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- <RS232 commPort="1" baudRate="9600" retry="3" t1="1" t2="10" t3="30" t4="10" />
- </GemConnection>
- <SecsItemFormats ackc5="Binary" ackc7="Binary" ackc7a="U1" ackc10="Binary" alid="U4" alcd="Binary" altx="Ascii" aled="Binary" attrid="Ascii" ccode="U2" ceid="U4" cpname="Ascii" dataid="U4" dsper="Ascii" errw7="Ascii" loc="Binary" mdln="Ascii" mid="Ascii" objid="Ascii" objspec="Ascii" objtype="Ascii" ppbody="Binary" ppid="Ascii" rcmd="Ascii" repgsz="U4" rptid="U4" seqnum="U2" softrev="Ascii" text="Ascii" tid="Binary" totsmp="U4" trid="U4" svid="U4" ecid="U4" ddid="U4" errcode="U1" opid="U1" length="U4" cmda="U1" ecmin="U4" ecmax="U4" ecdef="Ascii" idtyp="Binary" fnloc="U2" ffrot="U2" orloc="Binary" rpsel="U1" dutms="Ascii" xdies="U4" ydies="U4" rowct="U4" colct="U4" nulbc_binlt_bcequ="U1" prdct="U1" praxi="Binary" smpln="U4" mlcl="U8" refp="I2" />
- <Logger logLevel="Info" rolloverSize="10000000" maxBytes="100000" messageLengthLimit="1048576" />
- <Clock timeFormat="yymmddhhmmss" />
- <RemoteCommand allowLocalMode="false">
- <S2F21>
- <S2F21Command name="100" logicalName="START" description=" " />
- <S2F21Command name="101" logicalName="PAUSE" description=" " />
- <S2F21Command name="102" logicalName="STOP" description=" " />
- <S2F21Command name="103" logicalName="PP-SELECT" description=" " />
- <S2F21Command name="104" logicalName="RESUME" description=" " />
- <S2F21Command name="105" logicalName="ABORT" description=" " />
- </S2F21>
- <S2F41>
- <S2F41Command name="ReadCarrierID" logicalName="ReadCarrierID" description=" " />
- </S2F41>
- <S2F49>
- <S2F49Command name="GOREMOTE" logicalName="GOREMOTE" description="">
- </S2F49Command>
- <S2F49Command name="PP-SELECT" logicalName="PP-SELECT" description=" ">
- </S2F49Command>
- <S2F49Command name="START" logicalName="START" description=" ">
- </S2F49Command>
- <S2F49Command name="STOP" logicalName="STOP" description=" ">
- </S2F49Command>
- <S2F49Command name="ABORT" logicalName="ABORT" description=" ">
- </S2F49Command>
- <S2F49Command name="PAUSE" logicalName="PAUSE" description=" ">
- </S2F49Command>
- <S2F49Command name="RESUME" logicalName="RESUME" description=" ">
- </S2F49Command>
- </S2F49>
- </RemoteCommand>
- <StatusVariables>
- <SVID id="1" valueType="List" logicalName="AlarmsEnabled" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="2" valueType="List" logicalName="AlarmsSet" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="3" valueType="Ascii" logicalName="Clock" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="4" valueType="U4" logicalName="ControlState" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="5" valueType="List" logicalName="EventsEnabled" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="6" valueType="Ascii" logicalName="PPExecName" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="7" valueType="U1" logicalName="PreviousProcessState" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="8" valueType="U1" logicalName="ProcessState" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="9" valueType="U4" logicalName="SpoolCountActual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="10" valueType="U4" logicalName="SpoolCountTotal" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="11" valueType="Ascii" logicalName="SpoolFullTime" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="12" valueType="Ascii" logicalName="SpoolStartTime" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="13" valueType="Ascii" logicalName="SpoolState" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="14" valueType="Ascii" logicalName="SpoolSubstate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010001" valueType="Ascii" logicalName="CJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010002" valueType="Ascii" logicalName="PJQueue_Space" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010003" valueType="Boolean" logicalName="System.HasActiveAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010004" valueType="Boolean" logicalName="System.IsAlarm" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010005" valueType="Boolean" logicalName="System.IsAlarmConditionBuzzerOn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010006" valueType="Boolean" logicalName="System.IsAutoRunning" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010007" valueType="Boolean" logicalName="System.IsBusy" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010008" valueType="Boolean" logicalName="System.IsIdle" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010009" valueType="Boolean" logicalName="System.IsInitialized" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010010" valueType="Ascii" logicalName="System.SpoolingState" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1010011" valueType="Boolean" logicalName="System.IsSpoolingEnable" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1020001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCCascadePVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1030001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCHeaterPVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1040001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCLCascadePVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1050001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCLHeaterPVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1060001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCLOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1070001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1080001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCUCascadePVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1090001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCUHeaterPVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1100001" valueType="Boolean" logicalName="System.AlarmSignalHeaterCUOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1110001" valueType="Boolean" logicalName="System.AlarmSignalHeaterLCascadePVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1120001" valueType="Boolean" logicalName="System.AlarmSignalHeaterLHeaterPVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1130001" valueType="Boolean" logicalName="System.AlarmSignalHeaterLOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1140001" valueType="Boolean" logicalName="System.AlarmSignalHeaterUCascadePVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1150001" valueType="Boolean" logicalName="System.AlarmSignalHeaterUHeaterPVSBrk.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1160001" valueType="Boolean" logicalName="System.AlarmSignalHeaterUOverTemp.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170001" valueType="F8" logicalName="System.HeaterC.CascadeControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170002" valueType="F8" logicalName="System.HeaterC.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170003" valueType="F8" logicalName="System.HeaterC.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170004" valueType="F8" logicalName="System.HeaterC.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170005" valueType="F8" logicalName="System.HeaterC.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170006" valueType="Ascii" logicalName="System.HeaterC.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170007" valueType="F8" logicalName="System.HeaterC.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170008" valueType="F8" logicalName="System.HeaterC.HeaterControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170009" valueType="F8" logicalName="System.HeaterC.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170010" valueType="F8" logicalName="System.HeaterC.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170011" valueType="F8" logicalName="System.HeaterC.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170012" valueType="F8" logicalName="System.HeaterC.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170013" valueType="Boolean" logicalName="System.HeaterC.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170014" valueType="Boolean" logicalName="System.HeaterC.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170015" valueType="Boolean" logicalName="System.HeaterC.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170016" valueType="Boolean" logicalName="System.HeaterC.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170017" valueType="Boolean" logicalName="System.HeaterC.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170018" valueType="Boolean" logicalName="System.HeaterC.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170019" valueType="Boolean" logicalName="System.HeaterC.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170020" valueType="F8" logicalName="System.HeaterC.OverTemp" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170021" valueType="F8" logicalName="System.HeaterC.TCOpenOffsetOffset" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170022" valueType="F8" logicalName="System.HeaterC.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170023" valueType="F8" logicalName="System.HeaterC.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170024" valueType="F8" logicalName="System.HeaterC.UpRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1170025" valueType="F8" logicalName="System.HeaterC.WorkingOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180001" valueType="F8" logicalName="System.HeaterCL.CascadeControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180002" valueType="F8" logicalName="System.HeaterCL.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180003" valueType="F8" logicalName="System.HeaterCL.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180004" valueType="F8" logicalName="System.HeaterCL.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180005" valueType="F8" logicalName="System.HeaterCL.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180006" valueType="Ascii" logicalName="System.HeaterCL.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180007" valueType="F8" logicalName="System.HeaterCL.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180008" valueType="F8" logicalName="System.HeaterCL.HeaterControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180009" valueType="F8" logicalName="System.HeaterCL.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180010" valueType="F8" logicalName="System.HeaterCL.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180011" valueType="F8" logicalName="System.HeaterCL.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180012" valueType="F8" logicalName="System.HeaterCL.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180013" valueType="Boolean" logicalName="System.HeaterCL.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180014" valueType="Boolean" logicalName="System.HeaterCL.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180015" valueType="Boolean" logicalName="System.HeaterCL.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180016" valueType="Boolean" logicalName="System.HeaterCL.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180017" valueType="Boolean" logicalName="System.HeaterCL.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180018" valueType="Boolean" logicalName="System.HeaterCL.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180019" valueType="Boolean" logicalName="System.HeaterCL.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180020" valueType="F8" logicalName="System.HeaterCL.OverTemp" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180021" valueType="F8" logicalName="System.HeaterCL.TCOpenOffsetOffset" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180022" valueType="F8" logicalName="System.HeaterCL.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180023" valueType="F8" logicalName="System.HeaterCL.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180024" valueType="F8" logicalName="System.HeaterCL.UpRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1180025" valueType="F8" logicalName="System.HeaterCL.WorkingOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190001" valueType="F8" logicalName="System.HeaterCU.CascadeControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190002" valueType="F8" logicalName="System.HeaterCU.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190003" valueType="F8" logicalName="System.HeaterCU.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190004" valueType="F8" logicalName="System.HeaterCU.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190005" valueType="F8" logicalName="System.HeaterCU.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190006" valueType="Ascii" logicalName="System.HeaterCU.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190007" valueType="F8" logicalName="System.HeaterCU.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190008" valueType="F8" logicalName="System.HeaterCU.HeaterControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190009" valueType="F8" logicalName="System.HeaterCU.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190010" valueType="F8" logicalName="System.HeaterCU.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190011" valueType="F8" logicalName="System.HeaterCU.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190012" valueType="F8" logicalName="System.HeaterCU.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190013" valueType="Boolean" logicalName="System.HeaterCU.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190014" valueType="Boolean" logicalName="System.HeaterCU.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190015" valueType="Boolean" logicalName="System.HeaterCU.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190016" valueType="Boolean" logicalName="System.HeaterCU.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190017" valueType="Boolean" logicalName="System.HeaterCU.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190018" valueType="Boolean" logicalName="System.HeaterCU.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190019" valueType="Boolean" logicalName="System.HeaterCU.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190020" valueType="F8" logicalName="System.HeaterCU.OverTemp" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190021" valueType="F8" logicalName="System.HeaterCU.TCOpenOffsetOffset" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190022" valueType="F8" logicalName="System.HeaterCU.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190023" valueType="F8" logicalName="System.HeaterCU.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190024" valueType="F8" logicalName="System.HeaterCU.UpRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1190025" valueType="F8" logicalName="System.HeaterCU.WorkingOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200001" valueType="F8" logicalName="System.HeaterL.CascadeControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200002" valueType="F8" logicalName="System.HeaterL.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200003" valueType="F8" logicalName="System.HeaterL.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200004" valueType="F8" logicalName="System.HeaterL.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200005" valueType="F8" logicalName="System.HeaterL.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200006" valueType="Ascii" logicalName="System.HeaterL.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200007" valueType="F8" logicalName="System.HeaterL.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200008" valueType="F8" logicalName="System.HeaterL.HeaterControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200009" valueType="F8" logicalName="System.HeaterL.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200010" valueType="F8" logicalName="System.HeaterL.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200011" valueType="F8" logicalName="System.HeaterL.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200012" valueType="F8" logicalName="System.HeaterL.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200013" valueType="Boolean" logicalName="System.HeaterL.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200014" valueType="Boolean" logicalName="System.HeaterL.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200015" valueType="Boolean" logicalName="System.HeaterL.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200016" valueType="Boolean" logicalName="System.HeaterL.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200017" valueType="Boolean" logicalName="System.HeaterL.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200018" valueType="Boolean" logicalName="System.HeaterL.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200019" valueType="Boolean" logicalName="System.HeaterL.IsSelect" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200020" valueType="F8" logicalName="System.HeaterL.OverTemp" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200021" valueType="F8" logicalName="System.HeaterL.TCOpenOffsetOffset" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200022" valueType="F8" logicalName="System.HeaterL.TempFeedback" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200023" valueType="F8" logicalName="System.HeaterL.TempSetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200024" valueType="F8" logicalName="System.HeaterL.UpRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1200025" valueType="F8" logicalName="System.HeaterL.WorkingOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210001" valueType="F8" logicalName="System.HeaterU.CascadeControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210002" valueType="F8" logicalName="System.HeaterU.CascadePID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210003" valueType="F8" logicalName="System.HeaterU.CascadePID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210004" valueType="F8" logicalName="System.HeaterU.CascadePID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210005" valueType="F8" logicalName="System.HeaterU.CascadePV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210006" valueType="Ascii" logicalName="System.HeaterU.ControlMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210007" valueType="F8" logicalName="System.HeaterU.DownRate" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210008" valueType="F8" logicalName="System.HeaterU.HeaterControlModeSV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210009" valueType="F8" logicalName="System.HeaterU.HeaterPID_D" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210010" valueType="F8" logicalName="System.HeaterU.HeaterPID_I" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210011" valueType="F8" logicalName="System.HeaterU.HeaterPID_P" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210012" valueType="F8" logicalName="System.HeaterU.HeaterPV" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210013" valueType="Boolean" logicalName="System.HeaterU.IsAutoManual" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210014" valueType="Boolean" logicalName="System.HeaterU.IsCascadeMode" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210015" valueType="Boolean" logicalName="System.HeaterU.IsCascadePVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210016" valueType="Boolean" logicalName="System.HeaterU.IsEnableIn" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210017" valueType="Boolean" logicalName="System.HeaterU.IsEnableOutput" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="1210018" valueType="Boolean" logicalName="System.HeaterU.IsHeaterPVBreak" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="336900002" valueType="Boolean" logicalName="PM1.Shutter.DiOpen" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="336900003" valueType="Boolean" logicalName="PM1.Shutter.DoClose" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="336900004" valueType="Boolean" logicalName="PM1.Shutter.DoOpen" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="338680002" valueType="Boolean" logicalName="PM1.IoValve.ValveAV201.Status" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="338700002" valueType="Boolean" logicalName="PM1.IoValve.ValveSV227.Status" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="338730002" valueType="Boolean" logicalName="PM1.ValveSV227.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
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- <SVID id="338810001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisEmotorenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338820001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisEmotorenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338830001" valueType="Boolean" logicalName="PM1.AlarmSignalBlowerpoweronoff.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338840001" valueType="Boolean" logicalName="PM1.AlarmSignalCapheaterenable.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338850001" valueType="Boolean" logicalName="PM1.AlarmSignalEMO01001powerboxEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338860001" valueType="Boolean" logicalName="PM1.AlarmSignalEMO02001gasboxEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338870001" valueType="Boolean" logicalName="PM1.AlarmSignalEMO04001frontbodyEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338880001" valueType="Boolean" logicalName="PM1.AlarmSignalExternalEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338890001" valueType="Boolean" logicalName="PM1.AlarmSignalFouprobotEMS.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338900001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodydoorswitch.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338910001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodyinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338920001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodyinterlockresetbutton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338930001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodyIOshuttersw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338940001" valueType="Boolean" logicalName="PM1.AlarmSignalFS101waterflowalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338950001" valueType="Boolean" logicalName="PM1.AlarmSignalFTRenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338960001" valueType="Boolean" logicalName="PM1.AlarmSignalFTRenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338970001" valueType="Boolean" logicalName="PM1.AlarmSignalFTRinterlockreset.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338980001" valueType="Boolean" logicalName="PM1.AlarmSignalFurnacepoweronoff.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="338990001" valueType="Boolean" logicalName="PM1.AlarmSignalFurnacepoweronswitch.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339000001" valueType="Boolean" logicalName="PM1.AlarmSignalFurnacetransformertempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339010001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxexhaustpressurealarm1st.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339020001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxexhaustpressurealarm2nd.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339030001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339040001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxinterlockresetbutton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339050001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02001fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339060001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02001HCL1gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339070001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02001HCL1gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339080001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02002fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339090001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02002HCL2gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339100001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02002HCL2gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339110001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02003fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339120001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02003NH31gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339130001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02003NH31gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339140001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02004fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339150001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02004NH32gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339160001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02004NH32gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339170001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02005F21gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339180001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02005F21gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339190001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02005fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339200001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02006F22gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339210001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02006F22gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339220001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02006fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339230001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02007fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339240001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02007NO1gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339250001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02007NO1gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339260001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02008fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339270001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02008NO2gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339280001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02008NO2gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339290001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02009C3H61gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339300001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02009C3H61gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339310001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02009fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339320001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02010C3H62gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339330001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02010C3H62gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339340001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02010fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339350001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02011DMA1gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339360001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02011DMA1gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339370001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02011fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339380001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02012DMA2gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339390001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02012DMA2gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339400001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02012fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339410001" valueType="Boolean" logicalName="PM1.AlarmSignalHPMvalvepoweronoff.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339420001" valueType="Boolean" logicalName="PM1.AlarmSignalLD02001LSCleakalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339430001" valueType="Boolean" logicalName="PM1.AlarmSignalLD03001exhaustboxwaterleakupside.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339440001" valueType="Boolean" logicalName="PM1.AlarmSignalLD03002waterleakdownside.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339450001" valueType="Boolean" logicalName="PM1.AlarmSignalLD05001Magneticfluidleak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339460001" valueType="Boolean" logicalName="PM1.AlarmSignalLD05002Coolingwaterleak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339470001" valueType="Boolean" logicalName="PM1.AlarmSignalLD05003RHCleak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339480001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainfault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339490001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainidel.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339500001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainOSSD1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339510001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainOSSD2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339520001" valueType="Boolean" logicalName="PM1.AlarmSignalLoadingareaEMS.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339530001" valueType="Boolean" logicalName="PM1.AlarmSignalPowerboxfiredetector.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339540001" valueType="Boolean" logicalName="PM1.AlarmSignalPowerboxinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339550001" valueType="Boolean" logicalName="PM1.AlarmSignalPowerboxinterlockresetbutton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339560001" valueType="Boolean" logicalName="PM1.AlarmSignalSCRONOFFSWITCH.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339570001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw11.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339580001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw12.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339590001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02002gasboxdoorsw11.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339600001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02002gasboxdoorsw12.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339610001" valueType="Boolean" logicalName="PM1.AlarmSignalSL05001LAdoorsw1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339620001" valueType="Boolean" logicalName="PM1.AlarmSignalSL05002LAdoorsw2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339630001" valueType="Boolean" logicalName="PM1.AlarmSignalSL05004LAfurnacedoorsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339640001" valueType="Boolean" logicalName="PM1.AlarmSignalSMK01001detectorfault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339650001" valueType="Boolean" logicalName="PM1.AlarmSignalSMK01001detectoroperator.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339660001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05001FFUtempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339670001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05002Capinsidetempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339680001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05003Capoutsidetempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339690001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05004Raxisrotationtempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339700001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05005RHCtempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339710001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05006furnacetempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339720001" valueType="Boolean" logicalName="PM1.AlarmSignalVFD01001EDM.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339730001" valueType="Boolean" logicalName="PM1.AlarmSignalVFDenable.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339740001" valueType="Boolean" logicalName="PM1.AlarmSignalWaferrobotEMS.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339750001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339760001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="339770001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRinterlockreset.Value" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
- <SVID id="630010004" valueType="Boolean" logicalName="Stocker1.IsOnline" value="" eventTrigger="" units="" description="" isArray="false" />
- </StatusVariables>
- <EquipmentConstants>
- <ECID id="2000" valueType="U2" logicalName="EstablishCommunicationsTimeout" value="2" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2001" valueType="U4" logicalName="MaxSpoolTransmit" value="100" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2003" valueType="Boolean" logicalName="OverWriteSpool" value="FALSE" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2005" valueType="U4" logicalName="MaxSpoolCapacity" value="100" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2006" valueType="Boolean" logicalName="SpoolEnabled" value="False" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="2007" valueType="U1" logicalName="TimeFormat" value="0" min="0" max="100" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10010001" valueType="Ascii" logicalName="System.BypassInterlock" value="" min="" max="" eventTrigger="" units="" description="Bypass Interlock" isArray="false" />
- <ECID id="10010002" valueType="Ascii" logicalName="System.CassetteSlotCount" value="" min="" max="" eventTrigger="" units="" description="Cassette Slot Count" isArray="false" />
- <ECID id="10010003" valueType="Ascii" logicalName="System.ChargingOrderBySort" value="" min="" max="" eventTrigger="" units="" description="Charging Order By Sort" isArray="false" />
- <ECID id="10010004" valueType="Ascii" logicalName="System.ChargingOrderFromCassette" value="" min="" max="" eventTrigger="" units="" description="Charging Order From Cassette" isArray="false" />
- <ECID id="10010005" valueType="Ascii" logicalName="System.ChargingOrderToBoat" value="" min="" max="" eventTrigger="" units="" description="Charging Order To Boat" isArray="false" />
- <ECID id="10010006" valueType="Ascii" logicalName="System.CompareRecipeType" value="" min="" max="" eventTrigger="" units="" description="Compare Recipe Type" isArray="false" />
- <ECID id="10010007" valueType="Ascii" logicalName="System.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="10010008" valueType="Ascii" logicalName="System.DataCollectionInterval" value="" min="" max="" eventTrigger="" units="" description="Data Collection Interval" isArray="false" />
- <ECID id="10010009" valueType="Ascii" logicalName="System.EnablePopupKeyboard" value="" min="" max="" eventTrigger="" units="" description="Enable Popup Keyboard" isArray="false" />
- <ECID id="10010010" valueType="Ascii" logicalName="System.EnableWarningFailedWafer" value="" min="" max="" eventTrigger="" units="" description="Enable Warning Failed Wafer" isArray="false" />
- <ECID id="10010011" valueType="Ascii" logicalName="System.EnableWarningWaferProcessState" value="" min="" max="" eventTrigger="" units="" description="Enable Warning Wafer Process State" isArray="false" />
- <ECID id="10010012" valueType="Ascii" logicalName="System.IsATMMode" value="" min="" max="" eventTrigger="" units="" description="Is ATM Mode" isArray="false" />
- <ECID id="10010013" valueType="Ascii" logicalName="System.IsAutoFillCarrierId" value="" min="" max="" eventTrigger="" units="" description="Load Is Auto Fill CarrierId" isArray="false" />
- <ECID id="10010014" valueType="Ascii" logicalName="System.IsCycleMode" value="" min="" max="" eventTrigger="" units="" description="Is Cycle Mode" isArray="false" />
- <ECID id="10010015" valueType="Ascii" logicalName="System.IsEnableBoatChargeMapping" value="" min="" max="" eventTrigger="" units="" description="Is Enable Boat Charge Mapping" isArray="false" />
- <ECID id="10010016" valueType="Ascii" logicalName="System.IsEnableBoatDischargeMapping" value="" min="" max="" eventTrigger="" units="" description="Is Enable Boat Discharge Mapping" isArray="false" />
- <ECID id="10010017" valueType="Ascii" logicalName="System.IsEnableDummyWaferDischarge" value="" min="" max="" eventTrigger="" units="" description="Is Enable Dummy Wafer Discharge" isArray="false" />
- <ECID id="10010018" valueType="Ascii" logicalName="System.IsEnableFIMSChargeMapping" value="" min="" max="" eventTrigger="" units="" description="Is Enable FIMS Charge Mapping" isArray="false" />
- <ECID id="10010019" valueType="Ascii" logicalName="System.IsIgnoreSaveDB" value="" min="" max="" eventTrigger="" units="" description="Ignore Save IO data to DB" isArray="false" />
- <ECID id="10010020" valueType="Ascii" logicalName="System.IsLeaveAsAllWaferWhenWaferShort" value="" min="" max="" eventTrigger="" units="" description="Is LeaveAs All Wafer When Wafer Short" isArray="false" />
- <ECID id="10010021" valueType="Ascii" logicalName="System.IsServiceControlMode" value="" min="" max="" eventTrigger="" units="" description="Is Service Control Mode" isArray="false" />
- <ECID id="10010022" valueType="Ascii" logicalName="System.IsShowRobotDownBtn" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10010023" valueType="Ascii" logicalName="System.IsSimulatorMode" value="" min="" max="" eventTrigger="" units="" description="Is Simulator Mode" isArray="false" />
- <ECID id="10010024" valueType="Ascii" logicalName="System.LightCurtain" value="" min="" max="" eventTrigger="" units="" description="light curtain" isArray="false" />
- <ECID id="10010025" valueType="Ascii" logicalName="System.LoadNeedPressCassetteInButton" value="" min="" max="" eventTrigger="" units="" description="Load Need Press Cassette In Button" isArray="false" />
- <ECID id="10010026" valueType="Ascii" logicalName="System.LoadNeedPressCassetteOutButton" value="" min="" max="" eventTrigger="" units="" description="Load Need Press Cassette Out Button" isArray="false" />
- <ECID id="10010027" valueType="Ascii" logicalName="System.LogsSaveDays" value="" min="" max="" eventTrigger="" units="" description="Logs Save Days" isArray="false" />
- <ECID id="10010028" valueType="Ascii" logicalName="System.ModbusCommunicationEnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="Modbus Communication Enable Log Message" isArray="false" />
- <ECID id="10010029" valueType="Ascii" logicalName="System.ShowMFCBySetPoint" value="" min="" max="" eventTrigger="" units="" description="MFC setpoint greater than 0 display" isArray="false" />
- <ECID id="10010030" valueType="Ascii" logicalName="System.TotalCycledWafer" value="" min="" max="" eventTrigger="" units="" description="Total Cycled Wafer" isArray="false" />
- <ECID id="10010031" valueType="Ascii" logicalName="System.UnloadNeedPressCassetteInButton" value="" min="" max="" eventTrigger="" units="" description="Unload Need Press Cassette In Button" isArray="false" />
- <ECID id="10010032" valueType="Ascii" logicalName="System.UnloadNeedPressCassetteOutButton" value="" min="" max="" eventTrigger="" units="" description="Unload Need Press Cassette Out Button" isArray="false" />
- <ECID id="10010033" valueType="Ascii" logicalName="System.BackUpFileMaxNumber" value="" min="" max="" eventTrigger="" units="" description="BackUpFileMaxNumber" isArray="false" />
- <ECID id="10010034" valueType="Ascii" logicalName="System.RunningMode" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10010035" valueType="Ascii" logicalName="System.EnableMinics" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10010036" valueType="Ascii" logicalName="System.IsScheduleMaintenance" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10020001" valueType="Ascii" logicalName="System.EditParameter.EditChamberType" value="" min="" max="" eventTrigger="" units="" description="Edit Chamber Type" isArray="false" />
- <ECID id="10020002" valueType="Ascii" logicalName="System.EditParameter.EditParameterType" value="" min="" max="" eventTrigger="" units="" description="Alarm Condition,Temp Correction,Temp PID,Temp Profile,Temp Auto PID,Leak Check Condition,APC PID" isArray="false" />
- <ECID id="10030001" valueType="Ascii" logicalName="System.FDC.DataGroupName" value="" min="" max="" eventTrigger="" units="" description="FDC data group" isArray="false" />
- <ECID id="10030002" valueType="Ascii" logicalName="System.FDC.DelayTime" value="" min="" max="" eventTrigger="" units="" description="Step Delay time before collection data" isArray="false" />
- <ECID id="10030003" valueType="Ascii" logicalName="System.FDC.SampleInterval" value="" min="" max="" eventTrigger="" units="" description="interval time collection sample data" isArray="false" />
- <ECID id="10040001" valueType="Ascii" logicalName="System.Job.BuzzerTimeWhenJobDone" value="" min="" max="" eventTrigger="" units="" description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" isArray="false" />
- <ECID id="10040002" valueType="Ascii" logicalName="System.Job.EnablePopDialogWhenJobDone" value="" min="" max="" eventTrigger="" units="" description="Whether pop window after job done" isArray="false" />
- <ECID id="10050001" valueType="Ascii" logicalName="System.Job.CreateJob.CarrierPara" value="" min="" max="" eventTrigger="" units="" description="CarrierPara" isArray="false" />
- <ECID id="10050002" valueType="Ascii" logicalName="System.Job.CreateJob.Charge" value="" min="" max="" eventTrigger="" units="" description="Charge" isArray="false" />
- <ECID id="10050003" valueType="Ascii" logicalName="System.Job.CreateJob.CJID" value="" min="" max="" eventTrigger="" units="" description="CJID" isArray="false" />
- <ECID id="10050004" valueType="Ascii" logicalName="System.Job.CreateJob.JobRecipe" value="" min="" max="" eventTrigger="" units="" description="JobRecipe" isArray="false" />
- <ECID id="10050005" valueType="Ascii" logicalName="System.Job.CreateJob.m1CarrierPara" value="" min="" max="" eventTrigger="" units="" description="m1CarrierPara" isArray="false" />
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- <ECID id="10050007" valueType="Ascii" logicalName="System.Job.CreateJob.MaterialPCassetteNo" value="" min="" max="" eventTrigger="" units="" description="Material P CassetteNo" isArray="false" />
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- <ECID id="10060006" valueType="Ascii" logicalName="System.Job.JOBProcessStock.m2CarrierPara" value="" min="" max="" eventTrigger="" units="" description="m2CarrierPara" isArray="false" />
- <ECID id="10060007" valueType="Ascii" logicalName="System.Job.JOBProcessStock.MaterialPCassetteNo" value="" min="" max="" eventTrigger="" units="" description="Material P CassetteNo" isArray="false" />
- <ECID id="10060008" valueType="Ascii" logicalName="System.Job.JOBProcessStock.PCassette" value="" min="" max="" eventTrigger="" units="" description="PCassette" isArray="false" />
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- <ECID id="10080001" valueType="Ascii" logicalName="System.Job.Unload.MaterialPCassetteNo" value="" min="" max="" eventTrigger="" units="" description="Material P CassetteNo" isArray="false" />
- <ECID id="10080002" valueType="Ascii" logicalName="System.Job.Unload.PCassette" value="" min="" max="" eventTrigger="" units="" description="PCassette" isArray="false" />
- <ECID id="10090001" valueType="Ascii" logicalName="System.Recipe.Abort Recipe" value="" min="" max="" eventTrigger="" units="" description="Default abort recipe" isArray="false" />
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- <ECID id="10090003" valueType="Ascii" logicalName="System.Recipe.DefaultJobRecipeName" value="" min="" max="" eventTrigger="" units="" description="Default recipe name" isArray="false" />
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- <ECID id="10090005" valueType="Ascii" logicalName="System.Recipe.DefaultProcessRecipe" value="" min="" max="" eventTrigger="" units="" description="Default process recipe" isArray="false" />
- <ECID id="10090006" valueType="Ascii" logicalName="System.Recipe.DefaultProcessRecipeName" value="" min="" max="" eventTrigger="" units="" description="Default recipe name" isArray="false" />
- <ECID id="10090007" valueType="Ascii" logicalName="System.Recipe.DefaultStepNameList" value="" min="" max="" eventTrigger="" units="" description="Default step name list" isArray="false" />
- <ECID id="10090008" valueType="Ascii" logicalName="System.Recipe.ExcuteAfterRecipeComplete" value="" min="" max="" eventTrigger="" units="" description="Excute After Recipe Complete" isArray="false" />
- <ECID id="10090009" valueType="Ascii" logicalName="System.Recipe.Idle Recipe" value="" min="" max="" eventTrigger="" units="" description="Default idle recipe" isArray="false" />
- <ECID id="10090010" valueType="Ascii" logicalName="System.Recipe.RecipeSaveNumber" value="" min="" max="" eventTrigger="" units="" description="Step Delay time before collection data" isArray="false" />
- <ECID id="10090011" valueType="Ascii" logicalName="System.Recipe.Reset Recipe" value="" min="" max="" eventTrigger="" units="" description="Default reset recipe" isArray="false" />
- <ECID id="10090012" valueType="Ascii" logicalName="System.Recipe.SupportedAbortType" value="" min="" max="" eventTrigger="" units="" description="Supported Abort Recipe Type" isArray="false" />
- <ECID id="10090013" valueType="Ascii" logicalName="System.Recipe.SupportedAlarmType" value="" min="" max="" eventTrigger="" units="" description="Supported Alarm Recipe Type" isArray="false" />
- <ECID id="10090014" valueType="Ascii" logicalName="System.Recipe.SupportedChamberType" value="" min="" max="" eventTrigger="" units="" description="Supported Chamber Type" isArray="false" />
- <ECID id="10090015" valueType="Ascii" logicalName="System.Recipe.SupportedIdleType" value="" min="" max="" eventTrigger="" units="" description="Supported Idle Recipe Type" isArray="false" />
- <ECID id="10090016" valueType="Ascii" logicalName="System.Recipe.SupportedJobType" value="" min="" max="" eventTrigger="" units="" description="Supported Job Recipe Type" isArray="false" />
- <ECID id="10090017" valueType="Ascii" logicalName="System.Recipe.SupportedLayoutType" value="" min="" max="" eventTrigger="" units="" description="Supported Layout Recipe Type" isArray="false" />
- <ECID id="10090018" valueType="Ascii" logicalName="System.Recipe.SupportedProcessType" value="" min="" max="" eventTrigger="" units="" description="Supported Process Recipe Type" isArray="false" />
- <ECID id="10090019" valueType="Ascii" logicalName="System.Recipe.SupportedResetType" value="" min="" max="" eventTrigger="" units="" description="Supported Reset Recipe Type" isArray="false" />
- <ECID id="10090020" valueType="Ascii" logicalName="System.Recipe.SupportedSubType" value="" min="" max="" eventTrigger="" units="" description="Supported Sub Recipe Type" isArray="false" />
- <ECID id="10090021" valueType="Ascii" logicalName="System.Recipe.DefaultFileName" value="" min="" max="" eventTrigger="" units="" description="Default File Name" isArray="false" />
- <ECID id="10090022" valueType="Ascii" logicalName="System.Recipe.SingleRecipeFileType" value="" min="" max="" eventTrigger="" units="" description="Single Recipe File Type" isArray="false" />
- <ECID id="10100001" valueType="Ascii" logicalName="System.Scheduler.GroupWaferBySequence" value="" min="" max="" eventTrigger="" units="" description="Group Wafer By Sequence" isArray="false" />
- <ECID id="10100002" valueType="Ascii" logicalName="System.Scheduler.IsRunInParallelMode" value="" min="" max="" eventTrigger="" units="" description="IsRunInParallelMode" isArray="false" />
- <ECID id="10100003" valueType="Ascii" logicalName="System.Scheduler.WaferCountBelowWhichStartNewProcessJob" value="" min="" max="" eventTrigger="" units="" description="Wafer Count Below Which Start New Process Job" isArray="false" />
- <ECID id="10100004" valueType="Ascii" logicalName="System.Scheduler.WaitLoadTimeOut" value="" min="" max="" eventTrigger="" units="" description="Wait Load TimeOut" isArray="false" />
- <ECID id="10110001" valueType="Ascii" logicalName="System.SetUp.ExportMaxRow" value="" min="" max="" eventTrigger="" units="" description="Export Max Row" isArray="false" />
- <ECID id="10110002" valueType="Ascii" logicalName="System.SetUp.IsFIMS1Installed" value="" min="" max="" eventTrigger="" units="" description="Is FIMS1 Installed" isArray="false" />
- <ECID id="10110003" valueType="Ascii" logicalName="System.SetUp.IsFIMS2Installed" value="" min="" max="" eventTrigger="" units="" description="Is FIMS2 Installed" isArray="false" />
- <ECID id="10110004" valueType="Ascii" logicalName="System.SetUp.IsLP1Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP1 Installed" isArray="false" />
- <ECID id="10110005" valueType="Ascii" logicalName="System.SetUp.IsLP2Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP2 Installed" isArray="false" />
- <ECID id="10110006" valueType="Ascii" logicalName="System.SetUp.IsLP3Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP3 Installed" isArray="false" />
- <ECID id="10110007" valueType="Ascii" logicalName="System.SetUp.IsLP4Installed" value="" min="" max="" eventTrigger="" units="" description="Is LP4 Installed" isArray="false" />
- <ECID id="10110008" valueType="Ascii" logicalName="System.SetUp.IsPM1Installed" value="" min="" max="" eventTrigger="" units="" description="Is PM1 Installed" isArray="false" />
- <ECID id="10110009" valueType="Ascii" logicalName="System.SetUp.IsStocker10Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker10 Installed" isArray="false" />
- <ECID id="10110010" valueType="Ascii" logicalName="System.SetUp.IsStocker11Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker11 Installed" isArray="false" />
- <ECID id="10110011" valueType="Ascii" logicalName="System.SetUp.IsStocker12Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker12 Installed" isArray="false" />
- <ECID id="10110012" valueType="Ascii" logicalName="System.SetUp.IsStocker13Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker13 Installed" isArray="false" />
- <ECID id="10110013" valueType="Ascii" logicalName="System.SetUp.IsStocker14Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker14 Installed" isArray="false" />
- <ECID id="10110014" valueType="Ascii" logicalName="System.SetUp.IsStocker15Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker15 Installed" isArray="false" />
- <ECID id="10110015" valueType="Ascii" logicalName="System.SetUp.IsStocker16Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker16 Installed" isArray="false" />
- <ECID id="10110016" valueType="Ascii" logicalName="System.SetUp.IsStocker17Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker17 Installed" isArray="false" />
- <ECID id="10110017" valueType="Ascii" logicalName="System.SetUp.IsStocker18Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker18 Installed" isArray="false" />
- <ECID id="10110018" valueType="Ascii" logicalName="System.SetUp.IsStocker1Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker1 Installed" isArray="false" />
- <ECID id="10110019" valueType="Ascii" logicalName="System.SetUp.IsStocker2Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker2 Installed" isArray="false" />
- <ECID id="10110020" valueType="Ascii" logicalName="System.SetUp.IsStocker3Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker3 Installed" isArray="false" />
- <ECID id="10110021" valueType="Ascii" logicalName="System.SetUp.IsStocker4Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker4 Installed" isArray="false" />
- <ECID id="10110022" valueType="Ascii" logicalName="System.SetUp.IsStocker5Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker5 Installed" isArray="false" />
- <ECID id="10110023" valueType="Ascii" logicalName="System.SetUp.IsStocker6Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker6 Installed" isArray="false" />
- <ECID id="10110024" valueType="Ascii" logicalName="System.SetUp.IsStocker7Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker7 Installed" isArray="false" />
- <ECID id="10110025" valueType="Ascii" logicalName="System.SetUp.IsStocker8Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker8 Installed" isArray="false" />
- <ECID id="10110026" valueType="Ascii" logicalName="System.SetUp.IsStocker9Installed" value="" min="" max="" eventTrigger="" units="" description="Is Stocker9 Installed" isArray="false" />
- <ECID id="10110027" valueType="Ascii" logicalName="System.SetUp.ToolType" value="" min="" max="" eventTrigger="" units="" description="Tool Type" isArray="false" />
- <ECID id="10110028" valueType="Ascii" logicalName="System.SetUp.ExportNameConversion" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10120001" valueType="Ascii" logicalName="System.ShutDown.ShutDown" value="" min="" max="" eventTrigger="" units="" description="ShutDown" isArray="false" />
- <ECID id="10130001" valueType="Ascii" logicalName="System.SignalTower.Light" value="" min="" max="" eventTrigger="" units="" description="设置灯的种类，顺序" isArray="false" />
- <ECID id="10130002" valueType="Ascii" logicalName="System.SignalTower.Trigger" value="" min="" max="" eventTrigger="" units="" description="设置触发灯塔的项" isArray="false" />
- <ECID id="10130003" valueType="Ascii" logicalName="System.SignalTower.Value" value="" min="" max="" eventTrigger="" units="" description="设置灯塔触发的逻辑关系" isArray="false" />
- <ECID id="10140001" valueType="Ascii" logicalName="System.Step Name.Count" value="" min="" max="" eventTrigger="" units="" description="Step Name Length" isArray="false" />
- <ECID id="10140002" valueType="Ascii" logicalName="System.Step Name.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
- <ECID id="10150001" valueType="Ascii" logicalName="System.Stocker.FoupStockerCount" value="" min="" max="" eventTrigger="" units="" description="Foup Stocker Count" isArray="false" />
- <ECID id="10150002" valueType="Ascii" logicalName="System.Stocker.LP1Type" value="" min="" max="" eventTrigger="" units="" description="LP1 Type" isArray="false" />
- <ECID id="10150003" valueType="Ascii" logicalName="System.Stocker.LP2Type" value="" min="" max="" eventTrigger="" units="" description="LP2 Type" isArray="false" />
- <ECID id="10150004" valueType="Ascii" logicalName="System.Stocker.LP3Type" value="" min="" max="" eventTrigger="" units="" description="LP3 Type" isArray="false" />
- <ECID id="10150005" valueType="Ascii" logicalName="System.Stocker.LP4Type" value="" min="" max="" eventTrigger="" units="" description="LP4 Type" isArray="false" />
- <ECID id="10150006" valueType="Ascii" logicalName="System.Stocker.Stocker10WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker10 Type" isArray="false" />
- <ECID id="10150007" valueType="Ascii" logicalName="System.Stocker.Stocker11WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker11 Type" isArray="false" />
- <ECID id="10150008" valueType="Ascii" logicalName="System.Stocker.Stocker12WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker12 Type" isArray="false" />
- <ECID id="10150009" valueType="Ascii" logicalName="System.Stocker.Stocker13WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker13 Type" isArray="false" />
- <ECID id="10150010" valueType="Ascii" logicalName="System.Stocker.Stocker14WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker14 Type" isArray="false" />
- <ECID id="10150011" valueType="Ascii" logicalName="System.Stocker.Stocker15WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker15 Type" isArray="false" />
- <ECID id="10150012" valueType="Ascii" logicalName="System.Stocker.Stocker16WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker16 Type" isArray="false" />
- <ECID id="10150013" valueType="Ascii" logicalName="System.Stocker.Stocker17WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker17 Type" isArray="false" />
- <ECID id="10150014" valueType="Ascii" logicalName="System.Stocker.Stocker18WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker18 Type" isArray="false" />
- <ECID id="10150015" valueType="Ascii" logicalName="System.Stocker.Stocker1WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker1 Type" isArray="false" />
- <ECID id="10150016" valueType="Ascii" logicalName="System.Stocker.Stocker2WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker2 Type" isArray="false" />
- <ECID id="10150017" valueType="Ascii" logicalName="System.Stocker.Stocker3WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker3 Type" isArray="false" />
- <ECID id="10150018" valueType="Ascii" logicalName="System.Stocker.Stocker4WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker4 Type" isArray="false" />
- <ECID id="10150019" valueType="Ascii" logicalName="System.Stocker.Stocker5WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker5 Type" isArray="false" />
- <ECID id="10150020" valueType="Ascii" logicalName="System.Stocker.Stocker6WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker6 Type" isArray="false" />
- <ECID id="10150021" valueType="Ascii" logicalName="System.Stocker.Stocker7WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker7 Type" isArray="false" />
- <ECID id="10150022" valueType="Ascii" logicalName="System.Stocker.Stocker8WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker8 Type" isArray="false" />
- <ECID id="10150023" valueType="Ascii" logicalName="System.Stocker.Stocker9WaferType" value="" min="" max="" eventTrigger="" units="" description="Stocker9 Type" isArray="false" />
- <ECID id="10150024" valueType="Ascii" logicalName="System.Stocker.StockerCount" value="" min="" max="" eventTrigger="" units="" description="Stocker Count" isArray="false" />
- <ECID id="10150025" valueType="Ascii" logicalName="System.Stocker.StockerCountByLayer" value="" min="" max="" eventTrigger="" units="" description="Stocker Count per Layer" isArray="false" />
- <ECID id="10150026" valueType="Ascii" logicalName="System.Stocker.StockerLayers" value="" min="" max="" eventTrigger="" units="" description="Stocker Layers" isArray="false" />
- <ECID id="10160001" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker1" value="" min="" max="" eventTrigger="" units="" description="Stocker1 Display Name" isArray="false" />
- <ECID id="10160002" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker10" value="" min="" max="" eventTrigger="" units="" description="Stocker10 Display Name" isArray="false" />
- <ECID id="10160003" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker11" value="" min="" max="" eventTrigger="" units="" description="Stocker11 Display Name" isArray="false" />
- <ECID id="10160004" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker12" value="" min="" max="" eventTrigger="" units="" description="Stocker12 Display Name" isArray="false" />
- <ECID id="10160005" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker13" value="" min="" max="" eventTrigger="" units="" description="Stocker13 Display Name" isArray="false" />
- <ECID id="10160006" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker14" value="" min="" max="" eventTrigger="" units="" description="Stocker14 Display Name" isArray="false" />
- <ECID id="10160007" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker15" value="" min="" max="" eventTrigger="" units="" description="Stocker15 Display Name" isArray="false" />
- <ECID id="10160008" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker16" value="" min="" max="" eventTrigger="" units="" description="Stocker16 Display Name" isArray="false" />
- <ECID id="10160009" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker17" value="" min="" max="" eventTrigger="" units="" description="Stocker17 Display Name" isArray="false" />
- <ECID id="10160010" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker18" value="" min="" max="" eventTrigger="" units="" description="Stocker18 Display Name" isArray="false" />
- <ECID id="10160011" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker2" value="" min="" max="" eventTrigger="" units="" description="Stocker2 Display Name" isArray="false" />
- <ECID id="10160012" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker3" value="" min="" max="" eventTrigger="" units="" description="Stocker3 Display Name" isArray="false" />
- <ECID id="10160013" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker4" value="" min="" max="" eventTrigger="" units="" description="Stocker4 Display Name" isArray="false" />
- <ECID id="10160014" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker5" value="" min="" max="" eventTrigger="" units="" description="Stocker5 Display Name" isArray="false" />
- <ECID id="10160015" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker6" value="" min="" max="" eventTrigger="" units="" description="Stocker6 Display Name" isArray="false" />
- <ECID id="10160016" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker7" value="" min="" max="" eventTrigger="" units="" description="Stocker7 Display Name" isArray="false" />
- <ECID id="10160017" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker8" value="" min="" max="" eventTrigger="" units="" description="Stocker8 Display Name" isArray="false" />
- <ECID id="10160018" valueType="Ascii" logicalName="System.StockerDisplayName.Stocker9" value="" min="" max="" eventTrigger="" units="" description="Stocker9 Display Name" isArray="false" />
- <ECID id="10170001" valueType="Ascii" logicalName="System.WaferType.ED.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10170002" valueType="Ascii" logicalName="System.WaferType.ED.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10170003" valueType="Ascii" logicalName="System.WaferType.ED.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10170004" valueType="Ascii" logicalName="System.WaferType.ED.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10170005" valueType="Ascii" logicalName="System.WaferType.ED.IsDummy" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10170006" valueType="Ascii" logicalName="System.WaferType.ED.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10170007" valueType="Ascii" logicalName="System.WaferType.ED.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />
