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- <?xml version="1.0" encoding="utf-8"?>
- <root system="Furnace">
- <configs name="System" display="System Parameter">
- <config default="true" name="IsSimulatorMode" description="Is Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="120" name="BackUpFileMaxNumber" description="BackUpFileMaxNumber" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
- <!--主界面MFC setpoint 是否大于零才展示-->
- <config default="true" name="ShowMFCBySetPoint" description="MFC setpoint greater than 0 display" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsShowRobotDownBtn" description="" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsATMMode" description="Is ATM Mode" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="false" name="IsCycleMode" description="Is Cycle Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="3" name="CycleCount" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="EnableWarningWaferProcessState" description="Enable Warning Wafer Process State" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableWarningFailedWafer" description="Enable Warning Failed Wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnablePopupKeyboard" description="Enable Popup Keyboard" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="0" name="TotalCycledWafer" description="Total Cycled Wafer" max="10000000" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="Release" name="RunningMode" description="" max="" min="" paramter="Debug,Release" tag="" unit="" type="String" visible="false" />
- <config default="true" name="IsScheduleMaintenance" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsServiceControlMode" description="Is Service Control Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="BypassInterlock" description="Bypass Interlock" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1000" name="DataCollectionInterval" description="Data Collection Interval" max="99999" min="20" paramter="" tag="" unit="ms" type="Integer" />
- <config default="true" name="IsIgnoreSaveDB" description="Ignore Save IO data to DB" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="60" name="LogsSaveDays" description="Logs Save Days" max="365" min="7" paramter="" tag="" unit="" type="Integer" />
- <config default="25" name="CassetteSlotCount" description="Cassette Slot Count" max="100" min="1" paramter="" tag="" unit="" visible="false" type="Integer" />
- <config default="true" name="LoadNeedPressCassetteInButton" description="Load Need Press Cassette In Button" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="LoadNeedPressCassetteOutButton" description="Load Need Press Cassette Out Button" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="UnloadNeedPressCassetteInButton" description="Unload Need Press Cassette In Button" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="UnloadNeedPressCassetteOutButton" description="Unload Need Press Cassette Out Button" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsLeaveAsAllWaferWhenWaferShort" description="Is LeaveAs All Wafer When Wafer Short" max="" min="" paramter="" tag="" visible="false" unit="" type="Bool" />
- <config default="ED,P,M" name="ChargingOrderBySort" description="Charging Order By Sort" max="" min="" paramter="ED,P,M;ED,M,P;P,ED,M;P,M,ED;M,P,ED;M,ED,P" tag="ReadOnlySelection" unit="" type="String" />
- <config default="FromTopToBottom" name="ChargingOrderToBoat" description="Charging Order To Boat" max="" min="" paramter="FromTopToBottom;FromBottomToTop" tag="ReadOnlySelection" unit="" type="String" />
- <config default="FromTopToBottom" name="ChargingOrderFromCassette" description="Charging Order From Cassette" max="" min="" paramter="FromTopToBottom;FromBottomToTop" tag="ReadOnlySelection" unit="" type="String" />
- <config default="false" name="IsEnableFIMSChargeMapping" description="Is Enable FIMS Charge Mapping" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsEnableBoatChargeMapping" description="Is Enable Boat Charge Mapping" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsEnableBoatDischargeMapping" description="Is Enable Boat Discharge Mapping" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsEnableDummyWaferDischarge" description="Is Enable Dummy Wafer Discharge" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ModbusCommunicationEnableLogMessage" description="Modbus Communication Enable Log Message" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="false" name="LightCurtain" description="light curtain" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsAutoFillCarrierId" description="Load Is Auto Fill CarrierId" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="process;sub;alarm;abort;idle;reset" name="CompareRecipeType" description="Compare Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <configs name="ShutDown">
- <config default="Cancel" name="ShutDown" description="ShutDown" max="0" min="0" paramter="ShutDown;Cancel" tag="ReadOnlySelection" unit="" type="String" />
- </configs>
- <configs name="Scheduler" visible="false">
- <config default="15" name="WaitLoadTimeOut" description="Wait Load TimeOut" max="1000" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="2" name="WaferCountBelowWhichStartNewProcessJob" description="Wafer Count Below Which Start New Process Job" max="25" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="GroupWaferBySequence" description="Group Wafer By Sequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsRunInParallelMode" description="IsRunInParallelMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
- </configs>
- <configs name="SetUp" display="" >
- <config default="ELK" name="ToolType" description="Tool Type" max="" min="" paramter="NTP;ELK;SiBCN;TiN" tag="ReadOnlySelection" unit="" type="String" />
- <config default="true" name="IsLP1Installed" description="Is LP1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsLP2Installed" description="Is LP2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsLP3Installed" description="Is LP3 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsLP4Installed" description="Is LP4 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsFIMS1Installed" description="Is FIMS1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsFIMS2Installed" description="Is FIMS2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsStocker1Installed" description="Is Stocker1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker2Installed" description="Is Stocker2 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker3Installed" description="Is Stocker3 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker4Installed" description="Is Stocker4 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker5Installed" description="Is Stocker5 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker6Installed" description="Is Stocker6 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker7Installed" description="Is Stocker7 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker8Installed" description="Is Stocker8 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker9Installed" description="Is Stocker9 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker10Installed" description="Is Stocker10 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker11Installed" description="Is Stocker11 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker12Installed" description="Is Stocker12 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker13Installed" description="Is Stocker13 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker14Installed" description="Is Stocker14 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker15Installed" description="Is Stocker15 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker16Installed" description="Is Stocker16 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker17Installed" description="Is Stocker17 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsStocker18Installed" description="Is Stocker18 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="true" />
- <config default="true" name="IsPM1Installed" description="Is PM1 Installed" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="20000" name="ExportMaxRow" description="Export Max Row" max="100000" min="300" paramter="" tag="" unit="" type="Integer" />
- <config default="" name="ExportNameConversion" description="" paramter="" tag="" unit="" type="String" visible="false"/>
- </configs>
- <configs name="WaferType" visible="false">
- <configs name="P">
- <config default="Product1" name="FullName" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="AccFilmThick" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="AlternativeWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="IsReturnWafer" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="ReturnWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="CanProcessContinuously" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsDummy" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="#02ffff" name="NOFOUP" description="no foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="READY" description="have transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00BFFF" name="WCHARG" description="Charging wafers in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00CD00" name="ONBOAT" description="Complete Wafers Charging" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#87CEFA" name="WDCHRG" description="Wafer DisCharging is in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00FF7F" name="PRCEND" description="There are foups waiting to be moved out" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#3CB371" name="MOVECST" description="Moving transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#8FBC8F" name="TRAKCST" description="transfer foup on T rack" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF4040" name="SERR1" description="Sensor error 1 unrecoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="SERR2" description="Sensor error 2 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF6347" name="SERR3" description="Sensor error 3 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#1874CD" name="MAPPING" description="Mapping" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="P1">
- <config default="Product1" name="FullName" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="AccFilmThick" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="AlternativeWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="IsReturnWafer" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="ReturnWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="CanProcessContinuously" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsDummy" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="#02ffff" name="NOFOUP" description="no foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="READY" description="have transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00BFFF" name="WCHARG" description="Charging wafers in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00CD00" name="ONBOAT" description="Complete Wafers Charging" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#87CEFA" name="WDCHRG" description="Wafer DisCharging is in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00FF7F" name="PRCEND" description="There are foups waiting to be moved out" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#3CB371" name="MOVECST" description="Moving transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#8FBC8F" name="TRAKCST" description="transfer foup on T rack" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF4040" name="SERR1" description="Sensor error 1 unrecoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="SERR2" description="Sensor error 2 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF6347" name="SERR3" description="Sensor error 3 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#1874CD" name="MAPPING" description="Mapping" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="P2">
- <config default="Product2" name="FullName" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="AccFilmThick" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="AlternativeWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="IsReturnWafer" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="ReturnWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="CanProcessContinuously" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsDummy" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="#02ffff" name="NOFOUP" description="no foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="READY" description="have transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00BFFF" name="WCHARG" description="Charging wafers in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00CD00" name="ONBOAT" description="Complete Wafers Charging" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#87CEFA" name="WDCHRG" description="Wafer DisCharging is in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00FF7F" name="PRCEND" description="There are foups waiting to be moved out" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#3CB371" name="MOVECST" description="Moving transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#8FBC8F" name="TRAKCST" description="transfer foup on T rack" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF4040" name="SERR1" description="Sensor error 1 unrecoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="SERR2" description="Sensor error 2 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF6347" name="SERR3" description="Sensor error 3 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#1874CD" name="MAPPING" description="Mapping" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="SD">
- <config default="SideDummy" name="FullName" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="AccFilmThick" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="AlternativeWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="IsReturnWafer" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="ReturnWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="CanProcessContinuously" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="True" name="IsDummy" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="#fb9355" name="NOFOUP" description="no foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#fb9355" name="READY" description="have transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00BFFF" name="WCHARG" description="Charging wafers in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00CD00" name="ONBOAT" description="Complete Wafers Charging" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#87CEFA" name="WDCHRG" description="Wafer DisCharging is in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00FF7F" name="PRCEND" description="There are foups waiting to be moved out" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#3CB371" name="MOVECST" description="Moving transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#8FBC8F" name="TRAKCST" description="transfer foup on T rack" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF4040" name="SERR1" description="Sensor error 1 unrecoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="SERR2" description="Sensor error 2 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF6347" name="SERR3" description="Sensor error 3 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#1874CD" name="MAPPING" description="Mapping" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="ED">
- <config default="ExtraDummy" name="FullName" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="AccFilmThick" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="AlternativeWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="IsReturnWafer" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="ReturnWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="CanProcessContinuously" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="True" name="IsDummy" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="#aa93ff" name="NOFOUP" description="no foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#aa93ff" name="READY" description="have transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00BFFF" name="WCHARG" description="Charging wafers in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00CD00" name="ONBOAT" description="Complete Wafers Charging" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#87CEFA" name="WDCHRG" description="Wafer DisCharging is in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00FF7F" name="PRCEND" description="There are foups waiting to be moved out" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#3CB371" name="MOVECST" description="Moving transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#8FBC8F" name="TRAKCST" description="transfer foup on T rack" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF4040" name="SERR1" description="Sensor error 1 unrecoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="SERR2" description="Sensor error 2 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF6347" name="SERR3" description="Sensor error 3 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#1874CD" name="MAPPING" description="Mapping" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="M1">
- <config default="Monitor1" name="FullName" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="AccFilmThick" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="AlternativeWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="IsReturnWafer" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="ReturnWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="CanProcessContinuously" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsDummy" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="#0395ff" name="NOFOUP" description="no foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#0395ff" name="READY" description="have transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00BFFF" name="WCHARG" description="Charging wafers in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00CD00" name="ONBOAT" description="Complete Wafers Charging" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#87CEFA" name="WDCHRG" description="Wafer DisCharging is in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00FF7F" name="PRCEND" description="There are foups waiting to be moved out" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#3CB371" name="MOVECST" description="Moving transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#8FBC8F" name="TRAKCST" description="transfer foup on T rack" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF4040" name="SERR1" description="Sensor error 1 unrecoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="SERR2" description="Sensor error 2 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF6347" name="SERR3" description="Sensor error 3 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#1874CD" name="MAPPING" description="Mapping" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="M2">
- <config default="Monitor2" name="FullName" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="True" name="AccFilmThick" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="AlternativeWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="IsReturnWafer" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="None" name="ReturnWaferType" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="CanProcessContinuously" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsDummy" description="" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="#ff6fab" name="NOFOUP" description="no foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#ff6fab" name="READY" description="have transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00BFFF" name="WCHARG" description="Charging wafers in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00CD00" name="ONBOAT" description="Complete Wafers Charging" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#87CEFA" name="WDCHRG" description="Wafer DisCharging is in progress" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#00FF7F" name="PRCEND" description="There are foups waiting to be moved out" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#3CB371" name="MOVECST" description="Moving transfer foup" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#8FBC8F" name="TRAKCST" description="transfer foup on T rack" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF4040" name="SERR1" description="Sensor error 1 unrecoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#02ffff" name="SERR2" description="Sensor error 2 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#FF6347" name="SERR3" description="Sensor error 3 recoverable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="#1874CD" name="MAPPING" description="Mapping" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- </configs>
- <configs name="Stocker" visible="false">
- <config default="20" name="StockerCount" description="Stocker Count" max="22" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="16" name="FoupStockerCount" description="Foup Stocker Count" max="22" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="StockerLayers" description="Stocker Layers" max="4" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="StockerCountByLayer" description="Stocker Count per Layer" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <configs name="Recipe">
- <config default="Furnace" name="SupportedChamberType" description="Supported Chamber Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Job" name="SupportedJobType" description="Supported Job Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Process" name="SupportedProcessType" description="Supported Process Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Layout" name="SupportedLayoutType" description="Supported Layout Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Sub" name="SupportedSubType" description="Supported Sub Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Abort" name="SupportedAbortType" description="Supported Abort Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Alarm" name="SupportedAlarmType" description="Supported Alarm Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Reset" name="SupportedResetType" description="Supported Reset Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="Idle" name="SupportedIdleType" description="Supported Idle Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="PM1" name="ChamberModules" description="Chamber Modules" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="StandbyStep" name="ExcuteAfterRecipeComplete" description="Excute After Recipe Complete" max="" min="" paramter="IdleRecipe;StandbyStep;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="default" name="Reset Recipe" description="Default reset recipe" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="default" name="Idle Recipe" description="Default idle recipe" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="default" name="Abort Recipe" description="Default abort recipe" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="DefaultProcessRecipe" description="Default process recipe" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="process recipe" name="DefaultProcessRecipeName" description="Default recipe name" max="" min="" paramter="" tag="" unit="" type="String"/>
- <config default="layout recipe" name="DefaultLayoutRecipeName" description="Default recipe name" max="" min="" paramter="" tag="" unit="" type="String"/>
- <config default="job recipe" name="DefaultJobRecipeName" description="Default recipe name" max="" min="" paramter="" tag="" unit="" type="String"/>
- <config default="new recipe" name="DefaultStepNameList" description="Default step name list" max="" min="" paramter="" tag="" unit="" type="String"/>
- <config default="10" name="RecipeSaveNumber" description="Step Delay time before collection data" max="100" min="0" paramter="" tag="" unit="ms" type="Integer" />
- <config default="alarm;abort;idle;reset" name="SingleRecipeFileType" description="Single Recipe File Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="default" name="DefaultFileName" description="Default File Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- </configs>
- <configs name="Step Name" visible="false">
- <config default="" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="200" name="Count" description="Step Name Length" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <configs name="Interlock Name" visible="false">
- </configs>
- <configs name="Name Parameter" visible="false">
- </configs>
- <configs name="SignalTower" visible="false">
- <config default="red=1;yellow=2;green=3;blue=4;white=5;buzzer=6" name="Light" description="设置灯的种类，顺序" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="System.IsAlarm=System in alarm status;System.IsIdle=System in idle status" name="Trigger" description="设置触发灯塔的项" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="System.IsAlarm=on,off,off,off,off;System.IsIdle=off,on,off,off,off;" name="Value" description="设置灯塔触发的逻辑关系" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- </configs>
- <configs name="FDC" visible="false">
- <config default="Process" name="DataGroupName" description="FDC data group" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="1000" name="DelayTime" description="Step Delay time before collection data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
- <config default="100" name="SampleInterval" description="interval time collection sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
