
  577. return ret == Result.RUN;
  578. }
  579. private bool FsmStartPick(object[] param)
  580. {
  581. _pick.Init(ModuleHelper.Converter(param[0].ToString()), (int)param[1], (Hand)param[2], param.Length > 3 ? (bool)param[3] : false);
  582. Result ret = StartRoutine(_pick);
  583. if (ret == Result.FAIL || ret == Result.DONE)
  584. return false;
  585. return ret == Result.RUN;
  586. }
  587. private bool FsmStartPlace(object[] param)
  588. {
  589. _place.Init(ModuleHelper.Converter(param[0].ToString()), (int)param[1], (Hand)param[2], param.Length > 3 ? (bool)param[3] : false);
  590. Result ret = StartRoutine(_place);
  591. if (ret == Result.FAIL || ret == Result.DONE)
  592. return false;
  593. return ret == Result.RUN;
  594. }
  595. private bool FsmStartGoto(object[] param)
  596. {
  597. _goto.Init(ModuleHelper.Converter(param[0].ToString()), (int)param[1], (Hand)param[2], (bool)param[3], param.Length > 34 ? (bool)param[4] : false);
  598. Result ret = StartRoutine(_goto);
  599. if (ret == Result.FAIL || ret == Result.DONE)
  600. return false;
  601. return ret == Result.RUN;
  602. }
  603. private bool FsmStartSwap(object[] param)
  604. {
  605. _swap.Init(ModuleHelper.Converter(param[0].ToString()), ModuleHelper.Converter(param[1].ToString()), (int)param[2], (Hand)param[3]);
  606. Result ret = StartRoutine(_swap);
  607. if (ret == Result.FAIL || ret == Result.DONE)
  608. return false;
  609. return ret == Result.RUN;
  610. }
  611. private bool FsmStartCycleSwap(object[] param)
  612. {
  613. _cycleSwap.Init(ModuleHelper.Converter(param[0].ToString()), ModuleHelper.Converter(param[1].ToString()), (int)param[2], (Hand)param[3], Convert.ToInt32(param[4] == null ? 0 : param[4]));
  614. Result ret = StartRoutine(_cycleSwap);
  615. if (ret == Result.FAIL || ret == Result.DONE)
  616. return false;
  617. return ret == Result.RUN;
  618. }
  619. private bool FsmMonitorHomeTask(object[] param)
  620. {
  621. Result ret = MonitorRoutine();
  622. if (ret == Result.FAIL)
  623. {
  624. PostMsg(MSG.Error);
  625. return false;
  626. }
  627. if (ret == Result.DONE)
  628. {
  629. _alarmSignaRobotAlarmTrig.RST = true;
  630. _isInit = true;
  631. return true;
  632. }
  633. return false;
  634. }
  635. private bool FsmMonitorTask(object[] param)
  636. {
  637. Result ret = MonitorRoutine();
  638. if (ret == Result.FAIL)
  639. {
  640. PostMsg(MSG.Error);
  641. return false;
  642. }
  643. return ret == Result.DONE;
  644. }
  645. }
  646. }