- <ECID id="10170008" valueType="Ascii" logicalName="System.WaferType.ED.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />
- <ECID id="10170009" valueType="Ascii" logicalName="System.WaferType.ED.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />
- <ECID id="10170010" valueType="Ascii" logicalName="System.WaferType.ED.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />
- <ECID id="10170011" valueType="Ascii" logicalName="System.WaferType.ED.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />
- <ECID id="10170012" valueType="Ascii" logicalName="System.WaferType.ED.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />
- <ECID id="10170013" valueType="Ascii" logicalName="System.WaferType.ED.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10170014" valueType="Ascii" logicalName="System.WaferType.ED.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />
- <ECID id="10170015" valueType="Ascii" logicalName="System.WaferType.ED.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />
- <ECID id="10170016" valueType="Ascii" logicalName="System.WaferType.ED.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />
- <ECID id="10170017" valueType="Ascii" logicalName="System.WaferType.ED.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />
- <ECID id="10170018" valueType="Ascii" logicalName="System.WaferType.ED.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />
- <ECID id="10170019" valueType="Ascii" logicalName="System.WaferType.ED.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />
- <ECID id="10180001" valueType="Ascii" logicalName="System.WaferType.M1.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10180002" valueType="Ascii" logicalName="System.WaferType.M1.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10180003" valueType="Ascii" logicalName="System.WaferType.M1.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10180004" valueType="Ascii" logicalName="System.WaferType.M1.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="10180006" valueType="Ascii" logicalName="System.WaferType.M1.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10180007" valueType="Ascii" logicalName="System.WaferType.M1.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />
- <ECID id="10180008" valueType="Ascii" logicalName="System.WaferType.M1.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />
- <ECID id="10180009" valueType="Ascii" logicalName="System.WaferType.M1.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />
- <ECID id="10180010" valueType="Ascii" logicalName="System.WaferType.M1.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />
- <ECID id="10180011" valueType="Ascii" logicalName="System.WaferType.M1.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />
- <ECID id="10180012" valueType="Ascii" logicalName="System.WaferType.M1.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />
- <ECID id="10180013" valueType="Ascii" logicalName="System.WaferType.M1.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10180014" valueType="Ascii" logicalName="System.WaferType.M1.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />
- <ECID id="10180015" valueType="Ascii" logicalName="System.WaferType.M1.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />
- <ECID id="10180016" valueType="Ascii" logicalName="System.WaferType.M1.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />
- <ECID id="10180017" valueType="Ascii" logicalName="System.WaferType.M1.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />
- <ECID id="10180018" valueType="Ascii" logicalName="System.WaferType.M1.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />
- <ECID id="10180019" valueType="Ascii" logicalName="System.WaferType.M1.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />
- <ECID id="10190001" valueType="Ascii" logicalName="System.WaferType.M2.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10190002" valueType="Ascii" logicalName="System.WaferType.M2.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10190003" valueType="Ascii" logicalName="System.WaferType.M2.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10190004" valueType="Ascii" logicalName="System.WaferType.M2.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10190005" valueType="Ascii" logicalName="System.WaferType.M2.IsDummy" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10190006" valueType="Ascii" logicalName="System.WaferType.M2.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10190007" valueType="Ascii" logicalName="System.WaferType.M2.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />
- <ECID id="10190008" valueType="Ascii" logicalName="System.WaferType.M2.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />
- <ECID id="10190009" valueType="Ascii" logicalName="System.WaferType.M2.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />
- <ECID id="10190010" valueType="Ascii" logicalName="System.WaferType.M2.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />
- <ECID id="10190011" valueType="Ascii" logicalName="System.WaferType.M2.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />
- <ECID id="10190012" valueType="Ascii" logicalName="System.WaferType.M2.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />
- <ECID id="10190013" valueType="Ascii" logicalName="System.WaferType.M2.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10190014" valueType="Ascii" logicalName="System.WaferType.M2.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />
- <ECID id="10190015" valueType="Ascii" logicalName="System.WaferType.M2.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />
- <ECID id="10190016" valueType="Ascii" logicalName="System.WaferType.M2.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />
- <ECID id="10190017" valueType="Ascii" logicalName="System.WaferType.M2.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />
- <ECID id="10190018" valueType="Ascii" logicalName="System.WaferType.M2.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />
- <ECID id="10190019" valueType="Ascii" logicalName="System.WaferType.M2.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />
- <ECID id="10200001" valueType="Ascii" logicalName="System.WaferType.P1.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10200002" valueType="Ascii" logicalName="System.WaferType.P1.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10200003" valueType="Ascii" logicalName="System.WaferType.P1.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10200004" valueType="Ascii" logicalName="System.WaferType.P1.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10200005" valueType="Ascii" logicalName="System.WaferType.P1.IsDummy" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10200006" valueType="Ascii" logicalName="System.WaferType.P1.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10200007" valueType="Ascii" logicalName="System.WaferType.P1.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />
- <ECID id="10200008" valueType="Ascii" logicalName="System.WaferType.P1.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />
- <ECID id="10200009" valueType="Ascii" logicalName="System.WaferType.P1.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />
- <ECID id="10200010" valueType="Ascii" logicalName="System.WaferType.P1.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />
- <ECID id="10200011" valueType="Ascii" logicalName="System.WaferType.P1.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />
- <ECID id="10200012" valueType="Ascii" logicalName="System.WaferType.P1.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />
- <ECID id="10200013" valueType="Ascii" logicalName="System.WaferType.P1.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10200014" valueType="Ascii" logicalName="System.WaferType.P1.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />
- <ECID id="10200015" valueType="Ascii" logicalName="System.WaferType.P1.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />
- <ECID id="10200016" valueType="Ascii" logicalName="System.WaferType.P1.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />
- <ECID id="10200017" valueType="Ascii" logicalName="System.WaferType.P1.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />
- <ECID id="10200018" valueType="Ascii" logicalName="System.WaferType.P1.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />
- <ECID id="10200019" valueType="Ascii" logicalName="System.WaferType.P1.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />
- <ECID id="10210001" valueType="Ascii" logicalName="System.WaferType.P2.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10210002" valueType="Ascii" logicalName="System.WaferType.P2.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10210003" valueType="Ascii" logicalName="System.WaferType.P2.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10210004" valueType="Ascii" logicalName="System.WaferType.P2.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10210005" valueType="Ascii" logicalName="System.WaferType.P2.IsDummy" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10210006" valueType="Ascii" logicalName="System.WaferType.P2.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10210007" valueType="Ascii" logicalName="System.WaferType.P2.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />
- <ECID id="10210008" valueType="Ascii" logicalName="System.WaferType.P2.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />
- <ECID id="10210009" valueType="Ascii" logicalName="System.WaferType.P2.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />
- <ECID id="10210010" valueType="Ascii" logicalName="System.WaferType.P2.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />
- <ECID id="10210011" valueType="Ascii" logicalName="System.WaferType.P2.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />
- <ECID id="10210012" valueType="Ascii" logicalName="System.WaferType.P2.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />
- <ECID id="10210013" valueType="Ascii" logicalName="System.WaferType.P2.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10210014" valueType="Ascii" logicalName="System.WaferType.P2.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />
- <ECID id="10210015" valueType="Ascii" logicalName="System.WaferType.P2.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />
- <ECID id="10210016" valueType="Ascii" logicalName="System.WaferType.P2.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />
- <ECID id="10210017" valueType="Ascii" logicalName="System.WaferType.P2.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />
- <ECID id="10210018" valueType="Ascii" logicalName="System.WaferType.P2.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />
- <ECID id="10210019" valueType="Ascii" logicalName="System.WaferType.P2.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />
- <ECID id="10220001" valueType="Ascii" logicalName="System.WaferType.SD.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10220002" valueType="Ascii" logicalName="System.WaferType.SD.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10220003" valueType="Ascii" logicalName="System.WaferType.SD.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10220004" valueType="Ascii" logicalName="System.WaferType.SD.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10220005" valueType="Ascii" logicalName="System.WaferType.SD.IsDummy" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10220006" valueType="Ascii" logicalName="System.WaferType.SD.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10220007" valueType="Ascii" logicalName="System.WaferType.SD.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />
- <ECID id="10220008" valueType="Ascii" logicalName="System.WaferType.SD.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />
- <ECID id="10220009" valueType="Ascii" logicalName="System.WaferType.SD.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />
- <ECID id="10220010" valueType="Ascii" logicalName="System.WaferType.SD.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />
- <ECID id="10220011" valueType="Ascii" logicalName="System.WaferType.SD.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />
- <ECID id="10220012" valueType="Ascii" logicalName="System.WaferType.SD.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />
- <ECID id="10220013" valueType="Ascii" logicalName="System.WaferType.SD.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10220014" valueType="Ascii" logicalName="System.WaferType.SD.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />
- <ECID id="10220015" valueType="Ascii" logicalName="System.WaferType.SD.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />
- <ECID id="10220016" valueType="Ascii" logicalName="System.WaferType.SD.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />
- <ECID id="10220017" valueType="Ascii" logicalName="System.WaferType.SD.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />
- <ECID id="10220018" valueType="Ascii" logicalName="System.WaferType.SD.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />
- <ECID id="10220019" valueType="Ascii" logicalName="System.WaferType.SD.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />
- <ECID id="10230001" valueType="Ascii" logicalName="System.FFU.FFU1.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10240001" valueType="Ascii" logicalName="System.FFU.FFU10.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10250001" valueType="Ascii" logicalName="System.FFU.FFU11.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10260001" valueType="Ascii" logicalName="System.FFU.FFU12.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10270001" valueType="Ascii" logicalName="System.FFU.FFU13.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10280001" valueType="Ascii" logicalName="System.FFU.FFU14.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10290001" valueType="Ascii" logicalName="System.FFU.FFU15.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10300001" valueType="Ascii" logicalName="System.FFU.FFU16.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10310001" valueType="Ascii" logicalName="System.FFU.FFU17.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10320001" valueType="Ascii" logicalName="System.FFU.FFU18.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10330001" valueType="Ascii" logicalName="System.FFU.FFU2.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10340001" valueType="Ascii" logicalName="System.FFU.FFU3.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10350001" valueType="Ascii" logicalName="System.FFU.FFU4.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10360001" valueType="Ascii" logicalName="System.FFU.FFU5.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10370001" valueType="Ascii" logicalName="System.FFU.FFU6.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10380001" valueType="Ascii" logicalName="System.FFU.FFU7.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10390001" valueType="Ascii" logicalName="System.FFU.FFU8.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10400001" valueType="Ascii" logicalName="System.FFU.FFU9.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
- <ECID id="10410001" valueType="Ascii" logicalName="System.FFU.HSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10410002" valueType="Ascii" logicalName="System.FFU.LSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420001" valueType="Ascii" logicalName="System.WaferType.P.AccFilmThick" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420002" valueType="Ascii" logicalName="System.WaferType.P.AlternativeWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420003" valueType="Ascii" logicalName="System.WaferType.P.CanProcessContinuously" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420004" valueType="Ascii" logicalName="System.WaferType.P.FullName" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420005" valueType="Ascii" logicalName="System.WaferType.P.IsDummy" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420006" valueType="Ascii" logicalName="System.WaferType.P.IsReturnWafer" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420007" valueType="Ascii" logicalName="System.WaferType.P.MAPPING" value="" min="" max="" eventTrigger="" units="" description="Mapping" isArray="false" />
- <ECID id="10420008" valueType="Ascii" logicalName="System.WaferType.P.MOVECST" value="" min="" max="" eventTrigger="" units="" description="Moving transfer foup" isArray="false" />
- <ECID id="10420009" valueType="Ascii" logicalName="System.WaferType.P.NOFOUP" value="" min="" max="" eventTrigger="" units="" description="no foup" isArray="false" />
- <ECID id="10420010" valueType="Ascii" logicalName="System.WaferType.P.ONBOAT" value="" min="" max="" eventTrigger="" units="" description="Complete Wafers Charging" isArray="false" />
- <ECID id="10420011" valueType="Ascii" logicalName="System.WaferType.P.PRCEND" value="" min="" max="" eventTrigger="" units="" description="There are foups waiting to be moved out" isArray="false" />
- <ECID id="10420012" valueType="Ascii" logicalName="System.WaferType.P.READY" value="" min="" max="" eventTrigger="" units="" description="have transfer foup" isArray="false" />
- <ECID id="10420013" valueType="Ascii" logicalName="System.WaferType.P.ReturnWaferType" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="10420014" valueType="Ascii" logicalName="System.WaferType.P.SERR1" value="" min="" max="" eventTrigger="" units="" description="Sensor error 1 unrecoverable" isArray="false" />
- <ECID id="10420015" valueType="Ascii" logicalName="System.WaferType.P.SERR2" value="" min="" max="" eventTrigger="" units="" description="Sensor error 2 recoverable" isArray="false" />
- <ECID id="10420016" valueType="Ascii" logicalName="System.WaferType.P.SERR3" value="" min="" max="" eventTrigger="" units="" description="Sensor error 3 recoverable" isArray="false" />
- <ECID id="10420017" valueType="Ascii" logicalName="System.WaferType.P.TRAKCST" value="" min="" max="" eventTrigger="" units="" description="transfer foup on T rack" isArray="false" />
- <ECID id="10420018" valueType="Ascii" logicalName="System.WaferType.P.WCHARG" value="" min="" max="" eventTrigger="" units="" description="Charging wafers in progress" isArray="false" />
- <ECID id="10420019" valueType="Ascii" logicalName="System.WaferType.P.WDCHRG" value="" min="" max="" eventTrigger="" units="" description="Wafer DisCharging is in progress" isArray="false" />
- <ECID id="330010001" valueType="Ascii" logicalName="PM1.AlarmCondition" value="" min="" max="" eventTrigger="" units="" description="Alarm Condition" isArray="false" />
- <ECID id="330010002" valueType="Ascii" logicalName="PM1.AlarmConditionIndex" value="" min="" max="" eventTrigger="" units="" description="Alarm ConditionIndex" isArray="false" />
- <ECID id="330010003" valueType="Ascii" logicalName="PM1.APCPID" value="" min="" max="" eventTrigger="" units="" description="APCP ID" isArray="false" />
- <ECID id="330010004" valueType="Ascii" logicalName="PM1.APCPIDControllerID" value="" min="" max="" eventTrigger="" units="" description="APCP ID ControllerID" isArray="false" />
- <ECID id="330010005" valueType="Ascii" logicalName="PM1.AUXAlarmCondtionUnit" value="" min="" max="" eventTrigger="" units="" description="AUX Alarm Condtion Unit" isArray="false" />
- <ECID id="330010006" valueType="Ascii" logicalName="PM1.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="330010007" valueType="Ascii" logicalName="PM1.IsAIAOFloatType" value="" min="" max="" eventTrigger="" units="" description="Is AI AO Float Type" isArray="false" />
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- <ECID id="330040001" valueType="Ascii" logicalName="PM1.APC.VG2.PressureScale" value="" min="" max="" eventTrigger="" units="" description="Pressure Scale" isArray="false" />
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- <ECID id="330050002" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH11EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH11" isArray="false" />
- <ECID id="330050003" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH12EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH12" isArray="false" />
- <ECID id="330050004" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH13EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH13" isArray="false" />
- <ECID id="330050005" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH14EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH14" isArray="false" />
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- <ECID id="330050007" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH16EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH16" isArray="false" />
- <ECID id="330050008" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH1EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH1" isArray="false" />
- <ECID id="330050009" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH2EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH2" isArray="false" />
- <ECID id="330050010" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH3EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH3" isArray="false" />
- <ECID id="330050011" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH4EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH4" isArray="false" />
- <ECID id="330050012" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH5EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH5" isArray="false" />
- <ECID id="330050013" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH6EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH6" isArray="false" />
- <ECID id="330050014" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH7EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH7" isArray="false" />
- <ECID id="330050015" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH8EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH8" isArray="false" />
- <ECID id="330050016" valueType="Ascii" logicalName="PM1.AUX.AO_Unit1CH9EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit1-CH9" isArray="false" />
- <ECID id="330050017" valueType="Ascii" logicalName="PM1.AUX.AO_Unit2CH10EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit2-CH10" isArray="false" />
- <ECID id="330050018" valueType="Ascii" logicalName="PM1.AUX.AO_Unit2CH11EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit2-CH11" isArray="false" />
- <ECID id="330050019" valueType="Ascii" logicalName="PM1.AUX.AO_Unit2CH12EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit2-CH12" isArray="false" />
- <ECID id="330050020" valueType="Ascii" logicalName="PM1.AUX.AO_Unit2CH13EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit2-CH13" isArray="false" />
- <ECID id="330050021" valueType="Ascii" logicalName="PM1.AUX.AO_Unit2CH14EnableIn" value="" min="" max="" eventTrigger="" units="" description="Unit2-CH14" isArray="false" />
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- <ECID id="338190004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.17.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
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- <ECID id="338250002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.22.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
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- <ECID id="338260002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.23.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
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- <ECID id="338260004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.23.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
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- <ECID id="338270002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.24.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
- <ECID id="338270003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.24.ILKTime" value="" min="" max="" eventTrigger="" units="" description="ILKTime" isArray="false" />
- <ECID id="338270004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.24.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
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- <ECID id="338280002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.25.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
- <ECID id="338280003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.25.ILKTime" value="" min="" max="" eventTrigger="" units="" description="ILKTime" isArray="false" />
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- <ECID id="338400002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.36.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
- <ECID id="338400003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.36.ILKTime" value="" min="" max="" eventTrigger="" units="" description="ILKTime" isArray="false" />
- <ECID id="338400004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.36.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
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- <ECID id="338410002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.37.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
- <ECID id="338410003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.37.ILKTime" value="" min="" max="" eventTrigger="" units="" description="ILKTime" isArray="false" />
- <ECID id="338410004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.37.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
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- <ECID id="338420002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.38.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
- <ECID id="338420003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.38.ILKTime" value="" min="" max="" eventTrigger="" units="" description="ILKTime" isArray="false" />
- <ECID id="338420004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.38.Name" value="" min="" max="" eventTrigger="" units="" description="Name" isArray="false" />
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- <ECID id="338430002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.39.DelayOnTime" value="" min="" max="" eventTrigger="" units="" description="DelayOnTime" isArray="false" />
- <ECID id="338430003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.InterLock.39.ILKTime" value="" min="" max="" eventTrigger="" units="" description="ILKTime" isArray="false" />
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- <ECID id="860010010" valueType="Ascii" logicalName="WaferRobot.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="860010011" valueType="Ascii" logicalName="WaferRobot.IsSupport5Wafer" value="" min="" max="" eventTrigger="" units="" description="Is Support 5 Wafer" isArray="false" />
- <ECID id="860010012" valueType="Ascii" logicalName="WaferRobot.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="860010013" valueType="Ascii" logicalName="WaferRobot.PickTimeout" value="" min="" max="" eventTrigger="" units="" description="Pick Time Out" isArray="false" />
- <ECID id="860010014" valueType="Ascii" logicalName="WaferRobot.PlaceTimeout" value="" min="" max="" eventTrigger="" units="" description="Place Time Out" isArray="false" />
- <ECID id="860010015" valueType="Ascii" logicalName="WaferRobot.RetractTimeout" value="" min="" max="" eventTrigger="" units="" description="Retract Time Out" isArray="false" />
- <ECID id="860010016" valueType="Ascii" logicalName="WaferRobot.RobotCommunicationToken" value="" min="" max="" eventTrigger="" units="" description="Robot Communication Token" isArray="false" />
- <ECID id="860010017" valueType="Ascii" logicalName="WaferRobot.RobotSpeed" value="" min="" max="" eventTrigger="" units="" description="Robot速度, 1-100百分比" isArray="false" />
- <ECID id="860010018" valueType="Ascii" logicalName="WaferRobot.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Slot Count" isArray="false" />
- <ECID id="860010019" valueType="Ascii" logicalName="WaferRobot.TransferMode" value="" min="" max="" eventTrigger="" units="" description="Transfer Mode" isArray="false" />
- <ECID id="860010020" valueType="Ascii" logicalName="WaferRobot.TransferModeNumber" value="" min="" max="" eventTrigger="" units="" description="Transfer Mode Number" isArray="false" />
- <ECID id="870010001" valueType="Ascii" logicalName="Boat.AutoShutter.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="870010002" valueType="Ascii" logicalName="Boat.AutoShutter.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870020001" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Acc" value="" min="" max="" eventTrigger="" units="" description="Acc" isArray="false" />
- <ECID id="870020002" valueType="Ascii" logicalName="Boat.BoatElevatorServo.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="870020003" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Dec" value="" min="" max="" eventTrigger="" units="" description="Dec" isArray="false" />
- <ECID id="870020004" valueType="Ascii" logicalName="Boat.BoatElevatorServo.IntervalTime" value="" min="" max="" eventTrigger="" units="" description="Interval Time" isArray="false" />
- <ECID id="870020005" valueType="Ascii" logicalName="Boat.BoatElevatorServo.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870020006" valueType="Ascii" logicalName="Boat.BoatElevatorServo.MoveSpeed" value="" min="" max="" eventTrigger="" units="" description="MoveSpeed" isArray="false" />
- <ECID id="870020007" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position1" value="" min="" max="" eventTrigger="" units="" description="Position1" isArray="false" />
- <ECID id="870020008" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position10" value="" min="" max="" eventTrigger="" units="" description="Position10" isArray="false" />
- <ECID id="870020009" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position2" value="" min="" max="" eventTrigger="" units="" description="Position2" isArray="false" />
- <ECID id="870020010" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position3" value="" min="" max="" eventTrigger="" units="" description="Position3" isArray="false" />
- <ECID id="870020011" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position4" value="" min="" max="" eventTrigger="" units="" description="Position4" isArray="false" />
- <ECID id="870020012" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position5" value="" min="" max="" eventTrigger="" units="" description="Position5" isArray="false" />
- <ECID id="870020013" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position6" value="" min="" max="" eventTrigger="" units="" description="Position6" isArray="false" />
- <ECID id="870020014" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position7" value="" min="" max="" eventTrigger="" units="" description="Position7" isArray="false" />
- <ECID id="870020015" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position8" value="" min="" max="" eventTrigger="" units="" description="Position8" isArray="false" />
- <ECID id="870020016" valueType="Ascii" logicalName="Boat.BoatElevatorServo.Position9" value="" min="" max="" eventTrigger="" units="" description="Position9" isArray="false" />
- <ECID id="870030001" valueType="Ascii" logicalName="Boat.BoatRotationServo.Acc" value="" min="" max="" eventTrigger="" units="" description="Acc" isArray="false" />
- <ECID id="870030002" valueType="Ascii" logicalName="Boat.BoatRotationServo.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="870030003" valueType="Ascii" logicalName="Boat.BoatRotationServo.Dec" value="" min="" max="" eventTrigger="" units="" description="Dec" isArray="false" />
- <ECID id="870030004" valueType="Ascii" logicalName="Boat.BoatRotationServo.IntervalTime" value="" min="" max="" eventTrigger="" units="" description="Interval Time" isArray="false" />
- <ECID id="870030005" valueType="Ascii" logicalName="Boat.BoatRotationServo.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870030006" valueType="Ascii" logicalName="Boat.BoatRotationServo.MoveSpeed" value="" min="" max="" eventTrigger="" units="" description="MoveSpeed" isArray="false" />
- <ECID id="870030007" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position1" value="" min="" max="" eventTrigger="" units="" description="Position1" isArray="false" />
- <ECID id="870030008" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position10" value="" min="" max="" eventTrigger="" units="" description="Position10" isArray="false" />
- <ECID id="870030009" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position2" value="" min="" max="" eventTrigger="" units="" description="Position2" isArray="false" />
- <ECID id="870030010" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position3" value="" min="" max="" eventTrigger="" units="" description="Position3" isArray="false" />
- <ECID id="870030011" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position4" value="" min="" max="" eventTrigger="" units="" description="Position4" isArray="false" />
- <ECID id="870030012" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position5" value="" min="" max="" eventTrigger="" units="" description="Position5" isArray="false" />
- <ECID id="870030013" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position6" value="" min="" max="" eventTrigger="" units="" description="Position6" isArray="false" />
- <ECID id="870030014" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position7" value="" min="" max="" eventTrigger="" units="" description="Position7" isArray="false" />
- <ECID id="870030015" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position8" value="" min="" max="" eventTrigger="" units="" description="Position8" isArray="false" />
- <ECID id="870030016" valueType="Ascii" logicalName="Boat.BoatRotationServo.Position9" value="" min="" max="" eventTrigger="" units="" description="Position9" isArray="false" />
- <ECID id="870030017" valueType="Ascii" logicalName="Boat.BoatRotationServo.RotateTime" value="" min="" max="" eventTrigger="" units="" description="RotateTime" isArray="false" />
- <ECID id="870040001" valueType="Ascii" logicalName="Boat.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="870040002" valueType="Ascii" logicalName="Boat.IntervalTime" value="" min="" max="" eventTrigger="" units="" description="Interval Time" isArray="false" />
- <ECID id="870040003" valueType="Ascii" logicalName="Boat.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="870040004" valueType="Ascii" logicalName="Boat.RAxisInterval" value="" min="" max="" eventTrigger="" units="" description="R Axis Interval" isArray="false" />
- <ECID id="870040005" valueType="Ascii" logicalName="Boat.RAxisSpeed" value="" min="" max="" eventTrigger="" units="" description="R Axis Speed" isArray="false" />
- <ECID id="870040006" valueType="Ascii" logicalName="Boat.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Boat Slot Count" isArray="false" />
- <ECID id="870040007" valueType="Ascii" logicalName="Boat.ZAxisDownSpeed" value="" min="" max="" eventTrigger="" units="" description="Z Down Speed" isArray="false" />
- <ECID id="870040008" valueType="Ascii" logicalName="Boat.ZAxisUpSpeed" value="" min="" max="" eventTrigger="" units="" description="Z Up Speed" isArray="false" />
- <ECID id="870040009" valueType="Ascii" logicalName="Boat.ZMaxPosition" value="" min="" max="" eventTrigger="" units="" description="Z Max Position" isArray="false" />
- <ECID id="870040010" valueType="Ascii" logicalName="Boat.ZMinPosition" value="" min="" max="" eventTrigger="" units="" description="Z Min Position" isArray="false" />
- <ECID id="940010001" valueType="Ascii" logicalName="CarrierRobot.Address" value="" min="" max="" eventTrigger="" units="" description="Robot ip,default 192.168.250.32:13000" isArray="false" />
- <ECID id="940010002" valueType="Ascii" logicalName="CarrierRobot.Blade1Enable" value="" min="" max="" eventTrigger="" units="" description="Blade1 Enable" isArray="false" />
- <ECID id="940010003" valueType="Ascii" logicalName="CarrierRobot.Blade2Enable" value="" min="" max="" eventTrigger="" units="" description="Blade2 Enable" isArray="false" />
- <ECID id="940010004" valueType="Ascii" logicalName="CarrierRobot.Blade2Slots" value="" min="" max="" eventTrigger="" units="" description="Slot数目" isArray="false" />
- <ECID id="940010005" valueType="Ascii" logicalName="CarrierRobot.ConnectTimeout" value="" min="" max="" eventTrigger="" units="" description="Connect Time Out" isArray="false" />
- <ECID id="940010006" valueType="Ascii" logicalName="CarrierRobot.DualBlade1TransferEnable" value="" min="" max="" eventTrigger="" units="" description="Dual Blade1 Transfer Enable" isArray="false" />
- <ECID id="940010007" valueType="Ascii" logicalName="CarrierRobot.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="Enable Log Message" isArray="false" />
- <ECID id="940010008" valueType="Ascii" logicalName="CarrierRobot.ExtendTimeout" value="" min="" max="" eventTrigger="" units="" description="Extend Time Out" isArray="false" />
- <ECID id="940010009" valueType="Ascii" logicalName="CarrierRobot.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="940010010" valueType="Ascii" logicalName="CarrierRobot.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="940010011" valueType="Ascii" logicalName="CarrierRobot.PickTimeout" value="" min="" max="" eventTrigger="" units="" description="Pick Time Out" isArray="false" />
- <ECID id="940010012" valueType="Ascii" logicalName="CarrierRobot.PlaceTimeout" value="" min="" max="" eventTrigger="" units="" description="Place Time Out" isArray="false" />
- <ECID id="940010013" valueType="Ascii" logicalName="CarrierRobot.RetractTimeout" value="" min="" max="" eventTrigger="" units="" description="Retract Time Out" isArray="false" />
- <ECID id="940010014" valueType="Ascii" logicalName="CarrierRobot.RobotCommunicationToken" value="" min="" max="" eventTrigger="" units="" description="Robot Communication Token" isArray="false" />
- <ECID id="940010015" valueType="Ascii" logicalName="CarrierRobot.RobotSpeed" value="" min="" max="" eventTrigger="" units="" description="Robot速度, 1-100百分比" isArray="false" />
- <ECID id="940010016" valueType="Ascii" logicalName="CarrierRobot.RobotType" value="" min="" max="" eventTrigger="" units="" description="Robot Type" isArray="false" />
- <ECID id="940010017" valueType="Ascii" logicalName="CarrierRobot.RunToRunMode" value="" min="" max="" eventTrigger="" units="" description="Run To Run Mode" isArray="false" />
- <ECID id="940010018" valueType="Ascii" logicalName="CarrierRobot.RunToRunNumber" value="" min="" max="" eventTrigger="" units="" description="Run To Run Number" isArray="false" />
- <ECID id="940010019" valueType="Ascii" logicalName="CarrierRobot.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Slot Count" isArray="false" />
- <ECID id="940010020" valueType="Ascii" logicalName="CarrierRobot.TransferMode" value="" min="" max="" eventTrigger="" units="" description="Transfer Mode" isArray="false" />
- <ECID id="940010021" valueType="Ascii" logicalName="CarrierRobot.TransferModeNumber" value="" min="" max="" eventTrigger="" units="" description="Transfer Mode Number" isArray="false" />
- <ECID id="970010001" valueType="Ascii" logicalName="BufferServo.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="970010002" valueType="Ascii" logicalName="BufferServo.MoveSpeed" value="" min="" max="" eventTrigger="" units="" description="MoveSpeed" isArray="false" />
- <ECID id="970010003" valueType="Ascii" logicalName="BufferServo.Position1" value="" min="" max="" eventTrigger="" units="" description="Position1" isArray="false" />
- <ECID id="970010004" valueType="Ascii" logicalName="BufferServo.Position10" value="" min="" max="" eventTrigger="" units="" description="Position10" isArray="false" />
- <ECID id="970010005" valueType="Ascii" logicalName="BufferServo.Position2" value="" min="" max="" eventTrigger="" units="" description="Position2" isArray="false" />
- <ECID id="970010006" valueType="Ascii" logicalName="BufferServo.Position3" value="" min="" max="" eventTrigger="" units="" description="Position3" isArray="false" />
- <ECID id="970010007" valueType="Ascii" logicalName="BufferServo.Position4" value="" min="" max="" eventTrigger="" units="" description="Position4" isArray="false" />
- <ECID id="970010008" valueType="Ascii" logicalName="BufferServo.Position5" value="" min="" max="" eventTrigger="" units="" description="Position5" isArray="false" />
- <ECID id="970010009" valueType="Ascii" logicalName="BufferServo.Position6" value="" min="" max="" eventTrigger="" units="" description="Position6" isArray="false" />
- <ECID id="970010010" valueType="Ascii" logicalName="BufferServo.Position7" value="" min="" max="" eventTrigger="" units="" description="Position7" isArray="false" />
- <ECID id="970010011" valueType="Ascii" logicalName="BufferServo.Position8" value="" min="" max="" eventTrigger="" units="" description="Position8" isArray="false" />
- <ECID id="970010012" valueType="Ascii" logicalName="BufferServo.Position9" value="" min="" max="" eventTrigger="" units="" description="Position9" isArray="false" />
- <ECID id="980010001" valueType="Ascii" logicalName="CarrierID.CarrierIdReaderProtocolType" value="" min="" max="" eventTrigger="" units="" description="Protocol" isArray="false" />
- <ECID id="980020001" valueType="Ascii" logicalName="CarrierID.RFIDReader1.Address" value="" min="" max="" eventTrigger="" units="" description="ConnectioAddress" isArray="false" />
- <ECID id="980020002" valueType="Ascii" logicalName="CarrierID.RFIDReader1.BaudRate" value="" min="" max="" eventTrigger="" units="" description="BaudRate" isArray="false" />
- <ECID id="980020003" valueType="Ascii" logicalName="CarrierID.RFIDReader1.DataBits" value="" min="" max="" eventTrigger="" units="" description="DataBits" isArray="false" />
- <ECID id="980020004" valueType="Ascii" logicalName="CarrierID.RFIDReader1.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="EnableLogMessage" isArray="false" />
- <ECID id="980020005" valueType="Ascii" logicalName="CarrierID.RFIDReader1.Parity" value="" min="" max="" eventTrigger="" units="" description="Parity" isArray="false" />
- <ECID id="980020006" valueType="Ascii" logicalName="CarrierID.RFIDReader1.PortName" value="" min="" max="" eventTrigger="" units="" description="Carrier ID COM串口地址" isArray="false" />
- <ECID id="980020007" valueType="Ascii" logicalName="CarrierID.RFIDReader1.StopBits" value="" min="" max="" eventTrigger="" units="" description="StopBits" isArray="false" />
- <ECID id="990010001" valueType="Ascii" logicalName="FA.ConnectionMode" value="" min="" max="" eventTrigger="" units="" description="Connection Mode" isArray="false" />
- <ECID id="990010002" valueType="Ascii" logicalName="FA.DefaultCommunicationState" value="" min="" max="" eventTrigger="" units="" description="Default Communication State" isArray="false" />
- <ECID id="990010003" valueType="Ascii" logicalName="FA.DefaultControlState" value="" min="" max="" eventTrigger="" units="" description="Default Control State" isArray="false" />
- <ECID id="990010004" valueType="Ascii" logicalName="FA.DefaultControlSubState" value="" min="" max="" eventTrigger="" units="" description="Default Control SubState" isArray="false" />
- <ECID id="990010005" valueType="Ascii" logicalName="FA.DeviceId" value="" min="" max="" eventTrigger="" units="" description="Device ID" isArray="false" />
- <ECID id="990010006" valueType="Ascii" logicalName="FA.EnableSpooling" value="" min="" max="" eventTrigger="" units="" description="Enable Spooling" isArray="false" />
- <ECID id="990010007" valueType="Ascii" logicalName="FA.LinkTestInterval" value="" min="" max="" eventTrigger="" units="" description="Link Test Interval" isArray="false" />
- <ECID id="990010008" valueType="Ascii" logicalName="FA.LocalIpAddress" value="" min="" max="" eventTrigger="" units="" description="Local IP Address" isArray="false" />
- <ECID id="990010009" valueType="Ascii" logicalName="FA.LocalPortNumber" value="" min="" max="" eventTrigger="" units="" description="Local Port Number" isArray="false" />
- <ECID id="990010010" valueType="Ascii" logicalName="FA.LP1BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP1 Bypass CarrierID Reader" isArray="false" />
- <ECID id="990010011" valueType="Ascii" logicalName="FA.LP1DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP1 Default Access Mode" isArray="false" />
- <ECID id="990010012" valueType="Ascii" logicalName="FA.LP1DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP1 Default Transfer State" isArray="false" />
- <ECID id="990010013" valueType="Ascii" logicalName="FA.LP2BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description="LP2 Bypass CarrierID Reader" isArray="false" />
- <ECID id="990010014" valueType="Ascii" logicalName="FA.LP2DefaultAccessMode" value="" min="" max="" eventTrigger="" units="" description="LP2 Default Access Mode" isArray="false" />
- <ECID id="990010015" valueType="Ascii" logicalName="FA.LP2DefaultTransferState" value="" min="" max="" eventTrigger="" units="" description="LP2 Default Transfer State" isArray="false" />
- <ECID id="990010016" valueType="Ascii" logicalName="FA.RemoteIpAddress" value="" min="" max="" eventTrigger="" units="" description="Remote IP Address" isArray="false" />
- <ECID id="990010017" valueType="Ascii" logicalName="FA.RemotePortNumber" value="" min="" max="" eventTrigger="" units="" description="Remote Port Number" isArray="false" />
- <ECID id="990010018" valueType="Ascii" logicalName="FA.T3Timeout" value="" min="" max="" eventTrigger="" units="" description="T3 Timeout" isArray="false" />
- <ECID id="990010019" valueType="Ascii" logicalName="FA.T5Timeout" value="" min="" max="" eventTrigger="" units="" description="T5 Timeout" isArray="false" />
- <ECID id="990010020" valueType="Ascii" logicalName="FA.T6Timeout" value="" min="" max="" eventTrigger="" units="" description="T6 Timeout" isArray="false" />
- <ECID id="990010021" valueType="Ascii" logicalName="FA.T7Timeout" value="" min="" max="" eventTrigger="" units="" description="T7 Timeout" isArray="false" />
- <ECID id="990010022" valueType="Ascii" logicalName="FA.T8Timeout" value="" min="" max="" eventTrigger="" units="" description="T8 Timeout" isArray="false" />
- <ECID id="990020001" valueType="Ascii" logicalName="FA.E84.TP1" value="" min="" max="" eventTrigger="" units="" description="TP1 time out" isArray="false" />
- <ECID id="990020002" valueType="Ascii" logicalName="FA.E84.TP2" value="" min="" max="" eventTrigger="" units="" description="TP2 time out" isArray="false" />
- <ECID id="990020003" valueType="Ascii" logicalName="FA.E84.TP3" value="" min="" max="" eventTrigger="" units="" description="TP3 time out" isArray="false" />
- <ECID id="990020004" valueType="Ascii" logicalName="FA.E84.TP4" value="" min="" max="" eventTrigger="" units="" description="TP4 time out" isArray="false" />
- <ECID id="990020005" valueType="Ascii" logicalName="FA.E84.TP5" value="" min="" max="" eventTrigger="" units="" description="TP5 time out" isArray="false" />
- <ECID id="990020006" valueType="Ascii" logicalName="FA.E84.TP6" value="" min="" max="" eventTrigger="" units="" description="TP6 time out" isArray="false" />
- <ECID id="1000010001" valueType="Ascii" logicalName="FIMS.Address" value="" min="" max="" eventTrigger="" units="" description="Robot ip,default 192.168.38.11:1102" isArray="false" />
- <ECID id="1000010002" valueType="Ascii" logicalName="FIMS.EnableLogMessage" value="" min="" max="" eventTrigger="" units="" description="Enable Log Message" isArray="false" />
- <ECID id="1000020001" valueType="Ascii" logicalName="FIMS.FIMS1.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="1000020002" valueType="Ascii" logicalName="FIMS.FIMS1.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="1000020003" valueType="Ascii" logicalName="FIMS.FIMS1.IsOnline" value="" min="" max="" eventTrigger="" units="" description="Is Online" isArray="false" />
- <ECID id="1000020004" valueType="Ascii" logicalName="FIMS.FIMS1.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="1000030001" valueType="Ascii" logicalName="FIMS.FIMS2.CycleCount" value="" min="" max="" eventTrigger="" units="" description="Cycle Count" isArray="false" />
- <ECID id="1000030002" valueType="Ascii" logicalName="FIMS.FIMS2.HomeTimeout" value="" min="" max="" eventTrigger="" units="" description="Home Time Out" isArray="false" />
- <ECID id="1000030003" valueType="Ascii" logicalName="FIMS.FIMS2.IsOnline" value="" min="" max="" eventTrigger="" units="" description="Is Online" isArray="false" />
- <ECID id="1000030004" valueType="Ascii" logicalName="FIMS.FIMS2.MotionTimeout" value="" min="" max="" eventTrigger="" units="" description="Motion Time Out" isArray="false" />
- <ECID id="1010010001" valueType="Ascii" logicalName="LoadPort.LoadPortPosition" value="" min="" max="" eventTrigger="" units="" description="LoadPort Position" isArray="false" />
- <ECID id="1010010002" valueType="Ascii" logicalName="LoadPort.SlotCount" value="" min="" max="" eventTrigger="" units="" description="Slot Count" isArray="false" />
- <ECID id="1010020001" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedAfterCarrierIn" value="" min="" max="" eventTrigger="" units="" description="M Wafer Count After Process" isArray="false" />
- <ECID id="1010020002" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedAfterCarrierOut" value="" min="" max="" eventTrigger="" units="" description="Access Switch Pressed After Carrier Out" isArray="false" />
- <ECID id="1010020003" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedBeforeCarrierIn" value="" min="" max="" eventTrigger="" units="" description="Access Switch Pressed Before Carrier In" isArray="false" />
- <ECID id="1010020004" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchPressedBeforeCarrierOut" value="" min="" max="" eventTrigger="" units="" description="Access Switch Pressed Before Carrier Out" isArray="false" />
- <ECID id="1010020005" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.AccessSwitchTimeout" value="" min="" max="" eventTrigger="" units="" description="Access Switch Timeout" isArray="false" />
- <ECID id="1010020006" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.CarrierInOrOutDelayTime" value="" min="" max="" eventTrigger="" units="" description="Carrier In Or Out Delay Time" isArray="false" />
- <ECID id="1010020007" valueType="Ascii" logicalName="LoadPort.LoadPortSwitch.OperationSwitchPressedAfterCarrierOut" value="" min="" max="" eventTrigger="" units="" description="Operation Switch Pressed After Carrier Out" isArray="false" />
- <ECID id="1010030001" valueType="Ascii" logicalName="LoadPort.LP1.Address" value="" min="" max="" eventTrigger="" units="" description="ip:port" isArray="false" />
- <ECID id="1010030002" valueType="Ascii" logicalName="LoadPort.LP1.BaudRate" value="" min="" max="" eventTrigger="" units="" description="BaudRate" isArray="false" />
- <ECID id="1010030003" valueType="Ascii" logicalName="LoadPort.LP1.BypassCarrierIDReader" value="" min="" max="" eventTrigger="" units="" description=" " isArray="false" />
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- <ECID id="3312180002" valueType="Ascii" logicalName="PM1.N2Purge.FoupInhibit.FoupInhibitTime" value="" min="" max="" eventTrigger="" units="" description="FOUP TO FOUP WaitTime After BoatLoad" isArray="false" />
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- <ECID id="3312190013" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS521" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312200002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312200004" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS503" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312200010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312200011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312210011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312210012" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS520" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312210013" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS521" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312210014" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS522" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312220016" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveSV227" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312230002" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312230007" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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- <ECID id="3312240002" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240003" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240004" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV59" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240005" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240006" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240007" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveCommonBoxPressureRegulatingCylinder" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240008" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveFIMS1N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240009" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveFIMS2N2Purge" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240010" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240011" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240012" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312240013" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250001" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250002" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan1switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250003" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan2switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250004" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan3switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250005" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan4switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250006" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV202" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250007" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250008" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250009" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250010" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312250011" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312260001" valueType="Ascii" logicalName="PM1.N2Purge.WaferCooling.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable When Wafer Cooling" isArray="false" />
- <ECID id="3312270001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group1" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group10" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group2" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270004" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group3" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270005" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group4" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270006" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group5" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270007" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group6" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270008" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group7" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270009" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group8" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- <ECID id="3312270010" valueType="Ascii" logicalName="PM1.RecipeEditParameter.StepGroup.Group9" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
- </EquipmentConstants>
- <DataVariables>
- <DVID id="3003" valueType="Ascii" logicalName="PPChangeName" value="" eventTrigger="" description="Recipe change name(RCPID)" isArray="false" />
- <DVID id="3004" valueType="I4" logicalName="PPChangeStatus" value="" eventTrigger="" description="The type of change that occurred for the recipe indicated in RcpChangeName 
 0=No change
 1=Created
 2=Updated (modified)
 3=Stored (new)
 4=Replaced
 5=Deleted
 6=Copied
 7=Renamed" isArray="false" />
- <DVID id="3006" valueType="I4" logicalName="AlarmID" value="" eventTrigger="" description="This variable is valid only upon the setting or clearing of an alarm condition and contains the current alarm identification (ALID), regardless of whether that alarm is enabled for reporting." isArray="false" />
- <DVID id="3007" valueType="I4" logicalName="ECChangedID" value="" eventTrigger="" description="Changed ECID list L,n<ECID>" isArray="false" />
- <DVID id="3101" valueType="Ascii" logicalName="EventName" value="" eventTrigger="" description="" isArray="false" />
- <DVID id="3102" valueType="Ascii" logicalName="LotID" value="" eventTrigger="" description="" isArray="false" />
- <DVID id="3103" valueType="Ascii" logicalName="RecipeID" value="" eventTrigger="" description="" isArray="false" />
- <DVID id="3105" valueType="Ascii" logicalName="CarrierID" value="" eventTrigger="" description="The ID of the carrier." isArray="false" />
- <DVID id="3106" valueType="Ascii" logicalName="SlotMap" value="" eventTrigger="" description="Presence status of wafers in the carrier.
L, n (n = Number of SLOTSTATEs)
<SLOTSTATE>
0=UNDEFINED
1=EMPTY
2=NOT EMPTY
3=CORRECTLY OCCUPIED
4=DOUBLE SLOTTED
5=CROSS SLOTTED" isArray="false" />
- <DVID id="3107" valueType="Ascii" logicalName="SequenceID" value="" eventTrigger="" description="" isArray="false" />
- <DVID id="3111" valueType="I4" logicalName="AccessMode" value="" eventTrigger="" description="Load Port Access Mode.
0=MANUAL
1=AUTO" isArray="false" />
- <DVID id="3112" valueType="I4" logicalName="PortAssociationState" value="" eventTrigger="" description="The association state of a load port.
0=NOT ASSOCIATED
1= ASSOCIATED" isArray="false" />
- <DVID id="3113" valueType="I4" logicalName="PortID" value="" eventTrigger="" description="Load port ID" isArray="false" />
- <DVID id="3114" valueType="I4" logicalName="CarrierAccessingStatus" value="" eventTrigger="" description="The current accessing state of the carrier by the equipment.
0=NOT ACCESSED
1=IN ACCESS
2=CARRIER COMPLETE
3=CARRIER STOPPED" isArray="false" />
- <DVID id="3116" valueType="I4" logicalName="PortTransferState" value="" eventTrigger="" description="The current transfer state of a load port. 
0=OUT OF SERVICE
1=TRANSFER BLOCKED
2=READY TO LOAD
3=READY TO UNLOAD" isArray="false" />
- <DVID id="3117" valueType="I4" logicalName="Reason" value="" eventTrigger="" description="The reason for slot map status, SLOT MAP NOT READ to WAITING FOR HOST
0=Verification Needed
1=Verification By Equipment Unsuccessful
2=Read Fail
3=Improper Substrate Position" isArray="false" />
- <DVID id="3118" valueType="Ascii" logicalName="LocationID" value="" eventTrigger="" description="The ID of a carrier location." isArray="false" />
- <DVID id="3119" valueType="I4" logicalName="SlotMapStatus" value="" eventTrigger="" description="State of the carrier slot map status. 
0=SLOT MAP NOT READ
1=WAITING FOR HOST
2=SLOT MAP VERIFICATION OK
3=SLOT MAP VERIFICATION FAIL" isArray="false" />
- <DVID id="3201" valueType="Ascii" logicalName="PRJobID" value="" eventTrigger="" description="Process job ID" isArray="false" />
- <DVID id="3202" valueType="I4" logicalName="PRJobState" value="" eventTrigger="" description="Indicates the current state of a Process Job.
0=POOLED
1=SETTING UP
2=WAITINGFORHOST
3=PROCESSING
4=PROCESSING COMPLETE
5=EXECUTING
6=PAUSING
7=PAUSED
8=STOPPING
9=ABORTING
255=(no state)" isArray="false" />
- <DVID id="3203" valueType="I4" logicalName="PrvPRJobState" value="" eventTrigger="" description="The last process job state
 (Values same as DVVAL: 3202)" isArray="false" />
- <DVID id="3205" valueType="List" logicalName="PRMtlNameList" value="" eventTrigger="" description="" isArray="false" />
- <DVID id="3210" valueType="List" logicalName="RecVariableList" value="" eventTrigger="" description="" isArray="false" />
- <DVID id="3301" valueType="Ascii" logicalName="CJID" value="" eventTrigger="" description="Control Job ID" isArray="false" />
- <DVID id="3302" valueType="I4" logicalName="CJState" value="" eventTrigger="" description="Indicates the current state of a Control Job.
0=QUEUED
1=SELECTED
2=WAITINGFORSTART
3=EXECUTING
4=PAUSED (*1)
5=COMPLETED
255=(no state)" isArray="false" />
- <DVID id="3404" valueType="Ascii" logicalName="SubstID" value="" eventTrigger="" description="Identifier of substrate associated with last event." isArray="false" />
- <DVID id="3405" valueType="Ascii" logicalName="SubstLocID" value="" eventTrigger="" description="Identifier for equipment substrate location associated with the last event." isArray="false" />
- <DVID id="3406" valueType="I4" logicalName="SubstLocState" value="" eventTrigger="" description="State of substrate location associated with the last event.
0=UNOCCUPIED
1=OCCUPIED" isArray="false" />
- <DVID id="3407" valueType="I4" logicalName="SubstProcState" value="" eventTrigger="" description="Processing state of the substrate associated with the last event.
0=NEEDS PROCESSING
1=IN PROCESS
2=PROCESSED
3=ABORTED
4=STOPPED
5=REJECT
6=LOST
7=SKIPPED
255=(no state)" isArray="false" />
- <DVID id="3408" valueType="I4" logicalName="PrvSubstProcState" value="" eventTrigger="" description="The last board process state
(Values same as DVVAL: 3407)" isArray="false" />
- <DVID id="3505" valueType="List" logicalName="PPIDList" value="" eventTrigger="" description="List of PPID.