- </configs>
- <configs name="Job" visible="false">
- <config default="10" name="BuzzerTimeWhenJobDone" description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="true" name="EnablePopDialogWhenJobDone" description="Whether pop window after job done" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <configs name="Unload">
- <config default="12" name="MaterialPCassetteNo" description="Material P CassetteNo" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="" name="PCassette" description="PCassette" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- </configs>
- <configs name="JOBProcessStock">
- <config default="" name="PJID" description="PJID" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="CJID" description="CJID" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="JobRecipe" description="JobRecipe" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="CarrierPara" description="CarrierPara" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="m1CarrierPara" description="m1CarrierPara" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="m2CarrierPara" description="m2CarrierPara" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="PJVariable" description="PJVariable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="P" name="WaferType" description="WaferType" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="12" name="MaterialPCassetteNo" description="Material P CassetteNo" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="" name="PCassette" description="PCassette" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="" name="Charge" description="Charge" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- </configs>
- <configs name="CreateJob">
- <config default="" name="PJID" description="PJID" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="CJID" description="CJID" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="JobRecipe" description="JobRecipe" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="CarrierPara" description="CarrierPara" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="m1CarrierPara" description="m1CarrierPara" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="m2CarrierPara" description="m2CarrierPara" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="PJVariable" description="PJVariable" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="12" name="MaterialPCassetteNo" description="Material P CassetteNo" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="" name="PCassette" description="PCassette" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="" name="Charge" description="Charge" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- </configs>
- <configs name="JOBUnLoad">
- <config default="" name="WaferType" description="Wafer Type" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="CarrierPara" description="Carrier Para" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="TransferType" description="Transfer Type" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- </configs>
- <configs name="Stocker">
- <config default="P1" name="Stocker1WaferType" description="Stocker1 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="Stocker2WaferType" description="Stocker2 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="Stocker3WaferType" description="Stocker3 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="Stocker4WaferType" description="Stocker4 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="Stocker5WaferType" description="Stocker5 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="Stocker6WaferType" description="Stocker6 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P2" name="Stocker7WaferType" description="Stocker7 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P2" name="Stocker8WaferType" description="Stocker8 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P2" name="Stocker9WaferType" description="Stocker9 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P2" name="Stocker10WaferType" description="Stocker10 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P2" name="Stocker11WaferType" description="Stocker11 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P2" name="Stocker12WaferType" description="Stocker12 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="SD" name="Stocker13WaferType" description="Stocker13 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="M1" name="Stocker14WaferType" description="Stocker14 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="M2" name="Stocker15WaferType" description="Stocker15 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="ED" name="Stocker16WaferType" description="Stocker16 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="ED" name="Stocker17WaferType" description="Stocker17 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="ED" name="Stocker18WaferType" description="Stocker18 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="LP1Type" description="LP1 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="LP2Type" description="LP2 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="LP3Type" description="LP3 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- <config default="P1" name="LP4Type" description="LP4 Type" max="" min="" paramter="P1;P2;SD;ED;M1;M2;None" tag="ReadOnlySelection" unit="" type="String" />
- </configs>
- <configs name="StockerDisplayName" visible="false">
- <config default="1" name="Stocker1" description="Stocker1 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="2" name="Stocker2" description="Stocker2 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="3" name="Stocker3" description="Stocker3 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="4" name="Stocker4" description="Stocker4 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="5" name="Stocker5" description="Stocker5 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="6" name="Stocker6" description="Stocker6 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="7" name="Stocker7" description="Stocker7 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="8" name="Stocker8" description="Stocker8 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="9" name="Stocker9" description="Stocker9 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="10" name="Stocker10" description="Stocker10 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="11" name="Stocker11" description="Stocker11 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="12" name="Stocker12" description="Stocker12 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="1" name="Stocker13" description="Stocker13 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="1" name="Stocker14" description="Stocker14 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="2" name="Stocker15" description="Stocker15 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="1" name="Stocker16" description="Stocker16 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="2" name="Stocker17" description="Stocker17 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="3" name="Stocker18" description="Stocker18 Display Name" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- </configs>
- <configs name="EditParameter" visible="false">
- <config default="Parameter" name="EditChamberType" description="Edit Chamber Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
- <config default="AlarmCondition,TempCorrection,TempPID,TempProfile,LeakCheckCondition,APCPID" name="EditParameterType" description="Alarm Condition,Temp Correction,Temp PID,Temp Profile,Temp Auto PID,Leak Check Condition,APC PID" paramter="AlarmCondition,TempCorrection,TempPID,TempProfile,TempAutoPID,LeakCheckCondition,APCPID" tag="ReadOnlySelection" unit="" type="String" />
- </configs>
- </configs>
- <configs name="FA">
- <config default="Passive" name="ConnectionMode" description="Connection Mode" max="0" min="0" paramter="Passive;Active" tag="ReadOnlySelection" unit="" type="String" />
- <config default="127.0.0.1" name="LocalIpAddress" description="Local IP Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="5021" name="LocalPortNumber" description="Local Port Number" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="127.0.0.1" name="RemoteIpAddress" description="Remote IP Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="5020" name="RemotePortNumber" description="Remote Port Number" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="45" name="T3Timeout" description="T3 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="T5Timeout" description="T5 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="5" name="T6Timeout" description="T6 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="T7Timeout" description="T7 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="5" name="T8Timeout" description="T8 Timeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="false" name="EnableSpooling" description="Enable Spooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="30" name="LinkTestInterval" description="Link Test Interval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="Enabled" name="DefaultCommunicationState" description="Default Communication State" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="Online" name="DefaultControlState" description="Default Control State" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="Local" name="DefaultControlSubState" description="Default Control SubState" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="DeviceId" description="Device ID" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="LP1DefaultAccessMode" description="LP1 Default Access Mode" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="LP2DefaultAccessMode" description="LP2 Default Access Mode" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="LP1DefaultTransferState" description="LP1 Default Transfer State" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="LP2DefaultTransferState" description="LP2 Default Transfer State" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="LP1BypassCarrierIDReader" description="LP1 Bypass CarrierID Reader" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="LP2BypassCarrierIDReader" description="LP2 Bypass CarrierID Reader" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
- <configs name="E84">
- <config default="30" name="TP1" description="TP1 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="TP2" description="TP2 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="TP3" description="TP3 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="TP4" description="TP4 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="TP5" description="TP5 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="TP6" description="TP6 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- </configs>
- <configs name="Minics">
- <config default="127.0.0.1" name="ip" description="ip" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="50052" name="port" description="port" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="config1" description="config1" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="2" name="config2" description="config2" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="3" name="config3" description="config3" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableMinics" description="" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
- </configs>
- <configs name="FFU" visible="false">
- <config default="350" name="LSPEED" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="2500" name="HSPEED" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <configs name="FFU1">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU2">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU3">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU4">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU5">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU6">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU7">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU8">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU9">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU10">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU11">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU12">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU13">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU14">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU15">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU16">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU17">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="FFU18">
- <config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- </configs>
- <configs name="WaferRobot">
- <config default="10" name="PickTimeout" description="Pick Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="HomeTimeout" description="Home Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="MotionTimeout" description="Motion Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="127.0.0.1:10001" name="Address" description="Robot ip,default 192.168.250.35:13000" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="10" name="PlaceTimeout" description="Place Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="ExtendTimeout" description="Extend Time Out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
- <config default="10" name="RetractTimeout" description="Retract Time Out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
- <config default="10" name="ConnectTimeout" description="Connect Time Out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="true" name="IsSupport5Wafer" description="Is Support 5 Wafer" max="" min="" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="Blade1Enable" description="Blade1 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="true" name="Blade2Enable" description="Blade2 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="4" name="Blade2Slots" description="Slot数目" max="5" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="10" name="RobotSpeed" description="Robot速度, 1-100百分比" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="RobotCommunicationToken" description="Robot Communication Token" max="9999999" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
- <config default="true" name="DualBlade1TransferEnable" description="Dual Blade1 Transfer Enable" max="0" min="0" paramter="" tag="" unit="" visible="false" type="Bool" />
- <config default="5" name="SlotCount" description="Slot Count" max="9" min="1" paramter="" tag="" unit="" visible="false" type="Integer" />
- <config default="false" name="EnableLogMessage" description="Enable Log Message" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="BypassFIMSMap" description="Bypass FIMS Map" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="false" name="TransferMode" description="Transfer Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="TransferModeNumber" description="Transfer Mode Number" max="10000" min="1" paramter="" tag="" unit="次" type="Integer" />
- </configs>
- <configs name="CarrierRobot">
- <config default="Sunway" name="RobotType" description="Robot Type" max="" min="" paramter="Sunway" tag="ReadOnlySelection" unit="" type="String" />
- <config default="10" name="PickTimeout" description="Pick Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="HomeTimeout" description="Home Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="MotionTimeout" description="Motion Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="127.0.0.1:10002" name="Address" description="Robot ip,default 192.168.250.32:13000" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="10" name="PlaceTimeout" description="Place Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="10" name="ExtendTimeout" description="Extend Time Out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
- <config default="10" name="RetractTimeout" description="Retract Time Out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
- <config default="10" name="ConnectTimeout" description="Connect Time Out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="true" name="Blade1Enable" description="Blade1 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="true" name="Blade2Enable" description="Blade2 Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="1" name="Blade2Slots" description="Slot数目" max="5" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="10" name="RobotSpeed" description="Robot速度, 1-100百分比" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="RobotCommunicationToken" description="Robot Communication Token" max="9999999" min="0" paramter="" tag="" unit="" visible="false" type="Integer" />
- <config default="true" name="DualBlade1TransferEnable" description="Dual Blade1 Transfer Enable" max="0" min="0" paramter="" tag="" unit="" visible="false" type="Bool" />
- <config default="1" name="SlotCount" description="Slot Count" max="9" min="1" paramter="" tag="" unit="" visible="false" type="Integer" />
- <config default="false" name="EnableLogMessage" description="Enable Log Message" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="TransferMode" description="Transfer Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="TransferModeNumber" description="Transfer Mode Number" max="10000" min="1" paramter="" tag="" unit="次" type="Integer" />
- <config default="1" name="RunToRunNumber" description="Run To Run Number" max="10000" min="1" paramter="" tag="" unit="次" type="Integer" />
- <config default="false" name="RunToRunMode" description="Run To Run Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="FIMS">
- <config default="192.168.38.11:1102" name="Address" description="Robot ip,default 192.168.38.11:1102" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="EnableLogMessage" description="Enable Log Message" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <configs name="FIMS1">
- <config default="30" name="HomeTimeout" description="Home Time Out" max="120" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="MotionTimeout" description="Motion Time Out" max="120" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="3" name="CycleCount" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="IsOnline" description="Is Online" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
- </configs>
- <configs name="FIMS2">
- <config default="30" name="HomeTimeout" description="Home Time Out" max="120" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="MotionTimeout" description="Motion Time Out" max="120" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="3" name="CycleCount" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="IsOnline" description="Is Online" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false" />
- </configs>
- </configs>
- <configs name="LoadPort">
- <config default="Lower" name="LoadPortPosition" description="LoadPort Position" max="" min="" paramter="Upper;Lower" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
- <config default="25" name="SlotCount" description="Slot Count" max="30" min="1" paramter="" tag="" unit="" visible="false" type="Integer" />
- <configs name="LoadPortSwitch" visible="false">
- <config default="true" name="AccessSwitchPressedBeforeCarrierIn" description="Access Switch Pressed Before Carrier In" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="AccessSwitchPressedAfterCarrierIn" description="M Wafer Count After Process" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="AccessSwitchPressedBeforeCarrierOut" description="Access Switch Pressed Before Carrier Out" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="AccessSwitchPressedAfterCarrierOut" description="Access Switch Pressed After Carrier Out" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="Continue" name="OperationSwitchPressedAfterCarrierOut" description="Operation Switch Pressed After Carrier Out" max="" min="" paramter="Alarm;Continue" tag="ReadOnlySelection" unit="" type="String" />
- <config default="10" name="AccessSwitchTimeout" description="Access Switch Timeout" max="600" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="CarrierInOrOutDelayTime" description="Carrier In Or Out Delay Time" max="600" min="0" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <configs name="LP1">
- <config default="UseReadID" name="CarrierIDReaderSetting" description="Carrier ID Reader Setting" max="" min="" paramter="UseReadID;UseReservedID;ReadWithReservedIDCheck" tag="ReadOnlySelection" unit="" type="String" />
- <config default="UseReservedID" name="BypassReadID" description="Bypass Read ID" max="" min="" paramter="WaitIndication;UseReservedID" tag="ReadOnlySelection" unit="" type="String" />
- <config default="30" name="MotionTimeout" description="motion time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="HomeTimeout" description="home time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="COM10" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="False" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:8001" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false" />
- <config default="1" name="InfoPadType" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableAutoLock" description="EnableAutoLockWhenCassetteArrived" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoCarrierIdRead" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoUnload" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="BypassCarrierIDReader" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CloseDoorWhenIdle" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="NeedMoveToReadCarrierID" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="PLInService" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="DataReadSize" description="RFID Read Size" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="StartPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1" name="DefaultPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1" name="RFIDNoteNo" description="RFID NoteNo" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- </configs>
- <configs name="LP2">
- <config default="UseReadID" name="CarrierIDReaderSetting" description="Carrier ID Reader Setting" max="" min="" paramter="UseReadID;UseReservedID;ReadWithReservedIDCheck" tag="ReadOnlySelection" unit="" type="String" />
- <config default="UseReservedID" name="BypassReadID" description="Bypass Read ID" max="" min="" paramter="WaitIndication;UseReservedID" tag="ReadOnlySelection" unit="" type="String" />
- <config default="30" name="MotionTimeout" description="motion time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="HomeTimeout" description="home time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="COM11" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="False" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:8001" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false" />
- <config default="1" name="InfoPadType" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableAutoLock" description="EnableAutoLockWhenCassetteArrived" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoCarrierIdRead" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoUnload" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="BypassCarrierIDReader" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CloseDoorWhenIdle" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="NeedMoveToReadCarrierID" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="PLInService" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="DataReadSize" description="RFID Read Size" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="StartPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1" name="DefaultPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="2" name="RFIDNoteNo" description="RFID NoteNo" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- </configs>
- <configs name="LP3">
- <config default="UseReadID" name="CarrierIDReaderSetting" description="Carrier ID Reader Setting" max="" min="" paramter="UseReadID;UseReservedID;ReadWithReservedIDCheck" tag="ReadOnlySelection" unit="" type="String" />
- <config default="UseReservedID" name="BypassReadID" description="Bypass Read ID" max="" min="" paramter="WaitIndication;UseReservedID" tag="ReadOnlySelection" unit="" type="String" />
- <config default="30" name="MotionTimeout" description="motion time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="HomeTimeout" description="home time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="COM11" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="False" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:8001" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false" />
- <config default="1" name="InfoPadType" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableAutoLock" description="EnableAutoLockWhenCassetteArrived" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoCarrierIdRead" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoUnload" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="BypassCarrierIDReader" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CloseDoorWhenIdle" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="NeedMoveToReadCarrierID" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="PLInService" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="DataReadSize" description="RFID Read Size" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="StartPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1" name="DefaultPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="3" name="RFIDNoteNo" description="RFID NoteNo" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- </configs>