L, n
L, 3
<PPID> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3506" valueType="List" logicalName="SlotMapList" value="" eventTrigger="" description="List of map slot result.
L, n
L, 3
<SlotMapInt> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3507" valueType="Ascii" logicalName="BatchLocID" value="" eventTrigger="" description="BatchLocID" isArray="false" />
- <DVID id="3508" valueType="Ascii" logicalName="BoatID" value="" eventTrigger="" description="BoatID" isArray="false" />
- <DVID id="3509" valueType="List" logicalName="WaferIDList" value="" eventTrigger="" description="List of waferID.
L, n
L, 3
<waferID> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3510" valueType="List" logicalName="PrdVariableList" value="" eventTrigger="" description="List of PrdVariable.
L, n
L, 3
<PrdVariable> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3511" valueType="List" logicalName="CarrierIDList" value="" eventTrigger="" description="List of CarrierID.
L, n
L, 3
<CarrierID> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3512" valueType="Ascii" logicalName="Usage" value="" eventTrigger="" description="Usage" isArray="false" />
- <DVID id="3513" valueType="Ascii" logicalName="EPTState" value="" eventTrigger="" description="EPTState" isArray="false" />
- <DVID id="3514" valueType="List" logicalName="BufferCapacitiyList" value="" eventTrigger="" description="List of BufferCapacitiy .
L, n
L, 3
<BufferCapacitiy> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3515" valueType="List" logicalName="BufferMaterialInfo" value="" eventTrigger="" description="List of BufferMaterial.
L, n
L, 3
<BufferMaterial> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3518" valueType="Ascii" logicalName="PPStepChange" value="" eventTrigger="" description="BoatThickness" isArray="false" />
- <DVID id="3519" valueType="List" logicalName="ProcessCarrierIDList" value="" eventTrigger="" description="List of process CarrierID.
L, n
L, 3
<CarrierID> 
<TimeIn>
<TimeOut>" isArray="false" />
- <DVID id="3526" valueType="List" logicalName="BoatSlotMapList" value="" eventTrigger="" description="List of boat map slot result.
L, n
L, 3
<SlotMapInt> 
<TimeIn>
<TimeOut>" isArray="false" />
- </DataVariables>
- <DataCollections useAnnotatedEvent="false">
- <RPTIDs>
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- <RPTID id="2" logicalName="DefaultDefinedReport_2">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- <RPTID id="3" logicalName="DefaultDefinedReport_3">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- <RPTID id="4" logicalName="DefaultDefinedReport_4">
- <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
- </RPTID>
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
- <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
- <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
- </RPTID>
- <RPTID id="6" logicalName="DefaultDefinedReport_6">
- <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
- </RPTID>
- <RPTID id="7" logicalName="DefaultDefinedReport_7">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
- <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="10" logicalName="DefaultDefinedReport_10">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="11" logicalName="DefaultDefinedReport_11">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="12" logicalName="DefaultDefinedReport_12">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="3526" varType="DataVariable" logicalName="BoatSlotMapList" />
- </RPTID>
- <RPTID id="13" logicalName="DefaultDefinedReport_13">
- <ReportVariable id="3301" varType="DataVariable" logicalName="CJID" />
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="14" logicalName="DefaultDefinedReport_14">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- </RPTID>
- <RPTID id="15" logicalName="DefaultDefinedReport_15">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
- <ReportVariable id="3514" varType="DataVariable" logicalName="BufferCapacitiyList" />
- <ReportVariable id="3515" varType="DataVariable" logicalName="BufferMaterialInfo" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="16" logicalName="DefaultDefinedReport_16">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
- <ReportVariable id="3514" varType="DataVariable" logicalName="BufferCapacitiyList" />
- <ReportVariable id="3515" varType="DataVariable" logicalName="BufferMaterialInfo" />
- <ReportVariable id="3505" varType="DataVariable" logicalName="PPIDList" />
- <ReportVariable id="3507" varType="DataVariable" logicalName="BatchLocID" />
- <ReportVariable id="3508" varType="DataVariable" logicalName="BoatID" />
- <ReportVariable id="3509" varType="DataVariable" logicalName="WaferIDList" />
- <ReportVariable id="3510" varType="DataVariable" logicalName="PrdVariableList" />
- <ReportVariable id="3511" varType="DataVariable" logicalName="CarrierIDList" />
- <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
- <ReportVariable id="3513" varType="DataVariable" logicalName="EPTState" />
- <ReportVariable id="3518" varType="DataVariable" logicalName="PPStepChange" />
- <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
- <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
- <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
- <ReportVariable id="3302" varType="DataVariable" logicalName="CJState" />
- <ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
- <ReportVariable id="3101" varType="DataVariable" logicalName="EventName" />
- </RPTID>
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="18" logicalName="DefaultDefinedReport_18">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
- <ReportVariable id="3117" varType="DataVariable" logicalName="Reason" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="20" logicalName="DefaultDefinedReport_20">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="22" logicalName="DefaultDefinedReport_22">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="23" logicalName="DefaultDefinedReport_23">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="24" logicalName="DefaultDefinedReport_24">
- <ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
- <ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </RPTIDs>
- <CEIDs>
- <CEID id="1" logicalName="EquipmentOFFLINE" description="" enabled="true">
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- </CEID>
- <CEID id="2" logicalName="ControlStateLOCAL" description="" enabled="true">
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- </CEID>
- <CEID id="3" logicalName="ControlStateREMOTE" description="" enabled="true">
- <RPTID id="1" logicalName="DefaultDefinedReport_1">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="4" varType="StatusVariable" logicalName="ControlState" />
- </RPTID>
- </CEID>
- <CEID id="4" logicalName="ProcessingStarted" description="" enabled="true">
- <RPTID id="2" logicalName="DefaultDefinedReport_2">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- </CEID>
- <CEID id="5" logicalName="ProcessingCompleted" description="" enabled="true">
- <RPTID id="2" logicalName="DefaultDefinedReport_2">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- </CEID>
- <CEID id="6" logicalName="ProcessingStopped" description="" enabled="true">
- <RPTID id="2" logicalName="DefaultDefinedReport_2">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- </CEID>
- <CEID id="7" logicalName="ProcessingStateChanged" description="" enabled="true">
- <RPTID id="3" logicalName="DefaultDefinedReport_3">
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="8" varType="StatusVariable" logicalName="ProcessState" />
- <ReportVariable id="7" varType="StatusVariable" logicalName="PreviousProcessState" />
- </RPTID>
- </CEID>
- <CEID id="8" logicalName="EquipmentConstantChanged" description="" enabled="true">
- <RPTID id="4" logicalName="DefaultDefinedReport_4">
- <ReportVariable id="3007" varType="DataVariable" logicalName="ECChangedID" />
- </RPTID>
- </CEID>
- <CEID id="9" logicalName="ProcessProgramChanged" description="" enabled="true">
- <RPTID id="5" logicalName="DefaultDefinedReport_5">
- <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
- <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
- <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
- </RPTID>
- </CEID>
- <CEID id="10" logicalName="ProcessProgramSelected" description="" enabled="true">
- <RPTID id="6" logicalName="DefaultDefinedReport_6">
- <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
- </RPTID>
- </CEID>
- <CEID id="11" logicalName="SpoolingActivated" description="" enabled="true" />
- <CEID id="12" logicalName="SpoolingDeactivated" description="" enabled="true" />
- <CEID id="13" logicalName="SpoolingFailed" description="" enabled="true" />
- <CEID id="14" logicalName="ProcessProgramCreated" description="" enabled="true">
- <RPTID id="6" logicalName="DefaultDefinedReport_6">
- <ReportVariable id="3107" varType="DataVariable" logicalName="SequenceID" />
- </RPTID>
- </CEID>
- <CEID id="503" logicalName="WAFER_LEFT_POSITION" description="" enabled="true">
- <RPTID id="7" logicalName="DefaultDefinedReport_7">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
- <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="504" logicalName="WAFER_ARRIVE_POSITION" description="" enabled="true">
- <RPTID id="7" logicalName="DefaultDefinedReport_7">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3405" varType="DataVariable" logicalName="SubstLocID" />
- <ReportVariable id="3406" varType="DataVariable" logicalName="SubstLocState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1000" logicalName="CARRIER_ARRIVED" description="" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1001" logicalName="CARRIER_REMOVED" description="" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1002" logicalName="CARRIER_ID_READ" description="" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1003" logicalName="CARRIER_ID_READ_FAILED" description="" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1004" logicalName="CARRIER_ID_WRITE" description="" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1005" logicalName="CARRIER_ID_WRITE_FAILED" description="" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1006" logicalName="CARRIER_LOADED" description="" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1007" logicalName="CARRIER_UNLOADED" description="" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="1008" logicalName="SLOT_MAP_AVAILABLE" description="" enabled="true">
- <RPTID id="10" logicalName="DefaultDefinedReport_10">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2010" logicalName="ChargeStart" description="" enabled="true">
- <RPTID id="11" logicalName="DefaultDefinedReport_11">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2011" logicalName="ChargeEnd" description="" enabled="true">
- <RPTID id="12" logicalName="DefaultDefinedReport_12">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="3526" varType="DataVariable" logicalName="BoatSlotMapList" />
- </RPTID>
- </CEID>
- <CEID id="2012" logicalName="DischargeStart" description="" enabled="true">
- <RPTID id="12" logicalName="DefaultDefinedReport_12">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- <ReportVariable id="3526" varType="DataVariable" logicalName="BoatSlotMapList" />
- </RPTID>
- </CEID>
- <CEID id="2013" logicalName="DischargeEnd" description="" enabled="true">
- <RPTID id="11" logicalName="DefaultDefinedReport_11">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2020" logicalName="BatchLocOccupied" description="" enabled="true">
- <RPTID id="13" logicalName="DefaultDefinedReport_13">
- <ReportVariable id="3301" varType="DataVariable" logicalName="CJID" />
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2021" logicalName="BatchLocUnOccupied" description="" enabled="true">
- <RPTID id="13" logicalName="DefaultDefinedReport_13">
- <ReportVariable id="3301" varType="DataVariable" logicalName="CJID" />
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3506" varType="DataVariable" logicalName="SlotMapList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2022" logicalName="SideDummyStateAlarm" description="" enabled="true">
- <RPTID id="14" logicalName="DefaultDefinedReport_14">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- </RPTID>
- </CEID>
- <CEID id="2023" logicalName="ExtraDummyStateAlarm" description="" enabled="true">
- <RPTID id="14" logicalName="DefaultDefinedReport_14">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- </RPTID>
- </CEID>
- <CEID id="2024" logicalName="CarrierInEnd" description="" enabled="true">
- <RPTID id="15" logicalName="DefaultDefinedReport_15">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
- <ReportVariable id="3514" varType="DataVariable" logicalName="BufferCapacitiyList" />
- <ReportVariable id="3515" varType="DataVariable" logicalName="BufferMaterialInfo" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2025" logicalName="CarrierOutStart" description="" enabled="true">
- <RPTID id="15" logicalName="DefaultDefinedReport_15">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
- <ReportVariable id="3514" varType="DataVariable" logicalName="BufferCapacitiyList" />
- <ReportVariable id="3515" varType="DataVariable" logicalName="BufferMaterialInfo" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2026" logicalName="CarrierInStart" description="" enabled="true">
- <RPTID id="15" logicalName="DefaultDefinedReport_15">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
- <ReportVariable id="3514" varType="DataVariable" logicalName="BufferCapacitiyList" />
- <ReportVariable id="3515" varType="DataVariable" logicalName="BufferMaterialInfo" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="2027" logicalName="CarrierOutEnd" description="" enabled="true">
- <RPTID id="16" logicalName="DefaultDefinedReport_16">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3512" varType="DataVariable" logicalName="Usage" />
- <ReportVariable id="3514" varType="DataVariable" logicalName="BufferCapacitiyList" />
- <ReportVariable id="3515" varType="DataVariable" logicalName="BufferMaterialInfo" />
- <ReportVariable id="3505" varType="DataVariable" logicalName="PPIDList" />
- <ReportVariable id="3507" varType="DataVariable" logicalName="BatchLocID" />
- <ReportVariable id="3508" varType="DataVariable" logicalName="BoatID" />
- <ReportVariable id="3509" varType="DataVariable" logicalName="WaferIDList" />
- <ReportVariable id="3510" varType="DataVariable" logicalName="PrdVariableList" />
- <ReportVariable id="3511" varType="DataVariable" logicalName="CarrierIDList" />
- <ReportVariable id="3519" varType="DataVariable" logicalName="ProcessCarrierIDList" />
- <ReportVariable id="3513" varType="DataVariable" logicalName="EPTState" />
- <ReportVariable id="3518" varType="DataVariable" logicalName="PPStepChange" />
- <ReportVariable id="3102" varType="DataVariable" logicalName="LotID" />
- <ReportVariable id="3003" varType="DataVariable" logicalName="PPChangeName" />
- <ReportVariable id="3004" varType="DataVariable" logicalName="PPChangeStatus" />
- <ReportVariable id="3302" varType="DataVariable" logicalName="CJState" />
- <ReportVariable id="3006" varType="DataVariable" logicalName="AlarmID" />
- <ReportVariable id="3101" varType="DataVariable" logicalName="EventName" />
- </RPTID>
- </CEID>
- <CEID id="2028" logicalName="SideDummyStateWarning" description="" enabled="true">
- <RPTID id="14" logicalName="DefaultDefinedReport_14">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- </RPTID>
- </CEID>
- <CEID id="2029" logicalName="ExtraDummyStateWarning" description="" enabled="true">
- <RPTID id="14" logicalName="DefaultDefinedReport_14">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- </RPTID>
- </CEID>
- <CEID id="30200" logicalName="LPT_NtoO" description="Load Port Transfer State change form NA to Out of Service" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30201" logicalName="LPT_NtoI" description="Load Port transfer state change from NA to in service" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30202" logicalName="LPT_OtoI" description="Out of service to in service" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30203" logicalName="LPT_ItoO" description="In service to out of service" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30204" logicalName="LPT_ItoTR" description="In service to transfer ready" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30205" logicalName="LPT_ItoTB" description="In service to Transfer block" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30206" logicalName="LPT_TRtoRTL" description="Transfer ready to Ready to load" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30207" logicalName="LPT_TRtoRTU" description="Transfer ready to read to unload" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30208" logicalName="LPT_RTLtoTB" description="Ready to unload to transfer block" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30209" logicalName="LPT_RTUtoTB" description="RTU to TB" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30210" logicalName="LPT_TBtoRTL" description="TB to RTL" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30211" logicalName="LPT_TBtoRTU" description="TB to RTU" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30212" logicalName="LPT_TBtoTR" description="TB to TR" enabled="true">
- <RPTID id="17" logicalName="DefaultDefinedReport_17">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3116" varType="DataVariable" logicalName="PortTransferState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30220" logicalName="CID_NtoWFH" description="CarrierID change form NA to Wait for host" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30221" logicalName="CID_NtoIVO" description="NA to ID verification OK" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30222" logicalName="CID_NtoIVF" description="NA to ID Verification Failed" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30223" logicalName="CID_WFHtoIVO" description="Wait for host to ID Verification OK" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30224" logicalName="CID_WFHtoIVF" description="WFH to Verification Fail" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30225" logicalName="CID_DELETED" description="ID deleted" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30226" logicalName="CID_NtoINR" description="N to ID not read" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30227" logicalName="CID_INRtoIVO_6" description="ID not read to Verification OK transsision 6" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30228" logicalName="CID_INRtoIVO_11" description="ID not read to Verification OK transsision 11" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30229" logicalName="CID_INRtoWFH_7" description="ID not read to Verification OK transsision 7" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30230" logicalName="CID_INRtoWFH_10" description="ID not read to Verification OK transsision 10" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30240" logicalName="CSM_SMNRtoWFH" description="Carrier Slot map change from not read to wait for host" enabled="true">
- <RPTID id="18" logicalName="DefaultDefinedReport_18">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3106" varType="DataVariable" logicalName="SlotMap" />
- <ReportVariable id="3117" varType="DataVariable" logicalName="Reason" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30241" logicalName="CSM_SMNRtoSMVO" description="Carrier Slot map change from not read to verification OK" enabled="true">
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30242" logicalName="CSM_WFHtoSMVO" description="Wait for host to verification OK" enabled="true">
- <RPTID id="20" logicalName="DefaultDefinedReport_20">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30243" logicalName="CSM_WFHtoSMVF" description="Wait for host to verification failed" enabled="true">
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30244" logicalName="CSM_SMNRtoSMVF" description="Not read to verification failed" enabled="true">
- <RPTID id="19" logicalName="DefaultDefinedReport_19">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3118" varType="DataVariable" logicalName="LocationID" />
- <ReportVariable id="3119" varType="DataVariable" logicalName="SlotMapStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30250" logicalName="CA_NAtoIA" description="Carrier access state change from Not access to in access" enabled="true">
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30251" logicalName="CA_IAtoCC" description="Carrier access state change from In access to carrier complete." enabled="true">
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30252" logicalName="CA_IAtoCS" description="In access to carrier stopped." enabled="true">
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30253" logicalName="CA_NAtoCS" description="NA to Carrier stopped" enabled="true">
- <RPTID id="21" logicalName="DefaultDefinedReport_21">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3114" varType="DataVariable" logicalName="CarrierAccessingStatus" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30260" logicalName="LPR_NRtoR" description="Load port reserve state from Not reserve to reserved" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30261" logicalName="LPR_RtoNR" description="" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30270" logicalName="LPCA_NAtoA" description="Load Port carrier assocation from Not associated to associated" enabled="true">
- <RPTID id="22" logicalName="DefaultDefinedReport_22">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30271" logicalName="LPCA_AtoNA" description="" enabled="true">
- <RPTID id="23" logicalName="DefaultDefinedReport_23">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30272" logicalName="LPCA_AtoA" description="" enabled="true">
- <RPTID id="22" logicalName="DefaultDefinedReport_22">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3112" varType="DataVariable" logicalName="PortAssociationState" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30280" logicalName="AM_NtoA" description="Access mode from NA to Auto" enabled="true">
- <RPTID id="24" logicalName="DefaultDefinedReport_24">
- <ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30281" logicalName="AM_NtoM" description="Access mode from NA to Manual" enabled="true">
- <RPTID id="24" logicalName="DefaultDefinedReport_24">
- <ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30282" logicalName="AM_MtoA" description="Access mode from Manual to Auto" enabled="true">
- <RPTID id="24" logicalName="DefaultDefinedReport_24">
- <ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30283" logicalName="AM_AtoM" description="Access mot changed from auto to manual" enabled="true">
- <RPTID id="24" logicalName="DefaultDefinedReport_24">
- <ReportVariable id="3111" varType="DataVariable" logicalName="AccessMode" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30290" logicalName="CR_OPN" description="Carrier Opened" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30291" logicalName="CR_CLS" description="Carrier Clear" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30292" logicalName="CLCHG" description="Carrier Closed" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30293" logicalName="CCLMP" description="Carrier Clmp" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30294" logicalName="CUCLMP" description="Carrier Unclmp" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30295" logicalName="CDOCK" description="Carrier Docked" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30296" logicalName="CUDOCK" description="Carrier Undocked" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30305" logicalName="CID_WRITE" description="Carrier ID Writed" enabled="true">
- <RPTID id="9" logicalName="DefaultDefinedReport_9">
- <ReportVariable id="3105" varType="DataVariable" logicalName="CarrierID" />
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30306" logicalName="CID_WRITE_FAIL" description="Carrier ID Writed Fail" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30309" logicalName="CR_LOADED" description="Carrier Loaded" enabled="true">
- <RPTID id="8" logicalName="DefaultDefinedReport_8">
- <ReportVariable id="3113" varType="DataVariable" logicalName="PortID" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30500" logicalName="CJ_CREATED" description="State change report : (no state)→QUEUED" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30501" logicalName="CJ_CANCELD" description="State change report : QUEUED→(no state)" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30502" logicalName="CJ_SELECTED" description="State change report : QUEUED→SELECTED" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30504" logicalName="CJ_EXECUTING_5" description="State change report : SELECTED→EXECUTING(Control Job State Transition _5)" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30505" logicalName="CJ_EXECUTING_7" description="State change report : WAITING FOR START→EXECUTING(Control Job State Transition _7" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30506" logicalName="CJ_WAITINGFORSTART" description="State change report : SELECTED→WAITING FOR START" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30507" logicalName="CJ_PAUSED" description="State change report : EXECUTING→PAUSED" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30508" logicalName="CJ_RESUME" description="State change report : PAUSED→EXECUTING" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30509" logicalName="CJ_COMPLETE" description="State change report : EXECUTING→COMPLETED" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30510" logicalName="CJ_STOPPED" description="Stop Process.State change report : ACTIVE→COMPLETED" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30511" logicalName="CJ_ABORTED" description="Abort Process.State change report : ACTIVE→COMPLETED" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30512" logicalName="CJ_DELETED" description="State change report : COMPLETED→(no state)" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30600" logicalName="PJ_CREATED" description="State change report : (no state)→POOLED" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30601" logicalName="PJ_SETTINGUP" description="State change report : POOLED→SETTING UP" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30602" logicalName="PJ_WAITINGFORSTART" description="State change report : SETTING UP→WAITING FOR START" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30603" logicalName="PJ_PROCESSING_4" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30604" logicalName="PJ_PROCESSING_5" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30605" logicalName="PJ_PRCOMPLETED" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30606" logicalName="PJ_COMPLETED" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30607" logicalName="PJ_PAUSING" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
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- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30609" logicalName="PJ_RESUMED" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30610" logicalName="PJ_STOPPING_11" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30611" logicalName="PJ_STOPPING_12" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30612" logicalName="PJ_STOPPED" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30613" logicalName="PJ_ABORTING_13" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30614" logicalName="PJ_ABORTING_14" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30615" logicalName="PJ_ABORTING_15" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30616" logicalName="PJ_ABORTED" description="" enabled="true">
- <RPTID id="25" logicalName="DefaultDefinedReport_25">
- <ReportVariable id="3201" varType="DataVariable" logicalName="PRJobID" />
- <ReportVariable id="3202" varType="DataVariable" logicalName="PRJobState" />
- <ReportVariable id="3203" varType="DataVariable" logicalName="PrvPRJobState" />
- <ReportVariable id="3205" varType="DataVariable" logicalName="PRMtlNameList" />
- <ReportVariable id="3103" varType="DataVariable" logicalName="RecipeID" />
- <ReportVariable id="3210" varType="DataVariable" logicalName="RecVariableList" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30706" logicalName="STS_ATDESTINATION" description="" enabled="true">
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
- <ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30710" logicalName="STS_PROCESSED" description="" enabled="true">
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
- <ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30711" logicalName="STS_ABORTED" description="" enabled="true">
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
- <ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30711" logicalName="STS_STOPPED" description="" enabled="true">
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
- <ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- <CEID id="30712" logicalName="STS_REJECTED" description="" enabled="true">
- <RPTID id="26" logicalName="DefaultDefinedReport_26">
- <ReportVariable id="3404" varType="DataVariable" logicalName="SubstID" />
- <ReportVariable id="3407" varType="DataVariable" logicalName="SubstProcState" />
- <ReportVariable id="3408" varType="DataVariable" logicalName="PrvSubstProcState" />
- <ReportVariable id="3" varType="StatusVariable" logicalName="Clock" />
- </RPTID>
- </CEID>
- </CEIDs>
- </DataCollections>
- <Alarms>
- <ALID id="10010001" logicalName="System.ChargeProcessDischargeStartFailedWarning" description="ChargeProcessDischarge start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010001" eventClear="210010001" />
- <ALID id="10010002" logicalName="System.ChargeWaferJobMonitorFailedAlarm" description="ChargeWafer job monitor start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010002" eventClear="210010002" />
- <ALID id="10010003" logicalName="System.ChargeWaferJobStartFailedWarning" description="ChargeWafer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010003" eventClear="210010003" />
- <ALID id="10010004" logicalName="System.CreateWaferFailedWarning" description="Create wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010004" eventClear="210010004" />
- <ALID id="10010005" logicalName="System.DeleteWaferFailedWarning" description="Delete wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010005" eventClear="210010005" />
- <ALID id="10010006" logicalName="System.DischargeWaferJobMonitorFailedAlarm" description="DischargeWafer job monitor start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010006" eventClear="210010006" />
- <ALID id="10010007" logicalName="System.EDWaferTypeThicknessAlarm" description="ED wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010007" eventClear="210010007" />
- <ALID id="10010008" logicalName="System.EDWaferTypeThicknessWarning" description="ED wafer type thickness warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010008" eventClear="210010008" />
- <ALID id="10010009" logicalName="System.EDWaferTypeUseCountAlarm" description="ED wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010009" eventClear="210010009" />
- <ALID id="10010010" logicalName="System.EDWaferTypeUseCountWarning" description="ED wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010010" eventClear="210010010" />
- <ALID id="10010011" logicalName="System.EDWaferTypeUseTimeAlarm" description="ED wafer type use time alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010011" eventClear="210010011" />
- <ALID id="10010012" logicalName="System.EDWaferTypeUseTimeWarning" description="ED wafer type use time warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010012" eventClear="210010012" />
- <ALID id="10010013" logicalName="System.EquipmentEmergencyStopAlarm" description="Equipment emergency stop alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010013" eventClear="210010013" />
- <ALID id="10010014" logicalName="System.ExpertChargeProcessDischargeStartFailedWarning" description="Expert ChargeProcessDischarge start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010014" eventClear="210010014" />
- <ALID id="10010015" logicalName="System.ExpertChargeProcessStartFailedWarning" description="Expert ChargeProcess start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010015" eventClear="210010015" />
- <ALID id="10010016" logicalName="System.LoadCassetteJobStartFailedWarning" description="LoadCassette job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010016" eventClear="210010016" />
- <ALID id="10010017" logicalName="System.LoadProcessStockerStartFailedWarning" description="LoadProcessStocker start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010017" eventClear="210010017" />
- <ALID id="10010018" logicalName="System.LoadProcessUnloadStartFailedWarning" description="LoadProcessUnload start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010018" eventClear="210010018" />
- <ALID id="10010019" logicalName="System.MoveWaferFailedWarning" description="Move wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010019" eventClear="210010019" />
- <ALID id="10010020" logicalName="System.MWaferTypeUseCountAlarm" description="M wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010020" eventClear="210010020" />
- <ALID id="10010021" logicalName="System.MWaferTypeUseCountWarning" description="M wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010021" eventClear="210010021" />
- <ALID id="10010022" logicalName="System.PLCConnectRecoveryWarning" description="PLC connect recovery " category="EquipmentStatusWarning" enabled="false" eventSet="110010022" eventClear="210010022" />
- <ALID id="10010023" logicalName="System.PLCDisconnectAlarm" description="PLC disconnect " category="EquipmentStatusWarning" enabled="false" eventSet="110010023" eventClear="210010023" />
- <ALID id="10010024" logicalName="System.ReturnAllWaferJobStartFailedWarning" description="ReturnAllWafer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010024" eventClear="210010024" />
- <ALID id="10010025" logicalName="System.ReturnWaferFailedWarning" description="Return wafer failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010025" eventClear="210010025" />
- <ALID id="10010026" logicalName="System.SDWaferTypeThicknessAlarm" description="SD wafer type thickness alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010026" eventClear="210010026" />
- <ALID id="10010027" logicalName="System.SDWaferTypeThicknessWarning" description="SD wafer type thickness warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010027" eventClear="210010027" />
- <ALID id="10010028" logicalName="System.SDWaferTypeUseCountAlarm" description="SD wafer type use count alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010028" eventClear="210010028" />
- <ALID id="10010029" logicalName="System.SDWaferTypeUseCountWarning" description="SD wafer type use count warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010029" eventClear="210010029" />
- <ALID id="10010030" logicalName="System.SDWaferTypeUseTimeAlarm" description="SD wafer type use time alarm " category="EquipmentStatusWarning" enabled="false" eventSet="110010030" eventClear="210010030" />
- <ALID id="10010031" logicalName="System.SDWaferTypeUseTimeWarning" description="SD wafer type use time warning " category="EquipmentStatusWarning" enabled="false" eventSet="110010031" eventClear="210010031" />
- <ALID id="10010032" logicalName="System.SetLotIDFailedWarning" description="Set lotID failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010032" eventClear="210010032" />
- <ALID id="10010033" logicalName="System.TransferJobStartFailedWarning" description="Transfer job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010033" eventClear="210010033" />
- <ALID id="10010034" logicalName="System.UnloadCassetteJobStartFailedWarning" description="UnloadCassette job start failed " category="EquipmentStatusWarning" enabled="false" eventSet="110010034" eventClear="210010034" />
- <ALID id="10020001" logicalName="System.CHM.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110020001" eventClear="210020001" />
- <ALID id="10020002" logicalName="System.CHM.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110020002" eventClear="210020002" />
- <ALID id="10030001" logicalName="System.GasLine1.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110030001" eventClear="210030001" />
- <ALID id="10030002" logicalName="System.GasLine1.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110030002" eventClear="210030002" />
- <ALID id="10040001" logicalName="System.GasLine2.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110040001" eventClear="210040001" />
- <ALID id="10040002" logicalName="System.GasLine2.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110040002" eventClear="210040002" />
- <ALID id="10050001" logicalName="System.GasLine3.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110050001" eventClear="210050001" />
- <ALID id="10050002" logicalName="System.GasLine3.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110050002" eventClear="210050002" />
- <ALID id="10060001" logicalName="System.GasLine4.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110060001" eventClear="210060001" />
- <ALID id="10060002" logicalName="System.GasLine4.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110060002" eventClear="210060002" />
- <ALID id="10070001" logicalName="System.GasLine6.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110070001" eventClear="210070001" />
- <ALID id="10070002" logicalName="System.GasLine6.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110070002" eventClear="210070002" />
- <ALID id="10080001" logicalName="System.GasLine7.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110080001" eventClear="210080001" />
- <ALID id="10080002" logicalName="System.GasLine7.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110080002" eventClear="210080002" />
- <ALID id="10090001" logicalName="System.Heater.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110090001" eventClear="210090001" />
- <ALID id="10090002" logicalName="System.Heater.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110090002" eventClear="210090002" />
- <ALID id="10100001" logicalName="System.PM1.CommunicationError" description="Can not Communication " category="EquipmentStatusWarning" enabled="false" eventSet="110100001" eventClear="210100001" />
- <ALID id="10100002" logicalName="System.PM1.ConnectionError" description="Can not connect with " category="EquipmentStatusWarning" enabled="false" eventSet="110100002" eventClear="210100002" />
- <ALID id="20010001" logicalName="LP1.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120010001" eventClear="220010001" />
- <ALID id="20010002" logicalName="LP1.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="120010002" eventClear="220010002" />
- <ALID id="20010003" logicalName="LP1.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120010003" eventClear="220010003" />
- <ALID id="20010004" logicalName="LP1.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120010004" eventClear="220010004" />
- <ALID id="20010005" logicalName="LP1.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="120010005" eventClear="220010005" />
- <ALID id="20010006" logicalName="LP1.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="120010006" eventClear="220010006" />
- <ALID id="20010007" logicalName="LP1.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="120010007" eventClear="220010007" />
- <ALID id="20010008" logicalName="LP1.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="120010008" eventClear="220010008" />
- <ALID id="20010009" logicalName="LP1.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="120010009" eventClear="220010009" />
- <ALID id="30010001" logicalName="LP2.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130010001" eventClear="230010001" />
- <ALID id="30010002" logicalName="LP2.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="130010002" eventClear="230010002" />
- <ALID id="30010003" logicalName="LP2.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130010003" eventClear="230010003" />
- <ALID id="30010004" logicalName="LP2.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130010004" eventClear="230010004" />
- <ALID id="30010005" logicalName="LP2.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="130010005" eventClear="230010005" />
- <ALID id="30010006" logicalName="LP2.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="130010006" eventClear="230010006" />
- <ALID id="30010007" logicalName="LP2.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="130010007" eventClear="230010007" />
- <ALID id="30010008" logicalName="LP2.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="130010008" eventClear="230010008" />
- <ALID id="30010009" logicalName="LP2.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="130010009" eventClear="230010009" />
- <ALID id="40010001" logicalName="LP3.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140010001" eventClear="240010001" />
- <ALID id="40010002" logicalName="LP3.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="140010002" eventClear="240010002" />
- <ALID id="40010003" logicalName="LP3.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140010003" eventClear="240010003" />
- <ALID id="40010004" logicalName="LP3.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140010004" eventClear="240010004" />
- <ALID id="40010005" logicalName="LP3.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="140010005" eventClear="240010005" />
- <ALID id="40010006" logicalName="LP3.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="140010006" eventClear="240010006" />
- <ALID id="40010007" logicalName="LP3.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="140010007" eventClear="240010007" />
- <ALID id="40010008" logicalName="LP3.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="140010008" eventClear="240010008" />
- <ALID id="40010009" logicalName="LP3.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="140010009" eventClear="240010009" />
- <ALID id="50010001" logicalName="LP4.HomeFailAlarm" description="Home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150010001" eventClear="250010001" />
- <ALID id="50010002" logicalName="LP4.HomeTimeoutAlarm" description="Home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="150010002" eventClear="250010002" />
- <ALID id="50010003" logicalName="LP4.LoadFailAlarm" description="Load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150010003" eventClear="250010003" />
- <ALID id="50010004" logicalName="LP4.LoadJobFailWarning" description="Load job fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150010004" eventClear="250010004" />
- <ALID id="50010005" logicalName="LP4.LoadTimeoutAlarm" description="Load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="150010005" eventClear="250010005" />
- <ALID id="50010006" logicalName="LP4.SMIFNotReadyWarning" description="Smif not ready " category="EquipmentStatusWarning" enabled="false" eventSet="150010006" eventClear="250010006" />
- <ALID id="50010007" logicalName="LP4.SMIFPodNotPresentWarning" description="Smif pod not present " category="EquipmentStatusWarning" enabled="false" eventSet="150010007" eventClear="250010007" />
- <ALID id="50010008" logicalName="LP4.UnloadFailAlarm" description="Unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="150010008" eventClear="250010008" />
- <ALID id="50010009" logicalName="LP4.UnloadTimeoutAlarm" description="Unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="150010009" eventClear="250010009" />
- <ALID id="330010001" logicalName="PM1.AGV2Pump InterlockAlarm" description="AGV2Pump Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010001" eventClear="2330010001" />
- <ALID id="330010002" logicalName="PM1.AGVPump InterlockAlarm" description="AGVPump Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010002" eventClear="2330010002" />
- <ALID id="330010003" logicalName="PM1.AlarmCoolingWaterLeakAlarm" description="Cooling water leak Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010003" eventClear="2330010003" />
- <ALID id="330010004" logicalName="PM1.AlarmCSourceAVMFCHeaterINHIBITHIAlarm" description="C-Source AV&MFC heater INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010004" eventClear="2330010004" />
- <ALID id="330010005" logicalName="PM1.AlarmCSourceAVMFCHeaterINHIBITLOWAlarm" description="C-Source AV&MFC heater INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010005" eventClear="2330010005" />
- <ALID id="330010006" logicalName="PM1.AlarmCSourceTANKHeater1INHIBITHIAlarm" description="C-Source TANK heater1 INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010006" eventClear="2330010006" />
- <ALID id="330010007" logicalName="PM1.AlarmCSourceTANKHeater1INHIBITLOWAlarm" description="C-Source TANK heater1 INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010007" eventClear="2330010007" />
- <ALID id="330010008" logicalName="PM1.AlarmCSourceTANKHeater2INHIBITHIAlarm" description="C-Source TANK heater2 INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010008" eventClear="2330010008" />
- <ALID id="330010009" logicalName="PM1.AlarmCSourceTANKHeater2INHIBITLOWAlarm" description="C-Source TANK heater2 INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010009" eventClear="2330010009" />
- <ALID id="330010010" logicalName="PM1.AlarmCSourceTANKHeater3INHIBITHIAlarm" description="C-Source TANK heater3 INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010010" eventClear="2330010010" />
- <ALID id="330010011" logicalName="PM1.AlarmCSourceTANKHeater3INHIBITLOWAlarm" description="C-Source TANK heater3 INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010011" eventClear="2330010011" />
- <ALID id="330010012" logicalName="PM1.AlarmEXHboxwaterleakAlarm" description="EXH box water leak Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010012" eventClear="2330010012" />
- <ALID id="330010013" logicalName="PM1.AlarmGasboxlowerdoorSwAlarm" description="gas box lower door sw Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010013" eventClear="2330010013" />
- <ALID id="330010014" logicalName="PM1.AlarmGasboxupperdoorSwAlarm" description="gas box upper door sw Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010014" eventClear="2330010014" />
- <ALID id="330010015" logicalName="PM1.AlarmGasLeakFaultAlarm" description="gas leak fault Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010015" eventClear="2330010015" />
- <ALID id="330010016" logicalName="PM1.AlarmHeaterBbacksidePanelSWS112Alarm" description="heater backside panel SW S112 Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010016" eventClear="2330010016" />
- <ALID id="330010017" logicalName="PM1.AlarmHeaterRoomSWS11S12Alarm" description="heater room SW S11/S12 Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010017" eventClear="2330010017" />
- <ALID id="330010018" logicalName="PM1.AlarmLABacksideDoorSwitchAlarm" description="LA backside door switch Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010018" eventClear="2330010018" />
- <ALID id="330010019" logicalName="PM1.AlarmLSCWaterLeakAlarm" description="LSC water leak Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010019" eventClear="2330010019" />
- <ALID id="330010020" logicalName="PM1.AlarmMagneticFluidLeakAlarm" description="Magnetic fluid leak Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010020" eventClear="2330010020" />
- <ALID id="330010021" logicalName="PM1.AlarmMainFurnaceTS306Alarm" description="main furnace TS306 Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010021" eventClear="2330010021" />
- <ALID id="330010022" logicalName="PM1.AlarmOPpanelEMO1Alarm" description="OP panel EMO 1 Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010022" eventClear="2330010022" />
- <ALID id="330010023" logicalName="PM1.AlarmOPpanelEMO2Alarm" description="OP panel EMO 2 Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010023" eventClear="2330010023" />
- <ALID id="330010024" logicalName="PM1.AlarmRHCTS305Alarm" description="RHC TS305 Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010024" eventClear="2330010024" />
- <ALID id="330010025" logicalName="PM1.AlarmSignaBoatRAxisAlarm" description="Boat RAxis Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010025" eventClear="2330010025" />
- <ALID id="330010026" logicalName="PM1.AlarmSignaBoatRAxisWarning" description="Boat RAxis Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010026" eventClear="2330010026" />
- <ALID id="330010027" logicalName="PM1.AlarmSignaBoatZAxisAlarm" description="Boat ZAxis Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010027" eventClear="2330010027" />
- <ALID id="330010028" logicalName="PM1.AlarmSignaBoatZAxisWarning" description="Boat ZAxis Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010028" eventClear="2330010028" />
- <ALID id="330010029" logicalName="PM1.AlarmSignaGasHeaterSensorBreakOutAlarm" description="Gas Heater Sensor Break Out Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010029" eventClear="2330010029" />
- <ALID id="330010030" logicalName="PM1.AlarmSignalAirFlowFL70" description="Air Flow FL70 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010030" eventClear="2330010030" />
- <ALID id="330010031" logicalName="PM1.AlarmSignalAirFlowFL71" description="Air Flow FL71 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010031" eventClear="2330010031" />
- <ALID id="330010032" logicalName="PM1.AlarmSignalAirFlowFL72" description="Air Flow FL72 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010032" eventClear="2330010032" />
- <ALID id="330010033" logicalName="PM1.AlarmSignalAV91_1RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010033" eventClear="2330010033" />
- <ALID id="330010034" logicalName="PM1.AlarmSignalAV91_2RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010034" eventClear="2330010034" />
- <ALID id="330010035" logicalName="PM1.AlarmSignalAV91_3RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010035" eventClear="2330010035" />
- <ALID id="330010036" logicalName="PM1.AlarmSignalAV91_4RHCAirInOpened" description="RHC.DMR Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010036" eventClear="2330010036" />
- <ALID id="330010037" logicalName="PM1.AlarmSignalBlowerPower" description="BlowerPower Overload Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010037" eventClear="2330010037" />
- <ALID id="330010038" logicalName="PM1.AlarmSignalBoatLiftMotorHardwareInterlockAlarm" description="Boat Lift Motor Hardware Interlock Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010038" eventClear="2330010038" />
- <ALID id="330010039" logicalName="PM1.AlarmSignalBufferMotorHardwareInterlockAlarm" description="Buffer Motor Hardware Interlock Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010039" eventClear="2330010039" />
- <ALID id="330010040" logicalName="PM1.AlarmSignalC3H61GasLeak1stAlarm" description="C3H6-1 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010040" eventClear="2330010040" />
- <ALID id="330010041" logicalName="PM1.AlarmSignalC3H61GasLeak2ndAlarm" description="C3H6 - 1 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010041" eventClear="2330010041" />
- <ALID id="330010042" logicalName="PM1.AlarmSignalC3H62GasLeak1stAlarm" description="C3H6-2 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010042" eventClear="2330010042" />
- <ALID id="330010043" logicalName="PM1.AlarmSignalC3H62GasLeak2ndAlarm" description="C3H6-2 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010043" eventClear="2330010043" />
- <ALID id="330010044" logicalName="PM1.AlarmSignalCapHeaterAbnormal" description="Cap Heater Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010044" eventClear="2330010044" />
- <ALID id="330010045" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfBoatRotationFL904" description="Cooling Water Flow Alarm Of Boat Rotation FL904 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010045" eventClear="2330010045" />
- <ALID id="330010046" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfFlangeFL905" description="Cooling Water Flow Alarm Of Flang eFL905 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010046" eventClear="2330010046" />
- <ALID id="330010047" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfFurnaceFL902" description="Cooling Water Flow Alarm Of Furnace FL902 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010047" eventClear="2330010047" />
- <ALID id="330010048" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfLoadingAreaFL906" description="Cooling Water Flow Alarm Of Loading Area FL906 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010048" eventClear="2330010048" />
- <ALID id="330010049" logicalName="PM1.AlarmSignalCoolingWaterFlowAlarmOfShuttleFL903" description="Cooling Water Flow Alarm Of Furnace FL903 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010049" eventClear="2330010049" />
- <ALID id="330010050" logicalName="PM1.AlarmSignalCoolingWaterLeak" description="Cooling Water Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010050" eventClear="2330010050" />
- <ALID id="330010051" logicalName="PM1.AlarmSignalCoolingWaterPressureOut1" description="Cooling Water Pressure Out1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010051" eventClear="2330010051" />
- <ALID id="330010052" logicalName="PM1.AlarmSignalCoolingWaterPressureOut2" description="Cooling Water Pressure Out2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010052" eventClear="2330010052" />
- <ALID id="330010053" logicalName="PM1.AlarmSignalDG1Output1" description="P.CNT Pressure NG Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010053" eventClear="2330010053" />
- <ALID id="330010054" logicalName="PM1.AlarmSignalDG1Output2" description="P.CNT Pressure NG Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010054" eventClear="2330010054" />
- <ALID id="330010055" logicalName="PM1.AlarmSignalDMA1GasLeak1stAlarm" description="DMA - 1 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010055" eventClear="2330010055" />
- <ALID id="330010056" logicalName="PM1.AlarmSignalDMA1GasLeak2ndAlarm" description="DMA-1 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010056" eventClear="2330010056" />
- <ALID id="330010057" logicalName="PM1.AlarmSignalDMA2GasLeak1stAlarm" description="DMA-2gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010057" eventClear="2330010057" />
- <ALID id="330010058" logicalName="PM1.AlarmSignalDMA2GasLeak2ndAlarm" description="DMA-2 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010058" eventClear="2330010058" />
- <ALID id="330010059" logicalName="PM1.AlarmSignalDoorOverride" description="Door Override Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010059" eventClear="2330010059" />
- <ALID id="330010060" logicalName="PM1.AlarmSignalEXHBoxWaterLeak" description="EXH Box Water Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010060" eventClear="2330010060" />
- <ALID id="330010061" logicalName="PM1.AlarmSignalF21GasLeak1stAlarm" description="F2-1 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010061" eventClear="2330010061" />
- <ALID id="330010062" logicalName="PM1.AlarmSignalF21GasLeak2ndAlarm" description="F2-1 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010062" eventClear="2330010062" />
- <ALID id="330010063" logicalName="PM1.AlarmSignalF22GasLeak1stAlarm" description="F2-2 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010063" eventClear="2330010063" />
- <ALID id="330010064" logicalName="PM1.AlarmSignalF22GasLeak2ndAlarm" description="F2-2 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010064" eventClear="2330010064" />
- <ALID id="330010065" logicalName="PM1.AlarmSignalF2GasLeak1stAlarm" description="F2 Gas Leak 1st Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010065" eventClear="2330010065" />
- <ALID id="330010066" logicalName="PM1.AlarmSignalF2GasLeak2ndAlarm" description="F2 Gas Leak 2nd Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010066" eventClear="2330010066" />
- <ALID id="330010067" logicalName="PM1.AlarmSignalFBEMO1" description="FB EMO1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010067" eventClear="2330010067" />
- <ALID id="330010068" logicalName="PM1.AlarmSignalFBEMO2" description="FB EMO2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010068" eventClear="2330010068" />
- <ALID id="330010069" logicalName="PM1.AlarmSignalFBFrontDoorSwitch" description="FB Front Door Switch Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010069" eventClear="2330010069" />
- <ALID id="330010070" logicalName="PM1.AlarmSignalFFU1DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010070" eventClear="2330010070" />
- <ALID id="330010071" logicalName="PM1.AlarmSignalFFU2DataWriteError" description="FFU2 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010071" eventClear="2330010071" />
- <ALID id="330010072" logicalName="PM1.AlarmSignalFFU3DataWriteError" description="FFU3 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010072" eventClear="2330010072" />
- <ALID id="330010073" logicalName="PM1.AlarmSignalFFU4DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010073" eventClear="2330010073" />
- <ALID id="330010074" logicalName="PM1.AlarmSignalFFU5DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010074" eventClear="2330010074" />
- <ALID id="330010075" logicalName="PM1.AlarmSignalFFU6DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010075" eventClear="2330010075" />
- <ALID id="330010076" logicalName="PM1.AlarmSignalFFU7DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010076" eventClear="2330010076" />
- <ALID id="330010077" logicalName="PM1.AlarmSignalFFU8DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010077" eventClear="2330010077" />
- <ALID id="330010078" logicalName="PM1.AlarmSignalFFU9DataWriteError" description="FFU1 Data Write Error Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010078" eventClear="2330010078" />
- <ALID id="330010079" logicalName="PM1.AlarmSignalFilterBox1DoorSwitch" description="Filter Box1 Door Switch" category="EquipmentStatusWarning" enabled="false" eventSet="1330010079" eventClear="2330010079" />
- <ALID id="330010080" logicalName="PM1.AlarmSignalFilterBox1Fan1Alarm" description="Filter Box1 Fan1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010080" eventClear="2330010080" />
- <ALID id="330010081" logicalName="PM1.AlarmSignalFilterBox1Fan2Alarm" description="Filter Box1 Fan2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010081" eventClear="2330010081" />