- <configs name="LP4">
- <config default="UseReadID" name="CarrierIDReaderSetting" description="Carrier ID Reader Setting" max="" min="" paramter="UseReadID;UseReservedID;ReadWithReservedIDCheck" tag="ReadOnlySelection" unit="" type="String" />
- <config default="UseReservedID" name="BypassReadID" description="Bypass Read ID" max="" min="" paramter="WaitIndication;UseReservedID" tag="ReadOnlySelection" unit="" type="String" />
- <config default="30" name="MotionTimeout" description="motion time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="HomeTimeout" description="home time out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="COM11" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="False" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:8001" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false" />
- <config default="1" name="InfoPadType" description="InfoPadType,0=TDK,1=Ext,2=FixedbySC" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableAutoLock" description="EnableAutoLockWhenCassetteArrived" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoCarrierIdRead" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoUnload" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="BypassCarrierIDReader" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CloseDoorWhenIdle" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="NeedMoveToReadCarrierID" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="PLInService" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="DataReadSize" description="RFID Read Size" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="StartPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1" name="DefaultPage" description="RFID Read Start Page" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="4" name="RFIDNoteNo" description="RFID NoteNo" max="16" min="1" paramter="" tag="" unit="" type="Integer" visible="false"/>
- </configs>
- </configs>
- <configs name="CarrierID">
- <config default="1:N" name="CarrierIdReaderProtocolType" description="Protocol" max="" min="" paramter="1:1;1:N" tag="ReadOnlySelection" unit="" type="String"/>
- <configs name="RFIDReader1">
- <config default="COM10" name="PortName" description="Carrier ID COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:7090" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" visible="false"/>
- </configs>
- </configs>
- <configs name="Boat">
- <config default="30" name="MotionTimeout" description="Motion Time Out" max="12000" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="2" name="ZAxisUpSpeed" description="Z Up Speed" max="100000" min="0" paramter="" tag="" unit="mm/s" type="Double" />
- <config default="2" name="ZAxisDownSpeed" description="Z Down Speed" max="100000" min="0" paramter="" tag="" unit="mm/s" type="Double" />
- <config default="0" name="ZMinPosition" description="Z Min Position" max="100000" min="-100000" paramter="" tag="" unit="mm" type="Integer" visible="false" />
- <config default="1000" name="ZMaxPosition" description="Z Max Position" max="100000" min="-100000" paramter="" tag="" unit="mm" type="Integer" visible="false" />
- <config default="2" name="RAxisSpeed" description="R Axis Speed" max="100000" min="0" paramter="" tag="" unit="r/min" type="Double" />
- <config default="2" name="RAxisInterval" description="R Axis Interval" max="100000" min="0" paramter="" tag="" unit="r/min" type="Double" />
- <config default="143" name="SlotCount" description="Boat Slot Count" max="150" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="CycleCount" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="IntervalTime" description="Interval Time" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
- <configs name="BoatElevatorServo">
- <config default="30" name="MotionTimeout" description="Motion Time Out" max="12000" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="3" name="CycleCount" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="IntervalTime" description="Interval Time" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
- <config default="0" name="Position1" description="Position1" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position2" description="Position2" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position3" description="Position3" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position4" description="Position4" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position5" description="Position5" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position6" description="Position6" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position7" description="Position7" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position8" description="Position8" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position9" description="Position9" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position10" description="Position10" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="10" name="MoveSpeed" description="MoveSpeed" max="100000" min="-100000" paramter="" tag="" unit="mm/min" type="Double" visible="false"/>
- <config default="10" name="Acc" description="Acc" max="100000" min="-100000" paramter="" tag="" unit="mm/min" type="Double" visible="false"/>
- <config default="10" name="Dec" description="Dec" max="100000" min="-100000" paramter="" tag="" unit="mm/min" type="Double" visible="false"/>
- </configs>
- <configs name="BoatRotationServo">
- <config default="30" name="MotionTimeout" description="Motion Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="3" name="CycleCount" description="Cycle Count" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="RotateTime" description="RotateTime" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
- <config default="1" name="IntervalTime" description="Interval Time" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
- <config default="0" name="Position1" description="Position1" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position2" description="Position2" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position3" description="Position3" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position4" description="Position4" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position5" description="Position5" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position6" description="Position6" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position7" description="Position7" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position8" description="Position8" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position9" description="Position9" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position10" description="Position10" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="10" name="MoveSpeed" description="MoveSpeed" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="10" name="Acc" description="Acc" max="100000" min="-100000" paramter="" tag="" unit="mm/min" type="Double" visible="false"/>
- <config default="10" name="Dec" description="Dec" max="100000" min="-100000" paramter="" tag="" unit="mm/min" type="Double" visible="false"/>
- </configs>
- <configs name="AutoShutter">
- <config default="60" name="MotionTimeout" description="Motion Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="60" name="CycleCount" description="Cycle Count" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- </configs>
- <configs name="BufferServo">
- <config default="30" name="MotionTimeout" description="Motion Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="0" name="Position1" description="Position1" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position2" description="Position2" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position3" description="Position3" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position4" description="Position4" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position5" description="Position5" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position6" description="Position6" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position7" description="Position7" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position8" description="Position8" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position9" description="Position9" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="Position10" description="Position10" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- <config default="0" name="MoveSpeed" description="MoveSpeed" max="100000" min="-100000" paramter="" tag="" unit="" type="Double" visible="false"/>
- </configs>
- <configs name="PM1" display="Parameter">
- <!--是否开启Recipe 关联N2PurgeMode/ATMMode功能-->
- <config default="true" name="RecipeRelevancyN2Purge" description="Is Open Recipe Relevancy N2Purge" max="" min="" paramter="true;false" tag="ReadOnlySelection" unit="" type="Bool" />
- <config default="" name="SelectN2PurgeMode" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="Furnace" name="RecipeChamberType" description="Recipe Chamber Type" max="" min="" paramter="" tag="" unit="" type="String" />
- <!--<config default="147" name="SlotCount" description="Cassette Slot Count" max="150" min="1" paramter="" tag="" unit="" type="Integer" />-->
- <config default="10" name="HomeTimeout" description="Home Time Out" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="false" name="IsAIAOFloatType" description="Is AI AO Float Type" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="" name="AlarmCondition" description="Alarm Condition" tag="" unit="" type="String" visible="false"/>
- <config default="" name="AlarmConditionIndex" description="Alarm ConditionIndex" tag="" unit="" type="String" visible="false"/>
- <config default="" name="TempCorrection" description="Temp Correction" tag="" unit="" type="String" visible="false"/>
- <config default="" name="TempPID" description="Temp PID" tag="" unit="" type="String" visible="false"/>
- <config default="" name="TempProfile" description="Temp Profile" tag="" unit="" type="String" visible="false"/>
- <config default="" name="LeakCheckCondition" description="Leak Check Condition" tag="" unit="" type="String" visible="false"/>
- <config default="" name="TempAutoPID" description="Temp Auto PID" unit="" type="String" visible="false"/>
- <config default="" name="APCPID" description="APCP ID" tag="" unit="" type="String" visible="false"/>
- <config default="" name="APCPIDControllerID" description="APCP ID ControllerID" tag="" unit="" type="String" visible="false"/>
- <config default="" name="ProcessRecipe" description="Process Recipe" tag="" unit="" type="String" visible="false"/>
- <config default="%fs" name="AUXAlarmCondtionUnit" description="AUX Alarm Condtion Unit" max="" min="" paramter="%fs;%sv" tag="ReadOnlySelection" unit="" type="String" />
- <config default="%fs" name="MFCAlarmCondtionUnit" description="MFC Alarm Condtion Unit" max="" min="" paramter="%fs;%sv" tag="ReadOnlySelection" unit="" type="String" />
- <config default="false" name="IsF2ClnOn" description="IsF2ClnOn" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsHFClnOn" description="IsHFClnOn" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsDEPOOn" description="IsDEPOOn" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsCEXHEnable" description="IsCEXHEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsF2Enable" description="IsF2Enable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsDEPOEnable" description="IsDEPOEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsSIZEROEnable" description="IsSIZEROEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsCZEROEnable" description="IsCZEROEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsNZEROEnable" description="IsNZEROEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsSIMNTEnable" description="IsSIMNTEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsCMNTEnable" description="IsCMNTEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsNMNTEnable" description="IsNMNTEnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsDP1Enable" description="IsDP1Enable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsDP2Enable" description="IsDP2Enable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsDPREnable" description="IsDPREnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsBWREnable" description="IsBWREnable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsHTR1Enable" description="IsHTR1Enable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsHTR2Enable" description="IsHTR2Enable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="IsHTR3Enable" description="IsHTR3Enable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
- <configs name="RfPower">
- </configs>
- <configs name="RfMatch">
- </configs>
- <configs name="N2Purge" visible="false">
- <config default="1" name="TransferRoomArrivalWaitTime" description="LA O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="1" name="TransferRoomStableWaitTime" description="LA O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="1" name="FOUPOpenerArrivalWaitTime" description="FOUP O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="1" name="FOUPOpenerStableWaitTime" description="FOUP O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="1" name="O2DetectorTransferRoomToFOUPTime" description="Exchange LA TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="1" name="O2DetectorFOUPToTransferRoomTime" description="Exchange FOUP TO LA WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="1" name="O2DetectorFOUPToFOUPTime" description="FOUP TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- <config default="0" name="N2PurgeFOUPO2CheckSV" description="FOUP O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
- <config default="0" name="N2PurgeLAO2CheckSV" description=" LA O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
- <configs name="FoupEnter">
- <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="FOUPN2PurgeCancelEnable" description="FOUP N2 Purge Cancel Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- </configs>
- <configs name="WaferCharge">
- <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- </configs>
- <configs name="WaferDischarge">
- <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- </configs>
- <configs name="BoatLoad">
- <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="EAxisInhibitEnable" description="E Axis Inhibit Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When boatloading" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep boatloading Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- </configs>
- <configs name="FoupInhibit">
- <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable After BoatLoad" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="1" name="FoupInhibitTime" description="FOUP TO FOUP WaitTime After BoatLoad" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
- </configs>
- <configs name="BoatUnLoad">
- <config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable Before Boat Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable Before Boat Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="EAxisInhibitEnable" description="E Axis Inhibit Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When boatUnloading" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep boatloading Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- </configs>
- <configs name="WaferCooling">
- <config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When Wafer Cooling" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- </configs>
- <configs name="Manual_phase1" visible="false">
- <config type="Double" default="800" name="MFC51" />
- <config type="Bool" default="true" name="ValveAV56" />
- <config type="Bool" default="true" name="ValveAV57" />
- <config type="Bool" default="false" name="ValveAV65" />
- <config type="Bool" default="false" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveSV227" />
- <config type="Bool" default="false" name="ValveAV202" />
- <config type="Bool" default="false" name="ValveAV201" />
- <config type="Bool" default="true" name="TrigMS501" />
- <config type="Bool" default="false" name="TrigMS520" />
- <config type="Bool" default="false" name="TrigMS521" />
- <config type="Bool" default="false" name="TrigMS522" />
- </configs>
- <configs name="Manual_phase2" visible="false">
- <config type="Double" default="400" name="MFC51" />
- <config type="Bool" default="true" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="false" name="ValveAV65" />
- <config type="Bool" default="false" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveSV227" />
- <config type="Bool" default="false" name="ValveAV202" />
- <config type="Bool" default="false" name="ValveAV201" />
- <config type="Bool" default="true" name="TrigMS501" />
- <config type="Bool" default="false" name="TrigMS520" />
- <config type="Bool" default="false" name="TrigMS521" />
- <config type="Bool" default="false" name="TrigMS522" />
- </configs>
- <configs name="Manual_phase3" visible="false">
- <config type="Double" default="200" name="MFC51" />
- <config type="Bool" default="false" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="true" name="ValveAV65" />
- <config type="Bool" default="true" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveSV227" />
- <config type="Bool" default="false" name="ValveAV202" />
- <config type="Bool" default="true" name="ValveAV201" />
- <config type="Bool" default="true" name="TrigMS501" />
- <config type="Bool" default="true" name="TrigMS520" />
- <config type="Bool" default="true" name="TrigMS521" />
- <config type="Bool" default="true" name="TrigMS522" />
- </configs>
- <configs name="Manual_phase4" visible="false">
- <config type="Bool" default="false" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="true" name="ValveAV65" />
- <config type="Bool" default="true" name="ValveAV66" />
- <config type="Bool" default="false" name="ValveSV227" />
- <config type="Bool" default="true" name="ValveAV202" />
- <config type="Bool" default="false" name="ValveAV201" />
- <config type="Bool" default="false" name="TrigMS501" />
- <config type="Bool" default="false" name="TrigMS520" />
- <config type="Bool" default="false" name="TrigMS521" />
- <config type="Bool" default="false" name="TrigMS522" />
- </configs>
- <configs name="N2PurgeAIRTo20PPM" visible="false">
- <config type="Bool" default="true" name="ValveAV56" />
- <config type="Bool" default="true" name="ValveAV57" />
- <config type="Bool" default="false" name="ValveAV65" />
- <config type="Bool" default="false" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveLADamper" />
- <config type="Bool" default="false" name="ValveAV58" />
- <config type="Bool" default="false" name="ValveAV59" />
- <config type="Bool" default="false" name="ValveFIMS1N2Purge" />
- <config type="Bool" default="false" name="ValveFIMS2N2Purge" />
- <config type="Bool" default="false" name="ValveSV61" />
- <config type="Bool" default="false" name="ValveSV62" />
- <config type="Bool" default="false" name="ValveAV201" />
- </configs>
- <configs name="N2PurgeUnder20PPM" visible="false">
- <config type="Bool" default="true" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="false" name="ValveAV65" />
- <config type="Bool" default="false" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveLADamper" />
- <config type="Bool" default="false" name="ValveAV58" />
- <config type="Bool" default="false" name="ValveAV59" />
- <config type="Bool" default="false" name="ValveFIMS1N2Purge" />
- <config type="Bool" default="false" name="ValveFIMS2N2Purge" />
- <config type="Bool" default="false" name="ValveSV61" />
- <config type="Bool" default="false" name="ValveSV62" />
- <config type="Bool" default="false" name="ValveAV201" />
- </configs>
- <configs name="AIR" visible="false">
- <config type="Bool" default="false" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="true" name="ValveAV65" />
- <config type="Bool" default="true" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveLADamper" />
- <config type="Bool" default="false" name="ValveAV58" />
- <config type="Bool" default="false" name="ValveAV59" />
- <config type="Bool" default="false" name="ValveFIMS1N2Purge" />
- <config type="Bool" default="false" name="ValveFIMS2N2Purge" />
- <config type="Bool" default="false" name="ValveSV61" />
- <config type="Bool" default="false" name="ValveSV62" />
- <config type="Bool" default="true" name="ValveAV201" />
- </configs>
- <configs name="DoorOpen" visible="false">
- <config type="Bool" default="false" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="true" name="ValveAV65" />
- <config type="Bool" default="true" name="ValveAV66" />
- <config type="Bool" default="false" name="ValveLADamper" />
- <config type="Bool" default="false" name="ValveAV58" />
- <config type="Bool" default="false" name="ValveAV59" />
- <config type="Bool" default="false" name="ValveFIMS1N2Purge" />
- <config type="Bool" default="false" name="ValveFIMS2N2Purge" />
- <config type="Bool" default="false" name="ValveSV61" />
- <config type="Bool" default="false" name="ValveSV62" />
- <config type="Bool" default="true" name="ValveAV201" />
- </configs>
- <configs name="Foup1" visible="false">
- <config type="Bool" default="true" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="false" name="ValveAV65" />
- <config type="Bool" default="false" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveLADamper" />
- <config type="Bool" default="true" name="ValveAV58" />
- <config type="Bool" default="false" name="ValveAV59" />
- <config type="Bool" default="true" name="ValveFIMS1N2Purge" />
- <config type="Bool" default="false" name="ValveFIMS2N2Purge" />
- <config type="Bool" default="true" name="ValveSV61" />
- <config type="Bool" default="false" name="ValveSV62" />
- <config type="Bool" default="false" name="ValveAV201" />
- </configs>
- <configs name="Foup2" visible="false">
- <config type="Bool" default="true" name="ValveAV56" />
- <config type="Bool" default="false" name="ValveAV57" />
- <config type="Bool" default="false" name="ValveAV65" />
- <config type="Bool" default="false" name="ValveAV66" />
- <config type="Bool" default="true" name="ValveLADamper" />
- <config type="Bool" default="false" name="ValveAV58" />
- <config type="Bool" default="true" name="ValveAV59" />
- <config type="Bool" default="false" name="ValveFIMS1N2Purge" />
- <config type="Bool" default="true" name="ValveFIMS2N2Purge" />
- <config type="Bool" default="true" name="ValveSV61" />
- <config type="Bool" default="true" name="ValveSV62" />
- <config type="Bool" default="false" name="ValveAV201" />
- </configs>
- </configs>
- <configs name="Boat" visible="false">
- <config default="10" name="BoatMoveTimeout" description="Boat Move Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- <configs name="WaferCycleTime">
- <config default="true" name="IsEnableSDWaferUseCountWarning" description="Is Enable SD Wafer Use Count Warning" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="10" name="SDCountWarning" description="SD use count warning" max="10000" min="0" paramter="" tag="" unit="次" type="Integer" />
- <config default="20" name="SDCountAlarm" description="SD use count alarm" max="10000" min="0" paramter="" tag="" unit="次" type="Integer" />
- <config default="false" name="IsEnableSDWaferUseTimeWarning" description="Is Enable SD Wafer Use Time Warning" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="5" name="SDTimeWarning" description="SD use time warning" max="10000" min="0" paramter="" tag="" unit="hour" type="Double" />
- <config default="8" name="SDTimeAlarm" description="SD use time alarm" max="10000" min="0" paramter="" tag="" unit="hour" type="Double" />
- <config default="false" name="IsEnableSDWaferThicknessWarning" description="Is Enable SD Wafer Thickness Warning" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="990" name="SDThicknessWarning" description="SD use thickness warning" max="10000" min="0" paramter="" tag="" unit="nm" type="Double" />
- <config default="1200" name="SDThicknessAlarm" description="SD use thickness alarm" max="10000" min="0" paramter="" tag="" unit="nm" type="Double" />
- <config default="true" name="IsEnableEDWaferUseCountWarning" description="Is Enable ED Wafer Use Count Warning" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="10" name="EDCountWarning" description="ED use count warning" max="10000" min="0" paramter="" tag="" unit="次" type="Integer" />
- <config default="20" name="EDCountAlarm" description="ED use count alarm" max="10000" min="0" paramter="" tag="" unit="次" type="Integer" />
- <config default="false" name="IsEnableEDWaferUseTimeWarning" description="Is Enable ED Wafer Use Time Warning" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="5" name="EDTimeWarning" description="ED use time warning" max="10000" min="0" paramter="" tag="" unit="hour" type="Double" />
- <config default="8" name="EDTimeAlarm" description="ED use time alarm" max="10000" min="0" paramter="" tag="" unit="hour" type="Double" />
- <config default="false" name="IsEnableEDWaferThicknessWarning" description="Is Enable ED Wafer Thickness Warning" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
- <config default="990" name="EDThicknessWarning" description="ED use thickness warning" max="10000" min="0" paramter="" tag="" unit="nm" type="Double" />
- <config default="1200" name="EDThicknessAlarm" description="ED use thickness alarm" max="10000" min="0" paramter="" tag="" unit="nm" type="Double" />
- </configs>
- <configs name="APC">
- <config default="10" name="PressureScale" description="Pressure Scale" max="1000000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- <config default="Torr" name="PressureUnit" description="Pressure Unit" max="" min="" paramter="Torr;Pa" tag="ReadOnlySelection" unit="" type="String" />
- <config default="%" name="AngleAlarmCondtionUnit" description="Angle Alarm Condtion Unit" max="" min="" paramter="%;%d" tag="ReadOnlySelection" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="1" name="SlowExhRate" description="SlowExhRate" max="100" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="ValveStatusThreshold" description="ValveStatusThreshold" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="0" name="SlowVacuumModeSetting" description="SlowVacuumModeSetting" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="0" name="Interlock1" description="Interlock1" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="0" name="Interlock2" description="Interlock2" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="0" name="Interlock3" description="Interlock3" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="0" name="InterlockConstantOfInterlock3" description="InterlockConstantOfInterlock3" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="0" name="P1SensorOffsetSetting" description="P1SensorOffsetSetting" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="0" name="PosMonOffsetSetting" description="PosMonOffsetSetting" max="10000" min="-10000" paramter="" tag="" unit="" type="Double" visible="false" />
- <configs name="VG1">
- <config default="10" name="PressureScale" description="Pressure Scale" max="1000000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- </configs>
- <configs name="VG2">
- <config default="1000" name="PressureScale" description="Pressure Scale" max="1000000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- </configs>
- </configs>
- <configs name="MFM">
- <configs name="MFM1" display="MFM1">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM1" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM6" display="MFM6">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM6" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM7" display="MFM7">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM7" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM8" display="MFM8">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM8" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM9" display="MFM9">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM9" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM11" display="MFM11">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM11" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM12" display="MFM12">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM12" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM13" display="MFM13">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM13" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM16" display="MFM16">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM16" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="MFM57" display="MFM57">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFM57" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="true" name="IsMFMInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- </configs>
- <configs name="MFC">
- <config default="COM18" name="Address" description="MFC serial port name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="false" name="EnableLogMessage" description="Enable log message" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="3" name="ReconnectCount" description="MFC reconnect count" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
- <configs name="MFC1" display="MFC1">
- <config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC1" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="01" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC2" display="MFC2">
- <config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC2" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="02" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC3" display="MFC3">
- <config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC3" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="03" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC4" display="MFC4">
- <config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC4" name="GasName" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="04" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC5" display="MFC5">
- <config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC5" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="05" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC6" display="MFC6">
- <config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC6" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="06" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC7" display="MFC7">
- <config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC7" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="07" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC8" display="MFC8">
- <config default="3" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC8" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="08" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC9" display="MFC9">
- <config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC9" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="09" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC10" display="MFC10">
- <config default="10" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC10" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0A" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC11" display="MFC11">
- <config default="20" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC11" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0B" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC12" display="MFC12">
- <config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC12" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0C" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC13" display="MFC13">
- <config default="0.5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC13" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0D" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC14" display="MFC14">
- <config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC14" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0E" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC15" display="MFC15">
- <config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC15" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0F" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC16" display="MFC16">
- <config default="5" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC16" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC17" display="MFC17">
- <config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC17" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC31" display="MFC31">
- <config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC31" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC32" display="MFC32">
- <config default="1" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC32" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC51" display="MFC51">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC51" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="11" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="MFC57" display="MFC57">
- <config default="500" name="N2Scale" description="Scale" max="999999" min="0" paramter="" tag="" unit="slm" type="Double" />
- <config default="12000" name="PhyScale" description="Physical Scale" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="SLM" name="FlowUnit" description="Flow Unit" max="" min="" paramter="SCCM;SLM" tag="ReadOnlySelection" unit="" type="String" />
- <config default="MFC57" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="1" name="ScaleFactor" description="Scale Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false" />
- <config default="120" name="AlarmTime" description="Alarm Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="AlarmRange" description="Alarm Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="120" name="WarningTime" description="Warning Time" max="999999" min="0" paramter="" tag="" unit="s" type="Integer" visible="false" />
- <config default="1000" name="WarningRange" description="Warning Range" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="1" name="FlowRegulationFactor" description="Flow Regulation Factor" max="999999" min="0" paramter="" tag="" unit="" type="Double" visible="false" />
- <config default="true" name="IsMFCInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="Address" description="Address" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- </configs>
- <configs name="ChamberLiftPin" visible="false">
- <config default="10" name="MoveTimeout" description="Move Timeout" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- <configs name="ChamberDoor" visible="false">
- <config default="10" name="MoveTimeout" description="Move Timeout" max="120" min="0" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- <configs name="MainPump" visible="false">
- <config default="120" name="StartTimeout" description="Start Timeout" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="15" name="ResetErrorTimeout" description="Reset Error Timeout" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- <configs name="Heater">
- <config default="" name="PID" description="PID" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <configs name="HeaterU" display="Heater U">
- <config default="U" name="DisplayName" description="Display Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="2000" name="Range" description="Heater max value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="2000" name="OverTempRange" description="Over temp limit value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="10" name="RampRate" description="Ramp Rate" max="2000" min="0" paramter="" tag="" unit="°C/min" type="Double" />
- <config default="0" name="TemperatureOffset" description="Temperature Offset" max="2000" min="-2000" paramter="" tag="" unit="°C" type="Double" />
- <config default="TOP" name="AssociateParameterTable" description="Associate parameter table" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="Outer" name="InstallPosition" description="Install position" max="" min="" paramter="Inner;Outer" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
- <config default="0" name="Proportioning" description="PID中的P参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Integral" description="PID中的I参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Derivative" description="PID中的D参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="1451" name="ToleranceAlarmID" description="Tolerance Alarm ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1461" name="ToleranceWarningID" description="Tolerance Warning ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="HeaterCU" display="Heater CU">
- <config default="CU" name="DisplayName" description="Display Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="2000" name="Range" description="Heater max value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="2000" name="OverTempRange" description="Over temp limit value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="10" name="RampRate" description="Ramp Rate" max="2000" min="0" paramter="" tag="" unit="°C/min" type="Double" />
- <config default="0" name="TemperatureOffset" description="Temperature Offset" max="2000" min="-2000" paramter="" tag="" unit="°C" type="Double" />
- <config default="C3" name="AssociateParameterTable" description="Associate parameter table" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="Outer" name="InstallPosition" description="Install position" max="" min="" paramter="Inner;Outer" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
- <config default="0" name="Proportioning" description="PID中的P参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Integral" description="PID中的I参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Derivative" description="PID中的D参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="1453" name="ToleranceAlarmID" description="Tolerance Alarm ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1463" name="ToleranceWarningID" description="Tolerance Warning ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="HeaterC" display="Heater C">
- <config default="C" name="DisplayName" description="Display Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="2000" name="Range" description="Heater max value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="2000" name="OverTempRange" description="Over temp limit value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="10" name="RampRate" description="Ramp Rate" max="2000" min="0" paramter="" tag="" unit="°C/min" type="Double" />
- <config default="0" name="TemperatureOffset" description="Temperature Offset" max="2000" min="-2000" paramter="" tag="" unit="°C" type="Double" />
- <config default="C2" name="AssociateParameterTable" description="Associate parameter table" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="Outer" name="InstallPosition" description="Install position" max="" min="" paramter="Inner;Outer" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
- <config default="0" name="Proportioning" description="PID中的P参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Integral" description="PID中的I参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Derivative" description="PID中的D参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="1455" name="ToleranceAlarmID" description="Tolerance Alarm ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1465" name="ToleranceWarningID" description="Tolerance Warning ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="HeaterCL" display="Heater CL">
- <config default="CL" name="DisplayName" description="Display Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="2000" name="Range" description="Heater max value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="2000" name="OverTempRange" description="Over temp limit value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="10" name="RampRate" description="Ramp Rate" max="2000" min="0" paramter="" tag="" unit="°C/min" type="Double" />
- <config default="0" name="TemperatureOffset" description="Temperature Offset" max="2000" min="-2000" paramter="" tag="" unit="°C" type="Double" />
- <config default="C1" name="AssociateParameterTable" description="Associate parameter table" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="Outer" name="InstallPosition" description="Install position" max="" min="" paramter="Inner;Outer" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
- <config default="0" name="Proportioning" description="PID中的P参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Integral" description="PID中的I参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Derivative" description="PID中的D参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="1457" name="ToleranceAlarmID" description="Tolerance Alarm ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1467" name="ToleranceWarningID" description="Tolerance Warning ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- <configs name="HeaterL" display="Heater L">
- <config default="L" name="DisplayName" description="Display Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="2000" name="Range" description="Heater max value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="2000" name="OverTempRange" description="Over temp limit value" max="2000" min="0" paramter="" tag="" unit="°C" type="Double" />
- <config default="10" name="RampRate" description="Ramp Rate" max="2000" min="0" paramter="" tag="" unit="°C/min" type="Double" />
- <config default="0" name="TemperatureOffset" description="Temperature Offset" max="2000" min="-2000" paramter="" tag="" unit="°C" type="Double" />
- <config default="BTM" name="AssociateParameterTable" description="Associate parameter table" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="Outer" name="InstallPosition" description="Install position" max="" min="" paramter="Inner;Outer" tag="ReadOnlySelection" unit="" type="String" visible="false"/>
- <config default="0" name="Proportioning" description="PID中的P参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Integral" description="PID中的I参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="0" name="Derivative" description="PID中的D参数" max="" min="" paramter="" tag="" unit="" type="String" visible="false"/>
- <config default="1459" name="ToleranceAlarmID" description="Tolerance Alarm ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="1469" name="ToleranceWarningID" description="Tolerance Warning ID" max="10000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
- <config default="0" name="SetLastPoint" description="Set Point" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- <config default="0" name="SetLastRamping" description="Set Ramping" max="999999" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false" />
- </configs>
- </configs>
- <!--<configs name="AUX">
- <config default="1" name="AO_Unit1CH1EnableIn" description="Unit1-CH1" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH2EnableIn" description="Unit1-CH2" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH3EnableIn" description="Unit1-CH3" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH4EnableIn" description="Unit1-CH4" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH5EnableIn" description="Unit1-CH5" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH6EnableIn" description="Unit1-CH6" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH7EnableIn" description="Unit1-CH7" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH8EnableIn" description="Unit1-CH8" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH9EnableIn" description="Unit1-CH9" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH10EnableIn" description="Unit1-CH10" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH11EnableIn" description="Unit1-CH11" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH12EnableIn" description="Unit1-CH12" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH13EnableIn" description="Unit1-CH13" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH14EnableIn" description="Unit1-CH14" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH15EnableIn" description="Unit1-CH15" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit1CH16EnableIn" description="Unit1-CH16" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH1EnableIn" description="Unit2-CH1" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH2EnableIn" description="Unit2-CH2" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH3EnableIn" description="Unit2-CH3" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH4EnableIn" description="Unit2-CH4" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH5EnableIn" description="Unit2-CH5" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH6EnableIn" description="Unit2-CH6" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH7EnableIn" description="Unit2-CH7" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH8EnableIn" description="Unit2-CH8" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH9EnableIn" description="Unit2-CH9" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH10EnableIn" description="Unit2-CH10" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH11EnableIn" description="Unit2-CH11" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH12EnableIn" description="Unit2-CH12" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH13EnableIn" description="Unit2-CH13" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH14EnableIn" description="Unit2-CH14" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH15EnableIn" description="Unit2-CH15" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit2CH16EnableIn" description="Unit2-CH16" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH1EnableIn" description="Unit3-CH1" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH2EnableIn" description="Unit3-CH2" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH3EnableIn" description="Unit3-CH3" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH4EnableIn" description="Unit3-CH4" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH5EnableIn" description="Unit3-CH5" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH6EnableIn" description="Unit3-CH6" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH7EnableIn" description="Unit3-CH7" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH8EnableIn" description="Unit3-CH8" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH9EnableIn" description="Unit3-CH9" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH10EnableIn" description="Unit3-CH10" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH11EnableIn" description="Unit3-CH11" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH12EnableIn" description="Unit3-CH12" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH13EnableIn" description="Unit3-CH13" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH14EnableIn" description="Unit3-CH14" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH15EnableIn" description="Unit3-CH15" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit3CH16EnableIn" description="Unit3-CH16" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH1EnableIn" description="Unit4-CH1" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH2EnableIn" description="Unit4-CH2" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH3EnableIn" description="Unit4-CH3" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH4EnableIn" description="Unit4-CH4" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH5EnableIn" description="Unit4-CH5" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH6EnableIn" description="Unit4-CH6" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH7EnableIn" description="Unit4-CH7" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH8EnableIn" description="Unit4-CH8" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH9EnableIn" description="Unit4-CH9" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH10EnableIn" description="Unit4-CH10" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH11EnableIn" description="Unit4-CH11" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH12EnableIn" description="Unit4-CH12" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH13EnableIn" description="Unit4-CH13" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH14EnableIn" description="Unit4-CH14" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH15EnableIn" description="Unit4-CH15" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- <config default="1" name="AO_Unit4CH16EnableIn" description="Unit4-CH16" paramter="" tag="" unit="" max="1" min="0" type="Integer" visible="true" />
- </configs>-->
- <configs name="RecipeEditParameter" visible="false" >
- <configs name="WaferRobotParameter">
- <configs name="Parameter">
- <configs name="P000">
- <config default="Z轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P001">
- <config default="TH轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="18000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P002">
- <config default="EX1轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P003">
- <config default="EX2轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P004">
- <config default="P轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P010">
- <config default="Z轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P011">
- <config default="TH轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="18000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P012">
- <config default="EX1轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P013">
- <config default="EX2轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P014">
- <config default="P轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P020">
- <config default="Z轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P021">
- <config default="TH轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="18000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P022">
- <config default="EX1轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="150000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P023">
- <config default="EX2轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="150000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P024">
- <config default="P轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P030">
- <config default="Z轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="440000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P031">
- <config default="TH轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P032">
- <config default="EX1轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P033">
- <config default="EX2轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P034">
- <config default="P轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P040">
- <config default="Z轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P041">
- <config default="TH轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="120000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P042">
- <config default="EX1轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P043">
- <config default="EX2轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P044">
- <config default="P轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P050">