- <ALID id="330010082" logicalName="PM1.AlarmSignalForelineHeaterJacketHeavyAlarm" description="Foreline Heater Jacket Heavy Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010082" eventClear="2330010082" />
- <ALID id="330010083" logicalName="PM1.AlarmSignalForelineHeaterJacketLightAlarm" description="Foreline Heater Jacket Light Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010083" eventClear="2330010083" />
- <ALID id="330010084" logicalName="PM1.AlarmSignalFrontBodyExhaust1stAlarmMS6" description="Front Body Exhaust 1st Alarm MS6 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010084" eventClear="2330010084" />
- <ALID id="330010085" logicalName="PM1.AlarmSignalFrontBodyExhaust2ndAlarmMS6" description="Front Body Exhaust 2nd Alarm MS6 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010085" eventClear="2330010085" />
- <ALID id="330010086" logicalName="PM1.AlarmSignalFurnaceBacksideDoor" description="Furnace Backside Door Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010086" eventClear="2330010086" />
- <ALID id="330010087" logicalName="PM1.AlarmSignalFurnaceMainCircuitBreakerStatusMonitor" description="Furnace Main Circuit Breaker Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010087" eventClear="2330010087" />
- <ALID id="330010088" logicalName="PM1.AlarmSignalGasBoxExhaust1stAlarmMS2" description="Gas Box Exhaust 1st Alarm MS2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010088" eventClear="2330010088" />
- <ALID id="330010089" logicalName="PM1.AlarmSignalGasBoxExhaust2ndAlarmMS2" description="Gas Box Exhaust 2nd Alarm MS2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010089" eventClear="2330010089" />
- <ALID id="330010090" logicalName="PM1.AlarmSignalGasBoxLowerDoorSW" description="Gas Box Lower Door Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010090" eventClear="2330010090" />
- <ALID id="330010091" logicalName="PM1.AlarmSignalGasBoxUpperDoorSW" description="Gas Box Upper Door Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010091" eventClear="2330010091" />
- <ALID id="330010092" logicalName="PM1.AlarmSignalGasLeakFault" description="Gas Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010092" eventClear="2330010092" />
- <ALID id="330010093" logicalName="PM1.AlarmSignalGLBoxPG1CNT1Alarm" description="GL Box PG1 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010093" eventClear="2330010093" />
- <ALID id="330010094" logicalName="PM1.AlarmSignalGLBoxPG1CNT2Alarm" description="GL Box PG1 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010094" eventClear="2330010094" />
- <ALID id="330010095" logicalName="PM1.AlarmSignalGLBoxPG21CNT1Alarm" description="GL box PG21 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010095" eventClear="2330010095" />
- <ALID id="330010096" logicalName="PM1.AlarmSignalGLBoxPG21CNT2Alarm" description="GL box PG21 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010096" eventClear="2330010096" />
- <ALID id="330010097" logicalName="PM1.AlarmSignalGLBoxPG22CNT1Alarm" description="GL box PG22 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010097" eventClear="2330010097" />
- <ALID id="330010098" logicalName="PM1.AlarmSignalGLBoxPG22CNT2Alarm" description="GL box PG22 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010098" eventClear="2330010098" />
- <ALID id="330010099" logicalName="PM1.AlarmSignalGLBoxPG23CNT1Alarm" description="GL box PG23 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010099" eventClear="2330010099" />
- <ALID id="330010100" logicalName="PM1.AlarmSignalGLBoxPG23CNT2Alarm" description="GL box PG23 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010100" eventClear="2330010100" />
- <ALID id="330010101" logicalName="PM1.AlarmSignalGLBoxPG24CNT1Alarm" description="GL box PG24 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010101" eventClear="2330010101" />
- <ALID id="330010102" logicalName="PM1.AlarmSignalGLBoxPG24CNT2Alarm" description="GL box PG24 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010102" eventClear="2330010102" />
- <ALID id="330010103" logicalName="PM1.AlarmSignalGLBoxPG25CNT1Alarm" description="GL box PG25 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010103" eventClear="2330010103" />
- <ALID id="330010104" logicalName="PM1.AlarmSignalGLBoxPG25CNT2Alarm" description="GL box PG25 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010104" eventClear="2330010104" />
- <ALID id="330010105" logicalName="PM1.AlarmSignalGLBoxPG2CNT1Alarm" description="GL Box PG2 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010105" eventClear="2330010105" />
- <ALID id="330010106" logicalName="PM1.AlarmSignalGLBoxPG2CNT2Alarm" description="GL Box PG2 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010106" eventClear="2330010106" />
- <ALID id="330010107" logicalName="PM1.AlarmSignalGLBoxPG31CNT1Alarm" description="GL box PG31 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010107" eventClear="2330010107" />
- <ALID id="330010108" logicalName="PM1.AlarmSignalGLBoxPG31CNT2Alarm" description="GL box PG31 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010108" eventClear="2330010108" />
- <ALID id="330010109" logicalName="PM1.AlarmSignalGLBoxPG32CNT1Alarm" description="GL box PG32 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010109" eventClear="2330010109" />
- <ALID id="330010110" logicalName="PM1.AlarmSignalGLBoxPG32CNT2Alarm" description="GL box PG32 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010110" eventClear="2330010110" />
- <ALID id="330010111" logicalName="PM1.AlarmSignalGLBoxPG3CNT1Alarm" description="GL Box PG3 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010111" eventClear="2330010111" />
- <ALID id="330010112" logicalName="PM1.AlarmSignalGLBoxPG3CNT2Alarm" description="GL Box PG3 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010112" eventClear="2330010112" />
- <ALID id="330010113" logicalName="PM1.AlarmSignalGLBoxPG4CNT1Alarm" description="GL Box PG4 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010113" eventClear="2330010113" />
- <ALID id="330010114" logicalName="PM1.AlarmSignalGLBoxPG4CNT2Alarm" description="GL Box PG4 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010114" eventClear="2330010114" />
- <ALID id="330010115" logicalName="PM1.AlarmSignalGLBoxPG5CNT1Alarm" description="GL Box PG5 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010115" eventClear="2330010115" />
- <ALID id="330010116" logicalName="PM1.AlarmSignalGLBoxPG5CNT2Alarm" description="GL Box PG5 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010116" eventClear="2330010116" />
- <ALID id="330010117" logicalName="PM1.AlarmSignalGLBoxPG6CNT1Alarm" description="GL Box PG6 CNT1 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010117" eventClear="2330010117" />
- <ALID id="330010118" logicalName="PM1.AlarmSignalGLBoxPG6CNT2Alarm" description="GL Box PG6 CNT2 Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010118" eventClear="2330010118" />
- <ALID id="330010119" logicalName="PM1.AlarmSignalGLBoxPG7CNT1Alarm" description="Gas box PG7 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010119" eventClear="2330010119" />
- <ALID id="330010120" logicalName="PM1.AlarmSignalGLBoxPG7CNT2Alarm" description="Gas box PG7 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010120" eventClear="2330010120" />
- <ALID id="330010121" logicalName="PM1.AlarmSignalGLBoxPG8CNT2Alarm" description="Gas box PG8 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010121" eventClear="2330010121" />
- <ALID id="330010122" logicalName="PM1.AlarmSignalGLBoxPG9CNT2Alarm" description="Gas box PG8 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010122" eventClear="2330010122" />
- <ALID id="330010123" logicalName="PM1.AlarmSignalGLBoxVG21Output1" description="GL Box VG21 Output1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010123" eventClear="2330010123" />
- <ALID id="330010124" logicalName="PM1.AlarmSignalGLBoxVG21Output2" description="GL Box VG21 Output2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010124" eventClear="2330010124" />
- <ALID id="330010125" logicalName="PM1.AlarmSignalGLBoxVG21Status" description="GL Box VG21 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010125" eventClear="2330010125" />
- <ALID id="330010126" logicalName="PM1.AlarmSignalGLBoxVG22Output1" description="GL Box VG22 Output1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010126" eventClear="2330010126" />
- <ALID id="330010127" logicalName="PM1.AlarmSignalGLBoxVG22Output2" description="GL Box VG22 Output2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010127" eventClear="2330010127" />
- <ALID id="330010128" logicalName="PM1.AlarmSignalGLBoxVG22Status" description="GL Box VG22 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010128" eventClear="2330010128" />
- <ALID id="330010129" logicalName="PM1.AlarmSignalGLBoxVG32Output1" description="GL Box VG32 Output1 Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010129" eventClear="2330010129" />
- <ALID id="330010130" logicalName="PM1.AlarmSignalGLBoxVG32Output2" description="GL Box VG32 Output2 Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010130" eventClear="2330010130" />
- <ALID id="330010131" logicalName="PM1.AlarmSignalGLBoxVG33Output1" description="GL Box VG33 Output1 Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010131" eventClear="2330010131" />
- <ALID id="330010132" logicalName="PM1.AlarmSignalGLBoxVG33Output2" description="GL Box VG33 Output2 Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010132" eventClear="2330010132" />
- <ALID id="330010133" logicalName="PM1.AlarmSignalHCL1GasLeak1stAlarm" description="HCL-1 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010133" eventClear="2330010133" />
- <ALID id="330010134" logicalName="PM1.AlarmSignalHCL1GasLeak2ndAlarm" description="HCL-1 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010134" eventClear="2330010134" />
- <ALID id="330010135" logicalName="PM1.AlarmSignalHCL2GasLeak1stAlarm" description="HCL-2gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010135" eventClear="2330010135" />
- <ALID id="330010136" logicalName="PM1.AlarmSignalHCL2GasLeak2ndAlarm" description="HCL-2gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010136" eventClear="2330010136" />
- <ALID id="330010137" logicalName="PM1.AlarmSignalHCLGasLeak1stAlarm" description="HCL Gas Leak 1st Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010137" eventClear="2330010137" />
- <ALID id="330010138" logicalName="PM1.AlarmSignalHCLGasLeak2ndAlarm" description="HCL Gas Leak 2nd Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010138" eventClear="2330010138" />
- <ALID id="330010139" logicalName="PM1.AlarmSignalHeaterBacksidePanelSWS112" description="Heater Backside Panel SW S112 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010139" eventClear="2330010139" />
- <ALID id="330010140" logicalName="PM1.AlarmSignalHeaterCCascadePVSBrk" description="HeaterC Cascade Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010140" eventClear="2330010140" />
- <ALID id="330010141" logicalName="PM1.AlarmSignalHeaterCHeaterPVSBrk" description="HeaterC Heater Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010141" eventClear="2330010141" />
- <ALID id="330010142" logicalName="PM1.AlarmSignalHeaterCLCascadePVSBrk" description="HeaterCL Cascade Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010142" eventClear="2330010142" />
- <ALID id="330010143" logicalName="PM1.AlarmSignalHeaterCLHeaterPVSBrk" description="HeaterCL Heater Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010143" eventClear="2330010143" />
- <ALID id="330010144" logicalName="PM1.AlarmSignalHeaterCLOverTemp" description="HeaterCL OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010144" eventClear="2330010144" />
- <ALID id="330010145" logicalName="PM1.AlarmSignalHeaterCOverTemp" description="HeaterC OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010145" eventClear="2330010145" />
- <ALID id="330010146" logicalName="PM1.AlarmSignalHeaterCUCascadePVSBrk" description="HeaterCU Cascade Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010146" eventClear="2330010146" />
- <ALID id="330010147" logicalName="PM1.AlarmSignalHeaterCUHeaterPVSBrk" description="HeaterCU Heater Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010147" eventClear="2330010147" />
- <ALID id="330010148" logicalName="PM1.AlarmSignalHeaterCUOverTemp" description="HeaterCU OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010148" eventClear="2330010148" />
- <ALID id="330010149" logicalName="PM1.AlarmSignalHeaterLCascadePVSBrk" description="HeaterL Cascade Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010149" eventClear="2330010149" />
- <ALID id="330010150" logicalName="PM1.AlarmSignalHeaterLHeaterPVSBrk" description="HeaterL Heater Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010150" eventClear="2330010150" />
- <ALID id="330010151" logicalName="PM1.AlarmSignalHeaterLOverTemp" description="HeaterL OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010151" eventClear="2330010151" />
- <ALID id="330010152" logicalName="PM1.AlarmSignalHeaterRoomSWS11S12" description="Heater Room SW S11 S12 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010152" eventClear="2330010152" />
- <ALID id="330010153" logicalName="PM1.AlarmSignalHeaterUCascadePVSBrk" description="HeaterU Cascade Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010153" eventClear="2330010153" />
- <ALID id="330010154" logicalName="PM1.AlarmSignalHeaterUHeaterPVSBrk" description="HeaterU Heater Tc Break Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010154" eventClear="2330010154" />
- <ALID id="330010155" logicalName="PM1.AlarmSignalHeaterUOverTemp" description="HeaterU OverTemp Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010155" eventClear="2330010155" />
- <ALID id="330010156" logicalName="PM1.AlarmSignalHeatingExhaust1stAlarmMS1" description="Heating Exhaust 1st Alarm MS1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010156" eventClear="2330010156" />
- <ALID id="330010157" logicalName="PM1.AlarmSignalHeatingExhaust2ndAlarmMS1" description="Heating Exhaust 2nd Alarm MS1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010157" eventClear="2330010157" />
- <ALID id="330010158" logicalName="PM1.AlarmSignalHEXOverTemperatureAlarm" description="H-EX over temperature alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010158" eventClear="2330010158" />
- <ALID id="330010159" logicalName="PM1.AlarmSignalHFReconciliationPressureMinAbnormal" description="HF Reconciliation Pressure Min Abnormal Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010159" eventClear="2330010159" />
- <ALID id="330010160" logicalName="PM1.AlarmSignalHotN2Alarm" description="HOT N2 ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010160" eventClear="2330010160" />
- <ALID id="330010161" logicalName="PM1.AlarmSignalK141UPSAlarm" description="K 141 UPS Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010161" eventClear="2330010161" />
- <ALID id="330010162" logicalName="PM1.AlarmSignalK169UPSAlarm" description="K 169 UPS Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010162" eventClear="2330010162" />
- <ALID id="330010163" logicalName="PM1.AlarmSignalLAExhaust1stAlarmMS7" description="L/A Exhaust 1st Alarm MS7 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010163" eventClear="2330010163" />
- <ALID id="330010164" logicalName="PM1.AlarmSignalLAExhaust2ndAlarmMS7" description="L/A Exhaust 2nd Alarm MS7 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010164" eventClear="2330010164" />
- <ALID id="330010165" logicalName="PM1.AlarmSignalLAFFUCommAlarm" description="LA FFU Comm Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010165" eventClear="2330010165" />
- <ALID id="330010166" logicalName="PM1.AlarmSignalLDS1liquidLowWarning" description="LDS1 liquid low warning Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010166" eventClear="2330010166" />
- <ALID id="330010167" logicalName="PM1.AlarmSignalLDS1MajorAlarm" description="LDS1 major alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010167" eventClear="2330010167" />
- <ALID id="330010168" logicalName="PM1.AlarmSignalLDS1MinorWarning" description="LDS1 minor warning Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010168" eventClear="2330010168" />
- <ALID id="330010169" logicalName="PM1.AlarmSignalLDS1TankBlankAlarm" description="LDS1 tank blank alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010169" eventClear="2330010169" />
- <ALID id="330010170" logicalName="PM1.AlarmSignalLDS2LiquidLowWarning" description="LDS2 liquid low warning Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010170" eventClear="2330010170" />
- <ALID id="330010171" logicalName="PM1.AlarmSignalLDS2MajorAlarm" description="LDS2 major alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010171" eventClear="2330010171" />
- <ALID id="330010172" logicalName="PM1.AlarmSignalLDS2MinorWarning" description="LDS2 minor warning Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010172" eventClear="2330010172" />
- <ALID id="330010173" logicalName="PM1.AlarmSignalLDS2TankBlankAlarm" description="LDS2 tank blank alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010173" eventClear="2330010173" />
- <ALID id="330010174" logicalName="PM1.AlarmSignalLoadingAreaExhaust1stAlarmMS5" description="Loading Area Exhaust 1st Alarm MS5 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010174" eventClear="2330010174" />
- <ALID id="330010175" logicalName="PM1.AlarmSignalLoadingAreaExhaust2ndAlarmMS5" description="Loading Area Exhaust 2nd Alarm MS5 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010175" eventClear="2330010175" />
- <ALID id="330010176" logicalName="PM1.AlarmSignalMachineEMO1" description="Machine EMO1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010176" eventClear="2330010176" />
- <ALID id="330010177" logicalName="PM1.AlarmSignalMachineEMO2" description="Machine EMO2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010177" eventClear="2330010177" />
- <ALID id="330010178" logicalName="PM1.AlarmSignalMachineEMS1" description="Machine EMS1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010178" eventClear="2330010178" />
- <ALID id="330010179" logicalName="PM1.AlarmSignalMachineEMS2" description="Machine EMS2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010179" eventClear="2330010179" />
- <ALID id="330010180" logicalName="PM1.AlarmSignalMagneticFluidLeak" description="Magnetic Fluid Leak Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010180" eventClear="2330010180" />
- <ALID id="330010181" logicalName="PM1.AlarmSignalMainFurnaceCellingTS306" description="Main Furnace Celling TS306 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010181" eventClear="2330010181" />
- <ALID id="330010182" logicalName="PM1.AlarmSignalMINI8CommAlarm" description="MINI8 Comm Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010182" eventClear="2330010182" />
- <ALID id="330010183" logicalName="PM1.AlarmSignalN2FlowInFOUPAbnormal" description="N2 Flow in FOUP Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010183" eventClear="2330010183" />
- <ALID id="330010184" logicalName="PM1.AlarmSignalN2PurgeBOXPG14CNT1" description="N2 Purge BOX PG14 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010184" eventClear="2330010184" />
- <ALID id="330010185" logicalName="PM1.AlarmSignalN2PurgeBOXPG14CNT2" description="N2 Purge BOX PG14 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010185" eventClear="2330010185" />
- <ALID id="330010186" logicalName="PM1.AlarmSignalN2PurgeBOXPG15CNT1" description="N2 Purge BOX PG15 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010186" eventClear="2330010186" />
- <ALID id="330010187" logicalName="PM1.AlarmSignalN2PurgeBOXPG15CNT2" description="N2 Purge BOX PG15 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010187" eventClear="2330010187" />
- <ALID id="330010188" logicalName="PM1.AlarmSignalN2PurgeBOXPG16CNT1" description="N2 Purge BOX PG16 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010188" eventClear="2330010188" />
- <ALID id="330010189" logicalName="PM1.AlarmSignalN2PurgeBOXPG16CNT2" description="N2 Purge BOX PG16 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010189" eventClear="2330010189" />
- <ALID id="330010190" logicalName="PM1.AlarmSignalN2PurgeBOXPG70CNT1" description="N2 Purge BOX PG70 CNT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010190" eventClear="2330010190" />
- <ALID id="330010191" logicalName="PM1.AlarmSignalN2PurgeBOXPG70CNT2" description="N2 Purge BOX PG70 CNT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010191" eventClear="2330010191" />
- <ALID id="330010192" logicalName="PM1.AlarmSignalNegLmtPosBoatZAxis" description="Neg Lmt Pos Boat ZAxis " category="EquipmentStatusWarning" enabled="false" eventSet="1330010192" eventClear="2330010192" />
- <ALID id="330010193" logicalName="PM1.AlarmSignalNH31GasLeak1stAlarm" description="H3-1gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010193" eventClear="2330010193" />
- <ALID id="330010194" logicalName="PM1.AlarmSignalNH31GasLeak2ndAlarm" description="NH3-1gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010194" eventClear="2330010194" />
- <ALID id="330010195" logicalName="PM1.AlarmSignalNH32GasLeak1stAlarm" description="NH3-2gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010195" eventClear="2330010195" />
- <ALID id="330010196" logicalName="PM1.AlarmSignalNH32GasLeak2ndAlarm" description="NH3-2 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010196" eventClear="2330010196" />
- <ALID id="330010197" logicalName="PM1.AlarmSignalNH3GasLeak1stAlarm" description="NH3 Gas Leak 1stTriger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010197" eventClear="2330010197" />
- <ALID id="330010198" logicalName="PM1.AlarmSignalNH3GasLeak2ndAlarm" description="NH3 Gas Leak 2ndTriger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010198" eventClear="2330010198" />
- <ALID id="330010199" logicalName="PM1.AlarmSignalNO1GasLeak1stAlarm" description="NO-1 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010199" eventClear="2330010199" />
- <ALID id="330010200" logicalName="PM1.AlarmSignalNO1GasLeak2ndAlarm" description="NO-1 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010200" eventClear="2330010200" />
- <ALID id="330010201" logicalName="PM1.AlarmSignalNO2GasLeak1stAlarm" description="NO-2 gas leak 1st alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010201" eventClear="2330010201" />
- <ALID id="330010202" logicalName="PM1.AlarmSignalNO2GasLeak2ndAlarm" description="NO-2 gas leak 2nd alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010202" eventClear="2330010202" />
- <ALID id="330010203" logicalName="PM1.AlarmSignalO2ConcentrationEcho1" description="O2 Concentration Echo1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010203" eventClear="2330010203" />
- <ALID id="330010204" logicalName="PM1.AlarmSignalO2ConcentrationEcho2" description="O2 Concentration Echo2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010204" eventClear="2330010204" />
- <ALID id="330010205" logicalName="PM1.AlarmSignalO2ConcentrationHI" description="O2 Concentration High Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010205" eventClear="2330010205" />
- <ALID id="330010206" logicalName="PM1.AlarmSignalO2ConcentrationLow" description="O2 Concentration Low Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010206" eventClear="2330010206" />
- <ALID id="330010207" logicalName="PM1.AlarmSignalOPBoxPS11Out1" description="OP Box PS11 Out1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010207" eventClear="2330010207" />
- <ALID id="330010208" logicalName="PM1.AlarmSignalOPBoxPS11Out2" description="OP Box PS11 Out2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010208" eventClear="2330010208" />
- <ALID id="330010209" logicalName="PM1.AlarmSignalOPPanelEMO1" description="OP Panel EMO1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010209" eventClear="2330010209" />
- <ALID id="330010210" logicalName="PM1.AlarmSignalOPPanelEMO2" description="OP Panel EMO2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010210" eventClear="2330010210" />
- <ALID id="330010211" logicalName="PM1.AlarmSignalPG12CNT1Alarm" description="PG12 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010211" eventClear="2330010211" />
- <ALID id="330010212" logicalName="PM1.AlarmSignalPG12OUT1" description="PG12 OUT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010212" eventClear="2330010212" />
- <ALID id="330010213" logicalName="PM1.AlarmSignalPG12OUT2" description="PG12 OUT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010213" eventClear="2330010213" />
- <ALID id="330010214" logicalName="PM1.AlarmSignalPG13CNT1Alarm" description="PG13 CNT1 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010214" eventClear="2330010214" />
- <ALID id="330010215" logicalName="PM1.AlarmSignalPG13CNT2Alarm" description="PG13 CNT2 alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010215" eventClear="2330010215" />
- <ALID id="330010216" logicalName="PM1.AlarmSignalPG13OUT1" description="PG13 OUT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010216" eventClear="2330010216" />
- <ALID id="330010217" logicalName="PM1.AlarmSignalPG13OUT2" description="PG13 OUT Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010217" eventClear="2330010217" />
- <ALID id="330010218" logicalName="PM1.AlarmSignalPOD1FOUPVacuumSuckingAlarm" description="POD1 FOUP vacuum sucking alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010218" eventClear="2330010218" />
- <ALID id="330010219" logicalName="PM1.AlarmSignalPOD2FOUPVacuumSuckingAlarm" description="POD2 FOUP vacuum sucking alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010219" eventClear="2330010219" />
- <ALID id="330010220" logicalName="PM1.AlarmSignalPotLmtPosBoatZAxis" description="Pot Lmt Pos Boat ZAxis " category="EquipmentStatusWarning" enabled="false" eventSet="1330010220" eventClear="2330010220" />
- <ALID id="330010221" logicalName="PM1.AlarmSignalPS13HStatus" description="O.PRS Too High Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010221" eventClear="2330010221" />
- <ALID id="330010222" logicalName="PM1.AlarmSignalPS13LStatus" description="CK.PRS Too Low Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010222" eventClear="2330010222" />
- <ALID id="330010223" logicalName="PM1.AlarmSignalPS14OUT1" description="PS14 OUT1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010223" eventClear="2330010223" />
- <ALID id="330010224" logicalName="PM1.AlarmSignalPS14OUT2" description="PS14 OUT2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010224" eventClear="2330010224" />
- <ALID id="330010225" logicalName="PM1.AlarmSignalPS17ValueLowLimitAlarm" description="PS17 Value Low Limit Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010225" eventClear="2330010225" />
- <ALID id="330010226" logicalName="PM1.AlarmSignalPumpDown" description="Pump Down Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010226" eventClear="2330010226" />
- <ALID id="330010227" logicalName="PM1.AlarmSignalREV1stAlarmMS10" description="REV 1st Alarm MS10 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010227" eventClear="2330010227" />
- <ALID id="330010228" logicalName="PM1.AlarmSignalREV1stAlarmMS9" description="REV 1st Alarm MS9 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010228" eventClear="2330010228" />
- <ALID id="330010229" logicalName="PM1.AlarmSignalREV2ndAlarmMS10" description="REV 2nd Alarm MS10 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010229" eventClear="2330010229" />
- <ALID id="330010230" logicalName="PM1.AlarmSignalREV2ndAlarmMS9" description="REV 2nd Alarm MS9 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010230" eventClear="2330010230" />
- <ALID id="330010231" logicalName="PM1.AlarmSignalRFAlarm" description="RF Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010231" eventClear="2330010231" />
- <ALID id="330010232" logicalName="PM1.AlarmSignalRFSetPowerReached" description="RF Output Abnormal Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010232" eventClear="2330010232" />
- <ALID id="330010233" logicalName="PM1.AlarmSignalRHC1stAlarmMS8" description="RHC 1st Alarm MS8 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010233" eventClear="2330010233" />
- <ALID id="330010234" logicalName="PM1.AlarmSignalRHC2ndAlarmMS8" description="RHC 2nd Alarm MS8 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010234" eventClear="2330010234" />
- <ALID id="330010235" logicalName="PM1.AlarmSignalRHCFlowAlarmFL901" description="RHC Flow Alarm FL901 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010235" eventClear="2330010235" />
- <ALID id="330010236" logicalName="PM1.AlarmSignalRHCTS305" description="RHC TS305 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010236" eventClear="2330010236" />
- <ALID id="330010237" logicalName="PM1.AlarmSignalScavengeExhaust1stAlarmMS3" description="Scavenge Exhaust 1st Alarm MS3 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010237" eventClear="2330010237" />
- <ALID id="330010238" logicalName="PM1.AlarmSignalScavengeExhaust2ndAlarmMS3" description="Scavenge Exhaust 2nd Alarm MS3 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010238" eventClear="2330010238" />
- <ALID id="330010239" logicalName="PM1.AlarmSignalScrubberAlarm" description="Scrubber Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010239" eventClear="2330010239" />
- <ALID id="330010240" logicalName="PM1.AlarmSignalScrubberWarning" description="Scrubber Warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010240" eventClear="2330010240" />
- <ALID id="330010241" logicalName="PM1.AlarmSignalSMK1DetectorSensorFault" description="SMK1 Detector SensorFault Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010241" eventClear="2330010241" />
- <ALID id="330010242" logicalName="PM1.AlarmSignalSMK1DetectorSensorFireAlarm" description="SMK1 Detector Sensor Fire Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010242" eventClear="2330010242" />
- <ALID id="330010243" logicalName="PM1.AlarmSignalSMK1DetectorSensorOperates" description="SMK1 Detector Sensor Operates Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010243" eventClear="2330010243" />
- <ALID id="330010244" logicalName="PM1.AlarmSignalStepperMotorAlarm" description="Stepper Motor Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010244" eventClear="2330010244" />
- <ALID id="330010245" logicalName="PM1.AlarmSignalT101TempStatus" description="T101 Temp Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010245" eventClear="2330010245" />
- <ALID id="330010246" logicalName="PM1.AlarmSignalT102TempStatus" description="T102 Temp Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010246" eventClear="2330010246" />
- <ALID id="330010247" logicalName="PM1.AlarmSignalT103TempStatus" description="T103 Temp Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010247" eventClear="2330010247" />
- <ALID id="330010248" logicalName="PM1.AlarmSignalTransferRoomBacksideDoor" description="Transfer Room Backside Door Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010248" eventClear="2330010248" />
- <ALID id="330010249" logicalName="PM1.AlarmSignalTS30CapInsideTempSW" description="TS30 Cap Inside Temp Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010249" eventClear="2330010249" />
- <ALID id="330010250" logicalName="PM1.AlarmSignalTS31CapOutsideTempSW" description="TS31 Cap Outside Temp Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010250" eventClear="2330010250" />
- <ALID id="330010251" logicalName="PM1.AlarmSignalTS34RotationTempSW" description="TS34 Rotation Temp Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010251" eventClear="2330010251" />
- <ALID id="330010252" logicalName="PM1.AlarmSignalUPSAlarm" description="UPS Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010252" eventClear="2330010252" />
- <ALID id="330010253" logicalName="PM1.AlarmSignalUPSFault" description="UPS Fault Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010253" eventClear="2330010253" />
- <ALID id="330010254" logicalName="PM1.AlarmSignalVaccum1PumpAlarm" description="Vaccum1 Pump Alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010254" eventClear="2330010254" />
- <ALID id="330010255" logicalName="PM1.AlarmSignalVaccum1PumpWarning" description="Vaccum1 Pump Warning Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010255" eventClear="2330010255" />
- <ALID id="330010256" logicalName="PM1.AlarmSignalVaccum2PumpAlarm" description="Vaccum2 Pump Alarm Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010256" eventClear="2330010256" />
- <ALID id="330010257" logicalName="PM1.AlarmSignalVaccum2PumpWarning" description="Vaccum2 Pump Warning Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010257" eventClear="2330010257" />
- <ALID id="330010258" logicalName="PM1.AlarmSignalVaccumPumpAlarm" description="Vaccum Pump Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010258" eventClear="2330010258" />
- <ALID id="330010259" logicalName="PM1.AlarmSignalVaccumPumpWarning" description="Vaccum Pump Warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010259" eventClear="2330010259" />
- <ALID id="330010260" logicalName="PM1.AlarmSignalValveBoxExhaust1stAlarmMS4" description="Valve Box Exhaust 1st Alarm MS4 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010260" eventClear="2330010260" />
- <ALID id="330010261" logicalName="PM1.AlarmSignalValveBoxExhaust2ndAlarmMS4" description="Valve Box Exhaust 2nd Alarm MS4 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010261" eventClear="2330010261" />
- <ALID id="330010262" logicalName="PM1.AlarmSignalVG11HighAlarm" description="VG11 High Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010262" eventClear="2330010262" />
- <ALID id="330010263" logicalName="PM1.AlarmSignalVG11LowAlarm" description="VG11 Low Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010263" eventClear="2330010263" />
- <ALID id="330010264" logicalName="PM1.AlarmSignalVG12HighAlarm" description="VG12 High Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010264" eventClear="2330010264" />
- <ALID id="330010265" logicalName="PM1.AlarmSignalVG12LowAlarm" description="VG12 Low Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010265" eventClear="2330010265" />
- <ALID id="330010266" logicalName="PM1.AlarmSignalVG13HighAlarm" description="VG13 High Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010266" eventClear="2330010266" />
- <ALID id="330010267" logicalName="PM1.AlarmSignalVG13LowAlarm" description="VG13 Low Alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010267" eventClear="2330010267" />
- <ALID id="330010268" logicalName="PM1.AlarmSignalWaterFlowAlarmFL901" description="Water Flow Alarm FL901 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010268" eventClear="2330010268" />
- <ALID id="330010269" logicalName="PM1.AlarmSignalWaterFlowAlarmFL902" description="Water Flow Alarm FL902 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010269" eventClear="2330010269" />
- <ALID id="330010270" logicalName="PM1.AlarmSignalWaterFlowAlarmFL903" description="Water Flow Alarm FL903 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010270" eventClear="2330010270" />
- <ALID id="330010271" logicalName="PM1.AlarmSignalWaterFlowAlarmFL904" description="Water Flow Alarm FL904 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010271" eventClear="2330010271" />
- <ALID id="330010272" logicalName="PM1.AlarmSignalWaterFlowAlarmFL905" description="Water Flow Alarm FL905 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010272" eventClear="2330010272" />
- <ALID id="330010273" logicalName="PM1.AlarmSignalWaterFlowAlarmFL906" description="Water Flow Alarm FL906 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010273" eventClear="2330010273" />
- <ALID id="330010274" logicalName="PM1.AlarmSignalWaterFlowFL62" description="Water Flow FL62 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010274" eventClear="2330010274" />
- <ALID id="330010275" logicalName="PM1.AlarmSignaMainWaterFlowAlarm" description="Main Water Flow Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010275" eventClear="2330010275" />
- <ALID id="330010276" logicalName="PM1.AlarmSignaTempLimitAlarm" description="Temp Limit Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010276" eventClear="2330010276" />
- <ALID id="330010277" logicalName="PM1.AlarmSiSourceAVMFCHeaterINHIBITHIAlarm" description="Si-Source AV&MFC heater INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010277" eventClear="2330010277" />
- <ALID id="330010278" logicalName="PM1.AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm" description="Si-Source AV&MFC heater INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010278" eventClear="2330010278" />
- <ALID id="330010279" logicalName="PM1.AlarmSiSourceTANKHeater1INHIBITHIAlarm" description="Si-Source TANK heater1 INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010279" eventClear="2330010279" />
- <ALID id="330010280" logicalName="PM1.AlarmSiSourceTANKHeater1INHIBITLOWAlarm" description="Si-Source TANK heater1 INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010280" eventClear="2330010280" />
- <ALID id="330010281" logicalName="PM1.AlarmSiSourceTANKHeater2INHIBITHIAlarm" description="Si-Source TANK heater2 INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010281" eventClear="2330010281" />
- <ALID id="330010282" logicalName="PM1.AlarmSiSourceTANKHeater2INHIBITLOWAlarm" description="Si-Source TANK heater2 INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010282" eventClear="2330010282" />
- <ALID id="330010283" logicalName="PM1.AlarmSiSourceTANKHeater3INHIBITHIAlarm" description="Si-Source TANK heater3 INHIBIT HI ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010283" eventClear="2330010283" />
- <ALID id="330010284" logicalName="PM1.AlarmSiSourceTANKHeater3INHIBITLOWAlarm" description="Si-Source TANK heater3 INHIBIT LOW ALARM Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010284" eventClear="2330010284" />
- <ALID id="330010285" logicalName="PM1.AlarmTS30CapInsideTempSwAlarm" description="TS30 cap inside temp.sw Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010285" eventClear="2330010285" />
- <ALID id="330010286" logicalName="PM1.AlarmTS31capoutsidetemSwAlarm" description="TS31 cap outside temp.sw Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010286" eventClear="2330010286" />
- <ALID id="330010287" logicalName="PM1.AlarmTS34RRotationTempSwAlarm" description="TS34 R rotation temp. sw Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010287" eventClear="2330010287" />
- <ALID id="330010288" logicalName="PM1.APCAngleToleranceAlarm" description="PM1 APC Angle tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010288" eventClear="2330010288" />
- <ALID id="330010289" logicalName="PM1.APCAngleToleranceWarning" description="PM1 APC Angle tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010289" eventClear="2330010289" />
- <ALID id="330010290" logicalName="PM1.APCPressure1ToleranceAlarm" description="PM1 APC Pressure1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010290" eventClear="2330010290" />
- <ALID id="330010291" logicalName="PM1.APCPressure1ToleranceWarning" description="PM1 APC Pressure1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010291" eventClear="2330010291" />
- <ALID id="330010292" logicalName="PM1.APCPressure2ToleranceAlarm" description="PM1 APC Pressure1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010292" eventClear="2330010292" />
- <ALID id="330010293" logicalName="PM1.APCPressure2ToleranceWarning" description="PM1 APC Pressure2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010293" eventClear="2330010293" />
- <ALID id="330010294" logicalName="PM1.APCSetModeAlarm" description="PM1 APC alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010294" eventClear="2330010294" />
- <ALID id="330010295" logicalName="PM1.AUCPump InterlockAlarm" description="AUCPump Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010295" eventClear="2330010295" />
- <ALID id="330010296" logicalName="PM1.AutoProfileTimeOutAlarm" description="Auto profile timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010296" eventClear="2330010296" />
- <ALID id="330010297" logicalName="PM1.AUX100Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010297" eventClear="2330010297" />
- <ALID id="330010298" logicalName="PM1.AUX100Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010298" eventClear="2330010298" />
- <ALID id="330010299" logicalName="PM1.AUX101Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010299" eventClear="2330010299" />
- <ALID id="330010300" logicalName="PM1.AUX101Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010300" eventClear="2330010300" />
- <ALID id="330010301" logicalName="PM1.AUX102Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010301" eventClear="2330010301" />
- <ALID id="330010302" logicalName="PM1.AUX102Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010302" eventClear="2330010302" />
- <ALID id="330010303" logicalName="PM1.AUX103Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010303" eventClear="2330010303" />
- <ALID id="330010304" logicalName="PM1.AUX103Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010304" eventClear="2330010304" />
- <ALID id="330010305" logicalName="PM1.AUX104Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010305" eventClear="2330010305" />
- <ALID id="330010306" logicalName="PM1.AUX104Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010306" eventClear="2330010306" />
- <ALID id="330010307" logicalName="PM1.AUX105Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010307" eventClear="2330010307" />
- <ALID id="330010308" logicalName="PM1.AUX105Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010308" eventClear="2330010308" />
- <ALID id="330010309" logicalName="PM1.AUX106Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010309" eventClear="2330010309" />
- <ALID id="330010310" logicalName="PM1.AUX106Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010310" eventClear="2330010310" />
- <ALID id="330010311" logicalName="PM1.AUX107Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010311" eventClear="2330010311" />
- <ALID id="330010312" logicalName="PM1.AUX107Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010312" eventClear="2330010312" />
- <ALID id="330010313" logicalName="PM1.AUX108Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010313" eventClear="2330010313" />
- <ALID id="330010314" logicalName="PM1.AUX108Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010314" eventClear="2330010314" />
- <ALID id="330010315" logicalName="PM1.AUX109Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010315" eventClear="2330010315" />
- <ALID id="330010316" logicalName="PM1.AUX109Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010316" eventClear="2330010316" />
- <ALID id="330010317" logicalName="PM1.AUX10Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010317" eventClear="2330010317" />
- <ALID id="330010318" logicalName="PM1.AUX10Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010318" eventClear="2330010318" />
- <ALID id="330010319" logicalName="PM1.AUX110Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010319" eventClear="2330010319" />
- <ALID id="330010320" logicalName="PM1.AUX110Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010320" eventClear="2330010320" />
- <ALID id="330010321" logicalName="PM1.AUX111Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010321" eventClear="2330010321" />
- <ALID id="330010322" logicalName="PM1.AUX111Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010322" eventClear="2330010322" />
- <ALID id="330010323" logicalName="PM1.AUX112Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010323" eventClear="2330010323" />
- <ALID id="330010324" logicalName="PM1.AUX112Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010324" eventClear="2330010324" />
- <ALID id="330010325" logicalName="PM1.AUX113Alarm" description="True alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010325" eventClear="2330010325" />
- <ALID id="330010326" logicalName="PM1.AUX113Warning" description="True warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010326" eventClear="2330010326" />
- <ALID id="330010327" logicalName="PM1.AUX11Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010327" eventClear="2330010327" />
- <ALID id="330010328" logicalName="PM1.AUX11Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010328" eventClear="2330010328" />
- <ALID id="330010329" logicalName="PM1.AUX12Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010329" eventClear="2330010329" />
- <ALID id="330010330" logicalName="PM1.AUX12Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010330" eventClear="2330010330" />
- <ALID id="330010331" logicalName="PM1.AUX13Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010331" eventClear="2330010331" />
- <ALID id="330010332" logicalName="PM1.AUX13Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010332" eventClear="2330010332" />
- <ALID id="330010333" logicalName="PM1.AUX14Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010333" eventClear="2330010333" />
- <ALID id="330010334" logicalName="PM1.AUX14Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010334" eventClear="2330010334" />
- <ALID id="330010335" logicalName="PM1.AUX15Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010335" eventClear="2330010335" />
- <ALID id="330010336" logicalName="PM1.AUX15Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010336" eventClear="2330010336" />
- <ALID id="330010337" logicalName="PM1.AUX16Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010337" eventClear="2330010337" />
- <ALID id="330010338" logicalName="PM1.AUX16Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010338" eventClear="2330010338" />
- <ALID id="330010339" logicalName="PM1.AUX17Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010339" eventClear="2330010339" />
- <ALID id="330010340" logicalName="PM1.AUX17Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010340" eventClear="2330010340" />
- <ALID id="330010341" logicalName="PM1.AUX18Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010341" eventClear="2330010341" />
- <ALID id="330010342" logicalName="PM1.AUX18Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010342" eventClear="2330010342" />
- <ALID id="330010343" logicalName="PM1.AUX19Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010343" eventClear="2330010343" />
- <ALID id="330010344" logicalName="PM1.AUX19Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010344" eventClear="2330010344" />
- <ALID id="330010345" logicalName="PM1.AUX1Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010345" eventClear="2330010345" />
- <ALID id="330010346" logicalName="PM1.AUX1Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010346" eventClear="2330010346" />
- <ALID id="330010347" logicalName="PM1.AUX20Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010347" eventClear="2330010347" />
- <ALID id="330010348" logicalName="PM1.AUX20Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010348" eventClear="2330010348" />
- <ALID id="330010349" logicalName="PM1.AUX21Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010349" eventClear="2330010349" />
- <ALID id="330010350" logicalName="PM1.AUX21Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010350" eventClear="2330010350" />
- <ALID id="330010351" logicalName="PM1.AUX22Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010351" eventClear="2330010351" />
- <ALID id="330010352" logicalName="PM1.AUX22Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010352" eventClear="2330010352" />
- <ALID id="330010353" logicalName="PM1.AUX23Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010353" eventClear="2330010353" />
- <ALID id="330010354" logicalName="PM1.AUX23Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010354" eventClear="2330010354" />
- <ALID id="330010355" logicalName="PM1.AUX24Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010355" eventClear="2330010355" />
- <ALID id="330010356" logicalName="PM1.AUX24Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010356" eventClear="2330010356" />
- <ALID id="330010357" logicalName="PM1.AUX25Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010357" eventClear="2330010357" />
- <ALID id="330010358" logicalName="PM1.AUX25Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010358" eventClear="2330010358" />
- <ALID id="330010359" logicalName="PM1.AUX26Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010359" eventClear="2330010359" />
- <ALID id="330010360" logicalName="PM1.AUX26Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010360" eventClear="2330010360" />
- <ALID id="330010361" logicalName="PM1.AUX27Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010361" eventClear="2330010361" />
- <ALID id="330010362" logicalName="PM1.AUX27Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010362" eventClear="2330010362" />
- <ALID id="330010363" logicalName="PM1.AUX28Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010363" eventClear="2330010363" />
- <ALID id="330010364" logicalName="PM1.AUX28Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010364" eventClear="2330010364" />
- <ALID id="330010365" logicalName="PM1.AUX29Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010365" eventClear="2330010365" />
- <ALID id="330010366" logicalName="PM1.AUX29Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010366" eventClear="2330010366" />
- <ALID id="330010367" logicalName="PM1.AUX2Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010367" eventClear="2330010367" />
- <ALID id="330010368" logicalName="PM1.AUX2Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010368" eventClear="2330010368" />
- <ALID id="330010369" logicalName="PM1.AUX30Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010369" eventClear="2330010369" />
- <ALID id="330010370" logicalName="PM1.AUX30Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010370" eventClear="2330010370" />
- <ALID id="330010371" logicalName="PM1.AUX31Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010371" eventClear="2330010371" />
- <ALID id="330010372" logicalName="PM1.AUX31Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010372" eventClear="2330010372" />
- <ALID id="330010373" logicalName="PM1.AUX32Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010373" eventClear="2330010373" />
- <ALID id="330010374" logicalName="PM1.AUX32Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010374" eventClear="2330010374" />
- <ALID id="330010375" logicalName="PM1.AUX33Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010375" eventClear="2330010375" />
- <ALID id="330010376" logicalName="PM1.AUX33Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010376" eventClear="2330010376" />
- <ALID id="330010377" logicalName="PM1.AUX34Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010377" eventClear="2330010377" />
- <ALID id="330010378" logicalName="PM1.AUX34Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010378" eventClear="2330010378" />
- <ALID id="330010379" logicalName="PM1.AUX35Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010379" eventClear="2330010379" />
- <ALID id="330010380" logicalName="PM1.AUX35Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010380" eventClear="2330010380" />
- <ALID id="330010381" logicalName="PM1.AUX36Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010381" eventClear="2330010381" />
- <ALID id="330010382" logicalName="PM1.AUX36Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010382" eventClear="2330010382" />
- <ALID id="330010383" logicalName="PM1.AUX37Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010383" eventClear="2330010383" />
- <ALID id="330010384" logicalName="PM1.AUX37Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010384" eventClear="2330010384" />
- <ALID id="330010385" logicalName="PM1.AUX38Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010385" eventClear="2330010385" />
- <ALID id="330010386" logicalName="PM1.AUX38Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010386" eventClear="2330010386" />
- <ALID id="330010387" logicalName="PM1.AUX39Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010387" eventClear="2330010387" />
- <ALID id="330010388" logicalName="PM1.AUX39Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010388" eventClear="2330010388" />
- <ALID id="330010389" logicalName="PM1.AUX3Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010389" eventClear="2330010389" />
- <ALID id="330010390" logicalName="PM1.AUX3Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010390" eventClear="2330010390" />
- <ALID id="330010391" logicalName="PM1.AUX40Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010391" eventClear="2330010391" />
- <ALID id="330010392" logicalName="PM1.AUX40Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010392" eventClear="2330010392" />
- <ALID id="330010393" logicalName="PM1.AUX41Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010393" eventClear="2330010393" />
- <ALID id="330010394" logicalName="PM1.AUX41Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010394" eventClear="2330010394" />
- <ALID id="330010395" logicalName="PM1.AUX42Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010395" eventClear="2330010395" />
- <ALID id="330010396" logicalName="PM1.AUX42Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010396" eventClear="2330010396" />
- <ALID id="330010397" logicalName="PM1.AUX43Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010397" eventClear="2330010397" />
- <ALID id="330010398" logicalName="PM1.AUX43Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010398" eventClear="2330010398" />
- <ALID id="330010399" logicalName="PM1.AUX44Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010399" eventClear="2330010399" />
- <ALID id="330010400" logicalName="PM1.AUX44Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010400" eventClear="2330010400" />
- <ALID id="330010401" logicalName="PM1.AUX45Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010401" eventClear="2330010401" />
- <ALID id="330010402" logicalName="PM1.AUX45Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010402" eventClear="2330010402" />
- <ALID id="330010403" logicalName="PM1.AUX46Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010403" eventClear="2330010403" />
- <ALID id="330010404" logicalName="PM1.AUX46Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010404" eventClear="2330010404" />
- <ALID id="330010405" logicalName="PM1.AUX47Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010405" eventClear="2330010405" />
- <ALID id="330010406" logicalName="PM1.AUX47Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010406" eventClear="2330010406" />
- <ALID id="330010407" logicalName="PM1.AUX48Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010407" eventClear="2330010407" />
- <ALID id="330010408" logicalName="PM1.AUX48Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010408" eventClear="2330010408" />
- <ALID id="330010409" logicalName="PM1.AUX49Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010409" eventClear="2330010409" />
- <ALID id="330010410" logicalName="PM1.AUX49Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010410" eventClear="2330010410" />
- <ALID id="330010411" logicalName="PM1.AUX4Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010411" eventClear="2330010411" />
- <ALID id="330010412" logicalName="PM1.AUX4Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010412" eventClear="2330010412" />
- <ALID id="330010413" logicalName="PM1.AUX50Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010413" eventClear="2330010413" />
- <ALID id="330010414" logicalName="PM1.AUX50Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010414" eventClear="2330010414" />
- <ALID id="330010415" logicalName="PM1.AUX51Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010415" eventClear="2330010415" />
- <ALID id="330010416" logicalName="PM1.AUX51Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010416" eventClear="2330010416" />
- <ALID id="330010417" logicalName="PM1.AUX52Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010417" eventClear="2330010417" />
- <ALID id="330010418" logicalName="PM1.AUX52Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010418" eventClear="2330010418" />
- <ALID id="330010419" logicalName="PM1.AUX53Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010419" eventClear="2330010419" />
- <ALID id="330010420" logicalName="PM1.AUX53Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010420" eventClear="2330010420" />
- <ALID id="330010421" logicalName="PM1.AUX54Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010421" eventClear="2330010421" />
- <ALID id="330010422" logicalName="PM1.AUX54Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010422" eventClear="2330010422" />
- <ALID id="330010423" logicalName="PM1.AUX55Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010423" eventClear="2330010423" />
- <ALID id="330010424" logicalName="PM1.AUX55Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010424" eventClear="2330010424" />
- <ALID id="330010425" logicalName="PM1.AUX56Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010425" eventClear="2330010425" />
- <ALID id="330010426" logicalName="PM1.AUX56Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010426" eventClear="2330010426" />
- <ALID id="330010427" logicalName="PM1.AUX57Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010427" eventClear="2330010427" />
- <ALID id="330010428" logicalName="PM1.AUX57Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010428" eventClear="2330010428" />
- <ALID id="330010429" logicalName="PM1.AUX58Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010429" eventClear="2330010429" />
- <ALID id="330010430" logicalName="PM1.AUX58Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010430" eventClear="2330010430" />
- <ALID id="330010431" logicalName="PM1.AUX59Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010431" eventClear="2330010431" />
- <ALID id="330010432" logicalName="PM1.AUX59Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010432" eventClear="2330010432" />
- <ALID id="330010433" logicalName="PM1.AUX5Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010433" eventClear="2330010433" />
- <ALID id="330010434" logicalName="PM1.AUX5Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010434" eventClear="2330010434" />
- <ALID id="330010435" logicalName="PM1.AUX60Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010435" eventClear="2330010435" />
- <ALID id="330010436" logicalName="PM1.AUX60Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010436" eventClear="2330010436" />