- <config default="Z轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="440000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P051">
- <config default="TH轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P052">
- <config default="EX1轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P053">
- <config default="EX2轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P054">
- <config default="P轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P060">
- <config default="Z轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P061">
- <config default="TH轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="120000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P062">
- <config default="EX1轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P063">
- <config default="EX2轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P064">
- <config default="P轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P100">
- <config default="Z轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="70000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P101">
- <config default="TH轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="20000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P102">
- <config default="EX1轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="50000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P103">
- <config default="EX2轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="50000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P104">
- <config default="P轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P130">
- <config default="Z轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P131">
- <config default="TH轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P132">
- <config default="EX1轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P133">
- <config default="EX2轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P134">
- <config default="P轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P140">
- <config default="Z轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P141">
- <config default="TH轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P142">
- <config default="EX1轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P143">
- <config default="EX2轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P144">
- <config default="P轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P150">
- <config default="Z轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P151">
- <config default="TH轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P152">
- <config default="EX1轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P153">
- <config default="EX2轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P154">
- <config default="P轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P160">
- <config default="Z轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P161">
- <config default="TH轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P162">
- <config default="EX1轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P163">
- <config default="EX2轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P164">
- <config default="P轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P170">
- <config default="Z轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P171">
- <config default="TH轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P172">
- <config default="EX1轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P173">
- <config default="EX2轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P174">
- <config default="P轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P180">
- <config default="Z轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P181">
- <config default="TH轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P182">
- <config default="EX1轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P183">
- <config default="EX2轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P184">
- <config default="P轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P190">
- <config default="Z轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P191">
- <config default="TH轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P192">
- <config default="EX1轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P193">
- <config default="EX2轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P194">
- <config default="P轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P200">
- <config default="Z轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P201">
- <config default="TH轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P202">
- <config default="EX1轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P203">
- <config default="EX2轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P204">
- <config default="P轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P210">
- <config default="Z轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P211">
- <config default="TH轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P212">
- <config default="EX1轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P213">
- <config default="EX2轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P214">
- <config default="P轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P220">
- <config default="Z轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P221">
- <config default="TH轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P222">
- <config default="EX1轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P223">
- <config default="EX2轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P224">
- <config default="P轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P230">
- <config default="Z轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P231">
- <config default="TH轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P232">
- <config default="EX1轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P233">
- <config default="EX2轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P234">
- <config default="P轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P240">
- <config default="Z轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P241">
- <config default="TH轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P242">
- <config default="EX1轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P243">
- <config default="EX2轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P244">
- <config default="P轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P250">
- <config default="Z轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P251">
- <config default="TH轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P252">
- <config default="EX1轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P253">
- <config default="EX2轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P254">
- <config default="P轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P260">
- <config default="Z轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P261">
- <config default="TH轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P262">
- <config default="EX1轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P263">
- <config default="EX2轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P264">
- <config default="P轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P270">
- <config default="Z轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P271">
- <config default="TH轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P272">
- <config default="EX1轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P273">
- <config default="EX2轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P274">
- <config default="P轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P280">
- <config default="Z轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P281">
- <config default="TH轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P282">
- <config default="EX1轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P283">
- <config default="EX2轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P284">
- <config default="P轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P290">
- <config default="Z轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P291">
- <config default="TH轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P292">
- <config default="EX1轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P293">
- <config default="EX2轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P294">
- <config default="P轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P300">
- <config default="Z轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P301">
- <config default="TH轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P302">
- <config default="EX1轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P303">
- <config default="EX2轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P304">
- <config default="P轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P310">
- <config default="Z轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P311">
- <config default="TH轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P312">
- <config default="EX1轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P313">
- <config default="EX2轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P314">
- <config default="P轴HOST用有晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P320">
- <config default="Z轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P321">
- <config default="TH轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P322">
- <config default="EX1轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P323">
- <config default="EX2轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P324">
- <config default="P轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P330">
- <config default="Z轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P331">
- <config default="TH轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P332">
- <config default="EX1轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P333">
- <config default="EX2轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P334">
- <config default="P轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P340">
- <config default="Z轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P341">
- <config default="TH轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P342">
- <config default="EX1轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P343">
- <config default="EX2轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P344">
- <config default="P轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P350">
- <config default="Z轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P351">
- <config default="TH轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P352">
- <config default="EX1轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P353">
- <config default="EX2轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P354">
- <config default="P轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P360">
- <config default="Z轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P361">
- <config default="TH轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P362">
- <config default="EX1轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P363">
- <config default="EX2轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P364">
- <config default="P轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P400">
- <config default="Z轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="980000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P401">
- <config default="TH轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="140000" min="-100000" paramter="" type="Double" />
- <config default="0.01deg" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P402">
- <config default="EX1轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="475000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P403">
- <config default="EX2轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="475000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P404">
- <config default="P轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P410">
- <config default="Z轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P411">
- <config default="TH轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01deg" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P412">
- <config default="EX1轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P413">
- <config default="EX2轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P414">
- <config default="P轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P430">
- <config default="IO延时时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10" name="SetValue" description="" max="2000" min="0" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P440">
- <config default="晶圆扫描动作中示教位置的EX轴偏移" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="267300" name="SetValue" description="" max="300000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P441">
- <config default="晶圆扫描动作中示教位置的Z轴偏移" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="1000" name="SetValue" description="" max="50000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P442">
- <config default="晶圆扫描动作中突片检测偏移量" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="50000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P443">
- <config default="晶圆扫描动作中斜片范围" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="15" name="SetValue" description="" max="5000" min="0" paramter="" type="Double" />
- <config default="0.01%" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P444">
- <config default="晶圆扫描动作中单晶圆范围" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="140" name="SetValue" description="" max="5000" min="0" paramter="" type="Double" />
- <config default="0.01%" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P445">
- <config default="晶圆扫描动作中碟叠片晶圆范围" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250" name="SetValue" description="" max="5000" min="0" paramter="" type="Double" />
- <config default="0.01%" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P500">
- <config default="站1用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P501">
- <config default="站1用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P502">
- <config default="站1用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P504">
- <config default="站1用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P505">
- <config default="站1用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P520">
- <config default="站2用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P521">
- <config default="站2用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P522">
- <config default="站2用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P524">
- <config default="站2用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P525">
- <config default="站2用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P540">
- <config default="站3用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P541">
- <config default="站3用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P542">
- <config default="站3用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P544">
- <config default="站3用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P545">
- <config default="站3用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P560">
- <config default="站4用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P561">
- <config default="站4用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P562">
- <config default="站4用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P564">
- <config default="站4用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P565">
- <config default="站4用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P580">
- <config default="站5用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P581">
- <config default="站5用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P582">
- <config default="站5用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P584">
- <config default="站5用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P585">
- <config default="站5用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P600">
- <config default="站6用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P601">
- <config default="站6用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P602">
- <config default="站6用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P604">
- <config default="站6用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P605">
- <config default="站6用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P620">
- <config default="站7用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P621">
- <config default="站7用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P622">
- <config default="站7用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P624">
- <config default="站7用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P625">
- <config default="站7用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P640">
- <config default="站8用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P641">
- <config default="站8用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P642">
- <config default="站8用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P644">
- <config default="站8用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P645">
- <config default="站8用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P660">
- <config default="站9用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P661">
- <config default="站9用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P662">
- <config default="站9用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P664">
- <config default="站9用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P665">
- <config default="站9用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P680">
- <config default="站10用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P681">
- <config default="站10用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P682">
- <config default="站10用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P684">
- <config default="站10用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P685">
- <config default="站10用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P700">
- <config default="站11用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P701">
- <config default="站11用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P702">
- <config default="站11用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P704">
- <config default="站11用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P705">
- <config default="站11用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P720">
- <config default="站12用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P721">
- <config default="站12用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P722">
- <config default="站12用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P724">
- <config default="站12用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P725">
- <config default="站12用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- </configs>
- <configs name="PositionConfig">
- <configs name="C01">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C02">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C03">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C04">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C05">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C06">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C07">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C08">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C09">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C10">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C11">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C12">
- <config default="000" name="StParam" description="" max="" min="" paramter="000;001;004;005" type="String" />
- <config default="0" name="SetValue" description="" max="99999" min="-99999" paramter="" type="Double" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- </configs>
- <configs name="PositionAxis">
- <configs name="C01">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C02">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C03">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C04">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C05">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C06">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C07">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C08">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C09">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C10">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C11">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C12">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" min="-999999" paramter="" type="Double" />
- </configs>
- </configs>
- </configs>
- <configs name="CarrierRobotParameter">
- <configs name="Parameter">
- <configs name="P000">
- <config default="Z轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P001">
- <config default="TH轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="18000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P002">
- <config default="EX1轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P003">
- <config default="EX2轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P004">
- <config default="P轴TP用点动速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P010">
- <config default="Z轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P011">
- <config default="TH轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="18000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P012">
- <config default="EX1轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P013">
- <config default="EX2轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P014">
- <config default="P轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P020">
- <config default="Z轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P021">
- <config default="TH轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="18000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P022">
- <config default="EX1轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="150000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P023">
- <config default="EX2轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="150000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P024">
- <config default="P轴TP用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P030">
- <config default="Z轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="440000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P031">
- <config default="TH轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P032">
- <config default="EX1轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P033">
- <config default="EX2轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P034">
- <config default="P轴HOST用无晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P040">
- <config default="Z轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P041">
- <config default="TH轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="120000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P042">
- <config default="EX1轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P043">
- <config default="EX2轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P044">
- <config default="P轴HOST用有晶圆搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P050">
- <config default="Z轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="440000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P051">
- <config default="TH轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P052">
- <config default="EX1轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P053">
- <config default="EX2轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="500000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P054">
- <config default="P轴无晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P060">
- <config default="Z轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="440000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P061">
- <config default="TH轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="120000" name="SetValue" description="" max="200000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P062">
- <config default="EX1轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P063">
- <config default="EX2轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250000" name="SetValue" description="" max="500000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P064">
- <config default="P轴有晶圆回原点速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P100">
- <config default="Z轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="70000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P101">
- <config default="TH轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="20000" name="SetValue" description="" max="18000" min="1" paramter="" type="Double" />
- <config default="0.001deg/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P102">
- <config default="EX1轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="50000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P103">
- <config default="EX2轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="50000" name="SetValue" description="" max="250000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P104">
- <config default="P轴低速搬运速度" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="7000" name="SetValue" description="" max="7000" min="1" paramter="" type="Double" />
- <config default="0.001mm/s" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Speed" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P130">
- <config default="Z轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P131">
- <config default="TH轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P132">
- <config default="EX1轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P133">
- <config default="EX2轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P134">
- <config default="P轴TP用点动加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P140">
- <config default="Z轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P141">
- <config default="TH轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P142">
- <config default="EX1轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P143">
- <config default="EX2轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P144">
- <config default="P轴TP用点动减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P150">
- <config default="Z轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P151">
- <config default="TH轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P152">
- <config default="EX1轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P153">
- <config default="EX2轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P154">
- <config default="P轴TP用点动平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P160">
- <config default="Z轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P161">
- <config default="TH轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P162">
- <config default="EX1轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P163">
- <config default="EX2轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P164">
- <config default="P轴TP用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P170">
- <config default="Z轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P171">
- <config default="TH轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P172">
- <config default="EX1轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P173">
- <config default="EX2轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P174">
- <config default="P轴TP用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P180">
- <config default="Z轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P181">
- <config default="TH轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P182">
- <config default="EX1轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P183">
- <config default="EX2轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P184">
- <config default="P轴TP用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P190">
- <config default="Z轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P191">
- <config default="TH轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P192">
- <config default="EX1轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P193">
- <config default="EX2轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P194">
- <config default="P轴TP用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P200">
- <config default="Z轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P201">
- <config default="TH轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P202">
- <config default="EX1轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P203">
- <config default="EX2轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P204">
- <config default="P轴TP用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P210">
- <config default="Z轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P211">
- <config default="TH轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P212">
- <config default="EX1轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P213">
- <config default="EX2轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P214">
- <config default="P轴TP用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <configs name="P220">
- <config default="Z轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="TH轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="EX1轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="EX2轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="P轴HOST用无晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="Z轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="TH轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="EX1轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="EX2轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
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- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="P轴HOST用无晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
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- <config default="Z轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
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- <config default="TH轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
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- <config default="EX1轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
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- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
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- <config default="EX2轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
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- <config default="P轴HOST用无晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
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- <config default="Z轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
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- <config default="TH轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
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- <config default="EX1轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
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- <config default="EX2轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P254">
- <config default="P轴HOST用有晶圆搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P260">
- <config default="Z轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P261">
- <config default="TH轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P262">
- <config default="EX1轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P263">
- <config default="EX2轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P264">
- <config default="P轴HOST用有晶圆搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P270">
- <config default="Z轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P271">
- <config default="TH轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P272">
- <config default="EX1轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P273">
- <config default="EX2轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P274">
- <config default="P轴HOST用有晶圆搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P280">
- <config default="Z轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P281">
- <config default="TH轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P282">
- <config default="EX1轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P283">
- <config default="EX2轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P284">
- <config default="P轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P290">
- <config default="Z轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P291">
- <config default="TH轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P292">
- <config default="EX1轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P293">
- <config default="EX2轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P294">
- <config default="P轴HOST用无晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P300">
- <config default="Z轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P301">
- <config default="TH轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P302">
- <config default="EX1轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P303">
- <config default="EX2轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P304">
- <config default="P轴HOST用无晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P310">
- <config default="Z轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P311">
- <config default="TH轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P312">
- <config default="EX1轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P313">
- <config default="EX2轴HOST用无晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P314">
- <config default="P轴HOST用有晶圆回原点加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P320">
- <config default="Z轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P321">
- <config default="TH轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P322">
- <config default="EX1轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P323">
- <config default="EX2轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P324">
- <config default="P轴HOST用有晶圆回原点减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P330">
- <config default="Z轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P331">
- <config default="TH轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P332">
- <config default="EX1轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P333">
- <config default="EX2轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P334">
- <config default="P轴HOST用有晶圆回原点平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P340">
- <config default="Z轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P341">
- <config default="TH轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P342">
- <config default="EX1轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P343">
- <config default="EX2轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P344">
- <config default="P轴HOST低速搬运加速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P350">
- <config default="Z轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P351">
- <config default="TH轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P352">
- <config default="EX1轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P353">
- <config default="EX2轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P354">
- <config default="P轴HOST低速搬运减速时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="300" name="SetValue" description="" max="5000" min="50" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P360">
- <config default="Z轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P361">
- <config default="TH轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P362">
- <config default="EX1轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P363">
- <config default="EX2轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P364">
- <config default="P轴HOST低速搬运平滑时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="200" name="SetValue" description="" max="500" min="1" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Time" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P400">
- <config default="Z轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="980000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P401">
- <config default="TH轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="140000" min="-100000" paramter="" type="Double" />
- <config default="0.01deg" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P402">
- <config default="EX1轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="475000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P403">
- <config default="EX2轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="475000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P404">
- <config default="P轴原点位置坐标" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P410">
- <config default="Z轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="Z" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P411">
- <config default="TH轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01deg" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="TH" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P412">
- <config default="EX1轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX1" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P413">
- <config default="EX2轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="EX2" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P414">
- <config default="P轴HR_Signal信号判断阈值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="30" name="SetValue" description="" max="1000" min="0" paramter="" type="Double" />
- <config default="0.01mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="P" name="Axis" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P430">
- <config default="IO延时时间" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10" name="SetValue" description="" max="2000" min="0" paramter="" type="Double" />
- <config default="1ms" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P440">
- <config default="晶圆扫描动作中示教位置的EX轴偏移" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="267300" name="SetValue" description="" max="300000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P441">
- <config default="晶圆扫描动作中示教位置的Z轴偏移" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="1000" name="SetValue" description="" max="50000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P442">
- <config default="晶圆扫描动作中突片检测偏移量" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="50000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P443">
- <config default="晶圆扫描动作中斜片范围" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="15" name="SetValue" description="" max="5000" min="0" paramter="" type="Double" />
- <config default="0.01%" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P444">
- <config default="晶圆扫描动作中单晶圆范围" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="140" name="SetValue" description="" max="5000" min="0" paramter="" type="Double" />
- <config default="0.01%" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P445">
- <config default="晶圆扫描动作中碟叠片晶圆范围" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="250" name="SetValue" description="" max="5000" min="0" paramter="" type="Double" />
- <config default="0.01%" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Other" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P500">
- <config default="站1用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P501">
- <config default="站1用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P502">
- <config default="站1用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P504">
- <config default="站1用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P505">
- <config default="站1用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P520">
- <config default="站2用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P521">
- <config default="站2用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P522">
- <config default="站2用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P524">
- <config default="站2用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P525">
- <config default="站2用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P540">
- <config default="站3用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P541">
- <config default="站3用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P542">
- <config default="站3用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P544">
- <config default="站3用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P545">
- <config default="站3用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P560">
- <config default="站4用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P561">
- <config default="站4用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P562">
- <config default="站4用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P564">
- <config default="站4用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P565">
- <config default="站4用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P580">
- <config default="站5用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P581">
- <config default="站5用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P582">
- <config default="站5用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P584">
- <config default="站5用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P585">
- <config default="站5用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P600">
- <config default="站6用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P601">
- <config default="站6用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P602">
- <config default="站6用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P604">
- <config default="站6用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P605">
- <config default="站6用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P620">
- <config default="站7用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P621">
- <config default="站7用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P622">
- <config default="站7用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P624">
- <config default="站7用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P625">
- <config default="站7用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P640">
- <config default="站8用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P641">
- <config default="站8用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P642">
- <config default="站8用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P644">
- <config default="站8用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P645">
- <config default="站8用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P660">
- <config default="站9用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P661">
- <config default="站9用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P662">
- <config default="站9用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P664">
- <config default="站9用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P665">
- <config default="站9用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P680">
- <config default="站10用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P681">
- <config default="站10用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P682">
- <config default="站10用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P684">
- <config default="站10用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P685">
- <config default="站10用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P700">
- <config default="站11用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P701">
- <config default="站11用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P702">
- <config default="站11用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P704">
- <config default="站11用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P705">
- <config default="站11用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P720">
- <config default="站12用层数" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="25" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P721">
- <config default="站12用层间距" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P722">
- <config default="站12用工位偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P724">
- <config default="站12用上偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="P725">
- <config default="站12用下偏移值" name="SettingItem" description="" max="" min="" paramter="" type="String" />
- <config default="2500" name="SetValue" description="" max="20000" min="0" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="Slot" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- </configs>
- <configs name="PositionConfig">
- <configs name="workstationNumber" >
- <config default="000" name="SendParameter" description="" max="250" min="1" paramter="" type="Double" />
- <configs name="C01" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C02" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C03" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C04" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C05" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C06" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C07" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C08" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C09" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C10" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C11" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C12" >
- <config default="1" name="SetValue" description="" max="250" min="1" paramter="" type="Double" />
- <config default="" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- </configs>
- <configs name="LayerSpacing">
- <config default="001" name="SendParameter" description="" max="250" min="1" paramter="" type="Double" />
- <configs name="C01" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C02" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C03" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C04" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C05" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C06" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C07" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C08" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C09" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C10" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C11" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C12" >
- <config default="10000" name="SetValue" description="" max="15000" min="6000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- </configs>
- <configs name="UpperOffset">
- <config default="004" name="SendParameter" description="" max="250" min="1" paramter="" type="Double" />
- <configs name="C01" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C02" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C03" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C04" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C05" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C06" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C07" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C08" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C09" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C10" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C11" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C12" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- </configs>
- <configs name="DownOffset" >
- <config default="005" name="SendParameter" description="" max="250" min="1" paramter="" type="Double" />
- <configs name="C01" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C02" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C03" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C04" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C05" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C06" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C07" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C08" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C09" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C10" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C11" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- <configs name="C12" >
- <config default="2500" name="SetValue" description="" max="10000" min="-10000" paramter="" type="Double" />
- <config default="0.001mm" name="Unit" description="" max="" min="" paramter="" type="String" />
- <config default="PositionConfig" name="Type" description="" max="" min="" paramter="" type="String" />
- </configs>
- </configs>
- </configs>
- <configs name="PositionAxis">
- <configs name="C01">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C02">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C03">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C04">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C05">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C06">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C07">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C08">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C09">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C10">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C11">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- <configs name="C12">
- <config default="PositionAxis" name="Type" description="" max="" min="" paramter="" type="String" />
- <config default="0" name="ToDownAxis" description="升降轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="RotateAxis" description="旋转轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis1" description="伸缩轴1" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="TelescopingAxis2" description="伸缩轴2" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- <config default="0" name="VariableSpacingAxis" description="变间距轴" max="999999" unit="0.001mm/deg" min="-999999" paramter="" type="Double" />
- </configs>
- </configs>
- </configs>
- <configs name="AUX">
- <config default="false" name="IsModifyAll" description="IsModifyAll" max="" min="" paramter="" tag="" unit="" type="Bool"/>
- <configs name="1">
- <config default="Unit1-CH1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="2">
- <config default="Unit1-CH2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="3">
- <config default="Unit1-CH3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="4">
- <config default="Unit1-CH4 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH4PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH4SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="5">
- <config default="Unit1-CH5 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH5PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH5SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="6">
- <config default="Unit1-CH6 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH6PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH6SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="7">
- <config default="Unit1-CH7 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH7PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH7SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="8">