- <ALID id="330010437" logicalName="PM1.AUX61Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010437" eventClear="2330010437" />
- <ALID id="330010438" logicalName="PM1.AUX61Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010438" eventClear="2330010438" />
- <ALID id="330010439" logicalName="PM1.AUX62Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010439" eventClear="2330010439" />
- <ALID id="330010440" logicalName="PM1.AUX62Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010440" eventClear="2330010440" />
- <ALID id="330010441" logicalName="PM1.AUX63Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010441" eventClear="2330010441" />
- <ALID id="330010442" logicalName="PM1.AUX63Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010442" eventClear="2330010442" />
- <ALID id="330010443" logicalName="PM1.AUX64Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010443" eventClear="2330010443" />
- <ALID id="330010444" logicalName="PM1.AUX64Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010444" eventClear="2330010444" />
- <ALID id="330010445" logicalName="PM1.AUX65Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010445" eventClear="2330010445" />
- <ALID id="330010446" logicalName="PM1.AUX65Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010446" eventClear="2330010446" />
- <ALID id="330010447" logicalName="PM1.AUX66Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010447" eventClear="2330010447" />
- <ALID id="330010448" logicalName="PM1.AUX66Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010448" eventClear="2330010448" />
- <ALID id="330010449" logicalName="PM1.AUX67Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010449" eventClear="2330010449" />
- <ALID id="330010450" logicalName="PM1.AUX67Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010450" eventClear="2330010450" />
- <ALID id="330010451" logicalName="PM1.AUX68Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010451" eventClear="2330010451" />
- <ALID id="330010452" logicalName="PM1.AUX68Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010452" eventClear="2330010452" />
- <ALID id="330010453" logicalName="PM1.AUX69Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010453" eventClear="2330010453" />
- <ALID id="330010454" logicalName="PM1.AUX69Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010454" eventClear="2330010454" />
- <ALID id="330010455" logicalName="PM1.AUX6Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010455" eventClear="2330010455" />
- <ALID id="330010456" logicalName="PM1.AUX6Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010456" eventClear="2330010456" />
- <ALID id="330010457" logicalName="PM1.AUX70Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010457" eventClear="2330010457" />
- <ALID id="330010458" logicalName="PM1.AUX70Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010458" eventClear="2330010458" />
- <ALID id="330010459" logicalName="PM1.AUX71Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010459" eventClear="2330010459" />
- <ALID id="330010460" logicalName="PM1.AUX71Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010460" eventClear="2330010460" />
- <ALID id="330010461" logicalName="PM1.AUX72Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010461" eventClear="2330010461" />
- <ALID id="330010462" logicalName="PM1.AUX72Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010462" eventClear="2330010462" />
- <ALID id="330010463" logicalName="PM1.AUX73Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010463" eventClear="2330010463" />
- <ALID id="330010464" logicalName="PM1.AUX73Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010464" eventClear="2330010464" />
- <ALID id="330010465" logicalName="PM1.AUX74Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010465" eventClear="2330010465" />
- <ALID id="330010466" logicalName="PM1.AUX74Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010466" eventClear="2330010466" />
- <ALID id="330010467" logicalName="PM1.AUX75Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010467" eventClear="2330010467" />
- <ALID id="330010468" logicalName="PM1.AUX75Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010468" eventClear="2330010468" />
- <ALID id="330010469" logicalName="PM1.AUX76Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010469" eventClear="2330010469" />
- <ALID id="330010470" logicalName="PM1.AUX76Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010470" eventClear="2330010470" />
- <ALID id="330010471" logicalName="PM1.AUX77Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010471" eventClear="2330010471" />
- <ALID id="330010472" logicalName="PM1.AUX77Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010472" eventClear="2330010472" />
- <ALID id="330010473" logicalName="PM1.AUX78Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010473" eventClear="2330010473" />
- <ALID id="330010474" logicalName="PM1.AUX78Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010474" eventClear="2330010474" />
- <ALID id="330010475" logicalName="PM1.AUX79Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010475" eventClear="2330010475" />
- <ALID id="330010476" logicalName="PM1.AUX79Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010476" eventClear="2330010476" />
- <ALID id="330010477" logicalName="PM1.AUX7Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010477" eventClear="2330010477" />
- <ALID id="330010478" logicalName="PM1.AUX7Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010478" eventClear="2330010478" />
- <ALID id="330010479" logicalName="PM1.AUX80Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010479" eventClear="2330010479" />
- <ALID id="330010480" logicalName="PM1.AUX80Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010480" eventClear="2330010480" />
- <ALID id="330010481" logicalName="PM1.AUX81Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010481" eventClear="2330010481" />
- <ALID id="330010482" logicalName="PM1.AUX81Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010482" eventClear="2330010482" />
- <ALID id="330010483" logicalName="PM1.AUX82Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010483" eventClear="2330010483" />
- <ALID id="330010484" logicalName="PM1.AUX82Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010484" eventClear="2330010484" />
- <ALID id="330010485" logicalName="PM1.AUX83Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010485" eventClear="2330010485" />
- <ALID id="330010486" logicalName="PM1.AUX83Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010486" eventClear="2330010486" />
- <ALID id="330010487" logicalName="PM1.AUX84Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010487" eventClear="2330010487" />
- <ALID id="330010488" logicalName="PM1.AUX84Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010488" eventClear="2330010488" />
- <ALID id="330010489" logicalName="PM1.AUX85Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010489" eventClear="2330010489" />
- <ALID id="330010490" logicalName="PM1.AUX85Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010490" eventClear="2330010490" />
- <ALID id="330010491" logicalName="PM1.AUX86Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010491" eventClear="2330010491" />
- <ALID id="330010492" logicalName="PM1.AUX86Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010492" eventClear="2330010492" />
- <ALID id="330010493" logicalName="PM1.AUX87Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010493" eventClear="2330010493" />
- <ALID id="330010494" logicalName="PM1.AUX87Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010494" eventClear="2330010494" />
- <ALID id="330010495" logicalName="PM1.AUX88Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010495" eventClear="2330010495" />
- <ALID id="330010496" logicalName="PM1.AUX88Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010496" eventClear="2330010496" />
- <ALID id="330010497" logicalName="PM1.AUX89Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010497" eventClear="2330010497" />
- <ALID id="330010498" logicalName="PM1.AUX89Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010498" eventClear="2330010498" />
- <ALID id="330010499" logicalName="PM1.AUX8Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010499" eventClear="2330010499" />
- <ALID id="330010500" logicalName="PM1.AUX8Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010500" eventClear="2330010500" />
- <ALID id="330010501" logicalName="PM1.AUX90Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010501" eventClear="2330010501" />
- <ALID id="330010502" logicalName="PM1.AUX90Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010502" eventClear="2330010502" />
- <ALID id="330010503" logicalName="PM1.AUX91Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010503" eventClear="2330010503" />
- <ALID id="330010504" logicalName="PM1.AUX91Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010504" eventClear="2330010504" />
- <ALID id="330010505" logicalName="PM1.AUX92Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010505" eventClear="2330010505" />
- <ALID id="330010506" logicalName="PM1.AUX92Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010506" eventClear="2330010506" />
- <ALID id="330010507" logicalName="PM1.AUX93Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010507" eventClear="2330010507" />
- <ALID id="330010508" logicalName="PM1.AUX93Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010508" eventClear="2330010508" />
- <ALID id="330010509" logicalName="PM1.AUX94Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010509" eventClear="2330010509" />
- <ALID id="330010510" logicalName="PM1.AUX94Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010510" eventClear="2330010510" />
- <ALID id="330010511" logicalName="PM1.AUX95Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010511" eventClear="2330010511" />
- <ALID id="330010512" logicalName="PM1.AUX95Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010512" eventClear="2330010512" />
- <ALID id="330010513" logicalName="PM1.AUX96Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010513" eventClear="2330010513" />
- <ALID id="330010514" logicalName="PM1.AUX96Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010514" eventClear="2330010514" />
- <ALID id="330010515" logicalName="PM1.AUX97Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010515" eventClear="2330010515" />
- <ALID id="330010516" logicalName="PM1.AUX97Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010516" eventClear="2330010516" />
- <ALID id="330010517" logicalName="PM1.AUX98Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010517" eventClear="2330010517" />
- <ALID id="330010518" logicalName="PM1.AUX98Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010518" eventClear="2330010518" />
- <ALID id="330010519" logicalName="PM1.AUX99Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010519" eventClear="2330010519" />
- <ALID id="330010520" logicalName="PM1.AUX99Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010520" eventClear="2330010520" />
- <ALID id="330010521" logicalName="PM1.AUX9Alarm" description="True alarm Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010521" eventClear="2330010521" />
- <ALID id="330010522" logicalName="PM1.AUX9Warning" description="True warning Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010522" eventClear="2330010522" />
- <ALID id="330010523" logicalName="PM1.BoatHomeFailedWarning" description="Boat home failed warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010523" eventClear="2330010523" />
- <ALID id="330010524" logicalName="PM1.BoatMoveTimeOutAlarm" description="Boat move timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010524" eventClear="2330010524" />
- <ALID id="330010525" logicalName="PM1.BoatMoveToLoadPositionTimeoutWarning" description="Boat Move To Load Position Timeout Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010525" eventClear="2330010525" />
- <ALID id="330010526" logicalName="PM1.BothPump1 InterlockAlarm" description="BothPump1 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010526" eventClear="2330010526" />
- <ALID id="330010527" logicalName="PM1.BothPump2 InterlockAlarm" description="BothPump2 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010527" eventClear="2330010527" />
- <ALID id="330010528" logicalName="PM1.CheckCanDoOperationAlarm" description="Check can do operation failed " category="EquipmentStatusWarning" enabled="false" eventSet="1330010528" eventClear="2330010528" />
- <ALID id="330010529" logicalName="PM1.CheckEnableRunProcessAlarm" description="Check enable run process failed " category="EquipmentStatusWarning" enabled="false" eventSet="1330010529" eventClear="2330010529" />
- <ALID id="330010530" logicalName="PM1.CheckHasAlarmWarning" description="Check has alarm warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010530" eventClear="2330010530" />
- <ALID id="330010531" logicalName="PM1.CMNT InterlockAlarm" description="CMNT Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010531" eventClear="2330010531" />
- <ALID id="330010532" logicalName="PM1.ConcentrationO2ToleranceAlarm" description="ConcentrationO2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010532" eventClear="2330010532" />
- <ALID id="330010533" logicalName="PM1.ConcentrationO2ToleranceWarning" description="ConcentrationO2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010533" eventClear="2330010533" />
- <ALID id="330010534" logicalName="PM1.CoolingWateFlowOfShuttleFL903ToleranceAlarm" description="CoolingWateFlowOfShuttleFL903 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010534" eventClear="2330010534" />
- <ALID id="330010535" logicalName="PM1.CoolingWateFlowOfShuttleFL903ToleranceWarning" description="CoolingWateFlowOfShuttleFL903 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010535" eventClear="2330010535" />
- <ALID id="330010536" logicalName="PM1.CoolingWaterFlowOfBoatRotationFL904ToleranceAlarm" description="CoolingWaterFlowOfBoatRotationFL904 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010536" eventClear="2330010536" />
- <ALID id="330010537" logicalName="PM1.CoolingWaterFlowOfBoatRotationFL904ToleranceWarning" description="CoolingWaterFlowOfBoatRotationFL904 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010537" eventClear="2330010537" />
- <ALID id="330010538" logicalName="PM1.CoolingWaterFlowOfFlangeFL905ToleranceAlarm" description="CoolingWaterFlowOfFlangeFL905 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010538" eventClear="2330010538" />
- <ALID id="330010539" logicalName="PM1.CoolingWaterFlowOfFlangeFL905ToleranceWarning" description="CoolingWaterFlowOfFlangeFL905 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010539" eventClear="2330010539" />
- <ALID id="330010540" logicalName="PM1.CoolingWaterFlowOfFurnaceFL902ToleranceAlarm" description="CoolingWaterFlowOfFurnaceFL902 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010540" eventClear="2330010540" />
- <ALID id="330010541" logicalName="PM1.CoolingWaterFlowOfFurnaceFL902ToleranceWarning" description="CoolingWaterFlowOfFurnaceFL902 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010541" eventClear="2330010541" />
- <ALID id="330010542" logicalName="PM1.CoolingWaterFlowOfLoadingAreaFL906ToleranceAlarm" description="CoolingWaterFlowOfLoadingAreaFL906 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010542" eventClear="2330010542" />
- <ALID id="330010543" logicalName="PM1.CoolingWaterFlowOfLoadingAreaFL906ToleranceWarning" description="CoolingWaterFlowOfLoadingAreaFL906 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010543" eventClear="2330010543" />
- <ALID id="330010544" logicalName="PM1.CREF InterlockAlarm" description="CREF Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010544" eventClear="2330010544" />
- <ALID id="330010545" logicalName="PM1.CZERO InterlockAlarm" description="CZERO Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010545" eventClear="2330010545" />
- <ALID id="330010546" logicalName="PM1.DG1AnalogValueToleranceAlarm" description="DG1AnalogValue tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010546" eventClear="2330010546" />
- <ALID id="330010547" logicalName="PM1.DG1AnalogValueToleranceWarning" description="DG1AnalogValue tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010547" eventClear="2330010547" />
- <ALID id="330010548" logicalName="PM1.EmergencyAbort" description="Emergency abort " category="EquipmentStatusWarning" enabled="false" eventSet="1330010548" eventClear="2330010548" />
- <ALID id="330010549" logicalName="PM1.ExecuteAbortRecipeWarning" description="Execute abort recipe warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010549" eventClear="2330010549" />
- <ALID id="330010550" logicalName="PM1.ExhaustBoxExhaustMS4ToleranceAlarm" description="ExhaustBoxExhaustMS4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010550" eventClear="2330010550" />
- <ALID id="330010551" logicalName="PM1.ExhaustBoxExhaustMS4ToleranceWarning" description="ExhaustBoxExhaustMS4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010551" eventClear="2330010551" />
- <ALID id="330010552" logicalName="PM1.FlowConvergenceTimeOutAlarm" description="Flow convergence timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010552" eventClear="2330010552" />
- <ALID id="330010553" logicalName="PM1.FrontBodyExhaustMS6ToleranceAlarm" description="FrontBodyExhaustMS6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010553" eventClear="2330010553" />
- <ALID id="330010554" logicalName="PM1.FrontBodyExhaustMS6ToleranceWarning" description="FrontBodyExhaustMS6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010554" eventClear="2330010554" />
- <ALID id="330010555" logicalName="PM1.GasBoxExhaustMS2ToleranceAlarm" description="GasBoxExhaustMS2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010555" eventClear="2330010555" />
- <ALID id="330010556" logicalName="PM1.GasBoxExhaustMS2ToleranceWarning" description="GasBoxExhaustMS2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010556" eventClear="2330010556" />
- <ALID id="330010557" logicalName="PM1.GasLine1AlarmSignalCLN" description="GasLine1 Signal CLN Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010557" eventClear="2330010557" />
- <ALID id="330010558" logicalName="PM1.GasLine1GasLine1AlarmSignalTempOutRange" description="GasLine1 Temp Out Range Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010558" eventClear="2330010558" />
- <ALID id="330010559" logicalName="PM1.GasLine2AlarmSignalCLN" description="GasLine2 Signal CLN Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010559" eventClear="2330010559" />
- <ALID id="330010560" logicalName="PM1.GasLine2AlarmSignalTempOutRange" description="GasLine2 Temp Out Range Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010560" eventClear="2330010560" />
- <ALID id="330010561" logicalName="PM1.GasLine3AlarmSignalCLN" description="GasLine3 Signal CLN Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010561" eventClear="2330010561" />
- <ALID id="330010562" logicalName="PM1.GasLine3AlarmSignalTempOutRange" description="GasLine3 Temp Out Range Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010562" eventClear="2330010562" />
- <ALID id="330010563" logicalName="PM1.GasLine4AlarmSignalCLN" description="GasLine4 Signal CLN Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010563" eventClear="2330010563" />
- <ALID id="330010564" logicalName="PM1.GasLine4AlarmSignalTempOutRange" description="GasLine4 Temp Out Range Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010564" eventClear="2330010564" />
- <ALID id="330010565" logicalName="PM1.GasLine6AlarmSignalCLN" description="GasLine6 Signal CLN Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010565" eventClear="2330010565" />
- <ALID id="330010566" logicalName="PM1.GasLine6AlarmSignalTempOutRange" description="GasLine6 Temp Out Range Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010566" eventClear="2330010566" />
- <ALID id="330010567" logicalName="PM1.GasLine7AlarmSignalCLN" description="GasLine7 Signal CLN Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010567" eventClear="2330010567" />
- <ALID id="330010568" logicalName="PM1.GasLine7AlarmSignalTempOutRange" description="GasLine7 Temp Out Range Trigger" category="EquipmentStatusWarning" enabled="false" eventSet="1330010568" eventClear="2330010568" />
- <ALID id="330010569" logicalName="PM1.Heater10ToleranceAlarm" description="Heater10 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010569" eventClear="2330010569" />
- <ALID id="330010570" logicalName="PM1.Heater10ToleranceWarning" description="Heater10 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010570" eventClear="2330010570" />
- <ALID id="330010571" logicalName="PM1.Heater1ToleranceAlarm" description="Heater1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010571" eventClear="2330010571" />
- <ALID id="330010572" logicalName="PM1.Heater1ToleranceWarning" description="Heater1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010572" eventClear="2330010572" />
- <ALID id="330010573" logicalName="PM1.Heater2ToleranceAlarm" description="Heater2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010573" eventClear="2330010573" />
- <ALID id="330010574" logicalName="PM1.Heater2ToleranceWarning" description="Heater2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010574" eventClear="2330010574" />
- <ALID id="330010575" logicalName="PM1.Heater3ToleranceAlarm" description="Heater3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010575" eventClear="2330010575" />
- <ALID id="330010576" logicalName="PM1.Heater3ToleranceWarning" description="Heater3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010576" eventClear="2330010576" />
- <ALID id="330010577" logicalName="PM1.Heater4ToleranceAlarm" description="Heater4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010577" eventClear="2330010577" />
- <ALID id="330010578" logicalName="PM1.Heater4ToleranceWarning" description="Heater4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010578" eventClear="2330010578" />
- <ALID id="330010579" logicalName="PM1.Heater5ToleranceAlarm" description="Heater5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010579" eventClear="2330010579" />
- <ALID id="330010580" logicalName="PM1.Heater5ToleranceWarning" description="Heater5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010580" eventClear="2330010580" />
- <ALID id="330010581" logicalName="PM1.Heater6ToleranceAlarm" description="Heater6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010581" eventClear="2330010581" />
- <ALID id="330010582" logicalName="PM1.Heater6ToleranceWarning" description="Heater6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010582" eventClear="2330010582" />
- <ALID id="330010583" logicalName="PM1.Heater7ToleranceAlarm" description="Heater7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010583" eventClear="2330010583" />
- <ALID id="330010584" logicalName="PM1.Heater7ToleranceWarning" description="Heater7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010584" eventClear="2330010584" />
- <ALID id="330010585" logicalName="PM1.Heater8ToleranceAlarm" description="Heater8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010585" eventClear="2330010585" />
- <ALID id="330010586" logicalName="PM1.Heater8ToleranceWarning" description="Heater8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010586" eventClear="2330010586" />
- <ALID id="330010587" logicalName="PM1.Heater9ToleranceAlarm" description="Heater9 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010587" eventClear="2330010587" />
- <ALID id="330010588" logicalName="PM1.Heater9ToleranceWarning" description="Heater9 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010588" eventClear="2330010588" />
- <ALID id="330010589" logicalName="PM1.HeaterCLToleranceAlarm" description="PM1 heaterCL tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010589" eventClear="2330010589" />
- <ALID id="330010590" logicalName="PM1.HeaterCLToleranceWarning" description="PM1 heaterCL tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010590" eventClear="2330010590" />
- <ALID id="330010591" logicalName="PM1.HeaterCToleranceAlarm" description="PM1 heaterC tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010591" eventClear="2330010591" />
- <ALID id="330010592" logicalName="PM1.HeaterCToleranceWarning" description="PM1 heaterC tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010592" eventClear="2330010592" />
- <ALID id="330010593" logicalName="PM1.HeaterCUToleranceAlarm" description="PM1 heaterCU tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010593" eventClear="2330010593" />
- <ALID id="330010594" logicalName="PM1.HeaterCUToleranceWarning" description="PM1 heaterCU tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010594" eventClear="2330010594" />
- <ALID id="330010595" logicalName="PM1.HeaterLToleranceAlarm" description="PM1 heaterL tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010595" eventClear="2330010595" />
- <ALID id="330010596" logicalName="PM1.HeaterLToleranceWarning" description="PM1 heaterL tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010596" eventClear="2330010596" />
- <ALID id="330010597" logicalName="PM1.HeaterUToleranceAlarm" description="PM1 heaterU tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010597" eventClear="2330010597" />
- <ALID id="330010598" logicalName="PM1.HeaterUToleranceWarning" description="PM1 heaterU tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010598" eventClear="2330010598" />
- <ALID id="330010599" logicalName="PM1.HeatingExhaustMS1ToleranceAlarm" description="HeatingExhaustMS1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010599" eventClear="2330010599" />
- <ALID id="330010600" logicalName="PM1.HeatingExhaustMS1ToleranceWarning" description="HeatingExhaustMS1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010600" eventClear="2330010600" />
- <ALID id="330010601" logicalName="PM1.HMNT InterlockAlarm" description="HMNT Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010601" eventClear="2330010601" />
- <ALID id="330010602" logicalName="PM1.HREF InterlockAlarm" description="HREF Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010602" eventClear="2330010602" />
- <ALID id="330010603" logicalName="PM1.HZERO InterlockAlarm" description="HZERO Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010603" eventClear="2330010603" />
- <ALID id="330010604" logicalName="PM1.InputSignalTimeOutAlarm" description="Input signal timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010604" eventClear="2330010604" />
- <ALID id="330010605" logicalName="PM1.InterlockAlarm" description="Interlock occure alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010605" eventClear="2330010605" />
- <ALID id="330010606" logicalName="PM1.LAExhaustMS7ToleranceAlarm" description="LAExhaustMS7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010606" eventClear="2330010606" />
- <ALID id="330010607" logicalName="PM1.LAExhaustMS7ToleranceWarning" description="LAExhaustMS7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010607" eventClear="2330010607" />
- <ALID id="330010608" logicalName="PM1.LeakCheckAlarm" description="Leak Check alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010608" eventClear="2330010608" />
- <ALID id="330010609" logicalName="PM1.LoadingAreaExhaustMS5ToleranceAlarm" description="LoadingAreaExhaustMS5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010609" eventClear="2330010609" />
- <ALID id="330010610" logicalName="PM1.LoadingAreaExhaustMS5ToleranceWarning" description="LoadingAreaExhaustMS5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010610" eventClear="2330010610" />
- <ALID id="330010611" logicalName="PM1.MainPumpPumpError" description="MainPump error " category="EquipmentStatusWarning" enabled="false" eventSet="1330010611" eventClear="2330010611" />
- <ALID id="330010612" logicalName="PM1.MainPumpPumpExhaustPressureNotOK" description="MainPump exhaust pressure not ok " category="EquipmentStatusWarning" enabled="false" eventSet="1330010612" eventClear="2330010612" />
- <ALID id="330010613" logicalName="PM1.MainPumpPumpN2NotOK" description="MainPump N2 not ok " category="EquipmentStatusWarning" enabled="false" eventSet="1330010613" eventClear="2330010613" />
- <ALID id="330010614" logicalName="PM1.MainPumpPumpOverload" description="MainPump overload " category="EquipmentStatusWarning" enabled="false" eventSet="1330010614" eventClear="2330010614" />
- <ALID id="330010615" logicalName="PM1.MainPumpPumpWarning" description="MainPump warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010615" eventClear="2330010615" />
- <ALID id="330010616" logicalName="PM1.MFC10ToleranceAlarm" description="MFC10 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010616" eventClear="2330010616" />
- <ALID id="330010617" logicalName="PM1.MFC10ToleranceWarning" description="MFC10 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010617" eventClear="2330010617" />
- <ALID id="330010618" logicalName="PM1.MFC11ToleranceAlarm" description="MFC11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010618" eventClear="2330010618" />
- <ALID id="330010619" logicalName="PM1.MFC11ToleranceWarning" description="MFC11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010619" eventClear="2330010619" />
- <ALID id="330010620" logicalName="PM1.MFC12ToleranceAlarm" description="MFC12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010620" eventClear="2330010620" />
- <ALID id="330010621" logicalName="PM1.MFC12ToleranceWarning" description="MFC12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010621" eventClear="2330010621" />
- <ALID id="330010622" logicalName="PM1.MFC13ToleranceAlarm" description="MFC13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010622" eventClear="2330010622" />
- <ALID id="330010623" logicalName="PM1.MFC13ToleranceWarning" description="MFC13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010623" eventClear="2330010623" />
- <ALID id="330010624" logicalName="PM1.MFC16ToleranceAlarm" description="MFC16 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010624" eventClear="2330010624" />
- <ALID id="330010625" logicalName="PM1.MFC16ToleranceWarning" description="MFC16 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010625" eventClear="2330010625" />
- <ALID id="330010626" logicalName="PM1.MFC1ToleranceAlarm" description="MFC1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010626" eventClear="2330010626" />
- <ALID id="330010627" logicalName="PM1.MFC1ToleranceWarning" description="MFC1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010627" eventClear="2330010627" />
- <ALID id="330010628" logicalName="PM1.MFC2ToleranceAlarm" description="MFC2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010628" eventClear="2330010628" />
- <ALID id="330010629" logicalName="PM1.MFC2ToleranceWarning" description="MFC2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010629" eventClear="2330010629" />
- <ALID id="330010630" logicalName="PM1.MFC3ToleranceAlarm" description="MFC3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010630" eventClear="2330010630" />
- <ALID id="330010631" logicalName="PM1.MFC3ToleranceWarning" description="MFC3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010631" eventClear="2330010631" />
- <ALID id="330010632" logicalName="PM1.MFC4ToleranceAlarm" description="MFC4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010632" eventClear="2330010632" />
- <ALID id="330010633" logicalName="PM1.MFC4ToleranceWarning" description="MFC4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010633" eventClear="2330010633" />
- <ALID id="330010634" logicalName="PM1.MFC5ToleranceAlarm" description="MFC5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010634" eventClear="2330010634" />
- <ALID id="330010635" logicalName="PM1.MFC5ToleranceWarning" description="MFC5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010635" eventClear="2330010635" />
- <ALID id="330010636" logicalName="PM1.MFC6ToleranceAlarm" description="MFC6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010636" eventClear="2330010636" />
- <ALID id="330010637" logicalName="PM1.MFC6ToleranceWarning" description="MFC6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010637" eventClear="2330010637" />
- <ALID id="330010638" logicalName="PM1.MFC7ToleranceAlarm" description="MFC7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010638" eventClear="2330010638" />
- <ALID id="330010639" logicalName="PM1.MFC7ToleranceWarning" description="MFC7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010639" eventClear="2330010639" />
- <ALID id="330010640" logicalName="PM1.MFC8ToleranceAlarm" description="MFC8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010640" eventClear="2330010640" />
- <ALID id="330010641" logicalName="PM1.MFC8ToleranceWarning" description="MFC8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010641" eventClear="2330010641" />
- <ALID id="330010642" logicalName="PM1.MFC9ToleranceAlarm" description="MFC9 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010642" eventClear="2330010642" />
- <ALID id="330010643" logicalName="PM1.MFC9ToleranceWarning" description="MFC9 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010643" eventClear="2330010643" />
- <ALID id="330010644" logicalName="PM1.N24PurgePressureToleranceAlarm" description="N24PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010644" eventClear="2330010644" />
- <ALID id="330010645" logicalName="PM1.N24PurgePressureToleranceWarning" description="N24PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010645" eventClear="2330010645" />
- <ALID id="330010646" logicalName="PM1.N25PurgePressureToleranceAlarm" description="N25PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010646" eventClear="2330010646" />
- <ALID id="330010647" logicalName="PM1.N25PurgePressureToleranceWarning" description="N25PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010647" eventClear="2330010647" />
- <ALID id="330010648" logicalName="PM1.N26PurgePressureToleranceAlarm" description="N26PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010648" eventClear="2330010648" />
- <ALID id="330010649" logicalName="PM1.N26PurgePressureToleranceWarning" description="N26PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010649" eventClear="2330010649" />
- <ALID id="330010650" logicalName="PM1.N27PurgePressureToleranceAlarm" description="N27PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010650" eventClear="2330010650" />
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- <ALID id="330010653" logicalName="PM1.O2Detector1ToleranceWarning" description="O2Detector1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010653" eventClear="2330010653" />
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- <ALID id="330010662" logicalName="PM1.PreprocessStartFailedWarning" description="PM1 preprocess start failed " category="EquipmentStatusWarning" enabled="false" eventSet="1330010662" eventClear="2330010662" />
- <ALID id="330010663" logicalName="PM1.PreprocesStartFailedWarning" description="Preproces start failed warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010663" eventClear="2330010663" />
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- <ALID id="330010665" logicalName="PM1.PressureGasBoxUpperVG21ToleranceAlarm" description="PressureGasBoxUpperVG21 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010665" eventClear="2330010665" />
- <ALID id="330010666" logicalName="PM1.PressureGasBoxUpperVG21ToleranceWarning" description="PressureGasBoxUpperVG21 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010666" eventClear="2330010666" />
- <ALID id="330010667" logicalName="PM1.PressureGasBoxUpperVG22ToleranceAlarm" description="PressureGasBoxUpperVG22 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010667" eventClear="2330010667" />
- <ALID id="330010668" logicalName="PM1.PressureGasBoxUpperVG22ToleranceWarning" description="PressureGasBoxUpperVG22 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010668" eventClear="2330010668" />
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- <ALID id="330010670" logicalName="PM1.PressureGLBoxPG1ToleranceWarning" description="PressureGLBoxPG1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010670" eventClear="2330010670" />
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- <ALID id="330010672" logicalName="PM1.PressureGLBoxPG2ToleranceWarning" description="PressureGLBoxPG2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010672" eventClear="2330010672" />
- <ALID id="330010673" logicalName="PM1.PressureGLBoxPG3ToleranceAlarm" description="PressureGLBoxPG3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010673" eventClear="2330010673" />
- <ALID id="330010674" logicalName="PM1.PressureGLBoxPG3ToleranceWarning" description="PressureGLBoxPG3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010674" eventClear="2330010674" />
- <ALID id="330010675" logicalName="PM1.PressureGLBoxPG4ToleranceAlarm" description="PressureGLBoxPG4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010675" eventClear="2330010675" />
- <ALID id="330010676" logicalName="PM1.PressureGLBoxPG4ToleranceWarning" description="PressureGLBoxPG4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010676" eventClear="2330010676" />
- <ALID id="330010677" logicalName="PM1.PressureGLBoxPG5ToleranceAlarm" description="PressureGLBoxPG5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010677" eventClear="2330010677" />
- <ALID id="330010678" logicalName="PM1.PressureGLBoxPG5ToleranceWarning" description="PressureGLBoxPG5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010678" eventClear="2330010678" />
- <ALID id="330010679" logicalName="PM1.PressureGLBoxPG6ToleranceAlarm" description="PressureGLBoxPG6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010679" eventClear="2330010679" />
- <ALID id="330010680" logicalName="PM1.PressureGLBoxPG6ToleranceWarning" description="PressureGLBoxPG6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010680" eventClear="2330010680" />
- <ALID id="330010681" logicalName="PM1.PS11ToleranceAlarm" description="PS11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010681" eventClear="2330010681" />
- <ALID id="330010682" logicalName="PM1.PS11ToleranceWarning" description="PS11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010682" eventClear="2330010682" />
- <ALID id="330010683" logicalName="PM1.PS13ToleranceAlarm" description="PS13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010683" eventClear="2330010683" />
- <ALID id="330010684" logicalName="PM1.PS13ToleranceWarning" description="PS13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010684" eventClear="2330010684" />
- <ALID id="330010685" logicalName="PM1.PS14AnalogValueToleranceAlarm" description="PS14AnalogValue tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010685" eventClear="2330010685" />
- <ALID id="330010686" logicalName="PM1.PS14AnalogValueToleranceWarning" description="PS14AnalogValue tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010686" eventClear="2330010686" />
- <ALID id="330010687" logicalName="PM1.PS17ToleranceAlarm" description="PS17 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010687" eventClear="2330010687" />
- <ALID id="330010688" logicalName="PM1.PS17ToleranceWarning" description="PS17 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010688" eventClear="2330010688" />
- <ALID id="330010689" logicalName="PM1.PT71ToleranceAlarm" description="PT71 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010689" eventClear="2330010689" />
- <ALID id="330010690" logicalName="PM1.PT71ToleranceWarning" description="PT71 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010690" eventClear="2330010690" />
- <ALID id="330010691" logicalName="PM1.PT80ToleranceAlarm" description="PT80 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010691" eventClear="2330010691" />
- <ALID id="330010692" logicalName="PM1.PT80ToleranceWarning" description="PT80 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010692" eventClear="2330010692" />
- <ALID id="330010693" logicalName="PM1.RecipeErrorAlarm" description="Recipe error alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010693" eventClear="2330010693" />
- <ALID id="330010694" logicalName="PM1.RecipeExecutionError" description="Recipe execution error " category="EquipmentStatusWarning" enabled="false" eventSet="1330010694" eventClear="2330010694" />
- <ALID id="330010695" logicalName="PM1.RecipeFinishedAbnormallyAlarm" description="Recipe finished abnormally alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010695" eventClear="2330010695" />
- <ALID id="330010696" logicalName="PM1.RHCExhaustMS8ToleranceAlarm" description="RHCExhaustMS8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010696" eventClear="2330010696" />
- <ALID id="330010697" logicalName="PM1.RHCExhaustMS8ToleranceWarning" description="RHCExhaustMS8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010697" eventClear="2330010697" />
- <ALID id="330010698" logicalName="PM1.RHCFlowFL901ToleranceAlarm" description="RHCFlowFL901 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010698" eventClear="2330010698" />
- <ALID id="330010699" logicalName="PM1.RHCFlowFL901ToleranceWarning" description="RHCFlowFL901 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010699" eventClear="2330010699" />
- <ALID id="330010700" logicalName="PM1.ScavengerExhaustMS3ToleranceAlarm" description="ScavengerExhaustMS3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010700" eventClear="2330010700" />
- <ALID id="330010701" logicalName="PM1.ScavengerExhaustMS3ToleranceWarning" description="ScavengerExhaustMS3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010701" eventClear="2330010701" />
- <ALID id="330010702" logicalName="PM1.SensorFBLightCurtainFaultAlarm" description="FB Light Curtain Fault " category="EquipmentStatusWarning" enabled="false" eventSet="1330010702" eventClear="2330010702" />
- <ALID id="330010703" logicalName="PM1.SensorFBLightCurtainOSSD1Alarm" description="FB Light Curtain OSSD1 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010703" eventClear="2330010703" />
- <ALID id="330010704" logicalName="PM1.SensorFBLightCurtainOSSD2Alarm" description="FB Light Curtain OSSD2 Triger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010704" eventClear="2330010704" />
- <ALID id="330010705" logicalName="PM1.ShutterMoveFailedForInterlock" description="Shutter Move Failed For Interlock Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010705" eventClear="2330010705" />
- <ALID id="330010706" logicalName="PM1.Tank1PressureToleranceAlarm" description="Tank1Pressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010706" eventClear="2330010706" />
- <ALID id="330010707" logicalName="PM1.Tank1PressureToleranceWarning" description="Tank1Pressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010707" eventClear="2330010707" />
- <ALID id="330010708" logicalName="PM1.Tank2PressureToleranceAlarm" description="Tank2Pressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010708" eventClear="2330010708" />
- <ALID id="330010709" logicalName="PM1.Tank2PressureToleranceWarning" description="Tank2Pressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010709" eventClear="2330010709" />
- <ALID id="330010710" logicalName="PM1.TemperatureConvergenceTimeOutAlarm" description="Temperature convergence timeout alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010710" eventClear="2330010710" />
- <ALID id="330010711" logicalName="PM1.TubeHomeFailedWarning" description="PM1 tube home failed " category="EquipmentStatusWarning" enabled="false" eventSet="1330010711" eventClear="2330010711" />
- <ALID id="330010712" logicalName="PM1.UserDefineInterlockAlarm" description="User define interlock occure alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010712" eventClear="2330010712" />
- <ALID id="330010713" logicalName="PM1.ValveAV1 InterlockAlarm" description="ValveAV1 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010713" eventClear="2330010713" />
- <ALID id="330010714" logicalName="PM1.ValveAV10 InterlockAlarm" description="ValveAV10 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010714" eventClear="2330010714" />
- <ALID id="330010715" logicalName="PM1.ValveAV100 InterlockAlarm" description="ValveAV100 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010715" eventClear="2330010715" />
- <ALID id="330010716" logicalName="PM1.ValveAV101 InterlockAlarm" description="ValveAV101 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010716" eventClear="2330010716" />
- <ALID id="330010717" logicalName="PM1.ValveAV102 InterlockAlarm" description="ValveAV102 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010717" eventClear="2330010717" />
- <ALID id="330010718" logicalName="PM1.ValveAV103 InterlockAlarm" description="ValveAV103 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010718" eventClear="2330010718" />
- <ALID id="330010719" logicalName="PM1.ValveAV104 InterlockAlarm" description="ValveAV104 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010719" eventClear="2330010719" />
- <ALID id="330010720" logicalName="PM1.ValveAV105 InterlockAlarm" description="ValveAV105 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010720" eventClear="2330010720" />
- <ALID id="330010721" logicalName="PM1.ValveAV106 InterlockAlarm" description="ValveAV106 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010721" eventClear="2330010721" />
- <ALID id="330010722" logicalName="PM1.ValveAV107 InterlockAlarm" description="ValveAV107 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010722" eventClear="2330010722" />
- <ALID id="330010723" logicalName="PM1.ValveAV108 InterlockAlarm" description="ValveAV108 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010723" eventClear="2330010723" />
- <ALID id="330010724" logicalName="PM1.ValveAV109 InterlockAlarm" description="ValveAV109 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010724" eventClear="2330010724" />
- <ALID id="330010725" logicalName="PM1.ValveAV11 InterlockAlarm" description="ValveAV11 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010725" eventClear="2330010725" />
- <ALID id="330010726" logicalName="PM1.ValveAV110 InterlockAlarm" description="ValveAV110 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010726" eventClear="2330010726" />
- <ALID id="330010727" logicalName="PM1.ValveAV111 InterlockAlarm" description="ValveAV111 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010727" eventClear="2330010727" />
- <ALID id="330010728" logicalName="PM1.ValveAV112 InterlockAlarm" description="ValveAV112 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010728" eventClear="2330010728" />
- <ALID id="330010729" logicalName="PM1.ValveAV113 InterlockAlarm" description="ValveAV113 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010729" eventClear="2330010729" />
- <ALID id="330010730" logicalName="PM1.ValveAV114 InterlockAlarm" description="ValveAV114 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010730" eventClear="2330010730" />
- <ALID id="330010731" logicalName="PM1.ValveAV115 InterlockAlarm" description="ValveAV115 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010731" eventClear="2330010731" />
- <ALID id="330010732" logicalName="PM1.ValveAV116 InterlockAlarm" description="ValveAV116 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010732" eventClear="2330010732" />
- <ALID id="330010733" logicalName="PM1.ValveAV117 InterlockAlarm" description="ValveAV117 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010733" eventClear="2330010733" />
- <ALID id="330010734" logicalName="PM1.ValveAV118 InterlockAlarm" description="ValveAV118 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010734" eventClear="2330010734" />
- <ALID id="330010735" logicalName="PM1.ValveAV119 InterlockAlarm" description="ValveAV119 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010735" eventClear="2330010735" />
- <ALID id="330010736" logicalName="PM1.ValveAV12 InterlockAlarm" description="ValveAV12 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010736" eventClear="2330010736" />
- <ALID id="330010737" logicalName="PM1.ValveAV120 InterlockAlarm" description="ValveAV120 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010737" eventClear="2330010737" />
- <ALID id="330010738" logicalName="PM1.ValveAV121 InterlockAlarm" description="ValveAV121 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010738" eventClear="2330010738" />
- <ALID id="330010739" logicalName="PM1.ValveAV122 InterlockAlarm" description="ValveAV122 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010739" eventClear="2330010739" />
- <ALID id="330010740" logicalName="PM1.ValveAV123 InterlockAlarm" description="ValveAV123 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010740" eventClear="2330010740" />
- <ALID id="330010741" logicalName="PM1.ValveAV124 InterlockAlarm" description="ValveAV124 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010741" eventClear="2330010741" />
- <ALID id="330010742" logicalName="PM1.ValveAV125 InterlockAlarm" description="ValveAV125 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010742" eventClear="2330010742" />
- <ALID id="330010743" logicalName="PM1.ValveAV126 InterlockAlarm" description="ValveAV126 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010743" eventClear="2330010743" />
- <ALID id="330010744" logicalName="PM1.ValveAV127 InterlockAlarm" description="ValveAV127 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010744" eventClear="2330010744" />
- <ALID id="330010745" logicalName="PM1.ValveAV128 InterlockAlarm" description="ValveAV128 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010745" eventClear="2330010745" />
- <ALID id="330010746" logicalName="PM1.ValveAV129 InterlockAlarm" description="ValveAV129 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010746" eventClear="2330010746" />
- <ALID id="330010747" logicalName="PM1.ValveAV13 InterlockAlarm" description="ValveAV13 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010747" eventClear="2330010747" />
- <ALID id="330010748" logicalName="PM1.ValveAV130 InterlockAlarm" description="ValveAV130 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010748" eventClear="2330010748" />
- <ALID id="330010749" logicalName="PM1.ValveAV131 InterlockAlarm" description="ValveAV131 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010749" eventClear="2330010749" />
- <ALID id="330010750" logicalName="PM1.ValveAV132 InterlockAlarm" description="ValveAV132 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010750" eventClear="2330010750" />
- <ALID id="330010751" logicalName="PM1.ValveAV133 InterlockAlarm" description="ValveAV133 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010751" eventClear="2330010751" />
- <ALID id="330010752" logicalName="PM1.ValveAV134 InterlockAlarm" description="ValveAV134 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010752" eventClear="2330010752" />
- <ALID id="330010753" logicalName="PM1.ValveAV135 InterlockAlarm" description="ValveAV135 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010753" eventClear="2330010753" />
- <ALID id="330010754" logicalName="PM1.ValveAV136 InterlockAlarm" description="ValveAV136 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010754" eventClear="2330010754" />
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- <ALID id="330010756" logicalName="PM1.ValveAV15 InterlockAlarm" description="ValveAV15 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010756" eventClear="2330010756" />
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- <ALID id="330010759" logicalName="PM1.ValveAV18 InterlockAlarm" description="ValveAV18 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010759" eventClear="2330010759" />
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- <ALID id="330010781" logicalName="PM1.ValveAV38 InterlockAlarm" description="ValveAV38 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010781" eventClear="2330010781" />
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- <ALID id="330010783" logicalName="PM1.ValveAV4 InterlockAlarm" description="ValveAV4 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010783" eventClear="2330010783" />
- <ALID id="330010784" logicalName="PM1.ValveAV40 InterlockAlarm" description="ValveAV40 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010784" eventClear="2330010784" />
- <ALID id="330010785" logicalName="PM1.ValveAV41 InterlockAlarm" description="ValveAV41 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010785" eventClear="2330010785" />
- <ALID id="330010786" logicalName="PM1.ValveAV42 InterlockAlarm" description="ValveAV42 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010786" eventClear="2330010786" />
- <ALID id="330010787" logicalName="PM1.ValveAV43 InterlockAlarm" description="ValveAV43 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010787" eventClear="2330010787" />
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- <ALID id="330010789" logicalName="PM1.ValveAV45 InterlockAlarm" description="ValveAV45 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010789" eventClear="2330010789" />
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- <ALID id="330010791" logicalName="PM1.ValveAV47 InterlockAlarm" description="ValveAV47 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010791" eventClear="2330010791" />
- <ALID id="330010792" logicalName="PM1.ValveAV48 InterlockAlarm" description="ValveAV48 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010792" eventClear="2330010792" />
- <ALID id="330010793" logicalName="PM1.ValveAV49 InterlockAlarm" description="ValveAV49 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010793" eventClear="2330010793" />
- <ALID id="330010794" logicalName="PM1.ValveAV5 InterlockAlarm" description="ValveAV5 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010794" eventClear="2330010794" />
- <ALID id="330010795" logicalName="PM1.ValveAV50 InterlockAlarm" description="ValveAV50 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010795" eventClear="2330010795" />
- <ALID id="330010796" logicalName="PM1.ValveAV51 InterlockAlarm" description="ValveAV51 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010796" eventClear="2330010796" />
- <ALID id="330010797" logicalName="PM1.ValveAV52 InterlockAlarm" description="ValveAV52 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010797" eventClear="2330010797" />
- <ALID id="330010798" logicalName="PM1.ValveAV53 InterlockAlarm" description="ValveAV53 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010798" eventClear="2330010798" />
- <ALID id="330010799" logicalName="PM1.ValveAV54 InterlockAlarm" description="ValveAV54 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010799" eventClear="2330010799" />
- <ALID id="330010800" logicalName="PM1.ValveAV55 InterlockAlarm" description="ValveAV55 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010800" eventClear="2330010800" />
- <ALID id="330010801" logicalName="PM1.ValveAV56 InterlockAlarm" description="ValveAV56 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010801" eventClear="2330010801" />
- <ALID id="330010802" logicalName="PM1.ValveAV57 InterlockAlarm" description="ValveAV57 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010802" eventClear="2330010802" />
- <ALID id="330010803" logicalName="PM1.ValveAV58 InterlockAlarm" description="ValveAV58 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010803" eventClear="2330010803" />
- <ALID id="330010804" logicalName="PM1.ValveAV59 InterlockAlarm" description="ValveAV59 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010804" eventClear="2330010804" />
- <ALID id="330010805" logicalName="PM1.ValveAV6 InterlockAlarm" description="ValveAV6 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010805" eventClear="2330010805" />
- <ALID id="330010806" logicalName="PM1.ValveAV60 InterlockAlarm" description="ValveAV60 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010806" eventClear="2330010806" />
- <ALID id="330010807" logicalName="PM1.ValveAV61 InterlockAlarm" description="ValveAV61 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010807" eventClear="2330010807" />
- <ALID id="330010808" logicalName="PM1.ValveAV62 InterlockAlarm" description="ValveAV62 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010808" eventClear="2330010808" />
- <ALID id="330010809" logicalName="PM1.ValveAV63 InterlockAlarm" description="ValveAV63 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010809" eventClear="2330010809" />
- <ALID id="330010810" logicalName="PM1.ValveAV64 InterlockAlarm" description="ValveAV64 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010810" eventClear="2330010810" />
- <ALID id="330010811" logicalName="PM1.ValveAV65 InterlockAlarm" description="ValveAV65 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010811" eventClear="2330010811" />
- <ALID id="330010812" logicalName="PM1.ValveAV66 InterlockAlarm" description="ValveAV66 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010812" eventClear="2330010812" />
- <ALID id="330010813" logicalName="PM1.ValveAV67 InterlockAlarm" description="ValveAV67 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010813" eventClear="2330010813" />
- <ALID id="330010814" logicalName="PM1.ValveAV68 InterlockAlarm" description="ValveAV68 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010814" eventClear="2330010814" />
- <ALID id="330010815" logicalName="PM1.ValveAV69 InterlockAlarm" description="ValveAV69 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010815" eventClear="2330010815" />
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- <ALID id="330010819" logicalName="PM1.ValveAV72 InterlockAlarm" description="ValveAV72 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010819" eventClear="2330010819" />
- <ALID id="330010820" logicalName="PM1.ValveAV73 InterlockAlarm" description="ValveAV73 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010820" eventClear="2330010820" />
- <ALID id="330010821" logicalName="PM1.ValveAV74 InterlockAlarm" description="ValveAV74 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010821" eventClear="2330010821" />
- <ALID id="330010822" logicalName="PM1.ValveAV75 InterlockAlarm" description="ValveAV75 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010822" eventClear="2330010822" />
- <ALID id="330010823" logicalName="PM1.ValveAV76 InterlockAlarm" description="ValveAV76 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010823" eventClear="2330010823" />