- <config default="Unit1-CH8 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH8PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH8SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="9">
- <config default="Unit1-CH9 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH9PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH9SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="10">
- <config default="Unit1-CH10 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH10PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH10SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="11">
- <config default="Unit1-CH11 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH11PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH11SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="12">
- <config default="Unit1-CH12 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH12PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH12SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="13">
- <config default="Unit1-CH13 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH13PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH13SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="14">
- <config default="Unit1-CH14 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH14PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH14SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="15">
- <config default="Unit1-CH15 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH15PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH15SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="16">
- <config default="Unit1-CH16 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH16PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH16SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="17">
- <config default="Unit2-CH1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="18">
- <config default="Unit2-CH2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="19">
- <config default="Unit2-CH3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="20">
- <config default="Unit2-CH4 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH4PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH4SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="21">
- <config default="Unit2-CH5 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH5PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH5SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="22">
- <config default="Unit2-CH6 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH6PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH6SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="23">
- <config default="Unit2-CH7 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH7PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH7SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="24">
- <config default="Unit2-CH8 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH8PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH8SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="25">
- <config default="Unit2-CH9 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH9PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH9SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="26">
- <config default="Unit2-CH10 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH10PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH10SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="27">
- <config default="Unit2-CH11 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH11PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH11SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="28">
- <config default="Unit2-CH12 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH12PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH12SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="29">
- <config default="Unit2-CH13 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH13PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH13SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="30">
- <config default="Unit2-CH14 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH14PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH14SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="31">
- <config default="Unit2-CH15 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH15PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH15SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="32">
- <config default="Unit2-CH16 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH16PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH16SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="33">
- <config default="Unit3-CH1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="34">
- <config default="Unit3-CH2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="35">
- <config default="Unit3-CH3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="36">
- <config default="Unit3-CH4 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH4PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH4SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="37">
- <config default="Unit3-CH5 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH5PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH5SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="38">
- <config default="Unit3-CH6 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH6PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH6SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="39">
- <config default="Unit3-CH7 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH7PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH7SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="40">
- <config default="Unit3-CH8 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH8PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH8SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="41">
- <config default="Unit3-CH9 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH9PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH9SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="42">
- <config default="Unit3-CH10 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH10PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH10SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="43">
- <config default="Unit3-CH11 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH11PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH11SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="44">
- <config default="Unit3-CH12 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH12PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH12SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="45">
- <config default="Unit3-CH13 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH13PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH13SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="46">
- <config default="Unit3-CH14 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH14PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH14SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="47">
- <config default="Unit3-CH15 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH15PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH15SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="48">
- <config default="Unit3-CH16 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH16PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH16SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="49">
- <config default="Unit4-CH1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="50">
- <config default="Unit4-CH2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="51">
- <config default="Unit4-CH3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="52">
- <config default="Unit4-CH4 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH4PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH4SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="53">
- <config default="Unit4-CH5 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH5PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH5SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="54">
- <config default="Unit4-CH6 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH6PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH6SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="55">
- <config default="Unit4-CH7 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH7PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH7SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="56">
- <config default="Unit4-CH8 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH8PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH8SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="57">
- <config default="Unit4-CH9 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH9PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH9SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="58">
- <config default="Unit4-CH10 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH10PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH10SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="59">
- <config default="Unit4-CH11 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH11PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH11SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="60">
- <config default="Unit4-CH12 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH12PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH12SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="61">
- <config default="Unit4-CH13 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH13PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH13SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="62">
- <config default="Unit4-CH14 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH14PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH14SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="63">
- <config default="Unit4-CH15 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH15PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH15SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="64">
- <config default="Unit4-CH16 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH16PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH16SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="65">
- <config default="Unit6-CH1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="66">
- <config default="Unit6-CH2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="67">
- <config default="Unit6-CH3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="68">
- <config default="Unit6-CH4 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH4PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH4SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="69">
- <config default="Unit6-CH5 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH5PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH5SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="70">
- <config default="Unit6-CH6 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH6PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH6SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="71">
- <config default="Unit6-CH7 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH7PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH7SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="72">
- <config default="Unit6-CH8 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH8PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH8SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="73">
- <config default="Unit6-CH9 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH9PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH9SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="74">
- <config default="Unit6-CH10 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH10PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH10SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="75">
- <config default="Unit6-CH11 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH11PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH11SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="76">
- <config default="Unit6-CH12 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH12PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH12SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="77">
- <config default="Unit6-CH13 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH13PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH13SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="78">
- <config default="Unit6-CH14 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH14PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH14SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="79">
- <config default="Unit6-CH15 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH15PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH15SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="80">
- <config default="Unit6-CH16 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH16PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH16SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="81">
- <config default="Unit7-CH1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="82">
- <config default="Unit7-CH2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="83">
- <config default="Unit7-CH3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="84">
- <config default="Unit7-CH4 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH4PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH4SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="85">
- <config default="Unit7-CH5 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH5PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH5SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="86">
- <config default="Unit7-CH6 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH6PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH6SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="87">
- <config default="Unit7-CH7 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH7PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH7SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="88">
- <config default="Unit7-CH8 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH8PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH8SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="89">
- <config default="Unit7-CH9 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH9PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH9SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="90">
- <config default="Unit7-CH10 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH10PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH10SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="91">
- <config default="Unit7-CH11 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH11PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH11SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="92">
- <config default="Unit7-CH12 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH12PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH12SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="93">
- <config default="Unit7-CH13 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH13PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH13SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="94">
- <config default="Unit7-CH14 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH14PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH14SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="false" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="95">
- <config default="Unit7-CH15 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH15PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH15SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="96">
- <config default="Unit7-CH16 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CH16PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CH16SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="97">
- <config default="Si-Source TANK heater1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_SiSourceTANKHeater1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_SiSourceTANKHeater1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="98">
- <config default="Si-Source TANK heater2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_SiSourceTANKHeater2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_SiSourceTANKHeater2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="99">
- <config default="Si-Source TANK heater3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_SiSourceTANKHeater3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_SiSourceTANKHeater3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="100">
- <config default="Si-Source AV MFC heater PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_SiSourceAVMFCHeaterPV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_SiSourceAVMFCHeaterSV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="101">
- <config default="C-Source TANK heater1 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CSourceTANKHeater1PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CSourceTANKHeater1SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="102">
- <config default="C-Source TANK heater2 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CSourceTANKHeater2PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CSourceTANKHeater2SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="103">
- <config default="C-Source TANK heater3 PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CSourceTANKHeater3PV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CSourceTANKHeater3SV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="104">
- <config default="C-Source AV MFC heater PV" name="Display" description="Display" tag="" unit="" type="String" />
- <config default="AI_CSourceAVMFCHeaterPV" name="AI" description="AI" tag="" unit="" type="String" />
- <config default="AO_CSourceAVMFCHeaterSV" name="AO" description="AO" tag="" unit="" type="String" />
- <config default="℃" name="Unit" description="Unit" tag="" unit="" type="String" />
- <config default="true" name="IsInstalled" description="Install" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="Table1">
- <configs name="1">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="2">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="3">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="4">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="5">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="6">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="7">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="8">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="9">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="10">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="11">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="12">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="13">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="14">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="15">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="16">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="17">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="18">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="19">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="20">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="21">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="22">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="23">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="24">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="25">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="26">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="27">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="28">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="29">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="30">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="31">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="32">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="33">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="34">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="35">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="36">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="73">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="74">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="75">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="76">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="77">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="78">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="79">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="80">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="81">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="82">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="83">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="84">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="85">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="86">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="87">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="88">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="89">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="90">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="91">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="92">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="93">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="94">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="95">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="96">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="97">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="98">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="99">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="100">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="101">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="102">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="103">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="104">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- </configs>
- <configs name="Table2">
- <configs name="1">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="2">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="3">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="4">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="5">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="6">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="7">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="8">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="9">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="10">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="11">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="12">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="13">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="14">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="15">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="16">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="17">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="18">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="19">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="20">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="21">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="22">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="23">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="24">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="25">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="26">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="27">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="28">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="29">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="30">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="31">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="32">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="33">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="34">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="35">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="36">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="37">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="38">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="39">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="40">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="77">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="78">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="79">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="80">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="81">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="82">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="83">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="84">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="85">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="86">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="87">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="88">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="89">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="90">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="91">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="92">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="93">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="94">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="95">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="96">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="97">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="98">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="99">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="100">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="101">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="102">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="103">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="104">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- </configs>
- <configs name="Table3">
- <configs name="1">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="2">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="3">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="4">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="5">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="6">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="7">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="8">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="9">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="10">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="11">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="12">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="13">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="14">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="15">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="16">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="17">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="18">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="19">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="20">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="21">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="22">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="23">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="24">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="25">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="26">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="27">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="28">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="29">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="30">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="31">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="32">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="33">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="34">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="35">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="36">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="37">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="38">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="39">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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- <configs name="42">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
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- <configs name="44">
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- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="81">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="82">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="83">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="84">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="85">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="86">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="87">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="88">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="89">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="90">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="91">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="92">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="93">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="94">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="95">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="96">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="97">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="98">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="99">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="100">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="101">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="102">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="103">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- <configs name="104">
- <config default="0" name="Set" description="Set" max="9999999" min="-999999" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningLowLimit" description="WarningLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="WarningHighLimit" description="WarningHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmLowLimit" description="AlarmLowLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="0" name="AlarmHighLimit" description="AlarmHighLimit" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
- </configs>
- </configs>
- </configs>
- <configs name="StepGroup">
- <config default="" name="Group1" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group2" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group3" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group4" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group5" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group6" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group7" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group8" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group9" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="Group10" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="StepName">
- <config default="" name="1" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="2" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="3" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="4" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="5" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="6" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="7" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="8" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="9" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="10" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="11" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="12" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="13" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="14" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="15" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="16" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="17" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="18" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="19" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="20" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="21" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="22" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="23" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="24" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="25" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="26" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="27" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="28" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="29" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="30" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="31" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="32" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="33" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="34" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="35" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="36" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="37" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="38" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="39" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="40" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="41" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="42" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="43" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="44" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="45" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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- <config default="" name="47" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="48" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="49" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="50" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="51" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="52" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="53" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="54" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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- <config default="" name="59" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="60" description="" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="" name="61" description="" max="" min="" paramter="" tag="" unit="" type="String" />
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- </configs>
- <configs name="InterLock" visible="false">
- <configs name="1" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="2" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="3" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="4" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="5" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="6" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="7" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="8" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="9" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="10" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="11" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="12" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="13" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="14" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="15" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="16" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="17" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="18" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="19" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="20" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="21" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="22" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="23" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="24" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="25" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="26" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="27" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="28" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="29" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="30" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="31" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="32" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="33" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="34" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="35" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="36" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="37" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="38" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="39" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="40" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="41" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="42" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="43" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="44" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="45" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="46" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="47" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="48" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="49" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="50" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="51" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="52" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="53" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="54" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="55" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="56" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="57" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="58" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
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- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="132" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="133" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="134" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="135" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="136" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="137" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="138" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="139" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- <configs name="140" visible="false">
- <config default="" name="Name" description="Name" tag="" unit="" type="String" visible="false"/>
- <config default="false" name="NoneOrExist" description="None/Exist" tag="" unit="" type="Bool" visible="false"/>
- <config default="false" name="Normaly0nOrOff" description="Normaly 0n/Off" tag="" unit="" type="Bool" />
- <config default="00:00.0" name="DelayOnTime" description="DelayOnTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="DelayOffTime" description="DelayOffTime" tag="" unit="" type="String" />
- <config default="00:00.0" name="ILKTime" description="ILKTime" tag="" unit="" type="String" />
- </configs>
- </configs>
- <configs name="TempSetting" visible="false" >
- <configs name="A" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="B" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="C" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="D" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="E" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="F" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="G" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="H" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="I" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="J" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="K" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="L" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="M" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="N" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="O" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="P" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="Q" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="R" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="S" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="T" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="U" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="V" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="W" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="X" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="Y" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- <configs name="Z" visible="false">
- <config default="0" name="HeaterU" description="U" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCU" description="CU" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterC" description="C" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterCL" description="CL" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="HeaterL" description="L" max="9999" min="0" paramter="" tag="" unit="℃" type="Double" />
- </configs>
- </configs>
- <configs name="AlarmTables">
- <config default="" name="AlarmTable" description="Alarm Table" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="InterlockEdits">
- <config default="" name="InterlockEdit" description="Interlock Edit" max="" min="" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="RecipeDataRangeCheckParameter" visible="false" >
- <configs name="Table1">
- <config default="" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <configs name="Step1">
- <config default="" name="StepID" description="Step ID" max="" min="" paramter="" tag="" unit="" type="String" />
- <configs name="FixedPart" description="Fixed Part">
- <config default="00:00:000" name="StepTimeMin" description="Step Time Min" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="00:00:000" name="StepTimeMax" description="Step Time Max" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="ThicknessMin" description="Thickness Min" max="2000" min="0" paramter="" tag="" unit="A" type="Double" />
- <config default="0" name="ThicknessMax" description="Thickness Max" max="2000" min="0" paramter="" tag="" unit="A" type="Double" />
- <config default="0" name="LoopFreqMin" description="Loop Freq. in Recipe Min" max="2000" min="0" paramter="" tag="" unit="Times" type="Integer" />
- <config default="0" name="LoopFreqMax" description="Loop Freq. in Recipe Max" max="2000" min="0" paramter="" tag="" unit="Times" type="Integer" />
- <config default="0" name="SubrecipeLoopFreqMin" description="Subrecipe Loop Freq Min" max="2000" min="0" paramter="" tag="" unit="Times" type="Integer" />
- <config default="0" name="SubrecipeLoopFreqMax" description="Subrecipe Loop Freq Max" max="2000" min="0" paramter="" tag="" unit="Times" type="Integer" />
- </configs>
- <configs name="MFC">
- <configs name="C1-N2-1">
- <config default="0" name="ValueMin" description="Value Min" max="2000" min="0" paramter="" tag="" unit="SLM" type="Double" />
- <config default="0" name="ValueMax" description="Value Max" max="2000" min="0" paramter="" tag="" unit="SLM" type="Double" />
- <config default="0" name="RampDirectMin" description="Ramp Direct Min" max="2000" min="0" paramter="" tag="" unit="SLM" type="Double" />
- <config default="0" name="RampDirectMax" description="Ramp Direct Max" max="2000" min="0" paramter="" tag="" unit="SLM" type="Double" />
- <config default="00:00:000" name="RampTimeMin" description="Ramp Time Min" max="" min="" paramter="" tag="" unit="Time" type="String" />
- <config default="00:00:000" name="RampTimeMax" description="Ramp Time Max" max="" min="" paramter="" tag="" unit="Time" type="String" />
- <config default="0" name="RampPercentMin" description="Ramp Percent Min" max="2000" min="0" paramter="" tag="" unit="%" type="Double" />
- <config default="0" name="RampPercentMax" description="Ramp Percent Max" max="2000" min="0" paramter="" tag="" unit="%" type="Double" />
- </configs>
- </configs>
- <configs name="Temp">
- <configs name="1">
- <config default="U" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="ValueMin" description="Value Min" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="ValueMax" description="Value Max" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="RampDirectMin" description="Ramp Direct Min" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="0" name="RampDirectMax" description="Ramp Direct Max" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="00:00:000" name="RampTimeMin" description="Ramp Time Min" max="" min="" paramter="" tag="" unit="Time" type="String" />
- <config default="00:00:000" name="RampTimeMax" description="Ramp Time Max" max="" min="" paramter="" tag="" unit="Time" type="String" />
- </configs>
- <configs name="2">
- <config default="CU" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="ValueMin" description="Value Min" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="ValueMax" description="Value Max" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="RampDirectMin" description="Ramp Direct Min" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="0" name="RampDirectMax" description="Ramp Direct Max" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="00:00:000" name="RampTimeMin" description="Ramp Time Min" max="" min="" paramter="" tag="" unit="Time" type="String" />
- <config default="00:00:000" name="RampTimeMax" description="Ramp Time Max" max="" min="" paramter="" tag="" unit="Time" type="String" />
- </configs>
- <configs name="3">
- <config default="C" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="ValueMin" description="Value Min" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="ValueMax" description="Value Max" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="RampDirectMin" description="Ramp Direct Min" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="0" name="RampDirectMax" description="Ramp Direct Max" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="00:00:000" name="RampTimeMin" description="Ramp Time Min" max="" min="" paramter="" tag="" unit="Time" type="String" />
- <config default="00:00:000" name="RampTimeMax" description="Ramp Time Max" max="" min="" paramter="" tag="" unit="Time" type="String" />
- </configs>
- <configs name="4">
- <config default="CL" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="ValueMin" description="Value Min" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="ValueMax" description="Value Max" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="RampDirectMin" description="Ramp Direct Min" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="0" name="RampDirectMax" description="Ramp Direct Max" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="00:00:000" name="RampTimeMin" description="Ramp Time Min" max="" min="" paramter="" tag="" unit="Time" type="String" />
- <config default="00:00:000" name="RampTimeMax" description="Ramp Time Max" max="" min="" paramter="" tag="" unit="Time" type="String" />
- </configs>
- <configs name="5">
- <config default="L" name="Name" description="Name" max="" min="" paramter="" tag="" unit="" type="String" />
- <config default="0" name="ValueMin" description="Value Min" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="ValueMax" description="Value Max" max="2000" min="0" paramter="" tag="" unit="℃" type="Double" />
- <config default="0" name="RampDirectMin" description="Ramp Direct Min" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="0" name="RampDirectMax" description="Ramp Direct Max" max="2000" min="0" paramter="" tag="" unit="℃/min" type="Double" />
- <config default="00:00:000" name="RampTimeMin" description="Ramp Time Min" max="" min="" paramter="" tag="" unit="Time" type="String" />
- <config default="00:00:000" name="RampTimeMax" description="Ramp Time Max" max="" min="" paramter="" tag="" unit="Time" type="String" />
- </configs>
- </configs>
- <configs name="AUX">
- </configs>
- <configs name="Press">
- <config default="0" name="PressMin" description="Press Min" max="2000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- <config default="0" name="PressMax" description="Press Max" max="2000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- <config default="0" name="Press2Min" description="Press2 Min" max="2000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- <config default="0" name="Press2Max" description="Press2 Max" max="2000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- <config default="0" name="SlowVacMin" description="Slow Vac Min" max="2000" min="0" paramter="" tag="" unit="Torr/S" type="Double" />
- <config default="0" name="SlowVacMax" description="Slow Vac Max" max="2000" min="0" paramter="" tag="" unit="Torr/S" type="Double" />
- <config default="0" name="ValveAngleMin" description="Valve Angle Min" max="2000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- <config default="0" name="ValveAngleMax" description="Valve Angle Max" max="2000" min="0" paramter="" tag="" unit="Torr" type="Double" />
- </configs>
- <configs name="Loader">
- <config default="0" name="BoatElevatorSpeed1Min" description="Boat Elevator Speed1 Min" max="2000" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="0" name="BoatElevatorSpeed1Max" description="Boat Elevator Speed1 Max" max="2000" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="0" name="BoatElevatorSpeed2Min" description="Boat Elevator Speed2 Min" max="2000" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="0" name="BoatElevatorSpeed2Max" description="Boat Elevator Speed2 Max" max="2000" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="0" name="BoatElevatorSpeed3Min" description="Boat Elevator Speed3 Min" max="2000" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="0" name="BoatElevatorSpeed3Max" description="Boat Elevator Speed3 Max" max="2000" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="0" name="BoatRotateSpeedMin" description="Boat Rotate Speed Min" max="2000" min="0" paramter="" tag="" unit="rpm" type="Double" />
- <config default="0" name="BoatRotateSpeedMax" description="Boat Rotate Speed Max" max="2000" min="0" paramter="" tag="" unit="rpm" type="Double" />
- </configs>
- </configs>
- </configs>
- </configs>
- </configs>
- </configs>
- </root>
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