- <ALID id="330010824" logicalName="PM1.ValveAV77 InterlockAlarm" description="ValveAV77 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010824" eventClear="2330010824" />
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- <ALID id="330010830" logicalName="PM1.ValveAV82 InterlockAlarm" description="ValveAV82 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010830" eventClear="2330010830" />
- <ALID id="330010831" logicalName="PM1.ValveAV83 InterlockAlarm" description="ValveAV83 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010831" eventClear="2330010831" />
- <ALID id="330010832" logicalName="PM1.ValveAV84 InterlockAlarm" description="ValveAV84 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010832" eventClear="2330010832" />
- <ALID id="330010833" logicalName="PM1.ValveAV85 InterlockAlarm" description="ValveAV85 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010833" eventClear="2330010833" />
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- <ALID id="330010835" logicalName="PM1.ValveAV87 InterlockAlarm" description="ValveAV87 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010835" eventClear="2330010835" />
- <ALID id="330010836" logicalName="PM1.ValveAV88 InterlockAlarm" description="ValveAV88 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010836" eventClear="2330010836" />
- <ALID id="330010837" logicalName="PM1.ValveAV89 InterlockAlarm" description="ValveAV89 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010837" eventClear="2330010837" />
- <ALID id="330010838" logicalName="PM1.ValveAV9 InterlockAlarm" description="ValveAV9 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010838" eventClear="2330010838" />
- <ALID id="330010839" logicalName="PM1.ValveAV90 InterlockAlarm" description="ValveAV90 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010839" eventClear="2330010839" />
- <ALID id="330010840" logicalName="PM1.ValveAV91 InterlockAlarm" description="ValveAV91 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010840" eventClear="2330010840" />
- <ALID id="330010841" logicalName="PM1.ValveAV92 InterlockAlarm" description="ValveAV92 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010841" eventClear="2330010841" />
- <ALID id="330010842" logicalName="PM1.ValveAV93 InterlockAlarm" description="ValveAV93 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010842" eventClear="2330010842" />
- <ALID id="330010843" logicalName="PM1.ValveAV94 InterlockAlarm" description="ValveAV94 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010843" eventClear="2330010843" />
- <ALID id="330010844" logicalName="PM1.ValveAV95 InterlockAlarm" description="ValveAV95 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010844" eventClear="2330010844" />
- <ALID id="330010845" logicalName="PM1.ValveAV96 InterlockAlarm" description="ValveAV96 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010845" eventClear="2330010845" />
- <ALID id="330010846" logicalName="PM1.ValveAV97 InterlockAlarm" description="ValveAV97 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010846" eventClear="2330010846" />
- <ALID id="330010847" logicalName="PM1.ValveAV98 InterlockAlarm" description="ValveAV98 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010847" eventClear="2330010847" />
- <ALID id="330010848" logicalName="PM1.ValveAV99 InterlockAlarm" description="ValveAV99 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010848" eventClear="2330010848" />
- <ALID id="330010849" logicalName="PM1.ValveBlowerPowerOn InterlockAlarm" description="ValveBlowerPowerOn Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010849" eventClear="2330010849" />
- <ALID id="330010850" logicalName="PM1.ValveCommonBoxPressureRegulatingCylinder InterlockAlarm" description="ValveCommonBoxPressureRegulatingCylinder Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010850" eventClear="2330010850" />
- <ALID id="330010851" logicalName="PM1.ValveFIMS1N2Purge InterlockAlarm" description="ValveFIMS1N2Purge Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010851" eventClear="2330010851" />
- <ALID id="330010852" logicalName="PM1.ValveFIMS2N2Purge InterlockAlarm" description="ValveFIMS2N2Purge Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010852" eventClear="2330010852" />
- <ALID id="330010853" logicalName="PM1.ValveLABacksideDoorCylinderControl InterlockAlarm" description="ValveLABacksideDoorCylinderControl Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010853" eventClear="2330010853" />
- <ALID id="330010854" logicalName="PM1.ValveLADamper InterlockAlarm" description="ValveLADamper Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010854" eventClear="2330010854" />
- <ALID id="330010855" logicalName="PM1.ValveLAExhaustDamper InterlockAlarm" description="ValveLAExhaustDamper Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010855" eventClear="2330010855" />
- <ALID id="330010856" logicalName="PM1.ValveSV61 InterlockAlarm" description="ValveSV61 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010856" eventClear="2330010856" />
- <ALID id="330010857" logicalName="PM1.ValveSV62 InterlockAlarm" description="ValveSV62 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010857" eventClear="2330010857" />
- <ALID id="330010858" logicalName="PM1.ValveSV63 InterlockAlarm" description="ValveSV63 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010858" eventClear="2330010858" />
- <ALID id="330010859" logicalName="PM1.ValveSV64 InterlockAlarm" description="ValveSV64 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010859" eventClear="2330010859" />
- <ALID id="330010860" logicalName="PM1.VG11ToleranceAlarm" description="VG11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010860" eventClear="2330010860" />
- <ALID id="330010861" logicalName="PM1.VG11ToleranceWarning" description="VG11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010861" eventClear="2330010861" />
- <ALID id="330010862" logicalName="PM1.VG12AnalogValueToleranceAlarm" description="VG12AnalogValue tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010862" eventClear="2330010862" />
- <ALID id="330010863" logicalName="PM1.VG12AnalogValueToleranceWarning" description="VG12AnalogValue tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010863" eventClear="2330010863" />
- <ALID id="330010864" logicalName="PM1.VG12ToleranceAlarm" description="VG12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010864" eventClear="2330010864" />
- <ALID id="330010865" logicalName="PM1.VG12ToleranceWarning" description="VG12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010865" eventClear="2330010865" />
- <ALID id="330010866" logicalName="PM1.VG13ToleranceAlarm" description="VG13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010866" eventClear="2330010866" />
- <ALID id="330010867" logicalName="PM1.VG13ToleranceWarning" description="VG13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010867" eventClear="2330010867" />
- <ALID id="330010868" logicalName="PM1.VG14ToleranceAlarm" description="VG14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010868" eventClear="2330010868" />
- <ALID id="330010869" logicalName="PM1.VG14ToleranceWarning" description="VG14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010869" eventClear="2330010869" />
- <ALID id="330010870" logicalName="PM1.VG21ToleranceAlarm" description="VG21 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010870" eventClear="2330010870" />
- <ALID id="330010871" logicalName="PM1.VG21ToleranceWarning" description="VG21 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010871" eventClear="2330010871" />
- <ALID id="330010872" logicalName="PM1.VG22ToleranceAlarm" description="VG22 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010872" eventClear="2330010872" />
- <ALID id="330010873" logicalName="PM1.VG22ToleranceWarning" description="VG22 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010873" eventClear="2330010873" />
- <ALID id="330010874" logicalName="PM1.VG2PressureToleranceAlarm" description="VG2Pressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010874" eventClear="2330010874" />
- <ALID id="330010875" logicalName="PM1.VG2PressureToleranceWarning" description="VG2Pressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010875" eventClear="2330010875" />
- <ALID id="330010876" logicalName="PM1.VG32PressureToleranceAlarm" description="VG32Pressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010876" eventClear="2330010876" />
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- <ALID id="330010905" logicalName="PM1.ExecuteAbortRecipeFailAlarm" description="PM1 execute abort recipe fail alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010905" eventClear="2330010905" />
- <ALID id="330010906" logicalName="PM1.ValveAV201 InterlockAlarm" description="ValveAV201 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010906" eventClear="2330010906" />
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- <ALID id="330010909" logicalName="PM1.AlarmSignal100Vtransformerpoweron" description="100V transformer power on" category="EquipmentStatusWarning" enabled="false" eventSet="1330010909" eventClear="2330010909" />
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- <ALID id="330010911" logicalName="PM1.AlarmSignalAC100Vtransformertempsw" description="AC100V transformer temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330010911" eventClear="2330010911" />
- <ALID id="330010912" logicalName="PM1.AlarmSignalAxisCRmotorEDM" description="Axis-CR motor EDM" category="EquipmentStatusWarning" enabled="false" eventSet="1330010912" eventClear="2330010912" />
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- <ALID id="330010914" logicalName="PM1.AlarmSignalAxisCRmotorenable2" description="Axis-CR motor enable2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010914" eventClear="2330010914" />
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- <ALID id="330010934" logicalName="PM1.AlarmSignalFurnacepoweronswitch" description="Furnace power on switch" category="EquipmentStatusWarning" enabled="false" eventSet="1330010934" eventClear="2330010934" />
- <ALID id="330010935" logicalName="PM1.AlarmSignalFurnacetransformertempsw" description="Furnace transformer temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330010935" eventClear="2330010935" />
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- <ALID id="330010937" logicalName="PM1.AlarmSignalGasboxexhaustpressurealarm2nd" description="Gas box exhaust pressure alarm 2nd" category="EquipmentStatusWarning" enabled="false" eventSet="1330010937" eventClear="2330010937" />
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- <ALID id="330010942" logicalName="PM1.AlarmSignalGD02001HCL1gasleak2ndalarm" description="GD02001 HCL-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010942" eventClear="2330010942" />
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- <ALID id="330010945" logicalName="PM1.AlarmSignalGD02002HCL2gasleak2ndalarm" description="GD02002 HCL-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010945" eventClear="2330010945" />
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- <ALID id="330010948" logicalName="PM1.AlarmSignalGD02003NH31gasleak2ndalarm" description="GD02003 NH3-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010948" eventClear="2330010948" />
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- <ALID id="330010951" logicalName="PM1.AlarmSignalGD02004NH32gasleak2ndalarm" description="GD02004 NH3-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010951" eventClear="2330010951" />
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- <ALID id="330010953" logicalName="PM1.AlarmSignalGD02005F21gasleak2ndalarm" description="GD02005 F2-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010953" eventClear="2330010953" />
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- <ALID id="330010960" logicalName="PM1.AlarmSignalGD02007NO1gasleak2ndalarm" description="GD02007 NO-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010960" eventClear="2330010960" />
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- <ALID id="330010963" logicalName="PM1.AlarmSignalGD02008NO2gasleak2ndalarm" description="GD02008 NO-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010963" eventClear="2330010963" />
- <ALID id="330010964" logicalName="PM1.AlarmSignalGD02009C3H61gasleak1stalarm" description="GD02009 C3H6-1 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010964" eventClear="2330010964" />
- <ALID id="330010965" logicalName="PM1.AlarmSignalGD02009C3H61gasleak2ndalarm" description="GD02009 C3H6-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010965" eventClear="2330010965" />
- <ALID id="330010966" logicalName="PM1.AlarmSignalGD02009fault" description="GD02009 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010966" eventClear="2330010966" />
- <ALID id="330010967" logicalName="PM1.AlarmSignalGD02010C3H62gasleak1stalarm" description="GD02010 C3H6-2 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010967" eventClear="2330010967" />
- <ALID id="330010968" logicalName="PM1.AlarmSignalGD02010C3H62gasleak2ndalarm" description="GD02010 C3H6-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010968" eventClear="2330010968" />
- <ALID id="330010969" logicalName="PM1.AlarmSignalGD02010fault" description="GD02010 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010969" eventClear="2330010969" />
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- <ALID id="330010971" logicalName="PM1.AlarmSignalGD02011DMA1gasleak2ndalarm" description="GD02011 DMA-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010971" eventClear="2330010971" />
- <ALID id="330010972" logicalName="PM1.AlarmSignalGD02011fault" description="GD02011 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010972" eventClear="2330010972" />
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- <ALID id="330010974" logicalName="PM1.AlarmSignalGD02012DMA2gasleak2ndalarm" description="GD02012 DMA-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010974" eventClear="2330010974" />
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- <ALID id="330010976" logicalName="PM1.AlarmSignalHPMvalvepoweronoff" description="HPM valve power on/off" category="EquipmentStatusWarning" enabled="false" eventSet="1330010976" eventClear="2330010976" />
- <ALID id="330010977" logicalName="PM1.AlarmSignalLD02001LSCleakalarm" description="LD02001 LSC leak alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010977" eventClear="2330010977" />
- <ALID id="330010978" logicalName="PM1.AlarmSignalLD03001exhaustboxwaterleakupside" description="LD03001 exhaust box water leak (up-side)" category="EquipmentStatusWarning" enabled="false" eventSet="1330010978" eventClear="2330010978" />
- <ALID id="330010979" logicalName="PM1.AlarmSignalLD03002waterleakdownside" description="LD03002 water leak (down-side)" category="EquipmentStatusWarning" enabled="false" eventSet="1330010979" eventClear="2330010979" />
- <ALID id="330010980" logicalName="PM1.AlarmSignalLD05001Magneticfluidleak" description="LD05001 Magnetic fluid leak" category="EquipmentStatusWarning" enabled="false" eventSet="1330010980" eventClear="2330010980" />
- <ALID id="330010981" logicalName="PM1.AlarmSignalLD05002Coolingwaterleak" description="LD05002 Cooling water leak" category="EquipmentStatusWarning" enabled="false" eventSet="1330010981" eventClear="2330010981" />
- <ALID id="330010982" logicalName="PM1.AlarmSignalLD05003RHCleak" description="LD05003 RHC leak" category="EquipmentStatusWarning" enabled="false" eventSet="1330010982" eventClear="2330010982" />
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- <ALID id="330010984" logicalName="PM1.AlarmSignalLightcurtainidel" description="Light curtain idel" category="EquipmentStatusWarning" enabled="false" eventSet="1330010984" eventClear="2330010984" />
- <ALID id="330010985" logicalName="PM1.AlarmSignalLightcurtainOSSD1" description="Light curtain OSSD1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010985" eventClear="2330010985" />
- <ALID id="330010986" logicalName="PM1.AlarmSignalLightcurtainOSSD2" description="Light curtain OSSD2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010986" eventClear="2330010986" />
- <ALID id="330010987" logicalName="PM1.AlarmSignalLoadingareaEMS" description="Loading area EMS" category="EquipmentStatusWarning" enabled="false" eventSet="1330010987" eventClear="2330010987" />
- <ALID id="330010988" logicalName="PM1.AlarmSignalPowerboxfiredetector" description="Power box fire detector" category="EquipmentStatusWarning" enabled="false" eventSet="1330010988" eventClear="2330010988" />
- <ALID id="330010989" logicalName="PM1.AlarmSignalPowerboxinterlockbuttonled" description="Power box interlock button led" category="EquipmentStatusWarning" enabled="false" eventSet="1330010989" eventClear="2330010989" />
- <ALID id="330010990" logicalName="PM1.AlarmSignalPowerboxinterlockresetbutton" description="Power box interlock reset button" category="EquipmentStatusWarning" enabled="false" eventSet="1330010990" eventClear="2330010990" />
- <ALID id="330010991" logicalName="PM1.AlarmSignalSCRONOFFSWITCH" description="SCR ON/OFF SWITCH" category="EquipmentStatusWarning" enabled="false" eventSet="1330010991" eventClear="2330010991" />
- <ALID id="330010992" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw11" description="SL02001 gas box door sw1-1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010992" eventClear="2330010992" />
- <ALID id="330010993" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw12" description="SL02001 gas box door sw1-2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010993" eventClear="2330010993" />
- <ALID id="330010994" logicalName="PM1.AlarmSignalSL02002gasboxdoorsw11" description="SL02002 gas box door sw1-1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010994" eventClear="2330010994" />
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- <ALID id="330010996" logicalName="PM1.AlarmSignalSL05001LAdoorsw1" description="SL05001 LA door sw1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010996" eventClear="2330010996" />
- <ALID id="330010997" logicalName="PM1.AlarmSignalSL05002LAdoorsw2" description="SL05002 LA door sw2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010997" eventClear="2330010997" />
- <ALID id="330010998" logicalName="PM1.AlarmSignalSL05004LAfurnacedoorsw" description="SL05004 LA furnace door sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330010998" eventClear="2330010998" />
- <ALID id="330010999" logicalName="PM1.AlarmSignalSMK01001detectorfault" description="SMK01001 detector fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010999" eventClear="2330010999" />
- <ALID id="330011000" logicalName="PM1.AlarmSignalSMK01001detectoroperator" description="SMK01001 detector operator" category="EquipmentStatusWarning" enabled="false" eventSet="1330011000" eventClear="2330011000" />
- <ALID id="330011001" logicalName="PM1.AlarmSignalTS05001FFUtempsw" description="TS05001 FFU temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011001" eventClear="2330011001" />
- <ALID id="330011002" logicalName="PM1.AlarmSignalTS05002Capinsidetempsw" description="TS05002 Cap inside temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011002" eventClear="2330011002" />
- <ALID id="330011003" logicalName="PM1.AlarmSignalTS05003Capoutsidetempsw" description="TS05003 Cap outside temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011003" eventClear="2330011003" />
- <ALID id="330011004" logicalName="PM1.AlarmSignalTS05004Raxisrotationtempsw" description="TS05004 R axis rotation temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011004" eventClear="2330011004" />
- <ALID id="330011005" logicalName="PM1.AlarmSignalTS05005RHCtempsw" description="TS05005 RHC temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011005" eventClear="2330011005" />
- <ALID id="330011006" logicalName="PM1.AlarmSignalTS05006furnacetempsw" description="TS05006 furnace temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011006" eventClear="2330011006" />
- <ALID id="330011007" logicalName="PM1.AlarmSignalVFD01001EDM" description="VFD01001 EDM" category="EquipmentStatusWarning" enabled="false" eventSet="1330011007" eventClear="2330011007" />
- <ALID id="330011008" logicalName="PM1.AlarmSignalVFDenable" description="VFD enable" category="EquipmentStatusWarning" enabled="false" eventSet="1330011008" eventClear="2330011008" />
- <ALID id="330011009" logicalName="PM1.AlarmSignalWaferrobotEMS" description="Wafer robot EMS" category="EquipmentStatusWarning" enabled="false" eventSet="1330011009" eventClear="2330011009" />
- <ALID id="330011010" logicalName="PM1.AlarmSignalWTRenable1" description="WTR enable1" category="EquipmentStatusWarning" enabled="false" eventSet="1330011010" eventClear="2330011010" />
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- <ALID id="330011012" logicalName="PM1.AlarmSignalWTRinterlockreset" description="WTR interlock reset" category="EquipmentStatusWarning" enabled="false" eventSet="1330011012" eventClear="2330011012" />
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- <ALID id="330020002" logicalName="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020002" eventClear="2330020002" />
- <ALID id="330020003" logicalName="PM1.AlarmHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020003" eventClear="2330020003" />
- <ALID id="330020004" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfBoatRotation(FL904)" description="cooling water flow of boat rotation (FL904) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020004" eventClear="2330020004" />
- <ALID id="330020005" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfFlange(FL905)" description="cooling water flow of flange (FL905) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020005" eventClear="2330020005" />
- <ALID id="330020006" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfFurnace(FL902)" description="cooling water flow of furnace (FL902) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020006" eventClear="2330020006" />
- <ALID id="330020007" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfLoadingArea(FL906)" description="cooling water flow of loading area (FL906) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020007" eventClear="2330020007" />
- <ALID id="330020008" logicalName="PM1.AlarmHighLimit.AI_CoolingWaterFlowOfShutter(FL903)" description="cooling water flow of shutter (FL903) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020008" eventClear="2330020008" />
- <ALID id="330020009" logicalName="PM1.AlarmHighLimit.AI_CSourceAVMFCHeaterPV" description="C-Source AV MFC heater PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020009" eventClear="2330020009" />
- <ALID id="330020010" logicalName="PM1.AlarmHighLimit.AI_CSourceTANKHeater1PV" description="C-Source TANK heater1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020010" eventClear="2330020010" />
- <ALID id="330020011" logicalName="PM1.AlarmHighLimit.AI_CSourceTANKHeater2PV" description="C-Source TANK heater2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020011" eventClear="2330020011" />
- <ALID id="330020012" logicalName="PM1.AlarmHighLimit.AI_CSourceTANKHeater3PV" description="C-Source TANK heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020012" eventClear="2330020012" />
- <ALID id="330020013" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater10TempPV" description="Foreline heater-10 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020013" eventClear="2330020013" />
- <ALID id="330020014" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater11TempPV" description="Foreline heater-11 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020014" eventClear="2330020014" />
- <ALID id="330020015" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater12TempPV" description="Foreline heater-12 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020015" eventClear="2330020015" />
- <ALID id="330020016" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater1TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020016" eventClear="2330020016" />
- <ALID id="330020017" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater2TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020017" eventClear="2330020017" />
- <ALID id="330020018" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater3TempPV" description="Foreline heater-3 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020018" eventClear="2330020018" />
- <ALID id="330020019" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater4TempPV" description="Foreline heater-4 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020019" eventClear="2330020019" />
- <ALID id="330020020" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater5TempPV" description="Foreline heater-5 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020020" eventClear="2330020020" />
- <ALID id="330020021" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater6TempPV" description="Foreline heater-6 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020021" eventClear="2330020021" />
- <ALID id="330020022" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater7TempPV" description="Foreline heater-7 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020022" eventClear="2330020022" />
- <ALID id="330020023" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater8TempPV" description="Foreline heater-8 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020023" eventClear="2330020023" />
- <ALID id="330020024" logicalName="PM1.AlarmHighLimit.AI_ForelineHeater9TempPV" description="Foreline heater-9 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020024" eventClear="2330020024" />
- <ALID id="330020025" logicalName="PM1.AlarmHighLimit.AI_FrontBodyExhaustMS6" description="Front Body Exhaust MS6 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020025" eventClear="2330020025" />
- <ALID id="330020026" logicalName="PM1.AlarmHighLimit.AI_GasBoxExhaustMS2" description="Gas Box Exhaust MS2 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020026" eventClear="2330020026" />
- <ALID id="330020027" logicalName="PM1.AlarmHighLimit.AI_GasBoxUpperVG21Pressure" description="Gas box upper VG21 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020027" eventClear="2330020027" />
- <ALID id="330020028" logicalName="PM1.AlarmHighLimit.AI_GasBoxUpperVG22Pressure" description="Gas box upper VG22 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020028" eventClear="2330020028" />
- <ALID id="330020029" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater10PV" description="Gasline heater10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020029" eventClear="2330020029" />
- <ALID id="330020030" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater11PV" description="Gasline heater11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020030" eventClear="2330020030" />
- <ALID id="330020031" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater12PV" description="Gasline heater12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020031" eventClear="2330020031" />
- <ALID id="330020032" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater13PV" description="Gasline heater13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020032" eventClear="2330020032" />
- <ALID id="330020033" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater14PV" description="Gasline heater14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020033" eventClear="2330020033" />
- <ALID id="330020034" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater15PV" description="Gasline heater15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020034" eventClear="2330020034" />
- <ALID id="330020035" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater16PV" description="Gasline heater16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020035" eventClear="2330020035" />
- <ALID id="330020036" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater17PV" description="Gasline heater17 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020036" eventClear="2330020036" />
- <ALID id="330020037" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater18PV" description="Gasline heater18 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020037" eventClear="2330020037" />
- <ALID id="330020038" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater19PV" description="Gasline heater19 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020038" eventClear="2330020038" />
- <ALID id="330020039" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater1PV" description="Foreline heater-1 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020039" eventClear="2330020039" />
- <ALID id="330020040" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater20PV" description="Gasline heater20 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020040" eventClear="2330020040" />
- <ALID id="330020041" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater21PV" description="Gasline heater21 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020041" eventClear="2330020041" />
- <ALID id="330020042" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater22PV" description="Gasline heater22 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020042" eventClear="2330020042" />
- <ALID id="330020043" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater23PV" description="Gasline heater23 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020043" eventClear="2330020043" />
- <ALID id="330020044" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater24PV" description="Gasline heater24 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020044" eventClear="2330020044" />
- <ALID id="330020045" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater25PV" description="Gasline heater25 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020045" eventClear="2330020045" />
- <ALID id="330020046" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater26PV" description="Gasline heater26 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020046" eventClear="2330020046" />
- <ALID id="330020047" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater27PV" description="Gasline heater27 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020047" eventClear="2330020047" />
- <ALID id="330020048" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater28PV" description="Gasline heater28 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020048" eventClear="2330020048" />
- <ALID id="330020049" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater29PV" description="Gasline heater29 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020049" eventClear="2330020049" />
- <ALID id="330020050" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater2PV" description="Gasline heater2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020050" eventClear="2330020050" />
- <ALID id="330020051" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020051" eventClear="2330020051" />
- <ALID id="330020052" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater31PV" description="Gasline heater31 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020052" eventClear="2330020052" />
- <ALID id="330020053" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater32PV" description="Gasline heater32 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020053" eventClear="2330020053" />
- <ALID id="330020054" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater33PV" description="Gasline heater33 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020054" eventClear="2330020054" />
- <ALID id="330020055" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater34PV" description="Gasline heater34 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020055" eventClear="2330020055" />
- <ALID id="330020056" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020056" eventClear="2330020056" />
- <ALID id="330020057" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020057" eventClear="2330020057" />
- <ALID id="330020058" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020058" eventClear="2330020058" />
- <ALID id="330020059" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020059" eventClear="2330020059" />
- <ALID id="330020060" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020060" eventClear="2330020060" />
- <ALID id="330020061" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020061" eventClear="2330020061" />
- <ALID id="330020062" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020062" eventClear="2330020062" />
- <ALID id="330020063" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020063" eventClear="2330020063" />
- <ALID id="330020064" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater42PV" description="Gasline heater42 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020064" eventClear="2330020064" />
- <ALID id="330020065" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020065" eventClear="2330020065" />
- <ALID id="330020066" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater44PV" description="Gasline heater44 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020066" eventClear="2330020066" />
- <ALID id="330020067" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020067" eventClear="2330020067" />
- <ALID id="330020068" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater46PV" description="Gasline heater46 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020068" eventClear="2330020068" />
- <ALID id="330020069" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater47PV" description="Gasline heater47 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020069" eventClear="2330020069" />
- <ALID id="330020070" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater48PV" description="Gasline heater48 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020070" eventClear="2330020070" />
- <ALID id="330020071" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater49PV" description="Gasline heater49 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020071" eventClear="2330020071" />
- <ALID id="330020072" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater4PV" description="Gasline heater4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020072" eventClear="2330020072" />
- <ALID id="330020073" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater50PV" description="Gasline heater50 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020073" eventClear="2330020073" />
- <ALID id="330020074" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater51PV" description="Gasline heater51 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020074" eventClear="2330020074" />
- <ALID id="330020075" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater52PV" description="Gasline heater52 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020075" eventClear="2330020075" />
- <ALID id="330020076" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater53PV" description="Gasline heater53 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020076" eventClear="2330020076" />
- <ALID id="330020077" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater54PV" description="Gasline heater54 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020077" eventClear="2330020077" />
- <ALID id="330020078" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater55PV" description="Gasline heater55 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020078" eventClear="2330020078" />
- <ALID id="330020079" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater56PV" description="Gasline heater56 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020079" eventClear="2330020079" />
- <ALID id="330020080" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater57PV" description="Gasline heater57 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020080" eventClear="2330020080" />
- <ALID id="330020081" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater58PV" description="Gasline heater58 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020081" eventClear="2330020081" />
- <ALID id="330020082" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater59PV" description="Gasline heater59 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020082" eventClear="2330020082" />
- <ALID id="330020083" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater5PV" description="Gasline heater5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020083" eventClear="2330020083" />
- <ALID id="330020084" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater60PV" description="Gasline heater60 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020084" eventClear="2330020084" />
- <ALID id="330020085" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater61PV" description="Gasline heater61 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020085" eventClear="2330020085" />
- <ALID id="330020086" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater62PV" description="Gasline heater62 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020086" eventClear="2330020086" />
- <ALID id="330020087" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020087" eventClear="2330020087" />
- <ALID id="330020088" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020088" eventClear="2330020088" />
- <ALID id="330020089" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater8PV" description="Gasline heater8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020089" eventClear="2330020089" />
- <ALID id="330020090" logicalName="PM1.AlarmHighLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020090" eventClear="2330020090" />
- <ALID id="330020091" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020091" eventClear="2330020091" />
- <ALID id="330020092" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020092" eventClear="2330020092" />
- <ALID id="330020093" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020093" eventClear="2330020093" />
- <ALID id="330020094" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020094" eventClear="2330020094" />
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- <ALID id="330020096" logicalName="PM1.AlarmHighLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020096" eventClear="2330020096" />
- <ALID id="330020097" logicalName="PM1.AlarmHighLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020097" eventClear="2330020097" />
- <ALID id="330020098" logicalName="PM1.AlarmHighLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020098" eventClear="2330020098" />
- <ALID id="330020099" logicalName="PM1.AlarmHighLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020099" eventClear="2330020099" />
- <ALID id="330020100" logicalName="PM1.AlarmHighLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020100" eventClear="2330020100" />
- <ALID id="330020101" logicalName="PM1.AlarmHighLimit.AI_N2-5(PG15)purgePressure" description="N2-5(PG15) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020101" eventClear="2330020101" />
- <ALID id="330020102" logicalName="PM1.AlarmHighLimit.AI_N2-6(PG16)purgePressure" description="N2-6(PG16) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020102" eventClear="2330020102" />
- <ALID id="330020103" logicalName="PM1.AlarmHighLimit.AI_N2-7(PG17)PurgePressure" description="N2-7(PG17) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020103" eventClear="2330020103" />
- <ALID id="330020104" logicalName="PM1.AlarmHighLimit.AI_PG12AnalogValue" description="PG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020104" eventClear="2330020104" />
- <ALID id="330020105" logicalName="PM1.AlarmHighLimit.AI_PG13AnalogValue" description="PG13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020105" eventClear="2330020105" />
- <ALID id="330020106" logicalName="PM1.AlarmHighLimit.AI_PS11Value" description="PS11 Value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020106" eventClear="2330020106" />
- <ALID id="330020107" logicalName="PM1.AlarmHighLimit.AI_PS13AnalogValue" description="PS13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020107" eventClear="2330020107" />
- <ALID id="330020108" logicalName="PM1.AlarmHighLimit.AI_PS17Value" description="PS17 value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020108" eventClear="2330020108" />
- <ALID id="330020109" logicalName="PM1.AlarmHighLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020109" eventClear="2330020109" />
- <ALID id="330020110" logicalName="PM1.AlarmHighLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020110" eventClear="2330020110" />
- <ALID id="330020111" logicalName="PM1.AlarmHighLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020111" eventClear="2330020111" />
- <ALID id="330020112" logicalName="PM1.AlarmHighLimit.AI_SiSourceAVMFCHeaterPV" description="Si-Source AV MFC heater PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020112" eventClear="2330020112" />
- <ALID id="330020113" logicalName="PM1.AlarmHighLimit.AI_SiSourceTANKHeater1PV" description="Si-Source TANK heater1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020113" eventClear="2330020113" />
- <ALID id="330020114" logicalName="PM1.AlarmHighLimit.AI_SiSourceTANKHeater2PV" description="Si-Source TANK heater2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020114" eventClear="2330020114" />
- <ALID id="330020115" logicalName="PM1.AlarmHighLimit.AI_SiSourceTANKHeater3PV" description="Si-Source TANK heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020115" eventClear="2330020115" />
- <ALID id="330020116" logicalName="PM1.AlarmHighLimit.AI_Unit1CH10PV" description="Unit1-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020116" eventClear="2330020116" />
- <ALID id="330020117" logicalName="PM1.AlarmHighLimit.AI_Unit1CH11PV" description="Unit1-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020117" eventClear="2330020117" />
- <ALID id="330020118" logicalName="PM1.AlarmHighLimit.AI_Unit1CH12PV" description="Unit1-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020118" eventClear="2330020118" />
- <ALID id="330020119" logicalName="PM1.AlarmHighLimit.AI_Unit1CH13PV" description="Unit1-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020119" eventClear="2330020119" />
- <ALID id="330020120" logicalName="PM1.AlarmHighLimit.AI_Unit1CH14PV" description="Unit1-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020120" eventClear="2330020120" />
- <ALID id="330020121" logicalName="PM1.AlarmHighLimit.AI_Unit1CH15PV" description="Unit1-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020121" eventClear="2330020121" />
- <ALID id="330020122" logicalName="PM1.AlarmHighLimit.AI_Unit1CH16PV" description="Unit1-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020122" eventClear="2330020122" />
- <ALID id="330020123" logicalName="PM1.AlarmHighLimit.AI_Unit1CH1PV" description="Unit1-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020123" eventClear="2330020123" />
- <ALID id="330020124" logicalName="PM1.AlarmHighLimit.AI_Unit1CH2PV" description="Unit1-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020124" eventClear="2330020124" />
- <ALID id="330020125" logicalName="PM1.AlarmHighLimit.AI_Unit1CH3PV" description="Unit1-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020125" eventClear="2330020125" />
- <ALID id="330020126" logicalName="PM1.AlarmHighLimit.AI_Unit1CH4PV" description="Unit1-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020126" eventClear="2330020126" />
- <ALID id="330020127" logicalName="PM1.AlarmHighLimit.AI_Unit1CH5PV" description="Unit1-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020127" eventClear="2330020127" />
- <ALID id="330020128" logicalName="PM1.AlarmHighLimit.AI_Unit1CH6PV" description="Unit1-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020128" eventClear="2330020128" />
- <ALID id="330020129" logicalName="PM1.AlarmHighLimit.AI_Unit1CH7PV" description="Unit1-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020129" eventClear="2330020129" />
- <ALID id="330020130" logicalName="PM1.AlarmHighLimit.AI_Unit1CH8PV" description="Unit1-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020130" eventClear="2330020130" />
- <ALID id="330020131" logicalName="PM1.AlarmHighLimit.AI_Unit1CH9PV" description="Unit1-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020131" eventClear="2330020131" />
- <ALID id="330020132" logicalName="PM1.AlarmHighLimit.AI_Unit2CH10PV" description="Unit2-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020132" eventClear="2330020132" />
- <ALID id="330020133" logicalName="PM1.AlarmHighLimit.AI_Unit2CH11PV" description="Unit2-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020133" eventClear="2330020133" />
- <ALID id="330020134" logicalName="PM1.AlarmHighLimit.AI_Unit2CH12PV" description="Unit2-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020134" eventClear="2330020134" />
- <ALID id="330020135" logicalName="PM1.AlarmHighLimit.AI_Unit2CH13PV" description="Unit2-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020135" eventClear="2330020135" />
- <ALID id="330020136" logicalName="PM1.AlarmHighLimit.AI_Unit2CH14PV" description="Unit2-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020136" eventClear="2330020136" />
- <ALID id="330020137" logicalName="PM1.AlarmHighLimit.AI_Unit2CH15PV" description="Unit2-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020137" eventClear="2330020137" />
- <ALID id="330020138" logicalName="PM1.AlarmHighLimit.AI_Unit2CH16PV" description="Unit2-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020138" eventClear="2330020138" />
- <ALID id="330020139" logicalName="PM1.AlarmHighLimit.AI_Unit2CH1PV" description="Unit2-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020139" eventClear="2330020139" />
- <ALID id="330020140" logicalName="PM1.AlarmHighLimit.AI_Unit2CH2PV" description="Unit2-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020140" eventClear="2330020140" />
- <ALID id="330020141" logicalName="PM1.AlarmHighLimit.AI_Unit2CH3PV" description="Unit2-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020141" eventClear="2330020141" />
- <ALID id="330020142" logicalName="PM1.AlarmHighLimit.AI_Unit2CH4PV" description="Unit2-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020142" eventClear="2330020142" />
- <ALID id="330020143" logicalName="PM1.AlarmHighLimit.AI_Unit2CH5PV" description="Unit2-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020143" eventClear="2330020143" />
- <ALID id="330020144" logicalName="PM1.AlarmHighLimit.AI_Unit2CH6PV" description="Unit2-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020144" eventClear="2330020144" />
- <ALID id="330020145" logicalName="PM1.AlarmHighLimit.AI_Unit2CH7PV" description="Unit2-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020145" eventClear="2330020145" />
- <ALID id="330020146" logicalName="PM1.AlarmHighLimit.AI_Unit2CH8PV" description="Unit2-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020146" eventClear="2330020146" />
- <ALID id="330020147" logicalName="PM1.AlarmHighLimit.AI_Unit2CH9PV" description="Unit2-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020147" eventClear="2330020147" />
- <ALID id="330020148" logicalName="PM1.AlarmHighLimit.AI_Unit3CH10PV" description="Unit3-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020148" eventClear="2330020148" />
- <ALID id="330020149" logicalName="PM1.AlarmHighLimit.AI_Unit3CH11PV" description="Unit3-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020149" eventClear="2330020149" />
- <ALID id="330020150" logicalName="PM1.AlarmHighLimit.AI_Unit3CH12PV" description="Unit3-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020150" eventClear="2330020150" />
- <ALID id="330020151" logicalName="PM1.AlarmHighLimit.AI_Unit3CH13PV" description="Unit3-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020151" eventClear="2330020151" />
- <ALID id="330020152" logicalName="PM1.AlarmHighLimit.AI_Unit3CH14PV" description="Unit3-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020152" eventClear="2330020152" />
- <ALID id="330020153" logicalName="PM1.AlarmHighLimit.AI_Unit3CH15PV" description="Unit3-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020153" eventClear="2330020153" />
- <ALID id="330020154" logicalName="PM1.AlarmHighLimit.AI_Unit3CH16PV" description="Unit3-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020154" eventClear="2330020154" />
- <ALID id="330020155" logicalName="PM1.AlarmHighLimit.AI_Unit3CH1PV" description="Unit3-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020155" eventClear="2330020155" />
- <ALID id="330020156" logicalName="PM1.AlarmHighLimit.AI_Unit3CH2PV" description="Unit3-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020156" eventClear="2330020156" />
- <ALID id="330020157" logicalName="PM1.AlarmHighLimit.AI_Unit3CH3PV" description="Unit3-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020157" eventClear="2330020157" />
- <ALID id="330020158" logicalName="PM1.AlarmHighLimit.AI_Unit3CH4PV" description="Unit3-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020158" eventClear="2330020158" />
- <ALID id="330020159" logicalName="PM1.AlarmHighLimit.AI_Unit3CH5PV" description="Unit3-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020159" eventClear="2330020159" />
- <ALID id="330020160" logicalName="PM1.AlarmHighLimit.AI_Unit3CH6PV" description="Unit3-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020160" eventClear="2330020160" />
- <ALID id="330020161" logicalName="PM1.AlarmHighLimit.AI_Unit3CH7PV" description="Unit3-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020161" eventClear="2330020161" />
- <ALID id="330020162" logicalName="PM1.AlarmHighLimit.AI_Unit3CH8PV" description="Unit3-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020162" eventClear="2330020162" />
- <ALID id="330020163" logicalName="PM1.AlarmHighLimit.AI_Unit3CH9PV" description="Unit3-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020163" eventClear="2330020163" />
- <ALID id="330020164" logicalName="PM1.AlarmHighLimit.AI_Unit4CH10PV" description="Unit4-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020164" eventClear="2330020164" />
- <ALID id="330020165" logicalName="PM1.AlarmHighLimit.AI_Unit4CH11PV" description="Unit4-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020165" eventClear="2330020165" />
- <ALID id="330020166" logicalName="PM1.AlarmHighLimit.AI_Unit4CH12PV" description="Unit4-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020166" eventClear="2330020166" />
- <ALID id="330020167" logicalName="PM1.AlarmHighLimit.AI_Unit4CH13PV" description="Unit4-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020167" eventClear="2330020167" />
- <ALID id="330020168" logicalName="PM1.AlarmHighLimit.AI_Unit4CH14PV" description="Unit4-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020168" eventClear="2330020168" />
- <ALID id="330020169" logicalName="PM1.AlarmHighLimit.AI_Unit4CH15PV" description="Unit4-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020169" eventClear="2330020169" />
- <ALID id="330020170" logicalName="PM1.AlarmHighLimit.AI_Unit4CH16PV" description="Unit4-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020170" eventClear="2330020170" />
- <ALID id="330020171" logicalName="PM1.AlarmHighLimit.AI_Unit4CH1PV" description="Unit4-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020171" eventClear="2330020171" />
- <ALID id="330020172" logicalName="PM1.AlarmHighLimit.AI_Unit4CH2PV" description="Unit4-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020172" eventClear="2330020172" />
- <ALID id="330020173" logicalName="PM1.AlarmHighLimit.AI_Unit4CH3PV" description="Unit4-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020173" eventClear="2330020173" />
- <ALID id="330020174" logicalName="PM1.AlarmHighLimit.AI_Unit4CH4PV" description="Unit4-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020174" eventClear="2330020174" />
- <ALID id="330020175" logicalName="PM1.AlarmHighLimit.AI_Unit4CH5PV" description="Unit4-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020175" eventClear="2330020175" />
- <ALID id="330020176" logicalName="PM1.AlarmHighLimit.AI_Unit4CH6PV" description="Unit4-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020176" eventClear="2330020176" />
- <ALID id="330020177" logicalName="PM1.AlarmHighLimit.AI_Unit4CH7PV" description="Unit4-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020177" eventClear="2330020177" />
- <ALID id="330020178" logicalName="PM1.AlarmHighLimit.AI_Unit4CH8PV" description="Unit4-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020178" eventClear="2330020178" />
- <ALID id="330020179" logicalName="PM1.AlarmHighLimit.AI_Unit4CH9PV" description="Unit4-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020179" eventClear="2330020179" />
- <ALID id="330020180" logicalName="PM1.AlarmHighLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020180" eventClear="2330020180" />
- <ALID id="330020181" logicalName="PM1.AlarmHighLimit.AI_VG12AnalogValue" description="VG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020181" eventClear="2330020181" />
- <ALID id="330020182" logicalName="PM1.AlarmHighLimit.AI_VG14AnalogValue" description="VG14 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020182" eventClear="2330020182" />
- <ALID id="330020183" logicalName="PM1.AlarmHighLimit.AI_CH10PV" description="Unit1-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020183" eventClear="2330020183" />
- <ALID id="330020184" logicalName="PM1.AlarmHighLimit.AI_CH11PV" description="Unit1-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020184" eventClear="2330020184" />
- <ALID id="330020185" logicalName="PM1.AlarmHighLimit.AI_CH12PV" description="Unit1-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020185" eventClear="2330020185" />
- <ALID id="330020186" logicalName="PM1.AlarmHighLimit.AI_CH13PV" description="Unit1-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020186" eventClear="2330020186" />
- <ALID id="330020187" logicalName="PM1.AlarmHighLimit.AI_CH14PV" description="Unit1-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020187" eventClear="2330020187" />
- <ALID id="330020188" logicalName="PM1.AlarmHighLimit.AI_CH15PV" description="Unit1-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020188" eventClear="2330020188" />
- <ALID id="330020189" logicalName="PM1.AlarmHighLimit.AI_CH16PV" description="Unit1-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020189" eventClear="2330020189" />
- <ALID id="330020190" logicalName="PM1.AlarmHighLimit.AI_CH1PV" description="Unit1-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020190" eventClear="2330020190" />
- <ALID id="330020191" logicalName="PM1.AlarmHighLimit.AI_CH2PV" description="Unit1-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020191" eventClear="2330020191" />
- <ALID id="330020192" logicalName="PM1.AlarmHighLimit.AI_CH3PV" description="Unit1-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020192" eventClear="2330020192" />
- <ALID id="330020193" logicalName="PM1.AlarmHighLimit.AI_CH4PV" description="Unit1-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020193" eventClear="2330020193" />
- <ALID id="330020194" logicalName="PM1.AlarmHighLimit.AI_CH5PV" description="Unit1-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020194" eventClear="2330020194" />
- <ALID id="330020195" logicalName="PM1.AlarmHighLimit.AI_CH6PV" description="Unit1-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020195" eventClear="2330020195" />
- <ALID id="330020196" logicalName="PM1.AlarmHighLimit.AI_CH7PV" description="Unit1-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020196" eventClear="2330020196" />
- <ALID id="330020197" logicalName="PM1.AlarmHighLimit.AI_CH8PV" description="Unit1-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020197" eventClear="2330020197" />
- <ALID id="330020198" logicalName="PM1.AlarmHighLimit.AI_CH9PV" description="Unit1-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020198" eventClear="2330020198" />
- <ALID id="330030001" logicalName="PM1.AlarmHighLimit.AI_WaterFlowREV." description="water flow REV. High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330030001" eventClear="2330030001" />
- <ALID id="330040001" logicalName="PM1.AlarmLowLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040001" eventClear="2330040001" />
- <ALID id="330040002" logicalName="PM1.AlarmLowLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040002" eventClear="2330040002" />
- <ALID id="330040003" logicalName="PM1.AlarmLowLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040003" eventClear="2330040003" />
- <ALID id="330040004" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfBoatRotation(FL904)" description="cooling water flow of boat rotation (FL904) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040004" eventClear="2330040004" />
- <ALID id="330040005" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfFlange(FL905)" description="cooling water flow of flange (FL905) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040005" eventClear="2330040005" />
- <ALID id="330040006" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfFurnace(FL902)" description="cooling water flow of furnace (FL902) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040006" eventClear="2330040006" />
- <ALID id="330040007" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfLoadingArea(FL906)" description="cooling water flow of loading area (FL906) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040007" eventClear="2330040007" />
- <ALID id="330040008" logicalName="PM1.AlarmLowLimit.AI_CoolingWaterFlowOfShutter(FL903)" description="cooling water flow of shutter (FL903) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040008" eventClear="2330040008" />
- <ALID id="330040009" logicalName="PM1.AlarmLowLimit.AI_CSourceAVMFCHeaterPV" description="C-Source AV MFC heater PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040009" eventClear="2330040009" />
- <ALID id="330040010" logicalName="PM1.AlarmLowLimit.AI_CSourceTANKHeater1PV" description="C-Source TANK heater1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040010" eventClear="2330040010" />
- <ALID id="330040011" logicalName="PM1.AlarmLowLimit.AI_CSourceTANKHeater2PV" description="C-Source TANK heater2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040011" eventClear="2330040011" />
- <ALID id="330040012" logicalName="PM1.AlarmLowLimit.AI_CSourceTANKHeater3PV" description="C-Source TANK heater3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040012" eventClear="2330040012" />
- <ALID id="330040013" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater10TempPV" description="Foreline heater-10 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040013" eventClear="2330040013" />
- <ALID id="330040014" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater11TempPV" description="Foreline heater-11 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040014" eventClear="2330040014" />
- <ALID id="330040015" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater12TempPV" description="Foreline heater-12 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040015" eventClear="2330040015" />
- <ALID id="330040016" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater1TempPV" description="Foreline heater-2 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040016" eventClear="2330040016" />
- <ALID id="330040017" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater2TempPV" description="Foreline heater-2 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040017" eventClear="2330040017" />
- <ALID id="330040018" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater3TempPV" description="Foreline heater-3 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040018" eventClear="2330040018" />
- <ALID id="330040019" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater4TempPV" description="Foreline heater-4 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040019" eventClear="2330040019" />
- <ALID id="330040020" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater5TempPV" description="Foreline heater-5 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040020" eventClear="2330040020" />
- <ALID id="330040021" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater6TempPV" description="Foreline heater-6 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040021" eventClear="2330040021" />
- <ALID id="330040022" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater7TempPV" description="Foreline heater-7 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040022" eventClear="2330040022" />
- <ALID id="330040023" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater8TempPV" description="Foreline heater-8 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040023" eventClear="2330040023" />
- <ALID id="330040024" logicalName="PM1.AlarmLowLimit.AI_ForelineHeater9TempPV" description="Foreline heater-9 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040024" eventClear="2330040024" />
- <ALID id="330040025" logicalName="PM1.AlarmLowLimit.AI_FrontBodyExhaustMS6" description="Front Body Exhaust MS6 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040025" eventClear="2330040025" />
- <ALID id="330040026" logicalName="PM1.AlarmLowLimit.AI_GasBoxExhaustMS2" description="Gas Box Exhaust MS2 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040026" eventClear="2330040026" />
- <ALID id="330040027" logicalName="PM1.AlarmLowLimit.AI_GasBoxUpperVG21Pressure" description="Gas box upper VG21 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040027" eventClear="2330040027" />
- <ALID id="330040028" logicalName="PM1.AlarmLowLimit.AI_GasBoxUpperVG22Pressure" description="Gas box upper VG22 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040028" eventClear="2330040028" />
- <ALID id="330040029" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater10PV" description="Gasline heater10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040029" eventClear="2330040029" />
- <ALID id="330040030" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater11PV" description="Gasline heater11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040030" eventClear="2330040030" />
- <ALID id="330040031" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater12PV" description="Gasline heater12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040031" eventClear="2330040031" />
- <ALID id="330040032" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater13PV" description="Gasline heater13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040032" eventClear="2330040032" />
- <ALID id="330040033" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater14PV" description="Gasline heater14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040033" eventClear="2330040033" />
- <ALID id="330040034" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater15PV" description="Gasline heater15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040034" eventClear="2330040034" />
- <ALID id="330040035" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater16PV" description="Gasline heater16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040035" eventClear="2330040035" />
- <ALID id="330040036" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater17PV" description="Gasline heater17 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040036" eventClear="2330040036" />
- <ALID id="330040037" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater18PV" description="Gasline heater18 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040037" eventClear="2330040037" />
- <ALID id="330040038" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater19PV" description="Gasline heater19 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040038" eventClear="2330040038" />
- <ALID id="330040039" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater1PV" description="Foreline heater-1 Temp.PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040039" eventClear="2330040039" />
- <ALID id="330040040" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater20PV" description="Gasline heater20 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040040" eventClear="2330040040" />
- <ALID id="330040041" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater21PV" description="Gasline heater21 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040041" eventClear="2330040041" />
- <ALID id="330040042" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater22PV" description="Gasline heater22 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040042" eventClear="2330040042" />
- <ALID id="330040043" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater23PV" description="Gasline heater23 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040043" eventClear="2330040043" />
- <ALID id="330040044" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater24PV" description="Gasline heater24 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040044" eventClear="2330040044" />
- <ALID id="330040045" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater25PV" description="Gasline heater25 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040045" eventClear="2330040045" />
- <ALID id="330040046" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater26PV" description="Gasline heater26 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040046" eventClear="2330040046" />
- <ALID id="330040047" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater27PV" description="Gasline heater27 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040047" eventClear="2330040047" />
- <ALID id="330040048" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater28PV" description="Gasline heater28 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040048" eventClear="2330040048" />
- <ALID id="330040049" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater29PV" description="Gasline heater29 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040049" eventClear="2330040049" />
- <ALID id="330040050" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater2PV" description="Gasline heater2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040050" eventClear="2330040050" />
- <ALID id="330040051" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040051" eventClear="2330040051" />
- <ALID id="330040052" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater31PV" description="Gasline heater31 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040052" eventClear="2330040052" />
- <ALID id="330040053" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater32PV" description="Gasline heater32 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040053" eventClear="2330040053" />
- <ALID id="330040054" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater33PV" description="Gasline heater33 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040054" eventClear="2330040054" />
- <ALID id="330040055" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater34PV" description="Gasline heater34 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040055" eventClear="2330040055" />
- <ALID id="330040056" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040056" eventClear="2330040056" />
- <ALID id="330040057" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040057" eventClear="2330040057" />
- <ALID id="330040058" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040058" eventClear="2330040058" />
- <ALID id="330040059" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040059" eventClear="2330040059" />
- <ALID id="330040060" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040060" eventClear="2330040060" />
- <ALID id="330040061" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040061" eventClear="2330040061" />
- <ALID id="330040062" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040062" eventClear="2330040062" />
- <ALID id="330040063" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040063" eventClear="2330040063" />
- <ALID id="330040064" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater42PV" description="Gasline heater42 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040064" eventClear="2330040064" />
- <ALID id="330040065" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040065" eventClear="2330040065" />
- <ALID id="330040066" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater44PV" description="Gasline heater44 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040066" eventClear="2330040066" />
- <ALID id="330040067" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040067" eventClear="2330040067" />
- <ALID id="330040068" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater46PV" description="Gasline heater46 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040068" eventClear="2330040068" />
- <ALID id="330040069" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater47PV" description="Gasline heater47 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040069" eventClear="2330040069" />
- <ALID id="330040070" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater48PV" description="Gasline heater48 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040070" eventClear="2330040070" />
- <ALID id="330040071" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater49PV" description="Gasline heater49 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040071" eventClear="2330040071" />
- <ALID id="330040072" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater4PV" description="Gasline heater4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040072" eventClear="2330040072" />
- <ALID id="330040073" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater50PV" description="Gasline heater50 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040073" eventClear="2330040073" />
- <ALID id="330040074" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater51PV" description="Gasline heater51 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040074" eventClear="2330040074" />
- <ALID id="330040075" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater52PV" description="Gasline heater52 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040075" eventClear="2330040075" />
- <ALID id="330040076" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater53PV" description="Gasline heater53 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040076" eventClear="2330040076" />
- <ALID id="330040077" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater54PV" description="Gasline heater54 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040077" eventClear="2330040077" />
- <ALID id="330040078" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater55PV" description="Gasline heater55 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040078" eventClear="2330040078" />
- <ALID id="330040079" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater56PV" description="Gasline heater56 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040079" eventClear="2330040079" />
- <ALID id="330040080" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater57PV" description="Gasline heater57 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040080" eventClear="2330040080" />
- <ALID id="330040081" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater58PV" description="Gasline heater58 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040081" eventClear="2330040081" />
- <ALID id="330040082" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater59PV" description="Gasline heater59 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040082" eventClear="2330040082" />
- <ALID id="330040083" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater5PV" description="Gasline heater5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040083" eventClear="2330040083" />
- <ALID id="330040084" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater60PV" description="Gasline heater60 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040084" eventClear="2330040084" />
- <ALID id="330040085" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater61PV" description="Gasline heater61 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040085" eventClear="2330040085" />
- <ALID id="330040086" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater62PV" description="Gasline heater62 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040086" eventClear="2330040086" />
- <ALID id="330040087" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040087" eventClear="2330040087" />
- <ALID id="330040088" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040088" eventClear="2330040088" />
- <ALID id="330040089" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater8PV" description="Gasline heater8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040089" eventClear="2330040089" />
- <ALID id="330040090" logicalName="PM1.AlarmLowLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040090" eventClear="2330040090" />
- <ALID id="330040091" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040091" eventClear="2330040091" />
- <ALID id="330040092" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040092" eventClear="2330040092" />
- <ALID id="330040093" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040093" eventClear="2330040093" />
- <ALID id="330040094" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040094" eventClear="2330040094" />
- <ALID id="330040095" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG5Pressure" description="GL box PG5 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040095" eventClear="2330040095" />
- <ALID id="330040096" logicalName="PM1.AlarmLowLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040096" eventClear="2330040096" />
- <ALID id="330040097" logicalName="PM1.AlarmLowLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040097" eventClear="2330040097" />
- <ALID id="330040098" logicalName="PM1.AlarmLowLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040098" eventClear="2330040098" />
- <ALID id="330040099" logicalName="PM1.AlarmLowLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040099" eventClear="2330040099" />
- <ALID id="330040100" logicalName="PM1.AlarmLowLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040100" eventClear="2330040100" />
- <ALID id="330040101" logicalName="PM1.AlarmLowLimit.AI_N2-5(PG15)purgePressure" description="N2-5(PG15) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040101" eventClear="2330040101" />
- <ALID id="330040102" logicalName="PM1.AlarmLowLimit.AI_N2-6(PG16)purgePressure" description="N2-6(PG16) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040102" eventClear="2330040102" />
- <ALID id="330040103" logicalName="PM1.AlarmLowLimit.AI_N2-7(PG17)PurgePressure" description="N2-7(PG17) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040103" eventClear="2330040103" />
- <ALID id="330040104" logicalName="PM1.AlarmLowLimit.AI_PG12AnalogValue" description="PG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040104" eventClear="2330040104" />
- <ALID id="330040105" logicalName="PM1.AlarmLowLimit.AI_PG13AnalogValue" description="PG13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040105" eventClear="2330040105" />
- <ALID id="330040106" logicalName="PM1.AlarmLowLimit.AI_PS11Value" description="PS11 Value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040106" eventClear="2330040106" />
- <ALID id="330040107" logicalName="PM1.AlarmLowLimit.AI_PS13AnalogValue" description="PS13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040107" eventClear="2330040107" />
- <ALID id="330040108" logicalName="PM1.AlarmLowLimit.AI_PS17Value" description="PS17 value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040108" eventClear="2330040108" />
- <ALID id="330040109" logicalName="PM1.AlarmLowLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040109" eventClear="2330040109" />
- <ALID id="330040110" logicalName="PM1.AlarmLowLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040110" eventClear="2330040110" />
- <ALID id="330040111" logicalName="PM1.AlarmLowLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040111" eventClear="2330040111" />
- <ALID id="330040112" logicalName="PM1.AlarmLowLimit.AI_SiSourceAVMFCHeaterPV" description="Si-Source AV MFC heater PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040112" eventClear="2330040112" />
- <ALID id="330040113" logicalName="PM1.AlarmLowLimit.AI_SiSourceTANKHeater1PV" description="Si-Source TANK heater1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040113" eventClear="2330040113" />
- <ALID id="330040114" logicalName="PM1.AlarmLowLimit.AI_SiSourceTANKHeater2PV" description="Si-Source TANK heater2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040114" eventClear="2330040114" />
- <ALID id="330040115" logicalName="PM1.AlarmLowLimit.AI_SiSourceTANKHeater3PV" description="Si-Source TANK heater3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040115" eventClear="2330040115" />
- <ALID id="330040116" logicalName="PM1.AlarmLowLimit.AI_Unit1CH10PV" description="Unit1-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040116" eventClear="2330040116" />
- <ALID id="330040117" logicalName="PM1.AlarmLowLimit.AI_Unit1CH11PV" description="Unit1-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040117" eventClear="2330040117" />
- <ALID id="330040118" logicalName="PM1.AlarmLowLimit.AI_Unit1CH12PV" description="Unit1-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040118" eventClear="2330040118" />
- <ALID id="330040119" logicalName="PM1.AlarmLowLimit.AI_Unit1CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040119" eventClear="2330040119" />
- <ALID id="330040120" logicalName="PM1.AlarmLowLimit.AI_Unit1CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040120" eventClear="2330040120" />
- <ALID id="330040121" logicalName="PM1.AlarmLowLimit.AI_Unit1CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040121" eventClear="2330040121" />
- <ALID id="330040122" logicalName="PM1.AlarmLowLimit.AI_Unit1CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040122" eventClear="2330040122" />
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- <ALID id="330040148" logicalName="PM1.AlarmLowLimit.AI_Unit3CH10PV" description="Unit3-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040148" eventClear="2330040148" />
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- <ALID id="330040152" logicalName="PM1.AlarmLowLimit.AI_Unit3CH14PV" description="Unit3-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040152" eventClear="2330040152" />
- <ALID id="330040153" logicalName="PM1.AlarmLowLimit.AI_Unit3CH15PV" description="Unit3-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040153" eventClear="2330040153" />
- <ALID id="330040154" logicalName="PM1.AlarmLowLimit.AI_Unit3CH16PV" description="Unit3-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040154" eventClear="2330040154" />
- <ALID id="330040155" logicalName="PM1.AlarmLowLimit.AI_Unit3CH1PV" description="Unit3-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040155" eventClear="2330040155" />
- <ALID id="330040156" logicalName="PM1.AlarmLowLimit.AI_Unit3CH2PV" description="Unit3-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040156" eventClear="2330040156" />
- <ALID id="330040157" logicalName="PM1.AlarmLowLimit.AI_Unit3CH3PV" description="Unit3-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040157" eventClear="2330040157" />
- <ALID id="330040158" logicalName="PM1.AlarmLowLimit.AI_Unit3CH4PV" description="Unit3-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040158" eventClear="2330040158" />
- <ALID id="330040159" logicalName="PM1.AlarmLowLimit.AI_Unit3CH5PV" description="Unit3-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040159" eventClear="2330040159" />
- <ALID id="330040160" logicalName="PM1.AlarmLowLimit.AI_Unit3CH6PV" description="Unit3-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040160" eventClear="2330040160" />
- <ALID id="330040161" logicalName="PM1.AlarmLowLimit.AI_Unit3CH7PV" description="Unit3-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040161" eventClear="2330040161" />
- <ALID id="330040162" logicalName="PM1.AlarmLowLimit.AI_Unit3CH8PV" description="Unit3-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040162" eventClear="2330040162" />
- <ALID id="330040163" logicalName="PM1.AlarmLowLimit.AI_Unit3CH9PV" description="Unit3-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040163" eventClear="2330040163" />
- <ALID id="330040164" logicalName="PM1.AlarmLowLimit.AI_Unit4CH10PV" description="Unit4-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040164" eventClear="2330040164" />
- <ALID id="330040165" logicalName="PM1.AlarmLowLimit.AI_Unit4CH11PV" description="Unit4-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040165" eventClear="2330040165" />
- <ALID id="330040166" logicalName="PM1.AlarmLowLimit.AI_Unit4CH12PV" description="Unit4-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040166" eventClear="2330040166" />
- <ALID id="330040167" logicalName="PM1.AlarmLowLimit.AI_Unit4CH13PV" description="Unit4-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040167" eventClear="2330040167" />
- <ALID id="330040168" logicalName="PM1.AlarmLowLimit.AI_Unit4CH14PV" description="Unit4-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040168" eventClear="2330040168" />
- <ALID id="330040169" logicalName="PM1.AlarmLowLimit.AI_Unit4CH15PV" description="Unit4-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040169" eventClear="2330040169" />
- <ALID id="330040170" logicalName="PM1.AlarmLowLimit.AI_Unit4CH16PV" description="Unit4-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040170" eventClear="2330040170" />
- <ALID id="330040171" logicalName="PM1.AlarmLowLimit.AI_Unit4CH1PV" description="Unit4-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040171" eventClear="2330040171" />
- <ALID id="330040172" logicalName="PM1.AlarmLowLimit.AI_Unit4CH2PV" description="Unit4-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040172" eventClear="2330040172" />
- <ALID id="330040173" logicalName="PM1.AlarmLowLimit.AI_Unit4CH3PV" description="Unit4-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040173" eventClear="2330040173" />
- <ALID id="330040174" logicalName="PM1.AlarmLowLimit.AI_Unit4CH4PV" description="Unit4-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040174" eventClear="2330040174" />
- <ALID id="330040175" logicalName="PM1.AlarmLowLimit.AI_Unit4CH5PV" description="Unit4-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040175" eventClear="2330040175" />
- <ALID id="330040176" logicalName="PM1.AlarmLowLimit.AI_Unit4CH6PV" description="Unit4-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040176" eventClear="2330040176" />
- <ALID id="330040177" logicalName="PM1.AlarmLowLimit.AI_Unit4CH7PV" description="Unit4-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040177" eventClear="2330040177" />
- <ALID id="330040178" logicalName="PM1.AlarmLowLimit.AI_Unit4CH8PV" description="Unit4-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040178" eventClear="2330040178" />
- <ALID id="330040179" logicalName="PM1.AlarmLowLimit.AI_Unit4CH9PV" description="Unit4-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040179" eventClear="2330040179" />
- <ALID id="330040180" logicalName="PM1.AlarmLowLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040180" eventClear="2330040180" />
- <ALID id="330040181" logicalName="PM1.AlarmLowLimit.AI_VG12AnalogValue" description="VG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040181" eventClear="2330040181" />
- <ALID id="330040182" logicalName="PM1.AlarmLowLimit.AI_VG14AnalogValue" description="VG14 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040182" eventClear="2330040182" />
- <ALID id="330040183" logicalName="PM1.AlarmLowLimit.AI_CH10PV" description="Unit1-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040183" eventClear="2330040183" />
- <ALID id="330040184" logicalName="PM1.AlarmLowLimit.AI_CH11PV" description="Unit1-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040184" eventClear="2330040184" />
- <ALID id="330040185" logicalName="PM1.AlarmLowLimit.AI_CH12PV" description="Unit1-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040185" eventClear="2330040185" />
- <ALID id="330040186" logicalName="PM1.AlarmLowLimit.AI_CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040186" eventClear="2330040186" />
- <ALID id="330040187" logicalName="PM1.AlarmLowLimit.AI_CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040187" eventClear="2330040187" />
- <ALID id="330040188" logicalName="PM1.AlarmLowLimit.AI_CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040188" eventClear="2330040188" />
- <ALID id="330040189" logicalName="PM1.AlarmLowLimit.AI_CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040189" eventClear="2330040189" />
- <ALID id="330040190" logicalName="PM1.AlarmLowLimit.AI_CH1PV" description="Unit1-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040190" eventClear="2330040190" />
- <ALID id="330040191" logicalName="PM1.AlarmLowLimit.AI_CH2PV" description="Unit1-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040191" eventClear="2330040191" />
- <ALID id="330040192" logicalName="PM1.AlarmLowLimit.AI_CH3PV" description="Unit1-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040192" eventClear="2330040192" />
- <ALID id="330040193" logicalName="PM1.AlarmLowLimit.AI_CH4PV" description="Unit1-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040193" eventClear="2330040193" />
- <ALID id="330040194" logicalName="PM1.AlarmLowLimit.AI_CH5PV" description="Unit1-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040194" eventClear="2330040194" />
- <ALID id="330040195" logicalName="PM1.AlarmLowLimit.AI_CH6PV" description="Unit1-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040195" eventClear="2330040195" />
- <ALID id="330040196" logicalName="PM1.AlarmLowLimit.AI_CH7PV" description="Unit1-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040196" eventClear="2330040196" />
- <ALID id="330040197" logicalName="PM1.AlarmLowLimit.AI_CH8PV" description="Unit1-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040197" eventClear="2330040197" />
- <ALID id="330040198" logicalName="PM1.AlarmLowLimit.AI_CH9PV" description="Unit1-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330040198" eventClear="2330040198" />
- <ALID id="330050001" logicalName="PM1.AlarmLowLimit.AI_WaterFlowREV." description="water flow REV. Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330050001" eventClear="2330050001" />
- <ALID id="330060001" logicalName="PM1.WarningHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060001" eventClear="2330060001" />
- <ALID id="330060002" logicalName="PM1.WarningHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060002" eventClear="2330060002" />
- <ALID id="330060003" logicalName="PM1.WarningHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060003" eventClear="2330060003" />
- <ALID id="330060004" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfBoatRotation(FL904)" description="cooling water flow of boat rotation (FL904) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060004" eventClear="2330060004" />
- <ALID id="330060005" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfFlange(FL905)" description="cooling water flow of flange (FL905) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060005" eventClear="2330060005" />
- <ALID id="330060006" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfFurnace(FL902)" description="cooling water flow of furnace (FL902) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060006" eventClear="2330060006" />
- <ALID id="330060007" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfLoadingArea(FL906)" description="cooling water flow of loading area (FL906) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060007" eventClear="2330060007" />
- <ALID id="330060008" logicalName="PM1.WarningHighLimit.AI_CoolingWaterFlowOfShutter(FL903)" description="cooling water flow of shutter (FL903) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060008" eventClear="2330060008" />
- <ALID id="330060009" logicalName="PM1.WarningHighLimit.AI_CSourceAVMFCHeaterPV" description="C-Source AV MFC heater PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060009" eventClear="2330060009" />
- <ALID id="330060010" logicalName="PM1.WarningHighLimit.AI_CSourceTANKHeater1PV" description="C-Source TANK heater1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060010" eventClear="2330060010" />
- <ALID id="330060011" logicalName="PM1.WarningHighLimit.AI_CSourceTANKHeater2PV" description="C-Source TANK heater2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060011" eventClear="2330060011" />
- <ALID id="330060012" logicalName="PM1.WarningHighLimit.AI_CSourceTANKHeater3PV" description="C-Source TANK heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060012" eventClear="2330060012" />
- <ALID id="330060013" logicalName="PM1.WarningHighLimit.AI_ForelineHeater10TempPV" description="Foreline heater-10 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060013" eventClear="2330060013" />
- <ALID id="330060014" logicalName="PM1.WarningHighLimit.AI_ForelineHeater11TempPV" description="Foreline heater-11 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060014" eventClear="2330060014" />
- <ALID id="330060015" logicalName="PM1.WarningHighLimit.AI_ForelineHeater12TempPV" description="Foreline heater-12 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060015" eventClear="2330060015" />
- <ALID id="330060016" logicalName="PM1.WarningHighLimit.AI_ForelineHeater1TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060016" eventClear="2330060016" />
- <ALID id="330060017" logicalName="PM1.WarningHighLimit.AI_ForelineHeater2TempPV" description="Foreline heater-2 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060017" eventClear="2330060017" />
- <ALID id="330060018" logicalName="PM1.WarningHighLimit.AI_ForelineHeater3TempPV" description="Foreline heater-3 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060018" eventClear="2330060018" />
- <ALID id="330060019" logicalName="PM1.WarningHighLimit.AI_ForelineHeater4TempPV" description="Foreline heater-4 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060019" eventClear="2330060019" />
- <ALID id="330060020" logicalName="PM1.WarningHighLimit.AI_ForelineHeater5TempPV" description="Foreline heater-5 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060020" eventClear="2330060020" />
- <ALID id="330060021" logicalName="PM1.WarningHighLimit.AI_ForelineHeater6TempPV" description="Foreline heater-6 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060021" eventClear="2330060021" />
- <ALID id="330060022" logicalName="PM1.WarningHighLimit.AI_ForelineHeater7TempPV" description="Foreline heater-7 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060022" eventClear="2330060022" />
- <ALID id="330060023" logicalName="PM1.WarningHighLimit.AI_ForelineHeater8TempPV" description="Foreline heater-8 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060023" eventClear="2330060023" />
- <ALID id="330060024" logicalName="PM1.WarningHighLimit.AI_ForelineHeater9TempPV" description="Foreline heater-9 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060024" eventClear="2330060024" />
- <ALID id="330060025" logicalName="PM1.WarningHighLimit.AI_FrontBodyExhaustMS6" description="Front Body Exhaust MS6 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060025" eventClear="2330060025" />
- <ALID id="330060026" logicalName="PM1.WarningHighLimit.AI_GasBoxExhaustMS2" description="Gas Box Exhaust MS2 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060026" eventClear="2330060026" />
- <ALID id="330060027" logicalName="PM1.WarningHighLimit.AI_GasBoxUpperVG21Pressure" description="Gas box upper VG21 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060027" eventClear="2330060027" />
- <ALID id="330060028" logicalName="PM1.WarningHighLimit.AI_GasBoxUpperVG22Pressure" description="Gas box upper VG22 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060028" eventClear="2330060028" />
- <ALID id="330060029" logicalName="PM1.WarningHighLimit.AI_GaslineHeater10PV" description="Gasline heater10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060029" eventClear="2330060029" />
- <ALID id="330060030" logicalName="PM1.WarningHighLimit.AI_GaslineHeater11PV" description="Gasline heater11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060030" eventClear="2330060030" />
- <ALID id="330060031" logicalName="PM1.WarningHighLimit.AI_GaslineHeater12PV" description="Gasline heater12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060031" eventClear="2330060031" />
- <ALID id="330060032" logicalName="PM1.WarningHighLimit.AI_GaslineHeater13PV" description="Gasline heater13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060032" eventClear="2330060032" />
- <ALID id="330060033" logicalName="PM1.WarningHighLimit.AI_GaslineHeater14PV" description="Gasline heater14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060033" eventClear="2330060033" />
- <ALID id="330060034" logicalName="PM1.WarningHighLimit.AI_GaslineHeater15PV" description="Gasline heater15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060034" eventClear="2330060034" />
- <ALID id="330060035" logicalName="PM1.WarningHighLimit.AI_GaslineHeater16PV" description="Gasline heater16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060035" eventClear="2330060035" />
- <ALID id="330060036" logicalName="PM1.WarningHighLimit.AI_GaslineHeater17PV" description="Gasline heater17 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060036" eventClear="2330060036" />
- <ALID id="330060037" logicalName="PM1.WarningHighLimit.AI_GaslineHeater18PV" description="Gasline heater18 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060037" eventClear="2330060037" />
- <ALID id="330060038" logicalName="PM1.WarningHighLimit.AI_GaslineHeater19PV" description="Gasline heater19 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060038" eventClear="2330060038" />
- <ALID id="330060039" logicalName="PM1.WarningHighLimit.AI_GaslineHeater1PV" description="Foreline heater-1 Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060039" eventClear="2330060039" />
- <ALID id="330060040" logicalName="PM1.WarningHighLimit.AI_GaslineHeater20PV" description="Gasline heater20 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060040" eventClear="2330060040" />
- <ALID id="330060041" logicalName="PM1.WarningHighLimit.AI_GaslineHeater21PV" description="Gasline heater21 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060041" eventClear="2330060041" />
- <ALID id="330060042" logicalName="PM1.WarningHighLimit.AI_GaslineHeater22PV" description="Gasline heater22 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060042" eventClear="2330060042" />
- <ALID id="330060043" logicalName="PM1.WarningHighLimit.AI_GaslineHeater23PV" description="Gasline heater23 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060043" eventClear="2330060043" />
- <ALID id="330060044" logicalName="PM1.WarningHighLimit.AI_GaslineHeater24PV" description="Gasline heater24 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060044" eventClear="2330060044" />
- <ALID id="330060045" logicalName="PM1.WarningHighLimit.AI_GaslineHeater25PV" description="Gasline heater25 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060045" eventClear="2330060045" />
- <ALID id="330060046" logicalName="PM1.WarningHighLimit.AI_GaslineHeater26PV" description="Gasline heater26 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060046" eventClear="2330060046" />
- <ALID id="330060047" logicalName="PM1.WarningHighLimit.AI_GaslineHeater27PV" description="Gasline heater27 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060047" eventClear="2330060047" />
- <ALID id="330060048" logicalName="PM1.WarningHighLimit.AI_GaslineHeater28PV" description="Gasline heater28 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060048" eventClear="2330060048" />
- <ALID id="330060049" logicalName="PM1.WarningHighLimit.AI_GaslineHeater29PV" description="Gasline heater29 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060049" eventClear="2330060049" />
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- <ALID id="330060051" logicalName="PM1.WarningHighLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060051" eventClear="2330060051" />
- <ALID id="330060052" logicalName="PM1.WarningHighLimit.AI_GaslineHeater31PV" description="Gasline heater31 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060052" eventClear="2330060052" />
- <ALID id="330060053" logicalName="PM1.WarningHighLimit.AI_GaslineHeater32PV" description="Gasline heater32 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060053" eventClear="2330060053" />
- <ALID id="330060054" logicalName="PM1.WarningHighLimit.AI_GaslineHeater33PV" description="Gasline heater33 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060054" eventClear="2330060054" />
- <ALID id="330060055" logicalName="PM1.WarningHighLimit.AI_GaslineHeater34PV" description="Gasline heater34 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060055" eventClear="2330060055" />
- <ALID id="330060056" logicalName="PM1.WarningHighLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060056" eventClear="2330060056" />
- <ALID id="330060057" logicalName="PM1.WarningHighLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060057" eventClear="2330060057" />
- <ALID id="330060058" logicalName="PM1.WarningHighLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060058" eventClear="2330060058" />
- <ALID id="330060059" logicalName="PM1.WarningHighLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060059" eventClear="2330060059" />
- <ALID id="330060060" logicalName="PM1.WarningHighLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060060" eventClear="2330060060" />
- <ALID id="330060061" logicalName="PM1.WarningHighLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060061" eventClear="2330060061" />
- <ALID id="330060062" logicalName="PM1.WarningHighLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060062" eventClear="2330060062" />
- <ALID id="330060063" logicalName="PM1.WarningHighLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060063" eventClear="2330060063" />
- <ALID id="330060064" logicalName="PM1.WarningHighLimit.AI_GaslineHeater42PV" description="Gasline heater42 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060064" eventClear="2330060064" />
- <ALID id="330060065" logicalName="PM1.WarningHighLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060065" eventClear="2330060065" />
- <ALID id="330060066" logicalName="PM1.WarningHighLimit.AI_GaslineHeater44PV" description="Gasline heater44 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060066" eventClear="2330060066" />
- <ALID id="330060067" logicalName="PM1.WarningHighLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060067" eventClear="2330060067" />
- <ALID id="330060068" logicalName="PM1.WarningHighLimit.AI_GaslineHeater46PV" description="Gasline heater46 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060068" eventClear="2330060068" />
- <ALID id="330060069" logicalName="PM1.WarningHighLimit.AI_GaslineHeater47PV" description="Gasline heater47 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060069" eventClear="2330060069" />
- <ALID id="330060070" logicalName="PM1.WarningHighLimit.AI_GaslineHeater48PV" description="Gasline heater48 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060070" eventClear="2330060070" />
- <ALID id="330060071" logicalName="PM1.WarningHighLimit.AI_GaslineHeater49PV" description="Gasline heater49 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060071" eventClear="2330060071" />
- <ALID id="330060072" logicalName="PM1.WarningHighLimit.AI_GaslineHeater4PV" description="Gasline heater4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060072" eventClear="2330060072" />
- <ALID id="330060073" logicalName="PM1.WarningHighLimit.AI_GaslineHeater50PV" description="Gasline heater50 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060073" eventClear="2330060073" />
- <ALID id="330060074" logicalName="PM1.WarningHighLimit.AI_GaslineHeater51PV" description="Gasline heater51 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060074" eventClear="2330060074" />
- <ALID id="330060075" logicalName="PM1.WarningHighLimit.AI_GaslineHeater52PV" description="Gasline heater52 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060075" eventClear="2330060075" />
- <ALID id="330060076" logicalName="PM1.WarningHighLimit.AI_GaslineHeater53PV" description="Gasline heater53 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060076" eventClear="2330060076" />
- <ALID id="330060077" logicalName="PM1.WarningHighLimit.AI_GaslineHeater54PV" description="Gasline heater54 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060077" eventClear="2330060077" />
- <ALID id="330060078" logicalName="PM1.WarningHighLimit.AI_GaslineHeater55PV" description="Gasline heater55 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060078" eventClear="2330060078" />
- <ALID id="330060079" logicalName="PM1.WarningHighLimit.AI_GaslineHeater56PV" description="Gasline heater56 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060079" eventClear="2330060079" />
- <ALID id="330060080" logicalName="PM1.WarningHighLimit.AI_GaslineHeater57PV" description="Gasline heater57 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060080" eventClear="2330060080" />
- <ALID id="330060081" logicalName="PM1.WarningHighLimit.AI_GaslineHeater58PV" description="Gasline heater58 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060081" eventClear="2330060081" />
- <ALID id="330060082" logicalName="PM1.WarningHighLimit.AI_GaslineHeater59PV" description="Gasline heater59 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060082" eventClear="2330060082" />
- <ALID id="330060083" logicalName="PM1.WarningHighLimit.AI_GaslineHeater5PV" description="Gasline heater5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060083" eventClear="2330060083" />
- <ALID id="330060084" logicalName="PM1.WarningHighLimit.AI_GaslineHeater60PV" description="Gasline heater60 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060084" eventClear="2330060084" />
- <ALID id="330060085" logicalName="PM1.WarningHighLimit.AI_GaslineHeater61PV" description="Gasline heater61 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060085" eventClear="2330060085" />
- <ALID id="330060086" logicalName="PM1.WarningHighLimit.AI_GaslineHeater62PV" description="Gasline heater62 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060086" eventClear="2330060086" />
- <ALID id="330060087" logicalName="PM1.WarningHighLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060087" eventClear="2330060087" />
- <ALID id="330060088" logicalName="PM1.WarningHighLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060088" eventClear="2330060088" />
- <ALID id="330060089" logicalName="PM1.WarningHighLimit.AI_GaslineHeater8PV" description="Gasline heater8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060089" eventClear="2330060089" />
- <ALID id="330060090" logicalName="PM1.WarningHighLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060090" eventClear="2330060090" />
- <ALID id="330060091" logicalName="PM1.WarningHighLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060091" eventClear="2330060091" />
- <ALID id="330060092" logicalName="PM1.WarningHighLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060092" eventClear="2330060092" />
- <ALID id="330060093" logicalName="PM1.WarningHighLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060093" eventClear="2330060093" />
- <ALID id="330060094" logicalName="PM1.WarningHighLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060094" eventClear="2330060094" />
- <ALID id="330060095" logicalName="PM1.WarningHighLimit.AI_GLBoxPG5Pressure" description="GL box PG5 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060095" eventClear="2330060095" />
- <ALID id="330060096" logicalName="PM1.WarningHighLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060096" eventClear="2330060096" />
- <ALID id="330060097" logicalName="PM1.WarningHighLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060097" eventClear="2330060097" />
- <ALID id="330060098" logicalName="PM1.WarningHighLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060098" eventClear="2330060098" />
- <ALID id="330060099" logicalName="PM1.WarningHighLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060099" eventClear="2330060099" />
- <ALID id="330060100" logicalName="PM1.WarningHighLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060100" eventClear="2330060100" />
- <ALID id="330060101" logicalName="PM1.WarningHighLimit.AI_N2-5(PG15)purgePressure" description="N2-5(PG15) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060101" eventClear="2330060101" />
- <ALID id="330060102" logicalName="PM1.WarningHighLimit.AI_N2-6(PG16)purgePressure" description="N2-6(PG16) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060102" eventClear="2330060102" />
- <ALID id="330060103" logicalName="PM1.WarningHighLimit.AI_N2-7(PG17)PurgePressure" description="N2-7(PG17) purge pressure High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060103" eventClear="2330060103" />
- <ALID id="330060104" logicalName="PM1.WarningHighLimit.AI_PG12AnalogValue" description="PG12 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060104" eventClear="2330060104" />
- <ALID id="330060105" logicalName="PM1.WarningHighLimit.AI_PG13AnalogValue" description="PG13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060105" eventClear="2330060105" />
- <ALID id="330060106" logicalName="PM1.WarningHighLimit.AI_PS11Value" description="PS11 Value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060106" eventClear="2330060106" />
- <ALID id="330060107" logicalName="PM1.WarningHighLimit.AI_PS13AnalogValue" description="PS13 analog value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060107" eventClear="2330060107" />
- <ALID id="330060108" logicalName="PM1.WarningHighLimit.AI_PS17Value" description="PS17 value High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060108" eventClear="2330060108" />
- <ALID id="330060109" logicalName="PM1.WarningHighLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060109" eventClear="2330060109" />
- <ALID id="330060110" logicalName="PM1.WarningHighLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060110" eventClear="2330060110" />
- <ALID id="330060111" logicalName="PM1.WarningHighLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060111" eventClear="2330060111" />
- <ALID id="330060112" logicalName="PM1.WarningHighLimit.AI_SiSourceAVMFCHeaterPV" description="Si-Source AV MFC heater PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060112" eventClear="2330060112" />
- <ALID id="330060113" logicalName="PM1.WarningHighLimit.AI_SiSourceTANKHeater1PV" description="Si-Source TANK heater1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060113" eventClear="2330060113" />
- <ALID id="330060114" logicalName="PM1.WarningHighLimit.AI_SiSourceTANKHeater2PV" description="Si-Source TANK heater2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060114" eventClear="2330060114" />
- <ALID id="330060115" logicalName="PM1.WarningHighLimit.AI_SiSourceTANKHeater3PV" description="Si-Source TANK heater3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060115" eventClear="2330060115" />
- <ALID id="330060116" logicalName="PM1.WarningHighLimit.AI_Unit1CH10PV" description="Unit1-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060116" eventClear="2330060116" />
- <ALID id="330060117" logicalName="PM1.WarningHighLimit.AI_Unit1CH11PV" description="Unit1-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060117" eventClear="2330060117" />
- <ALID id="330060118" logicalName="PM1.WarningHighLimit.AI_Unit1CH12PV" description="Unit1-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060118" eventClear="2330060118" />
- <ALID id="330060119" logicalName="PM1.WarningHighLimit.AI_Unit1CH13PV" description="Unit1-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060119" eventClear="2330060119" />
- <ALID id="330060120" logicalName="PM1.WarningHighLimit.AI_Unit1CH14PV" description="Unit1-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060120" eventClear="2330060120" />
- <ALID id="330060121" logicalName="PM1.WarningHighLimit.AI_Unit1CH15PV" description="Unit1-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060121" eventClear="2330060121" />
- <ALID id="330060122" logicalName="PM1.WarningHighLimit.AI_Unit1CH16PV" description="Unit1-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060122" eventClear="2330060122" />
- <ALID id="330060123" logicalName="PM1.WarningHighLimit.AI_Unit1CH1PV" description="Unit1-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060123" eventClear="2330060123" />
- <ALID id="330060124" logicalName="PM1.WarningHighLimit.AI_Unit1CH2PV" description="Unit1-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060124" eventClear="2330060124" />
- <ALID id="330060125" logicalName="PM1.WarningHighLimit.AI_Unit1CH3PV" description="Unit1-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060125" eventClear="2330060125" />
- <ALID id="330060126" logicalName="PM1.WarningHighLimit.AI_Unit1CH4PV" description="Unit1-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060126" eventClear="2330060126" />
- <ALID id="330060127" logicalName="PM1.WarningHighLimit.AI_Unit1CH5PV" description="Unit1-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060127" eventClear="2330060127" />
- <ALID id="330060128" logicalName="PM1.WarningHighLimit.AI_Unit1CH6PV" description="Unit1-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060128" eventClear="2330060128" />
- <ALID id="330060129" logicalName="PM1.WarningHighLimit.AI_Unit1CH7PV" description="Unit1-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060129" eventClear="2330060129" />
- <ALID id="330060130" logicalName="PM1.WarningHighLimit.AI_Unit1CH8PV" description="Unit1-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060130" eventClear="2330060130" />
- <ALID id="330060131" logicalName="PM1.WarningHighLimit.AI_Unit1CH9PV" description="Unit1-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060131" eventClear="2330060131" />
- <ALID id="330060132" logicalName="PM1.WarningHighLimit.AI_Unit2CH10PV" description="Unit2-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060132" eventClear="2330060132" />
- <ALID id="330060133" logicalName="PM1.WarningHighLimit.AI_Unit2CH11PV" description="Unit2-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060133" eventClear="2330060133" />
- <ALID id="330060134" logicalName="PM1.WarningHighLimit.AI_Unit2CH12PV" description="Unit2-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060134" eventClear="2330060134" />
- <ALID id="330060135" logicalName="PM1.WarningHighLimit.AI_Unit2CH13PV" description="Unit2-CH13 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060135" eventClear="2330060135" />
- <ALID id="330060136" logicalName="PM1.WarningHighLimit.AI_Unit2CH14PV" description="Unit2-CH14 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060136" eventClear="2330060136" />
- <ALID id="330060137" logicalName="PM1.WarningHighLimit.AI_Unit2CH15PV" description="Unit2-CH15 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060137" eventClear="2330060137" />
- <ALID id="330060138" logicalName="PM1.WarningHighLimit.AI_Unit2CH16PV" description="Unit2-CH16 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060138" eventClear="2330060138" />
- <ALID id="330060139" logicalName="PM1.WarningHighLimit.AI_Unit2CH1PV" description="Unit2-CH1 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060139" eventClear="2330060139" />
- <ALID id="330060140" logicalName="PM1.WarningHighLimit.AI_Unit2CH2PV" description="Unit2-CH2 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060140" eventClear="2330060140" />
- <ALID id="330060141" logicalName="PM1.WarningHighLimit.AI_Unit2CH3PV" description="Unit2-CH3 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060141" eventClear="2330060141" />
- <ALID id="330060142" logicalName="PM1.WarningHighLimit.AI_Unit2CH4PV" description="Unit2-CH4 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060142" eventClear="2330060142" />
- <ALID id="330060143" logicalName="PM1.WarningHighLimit.AI_Unit2CH5PV" description="Unit2-CH5 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060143" eventClear="2330060143" />
- <ALID id="330060144" logicalName="PM1.WarningHighLimit.AI_Unit2CH6PV" description="Unit2-CH6 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060144" eventClear="2330060144" />
- <ALID id="330060145" logicalName="PM1.WarningHighLimit.AI_Unit2CH7PV" description="Unit2-CH7 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060145" eventClear="2330060145" />
- <ALID id="330060146" logicalName="PM1.WarningHighLimit.AI_Unit2CH8PV" description="Unit2-CH8 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060146" eventClear="2330060146" />
- <ALID id="330060147" logicalName="PM1.WarningHighLimit.AI_Unit2CH9PV" description="Unit2-CH9 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060147" eventClear="2330060147" />
- <ALID id="330060148" logicalName="PM1.WarningHighLimit.AI_Unit3CH10PV" description="Unit3-CH10 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060148" eventClear="2330060148" />
- <ALID id="330060149" logicalName="PM1.WarningHighLimit.AI_Unit3CH11PV" description="Unit3-CH11 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060149" eventClear="2330060149" />
- <ALID id="330060150" logicalName="PM1.WarningHighLimit.AI_Unit3CH12PV" description="Unit3-CH12 PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330060150" eventClear="2330060150" />
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- <ALID id="330080048" logicalName="PM1.WarningLowLimit.AI_GaslineHeater28PV" description="Gasline heater28 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080048" eventClear="2330080048" />
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- <ALID id="330080051" logicalName="PM1.WarningLowLimit.AI_GaslineHeater30PV" description="Gasline heater30 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080051" eventClear="2330080051" />
- <ALID id="330080052" logicalName="PM1.WarningLowLimit.AI_GaslineHeater31PV" description="Gasline heater31 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080052" eventClear="2330080052" />
- <ALID id="330080053" logicalName="PM1.WarningLowLimit.AI_GaslineHeater32PV" description="Gasline heater32 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080053" eventClear="2330080053" />
- <ALID id="330080054" logicalName="PM1.WarningLowLimit.AI_GaslineHeater33PV" description="Gasline heater33 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080054" eventClear="2330080054" />
- <ALID id="330080055" logicalName="PM1.WarningLowLimit.AI_GaslineHeater34PV" description="Gasline heater34 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080055" eventClear="2330080055" />
- <ALID id="330080056" logicalName="PM1.WarningLowLimit.AI_GaslineHeater35PV" description="Gasline heater35 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080056" eventClear="2330080056" />
- <ALID id="330080057" logicalName="PM1.WarningLowLimit.AI_GaslineHeater36PV" description="Gasline heater36 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080057" eventClear="2330080057" />
- <ALID id="330080058" logicalName="PM1.WarningLowLimit.AI_GaslineHeater37PV" description="Gasline heater37 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080058" eventClear="2330080058" />
- <ALID id="330080059" logicalName="PM1.WarningLowLimit.AI_GaslineHeater38PV" description="Gasline heater38 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080059" eventClear="2330080059" />
- <ALID id="330080060" logicalName="PM1.WarningLowLimit.AI_GaslineHeater39PV" description="Gasline heater39 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080060" eventClear="2330080060" />
- <ALID id="330080061" logicalName="PM1.WarningLowLimit.AI_GaslineHeater3PV" description="Gasline heater3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080061" eventClear="2330080061" />
- <ALID id="330080062" logicalName="PM1.WarningLowLimit.AI_GaslineHeater40PV" description="Gasline heater40 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080062" eventClear="2330080062" />
- <ALID id="330080063" logicalName="PM1.WarningLowLimit.AI_GaslineHeater41PV" description="Gasline heater41 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080063" eventClear="2330080063" />
- <ALID id="330080064" logicalName="PM1.WarningLowLimit.AI_GaslineHeater42PV" description="Gasline heater42 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080064" eventClear="2330080064" />
- <ALID id="330080065" logicalName="PM1.WarningLowLimit.AI_GaslineHeater43PV" description="Gasline heater43 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080065" eventClear="2330080065" />
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- <ALID id="330080067" logicalName="PM1.WarningLowLimit.AI_GaslineHeater45PV" description="Gasline heater45 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080067" eventClear="2330080067" />
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- <ALID id="330080087" logicalName="PM1.WarningLowLimit.AI_GaslineHeater6PV" description="Gasline heater6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080087" eventClear="2330080087" />
- <ALID id="330080088" logicalName="PM1.WarningLowLimit.AI_GaslineHeater7PV" description="Gasline heater7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080088" eventClear="2330080088" />
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- <ALID id="330080090" logicalName="PM1.WarningLowLimit.AI_GaslineHeater9PV" description="Gasline heater9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080090" eventClear="2330080090" />
- <ALID id="330080091" logicalName="PM1.WarningLowLimit.AI_GLBoxPG1Pressure" description="GL box PG1 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080091" eventClear="2330080091" />
- <ALID id="330080092" logicalName="PM1.WarningLowLimit.AI_GLBoxPG2Pressure" description="GL box PG2 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080092" eventClear="2330080092" />
- <ALID id="330080093" logicalName="PM1.WarningLowLimit.AI_GLBoxPG3Pressure" description="GL box PG3 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080093" eventClear="2330080093" />
- <ALID id="330080094" logicalName="PM1.WarningLowLimit.AI_GLBoxPG4Pressure" description="GL box PG4 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080094" eventClear="2330080094" />
- <ALID id="330080095" logicalName="PM1.WarningLowLimit.AI_GLBoxPG5Pressure" description="GL box PG5 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080095" eventClear="2330080095" />
- <ALID id="330080096" logicalName="PM1.WarningLowLimit.AI_GLBoxPG6Pressure" description="GL box PG6 pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080096" eventClear="2330080096" />
- <ALID id="330080097" logicalName="PM1.WarningLowLimit.AI_HeatingExhaustMS1" description="Heating Exhaust MS1 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080097" eventClear="2330080097" />
- <ALID id="330080098" logicalName="PM1.WarningLowLimit.AI_LAExhaustMS7" description="L/A Exhaust MS7 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080098" eventClear="2330080098" />
- <ALID id="330080099" logicalName="PM1.WarningLowLimit.AI_LoadingAreaExhaustMS5" description="Loading Area Exhaust MS5 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080099" eventClear="2330080099" />
- <ALID id="330080100" logicalName="PM1.WarningLowLimit.AI_N2-4(PG14)purgePressure" description="N2-4(PG14) purge pressure Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080100" eventClear="2330080100" />
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- <ALID id="330080105" logicalName="PM1.WarningLowLimit.AI_PG13AnalogValue" description="PG13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080105" eventClear="2330080105" />
- <ALID id="330080106" logicalName="PM1.WarningLowLimit.AI_PS11Value" description="PS11 Value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080106" eventClear="2330080106" />
- <ALID id="330080107" logicalName="PM1.WarningLowLimit.AI_PS13AnalogValue" description="PS13 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080107" eventClear="2330080107" />
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- <ALID id="330080109" logicalName="PM1.WarningLowLimit.AI_RHCExhaustMS8" description="RHC Exhaust MS8 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080109" eventClear="2330080109" />
- <ALID id="330080110" logicalName="PM1.WarningLowLimit.AI_RHCFlow(FL901)" description="RHC flow (FL901) Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080110" eventClear="2330080110" />
- <ALID id="330080111" logicalName="PM1.WarningLowLimit.AI_ScavengerExhaustMS3" description="Scavenger Exhaust MS3 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080111" eventClear="2330080111" />
- <ALID id="330080112" logicalName="PM1.WarningLowLimit.AI_SiSourceAVMFCHeaterPV" description="Si-Source AV MFC heater PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080112" eventClear="2330080112" />
- <ALID id="330080113" logicalName="PM1.WarningLowLimit.AI_SiSourceTANKHeater1PV" description="Si-Source TANK heater1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080113" eventClear="2330080113" />
- <ALID id="330080114" logicalName="PM1.WarningLowLimit.AI_SiSourceTANKHeater2PV" description="Si-Source TANK heater2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080114" eventClear="2330080114" />
- <ALID id="330080115" logicalName="PM1.WarningLowLimit.AI_SiSourceTANKHeater3PV" description="Si-Source TANK heater3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080115" eventClear="2330080115" />
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- <ALID id="330080119" logicalName="PM1.WarningLowLimit.AI_Unit1CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080119" eventClear="2330080119" />
- <ALID id="330080120" logicalName="PM1.WarningLowLimit.AI_Unit1CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080120" eventClear="2330080120" />
- <ALID id="330080121" logicalName="PM1.WarningLowLimit.AI_Unit1CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080121" eventClear="2330080121" />
- <ALID id="330080122" logicalName="PM1.WarningLowLimit.AI_Unit1CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080122" eventClear="2330080122" />
- <ALID id="330080123" logicalName="PM1.WarningLowLimit.AI_Unit1CH1PV" description="Unit1-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080123" eventClear="2330080123" />
- <ALID id="330080124" logicalName="PM1.WarningLowLimit.AI_Unit1CH2PV" description="Unit1-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080124" eventClear="2330080124" />
- <ALID id="330080125" logicalName="PM1.WarningLowLimit.AI_Unit1CH3PV" description="Unit1-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080125" eventClear="2330080125" />
- <ALID id="330080126" logicalName="PM1.WarningLowLimit.AI_Unit1CH4PV" description="Unit1-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080126" eventClear="2330080126" />
- <ALID id="330080127" logicalName="PM1.WarningLowLimit.AI_Unit1CH5PV" description="Unit1-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080127" eventClear="2330080127" />
- <ALID id="330080128" logicalName="PM1.WarningLowLimit.AI_Unit1CH6PV" description="Unit1-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080128" eventClear="2330080128" />
- <ALID id="330080129" logicalName="PM1.WarningLowLimit.AI_Unit1CH7PV" description="Unit1-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080129" eventClear="2330080129" />
- <ALID id="330080130" logicalName="PM1.WarningLowLimit.AI_Unit1CH8PV" description="Unit1-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080130" eventClear="2330080130" />
- <ALID id="330080131" logicalName="PM1.WarningLowLimit.AI_Unit1CH9PV" description="Unit1-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080131" eventClear="2330080131" />
- <ALID id="330080132" logicalName="PM1.WarningLowLimit.AI_Unit2CH10PV" description="Unit2-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080132" eventClear="2330080132" />
- <ALID id="330080133" logicalName="PM1.WarningLowLimit.AI_Unit2CH11PV" description="Unit2-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080133" eventClear="2330080133" />
- <ALID id="330080134" logicalName="PM1.WarningLowLimit.AI_Unit2CH12PV" description="Unit2-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080134" eventClear="2330080134" />
- <ALID id="330080135" logicalName="PM1.WarningLowLimit.AI_Unit2CH13PV" description="Unit2-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080135" eventClear="2330080135" />
- <ALID id="330080136" logicalName="PM1.WarningLowLimit.AI_Unit2CH14PV" description="Unit2-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080136" eventClear="2330080136" />
- <ALID id="330080137" logicalName="PM1.WarningLowLimit.AI_Unit2CH15PV" description="Unit2-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080137" eventClear="2330080137" />
- <ALID id="330080138" logicalName="PM1.WarningLowLimit.AI_Unit2CH16PV" description="Unit2-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080138" eventClear="2330080138" />
- <ALID id="330080139" logicalName="PM1.WarningLowLimit.AI_Unit2CH1PV" description="Unit2-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080139" eventClear="2330080139" />
- <ALID id="330080140" logicalName="PM1.WarningLowLimit.AI_Unit2CH2PV" description="Unit2-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080140" eventClear="2330080140" />
- <ALID id="330080141" logicalName="PM1.WarningLowLimit.AI_Unit2CH3PV" description="Unit2-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080141" eventClear="2330080141" />
- <ALID id="330080142" logicalName="PM1.WarningLowLimit.AI_Unit2CH4PV" description="Unit2-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080142" eventClear="2330080142" />
- <ALID id="330080143" logicalName="PM1.WarningLowLimit.AI_Unit2CH5PV" description="Unit2-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080143" eventClear="2330080143" />
- <ALID id="330080144" logicalName="PM1.WarningLowLimit.AI_Unit2CH6PV" description="Unit2-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080144" eventClear="2330080144" />
- <ALID id="330080145" logicalName="PM1.WarningLowLimit.AI_Unit2CH7PV" description="Unit2-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080145" eventClear="2330080145" />
- <ALID id="330080146" logicalName="PM1.WarningLowLimit.AI_Unit2CH8PV" description="Unit2-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080146" eventClear="2330080146" />
- <ALID id="330080147" logicalName="PM1.WarningLowLimit.AI_Unit2CH9PV" description="Unit2-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080147" eventClear="2330080147" />
- <ALID id="330080148" logicalName="PM1.WarningLowLimit.AI_Unit3CH10PV" description="Unit3-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080148" eventClear="2330080148" />
- <ALID id="330080149" logicalName="PM1.WarningLowLimit.AI_Unit3CH11PV" description="Unit3-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080149" eventClear="2330080149" />
- <ALID id="330080150" logicalName="PM1.WarningLowLimit.AI_Unit3CH12PV" description="Unit3-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080150" eventClear="2330080150" />
- <ALID id="330080151" logicalName="PM1.WarningLowLimit.AI_Unit3CH13PV" description="Unit3-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080151" eventClear="2330080151" />
- <ALID id="330080152" logicalName="PM1.WarningLowLimit.AI_Unit3CH14PV" description="Unit3-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080152" eventClear="2330080152" />
- <ALID id="330080153" logicalName="PM1.WarningLowLimit.AI_Unit3CH15PV" description="Unit3-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080153" eventClear="2330080153" />
- <ALID id="330080154" logicalName="PM1.WarningLowLimit.AI_Unit3CH16PV" description="Unit3-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080154" eventClear="2330080154" />
- <ALID id="330080155" logicalName="PM1.WarningLowLimit.AI_Unit3CH1PV" description="Unit3-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080155" eventClear="2330080155" />
- <ALID id="330080156" logicalName="PM1.WarningLowLimit.AI_Unit3CH2PV" description="Unit3-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080156" eventClear="2330080156" />
- <ALID id="330080157" logicalName="PM1.WarningLowLimit.AI_Unit3CH3PV" description="Unit3-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080157" eventClear="2330080157" />
- <ALID id="330080158" logicalName="PM1.WarningLowLimit.AI_Unit3CH4PV" description="Unit3-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080158" eventClear="2330080158" />
- <ALID id="330080159" logicalName="PM1.WarningLowLimit.AI_Unit3CH5PV" description="Unit3-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080159" eventClear="2330080159" />
- <ALID id="330080160" logicalName="PM1.WarningLowLimit.AI_Unit3CH6PV" description="Unit3-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080160" eventClear="2330080160" />
- <ALID id="330080161" logicalName="PM1.WarningLowLimit.AI_Unit3CH7PV" description="Unit3-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080161" eventClear="2330080161" />
- <ALID id="330080162" logicalName="PM1.WarningLowLimit.AI_Unit3CH8PV" description="Unit3-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080162" eventClear="2330080162" />
- <ALID id="330080163" logicalName="PM1.WarningLowLimit.AI_Unit3CH9PV" description="Unit3-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080163" eventClear="2330080163" />
- <ALID id="330080164" logicalName="PM1.WarningLowLimit.AI_Unit4CH10PV" description="Unit4-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080164" eventClear="2330080164" />
- <ALID id="330080165" logicalName="PM1.WarningLowLimit.AI_Unit4CH11PV" description="Unit4-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080165" eventClear="2330080165" />
- <ALID id="330080166" logicalName="PM1.WarningLowLimit.AI_Unit4CH12PV" description="Unit4-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080166" eventClear="2330080166" />
- <ALID id="330080167" logicalName="PM1.WarningLowLimit.AI_Unit4CH13PV" description="Unit4-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080167" eventClear="2330080167" />
- <ALID id="330080168" logicalName="PM1.WarningLowLimit.AI_Unit4CH14PV" description="Unit4-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080168" eventClear="2330080168" />
- <ALID id="330080169" logicalName="PM1.WarningLowLimit.AI_Unit4CH15PV" description="Unit4-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080169" eventClear="2330080169" />
- <ALID id="330080170" logicalName="PM1.WarningLowLimit.AI_Unit4CH16PV" description="Unit4-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080170" eventClear="2330080170" />
- <ALID id="330080171" logicalName="PM1.WarningLowLimit.AI_Unit4CH1PV" description="Unit4-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080171" eventClear="2330080171" />
- <ALID id="330080172" logicalName="PM1.WarningLowLimit.AI_Unit4CH2PV" description="Unit4-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080172" eventClear="2330080172" />
- <ALID id="330080173" logicalName="PM1.WarningLowLimit.AI_Unit4CH3PV" description="Unit4-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080173" eventClear="2330080173" />
- <ALID id="330080174" logicalName="PM1.WarningLowLimit.AI_Unit4CH4PV" description="Unit4-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080174" eventClear="2330080174" />
- <ALID id="330080175" logicalName="PM1.WarningLowLimit.AI_Unit4CH5PV" description="Unit4-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080175" eventClear="2330080175" />
- <ALID id="330080176" logicalName="PM1.WarningLowLimit.AI_Unit4CH6PV" description="Unit4-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080176" eventClear="2330080176" />
- <ALID id="330080177" logicalName="PM1.WarningLowLimit.AI_Unit4CH7PV" description="Unit4-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080177" eventClear="2330080177" />
- <ALID id="330080178" logicalName="PM1.WarningLowLimit.AI_Unit4CH8PV" description="Unit4-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080178" eventClear="2330080178" />
- <ALID id="330080179" logicalName="PM1.WarningLowLimit.AI_Unit4CH9PV" description="Unit4-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080179" eventClear="2330080179" />
- <ALID id="330080180" logicalName="PM1.WarningLowLimit.AI_ValveBoxExhaustMS4" description="Valve Box Exhaust MS4 Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080180" eventClear="2330080180" />
- <ALID id="330080181" logicalName="PM1.WarningLowLimit.AI_VG12AnalogValue" description="VG12 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080181" eventClear="2330080181" />
- <ALID id="330080182" logicalName="PM1.WarningLowLimit.AI_VG14AnalogValue" description="VG14 analog value Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080182" eventClear="2330080182" />
- <ALID id="330080183" logicalName="PM1.WarningLowLimit.AI_CH10PV" description="Unit1-CH10 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080183" eventClear="2330080183" />
- <ALID id="330080184" logicalName="PM1.WarningLowLimit.AI_CH11PV" description="Unit1-CH11 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080184" eventClear="2330080184" />
- <ALID id="330080185" logicalName="PM1.WarningLowLimit.AI_CH12PV" description="Unit1-CH12 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080185" eventClear="2330080185" />
- <ALID id="330080186" logicalName="PM1.WarningLowLimit.AI_CH13PV" description="Unit1-CH13 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080186" eventClear="2330080186" />
- <ALID id="330080187" logicalName="PM1.WarningLowLimit.AI_CH14PV" description="Unit1-CH14 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080187" eventClear="2330080187" />
- <ALID id="330080188" logicalName="PM1.WarningLowLimit.AI_CH15PV" description="Unit1-CH15 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080188" eventClear="2330080188" />
- <ALID id="330080189" logicalName="PM1.WarningLowLimit.AI_CH16PV" description="Unit1-CH16 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080189" eventClear="2330080189" />
- <ALID id="330080190" logicalName="PM1.WarningLowLimit.AI_CH1PV" description="Unit1-CH1 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080190" eventClear="2330080190" />
- <ALID id="330080191" logicalName="PM1.WarningLowLimit.AI_CH2PV" description="Unit1-CH2 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080191" eventClear="2330080191" />
- <ALID id="330080192" logicalName="PM1.WarningLowLimit.AI_CH3PV" description="Unit1-CH3 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080192" eventClear="2330080192" />
- <ALID id="330080193" logicalName="PM1.WarningLowLimit.AI_CH4PV" description="Unit1-CH4 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080193" eventClear="2330080193" />
- <ALID id="330080194" logicalName="PM1.WarningLowLimit.AI_CH5PV" description="Unit1-CH5 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080194" eventClear="2330080194" />
- <ALID id="330080195" logicalName="PM1.WarningLowLimit.AI_CH6PV" description="Unit1-CH6 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080195" eventClear="2330080195" />
- <ALID id="330080196" logicalName="PM1.WarningLowLimit.AI_CH7PV" description="Unit1-CH7 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080196" eventClear="2330080196" />
- <ALID id="330080197" logicalName="PM1.WarningLowLimit.AI_CH8PV" description="Unit1-CH8 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080197" eventClear="2330080197" />
- <ALID id="330080198" logicalName="PM1.WarningLowLimit.AI_CH9PV" description="Unit1-CH9 PV Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330080198" eventClear="2330080198" />
- <ALID id="330090001" logicalName="PM1.WarningLowLimit.AI_WaterFlowREV." description="water flow REV. Low Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330090001" eventClear="2330090001" />
- <ALID id="860010001" logicalName="WaferRobot.AlarmSignaWaferRobotTPStatusWarning" description="Wafer Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1860010001" eventClear="2860010001" />
- <ALID id="860010002" logicalName="WaferRobot.BladeWaferNotPresentWarning" description="Blade wafer not present " category="EquipmentStatusWarning" enabled="false" eventSet="1860010002" eventClear="2860010002" />
- <ALID id="860010003" logicalName="WaferRobot.BladeWaferPresentWarning" description="Blade wafer present " category="EquipmentStatusWarning" enabled="false" eventSet="1860010003" eventClear="2860010003" />
- <ALID id="860010004" logicalName="WaferRobot.CheckLoadFailAlarm" description="Check load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1860010004" eventClear="2860010004" />
- <ALID id="860010005" logicalName="WaferRobot.CheckLoadTimeoutAlarm" description="Check load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010005" eventClear="2860010005" />
- <ALID id="860010006" logicalName="WaferRobot.CheckWaferInformationFailAlarm" description="Check wafer information fail " category="EquipmentStatusWarning" enabled="false" eventSet="1860010006" eventClear="2860010006" />
- <ALID id="860010007" logicalName="WaferRobot.MapFailAlarm" description="Map fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1860010007" eventClear="2860010007" />
- <ALID id="860010008" logicalName="WaferRobot.MapTimeoutAlarm" description="Map timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010008" eventClear="2860010008" />
- <ALID id="860010009" logicalName="WaferRobot.PickWaferFailAlarm" description="Pick wafer fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1860010009" eventClear="2860010009" />
- <ALID id="860010010" logicalName="WaferRobot.PickWaferPauseWarning" description="Pick wafer pause " category="EquipmentStatusWarning" enabled="false" eventSet="1860010010" eventClear="2860010010" />
- <ALID id="860010011" logicalName="WaferRobot.PickWaferResumeWarning" description="Pick wafer resume " category="EquipmentStatusWarning" enabled="false" eventSet="1860010011" eventClear="2860010011" />
- <ALID id="860010012" logicalName="WaferRobot.PickWaferTimeoutAlarm" description="Pick wafer timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010012" eventClear="2860010012" />
- <ALID id="860010013" logicalName="WaferRobot.PlaceWaferFailAlarm" description="Place wafer fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1860010013" eventClear="2860010013" />
- <ALID id="860010014" logicalName="WaferRobot.PlaceWaferPauseWarning" description="Place wafer pause " category="EquipmentStatusWarning" enabled="false" eventSet="1860010014" eventClear="2860010014" />
- <ALID id="860010015" logicalName="WaferRobot.PlaceWaferResumeWarning" description="Place wafer resume " category="EquipmentStatusWarning" enabled="false" eventSet="1860010015" eventClear="2860010015" />
- <ALID id="860010016" logicalName="WaferRobot.PlaceWaferTimeoutAlarm" description="Place wafer timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010016" eventClear="2860010016" />
- <ALID id="860010017" logicalName="WaferRobot.RequestWaferPresentFailAlarm" description="Request wafer present fail " category="EquipmentStatusWarning" enabled="false" eventSet="1860010017" eventClear="2860010017" />
- <ALID id="860010018" logicalName="WaferRobot.RequestWaferPresentTimeoutAlarm" description="Request wafer present timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010018" eventClear="2860010018" />
- <ALID id="860010019" logicalName="WaferRobot.RobotDIAlarm" description="Robot DI Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1860010019" eventClear="2860010019" />
- <ALID id="860010020" logicalName="WaferRobot.RobotHasError" description="Robot has error " category="EquipmentStatusWarning" enabled="false" eventSet="1860010020" eventClear="2860010020" />
- <ALID id="860010021" logicalName="WaferRobot.RobotHomeFailAlarm" description="Robot home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1860010021" eventClear="2860010021" />
- <ALID id="860010022" logicalName="WaferRobot.RobotHomeTimeoutAlarm" description="Robot home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010022" eventClear="2860010022" />
- <ALID id="860010023" logicalName="WaferRobot.RobotSensorFoundWaferOnBladeAfterPlaceAlarm" description="Robot sensor found wafer on blade after place " category="EquipmentStatusWarning" enabled="false" eventSet="1860010023" eventClear="2860010023" />
- <ALID id="860010024" logicalName="WaferRobot.RobotSensorNotFoundWaferOnBladeAfterPickAlarm" description="Robot sensor found wafer on blade after pick " category="EquipmentStatusWarning" enabled="false" eventSet="1860010024" eventClear="2860010024" />
- <ALID id="860010025" logicalName="WaferRobot.SetServoOnFailAlarm" description="Set servo on fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1860010025" eventClear="2860010025" />
- <ALID id="860010026" logicalName="WaferRobot.SetServoOnTimeoutAlarm" description="Set servo on timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010026" eventClear="2860010026" />
- <ALID id="860010027" logicalName="WaferRobot.SetSpeedFailAlarm" description="Set speed fail " category="EquipmentStatusWarning" enabled="false" eventSet="1860010027" eventClear="2860010027" />
- <ALID id="860010028" logicalName="WaferRobot.SetSpeedTimeoutAlarm" description="Set speed timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1860010028" eventClear="2860010028" />
- <ALID id="860010029" logicalName="WaferRobot.TargetWaferNotPresentWarning" description="Target wafer not present " category="EquipmentStatusWarning" enabled="false" eventSet="1860010029" eventClear="2860010029" />
- <ALID id="860010030" logicalName="WaferRobot.TargetWaferPresentWarning" description="Target wafer present " category="EquipmentStatusWarning" enabled="false" eventSet="1860010030" eventClear="2860010030" />
- <ALID id="870010001" logicalName="Boat.AutoShutterCloseTimeOut" description="Auto shutter close timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010001" eventClear="2870010001" />
- <ALID id="870010002" logicalName="Boat.AutoShutterDownTimeOut" description="Auto shutter down timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010002" eventClear="2870010002" />
- <ALID id="870010003" logicalName="Boat.AutoShutterMoveFailedForInterlock" description="Auto shutter move failed for interlock " category="EquipmentStatusWarning" enabled="false" eventSet="1870010003" eventClear="2870010003" />
- <ALID id="870010004" logicalName="Boat.AutoShutterOpenTimeOut" description="Auto shutter open timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010004" eventClear="2870010004" />
- <ALID id="870010005" logicalName="Boat.AutoShutterUpTimeOut" description="Auto shutter up timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010005" eventClear="2870010005" />
- <ALID id="870010006" logicalName="Boat.BoatHumanInterlock" description="Boat boat human interlock " category="EquipmentStatusWarning" enabled="false" eventSet="1870010006" eventClear="2870010006" />
- <ALID id="870010007" logicalName="Boat.BoatRAxisHomeFailed" description="Boat boat R Axis home failed " category="EquipmentStatusWarning" enabled="false" eventSet="1870010007" eventClear="2870010007" />
- <ALID id="870010008" logicalName="Boat.BoatRAxisHomeTimeout" description="Boat boat R Axis home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010008" eventClear="2870010008" />
- <ALID id="870010009" logicalName="Boat.BoatRAxisMoveFailedForInterlock" description="Boat boat r axis move failed for interlock " category="EquipmentStatusWarning" enabled="false" eventSet="1870010009" eventClear="2870010009" />
- <ALID id="870010010" logicalName="Boat.BoatRAxisMoveTimeOut" description="Boat boat r axis move timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010010" eventClear="2870010010" />
- <ALID id="870010011" logicalName="Boat.BoatStepperMotorAlarm" description="Boat Boat Stepper Motor Alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1870010011" eventClear="2870010011" />
- <ALID id="870010012" logicalName="Boat.BoatZAxisDownLimit" description="Boat boat z axis down limit " category="EquipmentStatusWarning" enabled="false" eventSet="1870010012" eventClear="2870010012" />
- <ALID id="870010013" logicalName="Boat.BoatZAxisHomeFailed" description="Boat boat Z Axis home failed " category="EquipmentStatusWarning" enabled="false" eventSet="1870010013" eventClear="2870010013" />
- <ALID id="870010014" logicalName="Boat.BoatZAxisHomeTimeout" description="Boat boat Z Axis home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010014" eventClear="2870010014" />
- <ALID id="870010015" logicalName="Boat.BoatZAxisMoveFailedForAutoShutterNotDown" description="Boat boat z axis move failed for auto shutter not down " category="EquipmentStatusWarning" enabled="false" eventSet="1870010015" eventClear="2870010015" />
- <ALID id="870010016" logicalName="Boat.BoatZAxisMoveFailedForAutoShutterNotOpen" description="Boat boat z axis move failed for auto shutter not open " category="EquipmentStatusWarning" enabled="false" eventSet="1870010016" eventClear="2870010016" />
- <ALID id="870010017" logicalName="Boat.BoatZAxisMoveFailedForHumanInterlock" description="Boat boat z axis move failed for human interlock " category="EquipmentStatusWarning" enabled="false" eventSet="1870010017" eventClear="2870010017" />
- <ALID id="870010018" logicalName="Boat.BoatZAxisMoveFailedForInterlock" description="Boat boat z axis move failed for interlock " category="EquipmentStatusWarning" enabled="false" eventSet="1870010018" eventClear="2870010018" />
- <ALID id="870010019" logicalName="Boat.BoatZAxisMoveFailedForTiltStatus" description="Boat boat z axis move failed for tilt status " category="EquipmentStatusWarning" enabled="false" eventSet="1870010019" eventClear="2870010019" />
- <ALID id="870010020" logicalName="Boat.BoatZAxisMoveFailedForWaferRobotArmExtend" description="Boat boat z axis move failed for wafer robot arm extend " category="EquipmentStatusWarning" enabled="false" eventSet="1870010020" eventClear="2870010020" />
- <ALID id="870010021" logicalName="Boat.BoatZAxisMoveTimeOut" description="Boat boat z axis move timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1870010021" eventClear="2870010021" />
- <ALID id="870010022" logicalName="Boat.BoatZAxisUpLimit" description="Boat boat z axis up limit " category="EquipmentStatusWarning" enabled="false" eventSet="1870010022" eventClear="2870010022" />
- <ALID id="940010001" logicalName="CarrierRobot.AlarmSignaFOUPRobotTPStatusWarning" description="FOUP Robot TP Status Warning Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1940010001" eventClear="2940010001" />
- <ALID id="940010002" logicalName="CarrierRobot.BladeCassetteNotPresentWarning" description="Blade cassette not present " category="EquipmentStatusWarning" enabled="false" eventSet="1940010002" eventClear="2940010002" />
- <ALID id="940010003" logicalName="CarrierRobot.BladeCassettePresentWarning" description="Blade cassette present " category="EquipmentStatusWarning" enabled="false" eventSet="1940010003" eventClear="2940010003" />
- <ALID id="940010004" logicalName="CarrierRobot.CheckCarrierIDFailAlarm" description="Check carrier id fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010004" eventClear="2940010004" />
- <ALID id="940010005" logicalName="CarrierRobot.CheckCassetteInformationFailAlarm" description="Check cassette information fail " category="EquipmentStatusWarning" enabled="false" eventSet="1940010005" eventClear="2940010005" />
- <ALID id="940010006" logicalName="CarrierRobot.CheckLoadFailAlarm" description="Check load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010006" eventClear="2940010006" />
- <ALID id="940010007" logicalName="CarrierRobot.CheckLoadTimeoutAlarm" description="Check load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010007" eventClear="2940010007" />
- <ALID id="940010008" logicalName="CarrierRobot.GotoFailAlarm" description="CarrierRobot goto fail " category="EquipmentStatusWarning" enabled="false" eventSet="1940010008" eventClear="2940010008" />
- <ALID id="940010009" logicalName="CarrierRobot.GotoPauseWarning" description="CarrierRobot goto pause " category="EquipmentStatusWarning" enabled="false" eventSet="1940010009" eventClear="2940010009" />
- <ALID id="940010010" logicalName="CarrierRobot.GotoResumeWarning" description="CarrierRobot goto resume " category="EquipmentStatusWarning" enabled="false" eventSet="1940010010" eventClear="2940010010" />
- <ALID id="940010011" logicalName="CarrierRobot.GotoTimeoutAlarm" description="CarrierRobot goto timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010011" eventClear="2940010011" />
- <ALID id="940010012" logicalName="CarrierRobot.LoadCassetteFailAlarm" description="Load cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010012" eventClear="2940010012" />
- <ALID id="940010013" logicalName="CarrierRobot.LoadCassetteMappingFailAlarm" description="Load cassette mapping fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010013" eventClear="2940010013" />
- <ALID id="940010014" logicalName="CarrierRobot.LoadCassettePauseWarning" description="Load cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="1940010014" eventClear="2940010014" />
- <ALID id="940010015" logicalName="CarrierRobot.LoadCassetteResumeWarning" description="Load cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="1940010015" eventClear="2940010015" />
- <ALID id="940010016" logicalName="CarrierRobot.LoadCassetteTimeoutAlarm" description="Load cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010016" eventClear="2940010016" />
- <ALID id="940010017" logicalName="CarrierRobot.PickCassetteFailAlarm" description="Pick cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010017" eventClear="2940010017" />
- <ALID id="940010018" logicalName="CarrierRobot.PickCassettePauseWarning" description="Pick cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="1940010018" eventClear="2940010018" />
- <ALID id="940010019" logicalName="CarrierRobot.PickCassetteResumeWarning" description="Pick cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="1940010019" eventClear="2940010019" />
- <ALID id="940010020" logicalName="CarrierRobot.PickCassetteTimeoutAlarm" description="Pick cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010020" eventClear="2940010020" />
- <ALID id="940010021" logicalName="CarrierRobot.PlaceCassetteFailAlarm" description="Place cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010021" eventClear="2940010021" />
- <ALID id="940010022" logicalName="CarrierRobot.PlaceCassettePauseWarning" description="Place cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="1940010022" eventClear="2940010022" />
- <ALID id="940010023" logicalName="CarrierRobot.PlaceCassetteResumeWarning" description="Place cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="1940010023" eventClear="2940010023" />
- <ALID id="940010024" logicalName="CarrierRobot.PlaceCassetteTimeoutAlarm" description="Place cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010024" eventClear="2940010024" />
- <ALID id="940010025" logicalName="CarrierRobot.RequestCassettePresentFailAlarm" description="Request cassette present fail " category="EquipmentStatusWarning" enabled="false" eventSet="1940010025" eventClear="2940010025" />
- <ALID id="940010026" logicalName="CarrierRobot.RequestCassettePresentTimeoutAlarm" description="Request cassette present timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010026" eventClear="2940010026" />
- <ALID id="940010027" logicalName="CarrierRobot.RobotDIAlarm" description="Robot DI Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1940010027" eventClear="2940010027" />
- <ALID id="940010028" logicalName="CarrierRobot.RobotHasError" description="Robot has error " category="EquipmentStatusWarning" enabled="false" eventSet="1940010028" eventClear="2940010028" />
- <ALID id="940010029" logicalName="CarrierRobot.RobotHomeFailAlarm" description="Robot home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010029" eventClear="2940010029" />
- <ALID id="940010030" logicalName="CarrierRobot.RobotHomeTimeoutAlarm" description="Robot home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010030" eventClear="2940010030" />
- <ALID id="940010031" logicalName="CarrierRobot.RobotSensorFoundCassetteOnBladeAfterPlaceAlarm" description="Robot sensor found cassette on blade after place " category="EquipmentStatusWarning" enabled="false" eventSet="1940010031" eventClear="2940010031" />
- <ALID id="940010032" logicalName="CarrierRobot.RobotSensorNotFoundCassetteOnBladeAfterPickAlarm" description="Robot sensor not found cassette on blade after pick " category="EquipmentStatusWarning" enabled="false" eventSet="1940010032" eventClear="2940010032" />
- <ALID id="940010033" logicalName="CarrierRobot.SetServoOnFailAlarm" description="Set servo on fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010033" eventClear="2940010033" />
- <ALID id="940010034" logicalName="CarrierRobot.SetServoOnTimeoutAlarm" description="Set servo on timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010034" eventClear="2940010034" />
- <ALID id="940010035" logicalName="CarrierRobot.SetSpeedFailAlarm" description="Set speed fail " category="EquipmentStatusWarning" enabled="false" eventSet="1940010035" eventClear="2940010035" />
- <ALID id="940010036" logicalName="CarrierRobot.SetSpeedTimeoutAlarm" description="Set speed timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010036" eventClear="2940010036" />
- <ALID id="940010037" logicalName="CarrierRobot.SetStageValveFailAlarm" description="Set stage valve fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010037" eventClear="2940010037" />
- <ALID id="940010038" logicalName="CarrierRobot.SetStageValveTimeout" description="Set stage valve timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010038" eventClear="2940010038" />
- <ALID id="940010039" logicalName="CarrierRobot.ShutterCloseTimeoutAlarm" description="Shutter Close Timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010039" eventClear="2940010039" />
- <ALID id="940010040" logicalName="CarrierRobot.ShutterOpenTimeoutAlarm" description="Shutter Open Timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010040" eventClear="2940010040" />
- <ALID id="940010041" logicalName="CarrierRobot.TargetCassetteNotPresentWarning" description="Target cassette not present " category="EquipmentStatusWarning" enabled="false" eventSet="1940010041" eventClear="2940010041" />
- <ALID id="940010042" logicalName="CarrierRobot.TargetCassettePresentWarning" description="Target cassette present " category="EquipmentStatusWarning" enabled="false" eventSet="1940010042" eventClear="2940010042" />
- <ALID id="940010043" logicalName="CarrierRobot.UnloadCassetteFailAlarm" description="Unload cassette fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010043" eventClear="2940010043" />
- <ALID id="940010044" logicalName="CarrierRobot.UnloadCassetteTimeoutAlarm" description="Unload cassette timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010044" eventClear="2940010044" />
- <ALID id="940010045" logicalName="CarrierRobot.UnoadCassettePauseWarning" description="Unload cassette pause " category="EquipmentStatusWarning" enabled="false" eventSet="1940010045" eventClear="2940010045" />
- <ALID id="940010046" logicalName="CarrierRobot.UnoadCassetteResumeWarning" description="Unload cassette resume " category="EquipmentStatusWarning" enabled="false" eventSet="1940010046" eventClear="2940010046" />
- <ALID id="940010047" logicalName="CarrierRobot.WaferMapFailAlarm" description="Wafer map fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1940010047" eventClear="2940010047" />
- <ALID id="940010048" logicalName="CarrierRobot.WaferMapTimeout" description="Wafer map timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010048" eventClear="2940010048" />
- <ALID id="940010049" logicalName="CarrierRobot.WaitInCommandTimeout" description="Wait In Command timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010049" eventClear="2940010049" />
- <ALID id="940010050" logicalName="CarrierRobot.WaitOutCommandTimeout" description="Wait Out Command timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010050" eventClear="2940010050" />
- <ALID id="940010051" logicalName="CarrierRobot.WaitPodPrensentChangeTimeout" description="Wait pod prensent change timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1940010051" eventClear="2940010051" />
- <ALID id="950010001" logicalName="FIMS1.HomeFailAlarm" description="FIMS1 home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1950010001" eventClear="2950010001" />
- <ALID id="950010002" logicalName="FIMS1.HomeTimeoutAlarm" description="FIMS1 home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1950010002" eventClear="2950010002" />
- <ALID id="950010003" logicalName="FIMS1.LoadFailAlarm" description="FIMS1 load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1950010003" eventClear="2950010003" />
- <ALID id="950010004" logicalName="FIMS1.LoadTimeoutAlarm" description="FIMS1 load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1950010004" eventClear="2950010004" />
- <ALID id="950010005" logicalName="FIMS1.UnloadFailAlarm" description="FIMS1 unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1950010005" eventClear="2950010005" />
- <ALID id="950010006" logicalName="FIMS1.UnloadTimeoutAlarm" description="FIMS1 unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1950010006" eventClear="2950010006" />
- <ALID id="960010001" logicalName="FIMS2.HomeFailAlarm" description="FIMS2 home fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1960010001" eventClear="2960010001" />
- <ALID id="960010002" logicalName="FIMS2.HomeTimeoutAlarm" description="FIMS2 home timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1960010002" eventClear="2960010002" />
- <ALID id="960010003" logicalName="FIMS2.LoadFailAlarm" description="FIMS2 load fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1960010003" eventClear="2960010003" />
- <ALID id="960010004" logicalName="FIMS2.LoadTimeoutAlarm" description="FIMS2 load timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1960010004" eventClear="2960010004" />
- <ALID id="960010005" logicalName="FIMS2.UnloadFailAlarm" description="FIMS2 unload fail reason " category="EquipmentStatusWarning" enabled="false" eventSet="1960010005" eventClear="2960010005" />
- <ALID id="960010006" logicalName="FIMS2.UnloadTimeoutAlarm" description="FIMS2 unload timeout " category="EquipmentStatusWarning" enabled="false" eventSet="1960010006" eventClear="2960010006" />
- <ALID id="970010001" logicalName="CHM.ConcentrationO2ToleranceAlarm" description="ConcentrationO2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010001" eventClear="2970010001" />
- <ALID id="970010002" logicalName="CHM.ConcentrationO2ToleranceWarning" description="ConcentrationO2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010002" eventClear="2970010002" />
- <ALID id="970010003" logicalName="CHM.ExhaustBoxExhaustMS4ToleranceAlarm" description="ExhaustBoxExhaustMS4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010003" eventClear="2970010003" />
- <ALID id="970010004" logicalName="CHM.ExhaustBoxExhaustMS4ToleranceWarning" description="ExhaustBoxExhaustMS4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010004" eventClear="2970010004" />
- <ALID id="970010005" logicalName="CHM.FrontBodyExhaustMS6ToleranceAlarm" description="FrontBodyExhaustMS6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010005" eventClear="2970010005" />
- <ALID id="970010006" logicalName="CHM.FrontBodyExhaustMS6ToleranceWarning" description="FrontBodyExhaustMS6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010006" eventClear="2970010006" />
- <ALID id="970010007" logicalName="CHM.GasBoxExhaustMS2ToleranceAlarm" description="GasBoxExhaustMS2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010007" eventClear="2970010007" />
- <ALID id="970010008" logicalName="CHM.GasBoxExhaustMS2ToleranceWarning" description="GasBoxExhaustMS2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010008" eventClear="2970010008" />
- <ALID id="970010009" logicalName="CHM.HeatingExhaustMS1ToleranceAlarm" description="HeatingExhaustMS1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010009" eventClear="2970010009" />
- <ALID id="970010010" logicalName="CHM.HeatingExhaustMS1ToleranceWarning" description="HeatingExhaustMS1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010010" eventClear="2970010010" />
- <ALID id="970010011" logicalName="CHM.LAExhaustMS7ToleranceAlarm" description="LAExhaustMS7 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010011" eventClear="2970010011" />
- <ALID id="970010012" logicalName="CHM.LAExhaustMS7ToleranceWarning" description="LAExhaustMS7 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010012" eventClear="2970010012" />
- <ALID id="970010013" logicalName="CHM.LoadingAreaExhaustMS5ToleranceAlarm" description="LoadingAreaExhaustMS5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010013" eventClear="2970010013" />
- <ALID id="970010014" logicalName="CHM.LoadingAreaExhaustMS5ToleranceWarning" description="LoadingAreaExhaustMS5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010014" eventClear="2970010014" />
- <ALID id="970010015" logicalName="CHM.N24PurgePressureToleranceAlarm" description="N24PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010015" eventClear="2970010015" />
- <ALID id="970010016" logicalName="CHM.N24PurgePressureToleranceWarning" description="N24PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010016" eventClear="2970010016" />
- <ALID id="970010017" logicalName="CHM.N25PurgePressureToleranceAlarm" description="N25PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010017" eventClear="2970010017" />
- <ALID id="970010018" logicalName="CHM.N25PurgePressureToleranceWarning" description="N25PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010018" eventClear="2970010018" />
- <ALID id="970010019" logicalName="CHM.N26PurgePressureToleranceAlarm" description="N26PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010019" eventClear="2970010019" />
- <ALID id="970010020" logicalName="CHM.N26PurgePressureToleranceWarning" description="N26PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010020" eventClear="2970010020" />
- <ALID id="970010021" logicalName="CHM.N27PurgePressureToleranceAlarm" description="N27PurgePressure tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010021" eventClear="2970010021" />
- <ALID id="970010022" logicalName="CHM.N27PurgePressureToleranceWarning" description="N27PurgePressure tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010022" eventClear="2970010022" />
- <ALID id="970010023" logicalName="CHM.O2Detector1ToleranceAlarm" description="O2Detector1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010023" eventClear="2970010023" />
- <ALID id="970010024" logicalName="CHM.O2Detector1ToleranceWarning" description="O2Detector1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010024" eventClear="2970010024" />
- <ALID id="970010025" logicalName="CHM.O2Detector2ToleranceAlarm" description="O2Detector2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010025" eventClear="2970010025" />
- <ALID id="970010026" logicalName="CHM.O2Detector2ToleranceWarning" description="O2Detector2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010026" eventClear="2970010026" />
- <ALID id="970010027" logicalName="CHM.PG12ToleranceAlarm" description="PG12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010027" eventClear="2970010027" />
- <ALID id="970010028" logicalName="CHM.PG12ToleranceWarning" description="PG12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010028" eventClear="2970010028" />
- <ALID id="970010029" logicalName="CHM.PG13ToleranceAlarm" description="PG13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010029" eventClear="2970010029" />
- <ALID id="970010030" logicalName="CHM.PG13ToleranceWarning" description="PG13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010030" eventClear="2970010030" />
- <ALID id="970010031" logicalName="CHM.PG14ToleranceAlarm" description="PG14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010031" eventClear="2970010031" />
- <ALID id="970010032" logicalName="CHM.PG14ToleranceWarning" description="PG14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010032" eventClear="2970010032" />
- <ALID id="970010033" logicalName="CHM.PressureGasBoxUpperVG21ToleranceAlarm" description="PressureGasBoxUpperVG21 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010033" eventClear="2970010033" />
- <ALID id="970010034" logicalName="CHM.PressureGasBoxUpperVG21ToleranceWarning" description="PressureGasBoxUpperVG21 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010034" eventClear="2970010034" />
- <ALID id="970010035" logicalName="CHM.PressureGasBoxUpperVG22ToleranceAlarm" description="PressureGasBoxUpperVG22 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010035" eventClear="2970010035" />
- <ALID id="970010036" logicalName="CHM.PressureGasBoxUpperVG22ToleranceWarning" description="PressureGasBoxUpperVG22 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010036" eventClear="2970010036" />
- <ALID id="970010037" logicalName="CHM.PressureGLBoxPG1ToleranceAlarm" description="PressureGLBoxPG1 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010037" eventClear="2970010037" />
- <ALID id="970010038" logicalName="CHM.PressureGLBoxPG1ToleranceWarning" description="PressureGLBoxPG1 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010038" eventClear="2970010038" />
- <ALID id="970010039" logicalName="CHM.PressureGLBoxPG2ToleranceAlarm" description="PressureGLBoxPG2 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010039" eventClear="2970010039" />
- <ALID id="970010040" logicalName="CHM.PressureGLBoxPG2ToleranceWarning" description="PressureGLBoxPG2 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010040" eventClear="2970010040" />
- <ALID id="970010041" logicalName="CHM.PressureGLBoxPG3ToleranceAlarm" description="PressureGLBoxPG3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010041" eventClear="2970010041" />
- <ALID id="970010042" logicalName="CHM.PressureGLBoxPG3ToleranceWarning" description="PressureGLBoxPG3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010042" eventClear="2970010042" />
- <ALID id="970010043" logicalName="CHM.PressureGLBoxPG4ToleranceAlarm" description="PressureGLBoxPG4 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010043" eventClear="2970010043" />
- <ALID id="970010044" logicalName="CHM.PressureGLBoxPG4ToleranceWarning" description="PressureGLBoxPG4 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010044" eventClear="2970010044" />
- <ALID id="970010045" logicalName="CHM.PressureGLBoxPG5ToleranceAlarm" description="PressureGLBoxPG5 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010045" eventClear="2970010045" />
- <ALID id="970010046" logicalName="CHM.PressureGLBoxPG5ToleranceWarning" description="PressureGLBoxPG5 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010046" eventClear="2970010046" />
- <ALID id="970010047" logicalName="CHM.PressureGLBoxPG6ToleranceAlarm" description="PressureGLBoxPG6 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010047" eventClear="2970010047" />
- <ALID id="970010048" logicalName="CHM.PressureGLBoxPG6ToleranceWarning" description="PressureGLBoxPG6 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010048" eventClear="2970010048" />
- <ALID id="970010049" logicalName="CHM.PS11ToleranceAlarm" description="PS11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010049" eventClear="2970010049" />
- <ALID id="970010050" logicalName="CHM.PS11ToleranceWarning" description="PS11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010050" eventClear="2970010050" />
- <ALID id="970010051" logicalName="CHM.PS13ToleranceAlarm" description="PS13 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010051" eventClear="2970010051" />
- <ALID id="970010052" logicalName="CHM.PS13ToleranceWarning" description="PS13 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010052" eventClear="2970010052" />
- <ALID id="970010053" logicalName="CHM.PS17ToleranceAlarm" description="PS17 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010053" eventClear="2970010053" />
- <ALID id="970010054" logicalName="CHM.PS17ToleranceWarning" description="PS17 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010054" eventClear="2970010054" />
- <ALID id="970010055" logicalName="CHM.PT71ToleranceAlarm" description="PT71 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010055" eventClear="2970010055" />
- <ALID id="970010056" logicalName="CHM.PT71ToleranceWarning" description="PT71 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010056" eventClear="2970010056" />
- <ALID id="970010057" logicalName="CHM.PT80ToleranceAlarm" description="PT80 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010057" eventClear="2970010057" />
- <ALID id="970010058" logicalName="CHM.PT80ToleranceWarning" description="PT80 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010058" eventClear="2970010058" />
- <ALID id="970010059" logicalName="CHM.RHCExhaustMS8ToleranceAlarm" description="RHCExhaustMS8 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010059" eventClear="2970010059" />
- <ALID id="970010060" logicalName="CHM.RHCExhaustMS8ToleranceWarning" description="RHCExhaustMS8 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010060" eventClear="2970010060" />
- <ALID id="970010061" logicalName="CHM.ScavengerExhaustMS3ToleranceAlarm" description="ScavengerExhaustMS3 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010061" eventClear="2970010061" />
- <ALID id="970010062" logicalName="CHM.ScavengerExhaustMS3ToleranceWarning" description="ScavengerExhaustMS3 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010062" eventClear="2970010062" />
- <ALID id="970010063" logicalName="CHM.VG11ToleranceAlarm" description="VG11 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010063" eventClear="2970010063" />
- <ALID id="970010064" logicalName="CHM.VG11ToleranceWarning" description="VG11 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010064" eventClear="2970010064" />
- <ALID id="970010065" logicalName="CHM.VG12ToleranceAlarm" description="VG12 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010065" eventClear="2970010065" />
- <ALID id="970010066" logicalName="CHM.VG12ToleranceWarning" description="VG12 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010066" eventClear="2970010066" />
- <ALID id="970010067" logicalName="CHM.VG14ToleranceAlarm" description="VG14 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010067" eventClear="2970010067" />
- <ALID id="970010068" logicalName="CHM.VG14ToleranceWarning" description="VG14 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010068" eventClear="2970010068" />
- <ALID id="970010069" logicalName="CHM.WaterFlowFL901ToleranceAlarm" description="WaterFlowFL901 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010069" eventClear="2970010069" />
- <ALID id="970010070" logicalName="CHM.WaterFlowFL901ToleranceWarning" description="WaterFlowFL901 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010070" eventClear="2970010070" />
- <ALID id="970010071" logicalName="CHM.WaterFlowFL902ToleranceAlarm" description="WaterFlowFL902 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010071" eventClear="2970010071" />
- <ALID id="970010072" logicalName="CHM.WaterFlowFL902ToleranceWarning" description="WaterFlowFL902 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010072" eventClear="2970010072" />
- <ALID id="970010073" logicalName="CHM.WaterFlowFL903ToleranceAlarm" description="WaterFlowFL903 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010073" eventClear="2970010073" />
- <ALID id="970010074" logicalName="CHM.WaterFlowFL903ToleranceWarning" description="WaterFlowFL903 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010074" eventClear="2970010074" />
- <ALID id="970010075" logicalName="CHM.WaterFlowFL904ToleranceAlarm" description="WaterFlowFL904 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010075" eventClear="2970010075" />
- <ALID id="970010076" logicalName="CHM.WaterFlowFL904ToleranceWarning" description="WaterFlowFL904 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010076" eventClear="2970010076" />
- <ALID id="970010077" logicalName="CHM.WaterFlowFL905ToleranceAlarm" description="WaterFlowFL905 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010077" eventClear="2970010077" />
- <ALID id="970010078" logicalName="CHM.WaterFlowFL905ToleranceWarning" description="WaterFlowFL905 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010078" eventClear="2970010078" />
- <ALID id="970010079" logicalName="CHM.WaterFlowFL906ToleranceAlarm" description="WaterFlowFL906 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010079" eventClear="2970010079" />
- <ALID id="970010080" logicalName="CHM.WaterFlowFL906ToleranceWarning" description="WaterFlowFL906 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010080" eventClear="2970010080" />
- <ALID id="970010081" logicalName="CHM.WaterFlowFS102ToleranceAlarm" description="WaterFlowFS102 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010081" eventClear="2970010081" />
- <ALID id="970010082" logicalName="CHM.WaterFlowFS102ToleranceWarning" description="WaterFlowFS102 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010082" eventClear="2970010082" />
- <ALID id="970010083" logicalName="CHM.WaterFlowFS104ToleranceAlarm" description="WaterFlowFS104 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010083" eventClear="2970010083" />
- <ALID id="970010084" logicalName="CHM.WaterFlowFS104ToleranceWarning" description="WaterFlowFS104 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010084" eventClear="2970010084" />
- <ALID id="970010085" logicalName="CHM.WaterFlowFS105ToleranceAlarm" description="WaterFlowFS105 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010085" eventClear="2970010085" />
- <ALID id="970010086" logicalName="CHM.WaterFlowFS105ToleranceWarning" description="WaterFlowFS105 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010086" eventClear="2970010086" />
- <ALID id="970010087" logicalName="CHM.WaterFlowFS106ToleranceAlarm" description="WaterFlowFS106 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010087" eventClear="2970010087" />
- <ALID id="970010088" logicalName="CHM.WaterFlowFS106ToleranceWarning" description="WaterFlowFS106 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010088" eventClear="2970010088" />
- <ALID id="970010089" logicalName="CHM.WaterFlowFS111ToleranceAlarm" description="WaterFlowFS111 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010089" eventClear="2970010089" />
- <ALID id="970010090" logicalName="CHM.WaterFlowFS111ToleranceWarning" description="WaterFlowFS111 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010090" eventClear="2970010090" />
- <ALID id="970010091" logicalName="CHM.WaterFlowFS116ToleranceAlarm" description="WaterFlowFS116 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1970010091" eventClear="2970010091" />
- <ALID id="970010092" logicalName="CHM.WaterFlowFS116ToleranceWarning" description="WaterFlowFS116 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1970010092" eventClear="2970010092" />
- </Alarms>
- </Equipment>
|
